Micro-positioning platform for optical fiber coupling positioning

Abstract

The invention provides a micro-positioning platform for optical fiber coupling positioning, and relates to the field of micro-positioning platforms. Comprising a base, positioning platform bases at the vertex angle of the base, a first driving assembly between every two adjacent positioning platform bases, a displacement platform in the middle of the base, a second driving assembly on the displacement platform, a rotating platform on the second driving assembly and an optical fiber fixing piece on the rotating platform. The first driving assembly comprises a piezoelectric actuator, an amplification part and a correction part, the amplification part comprises a first flexible longitudinal beam and a first output end beam connected with the displacement platform through the first flexible longitudinal beam, and the correction part comprises a first connecting rod, a movable transverse rod and a first straight beam flexible hinge which are arranged on the two sides of the first output end beam in parallel; the two ends of the first connecting rod are connected with the first output end beam and the movable cross rod through first straight beam type flexible hinges respectively. The positioning platform solves the problem that in the prior art, a micro-positioning platform which is large in stroke, stable and accurate in movement and used for optical fiber coupling positioning does not exist.

Description

Technical Field

[0001] The invention relates to the field of micro-positioning platforms, and in particular to a micro-positioning platform for optical fiber coupling positioning. Background Art

[0002] Micro-positioning platforms are widely used in the fields of biomedicine, precision optics, aerospace, and micro-nano assembly. At present, piezoelectric actuators have been widely used in micro-positioning platforms and combined with flexible hinge transmission mechanisms to achieve high-precision movement. Piezoelectric actuators have the advantages of high rigidity, high resolution, small size, and fast response speed, but their stroke is small, and the stroke range is usually increased through levers or bridge displacement amplification mechanisms. In the field of precision optics, fiber-coupled micro-positioning platforms are particularly critical, which has promoted the continuous innovation and development of related technologies.

[0003] At present, scholars at home and abroad have conducted extensive research on its motion accuracy and structural stability. However, there are few studies on the motion coupling effect between multiple degrees of freedom. Among them, in the field of fiber coupling positioning, it is necessary to use a micro-positioning positioning platform to couple spatial light into the optical fiber, that is, it is necessary to control the movement of the optical fiber up and down, left and right, front and back, and it is necessary to control the orientation angle of the optical fiber axis, that is, it is necessary to achieve movement in five degrees of freedom. Although there are five-degree-of-freedom positioning platforms in the prior art, and micron-level positioning can be achieved through flexible transmission, this positioning platform has a small stroke and parasitic motion, which makes the movement of the platform not stable and accurate enough, and requires multiple adjustments, which in turn affects the mobile positioning efficiency of the positioning platform. Summary of the invention

[0004] Based on this, the purpose of the present invention is to provide a micro-positioning platform for fiber coupling positioning, aiming to solve the problem in the prior art of lack of a micro-positioning platform for fiber coupling positioning with large stroke, stable and precise movement.

[0005] The present invention provides a micro-positioning platform for optical fiber coupling positioning, comprising a base, positioning platform bases respectively arranged at four corners of the base, a first driving component arranged between two adjacent positioning platform bases, a displacement platform arranged in the middle of the base, a second driving component arranged on the displacement platform, a rotating platform arranged on the second driving component, and an optical fiber fixing member arranged on the rotating platform, wherein the first driving component is used to drive the displacement platform to move along the X-axis or the Y-axis, and the second driving component is used to drive the rotating platform to move along the Z-axis and rotate along the X-axis or the Y-axis; The first driving component includes a piezoelectric actuator, an amplifying component connected to the piezoelectric actuator, and a correcting component connected to the amplifying component. The amplifying component includes a first output end beam and a first flexible longitudinal beam. The first output end beam is connected to the displacement platform through the first flexible longitudinal beam. The correcting component includes a first connecting rod arranged in parallel on both sides of the first output end beam, a movable cross bar arranged in parallel with the first output end beam, and a first straight beam-like flexible hinge. The two ends of the first connecting rod are respectively connected to the first output end beam and the movable cross bar through the first straight beam-like flexible hinge. The first output end beam, the two first connecting rods and the movable cross bar form a parallelogram structure.

