Magnetic field measuring device

Abstract

The invention relates to the technical field of monocrystalline silicon growth furnaces, in particular to a magnetic field measuring device which comprises a supporting part, a transmission mechanism and a measuring assembly, and the supporting part is used for being connected with a to-be-measured magnet; the transmission mechanism is arranged on the supporting component; the measuring assembly is arranged on the supporting part and connected with the transmission mechanism, and the measuring assembly can move along a preset path under the driving of the transmission mechanism so as to measure the magnetic field around the to-be-measured magnet. The magnetic field measuring device can accurately find each position point in the magnetic field of the monocrystalline silicon growth furnace, and respectively measure the magnetic field of each position point at the preset position, so that accurate and reliable magnetic field parameters are provided for the monocrystalline silicon growth process, and the measurement accuracy and the measurement efficiency of a measuring mechanism are improved.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal silicon growth furnaces, and in particular to a magnetic field measuring device. Background Art

[0002] The magnetron direct-pulling method is currently an efficient way to reduce the oxygen content in single crystal silicon and improve the quality of single crystal silicon. The single crystal silicon growth furnace is a manufacturing device that produces single crystal silicon by direct-pulling method. The magnetic field provided by the magnet of the single crystal silicon growth furnace can effectively suppress the thermal convection of the conductive silicon melt, reduce the diffusion of oxygen in the crucible into the single crystal silicon, and thus improve the quality of single crystal silicon. In other words, the size of the magnetic field near the crucible wall in the single crystal silicon growth furnace is an important factor affecting the growth quality of single crystal silicon; in addition, if the magnetic field above the single crystal silicon growth furnace is too large, it is easy to interfere with the normal operation of the cylinder, solenoid valve, limit switch, etc. Therefore, it is very important to accurately, efficiently and conveniently measure the position of the crucible wall of the single crystal silicon growth furnace and the size of the magnetic field above the single crystal silicon growth furnace.

[0003] At present, it is difficult to measure the magnetic field at the crucible wall position and the position above the single crystal silicon growth furnace. The position positioning is inaccurate and the measurement error is large. Summary of the invention

[0004] The present application provides a magnetic field measuring device to solve the problem in the prior art that it is difficult to measure the magnetic field at the crucible wall position and the position above the single crystal silicon growth furnace.

[0005] The present application provides a magnetic field measuring device, comprising: A supporting component, the supporting component comprises a first connecting rod and a second connecting rod, the first connecting rod has a first end and a second end, the first end of the first connecting rod is connected to the magnet to be measured, the second connecting rod has a third end and a fourth end, the third end of the second connecting rod is rotatably connected to the second end of the first connecting rod; The transmission mechanism is arranged on the first connecting rod and the second connecting rod; The measuring component is connected to the transmission mechanism. Driven by the transmission mechanism, the measuring component can move along a preset path to measure the magnetic field around the magnet to be measured.

[0006] In one possible design, the transmission mechanism includes: A first rotating shaft is arranged at a first end of the first connecting rod, and a first pulley is sleeved on the first rotating shaft; A second rotating shaft is arranged at the second end of the first connecting rod, and a second pulley and a third pulley are sleeved on the second rotating shaft; A third rotating shaft is provided with a fourth end of the second connecting rod, and a fourth pulley is sleeved on the third rotating shaft; A first synchronous belt is wound around the first pulley and the second pulley; The second synchronous belt is wound around the third pulley and the fourth pulley.

[0007] In a possible design, a scale is provided on the first synchronous belt.

[0008] In a possible design, a avoidance groove is provided at a position of the first connecting rod close to the second end, and the avoidance groove is used to allow the second synchronous belt to pass through.

[0009] In a possible design, the transmission mechanism further includes a crank, which is connected to the first rotating shaft.

[0010] In a possible design, the supporting component further includes: A first support, disposed at a position of the first connecting rod close to the second end; A second support is arranged at a position of the second connecting rod close to the third end, the second support is rotatably connected to the first support via a pin, and the pin is coaxially arranged with the second rotating shaft; The fasteners are detachably connected to the first support and the second support respectively, and are used to limit the position of the second support relative to the first support.

