Angle deflection structure and deflection mirror device thereof

Abstract

The invention discloses an angle deflection structure and a deflection mirror device thereof, the angle deflection structure comprises a rotor assembly and a coil winding, the rotor assembly is composed of a rotating shaft and a permanent magnet, the permanent magnet covers the outer side of the circumferential direction of the rotating shaft, and the coil winding comprises a first winding and a second winding. The first winding and the second winding are respectively suspended on the outer sides of the permanent magnets and are oppositely arranged, and the first winding and the second winding respectively stretch across the outer sides of the two adjacent permanent magnets in space. The number of the magnetic poles is changed from 2 to 4, the magnetic field change is relatively gentle, the rotating speed is relatively stable, and relatively uniform speed output can be kept in the working process, which is very important for a galvanometer system needing to accurately control the deflection angle and position of a light path; and the change of the position signal can be responded more accurately, so that the accurate control requirement on the deflection angle of the optical element can be better met, and the processing accuracy and performance of equipment are improved.

Description

Technical Field

[0001] The invention relates to the field of deflection structures, and in particular to an angle deflection structure and a deflection mirror device thereof. Background Art

[0002] The angle deflection structure is a structural design that uses an electromagnetic field to drive the shaft to deflect within a certain angle. It has a wide range of applications, including large-scale laser processing equipment, high-speed laser engraving machines, etc.

[0003] In the prior art, angle deflection structures such as Figure 1 As shown, a rotating shaft is usually made of a magnet, and then a coil winding is arranged on the outside of the rotating shaft. Only when the coil winding is energized can a magnetic field be generated to drive the rotating shaft to rotate. However, from the above-mentioned magnetic field circuit, the existing structure has only two magnetic field circuits, commonly known as a "two-stage" structure. Due to the small number of magnetic poles, the magnetic field changes drastically and the rotation speed is high. However, this high speed may bring certain challenges in some application scenarios with high requirements for speed stability, such as speed fluctuations. In addition, in the closed-loop feedback control process in the galvanometer field, the two-pole structure cannot accurately respond to changes in the position signal and cannot achieve higher angle control accuracy. Summary of the invention

[0004] In order to solve the above-mentioned problems, the present invention provides an angle deflection structure, including a rotor assembly and a coil winding, wherein the rotor assembly is composed of a rotating shaft and four permanent magnets, and the permanent magnets are adjacently fixed and covered on the circumferential outer side of the rotating shaft, and the coil winding includes a first winding and a second winding, and the first winding and the second winding are respectively suspended on the outer side of the permanent magnet and are arranged in relative positions, and the first winding and the second winding respectively span the outer sides of two adjacent permanent magnets in space.

[0005] Furthermore, the permanent magnets are evenly adjacent and fixedly covered on the outer side of the rotating shaft in the circumferential direction, and the first winding and the second winding are spatially covered on the outer side of the permanent magnets at 90 degrees relative to each other.

[0006] Furthermore, a wrapping body is provided on the outside of the coil winding, and the wrapping body wraps the outside of the coil winding along the length direction of the coil winding. A channel for the rotor assembly to pass through is provided in the wrapping body, and the first winding and the second winding are tightly attached to the inner wall of the channel by fixing glue.

[0007] Furthermore, a supporting step is provided in the channel, and the first winding and the second winding stay on the supporting step in the channel.

[0008] Furthermore, a support shaft is fixed at one end of the rotating shaft, a clamping portion is configured at the end of the support shaft away from the rotating shaft, a first bearing is arranged between the support shaft and the channel, and the outer ring and inner ring of the first bearing are loosely fitted with the inner wall of the channel and the outer wall of the support shaft respectively.

[0009] Furthermore, a first limiting ring is protruded outwardly from the support shaft, a first limiting step is arranged in the channel, and the front end and the rear end of the first bearing are respectively clamped between the first limiting ring and the first limiting step.

[0010] Furthermore, a second bearing is arranged between the end of the rotating shaft away from the supporting shaft and the channel, and the outer ring and the inner ring of the second bearing are loosely fitted to the inner wall of the channel and the outer wall of the rotating shaft respectively.

