Molecular pump heat dissipation structure and molecular pump heat dissipation system

Abstract

The present invention relates to the technical field of object fluid devices, and discloses a heat dissipation structure for a molecular pump and a molecular pump heat dissipation system. The heat dissipation structure for the molecular pump includes: a housing, a bearing seat, a sealing assembly, and a heat dissipation air duct. The housing has a hollow inner cavity. The bearing seat is connected to the housing. The sealing assembly is arranged between the inner wall of the housing and the bearing seat, separating the hollow inner cavity into a motor cavity and a bearing cavity with a vacuum inside. The heat dissipation air duct penetrates through the housing, and the opposite sides of the motor cavity are respectively communicated with the heat dissipation air duct through an air inlet and an air outlet. With such a setting, the heat in the hollow inner cavity can be greatly reduced, the heat dissipation efficiency is improved, and the working efficiency and service life of the motor are improved.

Description

Technical Field

[0001] The invention relates to the technical field of physical fluid equipment, and in particular to a molecular pump heat dissipation structure and a molecular pump heat dissipation system. Background Art

[0002] Molecular pumps are widely used in chemical or physical experimental equipment, aerospace and industrial industries that require a vacuum environment. For small molecular pumps, high-speed operation is conducive to achieving higher performance in a smaller volume, and then higher speeds will increase the heat generated by bearing friction and the heat generated by the motor. Since the internal chamber of the molecular pump is a vacuum environment, the heat dissipation problem of the molecular pump's bearings and motors is difficult to solve, which seriously affects the performance and service life of the molecular pump.

[0003] In order to solve the problem of heat dissipation of molecular pumps, the heat dissipation methods of conventional molecular pumps are mainly air cooling and water cooling. The air cooling method mainly installs a fan and uses air to take away the heat on the surface of the pump body to achieve the effect of heat dissipation. For the same reason, water cooling is also mainly to take away the heat on the surface of the molecular pump shell. However, since the inner cavity of the molecular pump is in a vacuum environment, the heat of the motor and the heat generated by the friction of the bearings are difficult to conduct to the surface of the molecular pump shell, resulting in the inability of both methods to effectively dissipate heat. Summary of the invention

[0004] In view of this, the present invention provides a molecular pump heat dissipation structure and a molecular pump heat dissipation system to solve the problem that the conventional molecular pump heat dissipation method is difficult to effectively dissipate the heat of the molecular pump cavity.

[0005] In a first aspect, the present invention provides a molecular pump heat dissipation structure, comprising:

[0006] A housing having a hollow inner cavity;

[0007] A bearing seat connected to the housing;

[0008] A sealing assembly is disposed between the inner wall of the housing and the bearing seat to separate the hollow inner cavity into a motor cavity and a bearing cavity with a vacuum inside;

[0009] The heat dissipation duct runs through the shell, and the opposite sides of the motor cavity are connected to the heat dissipation duct through an air inlet and an air outlet respectively.

[0010] Optionally, the heat dissipation air duct includes an air inlet channel and an air outlet channel, the air inlet channel is connected to the air inlet, and the air outlet channel is connected to the air outlet.

[0011] Optionally, the inner diameter of the air outlet channel is greater than the inner diameter of the air inlet channel, and the size of the air outlet is greater than the size of the air inlet.

[0012] Optionally, a first guiding channel is formed between the outer wall of the bearing housing and the inner wall of the housing. The first guiding channel is located between the air inlet and the motor chamber and extends along the axial direction of the bearing chamber.

[0013] Optionally, the air inlet is constricted in the direction of air flow movement, and the air outlet is flared in the direction of air flow movement.

[0014] Optionally, a first filter element is provided at the port of the air inlet channel close to the outer wall of the housing, and a second filter element is provided at the port of the air outlet channel close to the outer wall of the housing.

[0015] Optionally, the sealing assembly includes a separating cylinder which is arranged along the extending direction of the main shaft, with one end connected to the bearing housing and the opposite end connected to the inner wall of the housing.

[0016] Optionally, a first annular groove is provided at the connection between the separating cylinder and the bearing housing, and a first sealing ring is arranged in the first annular groove. A second annular groove is provided at the connection between the separating cylinder and the housing, and a second sealing ring is arranged in the second annular groove.

