Power adjustment method and power control system of radio frequency neutralizer

Abstract

The present application relates to a power control method of a radio frequency neutralizer and a power control system of a radio frequency neutralizer, comprising: real-time detection of the emitter current and emitter voltage of the radio frequency neutralizer; judging whether the emitter current is within a set current value range, and if so, judging whether the emitter voltage is greater than a voltage threshold; if the emitter voltage is not greater than the voltage threshold, reducing the radio frequency power of the radio frequency neutralizer by a first adjustment amount; after a first waiting time, judging whether the radio frequency power is in a stable state, and when the radio frequency power reaches a stable state, continuing to judge whether the emitter current is within a set current value range; if the emitter current is lower than the set current value range, stopping reducing the radio frequency power adjustment; the technical solution ensures the stability of the radio frequency neutralizer, prolongs the service life of the radio frequency neutralizer, the emitter current always remains stable, prolongs the service life of the radio frequency neutralizer, and makes maintenance more convenient and intelligent.

Description

Technical Field

[0001] The present application relates to the technical field of ion source equipment, and in particular to a power adjustment method of a radio frequency neutralizer and a power control system of a radio frequency neutralizer. Background Art

[0002] In ion source equipment, a neutralizer is needed to provide neutralizing electrons, and the RF neutralizer is currently the best neutralizer due to its stable characteristics. When the RF neutralizer is used, the emitter current needs to match the RF power. When the emission current is within a range, the RF power needs to be adjusted to a power value to ensure stability. Usually, when the emission current is within a certain range, the same RF power will be used; for example, when the emission current is in the range of 200-500ma, the RF power is 75W, and when the emission current is in the range of 501mA-1000mA, the RF power is 95W, etc.

[0003] However, after the RF neutralizer has been used for a period of time, it will be contaminated and other phenomena will occur, causing the RF power matched by the RF neutralizer to change. Therefore, the RF power set at the beginning will be insufficiently matched, resulting in the current failing to reach the set value. At this time, the RF power needs to be reset to a new RF power value. Conventional methods mainly rely on empirical data to adjust the operation, and the adjustment is poor in real time and accuracy. In addition, a large deviation in the adjusted power value will accelerate the contamination of the neutralizer, easily leading to unstable output of the RF neutralizer and affecting the neutralization effect. Summary of the invention

[0004] Based on this, it is necessary to provide a power adjustment method, device and radio frequency neutralizer equipment for a radio frequency neutralizer to improve the working stability of the radio frequency neutralizer in response to one of the above-mentioned technical defects.

[0005] A power control method for a radio frequency neutralizer, comprising:

[0006] Real-time detection of emitter current and emitter voltage of RF neutralizer;

[0007] Determine whether the emitter current is within the set current value range, and if so, determine whether the emitter voltage is greater than a voltage threshold;

[0008] If the emitter voltage is not greater than the voltage threshold, reducing the radio frequency power of the radio frequency neutralizer by a first adjustment amount;

[0009] After the first waiting time has passed, determining whether the radio frequency power is in a stable state, and when the radio frequency power reaches the stable state, continuing to determine whether the emitter current is within a set current value range;

[0010] If the emitter current is lower than the set current value range, stop reducing the RF power adjustment.

[0011] In one embodiment, the power control method of the RF neutralizer further includes: if the emitter voltage is greater than a voltage threshold, stopping reducing the RF power adjustment.

[0012] In one embodiment, when the radio frequency power of the radio frequency neutralizer is reduced by the first adjustment amount, the method further includes: setting a flag to indicate that the radio frequency neutralizer currently enters a power reduction phase.

[0013] In one embodiment, the power control method of the radio frequency neutralizer further includes:

[0014] When the emitter current of the RF neutralizer drops below the set current value, the RF power is increased to make the emitter current and the emitter voltage in a stable state.

[0015] In one embodiment, when the emitter current of the RF neutralizer drops below a set current value, increasing the RF power to make the emitter current and the emitter voltage in a stable state includes:

[0016] Determine whether the RF power does not exceed the maximum power value corresponding to the set current value of the emitter current; if so, increase the RF power by a second adjustment amount; otherwise, stop increasing the RF power adjustment;

[0017] Determine whether the emitter current is within the range of the set current value; if so, stop increasing the RF power adjustment, otherwise return to the step of determining whether the RF power is a maximum power value corresponding to the set current value of the emitter current that does not exceed the set current value.

[0018] In one embodiment, the power control method of the RF neutralizer further includes: if the emitter voltage rises above the voltage threshold, stopping increasing the RF power adjustment; otherwise, returning to the step of determining whether the RF power is a maximum power value corresponding to a set current value that does not exceed the emitter current.

