Grinding wheel dressing device and grinding wheel dressing method

Abstract

The application relates to a grinding wheel dressing device and a grinding wheel dressing method, which are used for dressing the teeth of two grinding wheels in a double-sided grinding device. The grinding wheel dressing device comprises a first dressing wheel and a second dressing wheel, which are used for dressing the teeth of the two grinding wheels respectively; a moving structure is used for controlling the first dressing wheel or the second dressing wheel to move; and a dressing structure is used for sending instructions to the moving structure, so as to control the first dressing wheel or the second dressing wheel to dress the teeth of the corresponding grinding wheel. The teeth of the grinding wheels in the double-sided grinding device are dressed, damage caused by the teeth of the grinding wheels to silicon wafers is avoided, and the product yield is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor product manufacturing, and in particular to a grinding wheel dressing device and a grinding wheel dressing method. BACKGROUND

[0002] When a new grinding wheel is replaced in a silicon wafer double-side vertical grinder, the surface of the silicon wafer processed in succession has heavy grinding wheel marks, the damage layer of the silicon wafer is more than 7 microns thick, and the silicon wafer is easily scratched and has large warpage fluctuation, which cannot meet the requirements of the subsequent process.

[0003] When the silicon wafer is processed by the double-side vertical grinder, the silicon wafer is vertically placed in the grinding chamber, and the grinding wheels connected to the left and right main shafts of the equipment are vertically placed on both sides of the silicon wafer. The left and right grinding wheels rotate and feed towards the silicon wafer, thereby grinding and thinning the rotating silicon wafer to a specified thickness. The grinding wheel of the double-side vertical grinder generally consists of two parts, namely the grinding wheel teeth and the disc-shaped metal carrier. The grinding wheel teeth are adhered to the disc, and the surface of the new grinding wheel teeth has an enamel layer. The surface of the new grinding wheel teeth may also have burrs.

[0004] The processing principle of the silicon wafer double-side vertical grinder and the characteristics of the new grinding wheel teeth cause the problem that the double-side vertical grinder easily causes surface defects of the silicon wafer and large warpage fluctuation of the silicon wafer at the initial stage of using the new grinding wheel. SUMMARY

[0005] To solve the above technical problems, the present application provides a grinding wheel dressing device and a grinding wheel dressing method to solve the problem of grinding wheel teeth causing defects in grinding silicon wafers.

[0006] To achieve the above purpose, the technical solution adopted by the embodiments of the present application is as follows: a grinding wheel dressing device for dressing the teeth of two grinding wheels in a double-side grinding device, comprising:

[0007] a first dressing wheel and a second dressing wheel for dressing the teeth of the two grinding wheels, respectively;

[0008] a moving structure for controlling the movement of the first dressing wheel or the second dressing wheel;

[0009] a dressing structure for sending instructions to the moving structure to control the first dressing wheel or the second dressing wheel to dress the teeth of the corresponding grinding wheel.

[0010] Optionally, the first dressing wheel and the second dressing wheel are stacked into an integral structure, and a first partition is arranged between the first dressing wheel and the second dressing wheel.

[0011] Optionally, a first through hole is provided at the center of each of the first trimming wheel and the second trimming wheel, and a second through hole is provided at the center of the first separator, and the first through hole and the second through hole cooperate to allow a fixing screw to pass through.

[0012] Optionally, a second separator is provided on a side of the first trimming wheel away from the second trimming wheel, a third through hole is provided at the center of the second separator, and the first through hole, the second through hole and the third through hole cooperate to allow a fixing screw to pass through.

[0013] Optionally, the first separator and the second separator have the same structure, the first separator includes a first boss and a second boss stacked together, the cross-sectional area of ​​the second boss is smaller than the cross-sectional area of ​​the second boss, and the second boss of the first separator can be inserted into the first through hole of the second trimming wheel, and the second boss of the second separator can be inserted into the first through hole of the first trimming wheel.

[0014] Optionally, the movable structure includes a side of the second dressing wheel away from the first dressing wheel, the movable structure includes a shell, and a driving part and a transmission part arranged in the shell, and the transmission part is connected to the dressing wheel to drive the dressing wheel to move.

[0015] Optionally, the transmission part includes a transmission gear, and the fixing screw is reused as a transmission shaft that is transmission-connected to the transmission gear.

[0016] Optionally, a third separator is provided between the housing and the second finishing wheel.

