Magnetic suspension rotary table capable of adjusting rotor suspension height and adjusting method

Abstract

The magnetic suspension rotary table capable of adjusting the rotor suspension height at least comprises a stator and a rotor, a magnetic conductive part is arranged on the peripheral surface of the rotor, the stator at least comprises a permanent magnet structure and a magnetic conductive assembly used for conducting a magnetic field of the permanent magnet structure to the rotor, and the magnetic conductive assembly, the permanent magnet structure and the magnetic conductive part form a main magnetic flux path; the stator is provided with a plurality of ferromagnetic sheets with the adjustable number, the ferromagnetic sheets and the permanent magnet structures form a bypass magnetic flux path, and / or the ferromagnetic sheets, the permanent magnet structures and the magnetic conductive assembly form a bypass magnetic flux path. The magnetic field intensity conducted by the magnetic conductive assembly is adjusted by adjusting the number of the ferromagnetic sheets, and then the suspension height of the rotor is adjusted. The method has the advantages that extra energy is not consumed, the magnetic field intensity of the permanent magnet acting on the rotor is adjusted through a physical means, and the axial position change of the stator caused by inconsistent magnetic field intensity is eliminated, so that the suspension height of the rotor is accurately controlled, and the interchangeability of different batches of stators is improved.

Description

Technical Field

[0001] The invention relates to the technical field of magnetic suspension, and in particular to a magnetic suspension turntable capable of adjusting the suspension height of a rotor and an adjustment method. Background Art

[0002] In the field of semiconductor manufacturing, the cleanliness of wafers is crucial because it is directly related to the smooth progress of subsequent semiconductor processes and the final qualified rate of products. In order to ensure an ultra-clean environment, wafers of silicon or other semiconductor materials must be processed in a strictly controlled ultra-clean atmosphere. A key step in the wafer manufacturing process is to anneal the wafer after ion implantation. The doping process will produce strain on the crystal structure. If these stresses cannot be released quickly, it will cause unexpected changes in the resistivity of the ion doping. At present, the industry generally uses rapid thermal processing (RT) to effectively perform this annealing step. On the other hand, the uniformity of wafer processing cannot be ignored. To achieve this goal, when processing wafers, they are usually rotated around the vertical axis of the center of the wafer. This rotation not only helps to improve the uniformity of processing, but is also widely used in key processes such as chemical vapor deposition, heat treatment, ion implantation doping and other technical doping. In order to meet the extremely high requirements for ultra-clean environment and processing uniformity in semiconductor process manufacturing, semiconductor thermal processing equipment is preferably equipped with a magnetic suspension turntable with contactless rotation drive. As disclosed in invention patents TW426873B and CN111341692A, the magnetic levitation turntable consists of two parts: a stator and a rotor. The stator generates a magnetic field through a permanent magnet, giving the rotor the ability to suspend and rotate. Since this design does not require mechanical contact, it effectively avoids particle contamination and component wear caused by mechanical friction, and can also ensure a high degree of uniformity in the wafer processing process, thereby further improving the quality and performance of semiconductor products.

[0003] As a key component of the stator, the magnetic field strength of the permanent magnet directly determines the height of the rotor suspension and its stable state. However, in the actual production process, the magnetic field strength of the permanent magnet will be affected by multiple factors such as material properties, manufacturing process and production batch, resulting in a certain deviation in magnetic field strength between different batches. This deviation will cause slight changes in the height of the rotor in the free suspension state, which will cause differences in the axial position of different stators and the same rotor, ultimately affecting the interchangeability of the stator.

[0004] In the prior art, in order to solve the problem of rotor suspension height variation caused by inconsistent permanent magnet magnetic field strength, the axial position of the rotor is usually adjusted by adjusting the magnetic field strength of the axial coil. This method can compensate for the position deviation caused by the difference in permanent magnet magnetic field strength within a certain range, so that different batches of stators can still maintain relatively stable axial height consistency when matched with the same rotor. However, some obvious defects and shortcomings are still exposed in the actual application process: (1) Additional energy consumption In order to adjust the magnetic field strength of the axial coil to maintain the stable suspension of the rotor, the system must be powered continuously, which undoubtedly increases additional energy consumption. This increase in energy consumption causes the energy efficiency performance of each magnetic suspension system to fluctuate under the same operating conditions, directly affecting the overall energy efficiency and operating costs of the equipment.

[0005] (2) Stator heating problem Axial coils generate a lot of heat energy when they work continuously to precisely adjust the magnetic field, causing the temperature of the stator to rise significantly. This excessive heat not only increases the cooling burden of the equipment, requiring an additional cooling system to ensure stable operation, but may also damage the stator material and accelerate its aging process, thereby reducing the overall reliability and service life of the system and increasing maintenance costs and downtime.

