Sealing ring coating tool, coating machine and coating method

Abstract

The invention discloses a sealing ring coating tool, a coating machine and a coating method, relates to the field of vacuum coating, and is used for coating the inner wall of a sealing ring. The sealing ring coating tool comprises a supporting rod, a supporting seat and a clamping part, the support bar is configured to be rotatable. The supporting seat comprises a first through hole; the supporting rod penetrates through the first through hole, and the supporting base is installed on the supporting rod in a lifting mode. The clamping part comprises a supporting frame and a plurality of telescopic arms; the supporting frame comprises a body and a plurality of extending ends. The body comprises a second through hole, and the multiple extending ends are dispersedly installed on the periphery of the body. The supporting rod penetrates through the second through hole, and the supporting frame is rotatably installed on the supporting base. The telescopic arms and the extending ends are arranged in a one-to-one correspondence manner; one end of the telescopic arm is mounted at the extending end, and the mounting position of the telescopic arm relative to the extending end is adjustable; a lug boss is arranged at the other end of the telescopic arm; the protruding parts of all the telescopic arms clamp the outer wall of the sealing ring together. According to the scheme, the coating efficiency is high, and coating is more uniform.

Description

Technical Field

[0001] The invention relates to the field of vacuum coating, and in particular to a sealing ring coating tool, a coating machine and a coating method. Background Art

[0002] Diamond-like carbon coating technology can reduce the friction coefficient of the sealing ring surface, reduce the viscous resistance with the metal pair, and increase the service life of the sealing ring, so it has been widely used in the field of mechanical seals. For vacuum coating machines, the internal space size of the vacuum chamber is fixed. Under the condition that the coating time and cost of each coating remain unchanged, the more sealing rings are processed in a single process, the lower the coating cost and the higher the processing efficiency. Summary of the invention

[0003] The inventors have found that there are at least the following problems in the prior art: In order to reduce the coating cost of the sealing ring and increase the single furnace loading capacity of the vacuum coating machine, the sealing ring is bent to reduce the space occupied by the sealing ring. However, this method can only be applied to sealing rings with reduced hardness and strong elasticity such as nitrile rubber and EPDM rubber, and can only coat the outer wall of the sealing ring. For oil seals with higher hardness, it is difficult to bend, and forced bending can easily damage the sealing ring. The prior art cannot coat the inner wall of such sealing rings.

[0004] The invention provides a sealing ring coating tool for coating the inner wall of the sealing ring.

[0005] An embodiment of the present invention provides a sealing ring coating tool, comprising:

[0006] A support rod configured to be rotatable;

[0007] The support seat comprises a first through hole; the support rod passes through the first through hole, and the support seat is liftably mounted on the support rod;

[0008] The clamping part includes a support frame and a plurality of telescopic arms; the support frame includes a main body and a plurality of protruding ends; the main body includes a second through hole, and the plurality of protruding ends are dispersedly installed on the outer periphery of the main body; the support rod passes through the second through hole, and the support frame is rotatably installed on the support seat; the telescopic arms are arranged one-to-one with the protruding ends; one end of the telescopic arm is installed on the protruding end, and the installation position of the telescopic arm relative to the protruding end is adjustable; a protrusion is provided at the other end of the telescopic arm; the protrusions of all the telescopic arms jointly clamp the outer wall of the sealing ring.

[0009] In some embodiments, the support rod passes through the center of the first through hole; and / or, the support rod passes through the center of the second through hole.

[0010] In some embodiments, the support base comprises:

[0011] A seat body, provided with the first through hole; and

[0012] Two ear plates are arranged in pairs, and each ear plate is fixedly connected to the seat body; the main body of the support frame is rotatably mounted on the ear plates.

[0013] In some embodiments, each of the ear plates is located in a second through hole of the body, and an inner wall of the second through hole contacts an outer wall of each of the ear plates and is rotatably connected thereto.