[0006] The above-mentioned micro-positioning platform for optical fiber coupling positioning, by arranging multiple first drive components on the outer side of the displacement platform, arranging multiple second drive components on the displacement platform, and arranging a rotating platform for fixing the optical fiber on the second drive component, can drive the displacement platform to move along the X-axis or Y-axis through the first drive component, thereby driving the optical fiber to move on the X-axis or Y-axis, realizing the movement of the optical fiber in two degrees of freedom, and then through multiple second drive components, the contact point of the rotating platform and the second drive component is moved simultaneously and with the same amplitude, realizing the movement of the optical fiber on the Z axis, and through multiple second drive components, the contact point of the rotating platform and the second drive component is moved simultaneously and with different amplitudes, thereby realizing the movement of the rotating platform around the X-axis or Y-axis, and then through multiple second drive components, the movement of the other three degrees of freedom of the optical fiber can be realized, so that the positioning platform realizes the function of optical fiber coupling. In addition, due to the drive of the first drive component, the piezoelectric actuator cooperates with the amplification component to realize both soft drive and precision movement, and improve the stroke. The first output end beam of the amplifying component is connected to the correction component on both sides, thereby forming a parallelogram structure with the correction component, so that when the first output end beam outputs, the left and right swings caused by the parasitic motion will affect the output direction and amplitude of the first output end beam, and the parasitic motion is transmitted to the correction component through the first straight beam flexible hinges on both sides, and then the parasitic motion is buffered and absorbed by the correction component, and the parasitic motion causes the movable crossbar to move without affecting the movement of the first output end beam, thereby effectively reducing the influence of the parasitic motion and ensuring the motion stability and accuracy of the positioning platform. Therefore, the present invention solves the problem in the prior art of the lack of a micro-positioning platform for optical fiber coupling positioning with a large stroke, stable and accurate motion.

[0007] In addition, the micro-positioning platform for optical fiber coupling positioning proposed in the present invention may also have the following additional technical features: Preferably, the amplification component also includes a first input end beam arranged on both sides of the piezoelectric actuator, a second connecting rod symmetrically arranged on both sides of the first input end beam close to one end of the piezoelectric actuator, and a first fixed end beam arranged outside the piezoelectric actuator on a side adjacent to the first input end beam, the first fixed end beam is used to be fixedly connected to the base, one end of the second connecting rod is connected to the first input end beam through a second straight beam flexible hinge, and the other end is connected to the first output end beam or the first fixed end beam through the second straight beam flexible hinge.

[0008] Preferably, the second driving component includes a first correction amplifier component and a second correction amplifier component arranged outside the first correction amplifier component, the first correction amplifier component includes the piezoelectric actuator, a second input end beam arranged on both sides of the piezoelectric actuator, and a first flexible arm symmetrically arranged on both sides of the second input end beam, one end of the first flexible arm is connected to the second input end beam, and the other end is connected to the first flexible arm on an adjacent side, the connection between the two first flexible arms is connected to the second correction amplifier component through a first flexible cross beam, and the second input end beam and the first flexible arm form a rhombus structure.

[0009] Preferably, the second correction amplifier component includes a second flexible longitudinal beam symmetrically arranged on both sides of the first correction amplifier component, a second fixed end beam and a connecting cross beam respectively arranged on the other two sides of the first correction amplifier component, and a second output end beam arranged on the outside of the connecting cross beam, the second output end beam is connected to the connecting cross beam through a curved flexible hinge, the two ends of the second flexible longitudinal beam are respectively connected to the connecting cross beam and the second fixed end beam through second flexible arms, and the connecting cross beam, the second flexible longitudinal beam, the second fixed end beam and the second flexible arm form a rhombus structure.

