Matching parameter determination device and radio frequency power supply system

Abstract

The invention provides a matching parameter determination device and a radio frequency power supply system, and relates to the technical field of radio frequency, the matching parameter determination device comprises a first microstrip line, two first capacitors, a first operation module and a processor, the first microstrip line is coupled with a connection path between a radio frequency power supply and a load, and when the radio frequency power supply supplies power to the load, the first capacitor is connected with the first operation module; transmission current is generated through coupling in the first microstrip line, and a first end and a second end, opposite to each other, of the first microstrip line are respectively grounded through a first capacitor; the first operation module is connected with the first end and the second end, and is used for performing addition and subtraction on a first voltage signal at the first end and a second voltage signal at the second end to correspondingly obtain a sum voltage signal and a difference voltage signal, and performing division on the sum voltage signal and the difference voltage signal to obtain an operation result signal; the processor is connected with the first operation module and is used for determining the standing-wave ratio according to the operation result signal and a preset coefficient. According to the invention, the standing-wave ratio can be rapidly determined.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a matching parameter determination device and a radio frequency power supply system having the matching parameter determination device. Background Art

[0002] At present, RF power supplies can generate RF signals with a certain output power. RF power supplies are widely used in many fields, outputting RF signals to the loads of various core manufacturing equipment to supply power to the loads. When the RF power supply supplies power to the load, it is necessary to determine the impedance matching between the RF power supply and the load based on matching parameters such as reflection coefficient, reflection coefficient modulus, and standing wave ratio, so as to avoid damage to the RF power supply and improve output efficiency. Therefore, how to quickly determine matching parameters such as standing wave ratio has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a matching parameter determination device and a radio frequency power supply system, which can quickly determine the standing wave ratio.

[0004] In a first aspect, a matching parameter determination device is provided, the matching parameter determination device is used to determine the matching parameters when the RF power supply supplies power to the load, and the matching parameters at least include the standing wave ratio; the matching parameter determination device includes a first microstrip line, two first capacitors, a first operation module and a processor: the first microstrip line is coupled with the connection path between the RF power supply and the load, and when the RF power supply supplies power to the load, a transmission current is generated by coupling in the first microstrip line, and the first end and the second end relative to each other of the first microstrip line are grounded through one of the first capacitors respectively; the first operation module is connected to both the first end and the second end, and is used to perform addition and subtraction operations on the first voltage signal at the first end and the second voltage signal at the second end, respectively, to obtain a sum voltage signal and a difference voltage signal correspondingly, and to perform division operations on the sum voltage signal and the difference voltage signal to obtain an operation result signal; the processor is connected to the first operation module, and is used to determine the standing wave ratio according to the operation result signal and a preset coefficient.

[0005] In a possible implementation manner, the first microstrip line has an electric field inductance and a magnetic field inductance; wherein the preset coefficient is related to a preset characteristic impedance value, the electric field inductance, and the magnetic field inductance.

[0006] In a possible implementation manner, the preset coefficient is a ratio of a product of the magnetic field inductance and the preset characteristic impedance value to the electric field inductance.

[0007] In a possible implementation, the matching parameter further includes a reflection coefficient modulus; and the processor is further configured to determine the reflection coefficient modulus at least according to the standing wave ratio after determining the standing wave ratio.

[0008] In a possible implementation, the matching parameter determination device further includes a second operation module, which is selectively connected to both the first end and the second end, and the second operation module is used to divide the second voltage signal by the first voltage signal when connected to both the first end and the second end to obtain a quotient voltage signal; the processor is also used to control the second operation module to be connected to both the first end and the second end when a first preset relationship is satisfied between the preset characteristic impedance value, the electric field inductance, and the magnetic field inductance, so that the second operation module divides the second voltage signal by the first voltage signal to obtain the quotient voltage signal, and the processor determines the reflection coefficient modulus value according to the standing wave ratio and the quotient voltage signal; when the first preset relationship is not satisfied between the preset characteristic impedance value, the electric field inductance, and the magnetic field inductance, the processor controls the second operation module to be disconnected from both the first end and the second end, and determines the reflection coefficient modulus value only according to the standing wave ratio.

[0009] In a possible implementation, when the processor determines the reflection coefficient modulus value according to the standing wave ratio and the quotient voltage signal, the processor obtains a first modulus value of the reflection coefficient corresponding to the standing wave ratio based on a conversion relationship between the standing wave ratio and the reflection coefficient modulus value, and obtains a second modulus value of the reflection coefficient corresponding to the quotient voltage signal based on a corresponding relationship between the quotient voltage signal and the reflection coefficient modulus value, and determines the reflection coefficient modulus value according to the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient; when the processor determines the reflection coefficient modulus value according to the standing wave ratio, the processor determines the reflection coefficient modulus value corresponding to the standing wave ratio based on a conversion relationship between the standing wave ratio and the reflection coefficient modulus value.

