A mixing device and a mixing process

Abstract

The present application relates to the technical field of gas mixing, and specifically discloses a mixing device and a mixing process, which includes a tank body; a first stirring assembly, including a rotating power member, a threaded rod and a stirring blade, the threaded rod is coaxially fixedly connected to the output end of the rotating power member, the stirring blade is arranged on the threaded rod, and the stirring blade is used to stir the reaction solution in the tank body; the first mixing assembly includes a push plate, a stopper and a push rod, the push plate is slidably arranged in the tank body along the axial direction of the tank body, the push plate is threadedly connected to the threaded rod, a perforation is provided on the push plate, the stopper is slidably arranged in the perforation, the push rod is arranged on the tank body, the push rod is located between the push plate and the stirring blade, the push rod and the perforation are coaxially arranged, and the end of the push rod away from the stirring blade is used to abut against the stopper. The present application can make the gas at the top and bottom of the device mix more evenly, help to increase the mixing speed, and enhance the mixing effect.

Description

Technical Field

[0001] The present application relates to the technical field of gas mixing, and in particular to a mixing device and a mixing process. Background Art

[0002] In the chip production process, a variety of special gases are needed to meet the needs of different process links. Nitrogen is mainly used to protect the surface of the chip from oxidation; oxygen is mainly used to remove impurities on the chip surface and improve the cleanliness of the chip surface; hydrogen is mainly used to remove oxides and maintain the purity and excellent chemical properties of the chip surface; silane gas is mainly used to deposit silicon and silicide materials, such as polysilicon and silicon nitride; carbon tetrafluoride is used for plasma etching of silicon dioxide and silicon nitride. Silane gas is often used to deposit silicon and silicide materials.

[0003] In the chip production process, the above-mentioned gases usually need to be fully mixed before use. For example, in the deposition process, silane gas needs to be mixed with hydrogen, nitrogen or other inert gases to control the deposition rate and film quality. In the doping process, the doping source gas (such as phosphine, arsine, etc.) needs to be mixed with the carrier gas (such as nitrogen, argon, etc.).

[0004] In order to meet the demand for mixed gases, chip production factories are usually equipped with special mixing devices. The mixing device includes a reactor, which is filled with a reaction solution. When the reaction solution reacts, some gas will be produced; the reactor is also connected to a special gas cabinet, which can pass other special gases into the reactor. The gas passed in by the special gas cabinet is mixed with the gas produced in the reactor. After the mixing is completed, the gas in the reactor is discharged to the next process for use.

[0005] Since there are multiple gases involved in the mixing, each gas has a different density. The lighter gas will accumulate at the top of the reactor, and the heavier gas will accumulate on the side of the reactor close to the solution below. The gases at the top and bottom of the reactor are prone to uneven mixing, affecting the mixing effect. Summary of the invention

[0006] In order to make the gases at the top and bottom of the reactor mixed more evenly, the present application provides a mixing device and a mixing process.

[0007] In a first aspect, the present application provides a mixing device, which adopts the following technical solution:

[0008] A mixing device, comprising:

[0009] A tank body; and a

[0010] A first stirring assembly, the first stirring assembly comprising a rotating power member, a threaded rod and a stirring blade, wherein the rotation axis of the output end of the rotating power member is arranged along the axial direction of the tank body, the threaded rod is coaxially fixedly connected to the output end of the rotating power member, the stirring blade is arranged on the threaded rod, and the stirring blade is used to stir the reaction solution in the tank body;

[0011] The first mixing component, the first mixing component includes a push plate, a block and a push rod, the push plate is slidably arranged in the tank body along the axial direction of the tank body, the push plate is threadedly connected to the threaded rod, the push plate is provided with a through hole arranged along the axial direction of the tank body, the block is slidably arranged in the through hole, the block is used to close the through hole, the push rod is arranged on the tank body, the push rod is located between the push plate and the stirring blade, the push rod and the through hole are coaxially arranged, and the end of the push rod away from the stirring blade is used to abut against the block, so that when the push plate slides toward the side close to the stirring blade, the push rod can push the block out of the through hole; a flow direction control component is arranged on the push plate, the flow direction control component includes a connecting cylinder, a baffle ring and an elastic member, the connecting cylinder is fixedly connected to a side of the push plate close to the stirring blade, the connecting cylinder is connected to the through hole, the baffle ring is slidably arranged in the connecting cylinder, the elastic member is connected between the baffle ring and the connecting cylinder, and the elastic member makes the baffle ring abut against the inner wall of the connecting cylinder and close the connecting cylinder.

