Full-automatic detection device and method for resistivity of zone-melting germanium ingot

Abstract

The invention relates to a zone-melting germanium ingot resistivity full-automatic detection device and method. The device comprises a controller, a material conveying mechanism, and a weighing module, a contour measurement module, a temperature monitoring module and a resistivity test platform which are connected based on the material conveying mechanism; a material supply module of the material conveying mechanism is connected with a weighing module based on a conveyor, the weighing module is connected with a contour measurement module based on a material conveying robot, and the contour measurement module is connected with a resistivity test platform based on the material conveying robot. The device is controlled based on the method to realize full-automatic resistivity detection. The resistivity detection process of the zone-melting germanium ingot is fully automatic, the detection result deviation caused by human factors is eliminated, the labor intensity of workers is reduced, and meanwhile, the production process is optimized and standardized. Functional modules of material coding, weighing, overall dimension measurement, temperature monitoring, resistivity testing and the like required by resistivity detection are comprehensively managed by a special data acquisition and calculation system, and the testing process is more efficient and accurate.

Description

Technical Field

[0001] The present application relates to the technical field of germanium ingot detection, and in particular to a fully automatic detection device and method for resistivity of zone melting germanium ingots. Background Art

[0002] The relevant requirements, test methods and inspection rules for zone melting germanium ingots are currently implemented manually in accordance with relevant regulations. The operating methods are: manually stick labels, identify and enter material numbers through label information on the zone melting germanium ingots; use precision electronic scales to weigh the germanium ingots and record them through paper documents; use vernier calipers to measure any cross-sectional dimensions of the zone melting germanium ingots and record them through paper documents; control the surface temperature of the zone melting germanium ingots by adjusting the indoor air conditioning, and use an infrared temperature gun to measure whether the surface temperature of the germanium ingots meets the standard; enter the document information (including number, ingot weight W, ingot length L, ingot width B, ingot height H) into the test system; manually place the zone melting germanium ingot to be tested on the test bench fixture as required, complete the clamping of the zone melting germanium ingot by rotating the right screw, and complete the resistivity test of the zone melting germanium ingot by manually moving the probe assembly (including horizontal and vertical directions); read and identify the unqualified resistivity position through the test software, and make a cut-off mark with a marker pen.

[0003] At present, the entire detection process is basically manual operation, and the detection precision and accuracy are greatly affected by human factors; the cross-section of the zone melting germanium ingot is an inverted trapezoid, and the contour edges are all rounded. The cross-sectional dimensions are measured using a vernier caliper, and the measurement deviation is large; the resistivity detection is greatly affected by temperature factors, and it is difficult to ensure the temperature accuracy control requirements of the germanium ingot surface using traditional household air conditioners; an infrared temperature gun is used to monitor the surface temperature of the zone melting germanium ingot, and the measurement precision and accuracy deviation is large; the measurement data is manually recorded or entered into the system, and the entire process is prone to errors; the X-axis and Z-axis displacements of the probe are achieved by manually operating fixtures, which are inefficient and have relatively poor repeatability.

[0004] The main factors affecting resistivity detection include weight, cross-sectional area, temperature, test mechanism and system, etc. It is particularly important to strictly control each process during the detection process. Conventional technologies mainly have human operation factors and parameter data collection and measurement deviations, which affect the accuracy and reliability of the measurement results. Summary of the invention

[0005] In order to solve or partially solve the problems existing in the related art, the present application provides a device and method for fully automatic detection of resistivity of zone melting germanium ingots, which realizes fully automatic detection of resistivity through a controller to avoid measurement errors caused by human interference.

[0006] The first aspect of the present application provides a fully automatic resistivity detection device for a zone melting germanium ingot, comprising: a controller, a feeding mechanism and a weighing module connected to the feeding mechanism, a contour measurement module, a temperature monitoring module, and a resistivity testing platform. The feeding mechanism comprises a feeding module, a conveyor, and a feeding robot. The feeding module is connected to the weighing module based on the conveyor, the weighing module is connected to the contour measurement module based on the feeding robot, the contour measurement module comprises a clamping cylinder, an angle adjustment fixture, and a laser sensor, the contour measurement module is connected to the resistivity testing platform based on the feeding robot, and the resistivity testing platform comprises a clamping cylinder, an angle adjustment fixture, a probe assembly, and a resistivity tester.

