Filtering device for grinding machine table and machine table

Abstract

The invention discloses a filtering device for a grinding machine table, which comprises an upper seat and a lower seat, the upper seat and the lower seat are fixedly connected, a filter is arranged at the joint of the upper seat and the lower seat, and a replaceable filter element is arranged in the filter. The invention further discloses a grinding machine table. On the basis of an original machine table, the filter is additionally arranged, the filter is in threaded connection, and the sealing ring is arranged in the filter, so that after the improvement, the filter can intercept a large part of crystal slag, the abnormal rate of the machine table is reduced, the abnormal processing efficiency is improved, and large-area scrapping of wafers is avoided, so that the cost is reduced; the whole batch of products are prevented from being scrapped, and economic benefits are improved.

Description

Technical Field

[0001] The present invention relates to the field of integrated circuit manufacturing, and in particular to a filtering device and a grinding machine. Background Art

[0002] The working principle of a single grinding head of the IPEC 776WCMP machine is that the upward motor head drives the intermediate shaft to rotate through a key connection, and the intermediate shaft drives the wafer head to rotate counterclockwise through a key connection at a speed of 22 rpm. The downward motor head drives the polishing bell mouth to rotate clockwise through a belt connection at a speed of 370 rpm.

[0003] The wafer is clamped between the wafer head and the polishing bell mouth, with the crystal surface facing down. A pressure is applied from top to bottom, with the upper pressure being 4.9psi and the lower pressure being 5psi. The wafer is lifted up and the grinding liquid is discharged through the pipeline to achieve the purpose of flattening the tungsten metal.

[0004] When pressure is applied to the upper part of the machine, an air pipe needs to be connected. In order to ensure that the air pipe does not rotate with the intermediate shaft, the original factory sets a rotating joint above the shaft. There is a bearing inside the rotating joint, which can achieve the purpose of preventing the air pipe from rotating by itself.

[0005] However, after long-term use, the internal bearings will wear out, and some metal particles will be blown into the air path, causing grinding and scratching of the raw materials.

[0006] Therefore, designing a filter that can filter out possible particles becomes an urgent problem to be solved.

[0007] In view of this, the existing technology should be improved to solve the above-mentioned technical problems existing in the existing technology. Summary of the invention

[0008] The main purpose of the present invention is to provide a filtering device and a machine for a grinding machine. A filter is added to the original machine. The filter is connected by threads and a sealing ring is arranged inside. After such improvement, the filter can intercept a large part of the crystal slag, reduce the abnormality rate of the machine, improve the efficiency of abnormality processing, and will not cause large-scale scrapping of wafers.

[0009] According to one aspect of the present invention, a filtering device for a grinding machine is provided, which comprises: an upper seat and a lower seat, wherein the upper seat and the lower seat are fixedly connected, a filter is arranged at the connection between the upper seat and the lower seat, and a replaceable filter element is arranged inside the filter.

[0010] According to an embodiment of the present invention, the upper seat and the lower seat are fixedly connected by threads.

[0011] According to one embodiment of the present invention, the upper seat and the lower seat are coaxially arranged cylindrical structures.

[0012] According to an embodiment of the present invention, the upper seat and the lower seat are made of stainless steel.

[0013] According to one embodiment of the present invention, the filter element is a synthetic fiber filter cotton, and the raw material is polyester fiber.

[0014] According to an embodiment of the present invention, the maximum diameter of the metal particles that can pass through the filter is 50 μm.

[0015] According to an embodiment of the present invention, a sealing ring is provided at the connection between the upper seat and the lower seat.

[0016] According to another aspect of the present invention, a grinding machine is provided, which comprises the filtering device for a grinding machine as described in any one of the above technical solutions.

[0017] According to one embodiment of the present invention, the upper seat of the filter device is fixedly connected to the rotating joint of the grinding head, and the lower seat of the filter device is fixedly connected to the rotating shaft of the grinding head.

[0018] In a filtering device and a grinding machine for a grinding machine according to an embodiment of the present invention, a filter is installed on the grinding head on the machine. The filter is connected by threads and a sealing ring is arranged inside. After such improvement, the filter can intercept a large part of the crystal slag, reduce the abnormality rate of the machine, improve the efficiency of abnormality processing, and will not cause large-scale scrapping of wafers, thereby reducing costs and making the benefits more considerable. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solution of the embodiment of the present invention, the drawings required for use in the embodiment will be briefly introduced below. Obviously, the drawings described below are only some implementation cases of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0020] Figure 1 A schematic diagram of a filtering device for a grinding machine table according to an exemplary embodiment of the present invention is shown;

[0021] Figure 2 A comparison diagram before and after the installation of the filter device is shown.

[0022] The reference numerals in the figures are described as follows:

[0023] 1-upper seat; 2-lower seat; 3-filter. DETAILED DESCRIPTION

[0024] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the embodiments of the present invention are further described in detail below in combination with specific embodiments and with reference to the accompanying drawings.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0026] like Figure 1 As shown, the present invention provides a filtering device for a grinding machine, which comprises:

[0027] An upper seat 1 and a lower seat 2 are fixedly connected, a filter 3 is arranged at the connection between the upper seat 1 and the lower seat 2, and a replaceable filter element is arranged inside the filter 3.

[0028] In the filter device for a grinding machine according to an embodiment of the present invention, the upper seat 1 of the filter device is fixedly connected to the rotary joint of the grinding head, and the lower seat 2 of the filter device is fixedly connected to the rotating shaft of the grinding head.