[0017] Optionally, in the axial direction of the dressing wheel, the thickness of the first dressing wheel is greater than a first dimension and smaller than a second dimension, the first dimension is the width of the tooth, and the second dimension is the sum of the width of the tooth and twice the gap value between adjacent teeth.

[0018] Optionally, the first dressing wheel and the second dressing wheel are both made of ceramic.

[0019] The embodiment of the present invention further provides a grinding wheel dressing method, which uses the above-mentioned grinding wheel dressing device to perform dressing.

[0020] The first dressing wheel and the second dressing wheel are stacked to form an integral structure;

[0021] The grinding wheel dressing method comprises:

[0022] The first dressing wheel and the second dressing wheel are stacked to form an integral structure;

[0023] The grinding wheel dressing method comprises:

[0024] bringing the first dressing wheel into contact with the teeth to be ground of the first grinding wheel;

[0025] Trimming of the teeth of the grinding wheel;

[0026] Returning the first dressing wheel to an initial position;

[0027] making the second dressing wheel contact the teeth to be ground of the corresponding grinding wheel;

[0028] Reshape the teeth of the grinding wheel.

[0029] The beneficial effects of the present invention are as follows: the grinding wheel dressing device of the present invention can dress the teeth of the grinding wheel in the double-sided grinding equipment, thereby avoiding damage to the silicon wafer caused by the teeth of the grinding wheel and improving the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 An exploded schematic diagram showing a grinding wheel dressing device according to an embodiment of the present invention;

[0031] Figure 2 A schematic diagram showing a first separator according to an embodiment of the present invention;

[0032] Figure 3 A schematic diagram showing the first dressing wheel in contact with corresponding teeth in an embodiment of the present invention;

[0033] Figure 4 A schematic diagram showing the contact between the second dressing wheel and the corresponding tooth in an embodiment of the present invention;

[0034] Figure 5 A schematic diagram showing a grinding wheel dressing device in an initial position according to an embodiment of the present invention;

[0035] Figure 6 A schematic diagram showing the state in which the first trimming wheel rises to be flush with the corresponding tooth;

[0036] Figure 7 a schematic diagram showing the first dressing wheel in contact with the corresponding tooth;

[0037] Figure 8 Schematic diagram showing the second dressing wheel in contact with the corresponding tooth. DETAILED DESCRIPTION

[0038] In order to make the purposes, technical solutions, and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be described clearly and completely below with reference to the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are some but not all of the embodiments of the present disclosure. Based on the described embodiments of the present disclosure, all other embodiments obtained by a person of ordinary skill in the art without creative effort belong to the scope of protection of the present disclosure.

[0039] Unless otherwise defined, technical terms or scientific terms used in the present disclosure shall have the ordinary meanings as understood by a person of ordinary skill in the art to which the present disclosure pertains. The terms “first”, “second”, and similar terms used in the present disclosure do not denote any order, quantity, or importance, but are merely used to distinguish different constituent parts. Similarly, the terms “one”, “a”, or “the” or similar terms do not denote a quantity of the objects, but indicate that there is at least one of the objects. The terms “include”, “comprise”, or “contain” or similar terms mean that the elements or objects before the terms encompass the elements or objects listed after the terms and equivalents thereof, and do not exclude other elements or objects. The terms “connect” or “connected” or similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The terms “upper”, “lower”, “left”, “right”, and the like are merely used to indicate relative positional relationships, and when the absolute positions of the described objects are changed, the relative positional relationships can also be changed accordingly.

[0040] The terms “parallel”, “perpendicular”, and “identical” and the like used in the embodiments of the present disclosure include the strict meanings of “parallel”, “perpendicular”, “identical”, and the like, and also include cases where there is a certain tolerance, that is, “approximately parallel”, “approximately perpendicular”, “approximately identical”, and the like, within an acceptable deviation range for a specific value determined by a person of ordinary skill in the art, considering measurement and tolerance related to measurement of a specific quantity (for example, limitations of a measurement system). For example, “approximately” can mean within one or more standard deviations, or within 3% or 5% of the value.

[0041] As silicon wafer diameters increase while integrated circuit feature sizes decrease, higher requirements are placed on the flatness and cleanliness of the silicon wafer surface, as well as the degree of surface damage. Double-sided lapping involves simultaneously lapping both sides of a silicon wafer to produce a highly flat surface. A wafer clamping device is used to hold the semiconductor wafer in place during lapping. The clamping device typically includes a pair of hydrostatic pads. The hydrostatic pads are configured to simultaneously apply fluid pressure to both sides of the wafer positioned therebetween, thereby supporting the wafer in a non-contact manner. This reduces damage to the wafer that could otherwise be caused by physical clamping and allows the wafer to move (rotate) tangentially relative to the hydrostatic pad surfaces with minimal friction. The lapping device used to polish the silicon wafer in the vertical lapping apparatus includes a pair of opposing grinding wheels. The wheels simultaneously grind both sides of the wafer according to a predetermined lapping path while the wafer is supported by the hydrostatic pads.