[0014] In some embodiments, the two ear plates are respectively provided with a third through hole, and the central axes of the two third through holes coincide with each other.

[0015] In some embodiments, at least one of the extension ends is configured as an elongated strip, and an end of at least one of the extension ends away from the body is provided with a sink and a fourth through hole connected to the sink; one end of the telescopic arm is located in the sink;

[0016] The sealing ring coating tool also includes a fastener, which passes through the oblong hole to connect the telescopic arm and the protruding end.

[0017] In some embodiments, the length of the oblong hole is greater than the diameter of the fastener, and the installation position of the telescopic arm in the sink is adjustable. The installation position of the telescopic arm in the sink is adjusted by adjusting the position of the fastener in the oblong hole.

[0018] In some embodiments, the support seats and the support frames are arranged in one-to-one correspondence, and multiple groups of the support seats and support frames are dispersedly arranged along the length direction of the support rod.

[0019] In some embodiments, each of the support frames includes at least three protruding ends, and the three protruding ends are evenly arranged along the outer circumference of the body.

[0020] In some embodiments, each of the support frames includes four evenly distributed protruding ends, wherein two opposite protruding ends are located on the same straight line.

[0021] An embodiment of the present invention further provides a coating machine, comprising a sealing ring coating tool provided by any technical solution of the present invention.

[0022] In some embodiments, the coating machine further comprises:

[0023] A driver, on which the support rod of the sealing ring coating tooling is mounted to rotate under the drive of the driver; and

[0024] an ion source disposed adjacent to the support rod;

[0025] A vacuum chamber, wherein the ion source and the sealing ring coating tooling are both located in the vacuum chamber.

[0026] The embodiment of the present invention also provides a sealing ring coating method, comprising the following steps:

[0027] A plurality of sealing rings are installed on the sealing ring coating tooling provided by any technical solution of the present invention, and each of the supporting frames is correspondingly installed with one sealing ring;

[0028] Adjusting the position of the telescopic arms on each of the support frames to clamp the outer wall of the sealing ring;

[0029] Adjusting the inclination angle of the support frame;

[0030] Driving the support rod to rotate, so as to drive each of the sealing rings located on the support rod to rotate;

[0031] The ion source is turned on to coat the inner wall of each sealing ring on the sealing ring coating tooling.

[0032] In some embodiments, the inclination angle of the support frame is 15° to 30°.

[0033] In some embodiments, the coating machine further comprises the following steps:

[0034] After the support rod rotates for a set time, the ion source and the support rod are stopped;

[0035] Remove the coated sealing ring.

[0036] The sealing ring coating tool provided by the above technical solution includes a support rod, a support seat and a clamping part, wherein the clamping part is used to clamp the sealing ring, and the inclination angle of the clamping part relative to the support seat can be changed. By changing the clamping length of the clamping part and the inclination angle of the clamping part relative to the support seat, the inner wall of the sealing ring is tilted, and the horizontally sprayed ions can be sprayed onto the inner wall of the tilted sealing ring, so that the inner surface of sealing rings of various sizes can be uniformly and effectively coated. At the same time, the sealing ring coating tool can be one or more to perform coating operations at the same time, and the coating efficiency is high; in addition, since the support rod is constantly rotating during the coating process, the coating of the inner wall of the sealing ring is more uniform in combination with the inclined arrangement of the clamping part. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of this application. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0038] Figure 1 A schematic diagram of the three-dimensional structure of a sealing ring coating tooling provided in an embodiment of the present invention.

[0039] Figure 2 A schematic diagram of the three-dimensional structure of a sealing ring coating tool clamping multiple sealing rings provided in an embodiment of the present invention.

[0040] Figure 3 A schematic diagram for calculating the number of sealing rings that can be coated by the sealing ring coating tool provided in an embodiment of the present invention.

[0041] Figure 4 A schematic diagram of a sealing ring coating method provided in an embodiment of the present invention.

