Magnetic sensor, position detection device, and lens module

Abstract

A magnetic sensor is provided with: a soft magnetic structure including a plurality of yokes; and an MR element that is adjacent to the plurality of yokes in the short-side direction of the plurality of yokes and that is configured to detect a magnetic field generated from the plurality of yokes. The soft magnetic structure further includes a plurality of first additional magnetic bodies and a plurality of second additional magnetic bodies, the plurality of first additional magnetic bodies and the plurality of second additional magnetic bodies being arranged so as to be aligned with the plurality of yokes in the longitudinal direction of the plurality of yokes. The plurality of magnet yokes are disposed so as to be offset with respect to the plurality of magnet yokes in orthogonal directions orthogonal to the short-side direction and the long-side direction, respectively.

Description

Technical Field

[0001] The present invention relates to a magnetic sensor including at least one yoke and a magnetic detection element and configured to detect a magnetic field in a predetermined direction, and a position detection device and a lens module each including the magnetic sensor. Background Art

[0002] In recent years, magnetic sensors have been used for various purposes. As a magnetic sensor, a magnetic sensor using a spin valve type magnetoresistive effect element arranged on a substrate is known. The spin valve type magnetoresistive effect element has: a magnetization fixed layer, which has magnetization with a fixed direction; a free layer, which has magnetization whose direction can be changed according to the direction of the applied magnetic field; and a gap layer, which is arranged between the magnetization fixed layer and the free layer. The spin valve type magnetoresistive effect element arranged on the substrate is often configured to have sensitivity to a magnetic field in a direction parallel to the surface of the substrate.

[0003] On the other hand, in a system including a magnetic sensor, it is sometimes desired to detect a magnetic field in a direction perpendicular to the surface of the substrate by means of a magnetoresistive element disposed on the substrate. As a magnetic sensor for realizing this idea, a magnetic sensor having a yoke made of a soft magnetic body is known. The yoke converts a magnetic field in a direction perpendicular to the surface of the substrate into a magnetic field in a direction parallel to the surface of the substrate, and applies it to the magnetoresistive element. This magnetic sensor is described, for example, in Chinese Patent Application Publication No. 114924215A.

[0004] Chinese Patent Application Publication No. 114924215A discloses a magnetic sensor having a magnetic field conversion unit, a plurality of magnetoresistance effect elements, and a wiring unit. The magnetic field conversion unit includes a plurality of magnetic yokes. The plurality of magnetic yokes are each long in one direction, receive an input magnetic field in a direction perpendicular to the surface of the substrate, and generate an output magnetic field in a direction parallel to the surface of the substrate. The plurality of magnetoresistance effect elements are arranged on both sides of each of the plurality of magnetic yokes.

[0005] In addition to the input magnetic field, other magnetic fields in a direction parallel to the surface of the substrate are sometimes applied to each of the multiple yokes. In this case, the multiple yokes are magnetized in a predetermined direction according to the direction of the other magnetic field. If the direction of the other magnetic field changes, the direction of magnetization of each of the multiple yokes changes, and as a result, the direction of magnetization of the free layer of each of the multiple magnetoresistive effect elements changes. As a result, there is a problem that the characteristics obtained by the output of the magnetic sensor when the magnetic field is continuously changed, such as linearity or hysteresis, change. Summary of the invention

[0006] An object of the present invention is to provide a magnetic sensor capable of suppressing a change in output characteristics of the magnetic sensor due to at least one yoke, and a position detection device and a lens module each including the magnetic sensor.

[0007] The magnetic sensor of the present invention comprises: a soft magnetic structure including at least one magnetic yoke having a shape long in one direction; and a magnetic detection element adjacent to at least one magnetic yoke in the short side direction of at least one magnetic yoke and configured to detect a magnetic field generated from at least one magnetic yoke. The soft magnetic structure further comprises at least one additional magnetic body, the at least one additional magnetic body being arranged to be aligned with at least one magnetic yoke in the long side direction of at least one magnetic yoke, and being arranged to be offset relative to at least one magnetic yoke in an orthogonal direction orthogonal to the long side direction.

[0008] The position detection device of the present invention comprises: the magnetic sensor of the present invention; and a magnetic field generator having magnetization in one direction parallel to the orthogonal direction and configured to generate a magnetic field applied to at least one magnetic yoke. The magnetic sensor and the magnetic field generator are configured such that their relative positions change in the orthogonal direction and the strength of the magnetic field changes with the change in the relative position.

[0009] The lens module of the present invention comprises: a lens configured to be positionally variable; a magnetic sensor of the present invention; and a magnetic field generator having magnetization in one direction parallel to an orthogonal direction and configured to generate a magnetic field applied to at least one magnetic yoke. The magnetic sensor and the magnetic field generator are configured so that the intensity of the magnetic field changes with the change of the position of the lens.

[0010] In the present invention, the soft magnetic structure includes: at least one yoke; and at least one additional magnetic body, which are arranged to be offset relative to the at least one yoke in an orthogonal direction. Thus, according to the present invention, a magnetic sensor capable of suppressing the change of the output characteristics of the magnetic sensor due to the at least one yoke, and a position detection device and a lens module respectively equipped with the magnetic sensor can be realized.

[0011] Other objects, features and advantages of the present invention will become more apparent from the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a plan view showing the magnetic sensor according to the first embodiment of the present invention.

[0013] Figure 2 : is a circuit diagram showing the circuit configuration of the magnetic sensor according to the first embodiment of the present invention.

[0014] Figure 3 It means in Figure 1 A cross-sectional view of a portion of the cross section at the position indicated by line 3-3.

[0015] Figure 4 It means in Figure 1 A cross-sectional view of a portion of the cross section at the position indicated by line 4-4.

[0016] Figure 5 It is a side view showing a part of the magnetic sensor according to the first embodiment of the present invention.

[0017] Figure 6 It is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in the first embodiment of the present invention.

[0018] Figure 7 It is a perspective view showing a part of the wiring portion and the magnetoresistive effect element in the first embodiment of the present invention.

[0019] Figure 8 It is a perspective view showing a magnetoresistance effect element according to the first embodiment of the present invention.

[0020] Fig. 9 It is a front view showing the magnetic sensor and the magnetic field generator according to the first embodiment of the present invention.

[0021] Fig.10 It is a perspective view showing a lens module according to a first embodiment of the present invention.

[0022] Fig.11 It is an explanatory diagram schematically showing the interior of the lens module according to the first embodiment of the present invention.

[0023] Fig.12 It is a perspective view showing a position detection device and a driving device according to a first embodiment of the present invention.

[0024] Fig.13 It is a perspective view showing a plurality of coils of the drive device according to the first embodiment of the present invention.

[0025] Fig.14 It is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in a second embodiment of the present invention.

[0026] Fig.15 It is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in a third embodiment of the present invention.

[0027] Fig.16 It is a plan view showing a magnetic sensor according to a fourth embodiment of the present invention.

[0028] Fig.17 It is a side view showing a soft magnetic structure in a fourth embodiment of the present invention.

[0029] Fig.18 It is a side view showing a first modified example of the soft magnetic structure in the fourth embodiment of the present invention.

[0030] Fig.19 It is a side view showing a second modified example of the soft magnetic structure in the fourth embodiment of the present invention.

[0031] Fig. 20 It is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in a fifth embodiment of the present invention.

[0032] Fig.21 It is a side view showing a soft magnetic structure in a sixth embodiment of the present invention.

[0033] Fig. 22 It is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in a sixth embodiment of the present invention.

[0034] Fig.23 It is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in a seventh embodiment of the present invention.

[0035] Fig.24 It is a side view showing a soft magnetic structure in the eighth embodiment of the present invention.

[0036] Fig.25 It is a side view showing a soft magnetic structure in a ninth embodiment of the present invention.

[0037] Fig.26 It is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in a tenth embodiment of the present invention.

[0038] Fig. 27 It is a side view showing a soft magnetic structure in the eleventh embodiment of the present invention.

[0039] Fig.28 It is a side view showing a soft magnetic structure in a twelfth embodiment of the present invention.

[0040] Fig.29 It is a side view showing a soft magnetic structure in a thirteenth embodiment of the present invention. DETAILED DESCRIPTION

[0041] [First embodiment]

[0042] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Figure 1 and Figure 2 A schematic structure of a magnetic sensor according to a first embodiment of the present invention will be described. Figure 1 It is a plan view showing the magnetic sensor 1 according to the present embodiment. Figure 2 : is a circuit diagram showing the circuit configuration of the magnetic sensor 1 according to the present embodiment.

[0043] The magnetic sensor 1 of this embodiment includes a power supply terminal 11, a ground terminal 12, a first output terminal 13, a second output terminal 14, a first resistor R1, a second resistor R2, a third resistor R3, and a fourth resistor R4. The first to fourth resistors R1 to R4 each include a plurality of magnetic detection elements.

[0044] like Figure 2 As shown, the first resistor R1 is arranged between the power supply terminal 11 and the first output terminal 13 in terms of circuit structure. The second resistor R2 is arranged between the ground terminal 12 and the first output terminal 13 in terms of circuit structure. The third resistor R3 is arranged between the ground terminal 12 and the second output terminal 14 in terms of circuit structure. The fourth resistor R4 is arranged between the power supply terminal 11 and the second output terminal 14 in terms of circuit structure. In addition, in the present application, the expression "in terms of circuit structure" is used not only to refer to the configuration in the physical structure, but also to refer to the configuration in the circuit diagram.

[0045] A voltage or current of a predetermined magnitude is applied to the power terminal 11. The ground terminal 12 is grounded.

[0046] The magnetic sensor 1 further includes a soft magnetic structure 30 made of a soft magnetic material, a substrate 10, and an insulating layer (not shown). The power supply terminal 11, the ground terminal 12, the first and second output terminals 13 and 14, the first to fourth resistors R1 to R4, and the soft magnetic structure 30 are provided on the substrate 10. At least a portion of the first to fourth resistors R1 to R4 and the soft magnetic structure 30 is buried in the insulating layer (not shown) formed on the substrate 10.

[0047] The soft magnetic structure 30 includes at least one yoke, at least one additional magnetic body, and at least one shield. At least one yoke has a shape that is long in one direction. Here, the long side direction of at least one yoke is referred to as the long side direction, and the short side direction of at least one yoke is referred to as the short side direction. At least one additional magnetic body is configured to be arranged with at least one yoke in the long side direction. In addition, at least one additional magnetic body is configured to be offset relative to at least one yoke in an orthogonal direction orthogonal to the long side direction. Here, "arranged in an offset manner" includes a situation where the entirety of at least one additional magnetic body is offset relative to at least one yoke, and a situation where a portion of at least one additional magnetic body is offset relative to at least one yoke.

[0048] At least one shield is arranged to be offset relative to at least one yoke in a direction perpendicular to the short side direction and the long side direction. As described later, in this embodiment, at least one shield is arranged to be offset relative to at least one additional magnetic body in a direction perpendicular to the short side direction and the long side direction.

[0049] The plurality of magnetic detection elements are respectively adjacent to at least one yoke in the short side direction. The at least one yoke is configured to receive the magnetic field of the detection object of the magnetic sensor 1 and generate a magnetic field applied to each of the plurality of magnetic detection elements. The magnetic field of the detection object includes a component perpendicular to the surface of the substrate 10. The magnetic field generated from the at least one yoke includes a component parallel to the surface of the substrate 10. The plurality of magnetic detection elements are respectively configured to have sensitivity to the magnetic field in the direction parallel to the surface of the substrate 10 so as to be able to detect the magnetic field generated from the at least one yoke.

[0050] In the present embodiment, in particular, the magnetic sensor 1 includes a plurality of magnetoresistive elements (hereinafter referred to as MR elements) 20 as a plurality of magnetic detection elements. The magnetic sensor 1 further includes a wiring section 40 that electrically connects the plurality of MR elements 20 .

[0051] Here, if Figure 1 As shown in FIG. 1 , an X direction, a Y direction, and a Z direction are defined. The X direction, the Y direction, and the Z direction are orthogonal to each other. In addition, the direction opposite to the X direction is set as the -X direction, the direction opposite to the Y direction is set as the -Y direction, and the direction opposite to the Z direction is set as the -Z direction. In this embodiment, in particular, a direction perpendicular to the surface of the substrate 10 is set as the Z direction.

