Large-stroke flexible two-dimensional positioning platform based on S-shaped sheet

Abstract

The invention discloses a large-stroke flexible two-dimensional positioning platform based on an S-shaped sheet. The large-stroke flexible two-dimensional positioning platform comprises a rigid outer frame, a flexible translation hinge, a flexible compensation module, a linear driving module and an output moving platform, and the whole body is arranged in a centrosymmetric cross-shaped structure. The flexible translation hinge is of an S-shaped sheet structure, the two sides of the flexible translation hinge are fixedly connected with the rigid outer frame and the flexible compensation module correspondingly, and driving guiding and balanced stress are provided for the output movable platform. And the interference of parasitic displacement in the working direction of the non-driving module of the movable platform is isolated and output through synchronous and reverse passive deformation of the two four-bar structures of the flexible compensation module. Precise positioning and large-stroke adjustment of the output movable platform are achieved through isolation of parasitic motion by the flexible compensation module and bending deformation of the S-shaped sheets.

Description

Technical Field

[0001] The invention belongs to the field of precision optical machinery, and in particular relates to a long-stroke flexible two-dimensional positioning platform based on an S-shaped sheet. Background Art

[0002] In cutting-edge fields such as high-power laser technology, semiconductor lithography, ultra-precision machining and assembly, and nanotechnology, it is crucial to achieve extremely fine positioning and motion control, and therefore there is an urgent need for high-performance precision positioning workbench technology. In order to obtain micro-nano positioning accuracy, excellent stability, rigidity, and rapid response, flexible elements are introduced into the design of precision positioning platforms to solve key problems such as creeping, backlash, and wear that are prone to occur in traditional rigid hinge mechanisms during movement, thereby significantly improving the overall performance of the system.

[0003] At present, most precision positioning platforms tend to use notch-type flexible hinges as their core flexible components. Although they have shown significant advantages in sub-micron and even nanometer positioning accuracy, their range of motion is limited to a scale of tens of microns, making it difficult to meet the needs of some larger travels. On the other hand, although some precision positioning platforms can achieve a relatively wide range of motion, they are often accompanied by problems such as insufficient positioning accuracy or complex structural design and large size.

[0004] Therefore, exploring and developing a precision positioning platform that can ensure high-precision positioning, achieve a large range of motion, and maintain a compact structure and rapid response has become a hot topic and challenge in current research. Summary of the invention

[0005] To solve the above problems, the purpose of the present invention is to propose a long-stroke flexible two-dimensional positioning platform based on an S-shaped sheet, which realizes precise positioning and long-stroke adjustment of the output moving platform through the isolation of parasitic motion by the flexible compensation module and the bending deformation of the S-shaped sheet.

[0006] The technical solution of the present invention is as follows:

[0007] A long-stroke flexible two-dimensional positioning platform based on an S-shaped sheet is characterized in that the overall centrally symmetrical cross-shaped structure is arranged, including:

[0008] Rigid outer frame;

[0009] The flexible translation hinge is an I-shaped structure, the middle connection part of which adopts an S-shaped sheet, and the two ends are respectively connected to the rigid outer frame and the flexible compensation module for fixed connection, which is used to provide driving guidance and balanced force for the output dynamic platform;

[0010] A flexible compensation module, comprising two four-bar structures, which can be passively deformed synchronously and oppositely to compensate for the parasitic displacement generated by the motion of the output moving platform;

[0011] A linear drive module, used to drive the flexible compensation module and then drive the output moving platform to generate displacement;

[0012] An output moving platform, connected to the flexible compensation module, and used to generate displacement and achieve positioning under the action of the linear drive module;

