Indium tin oxide (ITO) rotating target material degreasing tool and degreasing method thereof
The support base made of ITO material separates the target blank from the exhaust base, which solves the problem of rupture caused by uneven heat during degreasing of the rotary target material, and achieves uniform shrinkage and quality improvement of the target material.
Patent Information
- Application Number
- CN202411231983.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-02
- Publication Date
- 2024-12-27
AI Technical Summary
During the degreasing process of rotating target materials, the degreasing rate difference is caused by uneven heating at the upper and lower ends, resulting in the problem of rupture of the target blank.
The support base made of ITO material is used to separate the target blank from the exhaust base, and the degreasing gas is quickly discharged through the through hole of the support base to avoid direct contact between the target blank and the exhaust base, ensuring uniform heat at the upper and lower ends, and during sintering, it is The target blank shrinks evenly.
Effectively prevent target blank from cracking, ensure the quality and density of rotating target material, and avoid cracking problems caused by degreasing.
Smart Images
Figure CN119194377A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the field of ITO rotary target material preparation, in particular to an ITO rotary target material degreasing tool and a degreasing method thereof. Background Art
[0002] The sintering of rotating targets is a shaping process. The target blanks are pressed by sintering at high temperatures, which promotes the solid-phase reaction between the powder particles of the target blanks and combines with each other, which can improve the strength and achieve densification as it shrinks. However, during the degreasing process, the target blanks will break. The reason is generally that the upper and lower ends of the target blanks are heated unevenly, resulting in a faster degreasing rate at the lower end, so that the degreasing gas generated by the sintered target blanks is retained in the target blanks and cannot be discharged smoothly along the inner wall of the target blanks, which will eventually cause cracks on the lower side of the target blanks; then, during the sintering process, the uneven heating of the upper and lower ends will also lead to uneven shrinkage rates at the upper and lower ends, further exacerbating the cracking phenomenon.
[0003] CN117367136A discloses a sintering gasket and a sintering method for a rotating target material, which improves the cracking phenomenon of the target blank during sintering by using a sintering gasket. The sintering gasket is composed of a disc body, a foot arranged at the lower end of the disc body, and a vent hole penetrating the upper and lower ends of the disc body; the upper surface of the disc body is concave to form a concave structure, and the concave structure includes an outer annular inclined surface and a disc platform located within the annular inclined surface.
[0004] The specification of the above patent states: During the low-temperature sintering stage of the target material, the setting of the vents and the pads provides sufficient ventilation conditions for the volatile moisture and additives of the target material, solving the problem of the target material being easy to crack during the low-temperature sintering process; in fact, the low-temperature sintering process is the degreasing process, which prevents the degreasing gas from being retained in the target blank through the vents that penetrate the upper and lower ends of the disc body, and can quickly discharge the degreasing gas generated by the sintered target blank, but due to its structural limitations, it still causes uneven heating at the upper and lower ends of the target blank, which is mainly reflected in the faster heating rate and higher temperature of the lower end of the target blank in contact with the sintering gasket, causing the lower end of the target blank to enter the degreasing process first and the degreasing is more intense, eventually leading to the cracking of the lower end of the target blank. In addition, the above-mentioned sintering gasket also limits the shrinkage position of the target blank through the outer annular bevel and the disc platform located in the annular bevel. This practice will result in the lower end of the target blank being of poor quality, requiring further machining, and even causing the lower end of the target blank to further crack.
[0005] Based on this, the technical problem solved in this case is: how to solve the problem of uneven heating at the upper and lower ends of the target blank, resulting in differences in degreasing rates and causing target blank cracks. Summary of the invention
[0006] In order to solve the above technical problems, the present application provides an ITO rotating target degreasing tool. The tool separates the exhaust base and the target blank through a support seat made of ITO material, so that the upper and lower ends of the target blank are heated evenly, and the degreasing gas can be quickly discharged from the exhaust base through the through hole of the support seat, thereby preventing the target blank from cracking. In addition, the support seat made of ITO material can shrink evenly with the target blank during sintering, thereby ensuring the quality of the rotating target material to the greatest extent; a degreasing process using the above tool is also disclosed, which can prevent the target blank from cracking due to degreasing.
[0007] The technical solution of the present invention is:
[0008] An ITO rotary target degreasing tool comprises an exhaust base and a support base made of ITO material, wherein the support base is stacked on the exhaust base and used for placing a target blank; the support base is provided with a through hole so that the gas generated by the target blank during the degreasing process can be discharged from the exhaust base through the through hole.
