Design rule inspection and test pattern generation method, storage medium and terminal
By classifying and automatically retrieving the design rule information table, the problem of inefficient design rule inspection and development in the existing technology is solved, and automated design rule inspection and test graph generation is realized, adapting to the needs of different process nodes and improving Development efficiency.
Patent Information
- Application Number
- CN202411289316.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-13
- Publication Date
- 2024-12-17
AI Technical Summary
The existing technology is inefficient in the development of design rules checking technical documents, requiring a lot of manual code writing and manual drawing of test graphics, resulting in a long development cycle. With the advancement of process level, design rules change frequently, and previous development works need to be updated. , similar to redevelopment.
By classifying the design rule information table, dividing different types of inspection item information, and establishing corresponding inspection item functions based on each inspection item information, including test graphic generation function and design rule inspection function, and automatically calling the corresponding function to generate tests Graphics and complete design rules checks, and automatically modify variable parameters to adapt to different process nodes.
It improves the efficiency of design rule inspection and test graphics development, avoids the need for redevelopment when replacing process nodes, reduces the time for manpower to write code and draw test graphics, and realizes automated design rule inspection.
Smart Images
Figure CN119150793A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a design rule checking and test pattern generating method, a storage medium and a terminal. Background Art
[0002] The Design Rule Check (DRC) of the layout is an essential verification step in circuit design. It can help layout engineers quickly check whether the circuit layout complies with the process design rules provided by the wafer fab.
[0003] When developing design rule checking technical documents, a large number of test patterns are usually reversely established based on the process design rules, such as correct feature patterns and error feature patterns, to verify the accuracy of the design rule checking code. Among them, the correct feature pattern meets the requirements of the layout design rules, and the error feature pattern does not meet the requirements of the layout design.
[0004] However, there are still many problems in the prior art in the process of developing design rule checking technical documents. Summary of the invention
[0005] The technical problem solved by the present invention is to provide a design rule checking and test pattern generating method, storage medium and terminal, so as to improve the development efficiency of the design rule checking and test pattern.
[0006] To solve the above problems, the present invention provides a method for generating a design rule check and a test pattern, comprising: providing a design rule information table; classifying the design rule information table to divide different types of check item information; establishing a corresponding check item function based on each type of check item information, each group of the check item functions including a test pattern generation function and a design rule check function; reading the design rule information table; identifying the check item information, and calling the corresponding check item function based on the check item information; running the check item function to generate a test pattern and complete the design rule check of the test pattern.
[0007] Optionally, the method of running the check item function to generate the test pattern and completing the design rule check on the test pattern includes: running the test pattern generation function to generate the test pattern; running the design rule check function to complete the design rule check on the test pattern.
[0008] Optionally, the inspection item information includes: inspection item name, graphic feature value, layer identifier and drawing association description.
[0009] Optionally, the inspection item name includes: one or more of minimum spacing, minimum line width, maximum spacing, maximum line width, minimum graphic density and minimum area.
[0010] Optionally, the inspection item function further includes: a layer identification graphic production function.
[0011] Optionally, the check item function is run to generate a layer identification graphic.
[0012] Optionally, the method of running the inspection item function to generate a layer identification graphic includes: running the layer identification graphic production function to generate the layer identification graphic.
[0013] Optionally, the test pattern includes: a correct test pattern that complies with the requirements of the layout design rules, and an erroneous test pattern that does not comply with the requirements of the layout design rules.
[0014] Optionally, the correct test pattern is generated based on the pattern feature value.
[0015] Optionally, the error test pattern is generated based on a drawing association description.
[0016] Optionally, the drawing association description includes: determining a drawing area with the graphic characteristic value as a median value; and generating the error test pattern within the drawing area at intervals of a preset step length.
[0017] Optionally, the test pattern generation function includes: the graphic morphology of the test pattern, and the number of the test patterns of each graphic morphology.
[0018] Correspondingly, the technical solution of the present invention also provides a storage medium on which computer instructions are stored, and when the computer instructions are executed, the steps of the method described in any one of the above technical solutions are executed.
[0019] Correspondingly, the technical solution of the present invention also provides a terminal, including a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, and when the processor executes the computer instructions, the steps of the method described in any one of the above technical solutions are executed.
