Minimum repetitive unit extraction method, OPC verification method and device

Abstract

The invention discloses a method for extracting a minimum repetitive unit and an OPC verification method and device.The OPC verification method comprises the steps that a mask pattern is obtained, and the mask pattern comprises an IP pattern with a repetitive unit array; extracting a minimum repetitive array in the mask pattern, the minimum repetitive array comprising all types of IP patterns, and at least one IP pattern in each type; matching all types of IP graphs in the minimum repeated array with IP graphs in a database in a one-to-one correspondence manner to obtain a comparison result; and confirming that the OPC verification is completed according to a comparison result. According to the method, the minimum repeated array in the mask pattern is extracted, and the minimum repeated array comprises all types of IP patterns in the mask pattern, so that subsequent OPC verification is carried out on the minimum repeated array, meanwhile, OPC verification of the whole mask pattern can be realized, the OPC verification time can be effectively shortened, and the OPC verification efficiency can be improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to a method for extracting a minimum repeating unit, an OPC verification method and a device. Background Art

[0002] In the mask publishing process of semiconductor manufacturing, OPC technology is generally required to correct the mask pattern. After imaging with the OPC-corrected mask, the target pattern formed on the semiconductor substrate can meet the target requirements and eliminate the distortion or deformation of the target pattern caused by the optical proximity effect.

[0003] Before publishing, the OPC-corrected mask needs to be verified by OPC to simulate whether the OPC-corrected mask is correct. In the existing OPC verification, the verification results are generally classified based on the names of the design units. As the chip scale increases, the number of repeated structures in different units increases, and the number of repeated structures in different positions in the same unit also increases. This causes similar verification results to appear multiple times. More than a dozen structures will appear thousands of times in the verification report, making it difficult to troubleshoot the problem.

[0004] Currently, the OPC verification method involves repeated verification, which increases the time and resources of OPC verification and reduces the verification efficiency. Summary of the invention

[0005] The technical problem solved by the present invention is how to extract the minimum repeating unit in a mask pattern and improve the verification efficiency at the same time.

[0006] To solve the above technical problems, an embodiment of the present invention provides a method for extracting a minimum repeating unit, comprising: obtaining a mask pattern, wherein the mask pattern includes an IP pattern having a repeating unit array; extracting the minimum repeating array in the mask pattern, wherein the minimum repeating array includes all types of IP patterns, and each type of IP pattern has at least one.

[0007] Optionally, the step of extracting the minimum repeating array in the mask pattern includes: scanning all IP patterns in the mask pattern, extracting the same type of IP patterns in the mask pattern, and obtaining several types of IP patterns; merging the several types of IP patterns to obtain the minimum repeating array. The step of scanning all IP patterns in the mask pattern, extracting the same type of IP patterns in the mask pattern, and obtaining several types of IP patterns includes: setting a number of first scanning lines and a number of second scanning lines according to the size of the mask pattern, the first scanning lines and the second scanning lines are perpendicular to each other, and the first scanning lines and the second scanning lines are distributed in a grid shape; setting scanning interval data for the first scanning lines and the second scanning lines; according to the scanning interval data, driving the first scanning lines and the second scanning lines at the same time when all IP patterns in the mask pattern start scanning to obtain scanning data; according to the scanning data, extracting the same type of IP patterns in the mask pattern to obtain several types of IP patterns.

[0008] Optionally, the scan data includes coordinate information of the IP graphic, a graphic shape of the IP graphic, and a graphic size of the IP graphic.

[0009] Optionally, according to the scanning data, the same type of IP graphics in the mask pattern are extracted to obtain several types of IP graphics, including: according to the scanning data, the same type of IP graphics in the IP graphics are extracted to obtain a first type of IP graphics, a second type of IP graphics, a third type of IP graphics and a fourth type of IP graphics.

[0010] Optionally, the step of merging the several types of IP graphics to obtain the minimum repeating array includes: obtaining the line width between different types of IP graphics; merging the several types of IP graphics according to the line width between different types of IP graphics to obtain the minimum repeating array graphic with the size of the minimum repeating array graphic.

[0011] Optionally, the minimum repeating array includes: at least one IP pattern of the first category, at least one IP pattern of the second category, at least one IP pattern of the third category, and at least one IP pattern of the fourth category.

[0012] Accordingly, an embodiment of the present invention provides an OPC verification method, comprising: obtaining a mask pattern, wherein the mask pattern includes an IP pattern having a repeating unit array; extracting a minimum repeating array in the mask pattern, wherein the minimum repeating array includes all types of IP patterns, and each type of IP pattern has at least one; matching all types of IP patterns in the minimum repeating array with IP patterns in a database one by one to obtain a comparison result; and confirming that the OPC verification is completed based on the comparison result.

[0013] Optionally, the step of extracting the minimum repeating array in the mask pattern includes: scanning all IP patterns in the mask pattern, extracting the same type of IP patterns in the mask pattern to obtain several types of IP patterns; and merging the several types of IP patterns to obtain the minimum repeating array.

[0014] Optionally, all IP graphics in the mask pattern are scanned, and IP graphics of the same type in the mask pattern are extracted to obtain several types of IP graphics, the step comprising: setting several first scanning lines and several second scanning lines according to the size of the mask pattern, the first scanning lines and the second scanning lines being perpendicular to each other, and the several first scanning lines and the several second scanning lines being distributed in a grid shape; setting scanning interval data for several first scanning lines and several second scanning lines; according to the scanning interval data, driving several first scanning lines and several second scanning lines to start scanning all IP graphics in the mask pattern at the same time to obtain scanning data; according to the scanning data, extracting IP graphics of the same type in the mask pattern to obtain several types of IP graphics.

[0015] Optionally, the scan data includes coordinate information of the IP graphic, a graphic shape of the IP graphic, and a graphic size of the IP graphic.

[0016] Optionally, according to the scanning data, the same type of IP graphics in the mask pattern are extracted to obtain several types of IP graphics, including: according to the scanning data, the same type of IP graphics in the IP graphics are extracted to obtain a first type of IP graphics, a second type of IP graphics, a third type of IP graphics and a fourth type of IP graphics.

[0017] Optionally, the step of merging the several types of IP graphics to obtain the minimum repeating array includes: obtaining the line width between different types of IP graphics; merging the several types of IP graphics according to the line width between different types of IP graphics to obtain the minimum repeating array graphic with the size of the minimum repeating array graphic.

[0018] Optionally, the minimum repeating array includes: at least one IP pattern of the first category, at least one IP pattern of the second category, at least one IP pattern of the third category, and at least one IP pattern of the fourth category.

