A vacuum door valve and display panel vacuum baking equipment

Abstract

The present invention discloses a vacuum door valve and a display panel vacuum baking device, which relate to the field of valve technology. A vacuum door valve provides stable support for the sealing plate by setting two piston rods, the second cylinder and the guide mechanism. The guide mechanism is designed to guide the movement direction of the sealing plate, so that the sealing plate can smoothly reciprocate under the drive of the second cylinder, avoiding the sealing plate from tilting when performing the back-and-forth reciprocating motion, ensuring a good sealing effect when the sealing plate seals the external sealing hole; a display panel vacuum baking device, which is equipped with a vacuum door valve with high-efficiency sealing performance, realizes reliable sealing and opening of the cavity a in the baking box, ensuring that the product can be baked in a sealed vacuum environment, thereby improving the baking quality of the product.

Description

Technical Field

[0001] The present invention relates to the field of valve technology, and in particular to a vacuum door valve and a display panel vacuum baking device. Background Art

[0002] The vacuum gate valve is an indispensable component for connecting the display panel vacuum baking equipment with the cavities in the line body. It can ensure the transmission of products (such as glass substrates) in different vacuum environments and meet the independent control requirements of the display panel vacuum baking equipment.

[0003] For large-sized vacuum gate valves, especially those in the display panel vacuum industry, two or three cylinders are used for driving. It is found that when multiple cylinders are used for driving, the movement speed of each cylinder is difficult to adjust to the same. As a result, the gate valve plate is prone to tilting when opening or closing, resulting in unstable operation, which in turn affects the sealing effect of the external sealing hole. Summary of the invention

[0004] In order to solve the above-mentioned shortcomings in the prior art, the present invention provides a vacuum door valve and a display panel vacuum baking device.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is as follows:

[0006] A vacuum gate valve includes a first cylinder, a second cylinder, a sealing plate, a guide mechanism and a mounting seat, wherein the first cylinder includes two piston rods, the mounting seat is fixed on the two piston rods of the first cylinder, the second cylinder is mounted on the mounting seat, the sealing plate is arranged on the second cylinder, the second cylinder drives the sealing plate to reciprocate, the sealing plate is used to seal the sealing hole of an external device, and the guide mechanism guides the direction in which the sealing plate is driven by the second cylinder to move. By providing the two piston rods, the second cylinder and the guide mechanism, a stable support is provided for the sealing plate, and the guide mechanism guides the movement direction of the sealing plate, so that the sealing plate can reciprocate smoothly when driven by the second cylinder, and the sealing plate is prevented from tilting when reciprocating back and forth, thereby ensuring a good sealing effect when the sealing plate seals the external device.

[0007] Furthermore, the guide mechanism includes a guide shaft and a guide shaft sleeve b, a through hole is provided on the mounting seat, one end of the guide shaft is inserted into the through hole, the guide shaft and the through hole can slide relative to each other, a groove adapted to the guide shaft sleeve b is provided on the sealing plate, the guide shaft sleeve b is fixed on the groove, the guide shaft sleeve b is sleeved on the other end of the guide shaft in a one-to-one correspondence, and the guide shaft sleeve b and the guide shaft can slide relative to each other. The design of the guide shaft allows it to slide relative to each other in the through hole, and at the same time, the sliding fit between the guide shaft sleeve b and the guide shaft provides a stable support for the sealing plate and effectively guides the movement of the sealing plate, thereby making the movement of the sealing plate more controllable and stable. In addition, the guide shaft sleeve b can effectively reduce the friction and wear of the guide shaft in the reciprocating motion, thereby extending the service life of the guide shaft.

[0008] Furthermore, the vacuum gate valve further comprises a limit cover, the limit cover is provided at one end of the through hole away from the sealing plate, the limit cover is mounted on the mounting seat, and the limit cover limits the movement distance of the guide shaft. The design of the limit cover ensures that the guide shaft moves within a specified stroke, and also plays a role in protecting the guide shaft and preventing dust.

[0009] Furthermore, the first cylinder includes a rectangular piston and a piston cylinder. The shape of the piston cylinder is rectangular, the corners of the piston cylinder are transitioned with rounded corners, and the rectangular piston is adapted to the inner wall of the piston cylinder. The rectangular design of the piston cylinder provides better guidance for the movement of the piston rod, further ensuring that the sealing plate can reciprocate up and down parallel to the sealing hole. At the same time, the corners of the piston cylinder are transitioned with rounded corners, so that the rectangular piston and the inner wall of the piston cylinder are closely matched, further improving the sealing effect of the piston cylinder, thereby improving the working efficiency of the first cylinder. The corners of the piston cylinder are transitioned with rounded corners, which can also effectively disperse stress and reduce the risk of cracks or damage that may be caused by local stress concentration. These design improvements work together to improve the overall performance and reliability of the vacuum gate valve.

