Ceramic substrate surface detection device

Abstract

The invention discloses a ceramic substrate surface detection device, and relates to the technical field of ceramic substrate detection, the ceramic substrate surface detection device comprises a workbench, a support frame, a camera, a storage table, a limiting frame, a movable sliding table, a rotating plate and a rotating frame, the support frame is arranged on the top of the workbench, the camera is arranged on the top of the support frame, the limiting frame is fixedly connected with the workbench, and the movable sliding table is arranged on the rotating plate. The limiting frame is provided with a sliding groove, the movable sliding table is in sliding fit with the sliding groove, the movable sliding table is provided with a first rotating hole, the rotating plate is provided with a first rotating shaft, the rotating frame is fixedly connected with the rotating plate, the rotating frame is provided with a second rotating hole, the storage table is fixedly provided with a second rotating shaft, and the storage table is located below the camera. According to the invention, the rotating plate and the movable sliding table as well as the object placing table and the rotating frame are rotationally matched, so that the side edge of the base plate is rotated to the position under the camera, and the camera can detect conveniently. And meanwhile, the detection distance is ensured to be constant through sliding fit between the limiting frame and the movable sliding table, and the focusing accuracy is maintained, so that high precision and reliability of detection are ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of appearance detection, and in particular to a ceramic substrate surface detection device. Background Art

[0002] Ceramic substrates are made by bonding copper foil directly to alumina at high temperature. Or aluminum nitride (AlN) and other ceramic substrate surfaces (single or double sides). This ultra-thin composite substrate has a variety of excellent performance characteristics, including excellent electrical insulation, high thermal conductivity, excellent soft soldering and high adhesion strength. After the ceramic substrate is processed, in order to ensure the quality of the ceramic substrate, it is necessary to check whether the surface and side of the ceramic substrate are flat and smooth, and whether there are defects such as cracks, scratches, bubbles, holes and stains.

[0003] In the prior art, a Chinese patent with the announcement number CN117074416A discloses a visual inspection device for aluminum nitride ceramic substrates, including a working platform, the upper surface of the working platform is connected to a fixing frame, and the lower surface of the fixing frame is provided with an angle-adjustable camera head. Specifically, the servo motor is controlled to rotate by the control end, driving the rotating gear to rotate, thereby causing the transmission rack to transmit, to squeeze the rotating structure, causing the rotating structure to change its angle, and then the micro-servo motor block is controlled to rotate by the control end, driving the rotating plate to rotate, causing the camera head to change its angle to a certain extent, thereby rotating the camera head to a position convenient for irradiating the side of the substrate, and detecting the side of the substrate.

[0004] The disadvantage of the above-mentioned prior art solution is that the detection of the side of the substrate is achieved by adjusting the shooting angle of the camera head, but the camera head needs to maintain accurate focus during the shooting process, and the change of the shooting angle will change the distance between the camera head and the ceramic substrate. When the distance between the camera head and the ceramic substrate changes, the focus state of the camera head needs to be adjusted accordingly to keep the image clear. If the focus adjustment is not timely or accurate, it will cause blurred imaging and reduced resolution, which will affect the accuracy and reliability of the detection. Summary of the invention

[0005] The object of the present invention is to provide a ceramic substrate surface detection device to solve the technical problem in the prior art that when the distance between the camera head and the ceramic substrate changes, if the focus adjustment of the camera head is not timely or inaccurate, it will cause blurred imaging and reduced resolution, thereby affecting the accuracy and reliability of detection.

[0006] The technical problem to be solved by the present invention can be achieved through the following technical solutions: A ceramic substrate surface detection device includes a workbench, a support frame, a camera, a control terminal, a storage table, a lifting and adjusting mechanism, a first rotating mechanism and a second rotating mechanism. The support frame and the control terminal are fixedly arranged on the top of the workbench, the camera is fixedly arranged on the top of the support frame, and the camera is electrically connected to the control terminal. The lifting and adjusting mechanism includes a limit frame and a movable slide. The limit frame is fixedly connected to the workbench, and a vertical slide groove is provided on the side of the limit frame. The movable slide is slidably connected to the slide groove. The first rotating mechanism includes a rotating plate, and a first rotating hole in a horizontal state is provided on the side of the movable slide. A first rotating shaft that rotates with the first rotating hole is fixedly provided on the side of the rotating plate. The second rotating mechanism includes a rotating frame, and the rotating frame is fixedly connected to the rotating plate. A second rotating hole in a horizontal state is provided on the side of the rotating frame, and the axis of the second rotating hole is perpendicular to the projection of the axis of the first rotating hole on the horizontal plane. A second rotating shaft that rotates with the second rotating hole is fixedly provided on the side of the storage table, and the storage table is located below the camera.

