Automatic gas distribution system and operation method thereof

Abstract

The invention discloses an automatic gas distribution system and an operation method thereof, and belongs to the technical field of automatic gas distribution, the automatic gas distribution system comprises a gas distribution system, a communication module, an atmosphere sensor and an automatic gas distribution upper computer, the gas distribution system comprises an inert gas source, an inert gas mass flow meter, a plurality of target gas sources and a plurality of target gas mass flow meters, and the inert gas mass flow meter and the target gas mass flow meters are both in wireless connection with the communication module. By using the automatic gas distribution method, the atmosphere can rapidly reach a stable state, the gas distribution speed and the gas distribution precision can be improved, various parameters can be flexibly set, automatic gas distribution parameters can be set according to requirements, meanwhile, automatic storage and calling of gas distribution data are supported, matched atmosphere points can be rapidly called, gas distribution is not needed again, a gas distribution list can be automatically scanned, and the gas distribution efficiency is improved. Manual operation is not needed, and labor cost is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of automatic gas distribution, in particular to an automatic gas distribution system and an operating method thereof. Background Art

[0002] The automatic gas distribution system and method are mainly used to use multiple mass flow meters and gas sources to achieve automatic gas distribution of any concentration of multiple gases, improve gas distribution accuracy, speed up gas distribution, reduce labor costs, and reduce deviations and errors caused by manual gas distribution;

[0003] At present, similar technologies mainly include: the first type: manual gas distribution, which depends entirely on the workers' operating experience to adjust the flow of multiple gases. However, this method has a slow gas distribution speed and poor gas distribution accuracy. When there are many types of gas sources, repeated gas distribution is required, and waiting for the atmosphere to stabilize also wastes a lot of time;

[0004] The second method: formula calculation + manual fine-tuning, which controls the flow rate calculated by the theoretical formula and then performs manual fine-tuning. However, there are large deviations between different systems, and the deviation between theory and practice may be large, which has the same problem as manual gas distribution.

[0005] The third type: PID control, which uses a PID controller to adjust the deviation between the requested gas concentration and the actual concentration. However, since the gas distribution system responds very slowly and the stabilization speed is inconsistent under different conditions, the integral term of the PID controller will easily saturate, causing the system to overshoot or oscillate.

[0006] In addition, similar technologies do not have the function of recording and calling gas distribution data. Even for the same atmosphere point, gas distribution needs to be re-performed, which wastes a lot of time. Moreover, similar technologies do not consider the response speed of the gas distribution system under different atmospheres. For example, during the atmosphere rising process, the response time for requesting the atmosphere to drop is much longer than the response time for requesting the atmosphere to rise, causing the gas distribution system to oscillate repeatedly near the requested atmosphere point and is difficult to stabilize. Therefore, an automatic gas distribution system and its operation method are proposed. Summary of the invention

[0007] The object of the present invention is to provide an automatic gas distribution system and an operating method thereof to solve the problems raised in the above background technology.

[0008] To achieve the above object, the present invention provides the following technical solutions: an automatic gas distribution system, comprising a gas distribution system, a communication module, an atmosphere sensor and an automatic gas distribution host computer, wherein the gas distribution system comprises an inert gas source, an inert gas mass flow meter, a plurality of target gas sources and a plurality of target gas mass flow meters, wherein the inert gas mass flow meter and the target gas mass flow meter are both wirelessly connected to the communication module;

[0009] Wherein, the inert gas mass flowmeter and the target gas mass flowmeter are used to control the flow of the inert gas source and the target gas source respectively, and the number of the target gas mass flowmeters used is consistent with the number of the target gas sources used;

[0010] The inert gas source is a pure gas source and does not react with the target gas source, and the target gas source is a gas for gas distribution.

[0011] As a further preferred embodiment of the present technical solution: an inert gas source is used to adjust the target gas concentration during gas distribution, and the target gas source may not be a pure gas source, wherein the range and accuracy of the inert gas mass flowmeter and the target gas mass flowmeter are matched according to the gas source concentration, and the number of target gas mass flowmeters is consistent with the number of target gas sources, so that multiple gases can be controlled simultaneously.