[0012] By adopting the above technical scheme, the rotating power part drives the threaded rod and the stirring blade to rotate, stirs the reaction solution in the tank body, and accelerates the solution reaction to produce gas; at the same time, when the threaded rod rotates, it can drive the push plate to slide in the tank body, and the perforations on the push plate are opened and closed by the block under the push of the push rod, so that the gas at the bottom of the tank body is transported to the top, so that the gas with higher density in the lower layer of the tank body and the gas with lower density in the upper layer of the tank body can be more fully mixed, which helps to enhance the mixing effect; when the push plate slides upward, the space in the tank body above the push plate gradually shrinks, so that the gas in the tank body above the push plate is gradually compressed. During the compression process, the collision between gas molecules increases, which helps to promote the contact and mixing between different gas molecules; the temperature increase caused by compression will also enhance the thermal motion of molecules, further promote diffusion, and accelerate mixing; in addition, the threaded rod On the one hand, it drives the stirring blade to rotate to stir the reaction solution, and on the other hand, it can drive the push plate to slide, thereby enhancing the gas mixing effect, that is, one power source can achieve stirring and mixing, which is more energy-saving and helps to reduce costs; the flow direction control component can effectively control the flow direction of the gas, when the push plate slides downward, the space in the tank body below the push plate gradually decreases, and the pressure in the tank body below the push plate gradually increases, so that the baffle ring slides upward, the baffle ring is separated from the abutment with the connecting tube, so that the connecting tube is opened, and the gas below the push plate can flow to the top of the push plate through the perforation of the connecting tube; when the push plate moves up, the pressure below the push plate gradually decreases, and the baffle ring is reset under the action of the elastic member, so that the baffle ring is pressed against the connecting tube to close the connecting tube, so that the perforation can be closed during the process of the push plate moving up, and the gas above the push plate is not easy to flow into the bottom of the push plate again, which helps to ensure the subsequent mixing effect.

[0013] Optionally, an exhaust port is provided on the top of the tank body, and a valve body for controlling the opening and closing of the exhaust port is provided in the exhaust port.

[0014] By adopting the above technical solution, the exhaust port arranged on the top of the tank body can discharge the mixed gas in time after the mixing is completed, so as to ensure the safety of operation and the purity of the gas; in addition, after the mixing is completed and the valve body is opened, the gas in the tank body is not only discharged under the action of the internal pressure, but the upward movement of the push plate can also accelerate the discharge of the gas, so that the gas in the tank body can be discharged more fully, which helps to enhance the exhaust effect.

[0015] Optionally, a second stirring assembly is provided in the tank body, and the second stirring assembly includes a mounting frame, a stirring piece and a screw barrel. The mounting frame is provided on the inner wall of the tank body on the side of the stirring blade close to the push plate, the push rod is rotatable around its own axis and is provided on the mounting frame, the stirring piece is fixedly provided on the push rod, the screw barrel is fixedly connected to the push plate, an internal thread is provided on the screw barrel, an external thread is provided on the push rod, and the push rod is threadably connected to the screw barrel so that when the push plate drives the screw barrel to slide, the push rod rotates around its own axis.

[0016] By adopting the above technical solution, the push plate slides and drives the screw barrel to slide. Since the threaded connection between the screw barrel and the push rod does not have a self-locking ability, the sliding of the screw barrel can cause the push rod to rotate around its own axis. The push rod drives the stirring member to rotate, and the stirring member can further stir the reaction solution in the tank body, so that the solution reacts more fully.

[0017] Optionally, a second mixing component is provided in the tank body, and the second mixing component includes a screw and a first fan blade. The screw is arranged along the axis direction of the tank body, and the first fan blade is coaxially fixedly connected to the end of the screw away from the stirring blade. The screw rotates around its own axis and is arranged on the inner wall of the tank body away from the stirring blade. The screw is threadably connected to the push plate so that the screw can rotate when the push plate slides.

[0018] By adopting the above technical solution, the threaded connection between the screw and the push plate does not have a self-locking capability, so that when the push plate slides, the screw can rotate around its own axis, and the screw drives the first fan blade to rotate, thereby further promoting the uniform mixing of the gas in the tank during the sliding process of the push plate and improving the mixing effect.

[0019] Optionally, the second mixing components are provided in multiple groups and arranged in a circular array.

[0020] By adopting the above technical solution, multiple groups of second mixing components are arranged in a circular array, which can be more evenly distributed in the tank body, thereby improving the uniformity and efficiency of gas mixing in the tank body, thereby improving the effect of the entire mixing process.

[0021] Optionally, a second fan blade is provided on the outer side of the screw rod, and the second fan blade is rotatably connected to the push plate. A limit block is fixedly provided on the second fan blade, and a limit groove is provided on the screw rod along its own axial direction. The limit block is slidably provided in the limit groove, so that when the push plate slides, the screw rod can drive the second fan blade to rotate.

