Cavity structure and deposition equipment

Abstract

The embodiment of the invention relates to the field of semiconductor manufacturing, and provides a cavity structure and deposition equipment, and the cavity structure comprises a first cavity, a second cavity and a communication channel located between the first cavity and the second cavity; the air outlet channel is communicated with the communicating channel; at least part of the air outlet regulation and control mechanism is located in the air outlet channel and the communicating channel, the air outlet regulation and control mechanism is used for dividing the part, communicating with the air outlet channel, of the communicating channel into a first exhaust hole and a second exhaust hole, the first exhaust hole communicates with the first cavity, and the second exhaust hole communicates with the second cavity; and the position of the air outlet regulation and control mechanism is adjustable, so that the opening degree of the first exhaust hole is adjustable, and the opening degree of the second exhaust hole is adjustable. According to the embodiment of the invention, at least the difference between the film thickness and the film quality of the films prepared in the two cavities in the cavity structure can be reduced.

Description

Technical Field

[0001] The embodiments of the present disclosure relate to the field of semiconductor manufacturing, and in particular to a chamber structure and deposition equipment. Background Art

[0002] Deposition process is a common film-forming process in semiconductor manufacturing process. Deposition process mainly includes chemical vapor deposition (CVD), physical vapor deposition (PVD) and atomic layer deposition (ALD). Taking chemical vapor deposition as an example, chemical vapor deposition is a process technology in which reactants react chemically under gaseous conditions to generate solid substances deposited on the surface of the wafer to produce thin films. This process technology is realized by deposition equipment. Specifically, the thin film is produced in the cavity structure of the deposition equipment.

[0003] In the related art, deposition equipment usually adopts a chamber structure including two chambers to prepare thin films. In this way, the target thin films can be prepared on two wafers in the same time, which can improve the preparation efficiency of the deposition equipment. However, the chamber structure in the related art has a large difference in film thickness and film quality of the thin films prepared in the two chambers because the gas inlet main pipeline distributes the gas unevenly to the two chambers. Therefore, the difference in film thickness and film quality of the thin films prepared in the two chambers of the chamber structure in the related art needs to be reduced. Summary of the invention

[0004] The embodiments of the present disclosure provide a chamber structure and a deposition device, which are at least beneficial for reducing the difference in film thickness and film quality of thin films prepared in two chambers in the chamber structure.

[0005] According to some embodiments of the present disclosure, on the one hand, the embodiments of the present disclosure provide a cavity structure, including: a first cavity, a second cavity and a connecting channel located between the first cavity and the second cavity, the connecting channel is used to connect the first cavity and the second cavity, the first cavity has a first air intake mechanism, the first air intake mechanism is used to provide gas to the inside of the first cavity, the second cavity has a second air intake mechanism, the second air intake mechanism is used to provide gas to the inside of the second cavity; an air intake main pipeline, the air intake main pipeline is used to connect the air intake pipe for providing gas, and is connected to the first air intake mechanism and the second air intake mechanism, and is used to provide gas to the first cavity and the second cavity; a first base and a second base, the first base is arranged in the first cavity , the second base is arranged in the second cavity, and the first base and the second base are both used to carry wafers; an air outlet channel, the air outlet channel is connected with the connecting channel, and is also used to connect with an exhaust pump to extract the gas in the first cavity and the second cavity through the air outlet channel; an air outlet regulating mechanism, at least part of the air outlet regulating mechanism is located in the air outlet channel and the connecting channel, the air outlet regulating mechanism is used to separate the part of the connecting channel connected with the air outlet channel into a first exhaust hole and a second exhaust hole, the first exhaust hole is connected with the first cavity, and the second exhaust hole is connected with the second cavity; wherein the position of the air outlet regulating mechanism is adjustable so that the opening of the first exhaust hole is adjustable, and the opening of the second exhaust hole is adjustable.

[0006] In some embodiments, the air outlet regulating mechanism includes: a shielding component, which is located in the air outlet channel and the connecting channel; an adjusting component, which is used to control the position of the shielding component to be adjustable, so that the opening of the first exhaust hole is adjustable, and the opening of the second exhaust hole is adjustable.

[0007] In some embodiments, the top of the shielding component abuts against the top of the communication channel, and the shielding component is used to divide the communication channel into a part communicating with the first cavity and another part communicating with the second cavity.

[0008] In some embodiments, the air outlet channel includes: a main air outlet channel that is connected to each other and branch air outlet channels located on both sides of the main air outlet channel, wherein the distance between one of the branch air outlet channels and the first cavity is smaller than the distance between the branch air outlet channel and the second cavity, and the distance between the other branch air outlet channel and the second cavity is smaller than the distance between the branch air outlet channel and the first cavity; the shielding component includes: a shielding part, which is located at the connecting point between the branch air outlet channel and the connecting channel; and a movable part, which is connected to the shielding part, and the movement of the movable part drives the position of the shielding part to be adjustable.

[0009] In some embodiments, the connecting channel includes: a first connecting air outlet channel and a second connecting air outlet channel; the air outlet channel includes: a first air outlet channel, the first air outlet channel is connected to the first connecting air outlet channel; a second air outlet channel, the second air outlet channel is connected to the second connecting air outlet channel; wherein, the shielding component is located in the second air outlet channel and the second connecting air outlet channel; the shielding component includes: a shielding part, the shielding part is located at the connection between the second air outlet channel and the second connecting air outlet channel; a movable part, the movable part is connected to the shielding part, and the movement of the movable part drives the position of the shielding part to be adjustable so as to adjust the opening of the first exhaust hole and the opening of the second exhaust hole.

[0010] In some embodiments, the shielding portion has two slot plates on one side facing the air outlet channel, and the two slot plates are used to form a slot, and the adjusting component includes: a rotating connection part, the rotating connection part is used to be rotatably connected to the end of the movable part away from the shielding portion; a rotating power part and a rotating shaft, one end of the rotating shaft is rotatably connected to the rotating power part, and the other end is connected to the movable part, the rotating power part provides power for the rotating shaft to make the rotating shaft rotate around the rotating power part, and the rotation of the rotating shaft drives the movable part to rotate around the rotating connection part; a slider, the slider is located in the slot and is slidably connected to the slot plate, and the slider is also rotatably connected to the end of the movable part away from the rotating connection part; wherein, the rotating shaft rotates around the rotating power part to drive the movable part to rotate around the rotating connection part, and the rotation of the movable part drives the slider to slide in the slot and drives the position of the shielding portion to be adjustable.

[0011] In some embodiments, the adjusting component is a connecting rod, which is connected to the shielding component and passes through the side wall of the air outlet channel. The position of the connecting rod is adjustable to drive the position of the shielding component to be adjustable; the air outlet regulating mechanism also includes: a first fixed seal, which is sleeved on the outer periphery of the connecting rod located at the outer part of the air outlet channel and abuts against the side wall of the air outlet channel, and is used to fix the connecting rod and prevent the gas in the air outlet channel from leaking from the connection between the air outlet channel and the connecting rod. The first fixed seal is also detachably connected to the connecting rod.

[0012] In some embodiments, the adjusting component includes: a threaded rod, which is threadedly connected to the shielding component, and at least one end of the threaded rod passes through the side wall of the air outlet channel; at least one knob, which is connected to one end of the threaded rod that passes through the side wall of the air outlet channel, and rotation of the knob drives the threaded rod to rotate, so as to make the position of the shielding component adjustable.

[0013] In some embodiments, the shielding component contains a magnet, the adjusting component is an energized coil, the adjusting component is located outside the air outlet channel, and the position of the shielding component is adjustable by changing the current size and current direction of the energized coil.

[0014] According to some embodiments of the present disclosure, another aspect of the present disclosure further provides a deposition device, comprising the chamber structure described in any of the above embodiments.