[0007] As a further solution of the present invention: the lifting and adjusting mechanism also includes a screw rod, which is rotatably arranged in a vertical state in the slide groove, and the movable slide table is provided with a matching hole that matches with the screw rod thread.

[0008] As a further solution of the present invention: the lifting and adjusting mechanism also includes a first motor, the first motor is fixedly connected to the limit frame, the output end of the first motor passes through the slide slot and is coaxially fixedly connected to the lead screw, and the first motor is electrically connected to the control terminal.

[0009] As a further solution of the present invention: the first rotating mechanism also includes a first driving gear and a driven gear, the driven gear is coaxially fixedly connected to the first rotating shaft, the first driving gear is rotationally matchedly connected to the movable slide, and the first driving gear is meshed with the driven gear.

[0010] As a further solution of the present invention: the first rotating mechanism also includes a second motor, the second motor is fixedly connected to the movable slide, the output end of the second motor is coaxially fixedly connected to the first driving gear, and the second motor is electrically connected to the control terminal.

[0011] As a further solution of the present invention: the second rotating mechanism also includes a second driving gear and a driven rack, the driven rack is fixedly connected to the bottom of the storage table, the second driving gear is rotationally connected to the rotating frame, and the second driving gear is meshed with the driven rack.

[0012] As a further solution of the present invention: the second rotating mechanism also includes a third motor, the third motor is fixedly connected to the rotating plate, the output end of the third motor is coaxially fixedly connected to the second driving gear, and the third motor is electrically connected to the control terminal.

[0013] As a further solution of the present invention: the driven rack is an arc-shaped structure, and the radius of the second driving gear is smaller than the radius of the driven rack.

[0014] As a further solution of the present invention: a plurality of adsorption heads arranged in a matrix are fixedly provided on the top of the storage table, the adsorption heads are connected to the output end of the air pump, and the air pump is electrically connected to the control terminal.

[0015] Compared with the prior art, the present invention has the following beneficial effects: The present invention realizes the rotation of the substrate side to the bottom of the camera through the rotation cooperation between the rotating plate and the movable slide, the storage table and the rotating frame, so as to facilitate the detection of the camera. At the same time, the sliding cooperation between the limit frame and the movable slide ensures that the detection distance is constant and the focus accuracy is maintained, thereby ensuring the high precision and reliability of the detection.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 The present invention is a three-dimensional structural schematic diagram of a ceramic substrate surface detection device.

[0018] Figure 2 It is a three-dimensional structural schematic diagram of the lifting and lowering adjustment mechanism in the present invention.

[0019] Figure 3 It is a three-dimensional structural schematic diagram of the lead screw and the first motor in the present invention.

[0020] Figure 4 It is a schematic diagram of the three-dimensional structure of the storage table in the present invention.

[0021] Figure 5 It is a schematic diagram of the three-dimensional structure of the first rotating mechanism in the present invention.

[0022] Figure 6 It is a three-dimensional structural schematic diagram of the first driving gear and the driven gear in the present invention.

[0023] Figure 7 It is a schematic diagram of the three-dimensional structure of the second rotating mechanism in the present invention.

[0024] Figure 8 It is a three-dimensional structural schematic diagram of the second driving gear and the driven rack in the present invention.

[0025] Reference numerals include: 1. Workbench; 2. Support frame; 3. Camera; 4. Control terminal; 5. Storage table; 6. Lifting and adjusting mechanism; 61. Limiting frame; 62. Movable slide; 63. Slide; 64. Screw; 65. First motor; 7. First rotating mechanism; 71. Turntable; 72. First driving gear; 73. Driven gear; 74. Second motor; 8. Second rotating mechanism; 81. Rotating frame; 82. Second driving gear; 83. Driven rack; 84. Third motor; 9. Adsorption head. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] like Figures 1 to 8 As shown, a ceramic substrate surface detection device includes a workbench 1, a support frame 2, a camera 3, a control terminal 4, a storage table 5, a lifting and adjusting mechanism 6, a first rotating mechanism 7 and a second rotating mechanism 8. The support frame 2 and the control terminal 4 are fixedly arranged on the top of the workbench 1, the camera 3 is fixedly arranged on the top of the support frame 2, and the camera 3 is electrically connected to the control terminal 4.

