Laser energy mutual verification method and device, and electronic equipment

Abstract

The invention provides a laser energy mutual verification method and device, and electronic equipment, and the method comprises the steps: obtaining an output voltage value of laser, an average gray value of laser intensity distribution, and an integral value of a laser pulse waveform through measurement equipment; calculating a first proportionality coefficient of the output voltage value and the average gray value of the laser intensity distribution, a second proportionality coefficient of the output voltage value and the integral value of the laser pulse waveform, and a third proportionality coefficient of the average gray value of the laser intensity distribution and the integral value of the laser pulse waveform; whether the distribution of the first proportionality coefficient, the second proportionality coefficient and the third proportionality coefficient of the single-pulse laser is within the preset range corresponding to each proportionality coefficient or not is judged in sequence, and whether the output laser energy is stable or not is judged according to the judgment result; the problem of laser energy deviation possibly existing in laser energy testing by single measuring equipment is effectively avoided, and the stability and the reliability of laser energy output are greatly improved.

Description

Technical Field

[0001] The present invention relates to the technical field of laser energy measurement, and in particular to a laser energy mutual calibration method and device, and electronic equipment. Background Art

[0002] At present, the following three methods are commonly used for high-power solid-state laser energy testing at home and abroad: (1) laser energy probe directly measures output voltage; (2) near-field CCD is used to test laser near-field intensity (high-power ultrashort laser real-time near-field intensity distribution measurement device, patent publication number: CN103712688B, a method and system for measuring pulse laser energy, patent application number: CN201010568934.7); (3) oscilloscope plus photodetector is used to test laser pulse waveform (research on femtojoule pulse laser energy measurement method, "Applied Optics", article number: 1002-2082 (2014) 03-0525-06). The above three measurement methods lack the function of mutual calibration, and do not use the laser energy probe voltage value, near-field CCD laser intensity distribution average gray value and photodetector laser pulse time domain waveform integral value to check and compare the energy in a system. It is impossible to self-consistently verify the precise measurement results of single pulse laser energy, and therefore it is impossible to solve the laser energy deviation problem that may exist when using only a single measurement device.

[0003] Therefore, the prior art needs to be further developed. Summary of the invention

[0004] The purpose of the present invention is to overcome the above technical deficiencies and provide a method and device for laser energy mutual verification, and electronic equipment to solve the problems existing in the prior art.

[0005] To achieve the above technical objectives, according to a first aspect of the present invention, the present invention provides a method for mutual verification of laser energy, comprising:

[0006] S100, using a measuring device to obtain a laser output voltage value, an average gray value of a laser intensity distribution, and an integral value of a laser pulse waveform;

[0007] S200, calculating a first proportionality coefficient between the output voltage value and the average gray value of the laser intensity distribution, a second proportionality coefficient between the output voltage value and the integral value of the laser pulse waveform, and a third proportionality coefficient between the average gray value of the laser intensity distribution and the integral value of the laser pulse waveform;

[0008] S300, sequentially determining whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively within the preset range corresponding to each proportional coefficient, and determining whether the output laser energy is stable based on the determination result.

[0009] Specifically, the method of using a measuring device to obtain the output voltage value of the laser, the average gray value of the laser intensity distribution, and the integral value of the laser pulse waveform includes:

[0010] The laser energy probe is used to obtain the output voltage value of the laser;

[0011] The average gray value of the laser intensity distribution is obtained using a near-field CCD;

[0012] An oscilloscope and a photodetector are used to obtain the integral value of the laser pulse waveform.

[0013] Specifically, the method of obtaining the integral value of the laser pulse waveform by using an oscilloscope and a photodetector includes:

[0014] The laser signal is converted into an electrical signal by using a photodetector disposed in the laser path, and then an oscilloscope connected to the photodetector is used to capture and display the waveform of the electrical signal output by the photodetector;

[0015] The data of the electrical signal waveform is integrated to obtain the integral value of the laser pulse waveform.

[0016] Specifically, the step of sequentially judging whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively within the preset ranges corresponding to the respective proportional coefficients, and judging whether the output laser energy is stable according to the judgment result, includes:

[0017] If the distributions of the first proportionality coefficient, the second proportionality coefficient, and the third proportionality coefficient of the single-pulse laser are all within a preset range, it is determined that the output laser energy is stable.

[0018] Specifically, the step of sequentially judging whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively within the preset ranges corresponding to the respective proportional coefficients, and judging whether the output laser energy is stable according to the judgment result, further includes:

[0019] If any one of the first proportionality coefficient, the second proportionality coefficient and the third proportionality coefficient of the single-pulse laser is not within the preset range, it is determined that the single-pulse laser energy has an output instability.