[0022] By adopting the above technical solution, a second fan blade is added to the outside of the screw, and through the cooperation between the limit block on the second fan blade and the limit groove on the screw, the second fan blade can be driven to rotate when the push plate slides, thereby further enhancing the gas mixing effect and improving the mixing efficiency.

[0023] Optionally, an exhaust hole is provided on the push plate.

[0024] By adopting the above technical solution, when the push plate slides upward, a small amount of gas above the push plate can be discharged downward through the exhaust hole, thereby avoiding excessive pressure above the push plate, which helps to ensure the safety of the mixing process; in addition, the gas discharged downward through the exhaust hole under pressure has a faster flow rate, and this part of the gas can be mixed with the gas originally located below the push plate to improve the mixing effect.

[0025] Optionally, the stopper is arranged in a truncated cone shape.

[0026] By adopting the above technical solution, the stopper can be helped to slide smoothly into the through hole, and the sealing effect of the stopper on the through hole can also be improved.

[0027] In a second aspect, the present application provides a compounding process, which adopts the following technical solution:

[0028] A compounding process, using any of the compounding devices described above, comprises the following steps:

[0029] a. The rotating power part drives the threaded rod and the stirring blade to rotate, stirring the reaction solution in the tank, accelerating the reaction of the solution, and the gas generated by the solution reaction is mixed with the gas introduced from the outside;

[0030] b. The threaded rod rotates to make the push plate slide toward the side close to the bottom of the tank body, and the push rod abuts against the block, and the push rod pushes the block out of the perforation. The perforation is in an open state, and the gas deposited at the bottom of the tank body flows into the upper side of the push plate through the perforation;

[0031] c. The threaded rod rotates in the opposite direction to make the push plate slide toward the side close to the top of the tank body, the push rod is separated from the contact with the stopper, the stopper slides into the perforation, and the perforation is closed;

[0032] d. When the push plate slides toward the side close to the top of the tank, the space above the push plate gradually decreases, the air in the tank is compressed, and the mixing of various gases is accelerated.

[0033] By adopting the above technical scheme, the mixing device can drive the threaded rod and the stirring blade to rotate through the rotating power part, stir the reaction solution in the tank body, accelerate the solution reaction and promote the solution reaction to produce gas; when the rotation of the threaded rod causes the push plate to slide toward the bottom of the tank body, the push rod pushes the block out of the perforation, opens the perforation, and allows the gas deposited at the bottom of the tank body to flow into the upper side of the push plate, so that the upper gas and the lower gas in the tank body can be fully in contact; when the threaded rod rotates in the opposite direction, the push plate slides toward the top of the tank body, the push rod disengages from the block, closes the perforation, reduces the space above the push plate, and compresses the gas, thereby further accelerating the mixing of various gases and enhancing the mixing effect.

[0034] In summary, the present application includes at least one of the following beneficial technical effects:

[0035] 1. When the rotating power part rotates, it drives the threaded rod to rotate. On the one hand, the threaded rod drives the stirring blade to rotate to accelerate the reaction of the solution. On the other hand, the threaded rod makes the push plate slide. When the push plate slides down, the gas in the lower layer of the tank can flow into the top of the push plate. When the push plate slides up, it can compress the gas inside the tank, thereby accelerating the mixing of the internal gas, which helps to increase the mixing speed and enhance the mixing effect.

[0036] 2. When the push plate slides, it can drive the screw barrel to slide. When the screw barrel slides, it can make the push rod rotate. The push rod drives the stirring piece to rotate, thereby further accelerating the mixing of the reaction solution, helping to increase the reaction rate of the solution, generating gas faster, and thus accelerating the mixing of the gas.

[0037] 3. When the push plate slides, the screw can rotate, and when the screw rotates, the first fan blade and the second fan blade can rotate, thereby accelerating the air flow in the tank body and further enhancing the mixing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is a schematic diagram of the overall structure of Example 1 of the present application;

[0039] Figure 2 is a cross-sectional view of Example 1 of the present application;

[0040] Figure 3 It is a schematic diagram of the structure after the push plate rises in Example 1 of the present application;

[0041] Figure 4 It is a schematic diagram of the structure after the push plate in Example 1 of the present application is lowered;

[0042] Figure 5 yes Figure 4 The enlarged schematic diagram of point A in the middle;

[0043] Figure 6 yes Figure 4 The enlarged schematic diagram of point B in the middle;

[0044] Figure 7 is a schematic diagram of the structure of the second fan blade in Example 1 of the present application;

[0045] Figure 8 is a cross-sectional view of Example 2 of the present application;

[0046] Fig. 9 yes Figure 8 Enlarged schematic diagram of point C in the middle.

