Multifunctional anti-cross-contamination device for grinding fluid and polishing equipment

Abstract

The present invention provides a multifunctional anti-cross-contamination device for grinding liquid and a polishing device, belonging to the field of polishing, wherein the multifunctional anti-cross-contamination device for grinding liquid comprises a flexible foldable hydrophobic film and a spray mechanism, the flexible foldable hydrophobic film can form a shielding of any two adjacent grinding discs, the flexible foldable hydrophobic film is parallel to the up-down direction and the first horizontal direction after unfolding, and the flexible foldable hydrophobic film can be retracted and unfolded in the up-down direction; the spray mechanism comprises a nozzle body extending in the first horizontal direction, the nozzle body is connected to the top of the flexible foldable hydrophobic film, and the nozzle body can move up and down; the top of the nozzle body is provided with a first nozzle connected to the first blind pipe, and a second nozzle connected to the second blind pipe, and each second nozzle faces the surface of the flexible foldable hydrophobic film. Compared with the prior art, the present invention solves the technical problem that the existing grinding liquid is easy to sputter each other between different grinding stations and cause cross contamination by improving the existing retaining ring.

Description

Technical Field

[0001] The present invention belongs to the field of polishing, and more specifically, relates to a multifunctional device for preventing cross contamination of abrasive liquid. The present invention also relates to a polishing device, which is equipped with the multifunctional device for preventing cross contamination of abrasive liquid. Background Art

[0002] In integrated circuit manufacturing, chemical mechanical polishing is the most effective processing method for global flattening of substrates. This processing method uses chemical reactions to corrode the substrate surface, and uses the friction between the polishing pad and the substrate to remove the corroded and softened materials to achieve the purpose of flattening.

[0003] In order to better control the grinding of the substrate, it is generally necessary to use multiple (2 or more) steps to grind the substrate, that is, multiple (2 or more) grinding discs will be used, and each grinding disc uses a different grinding liquid to grind the substrate. When the grinding disc rotates at high speed, the grinding liquid will be thrown out and easily splash onto other grinding discs.

[0004] In order to prevent the splashing of the grinding liquid between the grinding discs during the grinding process, it is currently generally adopted to add a retaining ring on the periphery of the grinding disc to stop the flying grinding liquid. In order to effectively intercept the flying chemical liquid, the retaining ring needs to be a certain distance higher than the grinding disc to produce an effect. Since the polishing head needs to switch between different stations, the size of the rigid retaining ring is limited, and it is impossible to completely eliminate cross-contamination between different polishing discs; due to the size and material limitations of the retaining ring, the polishing liquid that is thrown away during the grinding process will be blocked by the retaining ring and splash back to the grinding disc again, causing different degrees of influence on the polishing process. The grinding liquid remaining on the retaining ring will also have the risk of crystallization. The crystals falling on the polishing disc will scratch the ground wafer or even scrap it. Therefore, it is urgent to improve the structure of the existing retaining ring. Summary of the invention

[0005] The object of the present invention is to provide a multifunctional device for preventing grinding liquid from cross-contamination, so as to solve the technical problem that the existing grinding liquid is easy to splash each other between different grinding stations and cause cross-contamination.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is to provide a multifunctional device for preventing grinding liquid from splashing and preventing grinding liquid from cross-contamination, comprising:

[0007] A flexible foldable hydrophobic film, wherein the flexible foldable hydrophobic film is used to shield any two adjacent grinding discs, and the surface of the flexible foldable hydrophobic film after unfolding is parallel to the up-down direction and the first horizontal direction, and the flexible foldable hydrophobic film can be collapsed and unfolded along the up-down direction;

[0008] A spray mechanism, comprising a spray pipe body extending along a first horizontal direction, the spray pipe body being connected to the top of the flexible foldable hydrophobic membrane, and the spray pipe body being movable in an up-and-down direction;

[0009] The nozzle body is provided with a first blind pipe and a second blind pipe which are sequentially spaced and arranged side by side in the up-down direction; the top of the nozzle body is provided with a plurality of first nozzles which are connected to the first blind pipe, and the first nozzles are spaced and arranged along the first horizontal direction, and the nozzle of each first nozzle is directed horizontally and / or obliquely upward; the bottom of the nozzle body is provided with a plurality of second nozzles which are connected to the second blind pipe, and the second nozzles are directed toward the surface of the flexible foldable hydrophobic membrane.

