Liquid supply equipment for wafer cleaning machine

Abstract

The invention belongs to the technical field of semiconductors, and particularly relates to wafer cleaning machine liquid supply equipment which comprises an equipment rack. A plurality of liquid supply tanks are fixedly connected to the outer wall of the end part of the equipment rack and are respectively used for extracting liquids with different concentrations; the inner walls of the multiple liquid supply boxes are slidably connected with a lifting plate. Liquid medicine with different concentrations is extracted and temporarily stored in a plurality of liquid storage tanks, the liquid medicine with different concentrations is squeezed for flushing according to the requirements of different wafers, and the liquid can be rapidly supplied in a targeted manner, so that the processing efficiency of the wafers is ensured; the wafers are supported in the cleaning box by using the cleaning frame, and the output end of a stepping motor rotates forwards to drive a piston to extract the liquid medicine; when the output end of the stepping motor rotates reversely, the piston extrudes the liquid medicine temporarily stored in the liquid storage tank to spray and wash the wafer at the liquid injection pipe, the effect of supplying liquid to the wafer for cleaning is achieved, in the process that the liquid medicine is pumped into the mixing cylinder, stirring blades stir the pumped liquid medicine, and the effect that the liquid medicine is pumped and mixed evenly is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductors, in particular to a liquid supply device for a wafer cleaning machine. Background Art

[0002] A wafer is a chip used to make silicon semiconductor circuits. After the wafer undergoes multiple process steps, various contaminants will adhere to the surface of the wafer. The contaminants can easily affect the quality of the wafer. Therefore, wafer liquid cleaning is an important process step in the wafer manufacturing process.

[0003] A patent application with publication number CN114951193A discloses a wafer cleaning equipment and liquid supply method, including a liquid supply system, a plurality of cover covers stacked in sequence, a spray system connected to the liquid supply system, a rotating system suitable for placing wafers, a collection system and a lifting drive system arranged under the cover covers; this application mainly uses the lifting drive system to lift or lower the cover covers in sequence, so that multiple agents can clean the wafers between the cover covers and avoid cross contamination between the agents.

[0004] The above-mentioned wafer cleaning liquid supply equipment mainly fixes the wafer on a rotating system, and relies on allowing a variety of chemicals to clean the wafer from between the covers to improve the cleaning effect of the wafer. When supplying liquid for wafer cleaning, corresponding concentrations of liquid are usually supplied according to different types of wafers. However, the current liquid supply equipment of wafer cleaning machines is usually used to supply liquid of a single concentration. When cleaning different types of wafers, it is difficult to quickly supply liquids of different concentrations, which can easily affect the processing efficiency of the wafer.

[0005] To this end, the present invention provides a liquid supply device for a wafer cleaning machine. Summary of the invention

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the present invention to solve its technical problems is: a wafer cleaning machine liquid supply device described in the present invention comprises an equipment frame; a plurality of liquid supply boxes are fixedly connected to the end outer wall of the equipment frame, and the plurality of liquid supply boxes are respectively used to extract liquids of different concentrations; the inner walls of the plurality of liquid supply boxes are slidably connected with a lifting plate; a piston rod is fixedly connected to the bottom end of one side of the lifting plate, and a piston is installed at the bottom end of the piston rod; the bottom inner wall of the liquid supply box is fixedly connected with a bottom plate; a liquid storage tank is fixedly connected to the bottom plate, and the piston is slidably connected to the inner wall of the liquid storage tank; a one-way pressure valve and two solenoid valves are respectively fixedly connected to the bottom ends of the liquid storage tanks; a No. 1 conduit is fixedly connected to one of the solenoid valves; a cleaning assembly is arranged at one end of the No. 1 conduit away from the solenoid valve, and the cleaning assembly cleans the wafer by means of the liquid squeezed out of the No. 1 conduit; a transmission assembly is arranged inside the plurality of liquid supply boxes, and the transmission assembly is used to drive the lifting plate to slide up and down.

[0008] Preferably, the transmission assembly includes a top plate, a polished rod, a stepper motor and a lead screw; the top plate is fixedly connected to the top inner wall of the liquid supply box; the polished rod is fixedly connected to the bottom end of the middle part of the top plate, the bottom end of the polished rod is fixedly connected to the top end of the bottom plate, and the polished rod passes through the middle part of the lifting plate; the stepper motor is fixedly connected to the bottom of the top plate, and the stepper motor is located on the side of the polished rod away from the liquid storage tank; the lead screw is fixedly connected to the output end of the stepper motor, and the lead screw and the lifting plate are connected by a lead screw nut pair.

