MEMS relay, control circuit and power equipment

Abstract

The invention discloses an MEMS relay, a control circuit and power equipment. The MEMS relay comprises a substrate; the axial direction of the spiral coil is parallel to the substrate, and the spiral coil is spirally wound around the outer side of the magnetic strip in the length direction of the magnetic strip; the first magnetic structure is arranged on the substrate and corresponds to one end of the magnetic strip, a gap is formed between the first magnetic structure and the end of the magnetic strip, and the first magnetic structure and the magnetic strip are used for controlling a controlled circuit. In the application, one end of the magnetic strip is not fixed on the substrate through an anchor and the other end rotates around the anchor, but the whole magnetic strip is suspended in the spiral coil and moves slightly along the axial direction of the magnetic strip, and no anchor point exists, so that the problem that the anchor point is loosened after long-time use is avoided.

Description

Technical Field

[0001] The present application relates to the field of electronic technology, and in particular to a MEMS relay, a control circuit and a power device. Background Art

[0002] A relay is a controllable switch that can control the on or off of a controlled circuit. The switch of a relay is generally a mechanical contact switch. With the advancement of technology, the size of relays is getting smaller and smaller. For example, the common MEMS (MicroElectrical Mechanical System) relays are integrated on wafers using MEMS technology to form relays. However, in current MEMS relays, one end of the cantilever arm used for on and off is mostly fixed to the wafer through an anchor, and the other end can be rotated with the anchor as a fulcrum to complete the on and off actions. In this way, the anchor is used as the rotation fulcrum of the cantilever arm. After long-term use, the end fixed by the anchor is easy to loosen. Summary of the invention

[0003] The present application proposes a MEMS relay, a control circuit and a power device, which are intended to solve the problem mentioned in the background art that in the rotation method using the anchor as the fulcrum of the cantilever arm, the anchor is easy to loosen after long-term use.

[0004] In an embodiment of the present application, a MEMS relay is proposed, comprising:

[0005] substrate;

[0006] A spiral coil and a magnetic strip, wherein two ends of the spiral coil are used to connect to a control power supply, and the control power supply is used to control the direction of the current in the spiral coil. The spiral coil is arranged on the substrate, and the axial direction of the spiral coil is parallel to the surface of the substrate carrying the spiral coil. The spiral coil is spirally wound around the outer side of the magnetic strip in the length direction of the magnetic strip;

[0007] A first magnetic structure is provided on the substrate and is arranged corresponding to one end of the magnetic strip, a gap exists between the first magnetic structure and the end of the magnetic strip, and the first magnetic structure and the magnetic strip are used to control the controlled circuit.

[0008] In an embodiment of the present application, the MEMS relay further includes a second magnetic structure, which is disposed on the substrate and corresponds to the other end of the magnetic strip, the second magnetic structure and the end of the magnetic strip have a gap, the second magnetic structure and the magnetic strip are used to control the controlled circuit, and the control signal of the second magnetic structure and the magnetic strip to the controlled circuit is different from the control signal of the first magnetic structure and the magnetic strip to the controlled circuit.

[0009] In an embodiment of the present application, the spiral path of the spiral coil is made by through silicon via technology.

[0010] In the embodiment of the present application, the spiral coil is a three-dimensional spiral structure;

[0011] The spiral coil is a multi-layer structure, and a plurality of square holes and strip holes are formed in each layer;

[0012] The square holes in each layer are stacked to form a spiral path of the spiral coil, and the strip holes in each layer are stacked to form a space for the magnetic strip to pass through.

[0013] In an embodiment of the present application, the multilayer structure includes a first layer, a second layer, a third layer, a fourth layer, a fifth layer, a sixth layer, a seventh layer, an eighth layer and a ninth layer, wherein the first layer and the ninth layer, the second layer and the eighth layer, the third layer and the seventh layer, the fourth layer and the sixth layer are symmetrical structures with respect to the fifth layer, and each layer is parallel to the axial direction of the spiral coil;

[0014] The first layer includes a first strip-shaped hole and a plurality of first square holes arranged on both sides of the first strip-shaped hole;

[0015] The second layer includes a second strip-shaped hole and a plurality of second square holes arranged on both sides of the second strip-shaped hole;

[0016] The third layer includes a third strip hole and a plurality of third holes arranged in a staggered manner and arranged on both sides of the third strip hole;

[0017] The fourth layer includes a plurality of fourth square holes and fifth square holes, the fourth square holes and the fifth square holes correspond to each other one by one, and the fourth square holes and the fifth square holes are arranged alternately on both sides of the central axis of the fourth layer, and the adjacent fourth square holes and fifth square holes are connected through fourth strip holes; the cross-sections of the fourth square holes, the fifth square holes and the fourth strip holes of the fourth layer form a broken line, and each turning point is a fourth square hole or a fifth square hole;

[0018] The fifth layer comprises a plurality of sixth square holes, and adjacent sixth square holes are connected through fifth strip holes; the cross-sections of the sixth square holes and the fifth strip holes of the fifth layer form a wave shape, and the crests or troughs of the waves are the sixth square holes;

[0019] The length directions of the strip holes in the first, second and third layers are parallel to the axial direction of the spiral coil; the opening sizes of the square holes in the first, second, fourth, third and fifth layers increase successively; the distances between the square holes in the first, second, third, fourth and fifth layers and the central axis of the layer decrease successively.

[0020] In the embodiment of the present application, soft glue is filled around the magnetic strip and between the spiral coil.

[0021] In an embodiment of the present application, the first magnetic structure and the second magnetic structure both include:

[0022] A first rectangular annular support structure is provided with at least one static contact on a side of the first rectangular annular support structure away from the magnetic strip, and a moving contact on a side close to the magnetic strip, wherein the moving contact is opposite to the end of the magnetic strip.

[0023] In the embodiment of the present application, the first magnetic structure and the second magnetic structure both further include:

[0024] A second rectangular annular support structure, wherein the second rectangular annular support structure is connected to a side of the first rectangular annular support structure close to the magnetic strip through at least one intermediate contact, and the moving contact is arranged on a side of the second rectangular annular support structure close to the magnetic strip.

[0025] In the embodiment of the present application, the number of the static contacts and the number of the intermediate contacts are both three, and the three static contacts and the three intermediate contacts are arranged in one-to-one correspondence.

[0026] In the embodiment of the present application, the static contacts and the intermediate contacts each include three, the intermediate contact located in the middle and the static contact located in the middle are arranged correspondingly, and the intermediate contacts located on both sides are respectively outside the two static contacts located on both sides.

[0027] In an embodiment of the present application, the first magnetic structure and the second magnetic structure are symmetrical structures with each other, the first magnetic structure and the second magnetic structure have the same magnetic magnitude, the same magnetic polarity at one end close to the magnetic stripe, and the same distance from the magnetic stripe.

[0028] The present application also proposes a control circuit, which is applied to any of the above-mentioned MEMS relays, and the control circuit includes: a step-down module, a magnetic induction module, an amplification module, an operational amplification module, a register module, a pull-up module, a filtering module and a control signal output module;

[0029] The input end of the step-down module is used to connect to the working power supply, and the voltage output end of the step-down module is used to connect to the power input end of the magnetic induction module;

[0030] The magnetic induction module is used to sense the magnetic change of the first magnetic structure and / or the second magnetic structure to generate a first differential signal and / or a second differential signal; the differential signal output end of the magnetic induction module is connected to the signal input end of the amplification module;

[0031] The amplification module is used to amplify the received differential signal;

[0032] The signal output end of the amplification module is connected to the signal input end of the operational amplification module, and the operational amplification module is used to perform operational comparison on the received signal and select a signal that meets the first preset condition for output;

[0033] The signal output end of the operational amplifier module is connected to the signal input end of the register module, and the register module is used to identify the received signal and output a signal that meets the second preset condition;

[0034] The signal output end of the register module is connected to the input end of the pull-up module, and the pull-up module is used to pull up the voltage of the received signal;

[0035] The output end of the pull-up module is connected to the input end of the filter module, and the filter module is used to perform phase conversion and filtering on the received signal;

[0036] The output end of the filter module is connected to the input end of the control signal output module, and the output end of the control signal output module is used to output a control signal.

[0037] In the embodiment of the present application, the voltage reduction module includes a voltage reducer, a first resistor, a second resistor, a third resistor, a first capacitor and a second capacitor;

[0038] One end of the first resistor is connected to the voltage input pin of the voltage reducer, and the other end of the first resistor is used to connect to a high-voltage working power supply;

[0039] The ground pin of the voltage reducer is connected in series with the first capacitor and the second resistor and then grounded, and an end of the first capacitor away from the voltage reducer is also used to connect a low-voltage working power supply;

[0040] The third resistor is connected in series between the first resistor and the enable control pin of the buck;

[0041] An end of the first resistor close to the voltage dropper, an end of the second resistor close to the voltage dropper, an end of the first capacitor away from the voltage dropper, and an end of the third resistor away from the voltage dropper are connected to each other;

[0042] The voltage output pin of the voltage reducer is grounded through the second capacitor;

[0043] The voltage output pin of the voltage reducer is connected to the magnetic induction module.

