A scanning electron microscope sample stage

Abstract

The present invention relates to the technical field of scanning electron microscopes, and discloses a scanning electron microscope sample stage, comprising: a sample to be tested is located on an R-axis assembly, and the R-axis assembly drives the sample to be tested to rotate in a horizontal plane; the R-axis assembly is arranged on an X-axis assembly, and the X-axis assembly drives the R-axis assembly to move along the X-axis; the X-axis assembly is arranged on a Y-axis assembly, and the Y-axis assembly drives the X-axis assembly to move along the Y-axis; the Y-axis assembly is arranged on a T-axis assembly, and the T-axis assembly drives the Y-axis assembly to rotate around the T-axis; the T-axis and the surface scanning position of the sample to be tested are located in the same straight line; the T-axis assembly is arranged on a Z-axis assembly, and the Z-axis drives the T-axis assembly to move along the Z-axis. In the present application, the T-axis assembly is arranged on the Z-axis assembly to avoid the surface scanning position of the sample to be tested originally in the center of the field of view being out of focus due to the lifting and lowering of the Z-axis assembly when the T-axis assembly rotates, resulting in readjustment of the electron beam direction or readjustment of the five-axis automatic sample stage, which seriously occupies the scanning time.

Description

Technical Field

[0001] The invention relates to the technical field of scanning electron microscopes, and in particular to a scanning electron microscope sample stage. Background Art

[0002] With the rapid development of science and technology, scanning electron microscope (SEM), as a high-precision and high-resolution microscopic observation tool, plays an irreplaceable role in many fields such as materials science, biomedicine, semiconductor manufacturing and geological exploration. By scanning the surface of the sample with an electron beam, the SEM can generate high-quality images for microstructure analysis and composition detection. In the actual application of SEM, the effect of sample observation is affected by many factors. Among them, the sample stage is a key component for carrying and adjusting the sample. Its stability and flexibility directly determine the accuracy, stability and reliability of the observation results.

[0003] The existing sample stage can generally use a five-axis automatic sample stage to achieve sample loading and adjustment. The five-axis automatic sample stage is generally driven by a motor; using the software supporting the five-axis automatic sample stage, the sample stage can be automatically translated, tilted, rotated, raised or lowered by clicking the mouse or entering coordinates in the software. Figure 1 and Figure 2 The figure shows a schematic diagram of the layout of a five-axis automatic sample stage. The sample 1 to be tested is located on the R-axis assembly 2, and the R-axis assembly 2 is suitable for driving the sample 1 to be tested to rotate in a horizontal plane. The R-axis assembly 2 is located on the X-axis assembly 3, and the X-axis assembly 3 is suitable for driving the R-axis assembly 2 to move along the X-axis in a horizontal plane. The X-axis assembly 3 is located on the Y-axis assembly 4, and the Y-axis assembly 4 is suitable for driving the X-axis assembly 3 to move along the Y-axis in a horizontal plane. The X-axis and the Y-axis are perpendicular to each other. The Y-axis assembly 4 is arranged on the Z-axis assembly 5, and the Z-axis assembly 5 is suitable for driving the Y-axis assembly 4 to move up and down along the Z-axis. The Z-axis is perpendicular to both the X-axis and the Y-axis. The Z-axis assembly 5 is arranged on the T-axis assembly 6, and the T-axis assembly 6 is suitable for driving the Z-axis assembly 5 to rotate around the T-axis. The T-axis is perpendicular to the Z-axis. Figure 1 and Figure 2 In FIG. 1 , the vertical downward arrow indicates the direction of the electron beam scanning the surface of the sample 1 to be tested; the dotted line indicates the T axis, that is, the rotation center line of the T axis assembly 6; and the curved arrow indicates the direction in which the T axis assembly 6 rotates around the T axis. Figure 1In the figure, the T axis and the scanning position of the surface of the sample 1 to be tested are in the same straight line, the electron beam is downward, and is directly at the scanning position of the surface of the sample 1 to be tested, and the scanning position of the surface of the sample 1 to be tested is located at the center of the field of view; at this time, when the T axis assembly rotates, the sample 1 to be tested rotates around the same axis, and the scanning position remains unchanged. However, as the Z axis assembly 5 moves up and down, the scanning position of the T axis and the surface of the sample 1 to be tested changes, and they are no longer in the same straight line. Figure 2 As shown, when the Z-axis assembly 5 rises, the scanning position of the surface of the sample 1 to be tested is higher than the T-axis. At this time, when the T-axis assembly 6 rotates, the sample 1 to be tested also rotates around the T-axis. Since the direction of the electron beam remains unchanged, the scanning position of the surface of the sample 1 to be tested deviates and moves relative to the direction of the electron beam. The scanning position of the surface of the sample 1 to be tested, which was originally at the center of the field of view, will be out of focus and blurred, resulting in the need to readjust the direction of the electron beam to focus on the scanning position of the surface of the sample 1 to be tested or readjust the five-axis automatic sample stage to focus on the scanning position of the surface of the sample 1 to be tested, which seriously occupies the scanning observation time and leads to a decrease in the scanning observation efficiency; it also causes great inconvenience to the user's scanning observation. Summary of the invention

