Polishing device capable of controlling pressure distribution

Abstract

The invention relates to a polishing device capable of controlling pressure distribution, belongs to the technical field of ultra-precision manufacturing of optical elements, solves the technical problems of unstable transmission, complex structure and large motion inertia of the polishing device, and comprises a composite tool module, a composite grinding machine module and a pressure output module which are sequentially connected from bottom to top. The composite tool module is connected with an optical element to be polished, and the pressure output module is connected with external equipment. The composite tool module is of a disc type and comprises a grinding layer, a grinding disc, a first bearing and an adapter plate. The composite mill module comprises a pressure adjusting mechanism, a rotating shaft, a composite mill module rack, a second bearing and a first motor. The polishing device is used for polishing optical elements.

Description

Technical Field

[0001] The invention belongs to the technical field of ultra-precision manufacturing of optical elements, and in particular relates to a polishing device with controllable pressure distribution. Background Art

[0002] Among the existing technical means in the field of ultra-precision manufacturing of optical elements, single self-rotating disc polishing devices and planetary motion disc polishing devices are commonly used in the precision polishing of optical elements, and are indispensable and important devices in the polishing process. Among them, the single self-rotating disc polishing device has a simple structure, but its removal function (the three-dimensional distribution of the amount of material removed per unit time on the contact surface between the polishing disc and the optical element) is annular, deviating from the ideal Gaussian shape. Therefore, industry insiders further proposed a planetary motion disc polishing device based on the single self-rotating disc polishing device, by adding a revolution axis on the basis of the single self-rotation axis of the polishing disc, and changing the polishing speed distribution through the composite motion of the polishing disc and the revolution, and changing the shape of the removal function to make it close to the Gaussian shape. However, the planetary motion polishing device has the defects of unstable transmission, complex structure, large motion inertia, etc., and the polishing device needs to move quickly during operation, and the speed distribution of the composite motion of the revolution and the revolution will be affected by the polishing movement speed, which will cause the shape of the removal function to be unstable and affect the polishing effect. Summary of the invention

[0003] In order to overcome the shortcomings of the polishing device such as unstable transmission, complex structure and large motion inertia, the present invention proposes a polishing device with controllable pressure distribution.

[0004] The technical solution adopted by the present invention to solve the technical problem is:

[0005] A polishing device with controllable pressure distribution comprises a composite tool module, a composite grinder module and a pressure output module.

[0006] The composite tool module, the composite grinding machine module and the pressure output module are connected in sequence from bottom to top. The composite tool module contacts the optical element to be polished, and the pressure output module is connected to an external device.

[0007] The composite tool module is disc-type, and comprises a grinding layer, a grinding disc, a No. 1 bearing, and an adapter plate.

[0008] The grinding layer is fixedly connected to the grinding disc, located on the bottom surface of the grinding disc, and connected to the optical element to be polished; the grinding disc is fixedly connected to the outer ring of the No. 1 bearing, and the inner ring of the No. 1 bearing is fixedly connected to the adapter plate. The grinding disc and the adapter plate can rotate relative to each other through the No. 1 bearing. The adapter plate is fixedly connected to the pressure regulating mechanism. The grinding disc is matched and connected to the rotating shaft, and the rotating shaft drives the grinding disc to rotate.

[0009] The compound mill module comprises a pressure regulating mechanism, a rotating shaft, a compound mill module frame, a second bearing, a first motor, and a bearing nut.

[0010] The pressure regulating mechanism and the first motor are installed on the composite mill module frame. The second bearing is installed on the pressure regulating mechanism, and the composite mill module frame is connected to the pressure output module; the first motor drives the rotating shaft to rotate, and the driving rotating shaft is installed on the second bearing through the bearing nut.

[0011] The pressure output module is a cylinder type constant force output device, or a guide rail deadweight type constant force output device. A mounting hole is arranged at the upper end of the pressure output module, and the mounting hole is used for fixed connection with an external device.