[0010] Furthermore, the vacuum gate valve further includes two guide sleeves a, which are arranged on the inner cavity of the piston cylinder, and the two piston rods are respectively inserted into the two guide sleeves a, and the guide sleeves a and the piston rod can slide relative to each other, and the guide sleeves a are used to guide the piston rod. By arranging two guide sleeves a in the inner cavity of the piston cylinder, a guiding mechanism is provided for the piston rod, ensuring the stability and linearity of the piston rod during movement. In addition, the design of the guide sleeves reduces the direct contact and friction between the piston rod and the piston cylinder, thereby reducing the wear of the piston rod, thereby extending the service life of the piston rod.

[0011] Furthermore, the vacuum gate valve further comprises a first sealing ring, which is arranged on the rectangular piston, the piston cylinder is provided with a rod chamber and a rodless chamber, and the first sealing ring and the rectangular piston seal and isolate the rod chamber and the rodless chamber. Through the cooperation of the first sealing ring and the rectangular piston, effective sealing and isolation of the two chambers is achieved.

[0012] Furthermore, the vacuum gate valve further comprises a mechanical sensor a and a mechanical sensor b, wherein the mechanical sensor a is located in the rod cavity, and the mechanical sensor b is located in the rodless cavity, and the mechanical sensor a and the mechanical sensor b are respectively arranged at both ends of the rectangular piston stroke. By setting the mechanical sensor a and the mechanical sensor b, the operating state of the vacuum gate valve can be accurately monitored in real time, and the response speed of the system can be improved.

[0013] Furthermore, the vacuum gate valve further comprises a first buffer plug, which is arranged on the sealing plate and located between the sealing plate and the mounting seat. The arrangement of the first buffer plug can effectively buffer the impact of the sealing plate on the mounting seat during the reciprocating motion, thereby reducing the risk of damage to the sealing plate and the mounting seat due to repeated impacts.

[0014] Furthermore, the vacuum gate valve further comprises a second buffer plug, which is arranged on the rectangular piston. The arrangement of the second buffer plug can effectively buffer the impact of the rectangular piston at both ends of the stroke, which helps to extend the service life of the vacuum gate valve and reduce maintenance costs.

[0015] Furthermore, the second cylinder includes a cylinder shaft, a cylinder piston a and a cylinder piston b. The mounting seat is provided with a first chamber, a second chamber and a connecting chamber. The first chamber, the connecting chamber and the second chamber are interconnected. The connecting chamber is located between the first chamber and the second chamber. The cylinder piston a is located in the first chamber and can slide relative to the first chamber. The cylinder piston b is located in the second chamber and can slide relative to the second chamber. The cylinder shaft penetrates the connecting chamber and can slide relative to the connecting chamber. The cylinder piston a and the cylinder piston b are located in different chambers, respectively, so that the two cylinder pistons can be accommodated and independently controlled. The design of the connecting chamber can accommodate the cylinder shaft. The modular cylinder structure design enables the movement of the second cylinder to be precisely controlled, thereby improving the functionality and operational flexibility of the second cylinder.

[0016] Furthermore, the second chamber is smaller than the first chamber, the first chamber is used for inflation, and the inflation gas pushes the cylinder piston a to move toward the sealing plate, and the second chamber is used for inflation, and the inflation gas pushes the cylinder piston b to move away from the sealing plate. The second chamber is small in size, so its inflation speed is fast, so that the second cylinder can quickly drive the sealing plate away from the sealing hole, effectively speeding up the opening speed of the vacuum door valve; at the same time, the first chamber is used for inflation to push the cylinder piston a to move toward the sealing plate, so that the second cylinder can drive the sealing plate close to the sealing hole to achieve sealing of the sealing hole.

[0017] Furthermore, one end of the cylinder shaft passes through the first chamber and is fixedly connected to the cylinder piston a; the cylinder piston a drives the cylinder shaft to move in a direction close to the sealing plate, thereby realizing direct transmission of power from the cylinder piston a to the cylinder shaft. The fixed connection between the cylinder shaft and the cylinder piston a ensures that the power transmission from the cylinder piston a to the cylinder shaft is direct and effective, thereby improving the efficiency of movement.

[0018] Furthermore, the other end of the cylinder shaft passes through the second chamber and is fixedly connected to the cylinder piston b; the cylinder shaft extends from the second chamber, and the cylinder piston b is used to drive the cylinder shaft to move in a direction away from the sealing plate. The fixed connection between the cylinder shaft and the cylinder piston b realizes the direct transmission of power from the cylinder piston b to the cylinder shaft.

[0019] Furthermore, the vacuum gate valve further includes a second sealing ring, which is provided between the first chamber and the second chamber, and is used to seal and isolate the first chamber and the second chamber, thereby effectively preventing gas leakage or mutual interference between the two chambers and ensuring the stability and reliability of the second cylinder.

