MTS high-precision rapid evaporation device

Abstract

The MTS high-precision rapid evaporation device comprises an MTS storage tank, a liquid outlet pipeline, a gas supplementing pipeline and a vaporized gas input pipeline, a liquid inlet of the liquid outlet pipeline is formed in the bottom of the MTS storage tank, and a first control valve, a filter, an MTS flowmeter, a regulating valve, a vaporizer, an evaporator and a second control valve are sequentially arranged on the liquid outlet pipeline; and a third control valve, a pressure reducing valve, a fourth control valve and a vaporized gas flow control meter are sequentially arranged on the vaporized gas input pipeline. According to the device, the vaporized gas provided by the gas supplementing pipeline is used as a power source to pressurize the MTS storage tank, solid impurities are filtered through the filter, the MTS flow is adjusted through the liquid flow controller composed of the MTS flowmeter and the adjusting valve, and the vaporized gas of the vaporized gas input pipeline is input into the vaporizer to atomize the MTS liquid, so that the MTS liquid is atomized. Liquid is completely evaporated through heating of the evaporator, so that the MTS supply flow is automatically controlled, and high-precision and high-intelligence quantitative MTS supply is achieved.

Description

Technical Field

[0001] The present invention relates to the field of evaporation technology, and in particular to an MTS high-precision rapid evaporation device used for various silicon carbide deposition furnaces and fluidized bed equipment. Background Art

[0002] In the silicon carbide vapor deposition process, MTS (trichloromethylsilane) is a key reaction raw material. The precise control of its flow rate is a key factor in determining the success of the process, which directly affects the process effect and the success or failure of the product.

[0003] As a highly corrosive and volatile liquid, MTS will be directly damaged or have a very short life if it is treated with a traditional thermal mass flowmeter. All traditional flow control methods use the bubbling method, which converts liquid MTS into gas by heating, and calculates its flow rate by weighing the remaining material through a timed comparison method. However, there are the following disadvantages: 1. There are a large number of pipes on the MTS tank, which seriously affects the accuracy of weighing. 2. The weighing method cannot measure and control in real time, and the flow rate can only be calculated by comparing the weight changes in a fixed period. 3. MTS heating requires heating the entire tank, which requires a lot of power for heating and wastes electricity. 4. When the MTS tank is enlarged, the scale range needs to be increased, and its progress cannot be guaranteed. 5. Due to the slow heating response, the weighing is affected by external connections such as pipes, and the change cycle is long, and the temperature and weight closed-loop control automatic adjustment cannot be achieved. Summary of the invention

[0004] In order to overcome the deficiencies of the prior art, the present invention provides an MTS high-precision rapid evaporation device to solve the above-mentioned traditional problems.

[0005] The present invention is implemented by the following technical solutions:

[0006] A MTS high-precision rapid evaporation device comprises an MTS storage tank, a liquid outlet pipeline connected to the MTS storage tank, an air supply pipeline and a vaporized gas input pipeline connected to the liquid outlet pipeline; the liquid inlet of the liquid outlet pipeline is arranged at the bottom of the MTS storage tank, and the liquid outlet pipeline is sequentially provided with a first control valve, a filter, an MTS flow meter, a regulating valve, a vaporizer, an evaporator and a second control valve; the vaporized gas input pipeline is sequentially provided with a third control valve, a pressure reducing valve, a fourth control valve and a vaporized gas flow controller, and the outlet of the vaporized gas flow controller is connected to the vaporizer; the air inlet end of the air supply pipeline is connected to the outlet of the pressure reducing valve, the air outlet end of the air supply pipeline is connected to the top of the MTS storage tank, and the air supply pipeline is provided with a fifth control valve.

[0007] Preferably, the MTS flow meter is a Coriolis liquid flow meter.

[0008] Preferably, the regulating valve is an automatic valve with a regulating function.

[0009] Preferably, the automatic valve with regulating function is one of a V-shaped regulating ball valve, a sleeve regulating valve and a proportional valve.

[0010] Preferably, a heating coil is provided in the evaporator, and a heating medium is passed through the heating coil.

