Alignment device and alignment method

Abstract

The present application belongs to the technical field of semiconductor equipment manufacturing, and provides an alignment device and an alignment method, wherein the alignment device comprises a first motion platform, a second motion platform and a center of mass adjustment component, wherein the first motion platform comprises a first base, a first carrying platform and a first motion module, and the second motion platform comprises a second base, a second carrying platform and a second motion module, wherein the first motion module can drive the first carrying platform to move on the first base, and the second motion module can drive the second carrying platform to move on the second base, and when the first carrying platform moves to the extreme position, the second carrying platform can perform a supplementary compensatory movement, thereby increasing the adjustable stroke during the alignment process and realizing large stroke adjustment, and the center of mass adjustment component comprises at least two center of mass adjustment parts symmetrically connected to the top of the first base, which are used to adjust the center of mass of the alignment device, thereby increasing the center of mass stability and alignment accuracy of the alignment device, and the alignment method uses the above-mentioned alignment device to perform alignment operations.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment manufacturing, and in particular to an alignment device and an alignment method. Background Art

[0002] Integrated circuits are the core of modern electronic technology. By integrating thousands of electronic components into a small chip, the performance of electronic products has been greatly improved. With the rapid development of the integrated circuit industry, the performance and yield requirements of chip products are becoming higher and higher. In the manufacturing process of integrated circuits, wafer alignment technology is one of the key processes to ensure chip performance and yield. Wafer alignment technology requires precise alignment between wafers to ensure that the circuit pattern can be accurately transferred and replicated in the subsequent process flow. In order to achieve precise alignment between wafers, a precision alignment device is required to perform high-precision micro linear movement and angular rotation.

[0003] However, in the prior art, the device used for wafer alignment cannot monitor the parallelism between the upper and lower wafers in real time, and parallelism is an important parameter that affects the wafer alignment effect, which will eventually affect the yield and performance of the chip. In addition, when the alignment device is performing alignment adjustment operations, the center of mass of the device will shift from its equilibrium position, and the shift of the center of mass will reduce the stability of the device, reduce the alignment accuracy between the upper and lower wafers, increase the alignment error, and further affect the performance and yield of the chip.

[0004] Based on this, in order to solve the above problems, the present application provides an alignment device and an alignment method, which can monitor and feedback the parallelism between the upper and lower wafers in real time and improve the center of mass stability during the alignment process. Summary of the invention

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide an alignment device and an alignment method to solve the technical problems existing in the prior art, such as the poor center of mass stability of the wafer alignment device.

[0006] To achieve the above-mentioned and other related purposes, the present application provides an alignment device, including a first motion platform, a second motion platform and a center of mass adjustment assembly;

[0007] The first motion platform includes a first base, a first bearing platform and a first motion module, the first bearing platform is air-floatingly connected to the top of the first base, the first motion module is used to drive the first bearing platform to move along a first direction, the first bearing platform has a first placement area, and a first component to be debugged is placed on the first placement area;

[0008] The second motion platform includes a second base, a second bearing platform and a second motion module, the second bearing platform is air-floatedly connected to the top of the second base and is located below the first bearing platform along the third direction, the second motion module is used to drive the second bearing platform to move along the first direction, the second bearing platform has a second placement area, and the second part to be debugged is placed on the second placement area;

[0009] The center of mass adjustment assembly includes at least two center of mass adjustment parts, the first bearing platform is located between the two center of mass adjustment parts, and the two center of mass adjustment parts are symmetrically connected to the top of the first base along the second direction, for adjusting the center of mass of the alignment device;

[0010] The third direction is a vertical direction, and the first direction, the second direction and the third direction are perpendicular to each other.

[0011] Optionally, the second motion platform further includes a linear drive module connected to the bottom of the second base, for carrying and driving the second motion platform to move along the third direction;

[0012] The linear driving module includes at least three non-coplanar vertical driving systems that are spaced apart from each other, and one end of the vertical driving system away from the second base is fixedly connected to the first base and extends to the bottom of the first base.

[0013] Optionally, the first carrier stage includes a top carrier stage, a top fine-adjustment stage and a first detection module;

[0014] The top stage comprises a top carrier plate and two first movable carrier plates, the two first movable carrier plates are symmetrically connected to opposite sides of the top carrier plate along the first direction, and the first movable carrier plates are air-floatingly connected to the first base to drive the top stage to move along the first direction;

[0015] The first placement area is located on the top fine-tuning platform, the top fine-tuning platform is movably connected to the top carrier, and the top fine-tuning platform is provided with at least three first holes spaced apart from each other and opening downward;

[0016] The first detection module includes at least three first distance detectors distributed around the circumference of the axis of the first placement area, and is used to detect the distance between the top fine adjustment platform and the second carrying platform;

[0017] Wherein, in the top view of the top fine adjustment platform along the third direction, the first distance detector is located between the first placement area and the edge of the top fine adjustment platform, and is disposed in the first hole groove.

[0018] Optionally, the second carrier stage includes a bottom carrier stage, a bottom fine adjustment stage and a second detection module;

[0019] The bottom stage comprises a bottom carrier plate and two second movable carrier plates, the two second movable carrier plates are symmetrically connected to opposite sides of the bottom carrier plate along the first direction, and the second movable carrier plates are air-floatingly connected to the second base to drive the bottom stage to move along the first direction;

[0020] The second placement area is located on the bottom fine adjustment platform, the bottom fine adjustment platform is movably connected to the bottom carrier, and the bottom fine adjustment platform is provided with at least three second holes spaced apart from each other and opening upward;

[0021] The second detection module includes at least three second distance detectors distributed around the circumference of the axis of the second placement area, and is used to detect the distance between the bottom fine adjustment platform and the first carrying platform;

[0022] Wherein, in the top view of the bottom fine adjustment platform along the third direction, the second distance detector is located between the second placement area and the edge of the bottom fine adjustment platform, and is disposed in the second hole groove.

[0023] Optionally, the center of mass adjustment unit includes a third base, a first center of mass balance block, a second center of mass balance block and a third motion module;

[0024] The second mass center balance block is located on the third base and is connected to the third base by air floating; the first mass center balance block is located between the second mass center balance block and the third base and is connected to the third base by air floating; the second mass center balance block can be adsorbed and connected to the third base or the first mass center balance block;

[0025] The third motion module includes a third motor stator and a third motor mover. The third base is provided with a first guide groove opening upward and extending along the first direction. The third motor stator is arranged in the first guide groove and is spaced apart from the groove wall of the first guide groove. The third motor mover is connected to the first center of mass balance block and is located on a side of the third motor stator away from the bottom of the first guide groove.

[0026] Optionally, the third motion module further includes at least two first balancing guide blocks and at least two second balancing guide blocks;

[0027] The at least two first balancing guide blocks are symmetrically connected to the lower sides of the first mass center balancing block along the second direction and are located in the first guide groove, and the third motor mover is located between the two first balancing guide blocks;

[0028] The at least two second balancing guide blocks are symmetrically connected to the lower sides of the second mass center balancing block along the second direction. The third base is located between the two second balancing guide blocks, and the second balancing guide block can be adsorbed and connected to the third base.

[0029] Optionally, in a cross-sectional view of the mass center adjusting portion along the second direction, the cross-section of the third base is a T-shaped structure, and the top of the T-shaped structure of the third base has outer flanges on two opposite sides along the second direction;

[0030] The cross-section of the second balancing guide block is an L-shaped structure, including a vertical guide block and a transverse guide block. The vertical guide block is air-floatedly connected to the opposite sides of the outer flange along the second direction, and the transverse guide block can be adsorbed and connected to the bottom of the outer flange so that the second balancing guide block is spaced apart from the first balancing guide block.

[0031] Optionally, the mass center adjustment part is air-floatingly connected to the first base, and further includes a fourth motion module and a fifth motion module;

[0032] The fourth motion module includes a fourth motor stator and a fourth motor mover, the first base is provided with a second guide groove extending along the first direction, the second guide groove is located directly below the third base along the third direction, the fourth motor stator is arranged in the second guide groove, the fourth motor mover is connected to the bottom of the third base, and is located on a side of the fourth motor stator away from the bottom of the second guide groove;

[0033] The fifth motion module includes a fifth motor stator and a fifth motor mover. The fifth motor stator extends along the second direction, is connected to the top of the first base and is located between the two center of mass adjustment parts. The fifth motor mover is connected to a side of the center of mass adjustment part close to the fifth motor stator and is located directly above the fifth motor stator along the third direction.

[0034] Optionally, it further includes a vibration reduction assembly and a bottom frame, wherein the bottom frame is located below the first motion platform, and the vibration reduction assembly is located between the bottom frame and the first motion platform and is respectively connected to the bottom frame and the first motion platform.