[0009] The degreasing tooling of the present application separates the exhaust base and the target blank through the support base, so that the target blank does not directly contact the exhaust base, but contacts the support base made of ITO material, thereby avoiding uneven heating of the upper and lower ends of the target blank due to the excessively fast heating rate of the exhaust base during the degreasing process, and at the same time allowing the degreasing gas to be quickly discharged from the exhaust base through the through hole of the support base, thereby preventing the lower end of the target blank from cracking; in addition, during the sintering process, the support base made of ITO material can shrink evenly with the target blank, thereby ensuring the quality of the rotating target material to the greatest extent.
[0010] In the above-mentioned ITO rotary target degreasing tool, the exhaust base and the support base are both in annular shape, and the inner ring of the support base is the through hole.
[0011] In the above-mentioned ITO rotary target degreasing tool, the inner radii of the support seat and the exhaust base are equal.
[0012] In the above-mentioned ITO rotary target degreasing tool, the inner circle radius and the outer circle radius of the support seat and the target blank are equal.
[0013] In the above-mentioned ITO rotary target degreasing tool, a plurality of exhaust holes for exhausting degreasing gas are provided on the side of the exhaust base.
[0014] In the above-mentioned ITO rotary target degreasing tool, the support seat is made of ITO material powder by pressing and molding.
[0015] In the above-mentioned ITO rotary target degreasing tool, the exhaust base is made of a ceramic material of Al2O3 doped with SiO2, wherein the mass ratio of Al2O3:SiO2 is 85% to 100%:15% to 0%.
[0016] A method for degreasing an ITO rotary target material, comprising: adopting the above-mentioned ITO rotary target material degreasing tooling, laying alumina sand on the upper end surface of an exhaust base, stacking a support base on the exhaust base, and vertically placing a target blank on the support base; heating the temperature to 550-600°C, including but not limited to 550°C, 560°C, 570°C, 580°C, 590°C, and 600°C at a rate of 0.5-1.5°C / min, including but not limited to 0.5°C / min, 0.7°C / min, 1.0°C / min, 1.2°C / min, and 1.5°C / min, keeping the temperature for 2-4h, including but not limited to 2h, 2.5h, 3h, 3.5h, and 4h, and cooling the temperature to room temperature to obtain a degreased target blank.
[0017] In the above-mentioned ITO rotary target degreasing method, alumina sand is laid using a sieve with a mesh size of 40 to 150.
[0018] One of the above technical solutions of the present invention has at least one of the following advantages or beneficial effects:
[0019] The degreasing tooling of the present application separates the exhaust base and the target blank through the support base, so that the target blank does not directly contact the exhaust base, but contacts the support base made of ITO material, thereby avoiding uneven heating of the upper and lower ends of the target blank due to the excessively fast heating rate of the exhaust base during the degreasing process, and at the same time allowing the degreasing gas to be quickly discharged from the exhaust base through the through hole of the support base, thereby preventing the lower end of the target blank from cracking; in addition, during the sintering process, the support base made of ITO material can shrink evenly with the target blank, thereby ensuring the quality of the rotating target material to the greatest extent.
[0020] The degreasing process of the present application can prevent the target blank from cracking due to degreasing. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 This is a schematic diagram of the structure of the exhaust base and the support base of Example 1 of the present application;
[0022] Figure 2 This is a working schematic diagram of the tooling of Example 1 of the present application;
[0023] Figure 3 It is a cross-sectional schematic diagram of the tooling of Example 1 of the present application.
[0024] Description of reference numerals:
[0025] 1. Exhaust base; 2. Support seat; 3. Through hole; 4. Target blank; 5. Exhaust hole. DETAILED DESCRIPTION
[0026] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0027] Example 1
[0028] refer to Figures 1 to 3 A ITO rotary target degreasing tooling includes an exhaust base 1 and a support base 2 made of ITO material. The support base 2 is stacked on the exhaust base 1 and is used to place a target blank 4. A through hole 3 is provided on the support base 2 so that the gas generated by the target blank 4 during the degreasing process can be discharged from the exhaust base 1 through the through hole 3.
[0029] The degreasing tooling of the present embodiment separates the exhaust base 1 and the target blank 4 through the support base 2, so that the target blank 4 does not directly contact the exhaust base 1, but contacts the support base 2 made of ITO material, thereby avoiding uneven heating of the upper and lower ends of the target blank 4 due to the excessively fast heating rate of the exhaust base 1 during the degreasing process, and at the same time enables the degreasing gas to be quickly discharged from the exhaust base 1 through the through hole 3 of the support base 2, thereby preventing the lower end of the target blank 4 from cracking; in addition, during the sintering process, the support base 2 made of ITO material can shrink evenly with the target blank 4, thereby ensuring the quality of the rotating target material to the greatest extent.