[0019] In one embodiment, the first adjustment amount is 1W, and the second adjustment amount is 3W.

[0020] In one embodiment, the power control method of the RF neutralizer further includes: starting the RF neutralizer, controlling the RF power of the RF neutralizer to reach a set power value and the emitter current to reach a set current value.

[0021] In one embodiment, controlling the radio frequency power of the radio frequency neutralizer to reach a set power value and the emitter current to reach a set current value includes:

[0022] Start the sustaining electrode power supply, emitter power supply and RF power supply of the RF neutralizer; set the RF power setting power value of the RF neutralizer according to the range of the emitter current, and wait for the RF power of the RF neutralizer to reach the set power value and the emitter current to reach the set current value.

[0023] A power control system for a radio frequency neutralizer, comprising: an industrial computer, a sustaining electrode power supply, an emitter power supply and a radio frequency power supply respectively connected to the industrial computer; wherein the radio frequency neutralizer is connected to the sustaining electrode power supply, the emitter power supply and the radio frequency power supply;

[0024] The industrial computer is configured to execute the steps of the power control method of the radio frequency neutralizer.

[0025] The technical solution of this application has the following beneficial effects:

[0026] After the RF neutralizer starts and becomes stable, the RF power is automatically adjusted to keep the emitter current at a stable value with the minimum RF power; further, when the emitter current of the RF neutralizer drops to a range below the set current value, the RF power is increased to keep the emitter current and emitter voltage in a stable state; when the RF neutralizer is polluted, the RF power of the RF neutralizer can also be adaptively matched to the change of the emitter current, ensuring the stability of the RF neutralizer and extending the service life of the RF neutralizer. The emitter current always remains stable, increasing the service life of the RF neutralizer, and making maintenance more convenient and intelligent. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a flow chart of a power control method of a radio frequency neutralizer according to an embodiment;

[0028] Figure 2 is a flow chart of a power control method of a radio frequency neutralizer according to another embodiment;

[0029] Figure 3 The figure is a schematic diagram of the structure of a radio frequency neutralizer according to an embodiment. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0031] The term "comprising" and any other variations of the embodiments of the present application are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device comprising a series of steps is not limited to the listed steps or modules, but may optionally include steps or modules not listed, or may optionally include other steps or modules inherent to the process, method, product, or device.

[0032] The technical solution of the present application can enter the automatic RF power adjustment process after the RF neutralizer is ignited and preheated, and the RF power can be automatically adjusted to control the RF power, so as to maintain the emitter current at a stable value with the minimum RF power; Figure 1 , Figure 1 The figure is a flow chart of a power control method of a radio frequency neutralizer according to an embodiment; the process of automatically adjusting radio frequency power of the method mainly includes:

[0033] Step (1), real-time detection of the emitter current and emitter voltage of the RF neutralizer; specifically, after the RF neutralizer is ignited and preheated, the emitter current and emitter voltage are detected.

[0034] Step (2), determine whether the emitter current is within the range of the set current value. If so, execute step (3), otherwise go to step (6); specifically, detect whether the emitter current is near the set current value.

[0035] Step (3), determining whether the emitter voltage is greater than a voltage threshold; specifically, continuously determining the emitter voltage to detect whether it is greater than the voltage threshold.

[0036] Step (4), if the emitter voltage is not greater than the voltage threshold, reducing the RF power of the RF neutralizer by a first adjustment amount.

[0037] Exemplarily, when the RF power of the RF neutralizer is reduced by the first adjustment amount, a flag is set to indicate that the RF neutralizer currently enters a power reduction phase, and the first adjustment amount may be 1W.

[0038] Step (5), after the first waiting time has passed, the RF power reaches a stable state, and the process returns to step (2); specifically, after reducing the RF power adjustment, the process may wait for 3 seconds, and after the RF power is stable, the emitter current and the emitter voltage are determined.

[0039] Step (6): if the emitter current is lower than the set current value range, stop reducing the RF power adjustment; further, if the emitter voltage is greater than the voltage threshold, stop reducing the RF power adjustment.

[0040] Exemplarily, if the emitter voltage is greater than the voltage threshold, the RF power reduction adjustment is stopped. During the RF power reduction adjustment process, when the emitter current of the RF neutralizer drops to a range below the set current value, the RF power is increased to make the emitter current and the emitter voltage in a stable state.