[0010] In a possible implementation, the second operation module includes a second divider, two input terminals of the second divider are selectively connected to the first terminal and the second terminal respectively, and the output terminal of the second divider is connected to the processor, and the second divider is used to divide the second voltage signal by the first voltage signal when connected to the first terminal and the second terminal respectively, so as to obtain the quotient voltage signal and output it through the output terminal; the processor controls the two input terminals of the second divider to be connected or disconnected from the first terminal and the second terminal respectively, so that the second operation module is connected or disconnected from both the first terminal and the second terminal.

[0011] In a possible implementation, the matching parameter determination device also includes a sampling module, the sampling module is connected between the connection path between the RF power supply and the load and the ground, the output end of the sampling module is connected to the processor, the sampling module has a sampling coefficient, and is used to sample the voltage of the connection path, and obtain a sampled voltage signal proportional to the voltage of the connection path according to the sampling coefficient; the processor is also used to obtain the sampled voltage signal and the difference voltage signal, and obtain a sum voltage verification signal according to the sampled voltage signal, the sampling coefficient and the electric field induction coefficient, and verify the obtained sum voltage signal through the sum voltage verification signal.

[0012] In a possible implementation, the first operation module includes a first adder, a first subtractor and a first divider; the two input ends of the first adder are respectively connected to the first end and the second end, and are used to perform an addition operation on the first voltage signal and the second voltage signal to obtain the sum voltage signal; the two input ends of the first subtractor are respectively connected to the first end and the second end, and are used to perform a subtraction operation on the first voltage signal and the second voltage signal to obtain the difference voltage signal; the two input ends of the first divider are respectively connected to the output end of the first adder and the output end of the first subtractor, and are used to perform a division operation on the sum voltage signal and the difference voltage signal to obtain the operation result signal; wherein the processor is connected to the output end of the first divider to obtain the operation result signal, and determines the standing wave ratio according to the operation result signal and the preset coefficient.

[0013] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system includes a radio frequency power supply and a matching parameter determination device. The matching parameter determination device is used to determine the matching parameters when the radio frequency power supply supplies power to the load, and the matching parameters at least include the standing wave ratio; the matching parameter determination device includes a first microstrip line, two first capacitors, a first operation module and a processor: the first microstrip line is coupled with the connection path between the radio frequency power supply and the load, and when the radio frequency power supply supplies power to the load, a transmission current is generated by coupling in the first microstrip line, and the first end and the second end of the first microstrip line are respectively grounded through one of the first capacitors; the first operation module is connected to both the first end and the second end, and is used to perform addition and subtraction operations on the first voltage signal at the first end and the second voltage signal at the second end, respectively, to obtain a sum voltage signal and a difference voltage signal, and to perform division operations on the sum voltage signal and the difference voltage signal, to obtain an operation result signal; the processor is connected to the first operation module, and is used to determine the standing wave ratio according to the operation result signal and a preset coefficient.

[0014] The matching parameter determination device and the RF power supply system of the present application, when the RF power supply supplies power to the load, generate a transmission current in the first microstrip line by setting a first microstrip line to couple with the connection path between the RF power supply and the load, and obtain a calculation result signal by calculating a first voltage signal at the first end relative to the first microstrip line and a second voltage signal at the second end, so that the processor can quickly determine the standing wave ratio according to the calculation result signal and the preset coefficient. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 Schematic diagram of a matching parameter determination device in an embodiment of the present application.

[0017] Figure 2 FIG. 4 is a schematic diagram of a first computing module in an embodiment of the present application.

[0018] Figure 3 It is a schematic diagram of a matching parameter determination device in yet another embodiment of the present application.

[0019] Figure 4 for Figure 3 The schematic diagram of the switch module and related parts in the matching parameter determination device in the disconnected state is shown.

[0020] Figure 5 for Figure 3 The schematic diagram of the switch module in the on state and related parts in the matching parameter determination device is shown.

[0021] Figure 6 Schematic diagram of a matching parameter determination device in another embodiment of the present application.

[0022] Figure 7 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application.

[0023] Explanation of the accompanying drawings: 1000, RF power supply system, RS, RF power supply, RL, load, 10, matching parameter determination device, 100, first microstrip line, A, first end, U1, first voltage signal, B, second end, U2, second voltage signal, C1, first capacitor, 200, first operation module, 210, first adder, US, sum voltage signal, 220, first subtractor, UD, difference voltage signal, 230, first divider, CRS, operation result signal, 300, processor, CS1, first switch control signal, CS2, second switch control signal, 400, second operation module, 410, second divider, UQ, quotient voltage signal, 500, switch module, S1, first switch, S2, second switch, 600, sampling module, U3, sampling voltage signal, C2, second capacitor, C3, third capacitor, GND, ground. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0025] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0026] In the following, the terms "first", "second", and "third" are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", and "third" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.