[0017] Optionally, a third annular groove is provided between the connection of the bearing housing and the housing, and a third sealing ring is arranged in the third annular groove.

[0018] In a second aspect, the present invention further provides a molecular pump heat dissipation system, which includes the above-mentioned molecular pump heat dissipation structure and further includes a blower group, and the air outlet of the blower group faces the heat dissipation air duct.

[0019] Advantageous effects:

[0020] The present invention provides a molecular pump heat dissipation structure, including: a housing, a bearing housing, a sealing assembly and a heat dissipation air duct. The housing has a hollow inner cavity. The bearing housing is connected to the housing. The sealing assembly is arranged between the inner wall of the housing and the bearing housing, separating the hollow inner cavity into a motor chamber and a bearing chamber with a vacuum inside. The heat dissipation air duct penetrates through the housing, and the opposite sides of the motor chamber are respectively communicated with the heat dissipation air duct through an air inlet and an air outlet.

[0021] The hollow inner cavity of the housing is used to accommodate the main shaft and the motor. The hollow inner cavity penetrates the housing from bottom to top. The bearing seat is installed at the bottom of the housing, and the main shaft is rotatably installed on the bearing seat. The sealing assembly can be arranged along the extension direction of the main shaft, dividing the hollow inner cavity into a bearing cavity and a motor cavity. The bearing cavity can be evacuated to a vacuum, and the main shaft rotates in the bearing cavity. The vacuum environment can reduce the resistance suffered by the main shaft during rotation, ensuring that the main shaft can rotate at high speed. The motor is installed in the motor cavity, and the motor can drive the main shaft to rotate through the principle of electromagnetic induction. When the motor works, it will dissipate heat into the motor cavity. The heat dissipation air duct communicates with the motor cavity through the air inlet and the air outlet, changing the structure in the traditional molecular pump where the motor is in a vacuum environment. External air can flow successively along one port of the heat dissipation air duct, the air inlet, the motor cavity, the air outlet, and the other port of the heat dissipation air duct. When the low-temperature air passes through the motor cavity, it exchanges heat with the motor housing, continuously absorbs the heat of the motor housing, and sends the heat to the external environment through the air outlet.

[0022] Through the above structure, the heat in the motor and the motor cavity can be greatly reduced. As the main heat-generating component, the motor is arranged in this way, which can greatly reduce the heat in the hollow inner cavity. In addition, when the low-temperature air passes through the motor cavity, it can also exchange heat with the inner wall of the housing, the sealing assembly, and the outer wall of the bearing seat, thereby reducing the heat of the above structures, achieving the purpose of overall heat dissipation, improving the heat dissipation efficiency, and improving the working efficiency and service life of the motor. Description of the Drawings

[0023] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0024] Figure 1 It is a schematic structural diagram of the heat dissipation structure of the molecular pump according to the embodiment of the present invention;

[0025] Figure 2 is Figure 1 a partial enlarged schematic diagram at A in

[0026] Explanation of the reference numerals:

[0027] 1. Housing; 11. Motor chamber; 111. Air inlet; 112. Air outlet; 113. First guiding channel; 114. Second guiding channel; 12. Bearing chamber; 2. Bearing seat; 201. First bearing; 21. Boss; 22. Third annular groove; 23. Third sealing ring; 24. Fourth sealing ring; 31. Air inlet channel; 32. Air outlet channel; 41. Partition cylinder; 42. Second bearing; 43. First sealing ring; 44. Second sealing ring; 5. Main shaft; 51. Magnetic part; 6. Motor; 7. Base; 8. Air blower unit. Detailed implementation manners

[0028] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Apparently, the described embodiments are some but not all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0029] As Figure 1 shown, in the embodiment of the present application, a molecular pump heat dissipation structure is provided, including: a housing 1, a bearing seat 2, a sealing assembly and a heat dissipation air duct.

[0030] The housing 1 has a hollow inner cavity, and the hollow inner cavity of the housing 1 is used to accommodate the main shaft 5 and the motor 6.