[0019] Optionally, before the step of extracting the minimum repeating array in the mask pattern, the step also includes: creating a first database, wherein the first database includes a number of IP patterns that have not been processed by OPC; and creating a second database, wherein the second database includes IP patterns that have been processed by OPC.

[0020] Optionally, the step of performing one-to-one matching of all types of IP graphics in the minimum repeat array with IP graphics in a database to obtain a comparison result includes: performing one-to-one matching of all types of IP graphics in the minimum repeat array with IP graphics in the first database to obtain a first comparison result; the first comparison result includes: all types of IP graphics in the minimum repeat array match or do not match the IP graphics in the first database.

[0021] Optionally, after obtaining the first comparison result, the method includes: when all types of IP graphics in the minimum repeating array match the IP graphics in the first database, performing OPC processing on the minimum repeating array to obtain the minimum repeating array after OPC processing; performing one-to-one matching of all types of IP graphics in the minimum repeating array after OPC processing with the IP graphics in the second database to obtain a second comparison result; the second comparison result includes: all types of IP graphics in the minimum repeating array after OPC processing match or do not match the IP graphics in the second database.

[0022] Optionally, after obtaining the second comparison result, it also includes: when all types of IP graphics in the minimum repeat array after OPC processing match the IP graphics in the second database, confirming that the OPC verification is completed and the fault point in the minimum repeat array will not have any impact at this time; when all types of IP graphics in the minimum repeat array after OPC processing do not match the IP graphics in the second database, checking the source of the difference between the minimum repeat array and the IP graphics in the second database.

[0023] Optionally, after obtaining the first comparison result, the method includes: when all types of IP graphics in the minimum repeat array do not match the IP graphics in the first database, marking all types of IP graphics in the minimum repeat array as graphics that need to be confirmed and storing them in the first database to update the first database.

[0024] Optionally, after the step of acquiring the mask pattern, the method further includes: performing OPC processing on the mask pattern to obtain a fault point in the mask pattern; detecting the fault point to obtain a detection result; and confirming that the OPC verification is completed according to the detection result.

[0025] Optionally, the step of performing OPC processing on the mask pattern to obtain the fault point in the mask pattern and the step of extracting the minimum repeating array in the mask pattern are performed simultaneously.

[0026] Optionally, the types of the IP pattern with a repeating unit array include: a combination of one or more types of IPs with a repeating unit array such as SRAM, MEM CELL, and CISPIXEL.

[0027] Correspondingly, the present invention also provides an OPC verification device, including: an acquisition unit, used to acquire a mask pattern, wherein the mask pattern includes different types of IP patterns; an extraction unit, used to extract a minimum repeating array in the mask pattern, wherein the minimum repeating array includes all types of IP patterns, and each type of IP pattern has at least one; a matching unit, used to match all types of IP patterns in the minimum repeating array with IP patterns in a database one-to-one to obtain a comparison result; and a confirmation unit, used to confirm that the OPC verification is completed based on the comparison result.

[0028] Compared with the prior art, the technical solution of the embodiment of the present invention has the following beneficial effects: the present invention extracts the minimum repeating array in the mask pattern, and because the minimum repeating array includes all types of IP patterns in the mask pattern, the OPC verification is subsequently performed on the minimum repeating array, and the OPC verification of the entire mask pattern can be achieved at the same time, which can effectively reduce the OPC verification time and improve the OPC verification efficiency; in addition, the present invention also matches the minimum repeating array with the IP pattern in the database, thereby reducing the repeated verification operations, reducing the verification time, and improving the verification efficiency.

[0029] Furthermore, the present invention scans the mask pattern by setting the first scanning line and the second scanning line that are perpendicular to each other, and extracts the same type of IP graphics in the mask pattern according to the coordinate information of the IP graphics, the graphic shape of the IP graphics, and the graphic size of the IP graphics, thereby ensuring the accuracy of extracting the minimum repetitive array.

[0030] Furthermore, the database of the present invention is continuously updated after each match, that is, the database is continuously optimized, ensuring the diversity of the data in the database, thereby improving the efficiency and accuracy of OPC verification.

[0031] Furthermore, the present invention provides two sets of databases, wherein the first database includes a number of IP graphics that have not been processed by OPC, and the second database includes IP graphics that have been processed by OPC. By matching the IP graphics with the first database that has not been processed by OPC before OPC processing, when the IP graphics do not match the first database that has not been processed by OPC, the IP graphics are directly marked as graphics that need to be confirmed and stored in the first database to update the first database without the need for subsequent OPC processing steps. When the IP graphics match the first database that has not been processed by OPC, the extracted minimum repeating array continues to be processed by OPC, thereby saving verification time and improving verification efficiency; and when the minimum repeating array after OPC processing matches the second database, the impact of the fault point in the current minimum repeating array can be ignored. When the minimum repeating array after OPC processing does not match the second database, the OPC engineer is reminded to further confirm the above OPC verification results according to the source of the difference, thereby further saving verification time and improving verification efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 is a schematic flow chart of a method for extracting a minimum repeating unit in an embodiment of the present invention;

[0033] Figure 2 is a flow chart of an OPC verification method in an embodiment of the present invention;

[0034] Figure 3 is a flow chart of another OPC verification method in an embodiment of the present invention;

[0035] Figure 4 is a flowchart of another OPC verification method in an embodiment of the present invention;

[0036] Figure 5 is a flowchart of another OPC verification method in an embodiment of the present invention;

[0037] Figure 6 is a schematic diagram of extracting a minimum repeating array in an OPC verification method according to an embodiment of the present invention;

[0038] Figure 7 is a schematic diagram of extracting a minimum repeating array in another OPC verification method in an embodiment of the present invention;

[0039] Figure 8 is a schematic diagram of a verification system of an OPC verification method in an embodiment of the present invention;

[0040] Fig. 9 is a schematic diagram of a verification system of another OPC verification method in an embodiment of the present invention;

[0041] Fig.10 It is a structural schematic diagram of an OPC verification device in an embodiment of the present invention. DETAILED DESCRIPTION

[0042] At present, OPC verification is generally based on the name classification of the design unit. However, as the chip scale increases, the number of repeated structures in different units increases, and the number of repeated structures in different positions in the same unit also increases. This causes similar verification results to appear multiple times. More than a dozen structures will appear thousands of times in the verification report, making it difficult to troubleshoot problems, increasing the time and resources of OPC verification, and reducing verification efficiency.

