Comparative measurements using particles within one or more compartments

Abstract

Aspects of the present disclosure relate to generating measurements based on positions of particles (14A, 14B, 14C, 14D) within one or more compartments (262A, 262B, 262C, 262D). At least some of the particles may move in response to an external stimulus. A comparison measurement may be provided based on the comparison measurement. Measurements may be associated with two or more types of particles and / or two or more compartments.

Description

[0001] Cross-reference to priority application

[0002] This application claims priority to U.S. Application No. 18 / 299,627, filed on April 12, 2023, entitled “Comparative Measurements Using Particles in One or More Compartments,” and U.S. Provisional Application No. 63 / 363,885, filed on April 29, 2022, entitled “Comparative Measurements Using Particles in One or More Compartments,” which are incorporated herein by reference in their entirety and for all purposes. Technical Field

[0003] The disclosed technology relates to sensing based on the motion and / or position of particles within one or more compartments or enclosures. Background Art

[0004] Magnetic fields, objects and / or other stimuli can be detected in a variety of applications. Systems or devices that sense magnetic fields can be used for a variety of purposes. Some magnetic field sensors are made using semiconductor manufacturing processes, and some can also be built by adding additional layers after wafer fabrication, or by attaching, depositing or bonding additional materials, structures or laminates / layers (incorporating magnetic materials) on (or next to) the semiconductor. Such magnetic field sensors can be packaged with other semiconductor circuits, chiplets, etc. to build a functional package, module or system-in-package (SIP). Summary of the invention

[0005] The innovations described in the claims have several aspects, no single one of which is solely responsible for its desirable attributes. Without limiting the scope of the claims, some of the prominent features of the disclosure will now be described briefly.

[0006] One aspect of the present disclosure is a method comprising generating a first measurement and a second measurement based on the position of particles in one or more compartments. At least some of the particles move in response to an external stimulus. The method comprises providing a comparative measurement based on comparing at least the first measurement with the second measurement. The first and second measurements are associated with two or more types of particles and / or two or more compartments.

[0007] The external stimulus may be a magnetic field and the comparative measurement may indicate the magnetic field. The comparative measurement may indicate that the temperature is within a temperature range. The comparative measurement may indicate a force applied to one or more compartments.

[0008] In some cases, multiple compartments are capable of monitoring a range of values. The differences in compartment structure can increase the granularity of the measurement and / or the sensitivity of the system. One or more thresholds, alarms and / or flags can be set based on monitoring of multiple compartments.

[0009] Depending on the specifications of a particular application, compartments can be positioned to enhance and / or maximize detection capabilities. Compartments can be orthogonal, radial, and / or located in the area to be monitored. Thus, compartments can be intentionally arranged to produce useful results.

[0010] In some cases, a housing can be divided into different compartments. Sensing structures can be incorporated into different areas of a housing to divide a housing into different areas.

[0011] The particles may be magnetically sensitive and present in at least one fluid. The particles may be magnetically sensitive and embedded in at least one film. The particles may be present in at least one magnetically sensitive fluid.

[0012] The first and second measurements may be associated with two or more types of particles. The two or more types of particles have different magnetic susceptibilities. The two or more types of particles have different sizes and / or shapes.

[0013] The method may include resetting the position of the particle before generating the first measurement.

[0014] The second measurement can be generated based on optical detection of at least some of the particles after exposure to the external stimulus.

[0015] The first and second measurements may be associated with two or more compartments. The two or more compartments may include different fluid channels. The two or more compartments may include different sealed enclosures. The particles may include different types of particles in different corresponding compartments of the two or more compartments. The different types of particles have different magnetic susceptibilities. The different types of particles may have different sizes and / or shapes. The two or more compartments may include different dielectric materials in different corresponding compartments of the two or more compartments. The different dielectric materials may change viscosity in response to changes in temperature. The particles may be in different fluids in each of the two or more compartments.

[0016] One or more compartments may include an integrated sensing structure. One or more compartments may include an integrated magnetic structure configured to provide a bias voltage. One or more compartments may include an integrated conductive structure.

[0017] Another aspect of the present disclosure is a method comprising generating a first measurement and a second measurement based on the location of magnetically susceptible particles within one or more compartments, and providing a comparative measurement based on comparing at least the first measurement to the second measurement. The first and second measurements are associated with two or more types of particles and / or two or more compartments.

[0018] Another aspect of the invention is a system comprising a first compartment containing one or more first particles, a second compartment containing one or more second particles, and a measurement circuit configured to generate a measurement based on comparing a first measurement associated with the position of the one or more first particles and a second measurement associated with the position of the one or more second particles. The one or more first particles are configured to move in response to an external stimulus.

[0019] The external stimulus may be a magnetic field and the measurement may indicate that the magnetic field is within a temperature range.

[0020] One or more first particles can be in a first fluid, and one or more second particles can be in a second fluid. The first fluid can be a different type of fluid than the second fluid. At a particular temperature, the mobility of the one or more first particles in the first fluid may be different from that of the one or more second particles in the second fluid.

[0021] The one or more first particles and the one or more second particles may have different magnetic susceptibilities.The one or more first particles and the one or more second particles may have different sizes and / or shapes.

[0022] Another aspect of the present disclosure is a system comprising a compartment containing at least two types of particles and a measurement circuit configured to generate a measurement based on comparing a first measurement and a second measurement. The first measurement is associated with the position of the at least two types of particles. The second measurement is associated with the position of at least some of the at least two types of particles that move in response to an external stimulus relative to the position associated with the first measurement.

[0023] To summarize the present disclosure, certain aspects, advantages, and novel features of the innovations are described herein. It should be understood that not all of these advantages may be achieved according to any particular embodiment. Thus, the innovations may be embodied or implemented in a manner that achieves or optimizes one or a group of advantages taught herein without necessarily achieving other advantages taught or suggested herein. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Embodiments of the present disclosure will be described by way of non-limiting examples with reference to the accompanying drawings.

[0025] Figure 1A , 1B and 1C are schematic side or cross-sectional views of a container or housing including magnetically susceptible particles in a fluid according to one embodiment.

[0026] Figure 2A and 2B is a schematic side view or cross-sectional view of a container or housing including non-magnetically sensitive particles in a ferrofluid according to one embodiment.

[0027] Figure 3A and 3B is a schematic side view or cross-sectional view of a container or housing including a film with magnetically susceptible particles in two different states according to one embodiment.

[0028] Figure 3C , 3D , 3E and 3F schematically illustrate plan view examples of a thin film of magnetically susceptible particles embedded within a container or housing according to an embodiment.

[0029] Figure 4A , 4B 4C, 4D, and 4E are schematic side or cross-sectional views of example containers or housings having various cross-sectional shapes according to embodiments.

[0030] Figure 4F , 4G 4H show schematic plan views of a container or housing having a contraction region according to an embodiment.

[0031] Figure 5A is a schematic cross-sectional view of an example housing having multiple integrated structures according to an embodiment.

[0032] Figure 5B is a schematic isometric view of an example container with an integrated heating element according to an embodiment.

[0033] Figure 5C is a schematic isometric view of an example container with an integrated piezoelectric element according to an embodiment.

[0034] Figure 5D is a schematic side view or cross-sectional view of an example container or housing enclosing a film having embedded particles, the container having a flexible surface according to one embodiment.

[0035] Figure 5E and 5F are schematic cross-sectional views and corresponding plan views of an example housing including a patterned structure according to an embodiment.

[0036] Figure 5G and 5H is a schematic plan view of an example housing with magnetically susceptible particles in a phase change material according to an embodiment.

[0037] Fig. 6A Example shapes of magnetically susceptible particles are shown. Figure 6B An example composite structure containing magnetically susceptible particles in a nonmagnetic material is shown. Figure 6C An example of a particle cluster is shown.

[0038] Figure 7 is a schematic block diagram of a magnetic field sensing system according to an embodiment.

[0039] Fig. 8A , 8B , 8C, 8D, and 8E are schematic cross-sections of systems in a package having a container including particles that move in response to an applied magnetic field according to an embodiment.

[0040] Fig. 9 is a schematic cross-section of a system in a package having a container including particles that move in response to an applied magnetic field, wherein the container is enclosed in a laminate, according to one embodiment.

[0041] Fig. 10A and 10B Schematically illustrates an example integrated system having a housing containing magnetically susceptible particles according to an embodiment

[0042] Fig.11 An exploded schematic diagram of an example magnetic field measurement system with wireless communication in accordance with an embodiment is shown.

[0043] Fig.12 is a schematic isometric view of a photonic module including a housing having particles that move in response to an applied magnetic field, according to an embodiment.

[0044] Fig.13 is a schematic isometric view of an electronic module with electronic components and a housing with particles that move in response to an applied magnetic field according to an embodiment.

[0045] Fig.14A , 14B 14C are schematic side or cross-sectional views of example systems for detecting magnetic fields based on housing conductance, according to an embodiment.

[0046] Fig.15A , 15B 15C is a schematic side view or cross-sectional view of a system for detecting magnetic field strength via housing conductance measurement according to an embodiment.

[0047] Fig.16A , 16B , 16C, 16D, 16E and 16F are schematic side views or cross-sectional views of housings with magnetically sensitive particles for zero-power magnetic field detection according to embodiments.

[0048] Fig.17A and 17B is a schematic side view or cross-sectional view of a system configured for cumulative magnetic field exposure detection according to an embodiment.

[0049] Fig.18 , 1920 show an example MEMS structure interacting with magnetically susceptible particles within a container according to an embodiment.

[0050] Fig.21A and 21B is a schematic side view or cross-sectional view of a container with magnetically sensitive particles in a phase change material, wherein the container has an integrated magnetic sensor according to an embodiment.

[0051] Fig.22A is a schematic cross-section of a container with optically detected magnetically susceptible particles according to an embodiment.

[0052] Fig. 22B is a schematic cross-section of a container with optically detected magnetically susceptible particles according to another embodiment.

[0053] Fig.23A and 23B is a schematic cross-sectional view or side view of an optical measurement system according to an embodiment. Fig.23C yes Fig.23A and 23B Schematic diagram of a part of the optical system.

[0054] Fig.24 Schematic side and plan views of a system with one-dimensional capacitive sensing of particles within a container are shown according to an embodiment.

[0055] Fig.25 Schematic side and plan views of a system with two-dimensional capacitive sensing of particles within a container according to another embodiment are shown.

[0056] Fig.26 A plan view of a system having multiple compartments or housings including particles is shown according to one embodiment.

[0057] Fig.27A is an isometric view of a system having multiple compartments or housings, each compartment or housing including particles, according to one embodiment. Fig.27B yes Fig.27A A floor plan of the system, showing the areas of the compartments.

[0058] Figures 28A to 28E Examples of compartments or housings and integrated structures according to embodiments are shown.

[0059] Fig.29 Shown is a series of compartments or housings, each comprising a particle, according to one embodiment.

[0060] Fig.30 Multiple containers or housings are shown, wherein particles are each in a different dielectric material, according to one embodiment.

[0061] Fig.31 A system according to one embodiment is shown that includes multiple compartments or housings, each compartment or housing having particles of different sizes.

[0062] Figures 32A to 32E An example fluid channel or housing with magnetically susceptible particles is shown according to an embodiment.

[0063] Fig.33A and 33B Fluid channels with different types of particles are shown according to an embodiment. DETAILED DESCRIPTION

[0064] The following detailed description of certain embodiments presents various descriptions of specific embodiments. However, the innovations described herein may be embodied in a variety of different ways, for example, as defined and covered by the claims. In this specification, reference is made to the accompanying drawings in which the same reference numerals may represent identical or functionally similar elements. It should be understood that the elements shown in the accompanying drawings are not necessarily drawn to scale. In addition, it should be understood that certain embodiments may include more elements and / or a subset of the elements shown than shown in the figures. In addition, some embodiments may combine any suitable combination of features from two or more of the accompanying drawings. The headings provided herein are for convenience only and do not necessarily affect the scope or meaning of the claims.

[0065] Aspects of the present disclosure relate to detecting a magnetic field based on the position and / or movement of at least one particle within a container or housing. The particle may be contained in a container or housing that can retain the particle or restrict the movement of the particle within a desired area or path. The particle moves within the container in response to an applied magnetic field. The container may be a sealed housing. The particle may be a magnetically sensitive particle in a fluid, a magnetically sensitive particle embedded in a film, or a particle in a ferromagnetic fluid or gel (e.g., a non-magnetically sensitive particle). Whether the particles themselves react directly to the magnetic field, or whether they move because the fluid or film containing them reacts directly to the magnetic field, the particles are able to move within the container or housing under an applied magnetic field and / or another stimulus. The response of the material within the container or housing to the magnetic stimulus may produce a response having a discernible feature that may be measured to indicate one or more of the strength, direction, intensity, position, shape, or other properties of the magnetic body or magnetic field, depending on the specifications of a particular application. For example, a measurement circuit may measure an applied magnetic field based on the position of the particle. The measurement circuit may measure an applied magnetic field based on the movement of the particle. At least a portion of the measurement circuit may be included in an integrated circuit integrated with the container. The container and the measurement circuit can be included in a system in a package, the package including a packaging structure surrounding the measurement circuit. The packaging structure may include an opening, wherein at least a portion of the container is exposed by the opening. The system can be configured so that the housing is close enough to the surface of the package (or module) so that the housing is still physically protected and the sensitive material in the housing can detect the magnetic field near the surface of the package. The magnetic field detection described herein has a variety of applications, such as body detection with magnetic fields, biosensing, position sensing, proximity sensing, force / impact sensing, and current sensing.

[0066] In some embodiments, particles in a sealed enclosure can move in response to an applied magnetic field. The applied magnetic field can be any magnetic field applied to the enclosure. In some applications, the applied magnetic field is an external magnetic field applied to a magnetic field measurement system. The measurement circuit can detect the applied magnetic field based on the position or movement of the particles or fluid or gel. Some or all of the circuits of the measurement circuit can be included in an integrated circuit integrated with the enclosure. In some applications, a sensor can sense the particles and provide an output signal to the measurement circuit. Depending on the specifications of the particular application, a variety of different measurement techniques can be used to detect particles, such as capacitive sensing, detecting electrical shorts, magnetic sensing, optical sensing, micro-electromechanical system-based sensing, etc. In some cases, relaxation processes after the magnetic field is turned off can be sensed. In some applications, frequency-dependent responses can be sensed in an AC electric field.

[0067] The particles can have properties that facilitate movement and / or interaction (e.g., aggregation behavior, interlocking mechanisms, attraction or repulsion of materials [e.g., paramagnetic or diamagnetic materials]), or respond to an applied magnetic field within the enclosure itself. Examples of such properties can include one or more of shape, material, size, density, weight, surface area, surface patterning, etc. The particles can be suspended or embedded in a fluid, gel, or material that is combined to respond to a magnetic field in a desired manner according to the specifications of a particular application.

[0068] In certain applications, the housing may include a conductive material. In certain applications, the housing may include a non-conductive material. One or more magnetic structures may be integrated with the housing to modify and / or generate a magnetic field applied to the particles. The system may be configured so that the housing interacts with an external magnetic stimulus. The housing may include a conductive pattern and have regions designed to detect the presence and / or aggregation of magnetic or non-magnetic particles within the housing or within specific regions or locations of the housing. The container may include one or more conductive through-holes from the inner surface to the outer surface. Alternatively or additionally, the container may include one or more optical conduits and / or regions within the container that facilitate optical detection of particle clusters or particle motion within certain regions or locations within the housing.

