An LCD exposure device

Abstract

The present invention discloses an LCD exposure device, including an exposure machine, at the bottom of which there is a conveying groove for conveying an LCD substrate; a conveying table, which is arranged in the conveying groove and crosses the exposure machine, and a receiving groove is provided at the top of the conveying table. A conveyor belt is rotatably connected in the receiving groove. The conveyor belt is mainly composed of an inner belt and an outer belt. The outer belt is arranged on the outer side of the inner belt, and a gap is left between the inner belt and the outer belt. The two side edges of the inner belt and the outer belt are fixedly connected by support blocks. The present invention relates to the technical field of LCD panel exposure. The LCD exposure device, through the arranged support member, conveyor belt and negative pressure assembly, can, when the LCD substrate is placed on the conveyor belt, apply preliminary buffering to the LCD substrate by using air flow to reduce the impact force when the LCD substrate contacts the support member. Subsequently, when the LCD substrate is placed on the support member, the support member is used to support the LCD substrate to prevent it from directly contacting the conveyor belt and causing edge breakage of the edge.

Description

Technical Field

[0001] The present invention relates to the technical field of LCD panel exposure, and more specifically, to an LCD exposure device. Background Art

[0002] LCD exposure generally refers to the process of transferring patterns onto the substrate of a liquid crystal display using lithography technology during the manufacturing of LCD panels. LCD exposure is an essential step in the production of liquid crystal displays. By precisely transferring patterns onto the substrate through lithography technology, the performance and quality of the final product are ensured. With the progress of technology, the LCD exposure process is also constantly evolving to meet higher production requirements.

[0003] In the prior art, during the LCD exposure process, the LCD substrate to be exposed needs to be fed into the exposure machine through a conveying mechanism. Since the LCD substrate needs to undergo a glue coating process before exposure, in order to protect the glue layer on the surface of the LCD substrate, a negative pressure adsorption transfer method is avoided for transporting the LCD substrate, which may cause the LCD substrate to tilt when placed on the conveying mechanism. At this time, the LCD substrate is not encapsulated, and its fragile edges are directly exposed, resulting in the sharp edges contacting the bearing surface of the conveying mechanism. The edges are crushed due to stress concentration caused by extrusion, leading to substrate scrapping, thereby increasing the handling difficulty of the LCD substrate and raising the production cost of LCDs.

[0004] Therefore, those skilled in the art have provided an LCD exposure device to solve the problems raised in the above background art. Summary of the Invention

[0005] The purpose of the present invention is to provide an LCD exposure device to solve the problems raised in the above background art.

[0006] To achieve the above purpose, the present invention provides the following technical solutions:

[0007] The above technical objectives of the present invention are achieved through the following technical solutions:

[0008] An LCD exposure device includes an exposure machine, at the bottom of which there is a conveying groove for conveying the LCD substrate;

[0009] A conveying table is arranged in the conveying groove and crosses the exposure machine. A receiving groove is provided at the top of the conveying table, and a conveyor belt is rotatably connected in the receiving groove. The conveyor belt is mainly composed of an inner belt and an outer belt. The outer belt is arranged on the outside of the inner belt, and there is a gap between the inner belt and the outer belt. The two side edges of the inner belt and the outer belt are fixedly connected by support blocks;

[0010] Support members are provided in multiple groups at equal intervals along the circumferential direction of the conveyor belt. Each group is provided with multiple support members at equal intervals along the width direction of the conveyor belt. The support member includes a piston part and a suction cup part. The top of the piston part protrudes to form the suction cup part. A round hole is opened at the top of the suction cup part, and the round hole extends downward to the bottom of the piston part. Multiple through grooves communicating with the round hole are opened at the bottom of the outer wall of the piston part;

[0011] A negative pressure assembly is connected to the input side of the conveying table and is used to generate negative pressure in the accommodation groove and positive pressure in the gap of the conveyor belt;

[0012] Through holes are evenly distributed on the surfaces of the inner belt and the outer belt. The diameter of the through holes on the surface of the outer belt is larger than that of the through holes on the surface of the inner belt, so that the two through holes are respectively connected to the piston part and the suction cup part. A positioning spring is fixedly connected between the bottom of the suction cup part and the surface of the inner belt.