[0031] The bearing seat 2 is connected to the housing 1, the hollow inner cavity penetrates the housing 1 from bottom to top, the bearing seat 2 is installed at the bottom of the housing 1, a first bearing 201 is provided on the bearing seat 2, and a second bearing 42 is provided at the top of the hollow inner cavity. The first bearing 201 and the second bearing 42 jointly support the rotation of the main shaft 5.

[0032] The sealing assembly is arranged between the inner wall of the housing 1 and the bearing seat 2, separating the hollow inner cavity into a motor chamber 11 and a bearing chamber 12 with a vacuum inside. The sealing assembly can be arranged along the extension direction of the main shaft 5 to separate the hollow inner cavity into the bearing chamber 12 and the motor chamber 11. The bearing chamber 12 can be evacuated to a vacuum, and the main shaft 5 rotates in the bearing chamber 12. The vacuum environment can reduce the resistance suffered by the main shaft 5 during rotation, ensuring that the main shaft 5 can rotate at a high speed. The motor 6 is installed in the motor chamber 11, and the motor 6 can drive the main shaft 5 to rotate through the principle of electromagnetic induction. For example, a magnetic part 51 is provided at the position on the main shaft 5 corresponding to the motor 6. After the motor 6 is powered on, a magnetic field can be generated, and thus the main shaft 5 is driven to rotate through the magnetic part 51.

[0033] The heat dissipation air duct penetrates through the housing 1. The opposite sides of the motor chamber 11 are respectively communicated with the heat dissipation air duct through the air inlet 111 and the air outlet 112. For example, the two ports of the heat dissipation air duct are respectively opened on the opposite two side walls of the housing 1. The air inlet 111 is close to one of the ports of the heat dissipation air duct and is communicated with the heat dissipation air duct, and the air outlet 112 is close to the other port of the heat dissipation air duct and is communicated with the heat dissipation air duct, so that the external air can sequentially pass through the air inlet 111, the motor chamber 11 and the air outlet 112, thereby diffusing the heat in the motor chamber 11 into the external air.

[0034] When the molecular pump is working, both the motor 6 and the main shaft 5 will generate heat. Among them, the motor 6 is the main heat generating part. When the motor 6 is working, it will dissipate heat to the motor chamber 11. The heat dissipation air duct is communicated with the motor chamber 11 through the air inlet 111 and the air outlet 112, which changes the structure in the traditional molecular pump where the motor is in a vacuum environment. The external air can flow sequentially along one port of the heat dissipation air duct, the air inlet 111, the motor chamber 11, the air outlet 112 and the other port of the heat dissipation air duct. When the low-temperature air passes through the motor chamber 11, it exchanges heat with the outer shell of the motor 6, continuously absorbs the heat of the motor shell, and sends the heat to the external environment through the air outlet 112.

[0035] Through the above structure, the heat in the motor 6 and the motor chamber 11 can be greatly reduced. The motor 6 is the main heat generating component. Such a setting can greatly reduce the heat in the hollow inner cavity. In addition, when the low-temperature air passes through the motor chamber 11, it can also exchange heat with the inner wall of the housing 1, the sealing component and the outer wall of the bearing seat 2, thereby reducing the heat of the above structures, achieving the purpose of overall heat dissipation, improving the heat dissipation efficiency, and improving the working efficiency and service life of the motor.

[0036] In this embodiment, air can be blown to the port corresponding to the air inlet 111 of the heat dissipation air duct through an external air supply device, so as to accelerate the air flow speed in the heat dissipation air duct and further accelerate the heat dissipation efficiency.

[0037] As Figure 1 shown, in this embodiment, the heat dissipation air duct includes an air inlet channel 31 and an air outlet channel 32. The air inlet channel 31 is communicated with the air inlet 111, and the air outlet channel 32 is communicated with the air outlet 112. The air inlet channel 31 and the air outlet channel 32 are respectively arranged at the opposite ends of the housing 1 and correspond to the air inlet 111 and the air outlet 112 respectively, so that the opposite ends of the housing 1 are respectively kept at relatively low temperature and relatively high temperature. The low-temperature air enters the motor chamber 11 through the air inlet channel 31 and the air inlet 111. After heat exchange, the low-temperature air becomes high-temperature air, and the high-temperature air leaves the housing 1 from the air outlet 112 and the air outlet channel 32. Such a setting is beneficial to ensuring that the air can efficiently dissipate heat from the motor chamber 11.