[0006] (3) Consistency issues between systems Due to the inherent differences in the magnetic field strength of permanent magnets, different systems need to apply currents of different strengths to achieve the same levitation height. This difference leads to significant differences in energy consumption and thermal management requirements between systems, posing challenges to the interchangeability and maintainability of equipment. In practical applications, this may mean that specific control strategies and cooling solutions need to be customized for each system, increasing the complexity and cost of system design, while also reducing the flexibility and adaptability of the equipment in different application scenarios. Summary of the invention

[0007] The technical problem to be solved by the present invention is to provide a magnetic levitation turntable and adjustment method for adjusting the magnetic field strength of the permanent magnet acting on the rotor without consuming additional energy, thereby eliminating the change in the axial position of the stator caused by inconsistent magnetic field strength, thereby achieving precise control of the rotor suspension height and improving the interchangeability of stators of different batches.

[0008] In order to solve the above technical problems, the present invention provides a technical solution, a magnetic levitation turntable with adjustable rotor suspension height, comprising at least a stator and a rotor, wherein a magnetic conductive portion is provided on the outer surface of the rotor, and the stator comprises at least a permanent magnet structure having an annular inner surface and a magnetic conductive group for conducting the magnetic field of the permanent magnet structure to the rotor, wherein the magnetic conductive component, the permanent magnet structure and the magnetic conductive portion form a main magnetic flux path, and the stator is provided with a plurality of adjustable ferromagnetic sheets, wherein the ferromagnetic sheets and the permanent magnet structure form a bypass magnetic flux path, and / or the ferromagnetic sheets and the permanent magnet structure and the magnetic conductive component form a bypass magnetic flux path; the magnetic field strength conducted by the magnetic conductive component is regulated by adjusting the number of the ferromagnetic sheets, thereby adjusting the suspension height of the rotor relative to the stator.

[0009] In a preferred embodiment, the thickness of the ferromagnetic sheet is 0.1 mm-2 mm.

[0010] In a preferred embodiment, the material of the ferromagnetic thin sheet includes one or a combination of silicon steel sheet, iron-nickel alloy, iron-aluminum alloy, iron-cobalt alloy or amorphous alloy.

[0011] In a preferred embodiment, the magnetic conductive component comprises at least a first silicon steel plate and a second silicon steel plate respectively adapted to the magnetic poles at both ends of the permanent magnet structure; The permanent magnet structure, the first silicon steel plate, the magnetic conductive portion and the second silicon steel plate form a main magnetic flux path.

[0012] In a preferred embodiment, the permanent magnet structure comprises a permanent magnet having an annular inner surface.

[0013] In a preferred embodiment, the permanent magnet structure is formed by a plurality of permanent magnet units uniformly arranged along a circumferential direction; any of the permanent magnet units includes a plurality of permanent magnets with consistent magnetic pole directions, and a first magnetic conductive plate connected to the magnetic pole at one end of the permanent magnet and a second magnetic conductive plate connected to the magnetic pole at the other end of the permanent magnet.

[0014] In a preferred embodiment, the ferromagnetic sheet is adhered to the outer surface of the permanent magnet by magnetic attraction, and the ferromagnetic sheet and the permanent magnet form a first bypass magnetic flux path.

[0015] In a preferred embodiment, the ferromagnetic sheet is detachably connected between the first magnetic conductive plate and the second magnetic conductive plate, and the ferromagnetic sheet, the permanent magnet, the first magnetic conductive plate and the second magnetic conductive plate form a second bypass magnetic flux path.

[0016] In a preferred embodiment, the ferromagnetic sheet is detachably connected between the first silicon steel plate and the second silicon steel plate, and the permanent magnet structure, the first silicon steel plate, the ferromagnetic sheet and the second silicon steel plate form a third bypass magnetic flux path.

[0017] A preferred embodiment further comprises a displacement sensor, wherein the displacement sensor is mounted on the stator and is used to obtain the suspension height of the rotor relative to the stator.

[0018] A preferred embodiment further comprises a substrate fixedly connected to the stator and arranged horizontally, and the displacement sensor is mounted on the stator through the substrate.

[0019] The present invention also provides a method for adjusting the rotor suspension height by using the magnetic suspension turntable as described above, comprising the following steps: Setting preset parameters, wherein the preset parameters include a range of the suspension height of the rotor relative to the stator under the condition of satisfying interchangeability; Starting the magnetic suspension turntable and obtaining the suspension height of the rotor relative to the stator; Based on the obtained suspension height, the state of the stator is judged by preset parameters. If the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment is completed. Otherwise, the stator does not meet the interchangeability adjustment, and the number of ferromagnetic sheets is adjusted until the suspension height is within the preset parameter range.