[0069] The embodiments disclosed herein can achieve advantages over other magnetic field detection methods. For example, there may be advantages in manufacturing. In non-semiconductor processes, the container with the particles can be manufactured separately from the electronic equipment (such as the measurement circuit). As another example, parts of the system disclosed herein can be configured for magnetic field detection in environments that are not generally suitable for semiconductor components. Enclosing the particles in a container of certain materials (such as glass or metal or a laminated / composite structure or ceramic) can expose at least a portion of the system to an environment that is more severe than the standard packaged semiconductor circuits commonly used (for example, an environment with a temperature >100°C-150°C and / or containing harsh chemicals such as acids).

[0070] An advantage of the embodiments disclosed herein is that an omnidirectional magnetic field detector can be effectively implemented according to the principles and advantages disclosed herein. In contrast, most magnetic field detectors measure the magnetic field in a given direction, so in order to detect fields in multiple directions, the sensing structure is replicated at a higher cost, space occupation and complexity.

[0071] Another advantage of the embodiments disclosed herein is that the sensitivity and / or range of magnetic field detection can be modified by changing one or more characteristics of the particle (e.g., the nature, size, shape, structure, or number of the particle), one or more characteristics of the fluid in which the particle is immersed, or one or more characteristics of the housing (e.g., by adding one or more shields or thinning the housing, or adding specific shapes or indentations or materials or features, such as sensors or patterned or conductive materials or optical windows). In addition, it is relatively easy to adjust the sensitivity curve. This can allow magnetic field detection that can be particularly sensitive to a range of field strengths, allowing sensitivity to lower intensity fields and avoiding saturation in more intense fields, depending on the specific requirements of the application.

[0072] The structures disclosed herein can also facilitate detection without power. Particles can gather within a container in response to a magnetic field. Without power being supplied to the detector, the particles can move and position in response to an external field. Power can then be applied for interrogation, such as detecting and measuring the position or position change of a particle or particle cluster. The physical construction or shape of the container can facilitate the detection or measurement of the particle position. The detected position can reflect cumulative and / or time-dependent magnetic field exposure. Such a detector can be a passive system, attached to an element as a tag to track magnetic field exposure over time. The measurement circuit can read the maximum field strength or other magnetic field measurement to which the device is exposed. Resetting the magnetic field detector is relatively easy.

[0073] Certain geometries can be created based on the principles and advantages disclosed herein to create systems that are sensitive to certain patterns in magnetic fields. These can be built to the specifications of a particular application. For example, if there is a rotating field, it can be detected whether the rotation changes its characteristics. As another example, a security lock can be implemented where applying a certain pattern of dynamic magnetic fields can open the lock.

[0074] Optical detectors and / or emitters may be used instead of magnetic field sensors to sense the motion, shape, and / or position of particles. In certain applications, optical detection may result in faster response times.

[0075] A reed switch type detector can be implemented. A reed switch detector can create a contact when a magnetic field is applied, which opens when the magnetic field drops to a certain limit. After the field is applied, a connection that remains closed (or remains open) can be generated. This can involve two electrodes in a container and particles that close the contacts.

[0076] Aspects of the present disclosure relate to generating comparative measurements based on multiple measurements associated with particles in one or more compartments or shells. Particles can move in response to external stimuli, such as an applied magnetic field or an applied force. In some applications, these particles may be magnetically sensitive. Multiple measurements can be associated with different types of particles and / or different compartments or shells. In some cases, different compartments include different types of particles, such as particles with different sizes, masses, densities, shapes, sensitivities to external stimuli, etc., or any suitable combination thereof. As an alternative or in addition, particles in different compartments can be in different fluids or gels. In different fluids, particles can have different mobilities (e.g., different viscosities, elasticities, etc.). Combining the measurement responses from different shells can achieve an ideal system measurement sensitivity to external target stimuli. In some applications, multiple measurements can be associated with multiple types of particles in a single compartment or shell. One or more compartments can include a sealed shell, a fluid channel, different fluids or gels, different particle sizes or shapes, etc.

[0077] The sensitivity of the measurement can be increased by multiple measurements associated with different particles and / or compartments or housings. For example, for different types of particles in different compartments, each compartment can detect whether a parameter (such as a magnetic field, temperature, or force) is above or below a respective threshold. For multiple compartments, the parameter can be determined within a range between thresholds associated with the different compartments. Such a range is more accurate than detecting whether a parameter is below or above a threshold. As another example, different types of particles with different sensitivities to an external stimulus can more finely detect the external stimulus based on the motion of the different types of particles.

[0078] By including multiple compartments of particles, the presence and / or movement of an external stimulus (e.g., a magnetic field) can be localized. For example, sensing particle movement in a particular compartment (or region within a compartment) but not in other compartments can indicate the location (or relative location, direction, intensity, etc.) of the external stimulus.

[0079] The comparative measurement embodiments can be implemented according to any suitable measurement technique disclosed herein.Therefore, the comparative measurement embodiments can achieve the advantages of measurements related to the motion and / or position of particles in a container while improving accuracy, sensitivity and / or positioning.

[0080] Combining multiple compartments or housings can increase the sensitivity of the system. Multiple housings can enable comparative measurements, making the system more robust to environmental conditions that may affect accuracy when there is only one housing without comparative measurements. Depending on the application specifications, embodiments may include one or more different materials and / or fluid or gel properties within the housing (enabling particles / sensitive materials embedded therein to move in different ways), particles of different sizes, particles of different shapes, or particles with different sensitive layers or materials constructed of different thicknesses or patterns. Multiple housings with a combination of features described herein (as needed) can achieve at least one of the following: affect the sensitivity of the system, the response time of the system, help define the threshold of the system response, or target detection of larger objects moving in a specific path or direction or approaching the system sensing elements.

[0081] Magnetically sensitive particles in fluids

[0082] Embodiments disclosed herein relate to a container having magnetically sensitive particles in a fluid. The magnetically sensitive particles may be retained within the container. The container may be a sealed enclosure. The magnetically sensitive particles and possibly the fluid may also be selected so that the magnetically sensitive particles may move within the container in a detectable manner in response to exposure to an applied magnetic field. The fluid may be a liquid or a gel having a viscosity suitable for facilitating the movement of the magnetically sensitive particles within the container so that the movement of the particles may be detected. The fluid may have a suitable density and viscosity based on the desired measurement range for a particular application. The fluid may have a relatively small expansion constant so that there are no significant technical challenges in enforcing the enclosure during temperature drift. Example fluids include, but are not limited to, aqueous solutions (e.g., buffers, aqueous electrolytes, aqueous solutions containing conductive salts, solutions without conductive salts, pH buffers, salts in water, etc.), organic solutions (e.g., oils or organic solvents), aqueous or organic gels (e.g., hydrogels, PVC, polyacrylic acid, polyvinyl alcohol gels, polydimethylsiloxane gels, agarose PBS, PVC gels in organic solvents such as 2-nitrophenyl octyl ether), waxes, conductive polymers (e.g., PEDOT, Nafion dispersions, etc.), water, alcohols, oils, or fluids that allow Brownian motion of magnetically sensitive particles in the fluid. The position of the magnetically sensitive particles can be detected by optics, capacitive sensing, by determining electrical shorts, magnetic sensing, etc.

[0083] Figure 1A , 1B1C shows a container 12 according to an embodiment, which includes magnetically sensitive particles 14 in a fluid 16. The container 12 can be a sealed housing. The magnetically sensitive particles 14 can include any suitable combination of the features of the magnetically sensitive particles disclosed herein. The magnetically sensitive particles 14 can include one or more of the following materials: iron, cobalt, nickel, graphite, chromium or any suitable alloy thereof. The magnetically sensitive particles 14 can include one or more of the following materials: Heusler alloy or chromium oxide. In certain applications, the magnetically sensitive particles 14 can include polystyrene (PS) magnetic particles. Polystyrene magnetic particles can be synthesized by embedding superparamagnetic iron oxide into polystyrene. The polystyrene magnetic particles can be positively charged (e.g., by amine modification), unmodified, or negatively charged (e.g., by carboxyl modification). In certain applications, the magnetically sensitive particles can include magnetic particles coated with streptavidin. Figure 1A The position of the magneto-sensitive particles 14 is shown when no external magnetic field is applied.

[0084] Magnetic field source 18 can apply a magnetic field to move magnetically sensitive particles 14 within fluid 16. In some cases, magnetic field source 18 can be a magnetic body. Magnetic field source 18 can include alternating magnetic poles. This can enhance the attraction of magnetically sensitive particles 14 in certain applications. The applied magnetic field can be a gradient magnetic field to move magnetically sensitive particles 14. A uniform magnetic field can cause magnetically sensitive particles 14 to attract each other and aggregate. In some cases, the aggregation of magnetically sensitive particles 14 can be detected.

[0085] Figure 1B It is shown that the magnetic field can move the magnetically susceptible particles 14 to one side of the container 12 . Figure 1C It can be seen that different magnetic fields can make the magnetically sensitive particles 14 move in different directions. Figure 1A , 1B In 1C, the magnetically sensitive particles 14 are attracted by the applied magnetic field. The magnetically sensitive particles 14 can be paramagnetic, for example. Paramagnetic materials include metals that have a weak attraction to magnets. Examples of paramagnetic materials include lithium, aluminum, tungsten, platinum, and manganese salts. The magnetically sensitive particles 14 can be ferromagnetic. Such magnetically sensitive particles 14 can include one or more suitable ferromagnetic materials, such as iron, nickel, or cobalt. In some other applications, the magnetically sensitive particles 14 can be diamagnetic and can be repelled by the applied magnetic field. Examples of diamagnetic materials include graphite, gold, bismuth, antimony, quartz, and silver. According to Figure 1B or Figure 1C The measurement circuit can generate an indication of the applied magnetic field based on the position of the magnetically susceptible particles 14 in the container 12. This can measure the magnetic field based on the position of the magnetically susceptible particles 14 in the container 12.

[0086] Particles in dielectric materials

[0087] Particles can be embedded in a dielectric material within a container, wherein the mobility of the particles in the dielectric material varies with temperature. The property of the dielectric material changes with temperature, and this property affects the mobility of the particles in the dielectric material. The property can be the phase of the dielectric material or the viscosity of the dielectric material. The dielectric material can be a phase change material that can change phase (e.g., solid, gel, liquid, vapor) in response to changes in temperature. In some cases, changes in particle mobility can be related to phase changes in the dielectric material caused by temperature changes. In some cases, changes in particle mobility can be related to changes in viscosity of the dielectric material caused by temperature changes. Changes in the viscosity of the dielectric material can occur without a complete phase change in the dielectric material. Changes in viscosity can occur in dielectric materials that are gels or liquids.

[0088] The change in state of the dielectric material can affect the mobility of the particles in the container. The change in the mobility of the particles in the dielectric material can also affect the sensitivity of another measurement of the system. For example, a change in the state of the dielectric material can increase the mobility of the particles, so that the particles move more under the same stimulus (such as an external magnetic field), thereby improving the sensitivity of magnetic field detection. The mobility of magnetically sensitive particles may depend on the viscosity of the dielectric material and the strength of the external magnetic field.

[0089] The system can implement a sensor element that activates when the temperature exceeds a threshold (e.g., above a threshold temperature or below a threshold temperature). Detecting the movement of the particles can indicate that a minimum or maximum temperature has been reached. As the dielectric material goes through phases (e.g., melting, simmering, boiling, etc.), the particles can become more agitated or move from their initial position (before the temperature change affects the phase change material). This can be detected and indicates that a specific temperature range has been reached. For example, if the container is in a liquid or solution, the system can be used to track temperature exposure. Monitoring the particles can infer the phase of the liquid or solution. This monitoring can be done continuously or intermittently.

[0090] In some applications, the system can implement a sensor element that detects temperature based on particle motion associated with changes in the viscosity of the dielectric material. This can be achieved by an electrical signal associated with the position or cluster of particles or optical detection of the position or cluster of particles or another method described elsewhere in this article, depending on the specifications of the specific application. This temperature detection can involve regular or continuous evaluation of the speed of particle motion. Stimuli to move particles can be applied continuously (e.g., as an AC voltage or an AC applied magnetic field). Alternatively or additionally, the position of the particles can be reset periodically, and stimulation can be applied to move the particles. The measurement circuit can access calibration information (such as a lookup table or formula relationship) between particle motion (such as speed) and temperature. Such calibration information for a given device configuration (media composition, particle composition and shape, etc.) can be easily obtained by those skilled in the art through routine experiments.

[0091] Will refer to Fig.21A and 21B Discuss examples of magnetically sensitive particles in phase change materials.

[0092] Non-magnetic sensitive particles in magnetic sensitive fluid

[0093] In some embodiments, the container may include non-magnetically sensitive particles in a magnetically sensitive fluid. The magnetically sensitive fluid may be a ferrofluid, a paramagnetic fluid, a diamagnetic fluid, or a magnetorheological fluid. The magnetorheological fluid may change density based on the characteristics of an external magnetic field, and the particles may then change their depth in the fluid. The magnetorheological fluid may be a magnetorheological fluid that significantly changes mechanical viscosity when exposed to a magnetic field. Such a fluid may reduce and / or prevent particle motion when magnetized, and allow particle motion in the absence of a magnetic field.

[0094] Examples of magnetically sensitive fluids include ferrofluids made from particles of magnetic material (such as magnetite, hematite, or cobalt ferrite) dispersed in a fluid (such as water or an organic solvent). The properties of the ferrofluid and the density of the particles can be selected according to the specifications of a particular application.

[0095] The magnetically sensitive fluid can be a liquid. A variety of different types of non-magnetic particles can be included in the magnetically sensitive fluid. The positions of different types of non-magnetic particles can be used to measure the applied magnetic field. Through magnetic density separation, an indication of the applied magnetic field can be determined based on the position of the non-magnetic sensitive particles. Although the particles do not need to respond directly to the external magnetic field, it is advantageous that the particles can be selected so that they can help sense their positions when they are moved by the fluid in response to the external magnetic field. Example materials include non-magnetic conductors (e.g., aluminum, charged particles, such as particles with carboxylates or amino groups on the surface, making them conductive but not magnetic, etc.), plastics, foams, polyethylene terephthalate (PET), and silica particles. In some applications, the non-magnetic particles can be non-magnetic polystyrene particles. Non-magnetic polystyrene particles can be positively charged (e.g., by amine modification), unmodified, or negatively charged (e.g., by carboxyl modification). In some applications, non-magnetic particles can include non-magnetic particles coated with streptavidin. Non-magnetic particles can be selected based on how they are detected in the system. For example, by optical detection, opaque non-magnetic particles can be used. Non-magnetic particles have mechanical elasticity. Any suitable principles and advantages of the embodiments described with reference to magnetically sensitive particles may be applied to non-magnetically sensitive particles in a magnetic fluid.

[0096] Figure 2A and 2BA container 12 according to an embodiment is shown, which includes non-magnetic sensitive particles 24A, 24B and 24C in a ferromagnetic fluid 26. The container 12 can be a sealed shell. The non-magnetic sensitive particles 24A, 24B and 24C include a plurality of different types of particles, which have different properties, such as shape, density or weight. As shown, there are three different types of non-magnetic sensitive particles 24A, 24B and 24C in the ferromagnetic fluid 26. Different types of non-magnetic sensitive particles 24A, 24B and 24C can have the same or similar size and different densities. The non-magnetic sensitive particles 24A, 24B and 24C can be conductive in some applications.

