A detection, rotating, suction and transplanting device for photovoltaic panel silicon wafers

Abstract

The invention discloses a detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers, comprising: a chassis, a photovoltaic panel loading module and a photovoltaic panel unloading module are arranged in the chassis, the photovoltaic panel loading module and the photovoltaic panel unloading module are connected to a silicon wafer exposure device, the photovoltaic panel loading module comprises a silicon wafer loading and transporting line, a silicon wafer loading and turning transporting line, a loading and transplanting device, a two-stage loading and transporting line, a three-stage loading and transporting line and a rotating loading and transplanting machine, the photovoltaic panel unloading module comprises a rotating unloading and transplanting machine, a first unloading and transporting line, a transplanting and transporting line, a first unloading and transplanting machine, a second unloading and transporting line, a second unloading and transplanting machine, a third unloading and transporting line, a silicon wafer unloading and transporting line and a fourth unloading and transporting line; the invention arranges regularization mechanisms on a plurality of transporting lines to align and regularize silicon wafers to prevent them from shifting, thereby improving the loading and unloading accuracy of photovoltaic silicon wafers; the rotating loading and transplanting machine alternately takes and loads materials, thereby greatly improving the loading and unloading efficiency of the exposure machine.

Description

Technical Field

[0001] The invention relates to the technical field of loading and unloading of photovoltaic panel silicon wafers, and in particular to a detection, rotation, suction and transplanting device for photovoltaic panel silicon wafers. Background Art

[0002] Wafer exposure machine is a very important manufacturing equipment, which is mainly used in semiconductor manufacturing, photolithography and semiconductor packaging. In these fields, wafer exposure machine plays a vital role, not only has an important impact on the accuracy and quality of the chip, but also is an indispensable key process in semiconductor manufacturing.

[0003] The main principle of the silicon wafer exposure machine is to use photolithography technology to expose the silicon wafer through a light source and a mask, so as to transfer the mask pattern to the silicon wafer. The light source of the silicon wafer exposure machine is an ultraviolet light source with a wavelength between 200 and 400nm, which can expose the silicon wafer through the mask. During the exposure process, the photosensitive agent on the surface of the silicon wafer will react chemically with the ultraviolet light source, so that the mask pattern will leave an imprint on the surface of the silicon wafer. The accurate replication of the mask pattern is an important step in chip manufacturing, and the silicon wafer exposure machine is the most critical equipment to achieve this function.

[0004] The silicon wafer exposure machine requires silicon wafer loading and unloading equipment. In the existing silicon wafer loading and unloading equipment, the photovoltaic panel silicon wafers will deviate when moving on the transportation line, resulting in inaccurate loading and unloading transfer. At the same time, the existing silicon wafer loading and unloading equipment adopts single picking and placing, which is inefficient.

[0005] Therefore, we propose a detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers to solve the above-mentioned problems. Summary of the invention

[0006] The purpose of the present invention is to provide a detection, rotation, suction and transplanting device for photovoltaic panel silicon wafers to solve the problems raised in the above background technology.

[0007] To achieve the above purpose, the present invention provides the following technical solutions: a photovoltaic panel silicon wafer detection, rotation, suction and transplanting device, comprising: a chassis, a photovoltaic panel loading module and a photovoltaic panel unloading module are arranged in the chassis, and the photovoltaic panel loading module and the photovoltaic panel unloading module are connected to the silicon wafer exposure device;

[0008] The photovoltaic panel loading module comprises a silicon wafer loading and transporting line, a silicon wafer loading and turning transporting line, a loading and transplanting device, a two-stage loading and transporting line, a three-stage loading and transporting line and a rotary loading and transplanting machine. The silicon wafer loading and transporting line, the silicon wafer loading and turning transporting line and the two-stage loading and transporting line are in the same straight line and are connected in sequence. Two three-stage loading and transporting lines are provided, which are symmetrically arranged on both sides of the rotary loading and transplanting machine and are perpendicular to the transport direction of the silicon wafer loading and transporting line. Two loading and transplanting devices are provided, which are located between the three-stage loading and transporting line and the two-stage loading and transporting line.

[0009] The three-stage loading and transporting line comprises a carrier plate, which is fixedly arranged, on which two sets of conveyor belts and a set of relay transport lines are fixedly installed, a moving direction regularization mechanism is arranged on the carrier plate, a lifting regularization mechanism is arranged between the two sets of conveyor belts, and two third bidirectional linear servo modules are arranged below the carrier plate, the two third bidirectional linear servo modules are respectively located below the two sets of conveyor belts, and the third bidirectional linear servo modules drive and connect the two side regularization mechanisms;

[0010] The rotary loading transplanter includes a first DD motor, a transplanting arm and a servo lifting mechanism. The first DD motor is arranged on the servo lifting mechanism. The first DD motor drives the first rotating disk. Two mutually perpendicular transplanting arms are fixedly installed on the first rotating disk. The first suction claw is installed at the end of the transplanting arm. The first DD motor drives the first rotating disk to rotate back and forth 90°.