[0004] In view of this, the present invention provides a scanning electron microscope sample stage to solve the problem that after the Z-axis component of the existing five-axis automatic sample stage moves up and down, the T-axis and the scanning position of the surface of the sample to be tested are not in the same straight line. When the T-axis component rotates, the sample to be tested also rotates around the T-axis. Since the direction of the electron beam remains unchanged, the scanning position of the surface of the sample to be tested deviates and moves relative to the direction of the electron beam. The scanning position of the surface of the sample to be tested, which was originally in the center of the field of view, will be out of focus and blurred, resulting in the need to readjust the direction of the electron beam to focus on the scanning position of the surface of the sample to be tested or readjust the five-axis automatic sample stage to focus on the scanning position of the surface of the sample to be tested, which seriously occupies the scanning observation time, resulting in a decrease in the scanning observation efficiency and causing great inconvenience to the user's scanning observation.

[0005] The present invention provides a scanning electron microscope sample stage, comprising:

[0006] An R-axis assembly, on which the sample to be tested is located, and the R-axis assembly is suitable for driving the sample to be tested to rotate in a horizontal plane;

[0007] An X-axis assembly, the R-axis assembly is arranged on the X-axis assembly, and the X-axis assembly is suitable for driving the R-axis assembly to move along the X-axis in a horizontal plane;

[0008] A Y-axis component, the X-axis component is arranged on the Y-axis component, and the Y-axis component is suitable for driving the X-axis component to move along the Y-axis in a horizontal plane; the X-axis and the Y-axis are perpendicular to each other;

[0009] A T-axis assembly, the Y-axis assembly is arranged on the T-axis assembly, and the T-axis assembly is suitable for driving the Y-axis assembly to rotate around the T-axis; the T-axis and the scanning position of the surface of the sample to be tested are located in the same straight line;

[0010] Z-axis assembly, the T-axis assembly is arranged on the Z-axis assembly, and the Z-axis assembly is suitable for driving the T-axis assembly to move up and down along the Z-axis; the Z-axis is perpendicular to both the X-axis and the Y-axis, and the T-axis is perpendicular to the Z-axis. Beneficial effect: The present application adopts the above-mentioned technical scheme to improve the existing five-axis automatic sample stage, and arranges the T-axis assembly on the Z-axis assembly to avoid the displacement in the height direction between the T-axis and the scanning position of the surface of the sample to be measured due to the lifting and lowering of the Z-axis assembly, so that when the T-axis assembly rotates, the scanning position of the surface of the sample to be measured that is originally in the center of the field of view will be out of focus and blurred, resulting in the need to readjust the direction of the electron beam to focus on the scanning position of the surface of the sample to be measured or readjust the five-axis automatic sample stage to focus on the scanning position of the surface of the sample to be measured, which seriously occupies the scanning observation time, resulting in a decrease in the scanning observation efficiency and causing great inconvenience to the user's scanning observation. The technical scheme of the present application ensures the accuracy and stability of the scanning electron microscope observation.

[0011] Optionally, it also includes:

[0012] The storage chamber is composed of a first half storage chamber and a second half storage chamber which are suitable for mutually sealing and buckling; the Z-axis assembly, the T-axis assembly, the X-axis assembly, the Y-axis assembly and the R-axis assembly are all located in the storage chamber. Beneficial effect: The present application adopts the above technical solution, and by setting up a storage chamber, the X-axis assembly, the Y-axis assembly, the Z-axis assembly, the R-axis assembly and the T-axis assembly are protected; at the same time, it is convenient to set the storage chamber to a vacuum environment.