[0097] Figure 2A The initial positions of the non-magnetically sensitive particles 24A, 24B, and 24C are shown. The magnetic field source 28 can apply a magnetic field to move the non-magnetically sensitive particles 24A, 24B, and 24C in the ferromagnetic fluid 26. The gradient in the magnetic field can cause the density of the ferromagnetic fluid 26 to change, which in turn can cause the non-magnetically sensitive particles 24A, 24B, and / or 24C to move in the ferromagnetic fluid 26. The magnetic field applied by the magnetic field source 28 can cause the non-magnetically sensitive particles 24A, 24B, and 24C to move to the ferromagnetic fluid 26. Figure 2B The measurement circuit can detect the position of at least some of the non-magnetically sensitive particles 24A, 24B and / or 24C to generate an indication of the applied magnetic field. This can measure the magnetic field based on the position of at least some of the non-magnetically sensitive particles 24A, 24B and 24C within the container 12.

[0098] exist Figure 2A and 2B In the embodiment, the magnetic field does not directly attract the non-magnetically sensitive particles. The magnetic field changes the density of the ferromagnetic fluid 26 according to the field strength and changes, so the non-magnetically sensitive particles 24A, 24B and 24C will move to different levels in the magnetosensitive fluid 26.

[0099] In one embodiment, the magnetosensitive particles may also or alternatively be contained in a magnetosensitive fluid. For example, diamagnetic particles may be contained in a ferromagnetic fluid. Strong diamagnetic materials such as graphite tend to generate repulsive forces in a magnetic field.

[0100] Material layer with magnetically sensitive particles

[0101] In some embodiments, the magnetically sensitive particles may be embedded and / or deposited on a material layer. The material layer may be within a container. The container may be a sealed housing. The material layer may be a film, a sheet, a flexible layer, etc. For example, the material layer may be a film in which a magnetically sensitive material is embedded, or a magnetic film or layer incorporated into a flexible laminate structure. As another example, the material layer may be a sheet, a polymer or a composite material, or a prefabricated flexible layer on which a magnetic material is deposited, embedded or adhered. The magnetically sensitive particles may be implemented according to any suitable principles and advantages disclosed herein.

[0102] The material layer can be suspended within a container with or without a surrounding fluid. In one example, the layer is suspended in air or an inert gas. In another example, the layer is suspended in a liquid whose viscosity is selected to adjust the sensitivity of the film to an external magnetic field (the degree of movement in response), similar to the magnetically sensitive particle embodiment described above. The material layer can be tied to the container. The material layer can be tied inside the container and arranged so that the material layer can deflect in response to a magnetic field. In some applications, the material layer can return to an initial position when no magnetic field is applied, for example due to the elasticity of the layer material.

[0103] The material layer can be a flexible substrate. Suitable materials for the layer include polymer materials such as SU-8, polyimide, polyvinyl alcohol, polyacrylic acid, polyvinyl alcohol, polydimethylsiloxane, poly (3,4-ethylenedioxythiophene), Nafion, polyaniline, etc. Some such polymer materials are conductive. In some cases, the layer can include plastics such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyimide or transparent plastic. According to some applications, the layer can include a ferroelectric film. The layer can include thin glass. The layer can include metal foil. Metal traces and / or attached / embedded particles can be formed on the layer. The layer can optionally or additionally include a metallic non-magnetic material such as Au, Cu or Al. The layer can include a magnetic material such as NiFe, Ni, NiFeCo, CoZrTa, CoFe, etc. In some cases, the layer can include gold. In some cases, the layer can be a grid rather than a continuous layer. The layer can be made of nanomaterials and configured to bend, flex, or move in a desired manner so that an external magnetic stimulus can interact with the bound magnetic particles. Any suitable principles and advantages of the embodiments described with reference to magnetically susceptible particles can be applied to the material layer with magnetically susceptible particles, depending on the specifications of a particular application.

[0104] Figure 3A and 3B 1 shows a side view of a container 12 according to one embodiment, the container including a film 36 having magnetically sensitive particles 34 in two different states. The film 36 includes magnetically sensitive particles 34 embedded therein. The magnetically sensitive particles 34 can be diamagnetic, paramagnetic, ferromagnetic, or ferrimagnetic. For example, in one embodiment, the magnetically sensitive particles 34 are diamagnetic. As another example, the magnetically sensitive particles 34 are paramagnetic, such as Figure 3BAs shown. As another example, the magnetically sensitive particles 34 may include ferromagnetic materials, such as iron, nickel, or cobalt. As another example, the magnetically sensitive particles 34 may include ferromagnetic materials, such as magnetite (Fe3O4). The film 36 may deflect and / or shift relative to the central axis in response to an applied magnetic field. The movement of the film 36 may produce a discernible electrical output, such as capacitance. For example, as the film 36 moves, the capacitor formed by the film 36 and the top and bottom of the container 12 may change. In this example, the two capacitors are related to compensate for several effects (such as temperature). In some cases, the film 36 may include an electroactive polymer. In other examples, the particles may be non-magnetically sensitive and are selected for position detectability, and the film material may be magnetically sensitive. For example, such a magnetically sensitive material may include Ni, NiFe, CoFe, CoZrTa, Co, etc. In some applications, a magnetically sensitive layer without embedded non-magnetically sensitive particles may be implemented.

[0105] exist Figure 3A In the embodiment, no magnetic field is applied and the film 36 is in the initial position. A magnetic field source 38 having a magnetic field applies a magnetic field to move the film 36 to Figure 3B As shown in the location. Figure 3B As shown, in some applications, the membrane 36 can be deflected toward the magnetic field source 38. The measurement circuit or sensing structure contained in the housing can detect the movement or proximity and / or position of the membrane 36 to generate an indication of the applied magnetic field. This can measure the magnetic field based on the position of the magnetically sensitive particles 34 within the container 12.

[0106] Figure 3C , 3D , 3E and 3F show in plan view an example of a film 36 with magnetically sensitive particles 34 embedded in a container 12 according to an embodiment. The film 36 can have any suitable shape for a particular application and can combine different materials or structures (e.g., meshes, nanomaterials, composite layers, etc.) to promote the desired movement according to the specifications of the particular application. The magnetically sensitive particles 34 have any suitable pattern and / or arrangement within the film 36. One or more of the shape, size, position, pattern and structure of the particles can be optimized according to the specifications of the particular application. In the example shown, the relatively elastic tether facilitates the deformation of the film 36 and the change in the position of the particles 34 with an external or applied magnetic field. One or more of the shape, size and configuration of the container tether can be modified / optimized according to the specifications of the particular application.

[0107] container

[0108] In some embodiments, the container is a sealed enclosure made of glass. This can enable the enclosure to be sealed, similar to the technology used to assemble sealed semiconductor packages. According to some embodiments, the container can be flexible and include laminates, composite materials, ceramics, glass, or metal. The container can include several different layers.

[0109] In some applications, a sealed enclosure can be manufactured in a non-semiconductor / wafer manufacturing environment. Part or all of this enclosure may be exposed to a harsh environment. Examples of harsh environments include, but are not limited to, acidic environments, corrosive environments, and high temperature environments. The manufacture of the enclosure and the inclusion of particles for detecting a magnetic field within the enclosure can be performed in a manufacturing location and / or process separate from the manufacturing location of the integrated circuit integrated with the enclosure. In the later stages of manufacture, such as the packaging stage, the enclosure can be integrated with the integrated circuit and / or other components or processing circuits. For example, the enclosure can be combined in a module or stacked with an integrated circuit including semiconductors and / or supporting circuits and systems.

[0110] The particle container may have any suitable shape and size, depending on the specifications of a particular application.The housing containing the particles for magnetic field detection may be shaped to enhance and / or optimize the sensing of magnetic fields and / or magnetic bodies. Figure 4A , 4B 4C, 4D and 4E show example containers 42A, 42B, 42C, 42D and 42E, respectively, having various cross-sectional shapes. Different fluid housing shapes can adjust the proximity and / or direction of the magnetic body and / or magnetic field according to a particular application.

[0111] The shape of the housing can be adapted to the desired particle movement path / speed / distance under applied magnetic field. For example, Figure 4F , 4G 4H shows a plan view of a container 42F having a constriction region. Over time and / or in the case of a minimum threshold field, particles can flow through the constriction region based on exposure to an applied magnetic field. For example, in Figure 4G and 4H In the embodiment, the magnetically sensitive particles 14 flow toward the magnetic field source 48 having an associated magnetic field. The bias structure 45 integrated with the container 42F can bring the magnetically sensitive particles 42 to the initial position. Figure 4F The bias structure 45 can be deactivated to allow the magnetically sensitive particles 14 to flow in response to the applied magnetic field. The bias structure 45 can also be used as a reset mechanism to bring the magnetically sensitive particles 14 to the initial position. The container 42F and the magnetically sensitive particles 14 can be used to detect cumulative magnetic field exposure based on the amount of magnetically sensitive particles 14 that pass through the narrow area. The relative size and shape of the magnetic particles and the container constriction area can be modified and optimized according to the specific requirements of the application.

[0112] In some cases, a semipermeable membrane may be included within the narrow side of the container 42F (or at an appropriate location between the ends of the container) so that the magnetically susceptible particles 14 have little resistance at the intersection in one direction but not the opposite direction. This can allow the magnetically susceptible particles 14 to move to one side and remain there even when the magnetic field is no longer present. If such a membrane is designed accordingly, the device can be reset by applying a strong magnetic or electric field, thereby preventing the magnetically susceptible particles 14 from moving back through the membrane, or moving through the membrane. The size of the particles, the construction of the semipermeable membrane, the use of a mesh material, or any suitable combination of any or all of these factors (or another suitable material) can be applied / modified / optimized according to the specifications of a particular application.

[0113] A container may include one or more integrated structures that can be combined together to achieve the specific functionality and sensitivity of the system being built according to the specifications of a particular application. Figure 5A An example housing 50 with multiple integrated structures according to an embodiment is shown. One or more of these structures can be appropriately integrated with any container or housing disclosed herein. As shown, the housing 50 includes conductive structures 51 and 52. The conductive structure 51 shown includes through holes and conductive traces passing through or on a package dielectric material (e.g., a printed circuit board (PCB) layer, a package molding material, a ceramic, a glass, a composite material, a metal, a laminate, a polymer, etc.). The housing 50 can include one or more structures 53 on its surface (and / or also embedded in a layer of the housing 50). For example, a sensor, a conductive trace or a coil can be included on the inner surface (as shown) or the outer surface of the housing 50. The housing 50 can include a conductive path 52 from the inside of the housing 50 to the outside of the housing 50, which can also be provided in the form of traces, through holes and / or lead frame materials. The housing 50 also includes particles 54 in a material 55. The particles 54 can be one or more of conductive, magnetosensitive, paramagnetic, diamagnetic, ferromagnetic or ferrimagnetic materials. Material 55 can be a fluid, liquid, gel, paste, foam or polymer that allows particles to move relative to each other in response to a magnetic field. Material 55 can be electrically active. Housing 50 can include an optical window 56 so that clusters or movements of particles can be detected optically. Optical window 56 can be incorporated into a container. The particle size / shape / color can be such that a cluster of particles can be detected optically through the optical window. Particles 54 can be detected with the naked eye or with a suitable optical sensor integrated into the system.

[0114] Figure 5B5 is a schematic isometric view of an example container 12 with an integrated heating element 57 according to an embodiment. The heating element 57 may be included on and / or within one or more layers of the container 12. The heating element 57 may be located at any suitable location of the container 12, such as at the top and / or bottom of the container. The heating element 57 may be, for example, a resistive heating element. The heat generated by the heating element 57 may affect a dielectric material, such as a fluid, within the container 12, wherein the mobility of particles in the dielectric material varies with temperature. The heat generated by the heating element 57 may move particles in the dielectric material. In certain applications, the heating element 57 may heat the dielectric material to reset the position of the particles. The heat itself may provide a motive force to move the particles to a reset (e.g., randomly distributed) position, or a stimulus (e.g., gravity, an electric field, or a magnetic field) may be applied in different directions to reset the particle position, while the heating element 57 ensures the mobility of the particles within the dielectric material. In some embodiments, heat may be applied before recording a measurement from the sensing system. For example, this may ensure that the particles within the housing start from a known position or level within the housing. In certain embodiments, an alternating magnetic field may be applied to agitate the particles and generate heat by friction, thereby allowing a phase change or viscosity reduction to allow the temperature sensing device to be reset.

[0115] Figure 5C is a schematic isometric view of an example container 12 with an integrated reset mechanism, and in particular a piezoelectric element 58, according to an embodiment. The piezoelectric element 58 may include a piezoelectric material contained on and / or within one or more layers of the container 12. The piezoelectric element 58 may be located at any suitable location of the container 12, such as at the top and / or bottom of the container. When the particles are movable, the piezoelectric element 58 may be activated to physically agitate the particles in the dielectric material or fluid within the container. Such agitation may reset the position of the particles. A combination of a reset mechanism and a heat source, such as Figure 5C The piezoelectric element 58 and Figure 5B A heating element 57 may be used in a separate layer within and / or on the container 12 to ensure that the dielectric material is in a state that allows particle movement during the resetting process.

[0116] Agitation can also be used to increase the sensitivity of detecting particle motion. Agitation of the piezoelectric element 58 can enhance the detection of particle motion. In some applications, this can detect phase changes in dielectric materials. Agitation of the piezoelectric element 58 can enhance the detection of particle motion to detect changes in viscosity of the dielectric material. Using the piezoelectric element 54, particle motion can be intermittently stirred and detected. Intermittent detection of particle motion over time can be used to detect whether a threshold temperature is exceeded (for example, in refrigeration applications) and / or whether a target temperature level is reached (for example, in sterilization applications). In some applications, for example, when detecting and recording particle positions, the piezoelectric structure can be enabled at specific intervals. One or more of the size, shape, configuration, and position of the piezoelectric structure can be optimized and modified according to the specifications of the specific application.

[0117] The dielectric material may include a film or gel that becomes softer and / or more ductile above a certain temperature, allowing movement of the particles 14. A piezoelectric element or other stirring element may pulse the film and / or particles to detect if the temperature has been reached.

[0118] Figure 5D The particle is shown in a film 59 and a shell having a flexible surface 60 around the film 59 and the particle 14 . Figure 5D The container 12 may be used with any suitable principles and advantages disclosed herein, such as piezoelectric pulses. Figure 5D A flexible top surface 60 is shown in FIG. 1 , but any suitable surface of the containers disclosed herein may be flexible, and / or in certain applications, the container may include two or more flexible surfaces.

[0119] In some applications, the container can include an integrated patterned structure that is conductive and / or magnetically sensitive. In some cases, the patterned structure can be used for sensing. For example, the pattern can detect particle motion in a specific direction or a cluster of particles at a specific location. In some cases, the patterned structure can be used for biasing. Figure 5E and 5F An example housing having a patterned structure is shown. The patterned structure is shown in side view and plan view in these figures. Figure 5E A housing 61A having a patterned structure 62A is shown. Fig. 5F A housing 61B having a patterned structure 26B is shown. Patterned structures 62A and 26B are two examples of conductive and / or magnetically sensitive patterned structures. Depending on the specifications of a particular application, the patterned structure can be modified to have a suitable shape. One or more of the particle shape, size, and structure can also be modified as desired.