[0015] The technical solution provided by the embodiments of the present disclosure has at least the following advantages: In the cavity structure provided in the embodiment of the present disclosure, the cavity structure includes: a first cavity, a second cavity and a connecting channel located between the first cavity and the second cavity, the connecting channel is used to connect the first cavity and the second cavity, the first cavity has a first air intake mechanism, the first air intake mechanism is used to provide gas to the inside of the first cavity, the second cavity has a second air intake mechanism, the second air intake mechanism is used to provide gas to the inside of the second cavity; an air intake main pipeline, the air intake main pipeline is used to connect the air intake pipe for providing gas, and is connected to the first air intake mechanism and the second air intake mechanism, and is used to provide gas to the first cavity and the second cavity; a first base and a second base, the first base is arranged in the first cavity , the second base is arranged in the second cavity, and the first base and the second base are both used to carry the wafer; the gas outlet channel, the gas outlet channel is connected with the connecting channel, and is also used to connect with the vacuum pump to extract the gas in the first cavity and the second cavity through the gas outlet channel; the gas outlet regulating mechanism, at least part of the gas outlet regulating mechanism is located in the gas outlet channel and the connecting channel, the gas outlet regulating mechanism is used to separate the part connected with the connecting channel and the gas outlet channel into a first exhaust hole and a second exhaust hole, the first exhaust hole is connected with the first cavity, and the second exhaust hole is connected with the second cavity; wherein, the position of the gas outlet regulating mechanism is adjustable, so that the opening of the first exhaust hole is adjustable, and the opening of the second exhaust hole is adjustable. The first exhaust hole is connected with the first cavity and the gas outlet channel, and the opening of the first exhaust hole is positively correlated with the exhaust speed of the gas in the first cavity, the second exhaust hole is connected with the second cavity and the gas outlet channel, and the opening of the second exhaust hole is positively correlated with the exhaust speed of the gas in the second cavity. Therefore, the gas exhaust speed in the first cavity and the second cavity can be changed by adjusting the position of the gas outlet control mechanism and changing the opening of the first exhaust hole and the second exhaust hole to compensate for the difference in film thickness and film quality of the thin film in the first cavity and the second cavity caused by the difference in air intake between the first cavity and the second cavity, thereby reducing the difference in film thickness and film quality of the thin film prepared in the two cavities in the cavity structure. In addition, the gas outlet control mechanism of the embodiment of the present disclosure reduces the difference in film thickness and film quality of the thin film in the first cavity and the second cavity by adjusting the opening of the first exhaust hole and the second exhaust hole, thereby avoiding the problem of reduced film yield caused by adding a needle valve to the main air intake pipeline in the related art, thereby improving the reliability of film preparation in the cavity structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] One or more embodiments are exemplarily illustrated by pictures in the corresponding drawings, and these exemplified descriptions do not constitute a limitation on the embodiments. Unless otherwise specified, the pictures in the drawings do not constitute a scale limitation. In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the traditional technology, the drawings required for use in the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a structural schematic diagram of a cavity structure in the related art; Figure 2 It is a structural schematic diagram of another cavity structure in the related art; Figure 3 It is a structural schematic diagram of another cavity structure in the related art; Figure 4 A partial top view of another cavity structure in the related art; Figure 5 for Figure 4 Sectional view along section A1-A2; Figure 6 for Figure 4 Section along section B1-B2; Figure 7 for Figure 4 Section along the C1-C2 section; Figure 8 A schematic structural diagram of a cavity structure provided in some embodiments of the present disclosure; Fig. 9 A partial top view of a cavity structure provided in some embodiments of the present disclosure; Fig.10 for Fig. 9 A cross-sectional view along the A1'-A2' section; Fig.11 for Fig. 9 The first type of cross-section along the B1'-B2' section; Fig.12 for Fig. 9 The second cross-sectional view along the B1'-B2' section; Fig.13 for Fig. 9 The third cross-section along the B1'-B2' section; Fig.14 A schematic structural diagram of a cavity structure provided in some other embodiments of the present disclosure; Fig.15 A partial top view of a cavity structure provided in some other embodiments of the present disclosure; Fig.16 for Fig.15 An enlarged schematic diagram of the middle air outlet channel; Fig.17 A schematic diagram of an air outlet channel and a shielding component in a cavity structure provided in other embodiments of the present disclosure; Fig.18 Another schematic diagram of an air outlet channel and a shielding component in a cavity structure provided in other embodiments of the present disclosure; Fig.19 for Fig.15 A cross-sectional view along the A1'-A2' section; Fig. 20 for Fig.15 The first type of cross-section along the B1'-B2' section; Fig.21 A structural schematic diagram of a shielding component and an adjusting component in a cavity structure provided in other embodiments of the present disclosure; Fig. 22 Another structural schematic diagram of a shielding component and an adjusting component in a cavity structure provided in other embodiments of the present disclosure; Fig.23 for Fig.15 The second cross-sectional view along the B1'-B2' section; Fig.24 for Fig.15 The third cross-section along the B1'-B2' section; Fig.25 for Fig.15 The fourth cross-section along the B1'-B2' section; Fig.26 A schematic structural diagram of a cavity structure provided in some other embodiments of the present disclosure; Fig. 27 A partial top view of a cavity structure provided in some other embodiments of the present disclosure; Fig.28 A schematic diagram of a second air outlet channel and an air outlet regulating mechanism in a cavity structure provided in some other embodiments of the present disclosure; Fig.29 Another schematic diagram of the second air outlet channel and the air outlet regulating mechanism in the cavity structure provided in some other embodiments of the present disclosure; Fig.30 for Fig. 27 A cross-sectional view along the A1''-A2'' section; Fig.31 for Fig. 27 The first type of cross-section along the B1''-B2'' section; Fig.32 A structural schematic diagram of a shielding component and an adjusting component in a cavity structure provided in some other embodiments of the present disclosure; Fig.33 Another structural schematic diagram of the shielding component and the adjusting component in the cavity structure provided by some other embodiments of the present disclosure; Fig.34 for Fig. 27 The second cross-sectional view along the B1''-B2'' section; Fig.35 for Fig. 27 The third cross-sectional view along the B1''-B2'' section; Fig.36 for Fig. 27 The fourth cross-sectional view along the B1''-B2'' section. DETAILED DESCRIPTION

[0018] Figure 1 is a schematic diagram of a cavity structure in the related art, Figure 2 It is a structural schematic diagram of another cavity structure in the related technology.

[0019] There are two types of chamber structure designs generally used for deposition processes: spray design (such as Figure 1 ) and cross-flow designs (as shown Figure 2 as shown).

[0020] refer to Figure 1 The chamber structure of the spray-type design includes a chamber 100, an air inlet 110 at the top, and an air extraction port 120 at the bottom. The chamber structure also includes an air inlet mechanism 101 and a base 102 for carrying a wafer 11. The air inlet mechanism 101 is connected to the air inlet 110 to provide gas to the inside of the chamber 100. In the chamber structure of the spray-type design, the gas enters from the air inlet 110 and is finally discharged through the air extraction port 120 at the bottom of the chamber.

[0021] refer to Figure 2 The cross-flow chamber structure includes a chamber 200, and an air inlet 210 and an air extraction port 220 located on opposite sides. The chamber 200 also has a base 201 for supporting the wafer 11. In the cross-flow chamber structure, gas enters from the air inlet 210 on one side of the chamber 200 and is discharged through the air extraction port 220 located on the other side of the chamber 200.

[0022] Figure 3 FIG. 1 is a schematic diagram of another cavity structure in the related art. Figure 4 for Figure 3 Top view of the middle cavity structure. Figure 5 for Figure 4 Sectional view along section A1-A2, Figure 6 for Figure 4 Sectional view along section B1-B2, Figure 7 for Figure 4Section view along the C1-C2 section.

[0023] refer to Figure 3 For the chamber structure of the spray type design, in order to improve the output efficiency (throughput) of the deposition equipment, the chamber structure in the deposition equipment includes two chambers, so that the film can be deposited in the two chambers at the same time. Figure 1 Compared with the cavity structure, twice the film output will be achieved.

[0024] Combined with reference Figures 3 to 7 The cavity structure includes: a first cavity 300, a second cavity 301, and a connecting passage 302 between the first cavity 300 and the second cavity 301. The connecting passage 302 is used to connect the first cavity 300 and the second cavity 301. The first cavity 300 has a first air intake mechanism 310, which is used to provide gas to the inside of the first cavity 300. The second cavity 301 has a second air intake mechanism 311, which is used to provide gas to the inside of the second cavity 301. The cavity structure includes an air intake main pipeline 303, which is used to connect the air intake pipe for providing gas, and is connected to the first air intake mechanism 310 and the second air intake mechanism 311, and is used to provide gas to the first cavity 300 and the second cavity 301. The cavity structure further includes a first base 320 and a second base 321. The first base 320 is disposed in the first cavity 300, and the second base 321 is disposed in the second cavity 301. The first base 320 and the second base 321 are both used to carry wafers. The cavity structure further includes an outlet channel 304, which is connected to the connecting channel 302 and is also used to connect to an exhaust pump (not shown) to extract gas in the first cavity 300 and the second cavity 301 through the outlet channel 304.

[0025] refer to Figure 4 The communication channel 302 includes a communication outlet channel 312 and a communication test channel 322. The communication outlet channel 312 is used to connect with the outlet channel 304, so that the gas in the first cavity 300 and the second cavity 301 is discharged through the outlet channel 304.

[0026] The cavity structure further includes a test channel 305 , which connects the test channel 322 to the test channel 305 . The test channel 305 is used to connect to a vacuum gauge (not shown) to test the vacuum degree or air pressure in the first cavity 300 and the second cavity 301 .

[0027] In the cavity structure in the related art, the main air intake pipeline 303 is connected to the first cavity 300 and the second cavity 301 respectively. Due to the structural error and assembly error of the parts of the main air intake pipeline 303, the gas cannot be completely and equally divided into the first cavity 300 and the second cavity 301, resulting in a large difference in the film thickness and film quality of the thin film prepared in the first cavity 300 and the second cavity 301.

[0028] Therefore, the differences in film thickness and film quality of thin films prepared in the two cavities of the cavity structure in the related art need to be reduced.

[0029] In the cavity structure provided in the embodiment of the present disclosure, the cavity structure includes a first cavity, a second cavity, and a connecting channel, an air outlet channel, a first exhaust hole, a second exhaust hole, and an air outlet control mechanism located between the first cavity and the second cavity, wherein the position of the air outlet control mechanism is adjustable so that the opening of the first exhaust hole is adjustable and the opening of the second exhaust hole is adjustable. The first exhaust hole is connected to the first cavity and the air outlet channel, and the opening of the first exhaust hole is positively correlated with the exhaust speed of the gas in the first cavity. The second exhaust hole is connected to the second cavity and the air outlet channel, and the opening of the second exhaust hole is positively correlated with the exhaust speed of the gas in the second cavity. Therefore, the gas exhaust speed in the first cavity and the second cavity can be changed by adjusting the position of the air outlet control mechanism and changing the opening of the first exhaust hole and the second exhaust hole, so as to compensate for the difference in film thickness and film quality of the thin film in the first cavity and the second cavity caused by the difference in air intake between the first cavity and the second cavity, thereby reducing the difference in film thickness and film quality of the thin film prepared in the two cavities in the cavity structure.

