Rapid and accurate assembling method for wafer boat parts and special clamp thereof

Abstract

The invention relates to the field of crystal boats, in particular to a rapid and accurate assembling method for crystal boat parts and a special clamp for the crystal boat parts, the special clamp comprises a first clamping assembly, and the first clamping assembly comprises a second double-end lead screw; vertical plates are in threaded connection with the two ends of the second double-end lead screw, fixing seats are fixed to the two vertical plates, first double-end lead screws are rotationally installed on the two fixing seats, connecting blocks are in threaded connection with the threaded positions of the two ends of each first double-end lead screw, and clamping blocks are fixed to the ends of the connecting blocks; through the arrangement of the first clamping assembly, a disc part of a wafer boat can be conveniently clamped and fixed, through the arrangement of the second clamping assembly, the multiple supporting rods can be conveniently fixed, and the discs on the two sides can move to the two ends of the supporting rods to be in butt joint with the supporting rods during assembling, so that workers can conveniently fix the discs and the supporting rods through bolts; by means of the design, the wafer boat parts can be clamped and fixed in the wafer boat assembling process, the convenience of wafer boat assembling is provided, and the quality and efficiency of wafer boat assembling are improved.

Description

Technical Field

[0001] The invention relates to the field of wafer boats, and in particular to a rapid and accurate assembly method of wafer boat components and a special clamp thereof. Background Art

[0002] A wafer boat is a device used in the semiconductor industry to store, transport and process wafers. The main function of a wafer boat is to protect the wafers from damage during transportation, transfer and processing, and to ensure the integrity and processing quality of the wafers. Figure 1 It is a common wafer boat on the market. The wafer boat is mainly composed of two circular rings. Multiple support rods are fixed between the two circular rings. The ends of the support rods are fixed to the circular rings by bolts. Placement grooves are provided on the support rods. The wafer boat is convenient for placing multiple wafers through the multiple placement grooves, and the multiple support rods play an effective bearing role on the wafers.

[0003] At present, since the wafer boat is composed of multiple parts, the wafer boat needs to be assembled during the processing of the wafer boat. When assembling the above-mentioned wafer boat, the staff is required to fix the two ends of the support rod with the circular rings on both sides through bolts. In the assembly process, the circular rings and the support rods lack an effective fixing structure, which leads to many inconveniences in the assembly operation and affects the efficiency and quality of the wafer boat assembly. In view of this, we propose a fast and accurate assembly method of wafer boat components and a special clamp thereof. Summary of the invention

[0004] The object of the present invention is to provide a rapid and accurate assembly method of wafer boat components and a special fixture thereof, so as to solve the problems raised in the above background technology.

[0005] To achieve the above object, on the one hand, the present invention provides a method for quickly and accurately assembling wafer boat components, comprising the following steps:

[0006] S1, pass one of the support rods through the notch and squeeze it into the slot, and the support rod is inserted into the slot;

[0007] S2, repeat the above step S1 and insert multiple support rods into multiple slots in sequence;

[0008] S3, passing two adjacent clamps through the opening of the ring;

[0009] S4, rotate the first adjusting head, the first adjusting head drives the first double-headed screw to rotate, the two connecting blocks move synchronously in opposite directions, the connecting block drives the clamping block to move, when the outer wall of the clamping block is pressed against the inner wall of the opening of the ring, stop rotating the first adjusting head, and the disc is fixed;

[0010] S5, repeat the above step S4 to fix another disc on the fixing seat on the other side;

[0011] S6, rotating the second adjusting head, the second adjusting head drives the second double-headed screw to rotate, the two support plates move inwards relatively synchronously, the support plates drive the fixed seat to move, and the fixed seat drives the discs on both sides to move closer to the support rod; when the discs on both sides are close to the end of the support rod, stop rotating the second adjusting head;

[0012] S7. Pass a plurality of bolts through the disc in sequence and screw them into the ends of a plurality of support rods respectively. The disc is then fixed to the support rods, and the assembly of the wafer boat is completed.

[0013] On the other hand, the present invention also provides a special clamp for the rapid and accurate assembly of crystal boat components, which is used for the above-mentioned rapid and accurate assembly method of crystal boat components, including a first clamping component, the first clamping component including a base, a strip groove is provided on the top of the base, and a second double-headed screw is rotatably installed in the strip groove; vertical plates are threadedly connected to the threads at both ends of the second double-headed screw, and fixed seats are fixed to two opposite end faces of the two vertical plates, and installation grooves are provided on two opposite end faces of the two fixed seats, and the first double-headed screw is rotatably installed in the installation grooves, and connecting blocks are threadedly connected to the threads at both ends of the first double-headed screw, clamping blocks are fixed to the ends of the connecting blocks, and limiting plates are fixed to the edges of the outer walls of the clamping blocks.