[0011] Preferably, the chassis body is provided with a ventilation fan, an equipment operation indicator light, a silicon wafer outlet, a silicon wafer feed port, a height adjustment foot, an observation window, a system control cabinet, an air circuit integration cabinet and a system control computer, wherein the silicon wafer outlet and the silicon wafer feed port are respectively located on both sides of the chassis, and are respectively connected to the photovoltaic panel unloading module and the photovoltaic panel loading module.

[0012] Preferably, the silicon wafer loading and transporting line includes a first bidirectional linear servo module, a first regularizing plate, a support frame, a transport belt, a first servo motor and a first regularizing wheel group. The support frame is fixedly arranged, a first servo motor is arranged on one side of the support frame, a transport belt is arranged on the side of the support frame, the first servo motor drives and connects the transport belt, the first bidirectional linear servo module is fixedly arranged under the support frame, two first regularizing plates are symmetrically arranged on the first bidirectional linear servo module, the first regularizing wheel group is installed on the upper end of the first regularizing plate, and the first regularizing wheel group is located on the side of the transport belt.

[0013] Preferably, the silicon wafer loading and turning transport line comprises a lifting servo module, a rotating servo module, a carrier stand, a first conveyor belt, a second servo motor and a lattice rotating table, the carrier stand is fixedly arranged, a first conveyor belt is arranged on the side of the carrier stand, the first conveyor belt is connected to the second servo motor, and an open groove is arranged at the corresponding position of the first conveyor belt and the carrier stand;

[0014] A rotating servo module is arranged below the carrier stand, and a grid-shaped rotating table is fixedly installed on the output shaft of the rotating servo module. The grid-shaped rotating table is interlaced with the carrier stand through an open slot, and the rotating servo module drives the grid-shaped rotating table to rotate 90°;

[0015] The rotating servo module is connected to the lifting servo module, and the lifting servo module drives the rotating servo module to lift.

[0016] Preferably, the feeding and transplanting device is mainly composed of a linear servo module driving a first negative pressure clamp, and a plurality of suction nozzles are provided on the first negative pressure clamp.

[0017] Preferably, the two-stage loading and transporting line includes two groups of fixed brackets, a second conveying belt is arranged on the bracket, a third servo motor is arranged on the side of the bracket, the third servo motor drives and connects the second conveying belt, a second bidirectional linear servo module is fixedly arranged under the bracket, two second regularizing plates are driven and slidably arranged on the second bidirectional linear servo module, and a second regularizing wheel group is fixedly installed on the upper end of the second regularizing plate.

[0018] Preferably, the motion-direction regularization mechanism comprises a fourth bidirectional linear servo module, two movable seats are slidingly driven on the fourth bidirectional linear servo module, and the first regularization column is fixedly installed on the upper end of the movable seat.

[0019] Preferably, the lifting and regularizing mechanism includes a fixed frame, a lifting platform and a second regularizing column. The fixed frame is fixedly arranged on both sides of the fourth bidirectional linear servo module, and an arc-shaped guide groove is opened on the fixed frame. The lifting platform is slidably arranged on the fourth bidirectional linear servo module, and the lifting platform is divided into a fixed block and a lifting block. The fixed block is slidably connected to the lifting block up and down. A convex shaft is provided on the side of the lifting block, which is slidably connected to the arc-shaped guide groove, and the second regularizing column is fixedly installed on the upper end of the lifting block.

[0020] Preferably, the photovoltaic panel unloading module includes a rotary unloading and transplanting machine, a first unloading and transporting line, a transplanting and transporting line, a first unloading and transplanting machine, a second unloading and transporting line, a second unloading and transplanting machine, a third unloading and transporting line, a silicon wafer unloading and transporting line and a fourth unloading and transporting line. The rotary unloading and transplanting machine is arranged across the exposure equipment and the first unloading and transporting line. The first unloading and transporting line is connected to the transplanting and transporting line. The transfer directions of the transplanting and transporting line and the second unloading and transporting line are perpendicular. The first unloading and transplanting machine is arranged between the transplanting and transporting line. The second unloading and transporting line is connected to the third unloading and transporting line. The transfer directions of the second unloading and transporting line and the third unloading and transporting line are perpendicular. The second unloading and transplanting machine is arranged between the second unloading and transporting line and the third unloading and transporting line. The third unloading and transporting line is connected to the silicon wafer unloading and transporting line. The structure of the silicon wafer unloading and transporting line is the same as that of the silicon wafer loading turning transport line. The silicon wafer unloading and transporting line is connected to the fourth unloading and transporting line.