[0007] Among them, the fully automatic resistivity detection device for zone melting germanium ingots also includes a laser marking module and a code scanning system. The laser marking module includes a lifting mechanism, a flipping mechanism, a marking machine and a dust removal and smoke exhaust device. The laser marking module and the code scanning system are arranged between the feeding mechanism and the weighing module.

[0008] Among them, the feeding module includes a lifting mechanism, a material box and a manipulator. The material box is provided with multiple placement layers and multiple placement positions are provided in the placement layers. The germanium ingots are arranged in the placement positions and are placed on the conveyor based on the manipulator.

[0009] The weighing module is provided with an electric lifting platform and an electronic scale, and the germanium ingot is separated from the conveyor based on the electric lifting platform to realize automatic weighing.

[0010] Among them, the contour measurement module also includes conductive silicone, dust-proof servo module, drag chain and slide rail. The conductive silicone is used to assist in the positioning of the germanium ingot, the dust-proof servo module is used to prevent dust from entering the equipment, and the drag chain and slide rail are used to support and move the contour measurement module.

[0011] Among them, the fully automatic resistivity detection device for zone melting germanium ingots also includes a closed machine cover for controlling environmental indicators and a constant temperature and humidity precision air-conditioning system.

[0012] The second aspect of the present application provides a method for fully automatic resistivity detection of zone melting germanium ingots, which is applicable to the device for fully automatic resistivity detection of zone melting germanium ingots provided in the first aspect, and comprises the following steps:

[0013] After obtaining the quality information of the germanium ingot, the feeding robot is controlled to clamp the germanium ingot and move it to the contour measurement module;

[0014] Control the clamping cylinder to limit the germanium ingot, and control the laser sensor to measure and obtain the ingot width, ingot height and temperature data of the germanium ingot;

[0015] Control the feeding robot to move the germanium ingot to the resistivity test platform, control the clamping cylinder to clamp the germanium ingot, adjust the test surface and the probe level based on the angle adjustment fixture, and control the probe to cooperate with the resistivity tester to obtain resistance data;

[0016] The resistivity data is calculated based on the ingot width, ingot height and resistance data, and the resistivity of the germanium ingot is obtained after temperature correction based on the temperature data.

[0017] In some embodiments of the second aspect, the method further comprises the following steps:

[0018] After obtaining the detection signal, the robot is controlled to take the germanium ingot from the feeding module and shift it to the conveyor, and the conveyor is controlled to convey the germanium ingot to the laser marking module for laser marking to obtain a marked germanium ingot;

[0019] The marked germanium ingot is transported to the scanning system for scanning by the lifting mechanism, and then the conveyor is controlled to transport the marked germanium ingot to the weighing module for weighing.

[0020] In some embodiments of the second aspect, the method further comprises the following steps:

[0021] Obtain the scanning data of the scanning system and the resistivity data of the resistivity testing platform;

[0022] When the scanned data and resistivity data are normal, control the normal material to be transported to the subsequent process;

[0023] When the code scanning recognition fails and the resistivity of the germanium ingot is NG, it is judged as an abnormal material;

[0024] Control the feeding robot to buffer abnormal materials to the conveyor.

[0025] The technical solution provided by this application may have the following beneficial effects:

[0026] The present application provides a fully automatic resistivity detection device and method for zone melting germanium ingots, which makes the resistivity detection process of zone melting germanium ingots fully automated, eliminates the deviation of detection results caused by human factors and reduces the labor intensity of workers, while also optimizing and standardizing the production process; the cross-sectional size of the germanium ingot is truly measured and fed back by a laser profiler, and the required cross-sectional size is measured more accurately, and the position and number of times required to be measured can be accurately controlled and set; the shift and probe feeding of the resistivity test are fully automatically controlled, the walking accuracy is higher, and the test is faster and more accurate; the material coding, weighing, profile measurement, temperature monitoring, resistivity testing and other functional modules required for resistivity detection are managed by a special data acquisition and calculation system, and the test process is more efficient and accurate.

[0027] It should be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The above and other objects, features and advantages of the present application will become more apparent through a more detailed description of exemplary embodiments of the present application in conjunction with the accompanying drawings, wherein the same reference numerals generally represent the same components in the exemplary embodiments of the present application.