[0030] In addition, in order to reduce the difference in film thickness and film quality of the thin films in the two cavities in the related art, a needle valve is usually added to the air intake main line to control the air intake amount entering the two cavities so as to achieve the air intake amount of the two cavities being as similar as possible, thereby reducing the difference in film thickness and film quality of the thin films in the first cavity and the second cavity caused by the difference in air intake between the first cavity and the second cavity. However, when the gas condenses at the needle valve, particles will be generated and brought into the cavity, and finally deposited on the thin film, which increases the particle size of the thin film and reduces the yield of the thin film. The gas outlet regulating mechanism of the embodiment of the present invention reduces the difference in film thickness and film quality of the thin films in the first cavity and the second cavity by adjusting the opening of the first exhaust hole and the second exhaust hole, thereby avoiding the problem of reduced film yield caused by adding a needle valve to the air intake main line in the related art, thereby improving the reliability of thin film preparation with the cavity structure.

[0031] The following will describe the various embodiments of the present disclosure in detail with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that in the various embodiments of the present disclosure, many technical details are provided in order to enable the reader to better understand the present disclosure. However, even without these technical details and various changes and modifications based on the following embodiments, the technical solutions claimed in the present disclosure can be implemented.

[0032] Figure 8 A schematic diagram of a cavity structure provided in some embodiments of the present disclosure is shown. Fig. 9 A partial top view of a cavity structure provided in some embodiments of the present disclosure, Fig.10 for Fig. 9 A cross-sectional view along the A1'-A2' section, Fig.11 for Fig. 9 A first cross-sectional view along the B1'-B2' section.

[0033] Combined with reference Figures 8 to 11 The cavity structure includes a first cavity 400, a second cavity 401, and a connecting channel 402 between the first cavity 400 and the second cavity 401. The connecting channel 402 is used to connect the first cavity 400 and the second cavity 401. The first cavity 400 has a first air intake mechanism 410, which is used to provide gas to the inside of the first cavity 400. The second cavity 401 has a second air intake mechanism 411, which is used to provide gas to the inside of the second cavity 401. The cavity structure also includes an air intake main pipeline 403, an air outlet channel 404, and an air outlet control mechanism 405. The main air intake pipeline 403 is used to connect the air intake pipe for providing gas, and is connected to the first air intake mechanism 410 and the second air intake mechanism 411, so as to provide gas for the first cavity 400 and the second cavity 401; the first base 420 and the second base 421, the first base 420 is arranged in the first cavity 400, and the second base 421 is arranged in the second cavity 401, and the first base 420 and the second base 421 are both used to support the wafer 11; the gas outlet channel 404 is connected to the connecting channel 402, and is also used to connect to the vacuum pump (not shown) to extract the gas in the first cavity 400 and the second cavity 401 through the gas outlet channel 404. At least part of the gas outlet control mechanism 405 is located in the gas outlet channel 404 and the connecting channel 402. The gas outlet control mechanism 405 is used to separate the part of the connecting channel 402 connected to the gas outlet channel 404 into a first exhaust hole 414 and a second exhaust hole 424. The first exhaust hole 414 is connected to the first cavity 400, and the second exhaust hole 424 is connected to the second cavity 401. The position of the gas outlet control mechanism 405 is adjustable, so that the opening of the first exhaust hole 414 is adjustable, and the opening of the second exhaust hole 424 is adjustable.

[0034] The cavity structure is used to prepare a thin film on the surface of the wafer 11 . Specifically, the first cavity 400 and the second cavity 401 of the cavity structure are used to provide a reaction space for preparing a thin film on the surface of the wafer 11 , so as to prepare a thin film on the surface of the wafer 11 .

[0035] The communication channel 402 is used to connect the first cavity 400 and the second cavity 401. The communication channel 402 may include a communication outlet channel 412 and a communication test channel 422. The communication outlet channel 412 is used to connect with the outlet channel 404 so that the gas in the first cavity 400 and the second cavity 401 can be discharged through the outlet channel 404.

[0036] The cavity structure further includes a test channel 408 . The test channel 408 is connected to the communication test channel 422 . The test channel 408 is used to connect to a vacuum gauge (not shown) to test the vacuum degree or air pressure in the first cavity 400 and the second cavity 401 .

[0037] The intake main pipeline 403 is used to connect to the intake pipe for providing gas, so as to provide gas to the first cavity 400 and the second cavity 401 .

[0038] The gas outlet channel 404 is connected to the connecting channel 402 . Specifically, the gas outlet channel 404 is connected to the connecting gas outlet channel 412 , and is used to discharge the gas in the first cavity 400 and the second cavity 401 .

[0039] The side wall of the communication channel 402 is the cavity side wall 406, and the side wall of the gas outlet channel 404 is the cavity side wall 406 and the gas outlet pipe 407. In some examples, the gas outlet pipe 407 is a metal pipe, a ceramic pipe, etc. In other examples, the material of the gas outlet pipe 407 can be the same as that of the cavity side wall 406, and the gas outlet pipe 407 can be a part of the cavity side wall 406.

[0040] The air outlet regulating mechanism 405 is used to separate the part connected to the connecting channel 402 and the air outlet channel 404 into a first exhaust hole 414 and a second exhaust hole 424. Specifically, the part connected to the air outlet channel 404 and the connecting air outlet channel 412 is separated into a first exhaust hole 414 and a second exhaust hole 424.

[0041] The first exhaust hole 414 is connected to the first cavity 400 and the gas outlet channel 404, and the opening of the first exhaust hole 414 is positively correlated with the exhaust speed of the gas in the first cavity 400. The second exhaust hole 424 is connected to the second cavity 401 and the gas outlet channel 404, and the opening of the second exhaust hole 424 is positively correlated with the exhaust speed of the gas in the second cavity 401. Therefore, the opening of the first exhaust hole 414 and the second exhaust hole 424 can be adjusted by adjusting the position of the gas outlet control mechanism 405 to adjust the exhaust speed of the gas in the first cavity 400 and the second cavity 401.

[0042] In a specific example, if the air intake volume in the first cavity 400 is greater than the air intake volume in the second cavity 401 due to the air intake main pipeline 403, the position of the air outlet control mechanism 405 can be adjusted to make the opening of the first exhaust hole 414 greater than the opening of the second exhaust hole 424, so that the gas discharge speed in the first cavity 400 is greater than the gas discharge speed in the second cavity 401, and the exhaust volume per unit time in the first cavity 400 is greater than the exhaust volume per unit time in the second cavity 401, so as to compensate for the difference in film thickness and film quality of the thin film in the first cavity 400 and the second cavity 401 caused by the difference in air intake between the first cavity 400 and the second cavity 401, thereby reducing the difference in film thickness and film quality of the thin film prepared in the first cavity 400 and the second cavity 401 in the cavity structure.

[0043] In another specific example, if the air intake volume in the first cavity 400 is smaller than the air intake volume in the second cavity 401 due to the air intake main pipeline 403, the position of the air outlet control mechanism 405 can be adjusted to make the opening of the first exhaust hole 414 smaller than the opening of the second exhaust hole 424, so that the gas discharge speed in the first cavity 400 is smaller than the gas discharge speed in the second cavity 401, and the exhaust volume per unit time in the first cavity 400 is smaller than the exhaust volume per unit time in the second cavity 401, so as to compensate for the difference in film thickness and film quality of the thin film in the first cavity 400 and the second cavity 401 caused by the difference in air intake between the first cavity 400 and the second cavity 401, thereby reducing the difference in film thickness and film quality of the thin film prepared in the first cavity 400 and the second cavity 401 in the cavity structure.

[0044] Continue to refer Fig.11 The air outlet regulating mechanism 405 includes a shielding component 415 and an adjusting component 425. The shielding component 415 is located in the air outlet channel 404 and the connecting channel 402. The adjusting component 425 is used to control the position of the shielding component 415 to be adjustable, so that the opening of the first exhaust hole 414 is adjustable, and the opening of the second exhaust hole 424 is adjustable.

[0045] The shielding component 415 is located in the air outlet channel 404 and the connecting channel 402 . Specifically, the shielding component 415 is located in the air outlet channel 404 and the connecting air outlet channel 412 , and is used to adjust the opening of the first exhaust hole 414 and the second exhaust hole 424 .

[0046] The adjusting component 425 is used to control the position of the shielding component 415 so that the position of the shielding component 415 is adjustable.

[0047] In some embodiments, the top of the shielding member 415 can abut against the top of the communication channel 402, and the shielding member 415 is used to divide the communication channel 402 into a part communicating with the first cavity 400 and another part communicating with the second cavity 401. In this way, by controlling the shielding member 415 to move in the direction from the first cavity 400 to the second cavity 401, the opening of the first exhaust hole 414 and the second exhaust hole 424 can be controlled.

[0048] refer to Figure 8 , Fig. 9 and Fig.11 In some embodiments, the adjusting component 425 can be a connecting rod, which is connected to the shielding component 415 and passes through the side wall of the gas outlet channel 404. The position of the connecting rod is adjustable to drive the position of the shielding component 415 to be adjustable. The gas outlet regulating mechanism 405 can also include: a first fixed seal 435, which is sleeved on the outer periphery of the connecting rod located at the outer part of the gas outlet channel 404 and abuts against the side wall of the gas outlet channel 404, and is used to fix the connecting rod and prevent the gas in the gas outlet channel 404 from leaking from the connection between the gas outlet channel 404 and the connecting rod. The first fixed seal 435 is also detachably connected to the connecting rod. Among them, the adjusting component 425 passes through the side wall of the gas outlet channel 404, and what is passed through is the gas outlet pipe 407, not the cavity side wall 406.