[0035] Optionally, at least three non-coplanar displacement monitoring modules are further provided between the bottom frame and the first motion platform, for monitoring the displacement of the first motion platform along the first direction and the second direction;

[0036] The displacement monitoring module includes a third distance detector and a positioning block, wherein one of the third distance detector and the positioning block is connected to the top of the bottom frame, and the other is connected to the bottom of the first motion platform.

[0037] The present application also provides an alignment method, using any one of the alignment devices in the aforementioned embodiments to align a first component to be debugged and a second component to be debugged, wherein the alignment device is provided with a handover position and a working position, a top fine adjustment platform is provided on the first bearing platform, and a bottom fine adjustment platform is provided on the second bearing platform, and the alignment method comprises the following steps:

[0038] Moving the first carrying platform and the second carrying platform to the handover position;

[0039] Using the center of mass adjustment component to adjust the center of mass of the alignment device in real time so that the alignment device maintains a center of mass balance state;

[0040] Placing the first component to be debugged and the second component to be debugged in a first placement area and a second placement area respectively;

[0041] Performing a rough alignment operation using the first loading platform and the second loading platform;

[0042] The top fine adjustment stage and / or the bottom fine adjustment stage are used to perform fine alignment operations to align the first component to be adjusted with the second component to be adjusted.

[0043] Optionally, the performing of a rough alignment operation using the first carrying platform and the second carrying platform comprises the following steps:

[0044] Moving the first carrying platform from the handover position to the working position;

[0045] The second carrying platform is moved from the handover position to the working position.

[0046] Optionally, the second motion platform further includes a linear drive module, the first carrier platform further includes a first detection module and / or the second carrier platform further includes a second detection module, and after the rough alignment operation is performed using the first carrier platform and / or the second carrier platform, the following steps are further included:

[0047] Using the first detection module and / or the second detection module, detecting and obtaining the distance between the first carrying platform and the second carrying platform;

[0048] According to the distance between the first carrying platform and the second carrying platform, the position of the second carrying platform is adjusted by using a linear driving module so that the first carrying platform and the second carrying platform are parallel to each other.

[0049] Optionally, the center of mass adjustment unit includes a third base, a first center of mass balance block, a second center of mass balance block and a third motion module, and using the center of mass adjustment component to adjust the center of mass of the alignment device in real time includes the following steps:

[0050] When the first carrier platform (12) and the second carrier platform (22) move in the same direction along a first direction at the same time, the second center-of-mass balance block is adsorbed onto the first center-of-mass balance block, and the first center-of-mass balance block is driven to move by the third motion module to adjust the center of mass of the alignment device;

[0051] When one of the first supporting platform and the second supporting platform moves along the first direction and the other remains stationary, the second center of mass balance block is controlled to be adsorbed and connected to the third base, and is in a non-adsorbed state with the first center of mass balance block, and the first center of mass balance block is driven to move through the third motion module to adjust the center of mass of the alignment device.

[0052] Optionally, the center of mass adjustment unit further includes a fourth motion module and a fifth motion module, the alignment device further includes a displacement monitoring module, the displacement monitoring module includes a third distance detector and a positioning block, and the use of the center of mass adjustment component to adjust the center of mass of the alignment device in real time also includes the following steps:

[0053] Acquiring the distance data between the third distance detector and the positioning block through the displacement monitoring module;

[0054] According to the distance data between the third distance detector and the positioning block, the position of the center of mass adjustment part is adjusted by the fourth motion module and the fifth motion module, so that the alignment device maintains the center of mass balance state.

[0055] As described above, the alignment device and alignment method provided by the present application have at least the following beneficial effects:

[0056] In the alignment device of the present application, both the first bearing platform and the second bearing platform can move along the first direction. When the first bearing platform moves to the extreme position during alignment, the second bearing platform can perform a supplementary compensatory movement, which effectively improves the adjustable stroke during the alignment process; during the alignment process, the center of mass adjustment component can be used to adjust the center of mass offset caused by the movement of the first bearing platform and the second bearing platform, so that the alignment device maintains a center of mass balance state; the linear drive module can be used to adjust the parallelism between the first bearing platform and the second bearing platform, ensuring that the first component to be debugged and the second component to be debugged are parallel to each other, reducing the alignment deviation. It can be seen that the alignment device of the present application improves the adjustable stroke during the alignment process by using the first bearing platform to cooperate with the second bearing platform, and realizes a large stroke adjustment. Through the center of mass adjustment component and the linear drive module, the center of mass stability of the alignment device is improved, ensuring that the two components to be debugged are parallel to each other, thereby improving the alignment accuracy, and helping to improve the alignment efficiency, reducing the additional stress and wear caused by uneven mass distribution, and extending the service life of the equipment. The alignment method provided by the present application uses the above-mentioned alignment device to perform alignment operations, so it also has the above-mentioned beneficial effects. BRIEF DESCRIPTION OF THE DRAWINGS

[0057] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0058] Figure 1 Shown is a schematic diagram of the structure of the alignment device provided in Example 1 of the present application.

[0059] Figure 2 Shown is a schematic diagram of the main structure of the alignment device provided in the first embodiment of the present application along the first direction.

[0060] Figure 3 and Figure 4 Shown is a schematic structural diagram of the first base provided in Example 1 of the present application.

[0061] Figure 5 and Figure 6 Shown is a schematic diagram of the structure of the first supporting platform provided in Example 1 of the present application.

[0062] Figure 7 Shown is a schematic structural diagram of the second base provided in Example 1 of the present application.

[0063] Figure 8 and Fig. 9 Shown is a schematic diagram of the structure of the second supporting platform provided in Example 1 of the present application.

[0064] Fig.10 Shown is a schematic structural diagram of a linear drive module provided in Example 1 of the present application.

[0065] Fig.11 Shown is a schematic diagram of the structure of the center of mass adjustment unit provided in Example 1 of the present application.

[0066] Fig.12 Display as Fig.11 A partially enlarged view of the first center of mass balancing mass and the second center of mass balancing mass in the center of mass adjustment part is shown.

[0067] Fig.13 Shown is a schematic diagram of the structure of the fourth motion module provided in Example 1 of the present application.

[0068] Fig.14 Shown is a schematic diagram of the structure of the fifth motion module provided in Example 1 of the present application.

[0069] Fig.15 Shown is a schematic diagram of the structure of the displacement monitoring module provided in Example 1 of the present application.

[0070] Fig.16 and Fig.17 They respectively show the schematic diagrams of the top view of the displacement monitoring module along the third direction provided by the optional embodiments in the first embodiment of the present application.

[0071] Fig.18 Shown is a schematic diagram of the structure of the first detection module provided in Example 2 of the present application.

[0072] Fig.19 Shown is a schematic diagram of the structure of the second detection module provided in Example 2 of the present application.

[0073] Fig. 20 Shown is a flow chart of the alignment method provided in Example 3 of the present application.

[0074] Reference numerals:

[0075] 10. first motion platform; 11. first base; 111. bearing base; 1111. second guide groove; 112. guide base; 1120. first motion guide rail; 1121. first primary step surface; 1122. first secondary step surface; 1123. first top step surface; 12. first bearing platform; 121. top platform; 1211. top carrier plate; 1212. first motion carrier plate; 122. top fine adjustment platform; 1220. first placement area; 1221. first hole groove; 123. first detection module; 1231 , first distance detector; 13, first motion module; 131, first motor stator; 132, first motor mover; 133, first guide block; 20, second motion platform; 21, second base; 211, second motion guide rail; 2111, second primary step surface; 2112, second secondary step surface; 2113, second top step surface; 22, second carrier; 221, bottom carrier; 2211, bottom carrier plate; 2212, second motion carrier plate; 222, bottom fine adjustment platform; 2220, second placement area; 2221 , second hole slot; 223, second detection module; 2231, second distance detector; 23, second motion module; 231, second motor stator; 232, second motor mover; 233, second guide block; 24, linear drive module; 241, vertical drive system; 31, vibration reduction assembly; 32, bottom frame; 331, displacement monitoring module; 3311, third distance detector; 3312, positioning block; 40, center of mass adjustment assembly; 41, center of mass adjustment unit; 411, third base; 4111, first guide slot; 4 112, outer flange; 412, first center of mass balance block; 413, second center of mass balance block; 414, third motion module; 4141, third motor stator; 4142, third motor mover; 4143, first balance guide block; 4144, second balance guide block; 4041, vertical guide block; 4042, transverse guide block; 415, fourth motion module; 4151, fourth motor stator; 4152, fourth motor mover; 416, fifth motion module; 4161, fifth motor stator; 4162, fifth motor mover. DETAILED DESCRIPTION

[0076] In order to make the technical purpose, technical solution and technical effect of the present application clearer, the technical solution in the present application will be clearly and completely described in conjunction with the embodiments below. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0077] Therefore, the following detailed description of the embodiments of the present application is not intended to limit the scope of the present application for protection, but merely represents the selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work are within the scope of protection of the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0078] In the description of the present application, it should be noted that the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the implementation or example are included in at least one implementation or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same implementation or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more implementations or examples in a suitable manner.

