Automatic dust removal device and automatic dust removal method

Abstract

The present invention discloses an automatic dust removal device and method. The automatic dust removal device includes a dust removal tank and an AGV dust removal vehicle. The dust removal tank includes an upper tank, a middle tank, and a lower tank. The side wall of the upper tank is provided with a first connection hole for connecting to a vacuum pump, and a dust bag is provided in the upper tank. The middle tank is provided with a second connection hole for connecting to a single crystal furnace. The lower tank includes a top plate, a bottom plate, and side plates. The top plate has a hollow area. A gate assembly is provided on the side of the top plate near the bottom plate. The gate assembly moves along the edge of the hollow area toward the center of the hollow area to seal the hollow area. The top plate, side plates, and bottom plate form a storage space for accommodating a dust box. The side plates include docking doors. The lower tank is also provided with a vent for introducing argon gas. The AGV dust removal vehicle includes a body and legs. The legs are elevating mechanisms. The body includes a first storage compartment and a second storage compartment for accommodating the dust box. The first storage compartment is located on the side of the second storage compartment away from the legs. The present invention achieves automatic dust removal and automatic dust box replacement.

Description

Technical Field

[0001] The present invention relates to the technical field of dust removal equipment, and more particularly, to an automatic dust removal device and an automatic dust removal method. Background Art

[0002] In existing monocrystalline silicon production workshops, the production process generates a large amount of harmful dust, such as oxides. After each single crystal pulling furnace is shut down, manual cleaning of these oxides and other dust is required to prevent them from affecting the next batch of single crystal silicon pulling. This requires the use of appropriate dust removal equipment. However, during this dust removal process, these oxides and other dust can accumulate in the enclosed space of the dust removal equipment, potentially leading to safety hazards such as dust explosions.

[0003] Therefore, it is urgent to provide an automatic dust removal device and an automatic dust removal method that can automatically clean dust such as oxides. Summary of the Invention

[0004] In view of this, the present invention provides an automatic dust removal device and an automatic dust removal method that can automatically clean dust such as oxides.

[0005] In one aspect, the present invention provides an automatic dust removal device, comprising a dust removal tank and an AGV dust removal vehicle, wherein:

[0006] The dust removal tank includes an upper tank, a middle tank and a lower tank connected in sequence, and the upper tank, the middle tank and the lower tank are arranged along a first direction, wherein,

[0007] A first connecting hole is provided on the side wall of the upper tank, and the first connecting hole is used to connect a vacuum pump. A dust removal bag is provided in the upper tank;

[0008] The middle tank is provided with a second connecting hole, and the second connecting hole is connected to the single crystal furnace;

[0009] Along the first direction, the lower tank includes a top plate and a bottom plate arranged opposite to each other, the top plate is provided with a hollow area, and a gate assembly is provided on a side of the top plate close to the bottom plate, and the gate assembly moves along the edge of the hollow area toward the center of the hollow area to close the hollow area; the lower tank also includes a side plate located between the top plate and the bottom plate, the top plate, the side plate and the bottom plate constitute an accommodating space, the accommodating space is used to place the dust collection box, and the side plate includes a docking door; the lower tank is also provided with a vent hole, and the vent hole is used to introduce argon gas;

[0010] The AGV dust removal vehicle includes a body and legs. The legs are a lifting mechanism. The body includes a first storage compartment and a second storage compartment arranged along a first direction. The first storage compartment is located on the side of the second storage compartment away from the legs. The first storage compartment and the second storage compartment are used to place dust boxes.

[0011] Optionally, the gate assembly includes an annular mounting plate, a first motor is provided on a side of the top plate close to the bottom plate, and an output shaft of the first motor is connected to the annular mounting plate to control the rotation of the annular mounting plate;

[0012] The top plate is fixedly connected with N fixing columns, and the mounting plate is provided with N oblong holes. The fixing columns are sleeved in the oblong holes, and the annular mounting plate rotates clockwise or counterclockwise; the inner edge of the annular mounting plate is provided with N rotating shafts, and the rotating shafts are arranged one-to-one corresponding to the oblong holes; the rotating shafts are sleeved with connecting rods, and the other end of the connecting rods is connected to a fan-shaped gate plate, and the N fan-shaped gate plates move along the edge of the hollow area toward the center of the hollow area to close the hollow area.

[0013] Optionally, a water pipe is provided on the inner wall of the side panel, and cold water flows into the water pipe.

[0014] Optionally, along the first direction, the water pipes are arranged in a U-shaped reciprocating pattern.

[0015] Optionally, the water inlet and the water outlet of the water pipe are both located on a side of the side plate close to the top plate.

[0016] Optionally, slide grooves are arranged in parallel at the bottom of the dust collection box; the bottom plate includes multiple first rollers, and a belt is sleeved on the outer side of the first roller. A first roller located at the end is connected to the output shaft of the second motor, and the belt is slidably connected to the slide groove.

[0017] Optionally, the first storage compartment and the second storage compartment each include a plurality of second rollers, a belt is sleeved on the outer side of the second roller, a second roller located at the end is connected to the output shaft of the third motor, and the belt is slidably connected to the slide groove.

