Film forming apparatus

Abstract

The invention relates to a film forming apparatus. The film forming equipment comprises a film forming unit; the film forming unit comprises a film forming chamber and a substrate supporting mechanism arranged in the film forming chamber; the film forming chamber comprises a main shell, a first door body and a second door body, a cavity with a first opening in one end and a second opening in the other opposite end is defined by the main shell, the first door body is connected to the main shell and seals the first opening, and the second door body is connected to the main shell and seals the second opening; the first door body is detachably connected with the main shell, and the first door body can slide to be not in contact with the main shell so as to open the first opening; and / or the second door body is detachably connected with the main shell, and the second door body can slide to be not in contact with the main shell so as to open the second opening. According to the film forming equipment, the detachable sliding door structure is adopted in the film forming chamber, the first door body and / or the second door body can be operated to open the film forming chamber, the interior of the substrate supporting mechanism and the interior of the film forming chamber can be conveniently cleaned and maintained, maintenance is convenient and rapid, and the maintenance efficiency can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of forming a thin film on a substrate surface, and in particular to a film forming device. Background Art

[0002] Vacuum coating equipment is a device that uses physical or chemical methods to coat substrates in a vacuum environment. In related technologies, the substrate support mechanism and coating material supply mechanism of the vacuum coating equipment are installed together inside the process chamber, and the distance between the coating material supply mechanism and the substrate support mechanism is small. It is difficult to maintain and clean the vacuum coating equipment, and some structural components need to be removed. The maintenance time is long, which affects the efficiency of the equipment. Summary of the invention

[0003] Based on this, it is necessary to provide a film forming equipment to address the problem of difficult maintenance of vacuum coating equipment.

[0004] A film forming device, comprising a film forming unit; the film forming unit comprises:

[0005] Mounting seat;

[0006] A film forming chamber, comprising a main shell, a first door body and a second door body, the main shell being fixedly arranged on the mounting seat, the main shell comprising a bottom wall, two side walls connected to opposite side edges of the bottom wall and a top wall connected to the two side walls and away from one end of the bottom wall, the bottom wall, the two side walls and the top wall jointly define a cavity having a first opening at one end and a second opening at the other end, the first door body being connected to the main shell and closing the first opening, the second door body being connected to the main shell and closing the second opening, the first door body, the second door body and the main shell being able to enclose an airtight film forming chamber, and the relative setting direction of the first opening and the second opening being a first direction;

[0007] A substrate support mechanism is disposed in the film forming chamber and is used to support the substrate for film forming;

[0008] Wherein, the first door body is detachably connected to the main shell body, and the first door body is slidably provided on the mounting seat, and the first door body can slide until it is out of contact with the main shell body to open the first opening; and / or, the second door body is detachably connected to the main shell body, and the second door body is slidably provided on the mounting seat, and the second door body can slide until it is out of contact with the main shell body to open the second opening.

[0009] In some embodiments, the film forming unit further comprises a moving component;

[0010] The moving assembly includes a first slide rail and a first slider, the first slide rail is arranged on the mounting seat and extends along the first direction, the first slider is slidably connected to the first slide rail, the first door body is connected to the first slider, the first slider supports the first door body on the first slide rail, and enables the first door body to slide along the first slide rail;

[0011] And / or, the moving component includes a second slide rail and a second slider, the second slide rail is arranged on the mounting seat and extends along the first direction, the second slider is slidably connected to the second slide rail, the second door body is connected to the second slider, the second slider supports the second door body on the second slide rail, and enables the second door body to slide along the second slide rail.

[0012] In some embodiments, the moving assembly further includes a first moving driving member, the first moving driving member is drivingly connected to the first door body or the first sliding block, and the first moving driving member is used to drive the first door body to slide along the first sliding rail;

[0013] And / or, the moving assembly further includes a second moving driving member, the second moving driving member is drivingly connected to the second door body or the second sliding block, and the second moving driving member is used to drive the second door body to slide along the second sliding rail.

[0014] In some embodiments, the substrate support mechanism is disposed on the first door body, and the first door body can drive the substrate support mechanism to be loaded into or moved out of the film forming chamber through the first opening;

[0015] The film forming unit further includes a gas supply device, which is disposed in the film forming chamber and configured to supply a film forming material into the film forming chamber.

[0016] In some embodiments, the substrate support mechanism includes a support cylinder, and the support cylinder is configured to be rotatable around its central axis;

[0017] Among them, the relative setting direction of the two side walls is the second direction, and the relative setting direction of the bottom wall and the top wall is the third direction; when the support tube is loaded into the film forming chamber, the central axis of the support tube is parallel to the first direction, and the two opposite sides of the support tube along the second direction respectively face the two side walls, and the two opposite sides of the support tube along the third direction respectively face the bottom wall and the top wall; the first direction, the second direction and the third direction are perpendicular to each other.

[0018] In some embodiments, the film forming chamber also includes two support arms connected to the first door body and a support beam connected to the two support arms, the two support arms are spaced apart along the second direction, and the first door body, the two support arms and the support beam jointly define an installation space; the support tube is located in the installation space, one axial end of the support tube is rotatably connected to the first door body, and the other axial end of the support tube is rotatably connected to the support beam.

[0019] In some embodiments, the support beam is supported along the third direction on a first side of the two support arms; wherein the first side of the support arm is a side facing the top wall when installed in the film forming chamber.

[0020] In some embodiments, a connecting portion is provided in the middle portion of the second side of the support beam protruding along the third direction, and the connecting portion is connected to the other axial end of the support tube; wherein the second side of the support beam is the side facing the bottom wall when loaded into the film forming chamber.

[0021] In some embodiments, the gas supply device includes a spray member, which is disposed in the film forming chamber and is configured to supply gas toward an outer peripheral wall of the support tube.

[0022] In some embodiments, the projection contour of the outer peripheral wall of the support tube along the first direction is circular; the spray member includes a spray plate, the spray plate has a first surface, the projection contour of the first surface along the first direction is an arc, and the arc radius of the first surface is greater than the circular radius of the outer peripheral wall of the support tube;

[0023] Wherein, when the support tube is installed in the film-forming chamber, the first surface of the shower plate surrounds part of the outer peripheral wall of the support tube and has a first gap between the first surface of the shower plate and the outer peripheral wall of the support tube.

[0024] In some embodiments, a ratio of a projection area of ​​the first surface on the outer peripheral wall of the support tube along the radial direction of the support tube to a surface area of ​​the outer peripheral wall of the support tube is 1 / 5 to 2 / 3.

[0025] In some embodiments, when the support tube is installed in the film forming chamber, along the second direction, the support arm is located between the side wall and the shower plate, and the shower plate is located between the support arm and the support tube;

[0026] And / or, the first gap is 2 mm to 10 mm.

[0027] In some embodiments, the base support mechanism also includes at least two support guide rollers, the axial direction of the support guide rollers is parallel to the first direction, and one axial end of the support guide rollers is connected to the first door body, and the other axial end of the support guide rollers is connected to the support beam.

[0028] In some embodiments, at least two of the support guide rollers are arranged on the first side of the support tube along the third direction, and at least two of the support guide rollers are spaced apart along the second direction; wherein the first side of the support tube is the side facing the top wall when loaded into the film forming chamber.