[0013] The flexible compensation module is used to compensate for the parasitic displacement caused by the movement of the platform, and includes an output rigid block, a first flexible branch chain group, a transition rigid block, a second flexible branch chain group, and a compensation outer frame. The first four-bar structure is composed of the output rigid block, the transition rigid block, and the first flexible branch chain group connecting the output rigid block and the transition rigid block; the compensation outer frame is a semi-open frame type, which is used to accommodate the first four-bar structure, and is divided into opening part 1, opening part 2, driving part, connection part 1, and connection part 2 in sequence. The opening part 1 and the opening part 2 of the compensation outer frame are connected to the transition rigid block through the second flexible branch chain group to form a second four-bar structure. The first connection part of the compensation outer frame is fixed to at least one end of two flexible translation hinges, and the other ends of the two flexible translation hinges are fixed to the inner wall of the rigid outer frame; the second connection part of the compensation outer frame is fixed to at least one end of two flexible translation hinges, and the other ends of the two flexible translation hinges are fixed to the inner wall of the rigid outer frame; the driving part of the compensation outer frame is fixed to the inner wall of the rigid outer frame through a linear driving module; the output rigid block is fixed to the outer wall of the output moving platform. Through the first four-bar structure and the second four-bar structure connected in series with the transition rigid block, when the platform moves, it can passively generate deformations in opposite directions and the same degree along the X-axis direction of the coordinate system of the flexible compensation module, ensuring that the output rigid block and the compensation outer frame do not generate relative displacement in the Y-axis direction, thereby offsetting the parasitic displacement and improving the positioning accuracy.

[0014] Furthermore, the two four-bar structures of the flexible compensation module include a first four-bar structure and a second four-bar structure, which can be staggered in the Y-axis direction of the coordinate system of the flexible compensation module. When the output moving platform moves, a larger space can be reserved for the deformation of the first four-bar structure and the second four-bar structure, thereby increasing the ability to compensate for parasitic displacement.

[0015] Furthermore, the linear drive module is fixedly connected to the compensation outer frame drive part of the flexible compensation module and the rigid outer frame respectively.

[0016] Furthermore, when there are two linear drive modules, their working directions are guaranteed to be perpendicular to each other; when there are four linear drive modules, the linear drive modules with the same working direction need to ensure that the driving displacement and driving direction are the same.

[0017] Furthermore, the performance parameters of the first flexible branch chain group 32 and the second flexible branch chain group 34 when designed should be completely the same, and they are centralized flexibility branches, both ends of which are provided with notches, and flexible hinges are formed inside the notches;

[0018] Furthermore, the flexible translation hinge is equivalent to a conventional linear spring-shaped flexible hinge, but has additional elongation capacity; the four flexible translation hinges located on both sides of the flexible compensation module and arranged symmetrically in a parallelogram together provide driving guidance and balanced force. Furthermore, the whole is located on the same plane and has the same thickness, and is integrally processed and formed using a wire cutting machine.

[0019] When the platform needs to move in a certain direction, during single-direction adjustment, the linear drive module in the corresponding driving direction works and pushes the output moving platform to generate displacement through the flexible compensation module. The four translational flexible hinges connected to the driven flexible compensation module are offset and deformed together to assist in guiding. At the same time, the translational flexible hinge itself is slightly stretched by force to reduce excessive pulling on the flexible compensation module caused by insufficient length during the offset process.

[0020] At this time, the flexible compensation module in the driving direction (pushed by the linear drive module) does not deform;

[0021] The compensation module frame of the flexible compensation module in the non-driving direction does not move, but the first four-bar structure and the second four-bar structure will produce the same degree of deformation in the opposite direction relative to the transition rigid block due to the displacement of the output moving platform. During this deformation process, the transition rigid block moves half of the output moving platform in the required driving direction, accompanied by a parasitic displacement close to the output moving platform along the Y-axis direction of the coordinate system of the flexible compensation module. Because the first four-bar structure and the second four-bar structure have the same degree of deformation and are connected in series through the transition rigid block, the parasitic displacement is limited to the transition rigid block and will not further push the output rigid block to move along the Y-axis direction of the coordinate system of the flexible compensation module to cause the displacement of the output moving platform in the non-driving direction, thereby achieving the isolation of the driving direction displacement and the parasitic displacement in the non-driving direction, and realizing the decoupling in two-dimensional driving.

[0022] The parallelogram symmetrical arrangement of four flexible translation hinges provides driving guidance and balanced force to ensure the smooth operation of the platform.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] 1. The present invention can achieve high-precision positioning performance with a large stroke while being small and compact in overall size. The driving module is driven by the flexible compensation module and isolates the displacement interference of the output moving platform in the working direction of the non-driving module. The flexible compensation module and the bending deformation of the S-shaped sheet realize the precise positioning and posture control of the moving platform.