[0018] Optionally, an infrared alignment point is provided on the outer periphery of the docking door, and an infrared emission point is provided on the AGV dust removal vehicle, and the infrared emission point corresponds to the infrared alignment point one by one.

[0019] Optionally, the outriggers of the AGV dust removal vehicle are hydraulic outriggers.

[0020] On the other hand, the present invention also provides an automatic dust removal method, which uses the above-mentioned automatic dust removal device, comprising:

[0021] Connect the vacuum pump to the first connecting hole through a flange, and connect the single crystal furnace to the second connecting hole through a flange;

[0022] The gate assembly moves from the center of the hollow area to the edge of the hollow area, and the hollow area opens;

[0023] A dust box is placed in the accommodating space;

[0024] The AGV dust removal vehicle moves to the lower tank position. There is no dust box in the second storage compartment. A new dust box is installed in the first storage compartment. The second storage compartment is aligned with the docking door.

[0025] Start dusting;

[0026] After the dust removal reaches the preset time, the gate assembly moves along the edge of the hollow area toward the center of the hollow area to seal the hollow area, argon is introduced into the lower tank to restore the lower tank to normal pressure, and the docking door is opened;

[0027] The dust box is placed in the accommodating space and transported to the second storage compartment;

[0028] Lower the legs so that the first storage compartment is aligned with the docking door;

[0029] transporting the new dust box in the first storage compartment into the accommodating space;

[0030] The gate assembly moves from the center of the hollow area to the edge of the hollow area, the hollow area opens, and dust removal continues;

[0031] The AGV dust removal vehicle returns to the dust treatment point.

[0032] Compared with the prior art, the automatic dust removal device and automatic dust removal method provided by the present invention achieve at least the following beneficial effects:

[0033] The automatic dust removal equipment provided by the present invention comprises: a dust removal tank and an AGV dust removal vehicle. The dust removal tank includes an upper tank, a middle tank and a lower tank. The side wall of the upper tank is provided with a first connecting hole for connecting to a vacuum pump, and a dust bag is provided in the upper tank; the middle tank is provided with a second connecting hole for connecting to a single crystal furnace; the lower tank includes a top plate, a bottom plate and a side plate. The top plate is provided with a hollow area for receiving oxides and other dust. A gate assembly is provided on the side of the top plate close to the bottom plate. The gate assembly moves along the edge of the hollow area toward the center of the hollow area to close the hollow area, forming an independent closed space in the lower tank, and the movement of the gate assembly can be realized; the top plate, side plate and bottom plate constitute an accommodating space for placing a dust box, and the side plate includes a docking door to facilitate the docking of the dust removal tank with the dust removal vehicle; the lower tank is also provided with an air vent, and argon gas is introduced to restore the lower tank to normal pressure, providing an environmental basis for subsequent docking with the AGV dust removal vehicle; the AGV dust removal vehicle includes a body and legs, and the legs are a lifting mechanism to realize automatic replacement of the dust box, improve the automation of the dust removal process, and can automatically clean oxides and other dust and automatically replace the dust box.

[0034] Of course, any product implementing the present invention does not necessarily need to achieve all of the technical effects described above at the same time.

[0035] Further features and advantages of the present invention will become apparent from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

[0037] Figure 1This is a structural schematic diagram of an automatic dust removal device provided by the present invention;

[0038] Figure 2 This is a schematic diagram of the structure of a dust removal tank provided by the present invention;

[0039] Figure 3 is a top view of the connecting plate;

[0040] Figure 4 It is a schematic diagram of the lower tank structure;

[0041] Figure 5 Schematic diagram of the dust box structure;

[0042] Figure 6 It is a schematic diagram of the structure of the top plate and gate plate assembly;

[0043] Figure 7 This is a schematic diagram of the SGV dust removal vehicle structure;

[0044] Figure 8 It is a top view of the water pipe structure;

[0045] Figure 9 This is a flow chart of an automatic dust removal method provided by the present invention;

[0046] Figure 10 This is another flow chart of an automatic dust removal method provided by the present invention;

[0047] 100-dust removal tank, 1-upper tank, 2-middle tank, 3-lower tank, 4-first connecting hole, 5-water pipe, 6-second connecting hole, 7-top plate, 8-bottom plate, 9-hollow area, 10-gate assembly, 11-side plate, 12-dust collection box, 121-chute, 13-docking door, 14-vent, 200-AGV dust removal vehicle, 16-support legs, 31-first storage compartment, 32-second storage compartment, 9-hollow area, 34-infrared alignment point, 35 infrared emission point, 19-annular mounting plate, 20-fixing column, 21-long circular hole, 22-rotating shaft, 23-connecting rod, 24-fan-shaped gate, 40-power interface, 15-connecting plate. DETAILED DESCRIPTION

[0048] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0049] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

[0050] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered part of the specification.