[0021] Preferably, the rotary material discharging transplanter comprises a supporting frame, on which a second DD motor is hoisted, the second DD motor is driven and connected to a second rotating disk, and two symmetrical second suction claws are hoisted on the lower surface of the second rotating disk.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] 1. Set up regularization mechanisms on multiple transport lines to align and regularize silicon wafers to prevent them from shifting and improve the accuracy of loading and unloading photovoltaic silicon wafers;

[0024] 2. There are two three-section loading and transporting lines. The rotary loading and transplanting machine is equipped with two loading arms. The two loading arms take and load materials alternately. At the same time, there is a rotary unloading and transplanting machine. It unloads materials from the exposure machine by rotating alternately to meet the working rhythm of the exposure machine and greatly improve the loading and unloading efficiency of the exposure machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a structural schematic diagram of the present invention;

[0026] Figure 2 For the present invention Figure 1 Rear view of

[0027] Figure 3 It is a structural schematic diagram of a photovoltaic panel loading module and a photovoltaic panel unloading module in the present invention;

[0028] Figure 4 It is a structural schematic diagram of a silicon wafer loading and transporting line and a silicon wafer loading and turning and transporting line in the present invention;

[0029] Figure 5 It is a structural schematic diagram of the silicon wafer loading and transporting line in the present invention;

[0030] Figure 6 It is a structural schematic diagram of the silicon wafer loading and diverting transportation line in the present invention;

[0031] Figure 7 It is a structural schematic diagram of the lifting servo module and the rotating servo module in the present invention;

[0032] Figure 8 It is a structural schematic diagram of the feeding and transplanting device and the two-stage feeding and transporting line in the present invention;

[0033] Fig. 9 It is a structural schematic diagram of the feeding and transplanting device in the present invention;

[0034] Fig.10 It is a structural schematic diagram of the two-stage loading and transporting line in the present invention;

[0035] Fig.11 It is a structural schematic diagram of the three-stage loading and transporting line and the rotary loading and transplanting machine in the present invention;

[0036] Fig.12 It is a structural schematic diagram of the three-stage loading and transporting line in the present invention;

[0037] Fig.13 It is a structural schematic diagram of the moving direction regularization mechanism and the lifting regularization mechanism in the present invention;

[0038] Fig.14 It is a structural schematic diagram of the rotary loading and transplanting machine in the present invention;

[0039] Fig.15 It is a structural schematic diagram of the photovoltaic panel blanking module in the present invention;

[0040] Fig.16 It is a structural schematic diagram of the rotary feeding and transplanting machine in the present invention.

[0041] In the figure: 1. Chassis; 101. Ventilation fan; 102. Equipment operation indicator light; 103. Wafer outlet; 104. Wafer inlet; 105. Heightening feet; 106. Observation window; 107. System control cabinet; 108. Air circuit integration cabinet; 109. System control computer; 2. Photovoltaic panel loading module; 21. Wafer loading and transport line; 211. First bidirectional linear servo module; 212. First regularized board; 213. Support frame; 214. Transport belt; 215. First servo motor; 216. First regularized wheel set ; 22, silicon wafer feeding and turning transport line; 221, lifting servo module; 222, rotating servo module; 223, carrier stand; 224, first conveyor belt; 225, second servo motor; 226, grid rotary table; 227, open slot; 23, feeding and transplanting device; 231, first negative pressure clamp; 24, two-stage feeding and transport line; 241, bracket; 242, second bidirectional linear servo module; 243, second regular plate; 244, second regular wheel set; 245, second conveyor belt; 246, third servo motor machine; 25, three-stage loading and transporting line; 251, carrier plate; 252, third bidirectional linear servo module; 253, conveyor belt; 254, lifting and tidying mechanism; 2541, fixed frame; 2542, arc guide groove; 2543, lifting platform; 2544, second tidying column; 255, moving direction tidying mechanism; 2551, fourth bidirectional linear servo module; 2552, moving seat; 2553, first tidying column; 256, relay transport line; 26, rotary loading and transplanting machine; 261, first DD motor; 262, transplanting arm; 263, first suction claw; 264, servo lifting mechanism; 265, first rotating disk; 3, photovoltaic panel unloading module; 31, rotating unloading and transplanting machine; 311, supporting stand; 312, second DD motor; 313, second rotating disk; 314, second suction claw; 32, first unloading and transportation line; 33, transplanting and transportation line; 34, first unloading and transplanting machine; 35, second unloading and transportation line; 36, second unloading and transplanting machine; 37, third unloading and transportation line; 38, silicon wafer unloading and transportation line; 39, fourth unloading and transportation line. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] See also Figures 1 to 16The present invention provides a technical solution: a detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers, comprising: a chassis 1, a photovoltaic panel loading module 2 and a photovoltaic panel unloading module 3 are arranged in the chassis 1, the photovoltaic panel loading module 2 and the photovoltaic panel unloading module 3 are connected to a silicon wafer exposure device, the photovoltaic panel silicon wafers are loaded to the silicon wafer exposure device through the photovoltaic panel loading module 2, and the photovoltaic panel unloading module 3 unloads the silicon wafers that have been detected by the silicon wafer exposure device.