[0010] In a possible implementation, the spray mechanism also includes a first liquid supply pipe and a second liquid supply pipe, the first liquid supply pipe is connected to the liquid inlet of the first blind pipe, and the second liquid supply pipe is connected to the liquid inlet of the second blind pipe, and along the first horizontal direction, the first liquid supply pipe and the second liquid supply pipe are respectively located on both sides of the nozzle body.

[0011] In a possible implementation, the first liquid supply tube and the second liquid supply tube are both made of hard plastic and are both configured as spiral tubes with spiral axes parallel to the up and down directions. The first liquid supply tube and the second liquid supply tube can elastically expand and contract in the up and down directions.

[0012] In a possible implementation, the spray mechanism also includes a telescopic cylinder that drives the nozzle body to move up and down, and along the first horizontal direction, the cylinder body of the telescopic cylinder is arranged on one side of the nozzle body, and the telescopic rod of the telescopic cylinder is connected to the end of the nozzle body.

[0013] In a possible implementation, the number of the driving cylinder telescopic cylinders is two, and the two driving cylinder telescopic cylinders are respectively located on both sides of the flexible foldable hydrophobic membrane along the first horizontal direction, and any one of the two driving cylinder telescopic cylinders is located between the first liquid supply pipe and the flexible foldable hydrophobic membrane, and the other driving cylinder telescopic cylinder is located between the second liquid supply pipe and the flexible foldable hydrophobic membrane, and height sensors are respectively provided on the cylinder bodies of the two telescopic cylinders, and the height sensors are used to sense the expansion degree of the flexible foldable hydrophobic membrane and the position of the nozzle body.

[0014] In a possible implementation, the spray mechanism also includes a connecting plate, the length direction of the connecting plate extends along the first horizontal direction, the two ends of the connecting plate are respectively connected to the two telescopic rods, the upper plate surface of the connecting plate is connected to the nozzle body, and the lower plate surface of the connecting plate is connected to the top of the flexible foldable hydrophobic membrane.

[0015] In a possible implementation, the spray mechanism also includes two mounting seats, which are arranged on both sides of the flexible foldable hydrophobic membrane along a first horizontal direction, and the two mounting seats are used to fix the first liquid supply pipe and the second liquid supply pipe respectively, and the mounting seat includes a base plate and a fixing rod, the base plate is fixed to the bottom of the fixing rod, the first liquid supply pipe and the second liquid supply pipe can be respectively sleeved on the outer periphery of the two fixing rods, and the fixing rod can guide the extension and retraction of the first liquid supply pipe and the second liquid supply pipe.

[0016] In a possible implementation, the flexible foldable hydrophobic membrane is configured to have a pre-tightening force that contracts in an up-and-down direction.

[0017] In a possible implementation, a reinforcing plate extending along a first horizontal direction is connected to the bottom of the flexible foldable hydrophobic membrane, and two ends of the reinforcing plate are respectively connected to the bottoms of the two cylinders.

[0018] Compared with the prior art, the multifunctional grinding liquid cross-contamination prevention device provided by the present invention has the following beneficial effects:

[0019] First, the flexible foldable hydrophobic membrane arranged between two adjacent grinding stations can prevent the splashing of grinding liquid between different grinding discs during the grinding process, thereby solving the technical problem of cross-contamination of different grinding discs caused by splashing of grinding liquid in existing grinding equipment. In addition, the first nozzle arranged on the top of the flexible foldable hydrophobic membrane can be raised and lowered with the expansion and contraction of the flexible foldable hydrophobic membrane. When the grinding head switches between different grinding discs, the flexible foldable hydrophobic membrane is in a folded state and the nozzle body is in a low position to facilitate the movement of the grinding head between different grinding discs; when the grinding head is grinding on the grinding disc, the flexible foldable hydrophobic membrane is opened and the nozzle body is in a high position. The first nozzles on the top of the nozzle can moisturize the various components of the grinding station (such as a rotating support and an outer shield, etc.); the second nozzles at the bottom of the nozzle body can clean the flexible foldable hydrophobic membrane to remove the grinding liquid splashed on the flexible foldable hydrophobic membrane.

[0020] Another object of the present invention is to provide a polishing device, comprising the multifunctional device for preventing cross-contamination of polishing liquid as described above.