[0042] Reference numerals:

[0043] 1. Support rod; 2. Support seat; 3. Clamping part; 4. Fastener; 5. Sealing ring;

[0044] 21. first through hole; 22. seat body; 23. ear plate; 231. third through hole; 31. support frame; 32. telescopic arm; 311. body; 312. extended end; 313. sink; 314. oblong hole; 315. second through hole; 316. fourth through hole; 317. bolt; 321. raised portion. DETAILED DESCRIPTION

[0045] Combine the following Figure 1 to Figure 4 The technical solution provided by the present invention is described in more detail. The description of the exemplary embodiments is merely illustrative and is by no means intended to limit the present disclosure and its application or use. The present disclosure can be implemented in many different forms and is not limited to the embodiments described herein. These embodiments are provided to make the present disclosure thorough and complete and to fully express the scope of the present disclosure to those skilled in the art. It should be noted that unless otherwise specifically stated, the relative arrangement of the components and steps, the composition of the materials, the numerical expressions and the numerical values ​​described in these embodiments should be interpreted as being merely exemplary and not limiting.

[0046] The words "first", "second" and similar words used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different parts. The words "include" or "comprise" and similar words mean that the elements before the word include the elements listed after the word, and do not exclude the possibility of also including other elements.

[0047] In the present disclosure, when a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device. When a specific device is described as being connected to other devices, the specific device may be directly connected to the other devices without an intermediate device, or may not be directly connected to the other devices but have an intermediate device.

[0048] All terms used in the present disclosure, including technical terms or scientific terms, have the same meanings as those understood by ordinary technicians in the field to which the present disclosure belongs, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries, such as general dictionaries, should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an idealized or extremely formal sense, unless explicitly defined herein.

[0049] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment are considered part of the specification.

[0050] The dimensions of the various parts shown in the drawings are not drawn according to the actual proportional relationship. In the drawings, the same reference numerals are attached to common structural elements or structural elements of the same type, and their repeated descriptions are appropriately omitted.

[0051] Figure 1 A schematic diagram of the three-dimensional structure of a sealing ring coating tooling provided in an embodiment of the present invention. Figure 2 A schematic diagram of the three-dimensional structure of a sealing ring coating tool clamping multiple sealing rings provided in an embodiment of the present invention. Figure 3 A schematic diagram for calculating the number of sealing rings that can be coated by the sealing ring coating tool provided in an embodiment of the present invention.

[0052] See also Figures 1 to 3 , an embodiment of the present invention provides a sealing ring coating tool, which is used to cooperate with an ion source to achieve coating on the inner wall of the sealing ring 5. The sealing ring 5 refers to a Y-ring or fluororubber made of polyurethane. This type of sealing ring 5 is also called a skeleton oil seal. The inner surface of the sealing ring 5 serves as a sealing working surface. The inventors found that the coating equipment in the related art can only coat the outer wall of a deformable conventional sealing ring 5, and cannot achieve coating of a sealing ring 5 such as a skeleton oil seal that is relatively hard, cannot be deformed, and uses the inner wall as a working surface. The technical solution provided in the embodiment of the present invention can achieve coating of the inner wall of this type of non-deformable sealing ring 5, and the diameter of the sealing ring 5 can be applicable in the range of 50mm to 400mm. The material of the sealing ring 5 can be a Y-ring made of polyurethane, polytetrafluoroethylene, polyurethane, fluororubber skeleton oil seal, and a metal skeleton.