[0051] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0052] It should be noted that like reference numerals and letters refer to like items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0053] The present invention provides an automatic dust removal device, referring to Figure 1-Figure 7 , including a dust removal tank 100 and an AGV dust removal vehicle 200, wherein,

[0054] The dust removal tank 100 includes an upper tank 1, a middle tank 2 and a lower tank 3 connected in sequence, and the upper tank 1, the middle tank 2 and the lower tank 3 are arranged along the first direction y, wherein:

[0055] A first connecting hole 4 is provided on the side wall of the upper tank 1, and the first connecting hole 4 is used to connect a vacuum pump. A dust bag is provided in the upper tank 1;

[0056] The middle tank 2 is provided with a second connecting hole 6, and the second connecting hole 6 is connected to the single crystal furnace;

[0057] Along the first direction y, the lower tank 3 includes a top plate 7 and a bottom plate 8 arranged opposite to each other, the top plate 7 is provided with a hollow area 9, and a gate assembly 10 is provided on the side of the top plate 7 close to the bottom plate 8. The gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9; the lower tank 3 also includes a side plate 11 located between the top plate 7 and the bottom plate 8. The top plate 7, the side plate 11 and the bottom plate 8 constitute an accommodating space, and the accommodating space is used to place a dust box 12. The side plate 11 includes a docking door 13; the lower tank 3 is also provided with a vent 14, which is used to introduce argon gas;

[0058] The AGV dust removal vehicle 200 includes a body and a support leg 16. The support leg 16 is a lifting mechanism. The body includes a first storage compartment 31 and a second storage compartment 32 arranged along the first direction y. The first storage compartment 31 is located on the side of the second storage compartment 32 away from the support leg 16. The first storage compartment 31 and the second storage compartment 32 are used to place the dust box 12.

[0059] Specifically, the present invention provides an automatic dust removal device, including a dust removal tank 100 and an AGV dust removal vehicle 200, wherein:

[0060] The dust removal tank 100 includes an upper tank 1, a middle tank 2 and a lower tank 3 connected in sequence, and the upper tank 1, the middle tank 2 and the lower tank 3 are arranged along the first direction y, wherein:

[0061] A first connecting hole 4 is provided on the side wall of the upper tank 1, and the first connecting hole 4 is used to connect a vacuum pump, which can be used to create a negative pressure environment in the tank. A dust bag is provided in the upper tank 1 to collect dust during the dust removal process; the middle tank 2 is provided with a second connecting hole 6, and the second connecting hole 6 is connected to the single crystal furnace to provide a structural basis for dust removal; along the first direction y, the lower tank 3 includes a top plate 7 and a bottom plate 8 arranged opposite to each other, and the top plate 7 is provided with a hollow area 9, and the hollow area 9 is a closable design, and a gate assembly 10 is provided on the side of the top plate 7 close to the bottom plate 8, and the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area. Area 9, the gate assembly 10 is operated as a whole by a motor, and the electrical control realizes the closing and opening of the hollow area 9, so that the space of the lower tank 3 can be adjusted to be closed and open; the lower tank 3 also includes a side plate 11 located between the top plate 7 and the bottom plate 8. The top plate 7, the side plate 11 and the bottom plate 8 constitute an accommodating space, and the accommodating space is used to place the dust box 12. The side plate 11 includes a docking door 13, which is convenient for docking with the AGV dust removal vehicle 200 to improve the dust removal process; the lower tank 3 is also provided with a vent 14, which is used to introduce argon gas to restore the dust removal tank 100 to normal pressure, providing an environmental basis for docking with the AGV dust removal vehicle 200;

[0062] The AGV dust removal vehicle 200 includes a body and a support leg 16. The support leg 16 is a lifting mechanism. After the support leg 16 is lowered, the AGV dust removal vehicle 200 is centered in the dust removal tank 100, and the docking door 13 of the lower tank 3 can be docked with the AGV dust removal vehicle 200. The dust box 12 in the lower tank 3 is interchangeable with the dust box 12 in the AGV dust removal vehicle 200, thereby realizing automatic replacement of the dust box 12 and improving the automation of the dust removal process; the body includes a first storage compartment 31 and a second storage compartment 32 arranged along the first direction y, and the first storage compartment 31 is located on the side of the second storage compartment 32 away from the support leg 16. The first storage compartment 31 and the second storage compartment 32 are used to place the dust box 12.

[0063] It should be noted that the alignment process of the docking door 13 and the AGV dust removal vehicle 200 is achieved through infrared alignment, which improves the automation of the dust removal process and the accuracy of replacing the dust box 12, thereby improving the dust removal efficiency.

[0064] It should be noted that an automated guided vehicle (AGV) is an industrial vehicle that automatically or manually loads goods, travels along a set route, or tows a cargo trolley to a designated location, and then automatically or manually loads and unloads the goods. According to Japanese JISD6801, an AGV is a battery-powered, automatically controlled industrial vehicle. Automated guided vehicles can only truly function effectively when combined with automated guidance systems, automated loading and unloading systems, communications systems, safety systems, and management systems to form an automated guided vehicle system (AGV). The continuous advancement of computer hardware technology, parallel and distributed processing technology, automatic control technology, sensor technology, and software development environments has provided the necessary technical foundation for AGV research and application. Advances in artificial intelligence technologies, such as understanding and search, task and path planning, and fuzzy and neural network control, are enabling AGVs to become intelligent and autonomous.

