Production equipment monitoring method, electronic equipment and readable storage medium

Abstract

The embodiment of the invention provides a monitoring method of production equipment, electronic equipment and a readable storage medium, and allows a user to establish one or more monitoring tasks of a job type task, an equipment maintenance type task and a job quantity type task for selected monitored equipment to monitor the monitored equipment. When the trigger condition of the monitoring task is triggered, the follow-up production of the monitored equipment is controlled. The time type task is used for monitoring the accumulated operation duration when the machine measurement and value collection are not continuously carried out, and the trigger condition is that the accumulated operation duration reaches a first duration; the equipment maintenance type task is used for monitoring whether machine receiving value measurement is carried out after preventive maintenance, and the trigger condition is that machine receiving value measurement is not carried out after preventive maintenance; the work quantity type task is used for monitoring the accumulated work quantity which is not continuously subjected to machine measurement and value collection, and the trigger condition is that the accumulated work quantity reaches a preset quantity. By applying the monitoring method of the production equipment, the stability and the product quality of a production line can be improved.

Description

Technical Field

[0001] The present invention relates to the field of computer technology, and in particular to a monitoring method for production equipment, an electronic device and a readable storage medium. Background Art

[0002] With the rapid development of science and technology, semiconductor technology, as the cornerstone of modern information technology, is developing at an unprecedented speed. In this wave, chip manufacturing, as an important part of semiconductor technology, has increasingly higher complexity and precision requirements. Therefore, ensuring the stability and reliability of equipment during the manufacturing process has become a common focus of the industry.

[0003] In the actual production process, daily inspections of production equipment are required to ensure the normal operation of production equipment and production efficiency. However, traditional production equipment inspection methods mostly rely on manual operations, which is not only inefficient but also prone to errors and omissions due to human factors. In the highly automated semiconductor front-end chip manufacturing process, every equipment failure or performance degradation may affect the stable operation of the entire production line, and thus affect the quality and delivery cycle of the product. Therefore, this traditional inspection method can no longer meet the actual needs of production. Summary of the invention

[0004] The purpose of the embodiments of the present invention is to provide a monitoring method for production equipment, an electronic device and a readable storage medium to improve the stability of the production line and the product quality. The specific technical solution is as follows:

[0005] In a first aspect, an embodiment of the present application provides a method for monitoring a production device, comprising:

[0006] In response to a first operation, determining a monitored device from a list of production devices;

[0007] In response to the second operation, a monitoring task is generated; the monitoring task includes at least one of an operation time type task, an equipment maintenance type task and an operation volume type task, wherein the operation time type task is used to monitor the cumulative operation time for which the machine value collection is not continuously measured, the equipment maintenance type task is used to monitor whether the machine value collection is performed after preventive maintenance, and the operation volume type task is used to monitor the cumulative operation volume for which the machine value collection is not continuously measured;

[0008] Monitoring the monitored device through the monitoring task;

[0009] In response to the triggering condition of the monitoring task being triggered, the subsequent production of the monitored equipment is controlled; wherein, the triggering condition of the operation time type task is: the cumulative operation duration reaches a first duration; the triggering condition of the equipment maintenance type task is: no machine measurement is performed after preventive maintenance; the triggering condition of the workload type task is: the cumulative workload reaches a preset number.

[0010] Optionally, when the monitoring task includes the time type monitoring task, monitoring the monitored device through the monitoring task includes:

[0011] Based on the timing start time defined in the timer maintained under the time type task, the accumulated operation duration of the monitored device is timed;

[0012] When it is detected that the monitored device has been measured and received a value during the timing of the timer, the timing start time is updated to the time when the measurement and reception is performed.

[0013] Optionally, the configuration parameters of the job time type task include a cycle type and a cycle quantity, wherein the cycle type is used to indicate the time unit adopted by the preset first duration, and the cycle quantity is used to indicate the number of time units included in the first duration.

[0014] Optionally, when the monitoring task includes the job time type task, before the triggering condition of the job time type task is triggered, the method further includes:

[0015] When the monitoring accumulated time reaches a second time, a reminder message is generated; the second time is shorter than the first time, and the reminder message is used to remind production personnel to measure the received value of the monitored equipment.

[0016] Optionally, the triggering condition of the equipment maintenance type task is specifically: within the buffer time after the preventive maintenance of the monitored equipment, no machine value is measured on the monitored equipment.

[0017] Optionally, when the monitoring task includes a workload type task, monitoring the monitored device through the monitoring task includes:

[0018] Counting the accumulated workload of the monitored device based on the counting start time defined in the counter maintained under the workload type task;

[0019] When it is detected that the monitored device has been measured and received during the counting process of the counter, the counter is controlled to count again.

[0020] Optionally, the workload type task includes a first task and / or a second task, and the second task is dedicated to a production equipment of a batch production type;

[0021] The first task is used to monitor the cumulative wafer production volume or the cumulative lot production volume that has not been continuously measured and received; the second task is used to monitor the cumulative batch production volume that has not been continuously measured and received.

[0022] Optionally, the configuration parameters of the workload type task include a trigger recipe group list, and the workload type task is specifically used to monitor the cumulative workload of the first product that has not been continuously measured and received; the recipe group used by the first product is included in the trigger recipe group list.

[0023] Optionally, the configuration parameters of the monitoring task include a restricted recipe group list, and when the triggering condition of the monitoring task is triggered, the subsequent production of the monitored equipment is controlled, including:

[0024] When the triggering condition of the monitoring task is triggered, the monitored device is controlled to produce a second product subsequently; the recipe group used by the second product is included in the restricted recipe group list.

[0025] Optionally, after controlling the subsequent production of the monitored device, the method further includes:

[0026] When it is detected that the monitored device has been measured and received values, and the measured and received values ​​result indicates that the monitored device has no abnormality, the card control on the monitored device is released.

[0027] Optionally, in response to the first operation, determining the monitored device from the production device list includes:

[0028] Providing a first interface, wherein the first interface is used to display the production equipment list;

[0029] In response to an operation of selecting a specific production device in the production device list, the specific production device is used as a monitored device;

[0030] The generating of the monitoring task corresponding to the second operation includes:

[0031] In response to a task creation operation for the monitored device, a task creation page is provided; the task creation page includes a task type selection column and a configuration parameter editing column;

[0032] A monitoring task is generated based on the task type selected in the task type selection column and the configuration parameters set in the configuration parameter editing column.

[0033] In a second aspect, an embodiment of the present application provides an electronic device, including a processor, a communication interface, a memory, and a communication bus, wherein the processor, the communication interface, and the memory communicate with each other through the communication bus;

[0034] Memory, used to store computer programs;

[0035] The processor is used to implement any of the above-mentioned production equipment monitoring methods when executing the program stored in the memory.

[0036] An embodiment of the present invention further provides a computer program product comprising instructions, which, when executed on a computer, enables the computer to execute any of the above-mentioned methods for monitoring production equipment.

[0037] Beneficial effects of the embodiments of the present invention:

[0038] The monitoring method, electronic device and readable storage medium of production equipment provided by the embodiments of the present invention allow the user to establish one or more monitoring tasks of operation type tasks, equipment maintenance type tasks and workload type tasks for the selected monitored equipment, and monitor the monitored equipment through the corresponding monitoring tasks. When the triggering condition of the monitoring task is triggered, the subsequent production of the monitored equipment is controlled. Among them, the time type task is used to monitor the cumulative operation time for which the machine value has not been measured and collected continuously, and its triggering condition is that the cumulative operation time has reached a first time; the equipment maintenance type task is used to monitor whether the machine value has been measured and collected after preventive maintenance, and its triggering condition is that the machine value has not been measured and collected after preventive maintenance; the workload type task is used to monitor the cumulative workload for which the machine value has not been measured and collected continuously, and its triggering condition is that the cumulative workload has reached a preset amount.