[0029] Figure 1 It is a structural schematic diagram of a fully automatic detection device for resistivity of zone melting germanium ingots shown in the first embodiment of the present application;

[0030] Figure 2 is a partially enlarged schematic diagram of the contour measurement module shown in the first embodiment of the present application;

[0031] Figure 3 It is a partially enlarged schematic diagram of the resistivity testing platform shown in the first embodiment of the present application;

[0032] Figure 4 It is a schematic flow chart of a fully automatic detection method for resistivity of a zone melting germanium ingot shown in the second embodiment of the present application;

[0033] Figure 5 It is a flow chart of the fully automatic resistivity detection method of the zone melting germanium ingot shown in the third embodiment of the present application.

[0034] Reference numerals:

[0035] In the figure, 1-feeding module, 2-laser marking module, 3-barcode scanning system, 4-weighing module, 5-feeding robot, 6-contour measurement module, 61-first clamping cylinder, 62-first conductive silicone, 63-first angle adjustment fixture, 64-laser sensor, 65-dust-proof servo module, 7-temperature monitoring module, 8-resistivity test platform, 81-second clamping cylinder, 82-second conductive silicone, 83-second angle adjustment fixture, 84-probe assembly, 85-dust-proof servo module, 9-resistivity tester, 10-data acquisition and calculation system, 11-constant temperature and humidity precision air-conditioning system, 12-PLC electrical control system, 13-conveyor A, 14-conveyor B, 15-conveyor C. DETAILED DESCRIPTION

[0036] The embodiments of the present application will be described in more detail below with reference to the accompanying drawings. Although the embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the embodiments described herein. On the contrary, these embodiments are provided to make the present application more thorough and complete, and to fully convey the scope of the present application to those skilled in the art.

[0037] It should be understood that although the terms "first", "second", "third", etc. may be used in this application to describe various information, this information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of this application, the first information may also be referred to as the second information, and similarly, the second information may also be referred to as the first information. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0038] In the description of the present application, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0039] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0040] The technical solution of the embodiments of the present application is described in detail below with reference to the accompanying drawings.

[0041] Embodiment 1

[0042] like Figure 1 The fully automatic resistivity detection device for zone melting germanium ingot shown includes: a data acquisition and calculation system 10, a PLC electrical control system 12, a feeding mechanism and a weighing module 4 connected to the feeding mechanism, a profile measurement module 6, a temperature monitoring module 7, and a resistivity test platform 8. The data acquisition and calculation system 10 is used to connect with the weighing module 4, the profile measurement module 6, the temperature monitoring module 7, and the resistivity test platform 8 to receive data and perform resistivity calculations. The PLC electrical control system 12 is used to connect with various control devices, and the automatic control device operates to realize automatic resistivity detection.

[0043] The temperature monitoring module 7 uses a professional infrared thermometer (equipped with a GPR probe and a GP display) for measurement, and can accurately control and set the position and number of times to be measured.

[0044] The feeding mechanism includes a feeding module 1, a conveyor A13, a conveyor B14, a conveyor C15 and a feeding robot 5. The feeding module 1 includes a lifting mechanism, a material box and a manipulator. The material box is provided with 10 layers of placement layers, each of which is provided with 12 placement positions. The germanium ingots are placed in the placement positions. The PLC electrical control system 12 controls the material taking manipulator to take the molten germanium ingot to be tested in the material box and shift it to the conveyor A13. The conveyor A13 accurately conveys the germanium ingot to the laser marking module 2 for laser marking.

[0045] The laser marking module is equipped with a lifting mechanism, a flipping mechanism, a marking machine and a dust removal and fume exhaust device. Then the conveyor A13 transports the marked zone melting germanium ingot to the code scanning system 3 for scanning, and the conveyor A13 transports the scanned zone melting germanium ingot to the weighing module 4 for weighing.

[0046] The weighing module 4 is equipped with an electric lifting platform, on which a precision electronic scale is installed, which lifts the zone melting germanium ingot away from the conveyor A13 to achieve automatic weighing. The feeding robot 5 grabs the weighed zone melting germanium ingot from the conveyor A13 and moves it to the contour measurement module 6.