[0043] In order to solve the above technical problems, the present invention provides a method for extracting a minimum repeating unit and an OPC verification method, by extracting the minimum repeating array in the mask pattern, and because the minimum repeating array includes all types of IP patterns in the mask pattern, the OPC verification is subsequently performed on the minimum repeating array, and the OPC verification of the entire mask pattern can be achieved at the same time, which can effectively reduce the OPC verification time and improve the OPC verification efficiency; in addition, the present invention also matches the minimum repeating array with the IP pattern in the database, thereby reducing the operation of repeated verification, reducing the verification time, and improving the verification efficiency.

[0044] In order to make the above-mentioned objects, features and beneficial effects of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0045] Figure 1 It is a schematic flow chart of a method for extracting a minimum repeating unit in an embodiment of the present invention.

[0046] Please refer to Figure 1 The present invention provides a method for extracting a minimum repeating unit, comprising:

[0047] S31: Acquire a mask pattern, wherein the mask pattern includes an IP pattern having a repeating unit array.

[0048] In one embodiment of the present invention, the mask pattern includes an IP pattern having a repeating unit array.

[0049] In a specific embodiment, the types of IP patterns with repeating unit arrays include: SRAM, MEM CELL, CISPIXEL, and a combination of one or more types of IPs with repeating unit arrays.

[0050] S32: extracting a minimum repeating array from the mask pattern, wherein the minimum repeating array includes all types of IP patterns, and each type of IP pattern has at least one.

[0051] In some embodiments of the present invention, the step of extracting the minimum repeating array in the mask pattern includes: scanning all IP patterns in the mask pattern, extracting the same type of IP patterns in the mask pattern to obtain several types of IP patterns; and merging the several types of IP patterns to obtain the minimum repeating array.

[0052] In a specific embodiment, all IP graphics in the mask pattern are scanned, and IP graphics of the same type in the mask pattern are extracted to obtain several types of IP graphics. The steps include: setting several first scanning lines and several second scanning lines according to the size of the mask pattern, wherein the first scanning lines and the second scanning lines are perpendicular to each other, and the several first scanning lines and the several second scanning lines are distributed in a grid shape; setting scanning interval data for the several first scanning lines and the several second scanning lines; according to the scanning interval data, driving the several first scanning lines and the several second scanning lines to start scanning all IP graphics in the mask pattern at the same time to obtain scanning data; according to the scanning data, extracting IP graphics of the same type in the mask pattern to obtain several types of IP graphics.

[0053] The scan data includes coordinate information of the IP graphic, a graphic shape of the IP graphic, and a graphic size of the IP graphic.

[0054] In some embodiments of the present invention, the step of extracting the same type of IP graphics from the mask pattern according to the scan data to obtain several types of IP graphics includes: extracting the same type of IP graphics from the IP graphics according to the scan data to obtain a first type of IP graphics, a second type of IP graphics, a third type of IP graphics, and a fourth type of IP graphics. In some embodiments of the present invention, the step of merging the several types of IP graphics to obtain the minimum repeating array includes: obtaining the line width between different types of IP graphics; merging the several types of IP graphics according to the line width between different types of IP graphics to obtain the minimum repeating array pattern with the size of the minimum repeating array pattern.

[0055] The minimum repeating array includes: at least one IP pattern of the first type, at least one IP pattern of the second type, at least one IP pattern of the third type, and at least one IP pattern of the fourth type.

[0056] In the above scheme, the present invention scans the mask pattern by setting the first scanning line and the second scanning line that are perpendicular to each other, and extracts the same type of IP graphics in the mask pattern according to the coordinate information of the IP graphics, the graphic shape of the IP graphics, and the graphic size of the IP graphics, thereby ensuring the accuracy of extracting the minimum repetitive array.

[0057] In addition, a specific embodiment of the method for extracting the minimum repeating unit has been described in detail in the following scheme of the OPC verification method, and will not be repeated here.

[0058] Figure 2 It is a flowchart of an OPC verification method in an embodiment of the present invention.

[0059] Please refer to Figure 2 The present invention provides an OPC verification method, comprising:

[0060] S11: Obtaining a mask pattern.

[0061] In an embodiment of the present invention, the mask pattern includes an IP pattern having a repeating unit array.

[0062] In a specific embodiment, the types of IP patterns with repeating unit arrays include: SRAM, MEM CELL, CISPIXEL, and a combination of one or more types of IPs with repeating unit arrays.

[0063] Of course, the present invention is not limited thereto, and other types of IP patterns with repeated unit arrays are within the protection scope of the present invention.

[0064] In one embodiment of the present invention, after the step of obtaining the mask pattern, it also includes: performing OPC verification on the mask pattern to obtain a fault point in the mask pattern; detecting the fault point to obtain a detection result; and confirming that the OPC verification is completed based on the detection result.

[0065] In one embodiment of the present invention, the failure point is a bridge, or a weak point in the pinch-off process due to a small size.

[0066] Of course, the present invention is not limited to this, and other types of fault points are within the protection scope of the present invention.

[0067] In a specific embodiment, before the step of extracting the minimum repeating array in the mask pattern, the step of extracting the minimum repeating array in the mask pattern also includes: creating a second database, wherein the second database includes IP patterns that have been OPC verified. S12: extracting the minimum repeating array in the mask pattern.

[0068] In some embodiments of the present invention, the minimal repeating array includes all types of IP patterns, and there is at least one IP pattern of each type.

[0069] In one embodiment of the present invention, the step of extracting the minimum repeating array in the mask pattern includes: scanning all IP patterns in the mask pattern, extracting the same type of IP patterns in the mask pattern to obtain several types of IP patterns; merging the several types of IP patterns to obtain the minimum repeating array.

[0070] S13: matching all types of IP patterns in the minimal repeat array with IP patterns in the database one by one to obtain a comparison result.

[0071] S14: According to the comparison result, confirm that the OPC verification is completed.

[0072] In some embodiments of the present invention, the first comparison result includes: all types of IP patterns in the minimal repeat array match or do not match the IP patterns in the first database.

[0073] In a specific embodiment, when all types of IP graphics in the minimum repetitive array match the IP graphics in the first database, OPC verification is performed on the minimum repetitive array to obtain the minimum repetitive array after OPC verification; all types of IP graphics in the minimum repetitive array after OPC verification are matched with the IP graphics in the second database one by one to obtain a second comparison result; the second comparison result includes: all types of IP graphics in the minimum repetitive array after OPC verification match or do not match the IP graphics in the second database; when all types of IP graphics in the minimum repetitive array after OPC verification match the IP graphics in the second database, it is confirmed that the OPC verification is completed and the fault point in the minimum repetitive array will not have an impact at this time; when all types of IP graphics in the minimum repetitive array after OPC verification do not match the IP graphics in the second database, the source of the difference between the minimum repetitive array and the IP graphics in the second database is checked.

