Method and device for calibrating micro-range flow sensor

Abstract

The embodiment of the invention provides a micro-range flow sensor calibration method and device.The micro-range flow sensor calibration method is applied to a micro-range flow sensor calibration device, the device comprises a gas source, a pressure stabilizing and temperature controlling container, a calibration chamber and a reference chamber, and the method comprises the steps that sealing performance testing is conducted on the device, and a sealing performance testing result is determined; based on a sealing performance test result, performing pressure and temperature adjustment through a gas source and a pressure-stabilizing and temperature-controlling container, and determining a pressure and temperature adjustment result; the calibration chamber and the reference chamber are adjusted based on the pressure and temperature adjusting result, and a calibration environment is determined; wherein the calibration chamber is communicated with the reference chamber through a valve; and based on the calibration environment, sensor calibration is carried out through the pressure-stabilizing temperature-control container, the calibration chamber and the reference chamber, and a calibration result is determined. Accurate calibration of the micro-range flowmeter is achieved through the steps, the calibration device is not provided with a piston and other movable parts, and long-term reliable operation of the device can be achieved.

Description

Technical Field

[0001] The embodiments of this specification relate to the technical field of sensor calibration, and in particular to a method for calibrating a micro-range flow sensor. Background Art

[0002] With the development of semiconductors, clean energy, precision chemicals and other fields, micro-range gas flow meters are widely used in gas flow control, gas trade settlement and gas leak detection. High-precision calibration of micro-range gas flow meters is an effective means to ensure their accuracy. At present, the calibration of gas flow sensors generally adopts the standard table method and the gas accumulation method. The calibration uncertainty of the standard table method is generally between 0.1%-0.5%, and the calibration uncertainty of the gas accumulation method is generally between 0.05%-0.2%. The calibrated flow range is generally above 1sccm. There is currently no mature method for high-precision calibration (uncertainty less than 0.025%) of micro-range (below 1sccm) flow sensors, let alone calibration devices. The calibration of micro-range gas flow meters has become a major problem in today's flow calibration technology.

[0003] At present, the flow calibration technology of the National Institute of Standards and Technology (NIST) of the United States and the Physical Technology Institute (PTB) of Germany is the best in the field of micro-range flow measurement, with a minimum measurement range of up to 0.02sccm. Both use the piston-type gas accumulation metering method, which has the following disadvantages: ① Due to the tiny gas leakage during the piston movement, the flow measurement will cause errors. ② The sealing ring on the piston is a wearing part, which reduces the reliability of the metering device and requires frequent maintenance.

[0004] Therefore, a better solution is urgently needed. Summary of the invention

[0005] In view of this, the embodiments of this specification provide a micro-range flow sensor calibration method. One or more embodiments of this specification also relate to a micro-range flow sensor calibration device, a computing device, a computer-readable storage medium and a computer program to solve the technical defects existing in the prior art.

[0006] According to a first aspect of an embodiment of this specification, a micro-range flow sensor calibration method is provided, which is applied to a micro-range flow sensor calibration device, the device including a gas source, a pressure-stabilizing and temperature-controlled container, a calibration chamber, and a reference chamber, the method including: Conduct a sealing performance test on the device and determine the sealing performance test result; Based on the sealing performance test results, the pressure and temperature are adjusted through the gas source and the pressure-stabilizing and temperature-controlling container to determine the pressure and temperature adjustment results; The calibration chamber and the reference chamber are adjusted based on the pressure and temperature adjustment results to determine the calibration environment; wherein the calibration chamber and the reference chamber are connected via a valve; Based on the calibration environment, the sensor is calibrated through a pressure-controlled and temperature-controlled container, a calibration room, and a reference room to determine the calibration result.

[0007] In a possible implementation, the pressure-stabilizing and temperature-controlling container is connected to the measured flow sensor through a valve and a standard leak hole; Standard leaks include graphene holes.

[0008] In a possible implementation, based on the sealing performance test result, the pressure and temperature are adjusted by the gas source and the pressure-stabilizing and temperature-controlling container to determine the pressure and temperature adjustment result, including: When the sealing performance test results meet the requirements, determine the output air pressure; The pressure-stabilizing and temperature-controlling container is charged based on the output gas pressure to determine the target pressure; When the target pressure reaches the set pressure, the gas temperature and gas pressure of the pressure-stabilizing and temperature-controlling container are adjusted based on the preset PID control algorithm to determine the pressure and temperature adjustment results.