[0028] The lifting and lowering adjustment mechanism 6 includes a limit frame 61 and a movable slide 62. The limit frame 61 is fixedly connected to the workbench 1. A vertical slide groove 63 is provided on the side of the limit frame 61. The movable slide 62 is slidably connected to the slide groove 63.

[0029] The first rotating mechanism 7 includes a rotating plate 71 , a first rotating hole in a horizontal state is opened on the side of the movable slide 62 , and a first rotating shaft rotatably matched with the first rotating hole is fixedly provided on the side of the rotating plate 71 , so that the rotating plate 71 and the movable slide 62 are rotationally connected.

[0030] The second rotating mechanism 8 includes a rotating frame 81, which is fixedly connected to the rotating plate 71. A second rotating hole in a horizontal state is opened on the side of the rotating frame 81, and a second rotating shaft that rotates with the second rotating hole is fixedly provided on the side of the storage table 5, so that the storage table 5 and the rotating frame 81 are rotationally connected. At the same time, the axis of the second rotating hole and the projection of the axis of the first rotating hole on the horizontal plane are perpendicular to each other, and the storage table 5 is located below the camera 3.

[0031] Through the cooperation between the first rotating mechanism 7 and the second rotating mechanism 8, the side of the substrate can be rotated to the bottom of the camera 3, so that the camera 3 can detect the side of the substrate. Through the cooperation between the first rotating mechanism 7, the second rotating mechanism 8 and the lifting and adjusting mechanism 6, the camera 3 can detect the side of the substrate while ensuring that the distance between the camera head and the ceramic substrate remains unchanged, thereby avoiding affecting the focusing state of the camera head, thereby ensuring the accuracy and reliability of the detection.

[0032] Specifically, the ceramic substrate to be tested is first placed on the storage table 5 and ensured to be stable and immovable. Then, the movable slide 62 is slid up and down in the slide groove 63 of the limit frame 61 to adjust the initial distance between the camera 3 and the ceramic substrate, ensuring that the camera 3 can shoot within a suitable focal length range.

[0033] When the distance adjustment is completed, the second rotating mechanism 8 and the storage platform 5 are rotated in the horizontal direction through the first rotating mechanism 7 (rotational cooperation between the rotating plate 71 and the movable slide 62). During this process, the camera 3 is fixed and the ceramic substrate rotates around the first rotating axis, so that the side of the substrate rotates to the bottom of the camera 3.

[0034] Next, the ceramic substrate is rotated around a second rotation axis through the second rotation mechanism 8 (rotational cooperation between the storage table 5 and the rotating frame 81), and the second rotation axis is perpendicular to the projection of the first rotation axis on the horizontal plane. In this way, the side of the substrate can be rotated to the bottom of the camera 3.

[0035] During the entire rotation detection process, the distance between the side of the substrate and the camera 3 is kept constant through the lifting and adjusting mechanism 6 (sliding cooperation between the limit frame 61 and the movable slide 62), thereby avoiding the problem of inaccurate focusing due to distance changes.

[0036] The present invention realizes the rotation of each side of the substrate to the position directly below the camera 3 through the rotation cooperation of the rotating plate 71 and the movable slide 62, the storage platform 5 and the rotating frame 81, so as to facilitate the detection of each side of the substrate by the camera 3. At the same time, the sliding cooperation between the limit frame 61 and the movable slide 62 ensures that the detection distance is constant and the focusing accuracy is maintained, thereby ensuring the high precision and reliability of the detection.

[0037] refer to Figure 2 and Figure 3As shown, in some specific embodiments, in order to adjust the sliding position of the movable slide 62 in the slide slot 63, the lifting adjustment mechanism 6 also includes a screw rod 64 and a first motor 65. The screw rod 64 is vertically rotatably arranged in the slide slot 63, and the movable slide 62 is provided with a matching hole threadedly matched with the screw rod 64. The first motor 65 is fixedly connected to the limit frame 61, and the output end of the first motor 65 passes through the slide slot 63 and is coaxially fixedly connected to the screw rod 64. The first motor 65 is electrically connected to the control terminal 4.

[0038] Specifically, when the screw rod 64 rotates, the movable slide 62 can interact with the thread of the screw rod 64 through its matching hole and slide up and down along the slide groove 63. When the position of the movable slide 62 needs to be adjusted, the control terminal 4 sends a corresponding instruction to the first motor 65 to drive the screw rod 64 to rotate. The rotation of the screw rod 64 drives the movable slide 62 to slide up and down along the slide groove 63 to the desired position to achieve adjustment.

