Matching parameter determination method and related device

Abstract

The invention provides a matching parameter determination method and a related device, and relates to the technical field of radio frequency, the matching parameter determination method is used for determining a matching parameter, and the matching parameter comprises a reflection coefficient module value. The matching parameter determination method comprises the following steps: at least obtaining a test current value and a test voltage value of a load when a test AC source outputs a test AC signal to the load; determining a resistance value and an impedance module value of the load at least according to the test current value and the test voltage value; determining a reflection coefficient module value according to the preset characteristic impedance value, the resistance value of the load and the impedance module value; wherein the reflection coefficient module value is used for reflecting the impedance matching condition between the radio frequency power supply and the load when the radio frequency power supply outputs the radio frequency signal to the load. The method can quickly determine the module value of the reflection coefficient.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a matching parameter determination method, a matching parameter determination device, a radio frequency power supply system, and a computer-readable storage medium. Background Art

[0002] RF power supplies can generate RF signals with RF frequencies and a certain output power. RF power supplies are widely used in many fields to output RF signals to the loads of various core manufacturing equipment. When the RF power supply outputs RF signals to the load, it is necessary to determine the impedance matching between the RF power supply and the load based on matching parameters such as reflection coefficient, reflection coefficient modulus, and standing wave ratio, so as to avoid damage to the RF power supply and improve output efficiency.

[0003] Therefore, how to determine matching parameters such as the reflection coefficient modulus to reflect the impedance matching between the RF power supply and the load when the RF power supply outputs an RF signal to the load has become a problem that needs to be considered. Summary of the invention

[0004] The present application provides a matching parameter determination method, a matching parameter determination device, a radio frequency power supply system, and a computer-readable storage medium, which can quickly determine the reflection coefficient modulus to reflect the impedance matching between the radio frequency power supply and the load when the radio frequency power supply outputs a radio frequency signal to the load.

[0005] In a first aspect, a matching parameter determination method is provided, the matching parameter determination method is used to determine matching parameters, the matching parameters include a reflection coefficient modulus value, the matching parameter determination method includes: at least obtaining a test current value and a test voltage value of the load when a test AC source outputs a test AC signal to the load; determining a resistance value and an impedance modulus value of the load based on at least the test current value and the test voltage value; determining a reflection coefficient modulus value based on a preset characteristic impedance value, the resistance value and the impedance modulus value of the load; wherein the reflection coefficient modulus value is used to reflect the impedance matching condition between the RF power supply and the load when the RF power supply outputs an RF signal to the load.

[0006] In one possible implementation, the at least obtaining a test current value and a test voltage value of the load when the test AC source outputs a test AC signal to the load includes: obtaining a test current value, a test voltage value, and a test power value of the load when the test AC source outputs a test AC signal to the load; the at least determining the resistance value and the impedance modulus value of the load based on the test current value and the test voltage value includes: determining the resistance value and the impedance modulus value of the load based on the test current value, the test voltage value, and the test power value.

[0007] In a possible implementation, determining the resistance value and impedance modulus of the load based on the test current value, the test voltage value, and the test power value includes: determining the resistance value of the load based on the test voltage value and the test power value; determining the impedance modulus of the load based on the test current value and the test voltage value.

[0008] In a possible implementation, the matching parameters also include a standing wave ratio, and the standing wave ratio is also used to reflect the impedance matching between the RF power supply and the load when the RF power supply outputs an RF signal to the load; wherein, after determining the reflection coefficient modulus value according to the preset characteristic impedance value, the resistance value of the load and the impedance modulus value, the matching parameter determination method further includes: determining the standing wave ratio according to the reflection coefficient modulus value based on a first conversion relationship between the reflection coefficient modulus value and the standing wave ratio.

[0009] In a possible implementation, when the reflection coefficient modulus is less than or equal to a first preset value and the standing wave ratio is less than or equal to a second preset value, it reflects that impedance matching is completed between the RF power supply and the load; when the reflection coefficient modulus is greater than the first preset value and / or the standing wave ratio is greater than the second preset value, it reflects that impedance matching is not completed between the RF power supply and the load; wherein the second preset value is obtained based on the first conversion relationship and the first preset value.

