Imaging device and imaging system

Abstract

The invention discloses an imaging device and an imaging system, the imaging device comprises a lighting module, an imaging module, a light path switching module and a plurality of objective lenses which are all accommodated in an inner cavity enclosed by a shell, the plurality of objective lenses are respectively embedded in the shell and penetrate through the shell, and the magnifications of the plurality of objective lenses are different; the illumination module is used for emitting an illumination light beam, the light path switching module is used for switching the illumination light beam to different objective lenses and irradiating an imaging light beam to the imaging module, and the imaging light beam is formed after the illumination light beam penetrates through one objective lens and is reflected by a sample. And the objective lens does not need to move relative to the shell, so that dust is not easily generated at the objective lens due to friction, and high cleanliness of the imaging device can be realized. Meanwhile, light path switching is achieved through the internal light path switching module, the illumination light beams are cut into the corresponding objective lenses, switching of different multiplying powers is achieved, the probability that a sample is polluted by internal dust can be reduced through the closed imaging device, and the cleanliness of the imaging device can be improved.

Description

Technical Field

[0001] The present application relates to the field of microscopic imaging technology, and in particular to an imaging device and an imaging system. Background Art

[0002] In response to the inspection requirements of objects / defects of different sizes, multi-magnification and high-magnification microscopic imaging systems are designed with different technical solutions. Usually, the microscopic imaging system is composed of an illumination device, an objective lens, a tube lens and a camera to achieve microscopic imaging. Based on the multi-magnification requirements, a "linear" or "rotary" switching objective lens is adopted to achieve the magnification change. However, in order to ensure the switching of multi-magnification objective lenses, the bottom of the objective lens module cannot be fully sealed. When the objective lens is switched, the friction between the structures generates dust, which easily contaminates the sample surface. Therefore, how to achieve multi-magnification objective lens switching and improve the cleanliness of the microscopic imaging system is an urgent problem to be solved. Summary of the invention

[0003] The technical problem to be solved by the embodiments of the present application is to provide an imaging device and an imaging system that can realize multi-magnification objective lens switching and is conducive to improving cleanliness.

[0004] In a first aspect, the present application provides an imaging device, which includes a shell, an illumination module, an imaging module, an optical path switching module and multiple objective lenses, wherein the illumination module, the imaging module, the optical path switching module and the multiple objective lenses are all accommodated in an inner cavity enclosed by the shell, and the multiple objective lenses are respectively embedded in the shell and penetrate the shell, and the magnifications of the multiple objective lenses are all different; the illumination module is used to emit an illumination light beam, the optical path switching module is used to switch the illumination light beam to different objective lenses, and is used to irradiate an imaging light beam to the imaging module, wherein the imaging light beam is formed by the illumination light beam passing through one of the objective lenses and then being reflected by a sample.

[0005] In the present application, multiple objective lenses are fixed on the housing, and the objective lenses do not need to move relative to the housing. From the appearance, the imaging device is in a closed and static state, so it is not easy to generate dust due to friction at the objective lenses, which is conducive to achieving high cleanliness of the imaging device. At the same time, the optical path switching is realized through the internal optical path switching module, and the illumination light beam is cut into the corresponding objective lens to achieve different magnification switching. Since the imaging device is set as a device with a closed cavity, the internal devices and samples are effectively isolated. Even if the optical path switching module and other devices have friction and dust, the dust can be collected in the inner cavity, reducing the possibility of dust contamination of the sample, which is conducive to improving the cleanliness of the imaging device.

[0006] In combination with the first aspect, in a possible implementation, the optical path switching module includes a first reflector and a second reflector, and the first reflector and the second reflector are rotatable relative to multiple objective lenses respectively. The illumination light beam passes through the first reflector, the second reflector and the first objective lens in sequence and then irradiates the sample. The imaging light beam passes through the first objective lens, the second reflector and the first reflector in sequence and then irradiates the imaging module. The first objective lens is one of the multiple objective lenses.