[0053] See also Figure 1, the sealing ring coating tooling provided by the embodiment of the present invention includes a support rod 1, a support seat 2 and a clamping part 3. The support rod 1 is constructed to be rotatable. The support seat 2 includes a first through hole 21; the support rod 1 passes through the first through hole 21, and the support seat 2 is installed on the support rod 1 in a lifting manner. The clamping part 3 includes a support frame 31 and a plurality of telescopic arms 32. The support frame 31 includes a body 311 and a plurality of protruding ends 312; the body 311 includes a second through hole 315, and the plurality of protruding ends 312 are dispersedly installed on the periphery of the body 311. The support rod 1 passes through the second through hole 315, and the support frame 31 is rotatably installed on the support seat 2. The telescopic arms 32 are arranged one-to-one with the protruding ends 312; one end of the telescopic arm 32 is installed on the protruding end 312, and the installation position of the telescopic arm 32 relative to the protruding end 312 is adjustable; the other end of the telescopic arm 32 is provided with a protruding portion 321; the protruding portions 321 of all the telescopic arms 32 clamp the outer wall of the sealing ring 5 together. The protrusion 321 may specifically be a protrusion formed by bending the telescopic arm 32 .

[0054] The support rod 1 can be a threaded rod, and the bottom of the support rod 1 is installed on the driver. Driven by the driver, the support rod 1 rotates around its own axis, so it will drive the support frame 31 and the telescopic arm 32 installed on the support rod 1 to rotate synchronously. The threaded end of the support rod 1 is used to install the support seat 2. Each support rod 1 can be installed with one or more support seats 2. After the support seat 2 cooperates with the support rod 1, it can move up and down within its effective range.

[0055] The support seat 2 is provided with a first through hole 21, and the first through hole 21 is a screw hole. The first through hole 21 and the support rod 1 form a threaded connection, and by rotating the support seat 2, the position of the support seat 2 on the support rod 1 can be adjusted, thereby realizing the lifting and lowering of the support seat 2 relative to the support rod 1. In the above technical solution, the support rod 1 adopts a threaded rod, and the support seat 2 can be freely adjusted up and down along the threaded rod. Each support rod 1 can be installed with multiple support seats 2, and each support seat 2 cooperates with a clamping part 3 to position and install a sealing ring 5, so that multiple sealing rings 5 ​​can be flexibly clamped and coated on a support rod 1, which has wide applicability and is suitable for high-efficiency and large-scale production in different application scenarios in the industrial field.

[0056] The coating is to place a sealing ring 5 on the sealing ring coating tooling, and then place the entire sealing ring coating tooling into a vacuum chamber, and use an ion source to spray the film material onto the inner wall of the sealing ring 5 on the rotating sealing ring coating tooling. A plurality of support seats 2 can be installed on a support rod 1, each support seat 2 supports a clamping part 3, and the support frame 31 of each clamping part 3 cooperates with a plurality of telescopic arms 32 arranged around itself to clamp a sealing ring 5, and make the end face of the sealing ring 5 non-parallel to the horizontal plane, and the two form a certain angle θ, such as Figure 3As shown, the inner wall of the sealing ring 5 can be exposed, so that the ion jet sprayed horizontally by the ion source S can be evenly sprayed onto the inner wall of the sealing ring 5, ensuring the uniformity of the coating on the inner surface of the sealing ring 5.

[0057] The support seat 2 is used to support and install the support frame 31, and drive the support frame 31 to move up and down along the support rod 1. The support frame 31 is designed to install as many support seats 2 as possible on one support rod 1, and a sealing ring 5 is installed corresponding to each support seat 2. The total height of the support rod 1 is limited by the size of the vacuum chamber. When the total height of the support rod 1 has been determined, the position of the support seat 2 can be adjusted to change the spacing between multiple support seats 2 on the same support rod 1. Under the premise of satisfying the installation of the sealing ring 5, the more support seats 2 installed on a support rod 1, the more sealing rings 5 ​​that can be coated on the vacuum chamber at one time, and the higher the coating efficiency of the sealing ring 5.

[0058] Continuing to refer to, the support rod 1 passes through the center of the first through hole 21, and the first through hole 21 is located at the center of the support seat 2. The support rod 1 passes through the center of the first through hole 21 of the support seat 2, and the central axis of the support rod 1 coincides with the center line of the first through hole 21 of the support seat 2. When the support rod 1 rotates, the support seat 2 also rotates around the central axis of the support rod 1. During the rotation process, the support seat 2 also rotates around its own center line without eccentricity. The space occupied by the support seat 2 after rotation is small, which is conducive to the miniaturization of the vacuum chamber.