[0025] 2. The present invention uses an S-shaped sheet as a flexible element to increase the flexibility of the hinge and reduce stress concentration. Subsequently, a positioning platform with different workspace properties can be obtained according to the size design of the flexible hinge and the optimization of the kinematic model;

[0026] 3. The flexible compensation module used in the present invention can stagger the two series four-bar structures to increase the working range of the positioning platform;

[0027] 4. The present invention is entirely located on the same plane and has the same thickness, and can be integrally processed by a wire cutting machine, thus avoiding overall assembly and transmission errors. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present application and should not be regarded as limiting the scope of protection of the present application.

[0029] Figure 1 This is a schematic diagram of the structure of a long-stroke flexible two-dimensional positioning platform based on an S-shaped sheet according to an embodiment of the present invention;

[0030] Figure 2 A three-dimensional diagram of a long-stroke flexible two-dimensional positioning platform based on an S-shaped sheet according to an embodiment of the present invention;

[0031] Figure 3 It is a structural schematic diagram of the flexible translation hinge in the present invention;

[0032] Figure 4 is a schematic diagram of a flexible compensation module in the present invention;

[0033] Figure 5 A schematic diagram of a flexible compensation module and a first and a second four-bar structure that can be selected according to an embodiment of the present invention;

[0034] Figure 6 This is a schematic diagram of a deformation state in a single direction of an embodiment of the present invention (enlarged scale);

[0035] Figure 7 It is a schematic diagram of the bidirectional deformation state of an embodiment of the present invention (enlarged scale);

[0036] In the figure:

[0037] 1- Rigid outer frame;

[0038] 2-Flexible translation hinge;

[0039] 3-Flexible compensation module: 31-output rigid block, 32-first flexible branch chain group, 33-transition rigid block, 34-second flexible branch chain group, 35-compensation outer frame, 3511-opening part 1, 3512-opening part 2, 352-driving part, 3531-connecting part 1, 3532-connecting part 2, 36-second four-bar structure, 37-second flexible branch chain group;

[0040] 4-Linear drive module;

[0041] 5- Output dynamic platform. DETAILED DESCRIPTION

[0042] The technical solution of the present invention is further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereto.

[0043] See also Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of the structure of a long-travel flexible two-dimensional positioning platform based on an S-shaped sheet according to an embodiment of the present invention. Figure 2 This is a three-dimensional diagram of a large-stroke flexible two-dimensional positioning platform based on an S-shaped thin sheet according to an embodiment of the present invention. As shown in the figure, a large-stroke flexible two-dimensional positioning platform based on an S-shaped thin sheet has an overall structure arranged in a centrally symmetrical cross shape, including a rigid outer frame 1, a flexible translation hinge 2, a flexible compensation module 3, a linear drive module 4 and an output dynamic platform 5.

[0044] Rigid outer frame 1: As the supporting frame of the entire platform, it is made of high-strength material to ensure the stability and rigidity of the platform.

[0045] like Figure 3 As shown, the flexible translation hinge 2 is an I-shaped one, and the middle connecting part adopts an S-shaped thin sheet. The flexible translation hinge 2 is equivalent to a conventional linear spring-shaped flexible hinge, but has an additional extension capacity, which improves the travel and flexibility of the platform; Figure 1 As shown, the four flexible translation hinges 2 located on both sides of the flexible compensation module 3 and arranged symmetrically in a parallelogram together provide driving guidance and balanced force to ensure the smooth operation of the platform.

[0046] like Figure 4As shown, the flexible compensation module 3 is used to compensate for the parasitic displacement caused by the movement of the platform, and includes an output rigid block 31, a first flexible branch chain group 32, a transition rigid block 33, a second flexible branch chain group 34, and a compensation outer frame 35. A first four-bar structure 36 is formed by the output rigid block 31, the transition rigid block 33, and the first flexible branch chain group 32 connecting the output rigid block 31 and the transition rigid block 33; the compensation outer frame 35 is a semi-open frame type, used to accommodate the first four-bar structure 36, and is divided into an opening part 1 3511, an opening part 2 3512, a driving part 352, a connection part 1 3531, and a connection part 2 3532 in sequence. The opening part 1 3511 and the opening part 2 3512 of the compensation outer frame 35 are connected to the transition rigid block 33 through the second flexible branch chain group 34 to form a second four-bar structure 37. The connection part 1 3531 of the compensation outer frame 35 is fixed to at least one end of the two flexible translation hinges 2, and the other ends of the two flexible translation hinges 2 are fixed to the inner wall of the rigid outer frame 1; the connection part 2 3532 of the compensation outer frame 35 is fixed to at least one end of the two flexible translation hinges 2, and the other ends of the two flexible translation hinges 2 are fixed to the inner wall of the rigid outer frame 1; the driving part 352 of the compensation outer frame 35 is fixed to the inner wall of the rigid outer frame 1 through the linear driving module 4; the output rigid block 31 is fixed to the outer wall of the output moving platform 5. The first four-bar structure 36 and the second four-bar structure 37 connected in series by the transition rigid block 33 can passively generate deformations of opposite directions and the same degree along the X-axis direction of the coordinate system of the flexible compensation module 3 when the platform moves, ensuring that the output rigid block 31 and the compensation outer frame 35 do not generate relative displacement in the Y-axis direction, thereby offsetting the parasitic displacement and improving the positioning accuracy.