[0013] Optionally, it also includes:

[0014] A bearing assembly is arranged on the R-axis assembly, and the sample to be tested is located on the bearing assembly, and the bearing assembly is suitable for adjusting the height of the sample to be tested so that the T-axis and the scanning position of the surface of the sample to be tested are located in the same horizontal plane. Beneficial effect: The present application adopts the above-mentioned technical scheme, and through the bearing assembly with adjustable height, it is convenient to adjust the scanning position of the surface of the sample to be tested to be in the same horizontal plane as the T-axis, so as to further coordinate with the rotation of the T-axis assembly, so that when the T-axis assembly rotates, the scanning position of the surface of the sample to be tested that is originally in the center of the field of view will not be out of focus and blurred. The present application improves the flexibility of adjusting the height of the sample to be tested through the bearing assembly, and will not be constrained by the height of the sample to be tested. Instead, after easily adjusting the height of the sample to be tested, it can ensure that the scanning position of the surface of the sample to be tested is coplanar with the T-axis.

[0015] Optionally, the X-axis component and / or the Y-axis component are adjusted to move so that the T-axis and the scanning position of the surface of the sample to be measured are located in the same straight line.

[0016] Optionally, the bearing assembly includes:

[0017] A fixing seat, wherein a plurality of mounting holes are provided on the top surface of the fixing seat near the edge thereof, so as to respectively mount a plurality of sample cups, wherein the sample to be tested is located on one of the sample cups;

[0018] The top of the screw is fixedly connected to the bottom surface of the fixing seat, and the screw is threadedly connected to the R-axis assembly; the bearing assembly is suitable for driving the sample to be tested to rise or fall when the fixing seat and the screw are rotated. Beneficial effect: The present application adopts the above technical solution, and by setting up multiple sample cups, it can meet the simultaneous observation of different samples to be tested, thereby improving the scanning observation efficiency.

[0019] Optionally, the bearing assembly further includes:

[0020] A limiter, a threaded sleeve connected to a portion of the thread length of the screw, and the limiter is located between the fixed seat and the R-axis assembly; the limiter has a first state when tightened to abut against the top surface of the R-axis assembly to limit the rotation of the fixed seat and the screw, and a second state when loosened to a gap with the top surface of the R-axis assembly to allow the fixed seat and the screw to rotate. Beneficial effect: The present application adopts the above technical solution, and by setting the limiter, the height position of the fixed seat and the screw can be stabilized in the first state, and the height position of the fixed seat and the screw can be conveniently adjusted in the second state, which is simple to operate and has high stability.

[0021] Optionally, a plane along the height direction is provided on the outer circumference of the screw rod, and a scale mark for marking the height is provided on the plane. Beneficial effect: The present application adopts the above technical solution, and by providing scale marks, it is convenient to accurately adjust the height of the fixing seat.

[0022] Optionally, the spacing between adjacent scribed lines represents a height difference of 1 mm.

[0023] Optionally, the bearing assembly further comprises: a plurality of top screws, wherein a plurality of threaded holes corresponding to and communicating with the plurality of mounting holes are respectively provided on the outer peripheral wall of the fixing seat; the plurality of top screws are respectively arranged in the plurality of threaded holes, and the plurality of top screws are respectively suitable for fixing the plurality of sample cups.

[0024] Optionally, the fixing seat and the screw rod are made integrally. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 Schematic diagram of the arrangement of the five-axis automatic sample stage in the prior art Figure 1 ;

[0027] Figure 2 Schematic diagram of the arrangement of the five-axis automatic sample stage in the prior art Figure 2 ;

[0028] Figure 3 A schematic diagram of the arrangement of a scanning electron microscope sample stage provided in an embodiment of the present invention;

[0029] Figure 4 Schematic diagram of the local three-dimensional structure of the scanning electron microscope sample stage provided in an embodiment of the present invention Figure 1 ;

[0030] Figure 5 A schematic diagram of a partial main structure of a scanning electron microscope sample stage provided in an embodiment of the present invention;

[0031] Figure 6 for Figure 5 A right view structural diagram of ;

