Telescopic pipeline mechanism for automatic nickel brushing workstation

Abstract

The invention relates to the technical field of surface treatment nickel electroplating, in particular to a telescopic pipeline mechanism for an automatic nickel brushing workstation, the telescopic pipeline mechanism comprises a support assembly, a nickel liquid pipe telescopic assembly, a cable telescopic assembly, a brush carrier, a brush handle, a nickel liquid pipe and a cable, the support assembly is formed by connecting two T-shaped side plates on the outer side and a partition plate on the inner side in parallel at intervals through a plurality of supporting columns; a nickel liquid pipe telescopic assembly and a cable telescopic assembly are installed on the two faces of the partition plate correspondingly and used for winding and unwinding a nickel liquid pipe and a cable correspondingly. The cable and the nickel liquid pipe move to different positions along with the brush handle and extend and retract to proper lengths under the driving of the nickel liquid pipe telescopic assembly and the cable telescopic assembly, and the fixed pulley assembly always presses a pipeline of the cable or the nickel liquid pipe under the action of the balancing weight to keep the pipeline straight. The problem that a pipeline is wound with a brush handle and the front end of a robot and the problem that nickel liquid circulation is not smooth due to cable bending or nickel liquid pipe bending are solved.

Description

Technical Field

[0001] The invention relates to the technical field of surface treatment nickel electroplating, and in particular to a telescopic pipeline mechanism for an automatic nickel brushing workstation. Background Art

[0002] With the wide application of semiconductors in various fields and the continuous development of the domestic semiconductor industry, the demand for precision parts of semiconductor equipment is also increasing. In order to increase the corrosion resistance, voltage breakdown resistance, wear resistance and consistency and uniformity of the workpiece surface, the surface of the metal parts of the semiconductor equipment needs to be treated. In addition, the electroplating of nickel on some parts of semiconductor equipment is characterized by high labor intensity, high working hours per piece and low one-time yield of products. Combined with the current broad prospects of the semiconductor industry, it is technically feasible to apply automatic electroplating to the semiconductor industry. Therefore, research based on industrial robot automated production lines is carried out for the electroplating nickel industry.

[0003] At present, the electroplating of the company's metal products is completed by manual operation, which results in long working hours for each piece, quality cannot be guaranteed during batch production, and poor product consistency. In addition, the nickel plating brush heads need to be replaced frequently according to different workpieces, and manual operation is time-consuming and labor-intensive, resulting in low production efficiency. In addition, the nickel plating brush heads themselves are consumables, and the consumables in the nickel plating brush heads originally used in production are not easy to replace. In response to the above problems, a robot automatic nickel brushing equipment was designed, which realizes the purpose of automatically selecting different brush handles according to different workpieces and improving production efficiency. However, during the robot nickel brushing process, it was found that the pipelines for transporting nickel liquid and current were often entangled with the brush handle and the front end of the robot. Summary of the invention

[0004] In order to solve the above technical problems, the present invention discloses a telescopic pipeline mechanism for an automatic nickel brushing workstation.

[0005] The specific technical solutions are as follows: A telescopic pipeline mechanism for an automatic nickel brushing workstation comprises a bracket assembly, a nickel liquid tube telescopic assembly, a cable telescopic assembly, a brush rack, a brush handle, a nickel liquid tube and a cable; the positions of the bracket assembly and the brush rack are fixed; the bracket assembly comprises two outer side panels and an inner partition, the side panels and the partition are both T-shaped, and are connected in parallel and spaced apart by a plurality of pillars to form a bracket assembly; a group of nickel liquid tube telescopic assemblies and a group of cable telescopic assemblies are respectively installed on both sides of the partition, which are used to retract and release the nickel liquid tube and the cable respectively; one end of the nickel liquid tube and the cable is connected to the outside, the middle part is retracted and released by a group of nickel liquid tube telescopic assemblies and a group of cable telescopic assemblies, and the other end is connected to the brush handle, and the brush handle is detachably installed on the brush rack.