[0042] The grinding wheel in a double-sided vertical grinder generally consists of two parts: grinding wheel teeth and a disc-shaped metal carrier. The grinding wheel teeth are distributed in a ring shape on the carrier. The cleanliness and flatness of the grinding wheel tooth surface have a great impact on the grinding quality of the silicon wafer. For example, the surface of the grinding wheel after initial replacement still has a glaze layer, and there may also be burrs on the surface of the grinding wheel teeth.

[0043] refer to Figures 1-8 In order to solve the above problems, the present embodiment provides a grinding wheel dressing device, which is used to dress the teeth 04 of two grinding wheels 03 in a double-sided grinding device, and includes:

[0044] The first dressing wheel 08 and the second dressing wheel 10 are used to dress the teeth 04 of the two grinding wheels 03 respectively;

[0045] A moving structure 12, used for controlling the movement of the first dressing wheel 08 or the second dressing wheel 10;

[0046] The dressing structure is used to send instructions to the moving structure 12 to control the first dressing wheel 08 or the second dressing wheel 10 to dress the teeth 04 of the corresponding grinding wheel 03 .

[0047] The grinding wheel dressing device provided in this embodiment is used to dress the teeth 04 of the grinding wheel 03 in the double-sided grinding equipment, thereby avoiding poor grinding of silicon wafers due to problems such as cleanliness of the surface of the teeth 04 and improving product yield.

[0048] If the same dressing wheel is used to dress both grinding wheels 03 simultaneously, adjusting the distance between the dressing wheel and the teeth 04 of the two grinding wheels 03 becomes more difficult. If the two grinding wheels 03 are dressed sequentially, particles and other impurities will inevitably remain on the dressing wheel after one grinding wheel 03 is dressed. This means that after one dressing process, the dressing surface of the dressing wheel may be contaminated. If the other grinding wheel 03 is then dressed, the dressing quality of the teeth 04 of the other grinding wheel 03 will be affected. Alternatively, a cleaning step can be added between the two dressing processes to improve the dressing quality of both grinding wheels 03, but this increases the dressing time and cost.

[0049] In this embodiment, the first dressing wheel 08 is used to dress one of the two grinding wheels 03, and the second dressing wheel 10 is used to dress the other of the two grinding wheels 03. That is, the two grinding wheels 03 are not dressed using the same dressing wheel, which can effectively ensure the dressing quality of the surfaces of the teeth 04 of the two grinding wheels 03.

[0050] In some embodiments, the moving structure 12 includes a horizontal moving unit, a lifting unit, and a rotating unit.

[0051] In some embodiments, the lifting unit and the horizontal moving unit are both implemented by a screw, gear, and motor combination, and the rotating unit is implemented by a motor. The specific structural setting can refer to the setting of the moving structure 12 in the related art and will not be repeated here.

[0052] In some embodiments, the moving unit, the lifting unit, and the rotating unit can be controlled independently without interfering with each other.

[0053] In some embodiments, when trimming the teeth 04 of the two grinding wheels 03, the moving structure 12 can execute the command sent by the trimming structure to control the first trimming wheel 08 to move to a preset position, so that the first trimming wheel 08 is at the same height as the tooth 04 to be trimmed (the same distance from the initial position of the first trimming wheel 08), and then the moving structure 12 executes the command sent by the trimming structure to control the first trimming wheel 08 to feed in the direction close to the tooth 04 to be trimmed, so as to achieve the trimming of the tooth 04 of the grinding wheel 03.

[0054] In some embodiments, when the teeth 04 of the two grinding wheels 03 are being dressed, the dressing structure sends a command to the moving structure 12, and the moving structure 12 executes the command sent by the dressing structure to control the first dressing wheel 08 to move to a preset position to contact the teeth 04 of one grinding wheel 03 to be dressed, then controls the first dressing wheel 08 to feed towards the teeth 04 to be dressed, and controls the first dressing wheel 08 to rotate to dress the teeth 04 to be dressed. After the dressing of the teeth 04 of the grinding wheel 03 is completed, the first dressing wheel 08 is controlled to return to the initial position. The moving structure 12 executes the command sent by the dressing structure to control the second dressing wheel 10 to move to a preset position to contact the teeth 04 of another grinding wheel 03 to be dressed, then controls the second dressing wheel 10 to feed towards the teeth 04 to be dressed, and controls the second dressing wheel 10 to rotate to dress the teeth 04 to be dressed. After the dressing of the teeth 04 of the grinding wheel 03 is completed, the second dressing wheel 10 is controlled to return to the initial position, and the dressing is completed.

