Task processing method based on target chamber and application equipment thereof

Abstract

The embodiment of the invention provides a task processing method based on a target chamber and application equipment thereof. The method comprises the steps that when a target chamber is occupied by a mass production task, a creation instruction sent by a user is received, and a text issuing task is created according to the creation instruction; starting the text issuing task; the text issuing task corresponds to a processing priority; based on the processing priority, executing the text issuing task; and after the text issuing task is executed, executing the mass production task. According to the embodiment of the invention, a plurality of text issuing tasks can be flexibly allocated to different cavities based on a use scene in a mass production process by facing to the cavities, and the tasks are executed one by one in a non-stop state based on the priorities of the cavities, so that the processing of emergency tasks is solved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor production and manufacturing technology, and in particular to a task processing method based on a target chamber, a task processing device based on a target chamber, a semiconductor process equipment and a storage medium. Background Art

[0002] In the field of semiconductor manufacturing, there is often a situation where the target chamber cannot be used to perform some emergency tasks or DummySeason (cleaning wafers) because the target chamber is occupied by a mass production task.

[0003] Based on the above scenario, if the machine chamber is currently occupied by multiple tasks, but due to special reasons, you want to execute an emergency task or DummySeason based on the chamber on the machine side, you can only Abort (prohibit) all subsequent tasks involving the chamber, or perform a forced cancellation operation to release the target chamber and then execute the emergency task or DummySeason operation.

[0004] In the existing method, during the mass production process, the operation of executing emergency tasks or DummySeason is performed by switching the state of the target chamber or interrupting the task queue; however, these methods have the problems of low operating efficiency and complicated processes. Summary of the invention

[0005] In view of the above problems, embodiments of the present invention are proposed to provide a target chamber-based task processing method, a target chamber-based task processing device, a semiconductor process equipment and a storage medium that overcome the above problems or at least partially solve the above problems.

[0006] In order to solve the above problems, an embodiment of the present invention discloses a task processing method based on a target chamber, including:

[0007] When the target chamber is occupied by a mass production task, receiving a creation instruction sent by a user, and creating a text and issuing a task according to the creation instruction;

[0008] Initiate the text delivery task; the text delivery task has a corresponding processing priority;

[0009] Based on the processing priority, executing the text sending task;

[0010] After the text sending task is completed, the mass production task is executed.

[0011] Optionally, the method further comprises:

[0012] Obtaining permission information of the user;

[0013] When the permission information satisfies the preset creation permission, the step of creating a text distribution task according to the creation instruction is executed.

[0014] Optionally, the creation instruction includes task parameters, and the text delivery task corresponds to preset parameter list information; the step of creating the text delivery task according to the creation instruction includes:

[0015] Configuring the task parameters into the preset parameter list information;

[0016] The text delivery task is created according to the parameter list information after setting.

[0017] Optionally, the step of starting the text delivery task includes:

[0018] Get the startup password;

[0019] When the startup password is verified to be correct, the text delivery task is assigned to the target chamber;

[0020] When the startup password verification is wrong, the text delivery task is refused to be started.

[0021] Optionally, the text delivery task includes a chamber identifier; and the step of allocating the text delivery task to the target chamber includes:

[0022] The target chamber is determined according to the chamber identifier, and the text delivery task is assigned to the target chamber.

[0023] Optionally, when the task of starting the text delivery is rejected, the method further includes:

[0024] Generate creation failure information, where the creation failure information is used to prompt that the text delivery task cannot be started.

[0025] Optionally, the step of executing the text delivery task based on the processing priority includes:

[0026] Based on the processing priority, sorting the text delivery tasks;

[0027] Send the sorted text to tasks and execute them in sequence.

[0028] An embodiment of the present invention also discloses a target chamber-based task processing device, which is characterized in that it includes a processor, a memory, and a computer program stored in the memory and capable of running on the processor, and when the computer program is executed by the processor, the steps of the target chamber-based task processing method as described above are implemented.