[0049] The adjusting component 425 is a connecting rod, and the connecting rod is fixedly connected to the shielding component 415 . The position of the shielding component 415 is adjusted by controlling the connecting rod to move in a direction from the first cavity 400 to the second cavity 401 .

[0050] The first fixed seal 435 is detachably connected to the connecting rod. When the shielding component 415 does not need to be moved, the connecting rod also does not need to be moved. The first fixed seal 435 is sleeved on the outer periphery of the connecting rod of the outer part of the gas outlet channel 404 and abuts against the gas outlet channel 404, and is used to fix the connecting rod and prevent the gas in the gas outlet channel 404 from leaking from the connection between the gas outlet channel 404 and the connecting rod, thereby improving the reliability of the cavity structure. When the position of the shielding component 415 needs to be adjusted, the connecting rod also needs to be moved. The first fixed seal 435 can be removed so that the connecting rod can be moved in the direction from the first cavity 400 to the second cavity 401 to adjust the position of the shielding component 415.

[0051] Fig.12 for Fig. 9 The second cross-sectional view along the B1'-B2' section.

[0052] refer to Figure 8 , Fig. 9 and Fig.12In some embodiments, the adjusting component 425 may include: a threaded rod 4251 and at least one knob 4252, the threaded rod 4251 is threadedly connected to the shielding component 415, at least one end of the threaded rod 4251 penetrates the side wall of the gas outlet channel 404; the knob 4252 is connected to one end of the threaded rod 4251 penetrating the gas outlet channel 404, and the rotation of the knob 4252 drives the threaded rod 4251 to rotate, so as to drive the position of the shielding component 415 to be adjustable. Among them, the threaded rod 4251 penetrates the side wall of the gas outlet channel 404, and penetrates the gas outlet pipe 407, not the cavity side wall 406.

[0053] The threaded rod 4251 is threadedly connected to the shielding member 415, and the knob 4252 is connected to one end of the threaded rod 4251 that passes through the air outlet channel 404. The threaded rod 4251 can be driven to rotate by turning the knob 4252, and the rotation of the threaded rod 4251 drives the shielding member 415 to move in the direction from the first cavity 400 to the second cavity 401, so that the opening of the first exhaust hole 414 and the second exhaust hole 424 can be adjusted. In addition, the rotation angle of the knob 4252 is the same as the rotation angle of the threaded rod 4251, and the rotation angle of the threaded rod 4251 is related to the distance that the shielding member 415 moves in the direction from the first cavity 400 to the second cavity 401. Therefore, the moving distance of the shielding member 415 can be accurately controlled by the rotation angle of the knob 4252, which is conducive to improving the practicality of the cavity structure.

[0054] In some embodiments, the gas outlet control mechanism 405 may further include a second fixed seal 445, which is sleeved on the outer periphery of the threaded rod 4251 located at the outer portion of the gas outlet channel 404 and abuts against the gas outlet channel 404, and is used to fix the threaded rod 4251 and prevent the gas in the gas outlet channel 404 from leaking from the connection between the gas outlet channel 404 and the threaded rod 4251. The second fixed seal 445 is also detachably connected to the threaded rod 4251. In this arrangement, when the shielding component 415 does not need to be moved, the threaded rod 4251 and the knob 4252 do not need to be rotated. The second fixed seal 445 is sleeved on the outer periphery of the threaded rod 4251 located at the outer portion of the gas outlet channel 404 and abuts against the gas outlet channel 404, and is used to fix the threaded rod 4251 and prevent the gas in the gas outlet channel 404 from leaking from the connection between the gas outlet channel 404 and the threaded rod 4251, thereby improving the reliability of the cavity structure. When the position of the shielding component 415 needs to be adjusted, the threaded rod 4251 and the knob 4252 also need to be rotated, and the second fixed seal 445 can be removed so that the threaded rod 4251 can be moved in the direction from the first cavity 400 to the second cavity 401 to adjust the position of the shielding component 415.

[0055] Fig.13 for Fig. 9 A third cross-sectional view along the B1'-B2' section.

[0056] Combined with reference Figure 8 , Fig. 9 and Fig.13 In some embodiments, the shielding member 415 includes a magnet (not shown), the adjusting member 425 is a powered coil, and the adjusting member 425 is located outside the gas outlet channel 404. The position of the shielding member 415 can be adjusted by changing the current size and current direction of the powered coil. By controlling the movement of the shielding member 415 through the powered coil and the magnet, the adjusting member 425 can be located outside the gas outlet channel 404 without penetrating the gas outlet channel 404, thereby simplifying the structure of the cavity structure.

[0057] Some other embodiments of the present disclosure also provide a cavity structure, which is substantially the same as the cavity structure provided in the aforementioned embodiment, with the main difference being that the air outlet channel in the cavity structure provided in the following embodiment includes a main air outlet channel that is connected to each other and branch air outlet channels located on both sides of the main air outlet channel. The cavity structure will be described in detail below in conjunction with the accompanying drawings. It should be noted that the features that are the same or corresponding to the aforementioned embodiment will not be described in detail below to avoid redundancy. In the absence of contradiction, the corresponding description of the aforementioned embodiment is also applicable to the corresponding features of the following embodiment.

[0058] Fig.14 A schematic diagram of a cavity structure provided in some other embodiments of the present disclosure is shown. Fig.15 A partial top view of a cavity structure provided in some other embodiments of the present disclosure, Fig.16 for Fig.15 An enlarged schematic diagram of the middle outlet channel, Fig.17 A schematic diagram of an air outlet channel and a shielding component in a cavity structure provided in some other embodiments of the present disclosure, Fig.18 Another schematic diagram of an air outlet channel and a shielding component in a cavity structure provided in some other embodiments of the present disclosure, Fig.19 for Fig.15 A cross-sectional view along the A1'-A2' section.

[0059] Combined with reference Figures 14 to 19The cavity structure includes a first cavity 500, a second cavity 501, and a connecting channel 502 between the first cavity 500 and the second cavity 501. The connecting channel 502 is used to connect the first cavity 500 and the second cavity 501. The first cavity 500 has a first air intake mechanism 510, which is used to provide gas to the inside of the first cavity 500. The second cavity 501 has a second air intake mechanism 511, which is used to provide gas to the inside of the second cavity 501. The cavity structure also includes an air intake main pipeline 503, an air outlet channel 504, and an air outlet control mechanism 505. The main air intake pipeline 503 is used to connect the air intake pipe for providing gas, and is connected to the first air intake mechanism 510 and the second air intake mechanism 511, so as to provide gas for the first cavity 500 and the second cavity 501; the first base 520 and the second base 521, the first base 520 is arranged in the first cavity 500, and the second base 521 is arranged in the second cavity 501, and the first base 520 and the second base 521 are both used to carry the wafer 11; the air outlet channel 504 is connected to the connecting channel 502, and is also used to connect to the vacuum pump (not shown) to extract the gas in the first cavity 500 and the second cavity 501 through the air outlet channel 504. At least part of the gas outlet control mechanism 505 is located in the gas outlet channel 504 and the connecting channel 502. The gas outlet control mechanism 505 is used to separate the part of the connecting channel 502 connected to the gas outlet channel 504 into a first exhaust hole 514 and a second exhaust hole 524. The first exhaust hole 514 is connected to the first cavity 500, and the second exhaust hole 524 is connected to the second cavity 501. The position of the gas outlet control mechanism 505 is adjustable, so that the opening of the first exhaust hole 514 is adjustable, and the opening of the second exhaust hole 524 is adjustable.

[0060] It should be noted that the first cavity 500, the second cavity 501, the first air intake mechanism 510, the second air intake mechanism 511, the first base 520, the second base 521, the connecting channel 502, the connecting air outlet channel 512, the connecting test channel 522, the main air intake pipeline 503, the air outlet channel 504, the cavity side wall 506, the air outlet pipe 507 and the test channel 508 of the embodiment of the present disclosure can refer to the first cavity 400, the second cavity 401, the first air intake mechanism 410, the second air intake mechanism 411, the first base 420, the second base 421, the connecting channel 402, the connecting air outlet channel 412, the connecting test channel 422, the main air intake pipeline 403, the air outlet channel 404, the cavity side wall 406, the air outlet pipe 407 and the test channel 408 in the previous embodiment, and will not be repeated here.

[0061] Fig. 20 for Fig.15 A first cross-sectional view along the B1'-B2' section.

[0062] Combined with reference Fig.14 , Fig.15 , Fig.17 , Fig.18 and Fig. 20 In some embodiments, the air outlet regulating mechanism 505 includes a shielding component 515 and an adjusting component, and the shielding component 515 is located in the air outlet channel 504 and the connecting channel 502. The adjusting component is used to control the position of the shielding component 515 to be adjustable, so that the opening of the first exhaust hole 514 is adjustable, and the opening of the second exhaust hole 524 is adjustable.

[0063] The shielding component 515 is located in the air outlet channel 504 and the connecting channel 502 . Specifically, the shielding component 515 is located in the air outlet channel 504 and the connecting air outlet channel 512 , and is used to adjust the opening of the first exhaust hole 514 and the second exhaust hole 524 .

