Method for processing polymer microspheres by ion beam

Abstract

The invention discloses a method for processing polymer microspheres through an ion beam, and relates to the technical field of ion beam processing, the method for processing polymer microspheres through the ion beam is achieved through polymer microsphere processing equipment, the polymer microsphere processing equipment comprises a turnover mechanism, the turnover mechanism is provided with a leveling mechanism and a vertical mechanism, and the leveling mechanism and the vertical mechanism are arranged on the turnover mechanism. A polymer microsphere bearing mechanism is arranged on the left side of the turnover mechanism, and a driving mechanism is arranged on the right side of the turnover mechanism. According to the invention, the vacuum chamber needs to be opened for loading and unloading the polymer microspheres only after the processing is completed, so that the vacuumizing frequency is effectively reduced, the processing energy consumption and the processing cost are reduced while the processing efficiency is improved, in addition, the overturning operation of the polymer microspheres can also be completed in the resetting process of the polymer microsphere processing equipment, and the production efficiency is improved. And the processing efficiency is further improved.

Description

Technical Field

[0001] The invention relates to the technical field of ion beam processing, and in particular to a method for ion beam processing polymer microspheres. Background Art

[0002] Since polymer microspheres are small in size and brittle, it is difficult to fix them by clamping during ion beam processing. Although vacuum adsorption does not cause breakage, it is difficult to fix polymer microspheres by vacuum adsorption because the focused ion beam processing itself is carried out under vacuum conditions.

[0003] The invention patent with the authorization announcement number CN 114800926 B discloses a method for ion beam processing of polymer microspheres, S1, the polymer microspheres to be processed are sequentially loaded into the first groove of the base, after the placement is completed, the bottom surface of each polymer microsphere abuts against the inner wall of the corresponding first groove, and the spherical surface exposed in the upper half of the polymer microsphere is recorded as the A surface; S2, the A surface of each polymer microsphere is processed in turn by the ion beam; S3, after the A surface of all polymer microspheres is processed, the back plate cover is set above the base until the top surface of each polymer microsphere abuts against the inner wall of the corresponding second groove; S4, the entire sample platform is turned upside down by the flipping mechanism, and then the base is removed, and the spherical surface exposed in the upper half of the polymer microsphere is recorded as the B surface; S5, the B surface of each polymer microsphere is processed in turn by the ion beam. Compared with the prior art, the invention method can realize both sample fixation and conductive function, and can realize batch processing.

[0004] However, after actual application by technicians skilled in the art, it was found that the above method still has some shortcomings. The most obvious one is that after completing the A-side processing of the polymer microspheres, in order to facilitate the subsequent placement of the backplane, the flipping of the substrate and the backplane, and the removal of the substrate, the operator needs to open the vacuum chamber for operation. When the vacuum chamber is opened, the internal vacuum environment will be destroyed. Therefore, after completing the above operations, the vacuum chamber needs to be re-evacuated, which affects the processing efficiency and significantly increases the processing energy consumption, resulting in unnecessary increase in processing costs.

[0005] Therefore, it is necessary to invent a method for ion beam processing polymer microspheres to solve the above problems. Summary of the invention

[0006] The object of the present invention is to provide a method for ion beam processing of polymer microspheres. The method comprises a flipping mechanism, a leveling mechanism, a vertical mechanism, a polymer microsphere carrying mechanism and a driving mechanism, so that after completing the single-side processing of the polymer microspheres, the driving mechanism is used to drive the leveling mechanism to move left, thereby causing the polymer microsphere carrying mechanism to close under the push of the leveling mechanism, and then the driving mechanism drives the flipping mechanism, thereby causing the flipping mechanism to drive the polymer microsphere carrying mechanism to complete the flipping, and finally the driving mechanism drives the vertical mechanism, thereby causing the vertical mechanism to drive the polymer microsphere carrying mechanism to open to expose the surface to be processed of the polymer microspheres, so as to solve the problem proposed in the above background technology that after completing the A-side processing of the polymer microspheres, in order to facilitate the subsequent placement of the back plate, the flipping of the substrate and the back plate, and the removal of the substrate, the operator needs to open the vacuum chamber for operation, and when the vacuum chamber is opened, the internal vacuum environment will be destroyed, so that after completing the above operation, the vacuum chamber needs to be re-evacuated, which affects the processing efficiency and significantly increases the processing energy consumption, resulting in unnecessary increase in processing costs.