[0020] Furthermore, a display panel vacuum baking device comprises a baking oven and the vacuum door valve described above, wherein a cavity a is provided in the baking oven, the sealing port connected to the cavity a is provided on the baking oven, and the first cylinder is provided on the baking oven. By equipping the vacuum door valve with high-efficiency sealing performance, the cavity a in the baking oven is reliably sealed and opened, ensuring that the product can be baked in a sealed vacuum environment, thereby improving the baking quality of the product.

[0021] Furthermore, the two piston rods drive the sealing plate to move toward the sealing opening; the end of the travel of the sealing plate moving toward the sealing opening is located directly in front of the sealing opening. The two piston rods are driven to move by a single air source of the first cylinder, ensuring that the two piston rods move at the same speed, and the sealing plate can be driven to move smoothly by the two piston rods, reducing the risk of the sealing plate tilting during movement.

[0022] Furthermore, the cylinder shaft drives the sealing plate to reciprocate along the depth direction of the cavity a; the sealing plate fits with the sealing opening at the end of the stroke when it moves in the depth direction of the cavity a. The sealing plate can fit with the sealing opening at the end of the stroke to form an effective sealing interface, which helps to prevent gas or liquid leakage in the cavity a and ensures the sealing and uniformity of the baking process.

[0023] The beneficial effects of a vacuum gate valve of the present invention are:

[0024] By arranging the two piston rods, the second cylinder and the guide mechanism, stable support is provided for the sealing plate. The guide mechanism is designed to guide the movement direction of the sealing plate, so that the sealing plate can smoothly reciprocate when driven by the second cylinder, avoiding the sealing plate from tilting when performing the back-and-forth reciprocating motion, thereby ensuring a good sealing effect when the sealing plate seals the external sealing hole.

[0025] The beneficial effects of a display panel vacuum baking device of the present invention are:

[0026] By equipping the vacuum door valve with high-efficiency sealing performance, the cavity a in the baking oven can be reliably sealed and opened, ensuring that the product can be baked in a sealed vacuum environment, thereby improving the quality of product baking. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0028] Figure 1 This is a schematic diagram of the overall structure of a vacuum baking device for a display panel according to the present invention;

[0029] Figure 2 This is a schematic diagram of the overall structure of a vacuum gate valve of the present invention;

[0030] Figure 3 A partial cross-sectional view of a first cylinder of a vacuum gate valve of the present invention;

[0031] Figure 4 This is a cross-sectional view of a second cylinder and a sealing plate of a vacuum gate valve of the present invention.

[0032] In the attached figure:

[0033] 1. First cylinder; 11. Piston rod; 12. Rectangular piston; 13. Piston cylinder; 131. Rod chamber; 132. Rodless chamber; 15. Mechanical sensor a; 16. Mechanical sensor b; 2. Second cylinder; 21. Cylinder shaft; 22. Cylinder piston a; 23. Cylinder piston b; 3. Sealing plate; 31- Groove; 4- Guide mechanism; 5- Mounting seat; 51- Through hole; 52- First chamber; 53- Second chamber; 54- Connecting chamber; 6. Limiting cover; 7. First sealing ring; 41. Guide belt; 42. Guide shaft; 43. Guide shaft sleeve a; 44. Guide shaft sleeve b; 9. Sealing port; 10. Baking oven; 17. Cavity a; 18. Cavity cover; 19. First buffer plug; 20- Second buffer plug. DETAILED DESCRIPTION

[0034] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] Example 1

[0036] like Figure 1-4As shown, a vacuum gate valve comprises a first cylinder 1, a second cylinder 2, a sealing plate 3, a guide mechanism 4 and a mounting seat 5, wherein the first cylinder 1 comprises two piston rods 11, and the mounting seat 5 is fixed on the two piston rods 11 of the first cylinder 1. For the large-sized vacuum gate valve, the sealing plate 3 has a relatively large length, and may tilt during driving, which may cause the problem of unstable operation effect, thereby causing the contact between the sealing plate 3 and the sealing hole to be no longer uniform during the opening and closing process of the vacuum gate valve, and the sealing effect is unstable, and the vacuum gate valve may even be damaged. The first cylinder 1 must have at least two or more piston rods 11, and the two or more piston rods 11 The mounting base 5 can be supported across a distance, and multiple fulcrums are distributed at different positions of the mounting base 5, so that the mounting base 5 can be kept horizontal and stable. The second cylinder 2 is installed on the mounting base 5, and the sealing plate 3 is arranged on the second cylinder 2. The second cylinder 2 drives the sealing plate 3 to reciprocate. The sealing plate 3 is used to seal the sealing hole of the external device. The guide mechanism 4 guides along the direction in which the second cylinder 2 drives the sealing plate 3 to move. The number of the second cylinder 2 and the guide mechanism 4 can be increased according to the length of the sealing plate 3. Such a design provides good scalability to meet the requirements of the vacuum gate valves of different sizes to be driven smoothly. The two piston rods 11, the second cylinder 2 and the guide mechanism 4 provide stable support for the sealing plate 3. The design of the guide mechanism 4 guiding the movement direction of the sealing plate 3 enables the sealing plate 3 to reciprocate smoothly under the drive of the second cylinder 2, avoiding the sealing plate 3 from tilting when performing the back and forth reciprocating motion, and ensuring the good sealing effect of the sealing plate 3 when sealing the external device.