[0020] Compared with the prior art, the technical solution of the present invention has the following advantages:
[0021] In the method for generating design rule checking and test patterns of the technical solution of the present invention, by classifying the design rule information table, different types of check item information are divided, and corresponding check item functions are established based on each of the check item information, each group of the check item functions includes a test pattern generation function and a design rule checking function, and after reading and identifying the check item information on the design rule information table, the corresponding check item function is automatically called, and in the process of running the check item function, a test pattern is generated and the design rule check of the test pattern is completed. By establishing the corresponding check item function in advance for the universal check items, and automatically modifying the corresponding variable parameter part in the check item function based on the automatic identification of the check item information, the requirements of different process nodes for design rule checking are met, so after changing the process node, the design rule checking and test patterns do not need to be redeveloped. In addition, during the development process, each universal check item function can be quickly called without manual rewriting, thereby improving the development efficiency of design rule checking and test patterns. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 is a flow chart of a method for generating a design rule check and a test pattern according to an embodiment of the present invention;
[0023] Figure 2 It is a schematic diagram of a layer identification pattern in a method for generating a design rule check and a test pattern according to an embodiment of the present invention;
[0024] Figure 3 It is a schematic diagram of a correct test pattern and an incorrect test pattern in a design rule checking and test pattern generating method according to an embodiment of the present invention. DETAILED DESCRIPTION
[0025] As described in the background art, there are still many problems in the prior art in the process of developing design rule checking technical documents, which will be described in detail below.
[0026] Currently, the development of a complete design rule check (DRC) technical file usually requires the following steps: engineers develop a set of design rule check technical files according to the design rules and based on the design tools; engineers draw corresponding test graphics according to the design rules to verify the accuracy of the design rule check technical files, which generally include correct feature graphics and incorrect feature graphics, where the correct feature graphics meet the requirements of the layout design rules, and the incorrect feature graphics do not meet the requirements of the layout design.
[0027] Taking the 180nm process as an example, when developing the design rule checking technical documents based on the above method, it is necessary to write the codes one by one, and debug them. There are many codes to be written, so the corresponding development cycle generally takes 2 to 3 months, and the test graphics also need to be manually drawn one by one, and the drawing cycle also takes 1 to 2 months. Moreover, the development cycle is calculated when there are fewer types of test graphics. In order to ensure accuracy, several more groups of each test graphic are generally designed during the development stage, which will lead to a longer development cycle. With the advancement of process level, design rules are also constantly changing. The previously developed design rule checking technical documents and drawn test graphics also need to be updated, which is time-consuming. Developing design rule checking technical documents for different process platforms is basically equivalent to redevelopment, such as from 180nm process to 110nm process.
[0028] On this basis, the present invention provides a method, storage medium and terminal for generating design rule checking and test patterns, by classifying the design rule information table, dividing different types of check item information, and establishing corresponding check item functions based on each of the check item information, each group of the check item functions includes a test pattern generation function and a design rule checking function, after reading and identifying the check item information on the design rule information table, the corresponding check item function is automatically called, and in the process of running the check item function, a test pattern is generated and the design rule check of the test pattern is completed. By establishing the corresponding check item function in advance for the universal check items, and automatically modifying the corresponding variable parameter part in the check item function based on the automatic identification of the check item information, the requirements of different process nodes for design rule checking are met, so after changing the process node, the design rule checking and test pattern do not need to be redeveloped. In addition, in the development process, each universal check item function can be quickly called without manual rewriting, so that the development efficiency of design rule checking and test patterns can be improved.
[0029] Figure 1 1 is a flow chart of a method for generating a design rule check and a test pattern according to an embodiment of the present invention, comprising:
[0030] Step S101, providing a design rule information table;
[0031] Step S102, classifying the design rule information table to divide different types of inspection item information;
[0032] Step S103, establishing a corresponding inspection item function based on each type of inspection item information, each group of the inspection item functions including a test pattern generation function and a design rule checking function;
[0033] Step S104, reading the design rule information table;
[0034] Step S105, identifying the inspection item information, and calling the corresponding inspection item function based on the inspection item information;
[0035] Step S106, running the check item function, generating a test pattern and completing a design rule check on the test pattern.
[0036] The steps of the design rule checking and test pattern generation method will be described in detail below with reference to the accompanying drawings.
[0037] Figure 2 It is a schematic diagram of a layer identification pattern in a method for generating a design rule check and a test pattern according to an embodiment of the present invention; Figure 3 It is a schematic diagram of a correct test pattern and an incorrect test pattern in a design rule checking and test pattern generating method according to an embodiment of the present invention.