[0064] The adjusting component is used to control the position of the shielding component 515 to be adjustable.

[0065] Combined with reference Figures 14 to 18 as well as Fig. 20 In some embodiments, the air outlet channel 504 may include a main air outlet channel 534 and branch air outlet channels 544 located on both sides of the main air outlet channel 534, wherein the distance between one branch air outlet channel 544 and the first cavity 500 is smaller than the distance between the branch air outlet channel 544 and the second cavity 501, and the distance between the other branch air outlet channel 544 and the second cavity 501 is smaller than the distance between the branch air outlet channel 544 and the first cavity 500. The shielding component 515 may include a shielding portion 5151 and a movable portion 5152, wherein the shielding portion 5151 is located at the connection between the branch air outlet channel 544 and the connecting channel 502; the movable portion 5152 is connected to the shielding portion 5151, and the movement of the movable portion 5152 drives the shielding portion 5151 to move, so that the position of the shielding portion 5151 is adjustable.

[0066] The main gas outlet channel 534 is in communication with both the first cavity 500 and the second cavity 501 , and is used to discharge the gas in the first cavity 500 and the second cavity 501 .

[0067] The branch gas outlet channels 544 are located on both sides of the main gas outlet channel 534, wherein the distance between one branch gas outlet channel 544 and the first cavity 500 is smaller than the distance between the branch gas outlet channel 544 and the second cavity 501, and the distance between the other branch gas outlet channel 544 and the second cavity 501 is smaller than the distance between the branch gas outlet channel 544 and the first cavity 500. The branch gas outlet channel 544 with a smaller distance from the first cavity 500 is mainly used to discharge the gas in the first cavity 500, and the branch gas outlet channel 544 with a smaller distance from the second cavity 501 is mainly used to discharge the gas in the second cavity 501.

[0068] The first exhaust hole 514 is the connecting portion between the branch outlet channel 544 and the connecting outlet channel 512 close to the first cavity 500 , and the second exhaust hole 524 is the connecting portion between the branch outlet channel 544 and the connecting outlet channel 512 close to the second cavity 501 .

[0069] The shielding portion 5151 is located at the connection between the branched gas channel 544 and the connecting channel 502. The shielding portion 5151 moves under the drive of the movable portion 5152, and the openings of the first exhaust hole 514 and the second exhaust hole 524 can be changed by moving the shielding portion 5151.

[0070] It can be understood that the first exhaust hole 514 in the embodiment of the present disclosure is not only connected to the first cavity 500, but also connected to the second cavity 501. Since the first exhaust hole 514 is at a relatively short distance from the first cavity 500, the gas discharged from the first exhaust hole 514 is mainly the gas in the first cavity 500, and only a small amount of the gas in the second cavity 501 will be discharged from the first exhaust hole 514. Similarly, the second exhaust hole 524 is at a relatively short distance from the second cavity 501, and the gas discharged from the second exhaust hole 524 is mainly the gas in the second cavity 501, and only a small amount of the gas in the first cavity 500 will be discharged from the second exhaust hole 524. Therefore, even if the first exhaust hole 514 and the second exhaust hole 524 are connected to both the first cavity 500 and the second cavity 501, the embodiment of the present disclosure can still change the gas exhaust speed in the first cavity 500 and the second cavity 501 by changing the position of the shielding component 515 and adjusting the opening of the first exhaust hole 514 and the second exhaust hole 524, so as to compensate for the difference in film thickness and film quality of the thin film in the first cavity 500 and the second cavity 501 caused by the difference in air intake between the first cavity 500 and the second cavity 501, thereby reducing the difference in film thickness and film quality of the thin film prepared in the two cavities in the cavity structure.

[0071] In some embodiments, the aperture of the exhaust hole connected between the main gas outlet channel 534 and the connecting gas outlet channel 512 may be larger than the aperture of the first exhaust hole 514 and the aperture of the second exhaust hole 524. In this configuration, the exhaust hole connected between the main gas outlet channel 534 and the connecting gas outlet channel 512 is larger, and the first exhaust hole 514 and the second exhaust hole 524 are smaller, which can ensure that the first cavity 500 and the second cavity 501 have a larger gas exhaust speed, and the shielding component 515 is used to change the opening of the first exhaust hole 514 and the second exhaust hole 524, so as to achieve fine adjustment of the gas exhaust speed of the first cavity 500 and the second cavity 501.

[0072] In other embodiments, the aperture of the exhaust hole connecting the main air outlet channel 534 and the connecting air outlet channel 512 can be smaller than or equal to the aperture of the first exhaust hole 514; the aperture of the exhaust hole connecting the main air outlet channel 534 and the connecting air outlet channel 512 can be smaller than or equal to the aperture of the second exhaust hole 524.

[0073] Fig.21 A structural schematic diagram of a shielding component and an adjusting component in a cavity structure provided in other embodiments of the present disclosure; Fig. 22 Another structural schematic diagram of the shielding component and the adjusting component in the cavity structure provided in other embodiments of the present disclosure. Fig.21 and Fig. 22 It is a schematic diagram of the shielding component rotating around the rotating connection part at different angles.

[0074] Combined with reference Figures 14 to 18 as well as Figure 20 to Figure 22 In some embodiments, the shielding portion 5151 has two slot plates 5153 on one side facing the air outlet channel 504, and the two slot plates 5153 are used to form a slot (not marked). The adjusting component 525 includes a rotating connection portion 5251, a rotating power portion 5252, a rotating shaft 5253, a slider 5254, and a stop block 5255. The rotating connection portion 5251 is used to be rotatably connected to an end of the movable portion 5152 away from the shielding portion 5151. One end of the rotating shaft 5253 is rotatably connected to the rotating power portion 5252, and the other end is connected to the movable portion 5152. The rotating power portion 5252 provides power to the rotating shaft 5253, so that the rotating shaft 5253 rotates around the rotating power portion 5252, and the rotating shaft 5253 rotates to drive the movable portion 5152 to rotate around the rotating connection portion 5251. The slider 5254 is located in the slot and is slidably connected to the slot plate 5153. The slider 5254 is also rotatably connected to one end of the movable part 5152 away from the rotating connection part 5251; the limit block 5255 is in contact with the side of the shielding part 5151 away from the movable part 5152, and is used to limit the movement of the shielding part 5151 in a direction perpendicular to the first cavity 500 pointing to the second cavity 501; wherein, the rotating shaft 5253 rotates around the rotating power part 5252, driving the movable part 5152 to rotate around the rotating connection part 5251, and the rotation of the movable part 5152 drives the slider 5254 to slide in the slot and drives the position of the shielding part 5151 to be adjustable.

[0075] The card slot plate 5153 is used to form a card slot (not marked).

[0076] The rotating connection portion 5251 can be fixed in the air outlet channel 504 to provide a fulcrum for the rotation of the movable portion 5152 .

[0077] The rotating power part 5252 can be fixed to the side wall of the air outlet channel 504 to provide power for the rotation of the rotating shaft 5253, so that the rotating shaft 5253 rotates around the rotating power part 5252, thereby driving the movable part 5152 to rotate around the rotating connection part 5251.

[0078] The slider 5254 is located in the slot and is slidably connected to the slot plate 5153 . The slider 5254 is located in the slot and can slide along a first direction X. The first direction X is perpendicular to the direction from the first cavity 500 to the second cavity 501 .

[0079] The limit block 5255 is located in the communicating air outlet channel 512, and the limit block 5255 contacts the side of the shielding portion 5151 away from the movable portion 5152, and is used to limit the shielding portion 5151 from moving in the first direction X, so that the shielding portion 5151 can only move in the second direction Y under the push of the slider 5254, and will not move in the first direction X. The second direction is parallel to the direction from the first cavity 500 to the second cavity 501.

[0080] When the rotating power part 5252 provides power to rotate the rotating shaft 5253, the movable part 5152 rotates around the rotating connection part 5251 driven by the rotating shaft 5253, and the movable part 5152 rotates to drive the slider 5254 to slide in the slot along the first direction X and push the slot plate 5153 to move in the second direction Y, so that the shielding part 5151 moves in the second direction Y, that is, the slider 5254 pushes the shielding part 5151 to move in the second direction Y driven by the movable part 5152, so as to change the opening of the first exhaust hole 514 and the second exhaust hole 524, thereby changing the gas exhaust speed in the first cavity 500 and the second cavity 501, so as to compensate for the difference in film thickness and film quality of the thin film in the first cavity 500 and the second cavity 501 caused by the difference in air intake between the first cavity 500 and the second cavity 501, thereby reducing the difference in film thickness and film quality of the thin film prepared in the two cavities in the cavity structure.

[0081] Fig.23 for Fig.15 The second cross-sectional view along the B1'-B2' section.

[0082] Combined with reference Figures 14 to 18 ,as well as Fig.23In some embodiments, the adjusting component 525 is a connecting rod, which is connected to the shielding component 515 and passes through the side wall of the gas outlet channel 504. The position of the connecting rod is adjustable to drive the position of the shielding component 515 to be adjustable. The gas outlet regulating mechanism 505 also includes: a first fixed seal 535, which is sleeved on the outer periphery of the connecting rod located at the outer part of the gas outlet channel 504 and abuts against the side wall of the gas outlet channel 504, and is used to fix the connecting rod and prevent the gas in the gas outlet channel 504 from leaking from the connection between the gas outlet channel 504 and the connecting rod. The first fixed seal 535 is also detachably connected to the connecting rod. Among them, the adjusting component 525 passes through the side wall of the gas outlet channel 504, and what is passed through is the gas outlet pipe 507, not the cavity side wall 506.