[0041] As in the technical solution of the above-mentioned embodiment, after the RF neutralizer starts to stabilize, if the emitter current is near the set value, when the emitter voltage is less than the threshold value, the RF power is continuously reduced so that the emitter voltage and the emitter current are always in the best state, and the RF power is automatically adjusted to keep the emitter current at a stable value with the minimum RF power; when the RF neutralizer is polluted, the RF power of the RF neutralizer can also be adaptively matched to the change of the emitter current, thereby ensuring the stability of the RF neutralizer and extending the service life of the RF neutralizer. The emitter current always remains stable, which increases the service life of the RF neutralizer and makes maintenance more convenient and intelligent.

[0042] In order to make the technical solution of the present application more clear, more embodiments are described below.

[0043] In one embodiment, the power control method of the radio frequency neutralizer of the present application, before entering the automatic radio frequency power adjustment process, further includes:

[0044] The RF neutralizer is started, and the RF power of the RF neutralizer is controlled to reach a set power value and the emitter current to reach a set current value.

[0045] Specifically, when the RF power of the RF neutralizer reaches the set power value and the emitter current reaches the set current value, first start the maintaining pole power supply, emitter power supply and RF power supply of the RF neutralizer; set the RF power set power value of the RF neutralizer according to the range of the emitter current, and wait for the RF power of the RF neutralizer to reach the set power value and the emitter current to reach the set current value.

[0046] In one embodiment, after entering the power reduction stage, if the emitter voltage exceeds the threshold, the RF power is increased and no longer reduced; further, when the emitter voltage exceeds the voltage threshold, the RF power is continuously increased until the emitter voltage is within the voltage threshold, and after the emitter current of the RF neutralizer rises to the set value of the current interval, the RF power is kept from rising.

[0047] Exemplarily, if the emitter voltage rises above the voltage threshold, stop increasing the RF power adjustment, otherwise return to the step of determining whether the RF power is the maximum power value corresponding to the set current value of the emitter current. At the same time, determine whether the RF power is the maximum power value corresponding to the set current value of the emitter current; if so, increase the RF power by a second adjustment amount; otherwise stop increasing the RF power adjustment; determine whether the emitter current is within the range of the set current value; if so, stop increasing the RF power adjustment, otherwise return to the step of determining whether the RF power is the maximum power value corresponding to the set current value of the emitter current.

[0048] As in the scheme of the above-mentioned embodiment, after entering the power reduction stage, when the emitter current of the RF neutralizer drops to a range below the set current value, the RF power is increased to make the emitter current and the emitter voltage in a stable state; when pollution or the like occurs in the RF neutralizer, the RF power of the RF neutralizer can also be made to adaptively match the change of the emitter current, thereby ensuring the stability of the RF neutralizer and extending the service life of the RF neutralizer. The emitter current always remains stable, thereby increasing the service life of the RF neutralizer and making maintenance more convenient and intelligent.

[0049] like Figure 2 As shown, Figure 2 1 is a flow chart of a power control method of a radio frequency neutralizer according to another embodiment, which mainly includes the following steps:

[0050] Step S101, starting the radio frequency neutralizer, controlling the radio frequency power of the radio frequency neutralizer to reach a set power value and the emitter current to reach a set current value.

[0051] Step S102, detecting the emitter current and emitter voltage of the radio frequency neutralizer in real time.

[0052] Step S103, determining whether the emitter current is within a set current value range, if so, executing step S104, otherwise, proceeding to step S110.

[0053] Step S104, determine whether the emitter voltage is greater than the voltage threshold, if so, go to step S110.

[0054] Step S105: if the emitter voltage is not greater than the voltage threshold, the radio frequency power of the radio frequency neutralizer is reduced by a first adjustment amount, and a flag is set to indicate that the radio frequency neutralizer currently enters a power reduction phase.

[0055] Step S106, after the first waiting time has passed, determine whether the radio frequency power is in a stable state, and when the radio frequency power reaches a stable state, return to execute step S103.

[0056] Step S107, determining whether the RF power does not exceed the maximum power value corresponding to the set current value of the emitter current; if so, executing S108, otherwise, turning to executing step S110.

[0057] Step S108, increasing the RF power by a second adjustment amount; illustratively, the second adjustment amount is 3W.

[0058] Step S109, determining whether the emitter current is within the range of the set current value; if the emitter current is within the range of the set current value, executing step S110, otherwise returning to executing step S107.

[0059] Step S110, stop adjusting the RF power.

[0060] As in the technical solution of the above-mentioned embodiment, the RF power can be automatically adjusted to match the emitter current, and the emitter current can be kept at a stable value with the minimum RF power. Even when the RF neutralizer is polluted, the RF power of the RF neutralizer can be adaptively matched to the change of the emitter current, thereby ensuring the stability of the RF neutralizer and extending the service life of the RF neutralizer. The emitter current always remains stable, which increases the service life of the RF neutralizer and makes maintenance more convenient and intelligent.