[0010] In a possible implementation, determining the reflection coefficient modulus value according to a preset characteristic impedance value, a resistance value of a load, and an impedance modulus value includes: obtaining a first preset relationship between a reflection coefficient, an imaginary unit, a preset characteristic impedance value, a resistance value of a load, a reactance value, and an impedance modulus value; and determining the reflection coefficient modulus value according to the preset characteristic impedance value, the resistance value of the load, and the impedance modulus value based on a second preset relationship between the reflection coefficient modulus value, the preset characteristic impedance value, the resistance value of the load, and the impedance modulus value, wherein the second preset relationship is obtained based on the first preset relationship and a second conversion relationship between the reflection coefficient modulus value and the reflection coefficient.

[0011] In one possible implementation, the reflection coefficient has a real part, an imaginary part and an imaginary coefficient, and the imaginary unit is the imaginary coefficient of the reflection coefficient; wherein, in the first preset relationship, both the real part and the imaginary part of the reflection coefficient are related to the preset characteristic impedance value, the resistance value of the load and the impedance modulus; in the second conversion relationship, the reflection coefficient modulus is the square root of the sum of the square of the real part and the square of the imaginary part of the reflection coefficient, so that in the second preset relationship established based on the first preset relationship and the second conversion relationship, the reflection coefficient modulus is related to the preset characteristic impedance value, the resistance value of the load and the impedance modulus.

[0012] In a second aspect, a matching parameter determination device is also provided, which adopts the above-mentioned matching parameter determination method to determine the matching parameters, and the matching parameters include a reflection coefficient modulus; wherein the matching parameter determination device includes a test AC source, an acquisition unit and a control unit; the test AC source is used to output a test AC signal to the load; the acquisition unit is used to at least acquire a test current value and a test voltage value of the load when the test AC source outputs the test AC signal to the load; the control unit is used to determine the resistance value and the impedance modulus of the load based on at least the test current value and the test voltage value, and determine the reflection coefficient modulus based on the preset characteristic impedance value, the resistance value and the impedance modulus of the load; wherein the reflection coefficient modulus is used as a matching parameter to reflect the impedance matching between the RF power supply and the load when the RF power supply outputs an RF signal to the load.

[0013] In a third aspect, a radio frequency power supply system is also provided, the radio frequency power supply system comprising a radio frequency power supply and the above-mentioned matching parameter determination device.

[0014] In a fourth aspect, a computer-readable storage medium is further provided, wherein a computer program is stored in the computer-readable storage medium, and when the computer program is executed on a computer or a processor, the above-mentioned matching parameter determination method is implemented.

[0015] The matching parameter determination method, matching parameter determination device, RF power supply system and computer-readable storage medium of the present application obtain at least a test current value and a test voltage value of the load when the test AC source outputs a test AC signal to the load, and determine the resistance value and the impedance modulus of the load at least based on the test current value and the test voltage value, so that the reflection coefficient modulus can be quickly determined according to the preset characteristic impedance value, the resistance value and the impedance modulus of the load, so as to quickly reflect the impedance matching condition between the RF power supply and the load when the RF power supply outputs an RF signal to the load according to the reflection coefficient modulus. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0017] Figure 1 Flow chart of a matching parameter determination method in an embodiment of the present application.

[0018] Figure 2 for Figure 1 A sub-flowchart of step S100 and step S200 in FIG.

[0019] Figure 3 for Figure 2A sub-flowchart of step S210 in .

[0020] Figure 4 The following is a flowchart illustrating another part of the steps of the matching parameter determination method in another embodiment of the present application.

[0021] Figure 5 for Figure 1 A sub-flowchart of step S300 in FIG.

[0022] Figure 6 Schematic diagram of a block diagram of a matching parameter determination device in an embodiment of the present application.

[0023] Figure 7 FIG. 4 is a circuit diagram of a matching parameter determination device in an embodiment of the present application.

[0024] Figure 8 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application.

[0025] Explanation of the accompanying drawings: 1000, RF power supply system, RS, RF power supply, RFS, RF signal, 10, matching parameter determination device, 100, test AC source, ACS, test AC signal, 200, acquisition unit, 210, current acquirer, I1, test current value, 220, voltage acquirer, U1, test voltage value, 230, power acquirer, P1, test power value, 300, control unit, RL, load. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0027] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0028] In the following, the terms "first", "second", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "plurality" means two or more.