[0074] When all types of IP patterns in the minimum repeat array do not match the IP patterns in the first database, all types of IP patterns in the minimum repeat array are marked as patterns that need to be confirmed, and after confirmation, they are stored in the first database to update the first database.

[0075] In the above scheme, the present invention extracts the minimum repeating array in the mask pattern, and because the minimum repeating array includes all types of IP patterns in the mask pattern, the OPC verification is subsequently performed on the minimum repeating array, and the OPC verification of the entire mask pattern can be achieved at the same time, which can effectively reduce the OPC verification time and improve the OPC verification efficiency; in addition, the present invention also matches the minimum repeating array with the IP pattern in the database, thereby reducing the repeated verification operations, reducing the verification time, and improving the verification efficiency.

[0076] Figure 3 It is a flowchart of another OPC verification method in an embodiment of the present invention.

[0077] Please refer to Figure 3 The present invention provides an OPC verification method, comprising:

[0078] S21: Obtaining the mask pattern.

[0079] In some embodiments of the present invention, the mask pattern includes an IP pattern having a repeating unit array.

[0080] In a specific embodiment, the types of IP patterns with repeating unit arrays include: SRAM, MEM CELL, CISPIXEL, and a combination of one or more types of IPs with repeating unit arrays.

[0081] Of course, the present invention is not limited thereto, and other types of IP patterns with repeated unit arrays are within the protection scope of the present invention.

[0082] In some embodiments of the present invention, after executing step S21, the steps and step S202 are also executed.

[0083] Step S201: creating a first database, wherein the first database includes a number of IP graphics that have not been OPC processed;

[0084] Step S202: Create a second database, wherein the second database includes IP graphics that have been OPC processed.

[0085] The present invention provides two sets of databases, wherein the first database includes a plurality of IP graphics that have not been processed by OPC, and the second database includes IP graphics that have been processed by OPC. Before the OPC processing, the IP graphics are matched with the first database that has not been processed by OPC. When the IP graphics do not match the first database that has not been processed by OPC, the IP graphics are directly marked as graphics that need to be confirmed and stored in the first database, so as to update the first database without the need for subsequent OPC processing steps. When the IP graphics match the first database that has not been processed by OPC, the extracted minimum repeating array continues to be processed by OPC, thereby saving verification time and improving verification efficiency. When the minimum repeating array after OPC processing matches the second database, the influence of the fault point in the current minimum repeating array can be ignored. When the minimum repeating array after OPC processing does not match the second database, the OPC engineer is reminded to further confirm the above OPC verification result according to the source of the difference, thereby further saving verification time and improving verification efficiency.

[0086] S22: Scan all IP patterns in the mask pattern, extract IP patterns of the same type in the mask pattern, and obtain several types of IP patterns.

[0087] In some embodiments of the present invention, the minimal repeating array includes all types of IP patterns, and there is at least one IP pattern of each type.

[0088] Figure 4 It is a flowchart of another OPC verification method in an embodiment of the present invention.

[0089] Please refer to Figure 4 In one embodiment of the present invention, step S22 includes:

[0090] S221: setting a plurality of first scanning lines and a plurality of second scanning lines according to the size of the mask pattern.

[0091] S222: Setting scanning interval data of a plurality of the first scanning lines and a plurality of the second scanning lines.

[0092] S223: According to the scanning interval data, a plurality of the first scanning lines and a plurality of the second scanning lines are driven and all IP patterns in the mask pattern start scanning at the same time to obtain scanning data.

[0093] S224: extracting IP patterns of the same type from the mask pattern according to the scan data to obtain several types of IP patterns.

[0094] In a specific embodiment, the first scanning lines and the second scanning lines are perpendicular to each other, and a plurality of first scanning lines and a plurality of second scanning lines are distributed in a grid shape.

[0095] In a specific embodiment, the scan data is coordinate information of the IP graphic, a graphic shape of the IP graphic, and a graphic size of the IP graphic.

[0096] In an embodiment of the present invention, step S224 includes: extracting IP patterns of the same type in the mask pattern according to the scanning data to obtain a first type IP pattern, a second type IP pattern, a third type IP pattern and a fourth type IP pattern.

[0097] In the above scheme, the present invention scans the mask pattern by setting the first scanning line and the second scanning line that are perpendicular to each other, and extracts the same type of IP graphics in the mask pattern according to the coordinate information of the IP graphics, the graphic shape of the IP graphics, and the graphic size of the IP graphics, thereby ensuring the accuracy of extracting the minimum repetitive array.

[0098] Please continue to refer to Figure 3 , the OPC verification method further comprises:

[0099] S23: Merge the several types of IP graphs to obtain the minimum repeating array.

[0100] Figure 5 It is a flowchart of another OPC verification method in an embodiment of the present invention.

[0101] S231: Obtain the line width between different types of IP graphics.

[0102] S232: merging the plurality of types of IP patterns according to the line widths between the different types of IP patterns to obtain the minimum repeating array pattern and the size of the minimum repeating array pattern.

[0103] In a specific embodiment, the minimum repeating array includes: at least one IP pattern of the first type, at least one IP pattern of the second type, at least one IP pattern of the third type, and at least one IP pattern of the fourth type.

[0104] Figure 6 It is a schematic diagram of extracting a minimum repeating array in an OPC verification method in an embodiment of the present invention.

[0105] Please refer to Figure 6 , Figure 6A mask pattern 301 is provided, wherein the mask pattern 301 includes a plurality of IP patterns, and the types of the IP patterns are: a first type IP pattern A1, a second type IP pattern A2, a third type IP pattern B1, and a fourth type IP pattern B2.

[0106] In this embodiment, the size of the mask pattern 301 is 1000 microns*1000 microns.