[0047] Reference numerals: 1, tank body; 11, exhaust port; 111, valve body; 12, feed port; 13, liquid discharge port; 14, valve; 2, first stirring assembly; 21, rotating power member; 22, threaded rod; 23, stirring blade; 3, first mixing assembly; 31, push plate; 311, perforation; 312, exhaust port; 313, guide hole; 32, stopper; 321, guide column; 3211, bump; 322, avoidance groove; 33, push rod; 4 , second stirring component; 41, mounting frame; 42, stirring element; 43, screw barrel; 5, second mixing component; 51, screw; 511, limiting groove; 52, first fan blade; 6, second fan blade; 61, connecting ring; 611, limiting block; 62, blade; 7, flow control component; 71, connecting barrel; 711, barrel body; 712, supporting ring; 7121, exhaust groove; 72, retaining ring; 73, elastic member; 8, guide rod; 9, connecting rod. DETAILED DESCRIPTION

[0048] The following is combined with Figure 1-9 This application is described in further detail.

[0049] Embodiment 1,

[0050] The present application embodiment discloses a mixing device. Figure 1 The mixing device includes a tank body 1 and a first stirring assembly 2 and a first mixing assembly 3 arranged in the tank body 1. The tank body 1 is cylindrical, and the height direction of the tank body 1 is vertically arranged. A plurality of feed ports 12 are arranged at the top of the tank body 1, and a liquid discharge port 13 is arranged at the bottom of the tank body 1. A valve 14 for controlling opening and closing is arranged in the feed port 12 and the liquid discharge port 13. The reaction solution and the required gas can be charged into the tank body 1 through the feed port 12, and the solution in the tank body 1 can be discharged through the liquid discharge port 13.

[0051] Reference Figure 2 , Figure 3 and Figure 4 , the first stirring assembly 2 includes a rotating power member 21, a threaded rod 22 and a stirring blade 23. The rotating power member 21 is a motor, and the rotating power member 21 is fixedly connected to the outer wall at the top of the tank body 1; the output shaft of the rotating power member 21 is coaxially arranged with the axis of the tank body 1, and the output shaft of the rotating power member 21 is vertically downward and penetrates into the tank body 1. The threaded rod 22 is coaxially fixedly connected to the end of the output shaft of the rotating power member 21, and the threaded rod 22 is located inside the tank body 1. The stirring blade 23 is fixedly connected to the bottom end of the threaded rod 22, and the stirring blade 23 is provided with a plurality of stirring blades and arranged in a circular array. Therefore, after the rotating power member 21 is started, it can drive the threaded rod 22 to rotate, and the threaded rod 22 drives the stirring blade 23 to rotate, and the stirring blade 23 stirs the reaction solution at the bottom of the tank body 1, thereby accelerating the mixing of the solution, and when the solution reacts, it can generate gas for subsequent mixing.

[0052] Reference Figure 2 , the first mixing assembly 3 includes a push plate 31, a stopper 32 and a push rod 33. The push plate 31 is a circular plate, and the push plate 31 and the tank body 1 are coaxially arranged; the diameter of the push plate 31 is the same as the diameter of the inner wall of the tank body 1, so the peripheral wall of the push plate 31 abuts against the inner wall of the tank body 1, and the push plate 31 can separate the interior of the tank body 1 into two upper and lower parts. A vertical guide rod 8 is fixedly arranged inside the tank body 1, and the push plate 31 slides and penetrates the guide rod 8 in the vertical direction. A threaded hole is coaxially opened on the push plate 31, and the threaded hole on the push plate 31 is threadedly connected to the threaded rod 22, so that when the threaded rod 22 rotates, the push plate 31 can slide in the vertical direction. The thread lead angle of the thread on the threaded rod 22 is smaller than the equivalent friction angle, so the thread has a self-locking ability.

[0053] The push plate 31 is provided with a through hole 311 with a vertical axis, and there are multiple through holes 311; the stopper 32 is in a truncated cone shape, and the number of the stopper 32 is the same as the number of the through holes 311, and each stopper 32 corresponds to a through hole 311; a vertical guide column 321 is fixedly connected to the stopper 32, and a vertical guide hole 313 is provided on the push plate 31 beside the through hole 311, and the guide column 321 is slidably penetrated in the guide hole 313, so that the stopper 32 is slidably set at the through hole 311. A protrusion 3211 is fixedly connected to the bottom of the guide column 321, so as to prevent the guide column 321 from accidentally sliding out of the guide hole 313.

[0054] There are multiple push rods 33, the number of which is the same as the number of the stoppers 32, and each push rod 33 corresponds to a stopper 32; the push rod 33 and the corresponding stopper 32 are coaxially arranged, and the push rod 33 is located below the stopper 32. After the reaction solution is added to the tank body 1, the liquid level of the solution is lower than the end surface of the top of the push rod 33.