[0012] As a further preferred embodiment of the technical solution: it also includes a gas mixing valve and a gas pipeline, the gas mixing valve and the atmosphere sensor are both installed on the gas pipeline, the gas mixing valve is used to mix multiple gases, and the gas pipeline is used to ensure that the gas in the pipeline remains consistent.

[0013] As a further preferred embodiment of the present technical solution: the communication module is wirelessly connected to the atmosphere sensor, the communication module is used for data transmission and communication, and the atmosphere sensor is used to detect the concentration of various gases in the gas pipeline, wherein the atmosphere sensor can be composed of a plurality of different atmosphere sensors, which are used to detect the concentration of various gases in the gas pipeline, and at least one atmosphere sensor for the target gas is required, and the use of multiple sensors can improve the detection accuracy and reduce the deviation between different sensors.

[0014] As a further preferred embodiment of the present technical solution: the communication module is mainly used for communicating with each mass flow meter and multiple atmosphere sensors. It is generally a serial port, CAN and other communication interfaces, which are used to connect to a computer, and control and detect each mass flow meter and multiple atmosphere sensors through an automatic gas distribution host computer.

[0015] As a further preferred embodiment of the present technical solution: the automatic gas distribution host computer includes a flow meter control module, an automatic gas distribution module, a sensor detection module and a parameter management module, the communication module is wirelessly connected to the flow meter control module, and the flow meter control module is wirelessly connected to the automatic gas distribution module;

[0016] The flow meter control module is used to control the current flow rate and range of the inert gas mass flow meter and the target gas mass flow meter in real time, and detect their actual flow rates in real time.

[0017] As a further preferred embodiment of the present technical solution: the atmosphere sensor is wirelessly connected to the sensor detection module, the automatic gas distribution module is wirelessly connected to the sensor detection module, and the parameter management module is wirelessly connected to the automatic gas distribution module;

[0018] Wherein, the sensor detection module is used to control the operation of the atmosphere sensor and convert the collected data into the concentration of the target gas;

[0019] The automatic gas distribution module is used to automatically control the current flow of the flow meter control module according to the collected data of the sensor detection module, so that the error between the target value of the sensor and the set value reaches the set range;

[0020] The parameter management module is used to store automatic gas distribution parameters, including setting deviation, continuous stabilization time, gas distribution list, etc., and supports data import and export.

[0021] A method for operating an automatic gas distribution system comprises the following steps:

[0022] S1, first start the mass flow meter, then start the atmosphere sensor;

[0023] S2, judging whether the atmosphere sensor is stable. When the atmosphere sensor is judged to be stable, collecting data of multiple atmosphere sensors. When the atmosphere sensor is judged to be unstable, returning to the previous step to re-judgment whether the atmosphere sensor is stable.

[0024] S3. When the atmosphere sensor is stable, the actual gas concentration is collected in real time. If there is a correction formula for the corresponding atmosphere sensor, the gas concentration is calculated first according to the correction formula, and then the Kalman filter or mean filter is used to calculate the gas concentration.

[0025] S4. Input the requested gas concentration, and the concentration cannot exceed the gas source concentration range;

[0026] S5. Calculate theoretical flow distribution. When there are multiple gas sources including the target gas source, any target gas source can be selected for calculation, or multiple target gas sources can be selected for calculation, and the requested gas concentrations can be accumulated.

[0027] S6. Calculate the waiting time according to the difference between the requested gas concentration and the actual gas concentration, and when there are multiple atmospheres, select the maximum value;

[0028] S7, wait for the atmosphere sensor to stabilize, and calculate the deviation between the actual gas concentration and the requested concentration;

[0029] S8, judging whether the deviation is within the set range, if the deviation is within the range, accumulating the duration, and judging whether the duration exceeds the set value, if the duration exceeds the set value, the automatic gas distribution is completed, if the duration does not exceed the set value, returning to the previous step, and re-judging whether the deviation is within the set range;

[0030] S9. When the deviation is not within the range, the duration is reset to zero, and it is determined whether the deviation is through zero. When the deviation is through zero, the deviation conversion coefficient is adjusted, and the requested concentration is corrected according to the deviation conversion coefficient. Finally, the theoretical flow distribution is calculated again. When the deviation is not through zero, the requested concentration is directly corrected according to the deviation conversion coefficient, and the theoretical flow distribution is calculated.

