Vacuum gauge matching circuit for measuring capacitance value by using double-pulse signal and measuring method

Abstract

The invention relates to a vacuum gauge matching circuit for measuring a capacitance value by using double pulse signals and a measurement method, belongs to the field of vacuum gauges, solves the problem of low measurement accuracy caused by reading drifting and temperature drifting in the prior art, and comprises a pulse signal generator, a signal amplification circuit and a signal processing module, wherein the pulse signal generator is used for generating pulse signals which are respectively connected to an annular electrode and a circular electrode of a fixed electrode of the vacuum gauge and connected to the signal processing module; the signal amplification circuit comprises a first signal amplifier and a second signal amplifier which are used for respectively obtaining electric signals on an annular electrode and a circular electrode of a fixed electrode of the vacuum gauge and respectively amplifying the obtained electric signals; and the signal processing module is used for processing the two paths of electric signals output by the signal amplification circuit and the pulse signal, and calculating the vacuum degree based on a processing result. Simple and accurate vacuum degree measurement is realized.

Description

Technical Field

[0001] The present invention relates to the field of vacuum gauge technology, and in particular to a vacuum gauge supporting circuit and a measuring method for measuring capacitance using a double pulse signal. Background Art

[0002] At present, the most common types of vacuum measurement products include resistance vacuum gauges, capacitance vacuum gauges, ionization vacuum gauges and MEMS vacuum gauges. Among these different types of vacuum measurement products, capacitance vacuum gauges basically use elastic strain diaphragms as pressure response components. Strain diaphragms can completely isolate the measuring device and circuit from the measured medium to play a protective role. Therefore, capacitance vacuum gauges are widely used in many fields.

[0003] The performance of the capacitance vacuum gauge mainly depends on the sensor part and the supporting small signal measurement circuit part. The two not only need to work independently, but more importantly, they need to be perfectly matched to achieve high-precision vacuum pressure measurement.

[0004] At present, the analog signal circuits of most capacitive vacuum gauges use diode bridge circuits. This circuit structure is relatively simple, but it is sensitive to temperature and has extremely high requirements for sensor matching. It is very easy for the sensor output to drift due to matching imbalance, affecting the accuracy of the vacuum gauge measurement. Summary of the invention

[0005] In view of the above analysis, an embodiment of the present invention aims to provide a vacuum gauge supporting circuit and a measurement method for measuring capacitance using a dual pulse signal, so as to solve the problem of low measurement accuracy caused by reading drift and temperature drift in existing measurement methods.

[0006] On the one hand, an embodiment of the present invention provides a vacuum gauge supporting circuit for measuring capacitance value using a double pulse signal, including: a pulse signal generator, a signal amplification circuit, and a signal processing module; wherein,

[0007] The pulse signal generator is used to generate a pulse signal, which is respectively connected to the annular electrode and the circular electrode of the vacuum gauge fixed electrode, and is connected to the signal processing module;

[0008] The signal amplification circuit includes a first signal amplifier and a second signal amplifier, which are used to respectively obtain the electrical signals on the annular electrode and the circular electrode of the vacuum gauge fixed electrode, and respectively amplify the obtained electrical signals;

[0009] The signal processing module is used to process the two electrical signals output by the signal amplification circuit and the pulse signal, and to calculate the vacuum degree based on the processing results.

[0010] Based on the further improvement of the above scheme, the signal processing module includes a signal alignment module, a noise reduction module, a Fourier transform module, a CNN feature extraction module and a trained BP neural network module connected in sequence; wherein,

[0011] The signal alignment module is used to compare the collected pulse signal with the two independently amplified electrical signals to achieve alignment of the two electrical signals;

[0012] The noise reduction module is used to remove noise and clutter from the two aligned electrical signals received;

[0013] The Fourier transform module is used to perform Fourier transform on the two input electrical signals respectively to obtain frequency domain information of the two electrical signals;

[0014] The CNN feature extraction module is used to extract features from the frequency domain information of the two electrical signals; then, the extracted feature information is normalized and concatenated to obtain a one-dimensional vector;

[0015] The trained BP neural network module is used to predict the vacuum degree based on the one-dimensional vector; when training the neural network, the vacuum degree of the environment where the vacuum gauge is located is obtained, and the one-dimensional vector obtained by processing the two signals output by the combined pulse signal and the signal amplification circuit is used as the training set, and the mean square error is used as the loss function.