[0039] Based on the above three types of monitoring tasks, it is possible to judge whether the monitored equipment is facing risks such as performance degradation or failure from the dimensions of the operating time, preventive maintenance, and workload of the monitored equipment, so as to achieve accurate and comprehensive prediction of the performance of the monitored equipment. When the trigger adjustment of the monitoring task is triggered, it is considered that the monitored equipment is actually facing the above potential risks, but the necessary machine measurements and values ​​have not been taken to determine whether its performance is good. Therefore, by controlling the subsequent production of the monitored equipment after the trigger condition of the monitoring task is triggered, it is possible to avoid the monitored equipment from being put into production with the above potential risks, thereby helping to improve the stability of the production line, reduce the defective rate of products, and improve the quality of products.

[0040] Of course, it is not necessary to achieve all of the advantages described above at the same time to implement any product or method of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present invention. For ordinary technicians in this field, other embodiments can also be obtained based on these drawings.

[0042] Figure 1 A schematic diagram of a process flow of a method for monitoring production equipment provided in an embodiment of the present application;

[0043] Figure 2 Another schematic diagram of a process flow of a method for monitoring production equipment provided in an embodiment of the present application;

[0044] Figure 3 A schematic diagram of a monitoring task setting interface provided in an embodiment of the present application;

[0045] Figure 4 A schematic diagram of monitoring and production management of monitored equipment by using the monitoring method for production equipment provided in an embodiment of the present application;

[0046] Figure 5 A schematic diagram of the execution process of a time type task provided in an embodiment of the present application;

[0047] Figure 6 A schematic diagram of the execution process of a workload type task provided in an embodiment of the present application;

[0048] Figure 7 A schematic diagram of the execution process of the first task provided in an embodiment of the present application;

[0049] Figure 8 A schematic diagram of the execution process of the second task provided in an embodiment of the present application;

[0050] Fig. 9 A schematic diagram of the Action management interface provided in the embodiment of the present application;

[0051] Fig.10 A schematic diagram of the architecture of the modeling tool provided in the embodiment of the present application;

[0052] Fig.11 A schematic diagram of the architecture of the user operation platform provided in the embodiment of the present application;

[0053] Fig.12 A schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0054] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field based on this application belong to the scope of protection of the present invention.

[0055] To facilitate understanding, the production system involved in the embodiments of the present application is first briefly described.

[0056] The production system usually includes production equipment, MES (Manufacturing Execution System) system and SPC (Statistical Process Control) system.

[0057] Production equipment is equipment used to manufacture products. In the semiconductor front-end chip production system, production equipment specifically refers to equipment that manufactures semiconductor front-end chips.

[0058] The MES system is used to track and collect the production status information of production equipment in real time, and monitor the execution of production plans and conduct production management based on the production status information.

[0059] The SPC system is used to collect, count and analyze key quality characteristics in the production process, promptly detect anomalies in the production process, and help production personnel find the causes of the anomalies and how to eliminate them.

[0060] In the existing production system, in order to ensure the stability of the production line and product quality, it is generally necessary to collect and analyze the relevant quality characteristics of the production equipment through the SPC system (in the embodiment of the present application, this process is called the measurement value collection) to obtain the measurement results of the production equipment. Relevant personnel can judge whether the performance of the production equipment is good based on the measurement results. If not, the relevant personnel need to perform corresponding maintenance or repair on the production equipment to restore the performance of the production equipment to the best state.

[0061] However, when the relevant personnel use the SPC system to perform daily inspections on production equipment, it is easy to fail to perform necessary machine measurements and values ​​due to human errors and omissions, thus failing to notice the abnormalities of the production equipment in time, causing some production equipment to continue to execute subsequent production processes with failures or performance degradation. In actual production scenarios, every failure or performance degradation of production equipment may affect the stable operation of the entire production line, and thus affect product quality and delivery cycle.

[0062] In view of this, the embodiment of the present application provides a monitoring method for production equipment, so as to effectively constrain the potential risks of production equipment and ensure the stability of the production line and product quality. By applying the monitoring method for production equipment provided by the embodiment of the present application, users can establish different monitoring tasks for different production equipment according to actual needs, and intelligently monitor the production status of production equipment based on monitoring tasks. When it is determined based on monitoring data that the production equipment may face potential risks but the necessary machine measurement and collection values ​​are not performed on the production equipment, the monitoring method will control the subsequent production of the production equipment and force the production equipment to stop production, so as to prevent such potential risks from having adverse effects on the production line and product quality.

[0063] In practical applications, the monitoring method for production equipment provided in the embodiment of the present application can be integrated into the MES system. With the help of the characteristics of the MES system that can track and collect the production status of the production equipment in real time and perform production management, the MES system can be used to monitor the production equipment and control the production process of the production equipment.

[0064] As an example, the monitoring method for production equipment provided in the embodiments of the present application can be specifically applied to a semiconductor front-end chip production system to monitor the process of the production equipment executing the front-end chip manufacturing process, so as to timely discover potential risks that may exist in the production equipment and avoid such potential risks causing adverse effects on the stability of the front-end chip manufacturing production line and the quality of the chips produced.

[0065] The following is a detailed description of the monitoring method for production equipment provided in the embodiment of the present application. Figure 1 , the method comprising:

[0066] Step S101: In response to a first operation, a monitored device is determined from a production device list.

[0067] The database list specifically includes various production equipment used to execute product manufacturing in the production system. Users can select specific production equipment as monitored equipment based on actual needs based on interactive methods such as clicking and checking (first operation), and then set monitoring tasks for the monitored equipment in a targeted manner.

[0068] As an example, the present application can provide a first interface for displaying a list of production equipment through a display screen of a display device, in which the equipment ID of each production equipment or the equipment name of each production equipment and other information are listed, so that the user can select a monitored equipment from it. After the user selects a specific production equipment from the list of production equipment, the MES system can respond to the user's operation of selecting the specific production equipment and use the specific production equipment as the monitored equipment.

[0069] Step S102: In response to the second operation, a monitoring task is generated.

[0070] In the embodiment of the present application, the monitoring task includes at least one of an operation time type task, an equipment maintenance type task, and an operation volume type task. Among them, the operation time type task is used to monitor the cumulative operation time for which the machine value is not measured continuously, the equipment maintenance type task is used to monitor whether the machine value is measured after preventive maintenance (PM), and the operation volume type task is used to monitor the cumulative operation volume for which the machine value is not measured continuously.

[0071] As mentioned above, the measurement and collection of equipment refers to the process in which the SPC system obtains the relevant quality characteristics of the production equipment and analyzes whether the performance of the production equipment is good based on the relevant quality characteristics. Therefore, the monitoring object of the operation time type task is specifically: the cumulative measurement and collection time of the monitored equipment during the period when the monitored equipment has not been measured and collected by the SPC system continuously; the monitoring object of the operation volume type task is specifically: the cumulative operation volume of the monitored equipment during the period when the monitored equipment has not been measured and collected by the SPC system continuously; the monitoring object of the equipment maintenance type task is specifically: whether the monitored equipment has been measured and collected by the SPC system after preventive maintenance of the monitored equipment.

[0072] Specifically, the present application found in actual production scenarios that when production equipment has been operating for a long time or has completed a large amount of production, the production equipment may face potential performance degradation or failure risks, so it is necessary to measure the machine value of the production equipment to determine whether the performance of the production equipment is good. In addition, in actual production lines, preventive maintenance is often performed on production equipment to prevent subsequent unexpected failures of production equipment. After completing preventive maintenance, it is usually necessary to measure the machine value of the production equipment to determine whether the maintenance effect is good.

[0073] Taking the above into consideration, the embodiments of the present application provide several types of monitoring tasks, including operation time type tasks, equipment maintenance type tasks, and workload type tasks, so as to judge whether necessary machine value collection has been carried out on the production equipment when the production equipment faces potential risks from the dimensions of operation time, workload, and whether preventive maintenance has been carried out.