[0020] Specifically, the preset range includes a first preset range, a second preset range, and a third preset range;

[0021] The first preset range is a valid value distribution range of the first proportional coefficient, the second preset range is a valid value distribution range of the second proportional coefficient, and the third preset range is a valid value distribution range of the third proportional coefficient.

[0022] According to a second aspect of the present invention, there is provided a laser energy mutual calibration device, comprising:

[0023] A beam splitter, comprising a first beam splitter and a second beam splitter, used for splitting the sampling laser beam into two beams;

[0024] A beam reduction lens, comprising a first beam reduction lens combination and a second beam reduction lens combination, for reducing the diameter of the laser beam passing through the lens;

[0025] An attenuation wheel, comprising a first attenuation wheel and a second attenuation wheel, for adjusting and controlling the light intensity of the laser spot;

[0026] An acquisition module, including a laser energy probe, a near-field CDD, a photodetector, and an oscilloscope, is used to obtain the output voltage value of the laser, the average gray value of the laser intensity distribution, and the integral value of the laser pulse waveform using the laser energy probe, the near-field CDD, the photodetector, and the oscilloscope;

[0027] A control module is used to calculate a first proportional coefficient between an output voltage value and an average gray value of a laser intensity distribution, a second proportional coefficient between an output voltage value and an integral value of a laser pulse waveform, and a third proportional coefficient between an average gray value of a laser intensity distribution and an integral value of a laser pulse waveform; or to sequentially determine whether the distribution of a first proportional coefficient, a second proportional coefficient, and a third proportional coefficient of a single-pulse laser is within a preset range, and determine whether the output laser energy is stable based on the determination result.

[0028] Specifically, after the sampling laser beam passes through the first spectroscope, a first preset ratio of the sampling laser beam is transmitted to the laser energy probe by transmission, and a second preset ratio of the sampling laser beam is transmitted to the second spectroscope by reflection.

[0029] Specifically, the second beam splitter transmits the sampling laser beam of the third preset ratio to the first beam reduction lens combination by reflection, and transmits it to the near-field CDD via the first beam reduction lens combination and the first attenuation wheel;

[0030] The second beam splitter transmits the sampling laser beam of the fourth preset ratio to the reflector by transmission, and after being reflected by the reflector, it is transmitted to the second beam reduction lens combination, and then transmitted to the photodetector through the second beam reduction lens combination and the second attenuation wheel. The other end of the photodetector is connected to an oscilloscope.

[0031] According to a third aspect of the present invention, there is provided an electronic device, comprising: a memory; and a processor, wherein the memory stores computer-readable instructions, and when the computer-readable instructions are executed by the processor, the above-mentioned laser energy mutual verification method is implemented.

[0032] Beneficial effects:

[0033] The present invention calculates a first proportional coefficient between an output voltage value and an average gray value of a laser intensity distribution, a second proportional coefficient between an output voltage value and an integral value of a laser pulse waveform, and a third proportional coefficient between an average gray value of a laser intensity distribution and an integral value of a laser pulse waveform, and sequentially determines whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of a single-pulse laser is respectively within a preset range corresponding to each proportional coefficient, and determines whether the output laser energy is stable according to the determination result, thereby solving the problem that the traditional method cannot perform self-consistency review on the precise measurement result of the single-pulse laser energy, and the laser energy deviation that may exist in a single measuring device is used. The method is based on an existing measurement module, and does not require the laser energy probe to be disassembled for re-inspection, fully utilizes the original structure in the laser system, simplifies the re-inspection process of the laser energy probe, and greatly improves the re-inspection efficiency of the laser energy probe. Through the self-calibration between the three proportional coefficients, the laser energy deviation problem that may exist in the laser energy test of a single measuring device is effectively avoided, thereby quickly and accurately determining whether the laser energy output value is normal, effectively ensuring the authenticity of the laser energy output, greatly improving the stability and reliability of the laser energy output, and greatly improving the intelligence, usability and reliability of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 is a flow chart of a method for mutual verification of laser energy provided in a specific embodiment of the present invention;

[0035] Figure 2 It is a schematic diagram of the device composition of the laser energy mutual verification device provided in a specific embodiment of the present invention;

[0036] Figure 3 is a schematic diagram of the optical path composition of the laser energy collection module provided in a specific embodiment of the present invention;

[0037] Figure 4 is a schematic diagram of a near-field average grayscale of 987 provided in a specific embodiment of the present invention;

[0038] Figure 5 is a schematic diagram of a waveform integral value of 52.154 provided in a specific embodiment of the present invention;

[0039] Figure 6 is a long-term monitoring distribution diagram of W1 provided in a specific embodiment of the present invention;

[0040] Figure 7 is a long-term monitoring distribution diagram of W2 provided in a specific embodiment of the present invention;

[0041] Figure 8 It is a long-term monitoring distribution diagram of W3 provided in a specific embodiment of the present invention;