[0010] Preferably, three second drive assemblies are provided on the displacement platform, and the three second drive assemblies are distributed in a ring array around the central axis of the displacement platform.

[0011] Preferably, the rotating platform is triangular in shape, and the displacement platform is rectangular in shape. A plurality of first connecting holes are provided at the three top corners of the rotating platform so that the three corners of the rotating platform are respectively connected to the tops of the three second driving assemblies. The displacement platform is provided with second connecting holes equidistantly distributed around the central axis of the displacement platform so that the displacement platform is connected to the bottom of the second driving assembly.

[0012] Preferably, a mounting groove adapted to the optical fiber fixing part is provided in the middle of the rotating platform, an optical fiber fixing part is provided with an optical fiber fixing hole in the center, the bottom of the mounting groove, the displacement platform and the base are all provided with through holes adapted to the optical fiber fixing hole and coaxially arranged, and the optical fiber fixing part is provided with first fixing holes equidistantly distributed around the axis of the optical fiber fixing hole, so that the optical fiber fixing part can be fixed in the mounting groove.

[0013] Preferably, the outer contour of the positioning platform base is a right triangle, and the two right-angled sides of the positioning platform base are respectively connected to the outer sides of the first output end beams of the first driving assembly on both sides through a plurality of second flexible beams.

[0014] Preferably, the base is provided with a plurality of positioning bosses respectively adapted to the positioning platform base and the first fixed end beam, and the positioning bosses are provided with second fixing holes so that the plurality of positioning bosses are respectively connected to the positioning platform base and the first fixed end beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of a micro-positioning platform for optical fiber coupling positioning proposed in one embodiment of the present invention; Figure 2 An exploded view of a micro-positioning platform for optical fiber coupling positioning proposed in one embodiment of the present invention; Figure 3 It is a schematic diagram of assembling a positioning platform base, a displacement platform and a first driving component hiding a piezoelectric actuator proposed in an embodiment of the present invention; Figure 4 It is a schematic structural diagram of a first driving assembly that hides a piezoelectric actuator and a first flexible longitudinal beam proposed in an embodiment of the present invention; Figure 5 It is a schematic diagram of assembling a second driving component and a rotating platform of a hidden piezoelectric actuator proposed in one embodiment of the present invention; Figure 6 It is a structural schematic diagram of a second driving component of a hidden piezoelectric actuator proposed in an embodiment of the present invention; Figure 7 It is a structural schematic diagram of a rotating platform proposed in one embodiment of the present invention; Figure 8 It is a schematic structural diagram of a base proposed in one embodiment of the present invention.

[0016] Description of main structural symbols:

[0017] The following specific implementation manner will further illustrate the present invention in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0018] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0019] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which the present invention belongs. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0021] See also Figures 1 to 8 , shown is a micro-positioning platform for optical fiber coupling positioning in one embodiment of the present invention, comprising a base 10, positioning platform bases 20 respectively arranged at four corners of the base 10, a first driving assembly 30 arranged between two adjacent positioning platform bases 20, a displacement platform 40 arranged in the middle of the base 10, a second driving assembly 50 arranged on the displacement platform 40, a rotating platform 60 arranged on the second driving assembly 50, and an optical fiber fixing member 70 arranged on the rotating platform 60, the first driving assembly 30 is used to drive the displacement platform 40 to move along the X-axis or the Y-axis, and the second driving assembly 50 is used to drive the rotating platform 60 to move along the Z-axis and rotate along the X-axis or the Y-axis; The first driving component 30 includes a piezoelectric actuator 31, an amplifying component 32 connected to the piezoelectric actuator 31, and a correcting component 33 connected to the amplifying component 32. The amplifying component 32 includes a first output end beam 321 and a first flexible longitudinal beam 322. The first output end beam 321 is connected to the displacement platform 40 through the first flexible longitudinal beam 322. The correcting component 33 includes a first connecting rod 331 arranged in parallel on both sides of the first output end beam 321, a movable cross bar 332 arranged parallel to the first output end beam 321, and a first straight beam-like flexible hinge 333. The two ends of the first connecting rod 331 are respectively connected to the first output end beam 321 and the movable cross bar 332 through the first straight beam-like flexible hinge 333. The first output end beam 321, the two first connecting rods 331 and the movable cross bar 332 form a parallelogram structure.

