Substrate jacking and supporting mechanism and vacuum drying equipment

Abstract

The invention relates to a base plate jacking and supporting mechanism and hollow drying equipment, the base plate jacking and supporting mechanism comprises a jacking assembly and a supporting assembly, the jacking assembly comprises a jacking driving source, a transmission device and a jacking table, the transmission device can receive power of the jacking driving source, and the jacking table is arranged on the jacking assembly; a plurality of power supporting points are formed to act on the jacking table, and the power supporting points are controlled by the same jacking driving source to synchronously lift and support the jacking table; the supporting assembly comprises a plurality of supporting rods which are arranged on the jacking table, the ends of the supporting rods are arranged in the vacuum drying equipment in a penetrating mode, the supporting rods jointly support a base plate placed in the vacuum drying equipment, and each supporting rod supports the base plate in a point mode. The invention provides a base plate jacking and supporting mechanism which can be applied to large-size vacuum drying equipment, point supporting of a base plate is achieved, and the base plate is driven to stably ascend and descend.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum drying equipment, in particular to a substrate lifting support mechanism and vacuum drying equipment. Background Art

[0002] VCD (Vacuum Concentration Drying), or vacuum drying equipment, has a vacuum cavity that can provide a negative pressure environment. The air pressure in the vacuum cavity is reduced by evacuating the air. In recent years, vacuum drying equipment has been used in many fields to dry and solidify products.

[0003] In order to support the product in the vacuum chamber and drive the product to move up and down, in the prior art, a lifting mechanism is generally used in conjunction with the vacuum chamber, that is, a support rod is set to pass through the vacuum chamber, and a support rod driving source is set to be connected to the support rod, the support rod is used to support the product, and the support rod driving source is used to drive the product to move up and down.

[0004] However, the size of the traditional VCD equipment is small, and the size of the lifting platform for carrying the substrate to be dried is also small. Therefore, the lifting mechanism only needs to use an electric cylinder to drive the platform to lift. However, as the application fields of VCD equipment increase, the area of ​​the substrate to be dried is also increasing. When it is necessary to carry a large area of ​​substrate, the existing single-motor driven lifting mechanism has problems such as poor lifting effect, poor stability, and easy jamming during lifting.

[0005] Moreover, as the area of ​​the substrate to be dried increases, the position where the support structure is required to support it also increases. The existing support structure adopts a cross bar support method. When the number of cross bars increases, on the one hand, it will block the light beam emitted by the position sensor, thereby affecting the detection of the substrate position. On the other hand, the increase in the number of cross bars means that the blocked area on the substrate increases, which will also affect the drying effect of the substrate. Summary of the invention

[0006] To this end, the technical problem to be solved by the present invention is to overcome the problem that the lifting mechanism of the prior art is not applicable to large-size VCD equipment, and to provide a substrate lifting and supporting mechanism, which improves the existing lifting components and supporting components so that they can be used in large-size vacuum drying equipment to achieve point support for the substrate and drive its stable lifting and lowering movement.

[0007] In order to solve the above technical problems, the present invention provides a substrate lifting support mechanism, which is used in a vacuum drying device, comprising: a lifting component and a support component, one end of the support component is connected to the lifting component, and the other end of the support component is inserted into the vacuum drying device, the lifting component drives the support component to move up and down in the vacuum drying device, and the support component is used to support a substrate placed in the vacuum drying device; wherein:

[0008] The jacking assembly includes: a jacking drive source, a transmission device and a jacking platform, wherein the transmission device can receive the power of the jacking drive source and form a plurality of power support points acting on the jacking platform, and the plurality of power support points are controlled by the same jacking drive source to synchronously lift and support the jacking platform;

[0009] The support assembly includes: a plurality of support rods, which are arranged on the lifting platform, the ends of which are inserted into the vacuum drying equipment, and the plurality of support rods jointly support the substrate placed in the vacuum drying equipment, and each support rod realizes point support for the substrate.