[0011] Preferably, the heating medium is one of hot water, thermal oil and refrigerant.

[0012] Preferably, the gas inputted by the vaporized gas input pipeline is hydrogen.

[0013] Preferably, a liquid level gauge is provided on the side of the MTS storage tank, a drainage pipeline is provided on the top of the MTS storage tank, and a drainage valve is provided on the drainage pipeline; a pressure transmitter and a liquid adding pipeline are provided on the top of the MTS storage tank, and a liquid adding control valve is provided on the liquid adding pipeline.

[0014] Preferably, the MTS high-precision rapid evaporation device also includes a purge pipeline, the air inlet end of the purge pipeline is connected to the outlet of the pressure reducing valve, the air outlet end of the purge pipeline is connected to the liquid inlet end of the filter, and a sixth control valve is provided on the purge pipeline.

[0015] Preferably, the MTS high-precision rapid evaporation device further comprises an exhaust pipeline connected to the top of the MTS storage tank, and an exhaust valve is provided on the exhaust pipeline.

[0016] Preferably, the MTS high-precision rapid evaporation device further comprises a blasting line connected to the top of the MTS storage tank, the blasting line is provided with a blasting disc, and the gas outlet end of the blasting line is connected to the tail end of the exhaust line.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] The MTS high-precision rapid evaporation device of the present invention uses the vaporized gas provided by the gas supply pipeline as a power source to pressurize the MTS storage tank. The MTS liquid in the MTS storage tank is pressed out of the tank body through the liquid outlet pipeline by the gas pressure, and then the solid impurities are filtered through the filter. Then, the MTS flow rate is automatically adjusted in real time according to the set value through a liquid flow controller with PID control composed of an MTS flow meter and a regulating valve. Then, the MTS liquid is atomized by inputting the vaporized gas of the vaporized gas input pipeline into the vaporizer. Finally, the liquid is completely evaporated by heating the evaporator to realize automatic control of the MTS supply flow rate and realize high-precision, high-intelligent quantitative supply of MTS. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1It is a process flow chart of the MTS high-precision rapid evaporation device of the present invention.

[0020] In the figure: 10, MTS storage tank; 20, liquid outlet pipeline; 21, filter; 22, MTS flow meter; 23, regulating valve; 24, vaporizer; 25, evaporator; 30, air supply pipeline; 40, vaporized gas input pipeline; 41, pressure reducing valve; 42, vaporized gas flow controller; 50, purge pipeline; 60, exhaust pipeline; 70, blasting pipeline. DETAILED DESCRIPTION

[0021] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0022] In the description of the present invention, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0023] In the description of the present invention, it should be understood that when an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be intermediate elements at the same time. On the contrary, when an element is said to be "directly" connected to another element, there are no intermediate elements.

[0024] See also Figure 1, is an MTS high-precision rapid evaporation device of a preferred embodiment of the present invention, which is used to solve the problem that the MTS flow rate cannot be accurately controlled in the actual process. Specifically, the MTS high-precision rapid evaporation device includes an MTS storage tank 10, a liquid outlet pipeline 20 connected to the MTS storage tank 10, a gas supply pipeline 30 and a vaporized gas input pipeline 40 connected to the liquid outlet pipeline 20; the liquid inlet of the liquid outlet pipeline 20 is arranged at the bottom of the MTS storage tank 10, and the first control valve, the filter 21 are arranged on the liquid outlet pipeline 20 in sequence , MTS flowmeter 22, regulating valve 23, vaporizer 24, evaporator 25 and second control valve; the vaporized gas input pipeline 40 is sequentially provided with a third control valve, a pressure reducing valve 41, a fourth control valve and a vaporized gas flow controller 42, the outlet of the vaporized gas flow controller 42 is connected to the vaporizer 24; the air inlet end of the air supply pipeline 30 is connected to the outlet of the pressure reducing valve 41, the air outlet end of the air supply pipeline 30 is connected to the top of the MTS storage tank 10, and the air supply pipeline 30 is provided with a fifth control valve.