[0007] To achieve the above object, the present invention provides the following technical solutions: a method for ion beam processing of polymer microspheres, the method for ion beam processing of polymer microspheres is implemented by a polymer microsphere processing device, the polymer microsphere processing device comprises a flipping mechanism, a leveling mechanism and a vertical mechanism are arranged on the flipping mechanism, a polymer microsphere carrying mechanism is arranged on the left side of the flipping mechanism, and a driving mechanism is arranged on the right side of the flipping mechanism; After the driving mechanism drives the leveling mechanism to move left, the leveling mechanism completes the clamping of the polymer microspheres processed on one side, and then the driving mechanism drives the flipping mechanism, which drives the polymer microsphere supporting mechanism to complete the flipping through the leveling mechanism, and finally the driving mechanism drives the vertical mechanism, which drives the polymer microsphere supporting mechanism to open again.

[0008] Preferably, the flipping mechanism comprises a fixed plate, a rotating disk, a first gear ring, a threaded sleeve and a second gear ring; The fixed plate is fixedly arranged in the vacuum chamber, the rotating disk is rotatably arranged on the inner side of the fixed plate through a bearing, the first gear ring is fixedly sleeved at the left end of the outer side of the rotating disk, the threaded sleeve passes through the fixed plate and is rotatably connected to the fixed plate through a bearing, and the second gear ring is fixedly sleeved at the left end of the outer side of the threaded sleeve and meshes with the first gear ring.

[0009] Preferably, the leveling mechanism comprises a push rod, an end plate, a movable disk and a first return spring; The push rod slides through the rotating disk and fits with the upper connecting arm. The end plate is fixedly arranged at the right end of the push rod. The movable disk is rotatably nested on the right side of the end plate through a bearing. The first return spring is fixedly connected between the rotating disk and the end plate.

[0010] Preferably, the vertical mechanism comprises a rack, a gear, an annular plate and a second return spring; There are two racks and two gears, and the racks slide through the rotating disk and mesh with adjacent gears. The two gears are respectively fixed at the two ends of the rotating shaft below. The annular plate is slidably sleeved on the outside of the push rod and fixedly connected to the two racks. The second return spring is fixedly connected between the rotating disk and the annular plate.

[0011] Preferably, the polymer microsphere bearing mechanism comprises an H-shaped mounting seat, a rotating shaft, a connecting arm, a torsion spring, a limit block, a base and a back plate; The H-shaped mounting seat is fixedly arranged at the center of the left side of the rotating disk, and two rotating shafts and connecting arms are each provided. The two rotating shafts are penetrated through the inner top and inner bottom of the H-shaped mounting seat and are rotatably connected to the H-shaped mounting seat through bearings. The two connecting arms are respectively fixedly sleeved in the middle of the outer sides of the two rotating shafts, and the torsion spring is sleeved on the outer side of the rotating shaft and fixedly connected between the H-shaped mounting seat and the connecting arm. The limit block is fixedly arranged on the right side of the upper connecting arm, the base is fixedly arranged on the left end of the lower connecting arm, and the back plate is fixedly arranged on the top of the upper connecting arm.

[0012] Preferably, the driving mechanism comprises a U-shaped frame, a reciprocating screw, a driving motor, an outer sleeve, a third return spring and an inner sleeve; The U-shaped frame is fixedly arranged on the right side of the fixed plate, the reciprocating screw penetrates the U-shaped frame and is rotatably connected to the U-shaped frame through a bearing, the driving motor is fixedly arranged on the right side of the U-shaped frame and is transmission-connected to the reciprocating screw, the outer sleeve, the third return spring and the inner sleeve are sequentially sleeved on the outside of the reciprocating screw from right to left, the outer sleeve is transmission-connected to the reciprocating screw, the third return spring is fixedly connected between the outer sleeve and the inner sleeve, the inner sleeve is slidably connected to the reciprocating screw and is slidably arranged on the inside of the outer sleeve, and the left end of the inner sleeve is rotationally connected to the movable disk through a bearing.

[0013] Preferably, the driving mechanism further comprises a T-shaped plate, a one-way screw and a rotating plate; The T-shaped plate is fixedly sleeved on the left end of the outer side of the outer sleeve, the one-way screw is fixedly set on the top left side of the T-shaped plate, and the rotating plate is sleeved on the outer side of the one-way screw and is rotatably connected to the one-way screw through a bearing.