[0107] In one embodiment of the present invention, the step of extracting the minimum repeat array 302 includes: according to the size of the mask pattern 301 of 1000 microns*1000 microns, setting a plurality of first scan lines Scan line1 and a plurality of second scan lines Scan line2; setting the scan interval data of the plurality of first scan lines Scan line1 and the plurality of second scan lines Scan line2 to Scan step of 0; according to the scan interval data, driving the plurality of first scan lines Scan line1 and the plurality of second scan lines Scan line2 to start scanning all storage unit patterns in the mask pattern 301 at the same time, when the plurality of first scan lines Scan line1 and the plurality of second scan lines Scan line2 scan an IP pattern, the scanning stops and the scan data is obtained; according to the scan data, extracting the same type of IP patterns in the mask pattern 301 to obtain a plurality of types of IP patterns; obtaining the line width between different types of IP patterns; merging the plurality of types of IP patterns according to the line width between different types of IP patterns to obtain the minimum repeat array 302, the minimum repeat array including the first type of IP pattern A1 and the second type of IP pattern A2.

[0108] In this embodiment, the same type of IP graphics is characterized as follows: when the size of the IP graphics, the shape of the IP graphics, and the environment in which the IP graphics are located are all the same, the IP graphics are the same type of IP graphics.

[0109] In this embodiment, the step of setting a plurality of first scan lines Scan line1 and a plurality of second scan lines Scan line2 includes: setting the interval between adjacent first scan lines Scan line1 to be 30 nanometers, and the interval between adjacent second scan lines Scan line2 to be 30 nanometers.

[0110] Wherein, each first scanning line Scan line1 or second scanning line Scan line2 scans the number of IP patterns.

[0111] In this embodiment, the number of IP patterns scanned by the first scan line Scan line1 is 1, and the number of IP patterns scanned by the second scan line Scan line2 is 1.

[0112] In a specific embodiment, when the number of IP graphics scanned by the first scan line Scan line1 and the number of IP graphics scanned by the second scan line Scan line2 is 1, the scan interval data Scan step is 0; when the number of IP graphics scanned by the first scan line Scan line1 and the number of IP graphics scanned by the second scan line Scan line2 is 2, the scan interval data Scanstep is 1; when the number of IP graphics scanned by the first scan line Scan line1 and the number of IP graphics scanned by the second scan line Scan line2 is 3, the scan interval data Scan step is 2, and so on, when the number of IP graphics scanned by the first scan line Scan line1 and the number of IP graphics scanned by the second scan line Scan line2 is N, the scan interval data Scan step is N-1, where N is a natural number.

[0113] The scan data is characterized in that the scan data is coordinate information of the storage unit pattern, a pattern shape of the IP pattern, and a pattern size of the IP pattern.

[0114] Specifically, the plurality of first scan lines Scan line1 scan from top to bottom along the Y direction, and the plurality of second scan lines Scan line2 scan from left to right along the X direction. The IP graphics that are in the same first scan line Scan line1 or second scan line Scan line2 in the X direction or the Y direction and have the same shape and direction are classified as the same IP graphics.

[0115] In this embodiment, the first type IP graph A1 and the second type IP graph A2 are of the same type, and the third type IP graph B1 and the fourth type IP graph B2 are of another type.

[0116] In other embodiments, the first type IP pattern A1, the second type IP pattern A2, the third type IP pattern B1 and the fourth type IP pattern B2 are four different types of IP patterns.

[0117] In one embodiment, when the first scan line Scan line1 and the second scan line Scan line2 scan the edge of the IP graphic for the first time, the first coordinate information of the first scan line Scan line1 and the second scan line Scan line2 is recorded; when the first scan line Scan line1 and the second scan line Scan line2 scan the edge of the IP graphic for the second time, the second coordinate information of the first scan line Scan line1 and the second scan line Scan line2 is recorded; based on the difference between the first coordinate information and the second coordinate information, the graphic shape of the IP graphic and the graphic size of the IP graphic are obtained.

[0118] In one embodiment, in the step of extracting the minimum repeating array 302, the minimum repeating arrays are respectively extracted for the layers to be verified (not shown in the figure).

[0119] The layer to be verified includes an active region layer, a gate layer, a contact hole layer and a metal layer.

[0120] Figure 7 It is a schematic diagram of extracting a minimum repeating array in another OPC verification method in an embodiment of the present invention.

[0121] Please refer to Figure 7 , Figure 7 A mask pattern 401 is provided, wherein the mask pattern 401 includes a plurality of IP patterns, and the types of the IP patterns are: a first type IP pattern A1, a second type IP pattern A2, a third type IP pattern B1, and a fourth type IP pattern B2.

[0122] In one embodiment, the size of the mask pattern 401 is 1000 microns*1000 microns.

[0123] In one embodiment of the present invention, the step of extracting the minimum repeat array 402 includes: according to the size of the mask pattern 401 of 1000 microns*1000 microns, setting a plurality of first scan lines Scan line1 and a plurality of second scan lines Scan line2; setting the scan interval data of the plurality of first scan lines Scan line1 and the plurality of second scan lines Scan line2 to Scan step 3; according to the scan interval data, driving the plurality of first scan lines Scan line1 and the plurality of second scan lines Scan line2 and all IP patterns in the mask pattern 401 start scanning at the same time, when the plurality of first scan lines Scan line1 and the plurality of second scan lines Scan line2 are When line2 scans four IP graphics, the scanning stops and the scanning data is obtained; according to the scanning data, the same type of IP graphics in the mask graphic 401 are extracted to obtain several types of IP graphics; the line width between different types of IP graphics is obtained; according to the line width between different types of IP graphics, the several types of IP graphics are merged to obtain the minimum repeating array 402, and the minimum repeating array includes the first type IP graphic A1, the second type IP graphic A2, the third type IP graphic B1 and the fourth type IP graphic B2.

[0124] In this embodiment, the same type of IP graphics is characterized as follows: when the size of the IP graphics, the shape of the IP graphics, and the environment in which the IP graphics are located are all the same, the IP graphics are the same type of IP graphics.

[0125] In this embodiment, the step of setting a plurality of first scan lines Scan line1 and a plurality of second scan lines Scan line2 includes: setting the interval between adjacent first scan lines Scan line1 to be 30 nanometers, and the interval between adjacent second scan lines Scan line2 to be 30 nanometers.

[0126] Each first scan line Scan line1 or second scan line Scan line2 scans the number of storage unit patterns.

[0127] In this embodiment, the number of IP patterns scanned by the first scan line Scan line1 is 4, and the number of IP patterns scanned by the second scan line Scan line2 is 4.

[0128] In a specific embodiment, when the number of IP graphics scanned by the first scan line Scan line1 and the number of IP graphics scanned by the second scan line Scan line2 is 1, the scan interval data Scan step is 0; when the number of IP graphics scanned by the first scan line Scan line1 and the number of IP graphics scanned by the second scan line Scan line2 is 2, the scan interval data Scanstep is 1; when the number of IP graphics scanned by the first scan line Scan line1 and the number of IP graphics scanned by the second scan line Scan line2 is 3, the scan interval data Scan step is 2, and so on, when the number of IP graphics scanned by the first scan line Scan line1 and the number of IP graphics scanned by the second scan line Scan line2 is N, the scan interval data Scan step is N-1, where N is a natural number.