[0031] As a further preferred embodiment of the present technical solution: in S5, the specific formula for calculating the theoretical flow distribution is:

[0032]

[0033] In formula (1), CONC Aim To request gas concentration, CONC Gas is the target gas source concentration, FR Aim is the target gas source flow rate, FR Total is the total request flow.

[0034] As a further preferred embodiment of the present technical solution: in S9, the specific formula for adjusting the deviation conversion coefficient is:

[0035] CONC' Aim =CONC Aim +f(n)*(CONC Cur -CONC Aim )(2)

[0036] In formula (2), CONC Aim is the current requested gas concentration, CONC Cur is the current actual gas concentration, CONC' Aim is the corrected requested gas concentration, n is the number of times the deviation crosses zero, f is any function that converges to 0, and the commonly used function is f=k n (-1<k<1).

[0037] Compared with the prior art, the present invention has the following beneficial effects:

[0038] 1. The present invention can realize automatic gas distribution of any variety of atmospheres. The automatic gas distribution method can quickly make the atmosphere reach a stable state, improve the gas distribution speed and gas distribution accuracy, and various parameters can be flexibly set. The automatic gas distribution parameters can be set according to the needs. At the same time, it supports automatic storage and call of gas distribution data, and can quickly call the atmosphere points that have been distributed without the need to distribute gas again. It can automatically scan the gas distribution list without manual operation, thereby reducing labor costs;

[0039] 2. The gas distribution algorithm in the present invention is highly robust and can realize automatic configuration of any atmosphere, avoid repeated zero crossing of gas distribution, reduce the response speed of atmosphere, and has high precision, fast speed, good stability, and the gas distribution process is automated, automatically stops when the target conditions are reached, and reduces manual participation. At the same time, automatic gas distribution of the gas distribution list is realized. When there are many atmosphere points, no manual operation is required, reducing labor costs. In addition, the gas distribution data is stored and called through the gas distribution list, and secondary gas distribution is not required. Various parameters can be flexibly configured according to needs to meet automatic gas distribution under different use conditions;

[0040] 3. The automatic gas distribution algorithm of the present invention uses a correction function that can converge quickly, so that the gas distribution error can converge quickly to 0, improve the gas distribution speed, and reduce oscillation. At the same time, the automatic gas distribution algorithm will correct the deviation coefficient only when the deviation passes through zero, ensuring that when adjusting the atmosphere, the atmosphere always maintains an upward or downward trend, avoiding repeated rise and fall, and improving the response speed;

[0041] 4. The present invention calculates the waiting time based on the concentration difference, takes into account the difference in stabilization time under different atmospheres, avoids the continuous increase of the cumulative error caused by re-adjustment when the atmosphere is not stable, and uses the gas distribution list to realize automatic gas distribution of multiple atmosphere points, and can automatically record the gas distribution data, which can be called at any time without re-distribution. At the same time, it supports simultaneous detection of multiple atmosphere sensors, improves the accuracy and consistency of measurement, and reduces the error between different sensors. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 A schematic diagram of the architecture of an automatic gas distribution system of the present invention;

[0043] Figure 2 The present invention is a schematic flow chart of an operating method of an automatic gas distribution system. DETAILED DESCRIPTION

[0044] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0045] Example 1

[0046] See also Figure 1, the present invention provides a technical solution: an automatic gas distribution system, including a gas distribution system, a communication module, an atmosphere sensor and an automatic gas distribution host computer, the gas distribution system includes an inert gas source, an inert gas mass flow meter, multiple target gas sources and multiple target gas mass flow meters, the inert gas mass flow meter and the target gas mass flow meter are both wirelessly connected to the communication module;

[0047] Among them, the inert gas mass flow meter and the target gas mass flow meter are used to control the flow of the inert gas source and the target gas source respectively, and the number of the target gas mass flow meters used is consistent with the number of the target gas sources used;

[0048] Among them, the inert gas source is a pure gas source and does not react with the target gas source, and the target gas source is the gas for gas distribution.