[0052] In addition, hereinafter, the position in front of the reference position in the Z direction is referred to as "above", and the position on the opposite side of the reference position to "above" is referred to as "below". In addition, regarding the components of the magnetic sensor 1, the surface located at one end in the Z direction is referred to as the "upper surface", and the surface located at one end in the -Z direction is referred to as the "lower surface". The power terminal 11, the ground terminal 12, the first and second output terminals 13, 14, the first to fourth resistors R1 to R4, and the soft magnetic structure 30 can also be provided above the upper surface of the substrate 10. In addition, the expression "when viewed from the Z direction" means observing the object from a position far away in the Z direction.

[0053] Here, the area for configuring multiple MR elements 20 is called an element configuration area. The element configuration area is defined as a planar area overlapping with the substrate 10 when viewed from the Z direction. In the present embodiment, in particular, the element configuration area includes two areas A1 and A2. Area A2 is configured in front of area A1 in the -X direction. Multiple MR elements 20 are respectively configured to be located in area A1 or in area A2 when viewed from the Z direction. In addition, in the following description, the positional relationship between the multiple components of the magnetic sensor 1 and the areas A1 and A2 refers to the positional relationship when viewed from the Z direction.

[0054] In the present embodiment, the power terminal 11 and the first output terminal 13 are arranged so as to sandwich the region A1. The ground terminal 12 and the second output terminal 14 are arranged so as to sandwich the region A2. A plurality of elements constituting the first and fourth resistors R1 and R4 among the plurality of MR elements 20 are arranged in the region A1. A plurality of elements constituting the second and third resistors R2 and R3 among the plurality of MR elements 20 are arranged in the region A2.

[0055] Next, refer to Figure 1 , Figure 3 to Figure 6 The arrangement of the plurality of MR elements 20 and the structure of the soft magnetic structure 30 will be described in detail. Figure 3 It means in Figure 1 A cross-sectional view of a portion of the cross section at the position indicated by line 3-3. Figure 4 It means in Figure 1 A cross-sectional view of a portion of the cross section at the position indicated by line 4-4. Figure 5 It means from Figure 1 1 is a side view of a portion of the magnetic sensor 1 viewed in the -Y direction. Figure 6 It is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies.

[0056] In the present embodiment, the soft magnetic structure 30 includes a plurality of yokes 31. The plurality of yokes 31 each have a rectangular parallelepiped shape extending in a direction parallel to the X direction. In the present embodiment, in particular, the plurality of yokes 31 extend over regions A1 and A2, respectively. In addition, the plurality of yokes 31 are arranged in the Y direction. The direction parallel to the X direction corresponds to the "long side direction of at least one yoke". The direction parallel to the Y direction corresponds to the "short side direction of at least one yoke".

[0057] The plurality of MR elements 20 are arranged in front of the plurality of yokes 31 in the -Z direction. In addition, the plurality of MR elements 20 are adjacent to a corresponding one of the yokes 31 in a direction parallel to the Y direction. In addition, the positional relationship between the plurality of MR elements 20 and the plurality of yokes 31 is not limited to Figure 3 to Figure 5 For example, the plurality of MR elements 20 may be arranged in front of the plurality of yokes 31 in the Z direction.

[0058] The plurality of yokes 31 each have a first end face 31a located at one end in the -Y direction and a second end face 31b located at one end in the Y direction. The plurality of MR elements 20 are arranged near the first end face 31a or near the second end face 31b of a corresponding one of the yokes 31 at a predetermined interval relative to the first end face 31a or the second end face 31b.

[0059] Here, the plurality of elements constituting the first resistor R1 in the plurality of MR elements 20 are denoted by reference numerals 20A, and the plurality of elements constituting the fourth resistor R4 are denoted by reference numerals 20D. The plurality of elements 20A and the plurality of elements 20D may be connected in series. Figure 1 and Figure 3 As shown in FIG. 1 , the plurality of elements 20A are arranged in the region A1 along the second end faces 31b of the plurality of yokes 31. Figure 1 and Figure 3 As shown, a plurality of the elements 20D are arranged in the region A1 along the first end surfaces 31 a of the plurality of yokes 31 .

[0060] In addition, the plurality of MR elements 20 constituting the second resistor R2 are denoted by reference numerals 20B, and the plurality of elements constituting the third resistor R3 are denoted by reference numerals 20C. The plurality of elements 20B and the plurality of elements 20C may also be connected in series. Figure 1 and Figure 4 As shown in FIG. 1 , the plurality of elements 20B are arranged in the region A2 along the second end faces 31b of the plurality of yokes 31. Figure 1 and Figure 4 As shown, a plurality of the elements 20C are arranged in the region A2 along the first end surfaces 31 a of the plurality of yokes 31 .

[0061] The plurality of yokes 31 are each configured to receive an input magnetic field including an input magnetic field component in a direction parallel to the Z direction and generate an output magnetic field. The output magnetic field includes an output magnetic field component in a direction parallel to the Y direction, that is, an output magnetic field component that changes according to the input magnetic field component. In the present embodiment, the output magnetic field corresponds to the "magnetic field generated from at least one yoke" in the present invention. The plurality of MR elements 20 are each configured such that the resistance value changes according to the direction and strength of the output magnetic field component.

[0062] In the present application, the "input magnetic field component" is a magnetic field component at a position away from the yoke 31. In the case where the yoke 31 is assumed to be absent, the "input magnetic field component" is substantially the same as the magnetic field component near the position where the yoke 31 is arranged. In the present application, the "output magnetic field component" is a magnetic field component near the yoke 31 where the MR element 20 is present. The "output magnetic field component" changes from the magnetic field component (input magnetic field component) in the case where the yoke 31 is assumed to be absent due to the yoke 31.

[0063] The soft magnetic structure 30 further includes a plurality of first additional magnetic bodies 32A and a plurality of second additional magnetic bodies 32B. Figure 5 and Figure 6As shown in FIG. 1 , each of the plurality of first additional magnetic bodies 32A and each of the plurality of second additional magnetic bodies 32B are arranged to be aligned with a corresponding one of the yokes 31 in a direction parallel to the X direction. Figure 1 In the embodiment, the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B are omitted.

[0064] In the present embodiment, in particular, each of the plurality of first additional magnetic bodies 32A is connected to one end of the corresponding yoke 31 in the X direction. In addition, each of the plurality of second additional magnetic bodies 32B is connected to one end of the corresponding yoke 31 in the -X direction. A first additional magnetic body 32A and a second additional magnetic body 32B are connected to one yoke 31. A first additional magnetic body 32A and a second additional magnetic body 32B are configured so that one yoke 31 is sandwiched between one first additional magnetic body 32A and one second additional magnetic body 32B. Figure 5 and Figure 6 In FIG. 1 , the boundary between the yoke 31 and the first additional magnetic body 32A and the boundary between the yoke 31 and the second additional magnetic body 32B are indicated by dotted lines. The plurality of yokes 31 , the plurality of first additional magnetic bodies 32A, and the plurality of second additional magnetic bodies 32B may be made of the same magnetic material.

[0065] In addition, if Figure 5 As shown, each of the plurality of first additional magnetic bodies 32A and each of the plurality of second additional magnetic bodies 32B is arranged to be offset relative to a corresponding one of the yokes 31 in a direction parallel to the Z direction. In the present embodiment, in particular, each of the plurality of first additional magnetic bodies 32A extends from one end of the yoke 31 in a manner inclined toward the Z direction so that a portion thereof is offset relative to a corresponding one of the yokes 31 in the Z direction. Each of the plurality of second additional magnetic bodies 32B extends from one end of the yoke 31 in a manner inclined toward the -Z direction so that a portion thereof is offset relative to a corresponding one of the yokes 31 in the -Z direction.

[0066] In addition, if Figure 6 As shown in FIG. 1 , the plurality of first additional magnetic bodies 32A are arranged so as to be aligned in a direction parallel to the Y direction. In addition, the plurality of second additional magnetic bodies 32B are arranged so as to be aligned in a direction parallel to the Y direction.

[0067] In addition, if Figure 5 As shown, each of the plurality of MR elements 20 may not be adjacent to the first and second additional magnetic bodies 32A and 32B in the direction parallel to the Y direction.

[0068] Here, the number of the plurality of yokes 31 is represented by N (N is an integer equal to or greater than 2). The total number of the plurality of first additional magnetic bodies 32A and the number of the plurality of second additional magnetic bodies 32B is 2N.

[0069] like Figure 3 to Figure 5 As shown, the soft magnetic structure 30 further includes two shields 33 and 34. When viewed from the Z direction, each of the two shields 33 and 34 covers the plurality of MR elements 20, the plurality of yokes 31, the plurality of first additional magnetic bodies 32A, and the plurality of second additional magnetic bodies 32B. The shield 33 is arranged in front of the plurality of MR elements 20, the plurality of yokes 31, the plurality of first additional magnetic bodies 32A, and the plurality of second additional magnetic bodies 32B in the Z direction. The shield 34 is arranged in front of the plurality of MR elements 20, the plurality of yokes 31, the plurality of first additional magnetic bodies 32A, and the plurality of second additional magnetic bodies 32B in the -Z direction. The planar shape (shape viewed from the Z direction) of each of the shields 33 and 34 is, for example, a rectangle.

[0070] The center position of the yoke 31 in a direction parallel to the X direction, the center position of the shield 33 in a direction parallel to the X direction, and the center position of the shield 34 in a direction parallel to the X direction coincide or substantially coincide with each other.

[0071] Next, refer to Figure 1 and Figure 7 The wiring section 40 will be described. Figure 7 1 is a perspective view showing a part of the wiring section 40 and the MR elements 20. The wiring section 40 includes a plurality of lower electrodes 41 and a plurality of upper electrodes 42 for electrically connecting a plurality of MR elements 20 arranged in a row in a direction parallel to the X direction. The plurality of MR elements 20 are arranged on the plurality of lower electrodes 41. The plurality of upper electrodes 42 are arranged on the plurality of MR elements 20.

[0072] The connection relationship between the plurality of MR elements 20 and the lower electrode 41 and the upper electrode 42 is as follows. Each of the plurality of lower electrodes 41 has a shape that is elongated in the X direction. A gap is formed between two lower electrodes 41 that are adjacent in the X direction. On the upper surface of the lower electrode 41, the MR element 20 is arranged near both ends in the X direction. Each of the plurality of upper electrodes 42 is arranged on two lower electrodes 41 that are adjacent in the X direction, and electrically connects two adjacent MR elements 20. Thus, the plurality of MR elements 20 arranged in a row are connected in series.

[0073] The wiring section 40 further includes a plurality of connection electrodes. In each of the first to fourth resistor sections R1 to R4, the plurality of connection electrodes electrically connect the plurality of lower electrodes 41 or the plurality of upper electrodes 42 so as to connect in series the groups of the plurality of MR elements 20 arranged in a row.

[0074] Next, refer to Figure 8 The structure of the MR element 20 will be described. Figure 8 : is a three-dimensional diagram showing the MR element 20. The MR element 20 is a spin valve type MR element. The MR element 20 has: a magnetization fixed layer 22 having magnetization whose direction is fixed; a free layer 24 having magnetization whose direction can be changed according to the direction of the applied magnetic field; and a gap layer 23 arranged between the magnetization fixed layer 22 and the free layer 24. The MR element 20 can be a TMR (tunnel magnetoresistance effect) element or a GMR (giant magnetoresistance effect) element. In a TMR element, the gap layer 23 is a tunnel barrier layer. In a GMR element, the gap layer 23 is a non-magnetic conductive layer. In the MR element 20, the resistance value changes according to the angle between the magnetization direction of the free layer 24 and the magnetization direction of the magnetization fixed layer 22. When the angle is 0°, the resistance value is the minimum value, and when the angle is 180°, the resistance value is the maximum value. In each MR element 20 , the free layer 24 has shape anisotropy in which the easy magnetization axis direction is orthogonal to the magnetization direction of the magnetization fixed layer 22 .