[0011] In a possible design, the supporting component further includes: A fixed seat, the fixed seat is slidably matched with the first connecting rod, and the fixed seat is detachably connected to the magnet to be measured; The locking member is detachably connected to the fixing seat and the first connecting rod respectively, and is used to limit the position of the first connecting rod relative to the fixing seat.

[0012] In one possible design, the measurement components include: A follower block is arranged on the second synchronous belt; The magnetic field probe is arranged on the follower block and is used to test the magnetic field strength at the location.

[0013] In a possible design, the measuring assembly further includes a guide body, which is connected to the follower block, and has a guide groove, and an inner wall of the guide groove is slidably matched with a surface of the second connecting rod.

[0014] In a possible design, a first belt tensioning assembly and a second belt tensioning assembly are also included, the first belt tensioning assembly is arranged on the first connecting rod, and the second belt tensioning assembly is arranged on the second connecting rod, and the first belt tensioning assembly and the second belt tensioning assembly respectively include: An adjusting block is arranged on the first connecting rod / the second connecting rod and is slidably matched with the first connecting rod / the second connecting rod; A fixed block, arranged on the first connecting rod / the second connecting rod; The adjusting stud is passed through the fixing block, and the free end thereof abuts against the adjusting block.

[0015] The beneficial effects of this application are as follows: The magnetic field measuring device of the present application connects the supporting component to the magnet to be measured and uses the magnet to be measured itself to fix the measuring component, which is simple and convenient, and can also ensure that the measuring component on the supporting component is located at the position to be measured around the magnet to be measured (the position of the crucible wall of the single crystal silicon growth furnace and the position above the single crystal silicon growth furnace), thereby ensuring the accuracy of the measurement position; the measuring mechanism is driven by the transmission mechanism to move along the preset path, so that each position point in the magnetic field of the single crystal silicon growth furnace can be accurately found, and the magnetic field of each position point at the preset position can be measured respectively, so as to provide accurate and reliable magnetic field parameters for the single crystal silicon growth process, which is beneficial to improving the measurement accuracy and efficiency of the measuring mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 A schematic diagram of the overall structure of a magnetic field measuring device provided in an embodiment of the present application; Figure 2 A front view of a magnetic field measuring device provided in an embodiment of the present application; Figure 3 A top view of a magnetic field measuring device provided in an embodiment of the present application; Figure 4 for Figure 3 Sectional view at AA in the middle; Figure 5 for Figure 3 Sectional view at the middle BB; Figure 6 Schematic diagram of the use of the magnetic field measurement device provided in the embodiment of the present application Figure 1 ; Figure 7 Schematic diagram of the use of the magnetic field measurement device provided in the embodiment of the present application Figure 2 ; Figure 8 A schematic diagram of the folded state of the magnetic field measuring device provided in an embodiment of the present application.

[0018] Reference numerals: 100, support member; 110, first connecting rod; 111, first end; 112, second end; 113, avoidance groove; 120, second connecting rod; 121, third end; 122, fourth end; 130, first support; 140, second support; 150, pin; 160, fastener; 170, fixing seat; 171, guide edge; 180, fixing bolt; 190, locking member; 200, transmission mechanism; 211, first rotating shaft; 212, second rotating shaft; 213, third rotating shaft; 221, first pulley; 222, second pulley; 223, third pulley; 224, fourth pulley; 231, first synchronous belt; 232, second synchronous belt; 240, crank; 300, measuring assembly; 310, follower block; 320, pressing block; 330, extrusion screw; 340, magnetic field probe; 350, guide body; 400, first belt tensioning assembly; 410, adjusting block; 420, fixing block; 430, adjusting stud; 440, vertical bolt; 500, second belt tensioning assembly; 600. A magnet to be tested. DETAILED DESCRIPTION

[0019] The technical solution of the present application will be described clearly and completely below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0020] Combine the following Figure 1-Figure 8 , describing the magnetic field measurement device provided in an embodiment of the present application.