[0013] Further, the height of the through groove is the same as the thickness of the inner belt, and the height that the suction cup part protrudes from the outer belt is equal to twice the thickness of the inner belt.

[0014] Further, a round groove for air flow reverse push is opened at the top of the suction cup part, and the round groove is located outside the round hole.

[0015] Further, annular grooves are opened in the through holes of the inner belt and the outer belt, and sealing rings are connected in the annular grooves. The two sealing rings are respectively in contact with the outer walls of the suction cup part and the piston part.

[0016] Further, the inner wall of the accommodation groove is concavely formed with a track groove, and both sides of the inner belt and the outer belt extend into the track groove.

[0017] Further, the negative pressure assembly includes an air pump, a partition member and a diffusion nozzle. The partition member is arranged in the conveyor belt and is fixedly connected to the inner wall of the accommodation groove. A negative pressure chamber for suction is formed between the top of the partition member and the inner belt;

[0018] The diffusion nozzle is fixedly connected to the outer wall of the conveying table and communicates with the track groove;

[0019] The air pump is installed outside the conveying table. The input port of the air pump is communicated with the negative pressure chamber through an air inlet pipe, and the output port of the air pump is communicated with the diffusion nozzle through an exhaust pipe.

[0020] Further, the top of the conveying table consists of a feeding area, an exposure area and a discharging area, and the negative pressure chamber covers the feeding area and the exposure area.

[0021] In summary, the present invention includes at least one of the following beneficial technical effects:

[0022] 1. The LCD exposure device can, when the LCD substrate is placed on the conveyor belt, apply preliminary buffering to the LCD substrate by means of the provided support member, conveyor belt, and negative pressure assembly, reducing the impact force when the LCD substrate contacts the support member. Subsequently, when the LCD substrate is placed on the support member, the support member props up the LCD substrate to prevent it from directly contacting the conveyor belt and causing edge breakage, effectively improving the protection effect on the LCD substrate. Subsequently, when the LCD substrate is fully placed on the conveyor belt, the support force exerted by the support member on the LCD substrate is converted into negative pressure suction, making the LCD substrate closely adhere to the conveyor belt, making the conveyance of the LCD substrate more stable, reducing the movement amount during focusing during exposure, and thus improving the exposure efficiency.

[0023] 2. The LCD exposure device has a circular groove opened at the top of the suction cup portion, intercepting the airflow during backflow, thereby increasing the thrust of the airflow on the suction cup portion and enhancing the pre-down pressure of the suction cup portion. At this time, when the LCD substrate is slightly tilted, the suction cup portion closer to the LCD substrate will move slightly downward, enabling the LCD substrate to contact multiple suction cup portions simultaneously when placed on the conveyor belt, effectively preventing the LCD substrate from contacting a small number of suction cup portions in advance during placement, resulting in an overly small contact area and pressure concentration, and avoiding uneven stress on the surface of the LCD substrate and damage, further improving the protection performance of the LCD substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0025] Figure 1 It is a schematic structural diagram of an LCD exposure device of the present invention.

[0026] Figure 2 It is a regional schematic diagram of the conveying table in an LCD exposure device of the present invention.

[0027] Figure 3 It is an internal structural schematic diagram of the conveying table in an LCD exposure device of the present invention.

[0028] Figure 4 It is a state schematic diagram when the support member supports the LCD substrate in an LCD exposure device of the present invention.

[0029] Figure 5 It is a schematic structural diagram of the track groove in an LCD exposure device of the present invention.

