High-precision weighing mechanism of fluorination furnace

Abstract

The invention provides a high-precision weighing mechanism of a fluorination furnace, which comprises a weighing mechanism, the weighing mechanism comprises a support, a weighing instrument is fixed on the support through an inner hexagon screw, a floating joint is mounted on the weighing instrument, a weighing connecting shaft is screwed on the floating joint through an opening wrench, and the mounting position of the floating joint coincides with the central position of an inner hole of the support; a male plug of the weighing instrument is connected with an outgoing line female plug of the slide wire ring, the slide wire ring is installed on a sealing cover through a cross recessed pan head screw, the outgoing line direction of the slide wire ring is consistent with the direction of an incoming line hole of the sealing cover, an outgoing line of the slide wire ring penetrates through the incoming line hole of the sealing cover, and the female plug is used for wiring. The sealing cover is installed on the support through a cross recessed countersunk head screw. According to the invention, the weighing instrument is used in a vacuum environment, the weighing accuracy is ensured, the wiring mode is a slide wire ring, and the stability of an output electric signal is prevented when the weighing instrument rotates.

Description

Technical Field

[0001] The invention relates to the field of fluorination furnaces, and in particular to a high-precision weighing mechanism for a fluorination furnace. Background Art

[0002] During the fluoride crystal pulling process, fluoride crystals can be pulled according to the weight measured by a weighing instrument, but the existing weighing instruments have poor accuracy and stability, which affects the subsequent weighing accuracy. Summary of the invention

[0003] In view of the problems existing in the prior art, the present invention provides a high-precision weighing mechanism for a fluorination furnace to solve at least one of the above technical problems.

[0004] The technical solution of the present invention is: a high-precision weighing mechanism for a fluorination furnace, comprising a weighing mechanism, characterized in that the weighing mechanism comprises a support, a weighing instrument is fixed to the support by a hexagon socket screw, a floating joint is installed on the weighing instrument, a weighing connecting shaft is screwed to the floating joint by an open wrench, and the installation position of the floating joint coincides with the center position of the inner hole of the support;

[0005] The male plug of the weighing instrument is connected to the female plug of the wire sliding ring, and the wire sliding ring is installed on a sealing cover by a cross-slot pan head screw. The wire outlet direction of the wire sliding ring is consistent with the direction of the wire inlet hole of the sealing cover. The wire outlet of the wire sliding ring passes through the wire inlet hole of the sealing cover and is wired using a female plug. The sealing cover is installed on a support by a cross-slot countersunk screw.

[0006] The weighing instrument of the present invention is placed in a vacuum environment for use, thereby ensuring the accuracy of weighing, and the wiring method adopts a sliding wire ring to prevent the stability of the output electric signal of the weighing instrument when it rotates.

[0007] Further preferably, the cross recessed countersunk screws are symmetrically installed and firmly fixed.

[0008] Further preferably, a sealing ring is provided on the inner wall of the sealing cover to optimize the sealing effect.

[0009] Further preferably, a connecting flange is fixed to the support via a hexagon socket screw, and the support is mounted on the rotating seed crystal rod via the connecting flange.

[0010] The weighing instrument is inside the entire cover and rotates together with the seed crystal rod to ensure the precision requirements of weighing. In order to ensure the accuracy of weighing, the connecting joint adopts a floating joint structure, so that even if the weight increases, the seed crystal rod always remains in a vertical state.

[0011] Further preferably, a support plate is provided below the support, support rods are respectively installed at the four corners of the lower surface of the support plate, the support rods are fixed by hexagon socket countersunk screws, and a lower cover plate of the heating tank is installed at the center of the upper surface of the support plate by hexagon socket screws.

[0012] The heating temperature control structure ensures the stability of the weighing instrument's accuracy in a constant temperature environment.

[0013] Further preferably, a spring-flattening pad is provided at the connection between the support plate and the lower cover plate of the heating tank.