[0021] Reference Figure 1 As shown, the embodiment of the present application provides a magnetic field measuring device, including a supporting component 100, a transmission mechanism 200 and a measuring assembly 300, wherein the supporting component 100 is used to connect with a magnet to be measured 600, and it should be noted that the magnet to be measured 600 is a magnet of a single crystal silicon growth furnace, Figure 6 As shown, the magnet 600 to be measured is annular; the supporting component 100 includes a first connecting rod 110 and a second connecting rod 120, the length direction of the first connecting rod 110 is consistent with the radial direction of the magnet 600 to be measured, the first connecting rod 110 has a first end 111 and a second end 112, and the first end 111 of the first connecting rod 110 is connected to the magnet 600 to be measured; the second connecting rod 120 has a third end 121 and a fourth end 122, and the third end 121 of the second connecting rod 120 is rotatably connected to the second end 112 of the first connecting rod 110. For example, the third end 121 of the second connecting rod 120 is connected to the second end 112 of the first connecting rod 110 through an end shaft, so that by rotating the second connecting rod 120 around the end shaft, different use conditions can be met. Specifically, refer to Figure 6 As shown, when the second connecting rod 120 rotates to the bottom of the first connecting rod 110, it can be used to measure the magnetic field size at the crucible wall position of the single crystal silicon growth furnace; Figure 7As shown, when the second connecting rod 120 rotates to the top of the first connecting rod 110, it can be used to measure the magnetic field size above the single crystal silicon growth furnace; Figure 8 As shown, when the second connecting rod 120 continues to rotate in the direction close to the first connecting rod 110 so that the angle between the second connecting rod 120 and the first connecting rod 110 is minimized, the magnetic field measuring device is folded for easy storage and transportation.

[0022] In some specific embodiments, the support component 100 also includes a first support 130 and a second support 140. The first support 130 is fixed to the first connecting rod 110 at a position close to the second end 112 by bolts; the second support 140 is bolted to the second connecting rod 120 at a position close to the third end 121, and the second support 140 is rotatably connected to the first support 130 via a pin 150, and the pin 150 is coaxially arranged with the second rotating shaft 212; the fastener 160 is detachably connected to the first support 130 and the second support 140, respectively, and is used to limit the position of the second support 140 relative to the first support 130. Specifically, the outer end of the pin 150 is interference fit with the axial hole on the second support 140, and the inner end of the pin 150 is clearance fit with the axial hole on the first support 130. In this way, the pin 150 can rotate in the axial hole of the first support 130, so that the second support 140 rotates around the pin 150, thereby rotating the second connecting rod 120 to the position to be measured; the fastener 160 is a fastening screw. When the second connecting rod 120 rotates to the position to be measured, the fastening screw is tightened between the second support 140 and the first support 130 to achieve a fixed connection between the second support 140 and the first support 130. Specifically, reference surfaces are respectively provided on the same side of the first support 130 and the second support 140. For example, the reference surfaces are respectively perpendicular to the length direction of the first connecting rod. When the second support 140 is rotated to keep the reference surfaces of the first support 130 and the second support 140 flush, the second connecting rod 120 is perpendicular to the first connecting rod 110. Since the length direction of the first connecting rod 110 is consistent with the radial direction of the single crystal silicon growth furnace magnet, the length direction of the second connecting rod 120 is consistent with the axial direction of the single crystal silicon growth furnace magnet at this time. Therefore, by controlling the length of the first connecting rod 110 in the single crystal silicon growth furnace magnet, the radial position of the measuring component 300 in the single crystal silicon growth furnace magnet can be accurately controlled. By controlling the position of the measuring component 300 corresponding to the second connecting rod 120, the axial position of the measuring component 300 in the single crystal silicon growth furnace magnet can be accurately controlled, so that the measuring component 300 can be quickly and accurately reached different positions in the single crystal silicon growth furnace and different positions above the single crystal silicon growth furnace. In one of the embodiments, a pointer can also be set on the second support 140, and a rotating scale can be set on the first support 130. By controlling the rotation angle of the second support 140 relative to the first support 130, the position of the measuring component 300 corresponding to the second connecting rod 120 can be assisted in calculating, and then the specific position of the measuring component 300 in the single crystal silicon growth furnace and the specific position above the single crystal silicon growth furnace can be known.