[0010] In one embodiment of the present invention, the transmission device comprises:

[0011] A first transmission rod, extending along a first direction and connected to the lifting driving source, wherein the lifting driving source drives the first transmission rod to rotate, and the first transmission rod has two output ends;

[0012] A cam transmission structure, wherein the cam transmission structure is disposed on both output ends of the first transmission rod, and the cam transmission structure converts the axial rotation force of the first transmission rod into a linear driving force;

[0013] A second transmission rod is extended along the second direction, connected to the output end of the cam transmission structure, and driven by the cam transmission structure to move along the third direction, wherein the second transmission rod has two supporting ends, and each supporting end is provided with a supporting member;

[0014] The first direction, the second direction and the third direction extend perpendicularly to each other.

[0015] In one embodiment of the present invention, the cam transmission structure comprises:

[0016] A transmission wheel, sleeved on two output ends of the first transmission rod, and the transmission wheel can rotate along with the first transmission rod;

[0017] A coupling shaft is arranged on the wheel surface of the transmission wheel, and the coupling shaft protrudes from the transmission wheel;

[0018] A linear bearing is connected to the coupling shaft, the linear bearing is sleeved on the second transmission rod, and the linear bearing slides on the second transmission rod.

[0019] In one embodiment of the present invention, the transmission device further comprises: a support frame for supporting the transmission wheel.

[0020] In one embodiment of the present invention, the transmission device further comprises: a slide rail and a slider, wherein the slide rail is arranged on the support frame, and the slider is arranged on the supporting end of the second transmission rod, and the slider can slide on the slide rail.

[0021] In one embodiment of the present invention, the lifting assembly further includes a guiding device, wherein the guiding device is connected to the lifting platform, and the guiding device limits the lifting direction of the lifting platform.

[0022] In one embodiment of the present invention, the support assembly further comprises:

[0023] A base, arranged on the lifting platform, and the base is used to support the support rod;

[0024] The telescopic seal is sleeved outside the support rod. The telescopic seal can change its length as the support rod is extended or retracted, and two ends of the telescopic seal are respectively sealed and connected to the vacuum chamber and the base.

[0025] In one embodiment of the present invention, a PIN pin for supporting the substrate is disposed at the end of the support rod.

[0026] In order to solve the above technical problems, the present invention further provides a vacuum drying device, comprising: the above substrate lifting support mechanism, and further comprising:

[0027] The vacuum chamber is formed by buckling an upper plate and a lower plate, and one end of the support assembly passes through the lower plate and enters the vacuum chamber to support the substrate to move in the vacuum chamber.

[0028] In one embodiment of the present invention, the upper plate and the lower plate are further provided with a sealing ring and an adjusting gasket, and the sealing ring and the adjusting gasket jointly support the upper plate and the lower plate, and the supporting height of the sealing ring is higher than the supporting height of the adjusting gasket.

[0029] The above technical solution of the present invention has the following advantages compared with the prior art:

[0030] The substrate lifting support mechanism of the present invention is applied in vacuum drying equipment, and a lifting assembly and a support assembly are used to support a substrate placed in the vacuum drying equipment and drive it to move up and down; compared with the lifting mechanism of the prior art, the substrate lifting support mechanism of the present invention is more suitable for large-sized vacuum drying equipment, wherein: the lifting assembly is provided to include: a lifting drive source, a transmission device and a lifting platform, the power of the lifting drive source is decomposed by the transmission device, and a single power support point is decomposed into multiple power support points acting on the lifting platform, so as to ensure the stability of the lifting platform;

[0031] In addition, the present invention further provides a support assembly including a plurality of support rods, which are distributed to jointly support the substrate, thereby changing the rod support structure of the prior art into a point support structure. While ensuring the support strength, it can not only avoid blocking the sensor light beam, but also minimize the contact area between the support assembly and the substrate, thereby ensuring the drying effect of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to make the content of the present invention more clearly understood, the present invention is further described in detail below according to specific embodiments of the present invention in conjunction with the accompanying drawings, wherein:

[0033] Figure 1 It is a schematic diagram of the overall structure of the substrate lifting support mechanism of the present invention;

[0034] Figure 2 It is a structural schematic diagram of the jacking assembly of the present invention;

[0035] Figure 3 is a schematic structural diagram of a support assembly of the present invention;

[0036] Figure 4 It is a schematic structural diagram of the transmission device of the present invention;

[0037] Figure 5 It is a structural schematic diagram of the cam transmission structure of the present invention;

[0038] Figure 6 It is a schematic structural diagram of the upper plate and the lower plate of the vacuum drying equipment of the present invention when they are sealed and buckled.

[0039] Explanation of the reference numerals in the specification: 1. Lifting assembly; 11. Lifting drive source; 12. Transmission device; 121. First transmission rod; 122. Cam transmission structure; 1221. Transmission wheel; 1222. Coupling; 1223. Linear bearing; 123. Second transmission rod; 124. Support member; 125. Support frame; 126. Slide rail; 127. Slider; 13. Lifting platform; 14. Guide device; 2. Support assembly; 21. Support rod; 22. Base; 23. Telescopic seal; 24. PIN needle; 3. Vacuum chamber; 4. Upper plate; 5. Lower plate; 6. Sealing ring; 7. Adjustment pad. DETAILED DESCRIPTION

[0040] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it, but the embodiments are not intended to limit the present invention.

[0041] In the existing vacuum drying equipment, in order to drive the substrate in the vacuum chamber to move up and down, it is necessary to set a lifting mechanism to pass through the vacuum chamber. For example, the Japanese patent with publication number: JP2006261379A, invention name: vacuum dryer, vacuum pump and vacuum drying method discloses a lifting mechanism that penetrates into the vacuum chamber and uses the lifting mechanism to support the substrate to move in the vacuum chamber.

[0042] However, the size of the VCD device in the patent application is relatively small, and the size of the lifting platform for carrying the substrate is also relatively small. Therefore, in the patent application, the lifting mechanism only uses one electric cylinder to drive the platform to lift and lower to ensure the stable lifting and lowering of the platform; however, as the application fields of VCD devices are increasing, larger-sized vacuum drying equipment is required in many fields to lift larger-sized substrates. When the area of ​​the substrate increases, only one electric cylinder is used to drive the substrate to lift and lower, which is prone to problems such as insufficient electric cylinder drive, poor stability, and easy jamming during lifting;

[0043] Furthermore, referring to the prior art: Publication No.: JP2006261379A, Invention Name: Japanese Patent of Reduced Pressure Dryer, Vacuum Pump and Reduced Pressure Drying Method, the existing support structure uses a cross bar to support the substrate. Since the size of the VCD device in the traditional field is relatively small, the size of the substrate placed therein is also relatively small. The use of a cross bar to support both ends of the substrate can ensure stable support for the substrate. As the area of ​​the substrate to be dried continues to increase, when only two cross bars are used to support the ends of the substrate, the middle position of the substrate is not supported and will bend downward under the action of gravity, and may even break. In order to target substrates with larger areas, the support structure needs to set more support points. The existing support structure uses a cross bar support method. When the number of cross bars increases, on the one hand, it will block the light beam emitted by the position sensor, thereby affecting the detection of the position of the substrate. On the other hand, the increase in the number of cross bars means that the blocking area on the substrate increases, which will also affect the drying effect of the substrate.