[0029] An embodiment of the present invention also discloses a semiconductor process equipment, comprising a radio frequency power supply, a radio frequency matcher and a process chamber, wherein the input end of the radio frequency matcher is connected to the radio frequency power supply, and the output end of the radio frequency matcher is connected to the process chamber; the process chamber is provided with a processor, a memory and a computer program stored in the memory and capable of running on the processor, and when the computer program is executed by the processor, the steps of a task processing method based on a target chamber as described above are implemented.

[0030] An embodiment of the present invention further discloses a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the steps of the target chamber-based task processing method as described above are implemented.

[0031] The embodiments of the present invention include the following advantages:

[0032] The embodiment of the present invention receives a creation instruction sent by a user when the target chamber is occupied by a mass production task, creates a text sending task according to the creation instruction, starts the text sending task, corresponds to a processing priority, executes the text sending task based on the processing priority, and executes the mass production task after the text sending task is completed. The embodiment of the present invention creates a text sending task during the mass production process based on the process of executing tasks in the target chamber. Through the sending of the text sending task, the target chamber can directly process its working area based on the text sending task without waiting for the state conversion of the target chamber, so that the target chamber can quickly execute the text sending task; and based on the processing priority, the target chamber can execute the text sending tasks one by one without shutting down the target chamber, and give priority to tasks with high urgency, thereby solving the processing of urgent tasks. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 is a flowchart of a step of an embodiment of a task processing method based on a target chamber of the present invention;

[0034] Figure 2 is a flowchart of another embodiment of a task processing method based on a target chamber of the present invention;

[0035] Figure 3 This is a schematic diagram of a text delivery task execution example of a task processing method based on a target chamber of the present invention. 。 DETAILED DESCRIPTION

[0036] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0037] Reference Figure 1 , shows a flowchart of a task processing method based on a target chamber according to an embodiment of the present invention, wherein the task processing method based on a target chamber may specifically include the following steps:

[0038] Step 101, when the target chamber is occupied by a mass production task, receiving a creation instruction sent by a user, and creating a text and issuing a task according to the creation instruction;

[0039] During the mass production of semiconductors, the target chamber will be occupied by mass production tasks. At this time, if it is necessary to insert non-mass production tasks such as urgent tasks such as cleaning wafers, the creation instruction sent by the user can be received, and a text-delivered task can be created based on the creation instruction. The text-delivered task is the process processing task sent to the target chamber by the method in this article. The target chamber can execute the text-delivered task, leave its internal working area vacant, or perform the process corresponding to the text-delivered task.

[0040] Step 102, starting the text delivery task; the text delivery task has a corresponding processing priority;

[0041] After successfully creating a text delivery task, you can start the text delivery task so that the text delivery task can enter the executable task sequence of the chamber. Among them, the text delivery task corresponds to a processing priority. The processing priority can be associated with the task type of the text delivery task. The more important or urgent the task type is, the higher the processing priority; correspondingly, the text delivery task with a higher processing priority will be processed earlier by the target chamber. Among them, the processing priority can be represented by an identifier under the same rule, such as using the size of a number, or custom rules to represent the processing priority. In actual applications, it can be set according to actual needs.

[0042] Step 103, executing the text delivery task based on the processing priority;

[0043] The execution priority of the text delivery task is determined based on the processing priority, and the text delivery task is executed based on the priority. Specifically, when the target chamber receives the text delivery task, it can determine the urgency of the processing priority based on the processing priority rule, and determine the execution order between the text delivery tasks corresponding to different processing priorities according to the urgency, and execute the corresponding text delivery task based on the execution order.

[0044] Step 104, after the text sending task is completed, the mass production task is executed.

[0045] After completing the text delivery task, the target chamber is released and can continue to perform mass production tasks and process the wafers.

[0046] The embodiment of the present invention receives a creation instruction sent by a user when the target chamber is occupied by a mass production task, creates a text sending task according to the creation instruction, starts the text sending task, corresponds to a processing priority, executes the text sending task based on the processing priority, and executes the mass production task after the text sending task is completed. The embodiment of the present invention creates a text sending task during the mass production process based on the process of executing tasks in the target chamber. Through the sending of the text sending task, the target chamber can directly process its working area based on the text sending task without waiting for the state conversion of the target chamber, so that the target chamber can quickly execute the text sending task; and based on the processing priority, the target chamber can execute the text sending tasks one by one without shutting down the target chamber, and give priority to tasks with high urgency, thereby solving the processing of urgent tasks.