[0055] Reference Figure 2 and Figure 4In normal state, the stopper 32 is located in the corresponding through hole 311, and the through hole 311 is in a closed state. When the output shaft of the rotating power member 21 rotates in the positive direction, the push plate 31 can move downward. When the bottom wall of the stopper 32 and the top wall of the push rod 33 abut against each other, the push rod 33 can limit the sliding of the stopper 32. As the push plate 31 moves downward, the stopper 32 can slide upward relative to the push plate 31, so that the stopper 32 slides out of the through hole 311 on the push plate 31, and the through hole 311 is opened. At this time, the gas with a higher density in the tank body 1 below the push plate 31 can flow into the top of the push plate 31 through the through hole 311. When the output shaft of the rotating power part 21 rotates in the opposite direction, the push plate 31 can be moved upward. During the upward movement of the push plate 31, the stopper 32 can slide into the through hole 311 under the action of its own gravity to close the through hole 311. At this time, there is gas with higher density and gas with lower density above the push plate 31. The upward movement of the push plate 31 can reduce the space on the upper part of the tank body 1, and the gas above the push plate 31 is compressed, which helps to accelerate the mixing of the gases and enhance the mixing effect.

[0056] Reference Figure 2 and Figure 3 The top of the tank body 1 is provided with an exhaust port 11, and a valve body 111 is provided at the exhaust port 11. The valve body 111 can be a gate valve or a ball valve, and the valve body 111 is used to control the opening and closing of the exhaust port 11. During the gas mixing process, the valve body 111 is in a closed state; when the gas in the tank body 1 is mixed, the valve body 111 is opened, and the mixed gas in the tank body 1 can be discharged under pressure; during the exhaust process, the rotating power part 21 can be started and drive the push plate 31 to move upward, thereby further accelerating the exhaust of the gas, which helps to enhance the exhaust effect.

[0057] Reference Figure 2 The push plate 31 is also provided with a plurality of exhaust holes 312, which are through holes with a small diameter. When the push plate 31 moves upward, the gas on the upper part of the tank body 1 is compressed. During this process, the pressure on the upper part of the tank body 1 continues to increase, and a small part of the gas on the upper part of the tank body 1 can be discharged downward through the exhaust holes 312, thereby avoiding excessive pressure on the upper part of the tank body 1, which helps to ensure the safety of the mixing process.

[0058] Reference Figure 4 and Figure 5In order to accelerate the reaction of the solution, a second stirring assembly 4 is also provided in the tank body 1, and the second stirring assembly 4 includes a mounting frame 41, a stirring member 42 and a screw barrel 43. The mounting frame 41 is fixedly connected to the inner wall of the tank body 1, and the mounting frame 41 is located above the stirring blade 23, and the mounting frame 41 mainly plays a supporting role. The bottom end of the push rod 33 is rotatably connected to the mounting frame 41, and the rotation axis of the push rod 33 is its own axis. The stirring member 42 includes a leaf, which is fixedly connected to the bottom end of the push rod 33, and a plurality of leafs are provided and arranged in a circular array; the leaf is located above the stirring blade 23. The number of screw barrels 43 is the same as the number of push rods 33, and each screw barrel 43 corresponds to a push rod 33. The outer diameter of the screw barrel 43 is smaller than the aperture of the through hole 311, and the screw barrel 43 is coaxially arranged in the through hole 311; a connecting rod 9 is fixedly connected between the outer wall of the screw barrel 43 and the inner wall of the through hole 311, so that the screw barrel 43 is fixed on the push plate 31. The screw barrel 43 is coaxially arranged on the outside of the push rod 33. The inside of the screw barrel 43 is provided with an internal thread, and the push rod 33 is provided with an external thread, and the screw barrel 43 and the push rod 33 are threadedly connected. The threaded connection between the screw barrel 43 and the push rod 33 does not have a self-locking ability, that is, the thread lead angle is greater than the equivalent friction angle, so when the push plate 31 drives the screw barrel 43 to slide, the sliding of the screw barrel 43 can cause the push rod 33 to rotate, and the push rod 33 drives the stirring member 42 to rotate, so that the solution in the tank body 1 is further mixed, and the reaction of the solution is accelerated.

[0059] Since the screw barrel 43 is arranged in the through hole 311, the stopper 32 is coaxially provided with an escape groove 322, which is a circular groove, and the aperture of the escape groove 322 is the same as the outer diameter of the screw barrel 43; when the stopper 32 is located in the through hole 311, the top of the screw barrel 43 is located in the escape groove 322, and the top wall of the screw barrel 43 abuts against the bottom wall of the escape groove 322. When the push plate 31 slides to move the push rod 33 in the vertical direction, the top of the push rod 33 can abut against the bottom wall of the escape groove 322, thereby pushing the stopper 32 out of the through hole 311.