[0042] Fig. 9 is a schematic diagram of the relationship between the deviation values ​​provided in a specific embodiment of the present invention;

[0043] Wherein, the reference numerals of the above-mentioned drawings are as follows:

[0044] 1. Sampling laser beam; 2. First beam splitter; 3. Laser energy sensor; 4. Second beam splitter; 5. First beam reduction lens assembly; 6. First attenuation wheel; 7. Near-field CCD; 8. Reflector; 9. Second beam reduction lens assembly; 10. Second attenuation wheel; 11. Photodetector; 12. Oscilloscope. DETAILED DESCRIPTION

[0045] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention is clearly and completely described below in conjunction with the accompanying drawings of the present invention. Based on the embodiments in this application, other similar embodiments obtained by ordinary technicians in this field without making creative work should all fall within the scope of protection of this application. In addition, the directional words mentioned in the following embodiments, such as "up", "down", "left", "right", etc., are only reference to the directions of the accompanying drawings. Therefore, the directional words used are used to illustrate rather than limit the invention.

[0046] The present invention will be further described below in conjunction with the accompanying drawings and preferred embodiments.

[0047] Embodiment 1

[0048] See also Figure 1 This embodiment provides a method for mutual verification of laser energy, including:

[0049] S100, using a measuring device to obtain a laser output voltage value, an average gray value of a laser intensity distribution, and an integral value of a laser pulse waveform;

[0050] It should be noted that before step S100, the first preset range, the second preset range, the third preset range, the first preset ratio, the second preset ratio, the third preset ratio, and the fourth preset ratio are preset;

[0051] It can be understood that the present invention does not limit the specific numerical values ​​of the first preset range, the second preset range, the third preset range, the first preset ratio, the second preset ratio, the third preset ratio, and the fourth preset ratio, as long as the laser energy mutual verification method proposed in the present invention can be applied.

[0052] Preferably, the present invention sets the first preset range to ±0.02, the present invention sets the second preset range to ±0.02, the present invention sets the third preset range to ±0.02, the present invention sets the first preset ratio to 2%, the present invention sets the second preset ratio to 2%, the present invention sets the third preset ratio to 2%, and the present invention sets the fourth preset ratio to 50%. The above settings can further improve the accuracy of self-consistency review of the precise measurement results of single-pulse laser energy, and greatly improve the stability and reliability of the present invention.

[0053] Specifically, the method of using a measuring device to obtain the output voltage value of the laser, the average gray value of the laser intensity distribution, and the integral value of the laser pulse waveform includes:

[0054] The laser energy probe 3 is used to obtain the output voltage value of the laser;

[0055] The average gray value of the laser intensity distribution is obtained using near-field CCD7;

[0056] The oscilloscope 12 and the photodetector 11 are used to obtain the integral value of the laser pulse waveform.

[0057] It is understandable that when the laser irradiates the laser energy probe 3, the laser energy probe 3 converts the light energy into electrical energy, usually a voltage signal, and the amplitude of the voltage signal is proportional to the energy of the incident laser, so the laser energy can be tested by the output voltage value of the laser. Using the near-field CCD7 to obtain the average grayscale value of the laser intensity distribution usually includes: placing the near-field CCD7 in the near-field area of ​​the laser beam, ensuring that the plane of the near-field CCD7 is parallel to the propagation direction of the laser beam, adjusting the position and angle of the near-field CCD7 so that the laser spot completely falls on the photosensitive area of ​​the CCD, and transmitting the collected image of the laser spot to the computer for processing. In the processed image, the laser spot area is selected, and the average grayscale value of all pixels in the area is calculated.

[0058] Specifically, the method of obtaining the integral value of the laser pulse waveform by using the oscilloscope 12 and the photodetector 11 includes:

[0059] The laser signal is converted into an electrical signal by using a photodetector 11 disposed in the laser path, and then an oscilloscope 12 connected to the photodetector 11 is used to capture and display the waveform of the electrical signal output by the photodetector 11;

[0060] The data of the electrical signal waveform is integrated to obtain the integral value of the laser pulse waveform.

[0061] It should be noted here that the photodetector 11 is set on the laser path to ensure that the laser can directly irradiate the photodetector 11. The photodetector 11 converts the optical signal into an electrical signal, and the output end of the photodetector 11 is connected to the input end of the oscilloscope 12. The waveform data of the laser pulse is obtained by using the data acquisition function of the oscilloscope 12. The collected waveform data is integrated through computer data processing software. The integration operation can be used to calculate the total energy of the laser pulse energy, and the integral value is the energy value of the laser pulse.