[0020] In a preferred embodiment, the state of the stator is judged based on the obtained suspension height by preset parameters. If the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment is completed. Otherwise, the stator does not meet the interchangeability adjustment, and the number of the ferromagnetic sheets is adjusted until the suspension height is within the preset parameter range. Specifically, the steps include: Step S301, judging the state of the stator based on the obtained suspension height and preset parameters, if the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment ends; If the levitation height is greater than the maximum value of the preset parameter range, proceed to step S302; if the levitation height is less than the minimum value of the preset parameter range, proceed to step S303; Step S302, increasing the number of the ferromagnetic sheets, so that the rotor moves axially along the annular inner surface of the permanent magnet toward the stator, and reducing the levitation height of the rotor relative to the stator, so that the levitation height is within the range of the preset parameters; Step S303, reducing the number of the ferromagnetic sheets, causing the rotor to move away from the stator along the axial direction of the annular inner surface of the permanent magnet, increasing the levitation height of the rotor relative to the stator, and making the levitation height within the range of the preset parameters.

[0021] Compared with the prior art, the magnetic suspension turntable with adjustable rotor suspension height of the present invention has the following beneficial effects: (1) The magnetic levitation turntable with adjustable rotor suspension height of the present invention comprises at least a stator and a rotor. The stator comprises at least a permanent magnet structure with an annular inner surface and a magnetic conductive component connected to the permanent magnet structure for transmitting the magnetic field of the permanent magnet structure to the rotor. The stator is provided with a plurality of adjustable ferromagnetic thin sheets, the ferromagnetic thin sheets and the permanent magnet structure form a bypass magnetic flux path, and / or the ferromagnetic thin sheets and the permanent magnet structure and the magnetic conductive component form a bypass magnetic flux path; the magnetic field strength transmitted by the magnetic conductive component is regulated by adjusting the number of ferromagnetic thin sheets. With such a structural design, the traditional method of regulating the magnetic field by electric current is abandoned, and the physical regulation mechanism of the ferromagnetic thin sheets is adopted instead. This transformation is of great significance: the traditional method requires continuous power supply to maintain the magnetic field strength, while the present invention achieves precise control of the suspension height by directly adjusting the physical configuration of the permanent magnet magnetic field, without relying on external power, thereby greatly reducing energy consumption. In addition, this physical regulation method generates almost no additional heat during operation, effectively simplifying the complexity of the thermal management system. Compared with the common coil heating problem in traditional current regulation systems, the present invention fundamentally avoids this problem, completely eliminates the complex and costly heat dissipation and cooling devices, and further improves the overall performance and reliability of the system.

[0022] (2) The magnetic levitation turntable with adjustable rotor suspension height of the present invention adjusts the magnetic field strength of the magnetic component by adjusting the number of ferromagnetic sheets, thereby adjusting the suspension height of the rotor relative to the stator. The present invention effectively solves the problem of magnetic field strength differences that are difficult to avoid during the manufacturing process of permanent magnets by adjusting the ferromagnetic sheets. The consistency of the system and the interchangeability between batches are significantly improved. Specifically, even when facing different batches of permanent magnets, by adjusting the number and configuration of ferromagnetic sheets, it is possible to ensure that the magnetic field strength of each system reaches a highly uniform standard. This not only eliminates performance fluctuations caused by differences in permanent magnets, but also enables seamless replacement between systems, greatly improving the flexibility and maintainability of the system. Compared with the traditional current regulation system, the physical magnetic field regulation method of the present invention does not require complex current regulation of the permanent magnets in each system, but can achieve high consistency and interchangeability between batches through simple and precise physical regulation means. This feature not only reduces the complexity and cost of the system, but also significantly improves the long-term stability and reliability of the system.