[0030] In the figure, 1 is an exposure machine; 2 is a conveying table; 3 is a support member; 31 is a piston portion; 32 is a suction cup portion; 4 is a negative pressure assembly; 41 is an air pump; 42 is a partition member; 43 is a diffusion nozzle; 5 is a conveying groove; 6 is a receiving groove; 7 is a conveyor belt; 71 is an inner belt; 72 is an outer belt; 73 is a support block; 8 is a round hole; 9 is a through groove; 10 is a through hole; 11 is a positioning spring; 12 is a round groove; 13 is an annular groove; 14 is a sealing ring; 15 is an orbital groove; 16 is a negative pressure chamber; 17 is a feeding area; 18 is an exposure area; 19 is a discharging area. Detailed implementation manner

[0031] Next, in combination with the accompanying drawings and the detailed implementation manner, a further description of the present invention is made: Embodiment

[0032] Refer to Figure 1 - Figure 5 As shown in the figure, an LCD exposure device disclosed by the present invention includes an exposure machine 1, and a conveying groove 5 for conveying an LCD substrate is opened at the bottom thereof;

[0033] A conveying table 2 is arranged in the conveying groove 5 and crosses the exposure machine 1. A receiving groove 6 is opened at the top of the conveying table 2. A conveyor belt 7 is rotatably connected in the receiving groove 6. The conveyor belt 7 is mainly composed of an inner belt 71 and an outer belt 72. The outer belt 72 is arranged on the outer side of the inner belt 71. A gap is left between the inner belt 71 and the outer belt 72. The two side edges of the inner belt 71 and the outer belt 72 are fixedly connected by support blocks 73;

[0034] A plurality of groups of support members 3 are arranged at equal intervals along the circumference direction of the conveyor belt 7, and a plurality of support members 3 are arranged at equal intervals along the width direction of the conveyor belt 7 in each group. The support member 3 includes a piston portion 31 and a suction cup portion 32. A suction cup portion 32 is formed by the top protrusion of the piston portion 31. A round hole 8 is opened at the top of the suction cup portion 32, and the round hole 8 extends downward to the bottom of the piston portion 31. A plurality of through grooves 9 communicating with the round hole 8 are opened at the bottom of the outer wall of the piston portion 31;

[0035] A negative pressure assembly 4 is connected to the input side of the conveying table 2 for generating negative pressure in the receiving groove 6 and positive pressure in the gap of the conveyor belt 7;

[0036] Through holes 10 are uniformly distributed on the surfaces of the inner belt 71 and the outer belt 72. The diameter of the through holes 10 on the surface of the outer belt 72 is larger than the diameter of the through holes 10 on the surface of the inner belt 71, so that the two through holes 10 are respectively connected to the piston portion 31 and the suction cup portion 32. A positioning spring 11 is fixedly connected between the bottom of the suction cup portion 32 and the surface of the inner belt 71.

[0037] In this embodiment, observe Figure 1It can be found that by providing an exposure machine 1 and a conveyor table 2, a manipulator can be used to transfer the LCD substrate after coating onto the conveyor table 2. Subsequently, the conveyor belt 7 inside the conveyor table 2 operates to transport the LCD substrate into the exposure machine 1 for exposure operation. Then, the exposed LCD substrate will be transported out of the exposure machine 1 by the conveyor belt 7. Finally, the exposed LCD substrate is transferred to the next process by the manipulator.

[0038] Since the LCD substrate is not encapsulated at this time, its fragile edges are directly exposed. When the manipulator places the LCD substrate, if it is not level with the surface of the conveyor belt 7, it will cause the fragile edges of the LCD substrate to come into contact with the surface of the conveyor belt 7 first. When the sharp edge contacts the bearing surface of the conveying mechanism, the edge will be crushed due to stress concentration caused by extrusion, resulting in the scrapping of the substrate, which increases the handling difficulty of the LCD substrate and raises the production cost of the LCD.

[0039] Therefore, it can be observed that Figure 3 along the circumferential direction of the conveyor belt 7, multiple groups of support members 3 are equidistantly spaced. Each group is provided with multiple support members 3 equidistantly spaced along the width direction of the conveyor belt 7, which can provide support for the LCD substrate when the LCD substrate is placed, avoiding its contact with the conveyor belt 7 first and protecting the LCD substrate.