[0083] The adjusting component 525 is a connecting rod, and the connecting rod is fixedly connected to the movable part 5152 of the shielding component 515 . The position of the shielding part 5151 is adjusted by controlling the connecting rod to move in the direction from the first cavity 500 to the second cavity 501 and adjusting the position of the movable part 5152 .

[0084] The first fixed seal 535 is detachably connected to the connecting rod. When the shielding component 515 does not need to be moved, the connecting rod does not need to be moved either. The first fixed seal 535 is sleeved on the outer periphery of the connecting rod at the outer part of the gas outlet channel 504 and abuts against the gas outlet channel 504, and is used to fix the connecting rod and prevent the gas in the gas outlet channel 504 from leaking from the connection between the gas outlet channel 504 and the connecting rod, thereby improving the reliability of the cavity structure. When the position of the shielding component 515 needs to be adjusted, the connecting rod also needs to be moved. The first fixed seal 535 can be removed so that the connecting rod can be moved in the direction from the first cavity 500 to the second cavity 501 to adjust the position of the shielding component 515.

[0085] Fig.24 for Fig.15 A third cross-sectional view along the B1'-B2' section.

[0086] Combined with reference Figures 14 to 18 ,as well as Fig.24In some embodiments, the adjusting component may include: a threaded rod 5256 and at least one knob 5257, the threaded rod 5256 is threadedly connected to the shielding component 515, and at least one end of the threaded rod 5256 passes through the side wall of the air outlet channel 504; the knob 5257 is connected to one end of the threaded rod 5256 that passes through the side wall of the air outlet channel 504, and the rotation of the knob 5257 drives the threaded rod 5256 to rotate, so as to drive the position of the shielding component 515 to be adjustable. The threaded rod 5256 is threadedly connected to the shielding member 515, and the knob 5257 is connected to one end of the threaded rod 5256 that passes through the air outlet channel 504. The threaded rod 5256 can be driven to rotate by turning the knob 5257, and the threaded rod 5256 drives the movable portion 5152 of the shielding member 515 to move in the direction from the first cavity 500 to the second cavity 501, so that the shielding portion 5151 moves in the direction from the first cavity 500 to the second cavity 501, thereby making the opening of the first exhaust hole 514 and the second exhaust hole 524 adjustable. In addition, the rotation angle of the knob 5257 is the same as the rotation angle of the threaded rod 5256, and the rotation angle of the threaded rod 5256 is related to the distance that the shielding member 515 moves in the direction from the first cavity 500 to the second cavity 501. Therefore, the moving distance of the shielding member 515 can be accurately controlled by the rotation angle of the knob 5257, which is conducive to improving the practicality of the cavity structure.

[0087] In some embodiments, the gas outlet control mechanism 505 may further include: a second fixed seal 545, which is sleeved on the outer periphery of the threaded rod 5256 located at the outer part of the gas outlet channel 504 and abuts against the gas outlet channel 504, and is used to fix the threaded rod 5256 and prevent the gas in the gas outlet channel 504 from leaking from the connection between the gas outlet channel 504 and the threaded rod 5256. The second fixed seal 545 is also detachably connected to the threaded rod 5256. In this way, when the shielding component 515 does not need to be moved, the threaded rod 5256 and the knob 5257 do not need to be rotated. The second fixed seal 545 is sleeved on the outer periphery of the threaded rod 5256 located at the outer part of the gas outlet channel 504 and abuts against the gas outlet channel 504, and is used to fix the threaded rod 5256 and prevent the gas in the gas outlet channel 504 from leaking from the connection between the gas outlet channel 504 and the threaded rod 5256, thereby improving the reliability of the cavity structure. When the position of the shielding component 515 needs to be adjusted, the threaded rod 5256 and the knob 5257 also need to be rotated, and the second fixed seal 545 can be removed so that the threaded rod 5256 can be moved in the direction from the first cavity 500 to the second cavity 501 to adjust the position of the shielding component 515.

[0088] Fig.25 for Fig.15 Fourth cross-sectional view along the B1'-B2' section.

[0089] Combined with reference Figures 14 to 18,as well as Fig.25 In some embodiments, the shielding member 515 includes a magnet (not shown), the adjusting member 525 is a powered coil, and the adjusting member 525 is located outside the gas outlet channel 504. The position of the shielding member 515 can be adjusted by changing the current size and current direction of the powered coil. By controlling the movement of the shielding member 515 through the powered coil and the magnet, the adjusting member 525 can be located outside the gas outlet channel 504 without penetrating the gas outlet channel 504, thereby simplifying the structure of the cavity structure.

[0090] Some other embodiments of the present disclosure also provide a cavity structure, which is substantially the same as the cavity structure provided in the aforementioned embodiment, and the main difference is that the structures of the connecting channel and the air outlet channel in the cavity structure provided in the following embodiment are different. The cavity structure will be described in detail below in conjunction with the accompanying drawings. It should be noted that the features that are the same or corresponding to the aforementioned embodiment will not be described in detail below to avoid redundancy. In the absence of contradiction, the corresponding description of the aforementioned embodiment is also applicable to the corresponding features of the following embodiment.

[0091] Fig.26 A structural schematic diagram of a cavity structure provided in some other embodiments of the present disclosure. Fig. 27 A partial top view of a cavity structure provided in some embodiments of the present disclosure, Fig.28 A schematic diagram of a second air outlet channel and an air outlet regulating mechanism in a cavity structure provided in some other embodiments of the present disclosure, Fig.29 Another schematic diagram of the second air outlet channel and the air outlet regulating mechanism in the cavity structure provided in some other embodiments of the present disclosure, Fig.30 for Fig. 27 A cross-sectional view along the A1''-A2'' section, Fig.31 for Fig. 27 The first cross-sectional view along the B1''-B2'' section.

[0092] Combined with reference Figure 26 to Figure 31The cavity structure includes a first cavity 600, a second cavity 601, and a connecting passage between the first cavity 600 and the second cavity 601, the connecting passage is used to connect the first cavity 600 and the second cavity 601, the first cavity 600 has a first air intake mechanism 610, the first air intake mechanism 610 is used to provide gas to the inside of the first cavity 600, the second cavity 601 has a second air intake mechanism 611, the second air intake mechanism 611 is used to provide gas to the inside of the second cavity 601. The cavity structure also includes an air intake main pipeline 603, an air outlet channel, and an air outlet control mechanism 605. The main air intake pipeline 603 is used to connect the air intake pipe for providing gas, and is connected to the first air intake mechanism 610 and the second air intake mechanism 611, so as to provide gas for the first cavity 600 and the second cavity 601; the first base 620 and the second base 621, the first base 620 is arranged in the first cavity 600, and the second base 621 is arranged in the second cavity 601, and the first base 620 and the second base 621 are both used to carry the wafer 11; the air outlet channel is connected to the connecting channel, and is also used to connect to the vacuum pump (not shown) to extract the gas in the first cavity 600 and the second cavity 601 through the air outlet channel. At least part of the gas outlet control mechanism 605 is located in the gas outlet channel and the connecting channel, and the gas outlet control mechanism 605 is used to separate the part of the connecting channel connected to the gas outlet channel into a first gas outlet hole 614 and a second gas outlet hole 624. The first gas outlet hole 614 is connected to the first cavity 600, and the second gas outlet hole 624 is connected to the second cavity 601. The position of the gas outlet control mechanism 605 is adjustable, so that the opening of the first gas outlet hole 614 is adjustable, and the opening of the second gas outlet hole 624 is adjustable.

[0093] It should be noted that the first cavity 600, the second cavity 601, the first air intake mechanism 610, the second air intake mechanism 611, the first base 620, the second base 621, the main air intake pipeline 603, the cavity side wall 606, the air outlet pipe 607 and the test channel 608 of the embodiment of the present disclosure can refer to the first cavity 500, the second cavity 501, the first air intake mechanism 510, the second air intake mechanism 511, the first base 520, the second base 521, the main air intake pipeline 503, the cavity side wall 506, the air outlet pipe 507 and the test channel 508 in the previous embodiment, and will not be repeated here.

[0094] In some embodiments, the air outlet control mechanism 605 includes a shielding component 615 and an adjusting component, and the shielding component 615 is located in the air outlet channel and the connecting channel. The adjusting component is used to control the position of the shielding component 615 to be adjustable, so that the opening of the first exhaust hole 614 is adjustable, and the opening of the second exhaust hole 624 is adjustable.

[0095] The shielding component 615 is located in the air outlet channel and the connecting channel. Specifically, the shielding component 615 is located in the air outlet channel and the connecting air outlet channel 612 and is used to adjust the opening of the first exhaust hole 614 and the second exhaust hole 624 .

[0096] The adjusting component is used to control the position of the shielding component 615 to be adjustable.

[0097] In some embodiments, the communication channel may include a first communication outlet channel 612 and a second communication outlet channel 622; the outlet channel includes: a first outlet channel 634 and a second outlet channel 644, the first outlet channel 634 is connected to the first communication outlet channel 612; the second outlet channel 644 is connected to the second communication outlet channel 622. Wherein, the shielding component 615 is located in the second outlet channel 644 and the second communication outlet channel 622; the shielding component 615 includes a shielding portion 6151 and a movable portion 6152, the shielding portion 6151 is located at the connection between the second outlet channel 644 and the second communication outlet channel 622; the movable portion 6152 is connected to the shielding portion 6151, and the movement of the movable portion 6152 drives the position of the shielding portion 6151 to be adjustable, so as to adjust the opening of the first exhaust hole 614 and the opening of the second exhaust hole 624.