[0037] The guide mechanism 4 includes a guide shaft 42 and a guide shaft sleeve b44. A through hole 51 is provided on the mounting seat 5. One end of the guide shaft 42 is inserted into the through hole 51. The guide shaft 42 and the through hole 51 can slide relative to each other. A groove 31 adapted to the guide shaft sleeve b44 is provided on the sealing plate 3. The guide shaft sleeve b44 is fixed on the groove 31. The guide shaft sleeve b44 is sleeved on the other end of the guide shaft 42 one by one. The guide shaft sleeve b44 and the guide shaft 42 can slide relative to each other in a short stroke of 3 to 5 mm. This design ensures the accurate and smooth guiding of the sealing plate 3 during reciprocating motion, reduces deviations and errors during motion, and improves the accuracy of motion. The design of the guide shaft 42 allows it to slide relatively in the through hole 51. At the same time, the sliding fit between the guide shaft sleeve b44 and the guide shaft 42 provides a mechanism that provides stable support for the sealing plate 3 and effectively guides the movement of the sealing plate 3, thereby making the movement of the sealing plate 3 more controllable and smooth. In addition, the guide shaft sleeve b can effectively reduce the friction and wear of the guide shaft 42 during reciprocating motion, thereby extending the service life of the guide shaft 42.

[0038] The vacuum gate valve further includes a limit cover 6, and the limit cover 6 is provided at one end of the through hole 51 away from the sealing plate 3, and the limit cover 6 is mounted on the mounting seat 5, and the limit cover 6 limits the movement distance of the guide shaft 42. The design of the limit cover 6 ensures that the guide shaft 42 moves within a specified stroke, and also plays a role in protecting the guide shaft 42 and preventing dust.

[0039] The first cylinder 1 includes a rectangular piston 12 and a piston cylinder 13. The shape of the piston cylinder 13 is rectangular, and the corners of the piston cylinder 13 are rounded, which helps to disperse stress; the rectangular piston 12 is adapted to the inner wall of the piston cylinder 13, which helps to improve the sealing effect of the piston cylinder 13; the rectangular design of the piston cylinder 13 provides better guidance for the movement of the piston rod 11, and further ensures that the sealing plate 3 can reciprocate up and down parallel to the sealing hole. At the same time, the corners of the piston cylinder 13 are rounded, so that the rectangular piston 12 and the inner wall of the piston cylinder 13 are closely matched, which further improves the sealing effect of the piston cylinder 13, thereby improving the working efficiency of the first cylinder 1, and the corners of the piston cylinder 13 are rounded, which can also effectively disperse stress and reduce the risk of cracks or damage to the piston cylinder 13 due to local stress concentration. These design improvements work together to improve the overall performance and reliability of the vacuum gate valve.

[0040] The vacuum gate valve also includes a guide belt 41, which is arranged on the rectangular piston 12 and between the inner cavity of the rectangular piston 12 and the piston cylinder 13. The guide belt 41 has a guiding function. The guide belt 41 is made of PTFE (polytetrafluoroethylene) material. The PTFE (polytetrafluoroethylene) material contains carbon additives, so it has the characteristics of high load capacity (high compressive strength), low wear rate and low friction coefficient. It is suitable for oil-containing air and dry and oil-free air environments, and can effectively reduce the friction between the inner cavities of the rectangular piston 12 and the inner cavity of the piston cylinder 13, and play a good guiding role in the movement of the rectangular piston 12.

[0041] The vacuum gate valve also includes two guide sleeves a43, which are arranged on the inner cavity of the piston cylinder 13. The two piston rods 11 are respectively inserted into the two guide sleeves a43. The guide sleeves a43 and the piston rod 11 can slide relative to each other, and the guide sleeves a43 are used to guide the piston rod 11. By arranging two guide sleeves a in the inner cavity of the piston cylinder 13, a guiding mechanism is provided for the piston rod 11, ensuring the stability and linearity of the piston rod 11 during movement. In addition, the design of the guide sleeves a43 reduces the direct contact and friction between the piston rod 11 and the piston cylinder 13, thereby reducing the wear of the piston rod 11 and extending the service life of the piston rod 11.