[0047] Reference Figure 2 , shows a flowchart of another embodiment of a task processing method based on a target chamber of the present invention, wherein the task processing method based on a target chamber may specifically include the following steps:

[0048] Step 201, when the target chamber is occupied by a mass production task, receiving a creation instruction sent by a user and obtaining the permission information of the user;

[0049] In the embodiment of the present invention, the target chamber may be a single chamber or multiple chambers, which is not limited in the embodiment of the present invention.

[0050] When the target chamber is occupied by mass production tasks, and there is a need for urgent production or testing, the user can send a creation instruction to instruct to call the target chamber for urgent production or testing. At this time, the creation instruction sent by the user is received, and the user's authority information is obtained to identify the user's identity.

[0051] Step 202: when the permission information satisfies the preset creation permission, a text is created and a task is issued according to the creation instruction;

[0052] After obtaining the user's permission information, it can be determined whether the permission information meets the preset creation permission, and whether the user can create a text delivery task. The permission information can be represented by a permission level, and the preset creation permission is a specific permission level. When the permission level of the permission information is not lower than the specific permission level, the preset creation permission is met, otherwise, the preset creation permission is not met.

[0053] When the user's permission information meets the preset creation permission, that is, when the user's current permission level can create a text delivery task, the text delivery task is created according to the creation instruction.

[0054] In addition, when the user's permission information does not meet the preset creation permission, that is, when the user's current permission level cannot create a text delivery task, the user can be reminded that a user with a higher permission is required to create a text delivery task.

[0055] In an optional embodiment of the present invention, the creation instruction includes task parameters, and the text delivery task corresponds to preset parameter list information; the step of creating the text delivery task according to the creation instruction includes:

[0056] Sub-step S2021, configuring the task parameters into the preset parameter list information;

[0057] In the embodiment of the present invention, the task parameters can be used to configure the text delivery task; the task parameters can include parameters such as the chamber where the task is performed, the task type, the operation flow, and the process control.

[0058] The task parameters of this creation instruction can be configured into the preset parameter list information, so that each data in the parameter list information has specific implementation parameters.

[0059] Sub-step S2021, creating the text delivery task according to the set parameter list information.

[0060] The parameter list information after setting includes the requirements to be met by the text delivery task after the configuration is completed. Therefore, the text delivery task can be created according to the parameter list information after setting.

[0061] In addition, after creating a text delivery task, in order to avoid duplication of text delivery tasks, you can check the text delivery tasks to determine whether there are identical text delivery tasks. If there are no identical text delivery tasks, continue with the subsequent process.

[0062] Step 203, starting the text delivery task; the text delivery task has a corresponding processing priority;

[0063] After creation, you can start the text delivery task to put the text delivery task into the execution sequence of the device. Among them, the text delivery task has a processing priority.

[0064] Step 204, executing the text delivery task based on the processing priority;

[0065] The execution order of the text delivery tasks is determined based on the processing priority, and then the text delivery tasks are executed to realize the processing of urgent tasks.

[0066] Step 205, after the text sending task is completed, the mass production task is executed.

[0067] After completing the text delivery task, the target chamber is released and can continue to perform mass production tasks and process the wafers.

[0068] In an optional embodiment of the present invention, the step 203 of starting the text delivery task may specifically include:

[0069] Sub-step S2031, obtaining a startup password;

[0070] When the task is issued by the startup text, the user needs to enter the startup password, and the device can obtain the startup password. Then the startup password is verified. Since there are many ways to verify the password and the technology is mature, the embodiment of the present invention does not limit the way to verify the password.

[0071] Sub-step S2032, when the startup password is verified to be correct, assigning the text delivery task to the target chamber;

[0072] When the startup password is verified correctly, the text delivery task can be started, and the text delivery task can be assigned to the target chamber, and the target chamber can be used to execute the text delivery task later. The identity of the operator who issues the task is verified by the startup password to prevent non-machine equipment operators from operating and ensure the safe production of the machine equipment.