[0098] In some embodiments, the top of the shielding portion 6151 abuts against the top of the second communicating gas outlet channel 622. When the shielding portion 6151 is closer to the second cavity 601, the first exhaust hole 614 is the portion of the second gas outlet channel 644 that is connected to the second communicating gas outlet channel 622. At this time, the first exhaust hole 614 is only connected to the first cavity 600. The opening of the first exhaust hole 614 can be adjusted by adjusting the position of the shielding portion 6151 to adjust the exhaust speed of the gas in the first cavity 600. When the shielding portion 6151 is closer to the first cavity 600, the second exhaust hole 624 is the portion of the second gas outlet channel 644 that is connected to the second communicating gas outlet channel 622. At this time, the second exhaust hole 624 is only connected to the second cavity 601. The opening of the second exhaust hole 624 can be adjusted by adjusting the position of the shielding portion 6151 to adjust the exhaust speed of the gas in the second cavity 601.

[0099] In some embodiments, the exhaust hole of the first gas outlet channel 634 connected to the first communicating gas outlet channel 612 may be larger than the first exhaust hole 614 and the second exhaust hole 624. In this configuration, the exhaust hole of the first gas outlet channel 634 connected to the first communicating gas outlet channel 612 is larger, and the first exhaust hole 614 and the second exhaust hole 624 are smaller, which can ensure that the first cavity 600 and the second cavity 601 have a larger gas exhaust speed, and the shielding component 615 is used to change the opening of the first exhaust hole 614 and the second exhaust hole 624, so as to achieve fine adjustment of the gas exhaust speed of the first cavity 600 and the second cavity 601.

[0100] In other embodiments, the exhaust hole through which the first exhaust channel 634 communicates with the first communicating exhaust channel 612 may be smaller than or equal to the first exhaust hole 614 and the second exhaust hole 624 .

[0101] In some embodiments, the cavity structure also includes a test channel 608, and the connecting channel may also include a connecting test channel 632, which is used to connect with the test channel 608, and the test channel 608 is used to connect with a vacuum gauge (not shown) to test the vacuum degree or air pressure in the first cavity 600 and the second cavity 601.

[0102] Fig.32 A structural schematic diagram of a shielding component and an adjusting component in a cavity structure provided in some embodiments of the present disclosure, Fig.33 Another structural schematic diagram of the shielding component and the adjusting component in the cavity structure provided in some other embodiments of the present disclosure.

[0103] Combined with reference Figure 26 to Figure 29 as well as Figure 31 to Figure 33 In some embodiments, the shielding portion 6151 has two slot plates 6153 on one side facing the air outlet channel, and the two slot plates 6153 are used to form a slot (not marked). The adjusting component 625 includes a rotating connection portion 6251, a rotating power portion 6252, a rotating shaft 6253, and a slider 6254. The rotating connection portion 6251 is used to be rotatably connected to an end of the movable portion 6152 away from the shielding portion 6151. One end of the rotating shaft 6253 is rotatably connected to the rotating power portion 6252, and the other end is connected to the movable portion 6152. The rotating power portion 6252 provides power for the rotating shaft 6253, so that the rotating shaft 6253 rotates around the rotating power portion 6252, and the rotating shaft 6253 rotates to drive the movable portion 6152 to rotate around the rotating connection portion 6251. The slider 6254 is located in the slot and is slidably connected to the slot plate 6153. The slider 6254 is also rotatably connected to one end of the movable part 6152 away from the rotating connection part 6251; wherein the rotating shaft 6253 rotates around the rotating power part 6252, driving the movable part 6152 to rotate around the rotating connection part 6251. The rotation of the movable part 6152 drives the slider 6254 to slide in the slot and drives the position of the shielding part 6151 to be adjustable.

[0104] The card slot plate 6153 is used to form a card slot (not marked).

[0105] The rotating connection portion 6251 can be fixed in the second air outlet channel 644 to provide a fulcrum for the rotation of the movable portion 6152 .

[0106] The rotating power part 6252 can be fixed to the side wall of the second air outlet channel 644 to provide power for the rotation of the rotating shaft 6253, so that the rotating shaft 6253 rotates around the rotating power part 6252 to drive the movable part 6152 to rotate around the rotating connection part 6251.

[0107] The slider 6254 is located in the slot and is slidably connected to the slot plate 6153 . The slider 6254 is located in the slot and can slide along a first direction X. The first direction X is perpendicular to the direction from the first cavity 600 to the second cavity 601 .

[0108] The top of the shielding portion 6151 abuts against the top of the second communicating air outlet channel 622, and the bottom of the shielding portion 6151 abuts against the bottom of the second communicating air outlet channel 622, so the side wall of the second communicating air outlet channel 622 can limit the movement of the shielding portion 6151 in the first direction X, so that the shielding portion 6151 can only move in the second direction Y under the push of the slider 6254, and will not move in the first direction X. The second direction is parallel to the direction from the first cavity 600 to the second cavity 601.

[0109] When the rotating power part 6252 provides power to rotate the rotating shaft 6253, the movable part 6152 rotates around the rotating connection part 6251 driven by the rotating shaft 6253, and the movable part 6152 rotates to drive the slider 6254 to slide in the slot along the first direction X and push the slot plate 6153 to move in the second direction Y, so that the shielding part 6151 moves in the second direction Y, that is, the slider 6254 pushes the shielding part 6151 to move in the second direction Y driven by the movable part 6152 to change the opening of the first exhaust hole 614 and the second exhaust hole 624, thereby changing the gas exhaust speed in the first cavity 600 and the second cavity 601, so as to compensate for the difference in film thickness and film quality of the thin film in the first cavity 600 and the second cavity 601 caused by the difference in air intake between the first cavity 600 and the second cavity 601, thereby reducing the difference in film thickness and film quality of the thin film prepared in the two cavities in the cavity structure.

[0110] Fig.34 for Fig. 27 The second cross-sectional view along the B1''-B2'' section.

[0111] Combined with reference Figure 26 to Figure 29 as well as Fig.34In some embodiments, the adjusting component 625 is a connecting rod, which is connected to the shielding component 615 and passes through the side wall of the gas outlet channel. The position of the connecting rod is adjustable to drive the position of the shielding component 615 to be adjustable. The gas outlet regulating mechanism 605 also includes: a first fixed seal 635, which is sleeved on the outer periphery of the connecting rod located at the outer part of the gas outlet channel and abuts against the side wall of the gas outlet channel, and is used to fix the connecting rod and prevent the gas in the gas outlet channel from leaking from the connection between the gas outlet channel and the connecting rod. The first fixed seal 635 is also detachably connected to the connecting rod.

[0112] The adjusting component 625 is a connecting rod, and the connecting rod is fixedly connected to the shielding component 615 . The position of the shielding component 615 is adjusted by moving the connecting rod in a direction from the first cavity 600 to the second cavity 601 .

[0113] The first fixed seal 635 is detachably connected to the connecting rod. When the shielding component 615 does not need to be moved, the connecting rod does not need to be moved either. The first fixed seal 635 is sleeved on the outer periphery of the connecting rod at the outer part of the air outlet channel and abuts against the air outlet channel, and is used to fix the connecting rod and prevent the gas in the air outlet channel from leaking from the connection between the air outlet channel and the connecting rod, thereby improving the reliability of the cavity structure. When the position of the shielding component 615 needs to be adjusted, the connecting rod also needs to be moved. The first fixed seal 635 can be removed so that the connecting rod can be moved in the direction from the first cavity 600 to the second cavity 601 to adjust the position of the shielding component 615.

[0114] Fig.35 for Fig. 27 The third cross-sectional view along the B1''-B2'' section.

[0115] Combined with reference Figure 26 to Figure 29 as well as Fig.35 In some embodiments, the adjusting component may include: a threaded rod 6255 and at least one knob 6256, the threaded rod 6255 is threadedly connected to the shielding component 615, and at least one end of the threaded rod 6255 passes through the side wall of the air outlet channel; the knob 6256 is connected to one end of the threaded rod 6255 that passes through the side wall of the air outlet channel, and the rotation of the knob 6256 drives the threaded rod 6255 to rotate, thereby driving the shielding component 615 to move, so that the position of the shielding component 615 is adjustable.

[0116] The threaded rod 6255 is threadedly connected to the shielding member 615, and the knob 6256 is connected to one end of the threaded rod 6255 that passes through the air outlet channel 504. The threaded rod 6255 can be driven to rotate by turning the knob 6256, and the rotation of the threaded rod 6255 drives the shielding member 615 to move in the direction from the first cavity 600 to the second cavity 601, so that the opening of the first exhaust hole 614 and the second exhaust hole 624 can be adjusted. In addition, the rotation angle of the knob 6256 is the same as the rotation angle of the threaded rod 6255, and the rotation angle of the threaded rod 6255 is related to the distance that the shielding member 615 moves in the direction from the first cavity 600 to the second cavity 601. Therefore, the moving distance of the shielding member 615 can be accurately controlled by the rotation angle of the knob 6256, which is conducive to improving the practicality of the cavity structure.

