Reclaiming robot arm

Abstract

The present invention discloses a material-picking mechanical arm, which relates to the technical field of manipulators, wherein the material-picking mechanical arm is used to pick up and place a carrier from an insertion frame, and the material-picking mechanical arm comprises: a moving module; a first clamping assembly, comprising a material-picking arm, a first clamping claw and a first clamping cylinder, wherein one end of the material-picking arm is connected to the moving module, and the other end is connected to the first clamping cylinder, the first clamping cylinder drives the first clamping claw to clamp one end of the carrier; a second clamping assembly is used to clamp the other end of the carrier; and an opening and closing driving module is arranged on the first clamping assembly, the opening and closing driving module is also connected to the second clamping assembly, and drives the second clamping assembly to approach or move away from the first clamping assembly. The material-picking mechanical arm proposed by the technical solution of the present invention can reduce the generation of dust and ensure the quality of semiconductor carriers.

Description

Technical Field

[0001] The invention relates to the technical field of manipulators, and in particular to a material-taking manipulator arm. Background Art

[0002] In the semiconductor manufacturing process, the handling of semiconductor substrates is a crucial link. Among them, the performance of the manipulator, as the main tool for handling substrates, directly affects production efficiency and product quality. However, when most of the current manipulators are handling semiconductor substrates, there is friction between the manipulator's gripper and the substrate, which is easy to generate dust. These dusts may contain metal particles, resin particles, etc., which are easy to adhere to the surface of the substrate, not only contaminating the semiconductor substrate, but also affecting the performance of semiconductor devices, such as affecting the electrical performance of the substrate, and even causing short circuits or other failures in the subsequent packaging process. Summary of the invention

[0003] The main purpose of the present invention is to provide a material-retrieving robot arm, which aims to solve the problem that the current robot arm for transferring carriers is prone to generate dust, which affects the performance and quality of semiconductor carriers.

[0004] To achieve the above-mentioned purpose, the present invention provides a material taking robot arm, which is used to take and place the carrier from the insertion frame, and the material taking robot arm includes:

[0005] Mobile modules;

[0006] A first clamping assembly, comprising a material taking arm, a first clamping claw and a first clamping cylinder, wherein one end of the material taking arm is connected to the moving module, and the other end is connected to the first clamping cylinder, and the first clamping cylinder drives the first clamping claw to clamp one end of the carrier plate;

[0007] A second clamping assembly, used for clamping the other end of the carrier plate; and

[0008] The opening and closing driving module is arranged on the first clamping component. The opening and closing driving module is also connected to the second clamping component and drives the second clamping component to approach or move away from the first clamping component.

[0009] In one embodiment, the first clamping jaw includes a body, a push block and a clamping block, a through hole is provided in the body, the clamping block includes a connecting end and a clamping end, the clamping end passes through the through hole and extends out of the body, one end of the push block is cooperatively connected to the connecting end, and the other end of the push block is connected to the first clamping cylinder, the first clamping cylinder drives the push block to move, so as to drive the clamping block to slide along the through hole, so that the clamping end has a clamping state close to the body and a relaxing state away from the body.

[0010] In one embodiment, the connecting end is connected to a rotating shaft, the push block is provided with a guide groove, the guide groove is obliquely arranged, the rotating shaft is also movably arranged in the guide groove, the push block moves to drive the rotating shaft to slide along the guide groove, and then drives the clamping block to slide.

[0011] In one embodiment, a guide tooth is provided at one end of the push block away from the first clamping cylinder, the guide groove is provided on the guide tooth, and the clamping block also has an avoidance groove. The guide tooth is arranged correspondingly to the avoidance groove and is movably arranged in the avoidance groove.

[0012] In one embodiment, the body is connected to a baffle, the baffle and the body form a cavity, the push block is arranged in the cavity, the baffle is provided with a groove, the groove is arranged correspondingly with the guide tooth, and in the clamping state, the guide tooth is also located in the groove; and / or,

[0013] The main body is provided with a first sensor for sensing the carrier plate.