[0014] Preferably, a second clamping assembly is fixed between the two fixed seats, and the second clamping assembly includes two symmetrical support plates fixed to the top of the base, a bracket is fixed between the top ends of the two support plates, two support plates are fixed on both side walls in the opening of the bracket, a fixing block is fixed at the end of the support plate, a notch is provided on the top of the fixing block, and a slot is provided below the notch.

[0015] Preferably, the cross-sectional shape of the vertical plate is rectangular, and the size of the vertical plate is matched with the size of the strip groove.

[0016] Preferably, the front end of the second double-ended screw is coaxially keyed to a second adjusting head, and an anti-slip groove is provided on an outer wall of the second adjusting head.

[0017] Preferably, guide rails are fixed to both side walls of the installation groove, and guide grooves slidably connected to the guide rails are formed on both side walls of the connecting block.

[0018] Preferably, the top end of the first double-ended screw is coaxially keyed to a first adjusting head, and an anti-slip groove is provided on an outer wall of the first adjusting head.

[0019] Preferably, the clamping block and the limiting plate are an integrally formed structure, and the limiting plate is convex.

[0020] Preferably, the support plate and the fixing block are an integrally formed structure, and both the support plate and the fixing block are made of plastic material.

[0021] Preferably, the cross-sectional shape of the bracket is U-shaped, and the bracket is fixedly connected to the support plate by bolts.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] By setting up the first clamping assembly, it is convenient to clamp and fix the disc component of the crystal boat, and by setting up the second clamping assembly, it is convenient to fix multiple support rods. During assembly, the discs on both sides can be moved to the two ends of the support rods and docked with the support rods, which makes it convenient for workers to fix the discs to the support rods through bolts. This design can clamp and fix the crystal boat components during the process of assembling the crystal boat, provides convenience for crystal boat assembly, and improves the quality and efficiency of crystal boat assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a structural schematic diagram of a crystal boat in the prior art;

[0025] Figure 2 It is a schematic structural diagram of the first clamping assembly in the present invention;

[0026] Figure 3 It is a structural schematic diagram of the base in the present invention;

[0027] Figure 4 It is a partial structural schematic diagram of the first clamping assembly in the present invention;

[0028] Figure 5 It is a structural cross-sectional view of the fixing seat in the present invention;

[0029] Figure 6 is a schematic structural diagram of the second clamping assembly in the present invention;

[0030] In the figure:

[0031] 1. First clamping assembly; 10. Base; 101. Strip groove; 11. Vertical plate; 12. Fixed seat; 120. Mounting groove; 121. Guide rail; 13. First double-ended screw rod; 131. First adjustment head; 14. Connecting block; 140. Guide groove; 15. Clamping block; 150. Limiting plate; 16. Second double-ended screw rod; 160. Second adjustment head

[0032] 2. Second clamping assembly; 20. Bracket; 21. Support plate; 22. Support plate; 23. Fixing block; 230. Slot; 231. Notch. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0035] Example 1

[0036] On the one hand, the present invention provides a method for quickly and accurately assembling wafer boat components:

[0037] A method for quickly and accurately assembling components of a crystal boat, such as Figure 2-6 As shown, the following steps are included:

[0038] S1, passing one of the support rods through the notch 231 and pressing it into the slot 230, so that the support rod is inserted into the slot 230;

[0039] S2, repeat the above step S1 and insert the plurality of support rods into the plurality of slots 230 in sequence;

[0040] S3, passing two adjacent clamping blocks 15 through the opening of the ring;

[0041] S4, rotate the first adjusting head 131, the first adjusting head 131 drives the first double-ended screw 13 to rotate, the two connecting blocks 14 synchronously move in opposite directions relative to each other, the connecting block 14 drives the clamping block 15 to move, when the outer wall of the clamping block 15 is pressed against the inner wall of the opening of the ring, stop rotating the first adjusting head 131, and the disc is fixed;

[0042] S5, repeat the above step S4 to fix another disc on the fixing seat 12 on the other side;

[0043] S6. Rotate the second adjusting head 160, the second adjusting head 160 drives the second double-ended screw 16 to rotate, the two support plates 21 move inwards relative to each other synchronously, the support plate 21 drives the fixing seat 12 to move, and the fixing seat 12 drives the discs on both sides to move closer to the support rod; when the discs on both sides are pressed against the end of the support rod, stop rotating the second adjusting head 160;

[0044] S7. Pass a plurality of bolts through the disc in sequence and screw them into the ends of a plurality of support rods respectively. The disc is then fixed to the support rods, and the assembly of the wafer boat is completed.

