Plasma processing apparatus and plasma processing method

Abstract

In a plasma processing apparatus according to an exemplary embodiment, a pulse-shaped negative-polarity DC voltage is periodically applied to a lower electrode. The frequency of the period in which the pulse-shaped negative-polarity DC voltage is applied to the lower electrode is lower than the frequency of the high-frequency power supplied to generate the plasma. The high-frequency power is supplied during a first partial period within the cycle. The power level of the high-frequency power during the second partial period within the cycle is set to a power level that decreases from the power level of the high-frequency power during the first partial period.

Description

[0001] This application is a divisional application of an application with a filing date of December 17, 2019, application number 201980087489.1, and invention name “Plasma processing device and plasma processing method”. Technical Field

[0002] Exemplary embodiments of the present invention relate to a plasma processing apparatus and a plasma processing method. Background Art

[0003] In the plasma treatment of the substrate, a plasma treatment device is used. In the following patent document 1, a plasma treatment device is described. The plasma treatment device described in patent document 1 includes a chamber, an electrode, a high-frequency power supply, and a high-frequency bias power supply. The electrode is arranged in the chamber. The substrate is placed on the electrode. The high-frequency power supply supplies a pulse of high-frequency power to form a high-frequency electric field in the chamber. The high-frequency bias power supply supplies a pulse of high-frequency bias power to the electrode.

[0004] Previous technical literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 10-64915 Summary of the invention

[0007] The present invention provides a technique for controlling the energy of ions supplied from plasma to a substrate.

[0008] Means for solving technical problems

[0009] In an exemplary embodiment, a plasma processing device is provided. The plasma processing device includes a chamber, a substrate support, a high-frequency power supply, a bias power supply, and a control unit. The substrate support has a lower electrode and an electrostatic chuck. The electrostatic chuck is disposed on the lower electrode. The substrate support is configured to support a substrate placed thereon in the chamber. The high-frequency power supply is configured to generate high-frequency power supplied to generate plasma from gas in the chamber. The high-frequency power has a first frequency. The bias power supply is electrically connected to the lower electrode. The bias power supply is configured to periodically apply a pulsed negative-polarity DC voltage to the lower electrode according to a period specified by a second frequency. The second frequency is lower than the first frequency. The control unit is configured to control the high-frequency power supply. The control unit controls the high-frequency power supply to supply high-frequency power during a first portion of the cycle. The control unit controls the high-frequency power supply to set the power level of the high-frequency power during the second portion of the cycle to a power level reduced from the power level of the high-frequency power during the first portion.

[0010] Effects of the Invention

[0011] According to an exemplary embodiment, a technique for controlling energy of ions supplied from plasma to a substrate may be provided. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 FIG. 1 is a diagram schematically showing a plasma processing apparatus according to an exemplary embodiment.

[0013] Figure 2 FIG. 1 is a timing chart of high-frequency power and pulsed negative-polarity DC voltage according to an example.

[0014] Figure 3 This is another example of a timing chart of high-frequency power and a pulsed negative-polarity DC voltage.

[0015] Figure 4 This is another example of a timing chart of a pulsed negative-polarity DC voltage.

[0016] Figure 5 This is another example of a timing chart of high frequency power.

[0017] Figure 6 This is another example of a timing chart of high-frequency power and a pulsed negative-polarity DC voltage.

[0018] Figure 7 This is another example of a timing chart of high-frequency power and a pulsed negative-polarity DC voltage.

[0019] Figure 8 (a) and Figure 8 (b) is a timing chart of another example of a pulsed negative-polarity DC voltage.

[0020] Fig. 9 is a flow chart showing a plasma processing method according to an exemplary embodiment. DETAILED DESCRIPTION

[0021] Various exemplary embodiments are described below.

[0022] In an exemplary embodiment, a plasma processing device is provided. The plasma processing device includes a chamber, a substrate support, a high-frequency power supply, a bias power supply, and a control unit. The substrate support has a lower electrode and an electrostatic chuck. The electrostatic chuck is disposed on the lower electrode. The substrate support is configured to support a substrate placed thereon in the chamber. The high-frequency power supply is configured to generate high-frequency power supplied to generate plasma from gas in the chamber. The high-frequency power has a first frequency. The bias power supply is electrically connected to the lower electrode. The bias power supply is configured to periodically apply a pulsed negative-polarity DC voltage to the lower electrode according to a period specified by a second frequency. The second frequency is lower than the first frequency. The control unit is configured to control the high-frequency power supply. The control unit controls the high-frequency power supply to supply high-frequency power during a first portion of the cycle. The control unit controls the high-frequency power supply to set the power level of the high-frequency power during the second portion of the cycle to a power level reduced from the power level of the high-frequency power during the first portion.