[0014] In one embodiment, the clamping end is provided with a clamping plate, the main body is provided with a base surface and a clamping platform, the base surface and the clamping platform are respectively connected with guiding inclined surfaces, and the clamping plate cooperates with the clamping platform to clamp the carrier plate.

[0015] In one embodiment, the material picking arm includes a crossbeam, the crossbeam is connected to a base, the base is connected to the moving module, both ends of the crossbeam are also connected to vertical beams, and the two vertical beams are respectively connected to the first clamping cylinders.

[0016] In one embodiment, the second clamping assembly includes a connecting frame, a second clamping jaw and a second clamping cylinder, wherein the connecting frame is connected to the opening and closing drive module, the second clamping cylinder is arranged on the connecting frame, the second clamping jaw includes two claw plates arranged opposite to each other, and the second clamping cylinder connects the two claw plates and drives the two claw plates to move closer to or away from each other.

[0017] In one embodiment, the second clamping component also includes a first sensing component, the first sensing component includes a trigger member and a plurality of sensing members, the opening and closing driving module includes a moving seat and a linear guide rail, the linear guide rail drives the moving seat to move, the moving seat is connected to the connecting frame, the trigger member is arranged on the moving seat, and the plurality of sensing members are arranged on the linear guide rail and are spaced apart along the extension direction of the linear guide rail.

[0018] In one embodiment, the second clamping assembly also includes a second sensing assembly, which includes a second sensor, an elastic member and a slide seat, the slide seat is provided with a clamping pad and is used to clamp the carrier plate, a block is provided on the opposite side of the two claw plates, the second sensor is provided on the side of the block facing the slide seat, the slide seat is slidably connected to the claw plate, and a sensing code plate is provided on the side of the slide seat facing the block, the sensing code plate is close to the second sensor and is inductively connected to the second sensor, the elastic member is respectively connected to the block and the slide seat, and is used to drive the slide seat to reset.

[0019] The technical solution of the present invention is to set the second clamping component on the opening and closing driving module, the opening and closing driving module drives the second clamping component to move, the opening and closing driving module is set on the first clamping component, and the first clamping component is set on the moving module. In this way, the moving module can drive the first clamping component to move and also synchronously drive the opening and closing driving module and the second clamping component to move, so as to adjust the positions of the three, thereby facilitating the first clamping component to extend into the insertion frame. Specifically, the first clamping cylinder and the first clamping claw are connected to the end of the material picking arm away from the moving module, the moving module drives the material picking arm to extend into the insertion frame, the first clamping cylinder drives the first clamping claw to clamp one end of the carrier plate, the opening and closing driving module drives the second clamping component to approach the other end of the carrier plate and clamp it, the moving module moves to take the carrier plate out of the insertion frame, and the opening and closing driving module drives the second clamping component to move to flatten the carrier plate. In this way, the first clamping component and the second clamping component are respectively located at and clamp the opposite ends of the carrier, and the opening and closing drive module is used to drive the second clamping component to move and flatten the carrier. The opening and closing of the two clamping components can avoid friction between the gripper and the semiconductor carrier and thus avoid dust generation, thereby ensuring the quality of the semiconductor carrier. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0021] Figure 1 A schematic structural diagram of an embodiment of a reclaiming mechanical arm provided by the present invention;

[0022] Figure 2 A schematic diagram of a partial exploded structure of an embodiment of a reclaiming mechanical arm provided by the present invention;

[0023] Figure 3 A structural schematic diagram of the explosion of the first gripping assembly of the material retrieving mechanical arm embodiment provided by the present invention;

[0024] Figure 4 Another structural schematic diagram of the explosion of the first gripping assembly of the material retrieving robot arm embodiment provided by the present invention;

[0025] Figure 5 A schematic structural diagram of the second sensing component of the material retrieving robot arm embodiment provided by the present invention.