[0049] In this embodiment, specifically: the inert gas source is used to adjust the target gas concentration during gas distribution, and the target gas source may not be a pure gas source, wherein the range and accuracy of the inert gas mass flow meter and the target gas mass flow meter are matched according to the gas source concentration, and the number of target gas mass flow meters is consistent with the number of target gas sources, so that multiple gases can be controlled simultaneously.

[0050] In this embodiment, specifically: it also includes a gas mixing valve and a gas pipeline. The gas mixing valve and the atmosphere sensor are both installed on the gas pipeline. The gas mixing valve is used to mix multiple gases, and the gas pipeline is used to ensure that the gas in the pipeline remains consistent. Among them, multiple atmosphere sensors can be installed on the gas pipeline at the same time, and it has good air tightness.

[0051] In this embodiment, specifically: the communication module is wirelessly connected to the atmosphere sensor, the communication module is used for data transmission and communication, the atmosphere sensor is used to detect the concentration of various gases in the gas pipeline, wherein the atmosphere sensor can be composed of multiple, multiple different atmosphere sensors, which are used to detect the concentration of various gases in the gas pipeline, and at least one atmosphere sensor for the target gas is required, and using multiple can improve the detection accuracy and reduce the deviation between different sensors.

[0052] In this embodiment, specifically: the communication module is mainly used to communicate with each mass flow meter and multiple atmosphere sensors. It is generally a serial port, CAN and other communication interfaces, which are used to connect to a computer, and control and detect each mass flow meter and multiple atmosphere sensors through an automatic gas distribution host computer.

[0053] In this embodiment, specifically: the automatic gas distribution host computer includes a flow meter control module, an automatic gas distribution module, a sensor detection module and a parameter management module, the communication module is wirelessly connected to the flow meter control module, and the flow meter control module is wirelessly connected to the automatic gas distribution module;

[0054] The flow meter control module is used to control the current flow rate and range of the inert gas mass flow meter and the target gas mass flow meter in real time, and detect their actual flow rate in real time.

[0055] In this embodiment, specifically: the atmosphere sensor is wirelessly connected to the sensor detection module, the automatic gas distribution module is wirelessly connected to the sensor detection module, and the parameter management module is wirelessly connected to the automatic gas distribution module;

[0056] Among them, the sensor detection module is used to control the operation of the atmosphere sensor, convert the collected data into the concentration of the target gas, and optimize the data accuracy between multiple atmosphere sensors;

[0057] Among them, the automatic gas distribution module is used to automatically control the current flow of the flow meter control module according to the collected data of the sensor detection module, so that the error between the target value and the set value of the sensor reaches the set range;

[0058] Among them, the parameter management module is used to store automatic gas distribution parameters, including setting deviation, continuous stabilization time and gas distribution list, and supports data import and export.

[0059] Example 2

[0060] See also Figure 2 , an operating method of an automatic gas distribution system, comprising the following steps:

[0061] S1, first start the mass flow meter, then start the atmosphere sensor;

[0062] S2, judging whether the atmosphere sensor is stable. When the atmosphere sensor is judged to be stable, collecting data of multiple atmosphere sensors. When the atmosphere sensor is judged to be unstable, returning to the previous step to re-judgment whether the atmosphere sensor is stable.

[0063] S3. When the atmosphere sensor is stable, the actual gas concentration is collected in real time. If there is a correction formula for the corresponding atmosphere sensor, the gas concentration is calculated first according to the correction formula, and then the Kalman filter or mean filter is used to calculate the gas concentration.

[0064] S4. Input the requested gas concentration, and the concentration cannot exceed the gas source concentration range;

[0065] S5. Calculate theoretical flow distribution. When there are multiple gas sources including the target gas source, any target gas source can be selected for calculation, or multiple target gas sources can be selected for calculation, and the requested gas concentrations can be accumulated.