[0042] The vacuum gate valve further includes a first sealing ring 7, which is disposed on the rectangular piston 12. The piston cylinder 13 is provided with a rod chamber 131 and a rodless chamber 132. The first sealing ring 7 and the rectangular piston 12 seal and isolate the rod chamber 131 and the rodless chamber 132, ensuring that the rod chamber 131 has better airtightness. Through the cooperation of the first sealing ring 7 and the rectangular piston 12, effective sealing isolation of the two chambers is achieved.

[0043] The vacuum gate valve further includes a mechanical sensor a15 and a mechanical sensor b16, wherein the mechanical sensor a15 is located in the rod chamber 131, and the mechanical sensor b16 is located in the rodless chamber 132. The mechanical sensor a15 and the mechanical sensor b16 are respectively arranged at both ends of the stroke of the rectangular piston 12, and the mechanical sensor a15 and the mechanical sensor b16 are both used to detect the touch of the rectangular piston 12. By setting the mechanical sensor a15 and the mechanical sensor b16, the operating state of the vacuum gate valve can be accurately monitored in real time, and the response speed of the system can be improved.

[0044] The vacuum gate valve also includes a central controller, the mechanical sensor a15 is communicatively connected to the central controller, the mechanical sensor b16 is communicatively connected to the central controller, the mechanical sensor a15 sends a vacuum gate valve closing signal to the central controller, and the mechanical sensor b16 sends a vacuum gate valve opening signal to the central controller. The central controller is used to receive and process the opening signal and closing signal of the vacuum gate valve, and send the signal processing result to the display panel, so that the operator can monitor the switching state of the vacuum gate valve in real time, thereby enhancing the interactivity of the system and the user experience. The signal processing result includes the switching state of the vacuum gate valve, and the switching state of the vacuum gate valve is displayed through the display panel; through the cooperation of the mechanical sensor a15 and the mechanical sensor b16 with the central controller, the automatic detection of the switching state of the vacuum gate valve is realized, thereby improving the degree of automation of the equipment.

[0045] The vacuum gate valve also includes a first buffer plug 19, which is arranged on the sealing plate 3 and located between the sealing plate 3 and the mounting seat 5. The first buffer plug 19 is used to buffer the impact of the sealing plate 3 on the mounting seat 5 during the reciprocating motion, thereby preventing the sealing plate 3 and the mounting seat 5 from being damaged due to repeated impacts.

[0046] The vacuum gate valve also includes a second buffer plug 20, which is arranged on the rectangular piston 12. The second buffer plug 20 is used to buffer the impact of the rectangular piston 12 at both ends of the stroke. Through the setting of the second buffer plug 20, the impact of the rectangular piston 12 at both ends of the stroke can be effectively buffered, which helps to extend the service life of the vacuum gate valve and reduce maintenance costs.

[0047] The second cylinder 2 includes a cylinder shaft 21, a cylinder piston a22 and a cylinder piston b23. The mounting seat 5 is provided with a first chamber 52, a second chamber 53 and a connecting chamber 54. The first chamber 52, the connecting chamber 54 and the second chamber 53 are interconnected. The connecting chamber 54 is located between the first chamber 52 and the second chamber 53. The cylinder piston a22 is located in the first chamber 52. The cylinder piston a22 and the first chamber 52 can slide relative to each other. The cylinder piston b23 is located in the second chamber 53. The cylinder piston b23 and the second chamber 53 are relatively slidable; the cylinder piston a22 and the cylinder piston b23 are respectively located in different chambers, which can accommodate and independently control the two cylinder pistons. The cylinder shaft 21 is inserted into the connecting chamber 54, and the cylinder shaft 21 and the connecting chamber 54 are relatively slidable. The connecting chamber 54 accommodates the cylinder shaft 21. The modular cylinder structure design enables the movement of the second cylinder 2 to be precisely controlled, thereby improving the functionality and operational flexibility of the second cylinder 2.

[0048] The second chamber 53 is smaller than the first chamber 52. The first chamber 52 is used for inflation, and the inflation gas pushes the cylinder piston a22 to move toward the sealing plate 3; so that the second cylinder 2 can drive the sealing plate 3 to approach the sealing hole to achieve the sealing of the sealing hole; the second chamber 53 is used for inflation, and the inflation gas pushes the cylinder piston b23 to move away from the sealing plate 3; the second chamber 53 is smaller than the first chamber 52, so the speed of filling the second chamber 53 with gas is faster than that of the first chamber 52, and the movement speed of the cylinder piston b23 is faster than that of the cylinder piston a22; when the vacuum gate valve is opened, the sealing plate 3 needs to be quickly moved toward the installation hole. The seat 5 retracts, and the second chamber 53, by utilizing the characteristics of its small cylinder cavity, can be quickly inflated to push the cylinder piston b23, so that the second cylinder 2 can quickly drive the sealing plate 3 away from the sealing hole, effectively accelerating the opening speed of the vacuum gate valve; during the recovery of the sealing plate 3, the first cylinder 1 simultaneously drives the sealing plate 3 to descend through the two piston rods 11; the sealing plate 3 can be quickly retracted, reducing the contact between the sealing plate 3 and the sealing hole and the possible friction damage during the opening process of the vacuum gate valve, thereby protecting the sealing plate 3 and extending its service life; at the same time, this rapid response mechanism also improves the overall working efficiency of the vacuum gate valve.