[0065] The AGV dust removal vehicle 200 in the present invention is provided with a first storage compartment 31 and a second storage compartment 32 for preventing the dust box 12 and a liftable support leg 1616 on the basis of the existing AGV trolley, and is connected to the existing control system in the workshop. In this embodiment, the MES system (Manufacturing Execution System) manufacturing execution system is used as an example for illustration. The MES system is a production information management system for the workshop execution layer of a manufacturing enterprise. MES can provide enterprises with management modules including manufacturing data management, planning and scheduling management, production scheduling management, inventory management, quality management, human resources management, work center / equipment management, tool and tooling management, procurement management, cost management, project kanban management, production process control, bottom-level data integration analysis, and upper-level data integration decomposition, so as to create a solid, reliable, comprehensive and feasible manufacturing collaborative management platform for enterprises.

[0066] It should be noted that the upper tank 1 also includes a power interface 40, which is connected to the power cabinet to provide external power for the dust removal tank 100; a power supply is provided between the upper tank 1 and the middle tank 2. Figure 3 The connecting plate 15 shown is provided with a plurality of circular holes to facilitate the passage of dust.

[0067] It can be understood that the automatic dust removal equipment provided by the present invention includes: a dust removal tank 100 and an AGV dust removal vehicle 200. The dust removal tank 100 includes an upper tank 1, a middle tank 2 and a lower tank 3. The side wall of the upper tank 1 is provided with a first connecting hole 4 for connecting a vacuum pump, and a dust bag is provided in the upper tank 1; the middle tank 2 is provided with a second connecting hole 6 for connecting a single crystal furnace; the lower tank 3 includes a top plate 7, a bottom plate 8 and a side plate 11. The top plate 7 is provided with a hollow area 9 for receiving oxides and other dust. A gate assembly 10 is provided on the side of the top plate 7 close to the bottom plate 8. The gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9, forming an independent closed space for the lower tank 3. The movement of the gate assembly 10 can Implementation; the top plate 7, the side plate 11 and the bottom plate 8 constitute an accommodating space for placing the dust box 12, and the side plate 11 includes a docking door 13, which facilitates the docking of the dust removal tank 100 with the dust removal vehicle; the lower tank 3 is also provided with a vent 14, and the introduction of argon gas can restore the lower tank 3 to normal pressure, providing an environmental basis for subsequent docking with the AGV dust removal vehicle 200; the AGV dust removal vehicle 200 includes a body and a support leg 16, and the support leg 16 is a lifting mechanism to realize automatic replacement of the dust box 12, thereby improving the automation of the dust removal process, and can realize automatic cleaning of oxides and other dust and automatic replacement of the dust box 12.

[0068] In some optional embodiments, referring to Figure 6 The gate assembly 10 includes an annular mounting plate 19. A first motor is provided on one side of the top plate 7 close to the bottom plate 8. The output shaft of the first motor is connected to the annular mounting plate 19 to control the rotation of the annular mounting plate 19.

[0069] The top plate 7 is fixedly connected to N fixing columns 20, and the annular mounting plate 19 is provided with N oblong holes 21. The fixing columns 20 are sleeved in the oblong holes 21, and the annular mounting plate 19 rotates clockwise or counterclockwise; the inner edge of the annular mounting plate 19 is provided with N rotating shafts 22, and the rotating shafts 22 are arranged in a one-to-one correspondence with the oblong holes 21; the rotating shafts 22 are sleeved with connecting rods 23, and the other end of the connecting rods 23 is connected to a fan-shaped gate plate 24. The N fan-shaped gate plates 24 move along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9.

[0070] It should be noted that during the dust removal process, the hollow area 9 of the dust removal tank 100 is open; before the docking door 13 docks with the AGV, the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9, and argon gas is introduced into the lower tank 3 to restore the lower tank 3 to normal pressure, so that the lower tank 3 forms an independent space, which does not affect the internal environment of the upper tank 1 and the middle tank 2, and also prevents dust from flying out of the dust collection box 12 after the normal pressure is restored, affecting the dust removal effect;

[0071] It should be noted that a first motor (not shown in the figure) is provided on the side of the top plate 7 close to the bottom plate 8. The output shaft of the first motor is connected to the annular mounting plate 19 to control the rotation of the annular mounting plate 19. The first motor can be connected to the MES system to realize the automatic dust removal process.