[0006] The nickel liquid tube telescopic assembly includes a pair of limiting guide rails, a set of fixed pulley assemblies and a set of movable pulley assemblies; a slide groove is vertically opened on the side plate, and the limiting guide rail is vertically laid on one side of the partition; the fixed pulley assembly includes a pair of fixed pulleys, and the fixed pulley axles are installed on the bracket assembly; the movable pulley assembly includes a movable pulley and a stack of counterweights, and the two ends of the movable pulley axle slide vertically up and down in the limiting guide rails and the slide groove, and a stack of counterweights is hung on the lower part of the movable pulley axle; the nickel liquid tube passes around a fixed pulley, a movable pulley and another fixed pulley in sequence.

[0007] The cable telescopic assembly includes a pair of limiting guide rails, a set of fixed pulley assemblies and a set of movable pulley assemblies; a slide groove is vertically opened on the side plate, and the limiting guide rail is vertically laid on the other side of the partition; the fixed pulley assembly includes a pair of fixed pulleys, and the fixed pulley axles are installed on the bracket assembly; the movable pulley assembly includes a movable pulley and a stack of counterweights, and the two ends of the movable pulley axle slide vertically up and down in the limiting guide rails and the slide groove, and a stack of counterweights is hung on the lower part of the movable pulley axle; the cable passes around a fixed pulley, a movable pulley and another fixed pulley in turn.

[0008] An upper limit sensor and a lower limit sensor are respectively installed at the upper end and the lower end of the slide slot of the side plate.

[0009] Two limit blocks are installed on the top of the support assembly near one end of the brush holder; the limit blocks are provided with through holes for nickel liquid pipes or cables to pass through, so as to achieve limit.

[0010] A hanging groove is provided at one end of the brush holder away from the bracket assembly. The hanging groove and the grabbing head protruding from the top of the brush handle can be detachably installed. The brush handle can be moved horizontally to achieve the connection and separation of the grabbing head and the hanging groove.

[0011] The other end of the nickel liquid pipe is connected to the nickel liquid tank, and the other end of the cable is connected to the distribution box.

[0012] The brush handle is taken out and returned to its original position by a grabbing head on the top driven by a six-axis robot.

[0013] Compared with the prior art, the present invention has the following beneficial technical effects: The present invention provides a telescopic pipeline mechanism for an automatic nickel brushing workstation, in which the brush handle is grasped and followed by a six-axis manipulator, and the cable and the nickel liquid tube move to different positions with the brush handle, and are extended and retracted to a suitable length respectively driven by the nickel liquid tube telescopic assembly and the cable telescopic assembly, fundamentally solving the problem of the pipeline being entangled with the brush handle and the front end of the robot. At the same time, the fixed pulley assembly, under the action of the counterweight block, always presses the cable or the nickel liquid tube pipeline, so that the pipeline is always in a straight state, solving the problem of poor nickel liquid circulation caused by the bending of the cable or the nickel liquid tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1It is a three-dimensional structural schematic diagram of the telescopic pipeline mechanism of the present invention; Figure 2 It is a front view of the telescopic pipeline mechanism of the present invention; Figure 3 for Figure 2 Schematic diagram of the structure behind the hidden side panels; Figure 4 It is a top view of the telescopic pipeline mechanism of the present invention; In the figure, 1. bracket assembly; 2. lower limit sensor; 3. counterweight; 4. movable pulley assembly; 5. limit guide rail; 6. upper limit sensor; 7. fixed pulley assembly; 8. brush holder; 9. brush handle; 10. movable pulley axle; 11. nickel liquid pipe; 12. cable; 13. limit block; 14. hanging groove; 15. grab head; 16. side panel; 17. partition; 18. pillar; 19. fixed pulley axle. DETAILED DESCRIPTION

[0015] The present invention is further described below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited to the accompanying drawings.