[0049] One end of the cylinder shaft 21 passes through the first chamber 52 and is fixedly connected to the cylinder piston a22; the cylinder piston a22 drives the cylinder shaft 21 to move toward the sealing plate 3. The fixed connection between the cylinder shaft 21 and the cylinder piston a22 ensures that the power transmission from the cylinder piston a22 to the cylinder shaft 21 is direct and effective, thereby improving the efficiency of the movement.

[0050] The other end of the cylinder shaft 21 passes through the second chamber 53 and is fixedly connected to the cylinder piston b23; the cylinder shaft 21 extends from the second chamber 53, and the cylinder piston b23 is used to drive the cylinder shaft 21 to move in a direction away from the sealing plate 3. The fixed connection between the cylinder shaft 21 and the cylinder piston b23 realizes the direct transmission of power from the cylinder piston b23 to the cylinder shaft 21.

[0051] The vacuum gate valve also includes a second sealing ring 24, which is provided between the first chamber 52 and the second chamber 53. The second sealing ring 24 is used to seal and isolate the first chamber 52 and the second chamber 53, effectively preventing gas leakage or mutual interference between the two chambers, and ensuring the stability and reliability of the second cylinder 2.

[0052] A display panel vacuum baking device includes a baking oven 10 and the vacuum door valve described above. The baking oven 10 is provided with a cavity a17. By using the vacuum door valve, the baking oven 10 can maintain the required vacuum degree. The baking oven 10 is provided with the sealing port 9 connected to the cavity a17. The first cylinder 1 is provided on the baking oven 10. The setting of the first cylinder 1 can provide a stable operating force to ensure the reliable sealing and opening of the vacuum door valve. By equipping the vacuum door valve with high-efficiency sealing performance, the cavity a17 in the baking oven 10 can be reliably sealed and opened, ensuring that the product can be baked in a sealed vacuum environment, thereby improving the baking quality of the product.

[0053] The two piston rods 11 drive the sealing plate 3 to move toward the sealing port 9; the end of the movement of the sealing plate 3 toward the sealing port 9 is located directly in front of the sealing port 9, and the first cylinder 1 accurately controls the movement of the sealing plate 3 through the two piston rods 11 to ensure that the sealing plate 3 can be accurately positioned directly in front of the sealing port 9. The two piston rods 11 are driven to move by a single air source of the first cylinder 1, ensuring that the movement speeds of the two piston rods 11 are consistent. The two piston rods 11 can drive the sealing plate 3 to move smoothly, reducing the risk of the sealing plate 3 being tilted during movement and improving the reliability of sealing.

[0054] The cylinder shaft 21 drives the sealing plate 3 to reciprocate along the depth direction of the cavity a17; the sealing plate 3 fits with the sealing port 9 at the end of the travel of the movement in the depth direction of the cavity a17. After the sealing port 9 is sealed, the cavity a17 is evacuated and the product (such as a glass substrate) is vacuum-baked. This environment helps to improve the baking quality, reduce the risk of oxidation of the product (such as a glass substrate) during the baking process, and can improve the baking efficiency and save energy. The sealing plate 3 can fit with the sealing port 9 at the end of the travel, forming an effective sealing interface, which helps to prevent the leakage of gas or liquid in the cavity a and ensure the sealing and uniformity of the baking process.

[0055] The display panel vacuum baking equipment further includes a cavity cover 18, which is on the cavity a17. When the interior of the cavity a17 needs to be repaired, cleaned, and maintained, the cavity cover 18 can be opened.

[0056] The display panel vacuum baking equipment also includes a vacuum baking heating plate contained in the cavity a17, and the vacuum baking heating plate can bake the product (such as a glass substrate) in a vacuum environment.

[0057] Working process of the display panel vacuum baking equipment: when the product (such as a glass substrate) needs to enter the cavity a17 for a vacuum baking process, gas is first introduced into the cavity a17 to ensure that the air pressure inside the cavity a17 is consistent with the air pressure outside the cavity a17, and the sealing plate 3 is quickly retracted toward the mounting seat 5, and at the same time the sealing plate 3 descends, the vacuum door valve is opened, and the manipulator sends the product into the cavity a17 and places it on the vacuum baking heating plate. After placing the product, the manipulator withdraws, and the sealing plate 3 is driven to rise by the first cylinder 1 and moves to the front of the sealing port 9. The second cylinder 2 drives the sealing plate 3 to move in the depth direction of the cavity a17 until it is in contact with the sealing port 9. The sealing of the cavity a17 is completed, the cavity a17 is evacuated, and the product is vacuum-baked.