[0011] Furthermore, an elastic gasket is arranged between the side of the supporting step away from the coil winding and the second bearing, the elastic gasket is pre-pressed on one side of the second bearing, and a second limiting ring is arranged on the side of the second bearing away from the elastic gasket. The elastic gasket and the second limiting ring cooperate to form front and rear limitations on the second bearing.

[0012] Furthermore, the coil winding has a conducting wire extending outwardly, and the enclosure is provided with a conductor groove for the conducting wire to pass through.

[0013] The present application also provides a deflecting mirror device, including a vibrating lens fixed on a clamping portion, and a control circuit board fixed on an end of a packaging body away from the vibrating lens, the control circuit board is electrically connected to the power line, a first gasket is covered on the side of the control circuit board away from the packaging body, a plurality of light guide grids are arranged on the first gasket, a light blocking plate for shielding the light guide grids is arranged on the outer side of the first gasket, the rotating shaft passes through the first gasket, the light blocking plate is fixed on the rotating shaft and rotates synchronously with the rotating shaft.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. The number of magnetic poles in this application is changed from 2 to 4, the magnetic field changes relatively smoothly, the rotation speed is relatively more stable, and a relatively uniform speed output can be maintained during operation, which is very important for the galvanometer system that needs to accurately control the deflection angle and position of the optical path. For example, in the field of laser precision processing, a stable rotation speed can ensure that the laser beam accurately irradiates the target position and improves the processing accuracy.

[0015] 2. At the same time, the rotation speed of this application is relatively low and stable. In the closed-loop feedback control process, it can respond more accurately to changes in position signals, thereby achieving higher angle control accuracy. In applications that require high-precision optical path control, such as laser medical treatment, semiconductor lithography, etc., it can better meet the requirements for precise control of the deflection angle of optical components and improve the processing accuracy and performance of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0017] Figure 1 It is a schematic diagram of the prior art structure involved in the background technology of the present invention; Figure 2 It is a schematic structural diagram of a rotor assembly and a coil winding in the angle deflection structure of the present invention; Figure 3 A schematic structural diagram of another angle of the rotor assembly and the coil winding in the angle deflection structure of the present invention; Figure 4 It is a schematic diagram of the magnetic field loop of the rotor assembly and the coil winding in the angle deflection structure of the present invention; Figure 5 It is an overall exploded view of the angle deflection structure of the present invention; Figure 6 A cross-sectional view of an inclusion of the angle deflection structure of the present invention; Figure 7 is a cross-sectional view of a support shaft of the angle deflection structure of the present invention; Figure 8 It is a cross-sectional view of the overall structure of the angle deflection structure of the present invention; Fig. 9 It is an exploded view of the overall structure of the deflecting mirror device of the present invention.

[0018] The reference numerals and names in the figures are as follows: Rotor assembly 100, coil winding 200, rotating shaft 110, permanent magnet 120, first winding 210, second winding 220, enclosure 300, channel 310, fixing glue 230, supporting step 320, supporting shaft 130, clamping portion 131, first bearing 400, first limiting ring 132, first limiting step 330, second bearing 500, elastic gasket 340, second limiting ring 140, conducting wire 240, wire groove 350, vibrating lens 600, control circuit board 700, first gasket 800, light guide grid 810, light blocking plate 900. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] The present invention is described in more detail. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. It should be noted that when an element is described as "fixed to" another element, it can be directly on the other element, or there can be one or more centered elements therebetween. When an element is described as "connected to" another element, it can be directly connected to the other element, or there can be one or more centered elements therebetween.

[0021] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, vertical, horizontal" and "top, bottom" are usually based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description. Unless otherwise stated, these directional words do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the scope of protection of the present invention; the directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself. In the description of the present invention, it should be noted that the use of words such as "first" and "second" to define components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above words have no special meaning, and therefore cannot be understood as limiting the scope of protection of the present invention. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0022] The preferred embodiments of the present invention are now further described in conjunction with the accompanying drawings. Figures 2 to 4 As shown, at least one embodiment of the present application provides an angle deflection structure, including a rotor assembly 100 and a coil winding 200, wherein the rotor assembly 100 is composed of a rotating shaft 110 and four permanent magnets 120, wherein the permanent magnets 120 are adjacently fixedly covered on the circumferential outer side of the rotating shaft 110, and the coil winding 200 includes a first winding 210 and a second winding 220, wherein the first winding 210 and the second winding 220 are respectively suspended on the outer side of the permanent magnet 120 and are relatively arranged in position, and the first winding 210 and the second winding 220 respectively span the outer sides of two adjacent permanent magnets 120 in space.