[0062] S200, a first proportionality coefficient between the output voltage value and the average gray value of the laser intensity distribution, a second proportionality coefficient between the output voltage value and the integral value of the laser pulse waveform, and a third proportionality coefficient between the average gray value of the laser intensity distribution and the integral value of the laser pulse waveform;

[0063] It can be understood that, the output voltage value of the laser is recorded as T1, and the average gray value of the laser intensity distribution is recorded as T2, then the calculation method of the first proportionality coefficient W1 is as follows:

[0064]

[0065] in, is the ratio of the laser output voltage value to the average gray value of the laser intensity distribution, that is, the average value of T1 / T2, n represents a total of n groups of data measured, n = 1, 2, 3, ... n;

[0066] The integral value of the laser pulse waveform is recorded as T3, and the calculation method of the second proportional coefficient W2 is as follows:

[0067]

[0068] in, It is the integral value of the laser output voltage and the laser pulse waveform, that is, the average value of T1 / T3;

[0069] The calculation method of the third proportional coefficient W3 is as follows:

[0070]

[0071] in, It is the average gray value of the laser intensity distribution and the integral value of the laser pulse waveform, that is, the average value of T2 / T3.

[0072] S300, sequentially determining whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively within the preset range corresponding to each proportional coefficient, and determining whether the output laser energy is stable based on the determination result.

[0073] Specifically, the step of sequentially judging whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively within the preset ranges corresponding to the respective proportional coefficients, and judging whether the output laser energy is stable according to the judgment result, includes:

[0074] If the distributions of the first proportionality coefficient, the second proportionality coefficient, and the third proportionality coefficient of the single-pulse laser are all within a preset range, it is determined that the output laser energy is stable.

[0075] Specifically, the step of sequentially judging whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively within the preset ranges corresponding to the respective proportional coefficients, and judging whether the output laser energy is stable according to the judgment result, further includes:

[0076] If any one of the first proportionality coefficient, the second proportionality coefficient and the third proportionality coefficient of the single-pulse laser is not within the preset range, it is determined that the single-pulse laser energy has an output instability.

[0077] It should be further explained that when any of the proportional coefficients exceeds the preset range, it may cause instability in the internal energy of the laser, resulting in inconsistent energy output of each pulse and fluctuation. The output repeatability of the laser is one of the important indicators to measure its performance. The instability of the proportional coefficient directly leads to a decrease in the output repetition rate. At the same time, when it is determined that a single-pulse laser has unstable output, the laser equipment needs to be calibrated. During the operation of the laser, the system parameters are monitored in real time. Once the proportional coefficient is found to be deviated, the cause needs to be analyzed and adjusted immediately to solve the problem that may cause the abnormal proportional coefficient in time. Therefore, the mutual verification of the above-mentioned proportional coefficients greatly improves the stability of the laser energy output and further ensures the accuracy and efficiency of the laser output.

[0078] Specifically, the preset range includes a first preset range, a second preset range, and a third preset range;

[0079] The first preset range is a valid value distribution range of the first proportional coefficient, the second preset range is a valid value distribution range of the second proportional coefficient, and the third preset range is a valid value distribution range of the third proportional coefficient.

[0080] It can be understood that the preferred values ​​of the first preset range, the second preset range, and the third preset range are all set to ±0.02. For example, when a set of first proportional coefficients W1 is As the reference value, when it fluctuates within the range of ±0.02, the laser energy output can be considered to be stable. If it exceeds the range of ±0.02, it can be considered that there are unstable factors in the laser energy output, and further analysis is required. The judgment principle of the second proportional coefficient W2 and the third proportional coefficient W3 is the same as that of the first proportional coefficient W1.

[0081] The working principle of the present invention is described below by means of specific examples:

[0082] Figure 3 This is a schematic diagram of the optical path composition of the laser energy collection module of the present invention, including: a first beam splitter 2, a laser energy probe 3, a second beam splitter 4, a first beam reduction lens combination 5, a first attenuation wheel 6, a near-field CCD 7, a second beam reduction lens combination 9, a second attenuation wheel 10, a photodetector 11, and an oscilloscope 12.

[0083] The transmission path of the optical path of the laser energy collection module is as follows: after the sampling laser beam 1 passes through the first beam splitter 2, 50% of the laser is transmitted to the laser energy probe 3 by transmission, and 50% of the laser is transmitted to the second beam splitter 4 by reflection. The second beam splitter 4 transmits 50% of the laser to the first beam reduction lens combination 5 by reflection, and transmits it to the near-field CCD7 through the first beam reduction lens combination 5 and the first attenuation wheel 6. The second beam splitter 4 transmits 50% of the laser to the reflector 8 by transmission, and after reflection by the reflector 8, it is transmitted to the second beam reduction lens combination 9, and is transmitted to the photodetector 11 through the second beam reduction lens combination 9 and the second attenuation wheel 10. The other end of the photodetector 11 is connected to the oscilloscope 12.