[0075] The MR element 20 also has an antiferromagnetic layer 21. The antiferromagnetic layer 21, the magnetization fixed layer 22, the gap layer 23 and the free layer 24 are stacked in sequence in the Z direction. The antiferromagnetic layer 21 is made of an antiferromagnetic material, and generates exchange coupling with the magnetization fixed layer 22 to fix the magnetization direction of the magnetization fixed layer 22. In addition, the magnetization fixed layer 22 can also be a so-called self-pinned fixed layer (Synthetic Ferri Pinned layer, SFP layer). The self-pinned fixed layer has a stacked ferromagnetic structure in which a ferromagnetic layer, a non-magnetic intermediate layer and a ferromagnetic layer are stacked, and is formed by antiferromagnetic coupling of two ferromagnetic layers. In the case where the magnetization fixed layer 22 is a self-pinned fixed layer, the antiferromagnetic layer 21 can also be omitted.

[0076] In addition, the arrangement of the layers 21 to 24 in the MR element 20 may also be different from Figure 8 The configuration shown is upside down.

[0077] In the present embodiment, the magnetization direction of the magnetization fixed layer 22 is parallel to the Y direction. In addition, in the present embodiment, the magnetization direction of the magnetization fixed layer 22 of each of the plurality of MR elements 20, i.e., the plurality of elements 20A in the first resistor section R1 and the magnetization direction of the magnetization fixed layer 22 of each of the plurality of MR elements 20, i.e., the plurality of elements 20B in the second resistor section R2 are opposite to each other. The magnetization direction of each of the plurality of MR elements 20, i.e., the plurality of elements 20C in the third resistor section R3 is the same as the magnetization direction of each of the plurality of elements 20B. The magnetization direction of each of the plurality of MR elements 20, i.e., the plurality of elements 20D in the fourth resistor section R4 is the same as the magnetization direction of each of the plurality of elements 20A.

[0078] In this embodiment, the magnetization fixed layers 22 of the elements 20A and 20D are magnetized in the -Y direction, and the magnetization fixed layers 22 of the elements 20B and 20C are magnetized in the Y direction.

[0079] In the present embodiment, each of the plurality of MR elements 20 has a shape that is long in a direction parallel to the X direction. Thus, the free layer 24 of each of the plurality of MR elements 20 has shape anisotropy in which the easy magnetization axis direction is parallel to the X direction. Therefore, in a state where there is no applied magnetic field, the magnetization direction of the free layer 24 is parallel to the X direction. In the presence of an output magnetic field component, the magnetization direction of the free layer 24 changes according to the direction and intensity of the output magnetic field component. Therefore, the angle formed by the magnetization direction of the free layer 24 relative to the magnetization direction of the magnetization fixed layer 22 changes according to the direction and intensity of the output magnetic field component received by each of the plurality of MR elements 20. Therefore, the resistance value of each of the plurality of MR elements 20 corresponds to the output magnetic field component.

[0080] In this embodiment, the direction of the output magnetic field component received by the plurality of elements 20B is the same as the direction of the output magnetic field component received by the plurality of elements 20A. On the other hand, the direction of the output magnetic field component received by the plurality of elements 20C and the direction of the output magnetic field component received by the plurality of elements 20D are opposite to the direction of the output magnetic field component received by the plurality of elements 20A.

[0081] Next, the function of the magnetic sensor 1 of this embodiment is described. In this embodiment, the magnetic field of the object to be detected by the magnetic sensor 1 includes one of the components in the Z direction and the components in the -Z direction, but does not include the other. Here, the case where the magnetic field of the object to be detected by the magnetic sensor 1 includes the component in the Z direction but does not include the component in the -Z direction is described as an example. In this case, the direction of the input magnetic field component of the input magnetic field respectively input to the plurality of magnetic yokes 31 is the Z direction.

[0082] In the following, it is assumed that the input magnetic field is composed of only the input magnetic field component in the Z direction. In the state where there is no input magnetic field component, and as a result, no output magnetic field component, the magnetization direction of the free layer 24 of each of the plurality of MR elements 20 is parallel to the X direction. In the state where there is an input magnetic field component in the Z direction, the direction of the output magnetic field component received by the plurality of MR elements 20 constituting the first and second resistors R1 and R2 is the -Y direction, and the direction of the output magnetic field component received by the plurality of MR elements 20 constituting the third and fourth resistors R3 and R4 is the Y direction. In this case, the magnetization direction of the free layer 24 of each of the plurality of MR elements 20 constituting the first and second resistors R1 and R2 is tilted from the direction parallel to the X direction toward the -Y direction, and the magnetization direction of the free layer 24 of each of the plurality of MR elements 20 constituting the third and fourth resistors R3 and R4 is tilted from the direction parallel to the X direction toward the Y direction. As a result, compared with the state in which there is no output magnetic field component, the resistance value of each of the plurality of MR elements 20 constituting the first and third resistors R1 and R3 is reduced, and the resistance value of each of the first and third resistors R1 and R3 is also reduced. In addition, compared with the state in which there is no output magnetic field component, the resistance value of each of the plurality of MR elements 20 constituting the second and fourth resistors R2 and R4 is increased, and the resistance value of the second and fourth resistors R2 and R4 is also increased.

[0083] The amount of change in the resistance value of the MR element 20 depends on the strength of the output magnetic field component received by the MR element 20. If the strength of the output magnetic field component increases, the resistance value of the MR element 20 changes in a direction in which the increase or decrease increases. If the strength of the output magnetic field component decreases, the resistance value of the MR element 20 changes in a direction in which the increase or decrease decreases. The strength of the output magnetic field component depends on the strength of the input magnetic field component.

[0084] Thus, if the strength of the input magnetic field component changes, the resistance values ​​of the first to fourth resistors R1 to R4 change in such a way that the resistance values ​​of the first and third resistors R1 and R3 increase, and the resistance values ​​of the second and fourth resistors R2 and R4 decrease. Figure 2 The potential difference between the first output terminal 13 and the second output terminal 14 shown changes. The magnetic sensor 1 generates a detection signal that depends on the potential difference between the first output terminal 13 and the second output terminal 14. The detection signal has a corresponding relationship with the intensity of the input magnetic field component.

[0085] Next, the effects of the magnetic sensor 1 of the present embodiment will be described. When the magnetic sensor 1 is used, the magnetic field of the detection object is always applied to the magnetic sensor 1. As described above, when the magnetic field of the detection object includes a component in the Z direction but does not include a component in the -Z direction, an external magnetic field in the Z direction is applied to the plurality of yokes 31, the plurality of first additional magnetic bodies 32A, and the plurality of second additional magnetic bodies 32B.

[0086] Figure 5 The figure shows a yoke 31, a first additional magnetic body 32A and a second additional magnetic body 32B connected to the yoke 31, respectively. Here, the focus is on the magnetic body composed of the yoke 31, the first additional magnetic body 32A and the second additional magnetic body 32B. A part of the first additional magnetic body 32A is offset relative to the yoke 31 in the Z direction. A part of the second additional magnetic body 32B is offset relative to the yoke 31 in the -Z direction. If an external magnetic field in the Z direction is applied to the magnetic body, a path is formed for the magnetic flux to pass through the direction from the second additional magnetic body 32B to the first additional magnetic body 32A via the yoke 31, and the magnetic body is magnetized in this direction. The first additional magnetic body 32A is connected to one end of the yoke 31 in the X direction, and the second additional magnetic body 32B is connected to one end of the yoke 31 in the -X direction. Therefore, the yoke 31 is magnetized in the X direction.

[0087] However, in addition to the magnetic field of the detection object, a noise magnetic field in a direction parallel to the X direction is sometimes applied to the magnetic sensor 1. The direction of magnetization of the free layer 24 of each of the plurality of MR elements 20 changes from the direction when only the input magnetic field component is assumed to exist according to the direction of magnetization of the yoke 31. If the direction of magnetization of the yoke 31 is changed by changing the direction of the noise magnetic field, for example, from the X direction to the -X direction, the amount of change in the direction of magnetization of the free layer 24 also changes. As a result, the characteristics obtained by the output of the magnetic sensor 1 when the magnetic field of the detection object is continuously changed, such as linearity or hysteresis, change.

[0088] In contrast, in the present embodiment, as described above, when the magnetic sensor 1 is used, the magnetic field of the detection object is always applied to the magnetic sensor 1. Therefore, in the present embodiment, the state in which the yoke 31 is magnetized in the X direction is maintained by the magnetic field of the detection object. Thus, according to the present embodiment, the change in the characteristics of the magnetic sensor 1 caused by the change in the magnetization direction of the yoke 31 can be suppressed.

[0089] Next, the magnetic field to be detected by the magnetic sensor 1 will be described. The magnetic field to be detected may be a magnetic field generated by a magnetic field generator such as a magnet. In this case, the magnetic field generator may be a component of the magnetic sensor 1.

[0090] Fig. 9: is a front view showing the magnetic sensor 1 and the magnetic field generator 5. The magnetic field generator 5 is configured to generate a magnetic field applied to the plurality of magnetic yokes 31. The magnetic field generator 5 may be a magnet configured to generate a magnetic field having a component in a direction parallel to the Z direction. Fig. 9 In the example shown, the magnetic field generator 5 has magnetization in the Z direction and is configured to generate a magnetic field having a component in the Z direction. Fig. 9 In the example shown, the magnetic field generator 5 may be configured to have magnetization in multiple directions other than the Z direction in addition to the magnetization in the Z direction, or may be configured to have magnetization in multiple directions other than the Z direction instead of the magnetization in the Z direction. Fig. 9 In the example shown, the magnetic sensor 1 is arranged in front of the magnetic field generator 5 in the -Z direction. In this case, the magnetic field of the detection target includes a component in the Z direction but does not include a component in the -Z direction.

[0091] If the relative position of the magnetic sensor 1 and the magnetic field generator 5 changes, the strength of the magnetic field applied to the plurality of magnetic yokes 31, that is, the strength of the input magnetic field component changes. As described above, the detection signal of the magnetic sensor 1 has a corresponding relationship with the strength of the input magnetic field component. Therefore, the detection signal of the magnetic sensor 1 has a corresponding relationship with the relative position of the magnetic sensor 1 and the magnetic field generator 5. The relative position of the magnetic sensor 1 and the magnetic field generator 5 changes, for example, in a direction parallel to the Z direction.

[0092] Next, refer to Fig. 9 The position detection device 50 of the present embodiment is briefly described. The position detection device 50 of the present embodiment includes the magnetic sensor 1 and the magnetic field generator 5 of the present embodiment. The magnetic sensor 1 and the magnetic field generator 5 are configured so that the relative position of the magnetic sensor 1 and the magnetic field generator 5 changes in conjunction with the position of the variable position object. As described above, the detection signal of the magnetic sensor 1 has a corresponding relationship with the relative position of the magnetic sensor 1 and the magnetic field generator 5. In the position detection device 50, the position of the object is detected by measuring the detection signal of the magnetic sensor 1.

[0093] Next, refer to Fig.10 and Fig.11 A lens module 100 according to the present embodiment will be described. Fig.10 2 is a perspective view showing the lens module 100 . Fig.11 1 is an explanatory diagram schematically showing the interior of the lens module 100. Fig.11 In order to facilitate understanding, Fig.10The lens module 100 of this embodiment constitutes a part of a camera for a smartphone having an optical shake correction mechanism and an autofocus mechanism, and is used in combination with an image sensor 110 using a CMOS or the like.

[0094] The lens module 100 of this embodiment includes a position detection device 50 of this embodiment, a drive device 103, a lens 105, a frame 106, and a substrate 107. The position detection device 50 of this embodiment is used to detect the position of the lens 105 when automatically focusing. The drive device 103 moves the lens 105. The frame 106 protects the position detection device 50 and the drive device 103. The substrate 107 has an upper surface 107a. In addition, Fig.10 The substrate 107 is omitted. Fig.11 The frame 106 is omitted.

[0095] Here, if Fig.10 and Fig.11 As shown in FIG. 1 , the U direction and the V direction are defined. The U direction is the direction after rotating -45° from the X direction to the -Y direction. The V direction is the direction after rotating 45° from the X direction to the Y direction. The U direction and the V direction are respectively orthogonal to the Z direction. In the lens module 100, a direction perpendicular to the upper surface 107a of the substrate 107 (in Fig.11 The direction (direction toward the upper side in the figure) is defined as the Z direction. Both the U direction and the V direction are directions parallel to the upper surface 107a of the substrate 107. In addition, the direction opposite to the U direction is defined as the -U direction, and the direction opposite to the V direction is defined as the -V direction.