[0030] In this embodiment, the target blank 4 has an inner diameter of 150 mm, an outer diameter of 190 mm, and a height of 500 mm.
[0031] In this embodiment, preferably, the exhaust base 1 and the support base 2 are both in annular shape, and the inner ring of the support base 2 is the through hole 3. In practical applications, the annular design can make the exhaust base 1 and the support base 2 evenly heated, and avoid uneven heating of the upper and lower ends of the target blank 4 due to the structure of the exhaust base 1 and the support base 2.
[0032] In the present embodiment, specifically, the inner radius of the support seat 2 and the exhaust base 1 are both 150 mm, and the outer radius is both 238 mm. It should be noted that the heights of the support seat 2 and the exhaust base 1 are not limited in the present application, and those skilled in the art can design them according to actual needs. Specifically, in the present embodiment, the height of the support seat 2 is 50 mm, and the height of the exhaust base 1 is 150 mm.
[0033] Under the above design, the inner radius and outer radius of the support seat 2 and the exhaust base 1 are equal. At the same time, the inner radius of the two is equal to the inner diameter of the target blank 4. On the one hand, this is to allow the lower end surface of the target blank 4 to completely contact the support seat 2, thereby avoiding the problem of inconsistent temperatures between the contact part and the suspended part. On the other hand, the volume of the space through which the gas can pass is increased as much as possible, thereby further reducing the risk of the target blank 4 being broken due to the degreasing gas being retained in the target blank 4.
[0034] It should be noted that the exhaust base 1 of the present application is not limited to the structure described in the above embodiment. In practical applications, the exhaust base 1 only needs to be able to quickly exhaust the degreasing gas, such as the ITO rotating target sintering molding auxiliary disk disclosed in CN220750824U.
[0035] Preferably, a plurality of exhaust holes 5 for exhausting degreasing gas are provided on the side of the exhaust base 1. Under the above-mentioned preferred embodiment, the degreasing gas on the inner wall of the target blank 4 can be quickly exhausted from the side wall of the exhaust base 1.
[0036] In this embodiment, specifically, the support base 2 is made of ITO material powder by compression molding. Of course, in the technical field, the support base 2 can also be made by isostatic pressing.
[0037] In this embodiment, the exhaust base 1 is made of a ceramic material of Al2O3 doped with SiO2. Preferably, the mass ratio of Al2O3:SiO2 is 86%:14%, so that the exhaust base 1 has higher strength and avoids collapse of the exhaust base 1.
[0038] A method for degreasing an ITO rotary target material is disclosed. The degreasing tooling for an ITO rotary target material is used to process a total of 10 target blanks 4. The process is as follows: a 40-mesh screen is used to lay alumina sand on the upper end surface of an exhaust base 1, a support base 2 is stacked on the exhaust base 1, and a target blank 4 is vertically placed on the support base 2; then, the tooling is sent into a sintering furnace and heated to 600°C at a rate of 1.5°C / min, kept warm for 2 hours, and cooled to room temperature to obtain a degreased target blank 4.
[0039] Example 2
[0040] A degreasing tool for an ITO rotating target comprises an exhaust base 1 and a support base 2 made of ITO material. The support base 2 is stacked on the exhaust base 1 and is used to place a target blank 4. Both the support base 2 and the exhaust base 1 are provided with a through hole 3 connected to the inner wall of the target blank 4. The exhaust base 1 is also provided with a plurality of exhaust holes 5 for exhausting degreasing gas.
[0041] In this embodiment, the target blank 4 has an inner diameter of 150 mm, an outer diameter of 190 mm, and a height of 500 mm.
[0042] Preferably, the exhaust base 1 and the support base 2 are both in annular shape, and the inner ring of the support base 2 is the through hole 3. In practical applications, the annular design can make the exhaust base 1 and the support base 2 evenly heated, and avoid uneven heating of the upper and lower ends of the target blank 4 due to the structure of the exhaust base 1 and the support base 2.
[0043] Preferably, the inner radius and outer radius of the target blank 4, the support seat 2, and the exhaust base 1 are equal, that is, the inner radius of the support seat 2 and the exhaust base 1 are both 150 mm, and the outer radius is 190 mm. Specifically, in this embodiment, the height of the support seat 2 is 80 mm, and the height of the exhaust base 1 is 150 mm. Under the above design, the temperature of the support seat 2 and the target blank 4 is further made consistent, so that the shrinkage rate of the two during sintering is consistent, and the sintering quality is improved.