[0039] refer to Figure 5 and Figure 6 As shown, in some specific embodiments, in order to realize the rotational cooperation between the rotating plate 71 and the movable slide 62, the first rotating mechanism 7 further includes a first driving gear 72, a driven gear 73 and a second motor 74, the driven gear 73 is coaxially fixedly connected to the first rotating shaft, the first driving gear 72 is rotationally connected to the movable slide 62, and the first driving gear 72 is meshed with the driven gear 73. The second motor 74 is fixedly connected to the movable slide 62, the output end of the second motor 74 is coaxially fixedly connected to the first driving gear 72, and the second motor 74 is electrically connected to the control terminal 4.

[0040] Specifically, when the rotating plate 71 and the movable slide 62 need to rotate together, the control terminal 4 sends a corresponding instruction to the second motor 74 to drive the second motor 74 to rotate. Since the output end of the second motor 74 is coaxially fixedly connected to the first driving gear 72, the first driving gear 72 will also rotate accordingly. Since the first driving gear 72 is meshed with the driven gear 73, the driven gear 73 will also rotate with the rotation of the first driving gear 72. Since the driven gear 73 is coaxially fixedly connected to the first rotating shaft, it will eventually drive the rotating plate 71, the second rotating mechanism 8 and the storage table 5 to rotate to the desired position.

[0041] refer to Figure 6 As shown, in some specific embodiments, in order to improve the rotation accuracy of the first rotating mechanism 7, the diameter of the first driving gear 72 is smaller than the diameter of the driven gear 73, thereby reducing the transmission error caused by gear clearance or manufacturing error, thereby providing a smoother transmission effect, which helps to improve the rotation accuracy and stability of the rotating plate 71.

[0042] refer to Figure 7 and Figure 8 As shown, in some specific embodiments, in order to realize the rotational cooperation between the storage platform 5 and the rotating frame 81, the second rotating mechanism 8 further includes a second driving gear 82, a driven rack 83 and a third motor 84, the driven rack 83 is fixedly connected to the bottom of the storage platform 5, the second driving gear 82 is rotationally connected to the rotating frame 81, and the second driving gear 82 is meshed with the driven rack 83. The third motor 84 is fixedly connected to the rotating plate 71, the output end of the third motor 84 is coaxially fixedly connected to the second driving gear 82, and the third motor 84 is electrically connected to the control terminal 4.

[0043] Specifically, when the storage table 5 and the rotating frame 81 need to rotate together, the control terminal 4 sends a corresponding instruction to the third motor 84 to drive the third motor 84 to rotate. Since the output end of the third motor 84 is coaxially fixedly connected to the second driving gear 82, the second driving gear 82 will also rotate. Since the second driving gear 82 is meshed with the driven rack 83, the driven rack 83 will rotate with the rotation of the second driving gear 82. Since the driven rack 83 is fixedly connected to the bottom of the storage table 5, it will eventually drive the storage table 5 to rotate to the desired position.

[0044] refer to Figure 8 As shown, in some specific embodiments, in order to improve the rotation accuracy of the second rotating mechanism 8, the driven rack 83 is an arc-shaped structure, and the radius of the second driving gear 82 is smaller than the radius of the driven rack 83. The meshing mode of the arc-shaped driven rack 83 and the second driving gear 82 can ensure that during the rotation process, the contact point between the driven rack 83 and the second driving gear 82 always moves along the arc trajectory. This continuous and smooth contact trajectory helps to reduce the transmission error caused by tooth clearance, vibration or manufacturing error, thereby improving the rotation accuracy. At the same time, the radius of the second driving gear 82 is smaller than the radius of the driven rack 83, and can also reduce the transmission error caused by gear clearance or manufacturing error, which helps to improve the accuracy and stability of the rotation of the storage table 5.

[0045] refer to Figure 4 As shown, in some specific embodiments, in order to achieve the stability of the ceramic substrate on the placement table 5, a plurality of adsorption heads 9 arranged in a matrix are fixedly provided on the top of the placement table 5, the adsorption heads 9 are connected to the output end of the air pump, and the air pump is electrically connected to the control terminal 4.