[0016] Figure 1 is a schematic diagram of the three-dimensional structure of the telescopic pipeline mechanism of the present invention, Figure 2 This is a front view of the telescopic pipeline mechanism of the present invention. Figure 3 for Figure 2 Schematic diagram of the structure behind the hidden side panels. Figure 4 This is a top view of the telescopic pipeline mechanism of the present invention, as shown in the figure: The telescopic pipeline mechanism for an automatic nickel brushing workstation of the present invention comprises a bracket assembly 1, a nickel liquid pipe telescopic assembly, a cable telescopic assembly, a brush rack 8, a brush handle 9, a nickel liquid pipe 11 and a cable 12; the positions of the bracket assembly 1 and the brush rack 8 are fixed; the bracket assembly 1 comprises two side plates 16 on the outside and a partition plate 17 on the inside, the side plates 16 and the partition plate 17 are both T-shaped, and are connected in parallel with a plurality of pillars 18 to form the bracket assembly 1; a group of nickel liquid pipe telescopic assemblies and a group of cable telescopic assemblies are respectively installed on both sides of the partition plate 17 for retracting and releasing the nickel liquid pipe, respectively Nickel liquid pipe 11 and cable 12; an upper limit sensor 6 and a lower limit sensor 2 are respectively installed at the upper and lower ends of the slide groove of the side plate 16; two limit blocks 13 are installed on the top of the bracket assembly 1 close to one end of the brush holder 8; the limit block 13 has a through hole for the nickel liquid pipe 11 or the cable 12 to pass through, so as to achieve limit; one end of the nickel liquid pipe 11 is connected to the nickel liquid tank, one end of the cable 12 is connected to the distribution box, the middle part is retracted by a group of nickel liquid pipe telescopic components and a group of cable telescopic components, and the other end is connected to the brush handle 9, and the brush handle 9 is detachably mounted on the brush holder 8.

[0017] The nickel liquid tube telescopic assembly includes a pair of limiting guide rails 5, a set of fixed pulley assemblies 7 and a set of movable pulley assemblies 4; a slide groove is vertically opened on the side plate 16, and the limiting guide rail 5 is vertically laid on one side of the partition 17; the fixed pulley assembly 7 includes a pair of fixed pulleys, and its fixed pulley axle 19 is installed on the bracket assembly 1; the movable pulley assembly includes a movable pulley and a stack of counterweights 3, and both ends of the movable pulley axle 10 slide vertically up and down in the limiting guide rails 5 and the slide groove, and a stack of counterweights 3 is hung on the lower part of the movable pulley axle 10; the nickel liquid tube 11 passes around a fixed pulley, a movable pulley and another fixed pulley in turn.

[0018] The cable telescopic assembly includes a pair of limiting guide rails 5, a set of fixed pulley assemblies 7 and a set of movable pulley assemblies 4; a slide groove is vertically opened on the side plate 16, and the limiting guide rail 5 is vertically laid on the other side of the partition 17; the fixed pulley assembly 7 includes a pair of fixed pulleys, and its fixed pulley axle 19 is installed on the bracket assembly 1; the movable pulley assembly includes a movable pulley and a stack of counterweights 3, and both ends of the movable pulley axle 10 slide vertically up and down in the limiting guide rails 5 and the slide groove, and a stack of counterweights 3 is hung on the lower part of the movable pulley axle 10; the cable 12 passes around a fixed pulley, a movable pulley and another fixed pulley in turn.

[0019] A hanging groove 14 is formed at one end of the brush holder 8 away from the bracket assembly 1. The hanging groove 14 and the grabbing head 15 protruding from the top of the brush handle 9 are detachably mounted. The grabbing head 15 on the top of the brush handle 9 is driven by a six-axis robot to realize the removal and return of the brush handle 9. The six-axis robot horizontally moves the brush handle 9 to realize the connection and disconnection of the grabbing head 15 with the hanging groove 14.

[0020] When in use, the six-axis robot drives the brush handle 9 to brush nickel on the workpiece, and the cable 12 and the nickel liquid tube 11 extend out from the through hole of the limit block 13 with the brush handle 9, and the cable 12 and the nickel liquid tube 11 support the movable pulley assembly 4 to slide upward in the limit guide rail 5. The movable pulley assembly 4 always stretches the cable 12 and the nickel liquid tube 11 to make them straight and not entangled with other parts. After the nickel brushing is completed, the brush handle 9 is put back on the brush handle frame 8, and the movable pulley assembly 4 drives the cable 12 and the nickel liquid tube 11 to slide downward under the action of the gravity of the counterweight block 3 below, and when the cable 12 and the nickel liquid tube 11 are shortened to the shortest, the nickel liquid tube telescopic assembly and the cable telescopic assembly return to their original positions.