[0007] In this possible implementation, the first objective lens is any one of a plurality of objective lenses, specifically an objective lens corresponding to a target magnification selected during use. The internal optical path is switched by rotating the first reflector and the second reflector, so that the internal optical path is switched to a different objective lens, thereby switching objective lenses of different magnifications. The first reflector and the second reflector realize the optical path turning of the illumination light beam and the imaging light beam, and the implementation method is simple, which is conducive to cost saving and will not affect the imaging result.

[0008] In combination with the first aspect, in a possible implementation manner, the first reflector has a first reflective surface, the second reflector has a second reflective surface, and the first reflective surface and the second reflective surface are arranged opposite to each other and are parallel.

[0009] In this possible implementation, the first reflective surface and the second reflective surface are always parallel. Regardless of the rotation accuracy of the driving components of the first reflector and the second reflector, the imaging position of the imaging light beam on the imaging module will not change after passing through the first reflector and the second reflector, and the imaging device has a high position accuracy.

[0010] In combination with the first aspect, in a possible implementation, the imaging module is located on the transmission optical path of the imaging light beam, the imaging module is used to receive the imaging light beam reflected by the first reflector, and the first reflector and the second reflector are both rotatable around the central axis of the imaging module relative to the multiple objective lenses.

[0011] In this possible implementation, the positions of the first reflector and the second reflector relative to the imaging module remain unchanged, and there is no need to adjust and calibrate the two reflectors and the imaging module.

[0012] In combination with the first aspect, in a possible implementation manner, the multiple objective lenses are evenly arranged in a circle.

[0013] In this possible implementation, multiple objective lenses evenly arranged in a circle are fixed on the outer shell, and the optical path switching module only needs to be aligned with the center point of one of the objective lenses during assembly. When it is necessary to switch objective lenses of different magnifications, it can be quickly positioned at the center point of the corresponding objective lens. When the optical path switching module rotates, it can be quickly aligned with the center point of the objective lens, which is beneficial to improve the position accuracy of the imaging device.

[0014] In combination with the first aspect, in a possible implementation, multiple objective lenses are arranged around the first reflector, and the multiple objective lenses are located on the same side of the second reflector; when the first objective lens and the second reflector are both on the transmission light path of the illumination light beam or the imaging light beam, along the stacking direction of the second reflector and the multiple objective lenses, the orthographic projection of the second reflector at least partially overlaps with the orthographic projection of the first objective lens.

[0015] In this possible implementation, during the rotation process, the first reflector is always located in the space surrounded by multiple objective lenses, and the multiple objective lenses are always located on the same side of the second reflector. When the second reflector and the first objective lens are both on the transmission light path of the illumination beam or the imaging beam, the second reflector can reflect the illumination beam to the first objective lens. Similarly, the imaging beam passes through the first objective lens on the transmission light path and then irradiates the second reflector. There is no need to readjust the positions of the second reflector and the first objective lens, which is beneficial to improving the calibration efficiency. In this way, the illumination beam from the lighting module is directly incident on the first objective lens after being reflected by the first reflector and the second reflector, and the imaging beam is directly incident on the second reflector after passing through the first objective lens, which reduces the probability of the beam angle changing relative to the optical axis of the first objective lens after the optical path is switched, which is beneficial to improving the position accuracy of the imaging device.

[0016] In a possible implementation, the imaging module includes a camera, a tube lens and a dichroic mirror. The camera, the tube lens, the dichroic mirror and the first reflector are arranged in sequence, and the imaging light beam reflected by the first reflector passes through the dichroic mirror and the tube lens in sequence to irradiate the camera.

[0017] In this possible implementation, the spatial positions among the camera, the tube lens, the first objective lens and the sample remain unchanged, the imaging light beam between the tube lens and the first reflector is parallel light of different angles, the relative position of the second reflector and the first reflector also remains unchanged, the imaging light beam between the first reflector and the second reflector is also parallel light, when the second reflector is aligned with the first objective lens, the imaging light beam between the second reflector and the first objective lens is parallel light of different angles, when the objective lens of the same magnification is used, the imaging light beam in the middle part of the tube lens and the first objective lens is parallel light of different angles, the angle of the imaging light beam remains unchanged, and the imaging position on the imaging surface of the camera after passing through the tube lens also remains unchanged, so that the imaging device has a high position accuracy.