[0120] Figure 5G and 5H is a schematic plan view of an example housing 61C having magnetically susceptible particles 14 in a phase change dielectric material 16 according to an embodiment. Figure 5G In the embodiment, the phase change dielectric material 16A may initially be provided in a first state (eg, solid state), wherein the magnetically sensitive particles in the phase change material are in fixed positions. Above a threshold temperature, the phase change dielectric material 16 may change to a second state (eg, liquid state), such as Figure 5H As shown in the phase change dielectric material 16B in the housing 61C, the magnetically sensitive particles 14 are movable. The housing 61C may include one or more suitable integrated structures, such as one or more magnetic sensing structures, one or more conductive traces, one or more conductive or optical through holes, combined with a specific shape to limit the extent of particle movement, etc. Traces may be provided within the housing 91C to detect contact or position changes of the particles 14, which may occur with the phase change, thereby allowing the phase change to be electrically detected as an indication of exceeding a threshold temperature.

[0121] Magnetic sensitive particles

[0122] The magnetically sensitive particles can have one or more properties that allow the magnetically sensitive particles to move to the magnetic stimulus in a desired manner. For example, the magnetically sensitive particles can be constructed, shaped, patterned, etc. so that the magnetically sensitive particles respond to the magnetic stimulus in a desired manner. As an example, spiral magnetic particles can respond to magnetic induction forces and move in a fluid, which is different from spherical or square particles. The viscosity of the fluid and the shape of the magnetically sensitive particles can be balanced so that the magnetic particles move in response to an applied magnetic field. The magnetically sensitive particles can be coated with a conductive material (such as gold) so that when a certain amount of particles are aggregated or arranged, a conductive path is formed between electrical contacts in the container. The magnetically sensitive particles can be coated with a coating to enhance optical detection, such as coating to achieve one or more of the desired optical contrast, color, fluorescence, luminescence, or another optical property. In some cases, the magnetically sensitive particles can be coated so that they do not chemically react with surfaces or other structures.

[0123] In some cases, one or more interior portions of the housing may be patterned with a magnetic material to detect clusters of particles in a particular area. The shape of the magnetically sensitive particles can affect how the magnetically sensitive particles move and aggregate in such applications. Depending on the material of the outermost layer, the magnetically sensitive particles may stick together. In some applications, the magnetically sensitive particles may be coated with a thin material, such as Teflon or another polymer, so that there is little or no chance that the magnetically sensitive particles will stick together and / or aggregate for any reason other than a response to a magnetic field. The housing may contain one or more conductive vias and connections from the interior surface to the exterior. The housing may contain one or more optical conduits and / or areas to facilitate optical detection of particle clusters or movement.

[0124] Magnetically sensitive particles can be configured to move and / or respond in different ways. Sensitivity to certain field strengths, such as motion, can be enhanced by certain particle structures, shapes, etc. Magnetically sensitive particles can be combined with and / or embedded in non-magnetic materials to provide the effect of a partially patterned structure. The combined structure can then be inserted into a fluid, gel, or film.

[0125] In some cases, the magnetically sensitive particles may include a magnetically sensitive outer coating. For example, the magnetically sensitive particles may be polystyrene beads coated with nickel or other magnetically sensitive materials. The total density of magnetic material of such magnetically sensitive particles may be lower than that of a uniform sphere of magnetically sensitive material. In some other examples, the magnetically sensitive particles may have a magnetically sensitive core material and a coating that is selected to enhance or inhibit interaction with each other and / or the surrounding fluid. For example, the outer coating may be polystyrene, PTFE, Teflon, or some other polymer that may inhibit the particles from sticking together and not responding to magnetic field stimulation in the desired manner.

[0126] In some cases, the magnetically susceptible particles have a conductive outer surface. For example, the magnetically susceptible particles can be coated with gold. Using such magnetically susceptible particles, it is possible to close the electrical contact between two electrodes in a container.

[0127] In some applications, the magnetically sensitive particles may have a coating with one or more specific optical properties. Through such a coating, one or more of contrast, color, luminescence or fluorescence may be achieved. The coating with one or more specific optical properties may assist in the optical detection of the magnetically sensitive particles.

[0128] Magnetically susceptible particles can be ferromagnetic, ferrimagnetic, paramagnetic or diamagnetic. Diamagnetic particles are repelled by a magnetic field. In contrast, paramagnetic and ferromagnetic particles are attracted by a magnetic field.

[0129] The magnetically susceptible particles can have any suitable size for a particular application. In some applications, the magnetically susceptible particles are micrometer-sized or larger. In some applications, the magnetically susceptible particles are millimeter-sized particles. The magnetically susceptible particles can be larger than millimeter-sized. In some applications, the particle width of the magnetically susceptible particles can be in the range of about 50 nanometers to 1 millimeter. In some such applications, the particle width can be in the range of about 0.1 micrometer to 100 micrometers. In some of these applications, the particle width can be in the range of about 0.5 micrometer to 100 micrometers.

[0130] The magnetically sensitive particles can have a shape that affects their movement and / or orientation in the fluid, thereby enhancing and / or optimizing their sensitivity to magnetic field stimulation. In certain applications, it may be desirable to have asymmetric magnetically sensitive particles so that the magnetically sensitive particles move in a specific manner when exposed to a magnetic field. The combination of the shape of the magnetically sensitive particles and how the magnetically sensitive particles are embedded or suspended in the fluid / gel can accept magnetic stimulation of a specific direction and / or intensity. A specific particle shape combined with a fluid or gel of a specific viscosity can provide the desired sensitivity to magnetic stimulation. For a range of target sensitivities within the system, different particle sizes and shapes can be combined as needed. The particles can also be constructed to have a shape that, for example, facilitates the aggregation or physical connection of groups of particles.

[0131] Fig. 6A Example shapes of magnetically susceptible particles are shown.Magnetically susceptible particles can be added to inert non-magnetic materials to form composite structures. Figure 6B An example composite structure containing magnetically sensitive particles in a non-magnetic material is shown. Various processes, such as molding, printing, electroplating, sputtering, laser cutting, lamination, etc., can be used to make composite particles containing magnetically sensitive particles so that the magnetically sensitive particles react to the magnetic field in a desired manner. For example, for the outer non-magnetic layer, when many composite particles are clustered together, they may be held in a cluster by a magnetic field / force. Such composite particles can make the non-magnetic material in physical contact with one or more other composite particles. Such a structure may be ideal to allow such composite particles to release from each other in the absence of a magnetic field. For example, spherical particles with a magnetic core and covered with polystyrene / PTFE may be less likely to stick together and may bounce off each other. The combination of particle shape (e.g., spiral shape, propeller shape, etc.) and fluid viscosity can determine the sensitivity and / or speed of the response to magnetic field stimulation. One or more of the particle shape, structure, and size can be modified and optimized according to the specifications of a specific application.

[0132] The magnetically sensitive particles can have a variety of sizes and densities. If all particles are the same size, the contact surface area can be relatively small. By using multiple sizes (e.g., large and small), the bridge structure can have more contact points. This can allow smaller particles to reduce resistance / increase current carrying capacity. Figure 6C An example is shown of how combining different types of particles can lead to clusters of different shapes, which can be useful for detection purposes.

[0133] Container with integrated circuit

[0134] The magnetic field measurement system may include a container (or housing), one or more particles in the container, and a measurement circuit configured to output an indication of the applied magnetic field based on the position of at least one particle in the container. The container may be integrated with an integrated circuit and / or other components, such as co-packaged. The container may include an electrical connection to the integrated circuit. The integrated circuit may include some or all of the measurement circuit. In some cases, the integrated circuit may also include a sensor for sensing the position of the particles in the container. The sensor may output a signal to the measurement circuit. In some other applications, the measurement circuit may generate a measurement value of the applied magnetic field without a separate sensor.

[0135] Figures 7 to 12 A system and module including a container integrated with an integrated circuit including a measurement circuit is shown. Any suitable principles and advantages of these embodiments can be implemented together with each other. In addition, Figures 7 to 12 The embodiments of the present invention may be implemented with any other suitable principles and advantages related to containers, particles and magnetic field measurements disclosed herein, and the magnetic field measurements disclosed herein may be implemented with Figures 7 to 12 Any embodiments in the present invention may be implemented together.

[0136] Figure 7 is a schematic block diagram of a magnetic field sensing system 70 according to an embodiment. In the magnetic field sensing system 70, magnetic field measurements are generated based on the position of particles within the container. The magnetic field sensing system 70 includes a container or housing 12 that encloses a fluid 16 and magnetically sensitive particles 14 suspended within the fluid 16. An integrated circuit 72 is integrated with the container 12. As shown, the integrated circuit 72 is vertically integrated with the container 12. The integrated circuit 72 includes a measurement circuit 73. A sensor 74 is also integrated with the container 12. A packaging structure 75 can protect the integrated circuit 72 and the sensor 74. The container 12, the sensor 74, and the integrated circuit 72 can be packaged together.

[0137] The sensor 74 can sense the position of the magnetically sensitive particles 14. The sensor 74 can be a magnetic sensor, a capacitive sensor, a MEMS-based sensor, an optical sensor, a resistive sensor, an inductive sensor, or any other suitable sensor capable of detecting the movement and / or position of the magnetically sensitive particles. The sensor 74 can be configured to detect any changes in the magnetic field strength or distribution caused by the movement of the magnetically sensitive particles. For example, the sensor 74 can be configured to detect a change from uniformly distributed magnetically sensitive particles to multiple clusters. The sensor 74 can be configured to detect a change from uniformly distributed magnetically sensitive particles to a single cluster with an arbitrary position. In some cases, the sensor 74 can detect dynamic changes in the position of the particles.

[0138] The sensor 74 can be formed separately from the integrated circuit 72 and integrated with the integrated circuit 72 by packaging. The sensor 74 can be larger than the integrated circuit 72. The sensor 74 and the integrated circuit 72 can be formed by different manufacturing processes. As shown in the figure, the sensor 74 for detecting the position of the magnetically sensitive particles is located outside the container 12 and is separated from the integrated circuit 72 including the measurement circuit 73.

[0139] In some other embodiments, the sensor may be included within the container. According to various embodiments, the sensor may include an element on an integrated circuit that includes the measurement circuit and an element external to the integrated circuit. In some embodiments, the integrated circuit may include circuitry of the sensor and the measurement circuit.

[0140] The integrated circuit 72 shown includes a measurement circuit 73. In some other applications, the circuits of the measurement circuit may be included on the integrated circuit and outside the integrated circuit (e.g., as one or more independent circuit elements, on one or more other integrated circuits, etc.). The measurement circuit 73 generates an indication of the applied magnetic field based on the position of the magnetically sensitive particles 14 in the container 12. The measurement circuit 73 may include any suitable circuit to generate such an output. According to the specifications of the specific application, the measurement circuit 73 may include semiconductor devices, such as silicon devices and other components (chiplets, passive devices, discrete circuit elements, etc.) as needed. The measurement circuit 73 can process the output of the sensor 74 to generate an indication of the applied magnetic field. The measurement circuit 73 outputs a measurement value of the applied magnetic field. The measurement circuit 73 can perform any comparative measurement disclosed herein. For example, the measurement circuit 73 can generate a measurement value based on comparing a first measurement value associated with the position of one or more first particles in the first compartment and a second measurement value associated with the position of one or more second particles in the second compartment. As another example, the measurement circuit 73 can generate a measurement based on comparing a first measurement and a second measurement, wherein the first measurement is associated with the positions of at least two types of particles, and wherein the second measurement is associated with the positions of at least some of the two types of particles that move relative to the positions associated with the first measurement in response to an external stimulus. The sensitivity of the system can be modified by modifying components in the manner described herein (e.g., particle size or shape or structure, fluid or gel type, housing shape, functionality contained within the housing (e.g., optical windows, sensing structures, piezoelectric structures, heating elements, etc.), etc.).

[0141] The indication of the applied magnetic field may indicate one or more of the time and intensity of exposure to the magnetic field, the direction of the magnetic field, the angle of the magnetic field, the intensity of the magnetic field, the rotation of the magnetic field, the profile of the magnetically susceptible particles, the time domain variations of the magnetic field (e.g., frequency and / or harmonics), etc.

[0142] The container containing the particles can be contained in a system-in-package (SIP). A SIP is an example of a packaged module. The container can be placed near the surface of the packaging structure, or exposed through an opening in the packaging structure, to sense the magnetic field. In some applications, the opening in the packaging structure can expose at least a portion of the container to the external environment. The packaging structure can include a molding material, a sealed cavity or "can", a laminate, a composite material, or any other suitable structure to protect the integrated circuit. The applied magnetic field causes the particles to move within the container. The concentration of the particles can produce discernible electrical changes within the system, which indicates the presence / concentration of magnetic bodies and / or magnetic fields. The measurement circuitry of the integrated circuit of the SIP can output an indication of the magnetic field based on the position of the particles in the container. The SIP can operate in harsh environments, such as high temperature environments, acidic environments, humid environments, or corrosive environments. FIG. 8A to FIG. 9 An example cross-sectional schematic diagram of a SIP according to an embodiment is shown.

[0143] Fig. 8A A SIP 80 is shown having a container or housing 12 having a fluid 16 and magnetically sensitive particles 14 in the fluid 16. In the SIP 80, the container 12 is adjacent to the surface of a packaging structure 82. The container 12 is stacked with a sensor 83 (or a substrate or die containing a sensing element) and an integrated circuit 84. The integrated circuit 84 includes circuitry for a measurement circuit that outputs an indication of an applied magnetic field. In some applications, the sensor 83 is included on the integrated circuit. According to some other applications, the sensor 83 is not included on the integrated circuit. The integrated circuit 84 can be an application specific integrated circuit (ASIC). The integrated circuit 84 can include a semiconductor die. The sensor 83 can be on a semiconductor die. The elements of the system can be placed side by side rather than stacked vertically. The elements within the system can be connected using suitable techniques, including but not limited to conductive traces, wire bonds, solder bumps, plated traces, through-holes, etc. Depending on the specifications of a particular application, chiplets, passive devices, discrete circuit elements, and / or other components (although Fig. 8A (not shown) can be included in SIP 80.

[0144] Figure 8B A SIP 85 is shown having a container 12 exposed through an opening in a packaging structure 86. The packaging structure 86 may be a molded compound, however, depending on the specifications of a particular application, different packaging structures may be used (e.g., pre-molded cavity, ceramic / seal, metal can, etc.). The container 12 is exposed through the top of the SIP 85. The container or housing 12 of the SIP 85 may be exposed to a harsh environment. The structure of the container or housing 12 may be modified depending on the specifications of a particular application. For example, the container 12 may be a laminate or a flexible composite material or glass or metal or silicon or ceramic or other suitable material.

[0145] Figure 8CA SIP 87 is shown with a container 12 connected to an integrated circuit 83 via one or more intermediate layers 88. The one or more intermediate layers 88 may include one or more electrical connections between the container 12 and the integrated circuit 83, such as a wiring layer in a circuit board (e.g., a PCB or a ceramic package substrate), an interposer, a plated or sputtered connection, or an anisotropic conductive paste or film, or a redistribution layer (RDL). In the SIP 87, the container 12 may be exposed to a harsh environment. The packaging structure 89 covers less of the container 12 than the packaging structure 86 of the SIP 85.