[0040] The support member 3 includes a piston portion 31 and a suction cup portion 32. The top of the piston portion 31 protrudes to form the suction cup portion 32. A circular hole 8 is opened at the top of the suction cup portion 32, and the circular hole 8 extends downward to the bottom of the piston portion 31. Multiple through grooves 9 communicating with the circular hole 8 are opened at the bottom of the outer wall of the piston portion 31. The conveyor belt 7 mainly consists of an inner belt 71 and an outer belt 72. The outer belt 72 is provided on the outside of the inner belt 71, and a gap is left between the inner belt 71 and the outer belt 72. The two side edges of the inner belt 71 and the outer belt 72 are fixedly connected by support blocks 73. Subsequently, through holes 10 are evenly distributed on the surfaces of the inner belt 71 and the outer belt 72. The diameter of the through holes 10 on the surface of the outer belt 72 is larger than the diameter of the through holes 10 on the surface of the inner belt 71. The two through holes 10 are respectively connected to the piston portion 31 and the suction cup portion 32, which can be used to install the support member 3 on the conveyor belt 7. Finally, a negative pressure assembly 4 is connected to the input side of the conveyor table 2. The negative pressure assembly 4 can be used to suck out the air in the receiving groove 6, and then inject the air into the gap between the inner belt 71 and the outer belt 72. At this time, the injected air will flow along the gap close to the piston portion 31, then enter the circular hole 8 through the through grooves 9 on the outer wall of the piston portion 31, and finally be ejected from the circular hole 8, forming a stream of air at the top of the support member 3. When the LCD substrate approaches the support member 3, it will be buffered by the blowing of the air stream, reducing the speed of the LCD substrate approaching the support member 3, thereby reducing the impact force generated when the LCD substrate contacts the support member 3 and further protecting the LCD substrate.

[0041] When the gas in the accommodation groove 6 is pumped out, a negative pressure will be generated, which will suck the piston part 31 downward, causing the support member 3 to be sucked into the conveyor belt 7, thus losing the effect of protecting the LCD substrate. Therefore, observe Figure 3 and Figure 4 It can be found that a positioning spring 11 is fixedly connected between the bottom of the suction cup part 32 and the surface of the inner belt 71. At this time, the suction cup part 32 will be supported by the positioning spring 11 and move upward to resist the suction force from the accommodation groove 6, so as to ensure that the support member 3 can provide stable buffer protection for the LCD substrate when the LCD substrate is placed on the conveyor belt 7. As the LCD substrate is completely placed on the support member 3, since the round hole 8 is blocked, the air flow in the round hole 8 cannot be effectively discharged, resulting in an increase in the air pressure at the round hole 8, an increase in the gas pressure received at the bottom of the round hole 8. At this time, the weight pressure of the LCD substrate, the gas pressure in the round hole 8, and the negative pressure suction force in the accommodation groove 6 are in the same direction, making the pressure on the support member 3 greater than the elastic force of the positioning spring 11. At this time, the piston part 31 slides down, causing the through groove 9 of the piston part 31 to extend into the accommodation groove 6 (as Figure 4 shown), thereby turning the thrust of the positive pressure of the air flow in the round hole 8 into a negative pressure suction force, which is used to suck the LCD substrate on the surface of the conveyor belt 7, making the transportation of the LCD substrate more stable, effectively ensuring that the LCD substrate will not shift during transportation in the exposure process of the exposure machine, reducing the movement amount during the positioning of the exposure machine, saving energy consumption during exposure, and thus improving the exposure efficiency.

[0042] In a further preferred embodiment of the present invention, as Figure 3 - Figure 5 shown, the height of the through groove 9 is the same as the thickness of the inner belt 71, and the height of the suction cup part 32 protruding from the outer belt 72 is equal to twice the thickness of the inner belt 71;

[0043] A round groove 12 for air flow counter - pushing is formed at the top of the suction cup part 32, and the round groove 12 is located outside the round hole 8.