[0018] In a possible implementation, the imaging device further includes a beam splitter, which is used to reflect the illumination beam emitted by the illumination module to the optical path switching module, and to transmit the imaging beam emitted by the optical path switching module to the imaging module.

[0019] In a possible implementation, the imaging device further includes a focusing module, which is used to emit a focusing beam, and the focusing beam is irradiated to the sample via the optical path switching module and one of the objective lenses.

[0020] In this possible implementation, the focusing module performs automatic focusing according to the focusing light beam reflected by the sample, which is beneficial to improving the clarity of the imaging result of the imaging module.

[0021] In a second aspect, the present application provides an imaging system, which includes the imaging device of the first aspect. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0023] Figure 1 A schematic diagram of the structure of an imaging system provided in one embodiment of the present application; Figure 2 A schematic diagram of a moving path of a sample in an imaging device provided in an embodiment of the present application; Figure 3 A schematic diagram of an imaging device provided in one embodiment of the present application; Figure 4 A schematic diagram of a light path at an objective lens in an imaging device provided in an embodiment of the present application; Figure 5 A schematic diagram of the arrangement of multiple objective lenses provided in one embodiment of the present application; Figure 6 A schematic diagram of the internal optical path before and after the objective lens is switched according to an embodiment of the present application; Figure 7 A schematic diagram of the structure of a first reflector and a second reflector provided in an embodiment of the present application; Figure 8 A schematic diagram of another imaging device provided by an embodiment of the present application.

[0024] Description of reference numerals: 10- housing; 20- imaging module; 21- camera; 22- tube lens; 23- dichroic mirror; 30-objective lens; 31- first objective lens; 40- optical path switching module; 41-first reflecting mirror; 42-second reflecting mirror; 411 - first reflecting surface; 421 - second reflecting surface; 50-beam splitter; 60- lighting module; 61-light source; 62-first prism; 63-second prism; 64-third reflector; 70-focus module; 71-transmitter; 72-focus sensor; 100-imaging device; 200-samples; 300-Transfer stage; 1000-Imaging System. DETAILED DESCRIPTION

[0025] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings.

[0026] See also Figure 1 and Figure 2 , Figure 1 A schematic diagram of the structure of an imaging system 1000 provided in one embodiment of the present application. Figure 2 A schematic diagram of the movement path of a sample 200 in an imaging device 100 provided in an embodiment of the present application. The present application provides an imaging system 1000, which includes an imaging device 100 and a translation stage 300. The translation stage 300 is used to place the sample 200 to be tested. The imaging device 100 is used to realize imaging of samples 200 / defects of different sizes. Among them, the imaging system 1000 can be a microscopic imaging system.

[0027] The imaging device 100 includes a housing 10, an imaging module 20, a plurality of objective lenses 30, an optical path switching module 40 and an illumination module 60. The housing 10 is a sealed structure, and the housing 10 is enclosed and surrounded to form an inner cavity. The illumination module 60, the imaging module 20, the optical path switching module 40 and the plurality of objective lenses 30 are all accommodated in the inner cavity. Among them, the plurality of objective lenses 30 are respectively embedded in the housing 10 and penetrate the housing 10, and the magnifications of the plurality of objective lenses 30 are all different. The illumination module 60 is used to emit an illumination light beam. The optical path switching module 40 is used to switch the illumination light beam to different objective lenses 30, and to irradiate the imaging light beam to the imaging module 20, wherein the imaging light beam is formed by the illumination light beam passing through one of the objective lenses 30 and then being reflected by the sample 200. The imaging module 20 performs microscopic imaging according to the imaging light beam.