[0023] The transmission mechanism 200 is disposed on the support component 100; the measuring component 300 is disposed on the support component 100 and connected to the transmission mechanism 200. Driven by the transmission mechanism 200, the measuring component 300 can move along a preset path to measure the magnetic field around the magnet 600 to be measured. In some specific embodiments, the support component 100 is engaged with the magnet to be measured 600 to achieve fixation on the upper end surface of the magnet to be measured 600. For example, the support component 100 is a support rod, which is vertically arranged and provided with a coupling groove, which can be clamped on the upper end surface of the magnet to be measured 600. In some specific embodiments, the transmission mechanism 200 can be a traction rope and a pulley mechanism. For example, a pulley is installed on the support rod, and the traction rope is passed around the pulley to drive the measuring component 300 to move along the support rod, so that the measuring component 300 can reach different heights of the crucible wall of the single crystal silicon growth furnace and reach different heights above the single crystal silicon growth furnace, thereby realizing accurate measurement of the magnetic field at different positions. In other specific embodiments, the transmission mechanism 200 can also be a slider and rail mechanism. For example, a rail is installed on the support rod, and the slider is driven by a motor to drive the measuring component 300 to move along the support rod. Specifically, the measuring mechanism includes an element capable of measuring the magnitude of the magnetic field, such as a magnetic field probe 340.

[0024] By utilizing the technical solution provided in the above embodiment, by connecting the support component 100 with the magnet to be measured 600, and using the magnet to be measured 600 itself to fix the measuring component 300, it is simple and convenient, and can also ensure that the measuring component 300 on the support component 100 is located at the position to be measured around the magnet to be measured 600 (the position of the crucible wall of the single crystal silicon growth furnace and the position above the single crystal silicon growth furnace), thereby ensuring the accuracy of the measurement position; by driving the measuring mechanism to move along a preset path through the transmission mechanism 200, it is possible to accurately find each position point in the magnetic field of the single crystal silicon growth furnace, and respectively measure the magnetic field of each position point at the preset position, thereby providing accurate and reliable magnetic field parameters for the single crystal silicon growth process, which is beneficial to improving the measurement accuracy and efficiency of the measuring mechanism.

[0025] Reference Figure 1 , Figure 3 , Figure 4 , Figure 5As shown, the transmission mechanism 200 includes a first rotating shaft 211, a second rotating shaft 212, a third rotating shaft 213, a first pulley 221, a second pulley 222, a third pulley 223, a fourth pulley 224, a first synchronous belt 231 and a second synchronous belt 232, wherein the first rotating shaft 211 is mounted on the first end 111 of the first connecting rod 110 through a first bearing seat, and the first pulley 221 is sleeved on the first rotating shaft 211; the second rotating shaft 212 is mounted on the first end 111 of the first connecting rod 110 through a second bearing seat. On the support 130, the second rotating shaft 212 is provided with a second pulley 222 and a third pulley 223, and the second pulley 222 and the third pulley 223 are arranged at an interval; the third rotating shaft 213 is installed on the fourth end 122 of the second connecting rod 120 through the third bearing seat, and the third rotating shaft 213 is provided with a fourth pulley 224; the first synchronous belt 231 is wound around the first pulley 221 and the second pulley 222; the second synchronous belt 232 is wound around the third pulley 223 and the fourth pulley 224. In some specific embodiments, the transmission mechanism 200 also includes a crank 240, by rotating the crank 240, the first rotating shaft 211 can be driven to rotate, and then the first pulley 221 and the first synchronous belt 231 can be driven to rotate synchronously, and then the second pulley 222, the second rotating shaft 212, and the third pulley 223 can be driven to rotate synchronously, and then the second synchronous belt 232, the fourth pulley 224, and the third rotating shaft 213 can be driven to rotate synchronously, thereby converting the movement along the direction of the first connecting rod 110 into the movement along the direction of the second connecting rod 120, and realizing the movement of the measuring component 300 along the direction of the second connecting rod 120, so as to measure the magnetic field at the crucible wall position of the single crystal silicon growth furnace and different positions above the single crystal silicon growth furnace. In some specific embodiments, an avoidance groove 113 is provided at a position of the first connecting rod 110 near the second end 112, and the avoidance groove 113 is used to allow the second synchronous belt 232 to pass through; specifically, an avoidance groove 113 is also provided at the same position on the first support 130, and the second synchronous belt 232 can pass through the avoidance groove 113 and smoothly reach the lower end of the second connecting rod 120.