[0047] like Figure 5 As shown, the two four-bar structures of the flexible compensation module include a first four-bar structure and a second four-bar structure, which can be staggered in the Y-axis direction of the coordinate system of the flexible compensation module. When the output moving platform moves, a larger space can be reserved for the deformation of the first four-bar structure and the second four-bar structure, thereby increasing the ability to compensate for parasitic displacement.

[0048] Linear drive module 4: connects the drive part 352 of the compensation outer frame 34 and the rigid outer frame 1, thereby limiting the freedom of the flexible compensation module 3 and providing a single degree of freedom displacement drive along the Y-axis of the flexible compensation module coordinate system. By controlling the displacement of the linear drive module 4 in different working directions, the two-dimensional positioning of the platform can be achieved.

[0049] Output moving platform 5: It is the final execution component of the platform and is fixedly connected to the output rigid block 31 of the flexible compensation module 3. The output moving platform 5 is displaced by the combined action of the linear drive module 4, the flexible compensation module 3 and the flexible translation hinge 2 to achieve the positioning function.

[0050] like Figure 6 As shown, when the output moving platform 5 moves, the first four-bar structure 36 and the second four-bar structure 37 of the flexible compensation module 3 will passively generate deformations of opposite directions and the same degree along the X-axis of the coordinate system of the flexible compensation module 3, and ensure that the output rigid block 31 and the compensation frame 35 do not generate relative displacement in the Y-axis direction, thereby compensating for the parasitic displacement caused by the deformation of the four-bar structure. At this time, the position of the compensation frame 35 in the X-axis direction of the coordinate system of the flexible compensation module 3 remains basically unchanged, avoiding the parasitic displacement and coupling caused by the deformation of the parallel mechanism affecting the input accuracy of the linear drive module at the corresponding position.

[0051] When there are two linear drive modules 4, their working directions are guaranteed to be perpendicular to each other; when there are four linear drive modules 4, the linear drive modules 4 with the same working direction need to ensure that the driving displacement and driving direction are the same.

[0052] The performance parameters of the first flexible branch chain group 32 and the second flexible branch chain group 34 should be completely the same when they are designed, and they are centralized flexibility branches, both ends of which are provided with notches, and flexible hinges are formed inside the notches;

[0053] The specific working principle and process are as follows:

[0054] The movement direction of the flexible compensation module 3 is constrained by the correspondingly connected linear drive module 4 and the flexible translation hinges 2 on both sides thereof, and the freedom of the compensation outer frame 34 of the flexible compensation module 3 to move along the Y-axis direction of the coordinate system of the flexible compensation module 3 is retained and controlled by the linear drive module 4;

[0055] like Figure 6As shown, when the single-direction adjustment is working, the linear drive module 4 in the corresponding driving direction works and pushes the output movable platform 5 to generate displacement through the flexible compensation module 3, and the four translational flexible hinges 2 connected to the driven flexible compensation module 3 are offset and deformed together to assist the guide, and at the same time, the translational flexible hinge 2 itself is slightly stretched by force, thereby reducing the excessive pulling on the flexible compensation module 3 caused by insufficient length during the offset process, but at this time, the flexible compensation module 3 in the driving direction (pushed by the linear drive module 4) does not deform; the compensation frame 35 of the flexible compensation module 3 in the non-driving direction does not move, but the first four-bar structure 36 and the second four-bar structure 37 will produce deformations in the opposite direction and to the same degree relative to the transition rigid block 33 due to the displacement of the output movable platform 5. During this deformation process, the amount of movement of the transition rigid block 33 in the required driving direction is half of the amount of movement of the output movable platform 5, and is accompanied by a parasitic displacement close to the output movable platform 5 along the Y-axis direction of the coordinate system of the flexible compensation module 3. Because the deformation degrees of the first four-bar structure 36 and the second four-bar structure 37 are the same, and the two are connected in series through the transition rigid block 33, the parasitic displacement is limited to the transition rigid block 33, and will not further push the output rigid block 31 to move along the Y-axis direction of the coordinate system of the flexible compensation module 3 to cause the displacement of the output movable platform 5 in the non-driving direction, thereby achieving isolation of the driving direction displacement and the parasitic displacement in the non-driving direction, and realizing decoupling in two-dimensional drive.