[0009] In a possible implementation, adjusting the calibration chamber and the reference chamber based on the pressure and temperature adjustment result to determine the calibration environment includes: When the pressure and temperature adjustment results meet the requirements, obtain the temperature data of the calibration room and the reference room; Determine the temperature distribution based on the temperature data, and when the temperature distribution is uniform, fill the calibration chamber and the reference chamber with gas of preset pressure, and obtain pressure difference data; The calibration environment is determined based on the differential pressure data.

[0010] In a possible implementation, determining a calibration environment based on pressure difference data includes: When the pressure difference data is 0, it is determined that the calibration environment meets the requirements.

[0011] In a possible implementation, the sensor is calibrated based on the calibration environment through a pressure-controlled temperature container, a calibration room, and a reference room, and the calibration result is determined, including: When the calibration environment meets the requirements, the gas is passed through the flow sensor to be measured based on the pressure-stabilized temperature-controlled container to determine the flow measurement point; Allowing gas to flow into the calibration chamber based on a preset time, and obtaining pressure increase values ​​of the calibration chamber and the reference chamber; The sensor is calibrated based on the pressure increase value, the flow measurement point, the volume of the calibration chamber and the preset time, and the calibration result is determined.

[0012] In a possible implementation, performing sensor calibration based on the pressure increase value, the flow measurement point, the volume of the calibration chamber, and the preset time, and determining the calibration result includes: Q i =Δ PV / t; in, Q i Characterize the flow rate of the measured flow sensor, V is the calibration chamber volume, Δ P is the pressure increase between the calibration chamber and the reference chamber, t is the preset time.

[0013] According to a second aspect of the embodiments of this specification, a micro-range flow sensor calibration device is provided, which is applied to a micro-range flow sensor calibration device, the device includes a gas source, a pressure-stabilizing and temperature-controlled container, a calibration chamber and a reference chamber, and the device includes: A sealing test module is configured to perform a sealing performance test on the device and determine a sealing performance test result; The temperature and pressure regulating module is configured to perform pressure and temperature regulation based on the sealing performance test result through the gas source and the pressure-stabilizing and temperature-controlling container to determine the pressure and temperature regulation result; A calibration environment module is configured to adjust the calibration chamber and the reference chamber based on the pressure and temperature adjustment results to determine the calibration environment; wherein the calibration chamber and the reference chamber are connected via a valve; The calibration result module is configured to perform sensor calibration based on the calibration environment through the pressure-stabilized temperature-controlled container, the calibration chamber and the reference chamber to determine the calibration result.

[0014] According to a third aspect of an embodiment of this specification, a computing device is provided, including: Memory and processor; The memory is used to store computer executable instructions, and the processor is used to execute the computer executable instructions. When the computer executable instructions are executed by the processor, the steps of the above-mentioned micro-range flow sensor calibration method are implemented.

[0015] According to a fourth aspect of the embodiments of this specification, a computer-readable storage medium is provided, which stores computer-executable instructions, and when the instructions are executed by a processor, the steps of the above-mentioned micro-range flow sensor calibration method are implemented.

[0016] According to a fifth aspect of the embodiments of this specification, a computer program is provided, wherein when the computer program is executed in a computer, the computer is caused to execute the steps of the above-mentioned micro-range flow sensor calibration method.

[0017] The embodiments of this specification provide a micro-range flow sensor calibration method and device, wherein the micro-range flow sensor calibration method is applied to a micro-range flow sensor calibration device, the device includes an air source, a pressure-stabilizing and temperature-controlled container, a calibration chamber and a reference chamber, and the method includes: performing a sealing performance test on the device to determine the sealing performance test result; based on the sealing performance test result, adjusting the pressure and temperature through the air source and the pressure-stabilizing and temperature-controlled container to determine the pressure and temperature adjustment result; adjusting the calibration chamber and the reference chamber based on the pressure and temperature adjustment result to determine the calibration environment; wherein the calibration chamber and the reference chamber are connected through a valve; based on the calibration environment, the sensor is calibrated through the pressure-stabilizing and temperature-controlled container, the calibration chamber and the reference chamber to determine the calibration result. The above steps can realize the precise calibration of the micro-range flowmeter, and the calibration device has no movable parts such as pistons, so that the long-term reliable operation of the device can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a flow chart of a micro-range flow sensor calibration method provided by one embodiment of this specification; Figure 2 It is a structural schematic diagram of a micro-range flow sensor calibration device of a micro-range flow sensor calibration method provided by an embodiment of this specification; Figure 3 It is a structural schematic diagram of a micro-range flow sensor calibration device provided by an embodiment of this specification; Figure 4 It is a structural block diagram of a computing device provided by an embodiment of this specification. DETAILED DESCRIPTION

[0019] Many specific details are described in the following description to facilitate a full understanding of this specification. However, this specification can be implemented in many other ways than those described herein, and those skilled in the art can make similar generalizations without violating the connotation of this specification, so this specification is not limited to the specific implementation disclosed below.