[0038] As Figure 1As shown, in this embodiment, the inner diameter of the air outlet channel 32 is larger than that of the air inlet channel 31. For example, the cross-sections of both the air outlet channel 32 and the air inlet channel 31 are circular. The inner diameter of the air inlet channel 31 is D1, and the inner diameter of the air outlet channel 32 is D2, where D2 > D1. The air inlet channel 31 with a smaller inner diameter can increase the air flow rate, and the air outlet channel 32 with a larger inner diameter can ensure that the air after heat exchange can be efficiently discharged. The size of the air outlet 112 is larger than that of the air inlet 111. For the same reason, the smaller-sized air inlet 111 can increase the air velocity entering the motor chamber 11, and the larger-sized air outlet 112 can improve the discharge efficiency of the air after heat exchange. Increasing the air velocity entering the motor chamber 11 is beneficial to further improving the heat dissipation efficiency.

[0039] As Figure 1 shown, in this embodiment, a first guiding channel 113 is formed between the outer wall of the bearing seat 2 and the inner wall of the housing 1. The first guiding channel 113 is located between the air inlet 111 and the motor chamber 11 and extends along the axis direction of the bearing chamber 12. The top of the bearing seat 2 has a boss 21, and a first guiding channel 113 is formed between the outer wall of the boss 21 and the inner wall of the housing 1. After the air passes through the air inlet 111, it will move along the axial direction of the bearing chamber 12 under the guidance of the first guiding channel 113. The motor 6 can be arranged at a position facing the first guiding channel 113, so that the low-temperature air will directly move towards the direction of the outer shell of the motor 6, increasing the air pressure on the side of the air inlet 111 and pushing the air to flow towards the direction of the air outlet 112, thereby performing heat exchange on the overall outer shell of the motor 6 and improving the heat dissipation efficiency.

[0040] For the same reason, on the side of the air outlet 112, a second guiding channel 114 is formed between the boss 21 and the inner wall of the housing 1, and the air after heat exchange moves towards the side of the air outlet 112 under the guidance of the second guiding channel 114.

[0041] As Figure 1 shown, in this embodiment, the air inlet 111 is a constriction in the direction of air flow movement, further increasing the air flow rate of the low-temperature air entering the motor chamber 11, and the air outlet 112 is a flaring in the direction of air flow movement, further increasing the efficiency of the air after heat exchange being discharged from the motor chamber 11.

[0042] As Figure 1 shown, in this embodiment, a first filter element is provided at the port of the air inlet channel 31 close to the outer wall of the housing 1, and a second filter element is provided at the port of the air outlet channel 32 close to the outer wall of the housing 1. The first filter element and the second filter element can be filter meshes, thus preventing dust or other impurities from entering the motor chamber 11.

[0043] As Figure 1As shown, in this embodiment, the sealing assembly includes a spacer cylinder 41. The spacer cylinder 41 is arranged along the extending direction of the main shaft, with one end connected to the bearing housing 2 and the opposite end connected to the inner wall of the housing 1. The spacer cylinder divides the hollow inner cavity into a bearing cavity 12 and a motor cavity 11. Part of the bearing cavity 12 is formed inside the spacer cylinder 41, and the motor 6 can be installed on the outer wall of the spacer cylinder 41. The outside of the spacer cylinder 41 is the motor cavity 11 that communicates with the external environment.

[0044] As Figure 1 and Figure 2 As shown, in this embodiment, a first annular groove is provided at the connection between the spacer cylinder 41 and the bearing housing 2, and a first sealing ring 43 is arranged in the first annular groove. A second annular groove is provided at the connection between the spacer cylinder 41 and the housing 1, and a second sealing ring 44 is arranged in the second annular groove, thereby increasing the sealing performance of the connection between the spacer cylinder 41 and the bearing housing 2 and the inner wall of the housing 1, and ensuring that the bearing cavity 12 is in a stable vacuum environment.