[0029] In the description of the embodiments of the present application, it should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the features used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0030] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0031] See also Figure 1 , Figure 1 Flow chart of a matching parameter determination method in an embodiment of the present application. The present application provides a matching parameter determination method, which is used to determine matching parameters, wherein the matching parameters include a reflection coefficient modulus value; wherein, Figure 1 As shown, the matching parameter determination method includes:

[0032] Step S100: at least obtaining a test current value and a test voltage value of the load when the test AC source outputs a test AC signal to the load.

[0033] The power of the test AC signal is less than the power of the RF signal. Further, the power of the test AC signal is less than 10W, for example, the power of the test AC signal can be 1W, 2W, etc. Thus, the energy consumption and cost of the test AC source are reduced, and the output of the RF power source is avoided from being affected.

[0034] The frequency of the test AC signal is lower than the frequency of the RF signal. Furthermore, the frequency of the test AC signal is less than 100 Hz, for example, the frequency of the test AC signal may be 30 Hz, 40 Hz, etc. Thus, the energy consumption and cost of the test AC source are further reduced, and only an ordinary AC source is used as the test signal source, and the reflection coefficient modulus value can also be quickly determined.

[0035] Among them, the test current value and the test voltage value are both effective values.

[0036] Step S200: Determine the resistance value and impedance modulus of the load at least according to the test current value and the test voltage value.

[0037] Among them, the load has a certain impedance value, and the impedance value of the load includes a resistance value and a reactance value. The matching parameter determination method of the present application only determines the resistance value and the impedance modulus value of the load, without determining the reactance value or the impedance value of the load.

[0038] Step S300: determining a reflection coefficient modulus value according to a preset characteristic impedance value, a resistance value of a load, and an impedance modulus value.

[0039] Among them, the preset characteristic impedance value is the preset resistance value of the transmission path for the RF power supply to output the RF signal to the load, which can be set according to specific needs, generally 50Ω or 75Ω, so that the RF signal can be continuously transmitted to the load.

[0040] The reflection coefficient modulus is used to reflect the impedance matching between the RF power supply and the load when the RF power supply outputs an RF signal to the load.

[0041] Therefore, the above-mentioned matching parameter determination method in the present application obtains at least the test current value and the test voltage value of the load when the test AC source outputs the test AC signal to the load, and determines the resistance value and the impedance modulus of the load at least based on the test current value and the test voltage value, so that the reflection coefficient modulus can be quickly determined according to the preset characteristic impedance value, the resistance value and the impedance modulus of the load, so as to quickly reflect the impedance matching between the RF power supply and the load when the RF power supply outputs the RF signal to the load according to the reflection coefficient modulus.

[0042] Specifically, step S100 may include: obtaining a test current value, a test voltage value, and a test power value or a test phase angle of the load when the test AC source outputs a test AC signal to the load, wherein the test phase angle is the phase angle between the test current value and the test voltage value; step S200 may include: determining the resistance value and impedance modulus value of the load according to the test current value, the test voltage value, the test power value or the test phase angle.

[0043] In some embodiments, step S100: at least obtaining a test current value and a test voltage value of the load when the test AC source outputs a test AC signal to the load, specifically may include: obtaining a test current value, a test voltage value and a test phase angle of the load when the test AC source outputs a test AC signal to the load, wherein the test phase angle is a phase angle between the test current value and the test voltage value; step S200: determining the resistance value and the impedance modulus value of the load at least based on the test current value and the test voltage value, specifically may include: determining the resistance value and the impedance modulus value of the load based on the test current value, the test voltage value and the test phase angle.

[0044] Please also read Figure 2 , Figure 2 for Figure 1 A sub-flow chart of step S100 and step S200 in FIG. Figure 1 , Figure 2 As shown, step S100: at least obtaining a test current value and a test voltage value of the load when the test AC source outputs a test AC signal to the load, may specifically include:

[0045] Step S110: obtaining a test current value, a test voltage value, and a test power value of the load when the test AC source outputs a test AC signal to the load.

[0046] Among them, the test power value is the effective value.

[0047] Step S200: determining the resistance value and impedance modulus of the load at least according to the test current value and the test voltage value, which may specifically include:

[0048] Step S210: Determine the resistance value and impedance modulus value of the load according to the test current value, the test voltage value, and the test power value.