[0016] Based on the further improvement of the above scheme, the pulse signal generator is used to generate three homologous synchronous pulse signals based on the set duty cycle, frequency, change rate and voltage peak value, and output them through the first output terminal, the second output terminal and the third output terminal respectively; wherein,

[0017] The first output end is connected to the annular electrode of the vacuum gauge fixed electrode;

[0018] The second output end is connected to the circular electrode of the vacuum gauge fixed electrode;

[0019] The third output terminal is connected to the signal processing module.

[0020] Based on the further improvement of the above solution, the signal amplification circuit includes a first operational amplifier, a second operational amplifier, a resistor R1, and a resistor R2; wherein,

[0021] The reverse input terminal of the first operational amplifier is connected to the annular electrode of the vacuum gauge fixed electrode, the output terminal is connected through the resistor R1, the forward input terminal is grounded, and the output terminal is connected to the first input terminal of the signal processing module;

[0022] The reverse input terminal of the second operational amplifier is connected to the circular electrode of the vacuum gauge fixed electrode, connected to the output terminal through the resistor R2, the forward input terminal is grounded, and the output terminal is connected to the second input terminal of the signal processing module.

[0023] On the other hand, an embodiment of the present invention provides a method for measuring a vacuum gauge supporting circuit for measuring capacitance using a double pulse signal, comprising:

[0024] The pulse signal is connected to the annular electrode, the circular electrode and the signal processing module of the vacuum gauge fixed electrode respectively, and the two electrodes of the vacuum gauge are charged and discharged at the same time;

[0025] Collecting electrical signals from the annular electrode and the circular electrode, and amplifying the collected electrical signals respectively;

[0026] The two amplified electrical signals are input into the signal processing module and combined with the pulse signals to calculate the vacuum degree.

[0027] Based on the further improvement of the above method, the pulse signal is output by a pulse signal generator and is a homologous synchronous pulse signal.

[0028] Based on the further improvement of the above method, the pulse signal includes:

[0029] The pulse signal is a continuous pulse signal;

[0030] The duty cycle of the pulse signal is 50%;

[0031] The pulse signal frequency is above 10Hz;

[0032] The change rate dv / dt of the rising and falling edges of the pulse signal is set to be consistent;

[0033] The peak voltage of the pulse signal is 1V to 5V.

[0034] Based on the further improvement of the above method, when the collected electrical signals are amplified respectively, the amplification factors are consistent.

[0035] Based on the further improvement of the above method, the collected electrical signals are amplified respectively, including:

[0036] Amplifying the collected electrical signal on the annular electrode of the fixed electrode of the vacuum gauge by using the first signal amplifier;

[0037] The second signal amplifier is used to amplify the collected electrical signal on the circular electrode of the fixed electrode of the vacuum gauge.

[0038] Based on the further improvement of the above method, the signal processing module includes a signal alignment module, a noise reduction module, a Fourier transform module, a CNN feature extraction module and a trained BP neural network module connected in sequence, wherein:

[0039] The signal alignment module is used to compare the collected pulse signal with the two independently amplified electrical signals to achieve alignment of the two electrical signals;

[0040] The noise reduction module is used to remove noise and clutter from the two aligned electrical signals received;

[0041] The Fourier transform module is used to perform Fourier transform on the two electrical signals output by the noise reduction module to obtain frequency domain information of the two electrical signals;

[0042] The CNN feature extraction module is used to extract features from the frequency domain information of the two electrical signals; then, the extracted feature information is normalized and concatenated to obtain a one-dimensional vector;

[0043] The trained BP neural network module is used to predict the vacuum degree based on the one-dimensional vector of the signal after Fourier transformation; when training the neural network, the vacuum degree of the environment where the vacuum gauge is located, the pulse signal, and the two signals output by the signal amplification circuit are used as training sets, and the mean square error is used as the loss function.

[0044] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects:

[0045] 1. The vacuum gauge supporting circuit and measuring method for measuring capacitance using a double pulse signal provided by the present invention avoid the problem that the diode bridge analog circuit used in the traditional capacitance vacuum gauge is too complicated, and avoids the problem that the diode bridge analog circuit is difficult to balance and thus causes reading drift, thereby enhancing the measurement accuracy;

[0046] 2. Solve the problem of output signal temperature drift due to temperature change and enhance the accuracy of measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] Figure 1 A circuit diagram of a vacuum gauge supporting circuit for measuring capacitance using a double pulse signal according to an embodiment of the present invention;

[0048] Figure 2 A schematic diagram of an amplifier circuit shown in an embodiment of the present invention;

[0049] Figure 3 A waveform diagram showing the charging and discharging of a capacitor by a pulse signal according to an embodiment of the present invention;

[0050] Figure 4The present invention is a flowchart of a method for measuring a vacuum gauge supporting circuit using a double pulse signal to measure capacitance value according to an embodiment of the present invention. DETAILED DESCRIPTION

[0051] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not used to limit the scope of the present invention.