[0038] In step S101 , a design rule information table is provided.
[0039] It should be noted that, in this embodiment, the design rule information table (Design Rule Table) still needs to be sorted out by relevant personnel in the technical field, and the design rule information table is prepared based on the specific needs of the customer for the chip. The formed design rule information table is in text format, and most computer programming languages currently on the market can read the design rule information table. Specifically, such as Python programming language or C++ programming language, etc.
[0040] In step S102, the design rule information table is classified to divide different types of inspection item information.
[0041] It should be noted that since the design rule information table only objectively records the items of design rule checking, it is necessary to manually organize and divide them to confirm the specific inspection items that need to be done from the design rule information table for subsequent establishment of corresponding inspection item functions.
[0042] In this embodiment, the inspection item information includes: inspection item name, graphic feature value, layer identifier and drawing association description.
[0043] In this embodiment, the names of the inspection items include: one or more of minimum spacing (min space), minimum line width (minwidth), maximum spacing (max space), maximum line width (max space), minimum graphic density (min density) and minimum area (min area).
[0044] In this embodiment, the graphic characteristic value is the specific inspection value corresponding to each inspection item name.
[0045] Please refer to Figure 2 In this embodiment, the layer identifier is the process layer where the test pattern corresponding to each design rule check is specifically located; correspondingly, the inspection item function also includes: a layer identifier pattern generation function. The layer identifier pattern generation function is to draw a layer identifier pattern correspondingly after identifying the layer identifier, such as the first metal layer (Metal1, M1) and the contact plug (contact, CT) in the figure.
[0046] Please refer to Figure 3 In this embodiment, the test pattern includes: a correct test pattern 100 that meets the requirements of the layout design rules, and an incorrect test pattern 101 that does not meet the requirements of the layout design rules.
[0047] Please continue to refer to Figure 3 In this embodiment, the correct test pattern 100 is generated based on the pattern characteristic value. Specifically, when performing a design rule check for the minimum line width, and the characteristic value of the minimum line width is 1 micron, the correct test pattern 100 with a line width of 1 micron will be drawn accordingly.
[0048] In this embodiment, the error test pattern 101 is generated based on the drawing association description.
[0049] Please continue to refer to Figure 3 In this embodiment, the drawing association description includes: determining a drawing area with the median value of the graphic characteristic value; generating the error test pattern 101 within the drawing area at intervals of a preset step length. Specifically, when the graphic characteristic value is 1 micron, the drawing area of 0.995 microns to 1.005 microns is determined with the median value of the graphic characteristic value, and the preset step length is 0.001 microns, correspondingly, 10 groups of error test patterns 101 with different line widths will be drawn.
[0050] In this embodiment, the test pattern generation function includes: the graphic morphology of the test pattern, and the number of the test patterns of each graphic morphology. Taking the design rule check of the minimum line width as an example, when drawing the test pattern of the minimum line width, different graphic morphologies will be designed, such as rectangular, L-shaped, Z-shaped or trapezoidal graphic morphologies. The selection of these graphic morphologies is based on the experience of personnel in this technical field. In addition, the number of the test patterns of each graphic morphology will also be defined in the test pattern generation function, such as the number of the test patterns of various sizes under each graphic morphology can be defined to range from dozens to hundreds.
[0051] In step S104, the design rule information table is read.
[0052] It should be noted that, in this embodiment, the design rule information table is first stored in the running terminal. When the program is running, the storage path of the design rule information table is input or set in advance, and then the design rule information table is queried and read based on the storage path.
[0053] In step S105, the inspection item information is identified, and the corresponding inspection item function is called based on the inspection item information.
[0054] Based on the information statements recorded in the design rule information table, the inspection item information contained in the statements is identified, and then the corresponding inspection item function is automatically called.
[0055] In step S106, the check item function is run to generate a test pattern and complete the design rule check on the test pattern.
[0056] By classifying the design rule information table, different types of check item information are divided, and corresponding check item functions are established based on each type of check item information. Each group of check item functions includes a test pattern generation function and a design rule check function. After reading and identifying the check item information on the design rule information table, the corresponding check item function is automatically called. In the process of running the check item function, a test pattern is generated and the design rule check of the test pattern is completed. By establishing the corresponding check item function for the universal check items in advance, and automatically modifying the corresponding variable parameter part in the check item function based on the automatic identification of the check item information, the requirements of different process nodes for design rule checking are met. Therefore, after changing the process node, the design rule check and test pattern do not need to be redeveloped. In addition, during the development process, each universal check item function can be quickly called without the need for manual rewriting, thereby improving the development efficiency of design rule checking and test patterns.