[0049] Therefore, the above-mentioned matching parameter determination method in the present application, when obtaining the test current value, test voltage value and test power value of the load when the test AC source outputs a test AC signal to the load, can obtain the test power value more conveniently based on the test current value, test voltage value and test power value compared to obtaining the test phase angle, thereby being able to determine the resistance value and impedance modulus of the load more quickly.

[0050] in, Figure 2 For details of step S300, please refer to the aforementioned Figure 1 The relevant introduction in will not be repeated here.

[0051] Please also read Figure 3 , Figure 3 for Figure 2 A sub-flow chart of step S210 in FIG. Figure 2 , Figure 3 As shown, step S210: determining the resistance value and impedance modulus value of the load according to the test current value, the test voltage value and the test power value, which may specifically include:

[0052] Step S211: Determine the resistance value of the load according to the test voltage value and the test power value.

[0053] It should be noted that, as mentioned above, since there may be a phase angle between the test voltage value and the test current value, the load resistance value needs to be determined by the test voltage value and the test power value.

[0054] Among them, the resistance value of the load is R1 = U1 2 / P1, where U1 is the test voltage value and P1 is the test power value, that is, the resistance value of the load is the ratio of the square of the test voltage value to the test power value.

[0055] Step S212: Determine the impedance modulus of the load according to the test current value and the test voltage value.

[0056] As mentioned above, the test current value and the test voltage value are both effective values, and the impedance modulus of the load |Zl|=U1 / I1, that is, the impedance modulus of the load is the ratio of the test voltage value to the test current value.

[0057] Therefore, the above-mentioned matching parameter determination method in the present application can obtain the impedance value of the RF source based on the first voltage value and the first current value obtained after the first analog resistor is connected to the first preset position of the transmission medium, and then obtain the first reflection coefficient at the output end of the RF source based on the impedance value of the RF source and the preset characteristic impedance value.

[0058] Please also read Figure 4 , Figure 4 The following is a flowchart illustrating another part of the steps of the matching parameter determination method in another embodiment of the present application. The matching parameters also include the standing wave ratio, which is also used to reflect the impedance matching between the RF power supply and the load when the RF power supply outputs the RF signal to the load; wherein, Figure 4 Some of the steps in the flowchart shown in FIG. Figure 1 Step S300 shown in FIG. 1 includes the following steps after determining the reflection coefficient modulus value according to the preset characteristic impedance value, the resistance value of the load and the impedance modulus value. Figure 4 As shown, after step S300, the matching parameter determination method further includes:

[0059] Step S400: Based on a first conversion relationship between a reflection coefficient modulus and a standing wave ratio, the standing wave ratio is determined according to the reflection coefficient modulus.

[0060] The first conversion relationship between the reflection coefficient modulus and the standing wave ratio is SWR=(1+|Γ|) / (1-|Γ|), wherein |Γ| is the reflection coefficient modulus and SWR is the standing wave ratio.

[0061] Therefore, the above-mentioned matching parameter determination method in the present application determines the standing wave ratio according to the reflection coefficient modulus, and can simultaneously reflect the impedance matching between the RF power supply and the load when the RF power supply outputs the RF signal to the load according to the reflection coefficient and the standing wave ratio, so as to more accurately obtain the actual impedance matching situation.

[0062] Specifically, the standing wave ratio is also called the voltage standing wave ratio. Although there is a first conversion relationship between the reflection coefficient modulus and the standing wave ratio, both the reflection coefficient modulus and the standing wave ratio need to be determined when the RF power supply outputs the RF signal to the load. Generally speaking, the reflection coefficient modulus provides an accurate proportion of the reflected energy, which is of great use when the impedance matching needs to be adjusted. The standing wave ratio intuitively displays the ratio of the maximum amplitude to the minimum amplitude on the transmission path, which can help quickly identify the severity of the reflected energy, thereby determining whether the impedance matching needs to be adjusted.

[0063] in, Figure 4 The specific steps S100 to S300 may correspond to the aforementioned Figure 1 Steps S100 to S300 in the above are not described in detail here.

[0064] When the reflection coefficient modulus is less than or equal to the first preset value and the standing wave ratio is less than or equal to the second preset value, it reflects that impedance matching is completed between the RF power supply and the load; when the reflection coefficient modulus is greater than the first preset value and / or the standing wave ratio is greater than the second preset value, it reflects that impedance matching is not completed between the RF power supply and the load; wherein the second preset value is obtained based on the first conversion relationship and the first preset value.