[0026] In some specific embodiments, a scale is provided on the first synchronous belt 231 , so that the specific position of the measuring component 300 on the second connecting rod 120 can be adjusted according to the scale, and the operation is simple and quick.

[0027] Reference Figure 1As shown, the measuring assembly 300 includes a follower block 310 and a magnetic field probe 340. The follower block 310 is arranged on the second synchronous belt 232; the magnetic field probe 340 is arranged on the follower block 310, and is used to test the magnetic field strength at the position. Specifically, it also includes a pressing block 320 and an extrusion screw 330. The follower block 310 is fixed to the second synchronous belt 232 by screws. The follower block 310 is provided with a vertical groove, and the magnetic field probe 340 is arranged in the vertical groove. The extrusion screw 330 passes through the pressing block 320 and is connected to the follower block 310. By screwing the extrusion screw 330, the magnetic field probe 340 can be limited in the vertical groove between the pressing block 320 and the follower block 310. In this way, during the transmission process of the second synchronous belt 232, the magnetic field probe 340 can be driven to rotate with the second synchronous belt 232.

[0028] In some specific embodiments, the measuring assembly 300 further includes a guide body 350, which is connected to the follower block 310, and has a guide groove, and the inner wall of the guide groove is slidably matched with the surface of the second connecting rod 120. Specifically, the guide body 350 is bolted to the fixed block 420, and the opening of the guide groove faces away from the fixed block 420. For example, the guide body 350 is "U"-shaped, and the distance between the two opposite inner side walls facing the guide body 350 is equal to the width of the second connecting rod 120. In this way, the second synchronous belt 232 can pass through the inner side of the guide body 350, and at the same time, the inner wall of the guide body 350 can also be stuck on the outer surface of the second connecting rod 120, so that when the second synchronous belt 232 drives the magnetic field probe 340 to move, the guide body 350 always slides along the second connecting rod 120, which can prevent the magnetic field probe 340 from shaking. At the same time, by arranging the pin shaft 150 coaxially with the second rotating shaft 212, it can be ensured that when the second support 140 rotates to any angle around the pin shaft 150, the second synchronous belt 232 always remains parallel to the second connecting rod 120. In this way, when the second support 140 rotates to any angle around the pin shaft 150, when the second synchronous belt 232 drives the magnetic field probe 340 to move, the guide body 350 can move along the surface of the second connecting rod 120 to prevent the magnetic field probe 340 from shaking.

[0029] Reference Figure 1 , Figure 3As shown, the support component 100 also includes a fixing seat 170 and a locking member 190. The fixing seat 170 is slidably matched with the first connecting rod 110, and the fixing seat 170 is detachably connected to the magnet to be measured; the locking member 190 is detachably connected to the fixing seat 170 and the first connecting rod 110, respectively, and is used to limit the position of the first connecting rod 110 relative to the fixing seat 170. In some specific embodiments, a plurality of holes are respectively provided on the fixing seat 170 and the first connecting rod 110, wherein the positions of the holes are processed according to the size of the commonly used crucible of the single crystal silicon growth furnace; the locking member 190 is a clevis bolt, and the fixing seat 170 and the first connecting rod 110 are fixedly connected by tightening the clevis bolt at the corresponding hole position; in this way, when in use, the first connecting rod 110 can be moved to the required hole position according to the demand, so that the second connecting rod 120 is located at the side wall position of the crucible of the single crystal silicon growth furnace. In some specific embodiments, guide edges 171 are provided on both sides of the fixing seat 170, and the first connecting rod 110 is provided between the guide edges 171 on both sides to prevent the first connecting rod 110 from deviating from the radial direction of the single crystal silicon growing furnace. In some specific embodiments, a fixing groove is provided below the fixing seat 170, and one of the two inner side walls of the fixing groove that are arranged opposite to each other is an arc surface to ensure that it fits with the inner side wall of the crucible of the single crystal silicon growing furnace to prevent the first connecting rod 110 from deviating from the radial direction of the single crystal silicon growing furnace; a fixing bolt 180 is provided on the other of the two inner side walls of the fixing groove that are arranged opposite to each other, and when the fixing groove of the fixing seat 170 is stuck on the upper end surface of the magnet 600 to be measured, the fixing bolt 180 is tightened to make the end of the fixing bolt 180 abut against the outer side of the magnet 600 to be measured, thereby installing the fixing seat 170 on the upper end surface of the magnet 600 to be measured.