[0045] As Figure 1 As shown, in this embodiment, a third annular groove 22 is provided between the connection of the bearing housing 2 and the housing 1, and a third sealing ring 23 is arranged in the third annular groove 22, thereby increasing the sealing performance of the connection between the housing 1 and the bearing housing 2.

[0046] As Figure 1 As shown, in this embodiment, a base 7 is provided at the bottom of the bearing housing 2. The base 7 is used to block the duct below the bearing housing 2. A fourth annular groove is provided at the connection between the base 7 and the bearing housing 2, and a fourth sealing ring 24 is arranged in the fourth annular groove.

[0047] As Figure 1 As shown, in the embodiment of the present application, a molecular pump heat dissipation system is also provided, which includes the above-mentioned molecular pump heat dissipation structure, and also includes a fan group 8. The air outlet of the fan group 8 faces the heat dissipation duct.

[0048] The fan group 8 can blow air into the heat dissipation duct through the air outlet, thereby increasing the wind speed and further improving the heat dissipation effect. In addition, the air outlet of the fan group 8 can synchronously blow air to the outer wall of the housing 1, thereby increasing the speed of air flowing through the outer wall of the housing 1 and improving the heat dissipation efficiency of the housing 1.

[0049] Although the embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A molecular pump heat dissipation structure, characterized in that: include: A housing (1) having a hollow inner cavity; A bearing seat (2) connected to the bottom of the housing (1); a sealing assembly, arranged between the inner wall of the housing (1) and the bearing seat (2), and dividing the hollow inner cavity into a motor cavity (11) and a bearing cavity (12) with a vacuum inside, wherein the bearing cavity (12) is used for mounting the main shaft (5); A heat dissipation duct runs through the shell (1), and opposite sides of the motor cavity (11) are connected to the heat dissipation duct through an air inlet (111) and an air outlet (112), respectively. The air inlet (111) and the air outlet (112) are arranged relatively to each other along the radial direction of the main shaft (5), wherein the heat dissipation duct comprises an air inlet channel (31) and an air outlet channel (32), the air inlet channel (31) is connected to the air inlet (111), and the air outlet channel (32) is connected to the air outlet (112), the inner diameter of the air outlet channel (32) is larger than the inner diameter of the air inlet channel (31), the size of the air outlet (112) is larger than the size of the air inlet (111), the air inlet (111) is a contraction in the direction of air flow movement, and the air outlet (112) is an expansion in the direction of air flow movement.

2. The molecular pump heat dissipation structure according to claim 1, characterized in that: A first guide channel (113) is formed between the outer wall of the bearing seat (2) and the inner wall of the housing (1); the first guide channel (113) is located between the air inlet (111) and the motor cavity (11), and extends along the axial direction of the bearing cavity (12).

3. The molecular pump heat dissipation structure according to claim 1, characterized in that: A first filter is provided at a port of the air inlet channel (31) close to the outer wall of the shell (1), and a second filter is provided at a port of the air outlet channel (32) close to the outer wall of the shell (1).

4. The molecular pump heat dissipation structure according to claim 1, characterized in that: The sealing assembly comprises a spacer (41), which is arranged along the extension direction of the main shaft (5), one end of which is connected to the bearing seat (2) and the opposite end of which is connected to the inner wall of the housing (1).

5. The molecular pump heat dissipation structure according to claim 4, characterized in that: A first annular groove is provided at the connection between the spacer (41) and the bearing seat (2), a first sealing ring (43) is provided in the first annular groove, and a second annular groove is provided at the connection between the spacer (41) and the housing (1), a second sealing ring (44) is provided in the second annular groove.

6. The molecular pump heat dissipation structure according to claim 1, characterized in that: A third annular groove (22) is formed between the bearing seat (2) and the housing (1), wherein a third sealing ring (23) is arranged in the third annular groove (22).

7. A molecular pump cooling system, characterized in that: It comprises the molecular pump heat dissipation structure according to any one of claims 1 to 6, and further comprises an air supply unit (8), wherein an air supply port of the air supply unit (8) faces the heat dissipation air duct.

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