[0065] The second preset value corresponding to the first preset value is determined based on the first conversion relationship, that is, the first preset value and the second preset value also satisfy the first conversion relationship. For example, the first preset value is A1, and the second preset value is A2, then A2 = (1 + A1) / (1 - A1).

[0066] Therefore, the above-mentioned matching parameter determination method in the present application can reflect whether the impedance matching between the RF power supply and the load is completed by judging the size of the reflection coefficient modulus and the first preset value and the size of the standing wave ratio and the second preset value, and determine the second preset value corresponding to the first preset value based on the first conversion relationship, thereby reflecting whether the impedance matching between the RF power supply and the load is completed under the same standard.

[0067] In one or more embodiments, the first preset value and the second preset value can be set according to specific needs. The ideal reflection coefficient modulus is 0, and the ideal standing wave ratio is 1. However, it is generally believed that being close to these two values ​​can reflect that the impedance matching between the RF power supply and the load is completed. For example, the first preset value can be 0.2, and the corresponding second preset value is 1.5. For another example, the first preset modulus can be 0.25, and the corresponding second preset value is about 1.67.

[0068] Please also read Figure 5 , Figure 5 for Figure 1 A sub-flow chart of step S300 in FIG. Figure 1 , Figure 5As shown, step S300: determining the reflection coefficient modulus value according to the preset characteristic impedance value, the resistance value of the load and the impedance modulus value, which may specifically include:

[0069] Step S310: Obtain a first preset relationship among a reflection coefficient, an imaginary unit, a preset characteristic impedance value, a resistance value of a load, a reactance value, and an impedance modulus value.

[0070] Among them, the reflection coefficient is in impedance form, Γ=(R1-Z0+X1j) / (R1+Z0+X1j), where Γ is the reflection coefficient, Z0 is the preset characteristic impedance value, X1 is the load reactance value, j is the imaginary unit, and j2=-1. After simplification, Γ=(|Zl|2-Z0 2 +2Z0×X1j) / (R12+Z0 2 +2R1×Z0+X1 2 ), which is the first preset relationship.

[0071] Step S320: Based on the reflection coefficient modulus, the preset characteristic impedance value, the resistance value of the load and the impedance modulus, determine the reflection coefficient modulus according to the preset characteristic impedance value, the resistance value of the load and the impedance modulus, wherein the second preset relationship is based on the first preset relationship and a second conversion relationship between the reflection coefficient modulus and the reflection coefficient.

[0072] Among them, the second conversion relationship between the reflection coefficient modulus and the reflection coefficient is |Γ| 2 =R2+Z2, where R is the real part of the impedance form of the reflection coefficient, specifically R is (|Z1|2-Z0 2 ) / (R12+Z0 2 +2R1×Z0+X1 2 ), Z is the imaginary part of the impedance form of the reflection coefficient, and the specific imaginary part is the product of the imaginary unit, that is, Zj is (2Z0×X1j) / (R12+Z0 2 +2R1×Z0+X1 2 ), and since X1 2 =|Zl|2-R12, therefore, |Γ| 2 =[(|Z1|2-Z0 2 ) 2 +4Z0×(|Zl|2-R1 2 )] / (|Zl|2+Z0 2 +2R1×Z0) 2 , which is the second preset relationship.

[0073] Among them, in the second preset relationship, only the reflection coefficient modulus is unknown, and the unknown reflection coefficient modulus can be determined according to the preset characteristic impedance value, the resistance value of the load and the impedance modulus.

[0074] Therefore, the above-mentioned matching parameter determination method in the present application establishes the first preset relationship and the second preset relationship in sequence, and can determine the reflection coefficient modulus based on the second preset relationship according to the preset characteristic impedance value, the resistance value of the load and the impedance modulus.

[0075] Specifically, the reflection coefficient has a real part, an imaginary part and an imaginary coefficient, and the imaginary unit is the imaginary coefficient in the reflection coefficient; wherein, in the first preset relationship, the real part and the imaginary part of the reflection coefficient are both related to the preset characteristic impedance value, the resistance value of the load and the impedance modulus; in the second conversion relationship, the reflection coefficient modulus is the square root of the sum of the square of the real part and the square of the imaginary part of the reflection coefficient, so that in the second preset relationship established based on the first preset relationship and the second conversion relationship, the reflection coefficient modulus is related to the preset characteristic impedance value, the resistance value of the load and the impedance modulus.