[0079] Embodiment 1

[0080] This embodiment provides an alignment device for aligning a component to be debugged. Optionally, the component to be debugged includes a first component to be debugged and a second component to be debugged. The alignment device can align the first component to be debugged with the second component to be debugged. The first component to be debugged and the second component to be debugged can be, for example, wafers or other suitable semiconductor devices. Figure 1 and Figure 2 The alignment device of this embodiment includes a first motion platform 10, a second motion platform 20 and a center of mass adjustment component 40.

[0081] The first motion platform 10 includes a first base 11, a first bearing platform 12 and a first motion module 13. The first bearing platform 12 is located above the first base 11, and optionally, the first bearing platform 12 and the first base 11 are connected by air floating; the first motion module 13 is used to drive the first bearing platform 12 to move along a first direction, and can move along the positive direction of the first direction or move along the negative direction of the first direction; the first bearing platform 12 has a first placement area 1220, and the first component to be debugged is placed in the first placement area 1220.

[0082] The second motion platform 20 includes a second base 21, a second load-bearing platform 22 and a second motion module 23. The second load-bearing platform 22 is located above the second base 21 and below the first load-bearing platform 12 along the third direction. Optionally, the second load-bearing platform 22 and the second base 21 are air-floatedly connected. The second motion module 23 is used to drive the second load-bearing platform 22 to move along the first direction, and can move in the positive direction of the first direction or in the negative direction of the first direction. The second load-bearing platform 22 has a second placement area 2220, and the second component to be debugged is placed in the second placement area 2220.

[0083] The center of mass adjustment assembly 40 includes at least two center of mass adjustment parts 41, and the two center of mass adjustment parts 41 are symmetrically arranged on opposite sides of the first supporting platform 12 along the second direction so that the first supporting platform 12 is located between the two center of mass adjustment parts 41. The center of mass adjustment part 41 is connected to the top of the first base 11 and is used to adjust the center of mass of the alignment device.

[0084] The third direction is a vertical direction, and the first direction, the second direction and the third direction are perpendicular to each other; specifically, the first direction, the second direction and the third direction correspond to Figure 1 The x-axis direction, y-axis direction and z-axis direction are shown.

[0085] In this embodiment, the first load platform 12 and the second load platform 22 can both move in the first direction. When the first load platform 12 moves to the extreme position and cannot achieve alignment between the first component to be debugged and the second component to be debugged, the second load platform 22 can be controlled to be close to the first load platform 12 for compensatory movement, thereby increasing the adjustable stroke. During the movement of the first load platform 12 and the second load platform 22, it is inevitable that the center of mass of the alignment device deviates from its equilibrium position. The position of the center of mass can be adjusted through the center of mass adjustment component 40, so that the alignment device maintains a center of mass equilibrium state, thereby improving the accuracy of alignment, reducing additional stress and wear caused by uneven mass distribution, and extending the service life of the alignment device.

[0086] Reference Figure 3 The first base 11 includes a bearing base 111 and a guide base 112. The guide base 112 is connected to the upper part of the bearing base 111. The guide base 112 and the bearing base 111 can be an integrated structure or a separate structure. The guide base 112 and the bearing base 111 are fixedly connected. Optionally, there are two guide bases 112, and the two guide bases 112 are symmetrically arranged along the second direction and spaced apart from each other between the two centroid adjustment parts 41, so that an installation space for the second motion platform 20 is formed between the two guide bases 112.

[0087] In an alternative embodiment, reference Figure 4The first carrier 12 is connected to the guide base 112 by air floating, and a first motion guide rail 1120 is provided at one end of the guide base 112 away from the carrier base 111, and the first motion guide rail 1120 extends along the first direction, and the first motion module 13 is connected to the first motion guide rail 1120 to drive the first carrier 12 to move along the first direction. Optionally, the first motion guide rail 1120 is a step structure, and the first motion guide rail 1120 with a step structure can not only provide a guiding effect for the movement of the first carrier 12, but also reduce the vertical height of the device, thereby improving the integration of the device.

[0088] Reference Figures 3 to 5 The first motion module 13 includes a first motor stator 131 and a first motor mover 132. The first motor stator 131 is connected to the guide base 112, and the first motor mover is connected to the first supporting platform 12. The first motor stator 131 and the first motor mover 132 are used to drive the first supporting platform 12. Optionally, the first motor stator 131 is fixedly connected to the guide base 112, and the first motor mover 132 is fixedly connected to the first supporting platform 12. For example, bolts or other suitable methods can be used to achieve the above-mentioned fixed connection relationship.

[0089] In an alternative embodiment, reference Figure 4 and Figure 6The first motion module 13 further includes a plurality of first guide blocks 133. The first motion guide rail 1120 is a three-step structure having a first primary step surface 1121 and a first secondary step surface 1122. Optionally, the first motion guide rail 1120 further includes a first top step surface 1123, which is an air-floating surface. The first carrier 12 is air-floatingly connected to the guide base 112 via the first top step surface 1123. The two first primary step surfaces 1121 are respectively located on the sides of the two guide bases 112 away from each other. The first motor stator 131 is located on and connected to the first primary step surface 1121. The first motor mover 132 is arranged corresponding to the first motor stator 131 and is connected to the first carrier 12. Optionally, the number of the first motor movers 132 is two, and the two first motor movers 132 are symmetrically connected to the lower sides of the opposite sides of the first carrier 12 along the second direction. A plurality of first guide blocks 133 are connected to the bottom of the first carrier platform 12 and are symmetrically arranged on opposite sides of the first carrier platform 12 along the second direction. The first guide blocks 133 are located directly above the first secondary step surface 1122 along the third direction and are spaced apart from the first secondary step surface 1122. The first guide blocks 133 are air-floating blocks, which form an air-floating connection with the side of the guide base 112 and an air-floating gap with the guide base 112, and can slide relative to the guide base 112. The first guide blocks 133 can also provide a guiding function for the movement of the first carrier platform 12 along the first direction and prevent the first carrier platform 12 from deviating in the second direction. Optionally, the number of the first guide blocks 133 is four.

[0090] Reference Figure 7 and Figure 8 The second motion module 23 includes a second motor stator 231 and a second motor mover 232. The second motor stator 231 is connected to the second base 21, and the second motor mover 232 is connected to the second supporting platform 22. The second motor stator 231 and the second motor mover 232 are used to drive the second supporting platform 22. Optionally, the second motor stator 231 is fixedly connected to the second base 21, and the second motor mover 232 is fixedly connected to the second supporting platform 22. For example, bolts or other suitable methods can be used to achieve the above-mentioned fixed connection relationship.

[0091] In an alternative embodiment, reference Fig. 9The second motion module 23 also includes a plurality of second guide blocks 233. The second base 21 is provided with second motion guide rails 211 at two opposite ends along the second direction. The second motion guide rails 211 are step structures, and have a second primary step surface 2111 and a second secondary step surface 2112. Optionally, the second motion guide rails 211 also have a second top step surface 2113, and the second top step surface 2113 is an air-floating surface. The second bearing platform 22 is air-floatingly connected to the second base 21 through the second top step surface 2113. The second motor stator 231 is located on the second primary step surface 2111 and is connected to the second primary step surface 2111. The second motor mover 232 is arranged corresponding to the second motor stator 231 and is connected to the second bearing platform 22. Optionally, the number of the second motor movers 232 is two, and the two second motor movers 232 are symmetrically connected to the lower sides of the opposite sides of the second bearing platform 22 along the second direction. A plurality of second guide blocks 233 are connected to the bottom of the second carrier 22 and are symmetrically arranged on opposite sides of the second carrier 22 along the second direction. The second guide blocks 233 are arranged directly above the second secondary step surface 2112 along the third direction and are spaced apart from the second secondary step surface 2112. The second guide blocks 233 are air-floating blocks, which form an air-floating connection with the side of the second base 21 and an air-floating gap with the second base 21, and can slide relative to the second base 21. The second guide blocks 233 can also provide a guiding function for the movement of the second carrier 22 along the first direction and prevent the second carrier 22 from deviating in the second direction. Optionally, the number of the second guide blocks 233 is four.