[0044] In the embodiment of the present application, the magnetic induction module includes a first Hall sensor and / or a second Hall sensor;

[0045] The voltage output pin of the voltage reducer is connected to the positive pressure signal input pin of the first Hall sensor and / or the second Hall sensor;

[0046] The first Hall sensor and / or the second Hall sensor are used to sense the change in the magnitude of the magnetic force of the first magnetic structure and / or the second magnetic structure, and generate a first differential signal and / or a second differential signal;

[0047] A negative pressure signal input pin of the first Hall sensor and / or the second Hall sensor is grounded;

[0048] The positive differential signal output pin and the negative differential signal output pin of the first Hall sensor and / or the second Hall sensor are both connected to the amplification module.

[0049] In the embodiment of the present application, the amplification module includes an amplifier, a fourth resistor, a fifth resistor, a sixth resistor and a seventh resistor;

[0050] The positive differential signal output pin of the first Hall sensor and / or the second Hall sensor is connected to the positive voltage signal input pin of the amplifier through the fourth resistor;

[0051] The negative differential signal output pin of the first Hall sensor and / or the second Hall sensor is connected to the negative voltage signal input pin of the amplifier through the sixth resistor;

[0052] Two ends of the seventh resistor are respectively connected to the negative voltage signal input pin and the signal output pin of the amplifier;

[0053] Two ends of the fifth resistor are respectively connected to the ground pin of the amplifier and one end of the fourth resistor close to the amplifier;

[0054] The signal output pin of the amplifier is connected to the operational amplifier module.

[0055] In an embodiment of the present application, the operational amplifier module includes an operational amplifier and a third capacitor;

[0056] The positive voltage signal input pin of the operational amplifier is connected to the signal output pin of the amplifier, and the negative voltage signal input pin of the operational amplifier is grounded through the third capacitor;

[0057] The signal output pin of the operational amplifier is connected to the register module.

[0058] In the embodiment of the present application, the register module includes a register and an eighth resistor;

[0059] The serial data input pin of the register is connected to the signal output pin of the operational amplifier, one end of the eighth resistor is connected in series with the enable control pin of the register, and the other end is connected to the voltage signal output end of the buck, and the serial data output pin of the register is connected to the pull-up module.

[0060] In the embodiment of the present application, the pull-up module includes a first MOS tube and a second MOS tube;

[0061] The gate of the first MOS tube and the gate of the second MOS tube are both connected to the serial data output pin of the register;

[0062] The drain of the first MOS tube is used to connect to an adapted working power supply, the source of the first MOS tube is connected to the drain of the second MOS tube, and the source of the second MOS tube is grounded;

[0063] The source of the first MOS tube and the drain of the second MOS tube are connected and then connected to the control signal output module.

[0064] In the embodiment of the present application, the control signal output module includes: a third MOS tube, a fourth capacitor, a fifth capacitor, a ninth resistor, a tenth resistor, an eleventh resistor, a twelfth resistor, a first diode, and a fourth MOS tube;

[0065] The source of the first MOS tube and the drain of the second MOS tube are connected in series with the ninth resistor, the eleventh resistor, and the emitter of the third MOS tube;

[0066] The source of the first MOS tube and the drain of the second MOS tube are connected in series with the tenth resistor and the base of the third MOS tube;

[0067] The collector of the third MOS tube is grounded;

[0068] One end of the tenth resistor connected to the base of the third MOS tube is connected to one end of the twelfth resistor, and the other end of the twelfth resistor is grounded; one end of the tenth resistor connected to the base of the third MOS tube is connected to one end of the fourth capacitor, and the other end of the fourth capacitor is grounded, and the fourth capacitor and the twelfth resistor are connected in parallel;

[0069] The emitter of the third MOS tube is connected to the base of the fourth MOS tube through the first diode;

[0070] One end of the first diode close to the fourth MOS tube is grounded through the fifth capacitor;

[0071] The emitter of the fourth MOS tube is used to connect to the working power supply, and the collector of the fourth MOS tube is the control signal output end of the control signal output module.

[0072] The present application also proposes a power device, which includes a circuit board and at least one MEMS relay as described in any of the above embodiments, wherein the at least one MEMS relay is arranged on the circuit board, the at least one MEMS relay is connected through a control circuit as described in any of the above embodiments, and the at least one MEMS relay is used to control a controlled circuit.

[0073] In the embodiment of the present application, the magnetic strip is suspended in the spiral coil. When there is current in the spiral coil, the magnetism of the magnetic strip is enhanced, and then it attracts the first magnetic structure to control the controlled circuit. Among them, the magnetic strip in the embodiment of the present application is not fixed to the substrate by an anchor at one end and rotated around the anchor at the other end, but is suspended as a whole inside the spiral coil and moves slightly along the axis of the magnetic strip. There is no anchor point, thereby avoiding the problem of loosening of the anchor point after long-term use. BRIEF DESCRIPTION OF THE DRAWINGS

[0074] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0075] Figure 1 This is a schematic diagram of a usage scenario of a MEMS relay in an embodiment of the present application;

[0076] Figure 2 Schematic diagram of the structure of a MEMS relay in an embodiment of the present application;

[0077] Figure 3 A schematic diagram of the topological structure of a spiral coil of a MEMS relay in an embodiment of the present application;

[0078] Figure 4 A circuit diagram of a spiral coil of a MEMS relay in an embodiment of the present application;

[0079] Figure 5 A schematic diagram of a usage scenario of a MEMS relay in another embodiment of the present application;

[0080] Figure 6 It is a structural schematic diagram of the magnetic structure of a MEMS relay in an embodiment of the present application;

[0081] Figure 7It is a structural schematic diagram of the magnetic structure of a MEMS relay in another embodiment of the present application;

[0082] Figure 8 Schematic diagram of the magnetic structure of a MEMS relay in another embodiment of the present application;

[0083] Fig. 9 is a module diagram of a control circuit in an embodiment of the present application;

[0084] Fig.10 A circuit diagram of a voltage reduction module, an amplification module, and an operational amplification module in a control circuit in an embodiment of the present application;

[0085] Fig.11 1 is a circuit diagram of a register module, a pull-up module, a filter module and a control signal output module of a control circuit in an embodiment of the present application.

[0086] Description of reference numerals:

[0087] 100-MEMS relay, 110-spiral coil, 111-first layer, 1111-first bar hole, 1112-first square hole, 112-second layer, 1121-second bar hole, 1122-second square hole, 113-third layer, 1131-third bar hole, 1132-third third hole, 114-fourth layer, 1141-fourth square hole, 1142-fifth square hole, 1143-fourth bar hole, 115-fifth layer, 1151-sixth square hole, 1152-fifth bar hole, 120-magnetic strip , 130-substrate, 140-first magnetic structure, 150-second magnetic structure, 160-first rectangular ring-shaped support structure, 161-second rectangular ring-shaped support structure, 170-static contact, 180-middle contact, 190-moving contact, 200-controlled circuit, 300-working power supply, 400-step-down module, 410-magnetic induction module, 420-amplification module, 430-operational amplifier module, 440-registration module, 450-pull-up module, 460-filter module, 470-control signal output module.

[0088] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0089] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0090] It should be noted that if the embodiments of the present application involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0091] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present application, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.

[0092] like Figure 1 As shown, Figure 1 This is a schematic diagram of an application scenario of the MEMS relay 100 in an embodiment of the present application, wherein the MEMS relay 100 is connected to a working power supply 300 and a controlled circuit 200, and the MEMS relay 100 can control the controlled circuit 200, such as controlling the on and off of the controlled circuit 200, and the controlled circuit 200 can be any load circuit.

[0093] like Figure 2 , Figure 4 As shown, Figure 2 : is a structural diagram of a MEMS relay 100 in an embodiment of the present application. In an embodiment of the present application, a MEMS relay 100 is proposed, comprising:

[0094] Substrate 130;

[0095] A spiral coil 110 and a magnetic strip 120, wherein both ends of the spiral coil 110 are used to connect to a control power source L, and the control power source L is used to control the direction of the current in the spiral coil 110. The spiral coil 110 is disposed on the substrate 130, and the axial direction of the spiral coil 110 is parallel to the surface of the substrate 130 that carries the spiral coil 110. The spiral coil 110 is spirally wound around the outer side of the magnetic strip 120 in the length direction of the magnetic strip 120;

[0096] The first magnetic structure 140 is disposed on the substrate 130 and is arranged corresponding to one end of the magnetic stripe 120 . There is a gap between the ends of the first magnetic structure 140 and the magnetic stripe 120 . The first magnetic structure 140 and the magnetic stripe 120 are used to control the controlled circuit 200 .