[0023] In the above-mentioned embodiment, a pulsed negative-polarity DC voltage is periodically supplied to the lower electrode within a period (hereinafter referred to as a "pulse period") defined by the second frequency. During the pulse period, the potential of the substrate changes. During the first part of the pulse period, a high-frequency power having a power level higher than the power level of the high-frequency power during the second part of the pulse period is supplied. Therefore, the energy of the ions supplied to the substrate depends on the setting of the respective time ranges during the first part and the second part of the pulse period. Therefore, according to the above-mentioned embodiment, the energy of the ions supplied from the plasma to the substrate can be controlled.

[0024] In an exemplary embodiment, the first part period may be a period during which a pulsed negative DC voltage is applied to the lower electrode. The second part period may be a period during which a pulsed negative DC voltage is not applied to the lower electrode. According to this embodiment, ions with relatively high energy can be supplied to the substrate.

[0025] In an exemplary embodiment, the first part period may be a period during which a pulsed negative DC voltage is not applied to the lower electrode. The second part period may be a period during which a pulsed negative DC voltage is applied to the lower electrode. According to this embodiment, ions with relatively low energy can be supplied to the substrate.

[0026] In an exemplary embodiment, the control unit may control the high frequency power source to stop supplying the high frequency power during the second portion. That is, the control unit may control the high frequency power source to periodically supply pulses of the high frequency power within the pulse period.

[0027] In an exemplary embodiment, the control unit controls the high-frequency power source to periodically supply pulses of the high-frequency power during the first portion.

[0028] In one exemplary embodiment, the frequency of the cycle of the pulses of the high-frequency power supplied in the first partial period is set to be equal to or greater than twice the second frequency and equal to or less than 0.5 times the first frequency.

[0029] In another exemplary embodiment, a plasma processing method is provided. The plasma processing device used in the plasma processing method includes a chamber, a substrate support, a high-frequency power supply, and a bias power supply. The substrate support has a lower electrode and an electrostatic chuck. The electrostatic chuck is disposed on the lower electrode. The substrate support is configured to support a substrate placed thereon in the chamber. The high-frequency power supply is configured to generate high-frequency power supplied to generate plasma from the gas in the chamber. The high-frequency power has a first frequency. The bias power supply is electrically connected to the lower electrode. The plasma processing method is performed in a state where the substrate is mounted on the electrostatic chuck in order to perform plasma processing on the substrate. The plasma processing method includes the following steps: a pulsed negative-polarity DC voltage is periodically applied from the bias power supply to the lower electrode according to a period (i.e., a pulse period) specified by a second frequency. The second frequency is lower than the first frequency. The plasma processing method also includes the following steps: high-frequency power is supplied from the high-frequency power supply during the first part of the period. The plasma processing method further includes the step of setting the power level of the high frequency power in the second portion of the cycle to a power level reduced from the power level of the high frequency power in the first portion of the cycle.

[0030] In one exemplary embodiment, the first partial period may be a period during which a pulsed negative DC voltage is applied to the lower electrode, and the second partial period may be a period during which a pulsed negative DC voltage is not applied to the lower electrode.

[0031] In one exemplary embodiment, the first partial period may be a period during which a pulsed negative DC voltage is not applied to the lower electrode, and the second partial period may be a period during which a pulsed negative DC voltage is applied to the lower electrode.

[0032] In an exemplary embodiment, the supply of high-frequency power may be stopped during the second portion.

[0033] In an exemplary embodiment, during the first portion, pulses of high-frequency power may be periodically supplied from the high-frequency power supply.

[0034] In an exemplary embodiment, the frequency defining the cycle of the pulses of the high-frequency power supplied during the first partial period may be equal to or greater than twice the second frequency and equal to or less than 0.5 times the first frequency.

[0035] In an exemplary embodiment, the plasma processing method may further include the following step: while the plasma is present in the chamber, periodically applying a pulsed negative-polarity DC voltage from the bias power supply to the lower electrode within the pulse period. The period has a time length longer than the time length of the period defined by the second frequency. During this period, the supply of high-frequency power from the high-frequency power supply is stopped.

[0036] In an exemplary embodiment, the plasma processing method may further include the following step: supplying high frequency power from the high frequency power supply during a period longer than the pulse period, and stopping the application of the pulsed negative DC voltage from the bias power supply to the lower electrode during this period.

[0037] Hereinafter, various exemplary embodiments will be described in detail with reference to the accompanying drawings. In addition, in each of the drawings, the same or equivalent parts are denoted by the same reference numerals.

[0038] Figure 1 FIG. 1 is a diagram schematically showing a plasma processing apparatus according to an exemplary embodiment. Figure 1 The plasma processing apparatus 1 shown is a capacitively coupled plasma processing apparatus. The plasma processing apparatus 1 includes a chamber 10. An internal space 10s is provided in the chamber 10. The central axis of the internal space 10s is an axis AX extending in the vertical direction.