[0025] The above-mentioned MTS high-precision rapid evaporation device uses the vaporized gas provided by the air supply pipeline 30 as a power source to pressurize the MTS storage tank 10. Through the gas pressure, the MTS liquid in the MTS storage tank 10 is pressed out of the tank body through the liquid outlet pipeline 20, and then the solid impurities are filtered through the filter 21. Then, the liquid flow controller with PID control composed of the MTS flow meter 22 and the regulating valve 23 automatically adjusts the MTS flow in real time according to the set value. Then, the vaporized gas of the vaporized gas input pipeline 40 is input into the vaporizer 24 to atomize the MTS liquid. Finally, the liquid is completely evaporated by heating through the evaporator 25, so as to realize automatic control of the MTS supply flow and realize high-precision, high-intelligent quantitative supply of MTS.

[0026] In this embodiment, the MTS flowmeter 22 is a Coriolis liquid flowmeter. A Coriolis liquid flowmeter is a device that directly measures mass flow by using the principle that a Coriolis force proportional to the mass flow is generated when a fluid flows in a vibrating pipe. The device is composed of a flow detection element and a converter. The Coriolis liquid flowmeter achieves direct measurement of mass flow and has the characteristics of high precision and the ability to measure multiple media and multiple process parameters.

[0027] In this embodiment, the regulating valve 23 is an automatic valve with a regulating function. In one embodiment, the automatic valve with a regulating function is one of a V-shaped regulating ball valve, a sleeve regulating valve 23, and a proportional valve.

[0028] In this embodiment, a heating coil (not shown) is provided in the evaporator 25, and a heating medium is passed into the heating coil to heat the MTS liquid in the evaporator 25. Optionally, the heating medium is one of hot water, heat medium oil, and refrigerant. In other embodiments, the corresponding heating medium can be selected according to the specific process, which will not be described in detail here.

[0029] In this embodiment, the gas inputted by the vaporization gas input pipeline 40 is hydrogen. In the silicon carbide vapor deposition process, hydrogen and MTS are two necessary gases. The MTS liquid is vaporized by hydrogen and the ratio can be adjusted in advance to reach the amount required by the process.

[0030] Optionally, a liquid level gauge is provided on the side of the MTS storage tank 10, a drain line is provided on the top of the MTS storage tank 10, and a drain valve is provided on the drain line; a pressure transmitter and a liquid adding line are provided on the top of the MTS storage tank 10, and a liquid adding control valve is provided on the liquid adding line.

[0031] The MTS high-precision rapid evaporation device also includes a purge pipeline 50, the air inlet end of the purge pipeline 50 is connected to the outlet of the pressure reducing valve 41, the air outlet end of the purge pipeline 50 is connected to the liquid inlet end of the filter 21, and a sixth control valve is provided on the purge pipeline 50.

[0032] The MTS high-precision rapid evaporation device further includes an exhaust pipeline 60 connected to the top of the MTS storage tank 10 , and an exhaust valve is disposed on the exhaust pipeline 60 .

[0033] The MTS high-precision rapid evaporation device further includes a bursting line 70 connected to the top of the MTS storage tank 10 , on which a bursting piece is provided, and the gas outlet end of the bursting line 70 is connected to the tail end of the exhaust line 60 .

[0034] In other embodiments, the MTS high-precision rapid evaporation device also includes a control system (not shown), which is electrically connected to all control valves, MTS flowmeter 22, regulating valve 23, evaporator 25, pressure reducing valve 41, vaporized gas flow controller 42 and other related instruments and equipment for automatic control of the device. The system also has a filter 21, pipeline, liquid flowmeter purge function, and a tank liquid level automatic alarm function.

[0035] The specific operation of this device is:

[0036] The device controls the pressure of the gas source through the pressure reducing valve 41 to maintain the pressure of the pipeline and the storage tank at a constant pressure, opens the exhaust valve, adds the MTS liquid into the storage tank through the liquid filling port, closes the manual valve and the exhaust valve after reaching a certain liquid level, and opens the gas supply valve to inject gas into the storage tank. After the pressure stabilizes, the evaporator 25 and the pipeline are started to heat to the set temperature, and the vaporized gas flow controller 42 is started. After the gas flow stabilizes, the liquid pipeline is opened, and the MTS liquid enters the MTS flow meter 22 after being filtered, and the flow is precisely controlled through the regulating valve 23. The liquid enters the evaporator 25 after being vaporized in the vaporizer 24, and is completely vaporized. Then it enters the deposition chamber to complete the deposition process.