[0029] In some embodiments, at least two of the supporting guide rollers are spaced apart along the third direction.

[0030] In some embodiments, the base support mechanism further includes a support driving member, which is disposed on the first door body and is drivingly connected to the support tube, and the support driving member is used to drive the support tube to rotate.

[0031] In some embodiments, a projection profile of the top wall along the first direction is in an arc shape.

[0032] In some embodiments, the film forming device further comprises:

[0033] The unwinding and rewinding unit comprises an unwinding and rewinding chamber and an unwinding shaft and a rewinding shaft arranged in the unwinding and rewinding chamber; and

[0034] The transition unit includes a transition chamber and a gate valve structure arranged in the transition chamber. The transition chamber is connected between the winding and unwinding chamber and the film forming chamber. A conducting channel from the winding and unwinding chamber to the film forming chamber is formed inside the transition chamber. The gate valve structure is used to open or cut off the conducting channel.

[0035] The above-mentioned film forming equipment adopts a detachable sliding door structure in the film forming chamber, and the first door body and / or the second door body can be operated to open the film forming chamber, so that the substrate support mechanism and other parts can be disassembled and moved out of the film forming chamber, and the substrate support mechanism can be hoisted, disassembled, maintained or repaired. The disassembly and assembly are simple and convenient, and the cleaning and maintenance of the inside of the film forming chamber are also convenient. The maintenance is convenient and fast, which reduces the time spent on maintenance, improves the efficiency of maintenance, and is conducive to improving the utilization efficiency of the film forming equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] FIG. 1 is a schematic diagram of the three-dimensional structure of a film forming device according to some embodiments of the present application.

[0037] FIG. 2 is a front view of a film forming device according to some embodiments of the present application.

[0038] FIG. 3 is a top view of a film forming device according to some embodiments of the present application.

[0039] FIG. 4 is a cross-sectional view of a film forming device according to some embodiments of the present application.

[0040] Figure Number:

[0041] 100. Film forming equipment;

[0042] 10. Film forming unit; 1. Film forming chamber; 101. Film forming chamber; 11. Main shell; 111. Bottom wall; 112. Side wall; 113. Top wall; 114. First opening; 115. Second opening; 12. First door; 120. First side; 121. First door panel; 122. First base; 123. First reinforcing plate; 13. Second door; 131. Second door panel; 132. Second base; 133. Second reinforcing plate plate; 14, support arm; 15, support beam; 151, connection part; 2, base support mechanism; 21, support cylinder; 22, support guide roller; 3, mounting seat; 4, moving assembly; 41, first slide rail; 42, first slider; 43, second slide rail; 44, second slider; 45, first moving drive member; 46, second moving drive member; 5, gas providing device; 51, spray member; 511, spray plate; 510, first surface;

[0043] 20, winding and unwinding unit; 201, winding and unwinding chamber; 202, winding shaft; 203, unwinding shaft; 204, winding and unwinding chamber; 205, winding guide roller; 206, unwinding guide roller;

[0044] 30. transition unit; 301. transition chamber; 302. gate valve structure;

[0045] 200. Base material. DETAILED DESCRIPTION

[0046] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0047] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0048] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0049] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0050] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0051] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. An element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and are not intended to be the only implementation method.

[0052] In the related art, the substrate support mechanism and the coating material supply mechanism of the vacuum coating equipment are installed together in the process chamber, and the distance between the coating material supply mechanism and the substrate support mechanism is small. It is difficult to maintain and clean the vacuum coating equipment, and some structural components need to be removed, which takes a long time to maintain and affects the efficiency of the equipment.

[0053] Referring to FIGS. 1 to 4 , FIG. 1 shows a schematic diagram of the three-dimensional structure of a film forming device in some embodiments of the present application, FIG. 2 shows a front view of a film forming device in some embodiments of the present application, FIG. 3 shows a top view of a film forming device in some embodiments of the present application, and FIG. 4 shows a cross-sectional view of a film forming device in some embodiments of the present application; the film forming device 100 provided in the embodiment of the present application comprises a film forming unit 10; the film forming unit 10 comprises a mounting seat 3, a film forming chamber 1 and a substrate support mechanism 2. The film forming chamber 1 comprises a main housing 11, a first door body 12 and a second door body 13, and the main housing 11 is fixedly arranged on the mounting seat 3. The main housing 11 comprises a bottom wall 111, two side walls 112 connected to opposite sides of the bottom wall 111, and a top wall 113 connected to the two side walls 112 and away from one end of the bottom wall 111, and the bottom wall 111, the two side walls 112 and the top wall 113 jointly define a cavity having a first opening 114 at one end and a second opening 115 at the opposite other end. The first door body 12 is connected to the main shell 11 and closes the first opening 114, the second door body 13 is connected to the main shell 11 and closes the second opening 115, and the first door body 12, the second door body 13 and the main shell 11 can enclose an airtight film-forming chamber 101. The relative setting direction of the first opening 114 and the second opening 115 is a first direction. The substrate support mechanism 2 is arranged in the film-forming chamber 101 to support the substrate 200 for film formation. Among them, the first door body 12 is detachably connected to the main shell 11, and the first door body 12 is slidably arranged on the mounting seat 3; the first door body 12 can slide to no contact with the main shell 11 to open the first opening 114. And / or, the second door body 13 is detachably connected to the main shell 11, and the second door body 13 is slidably arranged on the mounting seat 3; the second door body 13 can slide to no contact with the main shell 11 to open the second opening 115.

[0054] As shown in FIGS. 1 to 3 , the X direction is a first direction, the Y direction is a second direction, and the Z direction is a third direction, and the X direction, the Y direction, and the Z direction are perpendicular to each other.

[0055] The film forming unit 10 is used to deposit a thin film on the surface of the substrate 200 in a vacuum environment by using a deposition process. For example, the deposition process may include an atomic layer deposition (ALD) process, a physical vapor deposition (PVD) process, a chemical vapor deposition (CVD) process, and the like.

[0056] In the film forming unit 10, the film forming chamber 1 is used to provide a reaction space for the thin film deposition process. In the film forming chamber 1, the interior of the main shell 11 has a cavity, and the two opposite ends of the main shell 11 along the first direction have openings connected to the cavity, wherein the opening at one end is a first opening 114, and wherein the opening at the other end is a second opening 115. The first door body 12 is connected to the main shell 11 and closes the first opening 114, and the second door body 13 is connected to the main shell 11 and closes the second opening 115, thereby enclosing an airtight film forming chamber 101. The bottom wall 111 of the main shell 11 constitutes the bottom inner wall of the film forming chamber 101, the side walls 112 of the main shell 11 constitute the inner walls on both sides of the film forming chamber 101 along the second direction, and the top wall 113 of the main shell 11 constitutes the top inner wall of the film forming chamber 101; the first door body 12 and the second door body 13 constitute the inner walls on both sides of the film forming chamber 101 along the first direction. The airtight film-forming chamber 101 can be switched between an atmospheric environment and a vacuum environment. For example, the film-forming chamber 101 can be evacuated so that the process pressure in the film-forming chamber 101 reaches 1 torr to 10 torr (Torr is a unit of pressure, 1 Torr is 1 mmHg, equal to 133.3223684 Pa), so that the film-forming chamber 101 is in the vacuum environment required for the deposition process.