[0044] See also Figure 1 and Figure 2 The chassis 1 is provided with a ventilation fan 101, an equipment operation indicator light 102, a silicon wafer discharge port 103, a silicon wafer feed port 104, a height adjustment foot 105, an observation window 106, a system control cabinet 107, an air circuit integration cabinet 108 and a system control computer 109, wherein the silicon wafer discharge port 103 and the silicon wafer feed port 104 are respectively located on both sides of the chassis 1, and are respectively connected to the photovoltaic panel unloading module 3 and the photovoltaic panel loading module 2.

[0045] See also Figure 3 The photovoltaic panel loading module 2 includes a silicon wafer loading and transporting line 21, a silicon wafer loading and turning transporting line 22, a loading and transplanting device 23, a second-stage loading and transporting line 24, a third-stage loading and transporting line 25 and a rotary loading and transplanting machine 26. The silicon wafer loading and transporting line 21, the silicon wafer loading and turning transporting line 22 and the second-stage loading and transporting line 24 are in the same straight line and are connected in sequence. The three-stage loading and transporting line 25 is provided with two, which are symmetrically arranged on both sides of the rotary loading and transplanting machine 26 and are perpendicular to the transport direction of the silicon wafer loading and transporting line 21. There are two devices 23, which are located between the three-stage loading and conveying line 25 and the two-stage loading and conveying line 24. A pair of silicon wafers are loaded to the silicon wafer loading and turning conveying line 22 through the silicon wafer loading and conveying line 21, and automatically rotated 90° on the silicon wafer loading and turning conveying line 22. When transported to the two-stage loading and conveying line 24, the loading and transplanting device 23 takes each pair of silicon wafers and places them on the three-stage loading and conveying line 25 and transports them to the rotary loading and transplanting machine 26. The rotary loading and transplanting machine 26 takes the silicon wafers on the three-stage loading and conveying line 25 and sends them to the exposure equipment.

[0046] For details, please refer to Figure 4 and Figure 5The silicon wafer loading and transporting line 21 comprises a first bidirectional linear servo module 211, a first regularizing plate 212, a support frame 213, a transport belt 214, a first servo motor 215 and a first regularizing wheel set 216. The support frame 213 is fixedly arranged, a first servo motor 215 is arranged on one side of the support frame 213, a transport belt 214 is arranged on the side of the support frame 213, the first servo motor 215 drives and connects the transport belt 214, a first bidirectional linear servo module 211 is fixedly arranged below the support frame 213, and a first bidirectional linear servo module 211 is arranged on the upper side of the first bidirectional linear servo module 216. Two first regularizing plates 212 are provided, and a first regularizing wheel set 216 is installed on the upper end of the first regularizing plates 212. The first regularizing wheel set 216 is located on the side of the conveying belt 214. When the silicon wafer enters the conveying belt 214, the first bidirectional linear servo module 211 first drives the two first regularizing plates 212 close to the conveying belt 214, so that the first regularizing wheel set 216 pushes the silicon wafer to make the silicon wafer neat and prevent it from falling during transportation. The first bidirectional linear servo module 211 retreats, and the first servo motor 215 drives the conveying belt 214 to move, and the silicon wafer is transported to the next workstation.