[0058] The action flow when the vacuum gate valve is closed is as follows: the first cylinder 1 takes in air, and the inflation gas pushes the rectangular piston 12 to rise, and the rectangular piston 12 drives the piston rod 11 to rise, and the piston rod 11 drives the mounting seat 5 and the sealing plate 3 to rise, and the sealing plate 3 moves to the front of the sealing port 9, and the mechanical sensor a15 senses the touch of the rectangular piston 12, and sends a vacuum gate valve closing signal to the central controller, and the central controller is used to receive and process the vacuum gate valve closing signal, and send the signal processing result to the display panel, and the second cylinder 2 pushes the sealing plate 3 to fit the sealing port 9, and the sealing of the cavity a17 is completed.

[0059] The action flow when the vacuum door valve is opened is as follows: the second cylinder 2 contracts rapidly, and the sealing plate 3 moves away from the cavity a17 (the movement of the second cylinder 2 is approximately 3mm to 5mm, and the movement stroke is very short, which can achieve rapid contraction). At the same time, the sealing plate 3 and the piston rod 11 descend. When the mechanical sensor b16 senses the touch of the rectangular piston 12, a vacuum door valve opening signal is sent to the central controller. The central controller is used to receive and process the vacuum door valve opening signal, and send the signal processing result to the display panel. The sealing port 9 opens, and the door opening action is completed.

[0060] The present invention and its embodiments are described above, which is not restrictive. What is shown in the accompanying drawings is only one of the embodiments of the present invention, and the actual content is not limited to this. In short, if ordinary technicians in this field are inspired by it and do not deviate from the purpose of the invention, they can creatively design structural methods and embodiments similar to the technical scheme, which should all fall within the scope of protection of the present invention.

Claims

1. A vacuum gate valve, characterized in that: The invention comprises a first cylinder (1), a second cylinder (2), a sealing plate (3), a guide mechanism (4) and a mounting seat (5), wherein the first cylinder (1) comprises two piston rods (11), the mounting seat (5) is fixed on the two piston rods (11) of the first cylinder (1), the second cylinder (2) is mounted on the mounting seat (5), the sealing plate (3) is arranged on the second cylinder (2), the second cylinder (2) drives the sealing plate (3) to perform reciprocating motion, the sealing plate (3) is used to seal a sealing hole of an external device, the guide mechanism (4) guides the sealing plate (3) in the direction in which the second cylinder (2) drives the sealing plate (3) to move, the guide mechanism (4) comprises a guide shaft (42) and a guide shaft sleeve b (44), and the mounting seat (5) is provided with a through hole ( 51), one end of the guide shaft (42) is inserted into the through hole (51), and the guide shaft (42) and the through hole (51) can slide relative to each other. The sealing plate (3) is provided with a groove (31) adapted to the guide shaft sleeve b (44), and the guide shaft sleeve b (44) is fixed on the groove (31). The guide shaft sleeve b (44) is sleeved on the other end of the guide shaft (42) in a one-to-one correspondence, and the guide shaft sleeve b (44) and the guide shaft (42) can slide relative to each other. The vacuum gate valve also includes a limit cover (6), and the limit cover (6) is provided at one end of the through hole (51) away from the sealing plate (3), and the limit cover (6) is mounted on the mounting seat (5), and the limit cover (6) limits the movement distance of the guide shaft (42).

2. A vacuum gate valve according to claim 1, characterized in that: The first cylinder (1) comprises a rectangular piston (12) and a piston cylinder (13); the piston cylinder (13) is rectangular in shape, the corners of the piston cylinder (13) are rounded, and the rectangular piston (12) is adapted to the inner wall of the piston cylinder (13).

3. A vacuum gate valve according to claim 2, characterized in that: The vacuum gate valve further comprises two guide sleeves a (43), the two guide sleeves a (43) being arranged on the inner cavity of the piston cylinder (13), the two piston rods (11) respectively inserted into the two guide sleeves a (43), the guide sleeves a (43) and the piston rods (11) being slidable relative to each other, and the guide sleeves a (43) being used to guide the piston rods (11).

4. A vacuum gate valve according to claim 2, characterized in that: The vacuum gate valve further comprises a first sealing ring (7), the first sealing ring (7) being arranged on the rectangular piston (12), the piston cylinder (13) being provided with a rod chamber (131) and a rodless chamber (132), the first sealing ring (7) and the rectangular piston (12) sealingly isolating the rod chamber (131) and the rodless chamber (132).