[0009] Preferably, the cleaning assembly includes a No. 1 guide box, an injection tube, a support seat, a cleaning box and a cleaning rack; the No. 1 guide box is fixedly connected to one end of a plurality of No. 1 guide tubes away from the liquid supply box; the injection tube is fixedly connected to the middle top of the No. 1 guide box; the support seat is fixedly connected to the horizontal part of the equipment frame; the cleaning box is fixedly connected to the top of the support seat, and the end of the injection tube away from the No. 1 guide box is connected to the center interior of the cleaning box; the cleaning rack is slidably connected to the inner wall of the cleaning box, and the cleaning rack is located below the injection tube.

[0010] Preferably, a mixing cylinder is fixedly connected to the bottom end of the bottom plate away from the liquid storage tank; a liquid extraction tube is fixedly connected to the bottom end of the mixing cylinder; a No. 2 conduit is fixedly connected to the outer wall of the mixing cylinder, and the No. 2 conduit is connected to a one-way pressure valve; a plurality of liquid storage tanks are fixedly connected to the upper end surface of the equipment frame, and the liquid extraction tube is located inside the liquid storage tank.

[0011] Preferably, a connecting rod is fixedly connected to the bottom end of the screw rod; a plurality of stirring blades are fixedly connected to the outer wall of the connecting rod located inside the mixing barrel; a filter plate is fixedly connected to the inner wall of the mixing barrel, the connecting rod passes through the middle of the filter plate, and the filter plate is located below the stirring blades; a scraper is fixedly connected to the outside of the connecting rod, and the scraper fits the bottom surface of the filter plate.

[0012] Preferably, the bottom end of the liquid extraction tube is fixedly connected to a connector; short tubes are fixedly connected to both sides of the connector; a long tube is fixedly connected to the bottom end of the connector, and a connecting rod passes through the long tube; a stirring blade is fixedly connected to the outside of the bottom end of the connecting rod, and the stirring blade is located at the bottom end of the liquid storage tank.

[0013] Preferably, one of the solenoid valves is fixedly connected to a No. 3 conduit; the ends of the two No. 3 conduits away from the liquid supply box are fixedly connected to a No. 2 guide box; a thick tube is fixedly connected to the middle of the No. 2 guide box, and the end of the thick tube away from the No. 2 guide box is installed on the No. 1 guide box through a valve.

[0014] Preferably, a liquid storage tank is fixedly connected to the upper end surface of the equipment frame; a water pump is fixedly connected to the liquid storage tank; an output end of the water pump is fixedly connected to a No. 1 water pipe, and an end of the No. 1 water pipe away from the water pump is fixedly connected to a side of a No. 1 guide box; an end of the No. 1 guide box away from the No. 1 water pipe is fixedly connected to a No. 2 water pipe.

[0015] Preferably, a collecting groove is provided at the top of the support seat; and a filter screen is fixedly connected to the inner wall of the collecting groove.

[0016] Preferably, a control valve is fixedly connected to the outer wall of the support seat, and the control valve is connected to the collection tank; a recovery pipe is fixedly connected to one end of the control valve away from the support seat; a one-way valve is installed between the recovery pipe and a liquid storage tank.

[0017] The beneficial effects of the present invention are as follows: 1. The liquid supply equipment of a wafer cleaning machine described in the present invention can quickly and specifically supply liquid by setting up multiple liquid storage tanks to extract and temporarily store liquid medicine of different concentrations, and squeeze liquid medicine of different concentrations for flushing according to the needs of different wafers, so as to ensure the processing efficiency of the wafers. The cleaning rack is used to support the wafers inside the cleaning box. The output end of the stepper motor rotates forward to drive the piston to extract liquid medicine. When the output end of the stepper motor rotates reversely, the piston squeezes the liquid medicine temporarily stored in the liquid storage tank to spray and flush the wafer at the liquid injection pipe, thereby playing the role of supplying liquid for cleaning the wafer. In the process of extracting liquid medicine into the mixing barrel, the stirring blade stirs the extracted liquid medicine to improve the effect of uniform mixing of liquid medicine extraction.

[0018] 2. The wafer cleaning machine liquid supply equipment described in the present invention connects two short tubes and one long tube through a set connector, cooperates to extract the medicine liquid in the upper and lower layers of the liquid storage tank to ensure the concentration of the extracted medicine liquid, relies on extracting two medicine liquids of different concentrations to be mixed in the No. 2 guide box, and then sent to the No. 1 guide box through a thick tube for transportation and spraying to clean the wafers, thereby playing a role in mixing the two medicine liquids of different concentrations, using a water pump to extract clean water from the liquid storage tank and send it to the No. 1 guide box to flush the residual medicine liquid, thereby playing a role in cleaning the inside of the No. 1 guide box, using a control valve to open the outlet of the collection tank, and the medicine liquid in the collection tank flows into a liquid storage tank for recovery, thereby playing an effect of recycling the medicine liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below in conjunction with the accompanying drawings.