[0027] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0028] Please also read Figure 1 , Figure 2 , Figure 1 is a schematic diagram of a matching parameter determination device in an embodiment of the present application, Figure 2 FIG. 1 is a schematic diagram of a first computing module in an embodiment of the present application. Figure 1 , Figure 2 As shown, the present application provides a matching parameter determination device 10, which is used to determine the matching parameters when the radio frequency power supply RS supplies power to the load RL, and the matching parameters at least include the standing wave ratio; the matching parameter determination device 10 includes a first microstrip line 100, two first capacitors C1, a first operation module 200 and a processor 300: the first microstrip line 100 is coupled with the connection path between the radio frequency power supply RS and the load RL, when the radio frequency power supply RS supplies power to the load RL, a transmission current is generated by coupling in the first microstrip line 100, and the first microstrip line 100 is relatively One end A and the second end B are grounded to GND respectively through a first capacitor C1; the first operation module 200 is connected to both the first end A and the second end B, and is used to perform addition and subtraction operations on the first voltage signal at the first end A and the second voltage signal U2 at the second end B, respectively, to obtain a sum voltage signal US and a difference voltage signal UD correspondingly, and to perform division operation on the sum voltage signal US and the difference voltage signal UD to obtain an operation result signal CRS; the processor 300 is connected to the first operation module 200, and is used to determine the standing wave ratio according to the operation result signal CRS and a preset coefficient.

[0029] Thus, the above-mentioned matching parameter determination device 10 in the present application, when the RF power supply RS supplies power to the load RL, generates a transmission current in the first microstrip line 100 by setting the first microstrip line 100 to couple with the connection path between the RF power supply RS and the load RL, and obtains the operation result signal CRS by operating the first voltage signal at the relative first end A of the first microstrip line 100 and the second voltage signal U2 at the second end B, so as to obtain the operation result signal CRS, and then the processor 300 can quickly determine the standing wave ratio according to the operation result signal CRS and the preset coefficient, wherein the standing wave ratio is also called the voltage standing wave ratio.

[0030] In one or more embodiments, the two first capacitors C1 are used to correspondingly maintain the voltage value of the first voltage signal at the first terminal A and the voltage value of the second voltage signal U2 at the second terminal B.

[0031] In one or more embodiments, the processor 300 is further configured to determine the impedance matching between the RF power supply RS and the load RL when the RF power supply RS supplies power to the load RL according to the standing wave ratio. Further, when the standing wave ratio is less than or equal to a first preset value, the processor 300 determines that the impedance matching between the RF power supply RS and the load RL is completed, that is, the impedance matching between the RF power supply RS and the load RL is completed; when the standing wave ratio is greater than the first preset value, the processor 300 determines that the impedance matching between the RF power supply RS and the load RL is not completed, that is, the impedance mismatch between the RF power supply RS and the load RL.

[0032] It should be noted that the ideal standing wave ratio is 1, but it is generally believed that the impedance of the RF power source RS and the load RL is matched when the standing wave ratio is close to 1. For example, the first preset value may be 1.4, 1.5, 1.6, and the like.

[0033] The first microstrip line 100 has an electric field inductance and a magnetic field inductance; wherein the preset coefficient is related to the preset characteristic impedance value, the electric field inductance and the magnetic field inductance.

[0034] Specifically, the first microstrip line 100 is a printed copper wire, and has a certain distance from the connection path between the RF power supply RS and the load RL. Since the first microstrip line 100 itself has a certain area and length, the first microstrip line 100 has a certain distance from the connection path, and the medium between the first microstrip line 100 and the connection path has a certain relative dielectric constant, so that the first microstrip line 100 has an electric field inductance coefficient and a magnetic field inductance coefficient. When the RF power supply RS supplies power to the load RL, the first microstrip line 100 generates a transmission current according to the electric field inductance coefficient and the magnetic field inductance coefficient, and makes the first end A have a first voltage signal, and the second end B has a second voltage signal U2. The operation result signal CRS obtained by operating the first voltage signal and the second voltage signal U2 is related to the preset characteristic impedance value, the electric field inductance coefficient, and the magnetic field inductance coefficient, so that the standing wave ratio can be determined in combination with the preset coefficients related to the preset characteristic impedance value, the electric field inductance coefficient, and the magnetic field inductance coefficient.

[0035] It should be noted that the preset characteristic impedance value is a preset resistance value of the connection path between the RF power supply RS and the load RL, which can be set according to specific needs, generally 50Ω or 75Ω, so that electric energy can be continuously provided to the load RL.

[0036] The preset coefficient is the ratio of the product of the magnetic field induction coefficient and the preset characteristic impedance value to the electric field induction coefficient.

[0037] Furthermore, the processor 300 is used to divide the operation result signal CRS by a preset coefficient to obtain a standing wave ratio.

[0038] Therefore, in the above-mentioned matching parameter determination device 10 in the present application, the processor 300 can obtain the preset coefficient according to the known preset characteristic impedance value, electric field inductance coefficient and magnetic field inductance coefficient, and then can divide the value of the calculation result signal CRS by the known preset coefficient to quickly obtain the standing wave ratio.