[0012] In the above-mentioned polishing device, the external equipment is an industrial robot or a CNC machine tool.

[0013] In the above-mentioned polishing device, the grinding layer is asphalt, or damping cloth, or polyurethane, or fixed abrasive.

[0014] In the above-mentioned polishing device, the grinding disc and the outer ring of the No. 1 bearing can be fixedly connected by screws, welding, gluing, or snap-on connection.

[0015] In the above-mentioned polishing device, the fixing connection method between the inner ring of the No. 1 bearing and the adapter plate can be screw connection, or can be welding, gluing, or snap connection.

[0016] The above-mentioned polishing device, the composite grinding machine module also includes an electric slip ring, a second motor, and a driving gear.

[0017] The upper ring of the electric slip ring is fixedly connected to the frame of the composite mill module, and the lower ring of the electric slip ring is fixedly connected to the housing of the pressure regulating mechanism. The second motor is installed on the frame of the composite mill module, and the driving gear is installed on the output shaft of the second motor, and the driving gear matches the pressure regulating mechanism.

[0018] The above-mentioned polishing device, the pressure regulating mechanism includes a pressure regulating mechanism housing, a cross-shaped pressure shaft, a telescopic motor, and a positioning shaft.

[0019] The No. 2 bearing is installed in the inner cavity of the pressure regulating mechanism housing, the cross-shaped pressure shaft matches the cross groove on the pressure regulating mechanism housing, and the telescopic motor is installed in the cross groove on the pressure regulating mechanism housing. The end of the telescopic shaft of the telescopic motor is fixed to the cross-shaped pressure shaft, driving the cross-shaped pressure shaft to slide in the cross groove. A ball head is arranged at the lower end of the cross-shaped pressure shaft, and the ball head extends into the waist groove on the adapter plate. The end of the ball head contacts the bottom surface of the waist groove. The contact point between the ball head and the bottom surface of the waist groove is the control point of the polishing pressure. While the telescopic motor drives the cross-shaped pressure shaft to slide in the cross groove, the contact point between the ball head and the bottom surface of the waist groove moves synchronously. A positioning shaft is also arranged at the lower end of the pressure regulating mechanism housing. The positioning shaft is a cylinder, and its end extends into the circular groove on the adapter plate to form a match. The cross-shaped pressure shaft matches the waist groove on the adapter plate to fix the relative position of the composite tool module and the composite grinder module.

[0020] In the above-mentioned polishing device, the pressure regulating mechanism also includes a driven gear.

[0021] The driven gear is mounted on the composite mill module frame, and the driven gear is meshed with the driving gear.

[0022] The above-mentioned polishing device adopts a wheel-type, airbag, and magnetorheological composite tool module to replace the disc-type composite tool module, so as to realize active control of the polishing pressure and thus optimize the removal function morphology.

[0023] The beneficial effects of the present invention are:

[0024] A polishing device with controllable pressure distribution, by separating the pressure output shaft from the rotation output shaft (the pressure distribution peak point and the rotation speed distribution minimum point are separated, and the pressure distribution peak point and the rotation speed distribution minimum point of the traditional device are coincident), by controlling the position of the pressure application point, the polishing pressure distribution is controlled, and a stable Gaussian removal function is obtained. Compared with the existing scheme, the removal function obtained by the device proposed by the present invention is more stable, and the movement of the device during the processing will not affect the shape of the removal function.

[0025] A polishing device with controllable pressure distribution can obtain a removal function with a smaller half-height width.

[0026] A polishing device with controllable pressure distribution has a simpler structure, and the modules of the device are coaxial, and the moment of inertia is smaller than that of existing solutions.