[0096] The lens 105 is disposed above the upper surface 107a of the substrate 107 in a posture in which the optical axis direction thereof coincides with the direction parallel to the Z direction. In addition, the substrate 107 has an opening (not shown) through which the light that has passed through the lens 105 passes. Fig.11 As shown, the lens module 100 is aligned with respect to the image sensor 110 so that light passing through the lens 105 and an opening (not shown) is incident on the image sensor 110 .

[0097] Next, refer to Figure 11 to Figure 13 The position detection device 50 and the drive device 103 of this embodiment will be described in detail. Fig.12 It is a perspective view showing the position detection device 50 and the driving device 103 . Fig.13 It is a perspective view showing a plurality of coils of the driving device 103 .

[0098] The position detection device 50 includes a first holding member 114, a second holding member 115, a plurality of first electric wires 116, and a plurality of second electric wires 117. The second holding member 115 holds the lens 105. Although not shown, the second holding member 115 has a cylindrical shape configured so that the lens 105 can be mounted therein.

[0099] The second holding member 115 is provided so that the position can be changed relative to the first holding member 114 in one direction, specifically, in the direction of the optical axis of the lens 105, that is, in a direction parallel to the Z direction. In the present embodiment, the first holding member 114 has a box-like shape configured in such a manner that the lens 105 and the second holding member 115 can be accommodated therein. A plurality of second electric wires 117 connect the first holding member 114 and the second holding member 115, and support the second holding member 115 in such a manner that the second holding member 115 can move relative to the first holding member 114 in a direction parallel to the Z direction.

[0100] The first holding member 114 is provided so as to be able to change its position relative to the substrate 107 in a direction parallel to the U direction and a direction parallel to the V direction above the upper surface 107a of the substrate 107. A plurality of first electric wires 116 connect the substrate 107 and the first holding member 114, and support the first holding member 114 so as to be able to move relative to the substrate 107 in a direction parallel to the U direction and a direction parallel to the V direction. If the relative position of the first holding member 114 relative to the substrate 107 changes, the relative position of the second holding member 115 relative to the substrate 107 also changes.

[0101] The drive device 103 includes magnets 131A, 131B, 132A, 132B, 133A, 133B, 134A, 134B and coils 141, 142, 143, 144, 145, 146. The magnet 131A is arranged in front of the lens 105 in the -V direction. The magnet 132A is arranged in front of the lens 105 in the V direction. The magnet 133A is arranged in front of the lens 105 in the -U direction. The magnet 134A is arranged in front of the lens 105 in the U direction. The magnets 131B, 132B, 133B, 134B are arranged above the magnets 131A, 132A, 133A, 134A, respectively. In addition, the magnets 131A, 131B, 132A, 132B, 133A, 133B, 134A, 134B are fixed to the first holding member 114.

[0102] like Fig.12As shown, the magnets 131A, 131B, 132A, and 132B each have a rectangular parallelepiped shape that is long in the U direction. The magnets 133A, 133B, 134A, and 134B each have a rectangular parallelepiped shape that is long in the V direction. The magnetization direction of the magnets 131A and 132B is the V direction. The magnetization direction of the magnets 131B and 132A is the -V direction. The magnetization direction of the magnets 133A and 134B is the U direction. The magnetization direction of the magnets 133B and 134A is the -U direction.

[0103] The coil 141 is arranged between the magnet 131A and the substrate 107. The coil 142 is arranged between the magnet 132A and the substrate 107. The coil 143 is arranged between the magnet 133A and the substrate 107. The coil 144 is arranged between the magnet 134A and the substrate 107. The coil 145 is arranged between the magnets 131A and 131B and the lens 105. The coil 146 is arranged between the magnets 132A and 132B and the lens 105. In addition, the coils 141, 142, 143, and 144 are fixed to the substrate 107. The coils 145 and 146 are fixed to the second holding member 115.

[0104] The magnetic field generated by magnet 131A is mainly applied to coil 141. The magnetic field generated by magnet 132A is mainly applied to coil 142. The magnetic field generated by magnet 133A is mainly applied to coil 143. The magnetic field generated by magnet 134A is mainly applied to coil 144.

[0105] In addition, if Fig.11 As shown, the coil 145 includes a first conductor portion 145A extending in the U direction along the magnet 131A, a second conductor portion 145B extending in the U direction along the magnet 131B, and two third conductor portions connecting the first and second conductor portions 145A and 145B. Fig.11 As shown, the coil 146 includes a first conductor portion 146A extending in the U direction along the magnet 132A, a second conductor portion 146B extending in the U direction along the magnet 132B, and two third conductor portions connecting the first and second conductor portions 146A and 146B.

[0106] The V-direction component of the magnetic field generated by the magnet 131A is mainly applied to the first conductor portion 145A of the coil 145. The -V-direction component of the magnetic field generated by the magnet 131B is mainly applied to the second conductor portion 145B of the coil 145. The -V-direction component of the magnetic field generated by the magnet 132A is mainly applied to the first conductor portion 146A of the coil 146. The V-direction component of the magnetic field generated by the magnet 132B is mainly applied to the second conductor portion 146B of the coil 146.

[0107] As described above, the position detection device 50 includes the magnetic sensor 1 and the magnetic field generator 5. The magnetic field generator 5 may also be a magnet having a rectangular parallelepiped shape. Fig.12 As shown, the magnet 131A has an end face 131A1 located at one end of the magnet 131A in the U direction. The magnet 134A has an end face 134A1 located at one end of the magnet 134A in the -V direction. The magnetic field generator 5 is fixed to the second holding member 115, for example, in the space near the end face 131A1 of the magnet 131A and the end face 134A1 of the magnet 134A.

[0108] Magnetic sensor 1 is fixed to substrate 107 near end surface 131A1 of magnet 131A and end surface 134A1 of magnet 134A. Distance from magnet 131A to magnetic sensor 1 and distance from magnet 134A to magnetic sensor 1 are equal.

[0109] The driving device 103 further includes a first magnetic sensor (not shown) fixed to the substrate 107 on one inner side of the coils 141 and 142, and a second magnetic sensor (not shown) fixed to the substrate 107 on one inner side of the coils 143 and 144. Here, the first magnetic sensor and the second magnetic sensor are respectively arranged on the inner side of the coil 141 and the inner side of the coil 144. As described later, in order to reduce the influence of the jitter, the first magnetic sensor and the second magnetic sensor are used when changing the position of the lens 105.

[0110] The first magnetic sensor detects the magnetic field generated by magnet 131A and generates a signal corresponding to the position of magnet 131A. The second magnetic sensor detects the magnetic field generated by magnet 134A and generates a signal corresponding to the position of magnet 134A. The first magnetic sensor and the second magnetic sensor are composed of elements that detect magnetic fields, such as Hall elements.

[0111] Next, refer to Figure 11 to Figure 13 The operation of the drive device 103 will be described. First, the optical shake correction mechanism and the autofocus mechanism will be briefly described. The drive device 103 constitutes a part of the optical shake correction mechanism and the autofocus mechanism. The drive device 103, the optical shake correction mechanism, and the autofocus mechanism are controlled by a control unit (not shown) outside the lens module 100.

[0112] The optical shake correction mechanism is configured to detect shake by, for example, a gyro sensor or the like outside the lens module 100. If the optical shake correction mechanism detects shake, the control unit (not shown) controls the drive device 103 so that the relative position of the lens 105 with respect to the substrate 107 changes according to the shake pattern. Thus, the absolute position of the lens 105 can be stabilized to reduce the influence of the shake. In addition, the relative position of the lens 105 with respect to the substrate 107 changes in a direction parallel to the U direction or in a direction parallel to the V direction according to the shake pattern.

[0113] The autofocus mechanism is configured to detect the state of focusing on the subject by, for example, the image sensor 110 or the autofocus sensor. The control unit (not shown) changes the relative position of the lens 105 with respect to the substrate 107 in a direction parallel to the Z direction through the drive device 103 so that the subject is in focus. Thus, the subject can be automatically focused.

[0114] Next, the operation of the drive device 103 associated with the optical shake correction mechanism will be described. When a current flows to the coils 141 and 142 through a control unit (not shown), the first holding member 114 to which the magnets 131A and 132A are fixed moves in a direction parallel to the V direction due to the interaction between the magnetic field generated by the magnets 131A and 132A and the magnetic field generated by the coils 141 and 142. As a result, the lens 105 also moves in a direction parallel to the V direction. In addition, when a current flows to the coils 143 and 144 through a control unit (not shown), the first holding member 114 to which the magnets 133A and 134A are fixed moves in a direction parallel to the U direction due to the interaction between the magnetic field generated by the magnets 133A and 134A and the magnetic field generated by the coils 143 and 144. As a result, the lens 105 also moves in a direction parallel to the U direction. The control unit (not shown) detects the position of the lens 105 by measuring signals corresponding to the positions of the magnets 131A and 134A generated by the first magnetic sensor (not shown) and the second magnetic sensor (not shown).

[0115] Next, the operation of the drive device 103 associated with the autofocus mechanism will be described. When the relative position of the lens 105 with respect to the substrate 107 is moved in the Z direction, the control unit (not shown) causes a current to flow to the coil 145 so that the current flows in the U direction in the first conductor portion 145A and in the -U direction in the second conductor portion 145B, and causes a current to flow to the coil 146 so that the current flows in the -U direction in the first conductor portion 146A and in the U direction in the second conductor portion 146B. The Lorentz force in the Z direction acts on the first and second conductor portions 145A, 145B of the coil 145 and the first and second conductor portions 146A, 146B of the coil 146 by these currents and the magnetic field generated by the magnets 131A, 131B, 132A, 132B. As a result, the second holding member 115 to which the coils 145 and 146 are fixed moves in the Z direction. As a result, the lens 105 also moves in the Z direction.

[0116] When the relative position of the lens 105 with respect to the substrate 107 is moved in the −Z direction, a control unit (not shown) causes a current to flow to the coils 145 and 146 in a direction opposite to that when the lens 105 is moved in the Z direction.

[0117] Next, the function of the position detection device 50 provided in the lens module 100 will be described. The position detection device 50 is used to detect the position of a variable-position object. In the lens module 100, the object is a lens 105 whose position changes in a linear direction.

[0118] When the relative position of the lens 105 relative to the substrate 107 changes, the relative position of the second holding member 115 relative to the substrate 107 and the first holding member 114 also changes. As described above, the second holding member 115 holds the magnetic field generator 5. Therefore, if the relative position of the lens 105 changes as described above, the relative position of the magnetic field generator 5 relative to the magnetic sensor 1 provided on the substrate 107 changes. As described above, the detection signal of the magnetic sensor 1 has a corresponding relationship with the relative position of the magnetic sensor 1 and the magnetic field generator 5. In the position detection device 50, the position of the lens 105 is detected by measuring the detection signal of the magnetic sensor 1.

[0119] [Second embodiment]

[0120] Next, refer to Fig.14 A second embodiment of the present invention will be described. Fig.14 It is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in this embodiment.

[0121] Next, the difference between the soft magnetic structure 30 in the present embodiment and the first embodiment is described. In the present embodiment, a plurality of first additional magnetic bodies 32A and a plurality of second additional magnetic bodies 32B are respectively connected to one end in the X direction or one end in the -X direction of a corresponding yoke 31. Some of the plurality of first additional magnetic bodies 32A respectively connected to one end in the X direction of the corresponding yoke 31 and some of the plurality of second additional magnetic bodies 32B respectively connected to one end in the X direction of the corresponding yoke 31 are arranged so that the first additional magnetic bodies 32A and the second additional magnetic bodies 32B are arranged alternately in a direction parallel to the Y direction. Similarly, some of the plurality of first additional magnetic bodies 32A respectively connected to one end in the -X direction of the corresponding yoke 31 and some of the plurality of second additional magnetic bodies 32B respectively connected to one end in the -X direction of the corresponding yoke 31 are arranged so that the first additional magnetic bodies 32A and the second additional magnetic bodies 32B are arranged alternately in a direction parallel to the Y direction. That is, the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B are arranged so that the first additional magnetic bodies 32A and the second additional magnetic bodies 32B are adjacent to each other in a direction parallel to the Y direction.

[0122] Here, the structure consisting of the yoke 31, the first additional magnetic body 32A connected to one end of the yoke 31 in the X direction, and the second additional magnetic body 32B connected to one end of the yoke 31 in the -X direction is referred to as a first magnetic body. In addition, the structure consisting of the yoke 31, the first additional magnetic body 32A connected to one end of the yoke 31 in the -X direction, and the second additional magnetic body 32B connected to one end of the yoke 31 in the X direction is referred to as a second magnetic body. The plurality of first magnetic bodies and the plurality of second magnetic bodies are arranged so that the first magnetic bodies and the second magnetic bodies are alternately arranged in a direction parallel to the Y direction.