[0056] like Figure 7 The simultaneous presence of drive in two directions shown can be viewed as a superposition of drive in a single direction.

[0057] The present invention increases the elongation capacity of the platform by adopting a flexible translation hinge with an S-shaped thin film design, thereby realizing flexible two-dimensional positioning with a large stroke. The S-shaped design not only improves the flexibility of the platform, but also ensures the stability of the platform during movement. The flexible compensation module can generate deformations of the same degree and opposite directions when the platform moves through the first four-bar structure and the second four-bar structure connected in series, effectively compensating for the parasitic displacement caused by the movement of the platform, improving the positioning accuracy of the platform, and avoiding the influence of the deformation of the parallel mechanism on the input accuracy of the linear drive module. The synergistic effect of the linear drive module and the flexible compensation module realizes the transmission of the displacement in the driving direction and the isolation of the drive in the non-driving direction, so that the simultaneous drive in the two directions can be regarded as the superposition of the drive in a single direction, thereby realizing the decoupling of the two-dimensional drive and improving the motion control performance of the platform. The rigid outer frame is made of high-strength material, which ensures the stability and rigidity of the entire platform, enables the platform to withstand large loads and deformations, and ensures the long-term stable operation of the platform.

[0058] In summary, the long-stroke flexible two-dimensional positioning platform based on the S-shaped sheet has remarkable technical effects such as long stroke, high precision, two-dimensional drive decoupling, stable and reliable structure and modular design. It is suitable for various application scenarios that require high-precision two-dimensional positioning.

Claims

1. A long-travel flexible two-dimensional positioning platform based on an S-shaped sheet, characterized in that: The overall centrally symmetrical cross-shaped structure includes: Rigid outer frame; The flexible translation hinge is an I-shaped structure, the middle connection part of which adopts an S-shaped sheet, and the two ends are respectively connected to the rigid outer frame and the flexible compensation module for fixed connection, which is used to provide driving guidance and balanced force for the output dynamic platform; A flexible compensation module, comprising two four-bar structures, which can be passively deformed synchronously and oppositely to compensate for the parasitic displacement generated by the motion of the output moving platform; A linear drive module, used to drive the flexible compensation module and then drive the output moving platform to generate displacement; The output moving platform is connected to the flexible compensation module and is used to generate displacement and achieve positioning under the action of the linear drive module.

2. The long-travel flexible two-dimensional positioning platform based on the S-shaped sheet according to claim 1 is characterized in that: The flexible compensation module is used to compensate for the parasitic displacement caused by the movement of the platform, and includes an output rigid block, a first flexible branch chain group, a transition rigid block, a second flexible branch chain group, and a compensation outer frame; a first four-bar structure composed of the output rigid block, the transition rigid block, and the first flexible branch chain group connecting the output rigid block and the transition rigid block; the compensation outer frame is a semi-open frame type, used to accommodate the first four-bar structure, and itself is divided into opening part 1, opening part 2, driving part, connection part 1, and connection part 2 in sequence; the opening part 1 and the opening part 2 of the compensation outer frame are connected to the transition rigid block through the second flexible branch chain group to form a second four-bar structure. The first connection part of the compensation outer frame is fixed to at least one end of two flexible translation hinges, and the other ends of the two flexible translation hinges are fixed to the inner wall of the rigid outer frame; the second connection part of the compensation outer frame is fixed to at least one end of two flexible translation hinges, and the other ends of the two flexible translation hinges are fixed to the inner wall of the rigid outer frame; the driving part of the compensation outer frame is fixed to the inner wall of the rigid outer frame through a linear driving module; the output rigid block is fixed to the outer wall of the output moving platform. Through the first four-bar structure and the second four-bar structure connected in series with the transition rigid block, when the platform moves, it can passively generate deformations in opposite directions and the same degree along the X-axis direction of the coordinate system of the flexible compensation module, ensuring that the output rigid block and the compensation outer frame do not generate relative displacement in the Y-axis direction, thereby offsetting the parasitic displacement and improving the positioning accuracy.