[0129] The scan data is characterized in that the scan data is coordinate information of the IP graphic, a graphic shape of the IP graphic, and a graphic size of the IP graphic.

[0130] Specifically, the plurality of first scan lines Scan line1 scan from top to bottom along the Y direction, and the plurality of second scan lines Scan line2 scan from left to right along the X direction. The IP graphics that are in the same first scan line Scan line1 or second scan line Scan line2 in the X direction or the Y direction and have the same shape and direction are classified as the same IP graphics.

[0131] In this embodiment, the first type IP graph A1, the second type IP graph A2, the third type IP graph B1 and the fourth type IP graph B2 are four different types of IP graphs, that is, the first type IP graph A1, the second type IP graph A2, the third type IP graph B1 and the fourth type IP graph B2 can be extracted respectively. Figure 6Four IP graphics are shown.

[0132] In one embodiment, when the first scan line Scan line1 and the second scan line Scan line2 scan the edge of the IP graphic for the first time, the first coordinate information of the first scan line Scan line1 and the second scan line Scan line2 is recorded; when the first scan line Scan line1 and the second scan line Scan line2 scan the edge of the IP graphic for the second time, the second coordinate information of the first scan line Scan line1 and the second scan line Scan line2 is recorded; based on the difference between the first coordinate information and the second coordinate information, the graphic shape of the IP graphic and the graphic size of the IP graphic are obtained.

[0133] In the specific implementation, when Scan step is set to 3, according to Figure 7 It can be seen that the first scan line Scan line1 can scan to the right to A1 shown in the red box, and the second scan line Scan line2 can scan downward to the first type IP graphic A1 shown in the red box at the lower left corner shown in the red box, thereby selecting the first type IP graphic A1 with the largest number of repetitions within the set range and the smallest spacing between the first type IP graphic A1 at the scanning starting point, thereby obtaining the cell array for the first type IP graphic A1, and so on to obtain the cell arrays of the remaining graphics, the second type IP graphic A2, the third type IP graphic B1, and the fourth type IP graphic B2; subsequently, all IP graphics with the same line width are pieced together to obtain the extracted minimum repeating array 402.

[0134] In one embodiment, in the step of extracting the minimum repeating array 402, the minimum repeating arrays are respectively extracted for the layers to be verified (not shown in the figure).

[0135] The layer to be verified includes an active region layer, a gate layer, a contact hole layer and a metal layer.

[0136] Please continue to refer to Figure 3 , after step S23, further comprising:

[0137] S24: Check whether all types of IP patterns in the minimum repetitive array match the IP patterns in the first database.

[0138] When all types of IP patterns in the minimum repetitive array match the IP patterns in the first database, step S25 is executed.

[0139] When all types of IP patterns in the minimum repeating array match the IP patterns in the first database, step S26 is executed.

[0140] S25: performing OPC processing on the minimum repeating array to obtain the minimum repeating array after OPC processing.

[0141] S26: Mark all types of IP patterns in the minimum repeating array as patterns that need to be confirmed, and store them in the first database to update the first database.

[0142] In this embodiment, when the IP graphic does not match the first database that has not undergone OPC processing, the IP graphic is directly marked as a graphic that needs to be confirmed and stored in the first database to update the first database. There is no need to perform subsequent OPC processing steps, which saves verification time and improves verification efficiency.

[0143] In addition, the database of the present invention is continuously updated after each match, that is, the database is continuously optimized, ensuring the diversity of the data in the database, thereby improving the efficiency and accuracy of OPC verification.

[0144] S27: Check whether all types of IP patterns in the minimum repeating array match the IP patterns in the second database.

[0145] When all types of IP patterns in the minimum repetitive array match the IP patterns in the second database, step S28 is executed.

[0146] When all types of IP patterns in the minimum repetitive array do not match the IP patterns in the second database, step S29 is executed.

[0147] S28: Confirm that the OPC verification is completed and that the fault point in the minimum repeat array will not have any impact.

[0148] In a specific implementation, when all types of IP patterns in the minimum repetitive array match the IP patterns in the second database, it will affect the determination of the fault point, where the fault point is the fault point obtained in the subsequent step S01.

[0149] In this embodiment, when all types of IP graphics in the minimum repetitive array match the IP graphics in the second database, even if there is a fault point in all types of IP graphics in the current minimum repetitive array, since all types of IP graphics in the minimum repetitive array are already in the second database, the impact of the fault point can be ignored, thereby reducing the time for subsequent detection of the fault point and improving verification efficiency.

[0150] S29: Checking the source of the difference between the minimal repeat array and the IP pattern in the second database.

[0151] In a specific embodiment, after the source of the difference is found, the OPC engineer is reminded to further confirm the above OPC verification result according to the source of the difference.

[0152] In some embodiments of the present invention, after executing step S21: acquiring the mask pattern, the method further includes:

[0153] S01: performing OPC processing on the mask pattern to obtain a fault point in the mask pattern.

[0154] In one embodiment of the present invention, the failure point is a bridge, or a weak point in the pinch-off process due to a small size.

[0155] Of course, the present invention is not limited to this, and other types of fault points are within the protection scope of the present invention. S02: Detect the fault point to obtain a detection result.

[0156] S03: According to the test results, confirm that the OPC verification is completed.

[0157] The above steps S01, S02 and S03 are conventional OPC Flow, and the step of performing OPC verification on the mask pattern to obtain the fault point in the mask pattern and the step of extracting the minimum repeating array in the mask pattern are performed simultaneously, that is, the conventional OPC Flow and the step of extracting the minimum repeating array in the mask pattern (patternmatch flow) are performed simultaneously.

[0158] Figure 8 It is a schematic diagram of a verification system of the OPC verification method in an embodiment of the present invention.

[0159] Please refer to Figure 8 The window for performing OPC verification includes the PM (pattern match) branch and the conventional OPC Flow (OPCV), which can then display the status of the cell pattern lib (database).

[0160] In addition, pattern matching can be performed in parallel according to different categories of IP graphics (ie, one-to-one matching with IP graphics in the OPC verification database).