[0044] In order to solve the problem that the lifting mechanism of the prior art is not applicable to large-size VCD equipment, Figure 1 As shown, the present invention provides a substrate lifting support mechanism, which is used in a vacuum drying device, comprising: a lifting component 1 and a support component 2, wherein the support component 2 is arranged on the lifting component 1, one end of the support component 2 is connected to the lifting component 1, and the other end of the support component 2 is inserted into the vacuum drying device, and the support component 2 is used to support a substrate placed in the vacuum drying device, and the lifting component 1 drives the support component 2 to move up and down in the vacuum drying device, thereby driving the substrate to move in the vacuum chamber;

[0045] Reference Figure 2 As shown, in this embodiment, the lifting component 1 includes: a lifting drive source 11, a transmission device 12 and a lifting platform 13. The transmission device 12 can receive the power of the lifting drive source 11 and form multiple power support points acting on the lifting platform 13. The multiple power support points are controlled by the same lifting drive source 11 to synchronously lift and support the lifting platform 13. The power of the lifting drive source 11 is decomposed by the transmission device 12, and the single power support point is decomposed into multiple power support points acting on the lifting platform 13 to ensure the stability of the lifting of the lifting platform 13. Compared with the lifting mechanism of the prior art, the substrate lifting support mechanism of the present invention is more suitable for large-sized vacuum drying equipment. Even if the area of ​​the substrate is large, the stability of the substrate lifting can be ensured by providing synchronous power at one point and multi-point support.

[0046] Reference Figure 3As shown, in this embodiment, the support assembly 2 includes: a plurality of support rods 21, a plurality of the support rods 21 are arrayed and distributed on the lifting platform 13, the ends of the plurality of the support rods 21 are inserted into the vacuum drying device, and the plurality of the support rods 21 jointly support the substrate placed in the vacuum drying device, and each of the support rods 21 realizes point support for the substrate, and the rod support structure of the prior art is changed into a point support structure, which can not only avoid blocking the sensor beam while ensuring the support strength, but also minimize the contact area between the support assembly 2 and the substrate, thereby ensuring the drying effect of the substrate;

[0047] It should be noted that, precisely because the jacking assembly 1 can provide sufficient stability and ensure that the jacking platform 13 can move up and down synchronously as a whole without shaking and tilting, in this embodiment, the support assembly 2 can be set as a point support structure to ensure that all support rods 21 can jointly support the substrate. Otherwise, if a stable jacking driving force cannot be guaranteed, when multiple support rods 21 are used to support the substrate, there will be protruding support rods 21 acting on the substrate. In this way, the entire weight of the substrate will fall on the protruding support point, causing damage to the substrate. Therefore, in this embodiment, the premise of being able to use point support is to ensure that the jacking assembly 1 can provide stable jacking power.

[0048] In this embodiment, in order to further illustrate how the transmission device 12 decomposes a power to act on multiple supporting points, refer to Figure 4 As shown, a specific structure of a transmission device 12 is disclosed, and the transmission device 12 includes: a first transmission rod 121, a cam transmission structure 122 and a second transmission rod 123, wherein:

[0049] The first transmission rod 121 is extended along the first direction, and the middle part of the first transmission rod 121 is connected to the lifting driving source 11, and the lifting driving source 11 drives the first transmission rod 121 to rotate. The first transmission rod 121 has two output ends, and the two output ends are symmetrically arranged on both sides of the lifting driving source 11. In this embodiment, the lifting driving source 11 is a servo motor, which can provide rotational force. Compared with the linear power provided by the electric cylinder, its torque is larger and the power provided is larger. When it is applied to large-size VCD equipment, it can provide sufficient power when the area of ​​the substrate is large;

[0050] The cam transmission structure 122 is provided on both output ends of the first transmission rod 121, that is, the transmission device 12 includes two groups of cam transmission structures 122, each group of the cam transmission structures 122 has an input end and an output end, wherein: the input end is connected to the output end of the first transmission rod 121, and the output end is connected to the second transmission rod 123, and the two groups of cam transmission structures 122 are connected to two second transmission rods 123, the second transmission rod 123 is extended along the second direction, and the two second transmission rods 123 are symmetrically arranged on both sides of the jacking drive source 11, the cam transmission structure 122 converts the axial rotation force of the first transmission rod 121 into a linear driving force for pushing the second transmission rod 123 to move, and the second transmission rod 123 is driven by the cam transmission structure 122 to move along the third direction, and the second transmission rod 123 has two supporting ends, each of which is provided with a supporting member 124, and the jacking platform 13 is arranged on the supporting member 124;