[0084] Considering that the laser energy acquisition module includes three laser measuring devices, namely, a laser energy probe 3, a near-field CCD 7, and a photoelectric detector 11, the voltage value of the laser energy probe 3, the average gray value of the laser intensity distribution of the near-field CCD 7, and the integral value of the laser pulse time domain waveform of the photoelectric detector 11 are compared and verified, and a method for mutual verification of laser energy is proposed, which includes the following steps:

[0085] Step 1: The output signal voltage value of the laser energy probe 3 is marked as T1, as shown in Table 1;

[0086] Step 2: Use the near-field CCD7 to obtain the average grayscale of the laser intensity distribution. Figure 4 , marked as T2, as shown in Table 1;

[0087] Step 3: Use the oscilloscope 12 and the photodetector 11 to output the laser pulse waveform as shown in Figure 5 ,Then use the computing software to process the data and integrate it, and get the integral value, marked as T3, as shown in Table 1;

[0088] Step 4: Use the output signal voltage value of the laser energy probe 3, marked as T1, and use the near-field CCD7 to mark the average gray value of the laser intensity distribution as T2, using the formula Calculate W1, as shown in Table 1;

[0089] Step 5: Use the oscilloscope 12 and the laser pulse waveform output by the photodetector 11, and then use computer software to process and integrate the data to obtain the integral value, marked as T3, using the formula Calculate W2, as shown in Table 1;

[0090] Step 6: Use the formula Calculate W3, as shown in Table 1;

[0091] Step 7: The three coefficients W1, W2, and W3 can be compared with each other in a single laser pulse, and the specific analysis of long-term monitoring is as follows: Figure 6 , Figure 7 and Figure 8 , it can accurately measure and judge the energy of a single pulse, greatly improving the stability and reliability of the entire laser energy collection device.

[0092] Table 1 T1, T2, T3 obtained by experimental measurement and W1, W2, W3 obtained by calculation

[0093]

[0094]

[0095] Specifically, from Figure 6 , Figure 7 and Figure 8 It can be seen that after long-term monitoring of the three coefficients W1, W2, and W3, the relationship between the voltage value of the laser energy sensor 3, the average gray value of the near-field CCD 7, and the integral value of the laser pulse time domain waveform of the photoelectric detector 11 has been in a steady state, indicating that the self-consistency and consistency of the laser acquisition module measurement are very reliable.

[0096] Through long-term monitoring of the three coefficients W1, W2, and W3, it was found that the voltage-grayscale ratio coefficient W1 and the voltage-waveform integral value ratio coefficient W2 in the 17th shot deviated from the effective area, while the grayscale-waveform integral value ratio coefficient W3 was very stable. After inspection, it was found that the energy of the 17th shot was close to the linear region lower line of the energy probe, resulting in a slight deviation in the voltage value of the energy probe.

[0097] In summary, through long-term monitoring of the three coefficients W1, W2, and W3, we can not only confirm the accuracy of the laser acquisition module, but also quickly locate the specific location of the system problem, effectively ensuring the operating efficiency of the laser system.

[0098] It should be noted here that the present invention calculates a first proportional coefficient between the output voltage value and the average gray value of the laser intensity distribution, a second proportional coefficient between the output voltage value and the integral value of the laser pulse waveform, and a third proportional coefficient between the average gray value of the laser intensity distribution and the integral value of the laser pulse waveform, and judges in turn whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively in the preset range corresponding to each proportional coefficient, and judges whether the output laser energy is stable according to the judgment result, thereby solving the problem that the traditional method cannot perform self-consistency review on the precise measurement result of the single-pulse laser energy, and the laser energy deviation that may exist in a single measuring device is used. In addition, the method is based on the existing measurement module, and there is no need to disassemble the laser energy probe for re-inspection, and the original structure in the laser system is fully utilized, which simplifies the re-inspection process of the laser energy probe and greatly improves the re-inspection efficiency of the laser energy probe. Through the self-calibration between the three proportional coefficients, the laser energy deviation problem that may exist in the laser energy test of a single measuring device is effectively avoided, thereby quickly and accurately judging whether the laser energy output value is normal, effectively ensuring the authenticity of the laser energy output, greatly improving the stability and reliability of the laser energy output, and greatly improving the intelligence, usability and reliability of the present invention.

[0099] Embodiment 2

[0100] The same parts of this embodiment as those of the first embodiment are not described in detail, except that:

[0101] Through long-term monitoring of the W1 coefficient as shown in Table 2, the output signal voltage value of the laser energy probe 3 and the average gray value of the laser intensity distribution of the near-field CCD7 change continuously as the laser energy increases.