[0076] Further, referring to the above, the real part of the reflection coefficient is related to the preset characteristic impedance value, the resistance value of the load, and the impedance modulus, and the imaginary part of the reflection coefficient is related to the preset characteristic impedance value, the resistance value of the load, the reactance value, and the impedance modulus. When calculating the reflection coefficient modulus, the imaginary unit becomes -1 due to its own square, and the reactance value of the load becomes the difference between the square of the impedance modulus value of the load and the square of the impedance value of the load due to its own square. Therefore, the reflection coefficient modulus is only related to the preset characteristic impedance value, the resistance value of the load, and the impedance modulus.

[0077] The matching parameter determination method of the present application can quickly determine matching parameters such as the reflection coefficient modulus and the standing wave ratio through the above steps, so as to quickly reflect the impedance matching between the RF power supply and the load when the RF power supply outputs the RF signal to the load according to the reflection coefficient modulus and the standing wave ratio, and judge whether the RF power supply and the load have completed impedance matching.

[0078] See also Figure 6 , Figure 6 FIG. 1 is a block diagram of a matching parameter determination device in an embodiment of the present application. Figure 6As shown, the present application also provides a matching parameter determination device 10, which adopts the above-mentioned matching parameter determination method to determine the matching parameters, and the matching parameters include the reflection coefficient modulus; wherein the matching parameter determination device 10 includes a test AC source 100, an acquisition unit 200 and a control unit 300; the test AC source 100 is used to output a test AC signal ACS to the load RL; the acquisition unit 200 is used to at least acquire the test current value I1 and the test voltage value U1 of the load RL when the test AC source 100 outputs the test AC signal ACS to the load RL; the control unit 300 is used to determine the resistance value and the impedance modulus of the load RL according to at least the test current value I1 and the test voltage value U1, and determine the reflection coefficient modulus according to the preset characteristic impedance value, the resistance value and the impedance modulus of the load RL; wherein the reflection coefficient modulus is used as a matching parameter to reflect the impedance matching between the RF power supply RS and the load RL when the RF power supply RS outputs the RF signal RFS to the load RL.

[0079] Please refer again Figure 1 .like Figure 1 As shown, the matching parameter determination method includes:

[0080] Step S100: at least obtaining a test current value and a test voltage value of the load when the test AC source outputs a test AC signal to the load.

[0081] Step S200: Determine the resistance value and impedance modulus of the load at least according to the test current value and the test voltage value.

[0082] Step S300: determining a reflection coefficient modulus value according to a preset characteristic impedance value, a resistance value of a load, and an impedance modulus value.

[0083] The reflection coefficient modulus is used to reflect the impedance matching between the RF power source RS and the load RL when the RF power source RS outputs the RF signal RFS to the load RL.

[0084] Among them, more specific steps of the matching parameter determination method can refer to the relevant content of the matching parameter determination method in any of the aforementioned embodiments, which will not be repeated here.

[0085] See also Figure 7 , Figure 7 FIG. 1 is a circuit diagram of a matching parameter determination device in an embodiment of the present application. Figure 7As shown, the test AC source 100 is used to be connected to both ends of the load RL to output a test AC signal ACS to the load RL; the acquisition unit 200 may include a current acquirer 210, a voltage acquirer 220 and a power acquirer 230, the current acquirer 210 is connected between the test AC source 100 and the load RL, and is used to acquire a test current value I1, the voltage acquirer 220 is connected to both ends of the load RL, and is used to acquire a test voltage value U1, and the power acquirer 230 is connected to both ends of the load RL, and is used to acquire a test power value P1; the control unit 300 is connected to the current acquirer 210, the voltage acquirer 220 and the power acquirer 230 to receive the test current value I1, the test voltage value U1 and the test power value P1.

[0086] In one or more embodiments, one end of the test AC source 100 that is not connected to the load RL through the current acquirer 210 may be grounded or connected to the same potential.

[0087] In one or more embodiments, the control unit 300 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0088] The steps of the matching parameter determination method and the functional operations performed by the matching parameter determination device 10 correspond to each other, and the relevant contents can be referenced to each other. The control unit 300 is mainly used to obtain the test current value I1, the test voltage value U1 and the test power value P1, and the control unit 300 is mainly used to establish the first preset relationship, the second preset relationship and other preset relationships to obtain the corresponding reflection coefficient modulus value, standing wave ratio and other matching parameters.