[0044] In this embodiment, when the LCD substrate is placed on the support member 3, it is necessary to use the support member 3 to support the LCD substrate to prevent the edge corners of the LCD substrate from coming into contact with the surface of the conveyor belt 7 first and being crushed, providing protection for the LCD substrate. Also, after the LCD substrate is completely placed, it is pressed downward, so that the negative pressure in the accommodation groove 6 sucks the LCD substrate, making the subsequent transportation of the LCD substrate more stable. Therefore, the height of the through groove 9 is the same as the thickness of the inner belt 71, and the height of the suction cup part 32 protruding from the outer belt 72 is equal to twice the thickness of the inner belt 71. At this time, when the suction cup part 32 is pressed into the conveyor belt 7 and the top of the suction cup part 32 is flush with the outer surface of the outer belt 72, the through groove 9 located above the inner belt 71 will be pressed below the inner belt 71, as Figure 4As shown in the state, the stability of the state conversion between blowing and suction of the support member 3 can be effectively guaranteed.

[0045] Subsequently, as the LCD substrate approaches the support member 3, the airflow ejected from the round hole 8 will be blocked by the LCD substrate and then generate a reverse thrust effect, causing the suction cup portion 32 to be subjected to a downward pressure. Therefore, Figure 4 it can also be found that a round groove 12 for airflow reverse thrust is opened at the top of the suction cup portion 32, so that when the airflow rebounds, it is intercepted by the round groove 12, thereby increasing the thrust of the airflow on the suction cup portion 32 and enhancing the pre-downward pressure of the suction cup portion 32. At this time, when the LCD substrate is slightly tilted, the suction cup portion 32 that is preferentially close to the LCD substrate will move slightly downward, so that when the LCD substrate is placed on the conveyor belt 7, it can contact with multiple suction cup portions 32 at the same time, effectively avoiding the pressure concentration caused by the premature contact with a small number of suction cup portions 32 when the LCD substrate is placed, avoiding uneven stress on the surface of the LCD substrate and damage, and further improving the protection performance of the LCD substrate.

[0046] In a further preferred embodiment of the present invention, as Figure 4 and Figure 5 shown, circular ring grooves 13 are respectively opened in the through holes 10 of the inner belt 71 and the outer belt 72, and a sealing ring 14 is connected in the circular ring groove 13. The two sealing rings 14 are respectively in contact with the outer walls of the suction cup portion 32 and the piston portion 31;

[0047] The inner wall of the accommodating groove 6 is concavely formed with a track groove 15, and both sides of the inner belt 71 and the outer belt 72 extend into the track groove 15.

[0048] In this embodiment, since the support member 3 slides up and down in the through hole 10, it will change the direction of the force applied to the LCD substrate, thereby changing the action of the support member 3 on the LCD substrate. Therefore, in order to ensure the running stability of the support member 3 and avoid air leakage, as Figure 4 shown, a circular ring groove 13 is opened on the inner wall, and a sealing ring 14 is connected in the circular ring groove 13, so that the sealing rings 14 located in the inner belt 71 and the outer belt 72 are respectively in contact with the outer walls of the piston portion 31 and the suction cup portion 32, which is used to ensure the sealing performance when the support member 3 slides, thereby ensuring the running stability of the support member 3.

[0049] Since the air flow is blown in through the gap between the outer belt 72 and the inner belt 71, and the conveyor belt 7 will move cyclically in the receiving groove 6, in order to reduce the air leakage through the gap between the conveyor belt 7 and the inner wall of the receiving groove 6, a track groove 15 is provided on the side wall of the receiving groove 6, and both side edges of the inner belt 71 and the outer belt 72 extend into the track groove 15, which is used to increase the overlapping area between the inner belt 71, the outer belt 72 and the inner wall of the receiving groove 6. Thus, when the air enters the track groove 15, the resistance of discharging along the gap between the inner belt 71, the outer belt 72 and the track groove 15 increases, so that the air flow preferentially enters the gap between the inner belt 71 and the outer belt 72, and then the air flow is discharged through the round holes 8, so as to ensure that when the LCD substrate is placed on the support member 3, it is stably blown by the air flow and the impact force when contacting the support member 3 is reduced.

