Device and method for testing rapid aging life of semiconductor liquid heater

Abstract

The invention discloses a semiconductor liquid heater rapid aging life testing device, which comprises a liquid input source, a sealing valve block, a tested liquid heater, a rapid aging life testing instrument and a cooler, and is characterized in that the tested liquid heater is arranged on the sealing valve block, and the sealing valve block is provided with a liquid inlet and a liquid outlet; the liquid input source outlet is communicated with the liquid inlet through a pipeline, the liquid outlet is communicated with the cooler inlet through a pipeline, the cooler outlet is communicated with the liquid input source inlet, and the rapid aging life test instrument is electrically connected with the tested liquid heater. The testing device is connected with a rapid aging life testing instrument, so that the rapid aging life testing instrument works under a high-load working condition, and whether the service life of the rapid aging life testing instrument meets the use requirement or not is simulated. Another purpose of the invention is to provide a test method which simulates the use environment of the liquid heater, and is simple to operate and high in test efficiency.

Description

Technical Field

[0001] The invention relates to the field of heater testing, and in particular to a semiconductor liquid heater rapid aging life testing device and a testing method. Background Art

[0002] In the context of localization of the semiconductor industry, more and more semiconductor equipment has begun to be domestically produced. With the acceleration of the localization process, it is particularly important to test the quality and service life of special equipment in localization. Liquid heater is one of the special equipment.

[0003] As the name implies, liquid heaters heat liquids. The thermal conductivity of liquids is relatively poor compared to that of metals, so the requirements for the heating wires in liquid heater components are extremely high. If the performance of the heating wire does not meet the use requirements, its service life will not meet the use requirements. However, due to the special use environment of liquid heaters and the complex processing technology, the performance of the heating wire itself cannot directly represent the service life of the finished product, and the existing technology does not have a good heater life test solution. Therefore, a new technical solution is urgently needed to solve at least one of the above technical problems. Summary of the invention

[0004] One object of the present invention is to provide a semiconductor liquid heater rapid aging life test device, which is connected to a rapid aging life test instrument and made to work under high load conditions to simulate whether its service life meets the use requirements. Another object of the present invention is to provide a test method that simulates the use environment of a liquid heater, is simple to operate, and has high test efficiency.

[0005] In order to achieve the above technical objectives and meet the above technical requirements, the technical solution adopted by the present invention is: a semiconductor liquid heater rapid aging life test device, characterized in that it includes a liquid input source, a sealing valve block, a liquid heater to be tested, a rapid aging life test instrument, and a cooler. The liquid heater to be tested is installed on the sealing valve block, and the sealing valve block is provided with a liquid inlet and a liquid outlet. The liquid input source outlet is connected to the liquid inlet through a pipeline, the liquid outlet is connected to the cooler inlet through a pipeline, the cooler outlet is connected to the liquid input source inlet, and the rapid aging life test instrument is electrically connected to the liquid heater to be tested.

[0006] As a preferred technical solution, a flow meter is provided between the outlet of the liquid input source and the inlet of the sealing valve block.

[0007] As a preferred technical solution, the liquid inlet is provided with a first joint, the liquid outlet is provided with a second joint, a mounting hole is provided on one side of the sealing valve block, a flow channel is defined in the sealing valve block, the liquid inlet, liquid outlet and mounting hole are connected to the flow channel, and the measured liquid heater is sealed and connected to the mounting hole.

[0008] As a preferred technical solution, the flow meter indicates that the liquid flow rate range is 5L / min-10L / min.

[0009] The present invention also provides a testing method, characterized in that the service life of the heater is tested using the testing device, and the testing method comprises the following steps: Connect the liquid input source, the sealing valve block and the cooler, and install the heater of the liquid to be tested on the sealing valve block; Connect the rapid aging life test instrument to the sealing valve block through a wire; Turn on the rapid aging life test instrument to apply test voltage to the liquid heater under test, and switch the power on and off for at least 10,000 times. When the number of on and off times reaches the requirement, remove the liquid heater under test, observe the surface condition of the heating wire of the liquid heater under test, and check whether the liquid heater under test is damaged.

[0010] As a preferred technical solution, the test voltage is 2-3 times the normal voltage.

[0011] As a preferred technical solution, the number of power on and off times is 30,000 times.