[0021] Compared with the prior art, the polishing equipment in the present invention has all the benefits of the above-mentioned multifunctional anti-cross-contamination device for polishing liquid, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the prior art description. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0023] Figure 1 A schematic diagram of the positional relationship between the multifunctional grinding liquid cross-contamination prevention device provided by the present invention and the grinding head and grinding disc;

[0024] Figure 2 It is a schematic diagram of the multifunctional anti-abrasive liquid cross-contamination device of the present invention in a state where the flexible foldable hydrophobic membrane is unfolded;

[0025] Figure 3 It is a schematic diagram of the multifunctional anti-abrasive liquid cross-contamination device in the present invention when the flexible foldable hydrophobic membrane is in a folded state.

[0026] In the figure:

[0027] 1. Flexible and foldable hydrophobic membrane;

[0028] 2. Spraying mechanism; 21. Spray pipe body; 211. First spray head; 212. Second spray head; 22. First liquid supply pipe; 23. Second liquid supply pipe; 24. Telescopic cylinder; 25. Connecting plate;

[0029] 3. Grinding head;

[0030] 4. Grinding disc. DETAILED DESCRIPTION

[0031] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0032] In the description of the present invention, it should be noted that if terms such as "upper", "lower", "inside" and "back" appear to indicate orientation or positional relationship, they are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0033] In addition, in the description of the present invention, unless otherwise clearly defined, the terms "installed", "connected", "connection", and "connector" should be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediate medium, or a connection between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in combination with specific circumstances.

[0034] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0035] Please also read Figures 1 to 3 Now, the multifunctional grinding liquid cross-contamination prevention device provided by the present invention is described. The multifunctional device for preventing cross-contamination of grinding liquid comprises a flexible foldable hydrophobic membrane 1 and a spray mechanism 2, wherein the flexible foldable hydrophobic membrane 1 is used to form a shield for any two adjacent grinding discs 4, the surface of the flexible foldable hydrophobic membrane 1 after unfolding is parallel to the up-down direction and the first horizontal direction, and the flexible foldable hydrophobic membrane 1 can be retracted and unfolded in the up-down direction; the spray mechanism 2 comprises a nozzle body 21 extending in the first horizontal direction, the nozzle body 21 is connected to the top of the flexible foldable hydrophobic membrane 1, and the nozzle body 21 can move in the up-down direction; further, the nozzle body 21 is provided with a first blind pipe and a second blind pipe sequentially spaced and arranged side by side in the up-down direction, a plurality of first nozzles 211 connected to the first blind pipe are provided at the top of the nozzle body 21, each of the first nozzles 211 is spaced and arranged in the first horizontal direction, the nozzle of each first nozzle 211 is oriented horizontally and / or obliquely upward, a plurality of second nozzles 212 connected to the second blind pipe are provided at the bottom of the nozzle body 21, and each of the second nozzles 212 is oriented toward the surface of the flexible foldable hydrophobic membrane 1.

[0036] Compared with the prior art, the flexible foldable hydrophobic membrane 1 provided between two adjacent grinding stations in this embodiment can prevent the splashing of the grinding liquid between different grinding discs 4 during the grinding process, thereby solving the technical problem that the existing grinding equipment causes cross-contamination of different grinding discs due to the splashing of the grinding liquid. In addition, the first nozzle 211 provided on the top of the flexible foldable hydrophobic membrane 1 can be raised and lowered with the expansion and contraction of the flexible foldable hydrophobic membrane 1. When the grinding head 3 switches between different grinding discs 4, the flexible foldable hydrophobic membrane 1 is in a folded state, and the nozzle body 21 is in a low position to facilitate the movement of the grinding head 3 between different grinding discs 4; when the grinding head 3 is grinding on the grinding disc, the flexible foldable hydrophobic membrane 1 is opened, and the nozzle body 21 is in a high position. The first nozzles 211 at the top of the nozzle can moisturize the various components of the grinding station (such as a rotating support and an outer shield, etc.); the second nozzles 212 at the bottom of the nozzle body 21 can clean the flexible foldable hydrophobic membrane 1 to remove the grinding liquid splashed on the flexible foldable hydrophobic membrane 1. Based on the above embodiments, in order to supply liquid to the first blind tube and the second blind tube in the nozzle body 21, a feasible implementation method is proposed. In detail, the spray mechanism 2 also includes a first liquid supply pipe 22 and a second liquid supply pipe 23. The first liquid supply pipe 22 is connected to the liquid inlet of the first blind tube, and the second liquid supply pipe 23 is connected to the liquid inlet of the second blind tube. Along the first horizontal direction, the first liquid supply pipe 22 and the second liquid supply pipe 23 are respectively located on both sides of the nozzle body 21. In this way, the liquid supply pipelines of the first blind tube and the second blind tube are independent of each other and can be operated independently under different working conditions, so that the first nozzle 211 or the second nozzle 212 can be sprayed separately according to needs.