[0022] It can be understood that by arranging a plurality of first drive components 30 outside the displacement platform 40, arranging a plurality of second drive components 50 on the displacement platform 40, and arranging a rotating platform 60 for fixing the optical fiber on the second drive component 50, the first drive component 30 can drive the displacement platform 40 to move along the X-axis or Y-axis, thereby driving the optical fiber to move on the X-axis or Y-axis, and realizing the movement of the optical fiber in two degrees of freedom, and then by a plurality of second drive components 50, the contact point of the rotating platform 60 and the second drive component 50 is moved simultaneously and with the same amplitude, realizing the movement of the optical fiber on the Z-axis, and by a plurality of second drive components 50, the contact point of the rotating platform 60 and the second drive component 50 is moved simultaneously and with different amplitudes, thereby realizing the movement of the rotating platform 60 around the X-axis or Y-axis, and then by a plurality of second drive components 50, the movement of the other three degrees of freedom of the optical fiber can be realized, so that the positioning platform realizes the function of optical fiber coupling. In addition, due to the driving of the first drive component 30, the piezoelectric actuator 31 and the amplifying component 32 realize a soft drive, achieves the effect of precise movement, and increases the stroke. The first output end beam 321 of the amplifying component 32 is connected to the correction component 33 on both sides, thereby forming a parallelogram structure with the correction component 33, so that when the first output end beam 321 outputs, the left and right swings caused by the parasitic motion will affect the output direction and amplitude of the first output end beam 321, and the parasitic motion is transmitted to the correction component 33 through the first straight beam flexible hinges 333 on both sides, and then the parasitic motion is buffered and absorbed by the correction component 33, and the parasitic motion causes the movable crossbar 332 to move, and will no longer affect the movement of the first output end beam 321, thereby effectively reducing the influence of the parasitic motion and ensuring the motion stability and accuracy of the positioning platform. Therefore, the present invention solves the problem in the prior art of the lack of a micro-positioning platform for optical fiber coupling positioning with a large stroke, stable and accurate motion.

[0023] It should be noted that in this article, the coordinates are established with the center point of the displacement platform as the origin, and the vertical line from the origin to any right angle side of the displacement platform is the X-axis. The vertical line from the origin to the right angle side of the displacement platform parallel to the X-axis is the Y-axis. A straight line is perpendicular to the rotation platform and the displacement platform and passes through the origin, and this straight line is the Z-axis. Specifically, the amplifying component 32 also includes a first input end beam 323 arranged on both sides of the piezoelectric actuator 31, a second connecting rod 324 symmetrically arranged on both sides of the first input end beam 323 close to one end of the piezoelectric actuator 31, and a first fixed end beam 325 arranged outside the piezoelectric actuator 31 on the side adjacent to the first input end beam 323. The first fixed end beam 325 is used to be fixedly connected to the base 10, one end of the second connecting rod 324 is connected to the first input end beam 323 through a second straight beam flexible hinge 326, and the other end is connected to the first output end beam 321 or the first fixed end beam 325 through a second straight beam flexible hinge 326.