[0020] The terms used in one or more embodiments of this specification are only for the purpose of describing specific embodiments, and are not intended to limit one or more embodiments of this specification. The singular forms of "a" and "the" used in one or more embodiments of this specification and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings. It should also be understood that the term "and / or" used in one or more embodiments of this specification refers to and includes any or all possible combinations of one or more associated listed items.

[0021] It should be understood that although the terms first, second, etc. may be used to describe various information in one or more embodiments of this specification, this information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of one or more embodiments of this specification, the first may also be referred to as the second, and similarly, the second may also be referred to as the first. Depending on the context, the word "if" as used herein may be interpreted as "at the time of" or "when" or "in response to determining".

[0022] In this specification, a micro-range flow sensor calibration method is provided. This specification also relates to a micro-range flow sensor calibration device, a computing device, and a computer-readable storage medium, which are described in detail one by one in the following embodiments.

[0023] See also Figure 1 , Figure 1 A flow chart of a micro-range flow sensor calibration method provided according to an embodiment of the present specification is shown. The method is applied to a micro-range flow sensor calibration device, the device includes a gas source, a pressure-stabilizing and temperature-controlled container, a calibration chamber and a reference chamber, and specifically includes the following steps.

[0024] Step 101: Perform a sealing performance test on the device and determine the sealing performance test result.

[0025] In a possible implementation, the sealing performance test is performed on the device to determine the sealing performance test result, including: determining the screw connection points and pipe valve parts of the device; performing single-point leak detection on the screw connection points and pipe valve parts by a helium mass spectrometer sniffing gun to determine the sealing performance test result. The pressure-stabilizing and temperature-controlling container is connected to the measured flow sensor through a valve and a standard leak hole; the standard leak hole includes a graphene hole.

[0026] In practical applications, see Figure 2 The micro-range flow sensor calibration device may include valves 1, 2, 3, 11, 12, 14, 20, 25; standard leak holes 7, 8, 9; differential pressure gauges 4, 5, 6, 17; temperature measuring devices 10, 19; measured flow meter 13; high-precision absolute pressure gauges 15, 24; calibration room 16; reference room 18; water bath temperature control device 21; time measuring device 22; pressure stabilizing chamber 23; gas source 26; temperature control box 27; flow regulating valve 28.

[0027] Among them, the gas source is used to provide calibration medium for the whole set of equipment, and the pressure can be roughly adjusted according to the test needs. The pressure-stabilizing and temperature-controlling container adopts a two-stage pressure-stabilizing method of a micro gas regulating valve and a diaphragm airbag and an intelligent gas temperature control method to accurately adjust the pressure and temperature of the gas source; the flow regulation system is composed of a standard leak hole and a valve. The standard leak hole changes the microscopic leakage channel of gas penetrating graphene by controlling the type and number of graphene holes, so as to achieve a stable gas output under constant pressure, and adopts a multi-porous graphene standard leak hole in parallel and a valve selection method to achieve precise adjustment of different tiny flow points. The calibration chamber is used to accumulate the gas passing through the flowmeter to be tested. The reference chamber and the calibration chamber have the same shape and size. At the beginning of the measurement, the pressure of the two is the same. As the gas in the calibration chamber increases, the pressure difference between the two gradually increases. The flow of the flowmeter can be calculated by measuring the pressure difference. The water bath temperature control system is used to control the temperature of the calibration chamber and the reference chamber. The constant temperature water bath flow and temperature control strategy are optimized through heat transfer numerical analysis, the uniformity of the gas temperature distribution in the calibration chamber and the reference chamber container is improved, and the influence of temperature changes on pressure measurement is reduced.

[0028] Furthermore, before calibrating the micro-range flow meter, it is necessary to optimize the system's threaded joints and pipe and valve connection structure based on the leakage mechanism of the threaded joints and pipe and valve parts, as well as the established pre-tightening force application range. During installation, the sealing surface must be strictly aligned, and sufficient pre-tightening force must be applied without damaging the performance of the sealing auxiliary material to improve the sealing performance of the threaded joints and pipe and valve connections.