[0026] Description of Figure Numbers:

[0027] 100. mobile module; 110. base;

[0028] 200, first gripping assembly; 210, material taking arm; 211, crossbeam; 212, vertical beam; 220, first gripping claw; 221, body; 222, push block; 223, clamping block; 224, through hole; 225, rotating shaft; 226, guide groove; 227, guide tooth; 228, avoidance groove; 229, baffle; 230, groove; 231, base surface; 232, guide slope; 233, clamping platform; 234, clamping plate; 235, bearing; 240, first clamping cylinder; 250, first sensor;

[0029] 300, second clamping assembly; 310, connecting frame; 320, second clamping claw; 321, claw plate; 330, second clamping cylinder; 340, stopper;

[0030] 400, opening and closing drive module; 410, linear guide rail; 420, moving seat;

[0031] 500, first sensing component; 510, triggering component; 520, sensing component;

[0032] 600, second induction component; 610, elastic member; 620, slide seat; 630, induction code plate.

[0033] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings in conjunction with the embodiments. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0036] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0037] In the prior art, when most of the current robots are carrying semiconductor carriers, there is friction between the grippers of the robots and the carriers, which easily generates dust. These dusts may contain metal particles, resin particles, etc., which are easily attached to the surface of the carriers, which will not only contaminate the semiconductor carriers, but may also affect the performance of semiconductor devices, such as affecting the electrical performance of the carriers, and even causing short circuits or other faults in the subsequent packaging process.

[0038] The invention provides a material taking mechanical arm.

[0039] See also Figures 1 to 5 As shown, in one embodiment of the present invention, the material picking robot arm is used to pick up and place the carrier from the insertion frame, and the material picking robot arm includes: a moving module 100, a first clamping component 200, a second clamping component 300 and an opening and closing drive module 400, wherein the first clamping component 200 includes a material picking arm 210, a first clamping claw 220 and a first clamping cylinder 240, wherein one end of the material picking arm 210 is connected to the moving module 100, and the other end is connected to the first clamping cylinder 240, the first clamping cylinder 240 drives the first clamping claw 220 and drives the first clamping claw 220 to clamp one end of the carrier; the second clamping component 300 is used to clamp the other end of the carrier; the opening and closing drive module 400 is arranged on the first clamping component 200, and the opening and closing drive module 400 is also connected to the second clamping component 300, and drives the second clamping component 300 to approach or move away from the first clamping component 200.

[0040] It should be noted that the carrier is a semiconductor carrier made of flexible material, which is stored in the insertion frame. The material-picking robot arm is used to reach into the insertion frame to clamp and take out the carrier. The flexible carrier is bent. After being taken out of the insertion frame, the material-picking robot arm is also used to flatten the carrier to facilitate the next process.

[0041] In the specific implementation process, the material taking arm 210 extends into the insertion frame and clamps one end of the carrier located at the bottom of the insertion frame. Specifically, the length of the material taking arm 210 is adapted to the insertion frame, and the first clamping claw 220 is located at the end of the material taking arm 210. After the material taking arm 210 extends into the insertion frame, the first clamping cylinder 240 drives the first clamping claw 220 to clamp one end of the carrier, and the opening and closing driving module 400 drives the second clamping component 300 to move in the direction close to the carrier and clamp the other end of the carrier. The moving module 100 drives the first clamping component 200 to move and simultaneously drives the second clamping component 300 and the opening and closing driving module 400 to move synchronously to take out the carrier. After taking out the carrier, the opening and closing driving module 400 drives the second clamping component 300 to move in the direction away from the first clamping component 200 to flatten the carrier.

[0042] The material taking arm 210 includes a crossbeam 211, the crossbeam 211 is connected to the base 110, the base 110 is connected to the mobile module 100, the two ends of the crossbeam 211 are also connected to the vertical beam 212, and the two vertical beams 212 are respectively connected to the first clamping cylinder 240. The base 110 is connected to the mobile module 100 and moves along the mobile module 100. One end of the base 110 is connected to the crossbeam 211 near the middle, and the two ends of the crossbeam 211 are respectively connected to a vertical beam 212. The other end of the vertical beam 212 extends toward the end away from the crossbeam 211 and is connected to the first clamping cylinder 240. The first clamping cylinder 240 is connected to the first clamping claw 220. In this way, the material taking arm 210 can extend into the insert frame to take and place the carrier, and the length of the vertical beam 212 matches the insert frame to ensure that the first clamping claw 220 can clamp the end edge of the carrier located in the insert frame.