[0123] In the present embodiment, the yoke 31 of the first magnetic body is magnetized in the X direction by the external magnetic field in the Z direction, similarly to the yoke 31 in the first embodiment. In addition, the yoke 31 of the second magnetic body is magnetized in the -X direction opposite to the yoke 31 of the first magnetic body. Therefore, in the present embodiment, a plurality of yokes 31 are configured so that the yokes 31 magnetized in the X direction and the yokes 31 magnetized in the -X direction are alternately arranged in a direction parallel to the Y direction. That is, in the present embodiment, the yoke 31 magnetized in the X direction and the yoke 31 magnetized in the -X direction are adjacent in a direction parallel to the Y direction. The two yokes 31 are magnetically coupled. Thus, according to the present embodiment, the magnetization of the yoke 31 can be stabilized. As a result, according to the present embodiment, the change in the characteristics of the magnetic sensor 1 caused by the change in the direction of the magnetization of the yoke 31 can be suppressed.

[0124] The other structures, functions and effects in this embodiment are the same as those in the first embodiment.

[0125] [Third Embodiment]

[0126] Next, refer to Fig.15 A third embodiment of the present invention will be described. Fig.15 It is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in the present embodiment.

[0127] Next, the difference between the soft magnetic structure 30 in this embodiment and the first embodiment is described. In this embodiment, the soft magnetic structure 30 includes a plurality of first additional magnetic bodies 35A and a plurality of second additional magnetic bodies 35B instead of the plurality of first additional magnetic bodies 32A and a plurality of second additional magnetic bodies 32B in the first embodiment. Fig.15 As shown, each of the plurality of first additional magnetic bodies 35A and each of the plurality of second additional magnetic bodies 35B are arranged to be aligned with a corresponding one of the yokes 31 in a direction parallel to the X direction.

[0128] In this embodiment, a plurality of first additional magnetic bodies 35A and a plurality of second additional magnetic bodies 35B are respectively connected to one end in the X direction or one end in the -X direction of a corresponding yoke 31. One first additional magnetic body 35A and one second additional magnetic body 35B are connected to one yoke 31. Fig.15 In FIG. 1 , the boundary between the yoke 31 and the first additional magnetic body 35A and the boundary between the yoke 31 and the second additional magnetic body 35B are indicated by dotted lines, respectively.

[0129] Some of the plurality of first additional magnetic bodies 35A connected to one end of the corresponding yoke 31 in the X direction and some of the plurality of second additional magnetic bodies 35B connected to one end of the corresponding yoke 31 in the X direction are arranged so that the first additional magnetic bodies 35A and the second additional magnetic bodies 35B are alternately arranged in a direction parallel to the Y direction. Similarly, some of the plurality of first additional magnetic bodies 35A connected to one end of the corresponding yoke 31 in the -X direction and some of the plurality of second additional magnetic bodies 35B connected to one end of the corresponding yoke 31 in the -X direction are arranged so that the first additional magnetic bodies 35A and the second additional magnetic bodies 35B are alternately arranged in a direction parallel to the Y direction. That is, the plurality of first additional magnetic bodies 35A and the plurality of second additional magnetic bodies 35B are arranged so that the first additional magnetic bodies 35A and the second additional magnetic bodies 35B are adjacent to each other in a direction parallel to the Y direction.

[0130] like Fig.15As shown, each of the plurality of first additional magnetic bodies 35A and each of the plurality of second additional magnetic bodies 35B is arranged to be offset relative to a corresponding one of the yokes 31 in a direction parallel to the Y direction. In the present embodiment, in particular, each of the plurality of first additional magnetic bodies 35A extends in a manner bent toward the -Y direction from one end of the yoke 31 so that a portion thereof is offset relative to a corresponding one of the yokes 31 in the -Y direction. Each of the plurality of second additional magnetic bodies 35B extends in a manner bent toward the Y direction from one end of the yoke 31 so that a portion thereof is offset relative to a corresponding one of the yokes 31 in the Y direction.

[0131] Here, the structure consisting of the yoke 31, the first additional magnetic body 35A connected to one end of the yoke 31 in the X direction, and the second additional magnetic body 35B connected to one end of the yoke 31 in the -X direction is referred to as a first magnetic body. In addition, the structure consisting of the yoke 31, the first additional magnetic body 35A connected to one end of the yoke 31 in the -X direction, and the second additional magnetic body 35B connected to one end of the yoke 31 in the X direction is referred to as a second magnetic body. The plurality of first magnetic bodies and the plurality of second magnetic bodies are arranged so that the first magnetic bodies and the second magnetic bodies are alternately arranged in a direction parallel to the Y direction.

[0132] In this embodiment, in addition to the magnetic field of the detection object, an external magnetic field in a direction parallel to the Y direction is always applied to the magnetic sensor 1. Hereinafter, the case where the external magnetic field in the Y direction is applied to the magnetic sensor 1 is described as an example. In this case, the external magnetic field in the Y direction is applied to the plurality of yokes 31, the plurality of first additional magnetic bodies 35A, and the plurality of second additional magnetic bodies 35B.

[0133] A portion of the first additional magnetic body 35A is offset in the -Y direction relative to the yoke 31. In addition, a portion of the second additional magnetic body 35B is offset in the Y direction relative to the yoke 31. If an external magnetic field in the Y direction is applied to the first magnetic body and the second magnetic body, a path through which magnetic flux passes in a direction from the first additional magnetic body 35A to the second additional magnetic body 35B via the yoke 31 is formed in the first magnetic body and the second magnetic body, respectively, and the first magnetic body and the second magnetic body are magnetized in this direction.

[0134] In the first magnetic body, the first additional magnetic body 35A is connected to one end of the yoke 31 in the X direction, and the second additional magnetic body 35B is connected to one end of the yoke 31 in the -X direction. Therefore, the yoke 31 of the first magnetic body is magnetized in the -X direction. In the second magnetic body, the first additional magnetic body 35A is connected to one end of the yoke 31 in the -X direction, and the second additional magnetic body 35B is connected to one end of the yoke 31 in the X direction. Therefore, the yoke 31 of the second magnetic body is magnetized in the X direction.

[0135] In this embodiment, similarly to the second embodiment, a plurality of yokes 31 are arranged so that the yokes 31 magnetized in the X direction and the yokes 31 magnetized in the -X direction are alternately arranged in a direction parallel to the Y direction. Thus, according to this embodiment, the magnetization of the yokes 31 can be stabilized for the same reason as described in the second embodiment. As a result, according to this embodiment, changes in the characteristics of the magnetic sensor 1 caused by changes in the direction of the magnetization of the yokes 31 can be suppressed.

[0136] In addition, similar to the multiple first additional magnetic bodies 32A and the multiple second additional magnetic bodies 32B in the first embodiment, the multiple first additional magnetic bodies 35A can also be respectively connected to one end of the X direction of a corresponding magnetic yoke 31, and the multiple second additional magnetic bodies 35B can also be respectively connected to one end of the -X direction of a corresponding magnetic yoke 31.

[0137] The other structures, functions and effects in this embodiment are the same as those in the first or second embodiment.

[0138] [Fourth Embodiment]

[0139] Next, refer to Fig.16 and Fig.17 A fourth embodiment of the present invention will be described. Fig.16 It is a top view showing the magnetic sensor according to the present embodiment. Fig.17 It means from Fig.16 A side view of the soft magnetic structure in this embodiment viewed in the -Y direction.

[0140] Next, the difference between the soft magnetic structure 30 in the present embodiment and the first embodiment is described. In the present embodiment, the soft magnetic structure 30 includes a plurality of yokes 36 instead of the plurality of yokes 31 in the first embodiment. The plurality of yokes 36 each have a rectangular shape extending in a direction parallel to the X direction. In addition, the plurality of yokes 36 are arranged in each region of the regions A1 and A2 so that a plurality of yokes are arranged in a direction parallel to the X direction and in a direction parallel to the Y direction. In the present embodiment, in particular, the plurality of yokes 36 are configured in each region of the regions A1 and A2 so that two are arranged in a direction parallel to the X direction and five are arranged in a direction parallel to the Y direction.

[0141] The positional relationship between the plurality of MR elements 20 and the plurality of yokes 36 is the same as the positional relationship between the plurality of MR elements 20 and the plurality of yokes 31 in the first embodiment. In addition, the positional relationship between the two shields 33, 34 and the plurality of yokes 36 is the same as the positional relationship between the two shields 33, 34 and the plurality of yokes 31 in the first embodiment, except for the relationship regarding the position of the center of the yoke 31 in the direction parallel to the X direction.

[0142] In addition, in the present embodiment, the soft magnetic structure 30 includes a plurality of first additional magnetic bodies 37A and a plurality of second additional magnetic bodies 37B instead of the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the first embodiment. The positional relationship and connection relationship among the plurality of yokes 36, the plurality of first additional magnetic bodies 37A, and the plurality of second additional magnetic bodies 37B are the same as the positional relationship and connection relationship among the plurality of yokes 31, the plurality of first additional magnetic bodies 32A, and the plurality of second additional magnetic bodies 32B in the first embodiment. In addition, the shape of each of the plurality of first additional magnetic bodies 37A is the same as the shape of each of the plurality of first additional magnetic bodies 32A. In addition, the shape of each of the plurality of second additional magnetic bodies 37B is the same as the shape of each of the plurality of second additional magnetic bodies 32B. In addition, in Fig.16 In the embodiment, the plurality of first additional magnetic bodies 37A and the plurality of second additional magnetic bodies 37B are omitted.

[0143] like Fig.17 As shown, in this embodiment, the first additional magnetic body 37A and the second additional magnetic body 37B are adjacent to each other in the direction parallel to the X direction.

[0144] The other structures, functions and effects in this embodiment are the same as those in the first embodiment.

[0145] [First to Third Modifications]

[0146] Next, the first and third modified examples of the soft magnetic structure 30 in this embodiment will be described. Fig.18 A first modification example will be described. Fig.18 It is a side view showing a first modification of the soft magnetic structure 30 .

[0147] like Fig.18 As shown, in the first modification, a plurality of first additional magnetic bodies 37A and a plurality of second additional magnetic bodies 37B are connected to a corresponding one of the yokes 36 in a direction parallel to the X direction such that two first additional magnetic bodies 37A are adjacent and two second additional magnetic bodies 37B are adjacent.

[0148] Next, refer to Fig.19 A second modification example will be described. Fig.19 It is a side view showing a second modification of the soft magnetic structure 30 .

[0149] Here, a structure consisting of a yoke 36 and the first and second additional magnetic bodies 37A and 37B connected to the yoke 36 is referred to as a specific magnetic body. The soft magnetic structure 30 includes a plurality of specific magnetic bodies. The plurality of specific magnetic bodies are arranged in a direction parallel to the X direction and in a direction parallel to the Y direction.

[0150] In addition, the soft magnetic structure 30 includes a plurality of magnetic body groups each including several of the plurality of specific magnetic bodies. Here, the focus is on two magnetic body groups adjacent to each other in a direction parallel to the X direction. In the second modified example, the connection relationship between the plurality of yokes 36, the plurality of first additional magnetic bodies 37A, and the plurality of second additional magnetic bodies 37B in one of the two magnetic body groups (hereinafter referred to as the first group) and the connection relationship between the plurality of yokes 36, the plurality of first additional magnetic bodies 37A, and the plurality of second additional magnetic bodies 37B in the other of the two magnetic body groups (hereinafter referred to as the second group) are opposite to each other. That is, in the first group, the plurality of first additional magnetic bodies 37A are respectively connected to one end of the X direction of a corresponding yoke 36, and the plurality of second additional magnetic bodies 37B are respectively connected to one end of the -X direction of a corresponding yoke 36. In the second group, the plurality of first additional magnetic bodies 37A are respectively connected to one end of the -X direction of a corresponding yoke 36, and the plurality of second additional magnetic bodies 37B are respectively connected to one end of the X direction of a corresponding yoke 36.