[0055] It should be noted that the moving structure 12 executes the command sent by the dressing structure to control the first dressing wheel 08 to move to a preset position to contact the teeth 04 of one grinding wheel 03 to be dressed. Here, the first dressing wheel 08 and the teeth 04 to be dressed are in zero pressure contact, which can also be referred to as engagement. In order to achieve this operation, the first dressing wheel 08 can be first controlled to contact the teeth 04 to be dressed, and then moved away from the teeth 04 to be dressed by a preset distance, for example, 20 um. Alternatively, a coordinate system can be established with the initial position of the first dressing wheel 08 as the zero point, and the positions of the first dressing wheel 08 and the teeth 04 to be dressed of the corresponding grinding wheel 03 are established in the same coordinate system, so as to obtain the movement path of the first dressing wheel 08 moving to the preset position.

[0056] It should be noted that the moving structure 12 executes the command sent by the dressing structure to control the first dressing wheel 08 to move to a preset position to contact the teeth 04 of one grinding wheel 03 to be dressed. Then, the moving structure 12 controls the first dressing wheel 08 to rotate while feeding towards the teeth 04 to be dressed, that is, to dress the teeth 04. During the dressing process, the feeding speed can be set to 10 um / min, the rotating speed can be set to 100 r / min, the rotating number of revolutions can be set to 250 r, or the dressing time can be set to 30 min, but it is not limited thereto.

[0057] It should be noted that the dressing process of the second dressing wheel 10 on the teeth 04 of the corresponding grinding wheel 03 is the same as the dressing process of the first dressing wheel 08 on the teeth 04 of the corresponding grinding wheel 03, and will not be described here.

[0058] In an exemplary embodiment, the first dressing wheel 08 and the second dressing wheel 10 are stacked into an integral structure, and a first separator 071 is provided between the first dressing wheel 08 and the second dressing wheel 10 .

[0059] The moving structure 12 controls the synchronous movement of the first dressing wheel 08 and the second dressing wheel 10. Since the first dressing wheel 08 and the stacked dressing wheel respectively dress the teeth 04 of the corresponding grinding wheel 03, a first separator 071 is provided between the first dressing wheel 08 and the second dressing wheel 10 to prevent mutual interference. When the first dressing wheel 08 is performing dressing, the position of the first dressing wheel 08 is controlled to correspond to the position of the corresponding tooth 04 of the grinding wheel 03. When the second dressing wheel 10 is performing dressing, the position of the second dressing wheel 10 is controlled to correspond to the position of the corresponding tooth 04 of the grinding wheel 03.

[0060] In an exemplary embodiment, a first through hole is provided at the center of each of the first dressing wheel 08 and the second dressing wheel 10 , and a second through hole is provided at the center of the first separator 071 . The first through hole and the second through hole cooperate to allow the fixing screw 06 to pass through.

[0061] In an exemplary embodiment, a second separator 072 is provided on a side of the first dressing wheel 08 away from the second dressing wheel 10, and a third through hole 103 is provided at the center of the second separator 072. The first through hole, the second through hole, and the third through hole 103 cooperate to allow the fixing screw 06 to pass through.

[0062] In an exemplary embodiment, the first separator 071 and the second separator 072 have the same structure, the first separator 071 includes a first boss 101 and a second boss 102 stacked together, the cross-sectional area of ​​the second boss 102 is smaller than the cross-sectional area of ​​the second boss 102, and the second boss 102 of the first separator 071 can be inserted into the first through hole of the second dressing wheel 10, and the second boss 102 of the second separator 072 can be inserted into the first through hole of the first dressing wheel 08.

[0063] In an exemplary embodiment, taking the first separator 071 as an example, the radius B or E of the second through hole is 5 mm, the radius A of the first boss 101 is 45 mm, the thickness C of the first boss 101 in the axial direction is 15 mm, the radius D of the second boss 102 is 25 mm, and the thickness C of the second boss 102 in the axial direction is 10 mm.