[0057] The substrate support mechanism 2 is used to support the substrate 200 in the film forming chamber 101 to perform surface coating on the substrate 200. For example, the substrate 200 can be a flexible film material that can be rolled up. For example, the substrate support mechanism 2 can include a roller support mechanism, a support platform or a support bracket.

[0058] When the film forming device 100 is in use, the first door body 12 closes the first opening 114, and the second door body 13 closes the second opening 115, so that an airtight film forming chamber 101 is formed inside the film forming chamber 1. In the film forming chamber 101, the substrate 200 is supported on the substrate support mechanism 2, so that the film forming chamber 101 is in a vacuum environment, and the film forming material is provided to the surface of the substrate 200, so as to achieve the deposition of a thin film on the surface of the substrate 200.

[0059] The mounting base 3 provides a mounting base for the film forming chamber 1. The main housing 11 is fixed on the mounting base 3, and the first opening 114 and the second opening 115 of the main housing 11 are arranged opposite to each other along a first direction. The first door body 12 is located on the side of the main housing 11 where the first opening 114 is provided. The second door body 13 is located on the side of the main housing 11 where the second opening 115 is provided.

[0060] Among them, the first door body 12 can be detachably connected to the main shell 11, and the first door body 12 can be slidably arranged on the mounting seat 3, while the second door body 13 can be non-detachably connected to the main shell 11. It is also possible that the first door body 12 is non-detachably connected to the main shell 11, while the second door body 13 is detachably connected to the main shell 11, and the second door body 13 is slidably arranged on the mounting seat 3. Thus, the first door body 12 or the second door body 13 can be detached from the main shell 11 to form a single-sided detachable sliding door structure. It is also possible that both the first door body 12 and the second door body 13 are detachably connected to the main shell 11, and the first door body 12 and the second door body 13 can be slidably arranged on the mounting seat 3, and the first door body 12 and the second door body 13 can be detached from the main shell 11 to form a double-sided detachable sliding door structure. The first door body 12 and / or the second door body 13 may be slidably disposed on the mounting seat 3 along a first direction, or may be slidably disposed on the mounting seat 3 along a second direction, a third direction or other directions, and the embodiments of the present application are not limited thereto.

[0061] When the film forming device 100 is maintained, the first door body 12 and / or the second door body 13 can be operated to be disassembled and separated from the main housing 11, and the first door body 12 and / or the second door body 13 can be slid until they are not in contact with the main housing 11, thereby opening the first opening 114 and / or the second opening 115. At this time, through the opened first opening 114 and / or the second opening 115, it is convenient to disassemble and move parts such as the substrate support mechanism 2 out of the film forming chamber 101, thereby facilitating the lifting, disassembly, maintenance or repair of the substrate support mechanism 2; at the same time, it is convenient to directly clean the process dust on the surface of the substrate support mechanism 2, and to clean and maintain the inside of the film forming chamber 101.

[0062] In some embodiments, for the double-sided detachable sliding door structure, the first door body 12 can be a driving side door, which can be used to install and drive the substrate support mechanism 2; the second door body 13 can be a process chamber side door. The first door body 12 and the second door body 13 can be moved and opened separately. After operating the first door body 12 to open the first opening 114, the substrate support mechanism 2 and the inside of the film forming chamber 101 can be cleaned and maintained; after operating the second door body 13 to open the second opening 115, the substrate 200 can be replaced or other maintenance operations that do not require major maintenance can be performed through the second opening 115. In this way, disassembly and assembly operations can be reduced, maintenance can be more convenient and quick, and the efficiency of equipment use can be further improved.

[0063] The film forming equipment 100 of the embodiment of the present application adopts a detachable sliding door structure through the film forming chamber 1, and the first door body 12 and / or the second door body 13 are simple and convenient to disassemble and assemble with the main shell 11; when the film forming equipment 100 is maintained, the first door body 12 and / or the second door body 13 can be operated to open the film forming chamber 101, so that the substrate support mechanism 2 and other components can be disassembled and moved out of the film forming chamber 101, and the substrate support mechanism 2 can be hoisted, disassembled, maintained or repaired, and the disassembly and assembly are simple and convenient; at the same time, it is convenient to clean and maintain the inside of the film forming chamber 101, and the maintenance is convenient and quick, which reduces the time spent on maintenance, improves the efficiency of maintenance, and is conducive to improving the use efficiency of the film forming equipment 100.

[0064] In some embodiments, referring to FIG. 1 to FIG. 3 , the film forming unit 10 further includes a moving assembly 4 . The moving assembly 4 is used to slidably mount the first door body 12 and / or the second door body 13 on the mounting seat 3 .

[0065] In some embodiments, the moving component 4 includes a first slide rail 41 and a first slider 42, the first slide rail 41 is provided on the mounting seat 3 and extends along the first direction, the first slider 42 is slidably connected to the first slide rail 41; the first door body 12 is connected to the first slider 42, the first slider 42 supports the first door body 12 on the first slide rail 41, and enables the first door body 12 to slide along the first slide rail 41.

[0066] The first door body 12 is detachably connected to the main housing 11, and the first door body 12 is slidably supported on the first slide rail 41 through the first slider 42, so that the first door body 12 can be slidably installed on the mounting seat 3. The first slide rail 41 is located on the side of the main housing 11 where the first opening 114 is provided, and the extension direction of the first slide rail 41 is parallel to the first direction. The first door body 12 slides along the first slide rail 41, that is, the first door body 12 can slide along the first direction to approach or move away from the first opening 114 on the main housing 11.

[0067] In some embodiments, the moving component 4 includes a second slide rail 43 and a second slider 44. The second slide rail 43 is disposed on the mounting base 3 and extends along the first direction. The second slider 44 is slidably connected to the second slide rail 43. The second door body 13 is connected to the second slider 44. The second slider 44 supports the second door body 13 on the second slide rail 43 and enables the second door body 13 to slide along the second slide rail 43.

[0068] The second door body 13 is detachably connected to the main housing 11, and the second door body 13 is slidably supported on the second slide rail 43 through the second slider 44, so that the second door body 13 can be slidably installed on the mounting seat 3. The second slide rail 43 is located on the side of the main housing 11 where the second opening 115 is provided, and the extension direction of the second slide rail 43 is parallel to the first direction. The second door body 13 slides along the second slide rail 43, that is, the second door body 13 can slide along the first direction to approach or move away from the second opening 115 of the main housing 11.

[0069] In some embodiments, the main housing 11 is fixed on the mounting base 3; the first slide rail 41 and the second slide rail 43 are disposed on the mounting base 3 and are located on opposite sides of the main housing 11 along the first direction. For example, the mounting base 3 may include a ground rail, and the first slide rail 41 and the second slide rail 43 may include linear rails disposed on the ground rail.