[0051] As shown in the figure, in this embodiment, the first direction, the second direction and the third direction extend perpendicularly to each other to form a three-axis rectangular coordinate system in space, and the power of the jacking drive source 11 acting on one point is extended in the first direction and the second direction through the first transmission rod 121 and the second transmission rod 123, and support members 124 are arranged on the two supporting ends of the second transmission rod 123 to form a multi-point support structure. The multiple support members 124 are synchronously lifted and lowered under the drive of the jacking drive source 11, and can act on multiple positions of the jacking platform 13, thereby ensuring the stability of the lifting and lowering of the jacking platform 13.

[0052] Reference Figure 5As shown, the present embodiment further discloses a specific structure of a cam transmission structure 122, the cam transmission structure 122 comprises: a transmission wheel 1221, a coupling 1222 and a linear bearing 1223, wherein: the transmission wheel 1221 is sleeved on the two output ends of the first transmission rod 121, when the first transmission rod 121 rotates, the transmission wheel 1221 can rotate with the first transmission rod 121, the coupling 1222 is arranged on the wheel surface of the transmission wheel 1221, when the transmission wheel 1221 rotates, the coupling 1222 rotates with the transmission shaft, and synchronous movement of the high and low positions and the left and right positions can be achieved, and the coupling 1222 protrudes from the The transmission wheel 1221 is connected to the linear bearing 1223, and the coupling 1222 drives the linear bearing 1223 to move synchronously. The linear bearing 1223 is sleeved on the second transmission rod 123, and the linear bearing 1223 can slide on the second transmission rod 123. When the linear bearing 1223 moves synchronously in high and low positions and left and right positions, the linear bearing 1223 can drive the second transmission rod 123 to move up and down while sliding on the second transmission rod 123. Through the above-mentioned cam transmission structure 122, the axial rotational force output by the jacking drive source 11 can be converted into a linear driving force that drives the second transmission rod 123 to move.

[0053] Specifically, the transmission device 12 further includes: a support frame 125 for supporting the transmission wheel 1221 , and the transmission wheel 1221 is suspended by the support frame 125 to ensure that the transmission wheel 1221 can rotate with the first transmission rod 121 .

[0054] Specifically, the transmission device 12 also includes: a slide rail 126 and a slider 127, the slide rail 126 is arranged on the support frame 125, and the slider 127 is arranged on the supporting end of the second transmission rod 123, and the slider 127 can slide on the slide rail 126. Through the cooperation of the slider 127 and the slide rail 126, the moving direction of the second transmission rod 123 can be further limited to ensure the movement stability of the second transmission rod 123, thereby further ensuring the stability of the entire lifting assembly.

[0055] Specifically, the lifting assembly 1 also includes a guide device 14, which is connected to the lifting platform 13. The guide device 14 limits the lifting direction of the lifting platform 13. The guide device 14 includes a plurality of guide rods arranged along a third direction, and a guide sleeve arranged on the lifting platform 13 and capable of being sleeved outside the guide rod. Through the limiting cooperation of the guide rod and the guide sleeve, the lifting platform 13 can be further prevented from tilting, thereby ensuring that the lifting platform 13 can be lifted and lowered stably.

[0056] As shown above, the substrate lifting support mechanism of the present invention is used in vacuum drying equipment. When it is actually used, multiple support rods 21 need to be inserted into the vacuum cavity. In order to enable the support rods 21 to be inserted into the vacuum cavity, it is necessary to open a through hole in the vacuum cavity for the support rods 21 to pass through. In order to facilitate the movement of the support rods 21 relative to the vacuum cavity, a certain gap needs to be reserved between the support rods 21 and the vacuum cavity, that is, a gap fit is set between the support rods 21 and the vacuum cavity. Although the gap between the support rods 21 and the vacuum cavity can be controlled within a very small range through process control, as long as there is a gap, even if it is very small, it will affect the sealing of the vacuum cavity.

