ICP (Inductively Coupled Plasma) light source online monitoring and protecting system

Abstract

According to the ICP plasma light source online monitoring and protecting system, the plasma flame state can be observed in real time, meanwhile, the matching condition of the flame position and the lens cone position can be observed, and the flameout protection function is achieved; comprising a flame monitoring module which is arranged in a combustion chamber of a spectrograph and is used for monitoring plasma flame and outputting a corresponding flame state signal and an ICP (Inductively Coupled Plasma) wavelength signal of the flame; the signal acquisition module is connected with the flame monitoring module and is used for judging whether flames exist or not according to the flame state signals and outputting corresponding judgment signals; the ICP upper computer is connected with the signal acquisition module and is used for outputting a corresponding power-off protection control signal; the RF power supply control module is used for receiving the judgment signal and the power-off protection control signal so as to carry out power-off protection operation when no flame exists; and the three-dimensional mobile control platform is arranged in the combustion chamber and is used for movably adjusting the position of the flame according to the ICP wavelength signal of the flame, so that the plasma flame is vertical to the lens cone.

Description

Technical Field

[0001] The invention relates to the technical field of ICP plasma light source monitoring, in particular to an ICP plasma light source online monitoring and protection system. Background Art

[0002] Inductively coupled plasma (ICP-OES) optical emission spectrometer is the most commonly used analytical instrument for elemental analysis of metal materials. It has the advantages of low detection limit, high precision, small matrix effect interference, wide linear analysis range, and the ability to simultaneously determine many elements in the periodic table. It has been widely used.

[0003] Generally, it is necessary to observe the flame state in the combustion chamber of the ICP inductively coupled plasma emission spectrometer. This is not only to determine whether there is a flame, so that the power supply of the ICP spectrometer can be immediately cut off when there is no flame to ensure the safety of the ICP equipment, but also to determine whether the flame position and the barrel position of the ICP spectroscopic system in the ICP inductively coupled plasma emission spectrometer are vertically on the same plane. This is because if the positions do not match (that is, the flame position and the barrel position are not vertically on the same plane), the intensity of the signal collected by the ICP inductively coupled plasma emission spectrometer will be weakened, and the stability will also be poor; and the plasma flame of the ICP spectrometer has very strong electromagnetic radiation, so the combustion chamber door of the ICP inductively coupled plasma emission spectrometer cannot be directly opened to observe the actual situation. The internal situation can only be observed through the perspective window. However, this method not only has low observation efficiency, but also fails to cut off the power supply in time to protect the ICP equipment when the flame is extinguished. Summary of the invention

[0004] In view of the above problems, the present invention provides an ICP plasma light source online monitoring and protection system, which can not only observe the plasma flame state in real time, but also observe the matching situation between the flame position and the lens barrel position, and has a flameout protection function.

[0005] The present invention adopts the following technical solution, an ICP plasma light source online monitoring and protection system, comprising:

[0006] The flame monitoring module is arranged in the combustion chamber of the spectrometer, and is used to monitor the plasma flame and output the corresponding flame state signal and the ICP wavelength signal of the flame;

[0007] A signal acquisition module, connected to the flame monitoring module, for judging whether there is a flame according to the flame state signal, and outputting a corresponding judgment signal;

[0008] An ICP host computer is connected to the signal acquisition module and is used to output a corresponding power-off protection control signal according to the judgment signal;

[0009] The RF power supply control module is connected to the signal acquisition module and the ICP host computer, and is used to receive the judgment signal and the power-off protection control signal to perform a power-off protection operation when there is no flame;

[0010] The three-dimensional mobile control platform is arranged in the combustion chamber of the spectrometer and is connected to the flame monitoring module and the ICP host computer. It is used to move and adjust the position of the flame according to the ICP wavelength signal of the flame so that the plasma flame is perpendicular to the lens barrel.

[0011] Furthermore, the flame monitoring module includes a photodiode, the wavelength of which is 940 nm; the photodiode is arranged at the center of the lens barrel;

[0012] Further, the signal acquisition module includes a capacitor C1, a resistor R1, an adjustment resistor R2, an operational amplifier U1, and a voltage regulator D1, and the operational amplifier U1 adopts a TL074CN chip; the photosensitive diode is connected to the capacitor C1, one end of the resistor R1, and the negative input end of the operational amplifier U1, the other end of the capacitor C1 is connected to the 2nd foot of the adjustment resistor R2, the other end of the resistor R1 is connected to the 3rd foot of the adjustment resistor R2, the positive input end of the operational amplifier U1 is grounded, the output end of the operational amplifier U1 is connected to the 2nd and 3rd feet of the section resistor R2, and the negative electrode of the voltage regulator D1, and the positive electrode of the voltage regulator D1 is grounded;

[0013] Furthermore, if the flame monitoring module detects a flame signal, the flame state signal indicates that it is normal, and the signal acquisition module outputs a flame determination signal according to the normal flame state signal;

[0014] If no flame signal is detected, the flame state signal is abnormal at this time, and the signal acquisition module outputs a flame-free judgment signal according to the abnormal flame state signal;