[0037] Based on the above embodiment, in order to prevent the two liquid supply pipes from being entangled on other equipment of the grinding station during the up and down movement of the nozzle body 21, preferably, the first liquid supply pipe 22 and the second liquid supply pipe 23 are made of hard plastic, and are both set as spiral pipes with spiral axes parallel to the up and down directions, and the first liquid supply pipe 22 and the second liquid supply pipe 23 can be elastically extended and retracted in the up and down directions. In this way, since the first liquid supply pipe 22 and the second liquid supply pipe 23 are made of harder materials, they will not be entangled or knotted as the nozzle body 21 moves up and down. At the same time, the two liquid supply pipes set in a spiral shape can be extended and retracted as the nozzle body 21 moves up and down, so that the two liquid supply pipes will not be entangled and have a certain deformation ability.

[0038] In order to drive the nozzle body 21 to move up and down, in a possible implementation, the spray mechanism 2 further includes a telescopic cylinder 24 for driving the nozzle body 21 to move up and down, and along the first horizontal direction, the cylinder body of the telescopic cylinder 24 is arranged on one side of the nozzle body 21, and the telescopic rod of the telescopic cylinder 24 is connected to the end of the nozzle body 21. In this way, the present embodiment can drive the nozzle to move up and down by the telescopic cylinder 24, and then drive the flexible foldable hydrophobic membrane 1 to expand and contract in the up and down direction, so that the flexible foldable hydrophobic membrane 1 in the present invention can be adapted to the switching between different grinding discs 4 of the grinding head 3 of the grinding equipment. It is also beneficial to clean the various parts in the grinding equipment more comprehensively by moving the nozzle body 21 up and down. Furthermore, in order to make the movement of the nozzle body 21 more stable, an optional embodiment is proposed. Specifically, there are two telescopic cylinders 24, and the two telescopic cylinders 24 are respectively located on both sides of the flexible foldable hydrophobic membrane 1 along the first horizontal direction, and any one of the two telescopic cylinders 24 is located between the first liquid supply pipe 22 and the flexible foldable hydrophobic membrane 1, and the other telescopic cylinder 24 is located between the second liquid supply pipe 23 and the flexible foldable hydrophobic membrane 1. In this way, the two telescopic cylinders 24 can work together to make the up and down movement of the nozzle more stable through a two-point connection, and prevent the nozzle body 21 from shaking when moving or spraying liquid. More preferably, height sensors are respectively provided on the cylinder bodies of the two telescopic cylinders 24, and the height sensors are used to sense the expansion degree of the flexible foldable hydrophobic membrane 1 and the position of the nozzle body 21, so as to control the extension and contraction of the telescopic cylinder 24 according to the data fed back by the height sensor, thereby realizing the position interlocking of the above-mentioned mechanism, which is conducive to improving the automation degree of the present invention. Of course, in this embodiment, the nozzle can also have a certain inclination angle by making the two telescopic cylinders 24 have different telescopic lengths, adjusting the direction of the nozzle in the nozzle body 21, and improving the cleaning range inside the grinding equipment.

[0039] Optionally, the telescopic cylinder 24 may be a pneumatic cylinder or a hydraulic cylinder, and may be configured in accordance with the principle of being able to drive the flexible foldable hydrophobic membrane 1 to be retracted and extended, and its specific model is not described here.

[0040] In the above embodiment, in order to make the connection between the two telescopic cylinders 24 and the nozzle body 21 more secure, the spray mechanism 2 also includes a connecting plate 25, the length direction of the connecting plate 25 extends along the first horizontal direction, the two ends of the connecting plate 25 are respectively connected to the two telescopic rods, the upper plate surface of the connecting plate 25 is connected to the nozzle body 21, and the lower plate surface of the connecting plate 25 is connected to the top of the flexible foldable hydrophobic membrane 1. In this way, the flexible foldable hydrophobic membrane 1 and the nozzle body 21 can be connected to the connecting plate 25 in this embodiment, and then the nozzle body 21 can be driven to move and the flexible foldable hydrophobic membrane 1 can be retracted and expanded by the telescopic cylinder 24. In addition to the above feasible implementation, in the above embodiment, preferably, two small connecting blocks are hinged at both ends of the connecting plate 25, and the connecting blocks are respectively connected to the two telescopic rods, and the hinge axes of the two connecting blocks and the connecting plate 25 are perpendicular to the surface of the flexible foldable hydrophobic membrane 1 after unfolding, so that the nozzle body 21 can have a certain inclination angle by adjusting the telescopic length of the two telescopic cylinders 24.