[0039] like Figure 2 As shown, the first operation module 200 includes a first adder 210, a first subtractor 220 and a first divider 230; the two input ends of the first adder 210 are respectively connected to the first end A and the second end B, and are used to perform an addition operation on the first voltage signal and the second voltage signal U2 to obtain a sum voltage signal US; the two input ends of the first subtractor 220 are respectively connected to the first end A and the second end B, and are used to perform a subtraction operation on the first voltage signal and the second voltage signal U2 to obtain a difference voltage signal UD; the two input ends of the first divider 230 are respectively connected to the output end of the first adder 210 and the output end of the first subtractor 220, and are used to perform a division operation on the sum voltage signal US and the difference voltage signal UD to obtain an operation result signal CRS; wherein the processor 300 is connected to the output end of the first divider 230 to obtain the operation result signal CRS, and determines the standing wave ratio according to the operation result signal CRS and the preset coefficient.

[0040] Thus, the above-mentioned matching parameter determination device 10 in the present application, by setting the first operation module 200 to include a first adder 210, a first subtractor 220 and a first divider 230 and corresponding connection relationships, to implement addition and subtraction operations on the first voltage signal at the first end A and the second voltage signal U2 at the second end B, respectively, to obtain the sum voltage signal US and the difference voltage signal UD correspondingly, and to divide the sum voltage signal US and the difference voltage signal UD to obtain the operation result signal CRS, and then the processor 300 determines the standing wave ratio according to the obtained operation result signal CRS and the preset coefficient.

[0041] Specifically, when the RF power supply RS supplies power to the load RL, according to the direction of the transmission current coupled in the first microstrip line 100, the first voltage signal is V / N+I / M, and the second voltage signal U2 is V / NI / M, wherein V is the voltage value in the connection path, I is the current value in the connection path when the RF power supply RS supplies power to the load RL, N is the electric field inductance, and M is the magnetic field inductance.

[0042] Furthermore, the sum voltage signal US obtained by adding the first voltage signal to the second voltage is 2V / N, and the difference voltage signal UD obtained by subtracting the first voltage signal from the second voltage is 2I / M. + +U - ,I=(U +-U - ) / Z0, then the voltage signal US is 2(U + +U - ) / N, the differential voltage signal UD is 2(U + -U - ) / (M×Z0), where U + is the voltage value of the forward wave, U - is the voltage value of the reverse wave, and Z0 is the preset characteristic impedance value.

[0043] Therefore, the calculation result signal CRS obtained by dividing the sum voltage signal US and the difference voltage signal UD is [(U + +U - ) / (U + -U - )]×(M×Z0 / N), where, according to the conversion relationship between the standing wave ratio, the voltage value of the forward wave, and the voltage value of the reverse wave, (U + +U - ) / (U + -U - ) is the standing wave ratio, M×Z0 / N is the above-mentioned preset coefficient, and according to the value of the calculation result signal CRS and the preset coefficient, (U + +U - ) / (U + -U - ) value, also known as the standing wave ratio.

[0044] In one or more embodiments, the matching parameter further includes a reflection coefficient modulus; the processor 300 is further configured to determine the reflection coefficient modulus at least according to the standing wave ratio after determining the standing wave ratio.

[0045] Therefore, the above-mentioned matching parameter determination device 10 in the present application, the standing wave ratio and the reflection coefficient modulus satisfy the following conversion relationship: SWR=(1+|Γ|) / (1-|Γ|), wherein SWR is the standing wave ratio, and |Γ| is the reflection coefficient modulus. The reflection coefficient modulus can be determined according to the standing wave ratio, and the impedance matching between the RF power supply RS and the load RL when the RF power supply RS supplies power to the load RL can be reflected according to the standing wave ratio and the reflection coefficient modulus at the same time, so as to more accurately obtain the actual impedance matching situation.

[0046] Specifically, although there is a conversion relationship between the reflection coefficient modulus and the standing wave ratio, both the reflection coefficient modulus and the standing wave ratio need to be determined when the RF power supply RS supplies power to the load RL. Generally speaking, the reflection coefficient modulus provides an accurate proportion of the reflected energy, which plays a greater role when the impedance matching needs to be adjusted, while the standing wave ratio intuitively displays the ratio of the maximum amplitude to the minimum amplitude on the connection path, which can help quickly identify the severity of the reflected energy, thereby determining whether the impedance matching needs to be adjusted.

[0047] In one or more embodiments, the processor 300 is further configured to determine the impedance matching between the RF power supply RS and the load RL when the RF power supply RS supplies power to the load RL according to the standing wave ratio and the reflection coefficient modulus. Further, when the standing wave ratio is less than or equal to the first preset value and the reflection coefficient modulus is less than or equal to the second preset value, the processor 300 determines that the impedance matching between the RF power supply RS and the load RL is completed, that is, the impedance matching between the RF power supply RS and the load RL is completed; when the standing wave ratio is greater than the first preset value and / or the reflection coefficient modulus is greater than the second preset value, the processor 300 determines that the impedance matching between the RF power supply RS and the load RL is not completed, that is, the impedance mismatch between the RF power supply RS and the load RL.