[0092] Reference Fig.10 The second motion platform 20 further includes a linear drive module 24, which is connected to the bottom of the second base 21, and is used to carry the second motion platform 20 and drive the second motion platform 20 to move along the third direction. The linear drive module 24 includes at least three non-coplanar vertical drive systems 241, and the three vertical drive systems 241 are spaced apart from each other. One end of the vertical drive system 241 away from the second base 21 is fixedly connected to the first base 11, so that the linear drive module 24 can support the second base 21. Optionally, one end of the vertical drive system 241 away from the second base 21 passes through the first base 11 and extends to the bottom of the first base 11 to provide sufficient moving space for the second motion platform 20.

[0093] In an optional embodiment, the vertical drive system 241 includes a fixed end, a mobile end and a transmission rod, the fixed end is connected to the bottom of the first base 11, the mobile end is connected to the bottom of the second base 21, the transmission rod is located between the mobile end and the fixed end, and is respectively connected to the mobile end and the fixed end, and passes through the first base 11 along the third direction, and the fixed end can drive the transmission rod to move along the third direction to drive the mobile end to move along the third direction.

[0094] Reference Figure 2 and Figure 5 The first carrier 12 includes a top carrier 121 and a top fine-adjustment platform 122. The top carrier 121 is connected to the first base 11 by air floating, and the top fine-adjustment platform 122 is connected to the top carrier 121. The first placement area 1220 is located on the top fine-adjustment platform 122, so that the first component to be adjusted can be fine-aligned by the top fine-adjustment platform 122. The top carrier 121 can move along the first direction through the first motion module 13 to drive the first component to be adjusted to move along the first direction. Optionally, a flexible connection is formed between the top fine-adjustment platform 122 and the top carrier 121, for example, the top fine-adjustment platform 122 can be movably connected to the top carrier 121 through a flexible hinge. Furthermore, four fine-tuning drives are arranged between the top fine-tuning table 122 and the top carrier 121, wherein two fine-tuning drives are arranged on opposite sides of the top fine-tuning table 122 along a first direction, and the other two fine-tuning drives are arranged on opposite sides of the top fine-tuning table 122 along a second direction. The four fine-tuning drives can drive the top fine-tuning table 122 to translate along the first direction or the second direction, or to rotate around the third direction as the rotation axis, thereby realizing more precise multi-degree-of-freedom adjustment of the first component to be adjusted, making the alignment more precise and improving the alignment accuracy.

[0095] In an optional embodiment, the top platform 121 includes a top carrier plate 1211 and two first moving carrier plates 1212, the two first moving carrier plates 1212 are symmetrically connected to the opposite sides of the top carrier plate 1211 along the first direction, the first moving carrier plate 1212 is air-floatingly connected to the first base 11, and is used to drive the top platform 121 to move along the first direction. Optionally, the top carrier plate 1211 can also perform a slight movement along the second direction, or by controlling the two opposite sides of the top carrier plate 1211 in the first direction to move relatively along the second direction, so that the top carrier plate 1211 can perform a slight rotation. The first motor mover 132 and the first guide block 133 are both connected to the first moving carrier plate 1212. Optionally, the number of the first guide blocks 133 is four, and every two first guide blocks 133 are respectively connected to the opposite sides of a first moving carrier plate 1212 along the second direction. The four first guide blocks 133 can accurately guide the first carrier plate 12 to move along the first direction and prevent it from deviating in the second direction.

[0096] Reference Figure 2 and Figure 8The second carrier platform 22 includes a bottom carrier 221 and a bottom fine-adjusting platform 222. The bottom carrier 221 is air-floatedly connected to the second base 21, and the bottom fine-adjusting platform 222 is connected to the bottom carrier 221. The second placement area 2220 is located on the bottom fine-adjusting platform 222, so that the second component to be debugged can be precisely aligned through the bottom fine-adjusting platform 222. Through the second motion module 23, the bottom carrier 221 can move along the first direction to drive the second component to be debugged to move along the second direction. Optionally, a flexible connection is formed between the bottom fine-adjusting platform 222 and the bottom carrier 221. For example, the bottom fine-adjusting platform 222 can be movably connected to the bottom carrier 221 through a flexible hinge. Furthermore, four fine-tuning drives are arranged between the bottom fine-tuning table 222 and the bottom carrier 221, wherein two fine-tuning drives are arranged on opposite sides of the bottom fine-tuning table 222 along the first direction, and the other two fine-tuning drives are arranged on opposite sides of the bottom fine-tuning table 222 along the second direction. The four fine-tuning drives can drive the bottom fine-tuning table 222 to translate along the first direction or the second direction, or to rotate around the third direction as the rotation axis, thereby realizing more precise multi-degree-of-freedom adjustment of the second component to be adjusted, making the alignment more precise and improving the alignment accuracy.

[0097] In an optional embodiment, the bottom platform 221 includes a bottom carrier plate 2211 and two second moving carrier plates 2212, the two second moving carrier plates 2212 are symmetrically connected to the opposite sides of the bottom carrier plate 2211 along the first direction, and the second moving carrier plates 2212 are air-floatingly connected to the second base 21, and are used to drive the bottom platform 221 to move along the first direction. Optionally, the bottom carrier plate 2211 can also perform a slight movement along the second direction, or by controlling the two opposite sides of the bottom carrier plate 2211 in the first direction to move relatively along the second direction, so that the bottom carrier plate 2211 can perform a slight rotation. The second motor mover 232 and the second guide block 233 are both connected to the second moving carrier plate 2212. Optionally, the number of the second guide blocks 233 is four, and every two second guide blocks 233 are respectively connected to the opposite sides of a second moving carrier plate 2212 along the second direction. The four second guide blocks 233 can accurately guide the second carrier plate 22 to move along the first direction and prevent it from deviating in the second direction.

[0098] When in use, the first load platform 12 and the second load platform 22 are controlled to move to achieve a rough alignment of the first component to be debugged and the second component to be debugged, and then the top fine-adjusting table 122 is controlled to move the first component to be debugged to perform a fine alignment on the first component to be debugged. After the top fine-adjusting table 122 is adjusted to the extreme position, if there is still a position deviation between the first component to be debugged and the second component to be debugged, the bottom fine-adjusting table 222 can be controlled to perform a compensating movement, which effectively increases the adjustable stroke of the alignment device during the fine alignment operation and ensures the precise alignment between the first component to be debugged and the second component to be debugged.

[0099] Reference Figures 11 to 13 The center of mass adjustment unit 41 includes a third base 411, a first center of mass balance block 412, a second center of mass balance block 413 and a third motion module 414. The third base 411 is connected to the top of the first base 11, the second center of mass balance block 413 is located on the third base 411, and the first center of mass balance block 412 is located between the second center of mass balance block 413 and the third base 411. Optionally, the first center of mass balance block 412 and the second center of mass balance block 413 are both connected to the third base 411 by air floating, and the second center of mass balance block 413 can be adsorbed and connected to the third base 411 or the first center of mass balance block 412. The third motion module 414 includes a third motor stator 4141 and a third motor mover 4142. A first guide groove 4111 opening upward is provided in the third base 411. The extension direction of the first guide groove 4111 is the first direction. The third motor stator 4141 is provided in the first guide groove 4111. Optionally, the third motor stator 4141 is fixedly connected to the third base 411. For example, the third motor stator 4141 can be fixedly connected to the bottom of the first guide groove 4111 by bolts. The third motor mover 4142 is spaced apart from the groove wall of the first guide groove 4111. The third motor mover 4142 is connected to the first mass center balance block 412 and is located on the side of the third motor stator 4141 away from the bottom of the first guide groove 4111.

[0100] When in use, the third motor mover 4142 can drive the first center of mass balance block 412 to move along the first direction. When the second center of mass balance block 413 is adsorbed and connected to the third base 411 and is in a non-adsorbed state with the first center of mass balance block 412, the first center of mass balance block 412 moves alone along the first direction; when the second center of mass balance block 413 is adsorbed on the first center of mass balance block 412 and is air-floatedly connected to the third base 411, the first center of mass balance block 412 can drive the second center of mass balance block 413 to move along the first direction at the same time. By setting a second center of mass balance block 413 and cooperating with the first center of mass balance block 412 to adjust the center of mass of the alignment device, the center of mass stabilization effect of the alignment device during the alignment process can be improved, and the first center of mass balance block 412 is set between the second center of mass balance block 413 and the third base 411, which can improve the space utilization rate of the alignment device, thereby improving the integration of the device, and at the same time, the first center of mass balance block 412 and the second center of mass balance block 413 have a larger movement space, ensuring that the center of mass adjustment effect of the center of mass adjustment part 41 can meet actual needs. The mass of the first center of mass balance block 412 and the mass of the second center of mass balance block 413 can be set accordingly according to actual needs; optionally, for example, the mass of the first center of mass balance block 412 is the same as the mass of the second load-bearing platform 22, and the mass of the second center of mass balance block 413 is the same as the mass of the first load-bearing platform 12; or, the mass of the first center of mass balance block 412 is the same as the mass of the first load-bearing platform 21, and the mass of the second center of mass balance block 413 is the same as the mass of the second load-bearing platform 22; or, the sum of the masses of the first center of mass balance block 412 and the second center of mass balance block 413 is the same as the sum of the masses of the first load-bearing platform 12 and the second load-bearing platform 22.