[0064] In an exemplary embodiment, the movable structure 12 includes a side of the second dressing wheel 10 away from the first dressing wheel 08, and the movable structure 12 includes a shell, and a driving part and a transmission part arranged in the shell, and the transmission part is connected to the dressing wheel to drive the dressing wheel to move.

[0065] In an exemplary embodiment, the transmission portion includes a transmission gear, and the fixing screw 06 is reused as a transmission shaft that is transmission-connected to the transmission gear.

[0066] Exemplarily, a third partition 073 is provided between the housing and the second dressing wheel 10 . A fourth through hole is provided at the center of the third partition 073 to facilitate connection with the transmission part in the moving structure 12 .

[0067] It should be noted that the first separator 071, the first dressing wheel 08, the second separator 072, the second dressing wheel 10, the third separator 073 and the movable structure 12 are all detachably connected together. When each part of the structure is damaged, cracked, or expires, it can be disassembled and replaced without replacing the entire dressing device, thereby reducing costs.

[0068] In an exemplary embodiment, the thickness of the first trimming wheel 08 in the axial direction of the trimming wheel is greater than a first dimension and less than a second dimension. The first dimension is the width of a single tooth 04, and the second dimension is the sum of the width of a single tooth 04 and twice the gap between adjacent teeth 04. This allows for complete coverage of the surface of the tooth 04 during trimming without affecting the trimming of adjacent teeth 04, thereby improving trimming quality.

[0069] In an exemplary embodiment, the material of the first dressing wheel 08 is resin-bonded silicon carbide ceramic, specifically, the first dressing wheel 08 is a hollow cylindrical 1500 mesh ceramic wheel made of resin-bonded silicon carbide, and the material of the second dressing wheel 10 is resin-bonded silicon carbide ceramic, specifically, the first dressing wheel 08 is a hollow cylindrical 1500 mesh ceramic wheel made of resin-bonded silicon carbide.

[0070] In an exemplary embodiment, the outer diameter of the first dressing wheel 08 is 130 mm, and the inner diameter of the first dressing wheel 08 is 50 mm. The outer diameter of the second dressing wheel 10 is 130 mm, and the inner diameter of the first dressing wheel 08 is 50 mm, but the present invention is not limited thereto. The first dressing wheel 08 and the second dressing wheel 10 have the same structure, which facilitates the first dressing wheel 08 and the second dressing wheel 10 to dress the teeth 04 of the corresponding grinding wheel 03 without interference.

[0071] It should be noted that the grinding wheel dressing device can be arranged at the bottom of the double-sided grinding equipment, thereby avoiding interference with the grinding wheel 03.

[0072] The embodiment of the present application also provides a grinding wheel dressing method, which is performed by using the grinding wheel dressing device, and sets the left grinding wheel as a first grinding wheel and the right grinding wheel as a second grinding wheel.

[0073] The first dressing wheel 08 and the second dressing wheel 10 are arranged in a stacked manner to form an integral structure.

[0074] The grinding wheel dressing method comprises the following steps.

[0075] The grinding wheel dressing device is controlled to move, so that the first dressing wheel 08 is in contact with the tooth 04 to be ground of the first grinding wheel.

[0076] The tooth 04 of the first grinding wheel 03 is dressed.

[0077] The grinding wheel dressing device is controlled to move, so that the grinding wheel dressing device returns to the initial position.

[0078] The grinding wheel dressing device is controlled to move, so that the second dressing wheel 10 is in contact with the tooth 04 to be ground of the second grinding wheel.

[0079] The tooth 04 of the second grinding wheel is dressed.

[0080] Specifically, after the silicon wafer double-sided vertical grinding machine replaces a new grinding wheel, the tooth 04 of the grinding wheel 03 needs to be dressed, and the initial position is that (referring to FIG. 1) the grinding wheel dressing device is located below the grinding wheel 03. Figure 5 The first dressing wheel 08 is controlled to rise to the center line of the first dressing wheel 08 and the center line of the tooth 04 of the left grinding wheel 03 (it should be noted that the first dressing wheel 08 and the second dressing wheel are synchronously moved) (as shown in FIG. 2). Figure 6 Then, the first dressing wheel 08 slowly moves to the left and almost contacts the tooth 04 of the left grinding wheel 03 (as shown in FIG. 3), which is also called that the first dressing wheel 08 is combined with the tooth 04 of the left grinding wheel 03. Figure 7 At this time, the left grinding wheel 03 rotates, the first dressing wheel 08 rotates and slowly feeds to the left at the same time, and the first dressing wheel 08 stops after rotating to a preset number of revolutions or rotating for a preset time.