[0029] Specifically, the flow meter 13 to be measured is installed on the measured platform of the device. Then, the screw joints and pipe valves of the calibration system are tested by a helium mass spectrometer single-point leak detection to ensure that the single-point leak rate index of the calibration system meets the requirements.

[0030] Step 102: Based on the sealing performance test result, the pressure and temperature are adjusted through the gas source and the pressure-stabilizing and temperature-controlling container to determine the pressure and temperature adjustment result.

[0031] In one possible implementation, based on the sealing performance test results, pressure and temperature are adjusted through the gas source and the pressure-stabilizing temperature-controlled container to determine the pressure and temperature adjustment results, including: when the sealing performance test results meet the requirements, determining the output gas pressure; charging the pressure-stabilizing temperature-controlled container based on the output gas pressure to determine the target pressure; when the target pressure reaches the set pressure, adjusting the gas temperature and gas pressure of the pressure-stabilizing temperature-controlled container based on a preset PID control algorithm to determine the pressure and temperature adjustment results.

[0032] The pressure-stabilizing and temperature-controlling container may include a temperature-pressure chamber.

[0033] In practical applications, see Figure 2, open the gas source valve 25 and adjust it to a suitable opening, control the output gas pressure of the gas source 26, and then pressurize the pressure stabilizing chamber 23, use a high-precision absolute pressure gauge 24 to monitor the gas pressure in the pressure stabilizing chamber, and after the pressure is close to the set pressure, use the Smith estimated fuzzy PID control algorithm to adjust the gas temperature and pressure in the pressure stabilizing container so that the temperature fluctuation and pressure fluctuation levels meet the requirements. Among them, the above-mentioned close to the set pressure can be 90% to 99% of the set pressure.

[0034] The embodiments of this specification improve the pressure measurement accuracy by setting up a calibration chamber and a reference chamber to measure the differential pressure.

[0035] Step 103: Based on the pressure and temperature adjustment results, the calibration chamber and the reference chamber are adjusted to determine the calibration environment; wherein the calibration chamber and the reference chamber are connected via a valve.

[0036] In one possible implementation, the calibration chamber and the reference chamber are adjusted based on the pressure and temperature adjustment results to determine the calibration environment, including: when the pressure and temperature adjustment results meet the requirements, obtaining the temperature data of the calibration chamber and the reference chamber; determining the temperature distribution based on the temperature data, and when the temperature distribution is uniform, filling the calibration chamber and the reference chamber with gas of a preset pressure and obtaining the pressure difference data; determining the calibration environment based on the pressure difference data.

[0037] In practical applications, see Figure 2 , close the downstream valve of the flowmeter to be calibrated. According to the results of theoretical analysis, determine the number and layout of temperature sensors required for the outer wall of the calibration chamber and the reference chamber, and improve the uniformity of the temperature distribution of the gas in the reference chamber and the calibration chamber. Paste the temperature sensors on the outer wall of the calibration chamber and the reference chamber as required, and fill the circulating constant temperature water medium in the constant temperature water bath temperature control device 21. When the temperature distribution of the calibration chamber 16 and the reference chamber 18 to be tested by the temperature sensor is uniform, open valves 25, 2, 12 and valve 14, fill the two containers with gas of given pressure, the two containers are connected through valve 14, and the pressure of the gas filled in the calibration chamber and the reference chamber is monitored by the indication of the high-precision absolute pressure gauge 15. Because the temperature of the gas inlet area of ​​the two chambers will increase during the inflation process, after the two chambers are filled with gas of given pressure, the corresponding valves 14 and valves 12 need to be closed, and when the wall temperature displayed by the temperature measuring device 10 of the calibration chamber and the temperature measuring device 19 of the reference chamber is the same, observe the value of the differential pressure gauge 17.

[0038] The embodiment of this specification realizes precise temperature control by using a water bath, and can realize flow meter calibration under different pressure and temperature conditions.

[0039] In a possible implementation, determining the calibration environment based on the pressure difference data includes: when the pressure difference data is 0, determining that the calibration environment meets the requirements.

[0040] In actual application, if the reading of the differential pressure gauge 17 is not "0", it is necessary to open the valve 14 to adjust the pressure balance in the calibration or reference chamber until the reading of the differential pressure gauge 17 between the calibration chamber and the reference chamber is "0" before the subsequent test can be started.