[0045] On the other hand, the present invention also provides a special clamp for the rapid and accurate assembly of crystal boat components, which is used to implement the above-mentioned rapid and accurate assembly method of crystal boat components, including a first clamping component 1, the first clamping component 1 includes a base 10, a strip groove 101 is opened on the top of the base 10, and a second double-headed screw 16 is rotatably installed in the strip groove 101; the second double-headed screw 16 is threadedly connected to the vertical plates 11 at the threads at both ends, and the two opposite end faces of the two vertical plates 11 are fixed with fixed seats 12, and the two opposite end faces of the two fixed seats 12 are opened with installation grooves 120, and the first double-headed screw 13 is rotatably installed in the installation grooves 120, and the first double-headed screw 13 is threadedly connected to the connecting block 14 at the threads at both ends, and the ends of the connecting block 14 are fixed with clamping blocks 15, and the clamping block 15 is fixedly connected to the connecting block 14 by bolts, and the outer wall edge of the clamping block 15 is fixed with a limiting plate 150. A second clamping assembly 2 is also fixed between the two fixing seats 12. The second clamping assembly 2 includes two symmetrical support plates 21 fixed to the top of the base 10. The support plates 21 are fixedly connected to the base 10 by bolts. A bracket 20 is fixed between the tops of the two support plates 21. Two support plates 22 are fixed on both side walls of the opening of the bracket 20. The support plates 22 are fixedly connected to the inner walls of the bracket 20 by bolts. A fixing block 23 is fixed at the end of the support plate 22. A notch 231 is provided at the top of the fixing block 23, and a slot 230 is provided below the notch 231.

[0046] In this embodiment, the cross-sectional shape of the vertical plate 11 is rectangular, and the size of the vertical plate 11 is adapted to the size of the strip groove 101. The rectangular cross-sectional design enhances the stability of the vertical plate 11, and the adaptation to the size of the strip groove 101 ensures the accuracy and stability of the installation, and avoids shaking when the vertical plate 11 moves horizontally.

[0047] In this embodiment, the front end of the second double-ended screw 16 is coaxially keyed to the second adjustment head 160, and an anti-skid groove is provided on the outer wall of the second adjustment head 160. The second adjustment head 160 is convenient for rotating the second double-ended screw 16, and the anti-skid groove design increases the friction of the hand grip, so that the user does not slip easily during adjustment.

[0048] In this embodiment, guide rails 121 are fixed to both side walls of the mounting groove 120, and guide grooves 140 are provided on both side walls of the connecting block 14 for sliding connection with the guide rails 121. The sliding connection design between the guide rails 121 and the guide grooves 140 makes the connecting block 14 move more smoothly and stably.

[0049] In this embodiment, the top of the first double-ended screw 13 is coaxially keyed to a first adjustment head 131, and an anti-slip groove is provided on the outer wall of the first adjustment head 131. The first adjustment head 131 and the anti-slip groove design improve the operating convenience of the first double-ended screw 13, allowing the user to easily adjust.

[0050] In this embodiment, the clamp block 15 and the limiting plate 150 are an integrally formed structure, and the limiting plate 150 is convex. The integrally formed structure enhances the overall strength and stability of the clamp block and the limiting plate, avoiding safety hazards caused by loose or broken connections, and the protruding limiting plate 150 limits the disc, preventing the disc from detaching from the clamp block 15.

[0051] In this embodiment, the support plate 22 and the fixing block 23 are an integrally formed structure, and both the support plate 22 and the fixing block 23 are made of plastic. The integrally formed structure improves the structural strength and durability of the support plate 22 and the fixing block 23. Plastic material has the advantages of light weight, corrosion resistance, and easy processing, and is suitable for making the support plate 22 and the fixing block 23.

[0052] In this embodiment, the cross-sectional shape of the bracket 20 is U-shaped, and the bracket 20 is fixedly connected to the support plate 21 by bolts. The U-shaped cross-sectional design enhances the load-bearing capacity and stability of the bracket, and can withstand a large weight without being easily deformed. The bolted fixed connection ensures that the bracket 20 is firmly connected to the support plate 21, and is not easy to loosen or fall off.

[0053] It can be understood that the thread winding direction of the thread grooves at both ends of the first double-ended screw 13 and the second double-ended screw 16 in this embodiment is such that when the first double-ended screw 13 and the second double-ended screw 16 rotate, the vertical plates 11 on both sides and the clamping blocks 15 on both sides can move relative to each other, thereby facilitating the assembly of the crystal boat.