[0072] It can be understood that the gate assembly 10 includes an annular mounting plate 19, and a first motor is provided on the side of the top plate 7 close to the bottom plate 8. The output shaft of the first motor is connected to the annular mounting plate 19 to control the rotation of the annular mounting plate 19; the top plate 7 is fixedly connected to N fixing columns 20, and the mounting plate is provided with N oblong holes 21. The fixing columns 20 are sleeved in the oblong holes 21. When the annular mounting plate 19 rotates, the fixing columns 20 move along the oblong holes 21; when the annular mounting plate 19 rotates clockwise, the rotating shaft 22 also rotates clockwise, and under the action of the connecting rod 23, the rotating shaft 22 rotates in a circular motion. The circular motion of the rotating shaft 22 is transformed into a linear motion of the fan-shaped gate plate 24 moving from the center to the edge of the hollow area 9. After the N fan-shaped gate plates 24 move along the center to the edge of the hollow area 9, the hollow area 9 is opened. The annular mounting plate 19 rotates counterclockwise, and the rotating shaft 22 also rotates counterclockwise. Under the action of the connecting rod 23, the circular motion of the rotating shaft 22 is transformed into a linear motion of the fan-shaped gate plate 24 moving from the edge to the center of the hollow area 9. After the N fan-shaped gate plates 24 move along the edge to the center of the hollow area 9, the hollow area 9 is closed, thereby realizing the opening and closing of the electric control gate assembly 10.

[0073] In some optional embodiments, referring to Figure 8 A water pipe 5 is provided on the inner wall of the side plate 11, and cold water is introduced into the water pipe 5.

[0074] It should be noted that a water pipe 5 is provided on the inner wall of the side plate 11 of the lower tank 3 , and cold water is passed into the water pipe 5 , which can cool the oxides during the dust removal process and achieve dust reduction in the dust removal tank 100 .

[0075] In some optional embodiments, the water pipes 5 are arranged in a U-shaped reciprocating pattern along the first direction y.

[0076] It should be noted that along the first direction y, the water pipe 5 is arranged in a U-shaped reciprocating pattern, and the contact space with the inner wall of the side plate 11 is relatively large. When the material used for the water pipe 5 is certain, the dust reduction and cooling effect of the maximum area can be guaranteed, which can save costs to a certain extent. On the other hand, the arrangement of the water pipe 5 in a U-shaped reciprocating pattern is simple, which can also save production costs to a certain extent. At the same time, the water injection speed and circulation effect of the U-shaped arrangement are better.

[0077] In some optional embodiments, the water inlet of the water pipe 5 and the water outlet of the water pipe 5 are both located on a side of the side plate 11 close to the top plate 7 .

[0078] It should be noted that the water inlet and the water outlet of the water pipe 5 are both located on the side of the side plate 11 close to the top plate 7, which is convenient for observing the water circulation process and avoiding problems in the water circulation path that affect the cooling effect.

[0079] In some optional embodiments, referring to Figure 5 , slide grooves 121 are provided in parallel at the bottom of the dust collection box 12; the bottom plate 8 includes a plurality of first rollers, a belt is sleeved on the outer side of the first roller, a first roller located at the end is connected to the output shaft of the second motor, and the belt is slidably connected to the slide groove 121.

[0080] It should be noted that slide grooves 121 are provided in parallel at the bottom of the dust box 12; the bottom plate 8 includes multiple first rollers, and a belt is sleeved on the outer side of the first roller. A first roller located at the end is connected to the output shaft of the second motor, and the belt is slidably connected to the slide groove 121. When the second motor is running, the first roller runs and interacts with the slide groove 121 to drive the dust box 12 to move. The dust box 12 is transferred from the lower tank 3 to the second storage compartment 32, thereby realizing automatic replacement of the dust box 12.

[0081] In some optional embodiments, referring to Figure 7 The first storage compartment 31 and the second storage compartment 32 both include multiple second rollers (not shown in the figure), and a belt is sleeved on the outer side of the second roller. A second roller located at the end is connected to the output shaft of the third motor, and the belt is slidably connected to the slide groove 121.

[0082] It should be noted that the bottom of the first storage compartment 31 and the second storage compartment 32 both include multiple second rollers, and a belt is sleeved on the outer side of the second roller. A second roller located at the end is connected to the output shaft of the third motor, and the belt is slidably connected to the slide 121. After the AGV dust removal vehicle 200 is docked with the dust removal tank 100, the docking door 13 is opened, the support leg 16 is raised, the second storage compartment 32 is aligned with the docking door 13, the second motor runs to send the dust box 12 out, the third motor runs, the second roller runs, the belt and the slide 121 move relative to each other, the dust box 12 enters the second storage compartment 32, the support leg 16 is lowered, the first storage compartment 31 is aligned with the docking door 13, the third motor runs, and through the second roller operation, the belt and the slide 121 move relative to each other, the new dust box 12 enters the accommodating space of the lower tank 3, completing the automatic replacement of the dust box 12.

[0083] In some optional embodiments, referring to Figure 4 and Figure 7 The outer periphery of the docking door 13 is provided with an infrared alignment point 34 , and the AGV dust removal vehicle 200 is provided with an infrared emitting point 35 , and the infrared emitting point 35 corresponds to the infrared alignment point 34 one by one.