[0041] Step 104: Based on the calibration environment, the sensor is calibrated through the pressure-stabilized temperature-controlled container, the calibration room, and the reference room to determine the calibration result.

[0042] In one possible implementation, a sensor is calibrated based on a calibration environment through a pressure-stabilized temperature-controlled container, a calibration chamber, and a reference chamber to determine a calibration result, including: when the calibration environment meets the requirements, the gas is passed through a flow sensor to be measured based on the pressure-stabilized temperature-controlled container to determine a flow measurement point; based on a preset time, the gas is allowed to flow into the calibration chamber to obtain pressure increase values ​​of the calibration chamber and the reference chamber; the sensor is calibrated based on the pressure increase value, the flow measurement point, the volume of the calibration chamber, and the preset time to determine the calibration result.

[0043] Specifically, the sensor is calibrated based on the pressure increase value, the flow measurement point, the volume of the calibration chamber and the preset time, and the calibration result is determined, including: Q i =Δ PV / t; in, Q i Characterize the flow rate of the measured flow sensor, V is the calibration chamber volume, Δ P is the pressure increase between the calibration chamber and the reference chamber, t is the preset time.

[0044] In actual application, open one or more of the valves 1-3 to select the standard leak holes 7-9, so that the flow reaches the first flow measurement point Qi (i=1,2,3,4,5). If there is a deviation between this flow point and the measured flow point, fine adjustment can be made by adjusting the opening of the flow control valve 28. Open valves 11 and 12 in sequence to allow the flow to flow into the calibration chamber. Wait for the flow accumulation time of the calibration range flowmeter to reach the first flow measurement point Qi (i=1,2,3,4,5). t After that, valves 12 and 11 are closed in sequence, and the opening and closing time of valve 12 is accurately measured by the timing device 22, and the pressure increase value Δ between the calibration chamber and the reference chamber of the platform to be calibrated is obtained by the test. P . Calculate the flow rate of the flow meter to be calibrated Q i =Δ PV / t ,in V To calibrate the chamber volume and to achieve calibration of the micro-range flowmeter.

[0045] It should be noted that the above step 104 may be repeated cyclically, and flow meter calibration at different flow points Qi (i=1, 2, 3, ...) may be achieved by adjusting different standard leak hole combinations.

[0046] The embodiments of this specification use standard leak holes and valve gating to achieve flow point regulation.

[0047] Furthermore, according to the pVTt method verification procedure, the uncertainty of the gas flow calibration platform is mainly composed of the uncertainty of temperature, pressure (differential pressure), volume and time. The standard uncertainty of the device is:

[0048] Among them, the items on the right represent volume, time, pressure, temperature, switch valve, and leakage rate.

[0049] Uncertainty of volume measurement Under constant temperature environment, the water calibration method is used to calibrate the volume of the standard container. The combined uncertainty of the volume of the standard container is:

[0050] Among them, the items on the right represent the type A uncertainty of the standard container volume measurement. , Quality uncertainty , density uncertainty , Temperature uncertainty , Uncertainty of container volume expansion coefficient The volume measurement uncertainty is better than 0.01%.

[0051] The resolution of the timer for time measurement uncertainty is 1ms. Considering the rectangular distribution, the shortest measurement time of the device is 600s, then:

[0052] The range of the measurement uncertainty of the valve switching time system difference is no more than ±10 ms. The shortest measurement time of the device is 600s. According to the uniform distribution, then:

[0053] The temperature measurement uncertainty uses a high-precision digital thermometer with an allowable error of 0.03°C.

[0054]

[0055] Pressure Measurement Uncertainty The pressure difference between the standard room and the calibration room is measured using a high-precision differential pressure gauge with a measuring range of 0-2500Pa and a measurement uncertainty of 0.01%.

[0056] Leak rate measurement uncertainty Total leak rate better than 1×10 -9 Pa.m3 / s, the measurement uncertainty caused by leakage is 0.01%.

[0057] In summary, the measurement standard uncertainty of the flow standard device proposed in the embodiment of this specification is better than 0.02%, and its expanded uncertainty is 0.04% (k=2).