[0015] Further, when the ICP host computer receives the flame-free judgment signal, it outputs a power-off protection control signal to the RF power control module to control the RF power control module to perform a power-off protection operation;

[0016] Furthermore, when the ICP host computer receives a flame judgment signal, the ICP host computer outputs an action control signal to the three-dimensional mobile control platform for position adjustment;

[0017] Furthermore, when the position is adjusted, the ICP host computer performs output control according to the received ICP wavelength signal of the flame. If the ICP wavelength signal is greater than the set wavelength threshold, it indicates that the plasma flame and the lens barrel are in the optimal vertical position; if the ICP wavelength signal is less than the set wavelength threshold, it indicates that the plasma flame and the lens barrel position do not match, and the three-dimensional mobile control platform is controlled to drive the flame to adjust the position;

[0018] Furthermore, an industrial camera is provided in the combustion chamber to capture the state of the plasma flame in real time and display it in real time through a display;

[0019] Furthermore, a filter is installed in front of the lens of the industrial camera to make the light transmittance less than 1%.

[0020] The beneficial effect of the present invention is that a flame detection module and a signal acquisition module can be used to generate a flame detection signal to determine whether a flame is present or not. The RF power control module and the ICP host computer can, based on the detection signal, timely perform a power-off protection operation when there is no flame, and move and adjust the position of the flame when there is a flame, so that the plasma flame is perpendicular to the lens barrel. This allows not only real-time observation of the plasma flame state, but also the matching of the flame position and the lens barrel position. The device has a flameout protection function and has good economic use value. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural block diagram of the present invention;

[0022] Figure 2 It is a circuit schematic diagram of the signal acquisition module in the present invention. DETAILED DESCRIPTION

[0023] like Figure 1 , Figure 2 As shown, an ICP plasma light source online monitoring and protection system in the present invention comprises:

[0024] The flame monitoring module is arranged in the combustion chamber of the spectrometer, and is used to monitor the plasma flame and output the corresponding flame state signal and the ICP wavelength signal of the flame;

[0025] The signal acquisition module is connected to the flame monitoring module and is used to judge whether there is flame according to the flame state signal and output a corresponding judgment signal;

[0026] The ICP host computer is connected to the signal acquisition module and is used to output a corresponding power-off protection control signal according to the judgment signal;

[0027] The RF power supply control module is connected to the signal acquisition module and the ICP host computer, and is used to receive the judgment signal and the power-off protection control signal to perform the power-off protection operation when there is no flame, thereby ensuring the safety of the ICP equipment;

[0028] The three-dimensional mobile control platform is arranged in the combustion chamber of the spectrometer and is connected to the flame monitoring module and the ICP host computer. It is used to move and adjust the position of the flame according to the ICP wavelength signal of the flame so that the plasma flame is perpendicular to the lens barrel (not shown in the figure).

[0029] The flame monitoring module includes a photodiode, and the wavelength of the photodiode is 940nm; the photodiode is set at the center of the lens barrel; the signal acquisition module includes a capacitor C1, a resistor R1, an adjustment resistor R2, an operational amplifier U1, and a voltage regulator D1. The operational amplifier U1 adopts a TL074CN chip; the photodiode is connected to the capacitor C1, one end of the resistor R1, and the negative input end of the operational amplifier U1, the other end of the capacitor C1 is connected to the 2nd foot of the adjustment resistor R2, the other end of the resistor R1 is connected to the 3rd foot of the adjustment resistor R2, the positive input end of the operational amplifier U1 is grounded, the output end of the operational amplifier U1 is connected to the 2nd and 3rd feet of the section resistor R2, and the negative pole of the voltage regulator D1, and the positive pole of the voltage regulator D1 is grounded; the judgment signal fire judge will be output to the ICP host computer and the RF power supply control module; Figure 2 The flame signal is the signal fed back to the signal acquisition module through the photodiode.

[0030] If the flame monitoring module detects a flame signal, the flame state signal is normal at this time, and the signal acquisition module outputs a flame judgment signal based on the normal flame state signal;

[0031] Specifically, when the ICP host computer receives a flame judgment signal, the ICP host computer outputs an action control signal to the three-dimensional mobile control platform for position adjustment;

[0032] Furthermore, when the position is adjusted, the ICP host computer performs output control according to the received ICP wavelength signal of the flame. If the ICP wavelength signal is greater than the set wavelength threshold, it means that the plasma flame is in the optimal vertical position with the lens barrel, that is, the middle position of the flame is perpendicular to the center position of the ICP optical path lens barrel; if the ICP wavelength signal is less than the set wavelength threshold, it means that the plasma flame does not match the lens barrel position, and the plasma flame is on the three-dimensional mobile control platform. The three-dimensional mobile control platform can be controlled to drive the flame to adjust the position up and down, front and back, left and right until the optimal position is obtained;

[0033] If no flame signal is detected, the flame state signal is abnormal at this time, and the signal acquisition module outputs a flame-free judgment signal according to the abnormal flame state signal;

[0034] Specifically, when the ICP host computer receives the flame-free judgment signal, it outputs a power-off protection control signal to the RF power control module to control the RF power control module to perform a power-off protection operation.