[0020] Figure 1 is a stereogram of the present invention; Figure 2 It is a structural schematic diagram of the No. 1 flow guide box in the present invention; Figure 3 It is a structural schematic diagram of the No. 2 flow guide box in the present invention; Figure 4 It is a structural schematic diagram of the liquid storage tank in the present invention; Figure 5 It is a partial structural sectional view of the mixing barrel in the present invention.

[0021] In the figure: 1. Equipment rack; 11. Liquid supply box; 12. Lifting plate; 13. Piston rod; 14. Bottom plate; 15. Liquid storage tank; 16. No. 1 guide tube; 2. Top plate; 21. Light rod; 22. Stepper motor; 23. Screw rod; 3. No. 1 guide box; 31. Liquid injection pipe; 32. Support seat; 33. Cleaning box; 34. Cleaning rack; 4. Mixing cylinder; 41. Liquid extraction pipe; 42. No. 2 Conduit; 43, liquid storage tank; 5, connecting rod; 51, stirring blade; 52, filter plate; 53, scraper; 6, connector; 61, short tube; 62, long tube; 63, stirring blade; 7, No. 3 conduit; 71, No. 2 guide box; 72, thick tube; 8, liquid storage tank; 81, water pump; 82, No. 1 water pipe; 83, No. 2 water pipe; 9, control valve; 91, recovery pipe; 92, one-way valve. DETAILED DESCRIPTION

[0022] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0023] like Figures 1 to 4As shown, a wafer cleaning machine liquid supply device according to an embodiment of the present invention comprises an equipment frame 1; a plurality of liquid supply boxes 11 are fixedly connected to the outer wall of the end of the equipment frame 1, and the plurality of liquid supply boxes 11 are respectively used to extract liquids of different concentrations; a lifting plate 12 is slidably connected to the inner walls of the plurality of liquid supply boxes 11; a piston rod 13 is fixedly connected to the bottom end of one side of the lifting plate 12, and a piston is installed at the bottom end of the piston rod 13; a bottom plate 14 is fixedly connected to the bottom inner wall of the liquid supply box 11; a liquid storage tank 15 is fixedly connected to the bottom plate 14, and the piston is slidably connected to the inner wall of the liquid storage tank 15 ; The bottom ends of the liquid storage tanks 15 are respectively fixed with a one-way pressure valve and two solenoid valves; a No. 1 conduit 16 is fixedly connected to one of the solenoid valves; a cleaning component is arranged at one end of the No. 1 conduit 16 away from the solenoid valve, and the cleaning component cleans the wafer by squeezing the liquid sent out from the No. 1 conduit 16; a plurality of the liquid supply boxes 11 are provided with transmission components inside, and the transmission components are used to drive the lifting plate 12 to slide up and down; when supplying liquid to the wafer for cleaning, the equipment rack 1 is used as the main frame of the wafer liquid supply equipment, and a plurality of liquid supply boxes 11 are fixed on the outer wall of the equipment rack 1 as A protective shell of the liquid supply component, a plurality of liquid medicines of different concentrations are placed in a plurality of liquid medicine containers, a one-way pressure valve is connected to the liquid medicine container through a pipeline, a bottom plate 14 fixes a liquid storage tank 15 on the inner wall of the bottom end of the liquid supply box 11, and the liquid storage tank 15 is used to temporarily store the supplied liquid medicine, and a sensor can be arranged inside the liquid storage tank 15 to monitor the concentration of the supplied liquid medicine, as the transmission component drives the lifting plate 12 to slide on the inner wall of the liquid supply box 11, the lifting plate 12 can synchronously drive the piston rod 13 to pull the piston, and the piston slides on the inner wall of the liquid storage tank 15, and the liquid medicine is extracted through the pipeline connected to the one-way pressure valve. The medicine in the container goes into the liquid storage tank 15. At this time, the one-way pressure valve is in the open state and the multiple solenoid valves are in the closed state. As the transmission component drives the lifting plate 12 to slide down in the reverse direction, the piston squeezes the medicine inside the liquid storage tank 15. At this time, the solenoid valve connected to the No. 1 catheter 16 opens, allowing the medicine to enter the No. 1 catheter 16 through the solenoid valve. Finally, the medicine is squeezed out to clean the wafer. According to the cleaning of different types of wafers, different concentrations of medicine are extracted from different medicine containers using wafer supply equipment, which can quickly and specifically supply liquid, thereby ensuring the processing efficiency of the wafer.