[0052] A specific embodiment of the present invention discloses a vacuum gauge supporting circuit for measuring capacitance value using a double pulse signal, such as Figure 1 As shown, including:

[0053] Pulse signal generator, signal amplification circuit, signal processing module; wherein,

[0054] The pulse signal generator is used to generate a pulse signal, which is respectively connected to the annular electrode and the circular electrode of the vacuum gauge fixed electrode, and is connected to the signal processing module;

[0055] The signal amplification circuit includes a first signal amplifier and a second signal amplifier, which are used to respectively obtain the electrical signals on the annular electrode and the circular electrode of the vacuum gauge fixed electrode, and respectively amplify the obtained electrical signals;

[0056] The signal processing module is used to process the two electrical signals output by the signal amplification circuit and the pulse signal, and to calculate the vacuum degree based on the processing results.

[0057] It should be noted that the fixed electrode of the vacuum gauge of this embodiment adopts an inner and outer double electrode design, which can effectively reduce the impact of thermal expansion of parts on the electrode area and solve the problem of temperature drift of the output signal of the capacitive vacuum gauge due to temperature changes.

[0058] Specifically, the pulse signal generator is used to generate three channels of synchronous pulse signals of the same source based on the set duty cycle, frequency, change rate and voltage peak value, and output them through the first output terminal, the second output terminal and the third output terminal respectively; wherein,

[0059] The first output end is connected to the annular electrode of the vacuum gauge fixed electrode;

[0060] The second output end is connected to the circular electrode of the vacuum gauge fixed electrode;

[0061] The third output terminal is connected to the signal processing module.

[0062] It should be noted that the pulse signal generator can be implemented using a common analog LC oscillation circuit, or a dedicated amplifier can be used to directly obtain the oscillation signal, such as HA-5147 amplifier, 725, OP25, OP06, OP07, OP27, and OP37 amplifiers. The amplifier amplification factor can reach more than 10 times.

[0063] Specifically, the signal amplification circuit includes a first operational amplifier, a second operational amplifier, a resistor R1, and a resistor R2; wherein,

[0064] The reverse input terminal of the first operational amplifier is connected to the annular electrode of the vacuum gauge fixed electrode, the output terminal is connected through the resistor R1, the forward input terminal is grounded, and the output terminal is connected to the first input terminal of the signal processing module;

[0065] The reverse input terminal of the second operational amplifier is connected to the circular electrode of the vacuum gauge fixed electrode, connected to the output terminal through the resistor R2, the forward input terminal is grounded, and the output terminal is connected to the second input terminal of the signal processing module.

[0066] The specific operational amplifier connection is as follows Figure 2 As shown in the figure, the actual circuit design needs to consider the measurement range of capacitance. The inverting input of the operational amplifier inputs the signal to be amplified, the feedback resistor is connected between the inverting input and the output, the inverting input is grounded through an adjustable resistor, and decoupling capacitors are added to the positive and negative voltage inputs to filter out high-frequency noise and ripple caused by power supply fluctuations.

[0067] Specifically, the signal processing module includes a signal alignment module, a noise reduction module, a Fourier transform module, a CNN feature extraction module and a trained BP neural network module connected in sequence; wherein,

[0068] The signal alignment module is used to compare the collected pulse signal with the two independently amplified electrical signals to achieve alignment of the two electrical signals;

[0069] The noise reduction module is used to remove noise and clutter from the two aligned electrical signals received. Exemplarily, the noise reduction module uses a high-speed pulse signal averaging algorithm to reduce system noise, and performs nonlinear compensation adjustment and ambient temperature compensation algorithm implantation to improve measurement accuracy.

[0070] The Fourier transform module is used to perform Fourier transform on the two electrical signals output by the noise reduction module to obtain frequency domain information of the two electrical signals;

[0071] The CNN feature extraction module is used to extract features from the frequency domain information of the two electrical signals, wherein the extracted features include amplitude features, phase features and frequency features.