[0059] Continue to see Figure 1 In some embodiments, the support seat 2 includes a seat body 22 and two ear plates 23 arranged in pairs. The seat body 22 is generally rectangular or circular, and the seat body 22 is provided with a first through hole 21. Each ear plate 23 is a flat plate. Each ear plate 23 is fixedly connected to the seat body 22, specifically, each ear plate 23 is welded or bolted to the upper surface of the seat body 22.

[0060] The clamping portion 3 is rotatable relative to the support seat 2, which specifically means that the clamping portion 3 can be adjusted to a position at an angle with the support seat 2 before installation, and then the clamping portion 3 is fixedly connected to the support seat 2. After the support seat 2 and the clamping portion 3 are fixedly connected, during the coating operation, the clamping portion 3 cannot rotate relative to the support seat 2, and the clamping portion 3 is fixed relative to the support seat 2.

[0061] Specifically, the support frame 31 is rotatably connected to the ear plate 23 of the support seat 2. Specifically, the body 311 of the support frame 31 is provided with a second through hole 315, and the diameter of the second through hole 315 is larger than the diameter of the first through hole 21. The two ear plates 23 of the support seat 2 are located in the second through holes 315 of the support frame 31. The inner wall of the second through hole 315 contacts the outer wall of each ear plate 23, and the body 311 of the support frame 31 and the ear plate 23 of the support seat 2 are rotatably connected by bolts.

[0062] Continue to see Figure 1 In some embodiments, the two ear plates 23 are each provided with a third through hole 231, and the central axes of the two third through holes 231 coincide. The body 311 is correspondingly provided with a fourth through hole 316. A bolt 317 is installed in each third through hole 231 and its corresponding fourth through hole 316. The central axes of the two bolts 317 coincide. When it is necessary to rotate the support frame 31, first loosen the two bolts 317, then rotate the support frame 31 as a whole relative to the ear plate 23 to a set angle θ, and then use the bolts 317 to fix the support frame 31 and the ear plate 23. The support frame 31 is set to be inclined with respect to the horizontal plane, so that the inner wall of the sealing ring 5 installed on the support frame 31 can be exposed, so that the subsequent ion source can be sprayed onto the inner wall of the sealing ring 5. The above technical scheme realizes the flexible adjustment of the inclination angle of the sealing ring 5 by adjusting the inclination angle of the clamping portion 3, thereby meeting the demand for uniform coating processing on the inner surface of the sealing ring 5.

[0063] In some embodiments, each support frame 31 includes at least three extension ends 312, and the three extension ends 312 are evenly arranged along the outer periphery of the body 311. The body 311 adopts a rectangular structure, and an extension end 312 is provided at each corner of the body 311. That is, each support frame 31 includes four evenly distributed extension ends 312, wherein two opposite extension ends 312 are located on the same straight line. By adjusting the extension length of the telescopic arms 32, the distance between the end points of the two opposite telescopic arms 32 is equal to the diameter D of the sealing ring 5, thereby meeting the clamping and coating requirements of sealing rings 5 ​​of different specifications.

[0064] See also Figure 3 , the diameter of the sealing ring 5 is D, the inclination angle of the sealing ring 5 to the horizontal plane is θ, the height of the sealing ring coating tooling is H, and the maximum number M of sealing rings 5 ​​that can be processed by each support rod 1 at a time is determined by the following formula:

[0065]

[0066] When the size of the vacuum chamber cavity and the distance between the target and the electrode remain unchanged, the inner surfaces of the plurality of sealing rings 5 ​​can be coated simultaneously by adjusting the position of the support seat 2 by means of a screw.

[0067] See also Figure 3, the effective coating range L required for a single sealing ring 5 is determined by the following formula:

[0068] L=D·sinθ

[0069] Wherein, D is the diameter of the sealing ring 5, and θ is the inclination angle between the sealing ring 5 and the horizontal plane.