[0023] (3) The magnetic suspension turntable with adjustable rotor suspension height of the present invention, the magnetic conductive component at least includes a first silicon steel plate and a second silicon steel plate respectively adapted to the magnetic poles at both ends of the permanent magnet structure; the permanent magnet structure, the first silicon steel plate, the magnetic conductive part and the second silicon steel plate form a main magnetic flux path. The permanent magnet structure includes a permanent magnet with an annular inner surface or is formed by a plurality of permanent magnet units arranged uniformly along the circumferential direction, any permanent magnet unit includes a plurality of permanent magnets with the same magnetic pole direction, and a first magnetic conductive plate connected to the magnetic pole at one end of the permanent magnet and a second magnetic conductive plate connected to the magnetic pole at the other end of the permanent magnet. The ferromagnetic sheet is attached to the outer surface of the permanent magnet by magnetic attraction, and the ferromagnetic sheet and the permanent magnet form a first bypass magnetic flux path; the ferromagnetic sheet is detachably connected between the first magnetic plate and the second magnetic plate, and the ferromagnetic sheet, the permanent magnet, the first magnetic plate and the second magnetic plate form a second bypass magnetic flux path; the ferromagnetic sheet is detachably connected between the first silicon steel plate and the second silicon steel plate, and the permanent magnet structure, the first silicon steel plate, the ferromagnetic sheet and the second silicon steel plate form a third bypass magnetic flux path. With such a structural design, the number of ferromagnetic sheets can be manually adjusted in a variety of ways to control the magnetic field intensity, and the operation is simple and intuitive. Compared with the traditional technology that relies on complex electronic control systems, the present invention does not need to rely on complex control algorithms and precision circuits. On the one hand, it greatly reduces the difficulty of operation and system complexity, reduces the technical threshold for operation and maintenance, and makes the system easier to manage and maintain; on the other hand, it significantly improves the reliability of the system, does not need to frequently use electronic components for adjustment, reduces the failure rate of the system, and extends the service life of the equipment.

[0024] (4) The magnetic levitation turntable with adjustable rotor suspension height of the present invention uses a ferromagnetic sheet with a thickness ranging from 0.1 mm to 2 mm. This design not only ensures the fineness of the adjustment, but also perfectly adapts to the control requirements of high-precision suspension height. The ultra-thin nature of the ferromagnetic sheet gives the adjustment process extremely high sensitivity and accuracy, so that each adjustment can be made in a small and accurate step, thereby easily achieving fine tuning of the suspension height. This design flexibility means that the system can perform personalized suspension height settings according to different application scenarios and specific performance requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the overall structure of a first embodiment of a magnetic suspension turntable rotor suspension height adjustment structure of the present invention; Figure 2 It is a cross-sectional view of the overall structure of a first embodiment of a magnetic suspension turntable rotor suspension height adjustment structure of the present invention; Figure 3 for Figure 2 Schematic diagram of the structure of the middle A area; Figure 4It is a schematic diagram of a first bypass magnetic flux path formed by a ferromagnetic sheet and a permanent magnet in Embodiment 1 of a magnetic suspension turntable rotor suspension height adjustment structure of the present invention; Figure 5 It is a schematic diagram of the substrate and sensor installation structure of a first embodiment of a magnetic suspension turntable rotor suspension height adjustment structure of the present invention; Figure 6 The present invention is a flow chart of an adjustment method of a second embodiment of a magnetic levitation turntable rotor suspension height adjustment structure.

[0026] Description of reference numerals: 1-stator; 11-permanent magnet structure; 111-permanent magnet; 112-permanent magnet unit; 1121-first magnetic conductive plate; 1122-second magnetic conductive plate; 12-magnetic conductive assembly; 121-first silicon steel plate; 122-second silicon steel plate; 13-ferromagnetic sheet; 14-main magnetic flux path; 15-second bypass magnetic flux path; 16-third bypass magnetic flux path; 17-first bypass magnetic flux path; 2- rotor; 21- magnetic conductive part; 3- Displacement sensor; 4-Substrate. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0028] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "front", "back", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0029] In the description of the present invention, it should be noted that, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, an integral connection, or a detachable connection; it can be the internal connection of two components; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] Embodiment 1

[0031] A magnetic suspension turntable capable of adjusting the rotor suspension height in this embodiment, such as Figure 1 and Figure 3 As shown, it at least includes a stator 1 and a rotor 2, and a magnetic conductive part 21 is provided on the outer surface of the rotor; the stator at least includes a permanent magnet structure 11 with an annular inner surface and a magnetic conductive component 12 for transmitting the magnetic field of the permanent magnet structure to the rotor, and the magnetic conductive component 12, the permanent magnet structure 11, and the magnetic conductive part 21 form a main magnetic flux path. The stator 1 is provided with a plurality of adjustable ferromagnetic sheets 13, the ferromagnetic sheets and the permanent magnet structure form a bypass magnetic flux path, and / or the ferromagnetic sheets and the permanent magnet structure and the magnetic conductive component form a bypass magnetic flux path; the magnetic field intensity conducted by the magnetic conductive component is regulated by adjusting the number of ferromagnetic sheets. With such a structural design, the traditional current-regulated magnetic field method is abandoned, and the physical regulation mechanism of the ferromagnetic sheets is adopted instead. The traditional method requires continuous power supply to maintain the magnetic field strength, while the embodiment shown in the present invention achieves precise control of the suspension height by directly adjusting the physical configuration of the permanent magnet magnetic field, without relying on external power, thereby greatly reducing energy consumption. In addition, this physical regulation method generates almost no additional heat during operation, effectively simplifying the complexity of the thermal management system. Compared with the common coil heating problem in traditional current regulation systems, the embodiment shown in the present invention fundamentally avoids this problem, completely eliminating the complex and costly heat dissipation and cooling devices, and further improving the overall performance and reliability of the system.