[0048] The second preset value corresponding to the first preset value is determined based on the conversion relationship between the standing wave ratio and the reflection coefficient modulus, thereby reflecting whether the impedance matching between the RF power supply RS and the load RL is completed under the same standard.

[0049] Furthermore, the first preset value and the second preset value also satisfy the conversion relationship between the standing wave ratio and the reflection coefficient modulus. For example, the first preset value is A1, and the second preset value is A2, then A1=(1+A2) / (1-A2).

[0050] It should be noted that the ideal reflection coefficient modulus is 0, but it is generally believed that when the reflection coefficient modulus is close to 0, the impedance matching of the RF power supply RS and the load RL can be determined. For example, when the first preset values ​​are 1.4, 1.5, and 1.6, respectively, the second preset values ​​may be approximately 0.17, 0.2, and 0.23, respectively. Further, the first preset value may be 1.5, and the second preset value may be 0.2.

[0051] See also Figure 3 , Figure 3 FIG. 1 is a schematic diagram of a matching parameter determination device in another embodiment of the present application. Figure 3As shown, the matching parameter determination device 10 also includes a second operation module 400, which can be selectively connected to the first end A and the second end B. The second operation module 400 is used to divide the second voltage signal U2 and the first voltage signal when connected to both the first end A and the second end B to obtain a quotient voltage signal UQ; the processor 300 is also used to control the second operation module 400 to be connected to both the first end A and the second end B when a first preset relationship is satisfied among the preset characteristic impedance value, the electric field inductance coefficient, and the magnetic field inductance coefficient, so that the second operation module 400 divides the second voltage signal U2 and the first voltage signal to obtain the quotient voltage signal UQ, and the processor 300 determines the reflection coefficient modulus value according to the standing wave ratio and the quotient voltage signal UQ; when the first preset relationship is not satisfied among the preset characteristic impedance value, the electric field inductance coefficient, and the magnetic field inductance coefficient, the processor 300 controls the second operation module 400 to be disconnected from both the first end A and the second end B, and determines the reflection coefficient modulus value only according to the standing wave ratio.

[0052] Thus, the above-mentioned matching parameter determination device 10 in the present application, by setting a second operation module 400 that is selectively connected to both the first end A and the second end B, can enable the second operation module 400 to perform a division operation on the second voltage signal U2 and the first voltage signal when the preset characteristic impedance value, the electric field inductance coefficient, and the magnetic field inductance coefficient satisfy a first preset relationship to obtain a quotient voltage signal UQ, and the processor 300 determines the reflection coefficient modulus value based on the standing wave ratio and the quotient voltage signal UQ.

[0053] In one or more embodiments, the first preset relationship is M×Z0=N, that is, the product of the magnetic field induction coefficient and the preset characteristic impedance value is the same as the electric field induction coefficient, that is, when the preset coefficient is 1, the preset characteristic impedance value, the electric field induction coefficient and the magnetic field induction coefficient satisfy the first preset relationship.

[0054] It should be noted that, in the above calculations, the preset characteristic impedance value can be regarded as a dimensionless value.

[0055] Please also read Figure 4 , Figure 5 , Figure 4 for Figure 3 The schematic diagram of the switch module and related parts in the matching parameter determination device in the disconnected state is shown, Figure 5 for Figure 3 Schematic diagram of a switch module in a conducting state and related parts in a matching parameter determination device shown in FIG. Figure 4 , Figure 5As shown, the second operation module 400 includes a second divider 410, and the two input terminals of the second divider 410 are selectively connected to the first terminal A and the second terminal B respectively, and the output terminal of the second divider 410 is connected to the processor 300. The second divider 410 is used to divide the second voltage signal U2 and the first voltage signal when connected to the first terminal A and the second terminal B respectively, so as to obtain the quotient voltage signal UQ and output it through the output terminal; the processor 300 controls the two input terminals of the second divider 410 to be connected or disconnected with the first terminal A and the second terminal B respectively, so that the second operation module 400 is connected or disconnected with both the first terminal A and the second terminal B.

[0056] Thus, the above-mentioned matching parameter determination device 10 in the present application controls the two input terminals of the second divider 410 to be connected or disconnected with the first terminal A and the second terminal B respectively by configuring the processor 300, so that the second operation module 400 is connected or disconnected with both the first terminal A and the second terminal B, and divides the second voltage signal U2 by the first voltage signal when the second divider 410 is connected to the first terminal A and the second terminal B respectively to obtain the quotient voltage signal UQ and output it through the output terminal to realize the division operation of the second voltage signal U2 by the first voltage signal.