[0039] In one embodiment, the chamber 10 includes a chamber body 12. The chamber body 12 has a substantially cylindrical shape. The internal space 10s is provided in the chamber body 12. The chamber body 12 is made of, for example, aluminum. The chamber body 12 is electrically grounded. A plasma-resistant film is formed on the inner wall surface of the chamber body 12, that is, the wall surface that divides the internal space 10s. The film may be a ceramic film such as a film formed by anodizing treatment or a film formed of yttrium oxide.

[0040] A passage 12p is formed in the side wall of the chamber body 12. When the substrate W is transferred between the internal space 10s and the outside of the chamber 10, the substrate W passes through the passage 12p. A gate valve 12g is provided along the side wall of the chamber body 12 to open and close the passage 12p.

[0041] The plasma processing apparatus 1 further includes a substrate support 16. The substrate support 16 is configured to support a substrate W placed thereon in the chamber 10. The substrate W has a substantially disk shape. The substrate support 16 is supported by a support portion 17. The support portion 17 extends upward from the bottom of the chamber body 12. The support portion 17 has a substantially cylindrical shape. The support portion 17 is formed of an insulating material such as quartz.

[0042] The substrate support 16 includes a lower electrode 18 and an electrostatic chuck 20. The lower electrode 18 and the electrostatic chuck 20 are provided in the chamber 10. The lower electrode 18 is formed of a conductive material such as aluminum and has a substantially disk shape.

[0043] A flow path 18f is formed in the lower electrode 18. The flow path 18f is a flow path for a heat exchange medium. As the heat exchange medium, a liquid refrigerant or a refrigerant (for example, chlorofluorocarbon) that cools the lower electrode 18 by its gasification is used. A supply device (for example, a cooling unit) for the heat exchange medium is connected to the flow path 18f. The supply device is provided outside the chamber 10. The heat exchange medium is supplied from the supply device to the flow path 18f via the pipe 23a. The heat exchange medium supplied to the flow path 18f is returned to the supply device via the pipe 23b.

[0044] The electrostatic chuck 20 is provided on the lower electrode 18. When being processed in the internal space 10s, the substrate W is placed on the electrostatic chuck 20 and held by the electrostatic chuck 20.

[0045] The electrostatic chuck 20 has a main body and an electrode. The main body of the electrostatic chuck 20 is formed of a dielectric such as aluminum oxide or aluminum nitride. The main body of the electrostatic chuck 20 has a roughly disc shape. The central axis of the electrostatic chuck 20 is roughly consistent with the axis AX. The electrode of the electrostatic chuck 20 is arranged in the main body. The electrode of the electrostatic chuck 20 has a membrane shape. A DC power supply is electrically connected to the electrode of the electrostatic chuck 20 via a switch. When the voltage from the DC power supply is applied to the electrode of the electrostatic chuck 20, an electrostatic attraction is generated between the electrostatic chuck 20 and the substrate W. By the generated electrostatic attraction, the substrate W is attracted to the electrostatic chuck 20 and is held by the electrostatic chuck 20.

[0046] The electrostatic chuck 20 includes a substrate mounting region. The substrate mounting region is a region having a substantially disk shape. The central axis of the substrate mounting region is substantially consistent with the axis AX. When being processed in the chamber 10, the substrate W is mounted on the upper surface of the substrate mounting region.

[0047] In one embodiment, the electrostatic chuck 20 may further include an edge ring mounting area. The edge ring mounting area extends circumferentially in a manner surrounding the substrate mounting area around the central axis of the electrostatic chuck 20. An edge ring ER is mounted on the upper surface of the edge ring mounting area. The edge ring ER has a ring shape. The edge ring ER is mounted on the edge ring mounting area in a manner such that its central axis is consistent with the axis AX. The substrate W is arranged in the area surrounded by the edge ring ER. That is, the edge ring ER is arranged to surround the edge of the substrate W. The edge ring ER may have conductivity. The edge ring ER is formed, for example, of silicon or silicon carbide. The edge ring ER may be formed of a dielectric such as quartz.

[0048] The plasma processing apparatus 1 may further include a gas supply line 25. The gas supply line 25 supplies a heat transfer gas, such as He gas, from a gas supply mechanism to a gap between the upper surface of the electrostatic chuck 20 and the back surface (lower surface) of the substrate W.

[0049] The plasma processing device 1 may further include an insulating region 27. The insulating region 27 is disposed on the support portion 17. The insulating region 27 is disposed radially outside the lower electrode 18 relative to the axis AX. The insulating region 27 extends circumferentially along the outer peripheral surface of the lower electrode 18. The insulating region 27 is formed of an insulator such as quartz. The edge ring ER is mounted on the insulating region 27 and the edge ring mounting region.