[0057] To solve the above problems, refer to Figure 3 As shown, the support assembly 2 also includes: a base 22 and a telescopic seal 23, the base 22 is arranged on the lifting platform 13, and the base 22 is used to support the support rod 21; the telescopic seal 23 is sleeved outside the support rod 21, and the telescopic seal 23 can change its length as the support rod 21 is extended and retracted, and the two ends of the telescopic seal 23 are respectively sealed and connected to the vacuum cavity and the base 22, so that the telescopic seal 23, the vacuum cavity and the base 22 together form a closed cavity structure, which can achieve the closure of the through hole; and the telescopic seal 23 is set to change its length as the support rod 21 moves. During the movement of the support rod 21, the telescopic seal 23 can also always close the gap between the support rod 21 and the through hole during the movement, so that the support rod 21 is sealed and connected to the vacuum cavity, ensuring that the sealing inside the vacuum cavity is not affected.

[0058] Specifically, the structure of the telescopic seal 23 and the connection method of the telescopic seal 23 with the vacuum chamber and the base 22 have been disclosed in the patent application number 2024217956647 applied by the company, and will not be repeated here.

[0059] Specifically, when the support rod 21 is used to support the substrate, in order to further reduce the contact area between the support point and the substrate, and also to prevent the support rod 21 from causing stamping damage to the substrate, a PIN needle 24 for supporting the substrate is provided at the end of the support rod 21, and a support seat is provided on the support rod 21, and the PIN needle 24 is detachably installed in the support seat, so that the PIN needle 24 can be replaced.

[0060] On this basis, the present invention also discloses a vacuum drying device, including: a substrate lifting support mechanism, and also including: a vacuum chamber 3, which is formed by buckling an upper plate 4 and a lower plate 5, one end of the support assembly 2 passes through the lower plate 5 and enters the vacuum chamber 3 to support the substrate to move in the vacuum chamber 3. The vacuum drying device of the present invention can support and lift a large-area substrate because it adopts a substrate lifting support mechanism. Therefore, compared with traditional vacuum drying equipment, the size that can be set is larger, meeting the use requirements of more fields.

[0061] Specifically, in order to ensure the airtightness of the vacuum chamber, a sealing ring 6 is generally provided between the upper plate 4 and the lower plate 5. When the upper plate 4 and the lower plate 5 are buckled, the gap between the upper plate 4 and the lower plate 5 can be sealed by the sealing ring 6. In small-sized vacuum drying equipment, since the weight of the upper plate 4 is relatively small, the sealing ring 6 is generally not squeezed and deformed, and the sealing ring 6 can be used stably for a long time; however, in large-sized vacuum drying equipment, the weight of the upper plate 4 will also increase. If the upper plate 4 is directly applied to the sealing ring 6, the sealing ring 6 will be squeezed and deformed during long-term use and cannot be restored to its original state. Long-term repeated use will affect its sealing performance.

[0062] Reference Figure 6 As shown, in the present embodiment, not only a sealing ring 6 but also an adjusting gasket 7 is provided between the upper plate 4 and the lower plate 5. In actual use, the height of the adjusting gasket 7 is set according to the gap between the upper plate 4 and the lower plate 5, and the supporting height of the sealing ring 6 is set higher than the supporting height of the adjusting gasket 7. The upper plate 4 and the lower plate 5 are jointly supported by the sealing ring 6 and the adjusting gasket 7. While ensuring the sealing effect of the sealing ring 6, the pressure on the sealing ring 6 is reduced, thereby ensuring the service life of the sealing ring 6 and further ensuring the sealing performance of the vacuum chamber.

