Laser scanning galvanometer with self-calibration system

Abstract

The invention provides a laser scanning galvanometer with a self-calibration system, and relates to the technical field of scanning galvanometers, the laser scanning galvanometer comprises a laser scanning galvanometer body, the laser scanning galvanometer body is internally provided with an inner cavity, the inner cavity is internally provided with a calibration structure, the calibration structure comprises a first calibration assembly, and a special-shaped support is fixedly installed on the inner wall of the inner cavity. A first circular groove is formed in the special-shaped support in a penetrating mode, the two first damping bearings are both arranged in the first circular groove, and outer rings of the two first damping bearings are both fixedly installed on the inner wall of the first circular groove. The overall structure of the calibration structure is mostly integrated on the special-shaped support, and the vibrating lens assembly on the high-speed motor generally has a replacement function, so that the first worm gear is conveniently arranged on the output shaft of the high-speed motor, additional installation on the existing basis is facilitated, the improvement cost is low, and the practicability is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of scanning galvanometers, and more specifically, particularly relates to a laser scanning galvanometer with a self-calibration system. Background Art

[0002] The laser scanning galvanometer is a key equipment used in laser processing, laser display and other fields. The laser scanning galvanometer is mainly composed of a galvanometer, a drive motor and a corresponding control system. Its working principle is to accurately control the drive motor through the control system to make the reflector swing rapidly on two mutually perpendicular axes, thereby changing the propagation direction of the laser. When the laser beam is irradiated on the reflector of the galvanometer, the angle change of the reflector will cause the laser beam to scan rapidly on the target plane.

[0003] 1. When using existing laser scanning galvanometers, some laser scanning galvanometers are installed on a certain device as an auxiliary component. During the operation of some devices, they may have vibration characteristics, which may cause the output shaft of the motor to slightly deviate. The existing laser scanning galvanometers lack a self-locking structure to lock the output shaft of the motor, which easily leads to a frequent increase in the number of calibrations required, and the practicality is insufficient and needs to be improved;

[0004] 2. The existing laser scanning galvanometer is usually used in conjunction with a robotic arm. However, the robotic arm will generate a large radial force during high-speed movement. During the movement, if the motor inside the laser scanning galvanometer is rotating, it is easy to cause the problem of offset. The lack of a self-locking structure easily causes deviations in subsequent laser printing. The practicality is insufficient and needs to be improved.

[0005] 3. When calibrating the existing laser scanning galvanometer, the calibration method in the prior art is usually semi-automatic, relatively dependent on the operator's experience, and easily interfered by human factors, which makes the calibration process more troublesome and less practical, and needs to be improved. Summary of the invention

[0006] In order to solve the above technical problems, the present invention provides a laser scanning galvanometer with a self-calibration system to solve the above problems.

[0007] A laser scanning galvanometer with a self-calibration system comprises a laser scanning galvanometer body, wherein an inner cavity is provided inside the laser scanning galvanometer body:

[0008] A calibration structure is provided inside the inner cavity;

[0009] The calibration structure comprises a first calibration assembly, which comprises a high-speed motor, a first worm gear, a special-shaped bracket, a first damping bearing, a rotating shaft, a first worm gear tooth group, a second worm gear tooth group, a servo motor, a connecting rod, a connecting block, a second damping bearing, a third damping bearing, a connecting shaft, an angle sensor and a second worm gear;

[0010] The special-shaped bracket is fixedly installed on the inner wall of the inner cavity, a first circular groove is opened inside the special-shaped bracket, two first damping bearings are arranged inside the first circular groove, and the outer rings of the two first damping bearings are fixedly installed on the inner wall of the first circular groove, the rotating shaft is fixedly installed between the inner rings of the first damping bearings, the first worm tooth group and the second worm tooth group are fixedly installed on the circumferential surface of the rotating shaft, the connecting rod is arranged on the inner side of the special-shaped bracket, the connecting block is fixedly installed on the upper end of the connecting rod, and a second circular groove and a third circular groove are respectively opened on the inner side of the connecting block, the second damping bearing is arranged inside the third circular groove, the connecting shaft is fixedly installed on the inner ring of the second damping bearing, the third damping bearing is arranged inside the second circular groove, the angle sensor is fixedly installed on the inner ring of the third damping bearing, and the second worm gear is fixedly installed between the output shaft of the angle sensor and the connecting shaft.