[0024] The transmission assembly includes a top plate 2, a polished rod 21, a stepper motor 22 and a screw rod 23; the top plate 2 is fixedly connected to the top inner wall of the liquid supply box 11; the polished rod 21 is fixedly connected to the middle bottom end of the top plate 2, the bottom end of the polished rod 21 is fixedly connected to the top of the bottom plate 14, and the polished rod 21 passes through the middle of the lifting plate 12; the stepper motor 22 is fixedly connected to the bottom of the top plate 2, and the stepper motor 22 is located on the side of the polished rod 21 away from the liquid storage tank 15; the screw rod 23 is fixedly connected to the output end of the stepper motor 22, and the screw rod 23 is connected to the lifting plate 12 through a screw nut pair; when the liquid medicine is extracted, the top plate 2 is fixed to the top inner wall of the liquid supply box 11 to support the stepper motor 22, the output end of the stepper motor 22 drives the screw rod 23 to rotate forward, and the screw rod 23 synchronously drives the lifting plate 12 connected to the screw nut pair to rise, and the lifting plate 12 slides on the outer wall of the polished rod 21, and the lifting plate 12 pulls the piston rod 13 and the piston to extract the medicine into the liquid storage tank 15 through the pipeline connected to the one-way pressure valve. When the medicine is squeezed and transported, the output end of the stepper motor 22 drives the screw rod 23 to rotate in the opposite direction, and the lifting plate 12 slides down the outer wall of the polished rod 21, and the lifting plate 12 drives the piston rod 13 and the piston to squeeze the medicine in the liquid storage tank 15, and the medicine is discharged from the No. 1 guide tube 16 to clean the wafer, which plays a role in extracting and discharging the medicine.

[0025] like Figure 1 and Figure 2 As shown, the cleaning assembly includes a No. 1 guide box 3, a liquid injection pipe 31, a support seat 32, a cleaning box 33 and a cleaning rack 34; the No. 1 guide box 3 is fixedly connected to the end of the plurality of No. 1 guide tubes 16 away from the liquid supply box 11; the liquid injection pipe 31 is fixedly connected to the middle top of the No. 1 guide box 3; the support seat 32 is fixedly connected to the horizontal part of the equipment frame 1; the cleaning box 33 is fixedly connected to the top of the support seat 32, and the end of the liquid injection pipe 31 away from the No. 1 guide box 3 is connected to the center of the cleaning box 33; the cleaning rack 34 is slidably connected to the cleaning box 33. The inner wall of the box 33, and the cleaning rack 34 is located below the injection pipe 31; when the wafer is cleaned, the temporarily stored liquid extracted from the liquid storage tank 15 is pressed and discharged into the No. 1 guide box 3 through the No. 1 conduit 16, and then the liquid reaches the inside of the injection pipe 31 and is sent to the middle top of the cleaning box 33. The cleaning rack 34 is used to support the wafer for auxiliary cleaning. The top of the cleaning box 33 is sprayed with liquid to rinse the wafer on the cleaning rack 34. The liquid after rinsing the wafer passes through the holes set on the cleaning rack 34 and falls into the support seat 32 for temporary storage, which plays a role in cleaning the wafer.

[0026] like Figures 1 to 5As shown, a mixing cylinder 4 is fixedly connected to the bottom end of the bottom plate 14 away from the liquid storage tank 15; a liquid extraction tube 41 is fixedly connected to the bottom end of the mixing cylinder 4; a No. 2 conduit 42 is fixedly connected to the outer wall of the mixing cylinder 4, and the No. 2 conduit 42 is connected to a one-way pressure valve; a plurality of liquid storage tanks 43 are fixedly connected to the upper end surface of the equipment frame 1, and the liquid extraction tube 41 is located inside the liquid storage tank 43; when extracting the medicine liquid, a plurality of medicine liquids of different concentrations are respectively stored in a plurality of liquid storage tanks 43, and a piston rod 13 matching the top of the liquid storage tank 43 with medicine liquids of different concentrations is used to drive the piston to extract the medicine liquid according to different types of wafers, and the medicine liquid is extracted from the inside of the liquid storage tank 43 by the liquid extraction tube 41 to circulate in the mixing cylinder 4, and the medicine liquid is extracted by the No. 2 conduit 42 and sent to the inside of the liquid storage tank 15 through the one-way pressure valve, thereby extracting the medicine liquid.