[0047] See also Figure 4 , Figure 6 and Figure 7 The silicon wafer loading and turning transport line 22 comprises a lifting servo module 221, a rotating servo module 222, a carrier frame 223, a first conveyor belt 224, a second servo motor 225 and a lattice rotating table 226. The carrier frame 223 is fixedly arranged, a first conveyor belt 224 is arranged on the side of the carrier frame 223, the first conveyor belt 224 is connected to the second servo motor 225, and an open groove 227 is arranged at the corresponding position of the first conveyor belt 224 and the carrier frame 223;

[0048] A rotating servo module 222 is disposed below the carrier stand 223. A grid-shaped rotating platform 226 is fixedly mounted on the output shaft of the rotating servo module 222. The grid-shaped rotating platform 226 is inserted into the carrier stand 223 through an open slot 227. The rotating servo module 222 drives the grid-shaped rotating platform 226 to rotate 90°.

[0049] The rotating servo module 222 is connected to the lifting servo module 221, and the lifting servo module 221 drives the rotating servo module 222 to rise and fall. When the rotating servo module 222 rises, it drives the grid rotating table 226 to rise, lifts the silicon wafer on the carrier stand 223, and then drives the grid rotating table 226 to rotate 90° through the rotating servo module 222. The rotating servo module 222 then descends, driving the grid rotating table 226 to descend, and the rotated silicon wafer is placed on the first conveyor belt 224 and transported to the next workstation.

[0050] See also Figure 8 and Fig. 9The loading and transferring device 23 is mainly composed of a linear servo module driving a first negative pressure clamp 231. The first negative pressure clamp 231 is provided with a plurality of suction nozzles for adsorbing the silicon wafer and then transferring it to the next station by the linear servo module.

[0051] See also Figure 8 and Fig.10 The second section loading and transporting line 24 comprises two sets of fixed brackets 241, a second conveying belt 245 is arranged on the bracket 241, a third servo motor 246 is arranged on the side of the bracket 241, the third servo motor 246 drives and connects the second conveying belt 245, a second bidirectional linear servo module 242 is fixedly arranged below the bracket 241, two second regularizing plates 243 are driven and slidably arranged on the second bidirectional linear servo module 242, and a second regularizing wheel set 244 is fixedly installed on the upper end of the second regularizing plate 243. When the silicon wafer is moved, When the silicon wafer is sent to the second conveyor belt 245, the third servo motor 246 stops working first, and the second bidirectional linear servo module 242 drives the two second regularizing plates 243 to approach the second conveyor belt 245, driving the second regularizing wheel group 244 to push and align the silicon wafer to prevent the silicon wafer from escaping from the second conveyor belt 245. Then the second bidirectional linear servo module 242 retreats, and the third servo motor 246 continues to work to transport the silicon wafer to the end, and then the loading and transplanting device 23 transfers it to the three-section loading and transportation lines 25 respectively.

[0052] See also Figures 11 to 13 The three-stage loading and transporting line 25 includes a carrier plate 251, which is fixedly arranged. Two sets of conveyor belts 253 and a set of relay transport lines 256 are fixedly installed on the carrier plate 251. The loading and transplanting device 23 transplants the silicon wafers to the relay transport line 256, and then the two sets of conveyor belts 253 transport them to the rotary loading and transplanting machine 26. A moving direction regularization mechanism 255 is arranged on the carrier plate 251, and a lifting regularization mechanism 254 is arranged between the two sets of conveyor belts 253. Two third double-layered structures are arranged below the carrier plate 251. The two third bidirectional linear servo modules 252 are respectively located under the two groups of conveyor belts 253. The third bidirectional linear servo module 252 drives and connects two side regularization mechanisms. In the process of conveyor belt 253 transmitting silicon wafers, the lifting regularization mechanism 254 and the moving regularization mechanism 255 are used to regularize the silicon wafers in the direction of silicon wafer transfer, and the side regularization mechanism is used to regularize the silicon wafers in the vertical direction of silicon wafer transfer, so as to align the silicon wafers and prevent them from leaving the conveyor line.

[0053] The motion-direction regularization mechanism 255 includes a fourth bidirectional linear servo module 2551, on which two moving seats 2552 are slidingly driven. A first regularization column 2553 is fixedly installed on the upper end of the moving seat 2552. Through the drive of the fourth bidirectional linear servo module 2551, the moving seat 2552 drives the first regularization column 2553 to approach or move away from the silicon wafer.

[0054] The lifting and tidying mechanism 254 includes a fixed frame 2541, a lifting platform 2543 and a second tidying column 2544. The fixed frame 2541 is fixedly arranged on both sides of the fourth bidirectional linear servo module 2551, and an arc-shaped guide groove 2542 is opened on the fixed frame 2541. The lifting platform 2543 is slidably arranged on the fourth bidirectional linear servo module 2551, and the lifting platform 2543 is divided into a fixed block and a lifting block. The fixed block is slidably connected to the lifting block up and down. The fixed block is driven by the fourth bidirectional linear servo module 2551 to move linearly. A convex shaft is provided on the side of the lifting block, and the convex shaft is slidably connected to the arc-shaped guide groove 2542. The second tidying column 2544 is fixedly installed on the upper end of the lifting block. During the linear movement of the lifting platform 2543, the lifting and lowering of the second tidying column 2544 is realized by the cooperation of the convex shaft and the arc-shaped guide groove 2542, so that the silicon wafers are tidy and aligned in the moving direction of the silicon wafers.