[0012] As a preferred technical solution, each power-on time is 0.8s, and each power-off time is 1.2s.

[0013] The beneficial effects of the present invention are: 1) The liquid in the liquid input source enters the sealing valve block, the liquid heater to be tested heats the liquid in the sealing valve block, and then enters the cooler to cool and then enters the liquid input source to form a cycle. The rapid aging life test instrument can apply high pressure to the liquid heater, so that the liquid heater works at a high load, achieving the purpose of quickly testing the service life of the liquid heater to be tested; 2) Flowmeter can indicate liquid flow; 3) The test method simulates the use environment of the liquid heater, with simple operation and high test efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a three-dimensional working diagram of a grinding fixture provided by one embodiment of the present invention; Figure 2 It is a three-dimensional diagram of a part of the structure of a grinding fixture provided by one embodiment of the present invention; exist Figure 1-21. Liquid input source; 2. Sealing valve block; 201. Liquid inlet; 202. Liquid outlet; 203. Mounting hole; 204. Flow channel; 3. Tested liquid heater; 4. Rapid aging life test instrument; 5. Cooler; 6. Flow meter; 7. First joint; 8. Second joint; 9. Sealing ring; 10. Wire. DETAILED DESCRIPTION

[0015] The present invention is further described below in conjunction with the accompanying drawings.

[0016] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "head", "tail", "top", "bottom", "left", "right", "front", "back", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as a limitation on this patent. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0017] See also Figure 1-Figure 2 An embodiment of the present invention provides a semiconductor liquid heater rapid aging life test device, comprising a liquid input source 1, a sealing valve block 2, a liquid heater to be tested 3, a rapid aging life test instrument 4, and a cooler 5. The liquid heater to be tested 3 is installed on the sealing valve block 2, and the sealing valve block 2 is provided with a liquid inlet 201 and a liquid outlet 202. The outlet of the liquid input source 1 is connected to the liquid inlet 201 through a pipeline, and the liquid outlet 202 is connected to the inlet of the cooler 5 through a pipeline. The outlet of the cooler 5 is connected to the inlet of the liquid input source 1, and the rapid aging life test instrument 4 is electrically connected to the liquid heater to be tested 3.

[0018] The liquid in the liquid input source 1 enters the sealing valve block 2, and the liquid heater 3 to be tested heats the liquid in the sealing valve block 2, and then enters the cooler 5 to be cooled and then enters the liquid input source 1 to form a cycle. The rapid aging life test instrument 4 can apply high voltage to the liquid heater, so that the liquid heater works at a high load, thereby achieving the purpose of quickly testing the service life of the liquid heater 3 to be tested.

[0019] In the semiconductor use environment, the liquid temperature needs to be kept in a stable state, but the measured liquid heater 3 will continue to heat the liquid. At this time, the cooler 5 is required to cool the liquid to stabilize the liquid temperature at a specified temperature.

[0020] like Figure 1-Figure 2As shown, a flow meter 6 is provided between the outlet of the liquid input source 1 and the inlet of the sealing valve block 2. The flow meter 6 can indicate the liquid flow rate. The liquid flow rate is between 5L / min and 10L / min, which is closer to the actual working flow rate, so that the test result is more accurate.

[0021] like Figure 1-Figure 2 As shown, the liquid inlet 201 is provided with a first joint 7, the liquid outlet 202 is provided with a second joint 8, a mounting hole 203 is provided on one side of the sealing valve block 2, a flow channel 204 is defined in the sealing valve block 2, the liquid inlet 201, the liquid outlet 202 and the mounting hole 203 are connected with the flow channel 204, the tested liquid heater 3 is sealed and connected with the mounting hole 203 through a sealing ring 9, and the tested liquid heater 3 is sealed and installed on the sealing valve block 2 to simulate a real sealing heating environment, and the test effect is more accurate.

[0022] See also Figure 1-Figure 2 The present invention also provides a testing method, using the testing device to test the service life of the heater, the testing method comprises the following steps: Connect the liquid input source 1, the sealing valve block 2, and the cooler 5, and install the measured liquid heater 3 to the sealing valve block 2; The rapid aging life test instrument 4 is connected to the sealing valve block 2 via a wire 10; Turn on the rapid aging life test instrument 4 to apply a test voltage to the liquid heater 3 under test, and switch the power on and off for at least 10,000 times. After the number of on and off times reaches the requirement, remove the liquid heater 3 under test, observe the surface condition of the heating wire of the liquid heater 3 under test, and check whether the liquid heater 3 under test is damaged. This simulates the use environment of the liquid heater, is simple to operate, and has high test efficiency.