[0027] The bottom end of the screw rod 23 is fixedly connected to a connecting rod 5; the outer wall of the connecting rod 5 located inside the mixing barrel 4 is fixedly connected to a plurality of stirring blades 51; the inner wall of the mixing barrel 4 is fixedly connected to a filter plate 52, the connecting rod 5 passes through the middle of the filter plate 52, and the filter plate 52 is located below the stirring blades 51; the outside of the connecting rod 5 is fixedly connected to a scraper 53, and the scraper 53 is attached to the bottom surface of the filter plate 52; when the liquid medicine is drawn into the interior of the mixing barrel 4, the output end of the stepping motor 22 is used to drive the screw rod 23 to rotate The screw rod 23 can drive the multiple stirring blades 51 on the connecting rod 5 to rotate synchronously. The multiple stirring blades 51 stir the extracted medicine liquid to improve the uniform mixing effect of the medicine liquid. The filter plate 52 fixed under the stirring blades 51 can filter the large pieces of matter after the medicine liquid is precipitated. The scraper 53 rotates together to break up the large pieces of matter, further improving the uniform mixing effect of the medicine liquid. At the same time, the scraper 53 can fit the bottom end of the filter plate 52 to scrape and reduce the blockage caused by the material attached to the bottom end of the filter plate 52.

[0028] like Figures 1 to 4 As shown, the bottom end of the liquid extraction tube 41 is fixedly connected with a connector 6; short tubes 61 are fixedly connected to both sides of the connector 6; a long tube 62 is fixedly connected to the bottom end of the connector 6, and the connecting rod 5 passes through the long tube 62; a stirring blade 63 is fixedly connected to the outside of the bottom end of the connecting rod 5, and the stirring blade 63 is located at the bottom end of the liquid storage tank 43; when the liquid medicine in the liquid storage tank 43 is extracted, the liquid medicine is easily precipitated and stratified due to long-term storage, and the connector 6 is fixed to the liquid extraction tube 4 The bottom end of 1 is used as a joint, and two short tubes 61 are respectively installed on both sides of the connector 6 to extract the upper layer of the liquid in the liquid storage tank 43, and the long tube 62 is fixed to the bottom end of the connector 6 and extends below the bottom end of the liquid storage tank 43 to extract the lower layer of the liquid in the liquid storage tank 43. The stirring blade 63 stirs the liquid in the lower layer of the liquid storage tank 43 as the connecting rod 5 rotates, so that the precipitated liquid in the lower layer is stirred, and the upper and lower layers of the liquid are extracted into the mixing cylinder 4 for mixing, so as to ensure the concentration of the extracted liquid.

[0029] like Figures 1 to 3 As shown, a No. 3 conduit 7 is fixedly connected to one of the solenoid valves; the ends of the two No. 3 conduits 7 away from the liquid supply box 11 are fixedly connected to the No. 2 guide box 71; a thick tube 72 is fixedly connected to the middle of the No. 2 guide box 71, and the end of the thick tube 72 away from the No. 2 guide box 71 is installed on the No. 1 guide box 3 through a valve; when extracting the medicine liquid, it is necessary to take a concentration between the two concentrations of the medicine liquid, and at the same time, the two liquid storage tanks 15 extract the medicine liquid inside the two liquid storage tanks 43, and then the medicine liquid temporarily stored in the two liquid storage tanks 15 is squeezed and discharged from the two No. 3 conduits 7, and the two No. 3 conduits 7 discharge the two different medicine liquids into the No. 2 guide box 71 for aggregation, and are transported to the No. 1 guide box 3 by the thick tube 72, and finally the injection tube 31 is used to spray and rinse the wafer at the top of the cleaning box 33, so as to play a role in mixing medicine liquids of different concentrations.

[0030] like Figure 1 and Figure 2 As shown, a liquid storage tank 8 is fixedly connected to the upper end surface of the equipment frame 1; a water pump 81 is fixedly connected to the liquid storage tank 8; an output end of the water pump 81 is fixedly connected to a No. 1 water pipe 82, and an end of the No. 1 water pipe 82 away from the water pump 81 is fixedly connected to a side of the No. 1 guide box 3; an end of the No. 1 guide box 3 away from the No. 1 water pipe 82 is fixedly connected to a No. 2 water pipe 83; after the chemical solution is extracted to rinse the wafer, part of the chemical solution remains inside the No. 1 guide box 3, and the clean water stored in the liquid storage tank 8 is utilized, and the water pump 81 extracts the clean water inside the liquid storage tank 8, and sends the clean water to the No. 1 guide box 3 for rinsing through the No. 1 water pipe 82, thereby cleaning the inside of the No. 1 guide box 3.

[0031] A collecting groove is provided at the top of the support seat 32; a filter is fixedly connected to the inner wall of the collecting groove; when the wafer is cleaned, the wafer is placed on the cleaning rack 34 and cleaned with liquid medicine, and the cleaned liquid medicine passes through the cleaning rack 34 and falls into the collecting groove of the support seat 32, and the filter mesh filters out the excessive impurities in the liquid medicine, thereby collecting the liquid medicine.