[0161] Figure 8 There are only SRAM and MEM CELL in the middle layout, so, Figure 8 The PM (pattern match) branches are only SRAM and MEM CELL; and Figure 8 It is OPC verification for MEM CELL. Specifically, Figure 8The LIB_PATH display box indicates the path of the database for comparison, the OPC_PATH display box indicates the path of OPC verification after extracting the minimum repeat array, the LAYOUT display box indicates the path of the original mask pattern, the LOCATION display box indicates the corresponding coordinates of the extracted IP pattern, the _ACT display box indicates that the step of extracting the minimum repeat array is performed on the ACT layer, and the match display box indicates that the comparison result is a successful match.

[0162] Fig. 9 It is a schematic diagram of a verification system of another OPC verification method in an embodiment of the present invention.

[0163] Fig. 9 It is OPC verification for SRAM. Specifically, Fig. 9 The LIB_PATH display box represents the path of the database for comparison, the OPC_PATH display box represents the path of OPC verification after extracting the minimum repeat array, the LAYOUT display box represents the path of the original mask pattern, the LOCATION display box represents the corresponding coordinates of the extracted IP pattern, the _ACT display box represents that the step of extracting the minimum repeat array this time is performed on the ACT layer, the _CT display box represents that the step of extracting the minimum repeat array this time is performed on the CT layer, the _M1 display box represents that the step of extracting the minimum repeat array this time is performed on the M1 layer, the POLY display box represents that the step of extracting the minimum repeat array this time is performed on the POLY layer, and the match display box represents that the comparison result is a successful match.

[0164] In this embodiment, the pattern match performed on the ACT layer is successful, the pattern match performed on the CT layer is found to be mismatched with five differences, the pattern match performed on the M1 layer is successful, and the pattern match performed on the POLY layer is successful.

[0165] In summary, the present invention extracts the minimum repeating array in the mask pattern, and because the minimum repeating array includes all types of IP patterns in the mask pattern, the OPC verification is subsequently performed on the minimum repeating array, and the OPC verification of the entire mask pattern can be achieved at the same time, which can effectively reduce the OPC verification time and improve the OPC verification efficiency; in addition, the present invention also matches the minimum repeating array with the IP pattern in the database, thereby reducing the repeated verification operations, reducing the verification time, and improving the verification efficiency.

[0166] Accordingly, please refer to Fig.10, the present invention also provides an OPC verification device 500, comprising: an acquisition unit 501, an extraction unit 502, a matching unit 503 and a confirmation unit 504;

[0167] The acquisition unit 501 is used to acquire a mask pattern, wherein the mask pattern includes different types of IP patterns;

[0168] The extraction unit 502 is used to extract the minimum repeating array in the mask pattern, and the minimum repeating array includes all types of IP patterns, and each type of IP pattern has at least one;

[0169] The matching unit 503 is used to match all types of IP patterns in the minimum repeat array with IP patterns in the database in a one-to-one correspondence to obtain a comparison result;

[0170] The confirmation unit 504 is used to confirm that the OPC verification is completed according to the comparison result.

[0171] Other embodiments further provide a computer-readable storage medium having a computer program stored thereon, wherein the computer program is executed by a processor to implement the steps of any of the above methods.

[0172] In a specific implementation, the computer-readable storage medium may include: ROM, RAM, magnetic disk or optical disk, etc.

[0173] Other embodiments further provide an electronic device, comprising a memory and a processor, wherein the memory stores a computer program that can be run on the processor, and the processor executes the steps of any of the above methods when running the computer program.

[0174] Regarding the various modules / units included in the various devices and products described in the above embodiments, they can be software modules / units, or hardware modules / units, or they can be partially software modules / units and partially hardware modules / units. For example, for various devices and products applied to or integrated in a chip, the various modules / units included therein can all be implemented in the form of hardware such as circuits, or at least some of the modules / units can be implemented in the form of software programs, which run on a processor integrated inside the chip, and the remaining (if any) modules / units can be implemented in the form of hardware such as circuits; for various devices and products applied to or integrated in a chip module, the various modules / units included therein can all be implemented in the form of hardware such as circuits, and different modules / units can be located in the same component (such as a chip, circuit module, etc.) or different components of the chip module, or at least some of the modules / units can be implemented in the form of hardware such as circuits. The element can be implemented in the form of a software program, which runs on a processor integrated inside the chip module, and the remaining (if any) modules / units can be implemented in the form of hardware such as circuits; for various devices and products applied to or integrated in the terminal, the various modules / units contained therein can be implemented in the form of hardware such as circuits, and different modules / units can be located in the same component (for example, chip, circuit module, etc.) or in different components in the terminal, or, at least some modules / units can be implemented in the form of a software program, which runs on a processor integrated inside the terminal, and the remaining (if any) modules / units can be implemented in the form of hardware such as circuits.

[0175] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A method for extracting a minimum repeating unit, characterized in that: include: Acquire a mask pattern, wherein the mask pattern includes an IP pattern having a repeating unit array; A minimum repeating array in the mask pattern is extracted, wherein the minimum repeating array includes all types of IP patterns, and each type of IP pattern has at least one.

2. The method for extracting the minimum repeating unit according to claim 1, characterized in that: The step of extracting the minimum repeating array in the mask pattern includes: scanning all IP patterns in the mask pattern, extracting the same type of IP patterns in the mask pattern to obtain several types of IP patterns; merging the several types of IP patterns to obtain the minimum repeating array.

3. The method for extracting the minimum repeating unit according to claim 2, characterized in that: The steps of scanning all IP patterns in the mask pattern, extracting IP patterns of the same type in the mask pattern, and obtaining several types of IP patterns include: According to the size of the mask pattern, a plurality of first scanning lines and a plurality of second scanning lines are set, the first scanning lines and the second scanning lines are perpendicular to each other, and the plurality of first scanning lines and the plurality of second scanning lines are distributed in a grid shape; Setting scanning interval data of a plurality of the first scanning lines and a plurality of the second scanning lines; According to the scanning interval data, a plurality of the first scanning lines and a plurality of the second scanning lines are driven and all IP graphics in the mask pattern are started to be scanned at the same time to obtain scanning data; according to the scanning data, IP graphics of the same type in the mask pattern are extracted to obtain a plurality of types of IP graphics.

4. The method for extracting the minimum repeating unit according to claim 3, characterized in that: The scan data includes coordinate information of the IP graphic, a graphic shape of the IP graphic, and a graphic size of the IP graphic.

5. The method for extracting the minimum repeating unit according to claim 4, characterized in that: The steps of extracting the same type of IP patterns from the mask pattern according to the scan data to obtain several types of IP patterns include: According to the scan data, IP patterns of the same type are extracted from the IP patterns to obtain a first type IP pattern, a second type IP pattern, a third type IP pattern and a fourth type IP pattern.