[0097] like Figure 2 , Figure 3 As shown, in the embodiment of the present application, the spiral coil 110 is a three-dimensional spiral structure;

[0098] The spiral coil 110 is a multi-layer structure, and a plurality of square holes and strip holes are formed in each layer;

[0099] The square holes in each layer are stacked to form a spiral path of the spiral coil 110 , and the bar holes in each layer are stacked to form a space for the magnetic strip 120 to pass through.

[0100] Reference Figure 2 The spiral coil 110 is disposed on a substrate 130, wherein the spiral coil 110 is a three-dimensional spiral structure. In the embodiment of the present application, the rotation path of the spiral coil 110 is a multi-layer structure, which can be manufactured by a TSV (Through Silicon Via) process.

[0101] For example, in the embodiment of the present application, the multilayer structure includes a first layer 111, a second layer 112, a third layer 113, a fourth layer 114, a fifth layer 115, a sixth layer, a seventh layer, an eighth layer, and a ninth layer, wherein the first layer 111 and the ninth layer, the second layer 112 and the eighth layer, the third layer 113 and the seventh layer, the fourth layer 114 and the sixth layer are symmetrical structures with respect to the fifth layer, and each layer is parallel to the axial direction of the spiral coil 110;

[0102] The first layer 111 includes a first strip-shaped hole 1111 and a plurality of first square holes 1112 disposed on both sides of the first strip-shaped hole 1111;

[0103] The second layer 112 includes a second strip-shaped hole 1121 and a plurality of second square holes 1122 disposed on both sides of the second strip-shaped hole 1121;

[0104] The third layer 113 includes a third strip hole 1131 and a plurality of third holes 1132 arranged in a staggered manner and disposed on both sides of the third strip hole 1131;

[0105] The fourth layer 114 includes a plurality of fourth square holes 1141 and fifth square holes 1142, the fourth square holes 1141 and the fifth square holes 1142 correspond to each other one by one, and the fourth square holes 1141 and the fifth square holes 1142 are arranged alternately on both sides of the central axis of the fourth layer 114, and the adjacent fourth square holes 1141 and the fifth square holes 1142 are connected through the fourth strip hole 1143; the cross-sections of the fourth square holes 1141, the fifth square holes 1142 and the fourth strip hole 1143 of the fourth layer 114 form a broken line, and each turning point is the fourth square hole 1141 or the fifth square hole 1142;

[0106] The fifth layer 115 includes a plurality of sixth square holes 1151, and adjacent sixth square holes 1151 are connected through fifth strip holes 1152; the cross-sections of the sixth square holes 1151 and the fifth strip holes 1152 of the fifth layer 115 form a wave shape, and the crest or trough of the wave is the sixth square hole 1151;

[0107] The length directions of the strip holes of the first layer 111, the second layer 112 and the third layer 113 are all parallel to the axial direction of the spiral coil 110; the opening sizes of the square holes of the first layer 111, the second layer 112, the fourth layer 114, the third layer 113 and the fifth layer 115 increase successively; the distances between the square holes of the first layer 111, the second layer 112, the third layer 113, the fourth layer 114 and the fifth layer 115 and the central axis of the layer decrease successively.

[0108] In the embodiments of the present application, Figure 3 As shown, the spiral path of the spiral coil 110 is made through 9 layers of through silicon vias. Since the sixth layer and the first layer 111 are symmetrical structures with respect to the fifth layer 115, the seventh layer and the second layer 112 are symmetrical structures with respect to the fifth layer 115, the eighth layer and the third layer 113 are symmetrical structures with respect to the fifth layer 115, and the fourth layer 114 and the sixth layer are symmetrical structures with respect to the fifth layer 115, Figure 3 The sixth layer, the seventh layer, the eighth layer, and the ninth layer are not shown. Their specific structures may refer to the structures of the first layer 111, the second layer 112, the third layer 113, and the fourth layer 114, respectively.

[0109] Continue to refer to Figure 3 , vertically upward from the substrate (direction 2), it includes the first layer 111, the second layer 112, the third layer 113, the fourth layer 114, the fifth layer 115, the sixth layer, the seventh layer, the eighth layer and the ninth layer, wherein each layer extends along the plane where direction 1 and direction 2 are located, and the axial direction of the spiral coil 110 is parallel to direction 1. Figure 2 , Figure 3 As shown, Figure 3It is the topological structure of the spiral coil 110 in each layer. Taking the first layer as an example, first square holes 1112 are provided on both sides, and a first bar hole 1111 is provided in the middle. The square holes in each layer are stacked to form a spiral path of the spiral coil 110, and the bar holes in each layer are stacked to form a space for the magnetic strip 120 to pass through, and the direction of the magnetic strip 120 is parallel to direction one.

[0110] Continue to refer to Figure 3 In the embodiment of the present application, the three-dimensional shape of the spiral coil 110 can be a circular spiral coil 110, or can also be a square spiral coil 110, wherein b is the cross-sectional shape when the spiral coil 110 is a circular spiral coil 110, and c is the cross-sectional shape when the spiral coil 110 is a square spiral coil 110. It should be noted that b is not necessarily a regular circle, and can also be an ellipse, a quasi-circular shape, etc. In addition, the spiral coil 110 is not limited to a 9-layer through silicon via structure, and can also be a through silicon via structure with more layers.

[0111] Continue to refer to Figure 2 , Figure 3 The magnetic strip 120 passes through the middle of the spiral coil 110. The magnetic strip 120 can be a soft magnetic strip 120 with a slight magnetism. For example, in the embodiment of the present application, a magnetic strip with a Gaussian magnetic flux of 20Gs-800Gs can be selected. In addition, the cross section of the magnetic strip 120 can be square or circular.

[0112] In addition, in the embodiment of the present application, in order to isolate the magnetic stripe 120 and the spiral coil 110, soft glue can be filled between the magnetic stripe 120 and the spiral coil 110, so that the magnetic stripe 120 can be suspended in the spiral coil 110 with the help of the soft glue without contacting the spiral coil 110, and the magnetic stripe 120 can also move slightly when it is subjected to the same magnetic repulsion force or the opposite magnetic attraction force in its axial direction.

[0113] like Figure 2 , Figure 6 As shown, the first magnetic structure 140 is disposed at one end of the magnetic strip 120. Figure 2In the orientation shown, the first magnetic structure 140 is arranged at the end position of the magnetic stripe 120 in direction three, and in direction three, there is a gap between the first magnetic structure 140 and the magnetic stripe 120, and the first magnetic structure 140 is provided with a moving contact 190, and the moving contact 190 is opposite to the end face of the magnetic stripe 120 in direction three, and there is a gap, when there is current in the spiral coil 110, the magnetism of the magnetic stripe 120 can be enhanced, when the magnetism of the magnetic stripe 120 is enhanced, the magnetic stripe 120 and the first magnetic structure 140 can attract each other, so that the magnetic stripe 120 and the moving contact 190 of the first magnetic structure 140 attract each other and contact each other, thereby achieving the purpose of controlling the controlled circuit 200. For example, when the moving contact 190 of the magnetic stripe 120 and the first magnetic structure 140 contact, the controlled circuit 200 is turned on. It should be noted that the control of the controlled circuit 200 after the magnetic strip 120 and the movable contact 190 of the first magnetic structure 140 are in contact is not limited to the conduction signal, but can also be other control signals. The embodiment of the present application does not limit the specific control of the controlled circuit by the MEMS relay. In addition, when the magnetic strip 120 and the movable contact 190 of the first magnetic structure 140 are disconnected, it can also play a role in controlling the controlled circuit 200, for example, to disconnect the controlled circuit 200.

[0114] like Figure 2 , Figure 4 As shown, Figure 4 FIG. 1 is a circuit diagram of the spiral coil 110 of the MEMS relay 100 in the embodiment of the present application, wherein two ends of the spiral coil 110 are connected in series to a control power source L, and the control power source L can control the direction of the current in the spiral coil 110. For example, Figure 4 In this embodiment, the control power supply L is DC+ and DC-, that is, the current direction in the spiral coil 110 is from top to bottom. In other embodiments, the control power supply L can also control DC+ and DC- to swap positions, so that the current direction in the spiral coil is changed to from bottom to top. Figure 4 The spiral wire in Figure 2 The spiral coil 110, Figure 4 The long strip in the spiral conductor is the magnetic strip 120 .

[0115] like Figure 2 , Figure 4 , Figure 6 As shown, assuming that the magnetic property of the first magnetic structure 140 is N-pole, Figure 2In the orientation shown, when there is no current in the spiral coil 110, the magnetic strip 120 maintains a slightly magnetic state, remains spaced from the first magnetic structure 140, and the controlled circuit 200 remains disconnected; when the control power supply L controls the current direction of the spiral coil 110 from top to bottom, the spiral coil 110 generates a magnetic field, which increases the magnetism of the magnetic strip 120, and the upper end of the magnetic strip 120 is the S pole and the lower end is the N pole. After the magnetism of the S pole at the upper end of the magnetic strip 120 increases, it attracts the first magnetic structure 140, so that the upper end of the magnetic strip 120 contacts the moving contact 190 of the first magnetic structure 140, and the controlled circuit 200 is turned on.