[0023] In the above embodiment, in the rotor assembly 100, since the permanent magnets 120 completely cover and are fixed on the outer side of the rotating shaft 110 in the circumferential direction, and the first winding 210 and the second winding 220 spatially span the outer sides of two adjacent permanent magnets 120 respectively, when the first winding 210 and the second winding 220 are energized, the permanent magnets 120 covering the rotating shaft 110 will generate opposite polarities at adjacent ends, and the rotating shaft 110 will be driven to rotate inside the coil winding 200 under the effect of the magnetic field.

[0024] The present application adopts four permanent magnets 120 to surround the rotating shaft 110, and then uses the coil winding 200 suspended outside the permanent magnet 120 to be energized, so that the polarity of the adjacent end of the permanent magnet 120 is opposite, thereby forming four magnetic field loops. Compared with the prior art, the number of magnetic poles in the present application is changed from 2 to 4, the magnetic field changes relatively smoothly, and its rotation speed is relatively more stable. During the operation, it can maintain a relatively uniform speed output, which is very important for the galvanometer system that needs to accurately control the deflection angle and position of the optical path. For example, in the field of laser fine processing, a stable rotation speed can ensure that the laser beam accurately irradiates the target position and improves the processing accuracy. At the same time, the rotation speed of the present application is relatively low and stable. In the closed-loop feedback control process, it can more accurately respond to the change of the position signal, thereby achieving higher angle control accuracy. In applications that require high-precision optical path control, such as laser medical treatment, semiconductor lithography and other fields, it can better meet the requirements for accurate control of the deflection angle of optical elements and improve the processing accuracy and performance of the equipment.

[0025] On the basis of the above embodiments, Figure 3 and Figure 4As shown, the permanent magnets 120 are evenly adjacent and fixedly covered on the circumferential outer side of the rotating shaft 110, that is, each permanent magnet 120 is spatially covered at 90 degrees and fixed on the circumferential outer side of the rotating shaft 110, and the first winding 210 and the second winding 220 are spatially covered at 90 degrees relative to each other on the outer side of the permanent magnet 120, so that when the first winding 210 and the second winding 220 are energized, the magnetic field loops generated between the first winding 210 and the second winding 220 and the permanent magnet 120 are equal, so that when the rotating shaft 110 rotates, the output can be at a more uniform speed.

[0026] On the basis of the above embodiments, Figure 5 and Figure 8 As shown, a wrapping body 300 is provided on the outside of the coil winding 200, and the wrapping body 300 wraps the outside of the coil winding 200 along the length direction of the coil winding 200. A channel 310 for the rotor assembly 100 to pass through is provided in the wrapping body 300, and the first winding 210 and the second winding 220 are tightly attached to the inner wall of the channel 310 by fixing glue 230, so that the first winding 210 and the second winding 220 are suspended on the outside of the permanent magnet 120.

[0027] In some embodiments, in combination Figure 6 and Figure 8 As shown, a supporting step 320 is provided in the channel 310. When the supporting step 320 is used to assemble the present application, the first winding 210 and the second winding 220 can be wrapped with a fixing glue 230, and then installed from the side of the channel 310 away from the supporting step 320, and stay on the supporting step 320 after entering the channel 310, thereby preventing the first winding 210 and the second winding 220 from moving in the channel 310, thereby causing deviation in the magnetic field circuit, and further making the assembly method of the present application simpler.