[0074] In actual applications, the user can create one or several types of monitoring tasks for the monitored device based on the actual operating status of the monitored device and the relevant operations used to create monitoring tasks (second operations), and subsequently monitor the monitored device through the one or several types of monitoring tasks.

[0075] As an example, to facilitate users in creating monitoring tasks, after the user determines the monitored device, in response to the user's task creation operation for the monitored device, a task creation page including a task type selection bar and a configuration parameter editing bar is provided, and the monitoring task is generated based on the task type selected by the user in the task type selection bar and the configuration parameters set by the user in the configuration parameter editing bar.

[0076] The task type selection column provides several options, such as operation time type tasks, equipment maintenance type tasks, and workload type tasks, so that users can create corresponding types of monitoring tasks. The configuration parameter editing column lists various configuration parameters that can be set for monitoring tasks, such as the time when the monitoring task starts to monitor, the time unit for timing the operation time type tasks, and the counting unit for counting the workload type tasks, so that users can set the specific values ​​of the configuration parameters according to actual needs and generate personalized monitoring tasks.

[0077] Step S103: monitoring the monitored device through the monitoring task.

[0078] After the establishment of the monitoring task is completed, the monitored equipment can be monitored through the corresponding monitoring task. Specifically, after the SPC system completes the measurement of the production equipment, it will return the measurement results (measurement results) to the MES system so that the MES system can know the actual status of the production equipment. Therefore, the MES system can follow up on the operation time, operation volume, preventive maintenance records and other information of the monitored production equipment in real time during the execution of the production process, and combine the records of the measurement results returned by the SPC system to determine whether the necessary measurement of the monitored equipment has been carried out when the monitored equipment faces potential risks.

[0079] Step S104: in response to the triggering condition of the monitoring task being triggered, the subsequent production of the monitored equipment is controlled.

[0080] The triggering condition for the task of operation time type is: the monitored cumulative operation time reaches the first time; the triggering condition for the task of equipment maintenance type is: the machine value is not measured after preventive maintenance; the triggering condition for the task of operation volume type is: the monitored cumulative operation volume reaches the preset number. Among them, the first time and the preset number can be set according to the actual operation status of the monitored equipment.

[0081] It is easy to understand from the previous description that when the triggering condition of the monitoring task is triggered, it indicates that the monitored equipment may face potential risks such as performance degradation or failure, and the necessary machine measurements have not been performed on the monitored equipment to determine whether its performance is good. If the monitored equipment is allowed to carry out subsequent production with this risk, it is easy to cause adverse effects on the production line and product quality. Therefore, in an embodiment of the present application, when the triggering condition of the monitoring task is triggered, the subsequent production of the monitored equipment can be controlled through the MES system, so that the monitored equipment cannot continue to operate. Exemplarily, when the triggering condition of the monitoring task is triggered, the MES system can prevent the next batch from entering the station, thereby achieving control over the monitored equipment.

[0082] In one embodiment of the present application, when the triggering condition of the monitoring task is triggered, the MES system can further alert the production personnel through the alarm system to remind the production personnel to measure the received values ​​of the monitored equipment.

[0083] As an example, after the monitored device is controlled, if it is detected that the monitored device has been tested and the test results indicate that there is no abnormality in the monitored device, the control on the monitored device can be lifted by allowing the next batch to continue entering the station, so that the monitored device can continue to be put into subsequent production processes.

[0084] The monitoring method of production equipment provided in the embodiment of the present application allows the user to establish one or more monitoring tasks of operation type tasks, equipment maintenance type tasks and workload type tasks for the selected monitored equipment, and monitor the monitored equipment through the corresponding monitoring tasks. When the triggering condition of the monitoring task is triggered, the subsequent production of the monitored equipment is controlled. Among them, the time type task is used to monitor the cumulative operation time for which the machine value has not been measured and collected continuously, and its triggering condition is that the cumulative operation time has reached a first time; the equipment maintenance type task is used to monitor whether the machine value has been measured and collected after preventive maintenance, and its triggering condition is that the machine value has not been measured and collected after preventive maintenance; the workload type task is used to monitor the cumulative workload for which the machine value has not been measured and collected continuously, and its triggering condition is that the cumulative workload has reached a preset number.

[0085] Based on the above three types of monitoring tasks, it is possible to judge whether the monitored equipment is facing risks such as performance degradation or failure from the dimensions of the operating time, preventive maintenance, and workload of the monitored equipment, so as to achieve accurate and comprehensive prediction of the performance of the monitored equipment. When the trigger adjustment of the monitoring task is triggered, it is considered that the monitored equipment is actually facing the above potential risks, but the necessary machine measurements and values ​​have not been taken to determine whether its performance is good. Therefore, by controlling the subsequent production of the monitored equipment after the trigger condition of the monitoring task is triggered, it is possible to avoid the monitored equipment from being put into production with the above potential risks, thereby helping to improve the stability of the production line, reduce the defective rate of products, and improve the quality of products.

[0086] The following is a description of the operation time type tasks, equipment maintenance type tasks and workload type tasks provided in this application:

[0087] 1. Time type tasks

[0088] The purpose of setting time type tasks is to avoid the situation where the monitored equipment has been operating for a long time but has not been promptly measured to determine whether its performance is good. In this case, the monitored equipment will continue to carry out subsequent production with the risk of potential performance degradation or failure, which will adversely affect the stability of the production line and product quality.

[0089] In practical applications, the timer can be used to monitor the cumulative operation time of the monitored equipment during the period when the monitored equipment is not measured and collected. The timer can be specifically understood as a timing task implemented by software or hardware methods. For example, the user can set the initial timing start time used by the timer when the timer executes timing, so that the MES system can specifically monitor the above cumulative time based on the following process:

[0090] Based on the timing start time defined in the timer maintained under the time type task, the cumulative operation time of the monitored equipment is counted;

[0091] When it is detected during the timer's timing that the monitored device has been measured and received a value, the timing start time is updated to the time when the measurement and reception was performed.

[0092] As an example, if the timer is set to count in days, and the initial count start time is set to the 1st of a month, the timer will start counting the cumulative operation time of the monitored equipment on the 1st of the month, and update the cumulative operation time to 1 day on the 2nd of the month, and update the cumulative operation time to 2 days on the 3rd of the month, and so on. If it is detected based on the record of the measurement results returned by the SPC system that the monitored equipment was measured on the 5th of the month, the timer will restart the count with the 5th of the month as the updated count start time, and update the cumulative operation time to 1 day on the 6th of the month, and update the cumulative operation time to 2 days on the 7th of the month, and so on.

[0093] Based on the above timing process, the timer can accurately count the cumulative operation time of the monitored equipment during the period when the monitored equipment is not measured and value collected, thereby ensuring the real-time and effectiveness of monitoring the monitored equipment based on time-type tasks, and helping to promptly discover potential risks faced by the monitored equipment.

[0094] When the accumulated operation duration obtained by the timer reaches the preset first duration, the triggering condition of the time type task is met, and the subsequent production of the monitored equipment can be controlled through the MES system.

[0095] When the user establishes a time-type task for a monitored device, the user can set the first duration based on the actual operating conditions of the monitored device. For example, if the performance of the monitored device is relatively stable and it is not prone to abnormal problems after long-term operation, a longer first duration can be set. If the performance of the monitored device is not very stable, a shorter first duration can be set to enable timely detection of potential risks faced by the monitored device.

[0096] 2. Equipment maintenance type tasks

[0097] The purpose of setting equipment maintenance type tasks is to avoid the situation where, after preventive maintenance on the monitored equipment, subsequent production is carried out using the monitored equipment without measuring the machine value to determine the maintenance effect, which may adversely affect the stability of the production line and product quality.