[0081] The feeding speed of the grinding wheel dressing device of the embodiment is 10 μm / min, the rotating speed is 100 r / min, the rotating number of revolutions is 250 r, or the dressing time is 30 min.

[0082] After the left grinding wheel 03 is trimmed, the trimming device must return to its initial position. Then control the second correction wheel to rise until the center line of the second trimming wheel 10 is aligned with the center line of the teeth 04 of the right grinding wheel 03, and then drive the trimming device to move slowly to the right to match the right grinding wheel 03 (as shown in the figure). Figure 8 As shown), the right grinding wheel 03 is then dressed, and after the dressing is completed, the grinding wheel dressing device returns to its initial position.

[0083] There are a few points to note:

[0084] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure. Other structures may refer to conventional designs.

[0085] (2) For the sake of clarity, the thickness of layers or regions in the drawings used to describe the embodiments of the present disclosure are exaggerated or reduced, i.e., these drawings are not drawn to scale. It is understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or intervening elements may be present.

[0086] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to form new embodiments.

[0087] It will be understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art will appreciate that various modifications and improvements can be made without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A grinding wheel dressing device for dressing the teeth of two grinding wheels in a double-sided grinding device, characterized in that: include: The first dressing wheel and the second dressing wheel are used to dress the teeth of the two grinding wheels respectively; The first dressing wheel and the second dressing wheel are stacked to form an integral structure, and a first separator is provided between the first dressing wheel and the second dressing wheel; a first through hole is provided at the center of each of the first dressing wheel and the second dressing wheel, and a second through hole is provided at the center of the first separator, and the first through hole and the second through hole cooperate to allow a fixing screw to pass through; a moving structure for controlling the movement of the first dressing wheel or the second dressing wheel so that the first dressing wheel contacts the teeth to be ground of the grinding wheel; or making the second dressing wheel contact the teeth to be ground of the corresponding grinding wheel; a trimming structure, configured to send instructions to the moving structure to control the first trimming wheel or the second trimming wheel to trim the teeth of the corresponding grinding wheel; After the first dressing wheel finishes dressing the teeth of the grinding wheel and the first dressing wheel returns to the initial position, the second dressing wheel is used to dress the teeth of the grinding wheel.

2. The grinding wheel dressing device according to claim 1, characterized in that: A second separator is provided on a side of the first trimming wheel away from the second trimming wheel, a third through hole is provided at the center of the second separator, and the first through hole, the second through hole and the third through hole cooperate to allow a fixing screw to pass through.

3. The grinding wheel dressing device according to claim 2, characterized in that: The first separator and the second separator have the same structure. The first separator includes a first boss and a second boss stacked together. The cross-sectional area of ​​the second boss is smaller than the cross-sectional area of ​​the second boss. The second boss of the first separator can be inserted into the first through hole of the second trimming wheel, and the second boss of the second separator can be inserted into the first through hole of the first trimming wheel.

4. The grinding wheel dressing device according to claim 1, characterized in that: The movable structure includes a side of the second dressing wheel away from the first dressing wheel, and the movable structure includes a shell, and a driving part and a transmission part arranged in the shell. The transmission part is connected to the dressing wheel to drive the dressing wheel to move.

5. The grinding wheel dressing device according to claim 4, characterized in that: The transmission part includes a transmission gear, and the fixing screw is reused as a transmission shaft that is transmission-connected to the transmission gear.

6. The grinding wheel dressing device according to claim 4, characterized in that: A third separator is provided between the housing and the second dressing wheel.

7. The grinding wheel dressing device according to claim 1, characterized in that: In the axial direction of the dressing wheel, the thickness of the first dressing wheel is greater than a first dimension and smaller than a second dimension, wherein the first dimension is the width of the tooth and the second dimension is the sum of the width of the tooth and twice the gap between adjacent teeth.

8. The grinding wheel dressing device according to claim 1, characterized in that: The first dressing wheel and the second dressing wheel are both made of ceramic.

9. A grinding wheel dressing method, characterized in that: The grinding wheel dressing device according to any one of claims 1 to 8 is used for dressing. The first dressing wheel and the second dressing wheel are stacked to form an integral structure; The grinding wheel dressing method comprises: bringing the first dressing wheel into contact with the teeth to be ground of the grinding wheel; Trimming of the teeth of the grinding wheel; Returning the first dressing wheel to an initial position; making the second dressing wheel contact the teeth to be ground of the corresponding grinding wheel; Reshape the teeth of the grinding wheel.

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