[0028] On the basis of the above embodiments, Figure 7 and Figure 8As shown, a support shaft 130 is fixed at one end of the rotating shaft 110, and a clamping portion 131 is arranged at the end of the support shaft 130 away from the rotating shaft 110. The clamping portion 131 can clamp different functional components according to different application scenarios of the present structure. For example, when the present structure is applied to a galvanometer system, the clamping portion 131 can be used to clamp an optical lens. For another example, when the present structure is applied to an electric toothbrush, the clamping portion 131 can be used to clamp a brush head, etc., which will not be repeated here. A first bearing 400 is arranged between the support shaft 130 and the channel 310, and the outer ring and the inner ring of the first bearing 400 are loosely matched with the inner wall of the channel 310 and the outer wall of the support shaft 130 respectively, so that the support shaft 130 and the channel 310 form a limit for the radial movement of the first bearing 400, so that when the rotating shaft 110 rotates, its radial movement depends on the radial runout accuracy of the first bearing 400, eliminating the influence of other factors (such as processing accuracy), thereby making the radial movement of the rotating shaft 110 more controllable.

[0029] In some embodiments, Figure 8 As shown, a first limiting ring 132 is protruded outwardly from the support shaft 130, and a first limiting step 330 is arranged in the channel 310. The front and rear ends of the first bearing 400 are respectively clamped between the first limiting ring 132 and the first limiting step 330, so that the first limiting ring 132 and the first limiting step 330 cooperate to form front and rear limiting for the first bearing 400, thereby preventing the first bearing 400 from moving forward and backward when the rotating shaft 110 rotates.

[0030] On the basis of the above embodiments, Figure 8 As shown, a second bearing 500 is arranged between the end of the rotating shaft 110 away from the supporting shaft 130 and the channel 310, and the outer ring and the inner ring of the second bearing 500 are loosely fitted with the inner wall of the channel 310 and the outer wall of the rotating shaft 110 respectively, so that the rotating shaft 110 and the channel 310 limit the radial movement of the second bearing 500, so that when the rotating shaft 110 rotates, its radial movement depends on the radial runout accuracy of the second bearing 500, eliminating the influence of other factors (such as processing accuracy), thereby making the radial movement of the rotating shaft 110 more controllable.

[0031] In some embodiments, Figure 8As shown, an elastic gasket 340 is arranged between the side of the supporting step 320 away from the coil winding 200 and the second bearing 500, and the elastic gasket 340 is pre-pressed on one side of the second bearing 500, so that when the rotating shaft 110 deflects in the radial direction, it will drive the second bearing 500 to form an extrusion on the elastic gasket 340, so that the second bearing 500 can operate in a stable state as a whole. It should be noted that in this embodiment, the supporting step 320 is not only used to support the first winding 210 and the second winding 220, but also used to support the elastic gasket 340 when the elastic gasket 340 is squeezed, thereby saving redundant components. This is of great significance when the structure is applied to tiny products. A second limiting ring 140 is arranged on the side of the second bearing 500 away from the elastic gasket 340, so that the elastic gasket 340 and the second limiting ring 140 form front and rear limits on the second bearing 500 through cooperation.

[0032] In some embodiments, Figure 5 As shown, the coil winding 200 has a conducting wire 240 extending outwardly, and the enclosure 300 is provided with a conductor groove 350 for the conducting wire 240 to pass through.

[0033] The present application also discloses a deflection mirror device applied to the above-mentioned angle deflection structure, such as Fig. 9 As shown, it includes a vibrating lens 600 fixed on a clamping portion 131, and a control circuit board 700 fixed on an end of a housing 300 away from the vibrating lens 600, the control circuit board 700 is electrically connected to the power line 240, and a first gasket 800 is covered on the side of the control circuit board 700 away from the housing 300, a plurality of light-guiding gratings 810 are arranged on the first gasket 800, and a light-blocking plate 900 for shielding the light-guiding gratings 810 is arranged on the outer side of the first gasket 800, the rotating shaft 110 passes through the first gasket 800, and the light-blocking plate 900 is fixed on the rotating shaft 110 and rotates synchronously with the rotating shaft 110.

[0034] The details of the exemplary embodiments described above are not limited to the embodiments described above, and the invention may be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive in all respects, and the scope of the invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the invention.