[0057] In one or more embodiments, Figure 3 , Figure 4 , Figure 5 As shown, the matching parameter determination device 10 may further include a switch module 500, the switch module 500 includes a first switch S1 and a second switch S2, the first switch S1 is connected between the first terminal A and one of the input terminals of the second divider 410, and the second switch S2 is connected between the second terminal B and the other input terminal of the second divider 410. The processor 300 is used to output a first switch control signal CS1 and a second switch control signal CS2 to control the first switch S1 and the second switch S2 to be turned on or off at the same time, wherein when the first switch S1 and the second switch S2 are turned on at the same time, the switch module 500 is in a turned-on state, and the two input terminals of the second divider 410 are connected to the first terminal A and the second terminal B, respectively, to receive the first voltage signal and the second voltage signal U2; when the first switch S1 and the second switch S2 are turned off at the same time, the switch module 500 is in a turned-off state, and the two input terminals of the second divider 410 are disconnected from the first terminal A and the second terminal B, respectively, to stop receiving the first voltage signal and the second voltage signal U2.

[0058] In one or more embodiments, when the processor 300 determines the reflection coefficient modulus value according to the standing wave ratio and the quotient voltage signal UQ, the processor 300 obtains the first modulus value of the reflection coefficient corresponding to the standing wave ratio based on the conversion relationship between the standing wave ratio and the reflection coefficient modulus value, and obtains the second modulus value of the reflection coefficient corresponding to the quotient voltage signal UQ based on the corresponding relationship between the quotient voltage signal UQ and the reflection coefficient modulus value, and determines the reflection coefficient modulus value according to the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient; when the processor 300 determines the reflection coefficient modulus value according to the standing wave ratio, the processor 300 determines the reflection coefficient modulus value corresponding to the standing wave ratio based on the conversion relationship between the standing wave ratio and the reflection coefficient modulus value.

[0059] Therefore, the reflection coefficient modulus value determined by the matching parameter determination device 10 in the present application according to the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient is more accurate and can avoid calculation errors.

[0060] The corresponding relationship between the quotient voltage signal UQ and the reflection coefficient modulus is that the value of the quotient voltage signal UQ is the reflection coefficient modulus.

[0061] Specifically, when the preset characteristic impedance value, the electric field inductance coefficient, and the magnetic field inductance coefficient satisfy the first preset relationship, referring to the above, V=U + +U - , I=U + -U - / Z0, then the first voltage signal is U + / N+U + / (M×Z0), the second voltage signal U2 is U - / N+U - / (M×Z0), the second operation module 400 performs a division operation on the second voltage signal U2 and the first voltage signal to obtain a quotient voltage signal UQ of U - / U + , that is, the second modulus of the reflection coefficient is U - / U + The value of .

[0062] In one or more embodiments, the processor 300 may determine the reflection coefficient modulus value based on the average value of the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient, or may determine the reflection coefficient modulus value based on the weighted average value of the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient, or may calibrate the other value based on one of the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient, and when the difference between the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient is greater than or equal to a first preset threshold value, it is determined that the deviation of the other value is large and the confidence of the reflection coefficient modulus value is low, and when the difference between the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient is less than the first preset threshold value, it is determined that the deviation of the other value is small and the confidence of the reflection coefficient modulus value is high. The present application is not limited to this.

[0063] See also Figure 6 , Figure 6 FIG. 1 is a schematic diagram of a matching parameter determination device in another embodiment of the present application. Figure 6 As shown, the matching parameter determination device 10 also includes a sampling module 600, which is connected between the connection path between the RF power supply RS and the load RL and the ground GND. The output end of the sampling module 600 is connected to the processor 300. The sampling module 600 has a sampling coefficient, which is used to sample the voltage of the connection path, and obtain a sampled voltage signal U3 proportional to the voltage of the connection path according to the sampling coefficient; the processor 300 is also used to obtain the sampled voltage signal U3 and the difference voltage signal UD, and obtain a sum voltage verification signal according to the sampled voltage signal U3, the sampling coefficient and the electric field induction coefficient, and verify the obtained sum voltage signal US through the sum voltage verification signal.

[0064] Therefore, the above-mentioned matching parameter determination device 10 in the present application samples the voltage of the connection path by setting the sampling module 600, and obtains a sampled voltage signal U3 proportional to the voltage of the connection path according to the sampling coefficient, and then the processor 300 can obtain the sum voltage verification signal according to the sampled voltage signal U3, the sampling coefficient and the electric field induction coefficient, and verify the obtained sum voltage signal US through the sum voltage verification signal to avoid large deviations of the sum voltage signal US and affect the accuracy of subsequent calculations.

[0065] Specifically, the sum voltage verification signal is the ratio of the product of the sampling voltage signal U3 and twice the sampling coefficient to the electric field induction coefficient, that is, the difference voltage verification signal is U3×2K / N, where K is the sampling coefficient.