[0027] A polishing device with controllable pressure distribution can realize real-time control of removal function distribution during machining, and can realize a more flexible polishing process compared with existing solutions. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a three-dimensional diagram of a polishing device according to an embodiment of the present invention;

[0029] Figure 2 is a schematic diagram of the cross-sectional position of a polishing device according to an embodiment of the present invention;

[0030] Figure 3 yes Figure 2 Middle A cross-section;

[0031] Figure 4 is a schematic diagram of the structure of the pressure regulating mechanism;

[0032] Figure 5 yes Figure 4 Middle B cross-section;

[0033] Figure 6 It is a schematic diagram of the composite tool module structure;

[0034] Figure 7 Schematic diagram of a polishing device according to an embodiment of the present invention used for polishing a grid-type track;

[0035] Figure 8 It is a schematic diagram of a polishing device according to an embodiment of the present invention used for circular trajectory polishing.

[0036] The reference numerals are as follows:

[0037] 1. Composite tool module, 2. Composite grinder module, 3. Pressure output module, 4. Polishing device with controllable pressure distribution, 5. Optical element, 6. Grid-type track, 7. Circular-type track;

[0038] 101. grinding layer, 102. grinding disc, 103. No. 1 bearing, 104. adapter plate;

[0039] 201. pressure regulating mechanism, 202. electric slip ring, 203. rotating shaft, 204. composite mill module frame, 205. No. 2 bearing, 206. No. 1 motor, 207. No. 2 motor, 208. driving gear, 209. bearing nut;

[0040] 2011. Pressure regulating mechanism housing, 2012. Cross-shaped pressure shaft, 2013. Telescopic motor, 2014. Positioning shaft, 2015. Driven gear. DETAILED DESCRIPTION

[0041] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0042] Embodiment 1

[0043] A polishing device with controllable pressure distribution is disclosed. By separating the pressure output shaft from the rotation output shaft and designing a pressure output shaft rotation and translation mechanism, the polishing pressure distribution is changed to obtain a stable Gaussian-like removal function (removal function: three-dimensional distribution of the amount of material removed per unit time on the contact surface between the polishing disc and the optical element). Compared with the existing solutions, the removal function obtained by the device proposed by the present invention is more stable, and the movement of the device during the processing will not affect the shape of the removal function. In addition, compared with the existing technical solutions, the half-width of the removal function obtained by the device proposed by the present invention is smaller. In addition, compared with the existing solution device, the device proposed by the present invention has a small moment of inertia and a simpler structure. In addition, the device proposed by the present invention can realize real-time control of the removal function distribution during the processing, and the process that can be realized is more flexible than that of the existing solution.

[0044] The invention belongs to the field of ultra-precision manufacturing of optical elements, in particular to a polishing device with controllable pressure distribution, in particular to a disc-type polishing device with controllable pressure distribution.

[0045] In view of the shortcomings of the prior art, the present invention proposes a polishing device with controllable pressure distribution. The overall view of the device is as follows: Figure 1 , Figure 2 As shown, the device is composed of the following three modules: a composite tool module 1, a composite grinder module 2, and a pressure output module 3.

[0046] The composite tool module 1, the composite grinding machine module 2 and the pressure output module 3 are coaxially arranged.

[0047] like Figure 3 , Figure 6 As shown, the composite tool module 1 is composed of the following parts: a grinding layer 101 , a grinding disc 102 , a No. 1 bearing 103 , and an adapter plate 104 .

[0048] The grinding layer 101 is arranged on the bottom surface of the grinding disc 102, and its material can be asphalt, damping cloth, polyurethane, fixed abrasive (when working, the polishing grinding disc 101 and the surface of the optical element move relative to each other under the action of pressure, and the surface material of the optical element is removed under the action of polishing pressure); the upper end of the polishing grinding disc 102 is provided with a square groove feature, which cooperates with the end feature of the rotating shaft 203 to transmit the rotational motion; the polishing grinding disc 102 is fixed to the outer ring of the No. 1 bearing 103 ( Figure 3 The inner ring of the bearing 103 is fixed with an adapter plate 104 ( Figure 3 The fixing method is screw connection (in the figure), and other fixing methods may be used, such as welding, gluing, snap fastening, etc.).