[0037] After the process is completed, the filter 21, MTS flow meter 22, regulating valve 23, vaporizer 24, evaporator 25 and pipeline are purged using the purge pipeline to reduce component corrosion and effectively increase the service life of the equipment. At the same time, the storage tank is equipped with a bursting disc to effectively protect the safety of the tank body, and the liquid level meter can compare the liquid flow in real time to improve the safety and stability of the equipment. This device can realize PID closed-loop control through the regulating valve 23 and the flow meter, automatically control the MTS supply flow, and realize high-precision, high-intelligence quantitative supply of MTS. While improving the flow control accuracy, it also reduces power loss and can achieve automation.

[0038] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0039] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. An MTS high-precision rapid evaporation device, characterized in that: It includes an MTS tank, a liquid outlet pipeline connected to the MTS tank, an air supply pipeline and a vaporized gas input pipeline connected to the liquid outlet pipeline; the liquid inlet of the liquid outlet pipeline is arranged at the bottom of the MTS tank, and the liquid outlet pipeline is sequentially arranged with a first control valve, a filter, an MTS flow meter, a regulating valve, a vaporizer, an evaporator and a second control valve; the vaporized gas input pipeline is sequentially arranged with a third control valve, a pressure reducing valve, a fourth control valve and a vaporized gas flow controller, and the outlet of the vaporized gas flow controller is connected to the vaporizer; the air inlet end of the air supply pipeline is connected to the outlet of the pressure reducing valve, the air outlet end of the air supply pipeline is connected to the top of the MTS tank, and the air supply pipeline is provided with a fifth control valve.

2. The MTS high-precision rapid evaporation device according to claim 1, characterized in that: The MTS flow meter is a Coriolis liquid flow meter.

3. The MTS high-precision rapid evaporation device according to claim 1, characterized in that: The regulating valve is an automatic valve with a regulating function.

4. The MTS high-precision rapid evaporation device according to claim 3, characterized in that: The automatic valve with regulating function is one of a V-shaped regulating ball valve, a sleeve regulating valve and a proportional valve.

5. The MTS high-precision rapid evaporation device according to claim 1, characterized in that: A heating coil is arranged in the evaporator, and a heating medium is introduced into the heating coil.

6. The MTS high-precision rapid evaporation device according to claim 5, characterized in that: The heating medium is one of hot water, heating oil and cooling medium.

7. The MTS high-precision rapid evaporation device according to claim 1, characterized in that: The gas inputted by the vaporized gas input pipeline is hydrogen.

8. The MTS high-precision rapid evaporation device according to claim 1, characterized in that: A liquid level gauge is provided on the side of the MTS storage tank, a liquid discharge pipeline is provided on the top of the MTS storage tank, and a liquid discharge valve is provided on the liquid discharge pipeline; a pressure transmitter and a liquid filling pipeline are provided on the top of the MTS storage tank, and a liquid filling control valve is provided on the liquid filling pipeline.

9. The MTS high-precision rapid evaporation device according to claim 1, characterized in that: The MTS high-precision rapid evaporation device also includes a purge pipeline, the air inlet end of the purge pipeline is connected to the outlet of the pressure reducing valve, the air outlet end of the purge pipeline is connected to the liquid inlet end of the filter, and a sixth control valve is provided on the purge pipeline.

10. The MTS high-precision rapid evaporation device according to claim 1, characterized in that: The MTS high-precision rapid evaporation device also includes an exhaust pipeline and a bursting pipeline connected to the top of the MTS storage tank, the exhaust pipeline is provided with an exhaust valve, the bursting pipeline is provided with a bursting piece, and the gas outlet end of the bursting pipeline is connected to the tail end of the exhaust pipeline.

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