[0070] As described above, the body 311 includes a second through hole 315, and the support rod 1 passes through the second through hole 315. When the clamping part 3 is driven by the support rod 1 to rotate, the clamping part 3 also rotates around the center line of its second through hole 315. The clamping part 3 has almost no eccentricity during the rotation process, and the space occupied is small, which is conducive to miniaturization of the vacuum chamber.

[0071] Continue to see Figure 1 At least one of the extension ends 312 is configured as an elongated strip, and a recess 313 and an oblong hole 314 communicating with the recess 313 are provided at one end of the extension end 312 away from the body 311. One end of the telescopic arm 32 is located in the recess 313. The sealing ring coating tool further includes a fastener 4, which passes through the oblong hole 314 to connect the telescopic arm 32 and the extension end 312. A bent protrusion 321 is provided at the end of the telescopic arm 32 away from the extension end 312, and the protrusions 321 of the multiple telescopic arms 32 cooperate together to clamp the outer wall of the sealing ring 5.

[0072] The seal ring coating tool adopts a telescopic arm 32 design, which can meet the needs of fast clamping of seal rings 5 ​​of different specifications, and does not need to bend the seal ring 5. During the coating process, the seal ring 5 does not deform, which improves the processing efficiency of the seal ring 5 and reduces the coating cost. The length of the telescopic arm 32 can be adjusted according to the size of the seal ring 5, which is beneficial to improving the production efficiency of the seal ring 5 coating and is suitable for industrial mass production.

[0073] The extended end 312 is long and the telescopic arm 32 is also long, and the weight of the entire clamping part 3 is very light. Since the sealing ring coating tool is rotating during the coating process, the light weight of the clamping part 3 is conducive to reducing the difficulty of starting the sealing ring coating tool, and can also reduce energy consumption and save energy.

[0074] Continue to see Figure 1 In some embodiments, the length of the oblong hole 314 is greater than the diameter of the fastener 4, and the installation position of the telescopic arm 32 in the sink 313 is adjustable. The installation position of the telescopic arm 32 in the sink 313 is adjusted by adjusting the position of the fastener 4 in the oblong hole 314. By adjusting the position of the telescopic arm 32, the clamping portion 3 can clamp the outer wall of the sealing ring 5 of different sizes, so as to improve the versatility of the clamping portion 3.

[0075] See also Figure 2In some embodiments, the support seat 2 and the support frame 31 are arranged one by one, and multiple groups of support seats 2 and support frames 31 are dispersedly arranged along the length direction of the support rod 1.

[0076] An embodiment of the present invention further provides a coating machine, comprising a sealing ring coating tool provided by any technical solution of the present invention.

[0077] In some embodiments, the coating machine further includes a driver (not shown), an ion source (not shown) and a vacuum chamber (not shown). The support rod 1 of the sealing ring coating tool is installed on the driver to rotate under the drive of the driver; the ion source is arranged adjacent to the support rod 1; the ion source and the sealing ring coating tool are both located in the vacuum chamber.

[0078] Figure 4 Schematic diagram of the sealing ring coating method provided by an embodiment of the present invention. Figure 4 The embodiment of the present invention further provides a sealing ring coating method, comprising the following steps:

[0079] Step S100, install a sealing ring 5 on the sealing ring coating tooling provided by any technical solution of the present invention, and each support frame 31 is used to install a corresponding sealing ring 5. Install a support seat 2 and a corresponding clamping part 3 at the bottom of the support rod 1, and then install a sealing ring 5 on the clamping part 3. Then install a second support seat 2 and a corresponding clamping part 3 on the support rod 1, and then install a second sealing ring 5. In this order, continue to install the following sealing rings 5 ​​until the sealing ring 5 fills the entire support rod 1.