[0098] Considering that in actual production scenarios, after completing preventive maintenance of production equipment, it is inevitable that a period of time will be required to complete the measurement and collection of production equipment. In order to avoid unnecessary impact of the card control mechanism under the equipment maintenance type task on production continuity, the trigger condition of the equipment maintenance type task can be specifically set as: within the buffer period after the preventive maintenance of the monitored equipment, the monitored equipment is not measured and collected.

[0099] When a buffer period is set, if the monitored equipment is measured and the received values ​​are collected within the buffer period after the completion of preventive maintenance, there is no need to control the subsequent production of the monitored equipment. If the monitored equipment is not measured and the received values ​​are collected within the buffer period after the completion of preventive maintenance, it is necessary to control the subsequent production of the monitored equipment.

[0100] For example, a timer can be maintained under the equipment maintenance type task. After the preventive maintenance of the monitored equipment is completed, the timer starts timing. If the monitored equipment is measured and received during the counter execution, the timer is terminated. Therefore, when the timer reaches the buffer time, the trigger condition of the equipment maintenance type task is met, and the subsequent production of the monitored equipment can be controlled through the MES system.

[0101] In an embodiment of the present application, by configuring a buffer time for equipment maintenance type tasks, necessary adjustment space can be provided for relevant personnel to avoid production interruptions and false alarms caused by unstable equipment status or operational delays by relevant personnel.

[0102] 3. Workload Type Tasks

[0103] The purpose of setting workload type tasks is to avoid the situation where the monitored equipment has already produced a large amount of workload but has not been promptly measured to determine whether its performance is good. In this case, the monitored equipment continues to carry out subsequent production with the risk of potential performance degradation or failure, which adversely affects the stability of the production line and product quality.

[0104] In practical applications, the cumulative workload of the monitored equipment can be monitored by a counter during the period when the monitored equipment is not continuously measured and collected. The counter can be specifically understood as a counting task implemented by software or hardware methods. For example, the user can set the counting start time for the counter to start counting, so that the MES system can specifically monitor the above-mentioned cumulative workload based on the following process:

[0105] Count the accumulated workload of the monitored equipment based on the counting start time defined in the counter maintained under the workload type task;

[0106] When the counter detects that the monitored device has been measured and received during the counting process, the counter is controlled to count again.

[0107] As an example, when the monitoring method of production equipment provided by the embodiment of the present application is applied to a semiconductor front-end chip production system, if the counter is set to count in units of the number of wafers, and the counter is set to start counting from time T, then the counter will update the cumulative operation volume to 1 wafer after the monitored equipment produces the first wafer after T, and the cumulative operation volume will be updated to 2 wafers after the monitored equipment produces the second wafer after T, and so on. If it is detected based on the record of the measurement results returned by the SPC system that the measured value is measured after the monitored production equipment produces the nth wafer after T, the counter is controlled to start counting again, so that the counter will update the cumulative operation volume to 1 wafer after the monitored equipment produces the n+1th wafer after T, and the cumulative operation volume will be updated to 2 wafers after the monitored equipment produces the n+2th wafer after T, and so on.

[0108] Based on the above counting process, the counter can accurately count the cumulative workload of the monitored equipment during the period when the monitored equipment is not measured and valued, thereby ensuring the real-time and effectiveness of monitoring the monitored equipment based on workload type tasks, and helping to promptly discover potential risks faced by the monitored equipment.

[0109] When the cumulative workload obtained by the counter reaches the preset number, the trigger condition of the workload type task is met, and the subsequent production of the monitored equipment can be controlled through the MES system.

[0110] When the user creates a workload type task for the monitored equipment, the user can set a preset quantity based on the actual operating conditions of the monitored equipment.

[0111] In the semiconductor front-end chip production system, the counting units commonly used to measure the size of the workload are the number of wafers, the number of lots and the number of batches. Among them, the lot batch is a batch consisting of several wafers, and the batch batch involves a special type of operation. On some production equipment (in the embodiment of the present application, this production equipment is called a batch production type production equipment), several lot batches will be merged and then entered into the station. These several lot batches are called a batch batch. In order to adapt to different production scenarios, the embodiment of the present application further provides two different types of workload type tasks: the first task and the second task.

[0112] Among them, the first task is commonly used for various types of production equipment in the semiconductor front-end chip production system, and is specifically used to monitor the cumulative wafer production or cumulative lot batch production of the monitored equipment during the period when the monitored equipment is not continuously measured and received. When the monitored cumulative wafer production reaches a preset number (preset wafer number), or the monitored cumulative lot batch production reaches a preset number (preset lot batch number), the trigger condition of the first task is met.

[0113] The second task is dedicated to Batch production type production equipment. It is specifically used to monitor the cumulative Batch production volume of the monitored equipment during the period when the monitored equipment is not continuously measured and valued. When the monitored cumulative Batch production volume reaches the preset quantity (preset Batch quantity), the trigger condition of the second task is met.

[0114] Specifically, when the monitored equipment is monitored based on the second task, if it is monitored that the cumulative Batch production volume of the monitored equipment has reached a preset number during the period when no measurement and value collection is performed continuously, only the subsequent Batch type production operations can be controlled, so that the monitored equipment cannot perform Batch type production operations, and other types of operations are not affected.

[0115] In practical applications, one or more monitoring tasks among the above-mentioned time-type tasks, equipment maintenance-type tasks, first tasks and second tasks can be established for specific monitored equipment according to actual needs to ensure the stability of the production line and product quality.

[0116] The following is an exemplary description of the entire process from establishing a monitoring task to implementing the management of production tasks based on the monitoring task when the monitoring method for production equipment provided in the embodiment of the present application is applied to an actual production line. Figure 2 The whole process specifically includes:

[0117] Step S201: Select a monitored device.

[0118] Based on actual needs, users can select the monitored equipment to be monitored from various production equipment in the production system.

[0119] Step S202: Setting monitoring tasks.

[0120] Based on actual needs, the user can establish one or more monitoring tasks among the above-mentioned time-type tasks, equipment maintenance-type tasks, first tasks, and second tasks for the monitored equipment.

[0121] In order to facilitate the user to determine the monitored device and establish a monitoring task for the monitored device, the embodiment of the present application provides a design of a monitoring task setting interface, specifically as follows: Figure 3 As shown below. Figure 3 The following is an example of the process of establishing a monitoring task:

[0122] Before the user determines the monitored equipment, the MES system can first display the Figure 3 A list of production equipment is shown in area A, so that the user can select the monitored equipment from it. Figure 3 Design, list the equipment IDs of each production equipment in the production equipment list, such as m1, m2, m3, etc.

[0123] When the user wants to create a monitoring task for a production device displayed in the production device list, he can first select a production device from area A with the mouse, identify the production device as the monitored device, and click the plus button at the top of area C to start creating a monitoring task for the monitored device. After the user clicks the plus button, the task creation page for the monitored device can be further displayed in area C, in which the various configuration parameters of the monitoring task are listed and the corresponding editing bar is provided. The user can set the various configuration parameters according to actual needs to establish a personalized monitoring task for the monitored device.

[0124] In order to ensure the effective operation of monitoring tasks and meet the needs of different user groups and diverse equipment, this application has designed various detailed configuration parameters for monitoring tasks, some of which are common to various monitoring tasks, and some are dedicated to specific types of monitoring tasks.

[0125] Configuration parameters common to all types of monitoring tasks include:

[0126] MonitorJobId is the unique identifier of each monitoring task. For example, the monitoring task Id can be automatically generated by the system or can be edited by the user.

[0127] Machine Name: the name of the monitored device targeted by the monitoring task.

[0128] Task type (MonitorType) is used to specify the type of monitoring task, and can be selected from time type task (Time), equipment maintenance type task (PM), first task (ProcessCount) or second task (BatchCount). For example, after the user clicks the drop-down menu display button c1 on the right side of "Task Type", a drop-down menu for providing optional task types can be displayed, and the above four task types are listed in the drop-down menu so that the user can select a specific task type from them.