[0057] In this embodiment, the method of running the check item function, generating the test pattern and completing the design rule check on the test pattern includes: running the test pattern generation function to generate the test pattern; running the design rule check function to complete the design rule check on the test pattern.
[0058] In this embodiment, the method of running the inspection item function to generate the layer identification graphic includes: running the layer identification graphic production function to generate the layer identification graphic.
[0059] It should be noted that, in this embodiment, after running the check item function, manual inspection is still required, and the manual inspection is mainly to determine whether the running result of the design rule check function is consistent with the design result. Specifically, if a total of 10 correct test graphics 100 and 10 error test graphics 101 are designed in the test pattern generation function, if the result of running the design rule check function also shows 10 correct test graphics 100 and 10 error test graphics 101, it means that both the test pattern generation function and the design rule check function are correct; if the result of running the design rule check function also shows 11 correct test graphics 100 and 9 error test graphics 101, the design result and the running result are inconsistent, and it is necessary to manually check the problems existing in the test pattern generation function and the design rule check function.
[0060] Correspondingly, an embodiment of the present invention further provides a storage medium on which computer instructions are stored. When the computer instructions are executed, the steps of any one of the above-mentioned embodiment methods are executed.
[0061] Correspondingly, an embodiment of the present invention further provides a terminal, including a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, and when the processor executes the computer instructions, the steps of any one of the above-mentioned embodiment methods are executed.
[0062] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.
Claims
1. A method for generating a design rule check and a test pattern, characterized in that: include: Provide design rule information table; Classifying the design rule information table to divide different types of inspection item information; Establishing a corresponding inspection item function based on each type of inspection item information, each group of inspection item functions including a test pattern generation function and a design rule checking function; Reading the design rule information table; Identify the inspection item information, and call the corresponding inspection item function based on the inspection item information; The check item function is run to generate a test pattern and complete a design rule check on the test pattern.
2. The method for generating a design rule check and a test pattern as claimed in claim 1, wherein: The method of running the check item function, generating the test pattern and completing the design rule check on the test pattern includes: running the test pattern generation function to generate the test pattern; running the design rule check function to complete the design rule check on the test pattern.
3. The method for generating a design rule check and a test pattern as claimed in claim 1, wherein: The inspection item information includes: inspection item name, graphic feature value, layer identifier and drawing association description.
4. The method for generating a design rule check and a test pattern as claimed in claim 3, wherein: The names of the inspection items include: one or more of minimum spacing, minimum line width, maximum spacing, maximum line width, minimum graphic density and minimum area.
5. The method for generating a design rule check and a test pattern as claimed in claim 3, wherein: The inspection item function also includes: a layer identification graphic production function.
6. The method for generating a design rule check and a test pattern as claimed in claim 5, wherein: The inspection item function is run to generate a layer identification graphic.
7. The method for generating a design rule check and a test pattern as claimed in claim 6, wherein: The method of running the inspection item function to generate a layer identification graphic includes: running the layer identification graphic production function to generate the layer identification graphic.
8. The method for generating a design rule check and a test pattern as claimed in claim 3, wherein: The test patterns include: correct test patterns that meet the requirements of layout design rules, and erroneous test patterns that do not meet the requirements of layout design rules.
9. The method for generating a design rule check and a test pattern as claimed in claim 8, wherein: The correct test pattern is generated based on the pattern feature value.
10. The method for generating a design rule check and a test pattern according to claim 8, wherein: The error test pattern is generated based on the drawing association description.
11. The method for generating a design rule check and a test pattern according to claim 10, wherein: The drawing association description includes: determining a drawing area with the graphic characteristic value as a median value; and generating the error test pattern within the drawing area at intervals of a preset step length.
12. The method for generating a design rule check and a test pattern according to claim 1, wherein: The test pattern generation function includes: the graphic morphology of the test pattern, and the number of the test patterns of each graphic morphology.
13. A storage medium having computer instructions stored thereon, characterized in that: When the computer instructions are executed, the steps of the method according to any one of claims 1 to 12 are executed.
14. A terminal comprising a memory and a processor, wherein the memory stores computer instructions that can be executed on the processor, characterized in that: When the processor runs the computer instructions, the steps of the method according to any one of claims 1 to 12 are performed.