[0060] Reference Figure 4In order to enhance the mixing effect of the gas in the tank body 1, a second mixing assembly 5 is further provided in the tank body 1, and the second mixing assembly 5 is provided at the upper part of the tank body 1, and the second mixing assembly 5 is provided with multiple groups and arranged in a circular array. The second mixing assembly 5 includes a screw 51 and a first fan blade 52. The screw 51 is arranged vertically, and the top of the screw 51 is rotatably connected to the inner wall of the top of the tank body 1, and the rotation axis of the screw 51 is its own axis. The first fan blade 52 is fixedly connected to the top of the screw 51. A threaded hole adapted to the screw 51 is provided on the push plate 31, and the push plate 31 and the screw 51 are threadedly connected. The thread on the screw 51 does not have a self-locking ability, that is, the thread lead angle is greater than the equivalent friction angle, so when the push plate 31 slides, the screw 51 can be rotated, and the screw 51 drives the first fan blade 52 to rotate, and the rotating first fan blade 52 can blow air downward, thereby accelerating the air flow in the tank body 1, which helps to enhance the gas mixing effect.

[0061] Reference Figure 4 , Figure 6 and Figure 7 , further, the outer side of the screw rod 51 is sleeved with a second fan blade 6, and the second fan blade 6 includes a connecting ring 61 and a blade 62. The connecting ring 61 is a circular ring, and the bottom wall of the connecting ring 61 is against the top wall of the push plate 31, and the connecting ring 61 is rotatably arranged on the top wall of the push plate 31 around its own axis. The blade 62 is fixedly connected to the outer wall of the connecting ring 61, and a plurality of blades 62 are arranged in a circular array. The inner diameter of the connecting ring 61 is the same as the rod diameter of the screw rod 51, and the connecting ring 61 is sleeved on the outer wall of the screw rod 51; the inner wall of the connecting ring 61 is fixedly connected to a limiting block 611, and correspondingly, a limiting groove 511 is provided on the screw rod 51 along its own axis direction, and the limiting block 611 is slidably arranged in the limiting groove 511. Therefore, when the push plate 31 slides, the connecting ring 61 can be driven to slide; the sliding of the push plate 31 can also cause the screw 51 to rotate. Since the cooperation between the limit block 611 and the limit groove 511 limits the rotation of the connecting ring 61 relative to the screw 51, the rotation of the screw 51 can drive the connecting ring 61 to rotate, thereby causing the blade 62 to rotate. That is, during the sliding process of the push plate 31, the second blade 6 can rotate while sliding, and the second blade 6 can blow air upward, thereby further enhancing the mixing of the gas.

[0062] The implementation principle of Example 1 is as follows: when the output shaft of the rotating power member 21 rotates in the forward direction, the threaded rod 22 can rotate accordingly, and the threaded rod 22 drives the stirring blade 23 to rotate, thereby accelerating the mixing of the reaction solution inside the tank body 1, and generating gas when the solution reacts. The remaining gas can be introduced into the tank body 1 from the feed port 12.

[0063] When the threaded rod 22 rotates, the push plate 31 can also be moved downward. When the push plate 31 moves downward, the push rod 33 pushes the stopper 32 out of the through hole 311, so that the through hole 311 is opened, and the heavier gas below the push plate 31 can flow into the top of the push plate 31 through the through hole 311. Then, the output shaft of the rotating power member 21 rotates in the opposite direction, so that the threaded rod 22 rotates with it, and the push plate 31 moves upward at this time. When the push plate 31 moves upward, the push rod 33 is lost, and the stopper 32 can slide into the through hole 311 to close the through hole 311; the process of the push plate 31 moving upward can gradually reduce the internal space of the tank body 1 above the push plate 31, and the various gases above the push plate 31 are compressed, which helps to accelerate the mixing of the various gases.

[0064] During the sliding of the push plate 31, the screw barrel 43 can be driven to slide, and the sliding of the screw barrel 43 drives the push rod 33 to rotate. The stirring member 42 on the push rod 33 can further stir the reaction solution in the tank body 1 as it rotates, so that the solution reacts more fully. In addition, when the push plate 31 slides, the screw 51 can also be rotated, and the screw 51 drives the first blade 52 and the second blade 6 to rotate, thereby accelerating the mixing of the gas above the push plate 31 and enhancing the mixing effect.

[0065] The above process is repeated, and the push plate 31 slides back and forth, continuously introducing the gas generated in the solution reaction to the top of the push plate 31, and then continuously compressing and mixing the gas. Until the mixing is completed, the valve body 111 is opened, and the mixed gas in the tank body 1 can be discharged to the next process or collected under the pressure inside the tank body 1 and the pushing action of the push plate 31 moving upward.

[0066] This embodiment also discloses a mixing process, comprising the following steps:

[0067] Step a. The output shaft of the rotating power member 21 rotates forward, causing the threaded rod 22 to rotate, and the threaded rod 22 drives the stirring blade 23 to rotate, stirring the solution in the tank body 1, so that the solution reacts fully, and a part of the solution is generated during the reaction for subsequent mixing.