[0066] S6. Calculate the waiting time according to the difference between the requested gas concentration and the actual gas concentration, and when there are multiple atmospheres, select the maximum value;

[0067] S7, wait for the atmosphere sensor to stabilize, and calculate the deviation between the actual gas concentration and the requested concentration;

[0068] S8, judging whether the deviation is within the set range, if the deviation is within the range, accumulating the duration, and judging whether the duration exceeds the set value, if the duration exceeds the set value, the automatic gas distribution is completed, if the duration does not exceed the set value, returning to the previous step, and re-judging whether the deviation is within the set range;

[0069] S9. When the deviation is not within the range, the duration is reset to zero, and it is determined whether the deviation is through zero. When the deviation is through zero, the deviation conversion coefficient is adjusted, and the requested concentration is corrected according to the deviation conversion coefficient. Finally, the theoretical flow distribution is calculated again. When the deviation is not through zero, the requested concentration is directly corrected according to the deviation conversion coefficient, and the theoretical flow distribution is calculated.

[0070] In this embodiment, specifically: in S5, the specific formula for calculating the theoretical flow distribution is:

[0071]

[0072] In formula (1), CONC Aim To request gas concentration, CONC Gas is the target gas source concentration, FR Aim is the target gas source flow rate, FR Total is the total request flow.

[0073] In this embodiment, specifically: in S6, the waiting time can be calculated by looking up a table.

[0074] In this embodiment, specifically: in S9, the specific formula for adjusting the deviation conversion coefficient is:

[0075] CONC' Aim =CONC Aim +f(n)*(CONC Cur -CONC Aim )(2)

[0076] In formula (2), CONC Aim is the current requested gas concentration, CONC Cur is the current actual gas concentration, CONC' Aim is the corrected requested gas concentration, n is the number of times the deviation crosses zero, f is any function that converges to 0, and the commonly used function is f=k n (-1<k<1).

[0077] Working principle: First start the mass flow meter, then start the atmosphere sensor, and determine whether the atmosphere sensor is stable. When the atmosphere sensor is determined to be stable, collect data from multiple atmosphere sensors. When the atmosphere sensor is determined to be unstable, return to the previous step and re-judge whether the atmosphere sensor is stable. When the atmosphere sensor is stable, collect the actual gas concentration in real time, and the corresponding atmosphere sensor has a correction formula. Then, calculate according to the correction formula, and then use Kalman filtering or mean filtering to calculate the gas concentration. Enter the requested gas concentration, and the concentration cannot exceed the gas source concentration range. Calculate the theoretical flow distribution. When there are multiple gas sources containing the target gas source, you can select any target gas source for calculation, or select multiple target gas sources for calculation, and accumulate the requested gas concentration. Calculate the waiting time based on the difference between the requested gas concentration and the actual gas concentration. When there are multiple atmospheres, select the maximum value among them.

[0078] Wait for the atmosphere sensor to stabilize, calculate the deviation between the actual gas concentration and the requested concentration, and determine whether the deviation is within the set range. When the deviation is within the range, accumulate the duration and determine whether the duration exceeds the set value. When the duration exceeds the set value, the automatic gas distribution is completed. When the duration does not exceed the set value, return to the previous step and re-determine whether the deviation is within the set range. When the deviation is not within the range, the duration is cleared and it is determined whether the deviation is zero. When the deviation is zero, adjust the deviation conversion coefficient and correct the requested concentration according to the deviation conversion coefficient. Finally, calculate the theoretical flow distribution again. When the deviation is not zero, directly correct the requested concentration according to the deviation conversion coefficient and calculate the theoretical flow distribution.

[0079] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An automatic gas distribution system, comprising a gas distribution system, a communication module, an atmosphere sensor and an automatic gas distribution host computer, characterized in that: The gas distribution system includes an inert gas source, an inert gas mass flow meter, multiple target gas sources and multiple target gas mass flow meters, and the inert gas mass flow meters and the target gas mass flow meters are both wirelessly connected to the communication module; Wherein, the inert gas mass flowmeter and the target gas mass flowmeter are used to control the flow of the inert gas source and the target gas source respectively, and the number of the target gas mass flowmeters used is consistent with the number of the target gas sources used; The inert gas source is a pure gas source and does not react with the target gas source, and the target gas source is a gas for gas distribution.

2. An automatic gas distribution system according to claim 1, characterized in that: It also includes a gas mixing valve and a gas pipeline. The gas mixing valve and the atmosphere sensor are both installed on the gas pipeline. The gas mixing valve is used to mix multiple gases, and the gas pipeline is used to ensure that the gas in the pipeline remains consistent.