[0014] Preferably, the method specifically comprises the following steps: S1, sequentially loading the polymer microspheres to be processed into the groove on the top of the base, at which time the bottom surface of the polymer microspheres abuts against the inner wall of the groove, and sequentially processing the exposed top surfaces of multiple polymer microspheres by ion beam in a vacuum chamber; S2. After the processing is completed, the drive motor is started. After the drive motor is started, the reciprocating screw is driven to rotate. When the reciprocating screw rotates, the outer sleeve is driven to move left. During the movement of the outer sleeve to the left, the inner sleeve is pushed by the third return spring, and the one-way screw and the rotating plate are driven to move left synchronously through the T-shaped plate; S3, when the inner sleeve moves to the left, it pushes the movable disk, and the movable disk drives the end plate to compress the first return spring, and at the same time drives the push rod to move to the left. When the push rod moves to the left, it pushes the upper connecting arm, so that it rotates counterclockwise with the rotation axis as the axis. When the connecting arm rotates, it drives the back plate at the top to rotate synchronously counterclockwise; S4, when the leftward movement distance of the outer sleeve reaches the first threshold, the back plate rotates from the vertical state to the horizontal state and covers the top of the multiple polymer microspheres. At this time, the left end of the push rod is in contact with the limit block, and the limit block blocks the push rod. Due to the obstruction of the limit block, the push rod cannot continue to move left, that is, the end plate, the movable disk and the inner sleeve cannot continue to move left. Subsequently, as the outer sleeve continues to move left, the third reset spring is continuously compressed, and at the same time, the T-shaped plate continues to drive the one-way screw and the rotating plate to move left; S5, when the outer sleeve moves to the left by a distance reaching a second threshold, the left end of the one-way screw enters the inner side of the threaded sleeve, and as the one-way screw continues to move to the left, the threaded sleeve rotates driven by the one-way screw, and when the threaded sleeve rotates, the second gear ring and the first gear ring drive the rotating disk to rotate, and when the rotating disk rotates, the leveling mechanism, the vertical mechanism and the polymer microsphere bearing mechanism are driven to rotate synchronously; S6, when the outer sleeve moves to the left by a distance reaching the third threshold, the polymer microsphere bearing mechanism rotates more than 150°, at which time the left side of the rotating plate fits with the right side of the annular plate, and as the rotating plate continues to move to the left, the annular plate compresses the second return spring and drives the rack to move to the left, and the rack drives the gear to rotate during the left movement, and when the gear rotates, the base is driven to rotate synchronously through the adjacent rotating shaft and the connecting arm, so that the base is gradually separated from the top of the multiple polymer microspheres; S7, when the outer sleeve moves to the left and reaches the fourth threshold, the polymer microsphere bearing mechanism is flipped, the base is rotated to a vertical state, and the back plate is in a horizontal state to carry the multiple polymer microspheres. At this time, the outer sleeve moves to the leftmost end of the reciprocating thread outside the reciprocating screw, and the drive motor is stopped while the top exposed surfaces of the multiple polymer microspheres are processed again by the ion beam in sequence; S8, after the processing is completed, the vacuum chamber is opened and the processed polymer microspheres are removed, and then the polymer microspheres to be processed are placed on the top of the back plate in a horizontal state and the vacuum chamber is evacuated, and then the top exposed surfaces of multiple polymer microspheres are processed in sequence by ion beam; S9. After the processing is completed, the drive motor is started again. After the drive motor is started, it continues to drive the reciprocating screw to rotate. At this time, the outer sleeve begins to move left and reset. During this process, the vertical mechanism, the leveling mechanism and the polymer microsphere supporting mechanism are reset in succession. The multiple polymers that have completed single-sided processing are transferred to the top of the base in a horizontal state. At this time, the top exposed surfaces of the multiple polymer microspheres are processed in turn by the ion beam and the vacuum chamber is opened after the processing is completed to unload the polymer microspheres.

[0015] Technical effects and advantages of the present invention: The present invention is provided with a flipping mechanism, a leveling mechanism, a vertical mechanism, a polymer microsphere carrying mechanism and a driving mechanism, so that after completing the single-sided processing of the polymer microspheres, the driving mechanism is used to drive the leveling mechanism to move left, so that the polymer microsphere carrying mechanism is closed under the push of the leveling mechanism, and then the driving mechanism drives the flipping mechanism, so that the flipping mechanism drives the polymer microsphere carrying mechanism to complete the flipping, and finally the driving mechanism drives the vertical mechanism, so that the vertical mechanism drives the polymer microsphere carrying mechanism to open, so as to expose the surface to be processed of the polymer microspheres. Compared with the same type of devices and methods in the prior art, the present invention only needs to open the vacuum chamber after the processing is completed to perform loading and unloading operations on the polymer microspheres, thereby effectively reducing the number of vacuum pumping times, improving the processing efficiency while reducing the processing energy consumption and processing costs. In addition, the flipping operation of the polymer microspheres can also be completed during the resetting process of the polymer microsphere processing equipment, further improving the processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0017] Figure 2 It is a schematic diagram of the overall cross-sectional structure of the present invention.

[0018] Figure 3 It is a schematic cross-sectional structure diagram of the turning mechanism, leveling mechanism and vertical mechanism of the present invention.

[0019] Figure 4 It is a schematic diagram of the cross-sectional structure of the polymer microsphere supporting mechanism of the present invention.

[0020] Figure 5 It is a schematic cross-sectional structural diagram of the driving mechanism of the present invention.