[0049] The adapter plate 104 is provided with a waist-shaped groove and a circular groove.

[0050] like Figure 3 As shown, the compound mill module 2 is composed of the following parts: a pressure regulating mechanism 201, an electric slip ring 202, a rotating shaft 203, a compound mill module frame 204, a second bearing 205, a first motor 206, a second motor 207, a driving gear 208, and a bearing nut 209.

[0051] like Figure 3 , Figure 4 , Figure 5 As shown, the pressure regulating mechanism 201 is composed of the following parts: a pressure regulating mechanism housing 2011, a cross-shaped pressure shaft 2012, a telescopic motor 2013, a positioning shaft 2014, and a driven gear 2015.

[0052] The pressure regulating mechanism 201 is fixed to the lower side of the lower circle of the electric slip ring 202, and the upper side of the upper circle of the electric slip ring 202 is fixed to the lower side of the composite mill module frame 204. The inner cavity of the composite mill module frame 204 is installed with a No. 2 bearing 205, a No. 1 motor 206, and a No. 2 motor 207. The end of the output shaft of the No. 1 motor 206 is installed with a rotating shaft 203. The upper end of the rotating shaft 203 is provided with a circular groove feature for fixing with the No. 1 motor 206. The rotating shaft 203 is matched with the inner ring of the No. 2 bearing 205. The upper end of the rotating shaft 203 is provided with a step protrusion, which is matched with the bearing nut 209 to fix the rotating shaft 203 and the No. 2 bearing 205. The rotating shaft 203 is provided with a square key feature for driving the grinding disc 102 to rotate. A driving gear 208 is installed on the output shaft of the No. 2 motor 207, and the driving gear 208 forms a meshing relationship with the driven gear 2015.

[0053] The driven gear 2015 is arranged at the upper end of the pressure regulating mechanism housing 2011 ( Figure 3The driven gear 2015 is integrated with the composite mill module frame 204, that is, the upper end of the composite mill module frame 204 is arranged with a gear feature, and the driven gear 2015 can also be arranged as a separate part and fixedly installed with the composite mill module frame 204). A round hole is arranged in the middle of the composite mill module frame 204 for the shaft 203 to pass through. A cross groove is arranged at the lower end of the composite mill module frame 204. The cross-shaped pressure shaft 2012 is arranged in the cross groove and can slide therein. The telescopic motor 2013 is installed and fixed. In the cross slot, the telescopic motor 2013 has the telescopic shaft end fixed to the cross-shaped pressure shaft 2012, driving the cross-shaped pressure shaft 2012 to slide in the cross slot. The lower end of the cross-shaped pressure shaft 2012 is provided with a ball head, which extends into the waist-shaped groove on the adapter plate 104. The ball head end contacts the bottom surface of the waist-shaped groove. The contact point between the ball head and the bottom surface of the waist-shaped groove is the control point of the polishing pressure. When the telescopic motor 2013 drives the cross-shaped pressure shaft 2012 to slide in the cross slot, the ball head and the contact point between the bottom surface of the waist-shaped groove move synchronously. The lower end of the pressure adjustment mechanism housing 2011 is also provided with a positioning shaft 2014. The positioning shaft 2014 is a cylinder, and its end extends into the circular groove on the adapter plate 104 to form a fit. The cross-shaped pressure shaft 2012 and the waist-shaped groove on the adapter plate 104 form a fit together to fix the relative position of the composite tool module and the composite grinding machine module 2.

[0054] The composite grinding mill module 2 is fixed below the pressure output module 3. The pressure output module 3 can be a cylinder type constant force output device, or a guide rail self-weight type constant force output device. The upper end of the pressure output module 3 is provided with a mounting hole for mounting the entire device on the end of the execution axis of an industrial robot or a CNC machine tool.