[0050] The plasma processing apparatus 1 further includes an upper electrode 30. The upper electrode 30 is provided above the substrate support 16. The upper electrode 30 closes the upper opening of the chamber body 12 together with a member 32. The member 32 has insulating properties. The upper electrode 30 is supported on the upper portion of the chamber body 12 via the member 32.

[0051] The upper electrode 30 includes a top plate 34 and a support body 36. The lower surface of the top plate 34 divides the internal space 10s. A plurality of exhaust holes 34a are formed on the top plate 34. The plurality of exhaust holes 34a penetrate the top plate 34 in the plate thickness direction (vertical direction). The top plate 34 is not limited, and is formed of silicon, for example. Alternatively, the top plate 34 may have a structure in which a plasma-resistant film is provided on the surface of an aluminum component. The film may be a ceramic film such as a film formed by anodizing or a film formed of yttrium oxide.

[0052] The support body 36 supports the top plate 34 in a detachable manner. The support body 36 is formed of a conductive material such as aluminum. A gas diffusion chamber 36a is provided inside the support body 36. A plurality of gas holes 36b extend downward from the gas diffusion chamber 36a. The plurality of gas holes 36b are respectively connected to the plurality of exhaust holes 34a. A gas introduction port 36c is formed in the support body 36. The gas introduction port 36c is connected to the gas diffusion chamber 36a. A gas supply pipe 38 is connected to the gas introduction port 36c.

[0053] The gas source group 40 is connected to the gas supply pipe 38 via the valve group 41, the flow controller group 42, and the valve group 43. The gas supply unit is composed of the gas source group 40, the valve group 41, the flow controller group 42, and the valve group 43. The gas source group 40 includes a plurality of gas sources. The valve group 41 and the valve group 43 each include a plurality of valves (e.g., on-off valves). The flow controller group 42 includes a plurality of flow controllers. The plurality of flow controllers of the flow controller group 42 are respectively mass flow controllers or pressure-controlled flow controllers. The plurality of gas sources of the gas source group 40 are respectively connected to the gas supply pipe 38 via a valve corresponding to the valve group 41, a flow controller corresponding to the flow controller group 42, and a valve corresponding to the valve group 43. The plasma processing device 1 is capable of supplying gas from one or more gas sources selected from the plurality of gas sources of the gas source group 40 to the internal space 10s at a separately regulated flow rate.

[0054] A baffle 48 is provided between the substrate support 16 or the support portion 17 and the side wall of the chamber body 12. The baffle 48 can be formed by coating a ceramic such as yttrium oxide on an aluminum member, for example. A plurality of through holes are formed in the baffle 48. Below the baffle 48, an exhaust pipe 52 is connected to the bottom of the chamber body 12. An exhaust device 50 is connected to the exhaust pipe 52. The exhaust device 50 has a pressure controller such as an automatic pressure control valve and a vacuum pump such as a turbomolecular pump, and can reduce the pressure of the internal space 10s.

[0055] The plasma processing apparatus 1 further includes a high-frequency power supply 61. The high-frequency power supply 61 is a power supply that generates high-frequency power RF. The high-frequency power RF is used to generate plasma from the gas in the chamber 10. The high-frequency power RF has a first frequency. The first frequency is a frequency in the range of 27 to 100 MHz, for example, a frequency of 40 MHz or 60 MHz. In order to supply the high-frequency power RF to the lower electrode 18, the high-frequency power supply 61 is connected to the lower electrode 18 via a matching circuit 63. The matching circuit 63 is configured to match the output impedance of the high-frequency power supply 61 with the impedance of the load side (lower electrode 18 side). In addition, the high-frequency power supply 61 may not be electrically connected to the lower electrode 18, but may be connected to the upper electrode 30 via the matching circuit 63.

[0056] The plasma processing apparatus 1 further includes a bias power supply 62. The bias power supply 62 is electrically connected to the lower electrode 18. In one embodiment, the bias power supply 62 is electrically connected to the lower electrode 18 via a low-pass filter 64. The bias power supply 62 is configured to generate a bias signal at a period P defined by the second frequency. P That is, the pulse period periodically applies a pulsed negative-polarity DC voltage PV to the lower electrode 18. The second frequency is lower than the first frequency. The second frequency is, for example, 50 kHz or more and 27 MHz or less.

[0057] When plasma processing is performed in the plasma processing device 1, gas is supplied to the internal space 10s. Then, by supplying high-frequency power RF, the gas is excited in the internal space 10s. As a result, plasma is generated in the internal space 10s. The substrate W supported by the substrate support 16 is processed by chemical substances such as ions and free radicals from the plasma. For example, the substrate is etched by the chemical substances from the plasma. In the plasma processing device 1, a pulsed negative DC voltage PV is applied to the lower electrode 18, and ions from the plasma are accelerated toward the substrate W.