[0021] In the figure: 1. flip mechanism; 11. fixed plate; 12. rotating disk; 13. first gear ring; 14. threaded sleeve; 15. second gear ring; 2. leveling mechanism; 21. push rod; 22. end plate; 23. movable disk; 24. first return spring; 3. vertical mechanism; 31. rack; 32. gear; 33. annular plate; 34. second return spring; 4. polymer microsphere bearing mechanism; 41. H-shaped mounting seat; 42. rotating shaft; 43. connecting arm; 44. torsion spring; 45. limit block; 46. base; 47. back plate; 5. driving mechanism; 51. U-shaped frame; 52. reciprocating screw; 53. driving motor; 54. outer sleeve; 55. third return spring; 56. inner sleeve; 57. T-shaped plate; 58. one-way screw; 59. rotating plate. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] The present invention provides Figure 1-Figure 5 A method for ion beam processing of polymer microspheres is shown, and the method for ion beam processing of polymer microspheres is implemented by a polymer microsphere processing device, and the polymer microsphere processing device comprises a flip mechanism 1, and a leveling mechanism 2 and a vertical mechanism 3 are arranged on the flip mechanism 1, a polymer microsphere carrying mechanism 4 is arranged on the left side of the flip mechanism 1, and a driving mechanism 5 is arranged on the right side of the flip mechanism 1; After the driving mechanism 5 drives the leveling mechanism 2 to move left, the leveling mechanism 2 completes the clamping of the polymer microspheres processed on one side, and then the driving mechanism 5 drives the flipping mechanism 1, and the flipping mechanism 1 drives the polymer microsphere supporting mechanism 4 to complete the flipping through the leveling mechanism 2, and finally the driving mechanism 5 drives the vertical mechanism 3, and the vertical mechanism 3 drives the polymer microsphere supporting mechanism 4 to open again.

[0024] like Figure 3 As shown, the flip mechanism 1 includes a fixed plate 11, a rotating disk 12, a first gear ring 13, a threaded sleeve 14 and a second gear ring 15, wherein the fixed plate 11 is fixedly arranged in the vacuum chamber, the rotating disk 12 is rotatably arranged on the inner side of the fixed plate 11 through a bearing, the first gear ring 13 is fixedly sleeved on the outer left end of the rotating disk 12, the threaded sleeve 14 passes through the fixed plate 11 and is rotatably connected to the fixed plate 11 through a bearing, and the second gear ring 15 is fixedly sleeved on the outer left end of the threaded sleeve 14 and meshes with the first gear ring 13.

[0025] By setting the above structure, after the left end of the one-way screw 58 enters the inner side of the threaded sleeve 14, as the one-way screw 58 continues to move left, the threaded sleeve 14 rotates driven by the one-way screw 58. When the threaded sleeve 14 rotates, the second gear ring 15 and the first gear ring 13 drive the rotating disk 12 to rotate. When the rotating disk 12 rotates, it drives the leveling mechanism 2, the vertical mechanism 3 and the polymer microsphere supporting mechanism 4 to rotate synchronously.

[0026] like Figure 3 As shown, the leveling mechanism 2 includes a push rod 21, an end plate 22, a movable disk 23 and a first return spring 24, wherein the push rod 21 slides through the rotating disk 12 and fits with the upper connecting arm 43, the end plate 22 is fixedly arranged at the right end of the push rod 21, the movable disk 23 is rotatably nested on the right side of the end plate 22 through a bearing, and the first return spring 24 is fixedly connected between the rotating disk 12 and the end plate 22.

[0027] By setting the above structure, when the inner sleeve 56 moves to the left, it pushes the movable disk 23, and the movable disk 23 drives the end plate 22 to compress the first return spring 24, and drives the push rod 21 to move to the left.

[0028] like Figure 3 As shown, the vertical mechanism 3 includes a rack 31, a gear 32, an annular plate 33 and a second return spring 34, wherein two racks 31 and two gears 32 are each provided, the rack 31 slides through the rotating disk 12 and meshes with the adjacent gears 32, the two gears 32 are respectively fixedly arranged at the two ends of the lower rotating shaft 42, the annular plate 33 is slidably sleeved on the outside of the push rod 21 and is fixedly connected to the two racks 31, and the second return spring 34 is fixedly connected between the rotating disk 12 and the annular plate 33.

[0029] By setting the above structure, after the left side of the rotating plate 59 is fitted with the right side of the annular plate 33, as the rotating plate 59 continues to move left, the annular plate 33 compresses the second return spring 34 and drives the rack 31 to move left. During the leftward movement of the rack 31, the gear 32 is driven to rotate. When the gear 32 rotates, the base 46 is driven to rotate synchronously through the adjacent rotating shaft 42 and the connecting arm 43, so that the base 46 is gradually detached from the top of the multiple polymer microspheres to avoid obstruction in the subsequent processing process.