[0028] In the present application, a plurality of objective lenses 30 are fixed on the housing 10, and the objective lenses 30 do not need to move relative to the housing 10. From the appearance, the imaging device 100 is in a closed and stationary state, so it is not easy to generate dust due to friction at the objective lenses 30, which is conducive to achieving high cleanliness of the imaging device 100. At the same time, the optical path switching is realized through the internal optical path switching module 40, and the illumination light beam is cut into the corresponding objective lens 30 to achieve different magnification switching. Since the imaging device 100 is set as a device with a closed cavity, the internal devices and the sample 200 are effectively isolated. Even if there is friction and dust generation between the optical path switching module 40 and other devices, the dust can be collected in the inner cavity, reducing the possibility of dust contaminating the sample 200, which is conducive to improving the cleanliness of the imaging device 100.

[0029] Exemplarily, a sealing rubber may be provided at the connection between the housing 10 and the objective lens 30 to enhance the sealing of the connection between the housing 10 and the objective lens 30 and reduce the possibility of internal dust falling from the connection between the objective lens 30 and the housing 10, thereby effectively isolating the internal device from the sample 200.

[0030] Please combine Figure 2 It can be understood that when the objective lens 30 needs to be switched to image the sample 200, the sample 200 on the translation stage 300 can be adjusted to below the objective lens 30 to be used by moving the translation stage 300, such as Figure 2 As shown, Figure 2 The moving direction is only for illustration, and the specific moving direction is determined according to the arrangement of the multiple objective lenses 30. Alternatively, the objective lens 30 to be used can be aligned with the sample 200 on the translation stage 300 by moving the imaging device 100 as a whole.

[0031] Please combine Figure 3 , Figure 3 A schematic diagram of an imaging device 100 provided in one embodiment of the present application. The imaging module 20 is located on the transmission optical path of the imaging light beam, and the imaging module 20 is used to receive the imaging light beam reflected by the optical path switching module 40. Specifically, the imaging module 20 includes a camera 21, a tube lens 22, and a dichroic mirror 23. The camera 21, the tube lens 22, and the dichroic mirror 23 are arranged in sequence along one direction (such as the height direction of the imaging device 100), and the imaging light beam emitted by the optical path switching module 40 is sequentially irradiated onto the camera 21 through the dichroic mirror 23 and the tube lens 22. In the present application, microscopic imaging with different magnifications is achieved by using the imaging module 20 and objective lenses 30 with different magnifications, and finally microscopic imaging of samples 200 / defects of different sizes is completed.

[0032] Please combine Figure 3 and Figure 4 , Figure 4Schematic diagram of the optical path at the objective lens 30 in the imaging device 100 provided in an embodiment of the present application; after the illumination light beam emitted by the illumination module 60 is reflected to the optical path switching module 40, the illumination light beam is irradiated to the first objective lens 31 by the optical path switching module 40. The first objective lens 31 is any one of the multiple objective lenses 30, specifically the objective lens 30 corresponding to the target magnification selected during use, and finally irradiates the object surface of the sample 200 through the first objective lens 31, wherein the path of the illumination light beam from the illumination module 60 to the object surface of the sample 200 is as shown in FIG. Figure 3 or Figure 4 As shown by the dotted arrow in the figure. The illumination beam is reflected by the object plane of the sample 200 to form an imaging beam. The imaging beam is transmitted to the optical path switching module 40 through the first objective lens 31 in turn, and is emitted to the dichroic mirror 23 through the optical path switching module 40, and is imaged on the camera 21 through the tube lens 22. The path of the imaging beam from the object plane of the sample 200 to the camera 21 is shown in FIG. Figure 3 or Figure 4 As shown by the solid arrow in .

[0033] Among them, the spatial position between the camera 21, the tube lens 22, the first objective lens 31 and the sample 200 remains unchanged, the imaging light beam in the middle part of the tube lens 22 and the first objective lens 31 is parallel light at different angles, and the angle of the imaging light beam remains unchanged, so the imaging position on the imaging surface of the camera 21 after passing through the tube lens 22 remains unchanged, so that the imaging device 100 has a higher position accuracy, that is, the error between the position of the sample 200 in the image and the actual position of the sample 200 is small.