[0014] The installation firmness effect is optimized.

[0015] Further preferably, a heating tank fixing seat is provided at the outer edge of the support plate, a heat preservation cover is installed on the heating tank fixing seat, the heat preservation cover is installed with the heating tank fixing seat by cross slot pan head screws, and the top of the heat preservation cover is covered with a heat preservation cover plate.

[0016] In order to ensure that the temperature is not affected by different seasons, an insulation cover is used to prevent sudden temperature changes.

[0017] Further preferably, the heat-insulating cover is provided with heat-insulating cotton, which can provide a better heat-insulating effect for the weighing device.

[0018] Further preferably, a heating groove is provided on the inner side of the heating groove fixing seat, and the heating groove is mounted on the support plate by four hexagon socket screws, and the outlet wire of the sliding wire ring passes through the heating groove.

[0019] Further preferably, the upper end surface of the heating tank is provided with a heating tank upper cover plate, and the heating tank lower cover plate is located at the lower end of the heating tank.

[0020] It can realize upper and lower heating to make the heating even.

[0021] Further preferably, the outer wall of the heating tank is bonded with a thermocouple heater by high-temperature double-sided adhesive, and the outlet wires of the thermocouple heater and the outlet wires of the sliding wire ring pass through the entire insulation cover together, so as to facilitate subsequent wiring.

[0022] Further preferably, the wires of the sliding wire ring are led out through a wire clamp, and the wires of the thermocouple heater are also fixed on the wire clamp.

[0023] This can fix the wiring harness and facilitate wiring.

[0024] Because the weighing instrument of the present invention needs to rotate, it must have a sliding wire ring for wiring. The weighing instrument signal and power supply must be connected through the sliding wire ring. In order to ensure that the weighing will not cause the seed crystal rod to be non-vertical due to the deformation of the weighing instrument under force, a floating joint is used for connection. The weight of the crystal is transmitted to the floating joint through the seed crystal rod, and the floating joint is connected to the weighing instrument. After the weighing instrument is subjected to force, there is a certain electrical signal, which is connected to the weighing instrument controller through the sliding wire ring cable to display the real-time weight signal, and the crystal pulling diameter is controlled by the weight signal. In order to ensure that the weighing instrument is not affected by different environments, such as temperature or humidity, a heating temperature control device is added to ensure that the weighing instrument always works in a constant temperature environment and the weighing accuracy is not affected.

[0025] Beneficial effects:

[0026] 1. The weighing instrument is used in a vacuum environment to ensure the accuracy of weighing.

[0027] 2. The wiring method uses a sliding wire ring to prevent the output electrical signal stability of the weighing instrument when it rotates.

[0028] 3. The weighing instrument is inside the whole cover and rotates with the seed crystal rod to ensure the accuracy of weighing.

[0029] 4. In order to ensure the weighing accuracy and reduce the temperature environment, which will affect the weighing accuracy, a heating temperature control structure is adopted.

[0030] 5. In order to ensure that the temperature is not affected by different seasons, there is thermal insulation cotton inside the thermal insulation cover to prevent rapid temperature changes.

[0031] 6. In order to ensure the accuracy of weighing, the connecting joint adopts a floating joint structure, so that the seed crystal rod always remains vertical even if the weight increases. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a cross-sectional view of the present invention;

[0033] Figure 2 It is a schematic diagram of the three-dimensional structure of the present invention;

[0034] Figure 3 It is the front view of the present invention.

[0035] In the figure: 1, support 2, sealing cover 3, sliding wire ring 4, sealing ring 5, cross recessed pan head screw 6, cross recessed countersunk screw 7, weighing connecting shaft 8, weighing instrument 9, floating joint 10, support plate 11, support rod 12, heating tank fixing seat 13, heating tank 14, heating tank upper cover 15, heating tank lower cover 16, insulation cover 17, insulation cover 18, wire clamp 19, connecting flange 20, thermocouple heater DETAILED DESCRIPTION

[0036] The present invention will be further described below in conjunction with the accompanying drawings.