[0129] Item Id: After the SPC system completes the measurement of production equipment, it will return the measurement results in the form of a chart. Item Id is the unique identifier of the chart returned by the SPC system. By recording the Item Id, the measurement results can be tracked and monitored to ensure the accuracy and traceability of the data.

[0130] Alarm is used to set whether to generate an alarm message to remind production personnel to measure the value of the monitored equipment after the trigger condition of the monitoring task is met. For example, two values ​​0 and 1 can be provided. When it is set to 0, it indicates that no alarm message needs to be generated. When it is set to 1, it indicates that an alarm message needs to be generated.

[0131] ConstraintRecipeGroup is used to configure the list of constrained recipe groups under the monitoring task. The list of constrained recipe groups may contain one or more recipe groups. The recipe group can be specifically understood as a specific combination of operating parameters used by production equipment when executing product manufacturing. When the trigger condition of the monitoring task is triggered, only the monitored equipment is controlled to carry out the subsequent production of the second product, and the subsequent production of other products is not affected. The second product specifically refers to the product whose adopted recipe group is included in the list of constrained recipe groups. Exemplarily, the default value of the constrained recipe group can be set to *, indicating that the constrained recipe group list contains all optional recipe groups, or the user can specifically enter one or more recipe groups contained in the constrained recipe group list, with commas, semicolons, etc. as separators.

[0132] In actual production, when the performance of production equipment is degraded, for products using different recipe groups, some products are susceptible to performance degradation and quality problems, while some products are not susceptible to performance degradation. Therefore, a restricted recipe group list can be configured based on the actual production situation. When the trigger conditions of the monitoring task are met, the production of products applied to the recipe groups included in the restricted recipe groups can be targeted and controlled. While ensuring the stability of the production line and product quality, production efficiency and production continuity can be guaranteed as much as possible.

[0133] Enable flag, optional T or F, when set to T, it indicates that the monitoring task is enabled, when set to F, it indicates that the monitoring task is not enabled. For example, when creating a monitoring task, the user can first set the enable flag to F, and then change the enable flag to T when the monitored device needs to be monitored later, so as to achieve more flexible production monitoring.

[0134] Configuration parameters specific to time-based tasks include:

[0135] Warning time (WarningTime) is used to configure a second time shorter than the first time. When the reminder time is configured, when the cumulative operation time of the monitored equipment reaches the second time during the period when the monitored equipment has not been measured and collected, a reminder message will be generated to remind the production personnel to measure and collect the monitored equipment.

[0136] As an example, if the first duration is set to 5 days, the subsequent production of the monitored equipment will be controlled only when the cumulative operation time for which the monitored equipment has not been measured and collected for 5 consecutive days is monitored through the time type task. If the second duration is further set to 4 days, then when the cumulative operation time for which the monitored equipment has not been measured and collected for 4 consecutive days is monitored, a reminder message will be generated to remind the production personnel to measure and collect the monitored equipment. It can be seen that by configuring the reminder time, the production personnel can be reminded in advance to conduct timely measurement and collection of the monitored equipment before the triggering condition of the time type task is triggered, so as to avoid the triggering condition of the subsequent time type task being actually triggered, resulting in the production continuity being affected.

[0137] WarningAlarm is used to set whether to generate a reminder message to remind production personnel to measure the value of the monitored equipment after the cumulative operation time of not measuring the value of the monitored equipment for a second time period. For example, two values ​​of 0 and 1 can be provided. When it is set to 0, it indicates that no reminder message needs to be generated, and when it is set to 1, it indicates that a reminder message needs to be generated.

[0138] The cycle type (CycleTimeType) is used to indicate the time unit used by the first duration. For example, the cycle type can be selected from multiple different time units such as day, week, month, etc.

[0139] The number of cycles (CycleTimePeriod) is used to indicate the number of time units contained in the first duration and can be set to a specific value.

[0140] For example, if the user sets the cycle type to day and the cycle number to 3, the first duration is 3 days. The embodiment of the present application provides a more detailed time division through the configuration parameter of the cycle type, so that the user can flexibly set the first duration by combining the two configuration parameters of the cycle type and the cycle number, so that the monitoring effect of the time type task is more accurate and better meets the diverse needs of users.

[0141] Configuration parameters specific to the first task include:

[0142] Count Type (CountType) is used to indicate the counting unit used for the preset quantity. For example, the counting type can be selected from the number of wafers or the number of lots.

[0143] Count Quantity (CountSpec), used to indicate the number of counting units included in the preset quantity, can be set to a specific value.

[0144] Exemplarily, if the user sets the counting type to the number of wafers and sets the counting quantity to 10, then the preset quantity included in the triggering condition representing the first task is 10 wafers.

[0145] Configuration parameters specific to the second task include:

[0146] The number of batches is used to indicate the number of batches included in the preset quantity and can be set to a specific value.

[0147] For example, if the user sets the number of batches to 5, the preset number included in the trigger condition representing the second task is specifically 5 batches.

[0148] Configuration parameters specific to time type tasks, first task, and second task include:

[0149] TimePoint is used to indicate the time when statistics are first started. When applied to a time type task, it is specifically used to indicate the time when the timer starts counting for the first time. When applied to the first task or the second task, it is specifically used to indicate the time when the counter starts counting for the first time.

[0150] Trigger Recipe Group (TriggerRecipeGroup) is used to configure the trigger recipe group list, which may contain one or more recipe groups. When the trigger recipe group list is configured, when the cumulative workload of the monitored equipment is monitored during the period when the monitored equipment is not continuously measured and collected based on the workload type task, only the first product produced is counted, and other products are not counted. The first product specifically refers to the product whose recipe group is included in the trigger recipe group list. Exemplarily, the default value of the trigger recipe group can be set to *, indicating that the trigger recipe group list contains all optional recipe groups, or one or more recipe groups contained in the trigger recipe group list can be specifically entered, with commas, semicolons, etc. as separators.

[0151] In actual production, for products using different formula groups, the production of some of these products may not have a significant impact on the performance of the production equipment. Therefore, the trigger formula group list can be configured based on the actual production situation, so that only the first product is counted subsequently. When the cumulative workload of the first product that has not been measured and received continuously reaches a preset number, the trigger condition of the workload type task is triggered, which helps to ensure the accuracy of the monitoring results.

[0152] Configuration parameters specific to equipment maintenance type tasks:

[0153] Buffer time (BufferTime) is used to configure the length of the buffer time after preventive maintenance of the monitored equipment. Exemplarily, the buffer time can be in hours.

[0154] Among the configuration parameters listed above, the task type directly determines whether the monitoring task to be established belongs to the time type task, the workload type task, the first task, or the second task, and the remaining configuration parameters will affect the triggering conditions of the monitoring task and its monitoring effect. The design of the above configuration parameters provided in the embodiment of the present application provides users with great flexibility and convenience, allowing users to establish personalized monitoring tasks for each production equipment based on specific needs and production scenarios, so that the process of monitoring each production equipment is more in line with the actual production situation.

[0155] It should be understood that the various configuration parameters listed above are only examples. In actual applications, only some of the configuration parameters listed above may be used, or other configuration parameters not listed may be further included, depending on actual needs.

[0156] In completing Figure 3 After setting the configuration parameters displayed on the task creation page in area C, the user can click the OK button at the bottom of area C, so that the MES system can generate the corresponding monitoring task based on the configuration parameters set by the user. Alternatively, the user can also click the Cancel button at the bottom of area C to exit the task creation page while setting the configuration parameters.

[0157] In addition, the embodiments of the present application Figure 3 The monitoring task setting interface provided in the further includes area B, which is used to display the relevant information of each monitoring task that has been created, so that the user can understand the specific situation of each monitoring task that has been created. For example, the monitoring task ID, device name, task type and other information of each monitoring task that has been created can be displayed through area B.