[0073] In an optional embodiment of the present invention, the text delivery task includes a chamber identifier; and the step of allocating the text delivery task to the target chamber includes:

[0074] Sub-step S20321, determining the target chamber according to the chamber identifier, and assigning the text delivery task to the target chamber.

[0075] In the embodiment of the present invention, the chamber identification can be used as reference data for chamber matching, and the target chamber for executing the text delivery task can be determined based on the chamber identification; the text delivery task is assigned to the target chamber so that the target chamber can execute the text delivery task. The text delivery task is executed directly through the target chamber, and other chambers still maintain normal production, ensuring the normal production rhythm of the machine equipment.

[0076] In an optional embodiment of the present invention, the step 204 of executing the text delivery task based on the processing priority may specifically include:

[0077] Sub-step S2041, sorting the text delivery tasks based on the processing priority;

[0078] All text delivery tasks are sorted according to the processing priority. Specifically, the processing priorities of the text delivery tasks can be compared, and the tasks with higher priorities are placed at the front, thereby sorting all text delivery tasks.

[0079] Sub-step S2042, sending the sorted text to tasks for execution in sequence.

[0080] After the sorting is completed, the text delivery tasks can be executed in the order corresponding to the sorted text delivery tasks to realize the processing of urgent tasks. Therefore, when urgent tasks need to be inserted, urgent tasks can be processed with the highest priority, ensuring the processing timeliness of urgent tasks and improving the response time of urgent tasks.

[0081] In addition, when the task of sending the text is refused to be started, the method further includes:

[0082] Step S1, generating creation failure information, wherein the creation failure information is used to prompt that the text delivery task cannot be started.

[0083] The operation of launching the text delivery task will be rejected, and the creation failure message will be generated. The creation failure message will prompt the user that the text delivery task cannot be started. The operator can use the creation failure message to diagnose the machine equipment or check the production process to improve production efficiency.

[0084] In order to make the embodiments of the present invention clear to those skilled in the art, the following examples are provided for explanation; Figure 3 Among them, the text-delivered task is a Mandatory Task, which is a process processing task delivered in text form.

[0085] (1) Start the process.

[0086] (2) Check whether the user permissions meet the permission requirements.

[0087] (3.1) If the user does not have permission, this function cannot be used.

[0088] (3.2) When the user has permission, he can create a Mandatory Task (text delivery task).

[0089] (4) Based on the current Mandatory Task, check whether there is an identical Mandatory Task in the existing tasks, and determine whether the Mandatory Task can be executed.

[0090] (5) When the Mandatory Task can be executed, obtain the parameter information of the Mandatory Task, including the chamber identification, processing urgency, start password, task attributes, process path, process time, process recipe, etc.

[0091] (6) List the Task list of the Mandatory Task. That is, in the parameter information of the Mandatory Task, extract the row name in each information name list and generate a list, that is, generate the Task list.

[0092] (7.1) Editing parameters: In the Task list, the specific parameters corresponding to the information name of each item in the parameter information of the Mandatory Task are determined as the parameters of the row and written into the row.

[0093] (8.1) After the parameter editing is completed, enter the startup password to start the Mandatory Task.

[0094] Since the Mandatory Task is special and may affect the normal mass production process, a startup password is required to enable the Mandatory Task. At this time, you can verify whether the password entered by the user is consistent with the startup password in the parameter information of the Mandatory Task, and then determine whether to start it.

[0095] Based on step 8.1, if the startup password is correct and the Mandatory Task is successfully created, perform the following steps:

[0096] (9.1) After the mandatory tasks are started, they are sorted based on their priorities.

[0097] (10.1) Priority includes two parameters: Mandatory Chamber (processing priority parameter) and CJob Priority (processing priority parameter); Mandatory Chamber is the first-level priority, and CJob Priority is the second-level priority. That is, priority is sorted based on Mandatory Chamber first. When Mandatory Chambers are the same, Mandatory Tasks with the same Mandatory Chamber are sorted based on CJob Priority. The execution order of all existing Mandatory Tasks is sorted by Mandatory Chamber and CJob Priority.

[0098] (11.1) If the Mandatory Chamber set by the newly created Mandatory Task is the same as the currently executing Mandatory Chamber, and the CJob Priority is higher than the currently executing Mandatory Task, the currently executing Mandatory Task will be terminated and the newly created Mandatory Task will be executed first.