[0037] Reference Figure 1-Figure 3 As shown, a high-precision weighing mechanism for a fluorination furnace includes a weighing mechanism, which includes a support 1, on which a weighing instrument 8 is fixed by a hexagon socket screw, a floating joint 9 is installed on the weighing instrument, and a weighing connecting shaft 7 is screwed to the floating joint by an open wrench, and the installation position of the floating joint coincides with the center position of the inner hole of the support; the male plug of the weighing instrument is connected to the outlet female plug of the sliding wire ring 3, and the sliding wire ring is installed on a sealing cover 2 by a cross groove pan head screw 5, and the outlet direction of the sliding wire ring is consistent with the direction of the inlet hole of the sealing cover, the outlet of the sliding wire ring passes through the inlet hole of the sealing cover, and is connected with a female plug, and the sealing cover is installed on the support by a cross groove countersunk screw 6.

[0038] The weighing instrument of the present invention is placed in a vacuum environment for use, thereby ensuring the accuracy of weighing, and the wiring method adopts a sliding wire ring to prevent the stability of the output electric signal of the weighing instrument when it rotates.

[0039] Further preferably, the cross recessed countersunk screws are symmetrically installed and firmly fixed.

[0040] Further preferably, a sealing ring 4 is provided on the inner wall of the sealing cover to optimize the sealing effect.

[0041] Further preferably, the support is fixed with a connecting flange 19 by means of a hexagon socket screw, and the support is mounted on the rotating seed crystal rod by means of the connecting flange. The weighing instrument is in the entire cover, and rotates together with the seed crystal rod to ensure the accuracy of weighing. In order to ensure the accuracy of weighing, the connecting joint adopts a floating joint structure, so that the seed crystal rod always remains in a vertical state even if the weight increases.

[0042] Further preferably, a support plate 10 is provided below the support, and support rods 11 are respectively installed at the four corners of the lower surface of the support plate, and the support rods are fixed by hexagon socket countersunk screws, and a heating tank lower cover is installed at the center of the upper surface of the support plate by hexagon socket screws. The heating temperature control structure ensures the stability of the accuracy of the weighing instrument in a constant temperature environment.

[0043] Further preferably, a spring-flat pad is provided at the connection between the support plate and the lower cover plate of the heating tank, thereby optimizing the installation firmness effect.

[0044] Further preferably, the outer edge of the support plate is provided with a heating tank fixing seat 12, on which a heat preservation cover 16 is installed, which is installed with the heating tank fixing seat by cross slot pan head screws, and the top of the heat preservation cover is covered with a heat preservation cover plate 17. In order to ensure that the temperature is not affected by different seasons, the heat preservation cover is used to prevent the temperature from changing rapidly.

[0045] Further preferably, a heat-insulating cotton is arranged in the heat-insulating cover, which can provide a better heat-insulating effect for the weighing device.

[0046] Further preferably, a heating groove 14 is provided on the inner side of the heating groove fixing seat, and the heating groove is mounted on the supporting plate by four hexagon socket screws, and the outlet wire of the sliding wire ring passes through the heating groove.

[0047] More preferably, the upper end surface of the heating tank is provided with a heating tank upper cover plate 15, and the heating tank lower cover plate is located at the lower end of the heating tank, so that upper and lower heating can be achieved and the heating can be uniform.

[0048] Further preferably, the outer wall of the heating tank is bonded with a thermocouple heater 20 by high-temperature double-sided adhesive, and the outgoing wires of the thermocouple heater and the outgoing wires of the sliding wire ring pass through the entire insulation cover together, so as to facilitate subsequent wiring.

[0049] Further preferably, the wires of the sliding wire loop are led out through the wire clamp 18, and the wires of the thermocouple heater are also fixed on the wire clamp, so that the wire harness can be fixed and the wiring is convenient.