[0055] The polishing device is installed at the end of the industrial robot or CNC machine tool execution axis and is only driven by the industrial robot or CNC machine tool to polish the surface of the optical element according to the following Figure 7 , Figure 8The set trajectory shown in the figure moves, and while the device moves on the surface of the optical element, the No. 1 motor 206 drives the rotating shaft 203 to rotate, and the rotating shaft 203 further drives the grinding disc 102 and the grinding layer 101 to rotate on the surface of the optical element. The grinding disc 102 and the grinding layer 101 rotate on the surface of the optical element, and relative to the polishing device itself, driven by the No. 1 motor 206, the grinding disc 102, the grinding layer 101 and the outer ring of the No. 1 bearing 103 rotate relative to other parts of the equipment. At the same time, the pressure output module 3 applies downward polishing pressure to the composite mill module 2, and the applied polishing pressure is transmitted to the contact point on the bottom surface of the waist groove through the composite mill module frame 204, the electric slip ring 202, and the ball head end of the cross-shaped pressure shaft 2012 of the pressure regulating mechanism 201, and further transmitted downward through the contact point to the contact surface between the grinding layer 101 and the optical element. The grinding layer 101 realizes the precise removal of the surface material of the optical element under the action of the rotational movement and polishing pressure. By driving the cross-shaped pressure shaft 2012 to slide in the cross groove through the telescopic motor 2013, the position of the contact point between the ball head and the bottom surface of the waist groove can be changed. Changing the position of the contact point can change the pressure distribution on the contact surface between the grinding layer 101 and the optical element, thereby changing the shape of the removal function.

[0056] Embodiment 2

[0057] An alternative solution for a polishing device with controlled pressure distribution is:

[0058] The device proposed in the first embodiment of the present invention is simplified in design, the contact point movement adjustment function is omitted, that is, the second motor, the electric slip ring, the driving gear and the driven gear are removed, and the polishing pressure adjustment mechanism is simplified, that is, the cross slide on the polishing pressure adjustment mechanism housing is cancelled, the telescopic motor is removed, and the cross-shaped pressure shaft is directly used as a feature on the polishing pressure adjustment mechanism housing. The pressure output shaft and the rotation output shaft of the degraded device are still separated, and the removal function form is optimized, but the active control of the removal function form cannot be realized during the polishing process.

[0059] Embodiment 3

[0060] An alternative solution for a polishing device with controlled pressure distribution is:

[0061] The polishing tool of the device proposed in Example 1 of the present invention is a disc polishing tool, which can be replaced by a wheel polishing tool, an airbag polishing tool, or a magnetorheological polishing tool. The polishing pressure of the above tools can still be actively controlled, thereby optimizing the removal function shape.

Claims

1. A polishing device with controllable pressure distribution, characterized in that: It comprises a composite tool module (1), a composite grinding machine module (2), and a pressure output module (3); The composite tool module (1), the composite grinding machine module (2), and the pressure output module (3) are connected in sequence from bottom to top; the composite tool module (1) is in contact with the optical element to be polished, and the pressure output module (3) is connected to an external device; The composite mill module (2) comprises a pressure regulating mechanism (201), a rotating shaft (203), a composite mill module frame (204), a second bearing (205), a first motor (206), and a bearing nut (209); The pressure regulating mechanism (201) and the first motor (206) are coaxially mounted on the composite mill module frame (204); the composite mill module frame (204) is connected to the pressure output module (3); the second bearing (205) is mounted on the pressure regulating mechanism (201); the first motor (206) drives the rotating shaft (203) to rotate, and the driving rotating shaft (203) is mounted on the second bearing (205) through a bearing nut (209); The composite tool module (1) is of a disc type, comprising a grinding layer (101), a grinding disc (102), a No. 1 bearing (103), and an adapter plate (104); The grinding layer (101) is fixedly connected to the grinding disc (102), located on the bottom surface of the grinding disc (102), and in contact with the optical element to be polished; the grinding disc (102) is fixedly connected to the outer ring of the No. 1 bearing (103), and the inner ring of the No. 1 bearing (103) is fixedly connected to the adapter plate (104); the grinding disc (102) and the adapter plate (104) can rotate relative to each other through the No. 1 bearing (103); the adapter plate (104) is fixedly connected to the pressure regulating mechanism (201); the grinding disc (102) is matched and connected to the rotating shaft (203), and the rotating shaft (203) drives the grinding disc (102) to rotate; The pressure output module (3) is a cylinder-type constant force output device, or a guide rail deadweight-type constant force output device; A mounting hole is arranged at the upper end of the pressure output module (3), and the mounting hole is used for fixed connection with an external device.