[0099] (11.2) If the Mandatory Chamber set in the newly created Mandatory Task is the same as the currently executing Mandatory Chamber, and the CJob Priority is higher than the currently executing Mandatory Task, the current Mandatory Task will be executed first. After the current Mandatory Task is completed, the newly created Mandatory Task will be executed.

[0100] If the parameters of the newly created Mandatory Task are different, multiple MandatoryTasks can be executed in parallel.

[0101] (14.1) After completing the Mandatory Task, continue with the mass production process.

[0102] Based on step 8.1, if the startup password is incorrect and the Mandatory Task creation fails, perform the following steps:

[0103] (12.1)Mandatory Task creation failed.

[0104] (13.1) The mass production process continues.

[0105] (14.3) The target chamber is still used by the original Task.

[0106] Based on step 4, if there is no Mandatory Task, perform the following steps:

[0107] (7.2) Edit the parameters according to (7.1).

[0108] (8.2) Enter the startup password to start the Mandatory Task.

[0109] Based on step 8.2, if the startup password is correct and the Mandatory Task is successfully created, perform the following steps:

[0110] (9.2) The password is correct. The machine assigns the corresponding chamber to the MandatoryTask to execute the process based on the Mandatory Chamber parameters.

[0111] (14.2)Mandatory Task is inserted into the execution sequence of the target chamber task based on the Mandatory Chamber, and the execution order is re-optimized.

[0112] Based on step 8.2, if the startup password is incorrect and the Mandatory Task creation fails, perform the following steps:

[0113] (12.2) The password is incorrect and the creation fails.

[0114] (13.2) Continue the original mass production process.

[0115] (14.3) The target chamber is still used by the original Task.

[0116] The embodiment of the present invention solves the problem that when the target chamber is occupied by a mass production task during mass production, the target chamber is released and allocated to the text delivery task, thereby solving some urgent tasks. The adjustment is based on the chamber level. During mass production, multiple tasks can be flexibly allocated to different chambers based on the usage scenario, and they can be executed one by one without stopping the machine based on the chamber priority, thereby improving processing efficiency.

[0117] It should be noted that, for the sake of simplicity, the method embodiments are described as a series of action combinations, but those skilled in the art should be aware that the embodiments of the present invention are not limited by the order of the actions described, because according to the embodiments of the present invention, certain steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in the specification are all preferred embodiments, and the actions involved are not necessarily required by the embodiments of the present invention.

[0118] The embodiment of the present invention further discloses a target chamber-based task processing device, which is characterized by comprising a processor, a memory, and a computer program stored in the memory and capable of running on the processor, wherein the computer program implements the steps of the target chamber-based task processing method when executed by the processor, and the target chamber-based task processing method:

[0119] When the target chamber is occupied by a mass production task, receiving a creation instruction sent by a user, and creating a text and issuing a task according to the creation instruction;

[0120] Initiate the text delivery task; the text delivery task has a corresponding processing priority;

[0121] Based on the processing priority, executing the text sending task;

[0122] After the text sending task is completed, the mass production task is executed.

[0123] Optionally, the method further comprises:

[0124] Obtaining permission information of the user;

[0125] When the permission information satisfies the preset creation permission, the step of creating a text distribution task according to the creation instruction is executed.

[0126] Optionally, the creation instruction includes task parameters, and the text delivery task corresponds to preset parameter list information; the step of creating the text delivery task according to the creation instruction includes:

[0127] Configuring the task parameters into the preset parameter list information;

[0128] The text delivery task is created according to the parameter list information after setting.

[0129] Optionally, the step of starting the text delivery task includes:

[0130] Get the startup password;

[0131] When the startup password is verified to be correct, the text delivery task is assigned to the target chamber;

[0132] When the startup password verification is wrong, the text delivery task is refused to be started.

[0133] Optionally, the text delivery task includes a chamber identifier; and the step of allocating the text delivery task to the target chamber includes:

[0134] The target chamber is determined according to the chamber identifier, and the text delivery task is assigned to the target chamber.