[0058] The embodiments of this specification provide a micro-range flow sensor calibration method and device, wherein the micro-range flow sensor calibration method is applied to a micro-range flow sensor calibration device, the device includes an air source, a pressure-stabilizing and temperature-controlled container, a calibration chamber and a reference chamber, and the method includes: performing a sealing performance test on the device to determine the sealing performance test result; based on the sealing performance test result, adjusting the pressure and temperature through the air source and the pressure-stabilizing and temperature-controlled container to determine the pressure and temperature adjustment result; adjusting the calibration chamber and the reference chamber based on the pressure and temperature adjustment result to determine the calibration environment; wherein the calibration chamber and the reference chamber are connected through a valve; based on the calibration environment, the sensor is calibrated through the pressure-stabilizing and temperature-controlled container, the calibration chamber and the reference chamber to determine the calibration result. The above steps can realize the precise calibration of the micro-range flowmeter, and the calibration device has no movable parts such as pistons, so that the long-term reliable operation of the device can be achieved.

[0059] Corresponding to the above method embodiment, this specification also provides a micro-range flow sensor calibration device embodiment, Figure 3 The structure diagram of a micro-range flow sensor calibration device provided by an embodiment of the present specification is shown. The device is applied to a micro-range flow sensor calibration device, and the device includes a gas source, a pressure-stabilizing and temperature-controlling container, a calibration chamber and a reference chamber, such as Figure 3 As shown, the device comprises: The sealing test module 301 is configured to perform a sealing performance test on the device and determine a sealing performance test result; The temperature and pressure regulating module 302 is configured to perform pressure and temperature regulation based on the sealing performance test result through the gas source and the pressure and temperature stabilizing container to determine the pressure and temperature regulation result; The calibration environment module 303 is configured to adjust the calibration chamber and the reference chamber based on the pressure and temperature adjustment result to determine the calibration environment; wherein the calibration chamber and the reference chamber are connected through a valve; The calibration result module 304 is configured to perform sensor calibration based on the calibration environment through the pressure-controlled temperature container, the calibration chamber, and the reference chamber to determine the calibration result.

[0060] In a possible implementation, the temperature and pressure regulating module 302 is further configured to: The pressure-stabilizing and temperature-controlling container is connected to the measured flow sensor through a valve and a standard leak hole; Standard leaks include graphene holes.

[0061] In a possible implementation, the temperature and pressure regulating module 302 is further configured to: When the sealing performance test results meet the requirements, determine the output air pressure; The pressure-stabilizing and temperature-controlling container is charged based on the output gas pressure to determine the target pressure; When the target pressure reaches the set pressure, the gas temperature and gas pressure of the pressure-stabilizing and temperature-controlling container are adjusted based on the preset PID control algorithm to determine the pressure and temperature adjustment results.

[0062] In a possible implementation, the calibration environment module 303 is further configured to: When the pressure and temperature adjustment results meet the requirements, obtain the temperature data of the calibration room and the reference room; Determine the temperature distribution based on the temperature data, and when the temperature distribution is uniform, fill the calibration chamber and the reference chamber with gas of preset pressure, and obtain pressure difference data; The calibration environment is determined based on the differential pressure data.

[0063] In a possible implementation, the calibration environment module 303 is further configured to: When the pressure difference data is 0, it is determined that the calibration environment meets the requirements.

[0064] In a possible implementation, the calibration result module 304 is further configured to: When the calibration environment meets the requirements, the gas is passed through the flow sensor to be measured based on the pressure-stabilized temperature-controlled container to determine the flow measurement point; Allowing gas to flow into the calibration chamber based on a preset time, and obtaining pressure increase values ​​of the calibration chamber and the reference chamber; The sensor is calibrated based on the pressure increase value, the flow measurement point, the volume of the calibration chamber and the preset time, and the calibration result is determined.

[0065] In a possible implementation, the calibration result module 304 is further configured to: Q i =Δ PV / t; in, Q i Characterize the flow rate of the measured flow sensor, V is the calibration chamber volume, Δ P is the pressure increase between the calibration chamber and the reference chamber, t is the preset time.

[0066] The above is a schematic scheme of a micro-range flow sensor calibration device of this embodiment. It should be noted that the technical scheme of the micro-range flow sensor calibration device and the technical scheme of the micro-range flow sensor calibration method described above belong to the same concept, and the details not described in detail in the technical scheme of the micro-range flow sensor calibration device can be found in the description of the technical scheme of the micro-range flow sensor calibration method described above.

[0067] Figure 4 The block diagram of a computing device 400 according to an embodiment of the present specification is shown. The components of the computing device 400 include but are not limited to a memory 410 and a processor 420. The processor 420 is connected to the memory 410 via a bus 430, and the database 450 is used to store data.