[0029] The upper seat 1 and the lower seat 2 are fixedly connected by threads. The upper seat 1 of the filter device is designed with internal threads and vertically connected to the external threads of the lower part of the rotary joint. The diameter of the internal thread of the upper seat 1 is 13.30±0.02mm, and the thread length is 15.00mm.

[0030] The lower seat 2 of the filtering device is designed with external threads and is vertically connected to the internal thread part of the rotating shaft of the grinding head. The diameter of the external thread of the lower seat 2 is 13.30±0.02mm, and the thread length is 12.80mm.

[0031] The upper seat 1 and the lower seat 2 are coaxially arranged cylindrical structures. The cross sections of the upper seat 1 and the lower seat 2 are both annular and are fixedly connected by threads.

[0032] The upper seat 1 and the lower seat 2 are made of stainless steel, specifically, 316 stainless steel.

[0033] The filter element is a synthetic fiber filter cotton, and the raw material is polyester fiber. In some embodiments, medium-efficiency filter cotton is used. Compared with other filter materials of the same level, synthetic fiber filter cotton has the advantages of low resistance, light weight, large capacity, environmental protection (incineration), and moderate price. Polyester fiber is used as the main raw material, abbreviated as PET.

[0034] The maximum diameter of the metal particles that can pass through the filter 3 is 50 μm. The wear of the internal bearing will blow some metal particles into the air path. In order to extend the service life of the machine, it is necessary to filter out as many metal particles as possible to reduce damage to the machine and raw materials. After implementing this application, metal particles of 50 μm and above can be filtered out.

[0035] A sealing ring is provided at the connection between the upper seat 1 and the lower seat 2. During the use of the machine, a high sealing requirement is required, so an O-ring is provided at the connection between the upper seat 1 and the lower seat 2 to improve the sealing.

[0036] like Figure 2 As shown, the filtering device is arranged at the lower end of the rotary joint of the machine. The rotary joint will produce falling metal particles due to wear. The metal particles sink due to gravity and are filtered by the filtering device, thereby reducing damage to the air path and the machine.

[0037] The present invention further provides a grinding machine, wherein the grinding machine has a filtering device as described in any one of the above technical solutions installed on a grinding head.

[0038] The upper seat 1 of the filter device is fixedly connected to the rotary joint of the grinding head, and the lower seat 2 of the filter device is fixedly connected to the rotating shaft of the grinding head.

[0039] The present invention installs a filter on the grinding head on the machine. The filter is connected by threads and is provided with a sealing ring inside. After such improvement, the filter can intercept a large part of the crystal slag, reduce the abnormality rate of the machine, improve the efficiency of abnormality processing, and will not cause large-scale scrapping of wafers, thereby reducing costs and making the benefits more considerable.

[0040] The above are exemplary embodiments disclosed in the present invention. The order disclosed in the above embodiments of the present invention is only for description and does not represent the advantages and disadvantages of the embodiments. However, it should be noted that the discussion of any of the above embodiments is only exemplary and is not intended to imply that the scope (including claims) disclosed in the embodiments of the present invention is limited to these examples. Various changes and modifications may be made without departing from the scope defined in the claims. The functions, steps and / or actions of the method claims according to the disclosed embodiments described herein do not need to be performed in any particular order. In addition, although the elements disclosed in the embodiments of the present invention may be described or required in individual form, they may also be understood as multiple unless explicitly limited to the singular.

[0041] A person skilled in the art should understand that the discussion of any of the above embodiments is only exemplary and is not intended to imply that the scope of the disclosure of the embodiments of the present invention (including the claims) is limited to these examples; under the concept of the embodiments of the present invention, the technical features in the above embodiments or different embodiments can also be combined, and there are many other changes in different aspects of the embodiments of the present invention as described above, which are not provided in detail for the sake of simplicity. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the embodiments of the present invention should be included in the protection scope of the embodiments of the present invention.

Claims

1. A filtering device for a grinding machine, characterized in that: include: The upper seat and the lower seat are fixedly connected, a filter is provided at the connection between the upper seat and the lower seat, and a replaceable filter element is provided inside the filter.

2. The filtering device for a grinding machine according to claim 1, characterized in that: The upper seat and the lower seat are fixedly connected by threads.

3. The filtering device for a grinding machine according to claim 1, characterized in that: The upper seat and the lower seat are coaxially arranged cylindrical structures.

4. The filtering device for a grinding machine according to claim 1, characterized in that: The upper seat and the lower seat are made of stainless steel.

5. The filtering device for a grinding machine according to claim 1, characterized in that: The filter element is synthetic fiber filter cotton, and the raw material is polyester fiber.

6. The filtering device for a grinding machine according to claim 1, characterized in that: The maximum diameter of the metal particles that can pass through the filter is 50 μm.

7. The filtering device for a grinding machine according to claim 1, characterized in that: A sealing ring is provided at the connection between the upper seat and the lower seat.

8. A grinding machine, characterized in that: The grinding machine is equipped with a filtering device according to any one of claims 1 to 7 on the grinding head.

9. The grinding machine according to claim 8, characterized in that: The upper seat of the filter device is fixedly connected to the rotary joint of the grinding head, and the lower seat of the filter device is fixedly connected to the rotating shaft of the grinding head.

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