5. A vacuum gate valve according to claim 4, characterized in that: The vacuum gate valve further comprises a mechanical sensor a (15) and a mechanical sensor b (16); the mechanical sensor a (15) is located in the rod chamber (131), and the mechanical sensor b (16) is located in the rodless chamber (132); the mechanical sensor a (15) and the mechanical sensor b (16) are respectively arranged at two ends of the stroke of the rectangular piston (12).

6. A vacuum gate valve according to claim 1, characterized in that: The vacuum gate valve further comprises a first buffer plug (19), wherein the first buffer plug (19) is arranged on the sealing plate (3) and is located between the sealing plate (3) and the mounting seat (5).

7. A vacuum gate valve according to claim 4, characterized in that: The vacuum gate valve further comprises a second buffer plug (20), wherein the second buffer plug (20) is arranged on the rectangular piston (12), and the second buffer plug (20) is used to buffer the impact of the rectangular piston (12) at both ends of the stroke.

8. A vacuum gate valve according to claim 1, characterized in that: The second cylinder (2) comprises a cylinder shaft (21), a cylinder piston a (22) and a cylinder piston b (23); the mounting seat (5) is provided with a first chamber (52), a second chamber (53) and a connecting chamber (54); the first chamber (52), the connecting chamber (54) and the second chamber (53) are interconnected; the connecting chamber (54) is located between the first chamber (52) and the second chamber (53); the cylinder piston a (22) is located in the first chamber (52) and can slide relative to the first chamber (52); the cylinder piston b (23) is located in the second chamber (53) and can slide relative to the second chamber (53); the cylinder shaft (21) penetrates the connecting chamber (54) and can slide relative to the connecting chamber (54).

9. A vacuum gate valve according to claim 8, characterized in that: The second chamber (53) is smaller than the first chamber (52); the first chamber (52) is used for inflation, and the inflation gas pushes the cylinder piston a (22) to move in a direction close to the sealing plate (3); the second chamber (53) is used for inflation, and the inflation gas pushes the cylinder piston b (23) to move in a direction away from the sealing plate (3).

10. A vacuum gate valve according to claim 8, characterized in that: One end of the cylinder shaft (21) passes through the first chamber (52) and is fixedly connected to the cylinder piston a (22); the cylinder piston a (22) drives the cylinder shaft (21) to move in a direction approaching the sealing plate (3).

11. A vacuum gate valve according to claim 10, characterized in that: The other end of the cylinder shaft (21) passes through the second chamber (53) and is fixedly connected to the cylinder piston b (23); the cylinder shaft (21) extends from the second chamber (53), and the cylinder piston b (23) is used to drive the cylinder shaft (21) to move in a direction away from the sealing plate (3).

12. A vacuum gate valve according to claim 8, characterized in that: The vacuum gate valve further comprises a second sealing ring (24), wherein the second sealing ring (24) is arranged between the first chamber (52) and the second chamber (53), and the second sealing ring (24) is used for sealing and isolating the first chamber (52) and the second chamber (53).

13. A display panel vacuum baking device, characterized in that: The invention comprises a baking oven (10) and a vacuum door valve according to any one of claims 1 to 12, wherein a cavity a (17) is provided in the baking oven (10), a sealing port (9) connected to the cavity a (17) is provided on the baking oven (10), and the first cylinder (1) is arranged on the baking oven (10).

14. The display panel vacuum baking device according to claim 13, characterized in that: The two piston rods (11) drive the sealing plate (3) to move in the direction of the sealing opening (9), and the end of the movement of the sealing plate (3) in the direction of the sealing opening (9) is located directly in front of the sealing opening (9).

15. The display panel vacuum baking device according to claim 13, characterized in that: The second cylinder (2) comprises a cylinder shaft (21), a cylinder piston a (22) and a cylinder piston b (23); the mounting seat (5) is provided with a first chamber (52), a second chamber (53) and a connecting chamber (54); the first chamber (52), the connecting chamber (54) and the second chamber (53) are interconnected; the connecting chamber (54) is located between the first chamber (52) and the second chamber (53); the cylinder piston a (22) is located in the first chamber (52); the cylinder piston a (22) and the first chamber (53) are connected to each other. 2), the cylinder piston b (23) is located in the second chamber (53), and the cylinder piston b (23) and the second chamber (53) are relatively slidable; the cylinder shaft (21) penetrates the connecting chamber (54), and the cylinder shaft (21) and the connecting chamber (54) are relatively slidable; the cylinder shaft (21) drives the sealing plate (3) to reciprocate along the depth direction of the chamber a (17); at the end of the travel of the sealing plate (3) moving in the depth direction of the chamber a (17), it fits with the sealing port (9).

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