[0032] In this embodiment, the magnetic field strength conducted by the magnetic conductive component is regulated by adjusting the number of ferromagnetic sheets, thereby adjusting the suspension height of the rotor 2 relative to the stator 1. The embodiment shown in the present invention effectively solves the problem of magnetic field strength differences that are difficult to avoid in the manufacturing process of permanent magnets by adjusting the ferromagnetic sheets. The consistency of the system and the interchangeability between batches are significantly improved. Specifically, even in the face of different batches of permanent magnets, by adjusting the number of ferromagnetic sheets, it is possible to ensure that the magnetic field strength of each system reaches a highly unified standard. This not only eliminates the performance fluctuations caused by differences in permanent magnets, but also enables seamless replacement between systems, greatly improving the flexibility and maintainability of the system. Compared with the traditional current regulation system, the physical magnetic field regulation method of the embodiment shown in the present invention does not require complex current regulation of the permanent magnets in each system, but can achieve high consistency and interchangeability between batches through simple and precise physical adjustment means. This feature not only reduces the complexity and cost of the system, but also significantly improves the long-term stability and reliability of the system.

[0033] It should be noted that the permanent magnet structure 11 has two structural forms, one is composed of a single permanent magnet 111 with an annular inner surface, which is used for uniform magnetic field distribution to ensure that the rotor is suspended at the designed height. The other is to form a permanent magnet structure with an annular inner surface by evenly arranging a number of permanent magnet units 112 along the circumferential direction. Any permanent magnet unit 112 includes a number of permanent magnets 111 with the same magnetic pole direction, and a first magnetic conductive plate 1121 that is connected to the magnetic pole at one end of the permanent magnet and a second magnetic conductive plate 1122 that is connected to the magnetic pole at the other end of the permanent magnet. This structural design can be flexibly adjusted according to specific application requirements. In this embodiment, the second structural mode is adopted, and four permanent magnet units 112 are evenly arranged along the circumferential direction to form a permanent magnet structure 11. Each permanent magnet unit is between the first magnetic conductive plate 1121 and the second magnetic conductive plate 1122, and four permanent magnets 111 are evenly arranged along the tangential direction of the circumference to ensure that the magnetic field acts evenly on the rotor to form a stable suspension force field.

[0034] In this embodiment, the magnetic field strength of the permanent magnet structure 11 acting on the rotor is initially set to be higher than the system design requirement, leaving room for subsequent magnetic field strength adjustment.

[0035] like Figure 1 , Figure 2 and Figure 3 As shown, the magnetic conductive component 12 includes a first silicon steel plate 121 and a second silicon steel plate 122 adapted to the magnetic poles at both ends of the permanent magnet structure 11. The silicon steel plate has an extremely high magnetic permeability and can effectively conduct the magnetic field generated by the permanent magnet structure 11. The magnetic field generated by the permanent magnet structure is conducted to the rotor 2 through the first silicon steel plate 121 and the second silicon steel plate 122, thereby avoiding leakage or uneven distribution of the magnetic field and ensuring the stability and efficiency of the system magnetic field.

[0036] The outer surface of the rotor 2 is provided with a magnetic conductive portion 21, which is matched with the first silicon steel plate and the second silicon steel plate at one end away from the permanent magnet structure. The permanent magnet structure 11, the first silicon steel plate 121, the magnetic conductive portion 21 and the second silicon steel plate 122 form a main magnetic flux path 14.

[0037] In this embodiment, the four magnetic conductive components 12 are respectively located at the connection points of the four permanent magnet units 112; one end of the first silicon steel plate 121 of the magnetic conductive component is connected to the first magnetic conductive plate 1121 of the permanent magnet unit 112, and the other end is connected to the first magnetic conductive plate 1121 of the adjacent permanent magnet unit 112; one end of the second silicon steel plate 122 of the magnetic conductive component is connected to the second magnetic conductive plate 1122 of the permanent magnet unit 112, and the other end is connected to the second magnetic conductive plate 1122 of the adjacent permanent magnet unit 112.