[0068] The computing device 400 also includes an access device 440 that enables the computing device 400 to communicate via one or more networks 460. Examples of these networks include a public switched telephone network (PSTN), a local area network (LAN), a wide area network (WAN), a personal area network (PAN), or a combination of communication networks such as the Internet. The access device 440 may include one or more of any type of network interface (e.g., a network interface card (NIC)) that is wired or wireless, such as an IEEE 802.11 wireless local area network (WLAN) wireless interface, a world-wide interoperability for microwave access (Wi-MAX) interface, an Ethernet interface, a universal serial bus (USB) interface, a cellular network interface, a Bluetooth interface, and a near field communication (NFC).

[0069] In one embodiment of the present specification, the above components of the computing device 400 and Figure 4 Other components not shown in the figure may also be connected to each other, for example, via a bus. It should be understood that Figure 4 The computing device structure block diagram shown is only for the purpose of illustration, and is not intended to limit the scope of this specification. Those skilled in the art can add or replace other components as needed.

[0070] The computing device 400 may be any type of stationary or mobile computing device, including a mobile computer or mobile computing device (e.g., a tablet computer, a personal digital assistant, a laptop computer, a notebook computer, a netbook, etc.), a mobile phone (e.g., a smart phone), a wearable computing device (e.g., a smart watch, smart glasses, etc.), or other types of mobile devices, or a stationary computing device such as a desktop computer or a personal computer (PC). The computing device 400 may also be a mobile or stationary server.

[0071] The processor 420 is used to execute the following computer executable instructions, which implement the steps of the above-mentioned micro-range flow sensor calibration method when executed by the processor. The above is a schematic scheme of a computing device of this embodiment. It should be noted that the technical scheme of the computing device and the technical scheme of the above-mentioned micro-range flow sensor calibration method belong to the same concept. The details of the technical scheme of the computing device that are not described in detail can be found in the description of the technical scheme of the above-mentioned micro-range flow sensor calibration method.

[0072] An embodiment of the present specification further provides a computer-readable storage medium storing computer-executable instructions, which, when executed by a processor, implement the steps of the above-mentioned micro-range flow sensor calibration method.

[0073] The above is a schematic scheme of a computer-readable storage medium of this embodiment. It should be noted that the technical scheme of the storage medium and the technical scheme of the micro-range flow sensor calibration method described above are of the same concept, and the details not described in detail in the technical scheme of the storage medium can be found in the description of the technical scheme of the micro-range flow sensor calibration method described above.

[0074] An embodiment of the present specification further provides a computer program, wherein when the computer program is executed in a computer, the computer is caused to execute the steps of the above-mentioned micro-range flow sensor calibration method.

[0075] The above is a schematic scheme of a computer program of this embodiment. It should be noted that the technical scheme of the computer program and the technical scheme of the above-mentioned micro-range flow sensor calibration method belong to the same concept, and the details not described in detail in the technical scheme of the computer program can be found in the description of the technical scheme of the above-mentioned micro-range flow sensor calibration method.

[0076] The above is a description of a specific embodiment of the specification. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be performed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0077] The computer instructions include computer program codes, which may be in source code form, object code form, executable files or some intermediate forms, etc. The computer-readable medium may include: any entity or device capable of carrying the computer program code, recording medium, USB flash drive, mobile hard disk, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electric carrier signal, telecommunication signal and software distribution medium, etc. It should be noted that the content contained in the computer-readable medium may be appropriately increased or decreased according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, computer-readable media do not include electric carrier signals and telecommunication signals.

[0078] It should be noted that, for the above-mentioned method embodiments, for the sake of simplicity of description, they are all expressed as a series of action combinations, but those skilled in the art should be aware that the embodiments of this specification are not limited by the order of the actions described, because according to the embodiments of this specification, some steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in the specification are all preferred embodiments, and the actions and modules involved are not necessarily required by the embodiments of this specification.

[0079] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0080] The preferred embodiments of this specification disclosed above are only used to help explain this specification. The optional embodiments do not describe all the details in detail, nor do they limit the invention to only the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of the embodiments of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the embodiments of this specification, so that technicians in the relevant technical field can well understand and use this specification. This specification is only limited by the claims and their full scope and equivalents.