[0072] The amplitude feature in the frequency domain information represents the amplitude of the signal in the spectrum graph, reflecting the strength of the signal; the phase feature in the frequency domain information represents the relative phase of the signal in the spectrum graph, reflecting the phase offset and delay of the signal; the frequency feature in the frequency domain information represents the frequency component of the signal in the spectrum graph, reflecting the frequency distribution and characteristics of the signal.

[0073] Next, the extracted feature information is normalized and concatenated to obtain a one-dimensional vector;

[0074] The trained BP neural network module is used to predict the vacuum degree based on the one-dimensional vector; when training the neural network, the vacuum degree of the environment where the vacuum gauge is located is obtained, and the one-dimensional vector obtained by processing the two signals output by the combined pulse signal and the signal amplification circuit is used as the training set, and the mean square error is used as the loss function.

[0075] Specifically, another conventional vacuum gauge may be placed in the environment where the vacuum gauge is located to obtain the actual vacuum degree of the environment where the vacuum gauge is located.

[0076] Another specific embodiment of the present invention discloses a measurement method of a vacuum gauge supporting circuit for measuring capacitance value using a dual pulse signal. In the process of charging and discharging the electrodes in the vacuum gauge by continuous pulses, the pressure strain diaphragm of the vacuum gauge deforms as the pressure changes, causing the electrode spacing in the vacuum gauge to change, thereby causing the capacitance value on the electrode to change.

[0077] Specifically, if Figure 3 As shown, each time a pulse signal charges and discharges the electrode in the vacuum gauge, a changing capacitance value C and a corresponding pulse signal voltage U are obtained. It is necessary to ensure that the capacitance can enter the saturation state within the entire range to obtain the full charge and discharge current Imax. When the capacitance changes, Imax2 obtained by the pulse signal fully charging and discharging the capacitance will change. Based on Imax and Imax2, the change in capacitance on one electrode can be obtained; based on the change in capacitance on two electrodes, the vacuum degree can be obtained.

[0078] like Figure 4 As shown, the specific steps include:

[0079] S11: Connect the pulse signal to the annular electrode, circular electrode and signal processing module of the fixed electrode of the vacuum gauge respectively, and charge and discharge the two electrodes of the vacuum gauge at the same time; use a simple pulse signal to measure the amount of charge charged and discharged by the tiny capacitor, that is, the amount of charge flowing into and out of the capacitor.

[0080] It is worth noting that the pulse signal is output by a pulse signal generator and is a homologous synchronous pulse signal to avoid phase difference.

[0081] It should be noted that in order to ensure the response speed of the vacuum gauge, the pulse signal needs to meet the following conditions:

[0082] The pulse signal is a continuous pulse signal;

[0083] The duty cycle of the pulse signal is 50%;

[0084] In order to ensure the sampling speed and measurement response speed of the vacuum gauge, the pulse signal frequency is above 10Hz;

[0085] The change rate dv / dt of the rising and falling edges of the pulse signal is set to be consistent;

[0086] The voltage peak value of the pulse signal needs to refer to the capacitance range generated by the actual diaphragm deformation. The voltage peak value of the pulse signal is 1V to 5V.

[0087] S12: collecting electrical signals from the annular electrode and the circular electrode, and amplifying the collected electrical signals respectively, including:

[0088] Amplifying the collected electrical signal on the annular electrode of the fixed electrode of the vacuum gauge by using the first signal amplifier;

[0089] The second signal amplifier is used to amplify the collected electrical signal on the circular electrode of the fixed electrode of the vacuum gauge.

[0090] S13: Input the two amplified electrical signals into the signal processing module, and calculate the vacuum degree by combining the pulse signals.

[0091] Specifically, the signal processing module includes a noise reduction module, a Fourier transform module and a trained BP neural network module connected in sequence, wherein:

[0092] The signal alignment module is used to compare the simultaneously collected pulse signal with the two independently amplified electrical signals, locate the starting point of the electrical signal collection based on the time axis of the pulse signal, obtain the aligned electrical signal, and then compare and process the electrical signals in the same time area, which can eliminate the circuit delay problem and avoid the difference error caused by delay in the signal processing process.