2. The polishing device according to claim 1, characterized in that: The external device is an industrial robot or a CNC machine tool.

3. The polishing device according to claim 1, characterized in that: The grinding layer (101) is asphalt or damping cloth or polyurethane or fixed abrasive.

4. The polishing device according to claim 1, characterized in that: The grinding disc (102) and the outer ring of the first bearing (103) are fixedly connected by screw connection, welding, gluing or snap connection.

5. The polishing device according to claim 1, characterized in that: The inner ring of the No. 1 bearing (103) and the adapter plate (104) are fixedly connected by screw connection, welding, gluing or snap connection.

6. The polishing device according to claim 1, characterized in that: The pressure regulating mechanism (201) comprises a pressure regulating mechanism housing (2011), a cross-shaped pressure shaft (2012), a telescopic motor (2013), and a positioning shaft (2014); The driving gear (208) cooperates with the outer gear of the pressure regulating mechanism housing (2011); The second bearing (205) is installed in the inner cavity of the pressure regulating mechanism housing (2011), the cross-shaped pressure shaft (2012) matches the cross slot on the composite mill module frame (204), and the telescopic motor (2013) is installed in the cross slot on the composite mill module frame (204); The end of the telescopic shaft of the telescopic motor (2013) is fixed to the cross-shaped pressure shaft (2012), driving the cross-shaped pressure shaft (2012) to slide in the cross groove; a ball head is arranged at the lower end of the cross-shaped pressure shaft (2012), the ball head extends into the waist groove of the adapter plate (104), the end of the ball head is in point contact with the bottom surface of the waist groove, and the contact point between the ball head and the bottom surface of the waist groove is the control point of the polishing pressure; while the telescopic motor (2013) drives the cross-shaped pressure shaft (2012) to slide in the cross groove, the contact point between the ball head and the bottom surface of the waist groove moves synchronously; a positioning shaft (2014) is also arranged at the lower end of the housing (2011) of the pressure adjustment mechanism; the positioning shaft (2014) is a cylinder, the end of which extends into the circular groove on the adapter plate (104) to form a match; the cross-shaped pressure shaft (2012) matches the waist groove on the adapter plate (104), and is used to fix the relative position of the composite tool module (1) and the composite grinding machine module (2).

7. The polishing device according to claim 6, characterized in that: The composite grinding mill module (2) further comprises an electric slip ring (202), a second motor (207), and a driving gear (208); The upper ring of the electric slip ring (202) is fixedly connected to the composite mill module frame (204), and the lower ring of the electric slip ring (202) is fixedly connected to the pressure regulating mechanism housing (2011); the second motor (207) is installed on the composite mill module frame (204), the driving gear (208) is installed on the output shaft of the second motor (207), and the driving gear (208) cooperates with the gear of the pressure regulating mechanism (201).

8. The polishing device according to claim 6, characterized in that: The pressure regulating mechanism (201) further comprises a driven gear (2015); The driven gear (2015) is mounted on the composite grinding mill module frame (204), and the driven gear (2015) is meshed with the driving gear (208).

9. The polishing device according to claim 1, characterized in that: Active control of polishing pressure distribution is achieved by changing the position of the contact pressure control point, thereby optimizing the removal function shape.

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