[0034] Please combine Figure 5 , Figure 5 The schematic diagram of the arrangement of multiple objective lenses 30 provided in one embodiment of the present application is shown in FIG. The multiple objective lenses 30 are evenly arranged in a circle, that is, the projection shape formed by the multiple objective lenses 30 is circular, and there may be a gap between two adjacent objective lenses 30, and the gap between two adjacent objective lenses 30 is the same.

[0035] In the imaging device 100 (such as Figure 3 After the objective lens 30 and the optical path switching module 40 are assembled, when calibrating the objective lens 30 and the optical path switching module 40, the center point position of each objective lens 30 can be obtained, and the optical path switching module 40 can be aligned with the center point of one of the objective lenses 30. Since a plurality of objective lenses 30 evenly arranged on the circumference are fixed on the housing 10, when it is necessary to switch objective lenses 30 of different magnifications, it is possible to quickly locate the center point of the corresponding objective lens 30 compared to reinstalling the objective lens 30. When the optical path switching module 40 rotates, it can quickly align with the center point of the objective lens 30, which is beneficial to improving the calibration accuracy of the imaging device 100, thereby improving the position accuracy of the imaging device 100.

[0036] For example, the optical path switching module 40 includes a first reflector 41 and a second reflector 42. The first reflector 41 and the second reflector 42 are arranged at intervals, and the first reflector 41 and the second reflector 42 are rotatable relative to the plurality of objective lenses 30, respectively. For example, the first reflector 41 and the second reflector 42 can be rotated by the same driving member (such as a motor), thereby reducing or avoiding the calibration between the first reflector 41 and the second reflector 42. The illumination light beam from the illumination module 60 is reflected from the first reflector 41 to the second reflector 42. Specifically, the illumination light beam passes through the first reflector 41, the second reflector 42 and the first objective lens 31 in sequence and then irradiates the sample 200. The imaging light beam passes through the first objective lens 31, the second reflector 42 and the first reflector 41 in sequence and then irradiates the imaging module 20.

[0037] Please combine Figure 6 , Figure 6 FIG. 1 is a schematic diagram of the internal optical path of the objective lens 30 before and after switching according to an embodiment of the present application, wherein the path of the illumination light beam from the first reflector 41 to the second reflector 42 is as shown in FIG. Figure 6 As shown by the dotted arrow in FIG. 4 , the path of the imaging light beam from the second reflector 42 to the first reflector 41 is as follows: Figure 6 As shown by the solid arrow in . During the rotation of the first reflector 41 and the second reflector 42, the relative positions of the first reflector 41 and the second reflector 42 remain unchanged. In this way, the internal light path is switched by rotating the first reflector 41 and the second reflector 42, and the internal light path is switched to different objective lenses 30 to switch objective lenses 30 with different magnifications. The first reflector 41 and the second reflector 42 are used to realize the light path turning of the illumination light beam and the imaging light beam, which is simple to implement, helps save costs, and does not affect the imaging results.

[0038] Please combine Figure 3 and Figure 4 In one implementation, the camera 21, the tube lens 22, the dichroic mirror 23, and the first reflector 41 are sequentially arranged along the height direction of the imaging device 100, and the imaging light beam reflected by the first reflector 41 sequentially passes through the dichroic mirror 23 and the tube lens 22 to irradiate the camera 21 to realize imaging. Among them, the imaging light beam between the first reflector 41 and the tube lens 22 is parallel light.