[0043] In addition, in order to improve the strength of the material picking arm 210, the two vertical beams 212 are connected to a reinforcing rod at one end close to the first clamping cylinder 240, and the two ends of the reinforcing rod are respectively connected to the corresponding vertical beams 212. In order to increase the distance between the two first clamping jaws 220 while reducing the distance between the two vertical beams 212, the ends of the vertical beams 212 are arranged to be bent in directions away from each other, the first clamping cylinder 240 is installed in the bending section, and an oblique rib is also connected between the bending section and the vertical beam 212 to improve the strength of the material picking arm 210, thereby improving the stability of the first clamping cylinder 240 and the first clamping jaw 220 to prevent shaking from affecting the clamping of the carrier plate.

[0044] In the specific implementation process, the mobile module 100 and the opening and closing drive module 400 are both linear modules, which can be a cylinder telescopic structure, a motor screw structure, etc. The mobile module 100 is also used to install an external structure to drive the entire material picking robot arm to move. The opening and closing mold drives the second clamping mechanism to perform linear motion to adjust the distance between the first clamping mechanism and the second clamping mechanism. On the one hand, it can clamp and flatten the carrier plate, and on the other hand, it can also adapt to carrier plates of different sizes to improve the applicability of the material picking robot arm. In addition, in order to improve the stability of clamping the carrier plate, the first clamping claw 220 is provided with two, and the two clamps are respectively located near the two sides of the material picking arm 210, and then clamp the positions near the two sides to avoid the bending of the carrier plate and scratches during the removal process. It can be understood that the second clamping assembly 300 is arranged corresponding to the first clamping assembly 200 to smoothly remove the carrier plate.

[0045] The technical solution of the present invention is achieved by setting the second clamping component 300 on the opening and closing driving module 400, the opening and closing driving module 400 drives the second clamping component 300 to move, the opening and closing driving module 400 is set on the first clamping component 200, and the first clamping component 200 is set on the moving module 100. In this way, the moving module 100 can drive the first clamping component 200 to move and also synchronously drive the opening and closing driving module 400 and the second clamping component 300 to move, so as to adjust the positions of the three, thereby facilitating the first clamping component 200 to extend into the insertion frame. Specifically, the first clamping cylinder 240 and the first clamping claw 220 are connected to the end of the material taking arm 210 away from the moving module 100, the moving module 100 drives the material taking arm 210 to extend into the insertion frame, the first clamping cylinder 240 drives the first clamping claw 220 to clamp one end of the carrier, the opening and closing driving module 400 drives the second clamping assembly 300 to approach the other end of the carrier and clamp it, the moving module 100 moves to take the carrier out of the insertion frame, and drives the second clamping assembly 300 to move and flatten the carrier by the opening and closing driving module 400. In this way, the first clamping assembly 200 and the second clamping assembly 300 are respectively located at and clamp the opposite ends of the carrier, and the opening and closing driving module 400 is used to drive the second clamping assembly 300 to move and flatten the carrier. The opening and closing of the two clamping assemblies can avoid friction between the gripper and the semiconductor carrier and thus avoid dust generation, thereby ensuring the quality of the semiconductor carrier.

[0046] refer to Figure 3 and Figure 4As shown, in one embodiment, the first clamping jaw 220 includes a main body 221, a push block 222 and a clamping block 223. A through hole 224 is opened in the main body 221. The clamping block 223 includes a connecting end and a clamping end. The clamping end passes through the through hole 224 and extends out of the main body 221. One end of the push block 222 is connected to the connecting end, and the other end of the push block 222 is connected to the first clamping cylinder 240. The first clamping cylinder 240 drives the push block 222 to move, so as to drive the clamping block 223 to slide along the through hole 224, so that the clamping end has a clamping state close to the main body 221 and a relaxing state away from the main body 221.