[0135] Optionally, when the task of starting the text delivery is rejected, the method further includes:

[0136] Generate creation failure information, where the creation failure information is used to prompt that the text delivery task cannot be started.

[0137] Optionally, the step of executing the text delivery task based on the processing priority includes:

[0138] Based on the processing priority, sorting the text delivery tasks;

[0139] Send the sorted text to tasks and execute them in sequence.

[0140] The embodiment of the present invention also discloses a semiconductor process equipment, including a radio frequency power supply, a radio frequency matcher and a process chamber, wherein the input end of the radio frequency matcher is connected to the radio frequency power supply, and the output end of the radio frequency matcher is connected to the process chamber; the process chamber is provided with a processor, a memory and a computer program stored in the memory and capable of running on the processor, and when the computer program is executed by the processor, the steps of the task processing method based on the target chamber are implemented as described above. Among them, the task processing method based on the target chamber includes:

[0141] When the target chamber is occupied by a mass production task, receiving a creation instruction sent by a user, and creating a text and issuing a task according to the creation instruction;

[0142] Initiate the text delivery task; the text delivery task has a corresponding processing priority;

[0143] Based on the processing priority, executing the text sending task;

[0144] After the text sending task is completed, the mass production task is executed.

[0145] Optionally, the method further comprises:

[0146] Obtaining permission information of the user;

[0147] When the permission information satisfies the preset creation permission, the step of creating a text distribution task according to the creation instruction is executed.

[0148] Optionally, the creation instruction includes task parameters, and the text delivery task corresponds to preset parameter list information; the step of creating the text delivery task according to the creation instruction includes:

[0149] Configuring the task parameters into the preset parameter list information;

[0150] The text delivery task is created according to the parameter list information after setting.

[0151] Optionally, the step of starting the text delivery task includes:

[0152] Get the startup password;

[0153] When the startup password is verified to be correct, the text delivery task is assigned to the target chamber;

[0154] When the startup password verification is wrong, the text delivery task is refused to be started.

[0155] Optionally, the text delivery task includes a chamber identifier; and the step of allocating the text delivery task to the target chamber includes:

[0156] The target chamber is determined according to the chamber identifier, and the text delivery task is assigned to the target chamber.

[0157] Optionally, when the task of starting the text delivery is rejected, the method further includes:

[0158] Generate creation failure information, where the creation failure information is used to prompt that the text delivery task cannot be started.

[0159] Optionally, the step of executing the text delivery task based on the processing priority includes:

[0160] Based on the processing priority, sorting the text delivery tasks;

[0161] Send the sorted text to tasks and execute them in sequence.

[0162] The embodiment of the present invention further discloses a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, the steps of the above-mentioned task processing method based on the target chamber are implemented. The task processing method based on the target chamber includes:

[0163] When the target chamber is occupied by a mass production task, receiving a creation instruction sent by a user, and creating a text and issuing a task according to the creation instruction;

[0164] Initiate the text delivery task; the text delivery task has a corresponding processing priority;

[0165] Based on the processing priority, executing the text sending task;

[0166] After the text sending task is completed, the mass production task is executed.

[0167] Optionally, the method further comprises:

[0168] Obtaining permission information of the user;

[0169] When the permission information satisfies the preset creation permission, the step of creating a text distribution task according to the creation instruction is executed.

[0170] Optionally, the creation instruction includes task parameters, and the text delivery task corresponds to preset parameter list information; the step of creating the text delivery task according to the creation instruction includes:

[0171] Configuring the task parameters into the preset parameter list information;

[0172] The text delivery task is created according to the parameter list information after setting.

[0173] Optionally, the step of starting the text delivery task includes:

[0174] Get the startup password;

[0175] When the startup password is verified to be correct, the text delivery task is assigned to the target chamber;

[0176] When the startup password verification is wrong, the text delivery task is refused to be started.

[0177] Optionally, the text delivery task includes a chamber identifier; and the step of allocating the text delivery task to the target chamber includes:

[0178] The target chamber is determined according to the chamber identifier, and the text delivery task is assigned to the target chamber.

[0179] Optionally, when the task of starting the text delivery is rejected, the method further includes:

[0180] Generate creation failure information, where the creation failure information is used to prompt that the text delivery task cannot be started.