[0116] In the embodiment of the present application, the magnetic strip 120 is suspended in the spiral coil 110. When there is current in the spiral coil 110, the magnetism of the magnetic strip 120 is enhanced, and then it attracts the first magnetic structure 140 to control the controlled circuit 200. In the embodiment of the present application, the magnetic strip 120 is not fixed to the substrate 130 by an anchor at one end and rotated around the anchor at the other end, but is suspended in the spiral coil 110 as a whole and moves slightly along the axial direction of the magnetic strip 120. There is no anchor point, thereby avoiding the problem of loosening of the anchor point after long-term use.

[0117] like Figure 2 , Figure 3 , Figure 4 As shown, in the embodiment of the present application, the MEMS relay 100 further includes a second magnetic structure 150, which is disposed on the substrate 130 and corresponds to the other end of the magnetic strip 120, and there is a gap between the second magnetic structure 150 and the end of the magnetic strip 120, and the second magnetic structure 150 and the magnetic strip 120 are used to control the controlled circuit 200, and the control signal of the second magnetic structure 150 and the magnetic strip 120 to the controlled circuit 200 is different from the control signal of the first magnetic structure 140 and the magnetic strip 120 to the controlled circuit 200.

[0118] like Figure 2 As shown, in Figure 2 In the orientation shown, the first magnetic structure 140 and the second magnetic structure 150 are respectively located at the two ends of the magnetic strip 120 in direction three. Figure 5 As shown, Figure 5 The schematic diagram of the use scenario of the MEMS relay 100 including the first magnetic structure 140 and the second magnetic structure 150 in the embodiment of the present application is shown in FIG. The MEMS relay 100 has different closed loops, and different closed loops can be used to send different control signals to the controlled circuit 200. In addition, the controlled circuit 200 can be any load circuit.

[0119] In the embodiment of the present application, the first magnetic structure 140 and the second magnetic structure 150 are symmetrical structures with each other. The first magnetic structure 140 and the second magnetic structure 150 have the same magnetic magnitude, the same magnetic polarity at one end close to the magnetic stripe, and the same distance from the magnetic stripe 120.

[0120] Reference Figure 2 In the embodiment of the present application, it is taken as an example that the magnetic poles of the first magnetic structure 140 and the second magnetic structure 150 close to one end of the magnetic stripe are both N poles. Figure 2 In the orientation shown, when there is no current in the spiral coil 110, the magnetic strip 120 maintains a slightly magnetic state and maintains a spacing state with the first magnetic structure 140 and the second magnetic structure 150; when the control power supply L controls the current direction of the spiral coil 110 from top to bottom, the spiral coil 110 generates a magnetic field, so that the magnetism of the magnetic strip 120 increases. When the magnetism of the magnetic strip 120 increases, the upper end of the magnetic strip 120 is the S pole and the lower end is the N pole. The increased magnetism of the N pole at the upper end of the magnetic strip 120 attracts the first magnetic structure 140, and the S pole at the lower end of the magnetic strip 120 and the second magnetic structure 150 repel each other, so that the upper end of the magnetic strip 120 contacts the moving contact 190 of the first magnetic structure 140. At this time, a first control signal can be sent to the controlled circuit 200, such as conduction, disconnection, voltage increase, etc.

[0121] When the control power supply L controls the current direction of the spiral coil 110 from bottom to top, the spiral coil 110 generates a magnetic field, so that the magnetism of the magnetic stripe 120 increases. When the magnetism of the magnetic stripe 120 increases, the upper end of the magnetic stripe 120 is an N pole and the lower end is an S pole. The increased magnetism of the N pole at the upper end of the magnetic stripe 120 and the first magnetic structure 140 repel each other, and the S pole at the lower end of the magnetic stripe 120 and the second magnetic structure 150 attract each other, so that the lower end of the magnetic stripe 120 contacts the moving contact 190 of the second magnetic structure 150, and at this time, a second control signal is sent to the controlled circuit 200, such as conduction, disconnection, voltage pull-up, etc. In the embodiment of the present application, by setting two magnetic structures, a control effect similar to a single-pole double-throw switch can be formed.

[0122] like Figure 6 As shown, in the embodiment of the present application, the first magnetic structure 140 and the second magnetic structure 150 both include: a first rectangular annular support structure 160, wherein the first rectangular annular support structure 160 is provided with at least one static contact 170 on the side away from the magnetic strip 120, and a moving contact 190 is provided on the side close to the magnetic strip 120, and the moving contact 190 is opposite to the end of the magnetic strip 120.

[0123] like Figure 6 As shown, Figure 6It is a structural schematic diagram of the magnetic structure, wherein the first rectangular annular support structure 160 is an internally hollow annular structure. In the embodiment of the present application, three static contacts 170 are provided at the end of the first rectangular annular support structure 160 away from the magnetic strip 120, and a moving contact 190 is provided at the end close to the magnetic strip 120. When the magnetic enhancement of the magnetic strip 120 and the magnetic structure attract or repel each other, the first rectangular annular support structure 160 located in the middle has a certain elasticity, so that the moving contact 190 and the magnetic strip 120 are close to or away from each other.

[0124] like Figure 7 As shown, in the embodiment of the present application, the first magnetic structure 140 and the second magnetic structure 150 also include: a second rectangular annular support structure 161, the second rectangular annular support structure 161 is connected to the side of the first rectangular annular support structure 160 close to the magnetic strip 120 through at least one intermediate contact 180, and the moving contact 190 is arranged on the side of the second rectangular annular support structure 161 close to the magnetic strip 120.

[0125] like Figure 7 As shown, in the embodiment of the present application, the second rectangular annular support structure 160 and the second rectangular annular support structure 161 are of the same size and shape, and both are hollow inside to form an elastic structure. The first rectangular annular support structure 160 and the second rectangular annular support structure 161 are connected by three middle contacts 180, and the moving contact 190 is arranged on the side of the second rectangular annular support structure 161 close to the magnetic strip 120. When the magnetic enhancement of the magnetic strip 120 and the magnetic structure attract or repel each other, the first rectangular annular support structure 160 and the second rectangular annular support structure 161 located in the middle both have a certain elasticity, so that the moving contact 190 and the magnetic strip 120 can be moved closer to or away from each other. Since two rectangular annular support structures are provided, the elasticity is greater, and thus a better supporting effect is achieved, and a better buffering effect is also achieved, so the reliability is higher and the service life is also longer.

[0126] like Figure 7 As shown, in the embodiment of the present application, the three middle contacts 180 located in the middle correspond to the three static contacts 170 one by one. In other embodiments, as shown in FIG. Figure 8 As shown, the three intermediate contacts 180 may not correspond one-to-one with the three static contacts 170. Specifically, for example, the intermediate contact 180 located in the middle corresponds to the static contact 170 located in the middle, while the two intermediate contacts 180 located on both sides are closer to the outside of the magnetic structure than the two static contacts 170 located on both sides, so that the magnetic structure can have more supporting points in the lateral direction, thereby having a better supporting effect.

[0127] In the embodiment of the present application, the magnetic strip 120 is suspended in the spiral coil 110. When there is current in the spiral coil 110, the magnetism of the magnetic strip 120 is enhanced, and then it attracts the first magnetic structure 140 to control the controlled circuit 200. In the embodiment of the present application, the magnetic strip 120 is not fixed to the substrate 130 by an anchor at one end and rotated around the anchor at the other end, but is suspended in the spiral coil 110 as a whole and moves slightly along the axial direction of the magnetic strip 120. There is no anchor point, thereby avoiding the problem of loosening of the anchor point after long-term use.

[0128] like Figure 2 , Fig. 9 , Fig.11 As shown, the present application also proposes a control circuit, which is applied to the MEMS relay described in any of the above embodiments. In the embodiment of the present application, the control circuit includes: a step-down module 400, a magnetic induction module 410, an amplification module 420, an operational amplification module 430, a register module 440, a pull-up module 450, a filter module 460 and a control signal output module 470;

[0129] The input end of the step-down module 400 is used to connect to the working power supply 300, and the voltage output end of the step-down module 400 is used to connect to the power input end of the magnetic induction module 410;

[0130] The magnetic induction module 410 is used to sense the magnetic change of the first magnetic structure 140 and / or the second magnetic structure 150 to generate a first differential signal and / or a second differential signal; the differential signal output end of the magnetic induction module 410 is connected to the signal input end of the amplification module 420;

[0131] The amplification module 420 is used to amplify the received differential signal;

[0132] The signal output end of the amplification module 420 is connected to the signal input end of the operational amplification module 430 . The operational amplification module 430 is used to perform operational comparison on the received signals and select a signal that meets the first preset condition for output.