[0032] Figure 7 A cross-sectional view of a load-bearing assembly provided in an embodiment of the present invention Figure 1 ;

[0033] Figure 8 It is a schematic diagram of a partial three-dimensional structure of a bearing assembly provided in an embodiment of the present invention;

[0034] Fig. 9 It is a partial front view structural schematic diagram of the bearing assembly provided in an embodiment of the present invention;

[0035] Fig.10 Schematic diagram of the local three-dimensional structure of the scanning electron microscope sample stage provided in an embodiment of the present invention Figure 2 ;

[0036] Fig.11 A schematic diagram of a partial top view of the structure of a scanning electron microscope sample stage provided in an embodiment of the present invention;

[0037] Fig.12 A cross-sectional view of a load-bearing assembly provided in an embodiment of the present invention Figure 2 ;

[0038] Fig.13 It is a schematic diagram of the main structure of the bearing assembly provided in an embodiment of the present invention.

[0039] Description of reference numerals:

[0040] 1. Sample to be tested; 2. R-axis assembly; 3. X-axis assembly; 4. Y-axis assembly; 5. Z-axis assembly; 6. T-axis assembly; 7. First half of the containing chamber; 8. Load-bearing assembly; 9. Fixed seat; 10. Screw; 11. Limiting piece; 12. Marked line; 13. Cantilever; 14. R-axis turbine; 15. Mounting hole; 16. Threaded hole. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0042] The existing bearing components for bearing the samples to be tested generally adopt a fixed height, which can meet the basic placement requirements of the samples to be tested. However, when analyzing the samples to be tested with special shapes and different heights, it is often necessary to change the samples multiple times or readjust the height of the five-axis automatic sample stage, thereby increasing the sample change time or reducing the observation and analysis efficiency. For the above reasons, the present application proposes an improved scanning electron microscope sample stage.

[0043] like Figures 3 to 13 A specific embodiment of the scanning electron microscope sample stage shown includes: an R-axis assembly 2, an X-axis assembly 3, a Y-axis assembly 4, a T-axis assembly 6, a Z-axis assembly 5, a storage bin and a bearing assembly 8. The scanning electron microscope sample stage described in the present application is used for scanning a sample 1 to be tested by a scanning electron microscope.

[0044] like Figure 3 , Figure 5 and Figure 6 As shown, the sample 1 to be tested can be located on the R-axis assembly 2, and the R-axis assembly 2 is suitable for driving the sample 1 to be tested to rotate in a horizontal plane. The R-axis assembly 2 is arranged on the X-axis assembly 3, and the X-axis assembly 3 is suitable for driving the R-axis assembly 2 to move along the X-axis in a horizontal plane. The X-axis assembly 3 is arranged on the Y-axis assembly 4, and the Y-axis assembly 4 is suitable for driving the X-axis assembly 3 to move along the Y-axis in a horizontal plane; the X-axis and the Y-axis are perpendicular to each other. The Y-axis assembly 4 is arranged on the T-axis assembly 6, and the T-axis assembly 6 is suitable for driving the Y-axis assembly 4 to rotate around the T-axis; specifically, as shown Figure 5As shown, the T-axis assembly 6 is provided with a cantilever 13, and the T-axis assembly 6 drives the Y-axis assembly 4 to rotate around the T-axis through the cantilever 13. The T-axis is located in the same straight line as the scanning position of the surface of the sample 1 to be tested. The T-axis assembly 6 is arranged on the Z-axis assembly 5, and the Z-axis assembly 5 is suitable for driving the T-axis assembly 6 to move up and down along the Z-axis; the Z-axis is perpendicular to the X-axis and the Y-axis, and the T-axis is perpendicular to the Z-axis. Figure 3 , Figure 5 and Figure 6 In the figure, the vertical downward arrow indicates the direction of the electron beam scanning the surface of the sample 1 to be tested; the dotted line indicates the T-axis, that is, the rotation center line of the T-axis assembly 6; and the curved arrow indicates the direction in which the T-axis assembly 6 rotates around the T-axis.

[0045] like Figure 4 As shown, the storage chamber is composed of a first half storage chamber 7 and a second half storage chamber which are adapted to be sealed and buckled with each other; the Z-axis assembly 5, the T-axis assembly 6, the X-axis assembly 3, the Y-axis assembly 4, the R-axis assembly 2 and the bearing assembly 8 are all located in the storage chamber. The storage chamber is adapted to maintain a vacuum environment.