[0102] Table 2 W1 data from 5.17 to 5.19

[0103]

[0104] And as the energy increases, the deviation relationship between the W1 value and its average value is also changing. Fig. 9From the data, we can see that the greater the energy, the greater the deviation. It can be determined that the output voltage value of the laser energy probe 3 increases with the increase of energy relative to the average grayscale value of the near-field CCD7. It can also be seen from the optical path diagram of the laser energy acquisition module that the laser energy probe 3 first measures the laser, and there is still an attenuation plate in front of the near-field CCD7. The attenuation plate is formulated according to different wavelengths. When the laser contains stray lasers of other wavelengths, the laser energy probe 3 will increase with the increase of laser energy, and the voltage value in front of the laser energy probe 3 will also increase. The attenuation plate in front of the near-field CCD7 will be relatively more stable.

[0105] It should be noted here that the present invention calculates a first proportional coefficient between the output voltage value and the average gray value of the laser intensity distribution, a second proportional coefficient between the output voltage value and the integral value of the laser pulse waveform, and a third proportional coefficient between the average gray value of the laser intensity distribution and the integral value of the laser pulse waveform, and judges in turn whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively in the preset range corresponding to each proportional coefficient, and judges whether the output laser energy is stable according to the judgment result, thereby solving the problem that the traditional method cannot perform self-consistency review on the precise measurement result of the single-pulse laser energy, and the laser energy deviation that may exist in a single measuring device is used. In addition, the method is based on the existing measurement module, and there is no need to disassemble the laser energy probe for re-inspection, and the original structure in the laser system is fully utilized, which simplifies the re-inspection process of the laser energy probe and greatly improves the re-inspection efficiency of the laser energy probe. Through the self-calibration between the three proportional coefficients, the laser energy deviation problem that may exist in the laser energy test of a single measuring device is effectively avoided, thereby quickly and accurately judging whether the laser energy output value is normal, effectively ensuring the authenticity of the laser energy output, greatly improving the stability and reliability of the laser energy output, and greatly improving the intelligence, usability and reliability of the present invention.

[0106] Embodiment 3

[0107] See also Figure 2 This embodiment provides a laser energy mutual verification device, the device comprising:

[0108] The beam splitter 100 includes a first beam splitter 2 and a second beam splitter 4, and is used to split the sampling laser beam 1 into two beams;

[0109] The beam reduction lens 200 includes a first beam reduction lens assembly 5 and a second beam reduction lens assembly 9, and is used to reduce the diameter of the laser beam passing through the lens;

[0110] The attenuation wheel 300 includes a first attenuation wheel 6 and a second attenuation wheel 10, and is used to adjust and control the intensity of the laser spot;

[0111] The acquisition module 400 includes a laser energy probe 3, a near-field CDD 7, a photodetector 11, and an oscilloscope 12, and is used to obtain the output voltage value of the laser, the average gray value of the laser intensity distribution, and the integral value of the laser pulse waveform using the laser energy probe 3, the near-field CDD 7, the photodetector 11, and the oscilloscope 12;

[0112] The control module 500 is used to calculate a first proportional coefficient between an output voltage value and an average gray value of a laser intensity distribution, a second proportional coefficient between an output voltage value and an integral value of a laser pulse waveform, and a third proportional coefficient between an average gray value of a laser intensity distribution and an integral value of a laser pulse waveform; or to sequentially determine whether the distribution of a first proportional coefficient, a second proportional coefficient, and a third proportional coefficient of a single-pulse laser is within a preset range, and determine whether the output laser energy is stable based on the determination result.

[0113] Specifically, after the sampling laser beam 1 passes through the first beam splitter 2, a first preset ratio of the sampling laser beam 1 is transmitted to the laser energy probe 3 by transmission, and a second preset ratio of the sampling laser beam 1 is transmitted to the second beam splitter 4 by reflection.

[0114] Specifically, the second beam splitter 4 transmits the sampling laser beam 1 of the third preset ratio to the first beam reduction lens assembly 5 by reflection, and transmits it to the near-field CDD 7 through the first beam reduction lens assembly 5 and the first attenuation wheel 6;

[0115] The second beam splitter 4 transmits the sampling laser beam 1 of the fourth preset ratio to the reflector 8 by transmission, and after being reflected by the reflector 8, it is transmitted to the second beam reduction lens combination 9, and then transmitted to the photodetector 11 through the second beam reduction lens combination 9 and the second attenuation wheel 10. The other end of the photodetector 11 is connected to the oscilloscope 12.