[0133] The signal output end of the operational amplifier module 430 is connected to the signal input end of the register module 440, and the register module 440 is used to identify the received signal and output a signal that meets the second preset condition;

[0134] The signal output end of the register module 440 is connected to the input end of the pull-up module 450, and the pull-up module 450 is used to pull up the voltage of the received signal;

[0135] The output end of the pull-up module 450 is connected to the input end of the filter module 460, and the filter module 460 is used to perform phase conversion and filtering on the received signal;

[0136] The output end of the filter module 460 is connected to the input end of the control signal output module 470 , and the output end of the control signal output module 470 is used to output a control signal.

[0137] The working power supply 300 may be a power supply for the controlled circuit 200 and / or the MEMS relay 100, and the working power supply 300 is reduced to a suitable voltage after passing through the step-down module 400. In addition, the working power supplies of the magnetic induction module 410, the amplification module 420, the operational amplification module 430, the register module 440, the filter module 460, and the control signal output module 470 may also be provided by the step-down module 400, or by other power supply modules.

[0138] The magnetic induction module 410 is used to sense the magnetic changes of the first magnetic structure 140 and / or the second magnetic structure 150 in the MEMS relay. For example, when only one first magnetic structure 140 or only one second magnetic structure 150 is provided in the MEMS relay, the magnetic induction module 410 is only used to sense the change in the magnetic force of the first magnetic structure 140 or the second magnetic structure 150; when both the first magnetic structure 140 and the second magnetic structure 150 are provided in the MEMS relay, the magnetic induction module 410 is used to sense the change in the magnetic force of the first magnetic structure 140 and the change in the magnetic force of the second magnetic structure 150.

[0139] In the embodiment of the present application, taking the case where only one first magnetic structure is provided in the MEMS relay as an example, the magnetic induction module 410 is used to sense the change in the magnitude of the magnetic force of the first magnetic structure 140. For example, when the control power supply L controls the current direction of the spiral coil 110 from top to bottom, the spiral coil 110 generates a magnetic field, so that the magnetism of the magnetic strip 120 increases, the upper end of the magnetic strip 120 is the S pole, and the lower end is the N pole. After the magnetism of the S pole at the upper end of the magnetic strip 120 increases, it attracts the first magnetic structure 140, so that the upper end of the magnetic strip 120 contacts the moving contact 190 of the first magnetic structure 140. After the magnetic stripe 120 contacts the first magnetic structure 140, the magnetism of the first magnetic structure 140 increases. When the magnetic induction module 410 senses the increase in the magnetism of the first magnetic structure 140, the magnetic induction module 410 can send a first differential signal. The first differential signal is processed by a series of modules including the amplification module 420, the operational amplifier module 430, the storage module 440, the pull-up module 450, and the filtering module 460, and is finally output from the control signal output module 470 to the controlled circuit 200, thereby controlling the controlled circuit 200.

[0140] For another example, in the embodiment of the present application, the first magnetic structure 140 and the second magnetic structure 150 are simultaneously provided in the MEMS relay. When the control power supply L controls the current direction of the spiral coil 110 from top to bottom, the upper end of the magnetic strip 120 contacts the first magnetic structure 140, and the magnetism of the first magnetic structure 140 increases. When the magnetic induction module 410 senses the increase in the magnetism of the first magnetic structure 140, the magnetic induction module 410 can send a first differential signal; when the control power supply L controls the current direction of the spiral coil 110 from bottom to top, the lower end of the magnetic strip 120 contacts the second magnetic structure 150, and the magnetism of the second magnetic structure 140 increases. When the magnetic induction module 410 senses the increase in the magnetism of the second magnetic structure 150, the magnetic induction module 410 can send a second differential signal. The first differential signal and the second differential signal are processed by a series of modules including the amplification module 420, the operational amplifier module 430, the register module 440, the pull-up module 450, and the filter module 460, and are finally output from the control signal output module 470 to the controlled circuit 200, thereby controlling the controlled circuit 200. The first differential signal and the second differential signal are different, so they can play different control roles.

[0141] In addition, it should be noted that Fig.10 and Fig.11 Both are part of the circuit diagram of the control circuit in the embodiment of the present application, and the two are combined to form the circuit diagram of a complete control circuit in the embodiment of the present application.

[0142] like Fig.10 As shown, in the embodiment of the present application, the buck module 400 includes a buck U1, a first resistor R1, a second resistor R2, a third resistor R3, a first capacitor C1 and a second capacitor C2;

[0143] One end of the first resistor R1 is connected to the voltage input pin VIN of the voltage reducer U1, and the other end of the first resistor R1 is used to connect to a high-voltage working power supply. In the embodiment of the present application, the high-voltage working power supply may be, for example, a 600V power supply.

[0144] The ground pin VSS of the buck U1 is connected in series with the first capacitor C1 and the second resistor R2 and then grounded. The end of the first capacitor C1 away from the buck U1 is also used to connect a low-voltage working power supply; wherein the low-voltage working power supply is used to power the buck U1, such as 10v-60v.

[0145] The third resistor R3 is connected in series between the first resistor R1 and the enable control pin CE of the voltage dropper U1.

[0146] One end of the first resistor R1 close to the voltage dropper U1, one end of the second resistor R2 close to the voltage dropper U1, one end of the first capacitor C1 away from the voltage dropper U1, and one end of the third resistor R3 away from the voltage dropper U1 are connected to each other.

[0147] The voltage output pin VOUT of the buck U1 is grounded through the second capacitor C2 , and the output pin VOUT of the buck U1 is connected to the magnetic induction module 410 .

[0148] Continue to refer to Figure 2 , Fig.10 In the embodiment of the present application, the magnetic induction module 410 includes a first Hall sensor U1 and / or a second Hall sensor U2;

[0149] The voltage output pin VOUT of the voltage reducer U1 is connected to the positive voltage signal input pin IN+ of the first Hall sensor U3 and / or the second Hall sensor U5;

[0150] The first Hall sensor U3 and / or the second Hall sensor U5 are used to sense the change in the magnitude of the magnetic force of the first magnetic structure 140 and / or the second magnetic structure 150, and generate a first differential signal and / or a second differential signal;

[0151] The negative pressure signal input pin IN- of the first Hall sensor U3 and / or the second Hall sensor U5 is grounded;

[0152] The positive differential signal output pin OUT+ and the negative differential signal output pin OUT− of the first Hall sensor U3 and / or the second Hall sensor U5 are both connected to the amplification module 420 .

[0153] The first Hall sensor U3 is used to sense the change in the magnetic force of the first magnetic structure 140 , and the second Hall sensor U5 is used to sense the change in the magnetic force of the second magnetic structure 150 .

[0154] In the embodiment of the present application, both the first Hall sensor U3 and the second Hall sensor U5 can be Hall sensors of model HW101A.

[0155] Continue to refer to Fig.10 In the embodiment of the present application, the amplification module 420 includes an amplifier U2, a fourth resistor R4, a fifth resistor R5, a sixth resistor R6 and a seventh resistor R7;

[0156] The positive differential signal output pin OUT+ of the first Hall sensor U3 and / or the second Hall sensor U5 is connected to the positive voltage signal input pin IN+ of the amplifier U2 through the fourth resistor R4;

[0157] The negative differential signal output pin OUT- of the first Hall sensor U3 and / or the second Hall sensor U5 is connected to the negative voltage signal input pin IN- of the amplifier U2 through the sixth resistor R6;

[0158] Two ends of the seventh resistor R7 are respectively connected to the negative voltage signal input pin IN- and the signal output pin OUT of the amplifier U2;

[0159] Two ends of the fifth resistor R5 are respectively connected to the ground pin GND of the amplifier U2 and one end of the fourth resistor R4 close to the amplifier U2;

[0160] The signal output pin OUT of the amplifier U2 is connected to the operational amplifier module 430 .

[0161] In the embodiment of the present application, the amplifier can be an amplifier of model LMV321, and the amplifier U2 can amplify the received differential signal. Among them, the differential signal output by the first Hall sensor U3 and / or the second Hall sensor U5 is a linear half-wave Sin sinusoidal voltage signal, or a Cos cosine voltage signal, and the voltage signal strength is relatively weak, for example, generally between 0.01V-0.7V. After the differential signal is input to the amplifier U2, the amplifier U2 amplifies it and outputs the amplified linear voltage signal (half-wave Sin sinusoidal voltage signal, or Cos cosine voltage signal), thereby increasing the voltage strength of the output signal. For example, in the embodiment of the present application, the linear voltage signal strength output by the amplifier U2 can be stabilized between 0.10V-0.7V. Fig.10 , Fig.11 As shown, in the embodiment of the present application, the operational amplifier module 430 includes an operational amplifier U4 and a third capacitor C3;

[0162] The positive voltage signal input pin IN+ of the operational amplifier U4 is connected to the signal output pin OUT of the amplifier U2, and the negative voltage signal input pin IN- of the operational amplifier U4 is grounded through the third capacitor C3;

[0163] The signal output pin OUT of the operational amplifier U4 is connected to the register module 440 .