[0050] Beneficial effects:

[0051] 1. The weighing instrument is used in a vacuum environment to ensure the accuracy of weighing.

[0052] 2. The wiring method uses a sliding wire ring to prevent the output electrical signal from being unstable when the weighing instrument rotates.

[0053] 3. The weighing instrument is inside the whole cover and rotates together with the seed crystal rod to ensure the accuracy of weighing.

[0054] 4. In order to ensure the weighing accuracy and reduce the temperature environment, which will affect the weighing accuracy, a heating temperature control structure is adopted.

[0055] 5. In order to ensure that the temperature is not affected by different seasons, there is thermal insulation cotton inside the thermal insulation cover to prevent rapid temperature changes.

[0056] 6. In order to ensure the accuracy of weighing, the connecting joint adopts a floating joint structure, so that the seed crystal rod always remains vertical even if the weight increases.

[0057] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A high-precision weighing mechanism for a fluorination furnace, comprising a weighing mechanism, characterized in that: The weighing mechanism comprises a support, a weighing instrument is fixed on the support by means of a hexagon socket screw, a floating joint is installed on the weighing instrument, a weighing connecting shaft is screwed onto the floating joint by means of an open wrench, and the installation position of the floating joint coincides with the center position of the inner hole of the support; The male plug of the weighing instrument is connected to the female plug of the wire sliding ring, and the wire sliding ring is installed on a sealing cover by a cross-slot pan head screw. The wire outlet direction of the wire sliding ring is consistent with the direction of the wire inlet hole of the sealing cover. The wire outlet of the wire sliding ring passes through the wire inlet hole of the sealing cover and is wired using a female plug. The sealing cover is installed on a support by a cross-slot countersunk screw.

2. A high-precision weighing mechanism for a fluorination furnace according to claim 1, characterized in that: The cross recessed countersunk screws are installed symmetrically.

3. A high-precision weighing mechanism for a fluorination furnace according to claim 1, characterized in that: The support is fixed with a connecting flange via a hexagon socket screw, and the support is mounted on the rotating seed crystal rod via the connecting flange.

4. A high-precision weighing mechanism for a fluorination furnace according to claim 1, characterized in that: A support plate is provided below the support, and support rods are respectively installed at the four corners of the lower surface of the support plate, and the support rods are fixed by hexagon socket countersunk screws. A heating tank lower cover is installed at the center of the upper surface of the support plate by hexagon socket screws.

5. A high-precision weighing mechanism for a fluorination furnace according to claim 4, characterized in that: A spring-flat pad is also provided at the connection between the support plate and the lower cover plate of the heating tank.

6. A high-precision weighing mechanism for a fluorination furnace according to claim 4, characterized in that: A heating tank fixing seat is arranged on the outer edge of the support plate, a heat preservation cover is installed on the heating tank fixing seat, the heat preservation cover is installed with the heating tank fixing seat by cross slot pan head screws, and the top of the heat preservation cover is covered with a heat preservation cover plate.

7. A high-precision weighing mechanism for a fluorination furnace according to claim 6, characterized in that: The heat-insulating cover is provided with heat-insulating cotton.

8. A high-precision weighing mechanism for a fluorination furnace according to claim 6, characterized in that: A heating groove is provided on the inner side of the heating groove fixing seat. The heating groove is mounted on the supporting plate by four hexagon socket screws. The outlet wire of the sliding wire ring passes through the heating groove.

9. A high-precision weighing mechanism for a fluorination furnace according to claim 8, characterized in that: The upper end surface of the heating tank is provided with a heating tank upper cover plate, and the heating tank lower cover plate is located at the lower end of the heating tank.

10. A high-precision weighing mechanism for a fluorination furnace according to claim 8, characterized in that: The outer wall of the heating tank is bonded with a thermocouple heater by high-temperature double-sided adhesive, and the outlet wires of the thermocouple heater and the outlet wires of the sliding wire ring pass through the entire heat-insulating cover together.

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