[0066] In one or more embodiments, twice the sampling coefficient may be equal to the electric field induction coefficient, and the processor 300 obtains the sum voltage verification signal only according to the sampled voltage signal U3, that is, the sampled voltage signal U3 is the sum voltage verification signal.

[0067] In one or more embodiments, when the difference between the sum voltage verification signal and the sum voltage signal US is greater than a second preset threshold, it is determined that the deviation of the sum voltage signal US is large, and the confidence of the sum voltage signal US is low; when the difference between the sum voltage verification signal and the sum voltage signal US is less than the second preset threshold, it is determined that the deviation of the sum voltage signal US is small, and the confidence of the sum voltage signal US is high.

[0068] In one or more embodiments, Figure 6 As shown, the sampling module 600 includes a second capacitor C2 and a third capacitor C3, the second capacitor C2 and the third capacitor C3 are connected in series between the connection path and the ground GND, and the connection point between the second capacitor C2 and the third capacitor C3 is connected to the processor 300 as the output end of the sampling module 600; wherein the capacitance value of the second capacitor C2 and the capacitance value of the third capacitor C3 are used to enable the sampling module 600 to have a sampling coefficient.

[0069] The processor 300 may be Figure 2 The output end of the first subtractor 220 is connected to obtain the difference voltage signal UD.

[0070] In one or more embodiments, the above-mentioned first adder 210, first subtractor 220, first divider 230 and second divider 410 can be analog operation circuits including electronic components such as operational amplifiers, capacitors, resistors, inductors, etc., or can be digital operation circuits. The present application is not limited to this, as long as the corresponding operation functions can be realized.

[0071] In one or more embodiments, the processor 300 may be a general-purpose processor 300 such as a central processing unit (CPU), or a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0072] The matching parameter determination device 10 of the present application, through the above structure, can quickly determine matching parameters such as the reflection coefficient modulus and the standing wave ratio, so as to quickly reflect the impedance matching between the RF power supply RS and the load RL when the RF power supply RS supplies power to the load RL according to the reflection coefficient modulus and the standing wave ratio, and judge whether the RF power supply RS and the load RL have completed impedance matching, and provide a variety of methods to determine and verify matching parameters such as the reflection coefficient modulus and the standing wave ratio.

[0073] See also Figure 7 , Figure 7 FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 7 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a radio frequency power supply RS and a matching parameter determination device 10 in any of the aforementioned embodiments.

[0074] Please refer again Figure 1 .like Figure 1 As shown, the matching parameter determination device 10 is used to determine the matching parameters when the radio frequency power supply RS supplies power to the load RL, and the matching parameters at least include the standing wave ratio; the matching parameter determination device 10 includes a first microstrip line 100, two first capacitors C1, a first operation module 200 and a processor 300: the first microstrip line 100 is coupled with the connection path between the radio frequency power supply RS and the load RL, when the radio frequency power supply RS supplies power to the load RL, a transmission current is generated by coupling in the first microstrip line 100, and the first end A and the second end B of the first microstrip line 100 are respectively grounded GND through a first capacitor C1; the first operation module 200 is connected to both the first end A and the second end B, and is used to perform addition and subtraction operations on the first voltage signal at the first end A and the second voltage signal U2 at the second end B, respectively, to obtain a sum voltage signal US and a difference voltage signal UD, and to perform a division operation on the sum voltage signal US and the difference voltage signal UD, to obtain an operation result signal CRS; the processor 300 is connected to the first operation module 200, and is used to determine the standing wave ratio according to the operation result signal CRS and a preset coefficient.

[0075] The more specific structure of the matching parameter determination device 10 can refer to the relevant content of the matching parameter determination device 10 in any of the aforementioned embodiments, which will not be repeated here.

[0076] In one or more embodiments, Figure 7 As shown, the RF power supply RS is used to connect to the load RL to supply power to the load RL, and the matching parameter determination device 10 can be coupled to the connection path between the RF power supply RS and the load RL to determine the matching parameters when the RF power supply RS supplies power to the load RL.

[0077] The matching parameter determination device 10 and the RF power supply system 1000 of the present application can quickly determine matching parameters such as the reflection coefficient modulus and the standing wave ratio through the above-mentioned structure, so as to quickly reflect the impedance matching between the RF power supply RS and the load RL when the RF power supply RS supplies power to the load RL according to the reflection coefficient modulus and the standing wave ratio, and judge whether the RF power supply RS and the load RL have completed impedance matching, and provide a variety of methods to determine and verify matching parameters such as the reflection coefficient modulus and the standing wave ratio.