[0030] like Figure 4As shown, the polymer microsphere carrying mechanism 4 includes an H-shaped mounting seat 41, a rotating shaft 42, a connecting arm 43, a torsion spring 44, a limit block 45, a base 46 and a back plate 47, wherein the H-shaped mounting seat 41 is fixedly arranged at the left center of the rotating disk 12, and two rotating shafts 42 and connecting arms 43 are each provided, and the two rotating shafts 42 are penetrated and arranged at the inner top and inner bottom of the H-shaped mounting seat 41 and are rotatably connected to the H-shaped mounting seat 41 through bearings, and the two connecting arms 43 are respectively fixedly sleeved and arranged in the middle of the outer sides of the two rotating shafts 42, and the torsion spring 44 is sleeved and arranged on the outer side of the rotating shaft 42 and fixedly connected between the H-shaped mounting seat 41 and the connecting arm 43, the limit block 45 is fixedly arranged on the right side of the upper connecting arm 43, the base 46 is fixedly arranged at the left end of the lower connecting arm 43, and the back plate 47 is fixedly arranged at the top of the upper connecting arm 43.

[0031] By setting the above structure, when the push rod 21 moves to the left, it pushes the upper connecting arm 43, thereby causing it to rotate counterclockwise around the rotating shaft 42. When the connecting arm 43 rotates, it drives the back plate 47 at its top to rotate counterclockwise synchronously. The back plate 47 rotates from a vertical state to a horizontal state and covers the tops of multiple polymer microspheres. At this time, the left end of the push rod 21 is in contact with the limit block 45, and the limit block 45 blocks the push rod 21. Due to the obstruction of the limit block 45, the push rod 21 cannot continue to move to the left.

[0032] like Figure 5 As shown, the driving mechanism 5 includes a U-shaped frame 51, a reciprocating screw 52, ​​a driving motor 53, an outer sleeve 54, a third return spring 55, an inner sleeve 56, a T-shaped plate 57, a one-way screw 58 and a rotating plate 59; The U-shaped frame 51 is fixedly arranged on the right side of the fixed plate 11, the reciprocating screw 52 passes through the U-shaped frame 51 and is rotatably connected to the U-shaped frame 51 through a bearing, the driving motor 53 is fixedly arranged on the right side of the U-shaped frame 51 and is transmission-connected to the reciprocating screw 52, ​​the outer sleeve 54, the third return spring 55 and the inner sleeve 56 are sleeved and arranged on the outside of the reciprocating screw 52 in sequence from right to left, the outer sleeve 54 is transmission-connected to the reciprocating screw 52, ​​the third return spring 55 is fixedly connected between the outer sleeve 54 and the inner sleeve 56, the inner sleeve 56 is slidably connected to the reciprocating screw 52 and is slidably arranged on the inner side of the outer sleeve 54, the left end of the inner sleeve 56 is rotationally connected to the movable disk 23 through a bearing, the T-shaped plate 57 is fixedly sleeved and arranged on the left end of the outer side of the outer sleeve 54, the one-way screw 58 is fixedly arranged on the top left side of the T-shaped plate 57, and the rotating plate 59 is sleeved and arranged on the outside of the one-way screw 58 and is rotationally connected to the one-way screw 58 through a bearing.

[0033] By setting the above structure, the reciprocating screw 52 can be driven to rotate after the driving motor 53 is started, and the reciprocating screw 52 drives the outer sleeve 54 to move left when rotating. During the movement of the outer sleeve 54 to the left, the inner sleeve 56 is pushed by the third return spring 55, and the one-way screw 58 and the rotating plate 59 are driven to move left synchronously through the T-shaped plate 57. When the inner sleeve 56 cannot continue to move left, the third return spring 55 is continuously compressed as the outer sleeve 54 continues to move left, and the T-shaped plate 57 continues to drive the one-way screw 58 and the rotating plate 59 to move left.