[0032] A control valve 9 is fixedly connected to the outer wall of the support seat 32, and the control valve 9 is connected to the collection tank; a recovery pipe 91 is fixedly connected to the end of the control valve 9 away from the support seat 32; a one-way valve 92 is installed between the recovery pipe 91 and a liquid storage tank 43; when the wafer is cleaned with liquid, part of the liquid is temporarily stored in the collection tank of the support seat 32, the control valve 9 is opened to connect with the recovery pipe 91, the liquid in the collection tank is sent to the one-way valve 92 through the recovery pipe 91, and the liquid passes through the one-way valve 92 and enters a liquid storage tank 43 for storage. This liquid storage tank 43 is used to collect and mix the recovered liquid. The recovered liquid can be extracted for cleaning low-quality wafers, thereby recycling the liquid.

[0033] Working process: When supplying liquid to wafer cleaning, the equipment rack 1 is used as the main frame of the wafer liquid supply equipment, and multiple liquid supply boxes 11 are fixed on the outer wall of the equipment rack 1 as a protective shell of the liquid supply component. Multiple different concentrations of liquid medicine are placed in multiple liquid medicine containers, and the one-way pressure valve is connected to the liquid medicine container through a pipeline. The bottom plate 14 fixes the liquid storage tank 15 on the inner wall of the bottom end of the liquid supply box 11. The liquid storage tank 15 is used to temporarily store the supplied liquid medicine. A sensor can be set inside the liquid storage tank 15 to monitor the concentration of the supplied liquid medicine. As the transmission component drives the lifting plate 12 to slide on the inner wall of the liquid supply box 11, the lifting plate 12 can synchronously drive the piston rod 13 to pull the piston, and the piston slides up the inner wall of the liquid storage tank 15 to extract the liquid concentration through the pipeline connected to the one-way pressure valve. The medicine in the device is transferred to the liquid storage tank 15. At this time, the one-way pressure valve is in the open state and the multiple solenoid valves are in the closed state. As the transmission component drives the lifting plate 12 to slide down in the reverse direction, the piston squeezes the medicine inside the liquid storage tank 15. At this time, the solenoid valve connected to the No. 1 conduit 16 is opened, so that the medicine enters the No. 1 conduit 16 through the solenoid valve. Finally, the medicine is squeezed out to clean the wafer. According to the cleaning of different types of wafers, different concentrations of medicine are extracted from different medicine containers using wafer liquid supply equipment, which can quickly and specifically supply liquid, thereby ensuring the processing efficiency of the wafer; when extracting the medicine, the top plate 2 is fixed to the top inner wall of the liquid supply box 11 to support the stepper motor 22, and the output end of the stepper motor 22 drives the screw rod 23 to rotate forward, and the screw rod 23 synchronously drives the lifting plate 12 connected to the lead screw nut pair to rise, and the lifting plate 12 slides on the outer wall of the polished rod 21. The lifting plate 12 pulls the piston rod 13 and the piston to extract the medicine into the liquid storage tank 15 through the pipeline connected to the one-way pressure valve. When the medicine is squeezed and transported, the output end of the stepper motor 22 drives the lead screw 23 to rotate in the opposite direction, and the lifting plate 12 slides down the outer wall of the polished rod 21. The lifting plate 12 drives the piston rod 13 and the piston to squeeze the medicine in the liquid storage tank 15. The medicine is discharged from the No. 1 conduit 16 to clean the wafer, which plays a role in extracting and discharging the medicine; when the wafer is supplied with liquid for cleaning, the medicine temporarily extracted from the liquid storage tank 15 is pressed and discharged into the No. 1 guide box 3 through the No. 1 conduit 16, and then the medicine reaches the injection pipe 31 The liquid is sent to the top of the middle part of the cleaning box 33. The cleaning rack 34 is used to support the wafer for auxiliary cleaning. The liquid is sprayed on the top of the cleaning box 33 to rinse the wafer on the cleaning rack 34. The liquid after rinsing the wafer passes through the holes set on the cleaning rack 34 and falls into the support seat 32 for temporary storage, which plays a role in cleaning the wafer. When the liquid is extracted, the liquids of various concentrations are stored in a plurality of liquid storage tanks 43 respectively. According to the different types of wafers, the piston rod 13 matched with the liquid storage tank 43 with liquids of different concentrations is used to drive the piston to extract the liquid. The liquid is extracted from the liquid storage tank 43 by the extraction pipe 41 to the mixing cylinder 4 for circulation. The liquid is extracted by the second conduit 42 and sent to the inside of the liquid storage tank 15 through the one-way pressure valve, which plays a role in extracting the liquid.When the liquid medicine is extracted into the interior of the mixing barrel 4, the output end of the stepping motor 22 is used to drive the screw 23 to rotate, and the screw 23 can drive the multiple stirring blades 51 on the connecting rod 5 to rotate synchronously. The multiple stirring blades 51 stir the extracted liquid medicine to improve the uniform mixing effect of the liquid medicine. The filter plate 52 fixed below the stirring blade 51 can filter the large pieces of matter after the liquid medicine is precipitated, and the large pieces of matter are broken up by the rotation of the scraper 53, further improving the uniform mixing effect of the liquid medicine. At the same time, the scraper 53 can fit the bottom end of the filter plate 52 to reduce the blockage caused by the material attached to the bottom end of the filter plate 52. When extracting the medicine in the liquid storage tank 43, since the medicine is easily precipitated and stratified after long-term storage, the connector 6 is fixed at the bottom end of the extraction tube 41 as a connector, and two short tubes 61 are respectively installed on both sides of the connector 6 to extract the medicine in the upper layer of the liquid storage tank 43, and the long tube 62 is fixed at the bottom end of the connector 6 and extends down to the bottom end of the liquid storage tank 43 to extract the medicine in the lower layer of the liquid storage tank 43. The stirring blade 63 stirs the medicine in the lower layer of the liquid storage tank 43 as the connecting rod 5 rotates, so that the precipitated medicine in the lower layer is stirred, and the upper and lower layers of the medicine are extracted into the mixing cylinder 4 for mixing, so as to ensure the concentration of the extracted medicine. When extracting the medicine liquid, it is necessary to take the concentration between the two medicine liquid concentrations. At the same time, the two liquid storage tanks 15 extract the medicine liquid inside the two liquid storage tanks 43, and then squeeze the medicine liquid temporarily stored in the two liquid storage tanks 15 to be discharged from the two No. 3 pipes 7. The two No. 3 pipes 7 discharge the two different medicine liquids into the No. 2 guide box 71 for gathering, and then transport them to the No. 1 guide box 3 by the thick pipe 72. Finally, the injection pipe 31 is used to spray and rinse the wafer at the top of the cleaning box 33, so as to play the role of mixing medicine liquids of different concentrations. After the chemical solution is extracted to rinse the wafer, part of the chemical solution remains inside the No. 1 guide box 3. The clean water is stored in the liquid storage tank 8. The water pump 81 extracts the clean water inside the liquid storage tank 8 and sends the clean water to the No. 1 guide box 3 through the No. 1 water pipe 82 to rinse the inside of the No. 1 guide box 3, thereby cleaning the inside of the No. 1 guide box 3. When the wafer is to be cleaned, the wafer is placed on the cleaning rack 34 and cleaned with chemical solution. The chemical solution after cleaning passes through the cleaning rack 34 and falls into the collecting tank of the support seat 32. The filter screen filters out the excessively large substances in the chemical solution, thereby collecting the chemical solution. After the wafer is cleaned with chemical solution, part of the chemical solution is temporarily stored in the collecting tank of the support seat 32. The control valve 9 is opened to connect with the recovery pipe 91. The chemical solution in the collecting tank is sent to the one-way valve 92 through the recovery pipe 91. The chemical solution passes through the one-way valve 92 and enters a liquid storage tank 43 for storage. The liquid storage tank 43 is used to collect and mix the recovered chemical solution. The recovered chemical solution can be extracted and used to clean low-quality wafers, thereby recycling the chemical solution.