[0070] By setting the first slide rail 41 and / or the second slide rail 43, a guiding and limiting role can be played on the assembly and disassembly movement of the first door body 12 and / or the second door body 13 and the main shell body 11. The first door body 12 and / or the second door body 13 can move smoothly, and the assembly and disassembly with the main shell body 11 is simpler and more convenient, thereby further improving the maintenance efficiency, making the maintenance convenient and quick, reducing the maintenance time, and improving the utilization efficiency of the film forming equipment 100.

[0071] In some embodiments, referring to FIGS. 1 to 3 , the moving assembly 4 further includes a first moving driving member 45 , which is transmission-connected to the first door body 12 or the first sliding block 42 ; the first moving driving member 45 is used to drive the first door body 12 to slide along the first sliding rail 41 .

[0072] The first door body 12 is slidably supported on the first slide rail 41 through the first slider 42, and the first door body 12 is slidably mounted on the mounting seat 3. The first moving driving member 45 may include a linear motion pair to drive the first door body 12 to move along the first direction. For example, the linear motion pair may include a ball screw, a worm gear, a gear rack, a linear motor, a hydraulic push rod, etc., as long as linear drive can be achieved.

[0073] In some embodiments, two first slide rails 41 may be provided, and the two first slide rails 41 are parallel to each other and arranged at intervals along the second direction; the first door body 12 is slidably supported on the two first slide rails 41; the first moving driving member 45 is provided on the mounting seat 3 and is located between the two first slide rails 41. In this way, the support for the first door body 12 is more stable and reliable, and the first door body 12 moves more smoothly, which is conducive to improving the reliability of the disassembly and assembly of the first door body 12 and the main housing 11.

[0074] In some embodiments, referring to FIG. 1 and FIG. 3 , the moving assembly 4 further includes a second moving driving member 46 , which is transmission-connected to the second door body 13 or the second slider 44 ; the second moving driving member 46 is used to drive the second door body 13 to slide along the second slide rail 43 .

[0075] The second door body 13 is slidably supported on the second slide rail 43 through the second slider 44, and the second door body 13 is slidably mounted on the mounting seat 3. The second moving driving member 46 may include a linear motion pair to drive the second door body 13 to move along the first direction. For example, the linear motion pair may include a ball screw, a worm gear, a gear rack, a linear motor, a hydraulic push rod, etc., as long as linear drive can be achieved.

[0076] In some embodiments, two second slide rails 43 may be provided, the two second slide rails 43 are parallel to each other and arranged at intervals along the second direction; the second door body 13 is slidably supported on the two second slide rails 43; the second moving driving member 46 is provided on the mounting base 3 and is located between the two second slide rails 43. In this way, the support for the second door body 13 is more stable and reliable, and the second door body 13 moves more smoothly, which is conducive to improving the reliability of the disassembly and assembly of the second door body 13 and the main housing 11.

[0077] By setting a first movable driving member 45 to drive the first door body 12 to slide and / or setting a second movable driving member 46 to drive the second door body 13 to slide, the movement of the first door body 12 and / or the second door body 13 is smoother, and the disassembly and assembly with the main shell body 11 is simpler and more convenient, which is conducive to further improving the maintenance efficiency.

[0078] In some embodiments, referring to FIG. 1 and FIG. 2 , the first door body 12 includes a first door plate 121, a first base 122 and a first reinforcing plate 123; the first door plate 121 may have a first side surface 120, and when the first door body 12 is detachably covered at the first opening 114, the first door plate 121 is sealed and connected to the main housing 11, and the first side surface 120 closes the first opening 114, which can improve the airtightness of the film forming chamber 101. The first base 122 is connected to the bottom of the first door plate 121 and is located on the side of the first door plate 121 away from the first side surface 120; the first base 122 is used to connect the first slider 42 to support the first door body 12 on the first slide rail 41. The first reinforcing plate 123 is connected to the side of the first door plate 121 away from the first side surface 120 and the first base 122, and the width dimension of the end of the first reinforcing plate 123 connected to the first base 122 is greater than the width dimension of the end of the first reinforcing plate 123 away from the first base 122. For example, the first reinforcing plate 123 may include a triangular rib plate. In some embodiments, the structure of the second door body 13 may be substantially the same as that of the first door body 12, and the second door body 13 includes a second door plate 131, a second base 132, and a second reinforcing plate 133. By providing the first reinforcing plate 123 and the second reinforcing plate 133, the structural strength of the first door body 12 and the second door body 13 may be improved, and the reliability and service life of the film forming device 100 may be improved.

[0079] In some embodiments, referring to Figures 1 to 3, the substrate support mechanism 2 is disposed on the first door body 12, and the first door body 12 can drive the substrate support mechanism 2 to be loaded into or removed from the film forming chamber 101 through the first opening 114. The film forming unit 10 also includes a gas supply device 5, which is disposed in the film forming chamber 1, and the gas supply device 5 is configured to supply film forming materials into the film forming chamber 101.

[0080] The gas supply device 5 is used to supply the gas phase film forming material to the surface of the substrate 200 supported by the substrate support mechanism 2 in the film forming chamber 101, so that the gas phase film forming material can be adsorbed on the surface of the substrate 200 and react to form a deposited film. The gas supply device 5 can use a gas advection or spray mode to supply the film forming material into the film forming chamber 101, which is not limited here.

[0081] When the film forming equipment 100 is maintained, the substrate support mechanism 2 can be removed from the film forming chamber 101 along with the first door body 12, while the gas supply device 5 remains in the film forming chamber 101, so that the substrate support mechanism 2 and the gas supply device 5 are kept away from each other, which is convenient for directly cleaning the process dust on the surface of the substrate support mechanism 2 and the surface of the gas supply device 5, and reducing the disassembly and assembly of the gas supply device 5; and the substrate support mechanism 2 is moved out of the film forming chamber 101, which is convenient for hoisting, disassembling, maintaining or repairing the substrate support mechanism 2, and the disassembly and installation are convenient; after the substrate support mechanism 2 is moved out of the film forming chamber 101, it is convenient to maintain the gas supply device 5 in the film forming chamber 101. In this way, the maintenance of the film forming equipment 100 is convenient and quick, which reduces the time spent on maintenance and improves the efficiency of maintenance.

[0082] In some embodiments, referring to FIGS. 1 to 4 , the substrate support mechanism 2 includes a support cylinder 21, which is configured to be able to rotate around its own central axis. The relative setting direction of the two side walls 112 is the second direction, and the relative setting direction of the bottom wall 111 and the top wall 113 is the third direction. When the support cylinder 21 is loaded into the film forming chamber 101, the central axis of the support cylinder 21 is parallel to the first direction. The two sides of the support cylinder 21 opposite to each other along the second direction face the two side walls 112 respectively, and the two sides of the support cylinder 21 opposite to each other along the third direction face the bottom wall 111 and the top wall 113 respectively. The first direction, the second direction, and the third direction are perpendicular to each other.

[0083] The support tube 21 is rotatably disposed on the first door body 12 , and the first door body 12 can move and drive the support tube 21 to be loaded into or removed from the film forming chamber 101 .