[0034] The method specifically comprises the following steps: S1, loading the polymer microspheres to be processed into the groove on the top of the base 46 in sequence, with the bottom surface of the polymer microsphere abutting against the inner wall of the groove, and processing the exposed top surfaces of the plurality of polymer microspheres in sequence in the vacuum chamber by an ion beam; S2. After the processing is completed, the drive motor 53 is started. After the drive motor 53 is started, the reciprocating screw 52 is driven to rotate. When the reciprocating screw 52 rotates, the outer sleeve 54 is driven to move leftward. During the movement of the outer sleeve 54 to the left, the third return spring 55 pushes the inner sleeve 56, and the one-way screw 58 and the rotating plate 59 are driven to move leftward synchronously through the T-shaped plate 57. S3, when the inner sleeve 56 moves to the left, it pushes the movable disk 23, and the movable disk 23 drives the end plate 22 to compress the first return spring 24, and drives the push rod 21 to move to the left. When the push rod 21 moves to the left, it pushes the upper connecting arm 43, so that it rotates counterclockwise around the rotating shaft 42. When the connecting arm 43 rotates, it drives the back plate 47 at the top thereof to rotate counterclockwise synchronously; S4, when the leftward movement distance of the outer sleeve 54 reaches the first threshold, the back plate 47 rotates from the vertical state to the horizontal state and covers the top of the plurality of polymer microspheres. At this time, the left end of the push rod 21 is in contact with the limit block 45, and the limit block 45 blocks the push rod 21. Due to the obstruction of the limit block 45, the push rod 21 cannot continue to move left, that is, the end plate 22, the movable disk 23 and the inner sleeve 56 cannot continue to move left. Subsequently, as the outer sleeve 54 continues to move left, the third return spring 55 is continuously compressed, and at the same time, the T-shaped plate 57 continues to drive the one-way screw 58 and the rotating plate 59 to move left; S5, when the outer sleeve 54 moves to the left by a distance reaching a second threshold, the left end of the one-way screw 58 enters the inner side of the threaded sleeve 14, and as the one-way screw 58 continues to move to the left, the threaded sleeve 14 rotates under the drive of the one-way screw 58, and when the threaded sleeve 14 rotates, the second gear ring 15 and the first gear ring 13 drive the rotating disk 12 to rotate, and when the rotating disk 12 rotates, the leveling mechanism 2, the vertical mechanism 3 and the polymer microsphere bearing mechanism 4 rotate synchronously; S6, when the outer sleeve 54 moves to the left by a distance reaching the third threshold, the polymer microsphere bearing mechanism 4 rotates more than 150°, at which time the left side of the rotating plate 59 is in contact with the right side of the annular plate 33, and as the rotating plate 59 continues to move to the left, the annular plate 33 compresses the second return spring 34 and drives the rack 31 to move to the left, and the rack 31 drives the gear 32 to rotate during the left movement, and when the gear 32 rotates, it drives the base 46 to rotate synchronously through the adjacent rotating shaft 42 and the connecting arm 43, so that the base 46 gradually detaches from the top of the plurality of polymer microspheres; S7, when the outer sleeve 54 moves to the left by a distance reaching a fourth threshold, the polymer microsphere bearing mechanism 4 is flipped over, the base 46 rotates to a vertical state, and the back plate 47 is in a horizontal state to bear the multiple polymer microspheres. At this time, the outer sleeve 54 moves to the leftmost end of the reciprocating thread outside the reciprocating screw 52, ​​and the driving motor 53 is stopped, and the top exposed surfaces of the multiple polymer microspheres are processed again by the ion beam in sequence; S8, after the processing is completed, the vacuum chamber is opened and the processed polymer microspheres are removed, and then the polymer microspheres to be processed are placed on the top of the back plate 47 in a horizontal state and the vacuum chamber is evacuated, and then the top exposed surfaces of multiple polymer microspheres are processed in sequence by ion beam; S9. After the processing is completed, the drive motor 53 is started again. After the drive motor 53 is started, it continues to drive the reciprocating screw 52 to rotate. At this time, the outer sleeve 54 begins to move left and reset. During this process, the vertical mechanism 3, the leveling mechanism 2 and the polymer microsphere supporting mechanism 4 are reset in succession. The multiple polymers that have completed single-sided processing are transferred to the top of the horizontal base 46. At this time, the top exposed surfaces of the multiple polymer microspheres are processed in turn by the ion beam and the vacuum chamber is opened after the processing is completed to unload the polymer microspheres.

[0035] It should also be noted that the first threshold, the second threshold, the third threshold and the fourth threshold increase in sequence, and the first threshold, the second threshold, the third threshold and the fourth threshold are recorded for the convenience of accurately describing the actual working conditions of the scheme; When the solution of the present application is actually produced, according to the actual specifications of the reciprocating screw 52, ​​the first threshold value, the second threshold value, the third threshold value and the fourth threshold value are all specific values.

[0036] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for ion beam processing of polymer microspheres, characterized in that: The method for ion beam processing polymer microspheres is implemented by a polymer microsphere processing device, the polymer microsphere processing device comprising a flipping mechanism (1), the flipping mechanism (1) being provided with a leveling mechanism (2) and a vertical mechanism (3), the flipping mechanism (1) being provided with a polymer microsphere carrying mechanism (4) on the left side, and the flipping mechanism (1) being provided with a driving mechanism (5) on the right side; After the driving mechanism (5) drives the leveling mechanism (2) to move leftward, the leveling mechanism (2) completes clamping the polymer microspheres processed on one side, and then the driving mechanism (5) drives the flipping mechanism (1), and the flipping mechanism (1) drives the polymer microsphere supporting mechanism (4) to complete flipping through the leveling mechanism (2), and finally the driving mechanism (5) drives the vertical mechanism (3), and the vertical mechanism (3) drives the polymer microsphere supporting mechanism (4) to open again.