[0068] Step b. When the threaded rod 22 rotates, it drives the push plate 31 to move downward, and the push plate 31 drives the stopper 32 to move downward. The push rod 33 pushes the stopper 32 out of the through hole 311, and the through hole 311 opens, and the gas below the push plate 31 flows into the top of the push plate 31.

[0069] Step c. The output shaft of the rotating power member 21 rotates in the opposite direction, so that the push plate 31 moves upward. After losing the abutment of the push rod 33, the stopper 32 slides into the through hole 311, and the through hole 311 is closed.

[0070] Step d. When the push plate 31 moves upward, the space above the tank body 1 is reduced, and the various gases above the push plate 31 are compressed, which helps to fully mix the various gases.

[0071] Step e. Repeat the above process. After the mixing is completed, open the valve body 111, start the rotating power member 21 and drive the push plate 31 to move upward. Under the pressure in the tank body 1 and the upward push of the push plate 31, the mixed gas in the tank body 1 is discharged.

[0072] Embodiment 2,

[0073] Reference Figure 8 and Fig. 9 , the difference between this embodiment and embodiment 1 is that a flow control assembly 7 is provided on the push plate 31 in this embodiment, and the flow control assembly 7 is provided with multiple groups, and each group of flow control assembly 7 corresponds to a through hole 311. The flow control assembly 7 includes a connecting cylinder 71, a retaining ring 72 and an elastic member 73. The connecting cylinder 71 includes a cylinder body 711 and a support ring 712, the top end of the cylinder body 711 is fixedly connected to the bottom wall of the push plate 31, and the cylinder body 711 and the through hole 311 are coaxially arranged. The support ring 712 is fixedly connected to the bottom end of the cylinder body 711, and the outer diameter of the support ring 712 is the same as the inner diameter of the cylinder body 711, and the inner diameter of the support ring 712 is the same as the outer diameter of the screw barrel 43. An annular exhaust groove 7121 is coaxially opened on the support ring 712, and the exhaust groove 7121 passes through the support ring 712. The retaining ring 72 is slidably arranged at the top end of the exhaust groove 7121, and the retaining ring 72 is used to control the opening and closing of the exhaust groove 7121. The elastic member 73 is a spring, and the elastic member 73 is fixedly connected between the bottom wall of the retaining ring 72 and the supporting ring 712. Under normal conditions, the elastic member 73 makes the retaining ring 72 press against the end of the exhaust groove 7121, closing the exhaust groove 7121.

[0074] When the push plate 31 slides downward, the push rod 33 pushes the block 32 out of the through hole 311; then, as the push plate 31 moves downward, the space in the tank body 1 below the push plate 31 gradually shrinks, and the pressure gradually increases. The increased pressure will overcome the elastic force of the elastic member 73, causing the baffle ring 72 to slide upward, and the exhaust groove 7121 to open. At this time, the gas with a higher density below the push plate 31 can flow upward through the exhaust groove 7121 and the through hole 311. When the push plate 31 slides upward, the space below the push plate 31 gradually increases, and the pressure gradually decreases. Therefore, the elastic member 73 resets the baffle ring 72, and the baffle ring 72 blocks the end of the exhaust groove 7121, closing the exhaust groove 7121. Therefore, during the upward movement of the push plate 31, the gas that has flowed into the upper part of the push plate 31 is not easy to flow into the lower part of the push plate 31, which helps to ensure the subsequent mixing effect.

[0075] Due to the provision of the flow direction control assembly 7, in this embodiment, the top end of the push rod 33 can be lengthened and the length of the screw barrel 43 can be correspondingly shortened, so that the push plate 31 has a larger downward movement range; therefore, when the liquid level of the reaction solution in the tank body 1 is low, the device can still be used and maintain a good mixing effect.