[0146] Fig.8D A SIP 90 is shown with the container 12 flush with the surface of the packaging structure 92. The container 12 of the SIP 90 is exposed through an opening in the packaging structure 92.

[0147] Fig. 8E A SIP 94 is shown with a protective layer 95 on a packaging structure 96. The protective layer 95 is an intermediate layer or protective layer that can protect the sensor 83 and the integrated circuit 84 from the harsh environment. The protective layer 95 can include a heat shield, stainless steel, a cooling plate, an anti-corrosion material, a sealing cover, etc. The protective layer 95 can protect the components on the SIP 94 from the harsh environment. The container 12 can be exposed through the openings in the packaging structure 96 and the protective layer 95.

[0148] Fig. 9 A SIP 97 is shown that includes a container 12 embedded in a laminate 98. The laminate 98 can be a printed circuit board. Embedding the container 12 in the laminate 98 can be used for applications where the magnetic field source is placed on the opposite side of the laminate 98 relative to the sensor and integrated circuit 84. Depending on the specifications of the particular application, the laminate material can also be constructed to contain other components and features (e.g., passive devices, discrete circuit elements, optical windows, sensing structures, heating elements, piezoelectric structures, etc.). In such applications, the magnetic field source can be closer to the container 12. In the SIP 97, the container 12 can be electrically connected to the sensor 83 and / or the integrated circuit 84 through electrical connections and conductive features in the laminate 98, such as mold through holes, traces, solder bumps, wire bonds, lead frames, anisotropic pastes or films, flexible with conductive traces, pastes, etc. surrounded by the packaging structure 82.

[0149] The integrated system may include an opening with an embedded structure. One or more housings with particles that move in response to an applied magnetic field may be exposed through the opening. The opening may be combined to detect magnetic stimulation of specific areas within the embedded system. An integrated circuit with measurement circuitry (and one or more discrete circuit elements, passive devices, and / or other components) may be integrated with the housing in the embedded structure. The integrated circuit may be a processing die of a circuit that includes the measurement circuitry. Fig. 10A and10B An example of an integrated system with a housing containing magnetically susceptible particles according to an embodiment is shown.

[0150] Fig. 10A An integrated system 100 is shown having an opening 102 within an embedded structure. The integrated system 100 includes a container, shown as a housing 104, having magnetically sensitive particles in a fluid or gel. An integrated circuit 106 of the integrated system 100 includes circuitry for producing measurement circuitry for an indication of an applied magnetic field. The housing 104 is integrated with the integrated circuit 106, such as by being embedded in a laminate or build structure, or may be combined with a pre-molded structure having a common overmolded element, mounted on a common packaging substrate and / or surrounded by a common housing (e.g., a "can" with an opening or window). Fig. 10A In the embodiment, the housing 104 is located on the opposite side of the opening 102. The method for constructing the system and the size and / or shape of the opening 102 can be modified and / or optimized according to the specifications of the system using appropriate packaging techniques.

[0151] Fig. 10B An integrated system 108 is shown having an opening 102 within an embedded structure. The integrated system 108 includes a container in the form of a housing 104 having magnetically sensitive particles in a fluid or gel. An integrated circuit 106 of the integrated system 108 includes circuitry for producing measurement circuitry indicating an applied magnetic field. The housing 104 is integrated with the integrated circuit 106, such as by being embedded in a common overmold, mounted on a common packaging substrate, and / or surrounded by a common housing (e.g., a "can" with an opening or window). Fig. 10B In the embodiment, the housing 104 is located at one end of the opening 102. The method for constructing the system and the size and / or shape of the opening 102 can be modified and / or optimized according to the specifications of the system using appropriate packaging techniques.

[0152] The magnetic field measurement system can communicate wirelessly with another device. Such a system can include one or more antennas (incorporated within the system) that can wirelessly transmit an indication of the applied magnetic field generated by the measurement circuit. The one or more antennas can wirelessly transmit any other suitable information. The system can be arranged so that a certain detected (or inferred magnetic-related parameter), such as confirmation of proximity, presence, magnetic field strength and / or direction, particle movement, etc., can trigger a flag or alarm and / or cause an action to be initiated within the system.

[0153] Fig.11An exploded schematic diagram of an example magnetic field measurement system 110 according to an embodiment is shown. The magnetic field measurement system 110 includes a wireless communication layer 112, which includes one or more antennas 114; a layer 116, which includes an integrated circuit, which includes circuits of a measurement circuit; and a layer 118, which includes a housing having particles that move in response to an applied magnetic field according to the principles and advantages disclosed herein. Conductive vias 119 and / or traces can electrically connect the layers of the magnetic field measurement system 110. The vias, traces, and conductive paths can be sputtered, plated, using wire bonding, anisotropic conductive films or pastes, or any other suitable method for constructing conductive paths. For example, one or more antennas 114 can include coils. One or more antennas 114 can be included in a radio frequency identification (RFID) tag. The wireless communication layer 112 can include circuits that support wireless signal transmission, or such circuits can be provided in a lower layer, such as layer 116. The circuits that support wireless signal transmission can encrypt data for wireless signal transmission. One or more antennas 114 can send encrypted data. The wireless communication layer can be incorporated into a SIP, module, or system in a variety of ways. It can be stacked or placed side by side, or heterogeneously constructed using chiplets (with built-in coils and structures). The sensing system can also incorporate conductive coupling and / or optical communication methods, examples of which are disclosed herein. The system structure can be modified and optimized according to the specifications of a specific application.

[0154] Containers with particles that move in response to an applied magnetic field may be included in various modules. Fig.12 A photon module 120 is shown according to an embodiment, which includes a container in the form of a housing 122 having particles that move in response to an applied magnetic field. When the particles change position according to the external magnetic field, a photodetector and / or optical fiber can detect the change and transmit data to an integrated circuit 124. A light source 126, such as a laser, can be used to optically detect the particles within the housing 122. The integrated circuit 124 includes circuits for measuring the circuits. The photon module 120 may include one or more of an optical fiber 121A, a lens fiber 121B, micro-optics 123, voice wire bonds 125A, wire bonds 125B, a flip-chip integrated circuit 124B, a high-speed electrical interposer 127, a packaging structure 128, and a thermal management system that may include microfluidics 129.

[0155] Fig.13An electronic module 130 having electronic components 132, 134, and 136 and a housing 138 having particles that move in response to an applied magnetic field are shown according to an embodiment. The electronic components 132, 134, and 136 and the housing 138 are integrated by mounting and electrically connecting to a common circuit board 139. The electronic component includes an integrated circuit 132 having a circuit for measuring the circuit. The electronic component may also include a sensor that provides an output to the measuring circuit. The module, system, or SIP may also include a circuit that encrypts the output of the sensor.

[0156] Measurement

[0157] The position and / or motion of a particle can be measured in a variety of different ways. Without limitation, example measurements include enclosure conductance measurements, zero power direction detection measurements, cumulative magnetic field exposure detection measurements, micro-electromechanical system-based measurements, optical measurements, and capacitive measurements. FIG. 14A to FIG. 25 Example measurement systems and methods are discussed. These measurement systems can include particles and containers according to any suitable principles and advantages disclosed herein. Any suitable principles and advantages of the measurement systems disclosed herein can be implemented together with each other.

[0158] The position of the particle can be determined from electrical conductivity measurements. The container enclosing the fluid can be partially or fully conductive. A plurality of contacts can be provided on the container for making measurements related to the particle position.

[0159] Fig.14A , 14B 14C shows an example system according to an embodiment, in which the position of the particle can be measured by shell conductivity measurement. The container 142 enclosing the fluid 16 and the magnetically sensitive particles 14 can be metal, or can contain metal and / or conductive areas to facilitate conductivity measurement. The container 142 includes a plurality of metal contacts 144A, 144B, 144C and 144D. As shown, the metal contacts 144A, 144B, 144C and 144D are located at the corners of the container 142. The shell conductivity can be measured using a measurement circuit connected to the metal contacts 144A, 144B, 144C and 144D. For example, impedance can be measured by applying a voltage to one or more of the metal contacts 144A, 144B, 144C and 144D and measuring the current. The measured value indicates the position of the magnetically sensitive particles 14 in the container 142. The shell conductivity of non-magnetically sensitive particles in the magnetically sensitive fluid can also be measured.

[0160] The baseline shell conductivity of container 142 is known. The system can be calibrated. For example, when no magnetic field is applied, the magnetically susceptible particles 14 can be Fig.14AThe magnetically sensitive particles 14 can be aligned relative to the magnetic field and / or magnetic lines of force.

[0161] The magnetic field source 28 can apply a magnetic field to move the magnetically sensitive particles 14 to Fig. 14B The position shown. The change in resistivity can indicate the position of the magnetically sensitive particle. By measuring the current using the metal contacts 144A, 144B, 144C, 144D, the position of the magnetically sensitive particle 14 can be determined based on the change in resistivity or conductivity due to the magnetically sensitive particle 14 moving from Fig.14A Move to the position shown Fig. 14B This change in resistivity or conductivity is indicative of the magnetic field applied by magnetic field source 28. In particular, the strength, intensity, direction and / or location of the applied magnetic field can be determined by comparing the measurements under the influence of magnetic field source 28 with the baseline measurements.

[0162] The magnetic field source 28 can apply a magnetic field to move the magnetically sensitive particles 14 to Fig. 14C By using metal contacts 144A, 144B, 144C, 144D to measure the current, the magnetic sensitive particles 14 can be Fig.14A Move the position shown to Fig. 14C The resistivity change caused by the position shown determines the position of the magnetically susceptible particles 14. This change in resistivity is indicative of the magnetic field applied by the magnetic field source 28. The strength, direction and / or location of the applied magnetic field can be determined.

[0163] Magnetically sensitive particles having different properties can be used in the shell conductance measurement to determine the strength of the applied magnetic field. For example, magnetically sensitive particles having different densities, different sizes and / or different weights can be used to determine the strength of the applied magnetic field.

[0164] Fig.15A , 15B 15C show a system for detecting magnetic field strength by housing conductance measurement according to an embodiment. Magnetoresistive particles 14A, 14B, and 14C may be distributed in fluid 16 within container 142 according to their sizes.

[0165] Magnetic field source 28A can apply a magnetic field having a first strength. This can cause magnetically susceptible particles 14A to contact the surface of container 142, such as Fig. 15BAs shown. The magnetic field applied by magnetic field source 28A is insufficient to bring magnetically sensitive particles 14B and 14C into contact with container 142. The applied magnetic field can compete with gravity so that only the lighter magnetically sensitive particles 14A are attracted by the magnetic field having the first strength. In some other applications, multiple types (e.g., 3 types) of magnetically sensitive particles can each have one or more different magnetic properties (such as magnetic permeability (or magnetic susceptibility), coercive force and / or remanence) so that they are more or less attracted by the external magnetic field.

[0166] Magnetic field source 28B may apply a magnetic field having a second strength. This may cause magnetically susceptible particles 14A and 14B to contact the surface of container 142, such as Fig. 15C The magnetic field applied by magnetic field source 28C is insufficient to bring magnetically susceptible particles 14C into contact with container 142. The applied magnetic field may compete with gravity so that only magnetically susceptible particles 14A and 14B are attracted by the magnetic field having the second strength.

[0167] Using metal contacts 144A and 144B, the measurement circuit can generate a case conductance measurement. Fig. 15B The corresponding shell conductance measurements show that the magnetic field strength is lower than Fig. 15C Corresponding enclosure conductivity measurements. It will be appreciated that fields with higher strengths exceeding different thresholds may additionally attract particles 14C of greater mass. Although not shown, more than two metal contacts may be employed at different locations of container 142. The device may be calibrated for different magnetic field strengths indicated by different conductivity measurements.

[0168] In some embodiments, the systems disclosed herein can perform zero-power detection of exposure to high magnetic fields or magnetic field disturbances. With zero-power detection, the device does not need to apply power to detect the magnetic field during exposure to the external magnetic field. Instead, power can be applied at a later stage while the system is interrogated to measure the state of the system (or an external optical detection system can be used to detect clusters / motion of particles), but the system can maintain its state without power until a later interrogation.

[0169] Figures 16A to 16F Shown is a housing with particles that can be used for zero-power detection according to one embodiment. Fig.16A An example housing 162 is shown with bias magnets 164A and 164B on opposite ends. Housing 162 is a sealed housing containing fluid 16 and magnetically sensitive particles 14 in fluid 16. Housing 162 is preloaded with magnetically sensitive particles 14 in an initial position, such as Fig.16AAs shown. In the initial position shown, the magnetically sensitive particles 14 are positioned at one end of the housing 162 by the bias magnet 164A. The bias magnet 164A can attract the magnetically sensitive particles to the initial position. If not disturbed, the magnetically sensitive particles 14 can remain in the initial position. In some applications, the zero-power detection technique can be applied to non-magnetically sensitive particles in the magnetically sensitive fluid.

[0170] Fig. 16B The magneto-sensitive particles 14 are shown after a large magnet 165 (representing any external magnetic field source) has caused the magneto-sensitive particles 14 to move from one end of the housing 162 to the other end of the housing. The large magnet 165 applies a larger magnetic field than the bias magnets 164A and 164B. The bias magnet 164B can hold the magneto-sensitive particles 14 in the housing. Fig. 16B The position shown in FIG. 1 is not shown until a sufficiently large magnetic field moves the magnetically sensitive particles 14. Therefore, after the large magnet 165 no longer applies a strong magnetic field, the magnetically sensitive particles 14 can remain in the position shown in FIG. Fig. 16B Position shown. No power is required during exposure measurement. Instead, power can be applied later for measurement even in the absence of a magnetic field, since the system remains exposed without power.

[0171] Multiple shells 162 can be used together to determine exposure to a magnetic field in a spatial direction. For example, four shells 162 relatively close to each other with appropriate initial states of magnetically sensitive particles can record and store indications of exposure to a relatively large magnetic field in the xy plane direction. As another example, six shells 162 can be used to detect magnetic fields in xyz space. The shape and size of each shell and the particle size, shape, structure and fluid or gel type within the shell can be selected or modified according to the specifications of a specific application.

[0172] Fig. 16C Four shells 162A, 162B, 162C, 164D are shown according to one embodiment, each shell including magnetically sensitive particles 14 in a fluid 16 in an initial position. The shells 162A, 162B, 162C, 164D can be used together to detect magnetic fields in directions within the xy plane. In the initial position, the two shells are oriented in one direction, and the magnetically sensitive particles start from opposite ends of the shells. Shells 162A and 162B are oriented in a first direction, and the magnetically sensitive particles 14 are located at opposite ends. Shells 162C and 162D are oriented in a second direction, and the magnetically sensitive particles 14 are located at opposite ends. As shown in the figure, the first and second directions are orthogonal. Each of the shells 162A, 162B, 162C, 164D can have an integrated bias magnet 164A and 164B and contain magnetically sensitive particles 14 and fluid 16. In Fig. 16C , 16D , 16E and 16F, housing 162A includes the reference numbers for these components, while the other housings omit these reference numbers.