[0181] Optionally, the step of executing the text delivery task based on the processing priority includes:

[0182] Based on the processing priority, sorting the text delivery tasks;

[0183] Send the sorted text to tasks and execute them in sequence.

[0184] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0185] It will be appreciated by those skilled in the art that the embodiments of the present invention may be provided as methods, devices, or computer program products. Therefore, the embodiments of the present invention may take the form of a complete hardware embodiment, a complete software embodiment, or an embodiment combining software and hardware. Moreover, the embodiments of the present invention may take the form of a computer program product implemented on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program codes.

[0186] The embodiments of the present invention are described with reference to the flowcharts and / or block diagrams of the methods, terminal devices (systems), and computer program products according to the embodiments of the present invention. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of the processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing terminal device to generate a machine, so that the instructions executed by the processor of the computer or other programmable data processing terminal device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 A process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0187] These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing terminal device to operate in a specific manner, so that the instructions stored in the computer-readable memory produce a manufactured product including an instruction device, which implements the process Figure 1 A process or multiple processes and / or boxes Figure 1 A function specified in one or more boxes.

[0188] These computer program instructions can also be loaded onto a computer or other programmable data processing terminal device so that a series of operating steps are executed on the computer or other programmable terminal device to produce a computer-implemented process, thereby providing instructions for executing on the computer or other programmable terminal device to implement the process. Figure 1 A process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0189] Although the preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the embodiments of the present invention.

[0190] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or terminal device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or terminal device including the elements.

[0191] The above is a detailed introduction to a target chamber-based task processing method and an application device provided by the present invention. Specific examples are used in this article to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea; at the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A task processing method based on a target chamber, characterized in that: include: When the target chamber is occupied by a mass production task, receiving a creation instruction sent by a user, and creating a text and issuing a task according to the creation instruction; Initiate the text distribution task; The text delivery task has a corresponding processing priority; Based on the processing priority, executing the text sending task; After the text sending task is completed, the mass production task is executed.

2. The method according to claim 1, characterized in that The method further comprises: Obtaining permission information of the user; When the permission information satisfies the preset creation permission, the step of creating a text distribution task according to the creation instruction is executed.

3. The method according to claim 1, characterized in that The creation instruction includes task parameters, and the text delivery task corresponds to preset parameter list information; The step of creating a text delivery task according to the creation instruction includes: Configuring the task parameters into the preset parameter list information; The text delivery task is created according to the parameter list information after setting.

4. The method according to claim 1, characterized in that The step of starting the text delivery task includes: Get the startup password; When the startup password is verified to be correct, the text delivery task is assigned to the target chamber; When the startup password verification is wrong, the text delivery task is refused to be started.

5. The method according to claim 4, characterized in that The text delivery task includes a chamber identifier; and the step of allocating the text delivery task to the target chamber includes: The target chamber is determined according to the chamber identifier, and the text delivery task is assigned to the target chamber.

6. The method according to claim 4, characterized in that When the task of sending the text is refused to be started, the method further includes: Generate creation failure information, where the creation failure information is used to prompt that the text delivery task cannot be started.

7. The method according to claim 1, characterized in that The step of executing the text delivery task based on the processing priority includes: Based on the processing priority, sorting the text delivery tasks; Send the sorted text to tasks and execute them in sequence.

8. A task processing device based on a target chamber, characterized in that: The method comprises a processor, a memory and a computer program stored in the memory and capable of running on the processor, wherein when the computer program is executed by the processor, the steps of the target chamber-based task processing method as described in any one of claims 1 to 7 are implemented.

9. A semiconductor process equipment, characterized in that: The semiconductor process equipment includes a radio frequency power supply, a radio frequency matcher and a process chamber, wherein the input end of the radio frequency matcher is connected to the radio frequency power supply, and the output end of the radio frequency matcher is connected to the process chamber; the process chamber is provided with a processor, a memory and a computer program stored in the memory and capable of running on the processor, and when the computer program is executed by the processor, the steps of a task processing method based on a target chamber are implemented as described in any one of claims 1 to 7.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the steps of a target chamber-based task processing method according to any one of claims 1 to 7 are implemented.

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