[0011] Preferably, the high-speed motor is fixedly installed inside the inner cavity, the two first worm gears are fixedly installed on the output shaft of the high-speed motor, the second worm tooth group is located below the first worm gear, the first worm gear is meshed with the second worm tooth group, the servo motor is fixedly installed on the side wall of the special-shaped bracket, and the output shaft of the servo motor is fixedly installed on the rotating shaft.

[0012] Preferably, the overall shape of the connecting block is "U"-shaped, the outer ring of the second damping bearing is fixedly mounted on the inner wall of the third circular groove, the connecting shaft portion is exposed outside the third circular groove, and the outer ring of the third damping bearing is fixedly mounted on the inner wall of the second circular groove.

[0013] Preferably, the angle sensor is partially exposed outside the second circular groove, the second worm gear is located above the first worm gear tooth group, the second worm gear is meshingly installed with the first worm gear tooth group, a second correction assembly is arranged inside the inner cavity, and the overall structure of the first correction assembly and the second correction assembly are consistent.

[0014] Preferably, the first correction assembly is arranged horizontally, and the second correction assembly is arranged vertically. A galvanometer lens assembly is fixedly mounted on the output shaft of the high-speed motor, a lens is provided at the lower end of the laser scanning galvanometer body, a heat dissipation groove group is penetrated through the side wall of the laser scanning galvanometer body, and a laser transmission assembly is provided on the surface of the laser scanning galvanometer body.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] In the present invention, by arranging a first worm gear on the output shaft of the high-speed motor and arranging a calibration structure, when the high-speed motor drives the vibrating lens assembly to rotate, the servo motor will synchronously drive the rotating shaft, and the second worm gear tooth group on the rotating shaft and the first worm gear will be synchronously meshed and driven, so that the self-locking property of the worm gear transmission can be used to ensure that the vibrating lens assembly can be maintained at a specific angle position, avoiding the rotation angle deviation of the vibrating lens assembly and the servo motor due to external interference or system vibration, etc., reducing the subsequent failure rate and improving practicality;

[0017] In the present invention, by arranging a connecting block on the special-shaped bracket and arranging a second worm gear on the connecting block, when the rotating shaft on the servo motor drives the first worm gear group and the second worm gear group to rotate, they can be meshed with the first worm gear and the second worm gear synchronously, and because the servo motor is controlled separately and the rotation amplitude is determined according to the rotation amplitude of the vibrating lens assembly driven by the high-speed motor, the angle sensor on the second worm gear will feedback the actual rotation angle of the high-speed motor, thereby facilitating subsequent calibration by the staff and improving practicality;

[0018] In the present invention, by optimizing the structure and layout of the laser scanning galvanometer body and setting the calibration structure, most of the overall structure of the calibration structure is integrated on the special-shaped bracket, and because the galvanometer lens assembly on the high-speed motor usually has a replacement function, it is also convenient to set the first worm gear on the output shaft of the high-speed motor, thereby facilitating additional installation on the existing basis, with low modification cost and improved practicality;

[0019] In the present invention, since the laser scanning galvanometer body is usually installed in conjunction with a mechanical arm during actual use, the mechanical arm will generate a large radial force during high-speed operation, and the device on which it is installed may have vibrating components, which may cause the output shaft of the servo motor to deviate. By arranging multiple first damping bearings, second damping bearings, and third damping bearings on the calibration structure, the self-locking property of the high-speed motor output shaft itself and the damping properties generated by the first damping bearing, the second damping bearing, and the third damping bearing can be used to further avoid the high-speed motor from deviating, thereby further improving reliability and increasing practicality.