[0093] The noise reduction module is used to remove noise and clutter from the two aligned electrical signals received; illustratively, the noise reduction module uses a high-speed pulse signal averaging algorithm to reduce system noise, and performs nonlinear compensation adjustment and ambient temperature compensation algorithm implantation to improve measurement accuracy;

[0094] In order to prevent the data from being too long, the two electrical signals output by the noise reduction module can be clipped at the same time, and the clipping length of each channel is equal; for example, the clipping length is 1 second;

[0095] The Fourier transform module is used to perform Fourier transform on the two input electrical signals respectively to obtain frequency domain information of the two electrical signals;

[0096] The CNN feature extraction module is used to extract features from the frequency domain information of the input signal. This solution uses the frequency domain information of the signal obtained by Fourier transform as the input of the CNN model, processes the amplitude, phase and frequency in the spectrum graph, and uses the extracted feature vector as the output, including: passing through the convolution layer, pooling layer and fully connected layer of the model. The specific extraction steps include:

[0097] The amplitude feature in the frequency domain information represents the amplitude of the signal in the spectrum graph, reflecting the strength of the signal; the phase feature in the frequency domain information represents the relative phase of the signal in the spectrum graph, reflecting the phase offset and delay of the signal; the frequency feature in the frequency domain information represents the frequency component of the signal in the spectrum graph, reflecting the frequency distribution and characteristics of the signal.

[0098] Next, the extracted feature vectors are normalized and concatenated to obtain a one-dimensional vector;

[0099] The one-dimensional vector is input into the trained BP neural network module to predict the vacuum degree based on the one-dimensional vector. Specifically, the connection relationship of the BP neural network is determined by weights and biases, the number of nodes in the input layer is equal to the dimension of the feature vector, and the neurons in the hidden layer and the output layer are connected to the nodes in the input layer through weights and biases.

[0100] The training of the BP neural network module includes: obtaining the vacuum degree of the environment where the vacuum gauge is located, and processing the one-dimensional vector obtained by combining the pulse signal and the two-way signal output by the signal amplification circuit as the training set; using the mean square error as the loss function; the training process is divided into forward propagation and back propagation, wherein the forward propagation includes the calculation of the weight and bias of the feature vector, and passing it to the output layer layer by layer to obtain the predicted value; the back propagation includes calculating the loss function according to the difference between the predicted value and the actual value, and adjusting the weight and bias. The back propagation process is iteratively performed until the neural network converges, and the training is completed when the loss function reaches an acceptable low value and no longer decreases significantly in subsequent training iterations.

[0101] Compared with the prior art, the vacuum gauge supporting circuit and measurement method for measuring capacitance values ​​using a dual pulse signal provided in this embodiment avoid the problem of the diode bridge analog circuit used in the traditional capacitance vacuum gauge being too complicated, and avoids the problem of the diode bridge analog circuit being difficult to balance, resulting in reading drift, thereby enhancing the measurement accuracy; solves the problem of output signal temperature drift due to temperature changes, thereby enhancing the measurement accuracy.

[0102] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A vacuum gauge supporting circuit for measuring capacitance using a double pulse signal, characterized in that: include: Pulse signal generator, signal amplification circuit, signal processing module; wherein, The pulse signal generator is used to generate a pulse signal, which is respectively connected to the annular electrode and the circular electrode of the vacuum gauge fixed electrode, and is connected to the signal processing module; The signal amplification circuit includes a first signal amplifier and a second signal amplifier, which are used to respectively obtain the electrical signals on the annular electrode and the circular electrode of the vacuum gauge fixed electrode, and respectively amplify the obtained electrical signals; The signal processing module is used to process the two electrical signals output by the signal amplification circuit and the pulse signal, and to calculate the vacuum degree based on the processing results.

2. The vacuum gauge supporting circuit for measuring capacitance using a double pulse signal according to claim 1, characterized in that: The signal processing module includes a signal alignment module, a noise reduction module, a Fourier transform module, a CNN feature extraction module and a trained BP neural network module connected in sequence; wherein, The signal alignment module is used to compare the collected pulse signal with the two independently amplified electrical signals to achieve alignment of the two electrical signals; The noise reduction module is used to remove noise and clutter from the two aligned electrical signals received; The Fourier transform module is used to perform Fourier transform on the two input electrical signals respectively to obtain frequency domain information of the two electrical signals; The CNN feature extraction module is used to extract features from the frequency domain information of the two electrical signals; then, the extracted feature information is normalized and concatenated to obtain a one-dimensional vector; The trained BP neural network module is used to predict the vacuum degree based on the one-dimensional vector; when training the neural network, the vacuum degree of the environment where the vacuum gauge is located is obtained, and the one-dimensional vector obtained by processing the two signals output by the combined pulse signal and the signal amplification circuit is used as the training set, and the mean square error is used as the loss function.