[0078] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A matching parameter determination device, characterized in that: Used to determine the matching parameters when the RF power supply supplies power to the load, wherein the matching parameters at least include the standing wave ratio; The matching parameter determination device comprises a first microstrip line, two first capacitors, a first operation module and a processor: the first microstrip line is coupled with a connection path between the RF power supply and the load, when the RF power supply supplies power to the load, a transmission current is generated by coupling in the first microstrip line, and the first end and the second end opposite to each other of the first microstrip line are grounded through one of the first capacitors respectively; The first operation module is connected to both the first end and the second end, and is used to perform addition and subtraction operations on the first voltage signal at the first end and the second voltage signal at the second end, respectively, to obtain a sum voltage signal and a difference voltage signal accordingly, and to perform division operations on the sum voltage signal and the difference voltage signal to obtain an operation result signal; the processor is connected to the first operation module, and is used to determine the standing wave ratio according to the operation result signal and a preset coefficient.

2. The matching parameter determination device according to claim 1, characterized in that: The first microstrip line has an electric field inductance and a magnetic field inductance; wherein the preset coefficient is related to a preset characteristic impedance value, the electric field inductance, and the magnetic field inductance.

3. The matching parameter determination device according to claim 2, characterized in that: The preset coefficient is a ratio of the product of the magnetic field inductance and the preset characteristic impedance value to the electric field inductance.

4. The matching parameter determination device according to claim 2, characterized in that: The matching parameters also include a reflection coefficient modulus; and the processor is further configured to determine the reflection coefficient modulus at least according to the standing wave ratio after determining the standing wave ratio.

5. The matching parameter determination device according to claim 4, characterized in that: The matching parameter determination device also includes a second operation module, which can be selectively connected to the first end and the second end. The second operation module is used to divide the second voltage signal and the first voltage signal when connected to both the first end and the second end to obtain a quotient voltage signal; the processor is also used to control the second operation module to be connected to both the first end and the second end when a first preset relationship is satisfied between the preset characteristic impedance value, the electric field inductance coefficient, and the magnetic field inductance coefficient, so that the second operation module divides the second voltage signal and the first voltage signal to obtain the quotient voltage signal, and the processor determines the reflection coefficient modulus value according to the standing wave ratio and the quotient voltage signal; the processor controls the second operation module to be disconnected from both the first end and the second end when the preset characteristic impedance value, the electric field inductance coefficient, and the magnetic field inductance coefficient do not satisfy the first preset relationship, and determines the reflection coefficient modulus value only according to the standing wave ratio.

6. The matching parameter determination device according to claim 5, characterized in that: When the processor determines the reflection coefficient modulus value according to the standing wave ratio and the quotient voltage signal, the processor obtains a first modulus value of the reflection coefficient corresponding to the standing wave ratio based on a conversion relationship between the standing wave ratio and the reflection coefficient modulus value, obtains a second modulus value of the reflection coefficient corresponding to the quotient voltage signal based on a corresponding relationship between the quotient voltage signal and the reflection coefficient modulus value, and determines the reflection coefficient modulus value according to the first modulus value of the reflection coefficient and the second modulus value of the reflection coefficient; When the processor determines the reflection coefficient modulus value according to the standing wave ratio, the processor determines the reflection coefficient modulus value corresponding to the standing wave ratio based on a conversion relationship between the standing wave ratio and the reflection coefficient modulus value.

7. The matching parameter determination device according to claim 5, characterized in that: The second operation module includes a second divider, two input ends of the second divider are selectively connected to the first end and the second end respectively, and the output end of the second divider is connected to the processor. The second divider is used to divide the second voltage signal by the first voltage signal when connected to the first end and the second end respectively, so as to obtain the quotient voltage signal and output it through the output end; the processor controls the two input ends of the second divider to be connected or disconnected with the first end and the second end respectively, so that the second operation module is connected or disconnected with both the first end and the second end.

8. The matching parameter determination device according to claim 2, characterized in that: The matching parameter determination device also includes a sampling module, which is connected between the connection path between the RF power supply and the load and the ground. The output end of the sampling module is connected to the processor. The sampling module has a sampling coefficient, which is used to sample the voltage of the connection path, and obtain a sampled voltage signal proportional to the voltage of the connection path according to the sampling coefficient; the processor is also used to obtain the sampled voltage signal and the difference voltage signal, and obtain a sum voltage verification signal according to the sampled voltage signal, the sampling coefficient and the electric field induction coefficient, and verify the obtained sum voltage signal through the sum voltage verification signal.

9. The matching parameter determination device according to claim 1, characterized in that: The first operation module includes a first adder, a first subtractor and a first divider; the two input ends of the first adder are respectively connected to the first end and the second end, and are used to add the first voltage signal and the second voltage signal to obtain the sum voltage signal; the two input ends of the first subtractor are respectively connected to the first end and the second end, and are used to subtract the first voltage signal and the second voltage signal to obtain the difference voltage signal; the two input ends of the first divider are respectively connected to the output end of the first adder and the output end of the first subtractor, and are used to divide the sum voltage signal and the difference voltage signal to obtain the operation result signal; wherein the processor is connected to the output end of the first divider to obtain the operation result signal, and determines the standing wave ratio according to the operation result signal and the preset coefficient.

10. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and a matching parameter determination device as described in any one of claims 1 to 9.

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