[0058] The plasma processing apparatus 1 further includes a control unit MC. The control unit MC is a computer including a processor, a storage device, an input device, a display device, etc., and controls each unit of the plasma processing apparatus 1. The control unit MC executes a control program stored in the storage device, and controls each unit of the plasma processing apparatus 1 according to process data stored in the storage device. Through control by the control unit MC, a process specified by the process data is executed in the plasma processing apparatus 1. The plasma processing method described below can be executed in the plasma processing apparatus 1 through control of each unit of the plasma processing apparatus 1 by the control unit MC.

[0059] The control unit MC controls the high frequency power supply 61 to generate a high frequency power supply at a period P. P The high frequency power RF is supplied to at least a part of the first part period P1 in the plasma processing apparatus 1. The high frequency power RF is supplied to the lower electrode 18. Alternatively, the high frequency power RF may be supplied to the upper electrode 30. The control unit MC sets the period P P The power level of the high frequency power RF in the second partial period P2 is set to a power level reduced from the power level of the high frequency power RF in the first partial period P1. That is, the control unit MC controls the high frequency power source 61 to supply one or more pulses PRF of the high frequency power RF in the first partial period P1.

[0060] The power level of the high frequency power RF during the second period P2 may be 0 [W]. That is, the control unit MC may control the high frequency power source 61 to stop supplying the high frequency power RF during the second period P2. Alternatively, the power level of the high frequency power RF during the second period P2 may be greater than 0 [W].

[0061] The control unit MC is configured such that a synchronization pulse, a delay time, and a supply time are given from the control unit MC to the high frequency power supply 61. The synchronization pulse is synchronized with the pulsed negative polarity DC voltage PV. The delay time is determined from the period P determined by the synchronization pulse. P The supply time is the length of the supply time of the high frequency power RF. The high frequency power source 61 is PThe start time of the supply time is delayed by the delay time to supply the high frequency power RF for one or more pulses PRF. As a result, the high frequency power RF is supplied to the lower electrode 18 during the first partial period P1. In addition, the delay time may be zero.

[0062] In one embodiment, the plasma processing apparatus 1 may further include a voltage sensor 78. The voltage sensor 78 is configured to directly or indirectly measure the potential of the substrate W. Figure 1 In the example shown, the voltage sensor 78 is configured to measure the potential of the lower electrode 18. Specifically, the voltage sensor 78 measures the potential of the power supply circuit connected between the lower electrode 18 and the bias power supply 62.

[0063] The control unit MC can change the potential of the substrate W measured by the voltage sensor 78 to the period P P The average potential V of the substrate W in AVE The high or low period is determined as the first partial period P1. The control unit MC can make the potential of the substrate W measured by the voltage sensor 78 lower or higher than the average value V AVE The period of time is determined as the second period P2. The average value V of the potential of the substrate W is AVE The control unit MC may control the high frequency power source 61 to supply the high frequency power RF as described above during the first partial period P1. Furthermore, the control unit MC may control the high frequency power source 61 to set the power level of the high frequency power RF as described above during the second partial period P2.

[0064] In the plasma processing apparatus 1, a pulsed negative DC voltage PV is supplied at a period P. P The lower electrode 18 is supplied periodically, so the potential of the substrate W changes according to the period P P Change. In period P P The first part of the period P1 provides a period of P The power level of the high frequency power RF in the second period P2 of the period P is high. Therefore, the energy of the ions supplied to the substrate W depends on the period P. P Therefore, according to the plasma processing apparatus 1, the energy of ions supplied from plasma to the substrate W can be controlled.

[0065] Figure 2 This is a timing diagram of a high frequency power and a pulsed negative polarity DC voltage. Figure 2 In FIG. 1 , “VO” represents the output voltage of the bias power supply 62, and “RF” represents the power level of the high frequency power RF. Figure 2In the example shown, the first partial period P1 is a period during which a pulsed negative-polarity DC voltage PV is applied to the lower electrode 18. Figure 2 In the example shown, the second period P2 is a period during which the pulsed negative DC voltage PV is not applied to the lower electrode 18. Figure 2 In the example shown, one pulse PRF of high frequency power RF is supplied in the first period P1. According to this example, ions having relatively high energy can be supplied to the substrate W.

[0066] Figure 3 This is another example of a timing diagram of high frequency power and pulsed negative polarity DC voltage. Figure 3 In FIG. 1 , “VO” represents the output voltage of the bias power supply 62, and “RF” represents the power level of the high frequency power RF. Figure 3 In the example shown, the first partial period P1 is a period during which the pulse-shaped negative-polarity DC voltage PV is not applied to the lower electrode 18. Figure 3 In the example shown, the second period P2 is a period during which a pulsed negative DC voltage PV is applied to the lower electrode 18. Figure 3 In the example shown, one pulse PRF of high frequency power RF is supplied in the first period P1. According to this example, ions having relatively low energy can be supplied to the substrate W.