[0046] like Figures 10 to 13 As shown, the bearing assembly 8 is arranged on the R-axis assembly 2; preferably, the sample to be tested 1 is located on the bearing assembly 8; specifically, the bearing assembly 8 is arranged on the R-axis turbine 14 on the R-axis assembly 2. The bearing assembly 8 is suitable for adjusting the height of the sample to be tested 1 so that the T-axis and the scanning position of the surface of the sample to be tested 1 are located in the same horizontal plane; the T-axis is the rotation center of the T-axis assembly 6. Further, by adjusting the movement of the X-axis assembly 3 and / or the Y-axis assembly 4, the T-axis and the scanning position of the surface of the sample to be tested 1 are located in the same straight line; the scanning position of the surface of the sample to be tested 1 is the observation point.

[0047] like Figures 7 to 9 , Fig.12 and Fig.13As shown, the bearing assembly 8 includes: a fixed seat 9, a screw 10, a stopper 11 and a plurality of top screws. A plurality of mounting holes 15 are provided on the top surface of the fixed seat 9 near the edge to respectively install a plurality of sample cups. Specifically, the mounting holes 15 are round holes with a diameter of 3.4 mm, which can basically adapt to sample cups of various manufacturers and models. The sample 1 to be tested is located on one of the sample cups; specifically, seven mounting holes can be provided to respectively install seven sample cups. The sample cup is composed of a support plate located at the upper part and a support column located at the lower part, and the support plate is connected to the support column, or the support plate and the support column are integrally arranged, and the sample 1 to be tested is located on the support plate. The top end of the screw 10 is fixedly connected to the bottom surface of the fixed seat 9, and the screw 10 is threadedly connected to the R-axis assembly 2; specifically, the screw 10 is threadedly connected to the R-axis turbine 14 of the R-axis assembly 2. The bearing assembly 8 is suitable for driving the sample 1 to be tested to rise or fall when the fixed seat 9 and the screw 10 are rotated. The limiter 11 is threadedly sleeved and connected to a part of the thread length of the screw 10, and the limiter 11 is located between the fixed seat 9 and the R-axis assembly 2; the limiter 11 has a first state when it is tightened to abut against the top surface of the R-axis assembly 2 to limit the rotation of the fixed seat 9 and the screw 10, and has a second state when it is loosened to have a gap with the top surface of the R-axis assembly 2 to allow the fixed seat 9 and the screw 10 to rotate. A plurality of threaded holes 16 corresponding to and communicating with a plurality of mounting holes 15 are respectively provided on the outer peripheral wall of the fixed seat 9; a plurality of top screws are respectively provided in the plurality of threaded holes 16, and the plurality of top screws are respectively suitable for fixing the support columns of a plurality of sample cups to fix the sample cups. Further, a plane along the height direction is provided on the outer periphery of the screw 10, and a scale line 12 for marking the height is provided on the plane. The spacing between adjacent scale lines 12 represents a height difference of 1 mm. The fixed seat 9 and the screw 10 can be made in one piece.

[0048] The use process of the scanning electron microscope sample stage described in this application is briefly described as follows. First, adjust the limiter 11 to the second state, adjust the top surface of the fixing seat 9 to be coplanar with the T axis, and then adjust the limiter 11 to the first state. Figure 5 The horizontal straight line shown is the top surface of the fixing seat 9. After the sample 1 to be tested is placed on the sample cup, the stopper 11 is adjusted to the second state according to the scanning position of the sample 1 to be tested, and the height of the fixing seat 9 is adjusted so that the scanning position of the sample 1 to be tested is coplanar with the T axis, and then the stopper 11 is adjusted to the first state. The X-axis assembly 3 and / or the Y-axis assembly 4 are adjusted to move so that the T axis and the scanning position of the surface of the sample 1 to be tested are located in the same straight line. The height of the fixing seat 9 can be adjusted in combination with the engraved line 12.

[0049] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations are all within the scope defined by the appended claims.