[0164] In the embodiment of the present application, the operational amplifier U4 may be an operational amplifier of model LM321, and the operational amplifier U4 may perform operational comparison on the signal received from the amplifier U3 based on the first preset condition.

[0165] In general, the effective range of the differential signal output by the first Hall sensor U3 and / or the second Hall sensor U5 is: between 0.01V and 0.7V. For example, if the first Hall sensor U3 and / or the second Hall sensor U5 use Si materials and related processes, the effective range of their output signals is generally between 0.01V and 0.5V; if the first Hall sensor U3 and / or the second Hall sensor U5 use GaSa, InP, GaN materials and related processes, the effective range of their output signals is generally between 0.1V and 0.7V. In addition, the signal output by the first Hall sensor U3 and / or the second Hall sensor U5 is a linear Sin sine or Cos cosine signal. After amplification by the amplifier U2, the output of the amplifier U2 is still a linear Sin sine or Cos cosine signal, and the signal strength output by the amplifier U2 will be stable between 0.1V and 0.7V.

[0166] When the operational amplifier U4 receives the signal output by the amplifier U2, it can be selected according to the first preset condition. For example, in the embodiment of the present application, the first preset condition can be based on the transistor process standard: less than 0.3V and more than 0.7V are bad signals, and between 0.3V-0.7V is a valid signal. Then, in the embodiment of the present application, the uniform speed amplifier U4 can select the signal output with a voltage strength between 0.3-0.7V according to the first preset condition.

[0167] In addition, it should be noted that the first preset condition in the embodiment of the present application is to select a 0.3-0.7V signal as the effective signal output. This selection criterion is based on the first Hall sensor U3 and / or the second Hall sensor U5 in accordance with the GaSa process standard. In other embodiments, the judgment criterion of the first preset condition can also be adjusted according to the actual materials and processes of the first Hall sensor U3 and / or the second Hall sensor U5, as well as the actual sampling signal strength, and is not limited to 0.3-0.7V.

[0168] like Fig.10 , Fig.11 As shown, in the embodiment of the present application, the register module 440 includes a register U6 and an eighth resistor R8;

[0169] The serial data input pin SI of the register U6 is connected to the signal output pin OUT of the operational amplifier U4, one end of the eighth resistor R8 is connected in series with the enable control pin CE of the register U6, and the other end is connected to the voltage signal output terminal VOUT of the voltage reducer U1, and the serial data output pin SQH of the register U6 is connected to the pull-up module 450. In the embodiment of the present application, the register can be a register of model 74HC595, and the register U6 can identify the magnetic MEMS signal received from the operational amplifier U4 to determine whether it meets the second preset condition.

[0170] In the embodiment of the present application, register U6 adopts a storage method of dynamically comparing the last valid signal, and outputs a high-low level digital signal, and the judgment result is whether the signal continues to work or resample. For example, the output signal of operational amplifier U4 is a high-low level digital signal. After register U6 receives a high-low level digital signal each time, it is compared with the signal that was effective last time. If it is lower or higher than the most basic standard, it will be directly judged as a bad signal and enter the next cycle of signal resampling. By adopting the storage method of dynamically comparing the last valid signal, the sampling result of the signal difference will be strengthened or weakened at the same time, and the judgment standard of register U6 will also change dynamically. Therefore, even if there are production process improvements or defects in this batch, it will not affect the judgment standard of this batch of signals.

[0171] Specifically, in an embodiment of the present application, after register U6 receives the magnetic MEMS signal sent by operational amplifier U4, it determines whether it is an error signal. For example, it determines whether it is an overvoltage, overcurrent, overtemperature, or short-circuit signal. If so, reset, lose, or resample based on register U6. For example, the signal determined to be an error can be transmitted to the step-down module 400, and the magnetic induction module 410 is waited for to sense the change in the magnetic force of the first magnetic structure 140 and the second magnetic structure 150. If the received magnetic MEMS signal is determined to be a normal signal, it can be output to the pull-up module 450. By setting register U6, the embodiment of the present application can determine whether the received signal is an error signal (such as overvoltage, overcurrent, overtemperature, or short-circuit signal) based on register U6. If the received signal is determined to be an error signal, the control signal is stopped from being sent to the controlled circuit, thereby playing a role in circuit protection.

[0172] like Fig.10 As shown, in the embodiment of the present application, the pull-up module 450 includes a first MOS tube U7 and a second MOS tube U8; the gate G1 of the first MOS tube U7 and the gate G2 of the second MOS tube U8 are both connected to the serial data output pin SQH of the register U6;

[0173] The drain electrode D1 of the first MOS transistor U7 is used to connect to an adapted working power supply, the source electrode S1 of the first MOS transistor U7 is connected to the drain electrode D2 of the second MOS transistor U8, and the source electrode S2 of the second MOS transistor U8 is grounded;

[0174] The source S1 of the first MOS transistor U7 and the drain D2 of the second MOS transistor U8 are connected to the control signal output module 470 .

[0175] Among them, the first MOS tube U7 and the second MOS tube U8 can select different conduction loops according to the voltage of the signal output from the register U6. For example, when the signal received from the register U6 is a high voltage, the first MOS tube U7 is turned on, and the voltage of the received signal is further pulled up to improve the driving ability. When the signal received from the register U6 is a low voltage, the second MOS tube U8 is turned on, and the signal is grounded to stop one step of transmission. In addition, in the embodiment of the present application, the first MOS tube U7 can use a field effect tube of 2N7001, and the second MOS tube U8 can use a field effect tube of model 2N7002.

[0176] like Fig.11 As shown, in the embodiment of the present application, the control signal output module 470 includes: a third MOS tube U9, a fourth capacitor C4, a fifth capacitor C5, a ninth resistor R9, a tenth resistor R10, an eleventh resistor R11, a twelfth resistor R12, a first diode IN1, and a fourth MOS tube U10;

[0177] The source S1 of the first MOS transistor U7 and the drain D2 of the second MOS transistor U8 are connected in series with the ninth resistor R9, the eleventh resistor R11, and the emitter E1 of the third MOS transistor U9;

[0178] The source S1 of the first MOS transistor U7 and the drain D2 of the second MOS transistor U8 are connected in series with the tenth resistor R10 and the base B1 of the third MOS transistor U9;

[0179] The collector C6 of the third MOS tube U9 is grounded;

[0180] One end of the tenth resistor R10 connected to the base B1 of the third MOS tube U9 is connected to one end of the twelfth resistor R12, and the other end of the twelfth resistor R12 is grounded; one end of the tenth resistor R10 connected to the base B1 of the third MOS tube U9 is connected to one end of the fourth capacitor C4, and the other end of the fourth capacitor C4 is grounded, and the fourth capacitor C4 and the twelfth resistor R12 are connected in parallel;

[0181] The emitter E1 of the third MOS tube U9 is connected to the base B2 of the fourth MOS tube U10 through the first diode IN1;

[0182] One end of the first diode IN1 close to the fourth MOS tube U10 is grounded through the fifth capacitor C5;

[0183] The emitter E2 of the fourth MOS tube U10 is used to connect to the working power supply, and the collector C7 of the fourth MOS tube is the control signal output end of the control signal output module 470.

[0184] In the embodiment of the present application, the third MOS tube U9 can perform phase conversion on the signal from the first MOS tube U7, filter it after passing through the first diode IN1, and finally output it through the fourth MOS tube U10, thereby achieving a high voltage and high current driving effect.

[0185] The control circuit in the embodiment of the present application is applied to the MEMS relay described in any of the above embodiments, and thus has all the beneficial effects of the MEMS relay described in any of the above embodiments, which will not be elaborated here one by one.

[0186] The present application also proposes a power device, which includes a circuit board and at least one MEMS relay described in any of the above embodiments, wherein the at least one MEMS relay is arranged on the circuit board, the at least one MEMS relay is connected through the control circuit described in any of the above embodiments, and the at least one MEMS relay is used to control the controlled circuit.

[0187] Among them, the MEMS switch relay plays the role of controlling the controlled circuit in the power device. The power device uses the MEMS switch relay in any of the above embodiments and the control circuit in any of the above embodiments, and therefore includes all the beneficial effects of the above MEMS relay and control circuit, which will not be elaborated here.

[0188] The above description is only an optional embodiment of the present application, and does not limit the patent scope of the present application. All equivalent structural transformations made by using the contents of the present application specification and drawings under the inventive concept of the present application, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present application.