[0067] Figure 4 This is another example of a timing diagram of a pulsed negative-polarity DC voltage. Figure 4 In FIG. 6 , “VO” represents the output voltage of the bias power supply 62. Figure 4 As shown in FIG. 1 , the voltage level of the pulsed negative-polarity DC voltage PV can be changed during the period in which it is applied to the lower electrode 18. Figure 4 In the example shown, the voltage level of the pulsed negative DC voltage PV decreases while it is applied to the lower electrode 18. Figure 4 In the example shown, the absolute value of the voltage level of the pulsed negative DC voltage PV increases during the period in which it is applied to the lower electrode 18. In addition, the pulsed negative DC voltage PV may be applied to the lower electrode 18 during the first partial period P1, or may be applied to the lower electrode 18 during the second partial period P2.

[0068] Figure 5 This is another example of a high frequency power timing diagram. Figure 5 In the figure, "RF" indicates the power level of high frequency electric power RF. Figure 5As shown, the control unit MC can control the high-frequency power source 61 so that a plurality of pulses PRF of the high-frequency power RF are sequentially supplied during the first period P1. That is, the control unit MC can control the high-frequency power source 61 so that a pulse group PG including a plurality of pulses PRF is supplied during the first period P1. During the first period P1, the pulses PRF of the high-frequency power RF can also be supplied periodically. The period P of the pulses PRF of the high-frequency power RF supplied during the first period P1 is specified. RFG The frequency may be greater than or equal to twice the second frequency and less than or equal to 0.5 times the first frequency.

[0069] Figure 6 This is another example of a timing diagram of high frequency power and pulsed negative polarity DC voltage. Figure 6 In FIG. 6 , “VO” represents the output voltage of the bias power supply 62, and “RF” represents the power level of the high frequency power RF. Figure 2 or Figure 3 In the example shown, the plasma processing apparatus 1 is in the period P A The pulsed negative DC voltage PV is P is periodically applied to the lower electrode 18 and at a period P P One or more pulses PRF of high frequency power RF are supplied. Figure 6 As shown, the control unit MC can control the high frequency power supply 61 so that during another period P B The supply of high frequency power RF is stopped. B The control unit MC can control the bias power supply 62 in a state where the supply of the high frequency power RF is stopped, so as to adjust the bias power supply 62 according to the period P. P A pulsed negative DC voltage PV is periodically applied to the lower electrode 18. B is a period P P The length of time is the length of time. B The period P may be a period during which plasma exists in the chamber 10. B It can be, for example, the period P A After the period.

[0070] Figure 7 This is another example of a timing diagram of high frequency power and pulsed negative polarity DC voltage. Figure 7 In FIG. 6 , “VO” represents the output voltage of the bias power supply 62, and “RF” represents the power level of the high frequency power RF. Figure 7 As shown, the control unit MC can also control the bias power supply 62 so that during another period P C The application of the pulse-shaped negative-polarity DC voltage PV to the lower electrode 18 is stopped. CThe internal control unit MC can control the high frequency power source 61 to supply the high frequency power RF while stopping the application of the pulsed negative polarity DC voltage PV to the lower electrode 18. The control unit MC can control the high frequency power source 61 so that during the period P C Pulses PRF or pulse groups PG of high frequency power RF are periodically supplied. C The period P of the pulse PRF or pulse group PG of the high frequency power RF is RFC It can be during the period P A The period of the pulse PRF or pulse group PG of the high frequency power RF is the same as the period P P The same cycle. In addition, during the period P C , which specifies the period P of the pulse PRF of the high frequency power RF that forms the pulse group PG. RFG The frequency may be greater than or equal to twice the second frequency and less than or equal to 0.5 times the first frequency.

[0071] Figure 8 (a) and Figure 8 (b) is a timing chart of another example of a pulsed negative-polarity DC voltage. Figure 8 In the example shown in (a), the output voltage VO of the bias power supply 62 is Figure 2 The output voltage VO of the bias power supply 62 in the example shown is different in that its polarity is changed to positive polarity in the second period P2 and before the first period P1. Figure 8 In the example shown in (a), a positive DC voltage is applied from the bias power supply 62 to the lower electrode 18 during the second partial period P2 and before the first partial period P1. In addition, when a pulsed negative DC voltage PV is applied to the lower electrode 18 during the first partial period P1, a positive DC voltage may be applied from the bias power supply 62 to the lower electrode 18 during at least a part of the second partial period P2.

[0072] Figure 8 In the example shown in (b), the output voltage VO of the bias power supply 62 is Figure 3 The output voltage VO of the bias power supply 62 in the example shown is different in that its polarity is changed to positive polarity within the first partial period P1 and before the second partial period P2. Figure 8 In the example shown in (b), a positive DC voltage is applied from the bias power supply 62 to the lower electrode 18 during the first partial period P1 and before the second partial period P2. In addition, when a pulsed negative DC voltage PV is applied to the lower electrode 18 during the second partial period P2, a positive DC voltage may be applied from the bias power supply 62 to the lower electrode 18 during at least a portion of the first partial period P1.