[0020] In the present invention, since the worm gear structure has the effect of increasing torque, the worm gear is used for transmission, so that when the servo motor is indirectly matched with the first damping bearing, the second damping bearing and the third damping bearing, the driving difficulty caused by the damping force of the first damping bearing, the second damping bearing and the third damping bearing can be avoided, thereby increasing reliability;

[0021] In the present invention, because the servo motor is controlled separately and the rotation amplitude is determined according to the amplitude of the vibration lens assembly driven by the high-speed motor to rotate, and because the first worm gear and the second worm gear on the high-speed motor rotate at the same angle and direction, when the high-speed motor is offset, the angle range of the angle sensor fed back is the actual rotation angle of the high-speed motor, so that the staff can compare the actual measured angle with the angle set by the program by using the angle information fed back by the angle sensor, calculate the angle deviation, and then, by adjusting the output of the servo motor and the high-speed motor, make the angle of the second worm gear and the output shaft of the high-speed motor gradually approach the set angle, thereby achieving self-calibration and improving practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a three-dimensional structural schematic diagram of the present invention;

[0023] Figure 2 It is a schematic diagram of the connection explosion structure of the present invention;

[0024] Figure 3 is a cross-sectional view of the laser scanning galvanometer body of the present invention;

[0025] Figure 4 It is a schematic diagram of the explosion structure of the laser scanning galvanometer body connection of the present invention;

[0026] Figure 5 It is a schematic diagram of the explosion structure of the vibrating lens assembly connection of the present invention;

[0027] Figure 6 It is a schematic diagram of the high-speed motor connection explosion structure of the present invention;

[0028] Figure 7 It is a schematic diagram of the explosion structure of the special-shaped bracket connection of the present invention;

[0029] Figure 8 is a cross-sectional view of a connecting block of the present invention;

[0030] Fig. 9 It is a schematic diagram of the angle sensor connection explosion structure of the present invention;

[0031] Fig.10 It is a schematic diagram of the explosion structure of the second correction assembly connection of the present invention.

[0032] In the figure, the correspondence between the component names and the figure numbers is: 11, laser scanning galvanometer body; 12, inner cavity; 13, high-speed motor; 14, first worm gear; 15, special-shaped bracket; 16, first circular groove; 17, first damping bearing; 18, rotating shaft; 19, first worm gear tooth group; 21, second worm gear tooth group; 22, servo motor; 23, connecting rod; 24, connecting block; 25, second circular groove; 26, third circular groove; 27, second damping bearing; 28, third damping bearing; 29, connecting shaft; 31, angle sensor; 32, second worm gear; 33, galvanometer lens assembly; 34, lens; 35, heat dissipation slot group; 36, laser transmission assembly; 37, first correction assembly; 38, second correction assembly. DETAILED DESCRIPTION

[0033] The following embodiments of the present invention are described in further detail in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0034] See also Figure 1 - Fig.10 The present invention provides a laser scanning galvanometer with a self-calibration system, including a laser scanning galvanometer body 11, wherein an inner cavity 12 is provided inside the laser scanning galvanometer body 11:

[0035] A calibration structure is provided inside the inner cavity 12;

[0036] The calibration structure includes a first calibration assembly 37, which is composed of a high-speed motor 13, a first worm gear 14, a special-shaped bracket 15, a first damping bearing 17, a rotating shaft 18, a first worm gear tooth set 19, a second worm gear tooth set 21, a servo motor 22, a connecting rod 23, a connecting block 24, a second damping bearing 27, a third damping bearing 28, a connecting shaft 29, an angle sensor 31 and a second worm gear 32;

[0037] The special-shaped bracket 15 is fixedly installed on the inner wall of the inner cavity 12, and a first circular groove 16 is opened inside the special-shaped bracket 15. Two first damping bearings 17 are arranged inside the first circular groove 16, and the outer rings of the two first damping bearings 17 are fixedly installed on the inner wall of the first circular groove 16. The rotating shaft 18 is fixedly installed between the inner rings of the first damping bearings 17. By optimizing the structure and layout of the laser scanning galvanometer body 11, a calibration structure is set, so that most of the overall structure of the calibration structure is integrated on the special-shaped bracket 15, and because the galvanometer lens assembly 33 on the high-speed motor 13 usually has a replacement function, it is also convenient to set the first worm gear 14 on the output shaft of the high-speed motor 13, so as to facilitate additional installation on the existing basis, with low modification cost and improved practicality.