[0084] It should be noted that an infrared alignment point 34 is provided on the outer periphery of the docking door 13, and the AGV dust removal vehicle 200 is provided with an infrared emitting point 35. The infrared emitting point 35 corresponds one-to-one to the infrared alignment point 34. The alignment of the docking door 13 and the AGV dust removal vehicle 200 is achieved through infrared alignment, which facilitates the docking of the AGV dust removal vehicle 200 with the dust removal tank 100 and improves the accuracy of alignment.

[0085] It should be noted that infrared emission and reception technology is mature and widely used, which makes the price of related products relatively low, and the construction cost is also low. At the same time, it has the characteristics of strong anti-interference ability, reliable information transmission, low power consumption, low cost, easy encoding and decoding, which can reduce costs and increase efficiency to a certain extent.

[0086] In some optional embodiments, the support legs 16 of the AGV dust removal vehicle 200 are hydraulic support legs 16 .

[0087] It should be noted that the hydraulic lift adopts advanced hydraulic transmission technology, which can achieve fast and smooth lifting, greatly improving work efficiency, while ensuring the safety and stability of the support legs 16 during the lifting process; hydraulic lifts usually use high-strength materials and structural designs, and have a high load-bearing capacity; hydraulic lifting equipment can quickly and accurately complete the handling and stacking of goods, greatly improving work efficiency and reducing labor costs.

[0088] The present invention also provides an automatic dust removal method, using the automatic dust removal device of any of the above embodiments, referring to Figure 9 ,include:

[0089] S1: Connect the vacuum pump to the first connecting hole 4 through a flange, and connect the single crystal furnace to the second connecting hole 6 through a flange;

[0090] S2: The gate assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, and the hollow area 9 opens;

[0091] S3: placing the dust box 12 in the accommodating space;

[0092] S4: The AGV dust removal vehicle 200 moves to the position of the lower tank 3. No dust box 12 is set in the second storage compartment 32. A new dust box 12 is set in the first storage compartment 31. The second storage compartment 32 is aligned with the docking door 13.

[0093] S5: Start dust removal;

[0094] S6: After the dust removal reaches the predetermined time, the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9, argon is introduced into the lower tank 3 to restore the lower tank 3 to normal pressure, and the docking door 13 is opened;

[0095] S7: The dust box 12 is placed in the accommodating space and transported to the second storage compartment 32;

[0096] S8: Lower the support leg 16 so that the first storage compartment 31 is aligned with the docking door 13;

[0097] S9: transporting the new dust box 12 in the first storage compartment 31 into the accommodating space;

[0098] S10: The shutter assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, the hollow area 9 is opened, and dust removal continues;

[0099] S11: The AGV dust removal vehicle 200 returns to the dust processing point.

[0100] Specifically, the present invention provides an automatic dust removal method, comprising: S1: connecting a vacuum pump to a first connection hole 4 via a flange, and connecting a single crystal furnace to a second connection hole 6 via a flange, to provide a structural basis for the subsequent dust removal process;

[0101] S2: The gate assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, and the hollow area 9 is opened. The opening of the hollow area 9 enables the space inside the dust removal tank 100 to be connected, thereby improving the dust removal effect;

[0102] S3: A dust collecting box 12 is placed in the accommodating space to provide a storage space for oxides and dust generated during the dust removal process and facilitate subsequent cleaning;

[0103] S4: The AGV dust removal vehicle 200 moves to the position of the lower tank 3. There is no dust box 12 in the second storage compartment 32. A new dust box 12 is placed in the first storage compartment 31. The second storage compartment 32 is aligned with the docking door 13 to facilitate replacement with the dust box 12 in the dust removal tank 100 and to process the dust waste.

[0104] S5: Dust removal starts. After the vacuum pump is running, a vacuum environment is formed in the dust removal tank 100. Some dust based on oxides can enter the dust collection box 12. The dust bag collects some waste materials to enhance the dust removal effect.

[0105] S6: After the dust removal reaches the predetermined time, the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 and closes the hollow area 9. Argon gas is introduced into the lower tank 3 to restore the lower tank 3 to normal pressure, and the docking door 13 is opened. After a period of dust removal, the dust collection box 12 needs to be replaced. The hollow area 9 is closed, and the lower tank 3 forms a closed independent space to avoid affecting the internal environment of the upper tank 1 and the middle tank 2. Argon gas is introduced into the lower tank 3 to restore the normal pressure environment, providing a structural foundation for the subsequent docking of the dust removal tank 100 and the AGV dust removal vehicle 200.

[0106] S7: The dust box 12 is placed in the accommodating space and transported to the second storage compartment 32. The dust box 12 in the lower tank 3 is transported to the second storage compartment 32 by the second motor.

[0107] S8: Lower the legs 16 so that the first storage compartment 31 is aligned with the docking door 13 to facilitate replacement of the new dust box 12;

[0108] S9: The new dust box 12 in the first storage compartment 31 is transported to the accommodating space. The third motor is operated to transfer the dust box 12 from the first storage compartment 31 to the accommodating space, completing the replacement of the dust box 12.

[0109] S10: The gate assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, the hollow area 9 is opened, and dust removal continues. After the dust box 12 is replaced, the hollow area 9 is opened, the upper tank 1, the middle tank 2 and the lower tank 3 are connected, and dust removal continues;

[0110] S11: The AGV dust removal vehicle 200 returns to the dust processing point and replaces the dust box 12.