[0035] An industrial camera is installed in the combustion chamber to capture the status of the plasma flame in real time and display it in real time through a monitor, so that the real-time status of the flame can be observed intuitively through video; the flame and the center position of the ICP lens barrel can also be visually observed based on the flame monitoring video; a filter is installed in front of the lens of the industrial camera to make the transmittance less than 1% to ensure that the camera is not exposed.

[0036] In the present invention, the flame monitoring module is mainly used to collect plasma flames (that is, ICP plasma light sources), and transmit optical signals to the signal acquisition module at the same time, and the signal acquisition module will output and feedback a fire judge judgment signal to indicate whether there is a plasma flame; if there is no plasma flame signal, the ICP host computer outputs a power-off protection control signal to the RF power control module to control the RF power control module to perform a power-off protection operation to achieve the flameout protection function; at the same time, it can be judged whether the plasma flame and the lens barrel are in the best position based on the intensity of the ICP wavelength signal collected in real time, and the flame can be driven to adjust its position up and down, front and back, left and right through a three-dimensional mobile control platform, so as to ensure that the middle position of the flame is perpendicular to the center position of the ICP optical path lens barrel.

[0037] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0038] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An ICP plasma light source online monitoring and protection system, characterized in that: include: The flame monitoring module is arranged in the combustion chamber of the spectrometer, and is used to monitor the plasma flame and output the corresponding flame state signal and the ICP wavelength signal of the flame; A signal acquisition module, connected to the flame monitoring module, for judging whether there is a flame according to the flame state signal, and outputting a corresponding judgment signal; An ICP host computer is connected to the signal acquisition module and is used to output a corresponding power-off protection control signal according to the judgment signal; The RF power supply control module is connected to the signal acquisition module and the ICP host computer, and is used to receive the judgment signal and the power-off protection control signal to perform a power-off protection operation when there is no flame; The three-dimensional mobile control platform is arranged in the combustion chamber of the spectrometer and is connected to the flame monitoring module and the ICP host computer. It is used to move and adjust the position of the flame according to the ICP wavelength signal of the flame so that the plasma flame is perpendicular to the lens barrel.

2. The ICP plasma light source online monitoring and protection system according to claim 1, characterized in that: The flame monitoring module comprises a photodiode, the wavelength of which is 940 nm; the photodiode is arranged at the center of the lens barrel.

3. The ICP plasma light source online monitoring and protection system according to claim 2, characterized in that: The signal acquisition module includes a capacitor C1, a resistor R1, an adjusting resistor R2, an operational amplifier U1, and a voltage regulator D1. The operational amplifier U1 adopts a TL074CN chip; the photosensitive diode is connected to the capacitor C1, one end of the resistor R1, and the negative input end of the operational amplifier U1, the other end of the capacitor C1 is connected to the 2nd foot of the adjusting resistor R2, the other end of the resistor R1 is connected to the 3rd foot of the adjusting resistor R2, the positive input end of the operational amplifier U1 is grounded, the output end of the operational amplifier U1 is connected to the 2nd and 3rd feet of the section resistor R2, and the negative pole of the voltage regulator D1, and the positive pole of the voltage regulator D1 is grounded.

4. The ICP plasma light source online monitoring and protection system according to claim 1, characterized in that: If the flame monitoring module detects a flame signal, the flame state signal is normal at this time, and the signal acquisition module outputs a flame judgment signal according to the normal flame state signal; If no flame signal is detected, the flame state signal is abnormal at this time, and the signal acquisition module outputs a flame-free judgment signal according to the abnormal flame state signal.

5. The ICP plasma light source online monitoring and protection system according to claim 4, characterized in that: When the ICP host computer receives the flame-free judgment signal, it outputs a power-off protection control signal to the RF power control module to control the RF power control module to perform a power-off protection operation.

6. The ICP plasma light source online monitoring and protection system according to claim 4, characterized in that: When the ICP host computer receives a flame determination signal, the ICP host computer outputs an action control signal to the three-dimensional mobile control platform for position adjustment.

7. The ICP plasma light source online monitoring and protection system according to claim 6, characterized in that: When performing position adjustment, the ICP host computer performs output control according to the received ICP wavelength signal of the flame. If the ICP wavelength signal is greater than the set wavelength threshold, it means that the plasma flame and the lens barrel are in the optimal vertical position; if the ICP wavelength signal is less than the set wavelength threshold, it means that the plasma flame and the lens barrel position do not match, and the three-dimensional mobile control platform is controlled to drive the flame to perform position adjustment.

8. The ICP plasma light source online monitoring and protection system according to claim 1, characterized in that: An industrial camera is arranged in the combustion chamber to capture the state of the plasma flame in real time and display it in real time through a display.

9. The ICP plasma light source online monitoring and protection system according to claim 8, characterized in that: A filter is installed in front of the lens of the industrial camera to make the light transmittance less than 1%.

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