[0189] Through the above description, the embodiments of the present application provide at least the following technical solutions, but are not limited thereto:

[0190] 1. A MEMS relay, comprising:

[0191] substrate;

[0192] A spiral coil and a magnetic strip, wherein two ends of the spiral coil are used to connect to a control power supply, and the control power supply is used to control the direction of the current in the spiral coil. The spiral coil is arranged on the substrate, and the axial direction of the spiral coil is parallel to the surface of the substrate carrying the spiral coil. The spiral coil is spirally wound around the outer side of the magnetic strip in the length direction of the magnetic strip;

[0193] A first magnetic structure is provided on the substrate and is arranged corresponding to one end of the magnetic strip, a gap exists between the first magnetic structure and the end of the magnetic strip, and the first magnetic structure and the magnetic strip are used to control the controlled circuit.

[0194] 2. According to the MEMS relay described in Technical Solution 1, the MEMS relay also includes a second magnetic structure, which is arranged on the substrate and corresponds to the other end of the magnetic strip, and there is a gap between the second magnetic structure and the end of the magnetic strip. The second magnetic structure and the magnetic strip are used to control the controlled circuit, and the control signal of the second magnetic structure and the magnetic strip to the controlled circuit is different from the control signal of the first magnetic structure and the magnetic strip to the controlled circuit.

[0195] 3. In the MEMS relay as described in Technical Solution 1 or 2, the spiral path of the spiral coil is made by through silicon via technology.

[0196] 4. The MEMS relay according to any one of technical solutions 1 to 3, wherein the spiral coil is a three-dimensional spiral structure;

[0197] The spiral coil is a multi-layer structure, and a plurality of square holes and strip holes are formed in each layer;

[0198] The square holes in each layer are stacked to form a spiral path of the spiral coil, and the strip holes in each layer are stacked to form a space for the magnetic strip to pass through.

[0199] 5. The MEMS relay according to any one of technical solutions 1 to 4, wherein the multilayer structure comprises a first layer, a second layer, a third layer, a fourth layer, a fifth layer, a sixth layer, a seventh layer, an eighth layer and a ninth layer, wherein the first layer and the ninth layer, the second layer and the eighth layer, the third layer and the seventh layer, the fourth layer and the sixth layer are symmetrical structures with respect to the fifth layer, and each layer is parallel to the axial direction of the spiral coil;

[0200] The first layer includes a first strip-shaped hole and a plurality of first square holes arranged on both sides of the first strip-shaped hole;

[0201] The second layer includes a second strip-shaped hole and a plurality of second square holes arranged on both sides of the second strip-shaped hole;

[0202] The third layer includes a third strip hole and a plurality of third holes arranged in a staggered manner and arranged on both sides of the third strip hole;

[0203] The fourth layer includes a plurality of fourth square holes and fifth square holes, the fourth square holes and the fifth square holes correspond to each other one by one, and the fourth square holes and the fifth square holes are arranged alternately on both sides of the central axis of the fourth layer, and the adjacent fourth square holes and fifth square holes are connected through fourth strip holes; the cross-sections of the fourth square holes, the fifth square holes and the fourth strip holes of the fourth layer form a broken line, and each turning point is a fourth square hole or a fifth square hole;

[0204] The fifth layer comprises a plurality of sixth square holes, and adjacent sixth square holes are connected through fifth strip holes; the cross-sections of the sixth square holes and the fifth strip holes of the fifth layer form a wave shape, and the crests or troughs of the waves are the sixth square holes;

[0205] The length directions of the strip holes in the first, second and third layers are parallel to the axial direction of the spiral coil; the opening sizes of the square holes in the first, second, fourth, third and fifth layers increase successively; the distances between the square holes in the first, second, third, fourth and fifth layers and the central axis of the layer decrease successively.

[0206] 6. In the MEMS relay as described in any one of technical solutions 1 to 5, soft glue is filled around the magnetic strip and between the spiral coil.

[0207] 7. According to any one of technical solutions 1 to 6, the first magnetic structure and the second magnetic structure both include:

[0208] A first rectangular annular support structure is provided with at least one static contact on a side of the first rectangular annular support structure away from the magnetic strip, and a moving contact on a side close to the magnetic strip, wherein the moving contact is opposite to the end of the magnetic strip.

[0209] 8. According to any one of technical solutions 1 to 7, the first magnetic structure and the second magnetic structure further include:

[0210] A second rectangular annular support structure, wherein the second rectangular annular support structure is connected to a side of the first rectangular annular support structure close to the magnetic strip through at least one intermediate contact, and the moving contact is arranged on a side of the second rectangular annular support structure close to the magnetic strip.

[0211] 9. In the MEMS relay as described in any one of technical solutions 1 to 8, the static contacts and the intermediate contacts each include three, and the three static contacts and the three intermediate contacts are arranged in a one-to-one correspondence.

[0212] 10. In the MEMS relay as described in any one of technical solutions 1 to 9, the static contacts and the intermediate contacts each include three, the intermediate contact located in the middle and the static contact located in the middle are arranged correspondingly, and the intermediate contacts located on both sides are respectively on the outside of the two static contacts located on both sides.

[0213] 11. In the MEMS relay as described in any one of technical solutions 1 to 10, the first magnetic structure and the second magnetic structure are symmetrical structures with each other, the first magnetic structure and the second magnetic structure have the same magnetic magnitude, the same magnetic polarity at one end close to the magnetic strip, and the same distance from the magnetic strip.

[0214] 12. A control circuit, applied to the MEMS relay according to any one of technical solutions 1 to 11, comprising: a step-down module, a magnetic induction module, an amplification module, an operational amplification module, a register module, a pull-up module, a filtering module and a control signal output module;

[0215] The input end of the step-down module is used to connect to the working power supply, and the voltage output end of the step-down module is used to connect to the power input end of the magnetic induction module;

[0216] The magnetic induction module is used to sense the magnetic change of the first magnetic structure and / or the second magnetic structure to generate a first differential signal and / or a second differential signal; the differential signal output end of the magnetic induction module is connected to the signal input end of the amplification module;

[0217] The amplification module is used to amplify the received differential signal;

[0218] The signal output end of the amplification module is connected to the signal input end of the operational amplification module, and the operational amplification module is used to perform operational comparison on the received signal and select a signal that meets the first preset condition for output;

[0219] The signal output end of the operational amplifier module is connected to the signal input end of the register module, and the register module is used to identify the received signal and output a signal that meets the second preset condition; the signal output end of the register module is connected to the input end of the pull-up module, and the pull-up module is used to pull up the voltage of the received signal;

[0220] The output end of the pull-up module is connected to the input end of the filter module, and the filter module is used to perform phase conversion and filtering on the received signal;

[0221] The output end of the filter module is connected to the input end of the control signal output module, and the output end of the control signal output module is used to output a control signal.

[0222] 13. As the control circuit of technical solution 12, the buck module includes a buck, a first resistor, a second resistor, a third resistor, a first capacitor and a second capacitor;

[0223] One end of the first resistor is connected to the voltage input pin of the voltage reducer, and the other end of the first resistor is used to connect to a high-voltage working power supply;

[0224] The ground pin of the voltage reducer is connected in series with the first capacitor and the second resistor and then grounded, and an end of the first capacitor away from the voltage reducer is also used to connect a low-voltage working power supply;

[0225] The third resistor is connected in series between the first resistor and the enable control pin of the buck;

[0226] An end of the first resistor close to the voltage dropper, an end of the second resistor close to the voltage dropper, an end of the first capacitor away from the voltage dropper, and an end of the third resistor away from the voltage dropper are connected to each other;

[0227] The voltage output pin of the voltage reducer is grounded through the second capacitor;

[0228] The voltage output pin of the voltage reducer is connected to the magnetic induction module.

[0229] 14. In the control circuit of technical solution 12 or 13, the magnetic induction module includes a first Hall sensor and / or a second Hall sensor;

[0230] The voltage output pin of the voltage reducer is connected to the positive pressure signal input pin of the first Hall sensor and / or the second Hall sensor;

[0231] The first Hall sensor and / or the second Hall sensor are used to sense the change in the magnitude of the magnetic force of the first magnetic structure and / or the second magnetic structure, and generate a first differential signal and / or a second differential signal;

[0232] A negative pressure signal input pin of the first Hall sensor and / or the second Hall sensor is grounded;

[0233] The positive differential signal output pin and the negative differential signal output pin of the first Hall sensor and / or the second Hall sensor are both connected to the amplification module.

[0234] 15. The control circuit according to any one of technical solutions 12 to 14, wherein the amplification module comprises an amplifier, a fourth resistor, a fifth resistor, a sixth resistor and a seventh resistor;

[0235] The positive differential signal output pin of the first Hall sensor and / or the second Hall sensor is connected to the positive voltage signal input pin of the amplifier through the fourth resistor;

[0236] The negative differential signal output pin of the first Hall sensor and / or the second Hall sensor is connected to the negative voltage signal input pin of the amplifier through the sixth resistor;

[0237] Two ends of the seventh resistor are respectively connected to the negative voltage signal input pin and the signal output pin of the amplifier;

[0238] Two ends of the fifth resistor are respectively connected to the ground pin of the amplifier and one end of the fourth resistor close to the amplifier;

[0239] The signal output pin of the amplifier is connected to the operational amplifier module.