[0116] It should be noted here that the present invention calculates a first proportional coefficient between the output voltage value and the average gray value of the laser intensity distribution, a second proportional coefficient between the output voltage value and the integral value of the laser pulse waveform, and a third proportional coefficient between the average gray value of the laser intensity distribution and the integral value of the laser pulse waveform, and judges in turn whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively in the preset range corresponding to each proportional coefficient, and judges whether the output laser energy is stable according to the judgment result, thereby solving the problem that the traditional method cannot perform self-consistency review on the precise measurement result of the single-pulse laser energy, and the laser energy deviation that may exist in a single measuring device is used. In addition, the method is based on the existing measurement module, and there is no need to disassemble the laser energy probe for re-inspection, and the original structure in the laser system is fully utilized, which simplifies the re-inspection process of the laser energy probe and greatly improves the re-inspection efficiency of the laser energy probe. Through the self-calibration between the three proportional coefficients, the laser energy deviation problem that may exist in the laser energy test of a single measuring device is effectively avoided, thereby quickly and accurately judging whether the laser energy output value is normal, effectively ensuring the authenticity of the laser energy output, greatly improving the stability and reliability of the laser energy output, and greatly improving the intelligence, usability and reliability of the present invention.

[0117] Embodiment 4

[0118] In a preferred embodiment, the present application further provides an electronic device, the electronic device comprising:

[0119] A memory; and a processor, wherein the memory stores computer-readable instructions, and when the computer-readable instructions are executed by the processor, the method of laser energy mutual verification is implemented. The computer device can be broadly a server, a terminal, or any other electronic device with necessary computing and / or processing capabilities. In one embodiment, the computer device may include a processor, a memory, a network interface, a communication interface, etc. connected via a system bus. The processor of the computer device can be used to provide necessary computing, processing and / or control capabilities. The memory of the computer device may include a non-volatile storage medium and an internal memory. An operating system, a computer program, etc. may be stored in or on the non-volatile storage medium. The internal memory can provide an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The network interface and the communication interface of the computer device can be used to connect and communicate with external devices via a network. When the computer program is executed by the processor, the steps of the method of the present invention are performed.

[0120] The present invention may be implemented as a computer-readable storage medium having a computer program stored thereon, which causes the steps of the method of an embodiment of the present invention to be executed when executed by a processor. In one embodiment, the computer program is distributed on a plurality of computer devices or processors coupled to a network so that the computer program is stored, accessed and executed in a distributed manner by one or more computer devices or processors. A single method step / operation, or two or more method steps / operations, may be performed by a single computer device or processor or by two or more computer devices or processors. One or more method steps / operations may be performed by one or more computer devices or processors, and one or more other method steps / operations may be performed by one or more other computer devices or processors. One or more computer devices or processors may perform a single method step / operation, or perform two or more method steps / operations.

[0121] It should be noted here that the present invention calculates a first proportional coefficient between the output voltage value and the average gray value of the laser intensity distribution, a second proportional coefficient between the output voltage value and the integral value of the laser pulse waveform, and a third proportional coefficient between the average gray value of the laser intensity distribution and the integral value of the laser pulse waveform, and judges in turn whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively in the preset range corresponding to each proportional coefficient, and judges whether the output laser energy is stable according to the judgment result, thereby solving the problem that the traditional method cannot perform self-consistency review on the precise measurement result of the single-pulse laser energy, and the laser energy deviation that may exist in a single measuring device is used. In addition, the method is based on the existing measurement module, and there is no need to disassemble the laser energy probe for re-inspection, and the original structure in the laser system is fully utilized, which simplifies the re-inspection process of the laser energy probe and greatly improves the re-inspection efficiency of the laser energy probe. Through the self-calibration between the three proportional coefficients, the laser energy deviation problem that may exist in the laser energy test of a single measuring device is effectively avoided, thereby quickly and accurately judging whether the laser energy output value is normal, effectively ensuring the authenticity of the laser energy output, greatly improving the stability and reliability of the laser energy output, and greatly improving the intelligence, usability and reliability of the present invention.

[0122] The various technical features described above can be combined arbitrarily. Although all possible combinations of these technical features are not described, any combination of these technical features should be considered to be covered by this specification as long as there is no contradiction in such combination.

[0123] The specific implementation of the present invention described above does not constitute a limitation on the protection scope of the present invention. Any other corresponding changes and modifications made based on the technical concept of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A method for mutual verification of laser energy, characterized in that: include: S100, using a measuring device to obtain a laser output voltage value, an average gray value of a laser intensity distribution, and an integral value of a laser pulse waveform; S200, calculating a first proportionality coefficient between the output voltage value and the average gray value of the laser intensity distribution, a second proportionality coefficient between the output voltage value and the integral value of the laser pulse waveform, and a third proportionality coefficient between the average gray value of the laser intensity distribution and the integral value of the laser pulse waveform; S300, sequentially determining whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively within the preset range corresponding to each proportional coefficient, and determining whether the output laser energy is stable based on the determination result.