[0024] It should be noted that, in a specific implementation, a voltage is applied to both ends of the piezoelectric actuator 31, and its output end will generate displacement, thereby pushing the first input end beam 323 to deform, so that it rotates clockwise around the second straight beam-like flexible hinge 326 on the side close to the first output end beam 321, thereby transmitting the displacement to the second connecting rod 324 connected thereto through the second straight beam-like flexible hinge 326, so that the second connecting rod 324 rotates counterclockwise around the second straight beam-like flexible hinge 326, thereby realizing the first amplification of the output micro-displacement of the piezoelectric actuator 31. At the same time, the second connecting rod 324 will rotate counterclockwise around the second straight beam-like flexible hinge 326 on the other side connected thereto, and transmit the displacement to the first output end beam 321 through the second straight beam-like flexible hinge 326, thereby realizing the secondary amplification of the output displacement of the piezoelectric actuator 31. Moreover, the displacement of the first output end beam 321 that partially sways left and right will be transmitted to the first connecting rod 331 through the first straight beam flexible hinge 333, and transmitted to the movable crossbar 332 through the first straight beam flexible hinge 333 on the other side of the first connecting rod 331, and then the influence of the parasitic motion will be reduced by using the characteristics of the parallelogram, so that the movable crossbar 332 moves to absorb the displacement. The other linear displacement of the first output end beam 321 is transmitted to the displacement platform 40 through the first flexible longitudinal beam 322 to drive the displacement platform 40 to move. Therefore, through the multiple first driving components 30 outside the displacement platform 40, the displacement platform 40 can be accurately controlled to move with a large stroke on the X-axis and the Y-axis, that is, the movement of the positioning platform in two degrees of freedom can be realized.

[0025] In addition, the second driving component 50 includes a first correction amplifier component 51 and a second correction amplifier component 52 arranged on the outside of the first correction amplifier component 51, the first correction amplifier component 51 includes a piezoelectric actuator 31, a second input end beam 511 arranged on both sides of the piezoelectric actuator 31, and a first flexible arm 512 symmetrically arranged on both sides of the second input end beam 511, one end of the first flexible arm 512 is connected to the second input end beam 511, and the other end is connected to the first flexible arm 512 on the adjacent side, the connection between the two first flexible arms 512 is connected to the second correction amplifier component 52 through a first flexible cross beam 513, and the second input end beam 511 and the first flexible arm 512 form a rhombus structure. Furthermore, the second correction amplifier component 52 includes a second flexible longitudinal beam 521 symmetrically arranged on both sides of the first correction amplifier component 51, a second fixed end beam 522 and a connecting cross beam 523 respectively arranged on the other two sides of the first correction amplifier component 51, and a second output end beam 524 arranged on the outside of the connecting cross beam 523, the second output end beam 524 is connected to the connecting cross beam 523 through a curved flexible hinge 525, and the two ends of the second flexible longitudinal beam 521 are respectively connected to the connecting cross beam 523 and the second fixed end beam 522 through a second flexible arm 526, and the connecting cross beam 523, the second flexible longitudinal beam 521, the second fixed end beam 522 and the second flexible arm 526 form a rhombus structure.

[0026] Specifically, in actual use, when voltage is applied to both ends of the piezoelectric actuator 31, its output end will generate displacement, thereby pushing the second input end beam 511 to deform. Taking the second input end beam 511 at the top as an example, the first flexible arm 512 of the lower right half of the second input end beam 511 rotates clockwise, transferring the displacement to the first flexible crossbeam 513, and then the first flexible crossbeam 513 pulls the second flexible longitudinal beam 521 inward, so that the second flexible arm 526 rotates counterclockwise due to the deformation of the second flexible longitudinal beam 521, and finally the connecting crossbeam 523, the curved flexible hinge 525 and the second output end beam 524 are displaced upward. When only the piezoelectric actuator 31 in one second drive assembly 50 is controlled, the output ends of the other two second drive assemblies 50 will not actively generate displacement. However, due to the existence of the curved flexible hinge 525, the rotating platform 60 will deflect accordingly. By controlling the different displacement outputs of the piezoelectric actuators 31 of the three second drive components 50, a variety of linkage combinations of flexible beams and flexible hinges can be achieved, thereby accurately controlling the rotation of the upper rotating platform 60 around the X and Y axes or the translation along the Z axis, thereby achieving the movement of the positioning platform in three degrees of freedom. In addition, through the diamond structure distribution of the first correction and amplification component 51, the partial parasitic motion displacements of the two second input end beams 511 will offset each other, and through the diamond structure distribution of the second correction and amplification component 52, the second flexible arm 526 on the second correction and amplification component 52 forms a parallelogram structure to buffer and absorb the parasitic motion.