[0117] In some embodiments, the gas outlet control mechanism 605 may further include: a second fixed seal 645, which is sleeved on the outer periphery of the threaded rod 6255 located at the outer part of the gas outlet channel and abuts against the gas outlet channel, and is used to fix the threaded rod 6255 and prevent the gas in the gas outlet channel from leaking from the connection between the gas outlet channel and the threaded rod 6255, and the second fixed seal 645 is also detachably connected to the threaded rod 6255. In this arrangement, when the shielding component 615 does not need to be moved, the threaded rod 6255 and the knob 6256 do not need to be rotated, and the second fixed seal 645 is sleeved on the outer periphery of the threaded rod 6255 located at the outer part of the gas outlet channel and abuts against the gas outlet channel, and is used to fix the threaded rod 6255 and prevent the gas in the gas outlet channel from leaking from the connection between the gas outlet channel and the threaded rod 6255, thereby improving the reliability of the cavity structure. When the position of the shielding component 615 needs to be adjusted, the threaded rod 6255 and the knob 6256 also need to be rotated, and the second fixed seal 645 can be removed so that the threaded rod 6255 can move in the direction from the first cavity 600 to the second cavity 601 to adjust the position of the shielding component 615.

[0118] Fig.36 for Fig. 27 The fourth cross-sectional view along the B1''-B2'' section.

[0119] Combined with reference Figure 26 to Figure 29 as well as Fig.36 In some embodiments, the shielding member 615 includes a magnet (not shown), the adjusting member 625 is a powered coil, and the adjusting member 625 is located outside the gas outlet channel. The position of the shielding member 615 can be adjusted by changing the current size and current direction of the powered coil. By controlling the movement of the shielding member 615 through the powered coil and the magnet, the adjusting member 625 can be located outside the gas outlet channel without penetrating the side wall of the gas outlet channel, so that the structure of the cavity structure is simplified.

[0120] In the cavity structure provided in the above-mentioned embodiment, the gas exhaust speed in the first cavity and the second cavity can be changed by adjusting the position of the gas outlet control mechanism and changing the opening of the first exhaust hole and the second exhaust hole, so as to compensate for the difference in film thickness and film quality of the thin film in the first cavity and the second cavity caused by the difference in air intake between the first cavity and the second cavity, thereby reducing the difference in film thickness and film quality of the thin film prepared in the two cavities in the cavity structure. In addition, the gas outlet control mechanism of the embodiment of the present disclosure reduces the difference in film thickness and film quality of the thin film in the first cavity and the second cavity by adjusting the opening of the first exhaust hole and the second exhaust hole, thereby avoiding the problem of reduced film yield caused by adding a needle valve to the main air intake pipeline in the related art, thereby also improving the reliability of film preparation in the cavity structure.

[0121] Correspondingly, another embodiment of the present disclosure further provides a deposition device having the chamber structure of any of the above embodiments. For the parts that are the same or corresponding to the previous embodiment, reference may be made to the corresponding description of the previous embodiment, and will not be described in detail below.

[0122] The deposition device includes the chamber structure described in any one of the above embodiments.

[0123] The deposition equipment can be used to realize flowable chemical vapor deposition to obtain the target material layer. The deposition equipment can also be used to realize other gas phase chemical deposition to obtain the target material layer, and other gas phase chemical deposition can be atmospheric pressure chemical vapor deposition (APCVD, atmospheric pressure chemical vapor deposition), low pressure chemical vapor deposition (LPCVD, low pressure chemical vapor deposition), ultrahigh vacuum chemical vapor deposition (UHVCVD, Ultrahigh vacuum chemical vapor deposition), metal organic chemical vapor deposition (MOCVD, Metal-organic chemical vapor deposition) or plasma chemical vapor deposition (PECVD, Plasma-Enhanced chemical vapor deposition), etc.

[0124] Those skilled in the art can understand that the above-mentioned embodiments are specific examples for realizing the present disclosure, and in practical applications, various changes can be made to them in form and details without departing from the spirit and scope of the present disclosure. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure, so the protection scope of the present disclosure shall be based on the scope defined in the claims.

Claims

1. A chamber structure, applied to a deposition device, characterized in that: include: A first cavity, a second cavity, and a communication passage between the first cavity and the second cavity, the communication passage is used to connect the first cavity and the second cavity, the first cavity has a first air intake mechanism, the first air intake mechanism is used to provide gas to the inside of the first cavity, the second cavity has a second air intake mechanism, the second air intake mechanism is used to provide gas to the inside of the second cavity; An air intake main pipeline, the air intake main pipeline is used to communicate with an air intake pipe for providing gas, and is connected to both the first air intake mechanism and the second air intake mechanism, and is used to provide gas to the first cavity and the second cavity; A first pedestal and a second pedestal, wherein the first pedestal is disposed in the first cavity, and the second pedestal is disposed in the second cavity, and both the first pedestal and the second pedestal are used to carry wafers; an air outlet channel, the air outlet channel being in communication with the communication channel and also used to be connected to an air pump so as to extract the gas in the first cavity and the second cavity through the air outlet channel; an air outlet regulating mechanism, at least part of which is located in the air outlet channel and the connecting channel, and the air outlet regulating mechanism is used to separate the part of the connecting channel connected to the air outlet channel into a first exhaust hole and a second exhaust hole, the first exhaust hole is connected to the first cavity, and the second exhaust hole is connected to the second cavity; Wherein, the air outlet regulating mechanism includes: a shielding component, which is located in the air outlet channel and the connecting channel; an adjusting component, which is used to control the position of the shielding component to be adjustable, so that the opening of the first exhaust hole is adjustable, and the opening of the second exhaust hole is adjustable.

2. The cavity structure according to claim 1, characterized in that: The top of the shielding component abuts against the top of the communication channel, and the shielding component is used to divide the communication channel into a part communicating with the first cavity and another part communicating with the second cavity.

3. The cavity structure according to claim 1, characterized in that: The air outlet channel comprises: A main outlet channel and branch outlet channels located on both sides of the main outlet channel are connected, wherein the distance between one branch outlet channel and the first cavity is smaller than the distance between the branch outlet channel and the second cavity, and the distance between the other branch outlet channel and the second cavity is smaller than the distance between the branch outlet channel and the first cavity; The shielding component comprises: a shielding portion, the shielding portion being located at a connecting portion between the branched gas channel and the connecting channel; The movable part is connected to the shielding part, and the movement of the movable part drives the position of the shielding part to be adjustable.

4. The cavity structure according to claim 1, characterized in that: The communication channel comprises: a first communicating air outlet passage and a second communicating air outlet passage; The air outlet channel comprises: a first air outlet channel, the first air outlet channel being in communication with the first communicating air outlet channel; a second air outlet channel, the second air outlet channel being connected to the second communicating air outlet channel; Wherein, the shielding component is located in the second air outlet channel and the second connecting air outlet channel; The shielding component comprises: a shielding portion, the shielding portion being located at a connection point between the second air outlet channel and the second communicating air outlet channel; The movable part is connected to the shielding part, and the movable part moves to drive the position of the shielding part to be adjustable, so as to adjust the opening of the first exhaust hole and the opening of the second exhaust hole.

5. The cavity structure according to claim 3 or 4, characterized in that: The shielding portion has two slot plates on one side facing the air outlet channel, and the two slot plates are used to form a slot. The adjusting component includes: A rotatable connection portion, the rotatable connection portion being used to be rotatably connected to an end of the movable portion away from the shielding portion; A rotating power unit and a rotating shaft, wherein one end of the rotating shaft is rotatably connected to the rotating power unit and the other end is connected to the movable unit, the rotating power unit provides power to the rotating shaft so that the rotating shaft rotates around the rotating power unit, and the rotation of the rotating shaft drives the movable unit to rotate around the rotating connection unit; A slider, the slider is located in the card slot and is slidably connected to the card slot plate, and the slider is also rotatably connected to an end of the movable part away from the rotating connection part; The rotating shaft rotates around the rotating power part, driving the movable part to rotate around the rotating connection part. The rotation of the movable part drives the slider to slide in the slot and drives the position of the shielding part to be adjustable.

6. The cavity structure according to any one of claims 2 to 4, characterized in that: The adjusting component is a connecting rod, which is connected to the shielding component and passes through the side wall of the air outlet channel. The position of the connecting rod is adjustable to drive the position of the shielding component to be adjustable; The gas outlet control mechanism also includes: The first fixed seal is sleeved on the outer periphery of the connecting rod located at the outer side of the air outlet channel and abuts against the side wall of the air outlet channel, and is used for fixing the connecting rod and preventing the gas in the air outlet channel from leaking from the connection between the air outlet channel and the connecting rod. The first fixed seal is also detachably connected to the connecting rod.

7. The cavity structure according to any one of claims 2 to 4, characterized in that: The adjusting component comprises: A threaded rod, wherein the threaded rod is threadedly connected to the shielding component, and at least one end of the threaded rod passes through the side wall of the air outlet channel; At least one knob is connected to one end of the threaded rod penetrating the side wall of the air outlet channel, and rotation of the knob drives the threaded rod to rotate, so as to drive the position of the shielding component to be adjustable.

8. The cavity structure according to any one of claims 2 to 4, characterized in that: The shielding component contains a magnet, the adjusting component is an energized coil, and the adjusting component is located outside the air outlet channel. The position of the shielding component can be adjusted by changing the current size and current direction of the energized coil.

9. A deposition device, characterized in that: Comprising the cavity structure as described in any one of claims 1 to 8.

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