[0101] By reasonably controlling the mass of the first center of mass balance block 412 and the second center of mass balance block 413, during the alignment process, the adverse effect of the impact force generated by the accelerated movement of the first support platform 12 and / or the second support platform 11 on the alignment device can be effectively reduced or eliminated, while ensuring the center of mass balance of the alignment device, thereby improving the structural stability and center of mass balance stability of the alignment device during the alignment process, thereby improving the alignment accuracy, and helping to improve the alignment efficiency, reduce the additional stress and wear caused by uneven mass distribution, and extend the service life of the equipment.

[0102] In an alternative embodiment, reference Fig.12The third motion module 414 further includes at least two first balancing guide blocks 4143, which are connected to the bottom of the first mass center balancing block 412 and are symmetrically arranged on opposite sides of the first mass center balancing block 412 along the second direction. The first balancing guide blocks 4143 are located in the first guide groove 4111, and the third motor mover 4142 is located between the two first balancing guide blocks 4143 along the second direction. Optionally, the number of the first balancing guide blocks 4143 in the third motion module 414 can be, for example, two, four, or other suitable numbers. The first balancing guide block 4143 is an air-floating block, which forms an air-floating connection with the side wall of the first guide groove 4111, and forms an air-floating gap with the first guide groove 4111, and can slide relative to the side wall of the first guide groove 4111. The first balancing guide block 4143 can also provide a guiding effect for the movement of the first mass center balancing block 412 along the first direction, and prevent the position of the first mass center balancing block 412 from shifting in the second direction.

[0103] In an optional embodiment, the third motion module 414 also includes at least two second balancing guide blocks 4144, which are connected to the bottom of the second center of mass balance block 413 and are symmetrically arranged on opposite sides of the second center of mass balance block 413 along the second direction. The third base 411 is located between the two second balancing guide blocks 4144, and the second balancing guide block 4144 can be adsorbed and connected to the third base 411. Optionally, the number of second balancing guide blocks 4144 in the third motion module 414 can be, for example, two, four or other suitable numbers. The second balancing guide block 4144 is an air floating block, which forms an air floating connection with the side of the third base 411 and forms an air floating gap with the third base 411, and can slide relative to the side of the third base 411. Through the second balancing guide block 4144, it can provide guidance for the movement of the second center of mass balance block 413 along the first direction to prevent the position of the second center of mass balance block 413 from shifting in the second direction. At the same time, it can be adsorbed and connected to the third base 411, and is used to maintain the position stability of the second center of mass balance block 413 when the first center of mass balance block 412 moves alone.

[0104] Further, refer to Fig.12 and Fig.13In the cross-sectional view of the mass center adjusting portion 41 along the second direction, the cross section of the third base 411 is a T-shaped structure, and the top of the third base 411 of the T-shaped structure has outer flanges 4112 on two opposite sides along the second direction, and the outer flanges 4112 also extend along the first direction. Specifically, the top of the third base 411 of the T-shaped structure has a larger width along the second direction than the bottom thereof, so that the third base 411 forms an outer flange 4112 at its top. The cross section of the second balancing guide block 4144 is an L-shaped structure, and the L-shaped second balancing guide block 4144 includes a vertical guide block 4041 and a transverse guide block 4042, and one end of the vertical guide block 4041 is connected to one end of the transverse guide block 4042 to form the above-mentioned L-shaped structure. The vertical guide block 4041 is air-floatedly connected to the opposite sides of the outer flange 4112 along the second direction, and the transverse guide block 4042 is located below the outer flange 4112 and can be adsorbed to the bottom of the outer flange 4112 to enable the second center of mass balance block 413 to move slightly upward along the third direction, so that the second center of mass balance block 413 is spaced apart from the second center of mass balance block 412.

[0105] Furthermore, the third motion module 414 has two vertical guide blocks 4041 and two transverse guide blocks 4042. The two vertical guide blocks 4041 are arranged on opposite sides of the third base 411 along the second direction, and the two transverse guide blocks 4042 are also arranged on opposite sides of the third base 411 along the second direction. When the first center of mass balance block 412 and the second center of mass balance block 413 move simultaneously, the first center of mass balance block 412 and the second center of mass balance block 413 are adsorbed and connected, the vertical guide block 4041 is air-floatedly connected to the outer flange 4112, and the transverse guide block 4042 and the outer flange 4112 are in a non-adsorbed state, ensuring that the second center of mass balance block 413 can move with the first center of mass balance block 412; when the first center of mass balance block 412 moves and the second center of mass balance block 413 is stationary, the first center of mass balance block 412 and the second center of mass balance block 413 are in a non-adsorbed state, and the transverse guide block 4042 is adsorbed and connected to the bottom of the outer flange 4112, ensuring the position stability of the second center of mass balance block 413 and avoiding the first center of mass balance block 412 being affected by the second center of mass balance block 413 when it moves.

[0106] In an alternative embodiment, reference Fig.13, the mass center adjustment part 41 is connected to the first base 11 by air floating, and the mass center adjustment part 41 also includes a fourth motion module 415. The fourth motion module 415 includes a fourth motor stator 4151 and a fourth motor mover 4152. The first base 11 is provided with a second guide groove 1111 extending along the first direction, and the second guide groove 1111 is located directly below the third base 411 along the third direction. The fourth motor stator 4151 is arranged in the second guide groove 1111. Optionally, the fourth motor stator 4151 is fixedly connected to the first base 11, for example, by bolts to fix the fourth motor stator 4151 to the bottom of the second guide groove 1111. The fourth motor mover 4152 is connected to the bottom of the third base 411, and its position is adapted to the fourth motor stator 4151. Optionally, the fourth motor mover 4152 is located on the side of the fourth motor stator 4151 away from the bottom of the second guide groove 1111. Due to the inevitable introduction of processing errors in actual production, there may be a center of mass offset error along the first direction during the center of mass adjustment process during actual alignment. The fourth motion module 415 drives the center of mass adjustment unit 41 to perform a slight movement along the first direction to achieve fine adjustment of the center of mass position, which can further improve the center of mass balance of the alignment device during the alignment process.

[0107] In an alternative embodiment, reference Fig.12 and Fig.14 The mass center adjustment part 41 is connected to the first base 11 by air floating, and the mass center adjustment part 41 also includes a fifth motion module 416. The fifth motion module 416 includes a fifth motor stator 4161 and a fifth motor mover 4162. The fifth motor stator 4161 extends along the second direction and is connected to the top of the first base 11. The fifth motor stator 4161 is located between the two mass center adjustment parts 41. The fifth motor mover 4162 is connected to the side of the mass center adjustment part 41 close to the fifth motor stator 4161 and is located directly above the fifth motor stator 4161 along the third direction. Due to the inevitable introduction of processing errors in the actual production process, there may be a mass center offset error along the second direction during the actual alignment adjustment process. The fifth motion module 416 drives the mass center adjustment part 41 to perform a slight movement along the second direction to achieve fine adjustment of the mass center position, further improving the mass center balance of the alignment device during the alignment process.

[0108] Further, refer to Figure 3The fifth motion module 416 includes two fifth motor stators 4161 and two fifth motor movers 4162. The two fifth motor stators 4161 are respectively located on the opposite sides of the first base 11 along the first direction. The fifth motor movers 4162 are arranged correspondingly to the fifth motor stators 4161. By setting the two fifth motor stators 4161 and the fifth motor movers 4162, the center of mass adjustment part 41 can be controlled to perform a slight translation or a slight rotation along the second direction to improve the effect of fine-tuning the center of mass.

[0109] In this embodiment, refer to Fig.15 The alignment device further includes a vibration reduction assembly 31 and a bottom frame 32. The bottom frame 32 is used to carry the alignment device and is located below the first motion platform 10. The vibration reduction assembly 31 is used to provide vibration reduction for the alignment device and is located between the bottom frame 32 and the first motion platform 10, and is respectively connected to the first motion platform 10 and the bottom frame 32, so that the first motion platform 10 and the bottom frame 32 are spaced apart from each other. Optionally, at least three non-coplanar displacement monitoring modules 331 are further provided between the bottom frame 32 and the first motion platform 10. The displacement monitoring modules 331 are used to detect the displacement of the first motion platform 10 along the first direction and the second direction, so as to obtain whether the first motion platform 10 has a translational motion along the first direction, and / or a translational motion along the second direction, and / or a rotation along the Rz direction.