2. The laser energy mutual calibration method according to claim 1, characterized in that: The method of using a measuring device to obtain the output voltage value of the laser, the average gray value of the laser intensity distribution, and the integral value of the laser pulse waveform includes: Using a laser energy probe (3) to obtain the output voltage value of the laser; Using a near-field CCD (7) to obtain an average grayscale value of the laser intensity distribution; An oscilloscope (12) and a photodetector (11) are used to obtain an integral value of the laser pulse waveform.

3. The laser energy mutual calibration method according to claim 2, characterized in that: The method of obtaining the integral value of the laser pulse waveform by using an oscilloscope (12) and a photodetector (11) comprises: A photodetector (11) disposed in a laser path is used to convert a laser signal into an electrical signal, and then an oscilloscope (12) connected to the photodetector (11) is used to capture and display the waveform of the electrical signal output by the photodetector (11); The data of the electrical signal waveform is integrated to obtain the integral value of the laser pulse waveform.

4. The laser energy mutual calibration method according to claim 1, characterized in that: The step of sequentially judging whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively within the preset ranges corresponding to the respective proportional coefficients, and judging whether the output laser energy is stable according to the judgment result, includes: If the distributions of the first proportionality coefficient, the second proportionality coefficient, and the third proportionality coefficient of the single-pulse laser are all within a preset range, it is determined that the output laser energy is stable.

5. The laser energy mutual calibration method according to claim 4, characterized in that: The method of sequentially judging whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of the single-pulse laser is respectively within the preset ranges corresponding to the respective proportional coefficients, and judging whether the output laser energy is stable according to the judgment result, further includes: If any one of the first proportionality coefficient, the second proportionality coefficient and the third proportionality coefficient of the single-pulse laser is not within the preset range, it is determined that the single-pulse laser energy has an output instability.

6. The laser energy mutual calibration method according to claim 5, characterized in that: The preset range includes a first preset range, a second preset range, and a third preset range; The first preset range is a valid value distribution range of the first proportional coefficient, the second preset range is a valid value distribution range of the second proportional coefficient, and the third preset range is a valid value distribution range of the third proportional coefficient.

7. A laser energy mutual calibration device, characterized in that: The method for mutual verification of laser energy according to any one of claims 1 to 6 comprises: A beam splitter (100), comprising a first beam splitter (2) and a second beam splitter (4), used for splitting the sampling laser beam (1) into two beams; A beam reduction lens (200), comprising a first beam reduction lens assembly (5) and a second beam reduction lens assembly (9), and used to reduce the diameter of a laser beam passing through the lens; An attenuation wheel (300), comprising a first attenuation wheel (6) and a second attenuation wheel (10), used for adjusting and controlling the light intensity of the laser spot; An acquisition module (400) comprises a laser energy probe (3), a near-field CDD (7), a photodetector (11), and an oscilloscope (12), and is used to acquire the output voltage value of the laser, the average gray value of the laser intensity distribution, and the integral value of the laser pulse waveform by using the laser energy probe (3), the near-field CDD (7), the photodetector (11), and the oscilloscope (12); The control module (500) is used to calculate a first proportional coefficient between an output voltage value and an average gray value of a laser intensity distribution, a second proportional coefficient between an output voltage value and an integral value of a laser pulse waveform, and a third proportional coefficient between an average gray value of a laser intensity distribution and an integral value of a laser pulse waveform; or to sequentially determine whether the distribution of the first proportional coefficient, the second proportional coefficient, and the third proportional coefficient of a single-pulse laser is within a preset range, and determine whether the output laser energy is stable based on the determination result.

8. The laser energy mutual calibration device according to claim 7, characterized in that: After the sampling laser beam (1) passes through the first beam splitter (2), a first preset ratio of the sampling laser beam (1) is transmitted to the laser energy probe (3) by transmission, and a second preset ratio of the sampling laser beam (1) is transmitted to the second beam splitter (4) by reflection.

9. The laser energy mutual verification device according to claim 8, characterized in that: The second beam splitter (4) transmits the sampling laser beam (1) of the third preset ratio to the first beam reduction lens assembly (5) by reflection, and transmits the sampling laser beam (1) to the near-field CDD (7) via the first beam reduction lens assembly (5) and the first attenuation wheel (6); The second beam splitter (4) transmits the sampling laser beam (1) of a fourth preset ratio to a reflector (8) by transmission, and after being reflected by the reflector (8), the sampling laser beam (1) is transmitted to a second beam reduction lens assembly (9), and then transmitted to a photoelectric detector (11) via the second beam reduction lens assembly (9) and a second attenuation wheel (10), and the other end of the photoelectric detector (11) is connected to an oscilloscope (12).

10. An electronic device, characterized in that: include: Memory; and a processor, wherein the memory stores computer-readable instructions, and when the computer-readable instructions are executed by the processor, the method for laser energy mutual verification according to any one of claims 1 to 6 is implemented.

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