[0041] In a feasible embodiment, the spray mechanism 2 further includes two mounting seats, which are arranged on both sides of the flexible foldable hydrophobic membrane 1 along the first horizontal direction, and the two mounting seats are used to fix the first liquid supply pipe 22 and the second liquid supply pipe 23 respectively, and the mounting seat includes a bottom plate and a fixing rod, the bottom plate is fixed to the bottom of the fixing rod, and the first liquid supply pipe 22 and the second liquid supply pipe 23 can be respectively sleeved on the outer periphery of the two fixing rods, and the fixing rod can guide the expansion and contraction of the first liquid supply pipe 22 and the second liquid supply pipe 23. As set above, this embodiment can fix the two liquid supply pipes respectively through the two mounting seats to prevent the liquid supply pipes from jumping away from the grinding device during the elastic expansion and contraction along the up and down directions.

[0042] In a feasible embodiment, the flexible foldable hydrophobic membrane 1 is configured to have a pre-tightening force that contracts in the up-down direction, and the bottom edge of the flexible foldable hydrophobic membrane 1 is connected to the bottom of the telescopic cylinder 24. In this way, the flexible foldable hydrophobic membrane 1 can be retracted and extended by the telescopic cylinder 24, and it is beneficial to unfold the flexible foldable hydrophobic membrane 1. More specifically, a fold is formed on the flexible foldable hydrophobic membrane 1 to facilitate its own folding, so as to facilitate the retraction and extension of the flexible foldable hydrophobic membrane 1.

[0043] Based on the above embodiments, further, in a feasible implementation manner, the bottom of the flexible foldable hydrophobic membrane 1 is connected to a reinforcing plate extending along the first horizontal direction, and the two ends of the reinforcing plate are respectively connected to the bottoms of the two cylinder bodies. With such an arrangement, the reinforcing plate in this embodiment can further straighten the flexible foldable hydrophobic membrane 1, so that the expansion and contraction process of the flexible foldable hydrophobic membrane 1 is more controllable.

[0044] In summary, compared with the prior art, the flexible foldable hydrophobic membrane 1 arranged between two adjacent grinding stations in the invention can block the splashing of the grinding liquid between different grinding discs 4 during the grinding process. At the same time, the first nozzle 211 arranged on the top of the flexible foldable hydrophobic membrane 1 can rise and fall with the expansion and contraction of the flexible foldable hydrophobic membrane 1. When the grinding head 3 switches between different grinding discs 4, the flexible foldable hydrophobic membrane 1 is in a folded state, and the nozzle body 21 is in a low position to facilitate the movement of the grinding head 3 between different grinding discs 4; when the grinding head 3 is grinding on the grinding disc, the flexible foldable hydrophobic membrane 1 is opened, and the nozzle body 21 is in a high position. The first nozzles 211 at the top of the nozzle can moisturize the various components of the grinding station (such as a rotating support and an outer shield, etc.); the second nozzles 212 at the bottom of the nozzle body 21 can clean the flexible foldable hydrophobic membrane 1 to remove the grinding liquid splashed on the flexible foldable hydrophobic membrane 1. When the two telescopic cylinders 24 in the present invention have different telescopic lengths, the present invention can make the nozzle body 21 have a certain inclination angle to increase the spraying and cleaning range of each nozzle on the nozzle body 21 on the grinding equipment. At the same time, the foldable flexible foldable hydrophobic membrane 1 can also meet the use requirements of the two telescopic cylinders 24 with different telescopic lengths, making the structural setting of the entire shielding assembly more reasonable.

[0045] Based on the same inventive concept, the present invention also proposes a polishing device, which includes the multifunctional device for preventing cross-contamination of polishing liquid mentioned above.

[0046] Compared with the prior art, the polishing equipment in the present invention has all the benefits of the above-mentioned multifunctional anti-cross-contamination device for polishing liquid, which will not be described in detail here.