[0080] Step S200, adjusting the tilt angle of the support frame 31. The tilt angle of the support frame 31 determines the tilt angle of the sealing ring 5 after installation, and further determines the coating effect. In some embodiments, the tilt angle of the support frame 31 is 15° to 30°, specifically 15°, 20°, or 30°.

[0081] Step S300, adjusting the position of the telescopic arms 32 on each support frame 31 to clamp the outer wall of the sealing ring 5. The position of the telescopic arms 32 relative to the protruding ends 312 can be adjusted through the oblong holes 314 to clamp sealing rings 5 ​​of different sizes.

[0082] Step S400, driving the support rod 1 to rotate, and the support rod 1 drives the sealing rings 5 ​​located on the support rod 1 to rotate. Since the sealing rings 5 ​​are installed at an angle, during the rotation of the support rod 1, all the sealing rings 5 ​​installed on the support rod 1 rotate synchronously, so that the horizontally ejected ions can be evenly sprayed on various positions of the inner wall of the sealing ring 5.

[0083] Step S500, turn on the ion source to coat the inner wall of each sealing ring 5 on the sealing ring coating tool. The position of the ion source is fixed, and the ion source sprays ions horizontally, see Figure 3 During the rotation of the support rod 1 , the sealing ring 5 also rotates synchronously, and the ions adhere to the inner wall of the sealing ring 5 to achieve coating of the sealing ring 5 .

[0084] In some embodiments, the coating machine further comprises the following steps:

[0085] Step S600, after the support rod 1 rotates for a set time, the ion source and the support rod 1 are stopped. By controlling the rotation time of the support rod 1 and the spraying time of the ion source, the coating effect of the sealing ring 5 can be controlled.

[0086] Step S700, removing the coated sealing ring 5. After the coating is completed, the vacuum chamber is opened, the sealing ring coating tool is taken out, and then the coated sealing rings 5 ​​are taken out one by one from top to bottom.

[0087] The process implementation of the sealing ring coating method is as follows:

[0088] Place the support rod 1 on the driver, and the driver and the support rod 1 form a driving connection. Specifically, the rotation of the support rod 1 can be achieved by using a revolving gear shaft. The support base is tightened and fixed to the support rod 1 by bolts, so that the height of the support seat 2 can be adjusted up and down through the thread. The clamping part 3 is matched with the support seat 2, and the angle between the clamping part 3 and the support seat 2 is adjusted. The support seat 2 and the clamping part 3 are fixed by bolts to achieve the required angle of the skeleton oil seal coating. Adjust the length of the telescopic arm 32, and fix the telescopic arm 32 by bolts to achieve the required length of the sealing ring 5 (specifically, the skeleton oil seal coating). The sealing ring coating tooling realizes rotation, angle adjustment, and length adjustment, and meets the inner ring coating requirements of the sealing ring 5.

[0089] In the description of the present invention, it is necessary to understand that the terms "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the protection content of the present invention. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0090] In the description of the present invention, each technical feature may be combined with other technical features where feasible.

[0091] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein, but these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A sealing ring coating tool, characterized in that: include: A support rod (1) configured to be rotatable; The support seat (2) comprises a first through hole (21); the support rod (1) passes through the first through hole (21), and the support seat (2) is mounted on the support rod (1) in a liftable manner; The clamping portion (3) comprises a support frame (31) and a plurality of telescopic arms (32); the support frame (31) comprises a main body (311) and a plurality of protruding ends (312); the main body (311) comprises a second through hole (315), and the plurality of protruding ends (312) are dispersedly installed on the outer periphery of the main body (311); the support rod (1) passes through the second through hole (315), and the support frame (31) is rotatably installed on the support seat (2); the telescopic arms (32) are arranged in a one-to-one correspondence with the protruding ends (312); one end of the telescopic arm (32) is installed on the protruding end (312), and the installation position of the telescopic arm (32) relative to the protruding end (312) is adjustable; the other end of the telescopic arm (32) is provided with a protruding portion (321); the protruding portions (321) of all the telescopic arms (32) jointly clamp the outer wall of the sealing ring (5).