[0158] In one possible implementation, after a monitoring task has been generated according to the configuration parameters set by the user, the user can be allowed to modify the configuration parameters of the generated monitoring task, so that the user can flexibly adjust the triggering conditions and monitoring effects of the monitoring task according to the actual operation of the monitored device.

[0159] Step S203: Perform corresponding type monitoring.

[0160] After the monitoring task is generated, the monitored device can be monitored based on the generated monitoring task.

[0161] In the entire production system, Figure 4 The schematic process realizes the monitoring and production management of the monitored equipment:

[0162] Specifically, the MES system can update the cumulative workload (cumulative wafer production, cumulative lot production, cumulative Batch production) of the monitored equipment when each batch of the monitored equipment leaves the station (applied to workload type tasks), and return the updated results to the monitored equipment to ensure the real-time and accuracy of the monitoring data.

[0163] In the production process, when the monitored equipment is measured and collected by the SPC system, the SPC system can return the measurement results to the MES system in the form of a Chart so that the MES system can determine whether the monitored equipment has been measured and collected in time. Therefore, in the production process, when the MES system monitors the monitored equipment based on one or more monitoring tasks of time type tasks, equipment maintenance type tasks, first tasks and second tasks, the corresponding type of monitoring tasks can be implemented based on the records of the measurement results returned by the SPC system, the preventive maintenance records of the monitored production equipment, the monitored cumulative workload and the cumulative operation time, to determine whether the monitoring data meets the triggering conditions of the monitoring task. When the triggering conditions of the monitoring task are met, an EMAS (Equipment Monitor Auto System, equipment automatic inspection system) Action (a system operation) will be generated. When an Action is generated (hereinafter referred to as the aforementioned EMAS Action), the MES system can further alert the production personnel through the alarm system to remind the production personnel to measure and collect the monitored equipment in time.

[0164] To ensure that the MES system can respond to potential risks of monitored equipment in a timely manner, the MES system needs to check whether there is an action that has been generated before each batch enters the station for production, to determine whether to allow entry, and return the judgment result to the monitored equipment. If there is an action that has been generated, entry is not allowed, and the subsequent production of the monitored equipment is blocked. If there is no action that has been generated, entry is allowed, and the monitored equipment can proceed with subsequent production.

[0165] The above-mentioned monitoring mechanism provided in the embodiment of the present application is that the MES system updates the production information (accumulated workload) when each batch leaves the station, and determines whether there is an action that has been generated when each batch enters the station. The real-time update is combined with the real-time judgment, which can not only ensure the timeliness of the monitoring data, but also help to ensure that the MES system responds promptly to the potential risks of the monitored equipment.

[0166] Furthermore, after the monitored equipment carries out production of subsequent batches, the MES system can perform data collection (DC) on the relevant production status information of the monitored equipment, return the collection results to the monitored equipment, and pass the DC report to the SPC system, which will perform further measurement and collection.

[0167] The following describes the execution process of the time type task, equipment maintenance type task, first task and second task respectively:

[0168] For the execution process of time type tasks, see Figure 5 Specifically, after the monitoring task is established, the system background can determine whether the task type is a time type task according to the task type configured by the user for the monitoring task. If not, it is necessary to execute the other three types of monitoring tasks. If so, the timing task under the time type task can be enabled.

[0169] As mentioned above, the user can set the time when the timing task starts timing for the first time based on the configuration parameter of the time point.

[0170] If the start time of the timing task is recorded as T0, then during the execution of the time type task, T0 specifically follows the following update logic:

[0171]

[0172] Among them, T Poinr The time when the user starts timing based on the time point configuration, T last It is the time when the monitored equipment was tested and received the value the most recently. last >T Point Characterization T lastLater than T Point , T last ≤T Point Characterization T last No later than T Point .

[0173] Specifically, when the user specifies T Point After that, the system background can determine in real time whether Point After that, whether the machine value is measured or not, if not, the start time of the timing task remains unchanged and is still T Point As T0, start timing at T0; if so, the start time of the timing task needs to be updated, and the updated start time is the measurement machine receiving time, with T last As T0, timing starts at the updated T0.

[0174] During the timing of the cumulative operation duration of the monitored device based on the timing task, the system background can determine in real time whether the timing duration has reached the first duration. If so, the trigger condition of the time type task is met and an Action is generated; if not, the monitored device can continue to be monitored based on the timing task.

[0175] After the monitoring task generates an Action, the MES system can control the subsequent production of the monitored equipment.

[0176] For the execution process of equipment maintenance type tasks, see Figure 6 Specifically, the system background can determine whether the task type is an equipment maintenance type task based on the task type configured by the user for the monitoring task. If not, it is necessary to execute the other three types of monitoring tasks. If so, the monitoring process under the equipment maintenance type task can be executed to further determine whether the monitored equipment has been measured and received after the preventive maintenance is completed. If not, the triggering conditions of the equipment maintenance type task are met and an Action is generated; if so, the monitored equipment can continue to be monitored based on the equipment maintenance type task.

[0177] The execution process of the first task is shown in Figure 7 Specifically, the system background can determine whether the task type is the first task according to the task type configured by the user for the monitoring task. If not, it is necessary to execute the other three types of monitoring tasks. If yes, the monitoring process under the first task can be executed.

[0178] When monitoring the monitored device through the first task, the system background can determine whether it is a lot-level card control based on the counting type configured by the user for the first task. If it is (the counting type is configured as lot batch number), then when the monitored device executes outbound, the lot count quantity is updated based on the outbound product, and the cumulative lot batch production during the period when no measurement and machine value collection is performed continuously is determined; if not (the counting type is configured as the number of wafers), then when the monitored device executes outbound, the wafer count quantity is updated based on the outbound product, and the cumulative wafer production during the period when no measurement and machine value collection is performed continuously is determined.

[0179] During the period of cumulative lot batch production or cumulative wafer production during the period when no measurement and collection of machine values ​​are performed continuously based on the first task monitoring, the system background can determine whether the cumulative lot batch production obtained by monitoring has reached a preset number (preset lot batch number), or determine whether the cumulative wafer production obtained by monitoring has reached a preset number (preset wafer number). If so, the trigger condition of the first task is met and an Action is generated; if not, the monitored equipment can continue to be monitored based on the first task.

[0180] The execution process of the second task is shown in Figure 8 The system background can determine whether the task type is the second task according to the task type configured by the user for the monitoring task. If not, it needs to execute the other three types of monitoring tasks. If yes, it can execute the monitoring process under the second task.

[0181] When monitoring the monitored device through the second task, specifically, when the monitored device executes outbound, the Batch count quantity can be updated based on the outbound product to determine the cumulative Batch production volume during the period when the machine measurement and value collection is not performed continuously. In addition, during the period when the cumulative Batch production volume during the period when the machine measurement and value collection is not performed continuously based on the second task monitoring, the system background can determine whether the cumulative Batch production volume obtained by monitoring reaches a preset quantity (preset Batch quantity). If so, the trigger condition of the second task is met and an Action is generated; if not, the monitored device can continue to be monitored based on the second task.

[0182] As mentioned above, users can create one or more of the four monitoring tasks for each monitored device. When monitoring the same monitored device based on multiple monitoring tasks, when any of the monitoring tasks generates an Action, the subsequent production of the monitored device can be controlled to avoid adverse effects on the stability of the production line and product quality.

[0183] Step S204: cancel the Action.

[0184] When a monitoring task generates an action, it indicates that the monitored device may face potential performance degradation or failure risks, and the monitored device has not been tested to determine whether its performance is good. Therefore, in order to avoid adverse effects on the production line, after the monitoring task generates an action, relevant personnel need to intervene to carry out corresponding processing. After the processing is completed and it is determined that the monitored device is performing well, the action generated by the monitoring task can be released.