[0173] Fig.16D Shows the magnetic field exposure Fig. 16C The four shells 162A, 162B, 162C, and 164D in the shell 162C have been removed from the Fig. 16C This represents exposure to a magnetic field from the direction in which the magnetically susceptible particles 14 are moving within the housing 162C. Fig.16D The positions of the magnetically sensitive particles 14 in the housings 162C and 162D shown together indicate the direction of the applied magnetic field. Any suitable detection technique can be used to determine the positions of the magnetically sensitive particles 14 in the housings 162A, 162B, 162C, and 162D. The measurement circuit can output an indication of the applied magnetic field based on the detected positions of the magnetically sensitive particles in the housings 162A, 162B, 162C, and 162D.

[0174] Fig.16E Shows Fig. 16C The four housings 162A, 162B, 162C, and 164D are exposed to Fig.16D The magnetic sensitive particles 14 in the shell 162B have been Fig. 16C This represents exposure to a magnetic field from the direction in which the magnetically susceptible particles 14 are moving within the housing 162B. Fig.16E The positions of the magnetically susceptible particles 14 within the housings 162A and 162B shown together indicate the direction of the applied magnetic field.

[0175] Fig.16F Shows Fig.16E The four housings 162A, 162B, 162C, and 164D are exposed to Fig.16E Two magnetic fields are applied to make the magnetic sensitive particles 14 move relative to Fig. 16C The initial position in Fig.16E The magnetically sensitive particles 14 in the shells 162A and 162B have been removed from Fig.16E The position shown is moved to the other end of these shells. This represents exposure to the magnetic field from the direction that the magnetically susceptible particles 14 move to in the shells 162A and 162B. Fig.16F The positions of the magnetically susceptible particles 14 in the shells 162A and 162B shown together indicate the direction in which the magnetic field is applied. Applying magnetic fields in two opposite directions will not cause the magnetically susceptible particles in the shells 162A, 162B, 162C, 164D to return to the original position. Fig. 16C Initial position shown.

[0176] Cumulative magnetic field exposure can be determined based on the position of the particles in the container. The system can passively record whether the magnetic field exposure exceeds a certain threshold. It can be detected whether the device is exposed to a relatively strong electric field even after a relatively strong magnetic field is applied. Cumulative magnetic field exposure detection can be performed using magnetically sensitive particles in a fluid or non-magnetically sensitive particles in a magnetically sensitive fluid.

[0177] Fig.17A and 17B A system with cumulative magnetic field exposure detection according to an embodiment is shown, which can be a measure of the magnetic field "dose" or field strength integrated over time. The system includes a housing 172, which includes a flow restriction structure 174 that blocks the passage of magnetically sensitive particles 14. The flow restriction structure 174 can be semi-permeable, allowing particles to flow more easily in one direction than in the opposite direction. The flow restriction structure 174 can be a membrane. The flow restriction structure 174 can be a filter or mesh or other suitable structure. In some embodiments, the flow restriction structure 174 can simply be a constriction in the cross-section of the flow path. The magnetically sensitive particles 14 can be in Fig.17A The initial position shown. A magnetic field source 18 applying a sufficiently strong magnetic field can cause at least some of the magnetically susceptible particles 14 to pass through the current limiting structure 174. The magnetically susceptible particles 14 that have passed through the current limiting structure 174 can then be detected. Such detection can involve optical detection or any other suitable detection mechanism, depending on the specifications of a particular application.

[0178] Fig. 17B The state in which some magnetically sensitive particles 14 have passed through the current limiting structure 174 is shown. Based on the position of the magnetically sensitive particles 14 that have passed through the current limiting structure 174, the measurement circuit can generate an indication of the cumulative magnetic field exposure. After applying a sufficiently strong magnetic field, a measurement result can be generated. The measurement value can be generated without applying a magnetic field.

[0179] Magnetically sensitive particles can interact with microelectromechanical systems (MEMS) structures. MEMS structures can include magnetic materials. Example MEMS structures include a seesaw structure including a magnetically sensitive material, a cantilever beam including a magnetically sensitive material, a movable MEMS mass including a magnetically sensitive material, a diaphragm or MEMS microphone including a magnetic material, a MEMS gyroscope with a magnetic material, and the like. In some applications, the MEMS structure can detect the position of a magnetically sensitive material in a container. In some applications, the MEMS structure can apply a magnetic field to move the magnetically sensitive particles within the container. An external magnetic field source, a MEMS structure including a magnetically sensitive material, and the magnetically sensitive particles can interact with each other. The MEMS structure can be used to detect the position of (1) magnetically sensitive particles within a fluid and / or (2) non-magnetically sensitive particles within a magnetically sensitive fluid. For example, the MEMS structure can be part of an antenna so that the antenna changes depending on the field strength, and a transponder can detect the change in the antenna.

[0180] Fig.18 , 19 20 show example MEMS structures interacting with particles within a container according to an embodiment. Fig.18 A cantilever MEMS structure 182 and a container 12 with magnetically sensitive particles 14 in a fluid 16 are shown. The cantilever MEMS structure 182 may include a magnetically sensitive layer 184 and may be incorporated within silicon. The cantilever MEMS structure 182 may move in response to the position of the magnetically sensitive particles 14 within the container 12. The position of the cantilever MEMS structure 182 may be used to sense an applied magnetic field. Measurement circuitry connected to the cantilever MEMS structure 182 may generate an output signal indicative of the applied magnetic field.

[0181] Fig.19 A seesaw MEMS structure 192 and a container 12 having magnetically sensitive particles 14 in a fluid 16 are shown. The seesaw MEMS structure 192 can incorporate a magnetically sensitive material 194. The seesaw MEMS structure 192 can move in response to the position of the magnetically sensitive particles 14 within the container 12. The position of the seesaw MEMS structure 192 can be used to sense an applied magnetic field. Measurement circuitry connected to the seesaw MEMS structure 192 can generate an output signal indicative of the applied magnetic field.

[0182] Fig. 20 A movable mass MEMS structure 202 and a container 12 having magnetically sensitive particles 14 in a fluid 16 are shown. The movable mass MEMS structure 202 can incorporate a magnetically sensitive material 204 and be tethered. The movable mass MEMS structure 202 can move in response to the position of the magnetically sensitive particles 14 within the container 12. The position of the movable mass MEMS structure 202 can be used to sense an applied magnetic field. Measurement circuitry connected to the movable mass MEMS structure 202 can generate an output signal indicative of the applied magnetic field.

[0183] A magnetic sensor can be integrated with the container to sense the position of magnetically sensitive particles. Examples of such magnetic sensors include magnetoresistive sensors (e.g., anisotropic magnetoresistive sensors, giant magnetoresistive sensors, or tunnel magnetoresistive sensors), fluxgate sensors, Hall effect sensors, search coil sensors, giant magnetoimpedance (GMI) sensors, etc.

[0184] Fig.21A and 21B A container 12 with an integrated magnetic sensor 212 is shown according to an embodiment. The magnetic sensor 212 can be an array of magnetic sensors, such as a one-dimensional array, a two-dimensional array, or a three-dimensional array. As shown, the magnetic sensor 212 is located on the outer surface of the container 12. The container 12 includes a material 216 and a particle 14. The particle 14 can be conductive. The magnetic sensor 212 can sense the position of the particle 14 within the container. Depending on the magnetic material used in a particular application, there can be a bias field for particle detection.

[0185] Material 216 can be a gel or fluid that has different physical states at different temperatures. For example, material 216 can be solid at room temperature and liquid at higher temperatures. At higher temperatures, magnetically sensitive particles 14 can move in material 216. For example, wax, coconut oil, or fat are example materials that are solid at room temperature and liquid at high temperatures. Material 216 can be used according to any suitable principles and advantages of any magnetic field measurement system disclosed herein. For example, material 216 can be used with MEMS-based sensors, capacitive sensors, optical sensors, housing conductivity measurements, zero power detection, cumulative magnetic field exposure, etc.

[0186] Fig. 21B It shows that the temperature of material 216 is higher than Fig.21A The mobility of the magnetically sensitive particles 14 in the material 216 is higher than Fig.21A A magnetic field can be applied to move the magnetically sensitive particles 14 to Fig. 21B The magnetic sensor 212 can detect the position of the magnetically sensitive particles 14. A measurement circuit connected to the magnetic sensor 212 can output an indication of the applied magnetic field.

[0187] The position of the particles can also be detected optically. When the magnet rotates, the particles in the fluid will move with the rotation of the magnet and affect the light transmission pattern within the housing. Optically, the rotation of the magnetic field can be determined. Optical detection can detect the displacement and / or position of magnetically sensitive particles based on any suitable movement of a magnetic body or other magnetic field source. Example movements include rotational and linear movements discussed with reference to Figures 22 and 23. Optical detection is also applicable to fixed magnets or magnetic field sources. Optical detection can be an efficient and relatively fast method for detecting magnetically sensitive particles. Example embodiments with optical detection are shown in Figures 22 and 23. Optical detection can be used to detect the position of (1) magnetically sensitive particles within a fluid and / or (2) non-magnetically sensitive particles within a magnetically sensitive fluid.

[0188] Fig.22AA container 222 with optically detected magnetically sensitive particles 14 is shown. The container 222 includes a glass cover 224. A silicon emitter 226 integrated with the container 222 can emit light into the container 222. A rotating magnet 228 can cause the magnetically sensitive particles 14 to move. As the magnetically sensitive particles 14 move within the fluid 16, the detection of light may change. For example, the magnetically sensitive particles 14 can block or otherwise adjust the path of light emitted from the emitter 226. The change in the distance of the light can be detected by an optical detector (not shown) located above the glass cover 224 and used to calculate the moving position of the magnetically sensitive particles 14. The shape, size, housing structure and constituent materials (including fluids, gels, particles, etc.) and location of the optical detector and emitter, as well as how they are integrated into the system, can be modified and optimized according to the specifications of the application. The operating principle of the system can remain unchanged, where the particles within the housing respond to magnetic stimuli and are detected by optical means (wherein the system contains an optically transparent medium that helps detect the particles and infer the strength, intensity, direction or position of the magnetic field).

[0189] Fig. 22B A container 232 with particles 14 with integrated optical detection is shown. The container 232 includes an integrated emitter 234 and an integrated receiver 236. The emitter 234 and the receiver 236 can each include silicon or another suitable semiconductor material. The material composition of the structure can also be selected based on the ability to allow or prohibit certain wavelengths of light to pass through. For example, light in the infrared spectrum can pass through silicon. The selection, shape, size and / or structure of the system components, and how they are integrated into the system, can be modified and optimized based on the specifications of the application. The position of the magnetically sensitive particle 14 can be detected based on the light emitted by the emitter 234 and received by the receiver 236. The light can have any suitable wavelength for detection. For example, the light can be infrared. The position of the magnetically sensitive particle 14 is represented Fig. 22B The magnetic field rotates caused by the rotating magnet 228. More generally, optical detection can determine the position of particles that move in response to the magnetic field. In some cases, a photosensitive metal pad can be included on the optical receiver.

[0190] Fig.23A and 23B 24 is a schematic cross-sectional or side view of an optical measurement system according to an embodiment. The optical measurement system may include a fiber optic cable / source 242, an optical edge coupler 243, a waveguide 244, a tilt gradient 245, particles 14 within a container 12 on a substrate 246, a silicon receiver 247, and circuitry 248 to external circuitry (e.g., including wire bonds and / or any other suitable connections). A packaging structure 249 may surround the silicon receiver 247 and at least a portion of the container 12, such as Fig. 23BThe packaging structure 249 may have an opening through which a portion of the container 12 is exposed.

[0191] Fig.23C yes Fig.23A and 23B By providing a light source at a plurality of different positions through the container 12 and providing a plurality of light detectors (eg, a photosensitive array) on opposite sides of the container 12, changes in the position of the particle 14 can be detected.

[0192] The position of one or more particles can be detected by capacitive sensing. Mutual capacitance can be measured to detect the position of one or more particles in the fluid within the container. In some cases, mutual capacitance can be measured continuously. Velocity can be determined by differentiating the continuous measurement values ​​once. Acceleration can be determined by differentiating the continuous measurement values ​​twice. Velocity and / or acceleration can be measured based on any suitable continuous position measurement (e.g., continuous optical measurement, etc.). Capacitive sensors, such as complementary metal oxide semiconductor capacitive sensors, can be used to detect one or more magnetically sensitive particles. Fig.24 and 25 An embodiment of detecting the position of magnetically sensitive particles using capacitive sensing is described.

[0193] Fig.24 A capacitive sensor 252 is shown integrated with a container 12, which includes particles 254 within a fluid 16. The particles 254 can be magnetically sensitive. The particles 254 can be beads with a conductive coating. The container 12 and the capacitive sensor 252 can be integrated with a wafer-level chip-scale package. The capacitive sensor 252 can be formed in the top metal layer of the integrated circuit 255, or can be a stand-alone device manufactured with packaging techniques (e.g., sputtering, plating, screen printing, etching, etc.) and then stacked. Different parts of the system can be heterogeneously integrated and include chiplets and other components and / or functional components according to the specifications of a specific application. The capacitive sensor 252 can detect a one-dimensional position of the particle 254 based on mutual capacitance measurement. The capacitive sensor 252 can include a one-dimensional array of capacitive sensing elements. The measurement circuit of the integrated circuit 255 can output an indication of the applied magnetic field based on the measured position.

[0194] Fig.25A capacitive sensor 256 is shown integrated with a container 12 that includes particles 254 within a fluid 16. An electrical shield 258 can be placed above the container 12. The capacitive sensor 256 can detect the two-dimensional position of the particle 254 based on mutual capacitance measurements. The capacitive sensor 256 can include a two-dimensional array of capacitive sensing elements. The capacitive sensor 256 can be formed in the top metal layer of an integrated circuit 259. Alternatively, the capacitive sensor 256 can be a stand-alone device manufactured using packaging technology. The measurement circuit can output an indication of the applied magnetic field based on the measured position. One or more of the selection, shape, size, and construction of the system components, as well as the manner in which these components are combined in the system, can be modified and optimized according to the specifications of the specific application.

[0195] Comparative Measurement

[0196] Multiple measurements can be generated based on the particle positions in one or more compartments. At least some particles can move in response to external stimuli, such as a magnetic field (e.g., one or more of intensity, direction, strength, etc.) or a force applied to a compartment. Comparative measurements can be provided based on at least comparing two different measurements, wherein the two measurements are associated with two or more types of particles and / or two or more compartments or shells. Relative to a single measurement, comparative measurements can provide higher sensitivity.

[0197] Aspects of the present disclosure relate to generating comparative measurements based on multiple measurements associated with particles in one or more compartments. The particles may move in response to an external stimulus, such as an applied magnetic field or an applied force. In some applications, the particles may be magnetically sensitive. Multiple measurements may be associated with different types of particles. Alternatively or additionally, multiple measurements may be associated with different compartments. In some cases, different compartments include different types of particles, such as particles of different sizes, masses, densities, sensitivities to external stimuli, etc., or any suitable combination thereof. Alternatively or in addition, the particles in different compartments may be in different fluids. In different fluids, the particles may have different mobilities. In some applications, multiple measurements may be associated with multiple types of particles in a single compartment. One or more compartments may include containers, sealed enclosures, fluid channels, etc. As disclosed herein, there are many different components that can change the final sensitivity depending on the specifications of the application.