[0240] 16. The control circuit according to any one of technical solutions 12 to 15, wherein the operational amplifier module comprises an operational amplifier and a third capacitor;

[0241] The positive voltage signal input pin of the operational amplifier is connected to the signal output pin of the amplifier, and the negative voltage signal input pin of the operational amplifier is grounded through the third capacitor;

[0242] The signal output pin of the operational amplifier is connected to the register module.

[0243] 17. The control circuit according to any one of technical solutions 12 to 16, wherein the register module comprises a register and an eighth resistor;

[0244] The serial data input pin of the register is connected to the signal output pin of the operational amplifier, one end of the eighth resistor is connected in series with the enable control pin of the register, and the other end is connected to the voltage signal output end of the buck, and the serial data output pin of the register is connected to the pull-up module.

[0245] 18. As the control circuit according to any one of technical solutions 12-17, the pull-up module includes a first MOS tube and a second MOS tube;

[0246] The gate of the first MOS tube and the gate of the second MOS tube are both connected to the serial data output pin of the register;

[0247] The drain of the first MOS tube is used to connect to an adapted working power supply, the source of the first MOS tube is connected to the drain of the second MOS tube, and the source of the second MOS tube is grounded;

[0248] The source of the first MOS tube and the drain of the second MOS tube are connected and then connected to the control signal output module.

[0249] 19. The control circuit according to any one of technical solutions 12 to 18, wherein the control signal output module comprises: a third MOS tube, a fourth capacitor, a fifth capacitor, a ninth resistor, a tenth resistor, an eleventh resistor, a twelfth resistor, a first diode, and a fourth MOS tube;

[0250] The source of the first MOS tube and the drain of the second MOS tube are connected in series with the ninth resistor, the eleventh resistor, and the emitter of the third MOS tube;

[0251] The source of the first MOS tube and the drain of the second MOS tube are connected in series with the tenth resistor and the base of the third MOS tube;

[0252] The collector of the third MOS tube is grounded;

[0253] One end of the tenth resistor connected to the base of the third MOS tube is connected to one end of the twelfth resistor, and the other end of the twelfth resistor is grounded; one end of the tenth resistor connected to the base of the third MOS tube is connected to one end of the fourth capacitor, and the other end of the fourth capacitor is grounded, and the fourth capacitor and the twelfth resistor are connected in parallel;

[0254] The emitter of the third MOS tube is connected to the base of the fourth MOS tube through the first diode;

[0255] One end of the first diode close to the fourth MOS tube is grounded through the fifth capacitor;

[0256] The emitter of the fourth MOS tube is used to connect to the working power supply, and the collector of the fourth MOS tube is the control signal output end of the control signal output module.

[0257] 20. A power device, comprising a circuit board and at least one MEMS relay as described in technical solutions 1-11, wherein the at least one MEMS relay is arranged on the circuit board, the at least one MEMS relay is connected via a control circuit as described in any one of technical solutions 12-19, and the at least one MEMS relay is used to control a controlled circuit.

Claims

1. A MEMS relay, characterized in that: include: substrate; A spiral coil and a magnetic strip, wherein two ends of the spiral coil are used to connect to a control power supply, and the control power supply is used to control the direction of the current in the spiral coil. The spiral coil is arranged on the substrate, and the axial direction of the spiral coil is parallel to the surface of the substrate carrying the spiral coil. The spiral coil is spirally wound around the outer side of the magnetic strip in the length direction of the magnetic strip; A first magnetic structure is provided on the substrate and is arranged corresponding to one end of the magnetic strip, a gap exists between the first magnetic structure and the end of the magnetic strip, and the first magnetic structure and the magnetic strip are used to control the controlled circuit.

2. The MEMS relay according to claim 1, characterized in that: The MEMS relay further includes a second magnetic structure, which is disposed on the substrate and corresponds to the other end of the magnetic strip, wherein the second magnetic structure and the end of the magnetic strip have a gap, the second magnetic structure and the magnetic strip are used to control the controlled circuit, and the control signal of the second magnetic structure and the magnetic strip on the controlled circuit is different from the control signal of the first magnetic structure and the magnetic strip on the controlled circuit.

3. The MEMS relay according to claim 1 or 2, characterized in that: The spiral path of the spiral coil is made by through silicon via technology.

4. The MEMS relay according to claim 3, characterized in that: The spiral coil is a three-dimensional spiral structure; The spiral coil is a multi-layer structure, and a plurality of square holes and strip holes are formed in each layer; The square holes in each layer are stacked to form a spiral path of the spiral coil, and the strip holes in each layer are stacked to form a space for the magnetic strip to pass through.

5. The MEMS relay according to claim 4, characterized in that: The multilayer structure comprises a first layer, a second layer, a third layer, a fourth layer, a fifth layer, a sixth layer, a seventh layer, an eighth layer and a ninth layer, wherein the first layer and the ninth layer, the second layer and the eighth layer, the third layer and the seventh layer, the fourth layer and the sixth layer are symmetrical structures with respect to the fifth layer, and each layer is parallel to the axial direction of the spiral coil; The first layer includes a first strip-shaped hole and a plurality of first square holes arranged on both sides of the first strip-shaped hole; The second layer includes a second strip-shaped hole and a plurality of second square holes arranged on both sides of the second strip-shaped hole; The third layer includes a third strip hole and a plurality of third holes arranged in a staggered manner and arranged on both sides of the third strip hole; The fourth layer includes a plurality of fourth square holes and fifth square holes, the fourth square holes and the fifth square holes correspond to each other one by one, and the fourth square holes and the fifth square holes are arranged alternately on both sides of the central axis of the fourth layer, and the adjacent fourth square holes and fifth square holes are connected through fourth strip holes; the cross-sections of the fourth square holes, the fifth square holes and the fourth strip holes of the fourth layer form a broken line, and each turning point is a fourth square hole or a fifth square hole; The fifth layer comprises a plurality of sixth square holes, and adjacent sixth square holes are connected through fifth strip holes; the cross-sections of the sixth square holes and the fifth strip holes of the fifth layer form a wave shape, and the crests or troughs of the waves are the sixth square holes; The length directions of the strip holes in the first, second and third layers are parallel to the axial direction of the spiral coil; the opening sizes of the square holes in the first, second, fourth, third and fifth layers increase successively; the distances between the square holes in the first, second, third, fourth and fifth layers and the central axis of the layer decrease successively.

6. The MEMS relay according to claim 1 or 2, characterized in that: Soft glue is filled around the magnetic strip and between the spiral coil.

7. The MEMS relay according to claim 2, characterized in that: The first magnetic structure and the second magnetic structure both include: A first rectangular annular support structure is provided with at least one static contact on a side of the first rectangular annular support structure away from the magnetic strip, and a moving contact on a side close to the magnetic strip, wherein the moving contact is opposite to the end of the magnetic strip.

8. The MEMS relay according to claim 7, characterized in that: The first magnetic structure and the second magnetic structure each further include: A second rectangular annular support structure, wherein the second rectangular annular support structure is connected to a side of the first rectangular annular support structure close to the magnetic strip through at least one intermediate contact, and the moving contact is arranged on a side of the second rectangular annular support structure close to the magnetic strip.

9. A control circuit, applied to the MEMS relay according to any one of claims 1 to 8, characterized in that: include: Buck module, magnetic induction module, amplification module, operational amplifier module, storage module, pull-up module, filtering module and control signal output module; The input end of the step-down module is used to connect to the working power supply, and the voltage output end of the step-down module is used to connect to the power input end of the magnetic induction module; The magnetic induction module is used to sense the magnetic change of the first magnetic structure and / or the second magnetic structure to generate a first differential signal and / or a second differential signal; the differential signal output end of the magnetic induction module is connected to the signal input end of the amplification module; The amplification module is used to amplify the received differential signal; The signal output end of the amplification module is connected to the signal input end of the operational amplification module, and the operational amplification module is used to perform operational comparison on the received signal and select a signal that meets the first preset condition for output; The signal output end of the operational amplifier module is connected to the signal input end of the register module, and the register module is used to identify the received signal and output a signal that meets the second preset condition; the signal output end of the register module is connected to the input end of the pull-up module, and the pull-up module is used to pull up the voltage of the received signal; The output end of the pull-up module is connected to the input end of the filter module, and the filter module is used to perform phase conversion and filtering on the received signal; The output end of the filter module is connected to the input end of the control signal output module, and the output end of the control signal output module is used to output a control signal.

10. A power device, characterized in that: The power device comprises a circuit board and at least one MEMS relay as described in claims 1-8, wherein the at least one MEMS relay is arranged on the circuit board, the at least one MEMS relay is connected via the control circuit as described in claim 9, and the at least one MEMS relay is used to control the controlled circuit.

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