[0030] Reference Figure 1As shown, the magnetic field measuring device also includes a first belt tensioning assembly 400 and a second belt tensioning assembly 500. The first belt tensioning assembly 400 is arranged on the first connecting rod 110, and the second belt tensioning assembly 500 is arranged on the second connecting rod 120. The first belt tensioning assembly 400 and the second belt tensioning assembly 500 respectively include an adjusting block 410, a fixing block 420 and an adjusting stud 430. Taking the first belt tensioning assembly as an example, a long hole is opened on the adjusting block 410, and a vertical bolt 440 passes through the long hole to install the adjusting block 410 on the first connecting rod. On the rod 110, when the vertical bolt 440 is not tightened, the adjustment block 410 can be slightly moved on the first connecting rod 110; when the vertical bolt 440 is tightened, the adjustment block 410 is fixedly connected to the first connecting rod 110; the fixing block 420 is fixed to the first connecting rod 110 by bolts; the adjustment stud 430 is passed through the fixing block 420, and the free end of the adjustment stud 430 abuts against the adjustment block 410; in this way, when the vertical bolt 440 is not tightened, the tightness of the first synchronous belt 231 can be adjusted by screwing the adjustment stud 430. Since the structure of the second belt tensioning assembly 500 is the same as that of the first belt tensioning assembly 400, the adjustment of the tightness of the second synchronous belt 232 is the same as the above process, which will not be repeated here.

[0031] The working process of the magnetic field measurement device of this application is as follows: The fixing seat 170 is mounted on the upper end surface of the magnet 600 (single crystal silicon growth furnace magnet) to be measured, and the fixing bolts 180 are tightened to make the inner arc of the fixing seat 170 close to the inner wall of the magnet 600 to be measured, so that the radial line of the first connecting rod 110 and the magnet 600 to be measured coincide, thereby ensuring the accuracy of the measurement position; Loosen the locking piece 190 on the first connecting rod 110, adjust the specific position of the first connecting rod 110 on the fixing seat according to the target position coordinates of the magnetic field measurement as needed (for example, if the magnetic field at the inner wall of the crucible of the single crystal silicon growth furnace is to be measured, and the size of the crucible of the single crystal silicon growth furnace is 36 inches, the first connecting rod 110 can be moved to the hole position marked with 36 inches, so that the first connecting rod 110 is aligned with the hole position on the fixing seat 170.) Manually tighten the locking piece 190 to fix the first connecting rod 110 on the fixing seat 170; Magnetic field measurement of the crucible wall position of a single crystal silicon growth furnace: according to the target position coordinates for magnetic field measurement as needed, the crank 240 is rotated, and the magnetic field probe 340 moves up and down under the linkage of the first synchronous belt 231 and the second synchronous belt 232, and the specific position of the magnetic field probe 340 is known through the scale on the first synchronous belt 231, so that the magnetic field probe 340 can reach the target position quickly and accurately; in this way, the magnetic field size of each point above and below the crucible wall position of the single crystal silicon growth furnace can be efficiently and accurately measured, and the single crystal silicon growth process parameters can be accurately formulated; Magnetic field measurement at the magnetic switch position above the single crystal silicon growth furnace: loosen the fastener 160, rotate the second connecting rod 120 upward 180 degrees, lock the fastener 160, and flip the magnetic field probe 340 from the bottom to the top, so as to measure the magnetic field size at each magnetic switch position, and take timely countermeasures against magnetic interference of the magnetic switch to avoid losses caused by strong magnetic influence during the growth of single crystal silicon; Storage of the magnetic field testing device: loosen the fastener 160 and rotate the second connecting rod 120 to a position where the angle with the first connecting rod 110 is the smallest, so as to achieve folding, reduce the storage space, and facilitate storage and transportation.