[0044] Preferably, the exhaust base 1 is further provided with a plurality of exhaust holes 5 for exhausting the degreasing gas. In this embodiment, further preferably, the exhaust holes 5 are provided on the side of the exhaust base 1.
[0045] In this embodiment, specifically, the support base 2 is made of ITO material powder by compression molding. Of course, in the technical field, the support base 2 can also be made by isostatic pressing.
[0046] In this embodiment, the exhaust base 1 is made of a ceramic material of Al2O3 doped with SiO2. Preferably, the mass ratio of Al2O3:SiO2 is 86%:14%, so that the exhaust base 1 has higher strength and avoids collapse of the exhaust base 1.
[0047] A method for degreasing an ITO rotary target material is disclosed. The degreasing tooling for an ITO rotary target material is used to process a total of 10 target blanks 4. The process is as follows: a 40-mesh screen is used to lay alumina sand on the upper end surface of an exhaust base 1, a support base 2 is stacked on the exhaust base 1, and a target blank 4 is vertically placed on the support base 2; then, the tooling is sent into a sintering furnace and heated to 600°C at a rate of 1.5°C / min, kept warm for 2 hours, and cooled to room temperature to obtain a degreased target blank 4.
[0048] In this embodiment, specifically, a 40-mesh screen is used to lay the alumina sand.
[0049] Comparative Example 1
[0050] Alumina sand is laid on the upper end surface of the exhaust base 1 as described in Example 1 using a 40-mesh screen, and then the target blank 4 is placed directly on the exhaust base 1, sent into a sintering furnace and heated to 600°C at a rate of 1.5°C / min, kept warm for 2 hours, and cooled to room temperature to obtain a degreased target blank 4. A total of 10 pieces of target blanks 4 are processed.
[0051] Testing: The uncracked degreased target blanks obtained in each example were further sintered, and the results are shown in Table 1.
[0052] Table 1: Cracking rate of degreased target blanks and average target density after sintering
[0053]
[0054]
[0055] Result analysis:
[0056] Comparing Example 1, Example 2 and Comparative Example 1, Example 2 has the best effect. The reason is that the sizes of the support seat and the exhaust base of Example 2 can make the temperatures of the support seat and the target blank tend to be consistent, and the shrinkage rates of the two during sintering tend to be consistent, thereby improving the sintering quality; Comparative Example 1 has the worst effect. The reason is that the target blank is separated from the exhaust base only by alumina sand. During degreasing, the exhaust base heats up quickly, which causes the lower end of the target blank to heat up too fast, and reaches the degreasing temperature first, resulting in uneven temperatures at the upper and lower ends, thereby causing the target material to break.
[0057] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.
Claims
1. An ITO rotary target degreasing tool, comprising an exhaust base, characterized in that: It also includes a support seat made of ITO material, which is stacked on the exhaust base and used to place the target blank; the support seat is provided with a through hole so that the gas generated by the target blank during the degreasing process can be discharged from the exhaust base through the through hole.
2. The ITO rotary target degreasing tool according to claim 1, characterized in that: The exhaust base and the support base are both in annular shape, and the inner ring of the support base is the through hole.
3. The ITO rotary target degreasing tool according to claim 2, characterized in that: The inner radii of the support seat and the exhaust base are equal.
4. The ITO rotary target degreasing tool according to claim 2, characterized in that: The inner circle radius and outer circle radius of the support seat and the target blank are equal.
5. The ITO rotary target degreasing tool according to claim 1, characterized in that: A plurality of exhaust holes for exhausting degreasing gas are arranged on the side of the exhaust base.
6. The ITO rotary target degreasing tool according to claim 1, characterized in that: The support seat is made of ITO material powder by compression molding.
7. The ITO rotary target degreasing tool according to claim 1, characterized in that: The exhaust base is made of a ceramic material of Al2O3 doped with SiO2, wherein the mass ratio of Al2O3 to SiO2 is 85% to 100% to 15% to 0%.
8. A method for degreasing an ITO rotating target, characterized in that: The ITO rotary target degreasing tool as described in any one of claims 1 to 7 is used, alumina sand is laid on the upper end surface of the exhaust base, the support base is stacked on the exhaust base, and the target blank is vertically placed on the support base; after heating and degreasing, it is cooled to room temperature to obtain a degreased target blank.
9. The ITO rotary target degreasing method according to claim 8, characterized in that: Use a 40-150 mesh screen to lay the alumina sand.
10. The ITO rotary target degreasing method according to claim 8, characterized in that: During heating and degreasing, increase the temperature to 550-600°C at a rate of 0.5-1.5°C / min and keep it at this temperature for 2-4 hours.