6. The method for extracting the minimum repeating unit according to claim 5, characterized in that: The step of merging the several types of IP graphs to obtain the minimum repeating array comprises: Get the line width between different types of IP graphics; The several types of IP patterns are merged according to the line widths between different types of IP patterns to obtain the minimum repeated array pattern and the size of the minimum repeated array pattern.

7. The method for extracting the minimum repeating unit according to claim 5, characterized in that: The minimum repeating array includes: at least one IP pattern of the first type, at least one IP pattern of the second type, at least one IP pattern of the third type, and at least one IP pattern of the fourth type.

8. An OPC verification method, characterized in that: include: Acquire a mask pattern, wherein the mask pattern includes an IP pattern having a repeating unit array; Extracting a minimum repeating array from the mask pattern, wherein the minimum repeating array includes all types of IP patterns, and each type of IP pattern has at least one; Matching all types of IP patterns in the minimal repeat array with IP patterns in the database one by one to obtain a comparison result; Based on the comparison results, confirm that OPC verification is completed.

9. The OPC verification method according to claim 8, characterized in that: The step of extracting the minimum repeating array in the mask pattern comprises: Scanning all IP patterns in the mask pattern, extracting IP patterns of the same type in the mask pattern, and obtaining several types of IP patterns; The several types of IP graphics are merged to obtain the minimum repeating array.

10. The OPC verification method according to claim 9, characterized in that: The steps of scanning all IP patterns in the mask pattern, extracting IP patterns of the same type in the mask pattern, and obtaining several types of IP patterns include: According to the size of the mask pattern, a plurality of first scanning lines and a plurality of second scanning lines are set, the first scanning lines and the second scanning lines are perpendicular to each other, and the plurality of first scanning lines and the plurality of second scanning lines are distributed in a grid shape; Setting scanning interval data of a plurality of the first scanning lines and a plurality of the second scanning lines; According to the scanning interval data, a plurality of the first scanning lines and a plurality of the second scanning lines are driven and all IP patterns in the mask pattern start scanning at the same time to obtain scanning data; According to the scanning data, the same type of IP patterns in the mask pattern are extracted to obtain several types of IP patterns.

11. The OPC verification method according to claim 10, characterized in that: The scan data includes coordinate information of the IP graphic, a graphic shape of the IP graphic, and a graphic size of the IP graphic.

12. The OPC verification method according to claim 11, characterized in that: The step of extracting the same type of IP graphics from the mask graphics according to the scan data to obtain several types of IP graphics includes: extracting the same type of IP graphics from the IP graphics according to the scan data to obtain a first type of IP graphics, a second type of IP graphics, a third type of IP graphics and a fourth type of IP graphics.

13. The OPC verification method according to claim 12, characterized in that: The step of merging the several types of IP graphs to obtain the minimum repeating array comprises: Get the line width between different types of IP graphics; The several types of IP patterns are merged according to the line widths between different types of IP patterns to obtain the minimum repeated array pattern and the size of the minimum repeated array pattern.

14. The OPC verification method according to claim 13, characterized in that: The minimum repeating array includes: at least one IP pattern of the first type, at least one IP pattern of the second type, at least one IP pattern of the third type, and at least one IP pattern of the fourth type.

15. The OPC verification method according to claim 10, characterized in that: Before the step of extracting the minimum repeating array in the mask pattern, the method further includes: A first database is created, wherein the first database includes a number of IP graphics that have not been processed by OPC; and a second database is created, wherein the second database includes IP graphics that have been processed by OPC.

16. The OPC verification method according to claim 15, characterized in that: The step of matching all types of IP patterns in the minimum repeat array with IP patterns in the database one by one to obtain a comparison result comprises: Matching all types of IP patterns in the minimum repeat array with IP patterns in the first database in a one-to-one correspondence to obtain a first comparison result; The first comparison result includes: All types of IP patterns in the minimal repeating array either match or do not match the IP patterns in the first database.

17. The OPC verification method according to claim 16, characterized in that: After obtaining the first comparison result, the following steps are included: When all types of IP patterns in the minimum repeating array match the IP patterns in the first database, performing OPC processing on the minimum repeating array to obtain the minimum repeating array after OPC processing; Matching all types of IP patterns in the minimum repeat array after OPC processing with the IP patterns in the second database in a one-to-one correspondence to obtain a second comparison result; The second comparison result includes: All types of IP patterns in the minimal repeating array after OPC processing match or do not match the IP patterns in the second database.

18. The OPC verification method according to claim 17, characterized in that: After obtaining the second comparison result, the method further includes: When all types of IP patterns in the minimum repeat array after OPC processing match the IP patterns in the second database, confirm that OPC verification is completed, and at this time, the fault point in the minimum repeat array will not have any impact; When all types of IP patterns in the minimum repeating array after the OPC process do not match the IP patterns in the second database, the source of the difference between the minimum repeating array and the IP patterns in the second database is checked.

19. The OPC verification method according to claim 16, characterized in that: After obtaining the first comparison result, the following steps are included: When all types of IP patterns in the minimum repeating array do not match the IP patterns in the first database, all types of IP patterns in the minimum repeating array are marked as patterns that need to be confirmed and stored in the first database to update the first database.

20. The OPC verification method according to claim 8, characterized in that: After the step of obtaining the mask pattern, it also includes: Performing OPC processing on the mask pattern to obtain a fault point in the mask pattern; Detecting the fault point to obtain a detection result; Based on the test results, confirm that OPC verification is completed.

21. The OPC verification method according to claim 20, characterized in that: The step of performing OPC processing on the mask pattern to obtain the fault points in the mask pattern and the step of extracting the minimum repeating array in the mask pattern are performed simultaneously.

22. The OPC verification method according to claim 8, characterized in that: The types of IP patterns with repeating unit arrays include: SRAM, MEM CELL, CISPIXEL, and a combination of one or more types of IPs with repeating unit arrays.

23. An OPC verification device, characterized in that: include: An acquisition unit, used for acquiring a mask pattern, wherein the mask pattern includes different types of IP patterns; An extraction unit, used for extracting a minimum repeating array in the mask pattern, wherein the minimum repeating array includes all types of IP patterns, and each type of IP pattern has at least one; A matching unit, used for matching all types of IP patterns in the minimum repeat array with IP patterns in the database in a one-to-one correspondence to obtain a comparison result; The confirmation unit is used to confirm the completion of OPC verification according to the comparison result.

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