[0111] It should be noted that flange connection has high bonding strength, which can ensure the stability and reliability of the connection; flange connection can achieve good sealing performance and prevent fluid leakage through tight connection using gaskets and bolts; flange connection is suitable for a variety of working conditions, including high temperature, high pressure, corrosive environment, etc., and has a wide range of applications; the processing and installation of flange connection are relatively simple and the cost is low, so it has certain advantages in terms of economy.

[0112] It can be understood that the automatic dust removal method provided by the present invention includes S1: connecting the vacuum pump to the first connecting hole 4 through the flange, and connecting the single crystal furnace to the second connecting hole 6 through the flange; S2: moving the gate assembly 10 from the center of the hollow area 9 to the edge of the hollow area 9, and the hollow area 9 is opened; S3: placing the dust box 12 in the accommodating space; S4: the AGV dust removal vehicle 200 moves to the position of the lower tank 3, the dust box 12 is not set in the second storage compartment 32, a new dust box 12 is set in the first storage compartment 31, and the second storage compartment 32 is aligned with the docking door 13; S5: starting dust removal; S6: after the dust removal reaches the predetermined time, the gate assembly 10 moves along the edge of the hollow area 9 After the edge moves toward the center of the hollow area 9, the hollow area 9 is closed, argon gas is introduced into the lower tank 3 to restore the lower tank 3 to normal pressure, and the docking door 13 is opened; S7: the dust box 12 is placed in the accommodating space and transported to the second storage compartment 32; S8: the support legs 16 are lowered to align the first storage compartment 31 with the docking door 13; S9: the new dust box 12 in the first storage compartment 31 is transported to the accommodating space; S10: the gate assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, the hollow area 9 is opened, and dust removal continues; a highly automated dust removal process can be achieved, and automatic dust removal and replacement of dust boxes can be achieved through the cooperation of the dust removal tank 100 and the AGV dust removal vehicle 200.

[0113] The present invention also provides another automatic dust removal method, using the automatic dust removal device of any of the above embodiments, referring to Figure 10 ,include:

[0114] S1: Connect the vacuum pump to the first connecting hole 4 through a flange, and connect the single crystal furnace to the second connecting hole 6 through a flange;

[0115] S2: The gate assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, and the hollow area 9 opens;

[0116] S3: placing the dust box 12 in the accommodating space;

[0117] S4: The AGV dust removal vehicle 200 moves to the position of the lower tank 3. No dust box 12 is set in the first storage compartment 31. A new dust box 12 is set in the second storage compartment 32. The first storage compartment 31 is aligned with the docking door 13.

[0118] S5: Start dust removal;

[0119] S6: After the dust removal reaches the predetermined time, the gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9, argon is introduced into the lower tank 3 to restore the lower tank 3 to normal pressure, and the docking door 13 is opened;

[0120] S7: The dust box 12 is placed in the accommodating space and transported to the first storage compartment 31;

[0121] S8: Raise the support leg 16 so that the second storage compartment 32 is aligned with the docking door 13;

[0122] S9: transporting the new dust box 12 in the second storage compartment 32 into the accommodating space;

[0123] S10: The shutter assembly 10 moves from the center of the hollow area 9 to the edge of the hollow area 9, the hollow area 9 is opened, and dust removal continues;

[0124] S11: The AGV dust removal vehicle 200 returns to the dust processing point.

[0125] It can be seen from the above embodiments that the automatic dust removal device and automatic dust removal method provided by the present invention achieve at least the following beneficial effects:

[0126] The automatic dust removal equipment provided by the present invention includes: a dust removal tank 100 and an AGV dust removal vehicle 200. The dust removal tank 100 includes an upper tank 1, a middle tank 2 and a lower tank 3. The side wall of the upper tank 1 is provided with a first connecting hole 4 for connecting a vacuum pump, and a dust bag is provided in the upper tank 1; the middle tank 2 is provided with a second connecting hole 6 for connecting a single crystal furnace; the lower tank 3 includes a top plate 7, a bottom plate 8 and a side plate 11. The top plate 7 is provided with a hollow area 9 for receiving oxides and other dust. A gate assembly 10 is provided on the side of the top plate 7 close to the bottom plate 8. The gate assembly 10 moves along the edge of the hollow area 9 toward the center of the hollow area 9 to close the hollow area 9, forming an independent closed space for the lower tank 3. The movement of the gate assembly 10 can Implementation; the top plate 7, the side plate 11 and the bottom plate 8 constitute an accommodating space for placing the dust box 12, and the side plate 11 includes a docking door 13, which facilitates the docking of the dust removal tank 100 with the dust removal vehicle; the lower tank 3 is also provided with a vent 14, and the introduction of argon gas can restore the lower tank 3 to normal pressure, providing an environmental basis for subsequent docking with the AGV dust removal vehicle 200; the AGV dust removal vehicle 200 includes a body and a support leg 16, and the support leg 16 is a lifting mechanism to realize automatic replacement of the dust box 12, thereby improving the automation of the dust removal process, and can realize automatic cleaning of oxides and other dust and automatic replacement of the dust box 12.