[0055] See also Fig.11 and Fig.14 The rotary loading and transplanting machine 26 includes a first DD motor 261, a transplanting arm 262 and a servo lifting mechanism 264. The first DD motor 261 is arranged on the servo lifting mechanism 264. The first DD motor 261 drives and connects to a first rotating disk 265. Two mutually perpendicular transplanting arms 262 are fixedly installed on the first rotating disk 265. A first suction claw 263 is installed at the end of the transplanting arm 262. The first DD motor 261 drives the first rotating disk 265 to rotate back and forth 90°, so that the two transplanting arms 262 drive the first suction claw 263 to travel back and forth between the three-stage loading and transporting line 25 and the exposure equipment. The silicon wafer is adsorbed by the first suction claw 263 and placed on the exposure equipment. The servo lifting mechanism 264 drives the lifting to improve the adaptability.

[0056] See also Fig.15The photovoltaic panel unloading module 3 includes a rotary unloading and transplanting machine 31, a first unloading and transporting line 32, a transplanting and transporting line 33, a first unloading and transplanting machine 34, a second unloading and transporting line 35, a second unloading and transplanting machine 36, a third unloading and transporting line 37, a silicon wafer unloading and transporting line 38 and a fourth unloading and transporting line 39. The rotary unloading and transplanting machine 31 is arranged across the exposure device and the first unloading and transporting line 32, and is used to take away the silicon wafers after the inspection on the exposure device and place them on the first unloading and transporting line 32. The first unloading and transporting line 32 is connected to the transplanting and transporting line 33. The transporting directions of the transplanting and transporting line 33 and the second unloading and transporting line 35 are perpendicular. The first unloading and transplanting machine is arranged between the transplanting and transporting line 33 and the second unloading and transporting line 35. 34, used for transferring the silicon wafers on the transplanting transport line 33 to the second unloading transport line 35, the second unloading transport line 35 is docked with the third unloading transport line 37, the transfer directions of the second unloading transport line 35 and the third unloading transport line 37 are perpendicular, a second unloading transplanter 36 is arranged between the second unloading transport line 35 and the third unloading transport line 37, the second unloading transplanter 36 transfers the silicon wafers on the second unloading transport line 35 to the third unloading transport line 37, the third unloading transport line 37 is docked with the silicon wafer unloading transport line 38, the structure of the silicon wafer unloading transport line 38 is the same as the silicon wafer loading turning transport line 22, the silicon wafer is rotated 90°, the silicon wafer unloading transport line 38 is docked with the fourth unloading transport line 39, and the rotated silicon wafers are unloaded.

[0057] For details, please refer to Fig.16 The rotary unloading and transplanting machine 31 includes a supporting frame 311, on which a second DD motor 312 is mounted. The second DD motor 312 drives and connects to a second rotating disk 313. Two symmetrical second suction claws 314 are mounted on the lower surface of the second rotating disk 313. The second rotating disk 313 is driven by the second DD motor 312 to drive the two second suction claws 314 to rotate 180°, so that the second suction claws 314 alternately travel back and forth between the exposure device and the first unloading transport line 32, and the silicon wafers on the exposure device are transplanted to the first unloading transport line 32 for unloading.

[0058] The transplanting transport line 33 , both ends of the second unloading transport line 35 , and the third unloading transport line 37 are all provided with a regularizing mechanism, which is the same as the regularizing mechanism on the second-stage loading transport line 24 .

[0059] Working principle: Two silicon wafers are loaded at a time and sent to the silicon wafer loading and transporting line 21 through the silicon wafer feeding port 104. The silicon wafer loading and transporting line 21 arranges the silicon wafers and sends them to the silicon wafer loading and transporting diversion line 22. The silicon wafer loading and transporting diversion line 22 rotates the two silicon wafers 90 degrees and sends them to the second-stage loading and transporting line 24. The second-stage loading and transporting line 24 continues to transfer the two silicon wafers. The two silicon wafers are transferred to two three-stage loading and transporting lines 25 respectively through two loading and transferring devices 23. When the silicon wafers arrive at the three-stage loading and transporting line, the two silicon wafers are transported to the second-stage loading and transporting line 24. When the conveying line 25 ends, the rotating loading and transplanting machine 26 alternately transfers the silicon wafers on the two three-stage loading and transporting lines 25 to the exposure equipment. After the exposure is completed, the rotating unloading and transplanting machine 31 takes the silicon wafers away in turn and places them on the first unloading and transporting line 32. The silicon wafers are then sent to the silicon wafer discharge port 103 for unloading through the transplanting and transporting line 33, the first unloading and transplanting machine 34, the second unloading and transporting line 35, the second unloading and transplanting machine 36, the third unloading and transporting line 37, the silicon wafer unloading and transporting line 38 and the fourth unloading and transporting line 39.