Claims

1. A telescopic pipeline mechanism for an automatic nickel brushing workstation, characterized in that: The invention comprises a support assembly (1), a nickel liquid tube telescopic assembly, a cable telescopic assembly, a brush frame (8), a brush handle (9), a nickel liquid tube (11) and a cable (12); the positions of the support assembly (1) and the brush frame (8) are fixed; the support assembly (1) comprises two T-shaped side plates (16) on the outside and a T-shaped partition plate (17) on the inside, the side plates (16) and the partition plate (17) are connected in parallel and spaced apart by a plurality of pillars (18) to form the support assembly (1); a group of nickel liquid tube (11) telescopic assemblies and a group of cable (12) telescopic assemblies are respectively installed on both sides of the partition plate (17), which are used to retract and release the nickel liquid tube (11) and the cable (12) respectively; one end of the nickel liquid tube (11) and the cable (12) are connected to the outside, the middle part is retracted and released by a group of nickel liquid tube telescopic assemblies and a group of cable telescopic assemblies, and the other end is connected to the brush handle (9), and the brush handle (9) is detachably installed on the brush frame (8).

2. The telescopic pipeline mechanism for the automatic nickel brushing workstation according to claim 1 is characterized in that: The nickel liquid pipe telescopic assembly comprises a pair of limiting guide rails (5), a set of fixed pulley assemblies (7) and a set of movable pulley assemblies (4); a sliding groove is vertically provided on the side plate (16), and the limiting guide rail (5) is vertically laid on one side of the partition plate (17); the fixed pulley assembly (7) comprises a pair of fixed pulleys, and the fixed pulley axles (19) thereof are installed on the bracket assembly (1); the movable pulley assembly (4) comprises a movable pulley and a stack of counterweights (3), and the two ends of the movable pulley axle (10) slide vertically up and down in the limiting guide rails (5) and the sliding groove, and a stack of counterweights (3) is hung on the lower part of the movable pulley axle (10); the nickel liquid pipe (11) passes around a fixed pulley, a movable pulley and another fixed pulley in sequence.

3. The telescopic pipeline mechanism for the automatic nickel brushing workstation according to claim 1 is characterized in that: The cable expansion and contraction assembly comprises a pair of limiting guide rails (5), a set of fixed pulley assemblies (7) and a set of movable pulley assemblies (4); a sliding groove is vertically provided on the side plate (16), and the limiting guide rail (5) is vertically laid on the other side of the partition plate (17); the fixed pulley assembly (7) comprises a pair of fixed pulleys, and the fixed pulley axles (19) thereof are installed on the bracket assembly (1); the movable pulley assembly (4) comprises a movable pulley and a stack of counterweights (3), and the two ends of the movable pulley axle (10) slide vertically up and down in the limiting guide rails (5) and the sliding groove, and a stack of counterweights (3) is hung on the lower part of the movable pulley axle (10); the cable (12) passes around a fixed pulley, a movable pulley and another fixed pulley in sequence.

4. The telescopic pipeline mechanism for an automatic nickel brushing workstation according to claim 1 is characterized in that: An upper limit sensor (6) and a lower limit sensor (2) are respectively installed at the upper end and the lower end of the slide groove of the side plate (16).

5. The telescopic pipeline mechanism for the automatic nickel brushing workstation according to claim 1 is characterized in that: Two limit blocks (13) are installed on the top of the support assembly (1) near one end of the brush holder (8); the limit blocks (13) have through holes for the nickel liquid pipe (11) or the cable (12) to pass through, thereby achieving limit.

6. The telescopic pipeline mechanism for the automatic nickel brushing workstation according to claim 1 is characterized in that: A hanging groove (14) is formed at one end of the brush holder (8) away from the bracket assembly (1); the hanging groove (14) and a grabbing head (15) protruding from the top of the brush handle (9) are detachably mounted; the grabbing head (15) and the hanging groove (14) are connected and disconnected by moving the brush handle (9) horizontally.

7. The telescopic pipeline mechanism for an automatic nickel brushing workstation according to claim 1, characterized in that: The other end of the nickel liquid pipe (11) is connected to the nickel liquid tank, and the other end of the cable (12) is connected to the distribution box.

8. The telescopic pipeline mechanism for an automatic nickel brushing workstation according to claim 1, characterized in that: The brush handle (9) is taken out and returned to its original position by a grabbing head (15) on the top driven by a six-axis robot.

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