[0039] like Figure 6As shown, for example, a plurality of objective lenses 30 are arranged around the first reflector 41, that is, the first reflector 41 is located in a space surrounded by the plurality of objective lenses 30. The plurality of objective lenses 30 are all located on the same side of the second reflector 42, for example, the plurality of objective lenses 30 as a whole and the second reflector 42 are stacked along the height direction of the imaging device 100. When the first objective lens 31 and the second reflector 42 are both on the transmission optical path of the illumination light beam or the imaging light beam, along the stacking direction of the second reflector 42 and the plurality of objective lenses 30, the orthographic projection of the second reflector 42 at least partially overlaps with the orthographic projection of the first objective lens 31. For example, along the stacking direction of the second reflector 42 and the plurality of objective lenses 30, the orthographic projection of the second reflector 42 may cover the first objective lens 31, for example, the orthographic projections of the two completely overlap, so that as much illumination light beam as possible is reflected by the second reflector 42 and enters the first objective lens 31, which is conducive to improving the imaging accuracy.

[0040] It can be understood that during the rotation process, the first reflector 41 is always located in the space surrounded by the multiple objective lenses 30, and the multiple objective lenses 30 are always located on the same side of the second reflector 42. When the first objective lens 31 and the second reflector 42 are both on the transmission optical path of the illumination beam or the imaging beam, the second reflector 42 can reflect the illumination beam to the first objective lens 31. Similarly, the imaging beam is irradiated to the second reflector 42 after passing through the first objective lens 31 on the transmission optical path. There is no need to readjust the positions of the second reflector 42 and the first objective lens 31, which is beneficial to improving the calibration efficiency. In this way, the illumination beam from the lighting module 60 is directly incident on the first objective lens 31 after being reflected by the first reflector 41 and the second reflector 42, and the imaging beam is directly incident on the second reflector 42 after passing through the first objective lens 31, which reduces the probability of the beam angle changing relative to the optical axis of the first objective lens 31 after the optical path is switched, which is beneficial to improving the position accuracy of the imaging device 100.

[0041] Please combine Figure 3 The imaging module 20 is located on the transmission optical path of the imaging light beam, and the imaging module is used to receive the imaging light beam reflected by the first reflector 41. The first reflector 41 and the second reflector 42 are both centered around the central axis of the imaging module 20 (eg Figure 3 The axis L1 shown in FIG. 1 rotates relative to the plurality of objective lenses 30 , and the positions of the first reflector 41 and the second reflector 42 relative to the imaging module 20 remain unchanged, and there is no need to adjust and calibrate the two reflectors and the imaging module 20 .

[0042] Please combine Figure 3 and Figure 7 , Figure 7A schematic diagram of the structure of the first reflector 41 and the second reflector 42 provided in an embodiment of the present application. In one implementation, the first reflector 41 has a first reflective surface 411, and the second reflector 42 has a second reflective surface 421. The structures of the first reflector 41 and the second reflector 42 may be the same. For example, the first reflector 41 and the second reflector 42 are both plane mirrors or prisms. The first reflector 41 is opposite to the second reflector 42 and the second reflector 42 is opposite to the first reflector 41. The first reflective surface 411 and the second reflective surface 421 are arranged opposite to each other. When the illumination light beam is irradiated to the first reflective surface 411, it is reflected by the first reflective surface 411 to the second reflective surface 421, and finally, after being reflected by the second reflective surface 421, it is irradiated to the object surface of the sample 200 through the first objective lens 31. After passing through the first objective lens 31, the imaging light beam is reflected by the second reflective surface 421 to the first reflective surface 411, and then reflected by the first reflective surface 411 to the imaging module 20.

[0043] In one implementation, the first reflection surface 411 and the second reflection surface 421 are arranged in parallel, that is, during the process of the first reflection mirror 41 and the second reflection mirror 42 rotating relative to the multiple objective lenses 30, the first reflection surface 411 and the second reflection surface 421 are always parallel, no matter how the rotation accuracy of the driving member driving the first reflection mirror 41 and the second reflection mirror 42 is, the imaging position of the imaging light beam on the imaging module 20 will not change after passing through the first reflection mirror 41 and the second reflection mirror 42, and the imaging device 100 has a high position accuracy, and thus has good high repeatability accuracy, wherein high repeatability accuracy means that when the imaging device 100 images the same sample 200 multiple times, the image data obtained by the multiple imaging have a high consistency and repeatability, and the error is small.