2. The sealing ring coating tool according to claim 1, characterized in that: The support rod (1) passes through the center of the first through hole (21), and the first through hole (21) is located at the center of the support seat (2); and / or the support rod (1) passes through the center of the second through hole (315).

3. The sealing ring coating tool according to claim 1, characterized in that: The support base (2) comprises: A seat body (22) is provided with the first through hole (21); and Two ear plates (23) are arranged in pairs, and each ear plate (23) is fixedly connected to the seat body (22); the main body (311) of the support frame (31) is rotatably mounted on the ear plate (23).

4. The sealing ring coating tool according to claim 3, characterized in that: Each of the ear plates (23) is located in a second through hole (315) of the body (311), and an inner wall of the second through hole (315) is in contact with an outer wall of each of the ear plates (23) and is rotatably connected thereto.

5. The sealing ring coating tool according to claim 4, characterized in that: The two ear plates (23) are respectively provided with a third through hole (231), and the central axes of the two third through holes (231) coincide with each other.

6. The sealing ring coating tool according to claim 1, characterized in that: At least one of the protruding ends (312) is constructed in an elongated strip shape, and one end of the at least one protruding end (312) away from the body (311) is provided with a sink (313) and an oblong hole (314) connected to the sink (313); one end of the telescopic arm (32) is located in the sink (313); The sealing ring coating tool also includes a fastener (4), and the fastener (4) passes through the oblong hole (314) to connect the telescopic arm (32) and the protruding end (312).

7. The sealing ring coating tool according to claim 6, characterized in that: The length of the oblong hole (314) is greater than the diameter of the fastener (4); the installation position of the telescopic arm (32) in the sink (313) is adjustable; and the installation position of the telescopic arm (32) in the sink (313) is adjusted by adjusting the position of the fastener (4) in the oblong hole (314).

8. The sealing ring coating tool according to claim 1, characterized in that: The support seats (2) and the support frames (31) are arranged in a one-to-one correspondence, and a plurality of groups of the support seats (2) and the support frames (31) are dispersedly arranged along the length direction of the support rod (1).

9. The sealing ring coating tool according to claim 1, characterized in that: Each of the support frames (31) comprises at least three protruding ends (312), and the three protruding ends (312) are evenly arranged along the outer circumference of the body (311).

10. The sealing ring coating tool according to claim 1, characterized in that: Each of the support frames (31) comprises four evenly distributed protruding ends (312), wherein two opposite protruding ends (312) are located on the same straight line.

11. A coating machine, characterized in that: It comprises the sealing ring coating tool as described in any one of claims 1 to 10.

12. The coating machine according to claim 11, characterized in that: Also includes: A driver, wherein the support rod (1) of the sealing ring coating tooling is mounted on the driver so as to rotate under the drive of the driver; An ion source is arranged adjacent to the support rod (1); as well as A vacuum chamber, wherein the ion source and the sealing ring coating tooling are both located in the vacuum chamber.

13. A sealing ring coating method, characterized in that: The following steps are involved: A plurality of sealing rings (5) are installed on the sealing ring coating tooling according to any one of claims 1 to 10, and each of the supporting frames (31) is correspondingly installed with one of the sealing rings (5); Adjusting the inclination angle of the support frame (31); Adjusting the position of the telescopic arms (32) on each of the support frames (31) to clamp the outer wall of the sealing ring (5); Driving the support rod (1) to rotate, thereby driving each of the sealing rings (5) located on the support rod (1) to rotate; The ion source is turned on to coat the inner wall of each sealing ring (5) located on the sealing ring coating tool.

14. The sealing ring coating method according to claim 13, characterized in that: The inclination angle of the support frame (31) is 15° to 30°.

15. The sealing ring coating method according to claim 1, characterized in that: The following steps are also included: After the support rod (1) rotates for a set time, the ion source and the support rod (1) are stopped; Remove the coated sealing ring (5).

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