[0151] Next, the third modification is briefly described. In the third modification, in a direction parallel to the X direction, two or more first groups of the second modification are arranged, and two or more second groups of the second modification are arranged. In addition, the two or more first groups and the two or more second groups are configured so that the first groups and the second groups are alternately arranged in a direction parallel to the X direction.

[0152] [Fifth Embodiment]

[0153] Next, refer to Fig. 20 A fifth embodiment of the present invention will be described. Fig. 20 It is a perspective view showing a plurality of yokes and a plurality of additional magnetic bodies in this embodiment.

[0154] Next, the difference between the soft magnetic structure 30 in this embodiment and the first embodiment is described. In this embodiment, the soft magnetic structure 30 includes a plurality of yokes 38 instead of the plurality of yokes 31 in the first embodiment. The plurality of yokes 38 each have a rectangular parallelepiped shape extending in a direction parallel to a direction intersecting each of the X direction and the Z direction and orthogonal to the Y direction.

[0155] In addition, the plurality of yokes 38 each have a first end located at one end in the X direction and a second end located at one end in the -X direction. In the present embodiment, in particular, the plurality of yokes 38 include a plurality of first specific yokes and a plurality of second specific yokes. The plurality of first specific yokes are each inclined relative to a direction parallel to the X direction in such a manner that a portion near the first end is offset relative to a portion near the second end in the Z direction. The plurality of second specific yokes are each inclined relative to a direction parallel to the X direction in such a manner that a portion near the first end is offset relative to a portion near the second end in the -Z direction. The plurality of first specific yokes and the plurality of second specific yokes are configured so that the first specific yokes and the second specific yokes are alternately arranged in a direction parallel to the Y direction.

[0156] The positional relationship between the plurality of MR elements 20 and the plurality of yokes 38 is the same as the positional relationship between the plurality of MR elements 20 and the plurality of yokes 31 in the first embodiment. In addition, the positional relationship between the two shields 33, 34 and the plurality of yokes 38 is the same as the positional relationship between the two shields 33, 34 and the plurality of yokes 31 in the first embodiment.

[0157] In addition, in the present embodiment, the soft magnetic structure 30 includes a plurality of first additional magnetic bodies 39A and a plurality of second additional magnetic bodies 39B instead of the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the first embodiment. The positional relationship and connection relationship among the plurality of yokes 38, the plurality of first additional magnetic bodies 39A, and the plurality of second additional magnetic bodies 39B are the same as those among the plurality of yokes 31, the plurality of first additional magnetic bodies 32A, and the plurality of second additional magnetic bodies 32B in the second embodiment.

[0158] The entire structure composed of one yoke 38 and the first and second additional magnetic bodies 39A and 39B connected to the one yoke 38 may extend in the extension direction of the one yoke 38. That is, the plurality of first additional magnetic bodies 39A may extend in the extension direction of the yoke 38 so that a part thereof is offset in the Z direction relative to the corresponding one yoke 38. In addition, the plurality of second additional magnetic bodies 39B may extend in the extension direction of the yoke 38 so that a part thereof is offset in the -Z direction relative to the corresponding one yoke 38.

[0159] Furthermore, the plurality of yokes 38 may include only a plurality of first specific yokes or only a plurality of second specific yokes.

[0160] The other structures, functions and effects in this embodiment are the same as those in the first or second embodiment.

[0161] [Sixth Embodiment]

[0162] Next, refer to Fig.21 and Fig. 22 A sixth embodiment of the present invention will be described. Fig.21 It is a side view showing the soft magnetic structure in this embodiment. Fig. 22 It is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in the present embodiment.

[0163] Next, the difference between the soft magnetic structure 30 in the present embodiment and the first embodiment is described. In the present embodiment, the soft magnetic structure 30 includes a plurality of first additional magnetic bodies 61A and a plurality of second additional magnetic bodies 61B instead of the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the first embodiment. The plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B each have a rectangular parallelepiped shape, for example.

[0164] like Fig.21 and Fig. 22 As shown, each of the plurality of first additional magnetic bodies 61A and each of the plurality of second additional magnetic bodies 61B is arranged to be aligned with a corresponding one of the yokes 31 in a direction parallel to the X direction. In the present embodiment, the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B are respectively arranged near one end in the X direction or one end in the -X direction of the corresponding one of the yokes 31.

[0165] Some of the plurality of first additional magnetic bodies 61A disposed near one end of the corresponding yoke 31 in the X direction and some of the plurality of second additional magnetic bodies 61B disposed near one end of the corresponding yoke 31 in the X direction are disposed so that the first additional magnetic bodies 61A and the second additional magnetic bodies 61B are alternately arranged in a direction parallel to the Y direction. Similarly, some of the plurality of first additional magnetic bodies 61A disposed near one end of the corresponding yoke 31 in the -X direction and some of the plurality of second additional magnetic bodies 61B disposed near one end of the corresponding yoke 31 in the -X direction are disposed so that the first additional magnetic bodies 61A and the second additional magnetic bodies 61B are alternately arranged in a direction parallel to the Y direction. That is, when viewed from the Z direction, one first additional magnetic body 61A and one second additional magnetic body 61B are adjacent in a direction parallel to the Y direction.

[0166] In addition, if Fig.21 and Fig. 22As shown, each of the plurality of first additional magnetic bodies 61A and each of the plurality of second additional magnetic bodies 61B are arranged to be offset relative to a corresponding one of the yokes 31 in a direction parallel to the Z direction. In the present embodiment, in particular, the plurality of first additional magnetic bodies 61A are arranged in front of the corresponding one of the yokes 31 in the Z direction. The plurality of second additional magnetic bodies 61B are arranged in front of the corresponding one of the yokes 31 in the -Z direction. One first additional magnetic body 61A and one second additional magnetic body 61B are arranged to sandwich at least a portion of one of the yokes 31 between one first additional magnetic body 61A and one second additional magnetic body 61B.

[0167] exist Fig.21 and Fig. 22 In the example shown, the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B are arranged at predetermined intervals with respect to the corresponding one yoke 31 in a direction parallel to the Z direction. Fig.21 and Fig. 22 In the illustrated example, each of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B is arranged so that a portion thereof overlaps with a corresponding one of the yokes 31 when viewed from the Z direction.

[0168] In addition, the arrangement and shape of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B are not limited to Fig.21 and Fig. 22 For example, when viewed from the Z direction, the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B may be arranged so as not to overlap with the corresponding one yoke 31 .

[0169] In addition, when the first additional magnetic body 61A is arranged near one end of the yoke 31 in the X direction and the second additional magnetic body 61B is arranged near one end of the yoke 31 in the -X direction, the yoke 31 may be arranged so that one end of the yoke 31 in the X direction and one end of the first additional magnetic body 61A in the X direction are aligned or substantially aligned in a direction parallel to the X direction, and one end of the yoke 31 in the -X direction and one end of the second additional magnetic body 61B in the -X direction are aligned or substantially aligned in a direction parallel to the X direction. Alternatively, the yoke 31 may be arranged so that one end of the yoke 31 in the -X direction and one end of the first additional magnetic body 61A in the X direction are aligned or substantially aligned in a direction parallel to the X direction, and one end of the yoke 31 in the -X direction and one end of the second additional magnetic body 61B in the X direction are aligned or substantially aligned in a direction parallel to the X direction.

[0170] Alternatively, the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B may each be in contact with a corresponding one of the yokes 31 .

[0171] In addition, Fig.21 In the example shown, the dimension of each of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B in the direction parallel to the Z direction is the same as or substantially the same as the dimension of each of the plurality of yokes 31 in the direction parallel to the Z direction. However, the dimension of each of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B in the direction parallel to the Z direction may be larger or smaller than the dimension of each of the plurality of yokes 31 in the direction parallel to the Z direction.

[0172] In addition, Fig. 22 In the example shown, the dimension of each of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B in the direction parallel to the Y direction is larger than the dimension of each of the plurality of yokes 31 in the direction parallel to the Y direction. However, the dimension of each of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B in the direction parallel to the Y direction may be the same as the dimension of each of the plurality of yokes 31 in the direction parallel to the Y direction, or may be smaller than the dimension of each of the plurality of yokes 31 in the direction parallel to the Y direction.

[0173] Furthermore, the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B may be made of the same magnetic material as the plurality of yokes 31 , or may be made of a magnetic material different from that of the plurality of yokes 31 .

[0174] Here, the number of the plurality of yokes 31 is represented by N (N is an integer equal to or greater than 2). The total number of the plurality of first additional magnetic bodies 61A and the number of the plurality of second additional magnetic bodies 61B is 2N.

[0175] In the present embodiment, when viewed from the Z direction, the two shields 33 and 34 cover the plurality of MR elements 20, the plurality of yokes 31, the plurality of first additional magnetic bodies 61A, and the plurality of second additional magnetic bodies 61B, respectively. The shield 33 is arranged in front of the plurality of MR elements 20, the plurality of yokes 31, the plurality of first additional magnetic bodies 61A, and the plurality of second additional magnetic bodies 61B in the Z direction. The shield 34 is arranged in front of the plurality of MR elements 20, the plurality of yokes 31, the plurality of first additional magnetic bodies 61A, and the plurality of second additional magnetic bodies 61B in the -Z direction.

[0176] The plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B have the same function as the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B described in the first embodiment. That is, the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B have the function of magnetizing the plurality of yokes 31 in the X direction or the -X direction when there is an external magnetic field in the Z direction.

[0177] In addition, similar to the multiple first additional magnetic bodies 32A and the multiple second additional magnetic bodies 32B in the first embodiment, the multiple first additional magnetic bodies 61A can also be respectively arranged near one end of the corresponding one of the magnetic yokes 31 in the X direction, and the multiple second additional magnetic bodies 61B can also be respectively arranged near one end of the corresponding one of the magnetic yokes 31 in the -X direction.

[0178] The other structures, functions and effects in this embodiment are the same as those in the first or second embodiment.

[0179] [Seventh Embodiment]

[0180] Next, refer to Fig.23 A seventh embodiment of the present invention will be described. Fig.23 It is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in the present embodiment.

[0181] Next, the difference between the soft magnetic structure 30 in this embodiment and the sixth embodiment is described. In this embodiment, the soft magnetic structure 30 includes a first additional magnetic body 62A and a second additional magnetic body 62B instead of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B in the sixth embodiment. The first additional magnetic body 62A and the second additional magnetic body 62B each have a rectangular parallelepiped shape extending in a direction parallel to the Y direction. In addition, as Fig.23 As shown in FIG. 1 , the first additional magnetic body 62A and the second additional magnetic body 62B are arranged so as to be aligned with the plurality of yokes 31 in a direction parallel to the X direction.

[0182] The first additional magnetic body 62A is disposed near one end of each of the plurality of yokes 31 in the X direction. In addition, the first additional magnetic body 62A is disposed forward of the plurality of yokes 31 in the Z direction.

[0183] The second additional magnetic body 62B is disposed near one end in the −X direction of each of the plurality of yokes 31. In addition, the second additional magnetic body 62B is disposed forward of the plurality of yokes 31 in the −Z direction.

[0184] The other positional relationships between the plurality of yokes 31 and the first and second additional magnetic bodies 62A and 62B are the same as the positional relationships between the yokes 31 and the first and second additional magnetic bodies 61A and 61B in the sixth embodiment.

[0185] In addition, Fig.23In the example shown, the first additional magnetic body 62A is arranged to overlap with all the yokes 31. However, the first additional magnetic body 62A may be arranged to overlap with at least one of the plurality of yokes 31. In this case, the soft magnetic structure 30 may further include a third additional magnetic body adjacent to the first additional magnetic body 62A in a direction parallel to the Y direction. The third additional magnetic body is arranged near one end in the X direction of at least one other yoke among the plurality of yokes 31. In addition, the third additional magnetic body may be arranged in front of the at least one other yoke in the Z direction or in front of the -Z direction.

[0186] Likewise, in Fig.23 In the example shown, the second additional magnetic body 62B is arranged to overlap with all the yokes 31. However, the second additional magnetic body 62B may be arranged to overlap with at least one of the plurality of yokes 31. In this case, the soft magnetic structure 30 may further include a fourth additional magnetic body adjacent to the second additional magnetic body 62B in a direction parallel to the Y direction. The fourth additional magnetic body is arranged near one end in the -X direction of at least one other yoke among the plurality of yokes 31. In addition, the fourth additional magnetic body may be arranged in front of the -Z direction or in front of the Z direction relative to the at least one other yoke.