[0047] In the specific implementation process, the first clamping cylinder 240 includes a driving part and a fixing part, the fixing part is fixedly installed on the material picking arm 210, the fixing part is also connected to the body 221, the driving part is connected to the push block 222 and drives the push block 222 to move along the first direction. The through hole 224 is opened on one side of the body 221, the clamping block 223 slides along the through hole 224, the clamping end of the clamping block 223 passes through the through hole 224 and is located outside the body 221, the connecting end is located in the body 221 and connected to the push block 222, the connecting end is connected to the push block 222, the push block 222 moves along the first direction and drives the clamping block 223 to move along the second direction, wherein the first direction is perpendicular to the second direction, the clamping block 223 moves along the second direction and makes the clamping end approach or move away from the body 221, so that the clamping end cooperates with the body 221 to clamp the carrier plate, thereby realizing the function of clamping the carrier plate. Specifically, in one embodiment, a slope is provided at the clamping end, and the push block 222 moves along the first direction and cooperates with the slope to drive the clamping block 223 to move along the second direction.

[0048] In another embodiment, the connecting end is connected to a rotating shaft 225, and the push block 222 is provided with a guide groove 226, which is obliquely arranged. The rotating shaft 225 is also movably arranged in the guide groove 226. The push block 222 moves to drive the rotating shaft 225 to slide along the guide groove 226, thereby driving the clamping block 223 to slide.

[0049] The rotating shaft 225 is rotatably connected to the connecting end of the clamping block 223, and also movably passes through the guide groove 226. The guide groove 226 is long and obliquely arranged. Specifically, the end of the guide groove 226 away from the first clamping cylinder 240 is close to the clamping end of the clamping block 223. The push block 222 moves to push the rotating shaft 225 to slide along the guide groove 226. The obliquely arranged guide groove 226 and the through hole 224 work together to limit the clamping block 223, so that the clamping block 223 moves along the second direction. When the first clamping cylinder 240 pushes the push plate, the guide groove 226 allows the rotating shaft 225 to move along the guide groove 226 so that the clamping end located outside the body 221 is close to the body 221 and clamps the carrier plate with the outer wall of the body 221; when the first clamping cylinder 240 pulls the push plate to move in the opposite direction, the guide groove 226 allows the rotating shaft 225 to move along the guide groove 226 so that the clamping end located outside the body 221 is away from the body 221, thereby loosening the carrier plate or facilitating the carrier plate to enter the space between the body 221 and the clamping end, thereby facilitating the next step of clamping the carrier plate. In this embodiment, the rotating shaft 225 is rotatably connected to the connecting end, and the rotating shaft 225 is also connected to a bearing 235, and is connected to the guide groove 226 through the bearing 235, so as to reduce the friction between the rotating shaft 225 and the guide groove 226, thereby reducing the generation of dust.

[0050] Compared with the previous embodiment, the present embodiment achieves movement of the clamping block 223 by cooperating with the rotating shaft 225 and the guide groove 226, which can further avoid the generation of dust.

[0051] In one embodiment, a guide tooth 227 is provided at one end of the push block 222 away from the first clamping cylinder 240, and a guide groove 226 is provided on the guide tooth 227. The clamping block 223 also has an avoidance groove 228. The guide tooth 227 is correspondingly arranged with the avoidance groove 228 and is movably arranged in the avoidance groove 228.

[0052] Specifically, a plurality of guide teeth 227 are provided, and the plurality of guide teeth 227 are arranged at intervals, and the avoidance groove 228 is provided corresponding to the guide teeth 227, and the guide teeth 227 are also movably provided in the avoidance groove 228, so that the rotating shaft 225 can sequentially pass through the clamping block 223 and the guide teeth 227. It can be understood that the push block 222 and the clamping block 223 are respectively provided with a plurality of avoidance grooves 228 and guide teeth 227, and the guide teeth 227 of the push block 222 are movably provided in the avoidance groove 228 of the clamping block 223, and correspondingly, the guide teeth 227 of the clamping block 223 are movably provided in the avoidance groove 228 of the push block 222, and the rotating shaft 225 passes through the guide teeth 227 and the avoidance groove 228, respectively, thereby realizing the connection between the push block 222 and the clamping block 223, and ensuring that the clamping block 223 moves in a balanced and stable manner.