[0185] Specifically, if after the monitoring task has generated an Action and the subsequent production of the monitored equipment has been controlled, it is detected that the SPC system has measured the monitored equipment, then it can be determined whether the performance of the monitored equipment is abnormal based on the measurement results returned by the SPC system. When the measurement results indicate that there is no abnormality in the monitored equipment, the Action can be released and the control can be stopped, so that the monitored equipment can continue to be put into subsequent production; when the measurement results indicate that there is an abnormality in the monitored equipment, relevant personnel are required to conduct a comprehensive inspection and maintenance of the monitored equipment to ensure that the monitored equipment is restored to the best state, and then the Action can be released and the control can be stopped.

[0186] In a possible implementation, in order to ensure the continuity of the production process as much as possible, the embodiment of the present application also provides a delayed control mechanism. Specifically, the user can configure the delay time (DelayTime) for the monitoring task, allowing the monitored device to continue normal production within the delay time after the Action is generated. If the Action is released within the delay time after the Action is generated, the monitored device will not be controlled; if the Action is not released after the delay time after the Action is generated, the subsequent production of the monitored device will be controlled. It should be noted that if the monitored device has been controlled after the Action is generated, the control needs to be released when the Action generated by the monitoring task is released.

[0187] Furthermore, in order to facilitate users to understand the execution status of each monitoring task, the embodiment of the present application sets a variety of attribute information that can be recorded for the generated Action, and provides an Action management interface. The attribute information designed for the Action in this application is shown in the following table:

[0188] Primary key uniqueness Property information illustrate yes ActionId Action unique identifier no Monitoring task ID Generate Action monitoring tasks no Task Status Open / Delay / Close no Generation time Record the time when the Action is generated

[0189] Among them, ActionId can uniquely identify the specific Action generated by the monitoring task and can be automatically generated by the system.

[0190] The monitoring task ID (MonitorJobId) is used to record the monitoring task ID of the monitoring task that generated a specific Action. When a monitoring task is used to monitor the monitored production equipment throughout the process, when the monitoring task generates an Action, after the relevant personnel perform corresponding processing and cancel the Action, the monitored equipment can still be monitored through the monitoring task in the future. Therefore, a monitoring task may generate multiple Actions before and after, so the monitoring task ID cannot uniquely identify the Action.

[0191] The task status (MonitorJobState) includes three states: Open, Delay, and Close.

[0192] If the delay time is not configured for the monitoring task, when the monitoring task generates an Action, the Action enters the Open state; after the relevant personnel cancel the Action, the Action switches from the Open state to the Close state.

[0193] If a delay is configured for a monitoring task, when an Action is generated by the monitoring task, the Action first enters the Delay state. If the monitored device is not measured and received after the delay period for the Action to enter the Delay state, the Action further enters the Open state. If the relevant personnel cancel the Action when it is in the Delay state or the Open state, the Action switches to the Close state.

[0194] For the above three states, when the Action is in the Open state, the subsequent production of the monitored equipment will be controlled to prevent the relevant batches from entering the station. This design ensures that the production process will only be intervened when there are potential risks or abnormal conditions in the equipment, thus ensuring the safety of production equipment and the continuity of production to the greatest extent.

[0195] The generation time (TriggerTime) is used to record the time when the monitoring action is generated, that is, the time when the trigger condition of the monitoring task is met.

[0196] The Action management interface provided in this application embodiment is shown in Fig. 9 This interface is used to display the various actions that have been generated in the production system ( Fig. 9 Take the actions numbered 1 to 3 as an example), and display the relevant information of each action. The relevant information of each action may include an ActionId (for example, Fig. 9 A1, A2, A3 in), generation time (for example, Fig. 92024-1-2 11:40), monitoring task ID (for example, Fig. 9 J1, J2, J3 in the ), device name (for example, Fig. 9 Device 1, Device 2, Device 3), task type, task status (including Close, Open, and Delay), delay duration, and other information.

[0197] Among them, the task status is used to record the task type of the monitoring task that generates the corresponding Action. The task types include Time, PM, ProcessCount, and BatchCount. It can be seen that Fig. 9 The three actions shown in the figure are generated by three types of monitoring tasks: Time, PM, and ProcessCount.

[0198] The delay time can be set by the user when establishing the monitoring task, or by modifying its configuration parameters after the monitoring task is established. For example, the delay time can be set in hours. If the user sets the delay time to 1, it indicates that the delay time is 1 hour. If the delay time is set to 0, it indicates that there is no delay time.

[0199] based on Fig. 9 In the illustrated interface, after an Action is generated, the user can manage the Action in the following ways. For example, after Action A2 is generated, if the monitored device is measured and received through the SCP system, and the measured value results indicate that there is no abnormality in the monitored device, the user can click the box at position D to select the Action, and then click the drop-down menu display button e next to the Action at the bottom of the page, select Close from the drop-down menu, set the status of the Action to Close, and cancel the Action. In addition, after selecting the Action, the user can also configure the delay time for the Action in the edit bar to the right of the delay time indicated at the bottom of the page, so that the MES system will temporarily not control the monitored device.

[0200] Furthermore, in actual production scenarios, in addition to conventional PW (Product Wafer) batches, there are also NPW (None Product Wafer) batches. Among them, NPW batches are not used for final product manufacturing, but for non-commercial purposes such as research and development, testing, and teaching.

[0201] Although in order to ensure the stability of the production line and product quality, the monitoring method of the production equipment provided in this application needs to focus mainly on PW type batches, the above-mentioned characteristics of NPW type batches also make it an ideal choice for equipment testing.

[0202] Therefore, in one embodiment of the present application, NPW type batches can be produced preferentially through the monitored equipment, and the monitored equipment can be monitored through one or more types of monitoring tasks mentioned above. Based on the monitoring results and the measurement results of the monitored equipment, the abnormal problems existing in the monitored equipment are comprehensively analyzed, the monitored equipment is comprehensively maintained, and a more reasonable equipment maintenance cycle and replacement time are set for the monitored equipment.

[0203] When PW type batches are subsequently produced by the monitored equipment and corresponding monitoring tasks need to be established, configuration parameters (such as the first duration, preset quantity, etc.) that are more suitable for the monitored equipment can be set based on the monitoring results of the previous monitoring of the production process of NPW type batches by the monitored equipment. This will help reduce unnecessary downtime and ensure production continuity while ensuring the stability of the production line and product quality.

[0204] In one embodiment of the present application, the above-mentioned production equipment monitoring method can be implemented through a special modeling tool, and the relevant data can be stored through a database (such as an Oracle database).

[0205] For example, see Fig.10 , the operation rules of the above four types of monitoring tasks can be defined in the modeling tool, monitoring task records can be generated based on the created monitoring tasks, and the relevant data can be transferred to the Oracle database for storage through the TCP / IP (Transmission Control Protocol / Internet Protocol) protocol. The monitoring task information, the monitoring record information of the monitored equipment, and the monitoring record history information of the monitored equipment are stored in the Oracle database.

[0206] In one embodiment of the present application, a user operation platform may be provided so that users can create monitoring tasks and manage actions through the user operation platform. Fig.11 The user operation platform may include a client interface visible to the user and a backend server.

[0207] In this user operation platform, a client interface can be used to provide Figure 3 The monitoring task setting interface shown in the figure allows users to create monitoring tasks, as well as Fig. 9The Action management interface shown in the figure allows users to manage Actions.

[0208] As an example, the client interface can be implemented through tools such as Winform (a framework for implementing applications) and Infragistics (a third-party control). Users can enter and query production information (such as the equipment name of the production equipment, the workload, and other information) on the Winform client, and send the results to the server through tibco. The server performs relevant processing (for example, the generation of monitoring tasks, the execution of monitoring tasks, etc.). Furthermore, the information entered by the user can be persisted through the Oracle database.