[0038] It should be noted that in both structural forms of the permanent magnet structure 11 , the ferromagnetic sheet 13 can be attached to the outer surface of the permanent magnet 111 by magnetic attraction or adhesion, and the ferromagnetic sheet 13 and the permanent magnet form a first bypass magnetic flux path 17 .

[0039] There are two structural forms of the permanent magnet structure 11. The ferromagnetic sheet 13 is detachably connected between the first silicon steel plate 121 and the second silicon steel plate 122 through slots, threaded holes, etc. set on the first silicon steel plate 121 and the second silicon steel plate 122. The permanent magnet structure, the first silicon steel plate, the ferromagnetic sheet and the second silicon steel plate form a third bypass magnetic flux path 16.

[0040] The permanent magnet structure 11 is formed by evenly arranging a number of permanent magnet units 112 along the circumferential direction to form a permanent magnet structure with an annular inner surface. The ferromagnetic sheet 13 is detachably connected between the first magnetic conductive plate 1121 and the second magnetic conductive plate 1122 through slots, threaded holes, etc. set on the first magnetic conductive plate 1121 and the second magnetic conductive plate 1122. The ferromagnetic sheet 13, the permanent magnet, the first magnetic conductive plate and the second magnetic conductive plate form a second bypass magnetic flux path 15.

[0041] In this embodiment, Figure 1 , Figure 3 and Figure 4 The ferromagnetic sheet 13 can form a bypass magnetic flux in three ways. One is to adhere to the outer surface of the permanent magnet 111 by magnetic attraction, and the ferromagnetic sheet 13 and the permanent magnet form a first bypass magnetic flux path 17; the second is to be detachably connected between the first magnetic conductive plate 1121 and the second magnetic conductive plate 1122, and the ferromagnetic sheet 13, the permanent magnet, the first magnetic conductive plate and the second magnetic conductive plate form a second bypass magnetic flux path 15; the third is to be detachably connected between the first silicon steel plate 121 and the second silicon steel plate 122, and the permanent magnet structure, the first silicon steel plate, the ferromagnetic sheet and the second silicon steel plate form a third bypass magnetic flux path 16.

[0042] It should be noted that any ferromagnetic sheet 13 can be connected to the permanent magnet 111 by magnetic attraction or adhesion to form a detachable connection with the permanent magnet structure 11. It is also possible to provide slots or threaded holes on the first magnetic conductive plate 1121 and the second magnetic conductive plate 1122 of the permanent magnet unit 112, so that any ferromagnetic sheet 13 can be detachably connected to the permanent magnet structure 11 by mechanical connection methods such as slots or threaded holes. It is also possible to provide slots or threaded holes on the first silicon steel plate 121 and the second silicon steel plate 122 of the magnetic conductive component 12, so that any ferromagnetic sheet 13 can be detachably connected between the first silicon steel plate 121 and the second silicon steel plate 122 by mechanical connection methods such as slots or threaded holes.

[0043] The embodiments of the present invention are as follows: Figure 1 and Figure 3 As shown, the ferromagnetic sheet 13 is attached to the outer surface of the permanent magnet 111 by magnetic attraction. The main magnetic flux is emitted from the permanent magnet 111, and is transmitted to the magnetic conductive part 21 of the rotor 2 through the magnetic conductive effect of the first silicon steel plate connected to the first magnetic conductive plate 1121 and the second silicon steel plate connected to the second magnetic conductive plate 1122, thereby forming a stable magnetic field to keep the rotor suspended. The ferromagnetic sheet 13 is attached to the outer surface of the permanent magnet 111, and the main magnetic flux emitted from the permanent magnet 111 is partially guided away from the main magnetic flux path to the first bypass magnetic flux path under the magnetic conductive effect of the ferromagnetic sheet 13, thereby reducing the magnetic field strength acting on the rotor 2. With such a structural design, the magnetic field strength can be controlled by manually adjusting the number of ferromagnetic sheets, and the operation is simple and intuitive. Compared with traditional technologies that rely on complex electronic control systems, the embodiments shown in the present invention do not need to rely on complex control algorithms and precision circuits. On the one hand, it greatly reduces the operating difficulty and system complexity, lowers the technical threshold for operation and maintenance, and makes the system easier to manage and maintain; on the other hand, it significantly improves the reliability of the system, does not require frequent use of electronic components for adjustment, reduces the failure rate of the system, and extends the service life of the equipment.