[0054] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the present invention and are not intended to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A method for fast and accurate assembly of wafer boat components, characterized in that: The following steps are involved: S1, passing one of the support rods through the notch (231) and pressing it into the slot (230), so that the support rod is inserted into the slot (230); S2, repeating the above step S1 and inserting the plurality of support rods into the plurality of slots (230) in sequence; S3, passing two adjacent clamping blocks (15) through the opening of the ring; S4, rotating the first adjusting head (131), the first adjusting head (131) drives the first double-headed screw (13) to rotate, the two connecting blocks (14) synchronously move in opposite directions relative to each other, the connecting block (14) drives the clamping block (15) to move, when the outer wall of the clamping block (15) is pressed against the inner wall of the opening of the annular ring, the first adjusting head (131) stops rotating, and the disc is fixed; S5, repeat the above step S4 to fix another disc on the fixing seat (12) on the other side; S6, rotating the second adjusting head (160), the second adjusting head (160) drives the second double-headed screw (16) to rotate, the two support plates (21) synchronously move inward relative to each other, the support plate (21) drives the fixed seat (12) to move, and the fixed seat (12) drives the discs on both sides to move closer to the support rod; when the discs on both sides are pressed against the end of the support rod, the second adjusting head (160) stops rotating; S7. Pass a plurality of bolts through the disc in sequence and screw them into the ends of a plurality of support rods respectively. The disc is then fixed to the support rods, and the assembly of the wafer boat is completed.

2. A special fixture for rapid and accurate assembly of wafer boat components, used to implement the rapid and accurate assembly method of wafer boat components according to claim 1, characterized in that: The invention comprises a first clamping assembly (1), wherein the first clamping assembly (1) comprises a base (10), a strip groove (101) is provided on the top of the base (10), a second double-headed screw rod (16) is rotatably mounted in the strip groove (101); both ends of the second double-headed screw rod (16) are threadedly connected to vertical plates (11), two opposite end surfaces of the two vertical plates (11) are fixed with fixed seats (12), two opposite end surfaces of the two fixed seats (12) are provided with mounting grooves (120), a first double-headed screw rod (13) is rotatably mounted in the mounting grooves (120), both ends of the first double-headed screw rod (13) are threadedly connected to connecting blocks (14), the ends of the connecting blocks (14) are fixed with clamping blocks (15), and the outer wall edges of the clamping blocks (15) are fixed with limiting plates (150).

3. The special fixture for rapid and accurate assembly of wafer boat components according to claim 2 is characterized in that: A second clamping assembly (2) is also fixed between the two fixing seats (12), and the second clamping assembly (2) comprises two symmetrical support plates (21) fixed to the top of the base (10), a bracket (20) is fixed between the top ends of the two support plates (21), two support plates (22) are fixed on both side walls in the opening of the bracket (20), a fixing block (23) is fixed at the end of the support plate (22), a notch (231) is provided at the top of the fixing block (23), and a card slot (230) is provided below the notch (231).

4. The special fixture for rapid and accurate assembly of wafer boat components according to claim 2, characterized in that: The cross-sectional shape of the vertical plate (11) is rectangular, and the size of the vertical plate (11) is matched with the size of the strip groove (101).

5. The special fixture for rapid and accurate assembly of wafer boat components according to claim 2, characterized in that: The front end of the second double-ended screw rod (16) is coaxially keyed to a second adjusting head (160), and an anti-slip groove is provided on the outer wall of the second adjusting head (160).

6. The special fixture for rapid and accurate assembly of wafer boat components according to claim 3, characterized in that: Guide rails (121) are fixed to both side walls of the installation groove (120), and guide grooves (140) slidably connected to the guide rails (121) are formed on both side walls of the connection block (14).

7. The special fixture for rapid and accurate assembly of wafer boat components according to claim 2, characterized in that: The top end of the first double-ended screw rod (13) is coaxially keyed to a first adjusting head (131), and an anti-slip groove is provided on the outer wall of the first adjusting head (131).

8. The special fixture for rapid and accurate assembly of wafer boat components according to claim 2, characterized in that: The clamping block (15) and the limiting plate (150) are an integrally formed structure, and the limiting plate (150) is in a convex shape.

9. The special fixture for rapid and accurate assembly of wafer boat components according to claim 3, characterized in that: The support plate (22) and the fixing block (23) are an integrally formed structure, and both the support plate (22) and the fixing block (23) are manufactured products made of plastic material.

10. The special fixture for rapid and accurate assembly of wafer boat components according to claim 3, characterized in that: The cross-sectional shape of the bracket (20) is U-shaped, and the bracket (20) is fixedly connected to the support plate (21) by bolts.

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