[0027] In addition, three second drive assemblies 50 are provided on the displacement platform 40, and the three second drive assemblies 50 are distributed in a ring array around the central axis of the displacement platform 40. The second drive assembly 50 is used to drive the rotating platform 60 to move up and down, and to rotate around the X-axis or Y-axis, so it is necessary to apply external force to at least three places of the rotating platform 60. Due to the application scenario of the displacement platform 40, the space occupied by the displacement platform 40 needs to be as small as possible, so three second drive assemblies 50 are the most preferred. In addition, in order to ensure the stability and accuracy of the movement of the rotating platform 60, the three second drive assemblies 50 are distributed in a ring array around the central axis of the displacement platform 40, so that the rotating platform 60 is evenly stressed, ensuring the smooth and accurate displacement of the rotating platform 60.

[0028] Specifically, the rotating platform 60 is triangular, and the displacement platform 40 is rectangular. A plurality of first connection holes 61 are provided at the three vertices of the rotating platform 60, so that the three corners of the rotating platform 60 are respectively connected to the tops of the three second drive assemblies 50. The displacement platform 40 is provided with second connection holes 41 equidistantly distributed around the central axis of the displacement platform 40, so that the displacement platform 40 is connected to the bottom of the second drive assembly 50. Through the plurality of first connection holes 61, the second drive assembly 50 applies displacement to the rotating platform 60 through multiple points, so as to avoid the displacement of the parasitic motion being consistent when applying at a single point, and then the displacement change caused by the large parasitic motion occurs. The multi-point application makes the displacement of the parasitic motion at different points different, and then there will be a situation of mutual cancellation, thereby reducing the parasitic motion. The driving motion in the main direction is all along the axial direction, and the multi-point application will not produce a situation of cancellation. In addition, the plurality of first connection holes 61 at each vertices are symmetrically distributed, and are distributed in a ring array with the central axis of the rotating platform 60, so as to enhance the fixing effect and structural stability of the rotating platform 60.

[0029] In addition, a mounting groove 62 adapted to the optical fiber fixing member 70 is provided in the middle of the rotating platform 60, an optical fiber fixing hole is provided in the center of the optical fiber fixing member 70, and a through hole 63 adapted to and coaxially arranged with the optical fiber fixing hole 71 is provided at the bottom of the mounting groove 62, the displacement platform 40 and the base 10, and a first fixing hole 72 equidistantly distributed around the axis of the optical fiber fixing hole 71 is provided on the optical fiber fixing member 70, so that the optical fiber fixing member 70 is fixed in the mounting groove 62. The multi-hole coaxial design ensures the symmetry and accuracy of the entire spatial micro-positioning platform during the movement process, and reduces the accumulation of errors. In a specific implementation, each through hole 63 is as large as possible to reduce the overall weight, so that the piezoelectric actuator 31 can make the positioning platform move more under the same power, thereby increasing the stroke of the positioning platform in disguise.

[0030] Furthermore, the outer contour of the positioning platform base 20 is a right triangle, and the two right-angled sides of the positioning platform base 20 are respectively connected to the outer sides of the first output end beam 321 of the first drive assembly 30 on both sides through multiple second flexible beams 21. The positioning platform base 20 is connected to the first output end beam 321 through multiple second flexible beams 21, which is used to support the first output beam to be suspended above the base 10, and to avoid the parasitic displacement direction generated by the connection of a single second flexible beam 21 to be consistent, which affects the displacement of the first output end beam 321. In addition, in the specific implementation, the first drive assembly 30, the second drive assembly 50 and the various parts therein are all arranged in a uniform circular array with the central axis of the displacement platform 40 as the symmetry axis. This design effectively ensures the structural symmetry of the entire micro-positioning platform, thereby greatly improving the accuracy and stability during the movement process.