[0089] The matching parameter determination method and matching parameter determination device 10 of the present application can quickly determine matching parameters such as the reflection coefficient modulus and the standing wave ratio through the above steps and structures, so as to quickly reflect the impedance matching between the RF power supply RS and the load RL when the RF power supply RS outputs the RF signal RFS to the load RL according to the reflection coefficient modulus and the standing wave ratio, and judge whether the RF power supply RS and the load RL have completed impedance matching.

[0090] See also Figure 8 , Figure 8 FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 8 As shown, the present application further provides a radio frequency power supply system 1000 , which includes a radio frequency power supply RS and the above-mentioned matching parameter determination device 10 .

[0091] Please refer again Figure 6 .like Figure 6 As shown, the matching parameter determination device 10 adopts the above-mentioned matching parameter determination method to determine the matching parameters, and the matching parameters include the reflection coefficient modulus; wherein the matching parameter determination device 10 includes a test AC source 100, an acquisition unit 200 and a control unit 300; the test AC source 100 is used to output a test AC signal ACS to the load RL; the acquisition unit 200 is used to at least acquire the test current value I1 and the test voltage value U1 of the load RL when the test AC source 100 outputs the test AC signal ACS to the load RL; the control unit 300 is used to determine the resistance value and the impedance modulus of the load RL according to at least the test current value I1 and the test voltage value U1, and determine the reflection coefficient modulus according to the preset characteristic impedance value, the resistance value and the impedance modulus of the load RL; wherein the reflection coefficient modulus is used as a matching parameter to reflect the impedance matching between the RF power supply RS and the load RL when the RF power supply RS outputs the RF signal RFS to the load RL.

[0092] The more specific structure of the matching parameter determination device 10 can refer to the relevant content of the matching parameter determination device 10 in any of the aforementioned embodiments, which will not be repeated here.

[0093] like Figure 6 , Figure 8 As shown, the RF power supply RS is used to be connected to the load RL to output the RF signal RFS to the load RL, and the matching parameter determination device 10 is used to be connected to the load RL to adopt the above-mentioned matching parameter determination method to determine the matching parameters, and the matching parameters include the reflection coefficient modulus, wherein the reflection coefficient modulus is used as a matching parameter to reflect the impedance matching between the RF power supply RS and the load RL when the RF power supply RS outputs the RF signal RFS to the load RL.

[0094] The matching parameter determination method, matching parameter determination device 10 and RF power supply system 1000 of the present application can quickly determine matching parameters such as reflection coefficient modulus and standing wave ratio through the above steps and structures, so as to quickly reflect the impedance matching between the RF power supply RS and the load RL when the RF power supply RS outputs the RF signal RFS to the load RL according to the reflection coefficient modulus and the standing wave ratio, and judge whether the RF power supply RS and the load RL have completed impedance matching.

[0095] The present application also provides a computer-readable storage medium, in which a computer program is stored. When the computer program runs on a computer or a processor, the matching parameter determination method of any of the aforementioned embodiments is implemented.

[0096] In the multiple embodiments provided in the present application, it should be understood that the disclosed methods, devices and equipment can be implemented in other ways. For example, the device embodiments described above are only schematic; for example, the division of units is only a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0097] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0098] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may be physically included separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of hardware plus software functional units.

[0099] The above-mentioned integrated unit implemented in the form of a software functional unit can be stored in a computer-readable storage medium. The above-mentioned software functional unit is stored in a storage medium, including a number of instructions for a computer device (which can be a personal computer, a server, or a network device, etc.) to perform some steps of the methods of various embodiments of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM), random access memory (RAM), disk or optical disk and other media that can store program codes.

[0100] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A matching parameter determination method, used to determine matching parameters, characterized in that: The matching parameter includes a reflection coefficient modulus, and the matching parameter determination method includes: At least obtaining a test current value and a test voltage value of the load when the test AC source outputs a test AC signal to the load; Determine the resistance value and impedance modulus value of the load based on at least the test current value and the test voltage value; Determine the reflection coefficient modulus value according to the preset characteristic impedance value, the resistance value of the load and the impedance modulus value; The reflection coefficient modulus is used to reflect the impedance matching between the RF power supply and the load when the RF power supply outputs a RF signal to the load.