2. The method for ion beam processing polymer microspheres according to claim 1, characterized in that: The turning mechanism (1) comprises a fixed plate (11), a rotating disk (12), a first gear ring (13), a threaded sleeve (14) and a second gear ring (15); The fixed plate (11) is fixedly arranged in the vacuum chamber, the rotating disk (12) is rotatably arranged on the inner side of the fixed plate (11) via a bearing, the first gear ring (13) is fixedly sleeved on the outer left end of the rotating disk (12), the threaded sleeve (14) passes through the fixed plate (11) and is rotatably connected to the fixed plate (11) via a bearing, and the second gear ring (15) is fixedly sleeved on the outer left end of the threaded sleeve (14) and meshes with the first gear ring (13).

3. The method for ion beam processing polymer microspheres according to claim 2, characterized in that: The leveling mechanism (2) comprises a push rod (21), an end plate (22), a movable disk (23) and a first return spring (24); The push rod (21) slides through the rotating disk (12) and fits with the upper connecting arm (43); the end plate (22) is fixedly arranged at the right end of the push rod (21); the movable disk (23) is rotatably nested on the right side of the end plate (22) through a bearing; and the first return spring (24) is fixedly connected between the rotating disk (12) and the end plate (22).

4. The method for ion beam processing polymer microspheres according to claim 3, characterized in that: The vertical mechanism (3) comprises a rack (31), a gear (32), an annular plate (33) and a second return spring (34); Two racks (31) and two gears (32) are provided. The racks (31) slide through the rotating disk (12) and mesh with adjacent gears (32). The two gears (32) are respectively fixedly arranged at two ends of the lower rotating shaft (42). The annular plate (33) is slidably sleeved on the outside of the push rod (21) and is fixedly connected to the two racks (31). The second return spring (34) is fixedly connected between the rotating disk (12) and the annular plate (33).

5. The method for ion beam processing polymer microspheres according to claim 4, characterized in that: The polymer microsphere bearing mechanism (4) comprises an H-shaped mounting seat (41), a rotating shaft (42), a connecting arm (43), a torsion spring (44), a limit block (45), a base (46) and a back plate (47); The H-shaped mounting seat (41) is fixedly arranged at the center of the left side of the rotating disk (12); two rotating shafts (42) and two connecting arms (43) are each provided; the two rotating shafts (42) are arranged through the inner top and inner bottom of the H-shaped mounting seat (41) and are rotatably connected to the H-shaped mounting seat (41) through bearings; the two connecting arms (43) are respectively fixedly sleeved and arranged at the middle of the outer sides of the two rotating shafts (42); the torsion spring (44) is sleeved and arranged on the outer sides of the rotating shafts (42) and is fixedly connected between the H-shaped mounting seat (41) and the connecting arm (43); the limit block (45) is fixedly arranged on the right side of the upper connecting arm (43); the base (46) is fixedly arranged on the left end of the lower connecting arm (43); and the back plate (47) is fixedly arranged on the top of the upper connecting arm (43).

6. The method for ion beam processing polymer microspheres according to claim 5, characterized in that: The driving mechanism (5) comprises a U-shaped frame (51), a reciprocating screw (52), a driving motor (53), an outer sleeve (54), a third return spring (55) and an inner sleeve (56); The U-shaped frame (51) is fixedly arranged on the right side of the fixed plate (11); the reciprocating screw (52) penetrates the U-shaped frame (51) and is rotatably connected to the U-shaped frame (51) via a bearing; the driving motor (53) is fixedly arranged on the right side of the U-shaped frame (51) and is transmission-connected to the reciprocating screw (52); the outer sleeve (54), the third return spring (55) and the inner sleeve (56) are sleeved and arranged on the outside of the reciprocating screw (52) in sequence from right to left; the outer sleeve (54) is transmission-connected to the reciprocating screw (52); the third return spring (55) is fixedly connected between the outer sleeve (54) and the inner sleeve (56); the inner sleeve (56) is slidably connected to the reciprocating screw (52) and is slidably arranged on the inner side of the outer sleeve (54); and the left end of the inner sleeve (56) is rotationally connected to the movable disk (23) via a bearing.

7. The method for ion beam processing polymer microspheres according to claim 6, characterized in that: The driving mechanism (5) further comprises a T-shaped plate (57), a one-way screw rod (58) and a rotating plate (59); The T-shaped plate (57) is fixedly sleeved on the left end of the outer side of the outer sleeve (54), the one-way screw (58) is fixedly arranged on the top of the left side of the T-shaped plate (57), and the rotating plate (59) is sleeved on the outer side of the one-way screw (58) and is rotatably connected to the one-way screw (58) via a bearing.