[0038] The first worm gear tooth group 19 and the second worm gear tooth group 21 are both fixedly installed on the circumferential surface of the rotating shaft 18, the connecting rod 23 is arranged on the inner side of the special-shaped bracket 15, the connecting block 24 is fixedly installed on the upper end of the connecting rod 23, and the inner side of the connecting block 24 is respectively provided with a second circular groove 25 and a third circular groove 26, the second damping bearing 27 is arranged inside the third circular groove 26, the connecting shaft 29 is fixedly installed on the inner ring of the second damping bearing 27, and the third damping bearing 28 is arranged inside the second circular groove 25. Since the laser scanning galvanometer body 11 is usually installed in conjunction with a mechanical arm during actual use, the mechanical arm will generate a large radial force during high-speed operation, and the device on which it is installed may have vibrating components, which may cause the output shaft of the motor of the servo motor 22 to deviate. By arranging multiple first damping bearings 17, second damping bearings 27 and third damping bearings 28 on the calibration structure, the self-locking property of the output shaft of the high-speed motor 13 itself and the damping properties generated by the first damping bearing 17, the second damping bearing 27 and the third damping bearing 28 can be utilized to further avoid the high-speed motor 13 from being offset, further improve reliability and increase practicality. In addition, since the worm gear structure has the effect of increasing torque, the worm gear is used for transmission, thereby avoiding the situation where the servo motor 22 is indirectly matched with the first damping bearing 17, the second damping bearing 27 and the third damping bearing 28. The damping force of the first damping bearing 17, the second damping bearing 27 and the third damping bearing 28 causes driving difficulties, thereby increasing reliability.

[0039] The angle sensor 31 is fixedly installed on the inner ring of the third damping bearing 28, the second worm gear 32 is fixedly installed between the output shaft of the angle sensor 31 and the connecting shaft 29, and the high-speed motor 13 is fixedly installed inside the inner cavity 12. Because the servo motor 22 is controlled separately and the rotation amplitude is determined according to the amplitude of the vibration lens assembly 33 driven by the high-speed motor 13 to rotate, and because the first worm gear 14 and the second worm gear 32 on the high-speed motor 13 rotate at the same angle and direction, when the high-speed motor 13 is offset, the angle range of its feedback in the angle sensor 31 is the actual rotation angle of the high-speed motor 13, so that the staff can compare the actually measured angle with the angle set by the program by using the angle information fed back by the angle sensor 31, and calculate the angle deviation. Then, by adjusting the output of the servo motor 22 and the high-speed motor 13, the angle of the second worm gear 32 and the output shaft of the high-speed motor 13 is gradually close to the set angle, thereby achieving self-calibration and improving practicality.

[0040] The two first worm gears 14 are both fixedly installed on the output shaft of the high-speed motor 13, the second worm gear set 21 is located below the first worm gear 14, the first worm gear 14 is meshed with the second worm gear set 21, the servo motor 22 is fixedly installed on the side wall of the special-shaped bracket 15, the output shaft of the servo motor 22 is fixedly installed with the rotating shaft 18, by arranging a connecting block 24 on the special-shaped bracket 15, and arranging a second worm gear 32 on the connecting block 24, so that when the rotating shaft 18 on the servo motor 22 drives the first worm gear set 19 and the second worm gear set 21 to rotate, it can be meshed with the first worm gear 14 and the second worm gear 32 synchronously, and because the servo motor 22 is controlled separately and the rotation amplitude is determined according to the amplitude of the vibration lens assembly 33 driven by the high-speed motor 13 to rotate, Therefore, the angle sensor 31 on the second worm gear 32 will feed back the actual rotation angle of the high-speed motor 13, which is beneficial to the subsequent calibration of the staff and improves practicality. By setting the first worm gear 14 on the output shaft of the high-speed motor 13 and setting a calibration structure, when the high-speed motor 13 drives the vibrating lens assembly 33 to rotate, the servo motor 22 will synchronously drive the rotating shaft 18, and the second worm tooth group 21 on the rotating shaft 18 will be synchronously meshed with the first worm gear 14. The self-locking property of the worm gear transmission can be used to ensure that the vibrating lens assembly 33 can be maintained at a specific angle position, avoiding the rotation angle deviation of the vibrating lens assembly 33 and the servo motor 22 due to external interference or system vibration, reducing the subsequent failure rate and improving practicality.