[0050] In a further preferred embodiment of the present invention, as Figure 1 - Figure 3 shown, the negative pressure assembly 4 includes an air pump 41, a partition member 42 and a diffusion nozzle 43. The partition member 42 is arranged inside the conveyor belt 7 and is fixedly connected to the inner wall of the receiving groove 6. A negative pressure chamber 16 for sucking air is formed between the top of the partition member 42 and the inner belt 71;

[0051] The diffusion nozzle 43 is fixedly connected to the outer wall of the conveying table 2 and is communicated with the track groove 15;

[0052] The air pump 41 is installed outside the conveying table 2. The input port of the air pump 41 is communicated with the negative pressure chamber 16 through an air inlet pipe, and the output port of the air pump 41 is communicated with the diffusion nozzle 43 through an exhaust pipe;

[0053] The top of the conveying table 2 is composed of a feeding area 17, an exposure area 18 and a discharging area 19, and the negative pressure chamber 16 covers the feeding area 17 and the exposure area 18.

[0054] In this embodiment, since the negative pressure assembly 4 needs to generate negative pressure in the receiving groove 6 and positive pressure in the gap between the inner belt 71 and the outer belt 72, thus combining Figure 1 and Figure 3 it can be found that an air pump 41 is fixedly connected to the outer side wall of the conveying table 2, and the input port of the air pump 41 is communicated with the receiving groove 6 through an air inlet pipe; the output port of the air pump 41 is communicated with the track groove 15 through an exhaust pipe. At this time, when the air pump 41 operates, the air in the receiving groove 6 can be pumped out and then injected into the gap between the inner belt 71 and the outer belt 72, so that the support member 3 can operate stably. By fixedly connecting a diffusion nozzle 43 at the exhaust port of the exhaust pipe, the area of the air flow ejected can be increased, thus avoiding the imbalance of the air pressure in the gap between the inner belt 71 and the outer belt 72 caused by the over-concentration of the air flow ejected when the air flow is ejected, which affects the stability of the support member 3.

[0055] When the LCD substrate is completely placed on the conveyor belt 7, the force exerted by the support member 3 on the LCD substrate will change from a supporting force to a suction force. When the LCD substrate is transported out of the exposure machine 1 after exposure, the LCD substrate still remains in close contact with the conveyor belt 7, resulting in increased difficulty in unloading the LCD substrate and affecting the production efficiency of the LCD.

[0056] Therefore, by combining Figure 2 and Figure 3 it can be found that a partition member 42 is provided inside the conveyor belt 7, and the partition member 42 is fixedly connected to the inner wall of the receiving groove 6. A negative pressure chamber 16 for suction is formed between the partition member 42 and the inner belt 71. At the same time, the intake pipe extends into the negative pressure chamber 16, which can be used to ensure that when the air pump 41 operates, a negative pressure for sucking the LCD substrate is stably generated at the bottom of the inner belt 71. Then look at Figure 2 It can be found that with the exposure machine 1 as the center, the top of the conveying table 2 is partitioned on both sides, and the top of the conveying table 2 is successively divided into a loading area 17, an exposure area 18, and a unloading area 19. And the negative pressure chamber 16 covers the overlapping parts of the conveyor belt 7 with the loading area 17 and the exposure area 18. When the LCD substrate is placed in the loading area 17, the support member 3 will first support the LCD substrate and then suck the LCD substrate to ensure close contact between the LCD substrate and the conveyor belt 7, so that the LCD substrate will not shift when the conveyor belt 7 transports the LCD substrate into the exposure machine 1. Then after the exposure of the LCD substrate is completed and the conveyor belt 7 transports the LCD substrate out of the exposure machine 1, at this time, the support member 3 for adsorbing the LCD substrate is separated from the negative pressure chamber 16, causing the support member 3 to lose the acting force of the negative pressure and break the balance. Then the support member 3 gradually lifts the LCD substrate under the support of the positioning spring 11, making the LCD substrate actively suspended above the conveyor belt 7. At this time, the LCD substrate can be easily taken out, making the unloading of the LCD substrate simpler and more convenient.