[0047] like Figure 2 As shown, the contour measurement module 6 includes a first clamping cylinder 61, a first conductive silicone 62, a first angle adjustment fixture 63, a laser sensor 64, a dustproof servo module 65, a marble platform, a drag chain, a slide rail, etc. The marble platform is used to provide a stable measurement environment to avoid the influence of external factors on the measurement results; the drag chain and the slide rail are used to support and move the measurement equipment.

[0048] The first clamping cylinder 61 is used to fix or clamp the molten germanium ingot to ensure stability and accuracy during the measurement process. The first conductive silicone 62 is used to absorb the light reflected from the surface to facilitate the accurate positioning of the laser sensor 64 and improve the measurement accuracy. The first angle adjustment fixture 63 is used to adjust and control the angle during the measurement process to ensure the accuracy of the measurement. The laser sensor 64 uses a laser beam to scan or irradiate the surface of the molten germanium ingot, and calculates the dimensional data by receiving the signal reflected by the laser to obtain the dimensional data of the ingot width B and the ingot height H. The dustproof servo module 65 is used to protect the measuring equipment from dust and pollution.

[0049] The contour measurement module 6 completes the measurement of the ingot width B (maximum value / minimum value) and ingot height H (maximum value / minimum value) of the zone melting germanium ingot, and uploads the measurement results to the data acquisition and calculation system 10. During the measurement process, the temperature monitoring module 7 monitors in real time whether the surface temperature of the germanium ingot meets the requirements. Then the feeding robot 5 intervenes and transports the zone melting germanium ingot after the size measurement to the resistivity testing platform 8 for resistivity testing.

[0050] like Figure 3The resistivity test platform 8 shown includes a second clamping cylinder 81, a second conductive silicone 82, a second angle adjustment fixture 83, a probe assembly 84, a dustproof servo module 85 and a resistivity tester 9. The second clamping cylinder 81 is configured to clamp the zone melting germanium ingot, and the second angle adjustment fixture 83 adjusts the test surface and the probe level; the marble platform is equipped with a dustproof servo module 85, and the dustproof servo module 85 is equipped with a probe assembly 84. The displacement and extension of the probe are controlled by the PLC electrical control system 12, and the resistivity tester 9 is cooperated to complete the fully automatic detection of the resistivity of the germanium ingot. In order to correctly measure the resistivity of the material, the probe assembly 84 is set to contact the surface of the germanium ingot. The function of the probe is to ensure that the signal can be effectively transmitted and ensure the accuracy of the measurement. There are usually sensors and contact points on the probe, and these designs can ensure that the tester can accurately read the resistivity value of the material to be tested.

[0051] The detection information is uploaded to the data acquisition and calculation system 10 for storage (mainly including resistivity NG point position information, resistivity curve and abnormal information, etc.). During the above whole process, if there is abnormal material (including unsuccessful code scanning recognition, resistivity NG of the entire zone melting germanium ingot, etc.), the feeding robot 5 intervenes to cache the abnormal material to the conveyor C15; normal material is transported to the subsequent process through the conveyor B14.

[0052] The entire testing process is completed in a closed machine cover, which is equipped with a constant temperature and humidity precision air conditioning system 11 to effectively control the temperature, humidity and other indicators of the testing environment to meet the testing requirements.

[0053] Embodiment 2

[0054] like Figure 4 A method for fully automatic detection of resistivity of a zone melting germanium ingot is shown, comprising the following steps:

[0055] S11, after obtaining the quality information of the germanium ingot, controlling the feeding robot to clamp the germanium ingot and move it to the contour measurement module;

[0056] S12, controlling the clamping cylinder to limit the germanium ingot, and controlling the laser sensor to measure to obtain the ingot width, ingot height and temperature data of the germanium ingot;

[0057] S13, controlling the feeding robot to shift the germanium ingot to the resistivity test platform, controlling the clamping cylinder to clamp the germanium ingot, adjusting the level of the test surface and the probe based on the angle adjustment fixture, and controlling the probe to cooperate with the resistivity tester to obtain resistance data;

[0058] S14. Resistivity data is calculated based on the ingot width, ingot height and resistance data, and the resistivity of the germanium ingot is obtained after temperature correction based on the temperature data.