[0034] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A liquid supply device for a wafer cleaning machine, characterized in that: The invention comprises an equipment frame (1); a plurality of liquid supply boxes (11) are fixedly connected to the outer wall of the end of the equipment frame (1), and the plurality of liquid supply boxes (11) are respectively used to extract liquids of different concentrations; a lifting plate (12) is slidably connected to the inner walls of the plurality of liquid supply boxes (11); a piston rod (13) is fixedly connected to the bottom end of one side of the lifting plate (12), and a piston is installed at the bottom end of the piston rod (13); a bottom plate (14) is fixedly connected to the inner wall of the bottom of the liquid supply box (11); a liquid storage tank (11) is fixedly connected to the bottom plate (14); 5), and the piston is slidably connected to the inner wall of the liquid storage tank (15); the bottom end of the liquid storage tank (15) is respectively fixedly connected to a one-way pressure valve and two solenoid valves; one of the solenoid valves is fixedly connected to a No. 1 guide tube (16); a cleaning component is provided at one end of the No. 1 guide tube (16) away from the solenoid valve, and the cleaning component cleans the wafer by means of liquid squeezed out of the No. 1 guide tube (16); a transmission component is provided inside the plurality of liquid supply boxes (11), and the transmission component is used to drive the lifting plate (12) to slide up and down.