[0110] In an optional embodiment, the displacement monitoring module 331 includes a third distance detector 3311 and a positioning block 3312, one of which is connected to the top of the bottom frame 32, and the other is connected to the bottom of the first motion platform 10. For example, the third distance detector 3311 is connected to the top of the bottom frame 32, and the positioning block 3312 is connected to the bottom of the first motion platform 10; or, the third distance detector 3311 is connected to the bottom of the first motion platform 10, and the positioning block 3312 is connected to the top of the bottom frame 32.

[0111] Further, refer to Fig.16 The displacement monitoring module 331 includes two third distance detectors, a detection surface of one third distance detector 3311 faces the positioning block 3312 along the first direction, and a detection surface of the other third distance detector 3311 faces the positioning block 3312 along the second direction, thereby realizing the monitoring of the displacement of the first motion platform 10 along the first direction and the second direction.

[0112] Further, refer to Fig.17Two groups of displacement monitoring modules 331 are arranged between the bottom frame 32 and the first motion platform 10, each group includes at least three non-coplanar displacement detection modules 331, the displacement monitoring module 331 includes a third distance detector 3311 and a positioning block 3312, wherein the detection surface of one group of third distance detectors 3311 faces the positioning block 3312 along the first direction, and the detection surface of another group of third distance detectors 3311 faces the positioning block 3312 along the second direction, thereby realizing the monitoring of the displacement of the first motion platform 10 along the first direction and the second direction.

[0113] When in use, when the distance data detected by the third distance detector 3311 indicates that the displacements of different positions of the first motion platform 10 along the first direction are different, and / or the displacements along the second direction are different, the position of the center of mass adjustment part 41 is adjusted by the fourth motion module 415 and / or the fifth motion module 416, so that the displacements of different positions of the first motion platform 10 along the first direction are the same, and the displacements along the second direction are the same. Preferably, the position of the center of mass adjustment part 41 can also be adjusted by the fourth motion module 415 and / or the fifth motion module 416, so that the displacements of different positions of the first motion platform 10 along the first direction are the same, and the displacements along the second direction are zero, or the displacements of different positions of the first motion platform 10 along the first direction and along the second direction are both zero. Using the displacement monitoring module 331 in conjunction with the fourth motion module 415 and the fifth motion module 416 to finely adjust the position of the center of mass adjustment part 41 can effectively prevent machining errors or other factors from having an adverse effect on the alignment of the component to be debugged, improve the structural stability and center of mass balance of the alignment device during the alignment process, and thus improve the alignment accuracy.

[0114] In an optional embodiment, a plurality of displacement sensors are further provided in the alignment device. Optionally, a first displacement sensor, a second displacement sensor and a third displacement sensor are provided in the alignment device, wherein the first displacement sensor is provided on the first secondary step surface 1122, and is used to monitor the displacement of the first bearing platform 12; the second displacement sensor is provided on the second secondary step surface 2112, and is used to detect the displacement of the second bearing platform 22; the third displacement sensor is provided in the first guide groove 4111, and is used to detect the displacement of the first center of mass balance block 412.

[0115] Embodiment 2

[0116] This embodiment provides another alignment device, which also includes the first motion platform 10, the second motion platform 20 and the center of mass adjustment assembly 40 in the first embodiment. The similarities with the first embodiment are not repeated here. The difference is that the alignment device of this embodiment is also provided with a first detection module 123 and / or a second detection module 223.

[0117] In an alternative embodiment, reference Fig.18The first carrier 12 also includes a first detection module 123. The first detection module 123 includes at least three first distance detectors 1231 distributed around the axis of the first placement area 1220. The first distance detector 1231 can detect the distance between the first carrier 12 and the second carrier 22. The distance data detected by the first distance detector 1231 can be used to obtain the parallelism between the two surfaces of the first carrier 12 and the second carrier 22 that are close to each other, thereby reflecting the parallelism between the first component to be debugged and the second component to be debugged. By controlling the vertical drive system 241 to drive the second motion platform 20 to move along the third direction, the parallelism between the second component to be debugged and the first component to be debugged can be adjusted accordingly, so that the second component to be debugged and the first component to be debugged remain parallel, ensuring that the two can be accurately aligned, thereby improving the accuracy of alignment.

[0118] Furthermore, the first distance detector 1231 is disposed in the top fine adjustment table, and in the top view of the top fine adjustment table along the third direction, the first distance detector 1231 is located between the first placement area 1220 and the edge of the top fine adjustment table. By arranging the first distance detector 1231 in the top fine adjustment table and distributing it around the circumference of the first placement area 1220, compared with other placement positions, the distance data detected by the first distance detector 1231 can more accurately reflect the parallel relationship between the first to-be-adjusted component and the second to-be-adjusted component, thereby improving the alignment accuracy between the two.

[0119] Further, at least three first holes 1221 with openings facing downward are provided in the top fine adjustment table, and the plurality of first holes 1221 are spaced apart from each other to provide installation space for the first distance detector 1231. For example, the first holes 1221 and the first distance detectors 1231 can be provided in a one-to-one correspondence, and the first distance detectors 1231 are installed in the first holes 1221. The first holes 1221 can be through holes or grooves. Preferably, for example, the first holes 1221 are groove structures.

[0120] In an alternative embodiment, reference Fig.19The second carrier 22 also includes a second detection module 223. The second detection module 223 includes at least three second distance detectors 2231 respectively surrounding the axis circumference of the second placement area 2220. The second distance detector 2231 can detect the distance between the second carrier 22 and the first carrier 12. The distance data detected by the second distance detector 2231 can be used to obtain the parallelism between the two surfaces of the second carrier 22 and the first carrier 12 that are close to each other, thereby reflecting the parallelism between the second component to be debugged and the first component to be debugged. By controlling the vertical drive system 241 to drive the second motion platform 20 to move along the third direction, the parallelism between the second component to be debugged and the first component to be debugged can be adjusted accordingly, so that the second component to be debugged and the first component to be debugged remain parallel, ensuring that the two can be accurately aligned.

[0121] Furthermore, the second distance detector 2231 is disposed in the bottom fine adjustment platform 222, and in the top view of the bottom fine adjustment platform 222 along the third direction, the second distance detector 2231 is located between the second placement area 2220 and the edge of the bottom fine adjustment platform 222. By arranging the second distance detector 2231 in the bottom fine adjustment platform 222 and distributing it around the circumference of the second placement area 2220, compared with other placement positions, the distance data detected by the second distance detector 2231 can more accurately reflect the parallel relationship between the second to-be-adjusted component and the first to-be-adjusted component, thereby improving the alignment accuracy between the two.

[0122] Further, at least three second holes 2221 with openings facing downward are provided in the bottom fine adjustment table 222, and the plurality of second holes 2221 are spaced apart from each other to provide installation space for the second distance detector 2231. For example, the second holes 2221 and the second distance detectors 2231 can be arranged in a one-to-one correspondence, and the second distance detectors 2231 are installed in the second holes 2221. The second holes 2221 can be through holes or grooves. Preferably, for example, the second holes 2221 are groove structures.

[0123] As described above, the alignment device of this embodiment also includes the first motion platform 10, the second motion platform 20 and the center of mass adjustment component 40, and thus also has the beneficial effects of the first embodiment. In addition, in this embodiment, by providing the first detection module 123 and / or the second detection module 223, real-time monitoring of the parallelism between the first to-be-adjusted component and the second to-be-adjusted component is achieved, and in conjunction with the linear drive module 24, real-time adjustment of the parallelism between the first to-be-adjusted component and the second to-be-adjusted component can be achieved, ensuring that the two remain parallel during the alignment process, thereby improving the alignment accuracy of the alignment device.

[0124] Embodiment 3

[0125] This embodiment provides an alignment method, using any one of the alignment devices described in the first embodiment or the second embodiment to align a first component to be adjusted and a second component to be adjusted. The alignment device is provided with an initial position, a handover position and a working position, a top fine adjustment platform 122 is provided on the first carrier 12, and a bottom fine adjustment platform 222 is provided on the second carrier 22. Fig. 20 The alignment method provided in this embodiment includes steps S1 to S5, specifically including:

[0126] Step S1: moving the first loading platform 12 and the second loading platform 22 to a connecting position;

[0127] Step S2: using the center of mass adjustment component 40 to adjust the center of mass of the alignment device in real time so that the alignment device maintains a center of mass balance state;

[0128] Step S3: placing the first component to be debugged and the second component to be debugged in the first placement area 1220 and the second placement area 2220 respectively;

[0129] Step S4: performing a rough alignment operation using the first loading platform 12 and the second loading platform 22;

[0130] Step S5: Use the top fine adjustment stage 122 and / or the bottom fine adjustment stage 222 to perform a fine alignment operation to align the first component to be adjusted with the second component to be adjusted.