[0053] In one embodiment, the main body 221 is connected to a baffle 229, which forms a cavity with the main body 221, and the push block 222 is disposed in the cavity. The baffle 229 is provided with a groove 230, and the groove 230 is correspondingly arranged with the guide tooth 227. In the clamping state, the guide tooth 227 is also located in the groove 230.

[0054] In the specific implementation process, the push block 222 is arranged in the cavity, the through hole 224 is connected to the cavity, and the connection end of the clamping block 223 is located in the cavity. The baffle plate 229 is connected to one end of the body 221 by bolts, and the baffle plate 229 and the body 221 also form a through hole 224, so that it is convenient to assemble the push block 222 and the clamping block 223. The baffle plate 229 is provided with a groove 230 on the side facing the cavity, and the groove 230 cooperates with the guide teeth 227 and is provided with a plurality of corresponding grooves. During the movement of the push plate, the guide teeth 227 also slide along the groove 230, which plays a role in guiding and limiting the movement of the push block 222.

[0055] In one embodiment, the body 221 is provided with a first sensor 250 for sensing the carrier. Specifically, the body 221 is provided with a sensing hole, and the first sensor 250 is located in the sensing hole, and the sensing hole is located at a corner of the body 221 close to the carrier. For example, in a specific implementation process, the two first clamping jaws 220 clamp the carrier, and the sensing hole is located on the opposite side of the two first clamping jaws 220. When the first clamping jaws 220 clamp the corner of the carrier, the carrier can be sensed in time.

[0056] In one embodiment, a clamping plate 234 is provided at the clamping end, and the body 221 is provided with a base surface 231 and a clamping platform 233. The base surface 231 and the clamping platform are respectively connected with guide slopes 232. The clamping plate 234 cooperates with the clamping platform 233 to clamp the carrier plate.

[0057] In the specific implementation process, the clamping plate 234 extends along the side wall of the body 221, and the clamping plate 234 faces the side of the body 221 and cooperates with the body 221 to clamp the carrier. It can be understood that the material picking arm 210 carries the first clamping claw 220 into the insertion frame and approaches the end of the carrier located at the bottom of the insertion frame, and then the material picking arm 210 moves in the opposite direction to make the carrier enter the space between the clamping plate 234 and the body 221. When the first sensor 250 senses the carrier, the first clamping cylinder 240 acts to pull the push block 222 so that the clamping block 223 moves toward the direction of the cavity, and then the clamping plate 234 approaches the body 221 to clamp the carrier.

[0058] Furthermore, the clamping platform 233 protrudes from the base surface 231 and cooperates with the clamping plate 234 to clamp the carrier. Specifically, when the carrier enters between the clamping plate 234 and the body 221, the edge of the carrier moves along the guide slope 232 between the base surface 231 of the body 221 and the clamping platform 233, and the clamping plate 234 cooperates with the clamping platform 233 to clamp the carrier. The clamping platform 233 can reduce the contact area between the body 221 and the carrier to avoid damage to the carrier, and by lifting the table off the base surface 231, it can also prevent other positions of the robot arm from contacting the carrier, causing scratches and damage to the carrier.

[0059] In one embodiment, the second clamping assembly 300 includes a connecting frame 310, a second clamping jaw 320 and a second clamping cylinder 330, wherein the connecting frame 310 is connected to the opening and closing drive module 400, the second clamping cylinder 330 is arranged on the connecting frame 310, the second clamping jaw 320 includes two claw plates 321 arranged opposite to each other, and the second clamping cylinder 330 connects the two claw plates 321 and drives the two claw plates 321 to move closer to or away from each other.