[0061] An embodiment of a radio frequency neutralizer is described below.

[0062] refer to Figure 3 As shown, Figure 3 The invention is a schematic diagram of a power control system structure of a radio frequency neutralizer according to an embodiment, comprising: an industrial computer, a sustaining electrode power supply, an emitter electrode power supply and a radio frequency power supply respectively connected to the industrial computer; wherein the radio frequency power supply is connected to a matching network, and the radio frequency neutralizer is connected to the sustaining electrode power supply, the emitter electrode power supply and the radio frequency power supply. The industrial computer is configured to execute the steps of the power control method of the radio frequency neutralizer according to any of the above embodiments, so as to control the radio frequency power.

[0063] For example, the RF neutralizer in the above-mentioned embodiment, after the RF neutralizer starts and becomes stable, the RF power is automatically adjusted to keep the emitter current at a stable value with the minimum RF power; when the emitter current of the RF neutralizer drops to a range below the set current value, the RF power is increased to make the emitter current and the emitter voltage in a stable state; when the RF neutralizer is polluted, the RF power of the RF neutralizer can also be adaptively matched to the change of the emitter current, thereby ensuring the stability of the RF neutralizer and extending the service life of the RF neutralizer. The emitter current always remains stable, thereby increasing the service life of the RF neutralizer and making maintenance more convenient and intelligent.

[0064] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A power control method for a radio frequency neutralizer, characterized in that: include: Real-time detection of emitter current and emitter voltage of RF neutralizer; Determine whether the emitter current is within the set current value range, and if so, determine whether the emitter voltage is greater than a voltage threshold; If the emitter voltage is not greater than the voltage threshold, reducing the radio frequency power of the radio frequency neutralizer by a first adjustment amount; After the first waiting time has passed, determining whether the radio frequency power is in a stable state, and when the radio frequency power reaches the stable state, continuing to determine whether the emitter current is within a set current value range; If the emitter current is lower than the set current value range, stop reducing the RF power adjustment; When the emitter current of the RF neutralizer drops below the set current value, the RF power is increased to make the emitter current and emitter voltage stable; specifically including: Determine whether the RF power does not exceed the maximum power value corresponding to the set current value of the emitter current; if so, increase the RF power by a second adjustment amount; otherwise, stop increasing the RF power adjustment; Determine whether the emitter current is within the range of the set current value; if so, stop increasing the RF power adjustment, otherwise return to the step of determining whether the RF power does not exceed the maximum power value corresponding to the set current value of the emitter current; If the emitter voltage rises above the voltage threshold, the RF power adjustment is stopped, otherwise the process returns to the step of determining whether the RF power does not exceed the maximum power value corresponding to the set current value of the emitter current.

2. The power control method of the radio frequency neutralizer according to claim 1, characterized in that: Also includes: If the emitter voltage is greater than the voltage threshold, the RF power reduction adjustment is stopped.

3. The power control method of the radio frequency neutralizer according to claim 2, characterized in that: When the radio frequency power of the radio frequency neutralizer is reduced by the first adjustment amount, the method further includes: setting a flag to indicate that the radio frequency neutralizer currently enters a power reduction phase.

4. The power control method of the radio frequency neutralizer according to claim 1, characterized in that: The first adjustment amount is 1W, and the second adjustment amount is 3W.

5. The power control method of the radio frequency neutralizer according to any one of claims 1 to 4, characterized in that: Also includes: The RF neutralizer is started, and the RF power of the RF neutralizer is controlled to reach a set power value and the emitter current to reach a set current value.

6. The power control method of the radio frequency neutralizer according to claim 5, characterized in that: Control the RF power of the RF neutralizer to reach the set power value and the emitter current to reach the set current value, including: Start the sustaining electrode power supply, emitter power supply and RF power supply of the RF neutralizer; set the RF power setting power value of the RF neutralizer according to the range of the emitter current, and wait for the RF power of the RF neutralizer to reach the set power value and the emitter current to reach the set current value.

7. A power control system for a radio frequency neutralizer, characterized in that: include: An industrial computer, a sustaining electrode power supply, an emitter power supply and a radio frequency power supply respectively connected to the industrial computer; wherein the radio frequency neutralizer is connected to the sustaining electrode power supply, the emitter power supply and the radio frequency power supply; The industrial computer is configured to execute the steps of the power control method of the radio frequency neutralizer according to any one of claims 1-6.

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