[0044] The material of the ferromagnetic sheet includes one or a combination of silicon steel sheet, iron-nickel alloy, iron-aluminum alloy, iron-cobalt alloy or amorphous alloy.

[0045] The thickness of the ferromagnetic sheet is 0.1mm-2mm. This design not only ensures the fineness of the adjustment, but also perfectly adapts to the control requirements of high-precision suspension height. The ultra-thin nature of the ferromagnetic sheet gives the adjustment process extremely high sensitivity and accuracy, allowing each adjustment to be made in small and accurate steps, making it easy to fine-tune the suspension height. This design flexibility means that the system can be personalized for suspension height settings based on different application scenarios and specific performance requirements.

[0046] like Figure 5 As shown, the magnetic suspension turntable with adjustable rotor suspension height in this embodiment further includes a displacement sensor 3 , which is installed on the stator 1 to obtain the suspension height of the rotor 2 relative to the stator.

[0047] Preferably, it further comprises a substrate 4 fixedly connected to the stator 1 and arranged horizontally, and the displacement sensor is mounted on the stator 1 through the substrate.

[0048] Embodiment 2 This embodiment provides a method for adjusting the rotor suspension height by using a magnetic suspension turntable as described above, such as Figure 6 As shown, the following steps are included: Step S1, setting preset parameters, wherein the preset parameters include a range of the suspension height of the rotor 2 relative to the stator 1 under the condition of satisfying interchangeability.

[0049] Step S2, starting the magnetic suspension turntable and obtaining the suspension height of the rotor 2 relative to the stator 1.

[0050] After the magnetic levitation turntable is started, the levitation height of the rotor relative to the stator is detected by a displacement sensor or a special height calibration tool.

[0051] Step S3, based on the obtained suspension height, the state of the stator is judged by preset parameters. If the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment is completed. Otherwise, the stator does not meet the interchangeability condition and the number of ferromagnetic sheets is adjusted until the suspension height is within the preset parameter range. Specifically, the steps are as follows: Step S301, based on the obtained suspension height, the state of the stator is judged through preset parameters. If the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment is completed; if the suspension height is greater than the maximum value of the preset parameter range, step S302 is performed; if the suspension height is less than the minimum value of the preset parameter range, step S303 is performed.

[0052] Step S302, increasing the number of ferromagnetic sheets, making the rotor 2 move axially along the annular inner surface of the permanent magnet structure close to the stator 1, reducing the levitation height of the rotor relative to the stator, and making the levitation height within the range of preset parameters.

[0053] Specifically, a ferromagnetic sheet is attached to the outer side or side of the permanent magnet 111 to guide more magnetic flux into the first bypass magnetic flux path. This part of the magnetic flux passes through the magnetic conductivity of the ferromagnetic sheet, but it no longer acts on the rotor. As the magnetic flux in the first bypass path increases, the magnetic field strength in the main magnetic flux path decreases, the magnetic force acting on the rotor decreases, and the rotor's suspension height decreases accordingly.

[0054] Step S303, reducing the number of ferromagnetic sheets, causing the rotor 2 to move away from the stator 1 along the axial direction of the annular inner surface of the permanent magnet structure, increasing the levitation height of the rotor relative to the stator, and making the levitation height within a preset parameter range.

[0055] Specifically, some ferromagnetic sheets are removed to allow more magnetic flux to re-enter the main magnetic flux path. Through the magnetic conduction of the first silicon steel plate and the second silicon steel plate, the magnetic field strength in the main magnetic flux is enhanced, and the magnetic field force acting on the rotor is increased, thereby increasing the rotor's suspension height.

[0056] In short, the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A magnetic suspension turntable with adjustable rotor suspension height, comprising at least a stator (1) and a rotor (2), wherein the outer surface of the rotor (2) is provided with a magnetic conductive portion (21), the stator at least comprising a permanent magnet structure (11) having an annular inner surface and a magnetic conductive component (12) for conducting the magnetic field of the permanent magnet structure to the rotor, the magnetic conductive component (12), the permanent magnet structure and the magnetic conductive portion forming a main magnetic flux path, characterized in that: The stator (1) is provided with a plurality of adjustable numbers of ferromagnetic sheets (13), wherein the ferromagnetic sheets and the permanent magnet structure form a bypass magnetic flux path, and / or the ferromagnetic sheets and the permanent magnet structure and the magnetic conductive component form a bypass magnetic flux path; by adjusting the number of the ferromagnetic sheets, the intensity of the magnetic field conducted by the magnetic conductive component is regulated, thereby adjusting the suspension height of the rotor (2) relative to the stator (1).