Claims

1. A micro-range flow sensor calibration method, characterized in that: Applicable to a micro-range flow sensor calibration device, the device includes a gas source, a pressure-stabilizing and temperature-controlling container, a calibration chamber and a reference chamber, and the method includes: Performing a sealing performance test on the device to determine a sealing performance test result; Based on the sealing performance test result, the pressure and temperature are adjusted by the gas source and the pressure-stabilizing and temperature-controlling container to determine the pressure and temperature adjustment result; Based on the pressure and temperature adjustment result, the calibration chamber and the reference chamber are adjusted to determine the calibration environment; wherein the calibration chamber and the reference chamber are connected via a valve; Based on the calibration environment, sensor calibration is performed through the pressure-stabilized temperature-controlled container, the calibration chamber and the reference chamber to determine a calibration result.

2. The method according to claim 1, characterized in that The pressure-stabilizing and temperature-controlling container is connected to the measured flow sensor through a valve and a standard leak hole; The standard leak hole includes a graphene hole.

3. The method according to claim 1, characterized in that The step of adjusting the pressure and temperature based on the sealing performance test result by using the gas source and the pressure-stabilizing and temperature-controlling container to determine the pressure and temperature adjustment result includes: When the sealing performance test result meets the requirements, determining the output air pressure; Pressurizing the pressure-stabilizing and temperature-controlling container based on the output gas pressure to determine a target pressure; When the target pressure reaches the set pressure, the gas temperature and gas pressure of the pressure-stabilizing and temperature-controlling container are adjusted based on a preset PID control algorithm to determine the pressure and temperature adjustment result.

4. The method according to claim 1, characterized in that: The step of adjusting the calibration chamber and the reference chamber based on the pressure and temperature adjustment result to determine the calibration environment comprises: When the pressure and temperature adjustment result meets the requirement, acquiring the temperature data of the calibration chamber and the reference chamber; Determine the temperature distribution based on the temperature data, and when the temperature distribution is uniform, fill the calibration chamber and the reference chamber with gas of preset pressure, and obtain pressure difference data; A calibration environment is determined based on the differential pressure data.

5. The method according to claim 4, characterized in that The determining of the calibration environment based on the pressure difference data comprises: When the pressure difference data is 0, it is determined that the calibration environment meets the requirements.

6. The method according to claim 1, characterized in that The step of performing sensor calibration based on the calibration environment through the pressure-stabilized temperature-controlled container, the calibration chamber, and the reference chamber to determine the calibration result includes: When the calibration environment meets the requirements, the gas is passed through the measured flow sensor based on the pressure-stabilizing and temperature-controlled container to determine the flow measurement point; Allowing the gas to flow into the calibration chamber based on a preset time, and obtaining pressure increase values ​​of the calibration chamber and the reference chamber; The sensor is calibrated based on the pressure increase value, the flow measurement point, the volume of the calibration chamber and the preset time, and a calibration result is determined.

7. The method according to claim 6, characterized in that The step of performing sensor calibration based on the pressure increase value, the flow measurement point, the volume of the calibration chamber and the preset time and determining the calibration result includes: Q i =D PV / t; Among them, the Q i Characterize the flow rate of the measured flow sensor, the V is the calibration chamber volume, the Δ P is the pressure increase value of the calibration chamber and the reference chamber, t is the preset time.

8. A micro-range flow sensor calibration device, characterized in that: Applicable to a micro-range flow sensor calibration device, the device includes a gas source, a pressure-stabilizing and temperature-controlling container, a calibration chamber and a reference chamber, and the device includes: A sealing test module, configured to perform a sealing performance test on the device and determine a sealing performance test result; a temperature and pressure regulating module, configured to perform pressure and temperature regulation through the gas source and the pressure-stabilizing and temperature-controlling container based on the sealing performance test result, and determine the pressure and temperature regulation result; A calibration environment module, configured to adjust the calibration chamber and the reference chamber based on the pressure and temperature adjustment result to determine a calibration environment; wherein the calibration chamber and the reference chamber are connected via a valve; The calibration result module is configured to perform sensor calibration based on the calibration environment through the pressure-stabilized temperature-controlled container, the calibration chamber and the reference chamber to determine a calibration result.

9. A computing device, characterized in that include: Memory and processor; The memory is used to store computer executable instructions, and the processor is used to execute the computer executable instructions. When the computer executable instructions are executed by the processor, the steps of the micro-range flow sensor calibration method according to any one of claims 1 to 7 are implemented.

10. A computer-readable storage medium storing computer-executable instructions, wherein the computer-executable instructions, when executed by a processor, implement the steps of the micro-range flow sensor calibration method according to any one of claims 1 to 7.

Images