[0060] The connecting frame 310 is connected to the opening and closing driving module 400, and the second clamping cylinder 330 is installed on the connecting frame 310. In the specific implementation process, the connecting frame 310 includes a main body and a connecting arm. Two connecting arms are provided, and the two connecting arms are respectively connected to the two sides of the main body. The second clamping cylinder 330 is connected to the connecting arm by bolts. The second clamping claw 320 includes two opposing claw plates 321. The second clamping cylinder 330 drives the two claw plates 321 to approach each other to clamp the carrier plate, or drives the two claw plates 321 away from each other to release the carrier plate.

[0061] refer to Figure 2 As shown, in one embodiment, the second clamping component 300 also includes a first sensing component 500, the first sensing component 500 includes a trigger member 510 and a plurality of sensing members 520, the opening and closing drive module 400 includes a moving seat 420 and a linear guide rail 410, the linear guide rail 410 drives the moving seat 420 to move, the moving seat 420 is connected to the connecting frame 310, the trigger member 510 is disposed on the moving seat 420, and the plurality of sensing members 520 are disposed on the linear guide rail 410 and are spaced apart along the extension direction of the linear guide rail 410.

[0062] It should be noted that the material-retrieving robot arm also includes a control system to control the coordination of various components. The first sensing component 500 is used to coordinate and control the distance between the second clamping component 300 and the first clamping component 200 to adapt to carriers of different sizes. Among them, the sensing member 520 can be a photoelectric sensor, or it can be formed into a switch, etc. A plurality of sensing members 520 are arranged along the linear guide rail 410. When facing carriers of different sizes, the control system controls the corresponding sensing member 520 to coordinate with the trigger member 510 according to the size of the carrier. First, when the moving seat 420 is in the initial position and extends into the insertion frame to clamp the carrier, the moving seat 420 moves so that when the trigger member 510 and the sensing member 520 cooperate and trigger, it indicates that the second clamping component 300 has reached the corresponding position, and then the second clamping cylinder 330 drives the clamping claw to clamp the carrier, and then the moving seat 420 moves a certain distance and triggers the corresponding sensing member 520, indicating that the carrier is unfolded.

[0063] refer to Figure 5 As shown, in one embodiment, the second clamping component 300 also includes a second sensing component 600, which includes a second sensor, an elastic member 610 and a slide 620. The slide 620 is provided with a clamping pad and is used to clamp the carrier plate. A stopper 340 is provided on the opposite side of the two claw plates 321. The second sensor is provided on the side of the stopper 340 facing the slide 620. The slide 620 is slidably connected to the claw plate 321, and a sensing code plate 630 is provided on the side of the slide 620 facing the stopper 340. The sensing code plate 630 is close to the second sensor and is inductively connected to the second sensor. The elastic member 610 is respectively connected to the stopper 340 and the slide 620, and is used to drive the slide 620 to reset.

[0064] Specifically, the second sensing component 600 is used to control the opening and closing drive mechanism to avoid over-stretching the carrier during the flattening process. Specifically, the slide 620 is slidably connected to the gripping plate, and the two are slidably connected by means of a slide rail and a slide groove. The slide 620 is used to set an anti-skid pad on the side of the carrier to increase the friction between the slide and the carrier. The block 340 is close to the edge of the claw plate 321, and the elastic member 610 is set between the slide 620 and the block 340. The block 340 is provided with a placement hole on the side facing the slide 620, and the second sensor is set in the placement hole. The slide 620 is provided with a sensing code plate 630 on the side facing the block 340, and the second sensor cooperates with the sensing code plate 630 for sensing. The slide 620 clamps the carrier, and during the flattening process driven by the opening and closing drive mechanism, the slide 620 moves in the direction of the block 340. When it slides to the sensing code plate 630 and the second sensor is triggered, the control system controls the opening and closing drive mechanism to stop. When the induction member 520 for indicating the unfolding in the first induction assembly 500 fails, the second sensor is triggered and indicates an alarm to avoid damage to the carrier board.