[0047] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A multifunctional device for preventing cross contamination of grinding fluid, characterized in that: include: A flexible foldable hydrophobic film, wherein the flexible foldable hydrophobic film is used to shield any two adjacent grinding discs, and the surface of the flexible foldable hydrophobic film after unfolding is parallel to the up-down direction and the first horizontal direction, and the flexible foldable hydrophobic film can be collapsed and unfolded along the up-down direction; A spray mechanism, comprising a spray pipe body extending along a first horizontal direction, the spray pipe body being connected to the top of the flexible foldable hydrophobic membrane, and the spray pipe body being movable in an up-and-down direction; The nozzle body is provided with a first blind pipe and a second blind pipe which are sequentially spaced and arranged side by side in the up-down direction; the top of the nozzle body is provided with a plurality of first nozzles which are connected to the first blind pipe, and the first nozzles are spaced and arranged along the first horizontal direction, and the nozzle of each first nozzle is directed horizontally and / or obliquely upward; the bottom of the nozzle body is provided with a plurality of second nozzles which are connected to the second blind pipe, and the second nozzles are directed toward the surface of the flexible foldable hydrophobic membrane.

2. The multifunctional device for preventing cross contamination of polishing liquid according to claim 1, characterized in that: The spray mechanism also includes a first liquid supply pipe and a second liquid supply pipe, the first liquid supply pipe is connected to the liquid inlet of the first blind pipe, and the second liquid supply pipe is connected to the liquid inlet of the second blind pipe. Along the first horizontal direction, the first liquid supply pipe and the second liquid supply pipe are respectively located on both sides of the nozzle body.

3. The multifunctional grinding liquid cross-contamination prevention device according to claim 2, characterized in that: The first liquid supply tube and the second liquid supply tube are both made of hard plastic and are both configured as spiral tubes with spiral axes parallel to the up-down direction. The first liquid supply tube and the second liquid supply tube can elastically expand and contract in the up-down direction.

4. The multifunctional device for preventing cross contamination of polishing liquid as claimed in claim 3, characterized in that: The spray mechanism also includes a telescopic cylinder for driving the nozzle body to move up and down. Along the first horizontal direction, the cylinder body of the telescopic cylinder is arranged on one side of the nozzle body, and the telescopic rod of the telescopic cylinder is connected to the end of the nozzle body.

5. The multifunctional device for preventing polishing liquid from cross contamination as claimed in claim 4, characterized in that: There are two telescopic cylinders, and the two telescopic cylinders are respectively located on both sides of the flexible foldable hydrophobic membrane along the first horizontal direction, and any one of the two telescopic cylinders is located between the first liquid supply pipe and the flexible foldable hydrophobic membrane, and the other telescopic cylinder is located between the second liquid supply pipe and the flexible foldable hydrophobic membrane. Height sensors are respectively provided on the cylinder bodies of the two telescopic cylinders, and the height sensors are used to sense the expansion degree of the flexible foldable hydrophobic membrane and the position of the nozzle body.

6. The multifunctional device for preventing cross contamination of polishing liquid according to claim 4, characterized in that: The spray mechanism also includes a connecting plate, the length direction of which extends along a first horizontal direction, the two ends of which are respectively connected to the two telescopic rods, the upper surface of the connecting plate is connected to the nozzle body, and the lower surface of the connecting plate is connected to the top of the flexible foldable hydrophobic membrane.

7. The multifunctional grinding liquid cross-contamination prevention device according to claim 3, characterized in that: The spray mechanism also includes two mounting seats, which are arranged on both sides of the flexible foldable hydrophobic membrane along a first horizontal direction, and are used to fix the first liquid supply pipe and the second liquid supply pipe respectively. The mounting seat includes a base plate and a fixing rod, and the base plate is fixed to the bottom of the fixing rod. The first liquid supply pipe and the second liquid supply pipe can be respectively sleeved on the outer periphery of the two fixing rods, and the fixing rod can guide the extension and retraction of the first liquid supply pipe and the second liquid supply pipe.

8. The multifunctional device for preventing cross contamination of polishing liquid according to claim 5, characterized in that: The flexible foldable hydrophobic membrane is configured to have a pre-tightening force that contracts in the up-down direction, and the bottom edge of the flexible foldable hydrophobic membrane is connected to the bottom of the telescopic cylinder.

9. The multifunctional device for preventing cross contamination of polishing liquid according to claim 5, characterized in that: The bottom of the flexible foldable hydrophobic membrane is connected with a reinforcing plate extending along a first horizontal direction, and two ends of the reinforcing plate are respectively connected to the bottoms of the two cylinder bodies.

10. A polishing device, characterized in that: The invention comprises a multifunctional grinding liquid cross-contamination prevention device as claimed in any one of claims 1 to 9.

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