[0198] By making multiple measurements associated with different particles and / or compartments, the measurement sensitivity and / or accuracy can be improved. For example, for different types of particles in different compartments, each compartment can detect whether a parameter (e.g., a magnetic field, temperature, or force) is above or below a respective threshold. For multiple compartments, the parameter can be determined within a range between thresholds associated with the different compartments. Such a range is more accurate than detecting whether a parameter is below or above a threshold. As another example, different types of particles with different sensitivities to external stimuli can detect external stimuli more finely based on the motion of the different types of particles.

[0199] By including multiple compartments of particles, the presence and / or movement of an external stimulus (e.g., a magnetic field) can be localized. For example, sensing particle movement in a particular compartment but not other compartments can indicate the location of the external stimulus.

[0200] A system may include a first compartment containing one or more first particles and a second compartment containing one or more second particles. At least some of the one or more first particles may move in response to an external stimulus. A measurement circuit may generate a measurement value based on a comparison of a first measurement value associated with the position of the one or more first particles and a second measurement value associated with the position of the one or more second particles. In some applications, such a system may detect that one or more first particles have moved, and one or more second particles have not moved. This may indicate that a parameter is within a range where one or more first particles move and a plurality of second particles do not move. The first and second compartments may include particles of different types. The first and second compartments may include fluids or dielectric materials having different properties.

[0201] The system may include a compartment containing at least two types of particles and a measurement circuit. The measurement circuit may generate a measurement based on comparing a first measurement and a second measurement. The first measurement is associated with the position of the at least two types of particles, and the second measurement is associated with the position of at least some of the two types of particles that move relative to the position associated with the first measurement in response to an external stimulus.

[0202] By comparison measurement, any suitable measurement technique may be used, such as any of the measurement techniques described above. Figures 14A to 25Any suitable principles and advantages discussed, the measurement can be a magnetic field measurement. The measurement can be a case conductance measurement, a zero-power magnetic field detection measurement, a cumulative magnetic field exposure measurement, a measurement using a microelectromechanical system, a magnetic sensor measurement, a magnetic sensor array measurement, a measurement of particle motion in a phase change material, an optical detection measurement (e.g., using an optical sensor or based on naked eye detection), a capacitance measurement, etc., or any suitable combination thereof. The measurement can be a temperature sensing measurement associated with the motion of particles in a dielectric material, wherein the mobility of the particles in the dielectric material varies with temperature. Such measurements can be implemented according to any suitable principles and advantages disclosed in U.S. Patent Application No. 18 / 053523 filed on November 8, 2022, the technical disclosure of which is incorporated herein by reference in its entirety for all purposes. The measured value can be the force applied to the compartment.

[0203] The particles in the compartments may include any suitable particles disclosed herein. These particles may be magnetically sensitive. The particles may be conductive, alternatively or additionally. In some applications, the particles in different compartments may have different properties, such as one or more of size, density, mass, shape or sensitivity to external stimuli. The particles may be configured to have a specific shape so that they can move in the housing in a desired manner. The system may be further enhanced and / or optimized by the properties (e.g., viscosity) of the fluid / material containing the particles. The particles may be patterned and / or coated with a specific thickness or a material that may affect the sensitivity / response of a specific application with a sensitive material. For example, if a fast response time is required, large particles in a low viscosity fluid may be used. On the other hand, if a slower (e.g., cumulative) exposure is measured, particles of different shapes in a more viscous fluid may be used. Different shapes / particle structures may be applied to enhance and / or optimize the sensitivity required for a specific application.

[0204] The particles can be contained in any suitable fluid, dielectric material or film in the compartment. The particles can be in any suitable fluid disclosed herein. The particles can be contained in any suitable dielectric material or phase change material disclosed herein and / or in U.S. Patent Application No. 18 / 053523. For example, as described above, the particles can be embedded in a film.

[0205] The compartment can be a container, a sealed housing, a passage, etc. The compartment can be implemented according to any suitable principle and advantage of the above-mentioned container. The compartment can be implemented according to any suitable principle and advantage of the passage disclosed in U.S. Patent Application No. 18 / 170765 filed on February 17, 2023, the technical disclosure of which is incorporated herein by reference in its entirety and for all purposes. In some applications, the compartment can retain particles and / or fluids. In some applications, the compartment can allow fluids and / or particles to flow through.

[0206] Fig.26 A plan view of a system 260 with multiple compartments including particles according to an embodiment is shown. System 260 includes multiple compartments 262A, 262B, 262C, and 262D, which include corresponding particles 14A, 14B, 14C, and 14D in a fluid. Comparative measurements can be generated using measurements associated with at least two separate compartments. Comparative measurements can indicate magnetic fields, temperatures, forces, etc.

[0207] Compartments 262A, 262B, 262C and 262D can have shapes and / or sizes tailored for specific applications. In some applications, compartments 262A, 262B, 262C and 262D can be sealed housings. In some applications, compartments 262A, 262B, 262C and 262D can be fluid channels. Any suitable number of compartments can be used for specific applications. In addition, the shape and / or size of each compartment can be modified and optimized according to the specifications of the application.

[0208] Each compartment 262A, 262B, 262C, and 262D may include different types of particles 14A, 14B, 14C, and 14D. Different particles 14A, 14B, 14C, and 14D have different properties, which make them have different sensitivities to external stimuli. The different properties may include particle size, particle thickness, particle mass, particle density, particle material, particle shape, particle mobility in a fluid, etc., or any suitable combination thereof. Fig.26 As shown, different particles 14A, 14B, 14C and 14D have different sizes. This will cause different particles 14A, 14B, 14C and 14D to have different respective sensitivities to external stimuli. For example, when the particles include magnetically sensitive materials, different particles 14A, 14B, 14C and 14D can have different respective sensitivities to external magnetic fields. Different particles 14A, 14B, 14C and 14D can move different amounts in corresponding compartments 262A, 262B, 262C and 262D in response to the same stimulus. In some cases, one or more different types of particles 14A, 14B, 14C and 14D can move in response to a specific stimulus, while one or more other types of different particles 14A, 14B, 14C and 14D do not move in response to a specific stimulus. For example, in response to a relatively weak stimulus, particle 14A can move, and particle 14D can remain in the same position.

[0209] In some applications, different particles 14A, 14B, 14C and 14D can be located in the same or similar fluids. In some other applications, two or more different particles 14A, 14B, 14C and 14D can be in different fluids that affect particle motion. For example, under the same environmental conditions, different fluids can have different viscosities. As another example, different fluids can be phase-change materials that change phases at different corresponding temperatures. Phase-change materials can be used so that the particles in this phase-change material only move when the temperature is higher or lower than the threshold temperature.

[0210] The measurement circuitry may generate a comparative measurement based on comparative measurements associated with at least two of the compartments 262A-262D. Measurements associated with at least two of the compartments 262A-262D may be generated sequentially. Measurements associated with at least two of the compartments 262A-262D may be generated simultaneously. The measurement circuitry may generate measurements associated with individual compartments 262A-262D. Comparing measurements associated with individual compartments may improve measurement sensitivity and / or accuracy. The measurement circuitry may be implemented in accordance with any suitable principles and advantages of the measurement circuitry disclosed herein. As an example, the measurement circuitry may be implemented in accordance with Figure 7 Any suitable principles and advantages of the measurement circuit 73 can be implemented.

[0211] Fig.27A is an isometric view of a system 270 having a plurality of compartments 272A, 272B, 272C, and 272D, each compartment including a particle 14, according to one embodiment. Fig.27B 272A, 272B, 272C and 272D. Compartments 272A, 272B, 272C and 272D can be separated particle spaces. Each of compartments 272A to 272D can be an isolated space in which particle 14 can move freely. Particle 14 can be in the fluid in each particle space. The motion of particle 14 can be detected in one or more of compartments 272A to 272D. In some applications, compartments 272A, 272B, 272C and 272D can include particles 14 of the same type.

[0212] System 270 can include multiple relatively small particle spaces in the form of compartments 272A, 272B, 272C and 272D. Particles in different particle spaces can be isolated from each other. Measurements related to two or more separate compartments 272A, 272B, 272C and 272D can be generated. Measurements associated with each of compartments 272A, 272B, 272C and 272D can be generated. The measurement can indicate that a part of a chip or system functions normally. Or, the measurement can indicate that a part of a chip or system may be damaged or unreliable. By comparing multiple measurements associated with each separate compartment 272A, 272B, 272C or 272D, a comparative measurement indicating whether there is a problem with some parts of a chip or system can be generated. This can box a part of a chip or system, rather than boxing the entire chip or system. Comparative measurements can indicate the location of the problem.

[0213] In system 270, a first side of each compartment 272A to 272D may include electrical contacts. In some applications, the electrical contacts may cover the entire first side of the compartment. A second side of the compartment may include one or more electrical control pads, where the second side is opposite the first side. With multiple connections, better reliability may be achieved.

[0214] Figures 28A to 28E An example of a compartment and integrated structure according to an embodiment is shown. A series of such compartments can be used to generate comparative measurements. Figures 28A to 28E Measurements associated with a single compartment of a plurality of compartments may be used to generate comparative measurements, using any suitable principles and advantages of. Fig.28A and 28C The compartments to 28E may be sealed enclosures.Any suitable principles and advantages of these embodiments may be implemented with each other and / or with other embodiments disclosed herein.

[0215] Fig.28A A compartment according to an embodiment is shown. The compartment shown includes particles 14 and an integrated magnetic structure 282 within a fluid. The particles 14 can be magnetically sensitive. The integrated magnetic structure 282 can be positioned on the outer surface of the compartment. The integrated magnetic structure 282 can generate a magnetic field. The integrated magnetic structure 282 can provide a bias. The integrated magnetic structure 282 can include a meandering conductor, a two-phase conductive path, or any other suitable magnetic structure. The integrated magnetic structure 282 can generate a changing magnetic field. The compartment can include one or more contacts 284, such as bumps, terminals, or other electrical connections. One or more contacts 284 can be located on the active side of the compartment. One or more conductive traces 285 can connect one or more contacts 284 to the integrated magnetic structure 282.

[0216] Fig.28BExample patterned magnetic structures are shown. These magnetic structures can be formed by any suitable method, such as deposition. The magnetic structures can have any suitable shape or pattern for a particular application. The magnetic structures can include conductive materials. The example magnetic structures can implement suitable integrated magnetic structures disclosed herein, such as Fig.28A and / or Fig.28C The integrated magnetic structure 282 can be combined with a conductive structure that can generate a magnetic field (such as an RFID coil, a meandering structure, etc.) and modified according to the specifications of the specific application.

[0217] Fig.28C A compartment according to another embodiment is shown. Fig.28C The compartment is in Fig.28A Different locations of the compartments have integrated magnetic structures and different electrical connections to the electrical contacts. Fig.28C As shown, an integrated magnetic structure 282 can be located within the compartment. The integrated magnetic structure 282 can be electrically connected to one or more electrical contacts 284 via conductive traces 286 and vias 287 extending through the compartment wall.

[0218] The sensing structure may be included within the compartment.The sensing structure may include a conductive region that may make physical contact with the particle and produce a discernible electrical output.

[0219] Fig.28D A compartment with a sensing structure according to an embodiment is shown. Fig.28D In the compartment shown, when the conductive particles 14 are in physical and / or electrical contact with the conductive sensing structure 288, the conductive sensing structure 288 can generate an electrical output. The electrical output can indicate when the particles 14 are aggregated and / or concentrated, and when they are in physical and / or electrical contact with the conductive sensing structure 288. The conductive sensing structure 288 can be electrically connected to one or more electrical contacts 284 through one or more through holes 287. One or more electrical contacts 284 can be electrically connected to any suitable processing circuit and / or ASIC. The processing circuit and / or ASIC may include a measurement circuit. The measurement circuit can generate a comparative measurement value based on the measurement value associated with each compartment having a sensing structure (such as the conductive sensing structure 288).

[0220] An integrated structure for concentrating particles and a sensing structure may be included in the compartment. The integrated structure may be a magnetic structure arranged to aggregate and / or concentrate particles in the compartment. The sensing structure may sense the aggregation and / or concentration of particles.

[0221] Fig.28E A compartment with integrated clustering structure and sensing structure according to an embodiment is shown. Fig.28EIn the compartment shown, the aggregation structure 289 can cause the particles 14 to aggregate in a specific area. This aggregation may be a response to an external stimulus. For example, the aggregation structure 289 can be a magnetic structure that attracts the particles 14, and in the presence of a specific magnetic stimulus, the particles 14 can be aggregated at a specific location of the integrated aggregation structure 289. When the conductive particles 14 are aggregated at a specific location, the conductive sensing structure 288 can generate an electrical output. The electrical output can be provided to a measurement circuit through one or more electrical contacts 284 to generate a comparative measurement value.

[0222] An array of compartments containing particles can be used to generate comparative measurements. The array can be located in a region of interest of a system for generating comparative measurements. Each compartment of the array can include a separate housing containing magnetically susceptible particles. The particles can be contained in a fluid or gel within a single compartment.

[0223] Fig.29 An array 290 of compartments 292A to 2921 according to one embodiment is shown, each compartment including particles 14. In some applications, each compartment 292A to 2921 includes the same or similar particles 14 in the same or similar fluid or gel. Array 290 can be used to locate measurements. In some cases, one or more compartments of the array may include different types of particles (e.g., one or more of size, shape, configuration, etc.). Different types of particles can be selected to sense stimuli of a specific range and / or amplitude. By sensing the position and / or movement of different particle types in the presence of the same or similar stimuli, more accurate comparative measurements can be produced. In some cases, one or more compartments of the array may include different types of fluids or dielectric materials containing particles. Different types of fluids or dielectric materials can be selected to sense stimuli of a specific range and / or amplitude. By sensing the position and / or movement of particles in different types of fluids or dielectric materials in the presence of the same or similar stimuli, more accurate comparative measurements can be produced.

[0224] Depending on the application, a series of discrete particle compartments can be arranged to sense certain directional fields, the presence of magnetic bodies or magnetic fields, the movement of magnetic fluids or other media. In some cases, multiple compartment arrays with particles can be implemented to generate different types of comparative measurements and / or generate comparative measurements at different locations. The arrays and / or compartments can be close to one or more of a channel, a pipe, a surface, integrated with a module, etc., or any suitable combination thereof. In addition, depending on the specifications of the application, multiple compartments can be located in a non-orthogonal array (e.g., radially or randomly or at a defined position relative to the monitored area).

[0225] In some applications, the compartments may include particles in different dielectric materials. A comparative measurement may be generated based on measurements associated with different compartments (such as containers or sealed enclosures) having different dielectric materials. The comparative measurement may be indicative of temperature.

[0226] Fig.30 A plurality of containers 302A, 302B, 302C, and 302D are shown according to one embodiment, wherein particles 14 are located in different dielectric materials 306A, 306B, 306C, and 306D, respectively. The containers 302A to 302D may be arranged in an array. The different dielectric materials 306A, 306B, 306C, and 306D may have different properties, such as different melting points, different vaporization temperatures, etc. The different containers 302A to 302D may be positioned close enough to each other so that they experience similar temperatures.