[0073] Below, reference Fig. 9 . Fig. 9 is a flow chart showing a plasma processing method according to an exemplary embodiment. Fig. 9 The plasma processing method shown (hereinafter, referred to as “method MT”) can be performed using the plasma processing apparatus 1 described above.

[0074] The method MT is performed with the substrate W mounted on the electrostatic chuck 20 . The method MT is performed to perform plasma processing on the substrate W. In the method MT, gas is supplied from the gas supply unit into the chamber 10 . The gas pressure in the chamber 10 is set to a predetermined pressure by the exhaust device 50 .

[0075] In method MT, step ST1 is performed. In step ST1, a pulsed negative DC voltage PV is supplied from bias power supply 62 at a period P. P is periodically applied to the lower electrode 18 .

[0076] Process ST2 in cycle P P Step ST3 is executed during the first part of period P1 within the period P. P The first partial period P1 may be a period during which a pulsed negative DC voltage PV is applied to the lower electrode 18. The second partial period P2 may be a period during which a pulsed negative DC voltage PV is not applied to the lower electrode 18. Alternatively, the first partial period P1 may be a period during which a pulsed negative DC voltage PV is not applied to the lower electrode 18. The second partial period P2 may be a period during which a pulsed negative DC voltage PV is applied to the lower electrode 18.

[0077] In step ST2, in order to generate plasma, high-frequency power RF is supplied from the high-frequency power supply 61. During the first period P1, one or more pulses PRF of the high-frequency power RF may be supplied. During the first period P1, a plurality of pulses PRF of the high-frequency power RF may be supplied sequentially. That is, during the first period P1, a pulse group PG including a plurality of pulses PRF may be supplied. During the first period P1, the pulses PRF of the high-frequency power RF may be supplied periodically. The period P of the pulses PRF of the high-frequency power RF supplied during the first period P1 is specified. RFG The frequency may be greater than or equal to twice the second frequency and less than or equal to 0.5 times the first frequency.

[0078] In step ST3, the cycle P P The power level of the radio frequency power RF in the second partial period P2 is set to a power level reduced from the power level of the radio frequency power RF in the first partial period P1. The supply of the radio frequency power RF may be stopped in the second partial period P2.

[0079] Steps ST1 to ST3 can be performed during the period P A Execution. In method MT, it is also possible to execute B (refer to Figure 6 ) When the high frequency power RF is stopped from being supplied from the high frequency power source 61, the pulsed negative polarity DC voltage PV is supplied at a period P P The bias power supply 62 is periodically applied to the lower electrode 18. As described above, during the period P B is a period P P The length of time is the length of time. B The period P may be a period during which plasma exists in the chamber 10. B It can be, for example, the period P A After the period.

[0080] In method MT, it is also possible to perform another period P C (refer to Figure 7 ) The high frequency power RF is supplied from the high frequency power supply 61 while the pulsed negative DC voltage PV applied from the bias power supply 62 to the lower electrode 18 is stopped. C The internal control unit MC can control the high frequency power source 61 to supply the high frequency power RF while stopping the application of the pulsed negative polarity DC voltage PV to the lower electrode 18. C , the high frequency power source 61 may periodically supply a pulse PRF or a pulse group PG of the high frequency power RF. C The period P of the pulse PRF or pulse group PG of the high frequency power RF is RFC It can be during the period P A The period of the pulse PRF or pulse group PG of the high frequency power RF is the same as the period P P The same cycle. In addition, during the period P C , which specifies the period P of the pulse PRF of the high frequency power RF that forms the pulse group PG. RFG The frequency may be greater than or equal to twice the second frequency and less than or equal to 0.5 times the first frequency.

[0081] Various exemplary embodiments have been described above, but the present invention is not limited to the exemplary embodiments, and various additions, omissions, substitutions, and changes may be made. Furthermore, elements in different embodiments may be combined to form other embodiments.

[0082] The plasma processing device according to another embodiment may be a capacitive coupling type plasma processing device different from the plasma processing device 1. Furthermore, the plasma processing device according to another embodiment may be an inductively coupled plasma processing device. Furthermore, the plasma processing device according to another embodiment may be an ECR (electron cyclotron resonance) plasma processing device. Furthermore, the plasma processing device according to another embodiment may be a plasma processing device that generates plasma using surface waves such as microwaves.

[0083] And, the period P P Alternatively, the period may be composed of three or more partial periods including the first partial period P1 and the second partial period P2. P The time lengths of the three or more partial periods in the period may be the same or different. The power level of the high frequency power RF in each of the three or more partial periods may be set to a power level different from the power level of the high frequency power RF in the preceding and following partial periods.