[0060] The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0061] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A detection, rotation, suction and transplanting device for photovoltaic panel silicon wafers, comprising: A chassis (1), characterized in that: a photovoltaic panel loading module (2) and a photovoltaic panel unloading module (3) are arranged in the chassis (1), and the photovoltaic panel loading module (2) and the photovoltaic panel unloading module (3) are connected to a silicon wafer exposure device; The photovoltaic panel loading module (2) comprises a silicon wafer loading and transporting line (21), a silicon wafer loading and turning transporting line (22), a loading and transplanting device (23), a second-stage loading and transporting line (24), a third-stage loading and transporting line (25) and a rotary loading and transplanting machine (26); the silicon wafer loading and transporting line (21), the silicon wafer loading and turning transporting line (22) and the second-stage loading and transporting line (24) are located on the same straight line and are connected in sequence; two third-stage loading and transporting lines (25) are provided and are symmetrically arranged on both sides of the rotary loading and transplanting machine (26) and are perpendicular to the transport direction of the silicon wafer loading and transporting line (21); and two loading and transplanting devices (23) are provided and are located between the third-stage loading and transporting line (25) and the second-stage loading and transporting line (24); The three-stage loading and transporting line (25) comprises a carrier plate (251), the carrier plate (251) is fixedly arranged, two groups of conveyor belts (253) and a group of relay transport lines (256) are fixedly installed on the carrier plate (251), a moving direction regularization mechanism (255) is arranged on the carrier plate (251), a lifting regularization mechanism (254) is arranged between the two groups of conveyor belts (253), two third bidirectional linear servo modules (252) are arranged below the carrier plate (251), the two third bidirectional linear servo modules (252) are respectively located below the two groups of conveyor belts (253), and the third bidirectional linear servo modules (252) drive and connect the two side regularization mechanisms; The rotary loading and transplanting machine (26) comprises a first DD motor (261), a transplanting arm (262) and a servo lifting mechanism (264); the first DD motor (261) is arranged on the servo lifting mechanism (264); the first DD motor (261) drives and connects to a first rotating disk (265); two mutually perpendicular transplanting arms (262) are fixedly mounted on the first rotating disk (265); a first suction claw (263) is mounted at the end of the transplanting arm (262); and the first DD motor (261) drives the first rotating disk (265) to rotate back and forth 90 degrees.

2. The detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers according to claim 1 is characterized in that: The case (1) is provided with a ventilation fan (101), an equipment operation indicator light (102), a silicon wafer discharge port (103), a silicon wafer feed port (104), a height adjustment foot (105), an observation window (106), a system control cabinet (107), an air circuit integration cabinet (108) and a system control computer (109), wherein the silicon wafer discharge port (103) and the silicon wafer feed port (104) are respectively located on two sides of the case (1) and are respectively connected to the photovoltaic panel unloading module (3) and the photovoltaic panel loading module (2).

3. The detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers according to claim 1 is characterized in that: The silicon wafer loading and transporting line (21) comprises a first bidirectional linear servo module (211), a first regularizing plate (212), a support frame (213), a transport belt (214), a first servo motor (215) and a first regularizing wheel set (216); the support frame (213) is fixedly arranged; a first servo motor (215) is arranged on one side of the support frame (213); a transport belt (214) is arranged on the side of the support frame (213); the first servo motor (215) is driven and connected to the transport belt (214); a first bidirectional linear servo module (211) is fixedly arranged below the support frame (213); two first regularizing plates (212) are symmetrically arranged on the first bidirectional linear servo module (211); a first regularizing wheel set (216) is installed on the upper end of the first regularizing plate (212); and the first regularizing wheel set (216) is located on the side of the transport belt (214).