[0044] In summary, since the spatial position between the camera 21, the tube lens 22, the first objective lens 31 and the sample 200 remains unchanged, the imaging light beam between the tube lens 22 and the first reflector 41 is parallel light of different angles, the relative position of the first reflector 41 and the second reflector 42 also remains unchanged, the illumination light beam and the imaging light beam between the first reflector 41 and the second reflector 42 are also parallel light, when the second reflector 42 is aligned with the first objective lens 31, the illumination light beam between the second reflector 42 and the first objective lens 31 is parallel light of different angles, when the same magnification objective lens 30 is used for detection, the imaging light beam in the middle part of the tube lens 22 and the first objective lens 31 is parallel light of different angles, the angle of the imaging light beam remains unchanged, and the imaging position on the imaging surface of the camera 21 after passing through the tube lens 22 also remains unchanged, and the imaging device 100 has high position accuracy.

[0045] In other embodiments, the optical path switching module 40 may also be a waveguide, and the illumination light beam is guided to the corresponding first objective lens 31 through the guidance of the waveguide.

[0046] For example, the imaging device 100 further includes a beam splitter 50, which is used to reflect the illumination beam emitted by the illumination module 60 to the optical path switching module 40, and to transmit the imaging beam emitted by the optical path switching module 40 to the imaging module 20. Among them, the camera 21, the tube lens 22, the dichroic mirror 23 and the beam splitter 50 are arranged in sequence along the height direction of the imaging device 100. Since the camera 21, the tube lens 22, the dichroic mirror 23 and the first reflector 41 are arranged in sequence along the height direction of the imaging device 100, that is, in the imaging device 100, the camera 21, the tube lens 22, the dichroic mirror 23, the beam splitter 50 and the first reflector 41 are arranged in sequence along the height direction of the imaging device 100.

[0047] Specifically, the illumination beam emitted by the illumination module 60 is reflected by the beam splitter 50 to the first reflector 41 and the second reflector 42, and the second reflector 42 irradiates the illumination beam to one of the selected objective lenses 30, and finally irradiates the object surface of the sample 200 through the objective lens 30. The path of the illumination beam from the illumination module 60 to the object surface of the sample 200 is as follows: Figure 3 or Figure 4 As shown by the dotted arrow in FIG. 2 . The illumination beam is reflected by the object plane of the sample 200 to become an imaging beam. The imaging beam is transmitted through the objective lens 30 to the second reflector 42, and then reflected by the second reflector 42 to the first reflector 41, and then reflected by the first reflector 41 to the beam splitter 50. The imaging beam can directly pass through the beam splitter 50 and the dichroic mirror 23, and is imaged on the camera 21 through the tube lens 22. The path of the imaging beam from the object plane of the sample 200 to the camera 21 is shown in FIG. Figure 3 or Figure 4 As shown by the solid arrow in .

[0048] Please combine Figure 3 In one implementation, the illumination module 60 includes a light source 61, a first prism 62, a second prism 63, and a third reflector 64, which are arranged in sequence. The light source 61 is used to emit an illumination beam. The illumination beam passes through the first prism 62 and the second prism 63 in sequence, and then is reflected to the beam splitter 50 by the third reflector 64, and then irradiates the object surface of the sample 200 through the first reflector 41, the second reflector 42, and the first objective lens 31.

[0049] See also Figure 8 , Figure 8Schematic diagram of another imaging device 100 provided in one embodiment of the present application. For example, the imaging device 100 may further include a focusing module 70, which is used to emit a focusing beam, and the focusing beam is irradiated to the sample 200 through the optical path switching module 40 and one of the objective lenses 30 (i.e., the first objective lens 31). The focusing module 70 may include an emitter 71 and a focusing sensor 72, wherein the emitter 71 is used to emit the focusing beam, and the focusing sensor 72 is used to process the focusing light reflected back from the sample 200 to achieve a focusing function.