2. A magnetic suspension turntable with adjustable rotor suspension height according to claim 1, characterized in that: The thickness of the ferromagnetic sheet (13) is 0.1 mm to 2 mm.

3. A magnetic suspension turntable with adjustable rotor suspension height according to claim 1, characterized in that: The material of the ferromagnetic thin sheet (13) includes one or a combination of silicon steel sheet, iron-nickel alloy, iron-aluminum alloy, iron-cobalt alloy or amorphous alloy.

4. A magnetic suspension turntable with adjustable rotor suspension height according to any one of claims 1 to 3, characterized in that: The magnetic conductive component (12) comprises at least a first silicon steel plate (121) and a second silicon steel plate (122) respectively adapted to the magnetic poles at both ends of the permanent magnet structure (11); The permanent magnet structure (11), the first silicon steel plate (121), the magnetic conductive portion (21) and the second silicon steel plate (122) form a main magnetic flux path (14).

5. A magnetic suspension turntable with adjustable rotor suspension height according to claim 4, characterized in that: The permanent magnet structure (11) comprises a permanent magnet (111) having an annular inner surface; Alternatively, the permanent magnet structure (11) is formed by a plurality of permanent magnet units (112) arranged evenly along a circumferential direction; any of the permanent magnet units (112) comprises a plurality of permanent magnets (111) having the same magnetic pole direction, a first magnetic conductive plate (1121) conductive to the magnetic pole at one end of the permanent magnet, and a second magnetic conductive plate (1122) conductive to the magnetic pole at the other end of the permanent magnet.

6. A magnetic suspension turntable with adjustable rotor suspension height according to claim 5, characterized in that: The ferromagnetic sheet (13) is adhered to the outer surface of the permanent magnet (111) by magnetic attraction, and the ferromagnetic sheet (13) and the permanent magnet form a first bypass magnetic flux path (17).

7. A magnetic suspension turntable with adjustable rotor suspension height according to claim 5, characterized in that: The ferromagnetic sheet (13) is detachably connected between the first magnetic conductive plate (1121) and the second magnetic conductive plate (1122), and the ferromagnetic sheet (13), the permanent magnet, the first magnetic conductive plate and the second magnetic conductive plate form a second bypass magnetic flux path (15); Alternatively, the ferromagnetic thin sheet (13) is detachably connected between the first silicon steel plate (121) and the second silicon steel plate (122), and the permanent magnet structure, the first silicon steel plate, the ferromagnetic thin sheet and the second silicon steel plate form a third bypass magnetic flux path (16).

8. A magnetic suspension turntable with adjustable rotor suspension height according to any one of claims 1-3 or 5-7, characterized in that: It also comprises a displacement sensor (3), which is mounted on the stator (1) and is used to obtain the suspension height of the rotor (2) relative to the stator.

9. A method for adjusting the rotor suspension height of a magnetic suspension turntable according to any one of claims 1 to 8, characterized in that: The steps include: Setting preset parameters, the preset parameters including a range of a suspension height of the rotor (2) relative to the stator (1) when interchangeability is satisfied; Starting the magnetic suspension turntable and obtaining the suspension height of the rotor (2) relative to the stator (1); Based on the obtained suspension height, the state of the stator is judged by preset parameters; if the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment is completed; otherwise, the stator does not meet the interchangeability condition and the number of the ferromagnetic sheets (13) is adjusted until the suspension height is within the preset parameter range.

10. The method for adjusting the rotor suspension height of a magnetic suspension turntable according to claim 9, characterized in that: Based on the obtained suspension height, the state of the stator is judged by preset parameters. If the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment is completed. Otherwise, the stator does not meet the interchangeability condition and the number of the ferromagnetic sheets (13) is adjusted until the suspension height is within the preset parameter range. Specifically, the following steps are included: Step S301, judging the state of the stator based on the obtained suspension height and preset parameters, if the suspension height is within the preset parameter range, the stator meets the interchangeability condition and the adjustment ends; If the levitation height is greater than the maximum value of the preset parameter range, proceed to step S302; if the levitation height is less than the minimum value of the preset parameter range, proceed to step S303; Step S302, increasing the number of the ferromagnetic sheets, so that the rotor (2) moves axially along the annular inner surface of the permanent magnet structure toward the stator (1), and reducing the levitation height of the rotor relative to the stator, so that the levitation height is within the range of the preset parameters; Step S303, reducing the number of the ferromagnetic sheets, causing the rotor (2) to move away from the stator (1) along the axial direction of the annular inner surface of the permanent magnet structure, increasing the levitation height of the rotor relative to the stator, and causing the levitation height to be within the range of the preset parameters.

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