[0032] The measuring device of the present application has at least the following beneficial effects: 1. It can accurately find each position point in the magnetic field of the single crystal silicon acoustic field furnace and measure the magnetic field, providing accurate and reliable magnetic field parameters for the single crystal silicon growth process; 2. This application is simple to operate, convenient and efficient, can be operated by one person, and can be adjusted without the aid of any tools; 3. The magnetic field at different positions in multiple directions can be measured by flipping, which has strong applicability; 4. The device has a light structure and can be folded for easy storage and transportation.

[0033] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0034] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0035] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0036] In the present application, the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0037] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A magnetic field measuring device, characterized in that: include: A supporting component, the supporting component comprising a first connecting rod and a second connecting rod, the first connecting rod having a first end and a second end, the first end of the first connecting rod being connected to the magnet to be measured, the second connecting rod having a third end and a fourth end, the third end of the second connecting rod being rotatably connected to the second end of the first connecting rod; A transmission mechanism, arranged on the first connecting rod and the second connecting rod; A measuring component is connected to the transmission mechanism, and driven by the transmission mechanism, the measuring component can move along a preset path to measure the magnetic field around the magnet to be measured.

2. The magnetic field measuring device according to claim 1, characterized in that: The transmission mechanism comprises: A first rotating shaft, disposed at the first end of the first connecting rod, and a first pulley is sleeved on the first rotating shaft; A second rotating shaft is arranged at the second end of the first connecting rod, and a second pulley and a third pulley are sleeved on the second rotating shaft; A third rotating shaft, on which the fourth end of the second connecting rod is disposed, and a fourth pulley is sleeved on the third rotating shaft; A first synchronous belt, wound around the first pulley and the second pulley; The second synchronous belt is wound around the third pulley and the fourth pulley.

3. The magnetic field measuring device according to claim 2, characterized in that: The first synchronous belt is provided with a scale.

4. The magnetic field measuring device according to claim 2, characterized in that: A avoidance groove is formed at a position of the first connecting rod close to the second end, and the avoidance groove is used for allowing the second synchronous belt to pass through.

5. The magnetic field measuring device according to claim 2, characterized in that: The transmission mechanism also includes a crank, and the crank is connected to the first rotating shaft.

6. The magnetic field measuring device according to claim 2, characterized in that: The support member further comprises: a first support, disposed at a position of the first connecting rod close to the second end; A second support is arranged at a position of the second connecting rod close to the third end, the second support is rotatably connected to the first support via a pin, and the pin is coaxially arranged with the second rotating shaft; The fasteners are detachably connected to the first support and the second support respectively, and are used to limit the position of the second support relative to the first support.

7. The magnetic field measuring device according to claim 2, characterized in that: The support member further comprises: A fixing seat, wherein the fixing seat is slidably matched with the first connecting rod, and the fixing seat is detachably connected to the magnet to be measured; A locking member is detachably connected to the fixing seat and the first connecting rod, respectively, and is used to limit the position of the first connecting rod relative to the fixing seat.

8. The magnetic field measuring device according to any one of claims 2 to 7, characterized in that: The measuring assembly comprises: A follower block, arranged on the second synchronous belt; The magnetic field probe is arranged on the follower block and is used to test the magnetic field strength at the location.

9. The magnetic field measuring device according to claim 8, characterized in that: The measuring assembly further comprises a guide body, the guide body is connected to the follower block, the guide body has a guide groove, and the inner wall of the guide groove is in sliding cooperation with the surface of the second connecting rod.

10. The magnetic field measuring device according to claim 2, characterized in that: The invention also includes a first belt tensioning assembly and a second belt tensioning assembly, wherein the first belt tensioning assembly is arranged on the first connecting rod, and the second belt tensioning assembly is arranged on the second connecting rod, and the first belt tensioning assembly and the second belt tensioning assembly respectively include: An adjusting block, disposed on the first connecting rod / the second connecting rod, and slidingly matched with the first connecting rod / the second connecting rod; A fixing block, arranged on the first connecting rod / the second connecting rod; The adjusting stud is passed through the fixing block, and the free end thereof abuts against the adjusting block.

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