[0031] Specifically, the base 10 is provided with a plurality of positioning bosses 11 respectively adapted to the positioning platform base 20 and the first fixed end beam 325, and the positioning bosses 11 are provided with second fixing holes 12, so that the plurality of positioning bosses 11 are respectively connected to the positioning platform base 20 and the first fixed end beam 325. By providing the positioning bosses 11, part of the structure of the first drive assembly 30 is fixedly connected to the base 10, and the main part is suspended above the base 10, thereby effectively reducing the motion interference between the internal components of the first drive assembly 30, thereby improving the displacement accuracy of the positioning platform and reducing the system error.

[0032] In summary, a micro-positioning platform for optical fiber coupling positioning in the above-mentioned embodiment of the present invention, by arranging multiple first driving components 30 on the outer side of the displacement platform 40, arranging multiple second driving components 50 on the displacement platform 40, and arranging a rotating platform 60 for fixing the optical fiber on the second driving component 50, can drive the displacement platform 40 to move along the X-axis or the Y-axis through the first driving component 30, thereby driving the optical fiber to move on the X-axis or the Y-axis, and realizing the movement of the optical fiber in two degrees of freedom, and then through the multiple second driving components 50, the contact point of the rotating platform 60 and the second driving component 50 is moved simultaneously and with the same amplitude, and the movement of the optical fiber on the Z axis is realized, and through the multiple second driving components 50, the contact point of the rotating platform 60 and the second driving component 50 is moved simultaneously and with different amplitudes, so that the rotating platform 60 can be moved around the X-axis or the Y-axis, and then through the multiple second driving components 50, the movement of the other three degrees of freedom of the optical fiber can be realized, so that the positioning platform realizes the function of optical fiber coupling. In addition, due to the driving of the first driving component 30, the piezoelectric actuator 31 and the amplifying component 32 realize a smooth driving, achieve the effect of precise movement, and increase the stroke. The first output end beam 321 of the amplifying component 32 is connected to the correction component 33 on both sides, thereby forming a parallelogram structure with the correction component 33, so that when the first output end beam 321 outputs, the left and right swings caused by the parasitic motion will affect the output direction and amplitude of the first output end beam 321, and the parasitic motion is transmitted to the correction component 33 through the first straight beam flexible hinges 333 on both sides, and then the parasitic motion is buffered and absorbed by the correction component 33, and the parasitic motion causes the movable crossbar 332 to move, and will no longer affect the movement of the first output end beam 321, thereby effectively reducing the influence of the parasitic motion, and ensuring the motion stability and accuracy of the positioning platform. Therefore, the present invention solves the problem of the lack of a micro-positioning platform for optical fiber coupling positioning with a large stroke, stable and accurate motion in the prior art.

[0033] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0034] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the patent of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. A micro-positioning platform for optical fiber coupling positioning, characterized in that: The optical fiber fixing device comprises a base, positioning platform bases respectively arranged at the four corners of the base, a first driving assembly arranged between two adjacent positioning platform bases, a displacement platform arranged in the middle of the base, a second driving assembly arranged on the displacement platform, a rotating platform arranged on the second driving assembly, and an optical fiber fixing member arranged on the rotating platform, wherein the first driving assembly is used to drive the displacement platform to move along the X-axis or the Y-axis, and the second driving assembly is used to drive the rotating platform to move along the Z-axis and rotate along the X-axis or the Y-axis; The first driving component includes a piezoelectric actuator, an amplifying component connected to the piezoelectric actuator, and a correcting component connected to the amplifying component. The amplifying component includes a first output end beam and a first flexible longitudinal beam. The first output end beam is connected to the displacement platform through the first flexible longitudinal beam. The correcting component includes a first connecting rod arranged in parallel on both sides of the first output end beam, a movable cross bar arranged in parallel with the first output end beam, and a first straight beam-like flexible hinge. The two ends of the first connecting rod are respectively connected to the first output end beam and the movable cross bar through the first straight beam-like flexible hinge. The first output end beam, the two first connecting rods and the movable cross bar form a parallelogram structure.