Claims

1. A scanning electron microscope sample stage, characterized in that: include: An R-axis component (2), the sample to be tested (1) is located on the R-axis component (2), and the R-axis component (2) is suitable for driving the sample to be tested (1) to rotate in a horizontal plane; An X-axis component (3), the R-axis component (2) being arranged on the X-axis component (3), the X-axis component (3) being suitable for driving the R-axis component (2) to move along the X-axis in a horizontal plane; A Y-axis component (4), the X-axis component (3) being arranged on the Y-axis component (4), the Y-axis component (4) being suitable for driving the X-axis component (3) to move along the Y-axis in a horizontal plane; the X-axis and the Y-axis being perpendicular to each other; A T-axis assembly (6), the Y-axis assembly (4) being arranged on the T-axis assembly (6), the T-axis assembly (6) being adapted to drive the Y-axis assembly (4) to rotate around the T-axis; the T-axis and the scanning position of the surface of the sample to be tested (1) being located in the same straight line; A Z-axis component (5), the T-axis component (6) being arranged on the Z-axis component (5), the Z-axis component (5) being suitable for driving the T-axis component (6) to move up and down along the Z-axis; the Z-axis is perpendicular to both the X-axis and the Y-axis, and the T-axis is perpendicular to the Z-axis; Also includes: A bearing assembly (8) is arranged on the R-axis assembly (2), the sample to be tested (1) is located on the bearing assembly (8), and the bearing assembly (8) is suitable for adjusting the height of the sample to be tested (1) so that the scanning position of the T-axis and the surface of the sample to be tested (1) are located in the same horizontal plane; By adjusting the movement of the X-axis component (3) and / or the Y-axis component (4), the T-axis and the scanning position of the surface of the sample to be tested (1) are located in the same straight line; The bearing assembly (8) comprises: A fixing seat (9), wherein a plurality of mounting holes (15) are provided on the top surface of the fixing seat (9) near the edge thereof, so as to respectively mount a plurality of sample cups, wherein the sample to be tested (1) is located on one of the sample cups; A screw rod (10) having a top end fixedly connected to the bottom surface of the fixing seat (9), and the screw rod (10) is threadedly connected to the R-axis assembly (2); the bearing assembly (8) is adapted to drive the sample to be tested (1) to rise or fall when the fixing seat (9) and the screw rod (10) are rotated; The bearing assembly (8) further comprises: a limit member (11) threadably sleeved and connected to a portion of the thread length of the screw rod (10), and the limit member (11) is located between the fixing seat (9) and the R-axis assembly (2); the limit member (11) has a first state in which the fixing seat (9) and the screw rod (10) are restricted from rotating when the limit member (11) is tightened to abut against the top surface of the R-axis assembly (2), and a second state in which the fixing seat (9) and the screw rod (10) are allowed to rotate when the limit member (11) is loosened to leave a gap with the top surface of the R-axis assembly (2); A plane along the height direction is provided on the outer circumference of the screw (10), and a scale line (12) for marking the height is provided on the plane; The T-axis assembly (6) is provided with a cantilever (13), and the T-axis assembly (6) drives the Y-axis assembly (4) to rotate around the T-axis via the cantilever (13); The mounting hole (15) is a circular hole with a diameter of 3.4 mm; The sample cup is composed of a supporting plate located at the upper part and a supporting column located at the lower part; the sample (1) to be tested is located on the supporting plate.

2. The scanning electron microscope sample stage according to claim 1, characterized in that: Also includes: The accommodating chamber is composed of a first half accommodating chamber (7) and a second half accommodating chamber which are adapted to be sealed and fastened with each other; the Z-axis assembly (5), the T-axis assembly (6), the X-axis assembly (3), the Y-axis assembly (4) and the R-axis assembly (2) are all located in the accommodating chamber.

3. The scanning electron microscope sample stage according to claim 1, characterized in that: The spacing between adjacent scale lines (12) represents a height difference of 1 mm.

4. The scanning electron microscope sample stage according to claim 1, characterized in that: The bearing assembly (8) further comprises: A plurality of top screws are provided on the outer peripheral wall of the fixing seat (9) with a plurality of threaded holes (16) corresponding to and communicating with the plurality of mounting holes (15); the plurality of top screws are respectively arranged in the plurality of threaded holes (16), and the plurality of top screws are respectively suitable for fixing the plurality of sample cups.

5. The scanning electron microscope sample stage according to claim 1, characterized in that: The fixing seat (9) and the screw rod (10) are manufactured integrally.

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