[0046] Specifically, when the ceramic substrate is placed on the storage table 5, the control terminal 4 starts the air pump to generate negative pressure (i.e., air pressure lower than atmospheric pressure) in the adsorption head 9. As the negative pressure is generated, the adsorption head 9 firmly adsorbs the bottom surface of the ceramic substrate. Since the adsorption heads 9 are arranged in a matrix, the ceramic substrate is subjected to uniform adsorption forces from multiple directions, thereby achieving a stable fixation.

[0047] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A ceramic substrate surface detection device, comprising a workbench (1), a support frame (2), a camera (3), a control terminal (4) and a storage table (5), wherein the support frame (2) and the control terminal (4) are fixedly arranged on the top of the workbench (1), the camera (3) is fixedly arranged on the top of the support frame (2), and the camera (3) is electrically connected to the control terminal (4), characterized in that: Also includes: A lifting and lowering adjustment mechanism (6), the lifting and lowering adjustment mechanism (6) comprising a limit frame (61) and a movable slide (62), the limit frame (61) being fixedly connected to the workbench (1), a vertical slide groove (63) being provided on a side of the limit frame (61), and the movable slide (62) being slidably connected to the slide groove (63); a first rotating mechanism (7), the first rotating mechanism (7) comprising a rotating plate (71), a first rotating hole in a horizontal state being opened on a side of the movable slide (62), a first rotating shaft being fixedly provided on a side of the rotating plate (71) and rotatably matched with the first rotating hole, the first rotating mechanism (7) further comprising a first driving gear (72) and a driven gear (73), the driven gear (73) being coaxially fixedly connected to the first rotating shaft, the first driving gear (72) being rotatably matched with the movable slide (62), and the first driving gear (72) being meshed with the driven gear (73); A second rotating mechanism (8), the second rotating mechanism (8) comprising a rotating frame (81), the rotating frame (81) being fixedly connected to the rotating plate (71), a second rotating hole in a horizontal state being provided on a side of the rotating frame (81), and the axis of the second rotating hole and the projection of the axis of the first rotating hole on a horizontal plane being perpendicular to each other, a second rotating shaft rotatably matched with the second rotating hole being fixedly provided on a side of the storage platform (5), and the storage platform (5) being located below the camera (3), the second rotating mechanism (8) further comprising a second driving gear (82) and a driven rack (83), the driven rack (83) being fixedly connected to the bottom of the storage platform (5), the second driving gear (82) being rotatably matched with the rotating frame (81), and the second driving gear (82) being meshed with the driven rack (83).

2. A ceramic substrate surface detection device according to claim 1, characterized in that: The lifting and lowering adjustment mechanism (6) further comprises a screw rod (64), wherein the screw rod (64) is rotatably arranged in a vertical state in the slide groove (63), and the movable slide table (62) is provided with a matching hole that is threadably matched with the screw rod (64).

3. A ceramic substrate surface detection device according to claim 2, characterized in that: The lifting and lowering adjustment mechanism (6) further comprises a first motor (65), wherein the first motor (65) is fixedly connected to the limit frame (61), an output end of the first motor (65) passes through the slide groove (63) and is coaxially fixedly connected to the lead screw (64), and the first motor (65) is electrically connected to the control terminal (4).

4. A ceramic substrate surface detection device according to claim 1, characterized in that: The first rotating mechanism (7) further comprises a second motor (74), the second motor (74) being fixedly connected to the movable slide (62), the output end of the second motor (74) being coaxially fixedly connected to the first driving gear (72), and the second motor (74) being electrically connected to the control terminal (4).

5. The ceramic substrate surface detection device according to claim 1, characterized in that: The diameter of the first driving gear (72) is smaller than the diameter of the driven gear (73).

6. The ceramic substrate surface detection device according to claim 1, characterized in that: The second rotating mechanism (8) further comprises a third motor (84), the third motor (84) being fixedly connected to the rotating plate (71), the output end of the third motor (84) being coaxially fixedly connected to the second driving gear (82), and the third motor (84) being electrically connected to the control terminal (4).

7. The ceramic substrate surface detection device according to claim 1, characterized in that: The driven rack (83) is an arc-shaped structure, and the radius of the second driving gear (82) is smaller than the radius of the driven rack (83).

8. The ceramic substrate surface detection device according to claim 1, characterized in that: A plurality of adsorption heads (9) arranged in a matrix are fixedly provided on the top of the storage table (5); the adsorption heads (9) are connected to the output end of the air pump, and the air pump is electrically connected to the control terminal (4).

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