[0227] Temperature can be detected based on the movement or non-movement of particles in containers 302A to 302D. For example, when the movement of particles 14 is detected in containers 302A, 302B, and 302C having dielectric materials 306A, 306B, and 306C, and no movement of particles 14 is detected in container 302D having dielectric material 306D, this can indicate that the temperature is within a range from (a) higher than the highest temperature that causes one of dielectric materials 306A, 306B, or 306D to transition to a mobile state of particles 14 to (b) lower than the temperature at which dielectric material 306D transitions to a mobile state of particles 14. Such temperature detection can be more accurate than detecting temperature based on the movement of particles 14 in a single container in containers 302A to 302D because such temperature can determine that the temperature is within a range having an upper limit and a lower limit. The measurement circuit can process the output of the sensor associated with each of containers 302A to 302D and output a temperature indication. Such a structure can provide an indication of the temperature range to which the system is exposed.

[0228] A system may include multiple compartments, where each compartment includes particles of different sizes. Fig.31 A system including multiple compartments 312A, 312B, and 312C having particles 14A, 14B, and 14C of different sizes is shown according to one embodiment. Each of the compartments 312A, 312B, and 312C may include an integrated sensing structure and / or an integrated biasing structure. Fig.31 As shown, compartments 312A, 312B, and 312C may be connected to one another. Particles 14A, 14B, and 14C may be sized such that they are held within respective compartments 312A, 312B, and 312C.

[0229] In certain embodiments, different compartments may be connected. The combination of different compartments with different particle sizes may facilitate a variety of different uses. For example, different compartments may implement different stirring steps for processing and / or analyzing fluids passing through the system. Such a system may include connected compartments enclosed with particles of different sizes. Each compartment may be configured to manipulate and / or stir the fluid in each chamber differently. Alternatively or in addition, the different particle sizes in each compartment may produce different sensitivities and / or responses to the material passing through each connected compartment. Depending on the specifications of the application, each compartment may be configured in a different shape and / or size and contain particles of different sizes (responding differently to stimuli). This may result in the fluid in each compartment being manipulated / stirred in a different manner. Each compartment may also contain one or more heating elements to treat or process the fluid passing through the connected compartments in a desired manner according to the specifications of the application. This may be part of an analytical process where a certain aspect or characteristic of the fluid is being measured and / or recorded.

[0230] Multiple compartments with different magnetic particle sizes can be used to construct an enhanced liquid chromatography system. Liquid chromatography is a method for separating and detecting different ionic species (such as C1 - Br - ,I - 、NO3 - Liquid chromatography can be used in a variety of applications (e.g., pharmaceutical and / or any industrial application that requires knowledge of the ionic composition of a sample). Fig.31 In a liquid chromatography system with compartments 312A, 312B and 312C, a liquid sample flows through a first compartment 321A or chamber containing specially constructed particles / beads. Different ions in the sample will pass through all connected compartments 312A, 312B and 312C, and they interact with these particles / beads to different degrees, so the ions that interact with the particles / beads the least can leave the compartment first (enter the next compartment). Ions that interact more with particles / beads can leave the compartment last. Particles / beads may be sensitive to magnetism. There can be a sensor (e.g., a conductivity sensor) at the end of the compartment that can quantify the concentration of each ion type in the last compartment and / or other distinguishable properties of the resulting material. Different compartments with particles / beads of different sizes can provide enhanced sensitivity and / or resolution or ion separation, etc. At the same time, electrodes can be included in each compartment to detect (e.g., electrochemically) different analytes separated in the sample by interacting with the beads. In addition to electrodes, other elements, such as one or more heaters, etc., can also be included to further manipulate the sample as it passes through the compartment.

[0231] In some applications, magnetically susceptible particles may be contained within multiple fluid channels. Figures 32A to 32DExample embodiments of such fluid channels are discussed. Different particle types with different properties can be included in different corresponding fluid channels. In response to magnetic stimulation, at least some of the particles in the fluid channels can move. The movement and / or position of the particles can be sensed to determine the position, concentration, or other detectable characteristics to make measurements based on the particles in the fluid channels. Multiple measurements can be compared to generate comparative measurements.

[0232] Fig.32A Fluid channels 322A and 322B including corresponding particles 14A and 14B according to an embodiment are shown. Fluid channels 322A and 322B are example compartments including particles for generating comparative measurements. Using different particles 14A and 14B in different fluid channels 332A and 332B can achieve higher measurement sensitivity. This structure can be used to detect the presence of magnetic bodies outside the concentric structure and / or through the central opening. The shape, size, material and / or structure of the channel can be modified and optimized according to the specifications of the application.

[0233] In some applications, Fig.32A The system can detect and / or react to a magnetic field passing through the center of the structure or outside of the structure. For example, fluid channels 322A and 322B can be concentric tubes. Fig.32A In the embodiment, the first fluid channel 322A is located around the second fluid channel 322B. As shown in the figure, in a plan view, the first fluid channel 322A can surround the second fluid channel 322B. The fluid channels 322A and 322B can be concentric. The size and shape of the fluid channels 322A and 322B can be adjusted for specific applications.

[0234] Fluid channel 322A may include magnetically sensitive particles 14A having different sensitivity to magnetic fields than magnetically sensitive particles 14B in fluid channel 322B. For example, due to the size, mass, ability to move within a compartment, etc., of particle 14A, or any suitable combination thereof, the different sizes may cause particle 14A to have different magnetic field sensitivity than particle 14B. Particles 14A and 14B may be selected based on desired system specifications and / or measurement sensitivity.

[0235] Compartments 322A and 322B may include the same or similar fluids and / or materials. Alternatively, particles 14A and 14B in each compartment 322A and 322B may be contained in different fluids and / or materials.

[0236] Fig.32B and 32C 324 can be positioned around the fluid channels 322A and 322B. The fluid channels 322A and 322B can be positioned around the biasing structure 324, for example, as Fig.32B and 32CAs shown. The bias structure 324 can generate a magnetic field when turned on. Fig.32B In the embodiment, the bias structure 324 is closed and no magnetic field is generated. When the bias structure 324 is closed, the particles 14A and 14B can be in any suitable position within the fluid channels 322A and 322B. Fig.32C In the embodiment, bias structure 324 is turned on and generates a magnetic field. When bias structure 324 generates a magnetic field, particles 14A and 14B can be aligned relative to the magnetic field and / or magnetic field lines, for example, as Fig.32C The biasing structure can reset the particle position, and the particles are intentionally moved to a specific area before the sensing cycle begins.

[0237] In some applications, a biasing structure including a permanent magnet or other structure with fixed magnetic properties may be positioned around the fluid channel. Fig.32D and 32E A biasing structure 325 is shown positioned around fluid channels 322A and 322B, wherein the biasing structure 325 has fixed magnetic properties and generates a magnetic field.

[0238] At least some particles 14A and / or 14B may move in response to magnetic stimulation from magnetic field source 326. Such movement may correspond to Fig.32D The particle position shown is Fig.32E As magnetic field source 326 moves closer to fluid channels 322A and 322B, particles 14A and 14B may be moved and / or aligned in a manner that: (1) causes the particles to be concentrated in a particular orientation and / or concentration and / or (2) produces a distinguishable and / or detectable feature. Fig.32E Display, relative to Fig.32D , the particles can move in response to the magnetic field source 326 moving toward the fluid channels 322A and 322B.

[0239] The measurement circuit can be based on comparison and Fig.32D The first measurement value associated with the particle position and Fig.32E The first measurement and the second measurement associated with the corresponding particle positioning are used to generate a comparative measurement value. The first measurement and the second measurement can both be associated with two different types of particles 14A and 14B, which have different sensitivities to the magnetic stimulation provided by the magnetic field source 326. Such measurements can be performed sequentially. Comparing these measurements can improve the measurement sensitivity and / or accuracy relative to a single measurement. In some applications, two measurements associated with two groups of different compartments with different particles can be performed. Such measurements can be performed sequentially or simultaneously. In some applications, three or more measurements associated with three or more groups of separate compartments with different particles can be performed. The measurement circuit can be implemented according to any suitable principles and advantages of the measurement circuits disclosed herein. As an example, the measurement circuit can be implemented according to Figure 7Any suitable principles and advantages of the measurement circuit 73 can be implemented.

[0240] Fig.32B and 32C The biasing structure 324 and Fig.32D and 32E The biasing structure 325 is an example biasing structure located around a compartment including magnetically sensitive particles. Other biasing structures can be implemented according to any suitable principles and advantages disclosed herein. For example, a biasing structure with a curved shape can be positioned around one or more compartments. Such a biasing structure with a tortuous shape can be located above and below a compartment. The biasing structure can be combined with any suitable combination of features of the compartments disclosed herein.

[0241] Fig.33A and 33B A fluid channel 332 with different types of particles 14A and 14B is shown according to an embodiment. These figures show that different types of particles can be contained in one compartment. Comparative measurements can be generated based on two or more measurements associated with particles 14A and 14B in the fluid channel 332. Particles 14A and 14B can be magnetically sensitive particles. Such magnetically sensitive particles can have different magnetic field sensitivities and due to their different properties, such as one or more of size, mass, ability to move within the fluid channel 332, etc. Comparing multiple measurements associated with at least two types of particles 14A and 14B can improve measurement sensitivity (1) relative to two measurements associated with a single type of particle, and (2) relative to a single measurement associated with at least two types of particles.

[0242] exist Fig.33A , bias structure 324 is in an open state. When bias structure 324 is open, particles 14A and 14B can be aligned along the magnetic flux lines. An external magnetic field can be applied to compartment 332 to cause at least some particles 14A and 14B to align relative to Fig.33B The position shown in FIG. 1 is moved. This can be used as a reset function. Two measurements associated with particles 14A and 14B, where at least some of these particles are in different positions, can be compared to produce a comparative measurement. In some applications, two measurements associated with different fluid compartments 332, each compartment 332 including particles 14A and 14B, can be compared to produce a comparative measurement.

[0243] in conclusion

[0244] In the above embodiments, the apparatus, system and method for applying a magnetic field based on the position detection of at least one particle in a container are described in conjunction with specific embodiments. However, it should be understood that the principles and advantages of the embodiments can be applied to any other system, device or method requiring magnetic field detection.

[0245] The principles and advantages described herein can be implemented in various devices. Examples of such devices may include, but are not limited to, consumer electronics, components of consumer electronics, electronic test equipment, vehicle-mounted electronics, industrial electronics, etc. Examples of consumer electronics components may include clock circuits, analog-to-digital converters, amplifiers, rectifiers, programmable filters, attenuators, frequency conversion circuits, etc. Examples of electronic devices may include memory chips, memory modules, circuits of optical networks or other communication networks, and disk drive circuits. Electronic products may include, but are not limited to, wireless devices, mobile phones (e.g., smartphones), cellular base stations, phones, televisions, computer monitors, computers, handheld computers, tablet computers, laptops, wearable computing devices, vehicle-mounted electronic systems, microwave ovens, refrigerators, stereo systems, digital video recorders (DVRs), digital music players, radios, cameras, digital cameras, portable memory chips, washing machines, dryers, washing machines / dryers, copiers, fax machines, scanners, watches, smart watches, clocks, wearable health monitoring devices, etc. In addition, the device may include unfinished products.

[0246] Unless the context clearly requires otherwise, throughout the specification and claims, the words "include", "comprising", "having", etc. should be interpreted as inclusive and not exclusive or exhaustive; that is, in the sense of "including but not limited to". The word "coupled" or "connected" as generally used herein refers to two or more elements that can be directly connected or connected through one or more intermediate elements. In addition, the words "herein", "above", "below" and words of similar meaning used in this application shall refer to the entire application, not to any particular part of this application. Where the context permits, words used in the singular or plural in the detailed description may also include the plural or singular, respectively. When referring to a list of two or more items, the word "or" is intended to cover all the following interpretations of the word: any item in the list, all items in the list, and any combination of items in the list. All numerical values ​​provided herein are intended to include similar values ​​within measurement errors.

[0247] Additionally, unless specifically stated otherwise or understood otherwise in the context of use, conditional language used herein, such as "may," "might," "could," "for example," "such as," etc., is generally intended to convey that some embodiments include and other embodiments do not include certain features, elements, and / or states.

[0248] The teaching of the present invention provided herein can be applied to other systems, not necessarily the above-mentioned systems. The elements and actions of the various embodiments described above can be combined to provide further embodiments. The actions of the methods discussed herein can be appropriately performed in any order. In addition, the actions of the methods discussed herein can be performed serially or in parallel as needed.

[0249] Although certain embodiments of the present invention have been described, these embodiments are presented only by way of example and are not intended to limit the scope of the present disclosure. In fact, the new methods and systems described herein may be embodied in various other forms. In addition, various omissions, substitutions, and changes may be made to the form of the methods and systems described herein without departing from the spirit of the present disclosure. The attached claims and their equivalents are intended to cover forms or modifications that fall within the scope and spirit of the present disclosure. Therefore, the scope of the present invention is defined by reference to the claims.

Claims

1. A method comprising: generating a first measurement and a second measurement based on positions of particles within the one or more compartments, wherein at least some of the particles are configured to move in response to an external stimulus; and The comparative measurement is provided based on comparing at least a first measurement with a second measurement, wherein the first and second measurements are associated with two or more types of particles and / or two or more compartments. 2 . The method of claim 1 , wherein the external stimulus is a magnetic field and the comparative measurement is indicative of the magnetic field. The method of claim 1 , wherein the comparison measurement indicates that the temperature is within a temperature range.

4. The method of claim 1, wherein the comparative measurement is indicative of a force applied to the one or more compartments.

5. A method according to any preceding claim, wherein the particles are magnetically sensitive and are present in at least one fluid.

6. A method according to any preceding claim, wherein the first and second measurements are associated with the two or more types of particles. The method of claim 6 , wherein the two or more types of particles have different magnetic susceptibilities.

8. The method of claim 6 or 7, wherein the two or more types of particles have at least one of different sizes or different shapes.

9. A method according to any preceding claim, further comprising resetting the position of the particle before generating the first measurement.

10. A method according to any preceding claim, wherein the first and second measurements are associated with the two or more compartments.

11. The method of claim 10, wherein the two or more compartments comprise different fluid pathways.

12. The method of claim 10 or 11, wherein the two or more compartments comprise different sealed enclosures.

13. The method of any one of claims 10 to 12, wherein the two or more compartments comprise different dielectric materials in different corresponding compartments of the two or more compartments, and the different dielectric materials change viscosity in response to changes in temperature.

14. The method of any one of claims 10 to 13, wherein the particles are in a different fluid in each of the two or more compartments.

15. A method according to any preceding claim, wherein the one or more compartments comprise an integrated sensing structure.

16. A method comprising: generating a first measurement and a second measurement based on the position of the magnetically susceptible particles within the compartment; and A comparative measurement is provided based on comparing at least a first measurement to a second measurement, wherein the first and second measurements are associated with two or more compartments.

17. A system comprising: a first compartment comprising one or more first particles, wherein the one or more first particles are configured to move in response to an external stimulus; a second compartment comprising one or more second particles; and A measurement circuit is configured to generate a measurement based on comparing a first measurement associated with the position of the one or more first particles and a second measurement associated with the position of the second particle.

18. The system of claim 17, wherein the external stimulus is a magnetic field and the measurement is indicative of the magnetic field.

19. The system of claim 17, wherein the measurement indicates a temperature within a temperature range.

20. The system of any one of claims 17 to 19, wherein the one or more first particles are in a first fluid, the one or more second particles are in a second fluid, and the first fluid is a different type of fluid than the second fluid.

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