[0127] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should be understood by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. An automatic dust removal device, characterized in that: Including dust removal tank and AGV dust removal vehicle, among which, The dust removal tank includes an upper tank, a middle tank and a lower tank connected in sequence, and the upper tank, the middle tank and the lower tank are arranged along a first direction, wherein, A first connecting hole is provided on the side wall of the upper tank, and the first connecting hole is used to connect a vacuum pump. A dust bag is provided in the upper tank; The middle tank is provided with a second connecting hole, and the second connecting hole is connected to the single crystal furnace; Along the first direction, the lower tank includes a top plate and a bottom plate arranged opposite to each other, the top plate is provided with a hollow area, and a gate assembly is provided on a side of the top plate close to the bottom plate, and the gate assembly moves along the edge of the hollow area toward the center of the hollow area to close the hollow area; the lower tank also includes a side plate located between the top plate and the bottom plate, the top plate, the side plate and the bottom plate forming an accommodating space, the accommodating space is used to place a dust box, and the side plate includes a docking door; the lower tank is also provided with a vent hole, and the vent hole is used to let in argon gas; The AGV dust removal vehicle includes a body and a support leg, wherein the support leg is a lifting mechanism, and the body includes a first storage compartment and a second storage compartment arranged along a first direction, wherein the first storage compartment is located on a side of the second storage compartment away from the support leg, and the first storage compartment and the second storage compartment are used to place dust boxes; The automatic dust removal method of the automatic dust removal equipment comprises: Connecting the vacuum pump to the first connecting hole via a flange, and connecting the single crystal furnace to the second connecting hole via a flange; The gate assembly moves from the center of the hollow area to the edge of the hollow area, and the hollow area is opened; A dust collection box is placed in the accommodating space; The AGV dust removal vehicle moves to the position of the lower tank, no dust box is set in the second storage compartment, a new dust box is set in the first storage compartment, and the second storage compartment is aligned with the docking door; Start dusting; After the dust removal reaches a predetermined time, the gate assembly moves along the edge of the hollow area toward the center of the hollow area to seal the hollow area, argon gas is introduced into the lower tank to restore the lower tank to normal pressure, and the docking door is opened; The dust box is placed in the accommodating space and transported to the second storage compartment; lowering the legs so that the first storage compartment is aligned with the docking door; transporting the new dust box in the first storage compartment into the accommodating space; The shutter assembly moves from the center of the hollow area to the edge of the hollow area, and the hollow area is opened to continue dust removal; The AGV dust removal vehicle returns to the dust processing point.

2. The automatic dust removal equipment according to claim 1, characterized in that: The gate assembly includes an annular mounting plate, a first motor is provided on a side of the top plate close to the bottom plate, and an output shaft of the first motor is connected to the annular mounting plate to control the rotation of the annular mounting plate; The top plate is fixedly connected to N fixing columns, and the mounting plate is provided with N oblong holes. The fixing columns are sleeved in the oblong holes, and the annular mounting plate rotates clockwise or counterclockwise; the inner edge of the annular mounting plate is provided with N rotating shafts, and the rotating shafts are arranged in a one-to-one correspondence with the oblong holes; the rotating shaft is sleeved with a connecting rod, and the other end of the connecting rod is connected to a fan-shaped gate plate, and the N fan-shaped gate plates move along the edge of the hollow area toward the center of the hollow area to close the hollow area.

3. The automatic dust removal equipment according to claim 1, characterized in that: A water pipe is provided on the inner wall of the side plate, and cold water flows into the water pipe.

4. The automatic dust removal equipment according to claim 3, characterized in that: Along the first direction, the water pipes are arranged reciprocatingly in a U shape.

5. The automatic dust removal equipment according to claim 4, characterized in that: The water inlet of the water pipe and the water outlet of the water pipe are both located on a side of the side plate close to the top plate.

6. The automatic dust removal equipment according to claim 1, characterized in that: The bottom of the dust box is provided with slide grooves in parallel; the bottom plate includes a plurality of first rollers, the outer sides of the first rollers are sleeved with belts, one of the first rollers located at the end is connected to the output shaft of the second motor, and the belt is slidably connected to the slide grooves.

7. The automatic dust removal equipment according to claim 1, characterized in that: The first storage compartment and the second storage compartment both include a plurality of second rollers, a belt is sleeved on the outer side of the second rollers, one of the second rollers at the end is connected to the output shaft of the third motor, and the belt is slidably connected to the slide groove.

8. The automatic dust removal equipment according to claim 1, characterized in that: The outer periphery of the docking door is provided with an infrared alignment point, and the AGV dust removal vehicle is provided with an infrared emission point, and the infrared emission point corresponds one-to-one to the infrared alignment point.

9. The automatic dust removal equipment according to claim 1, characterized in that: The outriggers of the AGV dust removal vehicle are hydraulic outriggers.

Images