[0041] The overall shape of the connecting block 24 is "U"-shaped, the outer ring of the second damping bearing 27 is fixedly installed on the inner wall of the third circular groove 26, the connecting shaft 29 is partially exposed outside the third circular groove 26, the outer ring of the third damping bearing 28 is fixedly installed on the inner wall of the second circular groove 25, the angle sensor 31 is partially exposed outside the second circular groove 25, the second worm gear 32 is located above the first worm gear tooth group 19, the second worm gear 32 is meshed and installed with the first worm gear tooth group 19, and a second correction assembly 38 is arranged inside the inner cavity 12. The first correction assembly 37 and the second correction assembly 38 have the same overall structure. The first correction assembly 37 is arranged horizontally, and the second correction assembly 38 is arranged vertically. The output shaft of the high-speed motor 13 is fixed A galvanometer lens assembly 33 is installed, a lens 34 is provided at the lower end of the laser scanning galvanometer body 11, a heat dissipation groove group 35 is penetrated through the side wall of the laser scanning galvanometer body 11, and a laser transmission assembly 36 is provided on the surface of the laser scanning galvanometer body 11. When in use, the staff can first turn on the laser scanning galvanometer body 11 to make the laser transmission assembly 36 emit laser, so that the laser passes through the galvanometer lens assembly 33 on the output shaft of the high-speed motor 13 inside the laser scanning galvanometer body 11 and swings rapidly on two mutually perpendicular axes, and then the propagation direction of the laser emitted by the laser transmission assembly 36 can be changed through the galvanometer lens assembly 33. At the same time, the laser will be laser printed on the target plane through the lens 34.

[0042] Working principle:

[0043] The first step is to use the laser scanning galvanometer body 11 normally;

[0044] When in use, the staff can first turn on the laser scanning galvanometer body 11 (the laser scanning galvanometer body 11 is controlled based on the PLC controller. The PLC controller is a device used to control the operation of industrial equipment and can make control decisions based on the received signals and preset control logic), so that the laser transmission assembly 36 emits a laser, so that the laser passes through the galvanometer lens assembly 33 on the output shaft of the high-speed motor 13 inside the laser scanning galvanometer body 11 and swings rapidly on two mutually perpendicular axes, and then the propagation direction of the laser emitted by the laser transmission assembly 36 can be changed through the galvanometer lens assembly 33. At the same time, the laser will be laser printed on the target plane through the lens 34.

[0045] In the second step, when the high-speed motor 13 rotates, it will synchronously drive the servo motor 22 to rotate in an adaptive manner, thereby indirectly completing the self-locking of the high-speed motor 13;

[0046] When the high-speed motor 13 rotates, the staff can set the program according to the rotation angle of the high-speed motor 13 set by the program so that the servo motor 22 drives the first worm gear group 19 and the second worm gear group 21 to engage with the first worm wheel 14 and the second worm wheel 32 at the same rotation direction and angle range as the high-speed motor 13 drives the vibration lens assembly 33 to rotate. When the servo motor 22 rotates, the output shaft of the servo motor 22 will drive the rotating shaft 18 to rotate between the first damping bearing 17 in the first circular groove 16, so that the rotating shaft 18 drives the second worm gear group 21 to rotate and engage with the first worm wheel 14, so that the second worm gear group 21 and the first worm wheel 14 are adapted to rotate synchronously.