2. The micro-positioning platform for optical fiber coupling positioning according to claim 1, characterized in that: The amplifying component also includes a first input end beam arranged on both sides of the piezoelectric actuator, a second connecting rod symmetrically arranged on both sides of the first input end beam close to one end of the piezoelectric actuator, and a first fixed end beam arranged outside the piezoelectric actuator on a side adjacent to the first input end beam, the first fixed end beam is used to be fixedly connected to the base, one end of the second connecting rod is connected to the first input end beam through a second straight beam flexible hinge, and the other end is connected to the first output end beam or the first fixed end beam through the second straight beam flexible hinge.

3. The micro-positioning platform for optical fiber coupling positioning according to claim 1, characterized in that: The second driving component includes a first correction amplifier component and a second correction amplifier component arranged outside the first correction amplifier component, the first correction amplifier component includes the piezoelectric actuator, a second input end beam arranged on both sides of the piezoelectric actuator, and a first flexible arm symmetrically arranged on both sides of the second input end beam, one end of the first flexible arm is connected to the second input end beam, and the other end is connected to the first flexible arm on an adjacent side, the connection between the two first flexible arms is connected to the second correction amplifier component through a first flexible cross beam, and the second input end beam and the first flexible arm form a rhombus structure.

4. The micro-positioning platform for optical fiber coupling positioning according to claim 3, characterized in that: The second correction amplifier component includes a second flexible longitudinal beam symmetrically arranged on both sides of the first correction amplifier component, a second fixed end beam and a connecting cross beam respectively arranged on the other two sides of the first correction amplifier component, and a second output end beam arranged on the outside of the connecting cross beam, the second output end beam is connected to the connecting cross beam through a curved flexible hinge, and the two ends of the second flexible longitudinal beam are respectively connected to the connecting cross beam and the second fixed end beam through second flexible arms, and the connecting cross beam, the second flexible longitudinal beam, the second fixed end beam and the second flexible arm form a rhombus structure.

5. The micro-positioning platform for optical fiber coupling positioning according to claim 3, characterized in that: The displacement platform is provided with three second drive assemblies, and the three second drive assemblies are distributed in a ring array around the central axis of the displacement platform.

6. The micro-positioning platform for optical fiber coupling positioning according to claim 5, characterized in that: The rotating platform is triangular in shape, and the displacement platform is rectangular in shape. A plurality of first connecting holes are provided at the three top corners of the rotating platform so that the three corners of the rotating platform are respectively connected to the tops of the three second driving assemblies. The displacement platform is provided with second connecting holes equidistantly distributed around the central axis of the displacement platform so that the displacement platform is connected to the bottom of the second driving assembly.

7. The micro-positioning platform for optical fiber coupling positioning according to claim 6, characterized in that: A mounting groove adapted to the optical fiber fixing part is provided in the middle of the rotating platform, an optical fiber fixing part is provided with an optical fiber fixing hole in the center, a through hole adapted to the optical fiber fixing hole and coaxially arranged is provided at the bottom of the mounting groove, the displacement platform and the base, and first fixing holes equidistantly distributed around the axis of the optical fiber fixing hole are provided on the optical fiber fixing part so that the optical fiber fixing part can be fixed in the mounting groove.

8. The micro-positioning platform for optical fiber coupling positioning according to claim 2, characterized in that: The outer contour of the positioning platform base is a right triangle, and the two right-angled sides of the positioning platform base are respectively connected to the outer sides of the first output end beams of the first driving assembly on both sides through a plurality of second flexible beams.

9. The micro-positioning platform for optical fiber coupling positioning according to claim 8, characterized in that: The base is provided with a plurality of positioning bosses respectively matched with the positioning platform base and the first fixed end beam, and the positioning bosses are provided with second fixing holes so that the plurality of positioning bosses are respectively connected with the positioning platform base and the first fixed end beam.

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