[0187] The other structures, functions and effects in this embodiment are the same as those in the sixth embodiment.

[0188] [Eighth Embodiment]

[0189] Next, refer to Fig.24 An eighth embodiment of the present invention will be described. Fig.24 It is a side view showing the soft magnetic structure in this embodiment.

[0190] Next, the differences between the soft magnetic structure 30 in the present embodiment and the sixth embodiment are described. In the present embodiment, the soft magnetic structure 30 includes a plurality of first yokes 31A and a plurality of second yokes 31B instead of the plurality of yokes 31. The plurality of first yokes 31A are arranged in a direction parallel to the Y direction. The plurality of second yokes 31B are arranged in a direction parallel to the Y direction and are arranged in front of the plurality of first yokes 31A in the -X direction. In the present embodiment, in particular, the first yokes 31A and the second yokes 31B adjacent to each other in a direction parallel to the X direction are connected to each other. Fig.24 In FIG. 1 , the boundary between the first yoke 31A and the second yoke 31B is indicated by a dotted line.

[0191] In addition, in the present embodiment, the soft magnetic structure 30 includes at least one additional magnetic body 63 instead of the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B in the sixth embodiment. The at least one additional magnetic body 63 is arranged to be aligned with the plurality of first magnetic yokes 31A and the plurality of second magnetic yokes 31B in a direction parallel to the X direction. In the present embodiment, the at least one additional magnetic body 63 is arranged near the boundary between the first magnetic yoke 31A and the second magnetic yoke 31B.

[0192] In addition, at least one additional magnetic body 63 is arranged to be offset relative to the plurality of first magnetic yokes 31A and the plurality of second magnetic yokes 31B in a direction parallel to the Z direction. In the present embodiment, in particular, at least one additional magnetic body 63 is arranged in front of the plurality of first magnetic yokes 31A and the plurality of second magnetic yokes 31B in the Z direction. At least one additional magnetic body 63 may or may not be in contact with the plurality of first magnetic yokes 31A and the plurality of second magnetic yokes 31B.

[0193] The at least one additional magnetic body 63 may be a plurality of additional magnetic bodies 63, like the plurality of first additional magnetic bodies 61A or the plurality of second additional magnetic bodies 61B in the sixth embodiment. In this case, the plurality of additional magnetic bodies 63 are respectively arranged to overlap with a corresponding first yoke 31A and a corresponding second yoke 31B as viewed from the Z direction. In addition, the shape of each of the plurality of additional magnetic bodies 63 is the same as the shape of each of the plurality of first additional magnetic bodies 61A or the plurality of second additional magnetic bodies 61B.

[0194] Alternatively, at least one additional magnetic body 63 may be one additional magnetic body 63 like the first additional magnetic body 62A or the second additional magnetic body 62B in the seventh embodiment. In this case, when viewed from the Z direction, one additional magnetic body 63 is arranged to overlap with the plurality of first yokes 31A and the plurality of second yokes 31B. In addition, the shape of one additional magnetic body 63 is the same as the shape of the first additional magnetic body 62A or the second additional magnetic body 62B.

[0195] Here, the total number of the plurality of first yokes 31A and the number of the plurality of second yokes 31B is represented by N (N is an integer equal to or greater than 4). The number of at least one additional magnetic body 63 is less than 2N.

[0196] The positional relationship between the plurality of MR elements 20 and the plurality of first yokes 31A and the plurality of second yokes 31B is the same as the positional relationship between the plurality of MR elements 20 and the plurality of yokes 31 in the first embodiment except for the following point. In the present embodiment, the plurality of MR elements 20 are arranged so as not to be aligned with at least one additional magnetic body 63 in a direction parallel to the Z direction.

[0197] In the present embodiment, when the magnetic field of the detection object of the magnetic sensor 1 includes a component in the -Z direction but does not include a component in the Z direction, an external magnetic field in the -Z direction is applied to the plurality of first yokes 31A, the plurality of second yokes 31B, and the at least one additional magnetic body 63. In this case, a first path for the magnetic flux to pass in the direction from the at least one additional magnetic body 63 toward the plurality of first yokes 31A and a second path for the magnetic flux to pass in the direction from the at least one additional magnetic body 63 toward the plurality of second yokes 31B are formed. Thus, the plurality of first yokes 31A are magnetized in the X direction, and the plurality of second yokes 31B are magnetized in the -X direction. According to the present embodiment, by magnetizing each of the plurality of first yokes 31A and each of the plurality of second yokes 31B in directions opposite to each other, the magnetization of each of the plurality of first yokes 31A and the magnetization of each of the plurality of second yokes 31B can be stabilized. As a result, according to the present embodiment, changes in the characteristics of the magnetic sensor 1 caused by changes in the directions of the magnetization of each of the plurality of first yokes 31A and the plurality of second yokes 31B can be suppressed.

[0198] The other structures, functions and effects in this embodiment are the same as those in the sixth or seventh embodiment.

[0199] [Ninth Embodiment]

[0200] Next, refer to Fig.25 A ninth embodiment of the present invention will be described. Fig.25 It is a side view showing the soft magnetic structure in this embodiment.

[0201] Next, the soft magnetic structure 30 in this embodiment is different from the sixth embodiment. In this embodiment, the soft magnetic structure 30 includes a plurality of yokes 36 in the fourth embodiment instead of the plurality of yokes 31 in the sixth embodiment.

[0202] In the present embodiment, some of the plurality of first additional magnetic bodies 61A are arranged to overlap one end in the X direction and one end in the -X direction of one of two yokes 36 adjacent in a direction parallel to the X direction when viewed in the Z direction. The remaining plurality of first additional magnetic bodies 61A are arranged to overlap one end in the X direction or one end in the -X direction of one yoke 36 when viewed in the Z direction.

[0203] In the present embodiment, the plurality of second additional magnetic bodies 61B are arranged so as to overlap one end in the X direction and the other end in the −X direction of two yokes 36 adjacent to each other in a direction parallel to the X direction when viewed in the Z direction.

[0204] Here, the number of the plurality of yokes 36 is represented by N (N is an integer equal to or greater than 4). The total number of the plurality of first additional magnetic bodies 61A and the number of the plurality of second additional magnetic bodies 61B is smaller than 2N.

[0205] The other structures, functions and effects in this embodiment are the same as those in the fourth or sixth embodiment.

[0206] [Tenth embodiment]

[0207] Next, refer to Fig.26 A tenth embodiment of the present invention will be described. Fig.26 It is a plan view showing a plurality of yokes and a plurality of additional magnetic bodies in the present embodiment.

[0208] Next, the difference between the soft magnetic structure 30 in this embodiment and the sixth embodiment is described. In this embodiment, the soft magnetic structure 30 includes a plurality of first additional magnetic bodies 64A and a plurality of second additional magnetic bodies 64B instead of the plurality of first additional magnetic bodies 61A and a plurality of second additional magnetic bodies 61B in the sixth embodiment. Fig.26 As shown, each of the plurality of first additional magnetic bodies 64A and each of the plurality of second additional magnetic bodies 64B are arranged to be aligned with a corresponding one of the yokes 31 in a direction parallel to the X direction.

[0209] The plurality of first additional magnetic bodies 64A are respectively arranged near one end of the corresponding yoke 31 in the X direction. Fig.26 As shown, the plurality of first additional magnetic bodies 64A are respectively arranged to be offset in a direction parallel to the Y direction relative to a corresponding one of the yokes 31. In the present embodiment, in particular, the plurality of first additional magnetic bodies 64A are respectively arranged forward in the Y direction relative to one end in the X direction of one of two yokes 31 adjacent in the Y direction.

[0210] The plurality of second additional magnetic bodies 64B are respectively arranged near one end of the corresponding yoke 31 in the -X direction. Fig.26 As shown, the plurality of second additional magnetic bodies 64B are respectively arranged to be offset in a direction parallel to the Y direction relative to a corresponding one of the yokes 31. In the present embodiment, in particular, the plurality of second additional magnetic bodies 64B are respectively arranged in front of the -Y direction with respect to one end in the -X direction of one of two yokes 31 adjacent in the Y direction.

[0211] The plurality of first additional magnetic bodies 64A and the plurality of second additional magnetic bodies 64B are arranged so as to satisfy the following first and second requirements. The first requirement is that, when focusing on the yoke 31 in which the first additional magnetic body 64A is arranged in front of one end in the Y direction, the second additional magnetic body 64B is arranged in front of one end in the -X direction of the yoke 31 in the -Y direction. The second requirement is that, when focusing on the yoke 31 in which the first additional magnetic body 64A is not arranged in front of one end in the Y direction, the first additional magnetic body 64A is arranged in front of one end in the X direction of the yoke in the -Y direction, and the second additional magnetic body 64B is arranged in front of one end in the -X direction of the yoke in the Y direction.

[0212] Here, the yoke 31 focused on in the first requirement is referred to as a first yoke, and the yoke 31 focused on in the second requirement is referred to as a second yoke. The plurality of yokes 31 are arranged so that the first yokes and the second yokes are alternately arranged in a direction parallel to the Y direction.

[0213] Here, the number of the plurality of yokes 31 is represented by N (N is an integer equal to or greater than 2). The total number of the plurality of first additional magnetic bodies 64A and the number of the plurality of second additional magnetic bodies 64B is smaller than 2N.

[0214] In this embodiment, as in the third embodiment, in addition to the magnetic field of the detection object, an external magnetic field in a direction parallel to the Y direction is always applied to the magnetic sensor 1. Hereinafter, the case where the external magnetic field in the Y direction is applied to the magnetic sensor 1 is described as an example. In this case, the external magnetic field in the Y direction is applied to the plurality of yokes 31, the plurality of first additional magnetic bodies 64A, and the plurality of second additional magnetic bodies 64B.

[0215] The first additional magnetic body 64A is arranged in front of one end of the first yoke in the X direction in the Y direction, and the second additional magnetic body 64B is arranged in front of one end of the first yoke in the -X direction in the -Y direction. When an external magnetic field in the Y direction is applied to the first yoke, the first additional magnetic body 64A, and the second additional magnetic body 64B, a path is formed for the magnetic flux to pass in a direction from the second additional magnetic body 64B to the first additional magnetic body 64A via the first yoke, and the first yoke is magnetized in the X direction, which is the direction in which the magnetic flux passes.

[0216] The first additional magnetic body 64A is arranged in front of one end of the second yoke in the X direction in the -Y direction, and the second additional magnetic body 64B is arranged in front of one end of the second yoke in the -X direction in the Y direction. When an external magnetic field in the Y direction is applied to the second yoke, the first additional magnetic body 64A, and the second additional magnetic body 64B, a path is formed for the magnetic flux to pass in a direction from the first additional magnetic body 64A to the second additional magnetic body 64B via the second yoke, and the second yoke is magnetized in the -X direction, which is the direction in which the magnetic flux passes.

[0217] In this embodiment, similarly to the third embodiment, a plurality of yokes 31 are arranged so that the yokes 31 magnetized in the X direction and the yokes 31 magnetized in the -X direction are alternately arranged in a direction parallel to the Y direction. Thus, according to this embodiment, the magnetization of the yokes 31 can be stabilized for the same reason as described in the third embodiment. As a result, according to this embodiment, changes in the characteristics of the magnetic sensor 1 caused by changes in the direction of the magnetization of the yokes 31 can be suppressed.

[0218] The other structures, functions and effects in this embodiment are the same as those in the third or sixth embodiment.

[0219] [Eleventh Embodiment]

[0220] Next, refer to Fig. 27 An eleventh embodiment of the present invention will be described. Fig. 27 It is a side view showing the soft magnetic structure in this embodiment.

[0221] Next, the difference between the soft magnetic structure 30 in the present embodiment and the first embodiment is described. In the present embodiment, the soft magnetic structure 30 includes a first additional magnetic body 71A and a second additional magnetic body 71B instead of the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the first embodiment. The first additional magnetic body 71A and the second additional magnetic body 71B each have a rectangular parallelepiped shape, for example. In addition, as Fig. 27 As shown, the first additional magnetic body 71A and the second additional magnetic body 71B are arranged so as to be aligned with the plurality of yokes 31 in a direction parallel to the X direction.