[0084] When the support cylinder 21 is loaded into the film forming chamber 101, the gas supply device 5 is located on the outer peripheral side of the support cylinder 21. The substrate 200 can be a flexible film material that can be rolled up, and the substrate 200 can be supported on the outer peripheral wall of the support cylinder 21, so that the substrate 200 can be supported in the film forming chamber 101 with a vacuum environment; at the same time, the support cylinder 21 can rotate around the central axis of the support cylinder 21, driving the substrate 200 supported on the outer peripheral surface of the support cylinder 21 to move, thereby realizing the conveying of the substrate 200; for example, the support cylinder 21 can be driven to rotate by a driving member such as a motor. In some embodiments, the support cylinder 21 can be set as a rotating body, for example, the support cylinder 21 can be a cylindrical roller, a truncated cone roller or a spindle roller. In the film forming chamber 101, when the substrate 200 bypasses the support cylinder 21, the gas supply device 5 supplies the gas phase film forming material to the surface of the substrate 200, and the gas phase film forming material effectively reacts with the surface of the substrate 200 to form a deposited film.

[0085] During maintenance, the support tube 21 is disassembled together with the first door body 12 and moved out of the film forming chamber 101, while the gas providing device 5 remains in the film forming chamber 101, so that the support tube 21 and the gas providing device 5 are kept away from each other, making it convenient to directly clean the process dust on the surface of the support tube 21.

[0086] In this way, the embodiment of the present application can provide a drum-winding vacuum coating equipment, which can improve the film forming quality and production efficiency, and is convenient and quick to maintain, reduces maintenance time, improves maintenance efficiency, and is conducive to improving the use efficiency of the film forming equipment 100.

[0087] In some embodiments, referring to Figures 1 to 4, the film forming chamber 1 further includes two support arms 14 connected to the first door body 12 and a support beam 15 connected to the two support arms 14, the two support arms 14 are arranged at intervals along the second direction, and the first door body 12, the two support arms 14 and the support beam 15 jointly define an installation space. The support cylinder 21 is located in the installation space, and one axial end of the support cylinder 21 is rotatably connected to the first door body 12, and the other axial end of the support cylinder 21 is rotatably connected to the support beam 15.

[0088] One end of the two support arms 14 is connected to the first door body 12 to form a cantilever structure. The support beam 15 is connected to the other end of the two support arms 14, thereby enclosing a quadrilateral installation space. The support cylinder 21 is rotatably accommodated in the installation space. For example, the support cylinder 21 can be driven to rotate by a drive motor, and the drive motor is fixed to the first door body 12. In some embodiments, referring to Figures 1 and 2, the support arm 14 has a weight-reducing design, for example, the support arm 14 can be set to a frame structure with holes or hollow areas; in this way, it is convenient to directly clean the surface of the support cylinder 21, and it can also save materials and reduce costs.

[0089] By installing the support tube 21 through a cantilever structure, the support tube 21 can be rotatably supported in the film forming chamber 101 in mid-air, which is beneficial to increasing the supporting area of ​​the support tube 21 for the substrate 200, and is beneficial to improving the film forming efficiency of the film forming equipment 100. It is also convenient to directly clean the surface of the support tube 21, which facilitates maintenance and improves maintenance efficiency.

[0090] 1 and 2 , the support beam 15 is supported along the third direction on the first side of the support arm 14 , wherein the first side of the support arm 14 is the side facing the top wall 113 when the support arm 14 is installed in the film forming chamber 101 .

[0091] The third direction may be parallel to the vertical direction, and the support beam 15 is supported on the first side of the support arm 14, that is, the support beam 15 is supported on the upper side of the support arm 14. In this way, the support beam 15 has a stronger bearing capacity, the support is stable and reliable, and a larger support cylinder 21 can be used to further increase the support area of ​​the support cylinder 21, which is beneficial to improving the film forming efficiency of the film forming device 100.

[0092] In some embodiments, referring to Fig. 1, a connecting portion 151 is provided in the middle of the second side of the support beam 15 protruding along the third direction, and the connecting portion 151 is connected to the other axial end of the support tube 21. The second side of the support beam 15 is the side facing the bottom wall 111 when installed in the film forming chamber 101.

[0093] The third direction can be parallel to the vertical direction, the second side of the support beam 15, that is, the lower side of the support beam 15. That is, a downwardly protruding connecting portion 151 is provided in the middle of the lower side of the support beam 15. The connecting portion 151 is used to rotatably connect the support tube 21. In some embodiments, the positive projection shape of the connecting portion 151 along the first direction can be an inverted trapezoid, etc. By setting the connecting portion 151 to protrude downward, the supporting position of the support tube 21 can be sunken, and the supporting height of the support tube 21 by the first door body 12 can be reduced. Since the supporting height of the support tube 21 is reduced, the height of the top wall 113 of the main shell 11 can be reduced. In this way, it is beneficial to reduce the volume of the film forming chamber 1, save occupied space, and reduce costs.

[0094] In some embodiments, referring to FIG. 1 and FIG. 3 , the gas supply device 5 includes a spray member 51 , which is disposed in the film forming chamber 101 ; the spray member 51 is configured to supply gas toward the outer peripheral wall of the support tube 21 .

[0095] The spray part 51 is located in the film forming chamber 101 and on the outer peripheral side of the support tube 21. The gas supply device 5 uses the spray part 51 to spray the film forming material to the substrate 200 supported on the outer peripheral surface of the support tube 21 in the film forming chamber 101. At this time, the gas phase film forming material does not fill the entire film forming chamber 101, but is locally supplied to the surface of the substrate 200. The gas phase film forming material simultaneously performs film forming treatment on the surface of the substrate 200 at different positions of the substrate 200. In order to obtain a better spraying effect and improve the film-forming effect, the spraying part 51 can be arranged close to the outer peripheral wall of the support tube 21, so that the distance between the support tube 21 and the spraying part 51 is small, which is conducive to the spraying part 51 spraying the gas-phase film-forming material to the substrate 200; at the same time, since the support tube 21 can be removed from the film-forming chamber 101 along with the disassembly of the first door body 12, it is convenient to directly clean the process dust on the surface of the support tube 21 and the surface of the spraying part 51, which is convenient for maintenance, can reduce the disassembly and assembly operations, improve the maintenance efficiency, and can improve the problem that the equipment maintenance and cleaning are difficult due to the small distance between the support tube 21 and the spraying part 51, and a part of the structural components need to be removed to separate the two. .

[0096] In some embodiments, referring to FIG. 1 , FIG. 3 and FIG. 4 , the projection profile of the outer peripheral wall of the support tube 21 along the first direction is circular. The spray member 51 includes a spray plate 511, and the spray plate 511 has a first surface 510, and the projection profile of the first surface 510 along the first direction is an arc. And the arc radius of the first surface 510 is greater than the circular radius of the outer peripheral wall of the support tube 21. Among them, when the support tube 21 is loaded into the film forming chamber 101, the first surface 510 of the spray plate 511 surrounds part of the outer peripheral wall of the support tube 21, and has a first gap D1 between the outer peripheral wall of the support tube 21.