3. The long-stroke flexible two-dimensional positioning platform based on the S-shaped sheet according to claim 2 is characterized in that: The two four-bar structures of the flexible compensation module include a first four-bar structure and a second four-bar structure, which are staggered in the Y-axis direction of the coordinate system of the flexible compensation module. When the output movable platform moves, a larger space can be reserved for the deformation of the first four-bar structure and the second four-bar structure in opposite directions but to the same extent, thereby increasing the ability to compensate for the parasitic displacement caused by the movement of the output movable platform.

4. The long-travel flexible two-dimensional positioning platform based on an S-shaped sheet according to claim 1 is characterized in that: The linear drive module is respectively connected to the driving part and the rigid frame of the compensation outer frame of the flexible compensation module, so as to limit the freedom of the flexible compensation module and provide a single-degree-of-freedom displacement drive along the Y-axis of the coordinate system of the flexible compensation module; by controlling the displacement of the linear drive module in different working directions, the two-dimensional positioning of the platform is realized.

5. The long-travel flexible two-dimensional positioning platform based on the S-shaped sheet according to claim 4 is characterized in that: When there are two linear drive modules, their working directions are guaranteed to be perpendicular to each other; when there are four linear drive modules, the linear drive modules with the same working direction need to ensure that the driving displacement and driving direction are the same.

6. The long-travel flexible two-dimensional positioning platform based on an S-shaped sheet according to claim 2 is characterized in that: The performance parameters of the first flexible branch chain group and the second flexible branch chain group during design should be completely the same, and they are concentrated flexibility branches, both ends of which are provided with notches, and flexible hinges are formed inside the notches.

7. The long-travel flexible two-dimensional positioning platform based on an S-shaped sheet according to claim 1 is characterized in that: The flexible translational hinge is equivalent to a conventional straight spring-shaped flexible hinge, but has additional elongation capacity, which reduces excessive pulling on the flexible compensation module caused by insufficient length during the offset process; the four flexible translational hinges located on both sides of the flexible compensation module and symmetrically arranged in a parallelogram together provide drive guidance and balanced force.

8. A long-stroke flexible two-dimensional positioning platform based on an S-shaped sheet according to any one of claims 1 to 7, characterized in that: The whole is located on the same plane and has the same thickness, and is processed and formed in an integrated manner using a wire cutting machine.

9. A long-stroke flexible two-dimensional positioning platform based on an S-shaped sheet according to any one of claims 1 to 7, characterized in that: When adjusting in a single direction, the linear drive module in the corresponding driving direction works and pushes the output moving platform to generate displacement through the flexible compensation module. The four translational flexible hinges connected to the driven flexible compensation module are offset and deformed together to assist in guiding. At the same time, the translational flexible hinge itself is slightly stretched by force to reduce excessive pulling on the flexible compensation module caused by insufficient length during the offset process. However, the flexible compensation module in the driving direction (pushed by the linear drive module) does not deform at this time; the compensation module frame of the flexible compensation module in the non-driving direction does not move, but the first four-bar structure and the second four-bar structure will produce deformations in opposite directions and to the same degree relative to the transition rigid block due to the displacement of the output moving platform. During the deformation process, the amount of movement of the transition rigid block in the required driving direction is half of the amount of movement of the output moving platform, and is accompanied by a parasitic displacement close to the output moving platform along the Y-axis direction of the coordinate system of the flexible compensation module. Because the deformation degree of the first four-bar structure and the second four-bar structure is the same, and the two are connected in series through the transition rigid block, the parasitic displacement is limited to the transition rigid block, and will not further push the output rigid block to move along the Y-axis direction of the coordinate system of the flexible compensation module to cause the displacement of the output moving platform in the non-driving direction, thereby achieving isolation of the driving direction displacement drive and the parasitic displacement in the non-driving direction, and realizing decoupling in two-dimensional driving; The simultaneous existence of driving in two directions can be regarded as the superposition of driving in a single direction.

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