2. The matching parameter determination method according to claim 1, characterized in that: The step of at least obtaining a test current value and a test voltage value of the load when the test AC source outputs a test AC signal to the load comprises: Obtaining a test current value, a test voltage value, and a test power value of the load when the test AC source outputs a test AC signal to the load; The step of determining the resistance value and the impedance modulus of the load at least according to the test current value and the test voltage value comprises: The resistance value and impedance modulus value of the load are determined according to the test current value, the test voltage value and the test power value.

3. The matching parameter determination method according to claim 2, characterized in that: Determining the resistance value and impedance modulus value of the load according to the test current value, the test voltage value, and the test power value includes: Determine the resistance value of the load according to the test voltage value and the test power value; Determine the impedance modulus of the load based on the test current value and the test voltage value.

4. The matching parameter determination method according to claim 1, characterized in that: The matching parameter also includes a standing wave ratio, which is also used to reflect the impedance matching between the RF power supply and the load when the RF power supply outputs a RF signal to the load; Wherein, after determining the reflection coefficient modulus value according to the preset characteristic impedance value, the resistance value of the load and the impedance modulus value, the matching parameter determination method further includes: Based on a first conversion relationship between the reflection coefficient modulus and the standing wave ratio, the standing wave ratio is determined according to the reflection coefficient modulus.

5. The matching parameter determination method according to claim 4, characterized in that: When the reflection coefficient modulus is less than or equal to a first preset value and the standing wave ratio is less than or equal to a second preset value, it reflects that impedance matching is completed between the RF power supply and the load; When the reflection coefficient modulus is greater than a first preset value and / or the standing wave ratio is greater than a second preset value, it reflects that impedance matching between the RF power source and the load is not completed; The second preset value is obtained based on the first conversion relationship and the first preset value.

6. The matching parameter determination method according to claim 1, characterized in that: Determining the reflection coefficient modulus value according to the preset characteristic impedance value, the resistance value of the load and the impedance modulus value includes: Obtaining a first preset relationship among a reflection coefficient, an imaginary unit, a preset characteristic impedance value, a resistance value of a load, a reactance value, and an impedance modulus value; Based on a second preset relationship among a reflection coefficient modulus, a preset characteristic impedance value, a resistance value of a load and an impedance modulus, the reflection coefficient modulus is determined according to the preset characteristic impedance value, the resistance value of the load and the impedance modulus, wherein the second preset relationship is obtained based on the first preset relationship and a second conversion relationship between the reflection coefficient modulus and the reflection coefficient.

7. The matching parameter determination method according to claim 6, characterized in that: The reflection coefficient has a real part, an imaginary part and an imaginary coefficient, and the imaginary unit is the imaginary coefficient in the reflection coefficient; Among them, in the first preset relationship, the real part and the imaginary part of the reflection coefficient are both related to the preset characteristic impedance value, the resistance value of the load and the impedance modulus; in the second conversion relationship, the reflection coefficient modulus is the square root of the sum of the square of the real part and the square of the imaginary part of the reflection coefficient, so that in the second preset relationship established based on the first preset relationship and the second conversion relationship, the reflection coefficient modulus is related to the preset characteristic impedance value, the resistance value of the load and the impedance modulus.

8. A matching parameter determination device, characterized in that: The matching parameter determination device adopts the matching parameter determination method according to any one of claims 1 to 7 to determine the matching parameters, wherein the matching parameters include a reflection coefficient modulus value; Wherein, the matching parameter determination device comprises: A test AC source, used for outputting a test AC signal to a load; an acquisition unit, configured to at least acquire a test current value and a test voltage value of the load when the test AC source outputs the test AC signal to the load; A control unit, configured to determine the resistance value and the impedance modulus of the load at least according to the test current value and the test voltage value, and to determine the reflection coefficient modulus according to the preset characteristic impedance value, the resistance value and the impedance modulus of the load; The reflection coefficient modulus is used as a matching parameter to reflect the impedance matching between the RF power supply and the load when the RF power supply outputs a RF signal to the load.

9. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and the matching parameter determination device as claimed in claim 8.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program runs on a computer or a processor, the matching parameter determination method according to any one of claims 1 to 7 is implemented.

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