[0097] In some embodiments, the film forming device 100 may be an ALD (Atomic layer deposition) roll-to-roll vacuum coating device. When the film forming device 100 is in use, the support tube 21 and the spray plate 511 are co-located inside the film forming chamber 101, and the substrate 200 on the support tube 21 is coated by the spray plate 511. According to the principle of atomic layer deposition, in the film forming chamber 101, when the substrate 200 bypasses the support tube 21, the spray plate 511 supplies the gas phase film forming material to the surface of the substrate 200, and the gas phase film forming material effectively reacts with the surface of the substrate 200, thereby realizing the deposition of a single atomic layer and forming a deposited thin film; at least two gases can be continuously introduced into the surface of the substrate 200 in the heated film forming chamber 101 for surface reaction, thereby realizing a thermal atomic layer deposition coating process for the substrate 200.

[0098] The support tube 21 may be a cylinder. The first surface 510 of the spray plate 511 may be a concave arc surface, and the first surface 510 may be arranged around the outer peripheral wall of the support tube 21, so that the shape of the first surface 510 is adapted to the shape of the outer peripheral wall of the support tube 21. In some embodiments, when the support tube 21 is loaded into the film forming chamber 101, the central axis of the first surface 510 of the spray plate 511 is substantially coincident with the central axis of the support tube 21; thus, the spacing of the first gap D1 is the difference between the radius of curvature of the first surface 510 and the radius of the outer peripheral wall of the support tube 21. In some embodiments, the spray plate 511 may be arranged in the film forming chamber 101.

[0099] By using an arc-shaped spray plate 511 with an arc surface shape that is compatible with the shape of the outer peripheral wall of the support tube 21 for spraying, it is beneficial to reduce the distance between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support tube 21, that is, the spacing of the first gap D1 can be controlled to be reduced, which is beneficial to improving the spraying effect on the substrate 200 and the film-forming effect, and the structure is compact and saves space.

[0100] At the same time, since the support tube 21 can be removed from the film forming chamber 101 along with the disassembly of the first door body 12, it is convenient to directly clean the process dust on the surface of the support tube 21 and the surface of the spray plate 511, so that there is no need to disassemble the spray plate 511 during maintenance, thereby reducing disassembly and installation, reducing maintenance time, improving equipment maintenance efficiency, and then improving equipment utilization rate, thereby improving maintenance difficulties caused by the close distance between the spray plate 511 and the support tube 21, and cumbersome regular maintenance.

[0101] In some embodiments, referring to FIG. 1 and FIG. 4 , a ratio of a projection area S1 of the first surface 510 on the outer peripheral wall of the support tube 21 along the radial direction of the support tube 21 to a surface area S2 of the outer peripheral wall of the support tube 21 is 1 / 5 to 2 / 3.

[0102] It can be understood that the projection range of the first surface 510 of the spray plate 511 on the outer peripheral wall of the support tube 21 is approximately equal to the spray coverage range of the spray plate 511 when spraying the support tube 21. The spray coverage range of the spray plate 511 on the support tube 21 is greater than or equal to 1 / 5 of the surface area S2 of the outer peripheral wall of the support tube 21, and less than or equal to 2 / 3 of the surface area S2 of the outer peripheral wall of the support tube 21. For example, the ratio of the projection area S1 of the first surface 510 on the outer peripheral wall of the support tube 21 along the radial direction of the support tube 21 to the surface area S2 of the outer peripheral wall of the support tube 21 is 1 / 2, that is, the spray plate 511 can cover half of the outer peripheral wall surface of the support tube 21 when spraying the support tube 21.

[0103] In this way, the spray plate 511 can spray a larger area of ​​the substrate 200, which is beneficial to improving the spraying efficiency of the substrate 200 and improving production efficiency.

[0104] In some embodiments, referring to FIG. 4 , when the support tube 21 is loaded into the film forming chamber 101 , along the second direction, the support arm 14 is located between the side wall 112 and the spray plate 511 , and the spray plate 511 is located between the support arm 14 and the support tube 21 .

[0105] In the second direction, the support cylinder 21 is accommodated between the two support arms 14, the support arm 14 is accommodated in the gap between the support cylinder 21 and the side wall 112 of the main shell 11, and the spray plate 511 is accommodated in the gap between the support arm 14 and the support cylinder 21. Therefore, the support cylinder 21, the spray plate 511 and the support arm 14 are arranged in an overlapping manner in the film forming chamber 101. In this way, it is helpful to reduce the spacing of the first gap D1 between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support cylinder 21, and the spray effect on the substrate 200 is better. At the same time, it is prevented that the support arm 14 blocks the spray path, which is conducive to improving the film forming effect, and the structure is compact and saves space.

[0106] In some embodiments, when the support tube 21 is loaded into the film-forming chamber 101, the opposite sides of the connecting portion 151 of the support beam 15 can avoid the spray plate 511, so as to facilitate the installation of the spray plate 511 to the outer peripheral side of the support tube 21, which is beneficial to further reduce the distance between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support tube 21, thereby improving the spraying effect and further improving the film-forming effect.

[0107] In some embodiments, referring to FIG. 1 and FIG. 4 , the first gap D1 is 2 mm to 10 mm.

[0108] The first gap D1 between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support tube 21 may be greater than or equal to 2 mm and less than or equal to 10 mm. It can be understood that the smaller the first gap D1, the smaller the distance between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support tube 21, and the better the spray effect of the spray plate 511 on the substrate 200; however, due to the small distance between the support tube 21 and the spray plate 511, when the support tube 21 moves with the first door body 12 and is loaded into or removed from the film forming chamber 101, there is a risk that the support tube 21 shakes and causes the support tube 21 to collide with the spray plate 511.

[0109] By setting the first gap D1 within the range of 2 mm to 10 mm, it is beneficial to improve the spraying effect on the substrate 200 and the film-forming effect. At the same time, it is convenient for the support tube 21 to move with the first door body 12 to be loaded into or removed from the film-forming chamber 101, thereby reducing interference. The first door body 12 moves smoothly and is easy to disassemble and assemble with the main shell 11, thereby improving maintenance efficiency.

[0110] In some embodiments, referring to Figures 1 and 4, the base support mechanism 2 also includes at least two support guide rollers 22, and the axial direction of the support guide roller 22 is parallel to the first direction; and one axial end of the support guide roller 22 is connected to the first door body 12, and the other axial end of the support guide roller 22 is connected to the support beam 15.

[0111] The support guide roller 22 is used to guide the substrate 200 to the support cylinder 21, and can tighten the substrate 200, which is conducive to conveying the substrate 200 as tightly as possible, thereby facilitating improving the film forming effect. The number of the support guide rollers 22 can be at least two, such as two, three, four or more. In some embodiments, the two support guide rollers 22 are symmetrically arranged on opposite sides of the support cylinder 21.

[0112] In some embodiments, referring to Figures 1 to 4, at least two supporting guide rollers 22 are disposed on the first side of the supporting tube 21 along the third direction, and at least two supporting guide rollers 22 are spaced apart along the second direction. The first side of the supporting tube 21 is the side facing the top wall 113 when the supporting tube 21 is loaded into the film forming chamber 101.