3. The vacuum gauge supporting circuit for measuring capacitance value by using double pulse signal according to claim 1 is characterized in that: The pulse signal generator is used to generate three-way synchronous pulse signals of the same source based on the set duty cycle, frequency, change rate and voltage peak value, and output them through the first output terminal, the second output terminal and the third output terminal respectively; wherein, The first output end is connected to the annular electrode of the vacuum gauge fixed electrode; The second output end is connected to the circular electrode of the vacuum gauge fixed electrode; The third output terminal is connected to the signal processing module.

4. The vacuum gauge supporting circuit for measuring capacitance value by using double pulse signal according to claim 1, characterized in that: The signal amplifying circuit includes a first operational amplifier, a second operational amplifier, a resistor R1, and a resistor R2; wherein, The reverse input terminal of the first operational amplifier is connected to the annular electrode of the vacuum gauge fixed electrode, the output terminal is connected through the resistor R1, the forward input terminal is grounded, and the output terminal is connected to the first input terminal of the signal processing module; The reverse input terminal of the second operational amplifier is connected to the circular electrode of the vacuum gauge fixed electrode, connected to the output terminal through the resistor R2, the forward input terminal is grounded, and the output terminal is connected to the second input terminal of the signal processing module.

5. A method for measuring a vacuum gauge supporting circuit for measuring capacitance using a double pulse signal, characterized in that: include: The pulse signal is connected to the annular electrode, the circular electrode and the signal processing module of the vacuum gauge fixed electrode respectively, and the two electrodes of the vacuum gauge are charged and discharged at the same time; Collecting electrical signals from the annular electrode and the circular electrode, and amplifying the collected electrical signals respectively; The two amplified electrical signals are input into the signal processing module and combined with the pulse signals to calculate the vacuum degree.

6. The method for measuring the vacuum gauge supporting circuit for measuring capacitance value by using double pulse signal according to claim 5, characterized in that: The pulse signal is output by a pulse signal generator and is a homologous synchronous pulse signal.

7. The method for measuring the vacuum gauge supporting circuit for measuring capacitance value by using double pulse signal according to claim 6, characterized in that: The pulse signal comprises: The pulse signal is a continuous pulse signal; The duty cycle of the pulse signal is 50%; The pulse signal frequency is above 10Hz; The change rate dv / dt of the rising and falling edges of the pulse signal is set to be consistent; The peak voltage of the pulse signal is 1V to 5V.

8. The method for measuring the vacuum gauge supporting circuit for measuring capacitance value by using double pulse signal according to claim 5, characterized in that: When the collected electrical signals are amplified respectively, the amplification factors are consistent.

9. The method for measuring the vacuum gauge supporting circuit for measuring capacitance value by using double pulse signal according to claim 5, characterized in that: The step of respectively amplifying the collected electrical signals comprises: Amplifying the collected electrical signal on the annular electrode of the fixed electrode of the vacuum gauge by using the first signal amplifier; The second signal amplifier is used to amplify the collected electrical signal on the circular electrode of the fixed electrode of the vacuum gauge.

10. The method for measuring the vacuum gauge supporting circuit for measuring capacitance value by using double pulse signal according to claim 5, characterized in that: The signal processing module includes a signal alignment module, a noise reduction module, a Fourier transform module, a CNN feature extraction module and a trained BP neural network module connected in sequence, wherein: The signal alignment module is used to compare the collected pulse signal with the two independently amplified electrical signals to achieve alignment of the two electrical signals; The noise reduction module is used to remove noise and clutter from the two aligned electrical signals received; The Fourier transform module is used to perform Fourier transform on the two electrical signals output by the noise reduction module to obtain frequency domain information of the two electrical signals; The CNN feature extraction module is used to extract features from the frequency domain information of the two electrical signals; then, the extracted feature information is normalized and concatenated to obtain a one-dimensional vector; The trained BP neural network module is used to predict the vacuum degree based on the one-dimensional vector of the signal after Fourier transformation; when training the neural network, the vacuum degree of the environment where the vacuum gauge is located, the pulse signal, and the two signals output by the signal amplification circuit are used as training sets, and the mean square error is used as the loss function.

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