[0065] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the inventive concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A material reclaiming robot arm, characterized in that: Used to take and place the carrier from the insertion frame, the material taking mechanical arm includes: Mobile modules; A first clamping assembly, comprising a material taking arm, a first clamping claw and a first clamping cylinder, wherein one end of the material taking arm is connected to the moving module, and the other end is connected to the first clamping cylinder, and the first clamping cylinder drives the first clamping claw to clamp one end of the carrier plate; A second clamping assembly, used for clamping the other end of the carrier plate; and an opening and closing driving module, which is disposed on the first clamping component, and is also connected to the second clamping component, and drives the second clamping component to approach or move away from the first clamping component; The second clamping assembly includes a connecting frame, a second clamping claw, and a second clamping cylinder, wherein the connecting frame is connected to the opening and closing driving module, the second clamping cylinder is arranged on the connecting frame, the second clamping claw includes two claw plates arranged opposite to each other, and the second clamping cylinder connects the two claw plates and drives the two claw plates to move closer to or away from each other; The second gripping assembly further includes a first sensing assembly, the first sensing assembly includes a triggering member and a plurality of sensing members, the opening and closing driving module includes a moving seat and a linear guide rail, the linear guide rail drives the moving seat to move, the moving seat is connected to the connecting frame, the triggering member is arranged on the moving seat, and the plurality of sensing members are arranged on the linear guide rail and spaced apart along the extension direction of the linear guide rail; The second clamping assembly also includes a second sensing assembly, which includes a second sensor, an elastic member and a slide seat. The slide seat is provided with a clamping pad and is used to clamp the carrier plate. A stop block is provided on the opposite side of the two claw plates. The second sensor is provided on the side of the stop block facing the slide seat. The slide seat is slidably connected to the claw plate, and an induction code plate is provided on the side of the slide seat facing the stop block. The induction code plate is close to the second sensor and is inductively connected to the second sensor. The elastic member is respectively connected to the stop block and the slide seat, and is used to drive the slide seat to reset.

2. The material reclaiming mechanical arm according to claim 1, characterized in that: The first clamping jaw includes a body, a pushing block and a clamping block. A through hole is provided in the body. The clamping block includes a connecting end and a clamping end. The clamping end passes through the through hole and extends out of the body. One end of the pushing block is cooperatively connected to the connecting end. The other end of the pushing block is connected to the first clamping cylinder. The first clamping cylinder drives the pushing block to move so as to drive the clamping block to slide along the through hole, so that the clamping end has a clamping state close to the body and a relaxing state away from the body.

3. The material reclaiming mechanical arm according to claim 2, characterized in that: The connecting end is connected with a rotating shaft, the pushing block is provided with a guide groove, the guide groove is obliquely arranged, the rotating shaft is also movably arranged in the guide groove, the pushing block moves to drive the rotating shaft to slide along the guide groove, and further drives the clamping block to slide.

4. The material reclaiming mechanical arm according to claim 3, characterized in that: A guide tooth is arranged at one end of the push block away from the first clamping cylinder, the guide groove is arranged on the guide tooth, and the clamping block also has an avoidance groove, the guide tooth is arranged correspondingly with the avoidance groove, and is movably arranged in the avoidance groove.

5. The material reclaiming mechanical arm according to claim 4, characterized in that: The body is connected with a baffle, the baffle and the body form a cavity, the push block is arranged in the cavity, the baffle is provided with a groove, the groove is arranged correspondingly with the guide tooth, and in the clamping state, the guide tooth is also located in the groove; and / or, The main body is provided with a first sensor for sensing the carrier plate.

6. The material reclaiming mechanical arm according to claim 2, characterized in that: The clamping end is provided with a clamping plate, the main body is provided with a base surface and a clamping platform, the base surface and the clamping platform are respectively connected with guiding inclined surfaces, and the clamping plate cooperates with the clamping platform to clamp the carrier plate.

7. The material reclaiming mechanical arm according to claim 1, characterized in that: The material taking arm comprises a cross beam, the cross beam is connected to a base, the base is connected to the moving module, both ends of the cross beam are also connected to vertical beams, and the two vertical beams are respectively connected to the first clamping cylinders.

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