[0059] Embodiment 3

[0060] like Figure 5A method for fully automatic resistivity detection of zone melting germanium ingots is shown, which is applicable to the device for fully automatic resistivity detection of zone melting germanium ingots as shown in the first embodiment, and comprises the following steps:

[0061] S21, after obtaining the detection signal, controlling the manipulator to take the germanium ingot from the feeding module and shift it to the conveyor, controlling the conveyor to convey the germanium ingot to the laser marking module for laser marking to obtain a marked germanium ingot;

[0062] S22, after the marked germanium ingot is transported to the code scanning system through the lifting mechanism for scanning, the conveyor is controlled to transport the marked germanium ingot to the weighing module for weighing;

[0063] The laser marking and code scanning system can accurately identify the identity information of the zone melting germanium ingot, avoiding the situation where the resistivity NG germanium ingot cannot be accurately identified and picked out when multiple germanium ingots are tested together.

[0064] S23, after obtaining the quality information of the germanium ingot, controlling the feeding robot to clamp the germanium ingot and move it to the contour measurement module;

[0065] The weight of the germanium ingot is one of the basic parameters required to calculate resistivity. Resistivity can be calculated by dividing the resistance measurement of the germanium ingot by its cross-sectional area, which can be derived from the relationship between weight and density. Therefore, before measuring the resistivity of the germanium ingot, it is necessary to measure the weight of the germanium ingot in order to calculate its cross-sectional area and thus the resistivity.

[0066] S24, controlling the clamping cylinder to limit the germanium ingot, and controlling the laser sensor to measure to obtain the ingot width, ingot height and temperature data of the germanium ingot;

[0067] The cross-sectional area of ​​the germanium ingot is a key parameter for resistivity calculation. The cross-sectional area can be derived from the relationship between weight and density, or it can be determined by measuring the size of the germanium ingot. Before measuring the resistivity of the germanium ingot, its cross-sectional area can be determined by measuring the size of the germanium ingot to ensure that the resistivity calculation is accurate and reliable.

[0068] There is a certain relationship between the resistivity and temperature of the germanium ingot. Generally, the resistivity increases with the increase of temperature. Therefore, before measuring the resistivity of the germanium ingot, it is necessary to measure the temperature of the germanium ingot for temperature correction. Temperature correction can correct the resistivity calculation result to the resistivity at a certain reference temperature, so that the resistivity results at different temperatures can be compared.

[0069] S25, controlling the feeding robot to shift the germanium ingot to the resistivity test platform, controlling the clamping cylinder to clamp the germanium ingot, adjusting the level of the test surface and the probe based on the angle adjustment fixture, and controlling the probe to cooperate with the resistivity tester to obtain resistance data;

[0070] S26. Resistivity data is calculated based on the ingot width, ingot height and resistance data, and the resistivity of the germanium ingot is obtained after temperature correction based on the temperature data.

[0071] The weight, cross-sectional area and temperature data are measured in order to calculate and correct the resistivity of the germanium ingot and ensure the accuracy and comparability of the resistivity measurement results.

[0072] The formula for calculating resistivity is:

[0073] ρ=R*(L / A)

[0074] Resistivity (ρ) is equal to resistance (R) multiplied by length (L), divided by cross-sectional area (A).

[0075] Among them, resistance (R) is the value measured by a resistance measuring instrument, length (L) is the length of the germanium ingot, and cross-sectional area (A) is the cross-sectional area of ​​the germanium ingot. The unit of resistance (R) is usually ohm (Ω), the unit of length (L) is usually meter (m), and the unit of cross-sectional area (A) is usually square meter (m^2). The unit of the final resistivity (ρ) is usually ohm·meter (Ω·m).

[0076] S27, obtaining the scanning data of the scanning system and the resistivity data of the resistivity testing platform;

[0077] S28, when the code scanning data and resistivity data are normal, control the normal material to be transported to the subsequent process;

[0078] S29. When the code scanning recognition fails and the resistivity of the germanium ingot is NG, it is judged as abnormal material; the feeding robot is controlled to cache the abnormal material to the conveyor.

[0079] Finally, it should be noted that, in this article, relationships such as first and second, etc. are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms include, include or any other variations are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0080] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0081] The embodiments of the present application have been described above, and the above description is exemplary, not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The selection of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other persons of ordinary skill in the art to understand the embodiments disclosed herein.