[0023] like Figure 1-Figure 2 As shown, the test voltage is 2-3 times of the normal pressure. The normal pressure of the liquid heater under test generally has two voltages, low voltage 24V, high voltage 208V, which are generally alternating current. When the test voltage is lower than 2 times of the normal pressure, the test time will not be significantly shortened, and the liquid heater 3 under test cannot be in a high-load working state. When the test voltage is better than 3 times, the voltage will be too high, and the liquid heater 3 under test will be easily damaged, resulting in the inability to accurately test the service life of the liquid heater 3 under test.

[0024] like Figure 1-Figure 2As shown, the number of power on and off times is 30,000, that is, 15,000 times of power on and 15,000 times of power off, each power on time is 0.8s, and each power off time is 1.2s. During the test process, the inventor has undergone multiple experiments. The inventor has set a variety of power-on times and power-off times. When the power-on time is greater than or less than 0.8s, and the power-off time is greater than or less than 1.2s, the test result error is large, and after years of experience, it does not conform to the actual use results. Therefore, the inventor has set the power-on and power-off times according to the environment and characteristics of the liquid heater in the semiconductor. This is more reasonable. If the liquid heater 3 under test can still be used normally after the number of power on and off times reaches 30,000 times, the service life meets the standard. The entire test takes 30,000s, which is approximately equal to the service life of the heater under test reaching 3 years, and the test results are more accurate.

[0025] The above embodiments are merely descriptions for the purpose of clearly illustrating the present invention, and are not limitations on the implementation methods. For those skilled in the art, other different forms of changes or modifications may be made based on the above descriptions. It is not necessary and impossible to enumerate all the implementation methods here, and the obvious changes or modifications derived therefrom are still within the scope of protection of the present invention.

Claims

1. A semiconductor liquid heater rapid aging life test device, characterized in that , including a liquid input source, a sealing valve block, a heater for the liquid to be tested, a rapid aging life test instrument, and a cooler. The heater for the liquid to be tested is installed on the sealing valve block. The sealing valve block is provided with a liquid inlet and a liquid outlet. The outlet of the liquid input source is connected to the liquid inlet through a pipeline, the liquid outlet is connected to the inlet of the cooler through a pipeline, the cooler outlet is connected to the inlet of the liquid input source, and the rapid aging life test instrument is electrically connected to the heater for the liquid to be tested.

2. The semiconductor liquid heater rapid aging life test method according to claim 1, characterized in that: A flow meter is arranged between the outlet of the liquid input source and the inlet of the sealing valve block.

3. The semiconductor liquid heater rapid aging life test device according to claim 1, characterized in that: The liquid inlet is provided with a first joint, the liquid outlet is provided with a second joint, a mounting hole is provided on one side of the sealing valve block, a flow channel is defined in the sealing valve block, the liquid inlet, the liquid outlet and the mounting hole are connected to the flow channel, and the measured liquid heater is sealed and connected to the mounting hole.

4. The semiconductor liquid heater rapid aging life test method according to claim 2, characterized in that: The flow meter indicates that the liquid flow rate range is 5L / min-10L / min.

5. A testing method, characterized in that: The service life of the heater is tested using the testing device described in any one of claims 1 to 4, and the testing method comprises the following steps: Connect the liquid input source, the sealing valve block and the cooler, and install the heater of the liquid to be tested on the sealing valve block; Connect the rapid aging life test instrument to the sealing valve block through a wire; Turn on the rapid aging life test instrument to apply test voltage to the liquid heater under test, and switch the power on and off for at least 10,000 times. When the number of on and off times reaches the requirement, remove the liquid heater under test, observe the surface condition of the heating wire of the liquid heater under test, and check whether the liquid heater under test is damaged.

6. The testing method according to claim 5, characterized in that: The test voltage is 2-3 times of normal voltage.

7. The testing method according to claim 5, characterized in that: The number of power on and off cycles is 30,000.

8. The testing method according to claim 5, characterized in that: Each power-on time is 0.8s, and each power-off time is 1.2s.

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