8. The method for ion beam processing polymer microspheres according to claim 7, characterized in that: The method specifically comprises the following steps: S1, sequentially loading the polymer microspheres to be processed into the groove on the top of the base (46), wherein the bottom surface of the polymer microspheres abuts against the inner wall of the groove, and sequentially processing the exposed top surfaces of the plurality of polymer microspheres by an ion beam in a vacuum chamber; S2, after the processing is completed, the driving motor (53) is started, and the driving motor (53) is started to drive the reciprocating screw (52) to rotate. When the reciprocating screw (52) rotates, the outer sleeve (54) is driven to move leftward. During the movement of the outer sleeve (54) to the left, the third return spring (55) pushes the inner sleeve (56), and the one-way screw (58) and the rotating plate (59) are driven to move leftward synchronously through the T-shaped plate (57); S3, when the inner sleeve (56) moves to the left, it pushes the movable disk (23), and the movable disk (23) drives the end plate (22) to compress the first return spring (24), and at the same time drives the push rod (21) to move to the left. When the push rod (21) moves to the left, it pushes the upper connecting arm (43), thereby causing it to rotate counterclockwise around the rotating shaft (42). When the connecting arm (43) rotates, it drives the back plate (47) at the top thereof to rotate counterclockwise synchronously; S4, when the distance of the outer sleeve (54) moving to the left reaches a first threshold, the back plate (47) rotates from a vertical state to a horizontal state and covers the tops of the plurality of polymer microspheres. At this time, the left end of the push rod (21) is in contact with the limit block (45), and the limit block (45) blocks the push rod (21). Due to the obstruction of the limit block (45), the push rod (21) cannot continue to move to the left, that is, the end plate (22), the movable plate (23) and the inner sleeve (56) cannot continue to move to the left. Subsequently, as the outer sleeve (54) continues to move to the left, the third return spring (55) is continuously compressed, and at the same time, the T-shaped plate (57) continues to drive the one-way screw (58) and the rotating plate (59) to move to the left; S5, when the distance of the outer sleeve (54) moving to the left reaches a second threshold, the left end of the one-way screw (58) enters the inner side of the threaded sleeve (14), and as the one-way screw (58) continues to move to the left, the threaded sleeve (14) rotates under the drive of the one-way screw (58), and when the threaded sleeve (14) rotates, the second gear ring (15) and the first gear ring (13) drive the rotating disk (12) to rotate, and when the rotating disk (12) rotates, the leveling mechanism (2), the vertical mechanism (3) and the polymer microsphere bearing mechanism (4) are driven to rotate synchronously; S6, when the distance of the leftward movement of the outer sleeve (54) reaches the third threshold, the polymer microsphere bearing mechanism (4) rotates more than 150 degrees, and at this time, the left side of the rotating plate (59) is in contact with the right side of the annular plate (33). Subsequently, as the rotating plate (59) continues to move left, the annular plate (33) compresses the second return spring (34) and drives the rack (31) to move left at the same time. During the leftward movement of the rack (31), the gear (32) is driven to rotate. When the gear (32) rotates, it drives the base (46) to rotate synchronously through the adjacent rotating shaft (42) and the connecting arm (43), thereby causing the base (46) to gradually detach from the top of the plurality of polymer microspheres; S7, when the distance of the leftward movement of the outer sleeve (54) reaches the fourth threshold value, the polymer microsphere bearing mechanism (4) is flipped over, the base (46) is rotated to a vertical state, and the back plate (47) is in a horizontal state to bear the plurality of polymer microspheres. At this time, the outer sleeve (54) moves to the leftmost end of the reciprocating thread outside the reciprocating screw (52), and the driving motor (53) is stopped while the top exposed surfaces of the plurality of polymer microspheres are processed again in sequence by the ion beam; S8, after the processing is completed, the vacuum chamber is opened and the processed polymer microspheres are removed, and then the polymer microspheres to be processed are placed on the top of the back plate (47) in a horizontal state and the vacuum chamber is evacuated, and then the top exposed surfaces of multiple polymer microspheres are processed in sequence by ion beam; S9, after the processing is completed, the drive motor (53) is started again. After the drive motor (53) is started, it continues to drive the reciprocating screw (52) to rotate. At this time, the outer sleeve (54) begins to move left and reset. During this process, the vertical mechanism (3), the leveling mechanism (2) and the polymer microsphere supporting mechanism (4) are reset in succession. The multiple polymers that have completed single-sided processing are transferred to the top of the horizontal base (46). At this time, the top exposed surfaces of the multiple polymer microspheres are processed in turn by the ion beam, and after the processing is completed, the vacuum chamber is opened to discharge the polymer microspheres.

Images