[0113] The third direction may be a vertical direction. The first side of the support tube 21 may be an upper side of the support tube 21. Since at least two support guide rollers 22 are both located on the first side of the support tube 21, the substrate 200 may be guided from the first side of the support tube 21 to the support tube 21, and after bypassing the second side of the support tube 21, the substrate 200 may be guided away from the support tube 21 from the first side of the support tube 21. Since the two support guide rollers 22 are spaced apart along the second direction, the substrate 200 may be guided from the support guide roller 22 at one position in the second direction to the support tube 21, and may be guided away from the support tube 21 by the support guide roller 22 at another position in the second direction.

[0114] By arranging the support guide rollers 22 on the first side of the support tube 21, the substrate 200 can be guided from the first side of the support tube 21 to and away from the support tube 21, so that the substrate 200 can bypass the second side of the support tube 21, making it convenient for the gas providing device 5 located on the second side of the support tube 21 to supply film-forming materials to the substrate 200. It can also avoid interference between the substrate 200 and the spray plate 511, making it convenient for the spray plate 511 to surround the second side of the support tube 21, thereby helping to reduce the distance between the first surface 510 of the spray plate 511 and the outer peripheral wall of the support tube 21, which is beneficial to improving the spraying effect on the substrate 200, and further improving the film-forming effect.

[0115] In some embodiments, referring to FIG. 1 and FIG. 4 , at least two supporting guide rollers 22 are arranged at intervals along the third direction.

[0116] The substrate 200 can be guided to the support cylinder 21 by the support guide roller 22 at one position in the third direction, and can be guided away from the support cylinder 21 by the support guide roller 22 at another position in the third direction. At the same time, since the substrate 200 can be guided to and away from the support cylinder 21 by the support guide rollers 22 at different positions in the second direction, the interference between the substrate 200 guided to and away from the support cylinder 21 can be reduced, and it is convenient to guide and away from the support cylinder 21 by the same side of the support cylinder 21 in the second direction, which is convenient for conveying the substrate 200, and the structure is compact, which saves space and is conducive to reducing the volume of the film forming chamber 1.

[0117] In some embodiments, the substrate support mechanism 2 may further include a support driving member (not shown), which is located on the first door body 12 and is in transmission connection with the support cylinder 21, and is used to drive the support cylinder 21 to rotate. For example, the support driving member may include a motor. The support cylinder 21 is driven to rotate by the support driving member, thereby driving the substrate 200 supported on the outer peripheral surface of the support cylinder 21 to move, thereby realizing the conveyance of the substrate 200.

[0118] In some embodiments, referring to FIG. 1 and FIG. 4 , a projection profile of the top wall 113 along the first direction is an arc shape.

[0119] By setting the top wall 113 of the main housing 11 as an arc-shaped wall, it can be adapted to the shape of the outer peripheral wall of the support tube 21. In this way, the structure of the film forming chamber 1 can be made more compact, which is conducive to reducing the volume of the film forming chamber 1 and saving the space occupied by the film forming chamber 1.

[0120] In some embodiments, referring to FIG. 1 , FIG. 3 and FIG. 4 , the film forming device 100 further includes a reel unit 20 and a transition unit 30. The reel unit 20 includes a reel chamber 201 and an unwinding shaft 203 and a rewinding shaft 202 disposed in the reel chamber 201. The transition unit 30 includes a transition chamber 301 and a gate valve structure 302 disposed in the transition chamber 301. The transition chamber 301 is connected between the reel chamber 201 and the film forming chamber 1. A conduction channel from the reel chamber 201 to the film forming chamber 1 is formed inside the transition chamber 301. The gate valve structure 302 is used to conduct or cut off the conduction channel.

[0121] The unwinding unit 20 is used for functions such as unwinding, winding, flattening and tension control of the substrate 200 roll; wherein, the unwinding chamber 201 has an unwinding chamber 204 inside, and the unwinding shaft 203 and the winding shaft 202 are arranged in the unwinding chamber 204. The unwinding shaft 203 is used to unwind the substrate 200 roll, and the winding shaft 202 is used to wind the substrate 200 roll. In some embodiments, the unwinding unit 20 further includes an unwinding guide roller 206 and a winding guide roller 205, wherein the unwinding guide roller 206 is arranged close to the unwinding shaft 203, and the winding guide roller 205 is arranged close to the winding shaft 202, and the unwinding guide roller 206 and the winding guide roller 205 can be used for flattening and tension control of the substrate 200. The transition chamber 301 is used to conduct the unwinding chamber 201 and the film forming chamber 1, so as to transport the substrate 200 between the unwinding chamber 201 and the film forming chamber 1. A gate valve structure 302 is also provided in the transition chamber 301. Closing the gate valve structure 302 can cut off the conduction between the winding and unwinding chamber 201 and the film forming chamber 1. The specific structure of the gate valve structure 302 is not limited here.

[0122] Before using the film forming device 100, the first door body 12 can be operated to be disassembled and separated from the main shell 11, so that the first door body 12 opens the first opening 114, and the support cylinder 21 can be moved out of the film forming chamber 101 along with the first door body 12. At this time, it is convenient to directly clean and inspect the surface of the support cylinder 21 and the first surface 510 of the spray plate 511, and it is also convenient to clean and inspect the inside of the film forming chamber 101. The second door body 13 can also be operated to be disassembled and separated from the main shell 11, so that the second door body 13 opens the second opening 115. At this time, the substrate 200 can be replaced or other maintenance operations that do not require major maintenance can be performed through the second opening 115.

[0123] When the film forming equipment 100 is in use, the interiors of the film forming chamber 1, the winding and unwinding chamber 201, and the transition chamber 301 are all in a vacuum environment, and the process pressure is 1 to 10 torr; the substrate 200 reaches the interior of the transition chamber 301 from the unwinding shaft 203 through the unwinding guide roller 206, and then reaches the film forming chamber 101 through the gate valve structure 302 opened in the transition chamber 301, passes through the support cylinder 21 for the coating process, returns to the transition chamber 301 through the support guide roller 22, and then reaches the winding shaft 202 through the transition chamber 301 and the winding guide roller 205. When it is necessary to take and place the substrate 200 coil or perform local maintenance operations, the gate valve structure 302 in the transition chamber 301 is closed, and the winding and unwinding chamber 201 and the film forming chamber 1 can be emptied separately, so that the coil can be replaced and maintenance can be performed more quickly; at the same time, after the coil is replaced or the maintenance is completed, it can be evacuated more quickly, and the process time can be entered more quickly, which greatly improves the coating efficiency.

[0124] After the film forming device 100 is used, the first door body 12 and the second door body 13 can be operated to be disassembled and separated from the main shell 11, so that the first door body 12 opens the first opening 114, the second door body 13 opens the second opening 115, and the support tube 21 moves with the first door body 12 and moves out of the film forming chamber 101. At this time, it is convenient to hoist and disassemble the support tube 21 for maintenance or repair, and it is convenient to clean and maintain the inside of the film forming chamber 101, and it is convenient to directly clean the process dust on the surface of the support tube 21 and the first surface 510 of the spray plate 511, which can effectively reduce the disassembly and assembly operations, and the maintenance is convenient and quick, which reduces the maintenance time and improves the maintenance efficiency.