[0047] In the third step, when the rotating shaft 18 rotates, it will indirectly drive the second worm gear 32 to rotate, so that the angle sensor 31 on the second worm gear 32 can record the current rotation range;

[0048] When the rotating shaft 18 rotates, the rotation of the rotating shaft 18 will drive the first worm gear group 19 to rotate and engage with the second worm gear 32, so that the second worm gear 32 rotates. At this time, the second worm gear 32 will generate a radial force, thereby driving the connecting shaft 29 to rotate at the inner ring of the second damping bearing 27. At the same time, the rotation of the second worm gear 32 will drive the angle sensor 31 to rotate at the inner ring of the third damping bearing 28, and the angle sensor 31 will transmit data to the controller in real time according to the current rotation angle. At the same time, the rotation direction and angle of the second worm gear 32 will be consistent with the rotation direction and angle of the high-speed motor 13 controlled by the controller.

[0049] Step 4: When the high-speed motor 13 is offset, the high-speed motor 13 can be calibrated by running the calibration structure;

[0050] Since the servo motor 22 is controlled separately and the rotation amplitude is determined according to the amplitude of the vibration lens assembly 33 driven by the high-speed motor 13, the meshing angle of the second worm gear set 21 and the first worm gear 14 and the first worm gear set 19 and the second worm gear 32 is the same as the target angle of rotation of the high-speed motor 13. If the output shaft of the high-speed motor 13 is offset and the rotation angle of the output shaft of the high-speed motor 13 is inconsistent with the program setting, the output shaft of the high-speed motor 13 will stop after it rotates to the right position. However, since the output shaft of the high-speed motor 13 is offset at this time, , so the actual rotation angle is different from the program setting angle, and after the high-speed motor 13 rotates to the right position, the output shaft of the high-speed motor 13 will be self-locking. At the same time, since the first worm gear 14 is fixed on the output shaft of the high-speed motor 13, when the output shaft of the high-speed motor 13 is self-locking, the servo motor 22 drives the second worm gear set 21 to mesh with the first worm gear 14 at this time, which will produce a large resistance, so the required torque is large. At the same time, once the torque exceeds the threshold value set on the controller of the servo motor 22, the servo motor 22 will stop rotating at this time, and due to the high-speed motor 13 The first worm gear 14 on the rotating shaft 18 is in a self-locking state, so the meshing angle of the second worm gear 32 on the rotating shaft 18 and the first worm gear tooth group 19 belongs to the wrong angle of rotation of the output shaft of the current high-speed motor 13 after the deviation. At the same time, the angle sensor 31 (the angle sensor 31 can directly measure the rotation angle of the object. It can be installed on a circular object and output the angle change value in real time as the object rotates) will transmit the current rotation angle to the controller. The staff uses the angle information fed back by the angle sensor 31 to compare the actual measured angle with the angle set by the program to calculate the angle deviation. Then, by adjusting the servo motor 22 (the servo motor 22 is equipped with an encoder and a torque sensor. When the torque is too large, the current and other parameters of the motor will change. The encoder and the torque sensor will be fed back to the driver of the servo motor 22. The driver can monitor these changes in real time. The driver compares the actual torque value with the set torque threshold. Once the threshold is exceeded, the driver will control the motor to stop running) and the output of the high-speed motor 13, the angle of the second worm gear 32 and the output shaft of the high-speed motor 13 gradually approaches the set angle, thereby achieving calibration.