Claims

1. A fully automatic detection device for resistivity of zone melting germanium ingot, characterized in that: include: A controller, a feeding mechanism and a weighing module, a contour measurement module, a temperature monitoring module and a resistivity testing platform connected based on the feeding mechanism. The feeding mechanism includes a feeding module, a conveyor and a feeding robot. The feeding module is connected to the weighing module based on the conveyor. The weighing module is connected to the contour measurement module based on the feeding robot. The contour measurement module includes a clamping cylinder, an angle adjustment fixture and a laser sensor. The contour measurement module is connected to the resistivity testing platform based on the feeding robot. The resistivity testing platform includes a clamping cylinder, an angle adjustment fixture, a probe assembly and a resistivity tester.

2. The fully automatic resistivity detection device for zone melting germanium ingot according to claim 1 is characterized in that: The fully automatic resistivity detection device for zone melting germanium ingots also includes a laser marking module and a code scanning system. The laser marking module includes a lifting mechanism, a flipping mechanism, a marking machine and a dust removal and smoke exhaust device. The laser marking module and the code scanning system are arranged between the feeding mechanism and the weighing module.

3. The fully automatic resistivity detection device for zone melting germanium ingot according to claim 1 is characterized in that: The feeding module includes a lifting mechanism, a material box and a robot. The material box is provided with multiple placement layers and the placement layers are provided with multiple placement positions. The germanium ingots are arranged in the placement positions and are placed on the conveyor based on the robot.

4. The fully automatic resistivity detection device for zone melting germanium ingot according to claim 1 is characterized in that: The weighing module is provided with an electric lifting platform and an electronic scale, and the germanium ingot is separated from the conveyor based on the electric lifting platform to realize automatic weighing.

5. The fully automatic resistivity detection device for zone melting germanium ingot according to claim 1 is characterized in that: The contour measurement module also includes conductive silicone, a dustproof servo module, a drag chain and a slide rail. The conductive silicone is used to assist in positioning the germanium ingot, the dustproof servo module is used to prevent equipment from dust, and the drag chain and the slide rail are used to support and move the contour measurement module.

6. The fully automatic resistivity detection device for zone melting germanium ingot according to claim 1 is characterized in that: The fully automatic resistivity detection device for zone melting germanium ingots also includes a closed machine cover and a constant temperature and humidity precision air conditioning system for controlling environmental indicators.

7. A method for fully automatic detection of resistivity of zone melting germanium ingots, applicable to the fully automatic detection device for resistivity of zone melting germanium ingots as claimed in any one of claims 1 to 6, characterized in that: The following steps are involved: After obtaining the quality information of the germanium ingot, controlling the feeding robot to clamp the germanium ingot and move it to the contour measurement module; Controlling the clamping cylinder to limit the germanium ingot, and controlling the laser sensor to measure to obtain the ingot width, ingot height and temperature data of the germanium ingot; Control the feeding robot to shift the germanium ingot to the resistivity test platform, control the clamping cylinder to clamp the germanium ingot, adjust the level of the test surface and the probe based on the angle adjustment fixture, and control the probe to cooperate with the resistivity tester to obtain resistance data; The resistivity data is calculated based on the ingot width, ingot height data and the resistance data, and the resistivity of the germanium ingot is obtained after temperature correction based on the temperature data.

8. The fully automatic detection method for resistivity of zone melting germanium ingot according to claim 7, characterized in that: The following steps are also included: After obtaining the detection signal, the robot is controlled to take the germanium ingot from the feeding module and shift it to the conveyor, and the conveyor is controlled to convey the germanium ingot to the laser marking module for laser marking to obtain a marked germanium ingot; After the marked germanium ingot is transported to the code scanning system for code scanning by the lifting mechanism, the conveyor is controlled to transport the marked germanium ingot to the weighing module for weighing.

9. The fully automatic detection method for resistivity of zone melting germanium ingot according to claim 7, characterized in that: The following steps are also included: Obtain the scanning data of the scanning system and the resistivity data of the resistivity testing platform; When the scanned data and resistivity data are normal, control the normal material to be transported to the subsequent process; When the code scanning recognition fails and the resistivity of the germanium ingot is NG, it is judged as an abnormal material; The material conveying robot is controlled to buffer the abnormal material to the conveyor.

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