[0131] The leveling and alignment method provided in this embodiment will be described in detail below with reference to the accompanying drawings. It should be noted that the above sequence does not strictly represent the process sequence of the leveling and alignment method protected by this application, and those skilled in the art may change it according to the actual processing steps.

[0132] First, step S1 is performed to move the first loading platform 12 and the second loading platform 22 to the handover position. In the alignment device, the initial position is the initial placement position of the first loading platform 12 and the second loading platform 22. The first loading platform 12 and the second loading platform 22 are located at the initial position. By moving the first loading platform 12 and the second loading platform 22 from the initial position to the handover position, the first to-be-adjusted component and the second to-be-adjusted component are placed on the first loading platform 12 and the second loading platform 22, respectively.

[0133] In an optional embodiment, executing step S1 includes the following steps: moving the first carrier 12 from the initial position to the handover position; moving the second carrier 22 from the initial position to the handover position. Specifically, the first carrier 12 and the second carrier 22 can be controlled to move to the handover position at the same time; or, one of the first carrier 12 and the second carrier 22 is controlled to move to the handover position, and then the other is moved to the handover position.

[0134] Then, step S2 is executed, and the center of mass of the alignment device is adjusted in real time by using the center of mass adjustment component 40, so that the alignment device maintains a center of mass balance state. During the movement of the first load platform 12 and the second load platform 22, the center of mass of the alignment device is offset, and the center of mass of the alignment device is adjusted by the center of mass adjustment component 40, so that the alignment device maintains a center of mass balance state. It should be noted that step S2 can be executed while step S1 is executed, so that step S1 and step S2 are performed synchronously to maintain the center of mass stability of the alignment device in real time.

[0135] In an optional embodiment, executing step S2 includes the following steps: when the first carrier platform 12 and the second carrier platform 22 move in the same direction along the first direction at the same time, the second center of mass balance block 413 is adsorbed to the first center of mass balance block 412, and the first center of mass balance block 412 is driven to move by the third motion module 414 to adjust the center of mass of the alignment device; when one of the first carrier platform 12 and the second carrier platform 22 moves along the first direction and the other remains stationary, the second center of mass balance block 413 is controlled to be adsorbed and connected to the third base 411, and is in a non-adsorbed state with the first center of mass balance block 412, and the first center of mass balance block 412 is driven to move by the third motion module 414 to adjust the center of mass of the alignment device.

[0136] In an optional embodiment, the center of mass adjustment part 41 also includes a fourth motion module 415 and a fifth motion module 416, the alignment device also includes a displacement monitoring module 331, the displacement monitoring module 331 includes a third distance detector 3311 and a positioning block 3312, and executing step S2 also includes the following steps: obtaining the distance data between the third distance detector 3311 and the positioning block 3312 through the displacement monitoring module 331; adjusting the position of the center of mass adjustment part 41 through the fourth motion module 415 and / or the fifth motion module 416 according to the distance data between the third distance detector 3311 and the positioning block 3312, so that the alignment device maintains the center of mass balance.

[0137] Then, step S3 is performed to place the first component to be debugged and the second component to be debugged in the first placement area 1220 and the second placement area 2220 respectively.

[0138] Next, step S4 is performed to perform a rough alignment operation using the first loading platform 12 and the second loading platform 22. Specifically, the first loading platform 12 and the second loading platform 22 are controlled to move to the working position so that the first component to be debugged is aligned or substantially aligned with the second component to be debugged.

[0139] In an optional embodiment, executing step S4 includes the following steps: moving the first carrier 12 from the handover position to the working position; moving the second carrier 22 from the handover position to the working position. Specifically, the first carrier 12 and the second carrier 22 can be controlled to move to the working position at the same time; or, one of the first carrier 12 and the second carrier 22 is controlled to move to the working position, and then the other is moved to the working position. Further, during the rough alignment operation, step S2 is executed at the same time to ensure that the alignment device is in a mass center balance state during the execution of step S4.

[0140] In an optional embodiment, the second motion platform 20 also includes a linear drive module 24, the first load platform 12 also includes a first detection module 123 and / or the second load platform 22 also includes a second detection module 223. After executing step S4 and performing a rough alignment operation using the first load platform 12 and the second load platform 22, the following steps are also included: using the first detection module 123 and / or the second detection module 223 to detect and obtain the distance data between the first load platform 12 and the second load platform 22; according to the distance data between the first load platform 12 and the second load platform 22, using the linear drive module 24 to adjust the position of the second load platform 22 so that the first load platform 12 and the second load platform 22 are parallel to each other.

[0141] Finally, step S5 is executed to perform a fine alignment operation using the top fine adjustment stage 122 and / or the bottom fine adjustment stage 222 to align the first component to be adjusted with the second component to be adjusted.

[0142] In an optional embodiment, executing step S5 includes the following steps: using the top fine-tuning table 122 to adjust the position of the first component to be debugged so that the first component to be debugged is aligned with the second component to be debugged; when the top fine-tuning table moves to the extreme position and the first component to be debugged is not aligned with the second component to be debugged, using the bottom fine-tuning table 222 to adjust the position of the second component to be debugged so that the first component to be debugged is aligned with the second component to be debugged. It should be noted that the top fine-tuning table and the bottom fine-tuning table 222 can be controlled to move at the same time to adjust the position of the first component to be debugged and the second component to be debugged; or the top fine-tuning table or the bottom fine-tuning table 222 can be controlled to move first to adjust the position of the first component to be debugged or the second component to be debugged, and then the bottom fine-tuning table 222 or the top fine-tuning table can be controlled to move to adjust the position of the second component to be debugged or the first component to be debugged.

[0143] The alignment method provided in this embodiment uses any one of the alignment devices described in the first or second embodiment to perform alignment, and therefore also has the beneficial effects of the first and second embodiments.

[0144] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify, change or combine the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed in the present application shall still be covered by the claims of the present application.

Claims

1. An alignment device, characterized in that: It comprises a first motion platform (10), a second motion platform (20) and a center of mass adjustment component (40); The first motion platform (10) comprises a first base (11), a first bearing platform (12) and a first motion module (13); the first bearing platform (12) is air-floatingly connected to the top of the first base (11); the first motion module (13) is used to drive the first bearing platform (12) to move along a first direction; the first bearing platform (12) has a first placement area (1220), and a first component to be debugged is placed on the first placement area (1220); The second motion platform (20) comprises a second base (21), a second bearing platform (22) and a second motion module (23); the second bearing platform (22) is air-floatingly connected to the top of the second base (21) and is located below the first bearing platform (12) along a third direction; the second motion module (23) is used to drive the second bearing platform (22) to move along the first direction; the second bearing platform (22) has a second placement area (2220), and a second component to be debugged is placed on the second placement area (2220); The center of mass adjustment assembly (40) comprises at least two center of mass adjustment parts (41), the first support platform (12) is located between the two center of mass adjustment parts (41), and the two center of mass adjustment parts (41) are symmetrically connected to the top of the first base (11) along the second direction, and are used to adjust the center of mass of the alignment device; The third direction is a vertical direction, and the first direction, the second direction and the third direction are perpendicular to each other.

2. The alignment device according to claim 1, characterized in that The second motion platform (20) further comprises a linear drive module (24) connected to the bottom of the second base (21), and used for carrying and driving the second motion platform (20) to move along the third direction; The linear drive module (24) comprises at least three non-coplanar vertical drive systems (241) arranged at intervals from each other, wherein one end of the vertical drive system (241) away from the second base (21) is fixedly connected to the first base (11) and extends to below the first base (11).

3. The alignment device according to claim 1, characterized in that: The first carrier platform (12) comprises a top carrier platform (121), a top fine adjustment platform (122) and a first detection module (123); The top carrier (121) comprises a top carrier plate (1211) and two first movable carrier plates (1212), the two first movable carrier plates (1212) being symmetrically connected to opposite sides of the top carrier plate (1211) along the first direction, and the first movable carrier plates (1212) being air-floatingly connected to the first base (11) to drive the top carrier (121) to move along the first direction; The first placement area (1220) is located on the top fine-adjusting platform (122), the top fine-adjusting platform (122) is movably connected to the top carrier (121), and the top fine-adjusting platform (122) is provided with at least three first hole slots (1221) spaced apart from each other and opening downward; The first detection module (123) comprises at least three first distance detectors (1231) distributed around the axis of the first placement area (1220) and used to detect the distance between the top fine adjustment platform and the second supporting platform (22); Wherein, in a top view of the top fine-tuning platform along the third direction, the first distance detector (1231) is located between the first placement area (1220) and an edge of the top fine-tuning platform, and is arranged in the first hole groove (1221).