[0125] By adding a transition chamber 301 between the winding and unwinding chamber 201 and the film forming chamber 1, the substrate 200 can be transported between the winding and unwinding chamber 201 and the film forming chamber 1 through the transition chamber 301, and through the gate valve structure 302 in the transition chamber 301, the winding and unwinding chamber 201 and the film forming chamber 1 can be vented separately, thereby reducing the venting time, effectively improving the replacement efficiency, reducing the maintenance time, and improving the use efficiency of the film forming equipment 100.

[0126] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0127] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A film forming device, characterized in that: Comprising a film forming unit; the film forming unit comprises: Mounting seat; A film forming chamber, comprising a main shell, a first door body and a second door body, the main shell being fixedly arranged on the mounting seat, the main shell comprising a bottom wall, two side walls connected to opposite side edges of the bottom wall and a top wall connected to the two side walls and away from one end of the bottom wall, the bottom wall, the two side walls and the top wall jointly define a cavity having a first opening at one end and a second opening at the other end, the first door body being connected to the main shell and closing the first opening, the second door body being connected to the main shell and closing the second opening, the first door body, the second door body and the main shell being able to enclose an airtight film forming chamber, and the relative setting direction of the first opening and the second opening being a first direction; A substrate support mechanism is disposed in the film forming chamber and is used to support the substrate for film forming; Wherein, the first door body is detachably connected to the main shell body, and the first door body is slidably provided on the mounting seat, and the first door body can slide until it is out of contact with the main shell body to open the first opening; and / or, the second door body is detachably connected to the main shell body, and the second door body is slidably provided on the mounting seat, and the second door body can slide until it is out of contact with the main shell body to open the second opening.

2. The film forming device according to claim 1, characterized in that: The film forming unit also includes a moving component; The moving assembly includes a first slide rail and a first slider, the first slide rail is arranged on the mounting seat and extends along the first direction, the first slider is slidably connected to the first slide rail, the first door body is connected to the first slider, the first slider supports the first door body on the first slide rail, and enables the first door body to slide along the first slide rail; And / or, the moving component includes a second slide rail and a second slider, the second slide rail is arranged on the mounting seat and extends along the first direction, the second slider is slidably connected to the second slide rail, the second door body is connected to the second slider, the second slider supports the second door body on the second slide rail, and enables the second door body to slide along the second slide rail.

3. The film forming device according to claim 2, characterized in that: The moving assembly further includes a first moving driving member, which is drivingly connected to the first door body or the first sliding block, and is used to drive the first door body to slide along the first sliding rail; And / or, the moving assembly further includes a second moving driving member, the second moving driving member is drivingly connected to the second door body or the second sliding block, and the second moving driving member is used to drive the second door body to slide along the second sliding rail.

4. The film forming device according to any one of claims 1 to 3, characterized in that: The substrate supporting mechanism is disposed on the first door body, and the first door body can drive the substrate supporting mechanism to be loaded into or moved out of the film forming chamber through the first opening; The film forming unit further includes a gas supply device, which is disposed in the film forming chamber and configured to supply a film forming material into the film forming chamber.

5. The film forming device according to claim 4, characterized in that: The substrate support mechanism includes a support cylinder, and the support cylinder is configured to be rotatable around its own central axis; Among them, the relative setting direction of the two side walls is the second direction, and the relative setting direction of the bottom wall and the top wall is the third direction; when the support tube is loaded into the film forming chamber, the central axis of the support tube is parallel to the first direction, and the two opposite sides of the support tube along the second direction respectively face the two side walls, and the two opposite sides of the support tube along the third direction respectively face the bottom wall and the top wall; the first direction, the second direction and the third direction are perpendicular to each other.

6. The film forming device according to claim 5, characterized in that: The film forming chamber also includes two support arms connected to the first door body and a support beam connected to the two support arms, the two support arms are arranged at intervals along the second direction, and the first door body, the two support arms and the support beam jointly define an installation space; the support tube is located in the installation space, one axial end of the support tube is rotatably connected to the first door body, and the other axial end of the support tube is rotatably connected to the support beam.

7. The film forming device according to claim 6, characterized in that: The support beam is supported on the first sides of the two support arms along the third direction; wherein the first side of the support arm is the side facing the top wall when installed in the film forming chamber.

8. The film forming device according to claim 6, characterized in that: A connecting portion is provided in the middle of the second side of the support beam protruding along the third direction, and the connecting portion is connected to the other axial end of the support tube; wherein the second side of the support beam is the side facing the bottom wall when installed in the film forming chamber.

9. The film forming device according to claim 6, characterized in that: The gas supply device includes a spray member, which is disposed in the film forming chamber and is configured to supply gas toward the outer peripheral wall of the support tube.

10. The film forming device according to claim 9, characterized in that: The projection contour of the outer peripheral wall of the support tube along the first direction is circular; the spray member includes a spray plate, the spray plate has a first surface, the projection contour of the first surface along the first direction is an arc, and the arc radius of the first surface is greater than the circular radius of the outer peripheral wall of the support tube; Wherein, when the support tube is installed in the film-forming chamber, the first surface of the shower plate surrounds part of the outer peripheral wall of the support tube and has a first gap between the first surface of the shower plate and the outer peripheral wall of the support tube.

11. The film forming device according to claim 10, characterized in that: A ratio of a projection area of ​​the first surface on the outer peripheral wall of the support tube along the radial direction of the support tube to a surface area of ​​the outer peripheral wall of the support tube is 1 / 5 to 2 / 3.

12. The film forming device according to claim 10, characterized in that: When the support tube is installed in the film forming chamber, along the second direction, the support arm is located between the side wall and the shower plate, and the shower plate is located between the support arm and the support tube; And / or, the first gap is 2 mm to 10 mm.

13. The film forming device according to claim 5, characterized in that: The base support mechanism also includes at least two support guide rollers, the axial direction of the support guide rollers is parallel to the first direction, one axial end of the support guide rollers is connected to the first door body, and the other axial end of the support guide rollers is connected to the support beam.

14. The film forming device according to claim 13, characterized in that: At least two of the support guide rollers are arranged on the first side of the support tube along the third direction, and at least two of the support guide rollers are spaced apart along the second direction; wherein the first side of the support tube is the side facing the top wall when loaded into the film forming chamber.

15. The film forming device according to claim 13, characterized in that: At least two of the supporting guide rollers are arranged at intervals along the third direction.

16. The film forming device according to claim 5, characterized in that: The base support mechanism also includes a support driving member, which is disposed on the first door body and is drivingly connected to the support tube, and is used to drive the support tube to rotate.

17. The film forming device according to claim 5, characterized in that: The projection profile of the top wall along the first direction is in an arc shape.

18. The film forming device according to any one of claims 5 to 17, characterized in that: The film forming equipment also includes: A reeling and unreeling unit, comprising a reeling and unreeling chamber and an unreeling shaft and a reeling shaft arranged in the reeling and unreeling chamber; and The transition unit includes a transition chamber and a gate valve structure arranged in the transition chamber. The transition chamber is connected between the winding and unwinding chamber and the film forming chamber. A conducting channel from the winding and unwinding chamber to the film forming chamber is formed inside the transition chamber. The gate valve structure is used to open or cut off the conducting channel.

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