[0076] The above are optional embodiments of the present application, and are not intended to limit the protection scope of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A mixing device, characterized in that: include: Tank (1); and a a first stirring assembly (2), the first stirring assembly (2) comprising a rotating power member (21), a threaded rod (22) and a stirring blade (23), the rotation axis of the output end of the rotating power member (21) being arranged along the axial direction of the tank body (1), the threaded rod (22) being coaxially fixedly connected to the output end of the rotating power member (21), the stirring blade (23) being arranged on the threaded rod (22), and the stirring blade (23) being used to stir the reaction solution in the tank body (1); The first mixing assembly (3) comprises a push plate (31), a stopper (32) and a push rod (33), wherein the push plate (31) is slidably disposed in the tank body (1) along the axial direction of the tank body (1), the push plate (31) is threadedly connected to the threaded rod (22), a through hole (311) disposed along the axial direction of the tank body (1) is formed on the push plate (31), the stopper (32) is slidably disposed in the through hole (311), and the stopper (32) is used to seal the tank body (1). The push rod (33) is arranged on the tank body (1), the push rod (33) is located between the push plate (31) and the stirring blade (23), the push rod (33) and the through hole (311) are coaxially arranged, and the end of the push rod (33) away from the stirring blade (23) is used to abut against the stopper (32), so that when the push plate (31) slides toward the side close to the stirring blade (23), the push rod (33) can push the stopper (32) out of the through hole (311); The push plate (31) is provided with a flow direction control assembly (7), the flow direction control assembly (7) comprising a connecting cylinder (71), a retaining ring (72) and an elastic member (73), the connecting cylinder (71) being fixedly connected to a side of the push plate (31) close to the stirring blade (23), the connecting cylinder (71) being connected to the through hole (311), the retaining ring (72) being slidably disposed in the connecting cylinder (71), the elastic member (73) being connected between the retaining ring (72) and the connecting cylinder (71), the elastic member (73) causing the retaining ring (72) to press against the inner wall of the connecting cylinder (71) and seal the connecting cylinder (71); A second stirring assembly (4) is arranged in the tank body (1), and the second stirring assembly (4) comprises a mounting frame (41), a stirring member (42) and a screw barrel (43). The mounting frame (41) is arranged on the inner wall of the tank body (1) on the side of the stirring blade (23) close to the push plate (31). The push rod (33) is arranged on the mounting frame (41) so as to rotate around its own axis. The stirring member (42) is fixedly arranged on the push rod (33). A connecting rod (9) is fixedly connected between the outer wall of the screw barrel (43) and the inner wall of the through hole (311). The screw barrel (43) is fixedly connected to the push plate (31). An internal thread is arranged on the screw barrel (43). An external thread is arranged on the push rod (33). The push rod (33) is threadedly connected to the screw barrel (43), so that when the push plate (31) drives the screw barrel (43) to slide, the push rod (33) rotates around its own axis.

2. A mixing device according to claim 1, characterized in that: The top of the tank body (1) is provided with an exhaust port (11), and the exhaust port (11) is provided with a valve body (111) for controlling the opening and closing of the exhaust port (11).

3. A mixing device according to claim 1, characterized in that: A second mixing assembly (5) is arranged in the tank body (1), and the second mixing assembly (5) comprises a screw (51) and a first fan blade (52). The screw (51) is arranged along the axis direction of the tank body (1), and the first fan blade (52) is coaxially fixedly connected to an end of the screw (51) away from the stirring blade (23). The screw (51) is rotatable around its own axis and is arranged on the inner wall of the tank body (1) away from the stirring blade (23). The screw (51) is threadedly connected to the push plate (31) so that the screw (51) can rotate when the push plate (31) slides.

4. A mixing device according to claim 3, characterized in that: The second mixing components (5) are provided in multiple groups and arranged in a circular array.

5. A mixing device according to claim 3, characterized in that: A second fan blade (6) is sleeved on the outer side of the screw rod (51), the second fan blade (6) and the push plate (31) are rotatably connected, a limit block (611) is fixedly arranged on the second fan blade (6), a limit groove (511) is provided on the screw rod (51) along its own axial direction, and the limit block (611) is slidably arranged in the limit groove (511), so that when the push plate (31) slides, the screw rod (51) can drive the second fan blade (6) to rotate.

6. A mixing device according to claim 1, characterized in that: The push plate (31) is provided with an exhaust hole (312).

7. A mixing device according to claim 1, characterized in that: The stopper (32) is arranged in a truncated cone shape.

8. A compounding process using the compounding device according to any one of claims 1 to 7, characterized in that: The mixing process comprises the following steps: a. The rotating power member (21) drives the threaded rod (22) and the stirring blade (23) to rotate, thereby stirring the reaction solution in the tank (1) to accelerate the reaction of the solution, and the gas generated by the solution reaction is mixed with the gas introduced from the outside; b. The threaded rod (22) rotates so that the push plate (31) slides toward the side close to the bottom of the tank body (1), the push rod (33) abuts against the stopper (32), and the push rod (33) pushes the stopper (32) out of the through hole (311). The through hole (311) is in an open state, and the gas deposited at the bottom of the tank body (1) flows into the upper side of the push plate (31) through the through hole (311); c. The threaded rod (22) rotates in the opposite direction so that the push plate (31) slides toward the side close to the top of the tank body (1), the push rod (33) is separated from the abutment with the stopper (32), the stopper (32) slides into the through hole (311), and the through hole (311) is in a closed state; d. When the push plate (31) slides toward the side close to the top of the tank body (1), the space above the push plate (31) gradually decreases, the air in the tank body (1) is compressed, and the mixing of various gases is accelerated.

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