[0057] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An LCD exposure device, characterized in that: It comprises an exposure machine (1), the bottom of which is provided with a conveying slot (5) for conveying an LCD substrate; A conveyor table (2) is arranged in a conveyor slot (5) and crosses the exposure machine (1). A receiving slot (6) is provided on the top of the conveyor table (2). A conveyor belt (7) is rotatably connected in the receiving slot (6). The conveyor belt (7) mainly consists of an inner belt (71) and an outer belt (72). An outer belt (72) is arranged on the outer side of the inner belt (71). A gap is left between the inner belt (71) and the outer belt (72). The inner belt (71) and the outer belt (72) are fixedly connected at their two side edges by support blocks (73). A support member (3) having a plurality of groups arranged at equal intervals along the circumference direction of the conveyor belt (7), each group having a plurality of members arranged at equal intervals along the width direction of the conveyor belt (7), the support member (3) comprising a piston portion (31) and a suction cup portion (32), the top of the piston portion (31) being raised to form the suction cup portion (32), the top of the suction cup portion (32) being provided with a circular hole (8), the circular hole (8) extending downward to the bottom of the piston portion (31), the outer wall bottom of the piston portion (31) being provided with a plurality of through grooves (9) communicating with the circular holes (8); A negative pressure component (4) connected to the input side of the conveying platform (2) and used to generate negative pressure in the containing groove (6) and generate positive pressure in the gap of the conveying belt (7); Through holes (10) are evenly distributed on the surfaces of the inner belt (71) and the outer belt (72); the diameter of the through holes (10) located on the surface of the outer belt (72) is larger than the diameter of the through holes (10) located on the surface of the inner belt (71), so that the two through holes (10) are respectively connected to the piston part (31) and the suction cup part (32); and a positioning spring (11) is fixedly connected between the bottom of the suction cup part (32) and the surface of the inner belt (71).

2. An LCD exposure device according to claim 1, characterized in that: The height of the through groove (9) is the same as the thickness of the inner belt (71), and the height of the suction cup portion (32) extending beyond the outer belt (72) is equal to twice the thickness of the inner belt (71).

3. An LCD exposure device according to claim 2, characterized in that: A circular groove (12) for airflow reverse thrust is provided on the top of the suction cup portion (32), and the circular groove (12) is located outside the circular hole (8).

4. An LCD exposure device according to claim 3, characterized in that: An annular groove (13) is provided in the through hole (10) of the inner belt (71) and the outer belt (72), and a sealing ring (14) is connected to the annular groove (13). The two sealing rings (14) are in contact with the outer wall of the suction cup portion (32) and the piston portion (31), respectively.

5. An LCD exposure device according to claim 4, characterized in that: The inner wall of the accommodating groove (6) is concave to form a track groove (15), and both sides of the inner belt (71) and the outer belt (72) extend into the track groove (15).

6. The LCD exposure device according to claim 5, characterized in that: The negative pressure assembly (4) comprises an air pump (41), a partition member (42) and a diffusion nozzle (43); the partition member (42) is arranged in the conveyor belt (7) and is fixedly connected to the inner wall of the receiving groove (6); a negative pressure chamber (16) for suction is formed between the top of the partition member (42) and the inner belt (71); The diffusion nozzle (43) is fixedly connected to the outer wall of the conveying platform (2) and communicates with the track groove (15); The air pump (41) is installed outside the conveying platform (2), the input port of the air pump (41) is connected to the negative pressure chamber (16) through an air inlet pipe, and the output port of the air pump (41) is connected to the diffusion nozzle (43) through an exhaust pipe.

7. An LCD exposure device according to claim 6, characterized in that: The top of the conveying platform (2) is composed of a discharge area (17), an exposure area (18) and a discharge area (19), and the negative pressure chamber (16) covers the discharge area (17) and the exposure area (18).

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