[0051] The embodiments of the present invention are given for the purpose of illustration and description, and are not intended to be exhaustive or to limit the invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described in order to better illustrate the principles and practical applications of the present invention and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A laser scanning galvanometer with a self-calibration system, comprising a laser scanning galvanometer body (11), wherein an inner cavity (12) is provided inside the laser scanning galvanometer body (11), characterized in that: A calibration structure is provided inside the inner cavity (12); The calibration structure comprises a first calibration assembly (37), wherein the first calibration assembly (37) comprises a high-speed motor (13), a first worm gear (14), a special-shaped bracket (15), a first damping bearing (17), a rotating shaft (18), a first worm gear tooth group (19), a second worm gear tooth group (21), a servo motor (22), a connecting rod (23), a connecting block (24), a second damping bearing (27), a third damping bearing (28), a connecting shaft (29), an angle sensor (31) and a second worm gear (32); The special-shaped bracket (15) is fixedly installed on the inner wall of the inner cavity (12); a first circular groove (16) is opened through the inside of the special-shaped bracket (15); the two first damping bearings (17) are both arranged inside the first circular groove (16); the outer rings of the two first damping bearings (17) are both fixedly installed on the inner wall of the first circular groove (16); the rotating shaft (18) is fixedly installed between the inner rings of the first damping bearings (17); the first worm gear tooth group (19) and the second worm gear tooth group (21) are both located on the rotating shaft (18). The connecting block (24) is fixedly installed on the circumferential surface, the connecting block (24) is fixedly installed on the upper end of the connecting rod (23), the inner side of the connecting block (24) is respectively provided with a second circular groove (25) and a third circular groove (26), the second damping bearing (27) is arranged inside the third circular groove (26), the connecting shaft (29) is fixedly installed on the inner ring of the second damping bearing (27), the third damping bearing (28) is arranged inside the second circular groove (25), and the angle sensor (31) is fixedly installed on the inner ring of the third damping bearing (28).

2. A laser scanning galvanometer with a self-calibration system as claimed in claim 1, characterized in that: The second worm gear (32) is fixedly installed between the output shaft of the angle sensor (31) and the connecting shaft (29), the high-speed motor (13) is fixedly installed inside the inner cavity (12), and the two first worm gears (14) are fixedly installed on the output shaft of the high-speed motor (13).

3. A laser scanning galvanometer with a self-calibration system as claimed in claim 2, characterized in that: The first worm wheel (14) is meshed with the second worm gear tooth set (21), the servo motor (22) is fixedly mounted on the side wall of the special-shaped bracket (15), and the output shaft of the servo motor (22) is fixedly mounted on the rotating shaft (18).

4. A laser scanning galvanometer with a self-calibration system as claimed in claim 3, characterized in that: The overall shape of the connecting block (24) is a "U" shape, and the outer ring of the second damping bearing (27) is fixedly mounted on the inner wall of the third circular groove (26).

5. The laser scanning galvanometer with a self-calibration system as claimed in claim 4, characterized in that: The connecting shaft (29) is partially exposed outside the third circular groove (26), and the outer ring of the third damping bearing (28) is fixedly mounted on the inner wall of the second circular groove (25).

6. The laser scanning galvanometer with a self-calibration system as claimed in claim 5, characterized in that: The angle sensor (31) is partially exposed outside the second circular groove (25), the second worm gear (32) is located above the first worm gear tooth set (19), and the second worm gear (32) is meshed and installed with the first worm gear tooth set (19).

7. A laser scanning galvanometer with a self-calibration system as claimed in claim 6, characterized in that: A second correction assembly (38) is disposed inside the inner cavity (12), and the first correction assembly (37) and the second correction assembly (38) have the same overall structure.

8. The laser scanning galvanometer with a self-calibration system as claimed in claim 7, characterized in that: The first correction assembly (37) is arranged horizontally, and the second correction assembly (38) is arranged vertically.

9. The laser scanning galvanometer with a self-calibration system as claimed in claim 8, characterized in that: A galvanometer lens assembly (33) is fixedly mounted on the output shaft of the high-speed motor (13), and a lens (34) is provided at the lower end of the laser scanning galvanometer mirror body (11).

10. The laser scanning galvanometer with a self-calibration system as claimed in claim 9, characterized in that: A heat dissipation groove group (35) is provided through the side wall of the laser scanning galvanometer body (11), and a laser transmission assembly (36) is provided on the surface of the laser scanning galvanometer body (11).

Images