[0063] Obviously, the above embodiments are merely examples for the purpose of clear explanation and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the present invention.

Claims

1. A substrate lifting support mechanism, characterized in that: The invention is applied in vacuum drying equipment, comprising: a lifting component and a supporting component, one end of the supporting component is connected to the lifting component, the other end of the supporting component is inserted into the vacuum drying equipment, the lifting component drives the supporting component to move up and down in the vacuum drying equipment, and the supporting component is used to support a substrate placed in the vacuum drying equipment; wherein: The jacking assembly includes: a jacking drive source, a transmission device and a jacking platform, wherein the transmission device can receive the power of the jacking drive source and form a plurality of power support points acting on the jacking platform, and the plurality of power support points are controlled by the same jacking drive source to synchronously lift and support the jacking platform; The support assembly includes: a plurality of support rods, which are arranged on the lifting platform, the ends of which are inserted into the vacuum drying equipment, and the plurality of support rods jointly support the substrate placed in the vacuum drying equipment, and each support rod realizes point support for the substrate.

2. The substrate lifting support mechanism according to claim 1, characterized in that: The transmission device comprises: A first transmission rod, extending along a first direction and connected to the lifting driving source, wherein the lifting driving source drives the first transmission rod to rotate, and the first transmission rod has two output ends; A cam transmission structure, wherein the cam transmission structure is disposed on both output ends of the first transmission rod, and the cam transmission structure converts the axial rotation force of the first transmission rod into a linear driving force; A second transmission rod is extended along the second direction, connected to the output end of the cam transmission structure, and driven by the cam transmission structure to move along the third direction, wherein the second transmission rod has two supporting ends, and each supporting end is provided with a supporting member; The first direction, the second direction and the third direction extend perpendicularly to each other.

3. The substrate lifting support mechanism according to claim 2, characterized in that: The cam transmission structure comprises: A transmission wheel, sleeved on two output ends of the first transmission rod, and the transmission wheel can rotate along with the first transmission rod; A coupling shaft is arranged on the wheel surface of the transmission wheel, and the coupling shaft protrudes from the transmission wheel; A linear bearing is connected to the coupling shaft, the linear bearing is sleeved on the second transmission rod, and the linear bearing slides on the second transmission rod.

4. The substrate lifting support mechanism according to claim 3, characterized in that: The transmission device further comprises: a support frame, which is used for supporting the transmission wheel.

5. The substrate lifting support mechanism according to claim 4, characterized in that: The transmission device further comprises: a slide rail and a slider, wherein the slide rail is arranged on the support frame, and the slider is arranged on the supporting end of the second transmission rod, and the slider can slide on the slide rail.

6. The substrate lifting support mechanism according to claim 1, characterized in that: The lifting assembly also includes a guide device, which is connected to the lifting platform and limits the lifting direction of the lifting platform.

7. The substrate lifting support mechanism according to claim 1, characterized in that: The support assembly also includes: A base, arranged on the lifting platform, and the base is used to support the support rod; The telescopic seal is sleeved outside the support rod. The telescopic seal can change its length as the support rod is extended or retracted, and two ends of the telescopic seal are respectively sealed and connected to the vacuum chamber and the base.

8. The substrate lifting support mechanism according to claim 1, characterized in that: The end of the support rod is provided with a PIN pin for supporting the substrate.

9. A vacuum drying device, characterized in that: include: The substrate lifting support mechanism according to any one of claims 1 to 8, further comprising: The vacuum chamber is formed by buckling an upper plate and a lower plate, and one end of the support assembly passes through the lower plate and enters the vacuum chamber to support the substrate to move in the vacuum chamber.

10. The vacuum drying equipment according to claim 9, characterized in that: The upper plate and the lower plate are also provided with a sealing ring and an adjusting gasket, and the sealing ring and the adjusting gasket jointly support the upper plate and the lower plate, and the supporting height of the sealing ring is higher than the supporting height of the adjusting gasket.

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