[0209] As an example, the server can provide functions such as QUERY, WIP (Work In Process), SCH (Schedule), EAP (Equipment Automation Protocol), etc., which can be implemented with the help of tools such as SpringBoot (an open source framework), SpringMVC (an open source framework), and Oracle database.

[0210] The embodiment of the present invention further provides an electronic device, such as Fig.12 As shown, it includes a processor 1201 , a communication interface 1202 , a memory 1203 and a communication bus 1204 , wherein the processor 1201 , the communication interface 1202 , and the memory 1203 communicate with each other via the communication bus 1204 .

[0211] Memory 1203, used for storing computer programs;

[0212] The processor 1201 is used to implement the following steps when executing the program stored in the memory 1203:

[0213] In response to a first operation of the user, determining a monitored device from the production device list;

[0214] In response to a second operation of the user, a monitoring task is generated; the monitoring task includes at least one of a task of a work time type, a task of a device maintenance type, and a task of a work volume type;

[0215] Monitor the monitored equipment through monitoring tasks; among them, the operation time type tasks are used to monitor the cumulative operation time without continuous measurement and collection of values, the equipment maintenance type tasks are used to monitor whether the measurement and collection of values ​​are performed after preventive maintenance, and the operation volume type tasks are used to monitor the cumulative operation volume without continuous measurement and collection of values;

[0216] When the triggering condition of the monitoring task is triggered, the card controls the subsequent production of the monitored equipment; the triggering condition of the operation time type task is: the cumulative operation time reaches the first time; the triggering condition of the equipment maintenance type task is: no machine measurement and collection value is performed after preventive maintenance; the triggering condition of the operation volume type task is: the cumulative operation volume reaches the preset number.

[0217] The communication bus mentioned in the above electronic device can be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. The communication bus can be divided into an address bus, a data bus, a control bus, etc. For ease of representation, only one thick line is used in the figure, but it does not mean that there is only one bus or one type of bus.

[0218] The communication interface is used for communication between the above electronic device and other devices.

[0219] The memory may include a random access memory (RAM) or a non-volatile memory (NVM), such as at least one disk memory. Optionally, the memory may also be at least one storage device located away from the aforementioned processor.

[0220] The above-mentioned processor can be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it can also be a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components.

[0221] In another embodiment of the present invention, a computer-readable storage medium is provided, in which a computer program is stored. When the computer program is executed by a processor, the steps of the monitoring method of any of the above-mentioned production equipment are implemented.

[0222] In another embodiment of the present invention, a computer program product including instructions is provided, which, when executed on a computer, enables the computer to execute the monitoring method of any production equipment in the above embodiments.

[0223] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented by software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present invention is generated in whole or in part. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions can be transmitted from a website site, computer, server or data center to another website site, computer, server or data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.). The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that includes one or more available media integrated. The available medium can be a magnetic medium (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid-state hard disk Solid State Disk (SSD)), etc.

[0224] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0225] Each embodiment in this specification is described in a related manner, and the same or similar parts between the embodiments can be referenced to each other, and each embodiment focuses on the differences from other embodiments.

[0226] The above description is only a preferred embodiment of the present invention and is not intended to limit the protection scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.

Claims

1. A method for monitoring production equipment, characterized in that: include: In response to a first operation, determining a monitored device from a list of production devices; In response to the second operation, generating a monitoring task; The monitoring task includes at least one of an operation time type task, an equipment maintenance type task and an operation amount type task, wherein the operation time type task is used to monitor the cumulative operation time for which the machine value collection has not been continuously measured, the equipment maintenance type task is used to monitor whether the machine value collection has been measured after preventive maintenance, and the operation amount type task is used to monitor the cumulative operation amount for which the machine value collection has not been continuously measured; Monitoring the monitored device through the monitoring task; In response to the triggering condition of the monitoring task being triggered, the subsequent production of the monitored equipment is controlled; wherein, the triggering condition of the operation time type task is: the cumulative operation duration reaches a first duration; the triggering condition of the equipment maintenance type task is: no machine measurement is performed after preventive maintenance; the triggering condition of the workload type task is: the cumulative workload reaches a preset number.

2. The method according to claim 1, characterized in that When the monitoring task includes the time type monitoring task, monitoring the monitored device through the monitoring task includes: Based on the timing start time defined in the timer maintained under the time type task, the accumulated operation duration of the monitored device is timed; When it is detected that the monitored device has been measured and received a value during the timing of the timer, the timing start time is updated to the time when the measurement and reception is performed.

3. The method according to claim 1 or 2, characterized in that: The configuration parameters of the job time type task include a cycle type and a cycle quantity, wherein the cycle type is used to indicate the time unit adopted by the preset first duration, and the cycle quantity is used to indicate the number of time units included in the first duration.

4. The method according to claim 1 or 2, characterized in that: When the monitoring task includes the job time type task, before the triggering condition of the job time type task is triggered, the method further includes: When the monitoring accumulated time reaches a second time, a reminder message is generated; the second time is shorter than the first time, and the reminder message is used to remind production personnel to measure the received value of the monitored equipment.

5. The method according to claim 1, characterized in that The triggering condition of the equipment maintenance type task is specifically: within the buffer time after the preventive maintenance is performed on the monitored equipment, no machine value is measured for the monitored equipment.

6. The method according to claim 1, characterized in that When the monitoring task includes a workload type task, monitoring the monitored device through the monitoring task includes: Counting the accumulated workload of the monitored device based on the counting start time defined in the counter maintained under the workload type task; When it is detected that the monitored device has been measured and received during the counting process of the counter, the counter is controlled to count again.

7. The method according to claim 1 or 6, characterized in that: The workload type tasks include a first task and / or a second task, wherein the second task is dedicated to a production equipment of a batch production type; The first task is used to monitor the cumulative wafer production volume or the cumulative lot production volume that has not been continuously measured and received; the second task is used to monitor the cumulative batch production volume that has not been continuously measured and received.

8. The method according to claim 1 or 6, characterized in that: The configuration parameters of the workload type task include a trigger recipe group list. The workload type task is specifically used to monitor the cumulative workload of the first product that has not been continuously measured and received; the recipe group used by the first product is included in the trigger recipe group list.

9. The method according to any one of claims 1, 2, 5 and 6, characterized in that: The configuration parameters of the monitoring task include a restricted recipe group list, and when the triggering condition of the monitoring task is triggered, the subsequent production of the monitored equipment is controlled, including: When the triggering condition of the monitoring task is triggered, the monitored device is controlled to produce a second product subsequently; the recipe group used by the second product is included in the restricted recipe group list.

10. The method according to claim 1, characterized in that After controlling the subsequent production of the monitored device, the method further includes: When it is detected that the monitored device has been measured and received values, and the measured and received values ​​result indicates that the monitored device has no abnormality, the card control on the monitored device is released.

11. The method according to claim 1, characterized in that: The step of determining the monitored device from the production device list in response to the first operation includes: Providing a first interface, wherein the first interface is used to display the production equipment list; In response to an operation of selecting a specific production device in the production device list, the specific production device is used as a monitored device; The generating of the monitoring task corresponding to the second operation includes: In response to a task creation operation for the monitored device, a task creation page is provided; the task creation page includes a task type selection column and a configuration parameter editing column; A monitoring task is generated based on the task type selected in the task type selection column and the configuration parameters set in the configuration parameter editing column.

12. An electronic device, characterized in that: It includes a processor, a communication interface, a memory and a communication bus, wherein the processor, the communication interface and the memory communicate with each other through the communication bus; Memory, used to store computer programs; A processor, for implementing the method steps described in any one of claims 1-11 when executing a program stored in a memory.

13. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, and when the computer program is executed by a processor, the method steps described in any one of claims 1 to 11 are implemented.

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