[0222] The first additional magnetic body 71A is arranged near one end of the plurality of yokes 31 in the X direction. In addition, the first additional magnetic body 71A is arranged in front of the plurality of yokes 31 in the Z direction. In this embodiment, in particular, the first additional magnetic body 71A is connected to one end of the shield 33 in the X direction. Fig. 27 In FIG. 1 , a boundary between the shield 33 and the first additional magnetic body 71A is indicated by a dotted line. The shield 33 and the first additional magnetic body 71A may be made of the same magnetic material.

[0223] The second additional magnetic body 71B is arranged near one end of each of the plurality of yokes 31 in the -X direction. In addition, the second additional magnetic body 71B is arranged in front of the plurality of yokes 31 in the -Z direction. In this embodiment, in particular, the second additional magnetic body 71B is connected to one end of the shield 34 in the -X direction. Fig. 27 In FIG. 1 , the boundary between the shield 34 and the second additional magnetic body 71B is indicated by a dotted line. The shield 34 and the second additional magnetic body 71B may be made of the same magnetic material.

[0224] The first additional magnetic body 71A and the second additional magnetic body 71B are arranged so that at least a portion of each of the plurality of yokes is sandwiched between the first additional magnetic body 71A and the second additional magnetic body 71B. In addition, the first magnetic body composed of the shield 33 and the first additional magnetic body 71A is offset in the X direction relative to the second magnetic body composed of the shield 34 and the second additional magnetic body 71B.

[0225] In this embodiment, if an external magnetic field in the Z direction is applied to the multiple magnetic yokes 31, the first additional magnetic body 71A and the second additional magnetic body 71B, a path is formed for the magnetic flux to pass from the second additional magnetic body 71B through the multiple magnetic yokes 31 toward the first additional magnetic body 71A, and the multiple magnetic yokes 31 are respectively magnetized in the direction for the magnetic flux to pass, that is, the X direction.

[0226] The other structures, functions and effects in this embodiment are the same as those in the first embodiment.

[0227] [Twelfth Embodiment]

[0228] Next, refer to Fig.28 A twelfth embodiment of the present invention will be described. Fig.28 It is a side view showing the soft magnetic structure in this embodiment.

[0229] The following describes the differences between the soft magnetic structure 30 in this embodiment and the first embodiment. In this embodiment, the soft magnetic structure 30 includes the first additional magnetic body 71A and the second additional magnetic body 71B in the eleventh embodiment in addition to the plurality of first additional magnetic bodies 32A and the plurality of second additional magnetic bodies 32B in the first embodiment.

[0230] The other structures, functions and effects in this embodiment are the same as those in the first or eleventh embodiment.

[0231] [Thirteenth Embodiment]

[0232] Next, refer to Fig.29 A thirteenth embodiment of the present invention will be described. Fig.29 It is a side view showing the soft magnetic structure in this embodiment.

[0233] Next, the soft magnetic structure 30 in this embodiment is different from the sixth embodiment. In this embodiment, the soft magnetic structure 30 includes the first additional magnetic body 71A and the second additional magnetic body 71B in the eleventh embodiment in addition to the plurality of first additional magnetic bodies 61A and the plurality of second additional magnetic bodies 61B in the sixth embodiment.

[0234] The other structures, functions and effects in this embodiment are the same as those in the sixth or eleventh embodiment.

[0235] In addition, the present invention is not limited to the above-mentioned embodiments, and various modifications are possible. For example, the form of the soft magnetic structure 30 is not limited to the examples shown in the embodiments, and any combination is possible as long as the requirements of the claims are met.

[0236] As described above, the magnetic sensor of the present invention comprises: a soft magnetic structure including at least one magnetic yoke having a shape long in one direction; and a magnetic detection element adjacent to at least one magnetic yoke in the short side direction of at least one magnetic yoke and configured to detect a magnetic field generated from at least one magnetic yoke. The soft magnetic structure further comprises at least one additional magnetic body, the at least one additional magnetic body being arranged to be aligned with at least one magnetic yoke in the long side direction of at least one magnetic yoke, and being arranged to be offset relative to at least one magnetic yoke in an orthogonal direction orthogonal to the long side direction.

[0237] In the magnetic sensor of the present invention, at least one additional magnetic body may include a first additional magnetic body and a second additional magnetic body, wherein the first additional magnetic body is configured to be offset relative to at least one magnetic yoke in a first direction parallel to an orthogonal direction, and the second additional magnetic body is configured to be offset relative to at least one magnetic yoke in a second direction opposite to the first direction. That is, the at least one additional magnetic body may also be at least two additional magnetic bodies.

[0238] Furthermore, in the magnetic sensor of the present invention, at least one additional magnetic body may be connected to at least one yoke.

[0239] Furthermore, in the magnetic sensor of the present invention, at least one additional magnetic body may be arranged at a distance from at least one yoke.

[0240] In the magnetic sensor of the present invention, the soft magnetic structure may further include a shield, and the shield is arranged to be offset in an orthogonal direction relative to at least one yoke. The at least one additional magnetic body may be connected to the shield.

[0241] In addition, in the magnetic sensor of the present invention, at least one magnetic yoke may include a plurality of magnetic yokes. That is, at least one magnetic yoke may include a plurality of magnetic yokes. At least one additional magnetic body may include a plurality of additional magnetic bodies. That is, at least one additional magnetic body may include a plurality of additional magnetic bodies.

[0242] In the case where at least one yoke is a plurality of yokes and at least one additional magnetic body is a plurality of additional magnetic bodies, the plurality of yokes may include a first yoke and a second yoke, and the first yoke and the second yoke are arranged to be adjacent to each other in the short side direction. The plurality of additional magnetic bodies may also include: a first additional magnetic body, which is arranged to be arranged with the first yoke in the long side direction and offset relative to the first yoke in a first direction parallel to the orthogonal direction; a second additional magnetic body, which is arranged to sandwich at least a portion of the first yoke between the first additional magnetic body and is arranged to be offset relative to the first yoke in a second direction opposite to the first direction; a third additional magnetic body, which is arranged to be arranged with the second yoke in the long side direction and offset relative to the second yoke in the first direction; and a fourth additional magnetic body, which is arranged to sandwich at least a portion of the second yoke between the third additional magnetic body and is arranged to be offset relative to the second yoke in the second direction. The first additional magnetic body and the fourth additional magnetic body may also be adjacent in the short side direction. The second additional magnetic body and the third additional magnetic body may also be adjacent in the short side direction.

[0243] Furthermore, when at least one yoke is a plurality of yokes and at least one additional magnetic body is a plurality of additional magnetic bodies, when N is an integer greater than or equal to 2, the number of the plurality of yokes may be N and the number of the plurality of additional magnetic bodies may be 2N or less.

[0244] In addition, when at least one yoke is a plurality of yokes and at least one additional magnetic body is a plurality of additional magnetic bodies, the soft magnetic structure may further include a shield, and the shield is configured to be offset relative to the at least one yoke in an orthogonal direction. The plurality of additional magnetic bodies may also include a first additional magnetic body connected to the shield, and a second additional magnetic body not connected to the shield.

[0245] In the magnetic sensor of the present invention, at least one yoke may include two yokes adjacent to each other in the longitudinal direction. In other words, at least one yoke may include at least two yokes.

[0246] Furthermore, the magnetic sensor of the present invention may further include a magnetic field generator having magnetization in one direction parallel to the orthogonal direction and configured to generate a magnetic field to be applied to at least one yoke.

[0247] The position detection device of the present invention comprises: the magnetic sensor of the present invention; and a magnetic field generator having magnetization in one direction parallel to the orthogonal direction and configured to generate a magnetic field applied to at least one magnetic yoke. The magnetic sensor and the magnetic field generator are configured so that their relative positions change in the orthogonal direction, and the strength of the magnetic field changes with the change in the relative position.

[0248] The lens module of the present invention comprises: a lens configured to be positionally variable; a magnetic sensor of the present invention; and a magnetic field generator having magnetization in one direction parallel to an orthogonal direction and configured to generate a magnetic field applied to at least one magnetic yoke. The magnetic sensor and the magnetic field generator are configured so that the intensity of the magnetic field changes with the change of the position of the lens.

[0249] Of course, various modes and variations of the present invention can be implemented based on the above description. Therefore, within the scope of the equivalents of the claims, the present invention can be implemented in modes other than the above-described best mode.

Claims

1. A magnetic sensor, characterized in that: have: A soft magnetic structure including at least one yoke having a shape long in one direction; and a magnetic detection element adjacent to the at least one yoke in the short side direction of the at least one yoke and configured to detect a magnetic field generated from the at least one yoke, The soft magnetic structure also includes at least one additional magnetic body, which is configured to be arranged with the at least one magnetic yoke in the long side direction of the at least one magnetic yoke and is configured to be staggered relative to the at least one magnetic yoke in an orthogonal direction orthogonal to the long side direction.

2. The magnetic sensor according to claim 1, characterized in that The at least one additional magnetic body includes a first additional magnetic body and a second additional magnetic body, wherein the first additional magnetic body is configured to be offset relative to the at least one magnetic yoke in a first direction which is a direction parallel to the orthogonal direction, and the second additional magnetic body is configured to be offset relative to the at least one magnetic yoke in a second direction opposite to the first direction.

3. The magnetic sensor according to claim 1, characterized in that The at least one additional magnetic body is connected to the at least one yoke.

4. The magnetic sensor according to claim 1, characterized in that The at least one additional magnetic body is arranged at a distance from the at least one yoke.

5. The magnetic sensor according to claim 1, characterized in that The soft magnetic structure further comprises a shield, wherein the shield is configured to be offset relative to the at least one yoke in the orthogonal direction, The at least one additional magnetic body is connected to the shield.

6. The magnetic sensor according to claim 1, characterized in that The at least one yoke comprises a plurality of yokes, The at least one additional magnetic body includes a plurality of additional magnetic bodies.

7. The magnetic sensor according to claim 6, characterized in that: The plurality of yokes include a first yoke and a second yoke, wherein the first yoke and the second yoke are arranged adjacent to each other in the short side direction. The plurality of additional magnetic bodies include: a first additional magnetic body arranged to be aligned with the first yoke in the longitudinal direction and offset from the first yoke in a first direction which is a direction parallel to the orthogonal direction; a second additional magnetic body, which is arranged to sandwich at least a portion of the first yoke between the first additional magnetic body and is arranged to be offset relative to the first yoke in a second direction opposite to the first direction; a third additional magnetic body arranged to be aligned with the second yoke in the longitudinal direction and staggered relative to the second yoke in the first direction; as well as a fourth additional magnetic body, which is arranged to sandwich at least a portion of the second yoke between the fourth additional magnetic body and the third additional magnetic body, and is arranged to be offset relative to the second yoke in the second direction, The first additional magnetic body and the fourth additional magnetic body are adjacent to each other in the short side direction. The second additional magnetic body and the third additional magnetic body are adjacent to each other in the short-side direction.

8. The magnetic sensor according to claim 6, characterized in that When N is an integer greater than or equal to 2, the number of the plurality of yokes is N, and the number of the plurality of additional magnetic bodies is 2N or less.

9. The magnetic sensor according to claim 6, characterized in that: The soft magnetic structure further comprises a shield, wherein the shield is configured to be offset relative to the at least one yoke in the orthogonal direction, The plurality of additional magnetic bodies include a first additional magnetic body connected to the shield and a second additional magnetic body not connected to the shield.

10. The magnetic sensor according to claim 1, characterized in that The at least one yoke includes two yokes adjacent to each other in the long side direction.

11. The magnetic sensor according to claim 1, characterized in that: The magnetic field generator is further provided. The magnetic field generator has magnetization in one direction parallel to the orthogonal direction and is configured to generate a magnetic field to be applied to the at least one yoke.

12. A position detection device, characterized in that: have: The magnetic sensor according to any one of claims 1 to 10; and a magnetic field generator having magnetization in a direction parallel to the orthogonal direction and configured to generate a magnetic field applied to the at least one yoke, The magnetic sensor and the magnetic field generator are configured so that their relative positions change in the orthogonal direction, and the intensity of the magnetic field changes in accordance with the change in the relative position.

13. A lens module, characterized in that: have: A lens configured to be positionally variable; The magnetic sensor according to any one of claims 1 to 10; and a magnetic field generator having magnetization in a direction parallel to the orthogonal direction and configured to generate a magnetic field applied to the at least one yoke, The magnetic sensor and the magnetic field generator are configured so that the intensity of the magnetic field changes as the position of the lens changes.

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