[0084] It can be understood from the above description that various embodiments of the present invention are described in this specification for the purpose of explanation, and various changes can be made without departing from the scope and purpose of the present invention. Therefore, the various embodiments disclosed in this specification are not intended to be limiting, and the true scope and purpose can be shown by the scope of the attached technical solutions.

[0085] Explanation of symbols

[0086] 1-plasma processing device, 10-chamber, 16-substrate support, 18-lower electrode, 20-electrostatic chuck, 61-high frequency power supply, 62-bias power supply, MC-control unit.

Claims

1. A plasma processing device comprising: Chamber; a substrate supporter having a lower electrode and an electrostatic chuck disposed on the lower electrode and configured to support a substrate placed thereon in the chamber; a high-frequency power supply configured to generate high-frequency power supplied to generate plasma from the gas in the chamber, the high-frequency power having a first frequency; a bias power supply electrically connected to the lower electrode and configured to periodically apply a pulsed negative-polarity DC voltage to the lower electrode at a period defined by a second frequency lower than the first frequency; and a control unit configured to control the high frequency power supply, The control unit controls the high frequency power supply in the following manner: The high frequency power is supplied during a first portion of the cycle, and a power level of the high frequency power during a second portion of the cycle is set to a power level reduced from the power level of the high frequency power during the first portion.

2. The plasma processing apparatus according to claim 1, wherein: The first period is a period during which the pulsed negative DC voltage is applied to the lower electrode. The second period is a period during which the pulse-shaped negative-polarity DC voltage is not applied to the lower electrode.

3. The plasma processing apparatus according to claim 1, wherein: The first period is a period during which the pulsed negative DC voltage is not applied to the lower electrode. The second period is a period during which the pulse-shaped negative-polarity DC voltage is applied to the lower electrode.

4. The plasma processing apparatus according to any one of claims 1 to 3, wherein: The control unit controls the high-frequency power supply to stop supply of the high-frequency power during the second portion.

5. The plasma processing apparatus according to any one of claims 1 to 4, wherein: The control unit controls the high-frequency power source so as to periodically supply pulses of the high-frequency power during the first portion.

6. The plasma processing apparatus according to claim 5, wherein: The frequency of the cycle of the pulse for supplying the high-frequency power during the first portion is defined to be greater than or equal to twice the second frequency and less than or equal to 0.5 times the first frequency.

7. A plasma processing method using a plasma processing device, The plasma processing device comprises: Chamber; a substrate supporter having a lower electrode and an electrostatic chuck disposed on the lower electrode and configured to support a substrate placed thereon in the chamber; a high-frequency power supply configured to generate high-frequency power supplied to generate plasma from the gas in the chamber, the high-frequency power having a first frequency; and a bias power supply electrically connected to the lower electrode; The plasma processing method is performed to perform plasma processing on the substrate in a state where the substrate is placed on the electrostatic chuck, and the plasma processing method includes: The step of periodically applying a pulsed negative-polarity DC voltage from the bias power supply to the lower electrode at a period defined by a second frequency lower than the first frequency; The step of supplying the high-frequency power from the high-frequency power source during a first portion of the cycle; and and setting the power level of the high-frequency power during a second portion of the cycle to a power level that is reduced from the power level of the high-frequency power during the first portion.

8. The plasma processing method according to claim 7, wherein: The first period is a period during which the pulsed negative DC voltage is applied to the lower electrode. The second period is a period during which the pulse-shaped negative-polarity DC voltage is not applied to the lower electrode.

9. The plasma processing method according to claim 7, wherein: The first period is a period during which the pulsed negative DC voltage is not applied to the lower electrode. The second period is a period during which the pulse-shaped negative-polarity DC voltage is applied to the lower electrode.

10. The plasma processing method according to any one of claims 7 to 9, wherein: During the second portion, supply of the high-frequency power is stopped.

11. The plasma processing method according to any one of claims 7 to 10, wherein: During the first portion, pulses of the high-frequency power are periodically supplied from the high-frequency power supply.

12. The plasma processing method according to claim 11, wherein: The frequency of the cycle of the pulse for supplying the high-frequency power during the first portion is defined to be greater than or equal to twice the second frequency and less than or equal to 0.5 times the first frequency.

13. The plasma processing method according to any one of claims 7 to 12, further comprising the following steps: During the period when plasma exists in the chamber and has a time length longer than the time length of the period specified by the second frequency, the pulsed negative-polarity DC voltage is periodically applied from the bias power supply to the lower electrode according to the period specified by the second frequency in a state where the supply of the high-frequency power from the high-frequency power supply is stopped.

14. The plasma processing method according to any one of claims 7 to 13, further comprising the following steps: The high frequency power is supplied from the high frequency power supply in a state where application of the pulsed negative DC voltage from the bias power supply to the lower electrode is stopped during a time length longer than the time length of the cycle defined by the second frequency.

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