4. The alignment device according to claim 1, characterized in that The second carrier platform (22) comprises a bottom carrier platform (221), a bottom fine adjustment platform (222) and a second detection module (223); The bottom carrier (221) comprises a bottom carrier plate (2211) and two second movable carrier plates (2212), the two second movable carrier plates (2212) being symmetrically connected to opposite sides of the bottom carrier plate (2211) along the first direction, and the second movable carrier plates (2212) being air-floatingly connected to the second base (21) to drive the bottom carrier (221) to move along the first direction; The second placement area (2220) is located on the bottom fine-adjusting platform (222), the bottom fine-adjusting platform (222) is movably connected to the bottom carrier (221), and the bottom fine-adjusting platform (222) is provided with at least three second hole slots (2221) spaced apart from each other and opening upwards; The second detection module (223) comprises at least three second distance detectors (2231) distributed around the axis of the second placement area (2220), and is used to detect the distance between the bottom fine adjustment platform and the first supporting platform (12); Wherein, in a top view of the bottom fine-adjusting platform along the third direction, the second distance detector (2231) is located between the second placement area (2220) and the edge of the bottom fine-adjusting platform, and is arranged in the second hole groove (2221).

5. The alignment device according to claim 1, characterized in that: The center of mass adjustment portion (41) comprises a third base (411), a first center of mass balance block (412), a second center of mass balance block (413) and a third motion module (414); The second center-of-mass balance block (413) is located on the third base (411) and is connected to the third base (411) by air floating; the first center-of-mass balance block (412) is located between the second center-of-mass balance block (413) and the third base (411) and is connected to the third base (411) by air floating; the second center-of-mass balance block (413) can be adsorbed and connected to the third base (411) or the first center-of-mass balance block (412); The third motion module (414) comprises a third motor stator (4141) and a third motor mover (4142); a first guide groove (4111) opening upward and extending along the first direction is provided in the third base (411); the third motor stator (4141) is arranged in the first guide groove (4111) and is spaced apart from the groove wall of the first guide groove (4111); the third motor mover (4142) is connected to the first center of mass balance block (412) and is located on a side of the third motor stator (4141) away from the groove bottom of the first guide groove (4111).

6. The alignment device according to claim 5, characterized in that The third motion module (414) further comprises at least two first balancing guide blocks (4143) and at least two second balancing guide blocks (4144); The at least two first balancing guide blocks (4143) are symmetrically connected to the lower sides of the first mass center balancing block (412) on opposite sides along the second direction and are located in the first guide groove (4111), and the third motor mover (4142) is located between the two first balancing guide blocks (4143); The at least two second balancing guide blocks (4144) are symmetrically connected to the lower sides of the second center of mass balancing block (413) on opposite sides along the second direction, the third base (411) is located between the two second balancing guide blocks (4144), and the second balancing guide block (4144) can be adsorbed and connected to the third base (411).

7. The alignment device according to claim 6, characterized in that In a cross-sectional view of the centroid adjustment portion (41) along the second direction, the cross-section of the third base (411) is a T-shaped structure, and the top of the T-shaped structure of the third base (411) has outer flanges (4112) on two opposite sides along the second direction; The cross-section of the second balancing guide block (4144) is an L-shaped structure, comprising a vertical guide block (4041) and a transverse guide block (4042), wherein the vertical guide block (4041) is air-floatedly connected to opposite sides of the outer flange (4112) along the second direction, and the transverse guide block (4042) can be adsorbed and connected to the bottom of the outer flange (4112) so that the second center of mass balancing block (413) is spaced apart from the first center of mass balancing block (412).

8. The alignment device according to claim 6, characterized in that The center of mass adjustment portion (41) is air-floatingly connected to the first base (11), and further comprises a fourth motion module (415) and a fifth motion module (416); The fourth motion module (415) comprises a fourth motor stator (4151) and a fourth motor mover (4152); a second guide groove (1111) extending along the first direction is provided on the first base (11); the second guide groove (1111) is located directly below the third base (411) along the third direction; the fourth motor stator (4151) is arranged in the second guide groove (1111); the fourth motor mover (4152) is connected to the bottom of the third base (411) and is located on a side of the fourth motor stator (4151) away from the bottom of the second guide groove (1111); The fifth motion module (416) comprises a fifth motor stator (4161) and a fifth motor mover (4162), wherein the fifth motor stator (4161) extends along the second direction, is connected to the top of the first base (11) and is located between the two center of mass adjustment parts (41), and the fifth motor mover (4162) is connected to a side of the center of mass adjustment part (41) close to the fifth motor stator (4161) and is located directly above the fifth motor stator (4161) along the third direction.

9. The alignment device according to claim 1, characterized in that: It also includes a vibration reduction component (31) and a bottom frame (32), wherein the bottom frame (32) is located below the first motion platform (10), and the vibration reduction component (31) is located between the bottom frame (32) and the first motion platform (10), and is respectively connected to the bottom frame (32) and the first motion platform (10).

10. The alignment device according to claim 9, characterized in that At least three non-coplanar displacement monitoring modules (331) are also arranged between the bottom frame (32) and the first motion platform (10), for monitoring the displacement of the first motion platform (10) along the first direction and the second direction; The displacement monitoring module (331) comprises a third distance detector (3311) and a positioning block (3312), wherein one of the third distance detector (3311) and the positioning block (3312) is connected to the top of the bottom frame (32), and the other is connected to the bottom of the first motion platform (10).

11. An alignment method, using the alignment device according to any one of claims 1 to 10 to align a first component to be debugged and a second component to be debugged, wherein the alignment device is provided with a handover position and a working position, a top fine adjustment table (122) is provided on the first carrier (12), and a bottom fine adjustment table (222) is provided on the second carrier (22), characterized in that: The following steps are involved: Moving the first carrying platform (12) and the second carrying platform (22) to the handover position; Using the center of mass adjustment component (40) to adjust the center of mass of the alignment device in real time so that the alignment device maintains a center of mass balance state; Placing the first component to be debugged and the second component to be debugged in a first placement area (1220) and a second placement area (2220), respectively; Using the first carrying platform (12) and the second carrying platform (22) to perform a rough alignment operation; The top fine adjustment table (122) and / or the bottom fine adjustment table are used to perform fine alignment operations so as to align the first component to be adjusted with the second component to be adjusted.

12. The alignment method according to claim 11, characterized in that: The rough alignment operation using the first carrier platform (12) and the second carrier platform (22) comprises the following steps: Moving the first carrying platform (12) from the handover position to the working position; The second carrying platform (22) is moved from the handover position to the working position.

13. The alignment method according to claim 11, characterized in that: The second motion platform (20) further comprises a linear drive module (24), the first carrier platform (12) further comprises a first detection module (123) and / or the second carrier platform (22) further comprises a second detection module (223), and after the first carrier platform (12) and the second carrier platform (22) are used to perform a rough alignment operation, the following steps are further included: Using the first detection module (123) and / or the second detection module (223), detecting and obtaining the distance between the first carrying platform (12) and the second carrying platform (22); According to the distance between the first carrying platform (12) and the second carrying platform (22), the position of the second carrying platform (22) is adjusted using a linear drive module (24) so ​​that the first carrying platform (12) and the second carrying platform (22) are parallel to each other.

14. The alignment method according to claim 11, characterized in that: The center of mass adjustment part (41) comprises a third base (411), a first center of mass balance block (412), a second center of mass balance block (413) and a third motion module (414). The center of mass adjustment component (40) is used to adjust the center of mass of the alignment device in real time, comprising the following steps: When the first carrier platform (12) and the second carrier platform (22) move in the same direction along a first direction at the same time, the second center-of-mass balance block (413) is adsorbed onto the first center-of-mass balance block (412), and the first center-of-mass balance block (412) is driven to move by the third motion module (414) to adjust the center of mass of the alignment device; When one of the first supporting platform (12) and the second supporting platform (22) moves along the first direction and the other remains stationary, the second center of mass balance block (413) is controlled to be adsorbed and connected to the third base (411) and to be in a non-adsorbed state with the first center of mass balance block (412), and the first center of mass balance block (412) is driven to move through the third motion module (414) to adjust the center of mass of the alignment device.

15. The alignment method according to claim 14, characterized in that: The center of mass adjustment unit (41) further comprises a fourth motion module (415) and a fifth motion module (416); the alignment device further comprises a displacement monitoring module (331); the displacement monitoring module (331) comprises a third distance detector (3311) and a positioning block (3312); and the center of mass adjustment component (40) is used to adjust the center of mass of the alignment device in real time, and further comprises the following steps: Acquiring distance data between the third distance detector (3311) and the positioning block (3312) through the displacement monitoring module (331); According to the distance data between the third distance detector (3311) and the positioning block (3312), the position of the center of mass adjustment portion (41) is adjusted through the fourth motion module (415) and the fifth motion module (416) so that the alignment device maintains the center of mass balance state.

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