3. An automatic gas distribution system according to claim 1, characterized in that: The communication module is wirelessly connected to the atmosphere sensor, the communication module is used for data transmission and communication, and the atmosphere sensor is used for detecting the concentration of various gases in the gas pipeline.

4. The automatic gas distribution system according to claim 1, characterized in that: The automatic gas distribution host computer includes a flow meter control module, an automatic gas distribution module, a sensor detection module and a parameter management module, the communication module is wirelessly connected to the flow meter control module, and the flow meter control module is wirelessly connected to the automatic gas distribution module; The flow meter control module is used to control the current flow rate and range of the inert gas mass flow meter and the target gas mass flow meter in real time, and detect their actual flow rates in real time.

5. An automatic gas distribution system according to claim 4, characterized in that: The atmosphere sensor is wirelessly connected to the sensor detection module, the automatic gas distribution module is wirelessly connected to the sensor detection module, and the parameter management module is wirelessly connected to the automatic gas distribution module; Wherein, the sensor detection module is used to control the operation of the atmosphere sensor and convert the collected data into the concentration of the target gas; The automatic gas distribution module is used to automatically control the current flow of the flow meter control module according to the collected data of the sensor detection module, so that the error between the target value of the sensor and the set value reaches the set range; Wherein, the parameter management module is used to store automatic gas distribution parameters.

6. A method for operating an automatic gas distribution system, characterized in that: The following steps are involved: S1, first start the mass flow meter, then start the atmosphere sensor; S2, judging whether the atmosphere sensor is stable. When the atmosphere sensor is judged to be stable, collecting data of multiple atmosphere sensors. When the atmosphere sensor is judged to be unstable, returning to the previous step to re-judgment whether the atmosphere sensor is stable. S3. When the atmosphere sensor is stable, the actual gas concentration is collected in real time. If there is a correction formula for the corresponding atmosphere sensor, the gas concentration is calculated first according to the correction formula, and then the Kalman filter or mean filter is used to calculate the gas concentration. S4. Input the requested gas concentration, and the concentration cannot exceed the gas source concentration range; S5. Calculate theoretical flow distribution. When there are multiple gas sources including the target gas source, any target gas source can be selected for calculation, or multiple target gas sources can be selected for calculation, and the requested gas concentrations can be accumulated. S6. Calculate the waiting time according to the difference between the requested gas concentration and the actual gas concentration, and when there are multiple atmospheres, select the maximum value; S7, waiting for the atmosphere sensor to stabilize, and calculating the deviation between the actual gas concentration and the requested concentration; S8, judging whether the deviation is within the set range, if the deviation is within the range, accumulating the duration, and judging whether the duration exceeds the set value, if the duration exceeds the set value, the automatic gas distribution is completed, if the duration does not exceed the set value, returning to the previous step, and re-judging whether the deviation is within the set range; S9. When the deviation is not within the range, the duration is reset to zero, and it is determined whether the deviation is through zero. When the deviation is through zero, the deviation conversion coefficient is adjusted, and the requested concentration is corrected according to the deviation conversion coefficient. Finally, the theoretical flow distribution is calculated again. When the deviation is not through zero, the requested concentration is directly corrected according to the deviation conversion coefficient, and the theoretical flow distribution is calculated.

7. The operating method of an automatic gas distribution system according to claim 6, characterized in that: In S5, the specific formula for calculating the theoretical flow distribution is: In formula (1), CONC Aim To request gas concentration, CONC Gas is the target gas source concentration, FR Aim is the target gas source flow rate, FR Total is the total request flow.

8. The operating method of an automatic gas distribution system according to claim 6, characterized in that: In S9, the specific formula for adjusting the deviation conversion coefficient is: CONC’ Aim =CONC Aim +f(n)*(CONC Cur -CONC Aim )(2) In formula (2), CONC Aim is the current requested gas concentration, CONC Cur is the current actual gas concentration, CONC' Aim is the corrected requested gas concentration, n is the number of times the deviation crosses zero, f is any function that converges to 0, and the commonly used function is f=k n (-1<k<1).

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