Claims

1. An angle deflection structure, It is characterized in that The invention comprises a rotor assembly (100) and a coil winding (200), wherein the rotor assembly (100) is composed of a rotating shaft (110) and four permanent magnets (120), wherein the permanent magnets (120) are adjacently fixedly covered on the outer side of the rotating shaft (110) in the circumferential direction, and the coil winding (200) comprises a first winding (210) and a second winding (220), wherein the first winding (210) and the second winding (220) are respectively suspended on the outer side of the permanent magnets (120) and arranged in relative positions, and the first winding (210) and the second winding (220) respectively span the outer sides of two adjacent permanent magnets (120) in space.

2. The angle deflection structure according to claim 1, It is characterized in that The permanent magnets (120) are evenly adjacent and fixedly covered on the outside of the rotating shaft (110) in the circumferential direction, and the first winding (210) and the second winding (220) are spatially opposite to each other at 90 degrees and covered on the outside of the permanent magnets (120).

3. The angle deflection structure according to claim 2, It is characterized in that An encapsulation body (300) is provided on the outside of the coil winding (200), the encapsulation body (300) encapsulating the outside of the coil winding (200) along the length direction of the coil winding (200), a channel (310) for the rotor assembly (100) to pass through is provided in the encapsulation body (300), and the first winding (210) and the second winding (220) are tightly attached to the inner wall of the channel (310) by means of fixing glue (230).

4. The angle deflection structure according to claim 3, It is characterized in that A supporting step (320) is provided in the channel (310), and the first winding (210) and the second winding (220) stay on the supporting step (320) in the channel (310).

5. The angle deflection structure according to claim 4, It is characterized in that A support shaft (130) is fixed at one end of the rotating shaft (110), a clamping portion (131) is arranged at one end of the support shaft (130) away from the rotating shaft (110), and a first bearing (400) is arranged between the support shaft (130) and the channel (310), and an outer ring and an inner ring of the first bearing (400) are loosely fitted to an inner wall of the channel (310) and an outer wall of the support shaft (130), respectively.

6. The angle deflection structure according to claim 5, It is characterized in that A first limiting ring (132) is protrudingly provided on the outside of the support shaft (130), a first limiting step (330) is arranged in the channel (310), and the front end and the rear end of the first bearing (400) are respectively clamped between the first limiting ring (132) and the first limiting step (330).

7. The angle deflection structure according to claim 5, It is characterized in that A second bearing (500) is provided between one end of the rotating shaft (110) away from the supporting shaft (130) and the channel (310), and an outer ring and an inner ring of the second bearing (500) are loosely fitted to an inner wall of the channel (310) and an outer wall of the rotating shaft (110), respectively.

8. The angle deflection structure according to claim 7, It is characterized in that An elastic gasket (340) is arranged between a side of the supporting step (320) away from the coil winding (200) and the second bearing (500); the elastic gasket (340) is pre-pressed on one side of the second bearing (500); a second limiting ring (140) is arranged on a side of the second bearing (500) away from the elastic gasket (340); the elastic gasket (340) and the second limiting ring (140) are matched to form front and rear limiting for the second bearing (500).

9. The angle deflection structure according to claim 5, It is characterized in that The coil winding (200) has a conducting wire (240) extending outwardly, and the encapsulation body (300) is provided with a conducting wire groove (350) for the conducting wire (240) to pass through.

10. A deflecting mirror device, It is characterized in that The invention comprises the angle deflection structure according to any one of claims 5 to 9.

11. The deflecting mirror arrangement according to claim 10, It is characterized in that The invention comprises a vibrating lens (600) fixed on a clamping portion (131), and a control circuit board (700) fixed on an end of an enclosure (300) away from the vibrating lens (600), wherein the control circuit board (700) is electrically connected to a conducting wire (240), a first gasket (800) is covered on a side of the control circuit board (700) away from the enclosure (300), a plurality of light guide grids (810) are arranged on the first gasket (800), a light shielding plate (900) for shielding the light guide grids (810) is arranged on the outer side of the first gasket (800), the rotating shaft (110) passes through the first gasket (800), and the light shielding plate (900) is fixed on the rotating shaft (110) and rotates synchronously with the rotating shaft (110).

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