[0050] Specifically, the focusing beam emitted by the focusing module 70 is reflected by the dichroic mirror 23, enters the optical path switching module 40 through the beam splitter 50, is reflected to the first objective lens 31 through the first reflector 41 and the second reflector 42 in the optical path switching module 40, and finally irradiates the object surface of the sample 200 through the first objective lens 31. The path of the focusing beam from the emitter 71 to the object surface of the sample 200 is as follows: Figure 8 As shown by the solid arrow in . After being reflected by the object surface of the sample 200, the focusing beam returns to the focusing module 70 along the original path, and the focusing sensor 72 determines the defocus state according to the returned image signal and performs automatic focusing. The automatic focusing function is realized by the focusing module 70, which is conducive to improving the clarity of the imaging result of the object surface feature of the sample 200 by the camera 21.

[0051] In this application, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0052] The first, second and various numerical numbers involved in this document are only distinguished for the convenience of description and are not intended to limit the scope of the present application.

[0053] It should be understood that in the various embodiments of the present application, the size of the serial numbers of the above-mentioned processes does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present application.

[0054] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, a person skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. An imaging device, characterized in that: It comprises a shell, a lighting module, an imaging module, an optical path switching module and a plurality of objective lenses, wherein the lighting module, the imaging module and the optical path switching module are all accommodated in an inner cavity enclosed by the shell, the plurality of objective lenses are respectively embedded in the shell and penetrate the shell, and the magnifications of the plurality of objective lenses are all different; the lighting module is used to emit an illumination light beam, the optical path switching module is used to switch the illumination light beam to different objective lenses, and is used to irradiate the imaging light beam to the imaging module, wherein the imaging light beam is formed by the illumination light beam passing through one of the objective lenses and then being reflected by a sample.

2. The imaging device according to claim 1, characterized in that The optical path switching module includes a first reflector and a second reflector, and the first reflector and the second reflector are rotatable relative to the multiple objective lenses respectively. The illumination light beam is sequentially irradiated to the sample after passing through the first reflector, the second reflector and the first objective lens, and the imaging light beam is sequentially irradiated to the imaging module after passing through the first objective lens, the second reflector and the first reflector, and the first objective lens is one of the multiple objective lenses.

3. The imaging device according to claim 2, characterized in that The first reflector has a first reflective surface, the second reflector has a second reflective surface, and the first reflective surface and the second reflective surface are arranged opposite to each other and are parallel.

4. The imaging device according to claim 2, characterized in that: The imaging module is located on the transmission optical path of the imaging light beam, and is used to receive the imaging light beam reflected by the first reflector. Both the first reflector and the second reflector are rotatable around the central axis of the imaging module relative to the multiple objective lenses.

5. The imaging device according to claim 2, characterized in that: The plurality of objective lenses are evenly arranged in a circle.

6. The imaging device according to claim 2, characterized in that: The plurality of objective lenses are arranged around the first reflector, and the plurality of objective lenses are all located on the same side of the second reflector; when the first objective lens and the second reflector are both on the transmission optical path of the illumination light beam or the imaging light beam, along the stacking direction of the second reflector and the plurality of objective lenses, the orthographic projection of the second reflector at least partially overlaps with the orthographic projection of the first objective lens.

7. The imaging device according to claim 2, characterized in that: The imaging module includes a camera, a tube lens and a dichroic mirror. The camera, the tube lens, the dichroic mirror and the first reflector are arranged in sequence. The imaging light beam reflected by the first reflector passes through the dichroic mirror and the tube lens in sequence to irradiate the camera.

8. The imaging device according to any one of claims 1 to 7, characterized in that: The imaging device further comprises a beam splitter, which is used to reflect the illumination light beam emitted by the illumination module to the optical path switching module, and to transmit the imaging light beam emitted by the optical path switching module to the imaging module.

9. The imaging device according to any one of claims 1 to 7, characterized in that: The imaging device further comprises a focusing module, wherein the focusing module is used to emit a focusing light beam, and the focusing light beam is irradiated to the sample via the optical path switching module and one of the objective lenses.

10. An imaging system, characterized in that: The invention comprises the imaging device as claimed in any one of claims 1 to 9.

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