4. The detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers according to claim 1, characterized in that: The silicon wafer loading and diverting transport line (22) comprises a lifting servo module (221), a rotating servo module (222), a carrier stand (223), a first conveyor belt (224), a second servo motor (225) and a grid-shaped rotating table (226); the carrier stand (223) is fixedly arranged; a first conveyor belt (224) is arranged on the side of the carrier stand (223); the first conveyor belt (224) is connected to the second servo motor (225); and an open groove (227) is arranged at the corresponding position of the first conveyor belt (224) and the carrier stand (223); A rotating servo module (222) is disposed below the platform stand (223); a grid-shaped rotating platform (226) is fixedly mounted on the output shaft of the rotating servo module (222); the grid-shaped rotating platform (226) is interlaced with the platform stand (223) via an open slot (227); and the rotating servo module (222) drives the grid-shaped rotating platform (226) to rotate 90°; The rotating servo module (222) is connected to the lifting servo module (221), and the lifting servo module (221) drives the rotating servo module (222) to lift and lower.

5. The detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers according to claim 1, characterized in that: The loading and transplanting device (23) is mainly composed of a linear servo module driving a first negative pressure clamp (231), and a plurality of suction nozzles are provided on the first negative pressure clamp (231).

6. The detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers according to claim 1, characterized in that: The two-stage loading and transporting line (24) comprises two groups of fixedly arranged brackets (241), a second conveying belt (245) is arranged on the brackets (241), a third servo motor (246) is arranged on the side of the brackets (241), the third servo motor (246) is driven to connect to the second conveying belt (245), a second bidirectional linear servo module (242) is fixedly arranged below the brackets (241), two second regularizing plates (243) are driven to slide on the second bidirectional linear servo module (242), and a second regularizing wheel set (244) is fixedly installed on the upper end of the second regularizing plate (243).

7. The detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers according to claim 1, characterized in that: The motion-direction regularization mechanism (255) comprises a fourth bidirectional linear servo module (2551), two movable seats (2552) are provided on the fourth bidirectional linear servo module (2551) for sliding drive, and a first regularization column (2553) is fixedly installed on the upper end of the movable seat (2552).

8. The detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers according to claim 1, characterized in that: The lifting and tidying mechanism (254) comprises a fixed frame (2541), a lifting platform (2543) and a second tidying column (2544); the fixed frame (2541) is fixedly arranged on both sides of the fourth bidirectional linear servo module (2551), and an arc-shaped guide groove (2542) is opened on the fixed frame (2541); the lifting platform (2543) is slidably arranged on the fourth bidirectional linear servo module (2551), and the lifting platform (2543) is divided into a fixed block and a lifting block; the fixed block is slidably connected to the lifting block up and down; a convex shaft is provided on the side of the lifting block, and the convex shaft is slidably connected to the arc-shaped guide groove (2542); and the second tidying column (2544) is fixedly installed on the upper end of the lifting block.

9. The detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers according to claim 1, characterized in that: The photovoltaic panel unloading module (3) comprises a rotary unloading and transplanting machine (31), a first unloading and transporting line (32), a transplanting and transporting line (33), a first unloading and transplanting machine (34), a second unloading and transporting line (35), a second unloading and transplanting machine (36), a third unloading and transporting line (37), a silicon wafer unloading and transporting line (38) and a fourth unloading and transporting line (39), wherein the rotary unloading and transplanting machine (31) is arranged across the exposure device and the first unloading and transporting line (32), the first unloading and transporting line (32) is connected to the transplanting and transporting line (33), the transporting directions of the transplanting and transporting line (33) and the second unloading and transporting line (35) are perpendicular, and the transplanting and transporting directions of the first unloading and transporting line (32) are perpendicular to each other. A first material unloading and transplanting machine (34) is arranged between the transport line (33) and the second material unloading and transport line (35); the second material unloading and transport line (35) is connected to the third material unloading and transport line (37); the transfer directions of the second material unloading and transport line (35) and the third material unloading and transport line (37) are perpendicular; a second material unloading and transplanting machine (36) is arranged between the second material unloading and transport line (35) and the third material unloading and transport line (37); the third material unloading and transport line (37) is connected to the silicon wafer unloading and transport line (38); the structure of the silicon wafer unloading and transport line (38) is the same as that of the silicon wafer loading and diverting transport line (22); and the silicon wafer unloading and transport line (38) is connected to the fourth material unloading and transport line (39).

10. The detection, rotating, sucking and transplanting device for photovoltaic panel silicon wafers according to claim 9, characterized in that: The rotary material discharging transplanter (31) comprises a supporting frame (311), a second DD motor (312) is suspended on the supporting frame (311), the second DD motor (312) is driven and connected to a second rotating disk (313), and two symmetrical second suction claws (314) are suspended on the lower surface of the second rotating disk (313).

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