2. The wafer cleaning machine liquid supply device according to claim 1, characterized in that: The transmission assembly comprises a top plate (2), a polished rod (21), a stepper motor (22) and a lead screw (23); the top plate (2) is fixedly connected to the top inner wall of the liquid supply box (11); the polished rod (21) is fixedly connected to the bottom end of the middle part of the top plate (2), the bottom end of the polished rod (21) is fixedly connected to the top end of the bottom plate (14), and the polished rod (21) passes through the middle part of the lifting plate (12); the stepper motor (22) is fixedly connected to the bottom of the top plate (2), and the stepper motor (22) is located on a side of the polished rod (21) away from the liquid storage tank (15); the lead screw (23) is fixedly connected to the output end of the stepper motor (22), and the lead screw (23) is connected to the lifting plate (12) through a lead screw nut pair.

3. The wafer cleaning machine liquid supply device according to claim 2, characterized in that: The cleaning assembly comprises a No. 1 guide box (3), a liquid injection pipe (31), a support seat (32), a cleaning box (33) and a cleaning rack (34); the No. 1 guide box (3) is fixedly connected to one end of a plurality of No. 1 guide tubes (16) away from the liquid supply box (11); the liquid injection pipe (31) is fixedly connected to the middle top of the No. 1 guide box (3); the support seat (32) is fixedly connected to the horizontal part of the equipment frame (1); the cleaning box (33) is fixedly connected to the top of the support seat (32), and one end of the liquid injection pipe (31) away from the No. 1 guide box (3) is connected to the center of the cleaning box (33); the cleaning rack (34) is slidably connected to the inner wall of the cleaning box (33), and the cleaning rack (34) is located below the liquid injection pipe (31).

4. The wafer cleaning machine liquid supply device according to claim 3, characterized in that: A mixing cylinder (4) is fixedly connected to the bottom end of the bottom plate (14) on a side away from the liquid storage tank (15); a liquid extraction pipe (41) is fixedly connected to the bottom end of the mixing cylinder (4); a No. 2 conduit (42) is fixedly connected to the outer wall of the mixing cylinder (4), and the No. 2 conduit (42) is connected to a one-way pressure valve; a plurality of liquid storage tanks (43) are fixedly connected to the upper end surface of the equipment frame (1), and the liquid extraction pipe (41) is located inside the liquid storage tank (43).

5. The wafer cleaning machine liquid supply device according to claim 4, characterized in that: The bottom end of the screw rod (23) is fixedly connected to a connecting rod (5); the outer wall of the connecting rod (5) located inside the mixing cylinder (4) is fixedly connected to a plurality of stirring blades (51); the inner wall of the mixing cylinder (4) is fixedly connected to a filter plate (52), the connecting rod (5) passes through the middle of the filter plate (52), and the filter plate (52) is located below the stirring blades (51); the outside of the connecting rod (5) is fixedly connected to a scraper (53), and the scraper (53) is in contact with the bottom surface of the filter plate (52).

6. The wafer cleaning machine liquid supply device according to claim 5, characterized in that: The bottom end of the liquid extraction tube (41) is fixedly connected to a connector (6); short tubes (61) are fixedly connected to both sides of the connector (6); a long tube (62) is fixedly connected to the bottom end of the connector (6); and a stirring blade (63) is fixedly connected to the outside of the bottom end of the connecting rod (5), and the stirring blade (63) is located at the bottom end of the liquid storage tank (43).

7. The wafer cleaning machine liquid supply device according to claim 3, characterized in that: A No. 3 conduit (7) is fixedly connected to one of the solenoid valves; one end of the two No. 3 conduits (7) away from the liquid supply box (11) is fixedly connected to a No. 2 flow guide box (71); a thick tube (72) is fixedly connected to the middle of the No. 2 flow guide box (71), and one end of the thick tube (72) away from the No. 2 flow guide box (71) is mounted on the No. 1 flow guide box (3) through a valve.

8. The liquid supply device for a wafer cleaning machine according to claim 3, characterized in that: A liquid storage tank (8) is fixedly connected to the upper end surface of the equipment frame (1); a water pump (81) is fixedly connected to the liquid storage tank (8); an output end of the water pump (81) is fixedly connected to a first water pipe (82), and an end of the first water pipe (82) away from the water pump (81) is fixedly connected to one side of a first flow guide box (3); an end of the first flow guide box (3) away from the first water pipe (82) is fixedly connected to a second water pipe (83).

9. The wafer cleaning machine liquid supply device according to claim 4, characterized in that: A collecting groove is provided at the top of the support seat (32); a filter screen is fixedly connected to the inner wall of the collecting groove.

10. The wafer cleaning machine liquid supply device according to claim 9, characterized in that: A control valve (9) is fixedly connected to the outer wall of the support seat (32), and the control valve (9) is connected to the collection tank; a recovery pipe (91) is fixedly connected to one end of the control valve (9) away from the support seat (32); and a one-way valve (92) is installed between the recovery pipe (91) and a liquid storage tank (43).

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